DE102012022634B3 - Component e.g. electrical component, for e.g. coupling of electromagnetic radiation into multi-mode-fiber in photonic/optical building technology, has fiber front surface connected with substrate material, and marks provided at substrate - Google Patents

Abstract

The component has an optical fiber (1) including a front surface guided upto a stopper. The stopper is formed from a material whose optical refraction index deviates from optical refraction indexes of the fiber and a glass substrate (2) for a maximum around plus or minus 0.05. The front surface is material engagingly connected with a substrate material at the stopper. The substrate material includes an optical refraction index, which deviates from the optical refraction index of the fiber for a maximum around plus or minus 0.05. Positioning marks are provided at the substrate. The substrate is a glass wafer. The substrate material is a borosilicate glass. An independent claim is also included for a method for manufacturing a component.

Description

The invention relates to a component for coupling and / or decoupling electromagnetic radiation into and / or from an optical fiber, and to methods for its production. It can be used in photonic / optical assembly and connection technology. There is the possibility of coupling discrete electro-optical transducers (eg elements emitting electromagnetic radiation, such as lasers, LEDs or elements receiving electromagnetic radiation, such as photodiodes or other electromagnetic radiation, into electrical energy-converting elements.) A fiber-coupled electro-optical component may be used significantly increased reliability, be provided in economically scalable manufacturing technology in miniaturized form, which achieves increased efficiency.

So far, integrated opto-electronic transducer elements had to be optically contacted in a very complex manner and intensity losses of the electromagnetic radiation used could not be avoided because of a possible inaccurate adjustment. Usually, electromagnetic radiation is conducted as a free jet in an ambient atmosphere over part of the radiation path. In this case, intensity losses occur as a result of reflections and alignment errors, or a very complex adjustment had to be carried out, in which the coupled-in optical power must be measured until a maximum has been reached (active assembly).

In such fiber-coupled opto-electronic components determine the packaging costs, ie the cost of the optical assembly and connection technology with a share between 60% to 80% in relation to the total cost.

In such components, in which a free jet is realized, a hermetically sealed housing is required, the inner cavity evacuated as permanently as possible or filled with a protective gas, which further increases the cost and production costs.

Another known possibility is to overmold positioned optoelectronic elements and optical fibers with an at least partially optically transparent material and to provide them with beam shaping elements. These can be optically coupled with connectors. This type of production is suitable only for tolerant electromagnetic radiation receiving elements because accurate positioning is very difficult to comply with during manufacture. For electromagnetic radiation emitting elements, as already mentioned above, additional active assembly steps are necessary.

Such conventional components require an increased volume of construction. The required multiple adjustment of individual elements, with high precision, the manufacturing cost is increased.

Frequently additional optical beam shaping elements for the electromagnetic radiation are required.

That's how it is DE 10 2011 113 172 A1 an optoelectronic device is known, which is to be a transceiver and thereby the device comprises an optical transmitter and receiver, coupling means with optical lenses.

An optical path changing element using optical fibers is off US 2009/0252455 A1 known.

In US 2003/0123819 A1 a multichannel optical communication module is described, in which two-level insulating housing with one optical connector, a silicon base with optical fibers, a multiplexer, laser diodes and photodiodes are present.

The US 2006/0239605 A1 relates to an optical coupling on a chip; on a substrate where an optical waveguide and a reflector are present.

It is therefore an object of the invention to provide such components that are inexpensive to produce with increased precision and achieve increased efficiency in the transmission, coupling or decoupling electromagnetic radiation in or out of an optical fiber and require a small volume of construction.

According to the invention, this object is achieved with a component having the features of claim 1. It can be produced by a method according to claim 14. Advantageous embodiments and further developments of the invention can be realized with features described in the subordinate claims.

In a device according to the invention for coupling and / or decoupling electromagnetic radiation into and / or from an optical fiber, the electromagnetic radiation from the optical fiber is directed onto at least one electromagnetic radiation into electrical current-converting element in an alternative. The radiation can also be coupled by an electromagnetic radiation emitting element in an optical fiber. In this case, with two optical fibers, both an input and a decoupling of the radiation possible, if in each case an electromagnetic radiation in electrical current converting element and a electromagnetic radiation emitting element are present on the device.

The one optical fiber or two optical fibers is / are fixed in three dimensions (in three spatial directions) with a mechanical stop formed in a substrate that is optically transparent for the respective electromagnetic radiation.

In this case, an optical fiber is in each case three-dimensionally positioned in a rectilinear groove-shaped recess or a bore in an adjusted form formed in a substrate that is optically transparent for the respective electromagnetic radiation and is thus fixed.

The space between the end face of the optical fiber exits from the electromagnetic radiation and an electromagnetic radiation into electrical current converting element or the space between an electromagnetic radiation emitting element and the end face of the optical fiber in which the emitted electromagnetic radiation is coupled, is formed cavity-free. This means that there is no free beam guidance and the electromagnetic radiation is guided exclusively by materials that are used for the substrate, the optical fiber and possibly a material forming a stop. The absence of cavities is advantageous if the component is to be enclosed later with a covering which shields it from the environment / protective envelope.

Exits the electromagnetic radiation between the end face of the optical fiber and a surface at which the electromagnetic radiation emerging from the optical fiber is reflected towards an electromagnetic radiation into electrical current converting element or between an electromagnetic radiation emitting element and the end face of the optical fiber in the emitted electromagnetic radiation can be coupled, a stop forming material may be present. In both cases, the gap between the optical fiber and the substrate is formed with a stop made of a material or produced as a material connection, with a deviation of the optical refractive indices of the materials used, which is a maximum of ± 0.05 allowed each other.

The cohesive connection can be made with a polymer cured material, a umgescholzenen glass solder or by a direct melting of the connection partners are done.

As a result, it can be achieved that a very precise adjustment of optical fibers with respect to an electromagnetic radiation into electrical current-converting element or an electromagnetic radiation-emitting element is possible, without calling for a high positioning overhead. In addition, it can advantageously be achieved that the electromagnetic radiation can be switched on and off almost completely without any optical refraction and reflections.

In this case, the substrate should be formed of a glass whose optical refractive index corresponds to the optical refractive index of the optical fiber (maximum deviation ± 0.02) and whose thermal expansion coefficient should be adapted to that of the components.

The substrate may be a glass wafer, which may already be partially processed. Thus, electrical conductor track structures, electrical contacts and also opto-electronic elements can already be present on a glass wafer before production of groove-shaped depressions or bores and of stops and fixation of optical fibers takes place and if necessary a reflective coating is applied. On a glass wafer, many components of the invention can be formed, which can be separated after completion, as it is known per se from the semiconductor element production. As a result, the production costs can be significantly reduced.

In a device according to the invention, the surface at which the electromagnetic radiation emerging from the optical fiber is reflected towards an electromagnetic radiation into electrical current converting element should be oriented at an inclined angle to the optical axis of the optical fiber or be formed as a concave or convex curved surface , It can thereby be ensured that a sufficient distance can be maintained between the active surface of an electromagnetic radiation element in electrical current, so that at least almost the entire active surface of the one or more electromagnetic radiation elements (s) is irradiated. If such a surface is inclined at an angle, an inclination angle of 45 ° is preferred. With a curved surface, a radius of curvature can be chosen that takes this into account.

Such a surface may be as an outer surface of the polymeric cured material or as a correspondingly formed on / in the substrate surface which has been formed by a corresponding geometrically shaped recess in the substrate.

It is possible to provide a plurality of such reflective surfaces on a substrate, so that the electromagnetic radiation is reflected several times and thereby the distance traveled by the electromagnetic radiation path is extended, whereby due to the divergence, an increase of the beam cross section occurs, which can be exploited. By favorable arrangement can be achieved that the reflective surfaces can be metallized over the entire surface, thereby reducing the manufacturing cost. In the event that an optical fiber is arranged on one side of the substrate / component, which is opposite to the side on which an electrical interconnect structure and possibly an optoelectronic element is arranged, the use of masks, in the region in which an electrical interconnect structure or an opto-electronic element is / are arranged, required.

It is also advantageous to provide at least the reflective surface, preferably the entire surface but at least in the region around groove-shaped recesses, with a coating which reflects the respective electromagnetic radiation. As a result, radiation intensity losses can be avoided. Such a coating should be particularly advantageously formed on all surfaces from which there is the possibility of unwanted radiation emission. Reflective coatings can be made of suitable metal and by known thin film coating techniques, such as. B. CVD or PVD method can be formed.

One or more electromagnetic radiation into electrical current converting element (s) having an electrical trace structure may be disposed on the surface of the substrate opposite to the surface on which the groove-shaped depression is formed. The irradiation of its active surface can then take place after at least one reflection of the electromagnetic radiation emerging from an optical fiber.

An electromagnetic radiation to electrical current converting element may be a photovoltaic element, preferably a GaAs photoelement. With such an element, the optical radiation can be converted into electrical energy. This can be used for signal and / or energy transmission. Data transmission can be achieved by means of modulated electromagnetic radiation. For pure energy transfer no modulation is required. The transmitted energy on the optical path can be used for the operation of other electrical, opto-electronic elements, electronic elements, sensors and actuators or stored in an energy storage. This is particularly advantageous in applications in which a purely electrical energy transmission causes disadvantages, as is the case, for example, in applications in the high voltage range or in wind turbines.

An element emitting electromagnetic radiation may advantageously be a laser diode, preferably a semiconductor laser (VCSEL).

A groove-shaped recess, in which an optical fiber is inserted and / or a recess on which a reflective surface is formed, may be formed as a V-groove.

A polymeric cured material with which a stop for an optical fiber can be formed may be an epoxy or hybrid polymer that can be processed by a sol-gel process. It is advantageous to use SiO ₂ filled resin or polymer, as this can be achieved by further improving the adaptation to the respective optical refractive index.

In contrast to the prior art, the component can be surrounded on a further substrate with a component which completely surrounds the component and hermetically seals against the environment. This eliminates the need for a hermetically sealed housing.

In the production of components according to the invention, it is possible to proceed in such a way that a depression or bore suitable for three-dimensional fiber fixing in three spatial directions is formed by powder jet cutting, etching, hot stamping, laser structuring, ultrasonic drilling and / or preferably by sawing. Both wet and dry etching processes are suitable as etching processes.

It should be used a substrate on which positioning marks are present. These should have a relation to the position of an electrical conductor structure and / or an electromagnetic radiation in electric current converting element or an electromagnetic radiation emitting element. With the help of these positioning marks a very accurate processing can be achieved with appropriate alignment of optical fibers. There is the possibility of using individual points or regions of an electrical strip conductor structure, which has already been formed on a substrate before further processing, as a positioning marking.

When forming a depression or bore should at least in the region of the front end of the optical fiber from the electromagnetic Radiation off or is coupled into the optical fiber, if this is introduced into the recess, be rectilinear.

Subsequently, a portion of this depression can be filled with a not yet cured polymeric material. After curing of this material, a stop surface for the end face of the optical fiber, from the electromagnetic radiation or electromagnetic radiation is to be coupled, preferably formed with a photolithographic process. At the stop surface, the optical fiber is fully flat after their installation, so that no free-jet occurs. The inserted optical fiber should then be additionally fixed, which is possible for example with an adhesive.

Then, a surface inclined at an angle with respect to the optical axis or concavely or convexly curved is formed by material removal of the substrate or the polymeric then cured material. This is the case, in particular, when the electromagnetic radiation coupled out of the optical fiber is to be directed to at least one element that converts electromagnetic radiation into electrical current.

Subsequently, the optical fiber is inserted into the groove-shaped recess or inserted into a bore and automatically adjusted and positioned without additional effort. At least prior to insertion or insertion, at least one electrical conductor track structure and / or an opto-electronic element and / or position markings may be attached or already present on the substrate.

After insertion into the stop guide, the optical fiber is fixed, which can be advantageously achieved by gluing, welding or soldering.

In this case, an electromagnetic radiation element converting into electrical energy and / or an element emitting electromagnetic radiation (as examples of optoelectronic elements) may have already been connected to the substrate before these method steps are carried out. On a substrate, a plurality of groove-shaped recesses for optical fibers can be formed. As a result, for example, there is the possibility that electromagnetic radiation in electrical energy-converting element and an electromagnetic radiation emitting element are present on a component. As a result, a data or signal transmission to and from the correspondingly formed component take place. In addition, there is the possibility of energy transmission to the device by optical means.

As already mentioned, surface regions of the component, which applies in particular to surfaces on which the electromagnetic radiation is to be reflected, can be provided with a reflective coating. For this purpose, suitable metals, such as. As gold, silver or aluminum. Precious metals are ideal for a long service life.

As already stated, groove-shaped recesses can be used with different production methods, with which material removal is possible. The respective selection can take place taking into account the desired precision and the manufacturing costs.

But it is particularly advantageous to form the groove-shaped recess (s) by sawing. For this purpose, conventional wafer saw blades can be used, the geometry of the cutting surfaces is adapted to the desired geometric shape of the respective recess. The material removal of the substrate material can be achieved in several stages, by repeated sawing with the same or modified feed in the individual stages.

Sawing can also be used in this form for the formation of surfaces on which electromagnetic radiation is to be reflected. Also in this case, a wafer saw blade with a corresponding cutting contour surface can be used to form the desired angle of inclination of the respective reflecting surface or the desired concave or convex curvature. No need for polishing after sawing.

With this manufacturing method, the desired precision and increased productivity can be achieved compared to the other mentioned and also suitable production methods.

In a device according to the invention a plurality of electromagnetic radiation in electrical energy converting elements can be arranged directly adjacent to each other and irradiated together with the electromagnetic radiation which has been decoupled from an optical fiber. In this case, for example, such an electromagnetic radiation into electrical energy-converting element for the data transmission and a further electromagnetic radiation into electrical energy-converting element for the pure energy transfer can be used.

It is also possible to produce on a glass wafer differently configured components, in which different opto-electronic elements to be subsequently separated from the respective wafer components are arranged. Thus, different electromagnetic radiation emitting elements or different electromagnetic radiation in electrical energy converting elements or these types of elements may be arranged together on a component.

An inventive component may have a planar structure, which is easy to install and space-saving (miniaturization). The adjustment of the elements to be interconnected (optical fiber, substrate and opto-electronic elements) can be done passively. It is a high reliability and durability reachable.

The substrate material can be used simultaneously for the optical beam guidance of the electromagnetic radiation and as a substrate for the optoelectronic elements as well as the electrically conductive connections and the contacting. For a beam deflection are no additional elements to be mounted, such. B. reflectors required. There is a good scalability in the production possible. Optical connectors that would adversely affect reliability are dispensable. There is no disadvantageous free guidance of the electromagnetic radiation.

With the invention, components that can perform optical and electrical functions simultaneously are provided as a single device. In this case, a plurality of optoelectronic elements (eg, electromagnetic radiation in electrical energy-converting elements, electromagnetic radiation emitting elements) may be present on a component optionally with a plurality of optical fibers on one component. However, components according to the invention can also be arranged in a row.

It is particularly advantageous that a free-jet guidance through cavities or cavities can be avoided and / or a subsequent manipulation of the optical fiber oriented in relation to an optoelectronic element can be avoided. In addition, a "self-adjustment" of optical fibers with respect to an optoelectronic element can be achieved. Optoelectronic elements must be positioned in relation to an electrical interconnect structure, whereby known plant technology and methods can be used for this purpose. For example, a wafer which has already been pre-processed on its surface can be used as the substrate, which additionally has to be processed by forming groove-shaped depressions or holes for optical fibers, their positioning and fixing. In addition, it may also be necessary to carry out a processing for the formation of reflective surfaces and possibly their coating. Deviations in the alignment can be kept at a maximum of 0.5 microns.

In this case, a passive assembly is possible in which can be dispensed with elaborate adjustment. Optical fibers can thus be positioned in relation to a stop, an optoelectronic element with the electrical interconnect structure connected thereto. Losses, ie unusable proportions of electromagnetic radiation can be minimized.

As already mentioned, electrical interconnects, electrical contacts and optoelectronic elements can be arranged on one or two opposite sides of a component, so that in the case of a cuboid or cube-shaped component four more surfaces are available at which further components can be arranged in a series arrangement.

The contacting of components according to the invention can be advantageously achieved by gluing, friction welding or thermocompression, a bonding is not required, but could possibly also be used. It can solder balls, loops (leadframes) or an interconnection system for integrated circuits (LGA) can be used.

The invention will be further explained by way of examples. The features used and described in the various examples can be combined independently of each other and are not limited to the respective example.

Showing:

1 an example of a device according to the invention with an electromagnetic radiation into electrical energy converting element in two views;

2 an example of a device according to the invention with an electromagnetic radiation in electric energy converting element, in which the radiation after simple reflection on this element impinges, in two views;

3 an example of a device according to the invention with an electromagnetic radiation in electric energy converting element, wherein the radiation after three reflection on this element impinges;

4 an example of a device according to the invention with an electromagnetic radiation in electrical energy converting element, wherein the radiation after double reflection on this element impinges;

5 an example of a device according to the invention with an electromagnetic radiation in electric energy converting element, in which radiation is reflected by means of a convex curved surface on this element;

6 a further example of a device according to the invention with an electromagnetic radiation in electric energy converting element, wherein the radiation is reflected by means of a convex curved surface on this element;

7 an example of a device according to the invention with an electromagnetic radiation in electric energy converting element, in which radiation is reflected by means of a concave curved surface and double reflection on this element;

8th an example of a device according to the invention with an electromagnetic radiation into electrical energy converting element, in which this element is arranged on the same surface of the substrate as the optical fiber;

9 an example of a device according to the invention with an electromagnetic radiation in electrical energy converting element of several Subtraten;

10 an example of a device according to the invention, in which electromagnetic radiation from an electromagnetic radiation emitting element can be coupled into an optical fiber after reflection on a concavely curved surface;

11 an example of a device according to the invention, in which the electromagnetic radiation from an electromagnetic radiation emitting element can be coupled directly into an optical fiber;

12 a further example of a device according to the invention, in which the electromagnetic radiation from an electromagnetic radiation emitting element can be coupled directly into an optical fiber can be coupled and

13 a further example of a device according to the invention, in which electromagnetic radiation from an electromagnetic radiation emitting element can be coupled into an optical fiber after reflection on an inclined surface and an optical waveguide 13 in a bore formed in the substrate is introduced. or this waveguide is generated by femtosecond lasers. The component is enclosed by an enclosure 10 hermetically protected.

For all examples to be described below, the substrate material used was a borosilicate glass (81% SiO ₂ , 13% B ₂ O ₃ , 4% Na ₂ O, 2% Al ₂ O ₃ ), which had an optical refractive index of 1.47 at a Wavelength of 830 nm. It became an optical fiber 1 used as multi-mode fiber GI 62.5 / 125 μm or multimode fiber SI 50/125 μm with an optical refractive index of 1.49 at the same wavelength. For a polymer curable material 6 is used Vitralit UC1609, which has an optical refractive index of 1.49 at the wavelength of 830 nm.

For fixing the optical fiber 1 after their adjustment, simply by insertion into a groove-shaped recess or insertion into a bore on the polymer with a curable material 6 formed stop can be made, the optical fiber 1 be fixed by an adhesive in the groove-shaped recess or bore.

The 1 shows an example of that in a glass substrate 2 a bore is formed which is aligned with the optical axis of the optical fiber 1 aligned emitting electromagnetic radiation. The divergent from an end face of the optical fiber 1 Exiting radiation is on the optically active surface of the electromagnetic radiation into electrical energy converting element 5 directed. The distance between the end face of the optical fiber 1 to the optically active surface of the element 5 takes into account the divergence of the radiation, so that at least complete irradiation of the optically active surface of the element 5 is reachable.

In the plan view of this example shown below, the arrangement of the elements in relation to one another becomes clear. The element 5 can via the electrical track structure 8th and electrical contacts 9 be electrically contacted to the outside. The optical fiber 1 is positioned so that the optical axis of the electrical radiation emerging from the optical fiber in the centroid of the optically active surface of the element 5 lies.

At the in 2 Example shown in two views was in the substrate 2 formed with a wafer saw a groove-shaped depression on a surface having a depth of 200 microns and up to a further groove-shaped recess formed perpendicular thereto 7 is guided. This depression has a wedge-shaped cross section, so that a surface 3 resulting at an angle of 45 ° with respect to the optical axis of the optical fiber 1 is inclined.

Before inserting, adjusting and positioning the optical fiber 1 the groove-shaped recess is in a region which is adjacent to the further groove-shaped recess 7 connects, a polymeric hardenable material 6 filled and photolithographic processing was thus a stop for the end face of the optical fiber 1 from which the electromagnetic radiation exits created. This face is after insertion with the polymeric curable material 6 after curing in direct contact, leaving the optical fiber 1 emerging radiation directly into this material 6 enters and is guided until the radiation reaches the surface 3 impinges and from there by 90 ° towards the at the bottom of the substrate 2 arranged electromagnetic radiation into electric energy converting element 5 is reflected. The distances between the end face of the optical fiber 1 and the active surface of the element 5 Taking into account the divergence of the radiation are chosen so that the total active usable area of the element 5 is irradiated.

In this example, the reflective surface is 3 formed with the substrate material. But it can also be done in the preparation so that the further groove-shaped depression 7 only after the photolithographic processing of the polymer curable material 6 is formed, and this area 3 on this then hardened material 6 is available.

At least the reflective surface 3 is provided on the surface with a reflective precious metal coating. It is favorable, however, if the entire surface is coated in this way. It can control the surface areas at the bottom of the substrate 2 at which the element 5 and electrical conductors 8th as well as electrical contacts 9 are arranged or formed, so do not remain coated. In the bottom view, the orientation and arrangement of the optical fiber 1 in relation to the element 5 and the groove-shaped recess 7 at the the reflecting surface 3 is designed to be recognized.

Both 1 and 2 are in the view from above or below the electrical trace structure 8th and a square area recognizable, at each of which four corners angles are present. These angles can fulfill the function of positioning marks, since they are at known positions in relation to subsequently to a mounting and to be fastened electromagnetic radiation into electrical energy converting element 5 or an electromagnetic radiation emitting element 4 are positioned. You can then for the formation of a groove-shaped recess, a bore for receiving an optical fiber 1 and the stop 6 be used as a positioning aid.

At the in 3 In the example shown, essentially the same procedure is followed during production, as in the example according to FIG 1 , This applies to the materials and elements used as well as the type of production, so that it is sometimes possible to do without repetitions, which also applies mutatis mutandis to other examples to be described below.

Also in this example, the groove-shaped recess into which the optical fiber 1 is introduced later, prepared analogously and analogously with the polymeric curable material 6 partially filled and photolithographically structured.

With the further deepening 7 becomes a first reflective surface 3 for the out of the optical fiber 1 Emerging radiation created at which the radiation is reflected by 90 °. From this reflective surface 3 the radiation is transferred to a second reflective surface 3.1 reflected at another groove-shaped depression 7.1 at the bottom of the substrate 2 is formed, and from there also by 90 ° to a third reflective surface 3.2 at the third groove-shaped depression 7.2 is formed, reflected. From this reflective surface 3.2 In turn, the radiation will be 90 ° to the active surface of the element 5 reflected. Due to the multiple reflection of the radiation, the path covered is extended, leaving a larger area of an element 5 can be irradiated, although the overall size of the device has not increased. All three groove-shaped depressions 7 . 7.1 and 7.2 are perpendicular to the optical axis of the optical fiber 1 and to the groove-shaped recess in which it is inserted aligned. In this example, because of the reflection by 90 ° and the inclination angle of 45 ° of the reflective surfaces 3 . 3.1 and 3.2 a circular beam cross section of the radiation until it strikes the element 5 maintained.

At the in 4 The example shown is that from the optical fiber 1 emerging radiation on a reflective surface 3 at the other groove-shaped depression 7 is formed, also reflected. However, its inclination angle is greater than the preselected 45 ° and may be 60 ° with respect to the optical axis of the optical fiber 1 be. This results in a reflection of the radiation on the surface 3 with a larger angle than 90 °. The radiation hits from the surface 3 on the bottom of the substrate 2 , which is also provided with a reflective coating at least in this area, and from there to the active surface of the element 5 reflected in this example at the top of the substrate 2 , on which also the groove-shaped recess for receiving the optical fiber 1 is formed, is arranged. The beam cross section of the radiation incident there has the form of an ellipse. In this example too, the path to be traversed by the radiation after exiting the optical fiber can 1 until the impact on the element 5 in the Comparison for example after 1 be extended.

At the in 5 In the example shown, the procedure is essentially the same and a component is produced, as in the example according to FIG 1 has been described. Only the groove-shaped recess 7 perpendicular to the optical axis of the optical fiber 1 is aligned, has a different cross-section, so that is a reflective surface 3 results, which is convexly curved. This will make the out of the optical fiber 1 emerging beam more expanded than that at a planar only inclined at an angle reflective surface 3 according to the example 1 , the case is. Also, this allows the cross-sectional area with which the radiation on the active surface of the element 5 impinges, be enlarged.

At the in 6 In the example shown, the groove-shaped recess is oriented in an inclined angle to the top and bottom of the substrate angle, so that the optical fiber 1 and whose optical axis are also inclined. Otherwise, the structure corresponds to that of the in 4 shown example.

At the in 7 The example shown, the groove-shaped recess and the optical fiber 1 again parallel to the surfaces of the substrate 2 aligned. The groove-shaped recess 7 however, has a reflective surface 3 for the out of the optical fiber 1 emerging radiation, which is concavely curved. This allows the radiation at this concave curved surface 3 towards the bottom of the substrate 2 be reflected, which is coated at least in this area reflective, so that the radiation from this surface in the direction of the active surface of the element 5 reflected in this example at the top of the substrate 2 is arranged.

At the in 8th Example shown are two substrates 2 and 2a connected with each other. It is in the substrate 2a formed a groove-shaped recess in which the optical fiber 1 is received, the open side of this groove-shaped recess faces in the direction of the second substrate 2 , whereby the groove-shaped recess with the optical fiber fixed and adjusted therein 1 can be housed. In the area of the stop 6 is an inclined reflective surface 3 formed, at which the from the optical fiber 1 emerging radiation towards the bottom of the substrate 2 and from there towards the opto-electronic element 5 can be reflected.

This in 9 Example shown is of three interconnected substrates 2 . 2.1 and 2.2 , like the example below 8th are formed from the same glass formed. At the middle substrate 2.1 is the stop 6 for the front end of the optical fiber 1 educated. The reflecting here also obliquely inclined surface 3 is at the three substrates 2 . 2.1 and 2.2 educated. The substrates 2 . 2.1 and 2.2 can through the polymer curable material 6 get connected.

The in the 10 to 13 Examples shown relate to components in which electromagnetic radiation from an element emitting electromagnetic radiation 4 , in this case a VCSEL in an optical fiber 1 , should be coupled.

At the in 10 The example shown is the optical fiber 1 again arranged within a groove-shaped depression, which is in the area near the element 4 with the polymer curable material 6 is filled. The of the element 4 emitted radiation hits a concave curved surface 3 on, from which they are in the face of the optical fiber 1 can be coupled due to reflection. The radius of curvature can be chosen such that the cross-sectional area of the reflected radiation at least approximately the usable cross-sectional area of the optical fiber 1 corresponds and no or minimum radiation losses can be achieved. The groove-shaped depression should at least in the region of the concave curved surface 3 with the material 6 filled out. It can, as already described above, by forming a perpendicular to the optical axis of the optical fiber 1 aligned further groove-shaped recess, which has been formed with a corresponding geoemetrically shaped Wafersägeblatt be prepared. The concave curved surface may be provided with a reflective coating.

In the example below 11 is based on a reflection of the element 4 emitted electromagnetic radiation with which a deflection of the radiation or a beam shaping can be achieved dispensed and the radiation directly from the element 4 through the material 6 in the optical fiber 1 , which has been adjusted and fixed again in a groove-shaped depression, coupled. For an electrically conductive connection to the element 4 from the bottom of the substrate 2 is through the substrate 2 from the top to the bottom of a via 11 (VIA) led. It can be the element 4 with an additional adhesive or the material 6 be fixed.

Analogously, this is also in 12 formed example. It is only on the via 11 has been dispensed with.

At the in 13 example shown is in a substrate 2 a waveguide 13 passing through a hole, to receive an optical fiber 1 is manufactured in the adjusted position after insertion or by a femtosecond laser. This is at an angle of 45 ° with respect to a reflective surface 3 aligned. On this surface 3 is from a VCSL, as an emitting element 4 , emitted electromagnetic radiation toward an end face of the optical fiber 1 reflected, so that the radiation at least almost completely into the optical fiber 1 can be coupled. The component is enclosed by an enclosure 10 hermetically protected.

At the bottom of the substrate 2 are electrical contact elements 12 appropriate.

All components described by way of example can be fastened to or on any other components, such as rotor blades, for example, this can be done alone or additionally with a potting compound which forms a permanent hermetic seal against the environment. It should be an adapted thermal expansion behavior, a suitable plasticity and / or elasticity, a resistance to corrosive attacks, electrically insulating and moistureproof, these properties should be permanently maintained.

LIST OF REFERENCE NUMBERS

1

optical fiber

2

Substrate (optically transparent)

2a

Substrate (optically not transparent)

3

reflective surface

4

electromagnetic radiation emitting element

5

electromagnetic radiation into electrical energy converting element

6

a stop forming material

7

groove-shaped recess

8th

electrical trace

9

electrical contact (eg balls)

10

Housing (eg Glob top)

11

electrical via

12

electrical contacts

13

Waveguide (written eg by femtosecond lasers)

Claims (21)

Component for coupling and / or decoupling electromagnetic radiation into and / or from an optical fiber, wherein the electromagnetic radiation from the optical fiber is directed to at least one electromagnetic radiation into electrical current converting element or from an electromagnetic radiation emitting element can be coupled into an optical fiber, characterized in that an optical fiber ( 1 ) in a substrate optically transparent to the respective electromagnetic radiation ( 2 ) formed rectilinear groove-shaped depression or a bore in adjusted form three-dimensionally positioned and fixed so and the space between the end face of the optical fiber ( 1 ) emanates from the electromagnetic radiation and a the electromagnetic radiation into electrical current converting element ( 5 ) or between an electromagnetic radiation emitting element ( 4 ) and the end face of the optical fiber ( 1 ) in which the emitted electromagnetic radiation is coupled, is formed cavity-free; wherein the end face of the optical fiber ( 1 ) to one on the substrate ( 2 ) formed stop and the stopper is formed of a material whose optical refractive index by a maximum of ± 0.05 of the optical refractive indices of the optical fiber ( 1 ) and the substrate ( 2 ) or the end face of the optical fiber ( 1 ) is materially connected to the substrate material at the stop, wherein the substrate material has an optical refractive index, the maximum of ± 0.05 of the optical refractive index of the optical fiber ( 1 ) and on the substrate ( 2 ) Positioning markings are present. Component according to one of the preceding claims, characterized in that on the substrate ( 2 ) At least one of the optical fiber ( 1 ) surface emitting or emitting electromagnetic radiation emitted by an element emitting electromagnetic radiation ( 3 ) for the reflection of the electromagnetic radiation in the direction of an electromagnetic radiation into electrical energy converting element ( 5 ) or an end face of an optical fiber ( 1 ) is aligned or formed. Component according to Claim 1 or 2, characterized in that the substrate ( 2 ) is formed of a glass whose optical refractive index of the optical refractive index of the optical fiber ( 1 ) corresponds. Component according to Claim 4, characterized in that the at least one surface ( 3 ) at the of the optical fiber ( 1 ) emanating electromagnetic radiation in the direction of the electromagnetic radiation into electric current converting element ( 5 ) is reflected at an inclined angle to the optical axis of the optical fiber ( 1 ) or is designed as a concave or convex curved surface and this surface ( 3 ) an outer surface of the abutment-forming material ( 6 ) or a corresponding on / in the substrate ( 2 ) trained surface ( 3 ) by a corresponding geometrically shaped recess ( 7 ) in the substrate ( 2 ) is formed. Component according to one of the preceding claims, characterized in that at least the reflective surface ( 3 ) is provided with a coating reflecting the respective electromagnetic radiation. Component according to one of the preceding claims, characterized in that the positioning marks on the substrate ( 2 ) in relation to an electrical conductor track structure ( 8th ) and / or an element which converts the electromagnetic radiation into electrical current ( 5 ) or electromagnetic radiation emitting element ( 4 ) and / or with the electrical interconnect structure ( 8th ) Positioning markings are formed. Component according to one of the preceding claims, characterized in that the electromagnetic radiation in electrical current converting element ( 5 ) with an electrical conductor track structure ( 8th ) attached to the surface of the substrate ( 2 is disposed opposite to the surface on which the groove-shaped recess is formed, is connected and the electromagnetic radiation into electrical energy converting element ( 5 ) is positioned so that from the optical fiber ( 1 ) emanating electromagnetic radiation to at least 80% on the optically active surface of the electromagnetic radiation into electrical energy converting element ( 5 ). Component according to one of the preceding claims, characterized in that an electromagnetic radiation into electrical current converting element ( 5 ) a photovoltaic element, preferably a GaAs photoelement and an electromagnetic radiation emitting element ( 4 ) is a laser diode or a semiconductor laser (VCSEL). Component according to one of the preceding claims, characterized in that one or more reflective surfaces ( 3 ) is / are arranged so that the divergent from the optical fiber ( 1 ) emanating radiation at least almost completely the optically active surface of the one or more electromagnetic radiation in electrical current converting elements (s) ( 5 ) irradiated. Component according to one of the preceding claims, characterized in that a groove-shaped recess in which an optical fiber ( 1 ) is positioned and / or a depression on the one reflective surface ( 3 ), is designed as a V-groove / are. Component according to one of the preceding claims, characterized in that the material forming a stop ( 6 ) is a polymeric hardenable material or a glass solder. Component according to one of the preceding claims, characterized in that the component is hermetically sealed from the environment. Component according to one of the preceding claims, characterized in that a groove-shaped recess for receiving an optical fiber ( 1 ) in a first substrate ( 2a ) is formed with a stop and the first substrate ( 2a ) with a second substrate ( 2 ), which is the optical fiber ( 1 ) is covered, connected. Method for producing a component according to one of the preceding claims, characterized in that a surface of the optically transparent substrate ( 2 ) is formed a straight groove-shaped recess or a bore by powder jet cutting, etching, hot stamping, ultrasonic drilling, laser structuring and / or by sawing, and then the optical fiber ( 1 ) inserted into the groove-shaped recess or introduced into a bore there adjusted relative to the inclined or concave or convex curved surface or with respect to the optically active surface of an electromagnetic radiation into electrical energy converting element ( 5 ) is positioned by insertion or insertion alone, when the electromagnetic radiation is converted to an electromagnetic radiation into electrical current converting element ( 5 ), or inserted in the groove-shaped depression or introduced into the bore optical fiber ( 1 ) with respect to an electromagnetic radiation emitting element ( 4 ) is adjusted and positioned, after positioning the optical fiber ( 1 ) fixed by gluing, welding or soldering and a guidance of the electromagnetic radiation is avoided as a free jet. A method according to claim 14, characterized in that prior to insertion or insertion of the optical fiber ( 1 ) in a groove-shaped recess or bore a portion of this groove-shaped depression or bore with the not yet cured, a stop forming material ( 6 ) and after curing a stop surface for the end face of the optical fiber ( 1 ), from which electromagnetic radiation or electromagnetic radiation is to be coupled, is formed, at which the optical fiber ( 1 ) is fully applied after its installation. A method according to claim 14, characterized in that after the insertion or insertion of an optical fiber ( 1 ) in a groove-shaped depression or a bore, the end face of the optical fiber ( 1 ) with the substrate material or a a stop ( 6 ) forming material is materially connected. A method according to any one of claims 14 to 16, characterized in that a surface inclined at an angle with respect to the optical axis or concavely or convexly curved ( 3 ) by material removal of the substrate ( 2 ) or the material forming a stop ( 6 ) is formed when the from the optical fiber ( 1 ) decoupled electromagnetic radiation on at least one electromagnetic radiation into electric current converting element ( 5 ). Method according to one of claims 14 to 17, characterized in that in the case that electromagnetic radiation to an electromagnetic radiation into electrical current converting element ( 5 ), at least in relation to the optical axis of the optical fiber ( 1 ) inclined or concave or convex curved surface ( 3 ) is provided with a coating reflecting the electromagnetic radiation. Method according to one of claims 14 to 18, characterized in that the electrical contacting of an electromagnetic radiation in electrical energy converting element ( 5 ) or an electromagnetic radiation emitting element ( 4 ) by gluing, friction welding or thermocompression. Method according to one of claims 14 to 19, characterized in that the electrical contacting of the device by solder balls, lead frames or by an interconnection system for integrated circuits (LGA) is produced. Method according to one of the preceding claims 14 to 20, characterized in that further electrical, opto-electrical or electromechanical components on the substrate ( 2 ) to be ordered.

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