DE112005001324T5 - AOM modulation techniques to improve laser system performance - Google Patents

Abstract

A method of modulating an AOM in a laser system to inhibit propagation of a laser beam along a beam path impinging on a workpiece, comprising:
Generating a laser beam;
Propagating the laser beam along an optical path into an AOM; and
Modulating a frequency of an RF signal applied to an AOM to prevent propagation of the laser beam along the optical path that hits the workpiece.

Description

technical area

The The present invention relates to laser micromachining, and more particularly Methods and systems, the AOM frequency and / or amplitude modulation use to improve the laser processing performance.

background the invention

1 is a schematic representation of a typical laser 2 of the prior art, a conventional acousto-optic Q-switch 10a used. 2A and 2 B (generic 2 ) are alternative schematic partial views of an acousto-optic modulator (AOM) 10 of the prior art with a transducer 12 pointing to a radio frequency (RF) driver 14 which controls the extent to which the AOM 10 a zero-order beam 16 and / or a first order beam 18 transfers. 3 Fig. 10 is a schematic view showing the conventional technique for controlling the RF driver 14 shows. With reference to 1 - 3 are AOMs 10 conventionally as Q-switches 10a within the resonators of the laser 2 has been used to control pulse time, repetition frequency and cavity gain. A typical Q-switch 10a (or a typical AOM 10 ) includes an RF converter 12 which is amplitude-modulated by the RF driver at a specific frequency set by the manufacturer. The Q-switch 10a is typically through a laser system control 4 controlled, which is a power supply 14a operated to a selectable amount of current to the RF converter 12 to allow laser pulses to either exit the laser or to hold the laser energy in the laser cavity. The power supply 14a also typically supplies power to a laser pump source 6 to transfer radiation to a laser medium 8th in response to commands from the laser system controller 4 provide. These components work together to create a pulsed laser beam 20 to produce, if desired.

AOM 10 have also been used as variable intra-cavity loss modulators to control lasers in pulse time and intensity by variably controlling the amplitude of the RF signal applied to the RF converter (s) 12 on the AOM (s) 10 as described in U.S. Patent 5,197,074 to Emmons, Jr et al. described. AOM 10 have also been used as extra cavity jet attenuators, which increase the intensity of the laser beam 20 control by the laser beam 20 is diffracted with different diffraction efficiency such that a percentage of the optical energy travels down a desired beam path and the majority of the remainder of the optical energy travels to a "beam sink".

Recently, Electro Scientific Industries, Inc. of Portland, Oregon, has AOMs 10 used as gating control devices or "pulse pickups" to allow pulses from a laser 2 propagate through or along various positioning system components to impact a workpiece when actuated and to prevent laser pulses from striking the workpiece when not actuated. This process is described in more detail in U.S. Patent 6,172,325 to Baird et al. described.

Referring again to 2 and 3 converts the converter 12 an RF input signal from the analog RF driver 14 in a sound wave 19 around, in the AOM 10 builds. While the sound wave 19 through the AOM 10 passes through, disturbs the sound wave 19 the optical medium of the AOM 10 , which helps to increase and decrease the diffraction indices in the AOM 10 leads. An incoming laser beam 20 is thus due to the sound wave 19 diffracted and follows the laws of diffraction, resulting in a zero order beam 16 which is on the axis and first order (or higher order) beams 18 with angles given by equations related to the diffraction method.

If no RF power 22 at the AOM 10 is applied, the incoming laser beam goes 20 through the AOM substantially along its original beam path. If the RF power 22 at the AOM 10 is applied, a portion of the energy of the incoming laser beam from the beam path of the beam zeroth order 16 to a beam path of a first-order beam 18 bent. The diffraction efficiency is called the ratio of the laser energy in the first order beam 18 to the laser energy of the incoming laser beam 20 Are defined.

With reference to 4 can be either the first-order beam 18 or the zero-order beam 16 be used as a working beam to access the workpiece 30 based on different application considerations. If the first order beam 18 As the working beam is used, the power of the working laser pulse can dynamically decrease from 100% of its maximum value down to the maximum Substantially zero control while the RF power 22 changed from its maximum power to essentially zero. Due to the practical limited diffraction efficiency of an AOM at an allowed maximum RF power loading of about 75% to 90%, the maximum energy value of the working laser pulse is about 75% to 90% of the laser pulse energy value of the laser.

However, if the zero order beam 16 As the working beam is used, the power of the working laser pulse can be dynamically reduced by about 100% (minus the losses due to wandering through the AOM 10 , possibly as much as a few percent due to thermal and dispersion considerations) of the maximum value of the laser pulse energy from the laser down to about 15% to 20% of the maximum value as the RF power 22 from essentially zero to its maximum power. For memory link processing, for example, when the working laser pulse is not on-call, no leakage of the system laser pulse energy is desired (ie, the working laser pulse energy should be zero) such that, as in FIG 4 shown, the first order beam 18 as the working beam is used and the zero-order beam 16 to a beam sink, such as an absorber 32 , is controlled.

An extinction ratio 34 of the AOM defines the difference in the transmitted power of a laser pulse 36 ( 36a or 36b ) between an "unblocked" (or "transmitting") state 38 and a "blocked" or "non-transmitting" state 40 , 5 is a simplified generic representation showing the differences in the transmission of a blocked and unblocked laser beam 20 as a function of the decibel (dB) level at the AOM 10 with a specific frequency. With reference to 3 and 5 get conventional AOMs 10 used in pulse pick-up laser systems by a constant frequency generator 24 (typically a PLL or a crystal) a specific single radio frequency that is set by the manufacturer and can not be changed. This frequency determines the exit angle and controls the amount of diffraction by the RF amplitude within the limits of the extinction ratio 34 ,

The amplitudes of the analog RF drivers 14 from conventional AOMs 10 transmitted signals can be controlled either by an "ON" or "OFF" signal of a transistor-transistor logic (TTL) from a digital on / off control 26 is transmitted and / or that an analog signal of 0-1 volts in non-integer increments of an analog amplitude control panel 28 in the RF driver 14 is sent. The TTL "OFF" signal controls the analog RF driver 14 to lower the output to the minimum level that is the lowest power output that the RF driver 14 will allow. Setting the analog signal in the RF driver 14 to its minimum level will achieve the same result. However, both options will still require the transmission of a small amount of RF power 22 to the converter 12 allow, which is a low energy first order diffracted beam 18 generated to the workpiece 30 if it is not wanted.

As laser powers continue to increase for a number of laser applications (such as laser DRAM machining, laser trimming and micromachining, and laser drilling of small holes), many of these laser applications seek to completely shut off laser power to the work surface , In these laser applications, the workpiece can be expensive in terms of materials and / or previous processing. In principle, if the laser output does not turn off completely, there is the potential for "leaking" or bending energy onto the workpiece at locations where damage, change or effect on material properties or characteristics is unacceptable Irrespective of laser operation, a laser energy leak has the potential to cause significant irreversible damage to a customer's product, such as devices on a wafer, and such damage may not necessarily Energy coverage problems in laser systems can occur in a continuous range of wavelengths, including long wavelength CO ₂ (about 10 μm), infrared and near infrared (such as 1.3 μm to 1.0 μm), visible and UV ( we less than about 400 μm).

With the increasing use of AOMs 10 In laser processing applications, the problem of energy leakage is becoming increasingly evident. Unfortunately, even if the minimum RF level is sent to prior art AOM controllers, some RF power still leaks 22 in the AOM 10 , which causes a quantity of laser beam energy to be diffracted to a potentially unwanted location. Such leakage can also occur when conventional Q-switches 10a be used, which allows for some laser energy from the laser 2 during the laser energy build-up time, when laser output is undesirable.

Summary the invention

Certain Embodiments described herein and techniques can a variety of laser processing advantages over conventional ones Laser systems and conventional Achieve laser processing. These embodiments and techniques include, but are not limited to to one or more of the following: digital control of the frequency and / or amplitude AOM modulation techniques; Intracavity and / or Extracavity AOM modulation techniques including, but not limited on, frequency and / or Amplitude modulation, which is essentially the complete extinction a laser beam facilitates to prevent unwanted laser energy on a workpiece strikes; AOM modulation techniques from pulse to pulse laser energy with automatic control, d. H. Closed loop control, about laser pulse energy stability to facilitate; and frequency and / or amplitude AOM modulation techniques, to facilitate beam positioning control, including, but not limited on using more than one converter on an AOM, using from automatic control for Applications such as alignment error correction, ray path rectification or tertiary Positioning.

One The aim of the invention is therefore to provide an improved Laser system performance through one or more selected AOM applications.

additional Objects and advantages of this invention will become more apparent from the following Description of preferred embodiments be obvious, referring to the attached drawings continues.

Short description the drawings

1 FIG. 13 is a schematic diagram of a conventional laser system using a prior art AOM device as a Q-switch. FIG.

2A and 2 B For example, alternate schematic representations of a prior art AOM device transmitting parts of zero and first order beams are transmitted in response to the amount of RF power it receives.

3 Fig. 12 is a schematic diagram showing a method for controlling a prior art AOM device.

4 Fig. 10 is a schematic diagram of a laser system showing a prior art AOM device as a pulse gating device.

5 Figure 5 is a simplified graph showing differences in the transmission of blocked and unblocked laser beams as a function of the decibel level applied to an AOM at a specific frequency.

6 is a schematic representation of a laser system using a frequency modulated AOM.

7 Figure 4 is a timing diagram showing, by way of example, high frequency range frequency shifting waveforms that are expressed by an AOM converter to achieve complete cancellation of an AOM.

8th FIG. 11 is a control flow chart showing events and consequences associated with using a high frequency range frequency offset to show complete cancellation of an AOM.

9 FIG. 11 is a control flow chart showing white noise events to achieve zero diffraction from an AOM.

10 is a schematic representation of a laser system using a frequency modulated AOM and a secondary beam sink.

11 is a schematic representation of an AOM control system that uses a DC power source switch used.

12 Figure 4 is a schematic diagram of a laser system using a frequency modulated AOM as a Q-switch in the laser.

13 Fig. 12 is a schematic diagram of a laser system using an extra cavity frequency controlled AOM and a frequency modulated AOM as a Q switch.

14 Figure 4 is a schematic representation of a laser system using extra cavity frequency controlled AOMs.

15 is a plot of amplitude versus time showing a typical peak-to-peak power between laser pulses.

16 Figure 4 is a schematic illustration of a laser system with automatic beam energy control using extra cavity amplitude and / or frequency controlled AOM.

17 is a graph of amplitude versus time showing amplitude stability achievable by AOM automatic energy control.

18 Figure 4 is a schematic representation of a laser system that uses extra cavity AOMs to effect beam positioning.

19 FIG. 12 is a schematic diagram showing an exemplary deflection angle range of an AOM. FIG.

20 Figure 4 is a schematic diagram showing an AOM scanning system that uses AOMs in series to effect beam alignment in two axes.

20A provides a curve of scan angle diffraction degree versus angle change versus a particular Bragg angle for exemplary UV and IR wavelengths.

20B Figure 13 is a schematic diagram showing an AOM scanning system that uses AOMs in series to increase the beam positioning range in a given axis.

20C provides a plot of scan angle diffraction efficiency versus angle change derived from serial, same axis modulating AOMs 60 results in exemplary UV and IR wavelengths.

21 Figure 4 is a schematic representation of a laser system using extra cavity AOMs and automatic correction control to affect beam positioning.

22 Figure 10 is a schematic representation of an AOM that uses at least two transducers to deflect a beam that is angled to an AOM entrance surface.

22A Figure 3 is a schematic representation of an AOM that uses at least two transducers to deflect a beam that is perpendicular to the AOM entrance surface.

23A and 23B Figure 12 are schematic diagrams showing the effects of at least two transducers propagating different frequencies on an AOM along the same axis.

23C Fig. 12 is a schematic diagram showing the effects of two transducers arranged at different angles to each other to increase the beam positioning area.

23D Figure 4 is a schematic representation of an alternative embodiment showing the effects of using two transducers arranged at different angles to each other to increase the beam positioning range.

23E Fig. 12 is a schematic diagram showing the advantages of using a plurality of transducers arranged at different angles to each other to increase the beam positioning range.

23F is a schematic representation showing an enlargement of a part of 23E shows.

23G Figure 4 is a schematic representation of an alternative embodiment showing the advantages of having multiple transducers arranged at different angles to each other to increase the beam positioning range.

24 Fig. 10 is a schematic diagram showing an AOM scanning system using an AOM with at least two transducers.

25 Fig. 10 is a schematic diagram showing an AOM scanning system using an AOM with at least two transducers and an automatic control system.

26 is a schematic representation of an AOM using four transducers.

27 Figure 4 is a schematic representation of a laser system using extra cavity AOM to effect laser pulse gating and extra cavity AOM using multiple transducers to effect beam positioning and amplitude modulation with automatic control.

28 Figure 4 is a schematic representation of a laser system using an extra cavity AOM to effect laser pulse gating and an extra cavity AOM using at least two transducers to effect tertiary beam positioning together with a galvanometer.

29 FIG. 10 is an illustration of an exemplary scan field of the galvanometer scan head and an AOM as may be used together for a laser trim application.

30 FIG. 12 is an illustration of an exemplary scan field of the galvanometer scan head and an AOM as may be used together for a circuit (IC) package processing application, such as by drilling.

31 FIG. 12 is an illustration of an exemplary sensing field of the galvanometer sensing head and an AOM as may be used together for a laser interconnection screening application.

detailed Description of preferred embodiments

6 shows an embodiment of a laser system 50 that has a modulation-enhanced AOM 60 used as a pulse-gating device, the AOM 60 a laser entrance surface 52 and a laser exit surface 54 having. With reference to 6 supplies a laser system control device 62 Control signals directly or indirectly to the laser 64 and an RF driver 66 that directly or indirectly affects the performance of the AOM 60 as described in more detail later controls. The laser 64 emits a laser beam along an optical path 72 which is a number of optical components 74 may include, for example, beam-expanding optics or a number of rotating mirrors (not shown) before the laser beam enters the AOM 60 enters, the zero-order beams 16 and first-order beams 18 propagated. The laser beam is preferably a laser beam with Q-switched or pulsed laser beam for most applications, but may be a continuous (CW) beam for some applications.

Typically, either the zero order beam 16 or the first order beam 18 subsequently by one or more turning or deflection mirrors 76 and a plurality of optional beam positioning components (not shown) through a focusing lens 78 steered to one or more target positions on a workpiece 80 impinge. Either the zero order beam 16 or the first order beam 18 (or higher-order beam) can be considered a working beam 90 can be used, along a working beam path 72a propagated to the workpiece 80 due to a tensioning device 88 or another type of positioning system platform is worn. The other first order or zero order beam is a non-working beam 92 moving along a non-working beam 72b to a jet sink 94 , such as a saturable absorber can be passed. Because it is preferred, for many embodiments, the first order beam 18 as the working beam 90 to use, the figures will generally represent this arrangement.

However, those skilled in the art will recognize that reverse logic and repositioning of the Ar beitsstrahlenganges 72a in conjunction with any AOM discussed herein 60 can be implemented without undue experimentation to use embodiments with arrangements where the zero-order beam 16 as the working beam 90 is used. In such embodiments, the AOM 60 be used to prevent propagate more than about 15% of the laser pulse energy along the beam path, which on the workpiece 80 preferably, and less than or equal to about 10% of the laser pulse energy is propagated along the beam path that is incident on the workpiece 80 impinges whenever no working beam is desired. Furthermore, such arrangements allow for AOM 60 in that the AOM propagate more than about 75% of the laser pulse energy along the beam path incident on the workpiece 80 whenever such laser pulse energy is desired, and in some preferred embodiments, it may be greater than about 90% or even as high as about 100% of the laser energy along the optical path 80 be propagated on the workpiece 80 impinges whenever such laser pulse energy is desired.

Regarding the modulation-amplified AOM 60 The direct digital synthesis (or other high-speed signal modulation technique) of the AOM drive signal allows the AOM to be actuated 60 to excite and modulate the radio frequency and amplitude of the RF drive signal at very high speeds (such as up to or more than 10 Mhz serial and 100 Mhz parallel) with excellent precision and stability. Such modulation techniques can be used to completely erase the AOM 60 to obtain, to completely prevent laser energy from the working beam path 72a to the work piece 80 migrates down to strike at an undesirable time or location. These techniques may additionally be used for conventional AOM modulation, such as setting the amplitude of the AOM RF signal to a low level or an "OFF" state.

7 - 9 show timing diagrams illustrating exemplary techniques for modulating the radio frequency of the AOM 60 with a frequency range greater than the frequency range at which the AOM 60 can build a sound wave to interact with light through the AOM 60 passes. 7 Figure 4 is a control diagram showing exemplary high frequency range frequency shifting waveforms generated by an AOM converter 70 are expressed ( 11 ) to completely erase the AOM 60 to reach. 8th FIG. 11 is a control flow chart showing events and consequences associated with the use of frequency domain frequency shifting to completely erase the AOM 60 to reach.

With reference to 6 . 7 and 8th In an exemplary embodiment, the RF signal is sent to the AOM 60 skillful RF energy at a higher speed modulated in the "OFF" state than the frequency range of the AOM 60 , In some embodiments, the frequency range or bandwidth of the AOM 60 be defined by a function of the time it takes for a sound wave to travel across the waist of a laser beam traveling along the optical path 72 emigrated. The frequency range is, therefore, the diameter of the laser beam and the speed of sound in the medium of the AOM 60 affected. By the diameter of the laser beam by the speed of sound in the material of the AOM 60 is divided, you can get the passage time of the sound through the laser beam. Converting the transit time to the frequency (1 / pass time) can be the maximum bandwidth of the AOM 60 with respect to such embodiments.

Modulating the radio frequency of the RF signal at a higher frequency range than that of the AOM 60 can absorb, can prevent a sound wave in the AOM 60 forms and thereby diffracting along the optical path 72 prevent moving laser beam. The optical diffraction of light by the AOM 60 can be prevented, as long as the radio frequency changes at a higher speed than the frequency range of the AOM 60 , In cases where the beam path is an order of magnitude greater than the zeroth order, the light energy will not be transferred to higher orders.

In 7 is in the "ON" state, the RF signal frequency adjusted to give the desired diffraction angle for the diffracted beam path 72a reached, to the workpiece 80 goes, and the RF signal amplitude is set to be the desired energy level at the workpiece 80 achieved to achieve a machining application such as cutting a connection or drilling a small hole. In 7 In the "OFF" state, the RF signal frequency is changed at a high speed while also minimizing the RF signal amplitude, ie turning it off or switching it to a low power level to ensure that no diffracted energy is present on the workpiece 80 is available. 8th is a control flow table that captures the consequences of in 7 shown waves forms explained. Referring again to the in 6 shown configuration where the beam path to the workpiece 80 the diffracted beam 72a is and the beam sink 94 a transmitted zero-order beam 72b absorbs the laser energy is completely transferred during such a frequency modulation with a higher or greater magnitude frequency range and thus completely to the workpiece 80 be extinguished (100%).

6 Also, a technique is to set the RF signal in the "OFF" state to a DC or a very low frequency signal level (or minimum amplitude level) compared to the RF signal at which the desired diffraction occurs, such low frequency signals or DC RF signals will not cause a beam to the optical path 72a to the workpiece 80 is bent. The modulation of the RF signal to a level that is DC in value or small enough to produce no diffraction angle prevents a wave within the AOM 60 formed. The modulation of the RF signal to a minimum diffraction angle uses such a small RF signal that the diffracted beam is actually collinear with that at the beam sink 94 will be transmitted beam. In the case of a zero frequency at the AOM 60 is set, no diffraction grating will be in the AOM 60 be present and 100% of the light become the beam sink 94 be transmitted. In the "ON" state, the RF signal is set so that the desired diffraction angle (F1) for the optical path leading to the workpiece 80 is reached, and the RF signal amplitude is set to be the desired energy level for machining on the workpiece 80 reached.

One source of a frequency signal capable of implementing frequency modulation to attenuate a high frequency RF signal to a low frequency or DC level is a digital frequency synthesizer that drives a digital to analog (D / A) converter. The A / D converter output and the connected signal conditioning circuitry assemble the frequency signal to the RF power driver to excite a controlled impedance (typically 50 ohm) transmission line. An example of a commercially available frequency signal source is a Model AD 9852 ASQ Direct Digital Synthesizer (DDS) manufactured by Analog Devices, Inc., Norwood, MA. The AD 9852 ASQ is connected to high-speed internal D / A converters and has an output update rate of 300 megaprobes every second. 100 MHz updates can be achieved by controlling the AD 9852 ASQ DDS through a parallel digital interface having a frequency resolution of 48 bits, a phase shift resolution of 14 bits, and an amplitude control of 12 bits. The model AD 9852 ASQ output may be applied to any of a number of commercially available RF driver integrated modules, such as those manufactured by Motorola, Inc. and other integrated circuit device manufacturers, to the AOM converter 70 drive.

Greater flexibility in the Frequenzsignal- and output control can be achieved by a digital signal processor (DSP), such as a model TigerSHARC ^®, manufactured by Analog Devices, Inc., with a field-programmable gate array (FPGA), such as a Model Virtex-II, manufactured by Xilinx, Inc. of San Jose, CA, and the integrated DDS is aligned with them.

Fast switching from the "ON" state to the "OFF" state can be accomplished by the RF driver 66 is configured to have a wide frequency operational amplifier with an amplifier k receiving the D / A converter output and driving an inductor L. Selecting the value of L to set the resonance at the operating RF frequency in the "ON" state provides a high voltage at the input of the AOM converter 70 without appreciable power consumption by the operational amplifier. (The resonant circuit includes the resistive losses of the inductor L and the AOM converter 70 and the capacity of the AOM converter 70 ). The resonance causes a transient ringing and thereby slows the switching from the "ON" state to the "OFF" state.

The DDS can be used with the DSP and FPGA to control the transfer function from the D / A converter to the voltage at the input of the AOM converter 70 to eat. The determination of the transfer function can be made by impulse response, swept-sine Bode plotting, or white noise input / output ratio measurement using a D / A converter for the input voltage of the AOM converter 70 and passing it to the DSP / FPGA circuit. Upon completion of the measurement, a digital biquadratic filter, which fits to invert the measured frequency response of the analog circuit, is configured into an FPGA as a system inverting notch filter to yield a shallow transfer function characterizing the analog driver circuit.

According to the theory of linear systems, the combination of the FPGA biquadratic filter, the D / A converter input and the analog driver circuit have a flat transfer function, allowing instantaneous switching between zero DC or the RF "OFF" state and the RF "ON" state. To turn on the RF immediately requires the release of a large amount of energy to start it, and the removal of a large amount of energy to stop it. This can saturate the current / voltage / slew rate capability of the operational amplifier at the desired bandwidth.

To make the drive useful, ramping up or shutting down the RF signal may be desired. These functions could easily be implemented in DSP / FPGA by multiplying the sine wave with k_ramp ^* t for startup and (1-k_ramp ^* t) for shutdown. The k_ramp parameter would be constituted at the linear operational limits of the operational amplifier current, voltage and slew rate outputs, and would be selected on a constitutionally-specific basis rather than being set to constituent variations. While startup / shutdown takes time, it would be expected that this time would be significantly shorter than the time required to naturally decay the transition.

The output of the DDS panel may then be placed in an RF power module, which is then transferred to the 50 ohms transmission line to the AOM converter 70 is coupled.

9 Figure 4 illustrates an alternative but similar technique to modulate the radio frequency at a higher speed than the AOM bandwidth by injecting white noise into the RF signal. By having multi-frequency components in the signal with a large bandwidth spectrum, the AOM will not have a sound wave that can put on a diffraction grating in the AOM medium. Referring again to 6 The white noise in the "OFF" state becomes the AOM 60 sent, which requires that the beam completely to the beam sink 94 is transmitted. In the "ON" state, the radio frequency is set so that the desired diffraction angle for the optical path 72a is reached, to the workpiece 80 goes, and the RF signal amplitude is set to the desired energy level on the workpiece 80 for processing is achieved. The introduction of white noise with a radio frequency higher than the preparation time for the sound wave within the AOM device will also give results as described.

Experts will recognize that the re 7 - 9 can be implemented using frequencies that have low or effectively zero efficiencies with respect to the Bragg equation. To achieve complete extinction, this can be done on the transducer 70 For example, applied RF signals may simply be set to one of the frequencies that provide Bragg efficiency of effectively zero, and the amplitude may optionally be set to zero or a baseline value if desired. Alternatively, frequency hopping and other techniques may use or be limited to frequencies that provide Bragg efficiency of effectively zero.

10 shows a configuration of a laser system 50a that is similar to the laser system 50 is, but two or more radiation sinks 94a and 94b used. While the beam sinks 94a along the optical path 72b of the transmitted beam is the beam sink 94b along an optical path 72c by a radio frequency signal arranged (F ₂₎ that generates a diffraction angle (F ₂₎ which is not to the workpiece 80 leads. In the "ON" state, the RF signal is set to provide the desired refractive angle (F ₁ ) for the optical path to the workpiece 80 leads, and the RF signal amplitude is adjusted to the desired energy level on the workpiece 80 achieved for processing. In the "OFF" state, the RF signal is set to the frequency F ₂ and a minimum amplitude, which will produce a diffraction angle that causes the beam to the second beam sink 94b is bent. The total laser energy in this "OFF" case will be shared between the transmitted beam and the F ₂ -bent beam, which is the optical path 72a to the workpiece 80 is left free of laser energy.

11 shows a simplified schematic diagram of an exemplary embodiment of an AOM control system 100 that is the system controller 62 used a control switch 102 to control power to the RF amplifier 68 or the AOM converter 70 and / or a control switch 104 is emitted to isolate the frequency signal from the RF driver 66 to the RF amplifier 68 or the AOM converter 70 separate. Exemplary embodiments of the control switches 102 and 104 have a fast switching and a fast settling time, preferably greater than the repetition frequency of the laser 64 to allow the bandwidth of laser processing applications. The control switches 102 and 104 may be mechanical or solid state relays or some other type of device that transmits the RF signal or power to the RF amplifier 68 or the AOM converter 70 blocked. In the "ON" state, one allows the DC power and the RF and amplitude signals to the RF amplifier 68 and through the AOM 60 walk. In the "OFF" state, the DC power or the RF and amplitude signals are from the AOM 60 by means of the control switch 102 and 104 separated.

12 shows an exemplary simplified schematic configuration of a laser system 50b using the aforementioned AOM modulation techniques to obtain an AOM 60a as a Q-switch within a laser 64a to use. Although a standard power supply 110 Can be used to pump a source 112 and an RF signal driver 66a to drive, the RF driver signal is generated and sent to the Q-switch AOM 60a in much the same way as the AOM modulation control is described above. In 12 is however AOM 60a shown to be laser light along an optical working beam path 72c transmits whenever AOM 60a is in an "OFF" state and light along a non-working optical beam path 72d to a radiation sink 94c bows whenever AOM 60a is in an "ON" state.

Professionals will recognize that the AOM 60a matched and aligned to operate in the reverse configuration by diffracting the laser light onto the working beam path when in the "ON" state. Regardless of the configuration, the previously discussed AOM modulation techniques can be used to provide a to achieve complete extinction whenever laser energy on the workpiece 80 not desired, with or without the use of an external AOM 60 ,

13 shows an exemplary simplified schematic configuration of a laser system 50c using the aforementioned AOM modulation techniques to the AOM 60 outside the laser 64a and the AOM 60a (not shown) within the laser 64a to use for complete erasure. Professionals will recognize that the AOMs 60 and 60a through the same or different RF drivers 66b can be controlled.

14 shows an exemplary simplified schematic configuration of a laser system 50d using the aforementioned AOM modulation techniques to form two or more AOMs 60 ₁ and 60 ₂ in series outside the laser 64 to use to achieve complete extinction, which prevents even minimal energy from the workpiece 80 reaches and damages it if a "blocked" status is desired 14 can, in an exemplary embodiment, AOM 60 ₁ in the "OFF" state, the laser light along an optical path 72b ₁ to a radiation sink 94 ₁ transferred and in the "ON" state, the laser light along an X-axis (with respect to the optical path 72b ₁ ) to an optical working beam path 72a ₁ bow. The optical working beam path 72a ₁ crosses with the AOM 60 ₂ in the "OFF" state, the laser light along an optical path 72b ₂ to a radiation sink 94 ₂ and in the "ON" state, the laser light along a Y-axis (with respect to the optical path 72b ₂ ) to the optical working beam path 72a ₂ can break to ultimately the workpiece 80 to reach. Experts will recognize that even though AOMs 60 ₁ and 60 ₂ are shown and described as changing the optical path along perpendicular axes, AOMs 60 ₁ and 60 ₂ adapted and arranged along the same axis or along transverse axes which are not perpendicular to each other. Professionals will also recognize that AOMs 60 ₁ and 60 ₂ both may be adapted and arranged to have the reverse "ON" / "OFF" state configurations (so that the working beam path is zero order) or may be adapted and arranged so that different "ON" / "OFF" state configurations exhibit. Additionally, the AOMs 60 ₁ and 60 ₂ both by the same or different RF drivers 66b (not shown) are controlled.

With reference to the 13 and 14 can be a single AOM 60 be defined to have an extinction ratio of N, while if two AOMs 60 ₁ and 60 ₂ are present in series, extinction ratios of N ₁ and N ₂ are present which allow for an increased overall extinction ratio due to their additive attenuation values. Experts will recognize that N more AOMs 60 can be used to increase the overall extinction ratio even more, as for very delicate workpieces 80 or particularly sensitive processing applications. The aforementioned embodiments and permutations or combinations thereof may be used to completely eliminate or deflect laser pulse energy from the workpiece 80 when such pulse energy is undesirable, thereby eliminating the possibility of damaging sensitive material.

Those skilled in the art will appreciate that these techniques can be applied to any type of laser, including, but not limited to, solid phase lasers such as Nd: YAG or Nd: YLF lasers, and CO ₂ lasers having wavelengths ranging from deep UV to far IR, including, but not limited to, wavelengths of about 266 nm, 355 nm, 532 nm, 1064 nm, 1320 nm and 10 μm. These techniques can be used on a laser processing system, including compound processing systems, laser trimming and micromachining systems, and small hole drilling systems.

One or more AOMs 60 , with or without the frequency modulation techniques described above, can also be used for a variety of other new applications. For example 15 a plot of amplitude versus time showing a typical peak trajectory between laser pulses hitting a laser output detector due to various laser instabilities or thermal drift. This pulse-to-pulse energy swing can be as much as 22% (even though the extended average swing may be less than 5%) for certain types of laser systems, especially high repetition rate UV systems. Such variations in laser energy can potentially cause problems to the workpiece 80 cause. For a given laser operation, the overall "processing window", which may be defined by variation tolerance in individual or sets of parameters (including laser output energy) that will not adversely affect the product's result, may be comparatively narrow. keep the editing window large or control the components that affect the editing window, and in particular the laser energy.

16 shows an exemplary laser system 50e , which is a beam splitting optical element 120 used to be part of the laser output, along the beam path 72a to a laser output detector 122 is propagated, which can be used to determine the incidence amplitude and the energy of the laser impulse leading to the workpiece 80 is going to determine.

Even though 16 the optical path 72 pointing at the beam entry surface 52 of the AOM 60 with an entrance angle 114 with respect to the jet entry surface 52 or a transducer modulation range 116 of the converter 70 which hits a Bragg angle or near it, professionals will recognize that the optical path 72 may be oriented so that it is on the beam entry surface 52 of the AOM 60 in a generally perpendicular non-Bragg entrance angle 114 incident. Professionals will also recognize that an angle cut on the beam entry surface 52 of the AOM 60 can be used (especially for AOMs 60 with material of high refractive index), so the entrance angle 114 perpendicular to the beam entry surface 52 can be aligned and still substantially meets the Bragg condition for a given frequency.

Those skilled in the art will further appreciate that a Bragg-AOM alignment can be implemented with any embodiment described above or below with respect to one of the figures. In general, a satisfactory Bragg efficiency (or diffraction efficiency by the AOM 60 ) reaches when the entrance angle 114 within ± 0.5 degrees of the Bragg angle with respect to the beam entrance surface 52 and / or the converter modulation area 116 located by the optical path 72 passes. In some embodiments, where the laser beam has a major IR wavelength component, the entrance angle is 114 preferably within ± 0.4 degrees of the Bragg angle, more preferably within about ± 0.1 degrees of the Bragg angle and, most preferably, the Bragg angles. In some embodiments, where the laser beam has a major UV wavelength component, the entrance angle is 114 preferably within about ± 0.2 degrees of the Bragg angle, more preferably within about ± 0.05 degrees of the Bragg angle and, most preferably, the Bragg angles.

Referring again to 16 may be the beam splitting optical element 120 even an additional AOM 60 be. In some embodiments, the amplitude controlling AOM 60 as the beam splitting optical element 120 where a higher order beam or a first order opposite beam is applied to the laser output detector 122 is directed. Professionals will further recognize that additional laser output detectors 122 (and beam splitting optical element 120 as required) along a beam path 72 upstream of the AOM 60 and / or in the zero-order beam path or the non-working beam path 72b may be arranged to provide additional information for amplitude monitoring and control. In some embodiments, the beam splitting optical element 120 and the laser output detector 122 be arranged at other downstream positions along the beam path, so that the amplitude corrections can correct an amplitude deviation caused by other components in the beam path 72a be generated. Laser output detectors 122 are known to those skilled in the art and are used in many laser applications. The laser output detector 122 however, it can be adjusted to give a signal 124 directly or indirectly to the system control unit 62 sends the corrective signals 126 to the RF driver 66 or existing amplitude or frequency control signals sent to the RF driver 66 be delivered, set len.

One or more AOMs 60 Therefore, with or without the frequency control techniques in an automatic system, they can be used to increase pulse amplitude stability at high refresh rates. Such amplitude or frequency adjustments may be used to estimate the laser pulse energy for laser drift and / or thermal instabilities in the laser output and / or inconsistent RF-induced heating of the AOM 60 to control. That at the AOM 60 An applied RF signal may be modulated to affect the amplitude or energy of a given laser output signal in response to the information regarding the amplitude or energy of one or more preceding laser output pulses. The amplitude or energy of any given consecutive laser output pulse in a continuous train (such as tens, hundreds or thousands) of multiple consecutive pulses can be controlled to be less than the typical 7% (or higher) pulse-to-pulse Energy variability of conventional applicable laser micromachining systems vary. In some preferred embodiments, the pulse-to-pulse energy fluctuation may be less than about 3%, or even less than about 0.5% to 1%. Such pulse-to-pulse energy stability is particularly useful in embodiments using harmonic solid phase lasers, particularly those used to generate UV wavelengths.

With the added benefit of frequency control, pulse amplitude stability can be achieved over a wide range of time scales, which limits the effects of laser variations in energy due to various events, such as thermal fluctuations in the laser 64 , the AOM 60 itself, or other linear or potentially non-linear events. A variety of transducers can also be used to modulate the same beam axis to increase the diffraction efficiency, as described later.

17 FIG. 12 is a graph illustrating amplitude versus time and showing exemplary amplitude stability achieved by automatic power control using the AOM 60 is achievable, as in the in 16 shown embodiment of the laser system 50e , The feedback is used to measure the amplitude of RF power to the AOM 60 which changes the transmitted energy along the higher order optical path 72a propagated to the workpiece 80 running.

In another example of AOM applications is 18 a schematic representation of a laser system 50f the two extra cavities AOMs 60 ₁ and 60 ₂ (generic AOMs 60 ) used to position the beam on the surface of the workpiece 80 to influence transversal Cartesian axes. In a preferred embodiment, one of the AOMs would 60 The movement along the X axis would control and the other would move along the Y axis, creating a fuller range of angular adjustment of the laser beam into X and Y on the surface of the workpiece 80 provided. In 18 is the first AOM 60 ₁ shown to modulate in the X axis and the second AOM 60 ₂ is shown to modulate in the Y-axis, but those skilled in the art will appreciate that the order or positioning could be reversed. Professionals will also recognize that the size of each or both AOMs 60 ₁ and 60 ₂ , and particularly 60 ₂ , may be increased to allow for greater acceptance or acceptance angles.

AOM 60 ₁ and 60 ₂ are preferably provided by separate corresponding RF drivers 66 ₁ and ₂ having the ability to variably control the amplitude and / or frequency of RF power applied to the transducers 70 as in any of the previously described embodiments, so that the amplitude and position of the output beam on the workpiece 80 can be controlled precisely. Since the RF driver frequency can be set to very high speeds, the AOMs can 60 can be used to control the beam in real time in a non-contact scanning system with look-up tables of characterized linear effects to calibrate out unwanted position error effects.

19 FIG. 4 is a schematic illustration of the exemplary positioning and deflection angle ranges of an exemplary AOM. FIG 60 which responds to an RF driver excited at 2W up to 50MHz. If the AOM 60 at an exemplary height of about 40 mm from the focusing lens 78 arranged at an exemplary distance of about 40 mm above the workpiece 80 and assuming about 96 mrad or 5.5 degrees total deflection angle for theta, calculations may be made to show that the effective sample sizes on the workpiece 80 at least a 4 mm scanning field in X and / or Y result.

With respect to angular resolution, in one embodiment, the output of a DDS driver for RF power may be set in very small increments of 1 Hz, giving a theoretical resolution represented by the following equation:

For example is when using a wavelength of 355 nm and a speed of sound of 650 m / s, the angle change concerning a frequency change of 1 Hz of the acoustic wave 2.73 E-10 degrees. Such a resolution can however, due to the mechanical limitations of the system, the frequency indeed dissolve, be impractical. Thus, in some embodiments, a Range of values for control by minimum resolution in steps of 4.1 E-6 Degree or the equivalent of 0.72 microradians, which is equivalent to a frequency step size of 15 KHz is. An exemplary optical AOM scanning system with a Angular adjustment of about 50 milliradians would mean 69444 angular resolution steps result.

The frequency range of the AOM 60 is primarily influenced by three points: the maximum speed available from electronic devices to generate a new frequency, such as the RF drivers 66 ; the ability of the AOM converter 70 to create a vibration with the new frequency; and the time it takes to get the new sound wave in the AOM 60 to create. In general, this third point concerning the formation of a new sound wave takes most of the time and thus dominates the sampling frequency range.

wobei v_s die Schallgeschwindigkeit in dem Medium ist.An equation concerning the angle corresponding to a specific frequency can be expressed as follows:

where v _{s is} the speed of sound in the medium.

wobei D die Weite des Laserstrahls durch den AOM 60 ist.The frequency range, B, can be given as:

where D is the width of the laser beam through the AOM 60 is.

For a standard AOM 60 the parameters could be as follows:
Material: quartz glass (n = 1.46, v _s = 6 km / s);
Sound: frequency f = 100 MHz;
Light: wavelength 1047 nm; and
Laser beam diameter: 12 mm.

Using these parameters would provide an exemplary AOM 60 in a scanning system have a frequency range of up to about 500 kHz at an acceptable angle. In contrast, a typical galvanometer frequency range is about 4 kHz and with a fast control mirror it can be above about 12 kHz. The primary limitation of a galvanometer scanner is the inertia generated by the motion of a mass and the resonance of the motion. An AOM 60 shows no such mass-related effects, so that its frequency range can be up to 100 times higher.

20 Figure 3 is a schematic diagram illustrating an embodiment of AOMs 60 ₁ and 60 ₂ from 18 shows in more detail, where the AOMs 60 aligned along different axes to provide a two-axis scanning system. The AOM 60 ₁ is in position with the axis A perpendicular to the Ach se A of the AOM 60 ₂ set. Therefore, a change in the frequency of the excitation signal at the AOM 60 ₁ the output angle of the AOM 60 ₁ change in the X-axis, with the relationship that changing the frequency will vary the exit angle theta X. Changing the frequency of the excitation signal at the AOM 60 ₂ will be the exit angle of the AOM 60 ₂ change in the Y-axis, with the relation that changing the frequency will change the theta Y. AOM 60 ₁ and 60 ₂ can be close to each other and independently modulated with the same or different frequencies and amplitudes. The output beam may change in amplitude and move in X and Y axis directions. The size and shape of the radiation sinks 94 ₁ and 94 ₂ may be adapted to receive the desired scanning field and the propagation of unwanted light to the workpiece 80 to prevent.

wobei die Materialeigenschaften wie folgt beschrieben werden können:

wobei λ die Lichtwellenlänge ist, M die Bewertungszahl des Materials ist, L die Länge des Wandlerwechselwirkungsbereiches ist, H die Höhe des Wandlers 70 ist und P die angelegte RF-Leistung ist. Die Änderung infolge der Frequenzmodulation des Signals kann durch ΔΦ wie folgt ausgedrückt beschrieben werden:

wobei v der akustische Geschwindigkeitsschall in dem Material ist, Δf die Frequenzänderung für die Modulation ist, L die Wechselwirkungslänge ist und Λ₀ die Wellenlänge des Schalls in dem Material ist. Das Substituieren der Gleichungen (5) und (6) in Gleichung (4) wird zu dem Beugungswirkungsgrad für einen speziellen Bragg-Winkel für eine Frequenzänderung ergeben. Der Beugungswirkungsgrad ist für ein Beispiel gezeigt, bei dem eine anfängliche Frequenz von 75 MHz, die einen Bragg-Winkel von 1,2 Grad bei einer UV-Wellenlänge von 355 nm liefert, um ± 14 MHz (etwa eine Abtastwinkeländerung von ± 0,175 Grad für die UV-Wellenlänge) geändert wird. Um deshalb, beispielsweise, oberhalb eines Beugungswirkungsgrades von 80 % zu bleiben, könnte man eine verfügbare Abtastwinkeländerung von ± 0,1 Grad verwenden. 20A provides a curve scan angle diffraction efficiency versus angle change from a particular Bragg angle at exemplary UV and IR wavelengths. An equation for finding the diffraction efficiency of an AOM can be expressed as follows:

wherein the material properties can be described as follows:

where λ is the wavelength of light, M is the rating of the material, L is the length of the transducer interaction region, H is the height of the transducer 70 and P is the applied RF power. The change due to the frequency modulation of the signal can be described by ΔΦ as expressed below:

where v is the acoustic velocity sound in the material, Δf is the frequency change for the modulation, L is the interaction length, and Λ _{0 is} the wavelength of the sound in the material. Substituting equations (5) and (6) into equation (4) will yield the diffraction efficiency for a particular Bragg angle for a frequency change. The diffraction efficiency is shown for an example in which an initial frequency of 75 MHz, which provides a 1.2 degree Bragg angle at 355 nm UV wavelength, is ± 14 MHz (about one scan angle change of ± 0.175 degrees for the UV wavelength) is changed. Therefore, to stay above a diffraction efficiency of 80%, for example, one could use an available scan angle change of ± 0.1 degrees.

Of the Diffraction efficiency at 1064 nm is also shown, showing that when the wavelength decreases, the allowable scan angle decreases. The usable "scan angle" ranges can be determined by be defined as the minimum diffraction efficiency to which the system with regard to the laser power handling window can. If it's a big one Editing windows, then the system has a larger laser power budget, for larger scanning angles to allow.

Referring again to 18 - 20 can if one or more additional AOMs 60 (or other moving devices such as FSMs) before the sample AOMs 60 ₁ and / or AOM 60 ₂ for the respective axes, the incoming Bragg angle condition is moved to provide a secondary Bragg angle or a plurality of Bragg angles which may be selected to be the sampling area of the sampling AOM 60 to increase.

20B is a schematic diagram showing an AOM scanning system, the AOMs 60x ₁ and 60x ₂ used in series to expand the beam positioning area within a given Cartesian or workpiece axis. With reference to 20B may be the upstream AOM 60x ₁ (preferably in its Bragg angle) along the beam path 72 be arranged so that its zero-order output the Bragg angle for the downstream AOM 60x ₂ reached. The first order output of the upstream AOM 60x ₁ can then for a second Bragg angle on the downstream AOM 60x ₂ be set. The magnification of the beam positioning area may be replaced by the use of separate AOMs 60x ₁ and 60x ₂ also with an AOM 60 ₃ can be achieved, which has a plurality of transducers, as later with reference to 23C shown and described.

In one example, the upstream AOM shifts 60x ₁ the first order beam by 1.2 degrees and the downstream AOM 60x ₂ the incoming beam by an additional 0.2 degrees without large efficiency losses. 20C FIG. 11 shows a plot of angle-of-deflection diffraction efficiency derived from serial, same axis modulating AOMs. FIG 60 at exemplary UV and IR wavelengths. Referring to 18 - 20C may be the use of serial AOMs 60 to modulate the same axis, the scan angle of the downstream AOM 60x ₂ extend as determined by the extent of the scan angle of the upstream AOM 60x ₁ or another device. An AOM 60x ₁ Like the upstream Bragg adjustment device, it can provide a larger scan angle than the use of a single AOM 60 alone and can be achieved at a frequency range greater than most laser repetition frequencies, ie greater than 100 kHz. Those skilled in the art will appreciate that even small AOM scan area improvements will be particularly beneficial at UV wavelengths where the Bragg efficiency factors may be somewhat limiting.

A slow device, such as an FSM or galvanometer system, as the upstream Bragg adjustment device, can sense the scanning angle of the downstream AOM 60x ₂ even larger, but the overall speed performance is limited by the frequency range of such an upstream interlocking. Such a slower upstream Bragg adjustment device would nonetheless be useful, particularly in making angular displacements to compensate for slow shifts in laser beam positioning, causing the Bragg efficiency to decrease. For example, if a downstream AOM 60x ₂ is used to correct for instabilities in the laser optics system that cause the laser beam tilt through the focusing lens 78 goes away slightly, causing an accuracy problem in exemplary jointing systems. Such minor corrections can be made with the AOM 60x ₂ be very fast, whereby the pointing drift or pointing drift from thermal and other effects is almost eliminated. However, after a few days, or potentially weeks, the shift from the initial calibration may be significant in terms of angle of incidence on the entrance surface of the AOM 60x ₂ What a loss of efficiency through the AOM 60x ₂ conditionally. One solution to this problem would be to incorporate a slower upstream Bragg adjustment device (where, however, a larger adjustment angle may be warranted or a slower adaptation time may be sufficient) to be able to adjust (or calibrate) the incoming beam. to the exact Bragg condition of the AOM 60x ₂ adjust, which allows maximizing the efficiency. Without such a slower upstream AOM 60x ₁ Bragg adjustment device in front of the AOM 60x ₂ then the calibration could be a fine positioning of the device by hand (or potentially with a mechanical stage under the AOM 60x ₂ required by hand or by electronic means).

Those skilled in the art will appreciate that the upstream Bragg adjustment device can be variably controlled over a wide range or can be used as a switch between two or more specific angles, the sufficiently effective Bragg angles of the downstream AOM 60x ₂ to satisfy. A third serial AOM 60 (or other beam-adjusting device, not shown) may also be used to correct the movement of the pupil as it shifts between two Bragg conditions. Professionals will also recognize that serial AOMs 60 the same axis (or other upstream Bragg adjustment devices) can be used to enhance the scan area along either axis or both axes of an AOM scanning system. Those skilled in the art will further appreciate that, as described later, the amplitude of the transducer (s) may 70 applied RF signal can be adjusted to compensate for the deviation from the Bragg efficiency, resulting from a shift of the exit angle in each of the AOMs 60x ₁ or 60x ₂ results.

21 is a schematic representation of a laser system 50g , the Extra Cavity AOMs 60 ₁ and 60 ₂ , two beam splitting optical elements 120a and 120b , an energy and amplitude detector 122 and a position-receiving detector 130 Used to automatically control pulse energy, amplitude and laser beam position on the surface of the workpiece 80 provide. Beam alignment may be critical to the result of many processing methods, especially if submicron accuracy is desired. Beam alignment may be affected by a variety of factors such as mechanical motion, vibration or thermal variations in one of the optical media and / or beam traveling contributors. Automatic AOM beam positioning control can reduce erroneous beam alignments and product loss due to such factors.

worin θ_B der Einfallwinkel des ankommenden Lichtes ist, λ die Wellenlänge des Lichts ist und A die Wellenlänge des Schalls in dem AOM-Medium ist.By implementing angle corrections using frequency control of the AOM RF power, diffraction efficiencies of the first order beam will be less if the angle is greater or less than the angle accepting the Bragg condition. The angle defined by the Bragg condition is given as:

where θ _{B is} the angle of incidence of the incoming light, λ is the wavelength of the light, and A is the wavelength of the sound in the AOM medium.

wobei L die Länge der Wechselwirkung des Schalls mit dem Licht ist (oder der Durchmesser des Lichtstrahles).If the frequency of the converter 70 is modified, the wavelength of the sound wave will be modified, which causes the Bragg angle corresponding to the Bragg equation to change. In this case, the reflectivity or diffraction efficiency will decrease with the following relationship:

where L is the length of the interaction of the sound with the light (or the diameter of the light beam).

These sin c function can be used in a laser processing operation Restrict angle, Because high efficiencies are typically required for machining are. However, a laser power or energy over budget may be implemented to reduce the efficiency during angular control, and the harmonization of the energy or amplitude of the system to wear.

For example, the use of a TeO ₂ -AOM crystal operating at 60-80 MHz with more than 2 W RF power and an acoustic speed of 650 m / s on a 1064 nm laser with a beam diameter of 2 mm provides a maximum allowable angle of about 50 milliradians before zero efficiency is diffracted at the first order beam.

For example, in a laser beam correcting application to correct transients in the optical system, an angular range of at least ± 0.5 milliradians is desirable. If the efficiency of the AOM 60 if the Bragg condition is 80% then a deviation from the Bragg condition will result in a loss of efficiency at the first order beam of about 0.8% or a new first order diffraction efficiency of 79.2%.

In such a case, the laser power budget to allow for additional laser energy may be implemented to allow for these additional losses due to angular correction as well as for amplitude correction for laser transitions, thermal effects or other disturbances in the optical train. Accordingly, the RF line can be connected to the AOM 60 be set to a low level in the Bragg condition to have a maximum laser energy output of E _max ; one possible number is the equivalent energy of 75% efficiency for this example. Thus, an overall control budget of 5% of the efficiency may be available for use with amplitude adjustments and angle corrections. If the angle is set to + 0.5 milliradians from the Bragg condition, the efficiency will drop to 79.2 percent, but the RF amplitude may be increased by 0.8 percent to compensate for the reduced efficiency due to the angle correction. In this example, 4.4% more overhead space would still be available for other amplitude corrections that may be desirable.

The amplitude of the on the converter 70 applied RF signal can thus be adjusted to compensate for deviations from the Bragg efficiency, which results from a shift of the exit angle, from a beam path 72 at the Bragg angle, which would impinge on a nominal beam position, the beam path 72 controls to occur at a desired beam position offset from the nominal beam position. The Bragg efficiency amplitude compensation information may be mathematical and / or experimental for each AOM 60 be determined with specified properties. The compensation data may be put into a table or provided by an algorithm, such as an algorithm based on a sin c function. The Bragg efficiency amplitude compensation information may be at the RF driver 66 from the laser system controller 62 or implemented by an intermediate controller or separate controller.

The Bragg efficiency compensation can be for either or both AOMs 60 ₁ and 60 ₂ implemen be corrected to an amplitude correction on the corresponding X and Y axes on the surface of the workpiece 80 to effect. Similarly, the Bragg efficiency compensation may be for either or both of the transversely or orthogonally arranged transducers 70x and 70y ( 24 ), as described later.

Referring again to 21 can receive signals from the amplitude detector 122 and the position-receiving detector 130 in every laser system control unit 62 and / or directly or indirectly to the X and Y RF drivers 66 ₁ and ₂ are given. In some alternative embodiments, beam splitting elements 120 and position-sensing detectors 130 after every AOM 60 be used. Beam dividing elements 120 You can even go directly to the exit surfaces of one or both of the AOMs 60 be attached.

The methods of feedback for these feedback control systems vary from capacitance detection of mechanical rotation to position sensing electronics for the detection of laser spots. The electronics of the position-sensing detector (s) 130 The limiting factor for the AOM performance may be the ability to accurately sense the angular position of the AOMs 60 demonstrated. Therefore, alternative automatic system components and techniques known to those skilled in the art can be used.

The frequency range of the position-sensing detector (s) 130 In the automatic control systems, filter techniques may preferably be used to increase positional accuracy by reducing the noise of the electronics. If the desired accuracy is extremely high, very high noise reduction can be used, but the frequency range of the position-sensing detector (s) 130 may be limited as a result of filtering.

The control system coefficients may be updated at a frequency greater than the desired overall system frequency range but not at each cycle of the AOM update. This update parameter can be set depending on the desired accuracy and the desired frequency range of the system. An exemplary system may have the following parameters:
AOM frequency range = 250 kHz;
Desired frequency range = 25 kHz; and
Position-receiving frequency range (after filtering) = 250 Hz.

The AOM control parameters would then be updated every 100 system cycles, allowing the detection of transients up to 250 Hz to be controlled, and also giving a total system power of 25 kHz. In cooperation with the very fast frequency update and setting speeds of the AOMs 60 ₁ and 60 ₂ by any of the techniques previously described, the automatic control system is capable of making small adjustments in real time on-the-fly alignment.

22 is a schematic representation of an AOM 60 ₃ , the at least two transducers 70A and 70B (generic as a converter 70 ) with overlapping converter modulation areas 116 used to allow the selection of the direction with which the sound wave passes through the medium of the AOM 60 emigrated. The converter 70A becomes a frequency shifted reflection of light along the path 72B produce, and the converter 70B Also, there is a frequency-shifted reflection of light along the path 72B cause. If they are used at the same frequency and if they are preferably phase locked, adding these transducer signals can produce small orders of magnitude increase in the efficiency of the scattered light. Estimated efficiency gains can range from about 1% to more than or equal to about 15%, depending on wavelengths and other typical laser parameters.

Only one of the transducers 70A and 70B can be activated at any given time, or both converters 70A and 70B can be activated at the same time. Professionals in the field will recognize that every converter 70 through the same or different RF drivers 66 (not shown) at the same or different frequencies according to one of the AOM modulation techniques or embodiments described above. If the transducers 70A and 70B are excited at different frequencies, there is the possibility that multiple diffractions are caused in the device, allowing the formation of two separate beams separated by the angle defined by the difference in frequency. The transducers 70A and 70B may also be operated simultaneously with slightly different phases to increase the scan angle resolution beyond that for a single transducer 70 alone is available. At least two or more transducers 70A and 70B can also or alternatively on the same surface of AOM 60 ₃ be arranged to achieve similar benefits. These embodiments can be applied to AOMs 60 be laid out, which are aligned on any axis.

If the transducers 70A and 70B have different sizes, they can potentially allow different frequency drivers, which would allow one of the converters 70 produces a higher frequency than the other. Referring again to equation (7), the Bragg angle may be increased by subtracting the acoustic frequency from each of the transducers 70A and 70B is increased. Conventional converters 70 range from 50 MHz to 250 MHz for Bragg angles of 0.7 degrees to 4 degrees. Frequencies above 250 MHz typically require smaller transducers and RF power generators capable of exciting them at higher frequencies. Using the smaller of the two transducers 70A or 70B would, if desired, allow for the formation of a larger Bragg angle for the incoming beam (and therefore allow a larger first order exit angle), potentially increasing the separation from the 0th order (and arranging the beam sinks 94 makes it easier) and thus the propagation of the first order beam to the workpiece 80 makes it easier. The use of the larger of the two converters 70A or 70B would, if desired, allow for greater refractive efficiency whenever the larger Bragg angle is not desired. Similarly, two smaller frequency and phase synchronized converters could be used 70A and 70B used to give the diffraction efficiency over a single smaller transducer 70 where applications or system limitations require the larger Bragg angle. Such embodiments would give the AOM scanning system greater versatility.

22A is a schematic representation of an AOM 60 ₃ , the at least two transducers 70A and 70B used to select the direction of going through the medium of the AOM 60 allow propagating sound wave to deflect a beam which is perpendicular to the AOM entrance surface. As related to 22 As discussed, this embodiment can be used to increase the diffraction efficiency, increase the diffraction angle range by providing a higher combined frequency, or increase applicability by using different sized transducers. Professionals will also notice that when the input beam 72 Closer to each of the transducers is the response time of the AOM 60 ₃ may be slightly increased.

23A and 23B are schematic representations showing the effect of at least two transducers 70A and 70B shows that with different frequencies on the AOM 60 propagate within overlapping transducer modulation ranges. 23A shows by way of example different frequencies, which by the AOM 60 propagate when the transducers 70A and 70B simultaneously "ON", and 23B shows the potential, diffraction within the AOM 60 which is the combination of the two sources.

In certain exemplary cases, such as when both the transducers 70 "ON" are as well as the first converter 70A twice the frequency of the second converter 70B can provide the diffractive combination of the two frequencies in the medium from the AOM 60 beyond the frequency limitations of the independent AOM RF drivers 66 which they produce themselves and beyond the frequency constraints of each of the transducers 70 which they generate themselves (due to the mechanical limitations of the converter and the electrical limitations of the RF power amplifier). Such frequency combinations may result in achieving higher angular beam positioning resolution or higher Bragg angles than are available for embodiments that include single RF drivers 66 use the individual transducers 70 drive. Those skilled in the art will also appreciate that for some embodiments, the transducers 70 may be arranged such that the transducer modulation ranges 116 are parallel instead of overlapping. In such embodiments, the transducers 70 be arranged so that both are on the same surface or on different surfaces.

At least two or more transducers 70A and 70B can also be used to diffract multiple wavelengths from the same beam. Referring again to 22 can the incident laser beam 72 contain multiple wavelengths, such as when harmonics through the laser 64 be generated. For example, if the laser beam 72 has a wavelength of 355 nm generated from 1064 nm using third harmonic generation techniques, the laser beam 72 Energy of 710 nm as well as 355 nm included. In such a case, the AOM 60 ₃ act as a wavelength selector allowing only the specific wavelength that satisfies the Bragg equation (7). Therefore, when the selected frequency of the first converter 70A is set to a frequency that results in Bragg diffraction at the 355 nm wavelength, the 710 nm portion of the beam is not diffracted and becomes along the zero order path 72A will wander. Those skilled in the art will appreciate that the use of a laser output with multiple selected wavelengths is advantageous for some laser applications Thus, a method in which two wavelengths travel to the work surface may be desirable. Accordingly, in addition to adjusting the first converter 70A to satisfy the Bragg equation for the first wavelength, one skilled in the art will understand the second transducer 70B adjust so that it satisfies the Bragg equation for the second wavelength, whereby both wavelengths in the path 72B propagate first order.

23C is a schematic representation showing the effects of at least two transducers 70 which are arranged at different angles to each other to increase the beam positioning area in a single Cartesian axis. With reference to 20 - 20C and 23A - 23C is the second converter 70B with a tilt angle 132 with respect to the first converter 70A arranged so that their corresponding transducer modulation ranges 116b and 116a are not parallel to each other, but through the beam path 72 pass in the same plane so that they modulate the initial or deflection angle in the same Cartesian axis. The transducers 70A and 70B are preferably arranged such that their respective transducer modulation ranges 116a and 116b are not overlapping, but overlap is allowed and may be desirable under some circumstances.

Professionals will recognize that the second converter 70B alternatively on the opposite transducer surface 138 can be arranged when using the appropriate tilt angle 132 is provided. The tilt angle 132 of the second converter 70B however, may be selected such that the diffracted order of the second transducer 70B from the bent order of the first transducer 70A is offset to placing the transducer close to the same side of the AOM 60 ₃ to allow.

In some preferred embodiments, the first transducer modulation range is 116a parallel to the beam entry surface 52 and the second converter modulation area 116b is parallel to the beam exit surface 54 so that the beam entry surface 52 and the jet exit surface 54 are not parallel. In other preferred embodiments, one of the transducer modulation ranges is 116 parallel to the beam entry surface 52 and the jet exit surface 54 so that the beam entry surface 52 and the jet exit surface 54 are parallel. In still other preferred embodiments, one of the transducer modulation ranges is 116 parallel to the beam entry surface 52 and the jet exit surface 54 may have an angle that is a mean of 90 degrees and 90 degrees ± the tilt angle 132 is, or can be another angle between 90 degrees and 90 degrees ± the tilt angle 132 be. Alternatively, the jet entry surface 52 with respect to the first converter modulation range 116a be angular, and the beam exit surface 54 may be parallel to the second transducer modulation range 116b be.

The AOM 60 ₃ can be cut at an angle to the tilt angle 132 for the second converter 70B provide by the transducer surface 136b or adjacent surface 136a be cleared or milled to the desired angle, depending on the AOM material. These techniques are well known in the optical material / device industry together with other techniques to achieve precision surfaces. Although the transducer surface 136b is shown as being outward from the transducer surface 136a Experts will recognize that the transducer surface 136b would work properly if they were at the same tilt angle 132 would extend inside.

In most embodiments, the tilt angle is 132 a small angle, typically no greater than 5 degrees, and more preferably less than about 2.5-3 degrees. In most embodiments, the tilt angle is 132 typically greater than about 0.1 degrees and preferably greater than 0.3 degrees or 0.5 degrees. 23C shows an exemplary tilt angle 132 of about 1 degree.

The AOM 60 ₃ is preferably on the beam path 72 arranged so that the beam path 72 on the AOM 60 ₃ with an entrance angle 114 or 114a incident, with respect to the jet entry surface 52 or the first transducer modulation range 116a equal to or near the Bragg angle. Professionals will recognize that the frequency of the first converter 70A applied RF signal can be adjusted or calibrated to compensate for minor unintentional deviations of the orientation.

Whenever scanning along the beam path 72a ₁ or its connected scan area 134a ₁ (to a minimum desirable Bragg efficiency) is desired, the first converter 70A activated by an RF signal with a frequency that satisfies or nearly satisfies the Bragg condition, so that the beam path 72 to a desired exit angle 118a ₁ within the scanning range 134a ₁ is deflected so that the beam path 72a ₁ on the workpiece 80 at a desired beam position 142 ( 27 ) which is shifted from its nominal or original beam position. The frequency of the RF signal at the first transducer 70A applied, would be adjusted to the desired exit angle 118a ₁ within the scanning range 134a ₁ and the amplitude of the RF signal applied to the first transducer 70A could also be adjusted to a desired amplitude to control the beam power or energy. Furthermore, whenever scanning along the beam path 72a ₁ or its associated scan area 134a ₁ is desired, preferably no RF signal to the second transducer 70B created so that the second transducer modulation range 116b generally the exit angle 118a ₁ of the beam path 72a ₁ unaffected. However, in some embodiments, it may be desirable to have the tilt angle 132 to adjust so that the beam path of first order or higher order, by the second transducer 70B is generated, with the beam path 72a ₁ is aligned, in which case the second transducer 70B at full amplitude and an RF frequency would be excited to satisfy the Bragg condition.

Whenever scanning beyond the scanning area 134a ₁ and within a scanning range 134a ₂ is desired, the ler from the simultaneous cooperative operation of the wall 70A and 70B results are the transducers 70A and 70B activated by corresponding RF signals at appropriate frequencies that meet or almost meet the Bragg condition, so that the beam path 72 with a desired exit angle 118a ₂ within the scanning range 134a ₂ is deflected so that the beam path 72a ₂ with a cooperative deflection angle (or cooperative deflection propagation direction) 128a ₂ to work on the workpiece 80 at a desired beam position 142 which are beyond the scanning range 134a ₁ is. The frequency of the second converter 70B applied RF signal would be applied to the desired exit angle 118a ₂ within the scanning range 134a ₂ to determine. In some preferred embodiments, the second transducer would 70B be excited at full amplitude and the amplitude of the at the first transducer 70A applied RF signal could be adjusted to a desired amplitude to control the beam power or energy.

Although in some preferred embodiments, the transducers 70A and 70B can be identical and by identical variably controllable RF driver 66 may be excited as described above, in some preferred embodiments, the transducers 70A and 70B and their associated RF drivers 66 have different operating characteristics or parameters. In particular, in some preferred embodiments, the first transducer 70A have a smaller size and operate at a higher frequency than the second converter 70B such that the first transducer modulation range 116a could provide a larger Bragg angular range than the second transducer modulation range 116b ,

Although the scanning angle ranges 134a ₁ and 134a ₂ down to 0% Bragg efficiency can become exemplary sample ranges 134 just down to 20% Bragg efficiency or down to 50% Bragg efficiency or down to 80% Bragg efficiency (as roughly used in 23C shown). In an example, like in 23C As shown, the incident Bragg condition is 1.2 degrees for the first transducer 70A and the incident Bragg condition 0.2 degrees for the second transducer 70B as through the corresponding beam paths 72a ₁ and 72a ₂ shown.

23D Figure 4 is a schematic representation of an alternative embodiment showing the effects when two transducers 70A and 70B with a tilt angle 132 are arranged to each other to increase the beam positioning range. With reference to 23D For example, in some preferred embodiments, the transducers may be used 70A and 70B be arranged so that their corresponding tilt angle / their corresponding tilt angle 132 and the transducer modulation areas 116 are aligned to a common beam path zeroth order 72b provide.

The tilt angle 132b and the frequency of the transducer 70B Applied RF signal are adjusted to a beam path 72a ₂ from the converter modulation area 116b with a scanning area 134a ₂ provide the scanning area 134a ₁ the beam path of the first order 72a ₂ passing through the transducer modulation area 116b is provided, adjacent or overlapped with this. In such an example, whenever an exit angle 118a ₁ within the scanning range 134a ₁ is desired, the converter 70A with the desired frequency and amplitude modulated while the converter 70B is effectively switched to "OFF" as previously described with respect to one of the techniques for complete extinction, such as simply changing the frequency to not provide effective Bragg efficiency, whenever an exit angle 118a ₂ within the scanning range 134a ₂ is desired, the converter 70B with the desired frequency and amplitude modulated while the converter 70A is effectively "OFF." In some embodiments, the zero order beam path may be through the AOM 60 ₃ be used as the working beam path to a scanning range similar to that of the scanning range 134a ₁ . about the zero order beam path, and provide the tilt angle 132 and the on the converter 70B applied frequency could be adjusted to a sampling range 134a ₂ provide the scanning area 134a ₁ is adjacent or overlapping it.

The second converter 70B with the tilt angle 132 can also be used to produce a second beam, with those on the transducers 70A and 70B applied frequencies are configured to simultaneously provide two resolvable beam spots. The amplitude of the on the converter 70A applied RF signal (the transducer 70B receives a full amplitude signal) can be used to control the power content of both beams. Alternatively, the on both transducers 70A and 70B applied amplitudes are controlled.

The use of the second converter 70B with a tilt angle 132 can, therefore, be used to increase the overall scanning range while limiting losses due to Bragg efficiency limitations, and to provide other advantages similar to those of the 20A - 20C described. Those skilled in the art will recognize that such a second converter 70B and the tilt angle 132 can be used to control the deflection angle on either or both Cartesian axes.

23E is a schematic diagram showing the advantages when multiple transducers 70 are arranged at different angles on an AOM side (with respect to the plane of the transducer surface 136a of the converter 70A ) to increase the beam positioning area, and 23F shows an enlargement of a part of 23E , With reference to 23C - 23F can the concept of the tilt angle 132 on the use of multiple tilted converters 70A - 70F be extended in series to the sampling range of the AOM 60 ₃ continue to extend along a single Cartesian axis.

As before regarding 23C discussed is the input beam path 72 to the AOM 60 ₃ is set to achieve a desired Bragg angle to a desirable distance between the zero order beam path 72b and the first order beam path 72a ₁ of the first converter 70A to allow. Frequency modulation of the first converter 70A slightly in either direction becomes the allowable scanning angle 134a ₁ for the first order beam diffracted by the sound wave passing through the transducer 70A in the first converter modulation area 116a was generated. 23E Fig. 10 illustrates an example using a beam having a wavelength of 355 nm and a sound velocity of 650 m / s at about ± 0.2 degrees as a desirable maximum scanning angle range 134a ₁ , An exemplary scan angle range 134a ₁ however, of ± 0.1 degrees could alternatively be used and provide a higher diffraction efficiency, corresponding to only a 20% loss of efficiency at the maximum of 0.1 degrees away from the Bragg condition.

To enlarge the area, the second transducer can be used 70B with a tilt angle 132b be inclined (with respect to the plane of the transducer surface of the first transducer 70A ) which is equivalent to: tilt = Incoming Bragg angle - separation angle (9) wherein the incoming Bragg angle is the Bragg angle of the first transducer 70A and the separation angle is the amount of desired overlap between the scan angle 134 of the second converter 70B with that of the first converter 70A Are defined. This can be represented as diffraction efficiency in 23E be seen.

In case of 23E For example, the incoming Bragg angle is set to 1.4 degrees, which is obtained using an AOM material with a sonic velocity of 650 m / s, a 355 nm light wavelength, and an RF frequency of 90 MHz connected to the first transducer 70A is created. If a separation of 0.2 degrees is desired for the overlap of the diffraction beam resulting from the second transducer 70B results, then becomes a tilt angle 132 used by 1.2 degrees. The frequency of the second converter 70B applied RF signal would then be set at about 12.8 MHz to produce the Bragg angle of 0.2 degrees. This frequency can be calibrated by finding the maximum diffraction efficiency to achieve manufacturing tolerances in the precision manufacturing of each of the transducers 70 or any corresponding tilt angle 132 on the AOM 60 ₃ to mitigate. Because the first converter 70A is set to have an output beam with an exit angle 118a ₁ of 1.8 degrees to the second transducer modulation range 116b that hits through the tilt angle 132b of the second converter 70B of 1.2 degrees, the Bragg condition of 0.2 degrees fits the second transducer 70B , In this case, if the range is beyond the scanning angle range 134a ₁ of the first converter 70A is desired, then the first transducer 70A used to diffract with a desired amplitude and RF fre to cause the Bragg equation for the converter 70A enough. The resulting beam path 72a ₁ is then through the second converter 70B diffracted, which operates at full amplitude and a frequency at which the desired exit angle 118a ₂ and the cooperative deflection angle 128a ₂ be achieved for positioning the beam spot on the workpiece 80 ,

This concept can then be used for additional converters 70C - 70F expanding, setting up the tilt angle 132c - 132f and the transducer modulation areas 116c - 116f so that the corresponding scanning angle ranges 134a ₃ - 134a ₆ have the desired diffraction efficiencies. In this example, a diffraction angle of ± 0.1 degrees is desired, so that a tilt angle 132 of 1.0 degree is required to satisfy the equation (9) using an incoming Bragg angle of 1.4 degrees for the first transducer 70A and a separation of 0.4 degrees. In this example, a separation of 0.4 degrees for the transducer 70C used because the scanning angle range 134a ₂ of the second transducer region 70B of ± 0.1 degrees at the separation angle is taken into account. If an angle is desired in the scan that is in the scan angle range 134a ₃ of the converter 70C falls, then the RF power to the first converter 70A applied to the on the workpiece 80 to control the desired amplitude and at a frequency which satisfies the Bragg equation, and the full RF power is applied to the transducer 70F applied at a frequency between 19.1 MHz and 32 MHz to the desired exit angle 118a ₃ and the desired cooperative deflection angle 128a ₃ for positioning the beam on the workpiece 80 to reach. The converter 70C would be most effective at its Bragg angle of 0.4 degrees at a frequency of about 25.6 MHz.

The same logic that is used to tilt the angle 132c of the converter 70C can be applied to tilt angles 132 for the additional transducers 70 to be determined in the series. In this example, the converter 70D on a tilt angle 132d of 0.8 degrees, giving a Bragg condition of 0.6 degrees; the converter 70E gets on a tilt angle 132e of 0.6 degrees, giving a Bragg condition of 0.8 degrees; and the converter 70F is on a tilt angle 132f of 0.4 degrees, giving a 1.0 degree Bragg condition. If one of these enlarged scanning angle ranges 134 is needed, then RF power is applied to the first converter 70A with the desired amplitude and frequency which satisfies the Bragg condition, and the corresponding transducer 70 needed, keeps the full RF power at the frequency for the scan range of the particular converter 70 , As noted earlier, the angle cuts need for the placement of the transducers 70 on the AOM 60 ₃ not to be perfect, so that slight frequency adjustments may be desirable from the frequencies that satisfy the theoretical Bragg conditions.

In addition to determining the scan ranges based on minimum desirable diffraction efficiencies, one skilled in the art may implement a power budget and use amplitude compensation, preferably at the first transducer 70A for Bragg Angular Efficiency Deviation as previously described.

Although the example decreasing corresponding tilt angle 132 and using corresponding frequencies as the corresponding distances of the transducer modulation ranges 116 from the jet entry surface 52 Experts will recognize that the converters 70B - 70F and their corresponding tilt angle 132 , the converter modulation areas 116 and frequencies in a different order with respect to the beam entrance surface 52 can be arranged. For example, the converters could 70F and 70C with their tilt angles 132 and frequencies are positionally exchanged.

As discussed earlier, the tilt angle can be 132 extend inwards or outwards, the transducers can 70 offset and on the generally opposite converter sides of the AOM 60 ₃ be arranged. An advantageous embodiment could alternatively be the converter 70A - 70F Arrange on the generally opposite sides, so that the transducers 70A . 70C and 70E generally on one side of the AOM 60 ₃ located and the transducers 70B . 70D and 70F generally on the other side of the AOM 60 ₃ are located.

As also discussed previously, the transducer modulation range 116a parallel to the beam entry surface 52 and the last serial converter modulation range 116f parallel to the jet exit surface 54 so that the beam entry surface 52 and the jet exit surface 54 are not parallel. In other preferred embodiments, one of the transducer modulation ranges is 116 parallel to the beam entry surface 52 and the jet exit surface 54 so that the beam entry surface 52 and the jet exit surface 54 are parallel. In yet another embodiment, one of the transducer modulation ranges 116 parallel to the beam entry surface 52 and the jet exit surface 54 can be at an angle that is an average of 90 degrees and 90 degrees ± the tilt angle 132f is, can at an angle parallel to the transducer modulation range 116 being the means, or can another angle between 90 degrees and 90 degrees ± the tilt angle 132b be. Alternatively, the jet entry surface 52 with respect to the first converter modulation range 116a be angular and the jet exit surface 54 can be parallel to the last transducer modulation range 116 be.

Professionals will recognize that large numbers of serially inclined transducers 70 can be used, depending on the desirable overall scanning range, the tilt angle 132 , the relative positioning arrangements and order, the size of the converter 70 , the properties of the AOM material, any size limitations of the AOM 60 ₃ in terms of manufacturing or system alignment, or any other variables known to those skilled in the art. In some example embodiments, two to five or two to ten tilted transducers are used 70 used. In other exemplary embodiments, at least three tilted converters are used 70 or more than 15 transducers 70 used. In these exemplary embodiments, the converter may be AOM 60 ₃ even less than a few inches long or less than 10 cm in length, but may be longer, if desired.

Although in some preferred embodiments, the transducers 70A - 70F can be identical and by identical variably controllable RF driver 66 can be excited, as discussed previously, in some preferred embodiments, the transducers 70A - 70F and their associated RF drivers 66 have different operating characteristics or parameters. In particular, in some preferred embodiments, the transducers may 70 with a correspondingly larger tilt angle 132 (with respect to the plane of the transducer surface of the transducer 70A ) have correspondingly larger sizes and operate at correspondingly lower frequencies than correspondingly smaller transducers 70 ,

23G shows an alternative embodiment, the multiple tilted transducer 70A - 70F used what the benefits of using multiple transducers 70 with different angles on an AOM surface showing the sampling range of an AOM 60 ₃ extend in a single Cartesian axis. With reference to 23C - 23G can the tilt angle 132a - 132f and the frequencies of the corresponding transducers 70B - 70F be organized, so that the beams of zero order together with the beam path zeroth order 72b are aligned together so that the scanning areas 134a ₂ - 134a ₆ their beam paths of first order 72a ₁ - 72a ₆ adjacent or slightly overlapping. Professionals will recognize that converter 70B - 70F for reasons of convenience with regard to their arrangement in 23E can be arranged; however, any arrangement would be suitable, as previously discussed.

Whenever an exit angle 118a ₁ within a scanning range 134a ₁ is desired, the converter 70A with the desired frequency and amplitude modulated while the remaining transducers 70B - 70F are effectively switched to "OFF." Whenever an exit angle 118a ₂ within a corresponding scanning range 134a is desired, the converter 70B with the desired frequency and amplitude modulated while the transducers 70A and 70C - 70F are effectively switched to "OFF." Similarly, whenever an exit angle 118a ₃ - 118a ₆ within a corresponding scanning range 134a ₃ - 134a ₆ is desired, the corresponding transducer 70C - 70F modulated with the appropriate frequency and amplitude, while all other converters 70 are effectively switched to "OFF." An advantage of this embodiment is that only one transducer 70 to reach any of the scan areas. Another advantage of this embodiment is that little or no loss occurs when the zero order beam path 72b as the basic beam path for the other transducers 70 is used to distract from it.

Professionals will recognize that AOM 60 ₃ with a variety of serially-tuned converters 70 , for pulse acquisition (with or without the techniques for complete cancellation), and amplitude control in one or both Cartesian axes can be used as before and discussed hereinbelow.

The combination of two AOMs 60 ₁ and 60 ₂ close together, like in 18 . 20 and 21 can give a very good scanning system, as already described. The entrance aperture of the second AOM 60 ₂ but can be the one from the first AOM 60 ₁ limit reachable angle. Another inconvenience that is typical of most scanning systems is that the focusing lens 78 is typically adapted to have a focal length or pupil located between the two galvanometer positioning devices defined by the AOMs 60 ₁ and 60 ₂ can be replaced as described in the earlier embodiments. Additional AOMs 60 (or other beam adjusting device, not shown) may also be used in series to correct the movement of the pupil when the AOM scanning system is located somewhere other than in a state that the rear pupil of the focusing lens 78 enough.

24 is a schematic diagram showing an AOM 60 ₄ shows the transducer 70x and 70y which are arranged on transversal, and preferably orthogonal, surfaces to modulate different transducer modulation axes (transversely and preferably orthogonally) in a single medium to provide scan control of both the X and Y axes or directions on the surface of the workpiece 80 provide. With reference to 24 sets / attach RF drivers 66xy Signals to the converter 70x to control the beam position in the X-axis and to the transducer 70y to control the beam position in the Y axis. Professionals will recognize that every converter 70 through the same or different RF drivers 66xy may be excited at the same or different frequencies according to one of the AOM modulation techniques or embodiments described above. An advantage of using a single AOM 60 ₄ is that the focusing lens 78 in terms of their complexity can be reduced, since the focal length at the output of the individual AOM 60 ₄ can be arranged and the scan angle could then be increased because it has no entrance aperture limit for a second AOM 60 having. Nonetheless, one or more uniaxial or biaxial AOMs may also be used 60 (or other beam adjustment device, not shown) may be used to correct the movement of the pupil when the AOM scanning system is located somewhere other than in a state of the rear pupil of the focusing lens 78 enough.

25 shows an exemplary embodiment of AOM 60 ₄ that in a laser system 50h using an automatic beam detection and positioning system which is a beam splitting element 120 on the output surface of the AOM 60 ₄ and a position-receiving detector 130 used to the angle of the optical path 72 at the exit surface of the AOM 60 ₄ to demonstrate how in a combination of the embodiments related to 21 and 24 discussed.

26 is a schematic representation of an AOM 60 ₅ , the four transducers 70Ax . 70Bx . 70Ay and 70By (general converter 70 ) used. This embodiment combines the advantages of the AOM 60 ₃ from 22 and 23 have been described with NEN associated with AOM 60 ₄ from 24 and 25 have been described to facilitate larger scan angles and greater applicability. Professionals will recognize that every converter 70 through the same or different RF drivers 66 or 66xy can be excited at the same or different frequencies according to one of the AOM modulation techniques or embodiments described above. Professionals will recognize that AOMs 60 ₄ and 60 ₅ can be used to any AOM 60 that was previously discussed, or any pair of AOMs 60 to replace that previously discussed.

Some alternative preferred embodiments of AOMs 60 ₄ and 60 ₅ use a variety of transducers 70 with tilt angles 132 to increase the scanning range, as previously discussed. Experts will recognize that the transducer modulation ranges 116 may be non-intersecting in the transverse Cartesian axes, but intersecting transversal axis transducer modulation ranges 116 are preferred. For convenience of manufacture and control, some preferred embodiments use identical tilt angles 132 for the transducers 70 of intersecting transducer modulation areas 116 but such relationships are not required. In some embodiments, the tilt-angle transducers 70 use where the scanning areas around the zero order beam path 72b are arranged, only a single transducer would have 70 for each Cartesian axis to provide scan control in both fully extended range axes. Tilt-angled transducer 70 may also be used in two axes to provide a matrix of beams, each of the beams having a selectable range of the energy of the beam entering the AOM 60 entry.

27 is a schematic representation of an exemplary laser system 50i That's an extra cavity AOM 60 to effect laser pulse gating; an extra cavity AOM 60 ₄ who has several transducers 70 used, a beam splitting element 120 ₃ and a position detecting detector 130 used to effect automatic control beam positioning; and beam-dividing elements 120 ₁ and 121 ₂ and amplitude detectors 122a and 122b used to effect automatic amplitude control. With reference to 27 may be the amplitude feedback signals 124a and or 124b to the control panel 62 and / or the RF driver (s) 66xy be directed. Similarly, the position feedback signal 126 to the system control 62 and / or the RF driver (s) 66xy be directed. Professionals will recognize that every converter 70 by the same or different RF drivers 66xy can be excited at the same or different frequencies according to one of the AOM modulation techniques or embodiments described above.

This embodiment uses a separate AOM 60 as a laser shutter or gate for pulse gating, to allow pulses to travel only through the scanning system, if so is desired. In certain embodiments, a different angular arrangement of the pulse-receiving AOM 60 used to the need for the beam sink 90 to eliminate. An advantage of using a separate pulsed AOM 60 is that the AOM 60 ₄ can be arranged to provide its full angle displacement capabilities. Such a separate pulsatile AOM 60 may be used in conjunction with any of the previously described embodiments or AOM modulation techniques. However, professionals will acknowledge that the pulse-sensing AOM 60 is not required. The AOM 60 ₄ can be angled with respect to the optical path 72 be offset so that the AOM 60 ₄ both pulse selection and beam positioning can cause. Such a configuration could be the total scan angle to the workpiece 80 restrict. Professionals will recognize that AOMs 60 which are used in a previously described embodiment for beam positioning and / or amplitude modulation can also be used for pulse acquisition by the AOM 60 with respect to the optical path 72 is selectively positioned.

professionals will recognize that current beam positioning or scanning systems in laser processing equipment are generally mechanical, and either a galvanometer-based System or a Quick Control Level (FSM) or other type of system is based on a movable mirror. Both the galvanometer as well as FSM technology have mechanical masses which are the total sampling rate of the Limit systems. In general, the trade-off between scan angles and scanning speed can be seen in both systems: where Galvanometerysteme a larger scanning angle and lower speeds, FSMs have a lower Scanning angle, but a higher one Speed.

28 is a schematic diagram of an exemplary laser system 50j with a beam positioning AOM 60 ₄ or 60 ₅ operating in conjunction with a typical quickstop, such as an FSM or a galvanometer scanhead 140 , which includes a pair of galvanometer mirrors, to the overall throughput of a laser system 50 by having a multi-component or tertiary beam positioning system supported by a conventional slow interlocking (such as a single-axis or sub-axis XY table). The AOM 60 ₄ or 60 ₅ or a pair of AOMs 60 or 60 ₃ may be upstream or downstream of the galvanometer sensing head 140 are located. The movement between the AOM and the Galvanometerabtastystemen can directly or indirectly through the system control 62 coordinated with or without the help of the RF driver (s) 66xy and / or a galvanometer control 144 containing the galvanometer feedback signals 144 from the galvanometer scanning head 140 receives.

Professionals will recognize that a separate AOM 60 is shown for the pulse recording and can be used to simplify the motion control coordination. The AOM 60 however, it can be omitted and the AOM 60 ₄ or 60 ₅ can be used for pulse recording as well as for beam positioning. Those skilled in the art will also appreciate that, although a system with automatic control is shown for simplicity, alternative embodiments of the laser system 50j can be easily implemented to include position and / or amplitude feedback for automatic control. Professionals will also recognize that the AOM 60 ₄ or 60 ₅ can be modulated as discussed with respect to any previous embodiment and that the laser system 50j may be adapted to accommodate the variations of any previously discussed embodiment.

29 . 30 and 31 FIG. 13 are illustrations of exemplary scan fields of the galvanometer scan head. FIG 140 and AOM 60 ₄ or 60 ₅ how they can be used together for various laser processing applications, such as trimming, hole drilling and connection processing, respectively. With reference to 28 - 31 and conventional beam positioning technology, although an XY table can be used to chuck the chuck 88 and the workpiece carried by him 80 to move, the galvanometer scanning head 140 have a fixed position or may be arranged in a split axis arrangement so that it can be controlled along one or more geometric axes. The relative movement between the galvanometer scanning head 140 and the workpiece 80 can be used to make a main galvanometer sampling field 150 (and its square galvanometer subfield 152 ) within a main AOM scan field 160 (and its square AOM subfield 162 ) with respect to the targets on the surface of the workpiece 80 to position. Since the galvanometer frequency range is much less than the AOM frequency range, the galvanometer (and the workpiece 80 ) are moved continuously during the AOM 60 ₄ or 60 ₅ Targets within its main AOM scan field 160 processed. This is in addition to the coordinated movement of the linear motor and the galvanometer.

Such an adaptation would be very advantageous for laser applications with processing stations with egg very high density. The smaller and much faster AOM scan field 160 would be able to resist more than one 164 , several connections 166 and process multiple IC packages very quickly in a single galvanometer motion, instead of many conventional galvanometer motions.

In addition to being used as a beam positioning system instead of an FSM and / or a galvanometer scanning head, or as an additional beam positioning system component, an AOM scanning system could be used for simulated spot magnification or Abbe error correction and along the beam path before or after the "fast" positioning components Furthermore, professionals will recognize that one or more AOMs 60 with or without modulation enhancement, in place of (or in addition to) one of the "fast" positioning system components such as described in U.S. Patent Nos. 4,532,402, 5,751,585, 5,847,960, 6,430,465 and 6,706,999 and US Published Patent Application 2002/0117481, which is incorporated herein by reference are recorded are described.

It is for the professionals in the field will be obvious that many changes regarding the details of the above-described embodiments can be made without departing from the underlying principles of this invention. The scope of the present invention should therefore be limited only by the following claims be determined.

Summary

The digital control of frequency and / or amplitude modulation techniques of an intracavity and / or extracavity AOM ( 60 ) substantially facilitates the complete extinction of a laser beam ( 90 ) to prevent unwanted laser energy on a workpiece ( 80 ) impinges; facilitates laser pulse amplitude stability through automatic control of pulse-to-pulse laser energy; facilitates beam positioning control including, but not limited to, automatic control for applications such as alignment error correction, beam drift correction, or tertiary positioning; and facilitates the use of more than one converter on an AOM ( 60 ) to run each of the applications listed above.

Claims (318)

Method of modulating an AOM in a laser system, to propagate a laser beam along a beam path to inhibit striking a workpiece comprising: Produce a laser beam; Propagating the laser beam along a optical path into an AOM; and Modulating a frequency an RF signal that is applied to an AOM to propagate of the laser beam along the beam path to prevent the on the workpiece meets. The method of claim 1, further comprising: Select one Frequency with which the laser beam propagates along the beam path, around on the workpiece hold true. The method of claim 2, further comprising: Modulate the amplitude of the signal to influence the intensity of the laser beam, the on the workpiece meets. The method of claim 1, wherein the AOM is a vibration preparation time includes to establish a sound wave in the AOM to the laser beam propagate along the beam path to impinge on the workpiece, and wherein the frequency of the applied RF signal is continuous changes within a time interval, the shorter is as the oscillation preparation time whenever the laser beam propagation should be prevented along the beam path. Method according to claim 4, wherein the frequency of the applied RF signal alternately between two selected frequencies changed within the time interval becomes. Method according to claim 1, wherein the frequency of the applied RF signal alternately between two selected frequencies changed becomes. Method according to claim 1, wherein the frequency of the applied RF signal is changed between many frequencies. Method according to claim 4, wherein the frequency of the applied RF signal between many frequencies within the time interval changed becomes. The method of claim 1, wherein the frequency modulates is going to be white Generate noise. The method of claim 1, wherein the amplitude of the RF signal is reduced whenever a beam propagation should be prevented. The method of claim 1, wherein the AOM is a first AOM is used and second AOM along the ray path around the radiation extinction abilities to reinforce whenever the laser beam propagation along the beam path should be prevented. The method of claim 11, wherein different frequencies be used in the first and the second AOM. The method of claim 1, wherein a beam splitting element in the beam path downstream of the AOM is arranged to a part of the laser beam to a Detector deflecting information directly or indirectly to a Laser control unit transmits that directly or indirectly modulating the RF signal applied to the AOM adapts. The method of claim 13, wherein the modulation adjustment the output amplitude stability of the Laser beam increases from one pulse to another. The method of claim 1, wherein the AOM is at least two transducers used. The method of claim 15, wherein the at least two transducers modulate a common transducer modulation range, which goes through the ray path, around a deflection angle of the beam path along a common To influence Cartesian axis. The method of claim 15, wherein the at least two transducers corresponding first and second transducer modulation areas which traverse the beam path to a deflection angle the beam path along according to the different Cartesian To influence axes. The method of claim 15, wherein the at least modulate two transducers at different frequencies. The method of claim 1, wherein the AOM is a Q-switch is used. The method of claim 1, wherein the AOM has a beam entrance surface. the RF signal is applied to a transducer to a transducer modulation range within the AOM and where the beam path on the AOM impinges at an entrance angle, with respect to the beam entry surface or the first converter modulation range is or is close to the Bragg angle it is. The method of claim 20, wherein the RF signal is applied with one or more frequencies, the Bragg efficiencies of effectively zero. The method of claim 1, wherein the RF signal comprises one or more frequencies, the Bragg efficiencies of effectively zero. Laser system for machining a workpiece, the for stray laser irradiation sensitive, comprising: a laser medium to the generation to facilitate a laser beam along an optical path; one AOM, which is located along the optical path; a converter, which is connected to the AOM; and a variable frequency control for modulating the frequency applied to the AOM the transducer to cause a major part of the laser beam to to propagate to a beam sink whenever an impact laser beam on a workpiece is undesirable, and to cause that a major part of the laser beam propagates to the workpiece, whenever an impact of the laser beam on the workpiece is desirable is. The laser system of claim 23, wherein the amplitude the frequency is set to influence the intensity of the laser beam, the on the workpiece incident. The laser system of claim 23, wherein the AOM is a Vibration preparation time includes to create a sound wave in the AOM to establish the laser beam along the beam path too propagate to the workpiece and where the frequency of the applied RF signal is continuous is changed within a time interval that is shorter as the oscillation preparation time, whenever the laser beam propagation should be prevented along the beam path. The laser system of claim 25, wherein the frequency of the applied RF signal alternately between two selected frequencies changed within the time interval is. The laser system of claim 23, wherein the frequency of the applied RF signal alternately between two selected frequencies changed is. The laser system of claim 23, wherein the frequency the applied RF signal is changed between many frequencies. The laser system of claim 25, wherein the frequency of the applied RF signal between many frequencies within the Time interval changed is. The laser system of claim 23, wherein the frequency is so modulated that it is white Noise generated. The laser system of claim 23, wherein a first transducer is connected to the AOM and used whenever the laser beam propagation along the beam path, and where the AOM a second transducer used at a selected frequency, whenever the laser beam propagation along the beam path is selected, around on the workpiece hold true. The laser system of claim 23, wherein the AOM is a first AOM is and a second AOM is used along the ray path, around beam extinction capabilities to reinforce whenever laser beam propagation along the beam path prevents shall be. A laser system according to claim 31, wherein different ones Frequencies in the first and second AOM are used. A laser system according to claim 23, wherein a laser-dividing element in the beam path downstream of the AOM is arranged to move a portion of the laser beam onto a detector to divert information directly or indirectly to a laser control device, the directly or indirectly modulating the RF signal applied to the AOM established. The laser system of claim 34, wherein the modulation adjustment the output amplitude stability of the Laser beam increases from pulse to pulse. The laser system of claim 23, wherein the AOM is at least two transducers used. The laser system of claim 36, wherein the at least two transducers modulate a common transducer modulation range, which passes through the beam path, around a deflection angle of the beam path along a common To influence Cartesian axis. The laser system of claim 36, wherein the at least two transducers corresponding first and second transducer modulation areas which traverse the optical path to a deflection angle the beam path along corresponding different Cartesian To influence axes. The laser system of claim 37, wherein the at least modulate two transducers at different frequencies. The laser system of claim 36, wherein the AOM is as a Q-switch is used. The laser system of claim 36, wherein the AOM is as an extra cavity pulse pickup is used. The laser system of claim 23, wherein the AOM is a Beam entrance surface , the RF signal is applied to a transducer to a To generate converter modulation area within the AOM, and wherein the beam path hits the AOM with an entrance angle that, in terms of the radiation input surface or the first converter modulation range, a Bragg angle or close to it. The laser system of claim 42, wherein the RF signal is applied with one or more frequencies, the Bragg efficiencies of effectively zero. The laser system of claim 42, wherein the RF signal is applied with one or more frequencies, the Bragg efficiencies of effectively zero. Method for inhibiting laser beam propagation along a beam path impinging on a workpiece, comprising: Produce a laser beam; Propagating the laser beam along one optical path into a first AOM with a first transducer; Modulate of the first transducer to propagate the laser beam along to prevent the beam path that hits the workpiece, so that a major part of the beam becomes a first beam sink propagated and a lesser part of the beam continues along the Beam path propagated, the beam path a second AOM between the first AOM and the workpiece, the second AOM a second transducer; and Modulate the second Wandlers to propagate the smaller part of the laser beam along the beam path that hits the workpiece, so the bulk the lower part of the beam to a second beam sink propagates, whereby the propagation of the laser beam along the Beam path is hit, which hits the workpiece. The method of claim 44, wherein the beam path, the on the workpiece meets, comprises a beam path of zero order. Method of modulating an AOM in a laser system, to inhibit laser beam propagation along a ray path, on a workpiece meets, comprising: Generating a laser beam; Propagate the laser beam along an optical path into an AOM; and Invest an RF signal to a transducer on the AOM at a frequency with a Bragg efficiency of effectively zero to propagation of the laser beam along the beam path to prevent the the workpiece incident. The method of claim 47, wherein the AOM has a beam entrance surface. the RF signal is applied to a transducer around a transducer modulation range within the AOM, and wherein the beam path on the AOM meets with an entrance angle, with respect to the radiation entrance surface or of the transducer entry region is a Bragg angle or near it is. Method for harmonizing the amplitude or energy a multitude of consecutive laser output pulses applied to a workpiece directed, comprising: Generating a variety of each other following laser pulses along a beam path, which on a workpiece at a Radiation position hits, the plurality of successive Laser pulses have amplitudes and energies that vary considerably; Propagate the multitude of successive laser pulses by an AOM, which is arranged along the beam path to a plurality of to provide consecutive laser output pulses; distract a part of each of the plurality of successive ones Laser output pulses to an amplitude or energy detector; Transfer of information concerning the amplitude or the energy of one each of the plurality of consecutive laser output pulses directly or indirectly to an AOM controller; and Modulate a at the AOM applied RF signal to the amplitude or energy from a given one of the plurality of successive laser output pulses in response to the information regarding the amplitude or energy from one or more of the plurality given of consecutive laser output pulses corresponding to the given one precede / advance from the plurality of successive laser output pulses. The method of claim 49, further comprising: propagating the plurality of successive laser output pulses through a beam element is disposed along the beam path downstream of the AOM to deflect a portion of each of the plurality of successive laser output pulses to an amplitude or energy detector. The method of claim 49, wherein the amplitude or the energy of successive laser output pulses less than 5% varies. The method of claim 51, wherein the plurality of successive laser pulses through a harmonic solid-phase UV-harmonic Lasers are generated. The method of claim 49, wherein the amplitude or energy from successive laser output pulses by less varies as 1%. The method of claim 49, wherein the amplitudes or energies of the plurality of consecutive laser pulses due to laser instability or thermal drift. The method of claim 49, wherein the amplitudes or energies of the plurality of successive laser pulses due to thermal heating of the AOM from inconsistently applied RF energy varies. The method of claim 49, wherein the plurality of successive laser pulses by a harmonic solid-phase laser be generated. The method of claim 49, wherein the beam path occurs on the AOM at an angle which, with respect to a beam entrance surface of the AOM is or is close to a Bragg angle applied to the AOM RF signal is frequency-modulated to an exit angle of one of the plurality of successive laser output pulses to influence, which propagates along the beam path to the workpiece, and the RF signal is modulated to the amplitude or energy of the given one of the plurality of successive laser output pulses to influence Deviations of the Bragg efficiency to compensate, from a Displacement of the exit angle of the beam path from the Bragg angle result. The method of claim 49, wherein the beam path, the on the workpiece impinges, comprises a first-order beam path, that of the AOM is propagated. The method of claim 49, wherein the beam path, the on the workpiece impinges, comprises a zero-order beam path, that of the AOM propagates. The method of claim 59, wherein the AOM is the parts the plurality of successive laser output pulses to the Amplitude or energy detector conducts. The method of claim 59, wherein the laser beam has a laser pulse energy, and the AOM is used to more to prevent 10% of the laser pulse energy from passing along the beam path, the on the workpiece hits, to propagate. The method of claim 61, wherein the AOM uses is more than 75% of the laser pulse energy along the beam path to propagate, which impinges on the workpiece. The method of claim 62, wherein the AOM uses is more than 90% of the laser pulse energy along the beam path propagate on the workpiece incident. The method of claim 49, wherein the AOM is at least used a first and a second converter. The method of claim 64, wherein the AOM is two in the Includes general orthogonal axes and the first and second Converters modulate a common transducer region and are phase-synchronized. A laser system for harmonizing the amplitude or energy of a plurality of successive laser output pulses directed to a workpiece, comprising: a laser medium for facilitating the generation of a plurality of successive laser pulses; long an optical path; an AOM disposed along the optical path for propagating a plurality of successive laser output pulses along a beam path to a workpiece; a transducer connected to the AOM; a beam splitting element for redirecting a portion of each of the plurality of successive laser output pulses away from the beam path; an amplitude or energy detector for receiving portions of the plurality of successive laser output pulses and for transmitting information regarding the amplitude or energy of each of the plurality of successive laser output pulses; and an AOM RF driver for modulating an RF signal applied to the transducer to directly or indirectly amplify the amplitude or energy of a given one of the plurality of successive laser output pulses in response to the information regarding the amplitude or energy of one or more the plurality of successive laser output pulses preceding the given one of the plurality of successive laser output pulses. The laser system of claim 66, wherein the amplitude or energy from successive laser output pulses by less varies as 5%. The laser system of claim 67, wherein said plurality of successive laser pulses by a harmonic UV solid-phase laser is generated. The laser system of claim 66, wherein the amplitude or energy from successive laser output pulses by less varies as 1%. The laser system of claim 66, wherein the amplitudes or energies of the plurality of successive laser pulses due to laser instabilities or thermal drift varies. The laser system of claim 66, wherein said plurality of successive laser pulses by a harmonic solid-phase laser is generated. The laser system of claim 66, wherein the AOM is the Beam splitter represents and the parts of the plurality of each other following laser output pulses to the amplitude or energy detector passes. The laser system of claim 66, wherein the AOM is at least includes two transducers that respond to the AOM RF driver to a modulate single modulation axis. Method for using an AOM to amplitude or energy from a plurality of consecutive laser output pulses to harmonize, which are directed to a workpiece, wherein the AOM is suitable for arranging along a beam path between a laser and a workpiece, the AOM has a jet entrance surface, a jet exit surface and a first transducer disposed on a first transducer surface of AOM is arranged and within a first transducer modulation range modulated, wherein the first transducer surface is in a first plane, which is transverse to the beam entry surface, comprising: Produce a laser beam along a beam path impinging on a workpiece; Propagate the laser beam through the arranged along the beam path AOM, where the beam path to the AOM with an entrance angle that hits, with respect the jet entry surface or the first transducer modulation range of the Bragg angles or near it is and the beam path with a first exit angle exit; Controlling a first frequency of a first RF signal, which is applied to the first converter, that within a first Transducer modulation range modulated by the beam path passes through a first exit angle of the beam path along a first workpiece axis in terms of a surface of the workpiece to influence; and Controlling a first amplitude of the first one RF signal, which is applied to the first converter to the deviation to compensate for the Bragg efficiency, which consists of a first Displacement of the first exit angle of the beam path of the Bragg angle results. The method of claim 74, further comprising: controlling a second frequency of a second RF signal applied to a second transducer disposed on a second transducer surface of the AOM, the second transducer surface being in a second plane that is transversal to the beam entrance surface and the first level, the second Modulator modulated within a second transducer modulating region passing through the beam path to affect a second exit angle of the beam path along a second workpiece axis that is transverse to the first workpiece axis with respect to a surface of the workpiece, the second transducer modulating portion being perpendicular to the first transducer modulating portion; Coordinating the first and second frequencies to deflect the beam path in both the first and second workpiece axes at a cooperative deflection angle resulting from the first and second exit angles provided by the first and second transducers in response to the first and second RF axes. Signal have been awarded; and controlling a second amplitude of the second RF signal applied to the second transducer to compensate for the deviation from the Bragg efficiency resulting from a second shift of the second exit angle of the beam path from the Bragg angle. The method of claim 75, wherein the first and second transducer surface are generally orthogonal. The method of claim 75, wherein the first and second frequency are different. The method of claim 74, wherein the beam path initially on the workpiece impinges on a nominal beam position and wherein the first Exit angle with the AOM the beam path from the nominal beam position deflects to the workpiece at a desired Beam position apply. The method of claim 74, further comprising: Taxes a second frequency of a second RF signal that at a second Transducer is placed on a second transducer surface of the AOM is arranged, wherein the second transducer surface is located in a second plane which is transverse to the beam entry surface, the second transducer is modulated in a second transducer modulation range, which passes through the beam path, to a second exit angle of the Strah lenganges along the first workpiece axis to influence, with the second transducer is spatially separated and with at a small angle of the first transducer is oriented, so that the first and second Transducer modulation range are not parallel; Coordinate the first and second frequencies to the beam path with a to divert the cooperative deflection angle resulting from the first and second exit angle resulting from the first and second Transducer has been awarded in response to the first and second RF signal; and Controlling a second amplitude of the second RF signal, which is applied to the second converter to the deviation compensate for the Bragg efficiency, which consists of a second Displacement of the second exit angle of the beam path of the Bragg angle results. The method of claim 79, wherein the first and second converter modulation area are not overlapping. The method of claim 79, wherein the first and second plane transversal, the jet entry surface and the jet exit surface Have planes that are not parallel, the first transducer modulation range is generally parallel to the jet entry surface and the second transducer modulation range generally parallel to the jet exit surface is. The method of claim 79, wherein the small angle is about 0.1 to about 3 degrees. The method of claim 82, wherein the narrow angle is about 0.5 to about 2.5 degrees. The method of claim 79, wherein the first and second frequency are different. The method of claim 79, wherein the cooperative Deflection angle has a range of up to at least 100 Milliradiant Re of the Bragg angle. The method of claim 79, wherein the first converter to a high-frequency driver for a larger Bragg angle range responds and the second converter to a driver for lower Frequency for reacts to a smaller Bragg angle range. The method of claim 74, further comprising: providing fine adjustment and rapid adjustment control signals from a positioning signal processor; Controlling, by means of a fine positioning driver, a large portion of a relative beam-controlling movement of a translation stage, generally along a translation axis, in response to the fine-adjustment control signal; Controlling, with the first and / or second transducers, a small range of relative beam-steering movement of the AOM in response to the quick-shift control signal; and causing the large range of relative beam-steering movement between the beam path and the workpiece on the translation stage; and effecting the small range of relative beam-controlling motion between the beam path and the workpiece with the AOM to strike the workpiece at a desired beam position. The method of claim 74, wherein the laser beam Pulse includes with a maximum peak power and / or energy, further comprising: Using a total laser power budget, allowing a reduced peak power and / or energy is to propagate through the AOM and along the beam path, whenever you want is that a working pulse hits the workpiece and the first exit angle the Bragg angle is or is near the reduced peak power and / or energy is less than the maximum peak power and / or energy; and Using a higher compensated peak power and / or energy through the AOM and along the beam path to propagate whenever it is desired to have a work break on the workpiece and the first exit angle is shifted from the Bragg angle is, being the higher compensated peak power and / or energy is greater as the reduced peak power and / or power and lower is considered the maximum peak power and / or energy. AOM control system for controlling an AOM that is appropriate is to move along a beam path between a laser and a laser beam workpiece to be arranged; the AOM has a beam entry surface, a Beam exit surface and a first transducer disposed on a first transducer surface of AOM is arranged and within a first transducer modulation range modulated; wherein the first transducer surface is in a first plane which is transverse to the beam entry surface; of the AOM also provides a Bragg angle with respect to the beam entry surface, first transducer modulation region and / or the beam exit surface, comprising: one first RF driver comprising or in conjunction with a variable-speed controller Frequencies adapted to a first frequency of a first RF signal to the first transducer to apply to the beam path away from the Bragg angle at the first transducer modulation range to shift to a deflection angle of the beam path along to influence a first Cartesian axis, the first RF driver is also adapted to a first amplitude of the first Adjusting the RF signal applied to the first transducer; and a control unit for providing information regarding Bragg efficiency compensation data to the first RF driver to set the first amplitude, so that they are for compensates for the deviation from the Bragg efficiency, which is resulting from a shift of the beam path from the Bragg angle. The AOM control system of claim 89, wherein the Bragg efficiency compensation data includes a table. The AOM control system of claim 89, wherein the Bragg efficiency compensation data include an algorithm based on a sin c function. AOM control system according to claim 89, wherein the laser beam Pulse includes with a maximum peak power and / or energy, a total laser power budget is used, so that a reduced Peak power and / or power is allowed through the AOM propagate and propagate along the beam path whenever it desired is that a working pulse hits the workpiece and the deflection angle the Bragg angle is or is close to it, with the reduced Peak power and / or energy is less than the maximum Peak power and / or energy; and being a higher compensated one Peak power and / or power is allowed by the AOM and propagate along the beam path whenever desired that a working pulse hits the workpiece and the deflection angle shifted from the Bragg angle, with the higher compensated peak power and / or energy is greater as the reduced peak power and / or power and lower is considered the maximum peak power and / or energy. A method for increasing the power of an AOM suitable for positioning along a beam path between a laser and a workpiece, the AOM having a beam entrance surface, a A beam exit surface and a first transducer disposed on a first transducer surface of the AOM, wherein the first transducer surface is located in a first plane which is transverse to the beam entrance opening, comprising: generating a laser beam along a beam path which is incident on a workpiece at a meets nominal beam position; Propagating the laser beam through the AOM disposed along the beam path; Controlling a first frequency of a first RF signal applied to the first transducer modulating within a first transducer modulation region that traverses the beam path to affect a deflection angle of the beam path along a first workpiece axis with respect to a surface of the workpiece; Controlling a second frequency of a second RF signal applied to a second transducer disposed on a second transducer surface of the AOM, wherein the second transducer surface is located in a second plane that is transverse to the beam entrance surface and generally parallel or coplanar with the first transducer surface; and modulating the second transducer in a second transducer modulation region that traverses the beam path to affect the deflection angle of the beam path along the first workpiece axis; and coordinating the first and second RF signals to deflect the laser beam from the nominal laser position on the workpiece to impact the workpiece at a desired beam position, resulting from a cooperative deflection angle of the beam path imparted by the first and second RF signals has been. The method of claim 93, wherein the first and second frequency are different. The method of claim 93, wherein the first and second frequency are in harmonic relationship. The method of claim 93, wherein the first and second frequency are equal and generally in phase. The method of claim 93, wherein the first and second frequency are the same and are out of phase. The method of claim 93, wherein the first and second transducer surface coplanar, and wherein the first and second transducer modulation range not overlapping are. The method of claim 98, wherein the laser beam includes at least different first and second wavelengths and the first Frequency the first wavelength modulated and the second frequency modulates the second wavelength. The method of claim 99, wherein the first and second transducer surface are parallel and wherein the first and second transducer modulation area not overlapping is. The method of claim 93, wherein the first and second transducer surface are parallel and wherein the first and second transducer modulation area essentially overlapping is. The method of claim 93, wherein the cooperative Deflection angle has a range of up to at least 100 Milliradiant Re a level of the first transducer modulation range. The method of claim 93, wherein the beam path, the on the workpiece meets, comprises a first order beam path from the AOM propagated. The method of claim 93, wherein the beam path, the on the workpiece meets, comprises a zero order beam path of the AOM propagates. The method of claim 93, wherein the beam path on the AOM impinges at an angle that is generally perpendicular to the jet entry surface is. The method of claim 93, wherein the beam path impinges on the AOM with an entrance angle which is relative to the Beam entrance surface or the first transducer modulation range is a Bragg angle or close to this is. The method of claim 106, wherein the cooperative Deflection angle has a range of up to at least 50 Milliradiant Re of the Bragg angle. The method of claim 93, wherein the first converter to a high-frequency driver for a big Bragg angle range reacts and the second converter to a driver lower frequencies for a lower Bragg angle range reacts. The method of claim 93, further comprising: Provide of fine adjustment and rapid adjustment control signals of a positioning signal processor; Control with a fine position driver a big one Range of relative ray - controlling movement of a translation stage, im Generally along a translation axis in response to the Fine-adjustment control signal; Taxes with the first and / or second converter of a small range of relative beam-controlling Moving the AOM in response to the quick-shift control signal; Cause of the big one Range of relative beam-steering motion between the Beam path and the workpiece on the translation stage; and To effect with the AOM of the small area of relative Beam-controlling movement between the beam path and the workpiece to a desired one Beam position on the workpiece hold true. The method of claim 109, further comprising: To capture error information regarding differences between the optical path and the desired beam position; and Transfer the error information directly or indirectly to the first and / or second transducer to the differences between the beam path and the desired Compensate beam position. The method of claim 109, further comprising: To capture from achsenferner information regarding differences between the Beam path along a scan line and desired beam positions, which are off axis, but parallel to the scan line; and To transfer the off-axis information to the first and / or second transducer, to deflect the laser beam so that it reaches the desired Laser positions incident parallel to the scan line on the workpiece. The method of claim 93, wherein the cooperative Distracting angle is unattainable by either the first one or the second converter. The method of claim 93, wherein the beam path impinges on the AOM with an entrance angle which is relative to the Beam entrance surface or the first transducer modulation range is a Bragg angle or close to this, with the first and second transducer surfaces parallel are, wherein the first and second converter modulation substantially overlap and wherein the first and second frequencies are generally in one harmonious relationship with each other. The method of claim 93, wherein the first converter responds to a first RF driver having a first frequency constraint, which corresponds to a first deflection angle range limitation, the second one Transducer responds to a second RF driver having a second frequency limitation a second deflection angle range limitation, wherein the second frequency is different from the first frequency and the cooperative deflection angle is greater as the first and second deflection angle range limitations. The method of claim 114, wherein the first and second frequency are in harmonic relationship. The method of claim 93, wherein the first converter responds to a first RF driver and has a first frequency response constraint, which corresponds to a first deflection angle resolution constraint, which is a first resolution of a first virtual deflection angle, which is determined by applying the the first RF signal is produced at the first transducer, the second Converter responds to a second RF driver and has a second frequency response constraint, which corresponds to a second deflection angle resolution constraint, which is a second resolution limited to a second virtual deflection angle, the generated by applying the second RF signal to the second transducer is, the first and second frequencies are different or different Have phases and the cooperative deflection angle a more precise cooperative resolution provides as either the first or the second resolution. The method of claim 116, wherein the first and second transducer surface are parallel, the first and second transducer modulation areas in Substantially overlap and the phases of the first and second RF signals are set, to fine-tune the cooperative deflection angle. The method of claim 116, wherein the first and second transducer surfaces coplanar, with the first and second transducer modulation ranges not overlapping are and the first and second frequencies are set to the fine-tune the cooperative deflection angle. The method of claim 93, wherein the laser beam includes at least different first and second wavelengths and the first Frequency the first wavelength modulated and the second frequency modulates the second wavelength. The method of claim 119, wherein the first and second frequency can be adjusted to bend the first and second wavelength, to propagate generally along a common beam path. The method of claim 120, wherein the first and second wavelength be bent at angles or near angles that are a Bragg condition suffice. The method of claim 93, wherein the first and second frequency generated by separate RF drivers. AOM control system comprising: an AOM that is suitable to move along a beam path between a laser and a workpiece with the AOM having a beam entrance surface, a Beam exit surface and a first transducer disposed on a first transducer surface is, wherein the first transducer surface is in a first plane which is transverse to the beam entry surface, wherein the first transducer is adapted to be within a first modulator modulated modulating the beam path passes; one second transducer attached to the second transducer surface which is in a second plane that is transversal to the beam entrance opening is, wherein the second converter is adapted to within a second transducer modulation range, which modulates the beam path passes; one first RF driver comprising a variable frequency controller or connected to this, which is adapted to a first Frequency of a first RF signal to be applied to the first transducer, to modulate within the first transducer modulation range, around a deflection angle of the beam along a first Cartesian Influence axis; and a second RF driver, the one control unit variable frequency includes or is connected to this a second frequency of a second RF signal to the second converter to modulate to modulate the second transducer modulation range, around the deflection angle of the beam path along the first Cartesian To influence axis, so that the deflection angle from the simultaneous Applying the first and second RF signal results. An AOM control system according to claim 123, further comprising: one Beam position controller, to coordinate the first and second frequency to the beam path with the AOM to deflect to the workpiece at a desired Beam position arising from the deflection angle. The AOM control system of claim 123, wherein the first and second RF drivers form a single RF driver. The AOM control system of claim 123, wherein the first and second RF drivers form separate RF drivers. The AOM control system of claim 123, wherein the first and second RF drivers include different frequency ranges. The AOM control system of claim 123, wherein the first and second frequency are different. The AOM control system of claim 123, wherein the first and second frequency are in harmonic relationship. The AOM control system of claim 123, wherein the first and second frequency are generally in phase. The AOM control system of claim 123, wherein the first and second frequency are out of phase. The AOM control system of claim 123, wherein the first and second transducer surface coplanar, and wherein the first and second transducer modulation range not overlapping are. The AOM control system of claim 123, wherein the first and second transducer surface are parallel and wherein the first and second transducer modulation area not overlapping are. AOM control system according to claim 123, wherein the deflection angle a range of up to at least 100 milliradians with respect to a Level of the first transducer modulation range includes. The AOM control system of claim 123, wherein the AOM is suitable for propagating a beam path of the first order as a working beam path. The AOM control system of claim 123, wherein the AOM is suitable for the impact of the beam path with an entrance angle, the, re the radiation entrance surface or the first transducer modulation range is a Bragg angle or close to it. AOM control system according to claim 123, wherein the deflection angle has a range of up to at least 50 milliradians with respect to Bragg angle includes. The AOM control system of claim 123, wherein the first Transducer reacts to a high frequency driver for a large Bragg angle range, and the second converter for a low frequency driver for one low Bragg angle range reacts. The AOM control system of claim 123, wherein the AOM control system forms a part of a laser system. The AOM control system of claim 139, wherein the AOM is adapted to small ranges of relative jet-controlling To cause movement between the beam path and the workpiece, and the first and second converters the small range of relative Beam-controlling movement of the AOM in response to a Schnellverstell control signal control, further comprising: a slow interlocking to one huge Range of relative movement between the beam path and the workpiece, the slow interlocking comprising a translation stage capable of to move generally along a translation axis; one Positioning signal processor to get out of the positioning command Derive fine adjustment and rapid adjustment control signals; one Driver for a slow interlocking to the large range of relative jet-steering Movement of the translation stage in response to the fine adjustment control signal, so that the Coordination of the AOM with the slow interlocking the beam path deflects to the workpiece at a desired Radiation position apply. An AOM control system according to claim 139, wherein the laser beam at least different first and second wavelengths and the AOM is adjusted so that the first frequency is the first Wavelength modulated and the second frequency modulates the second wavelength. AOM control system according to claim 141, wherein the first and second RF drivers are adapted to the first and second frequencies adjust so that the first and second wavelength diffracted is going to be generally along a common beam path to propagate. The AOM control system of claim 142, wherein the first and second wavelength with angles corresponding to or close to a Bragg state to be bent. The AOM control system of claim 123, wherein the beam path impinges on the AOM at an angle that is Bragg angle with respect to a beam entrance surface, or the first transducer modulation range, or frequency-modulates the RF signal applied to the AOM one To cause exit angles of the given one of the plurality of successive laser output pulses propagating along the beam path to the workpiece, and the RF signal is modulated to cause the amplitude or energy of the given one of the plurality of successive laser output pulses; to compensate for deviations from the Bragg efficiency, resulting from a shift of the exit angle of the beam path from the Bragg angle. The AOM control system of claim 123, wherein the first Converter to a first RF driver which has a first frequency limitation that is a first Deflection angle range limitation corresponds to the second converter responds to a second RF driver having a has second frequency limitation, which corresponds to a second deflection angle range limitation, the second frequency is different from the first sequence and the deflection angle is larger as the first and second deflection angle range constraints. The AOM control system of claim 145, wherein the first and second frequency are in harmonic relationship with each other. The AOM control system of claim 123, wherein the first Converter to a first RF driver reacts and has a first Frequenzanwortsbeschränkung, the first Angle deflection resolution restriction corresponds, the first resolution limited by a first deflection angle, by applying the first RF signal is made to the first transducer, the second Converter responds to a second RF driver and has a second frequency response constraint, which corresponds to a second deflection angle resolution constraint, which is a second resolution limited by a second deflection angle, by applying the second RF signal is made to the second transducer, the first or second frequency are different from each other or different Have phases and the deflection angle a more precise cooperative resolution provides as both the first and the second resolution. AOM control system according to claim 147, wherein the first and second transducer surface are parallel, wherein the first and second transducer modulation area essentially overlap and wherein the phases of the first and second RF signals are adjusted are to fine tune the deflection angle. AOM control system according to claim 147, wherein the first and second transducer surface coplanar, with the first and second transducer modulation ranges not overlapping and wherein the first and second frequencies are set to to fine tune the deflection angle. AOM control system according to claim 147, wherein the first and second transducer surface are parallel, wherein the first and second transducer modulation area essentially overlapping and wherein the first and second RF signals are the same frequency and are phase locked to the diffraction efficiency to increase. Method for increasing a beam deflection angle range in an AOM, which arranged on a first surface a first transducer responding to a first RF driver having a first frequency constraint, that corresponds to a first deflection angle range constraint comprising: Produce a laser beam along a beam path which is incident on a workpiece at a first beam position hits; Propagating the laser beam by the AOM, which is arranged along the beam path; Taxes a first frequency of a first RF signal that is at the first Transducer is applied to the AOM; Controlling a second frequency a second RF signal applied to a second transducer located on a second surface of the AOM, the second surface is generally parallel or coplanar with the first surface, the second converter, which responds to a second RF driver, the a second frequency restriction which corresponds to a second deflection angle range limitation and the second frequency is different from the first frequency; and Coordinate the first and second frequency to be with the AOM the laser beam from the beam path and the first beam position on the workpiece divert to impinge on the workpiece at a particular beam position, resulting from a cooperative deflection angle beyond the first and second deflection angle range limitation. A method of increasing beam deflection angle direction control in an AOM disposed on a first transducer surface of a first transducer responsive to a first RF driver, the first transducer having a first frequency constraint that is at a first deflection angle tion limitation corresponds to: generating a laser beam along a beam path incident on a workpiece at a first beam position; Propagating the laser beam through the AOM disposed along the beam path; Controlling a first frequency of an RF signal applied to the first converter on the AOM; Controlling a second frequency of a second RF signal applied to a second transducer disposed on a second transducer surface of the AOM, wherein the second transducer surface is generally parallel or coplanar with the first surface, the second transducer is responsive to a second RF transducer Driver responsive, wherein the second transducer has a second frequency constraint that corresponds to a second deflection angle control constraint, and wherein the first or second frequency is different or has different phases; and coordinating the first and second frequencies to deflect with the AOM the laser beam from the beam path and the first beam position on the workpiece to impinge on the workpiece at a particular beam position, resulting from a cooperative deflection angle not from either the first or second beam is independently available from the second converter. Method for amplifying a beam positioning control from an AOM suitable for placement along a beam path between a laser and a workpiece with a first and a second transverse surface axis, wherein the AOM has a jet entrance surface, a jet exit surface and a first transducer disposed on the first transducer surface of AOM, the first being in a first plane, which is transverse to the beam entry surface, comprising: Produce a laser beam along a beam path impinging on a workpiece; Propagate of the laser beam through the AOM, which is arranged along the beam path is; Controlling a first frequency of a first RF signal, which is applied to the first converter which is within a first Transducer modulation range modulates, which passes through the beam path to a first exit angle of the beam path along the first surface axis to effect; Controlling a second frequency of a second RF signal, which is applied to a second converter, which on a second transducer surface the AOM is arranged, wherein the second transducer surface is located in a second plane that is transverse to the beam entry surface and the first level, wherein the second converter in a second Modulator modulator modulated transversely to the first Transducer modulation range is and the beam path goes through to a second exit angle of the beam path along the second surface axis to effect; and Coordinating the first and second frequencies, around the beam path along the first and second surface axes distract to get on the workpiece at a desired Radiation position with a cooperative deflection angle, which results from the first and second exit angle, the through the first and second transducers in response to the first and second frequency of the first and second RF signals. The method of claim 153, wherein the first and second converter modulation regions are generally orthogonal. The method of claim 153, wherein the first and cross the second transducer modulation area. The method of claim 153, wherein the first and second frequency are different. The method of claim 153, wherein the beam path, the on the workpiece impinges, comprises a first-order beam path, that of the AOM propagates. The method of claim 153, wherein the beam path, the on the workpiece impinges, comprises a zero-order beam path, that of the AOM propagates. The method of claim 153, wherein the beam path impinges on the AOM at an angle that is generally perpendicular to the jet entry surface is. The method of claim 153, wherein the beam path impinging on the AOM at an angle which is a Bragg angle with respect to the Beam entrance surface or the first transducer modulation range, or near it is. The method of claim 160, wherein the first and second RF signals each comprise a first and a second RF signal Amplitude and the first and / or second amplitude is set to compensate for deviations from a Bragg efficiency, which results from shifts of the first and / or second exit angle of the beam path of the Bragg angle. The method of claim 153, wherein a third Frequency of a third RF signal applied to a third transducer which is arranged on a third transducer surface of the AOM, the third transducer surface is generally transverse to the beam entrance surface and the third converter in a third converter modulation range modulated, which passes through the beam path and affects the first exit angle, so that the first and third RF signal cooperate to the first Control exit angle. The method of claim 162, wherein the first and third converter modulation range are generally parallel. The method of claim 162, wherein the first and third transducer surface coplanar are. The method of claim 162, wherein the third converter spatial separated and aligned at a small angle with respect to the first transducer is such that the first and third transducer modulation ranges are not parallel and non-overlapping are. The method of claim 162, wherein the first and third frequency are different. The method of claim 162, wherein the first and third frequency are the same. The method of claim 162, wherein the first and third frequency in general in a harmonious relationship to each other are. The method of claim 162, wherein the first and third frequency have different phases. The method of claim 163, wherein the first and second frequency are generally in phase. The method of claim 162, wherein the beam path impinges on the AOM with an entrance angle which is a Bragg angle in terms of the jet entry surface or the first transducer modulation range is or is close to. The method of claim 162, wherein the first and third RF signal work together to the first exit angle with a resolution which is beyond the ones that are either the first or third converter independently can deliver. The method of claim 162, wherein the first and third RF signal interact to increase the first exit angle to include a cooperative deflection angle range beyond deflection angle ranges, either the first or the second the third converter independent can provide. The method of claim 153, further comprising: Provide of fine adjustment and rapid adjustment control signals from a positioning signal processor; Taxes with one Driver for a slow interlocking of a large area of relative Beam-controlling movement of a translation stage, generally along a translation axis in response to the fine adjustment control signal; Taxes with the first and / or second converter of a small range from relative beam-steering motion of the AOM in response to the quick-shift control signal; and Effecting the big one Range of a relative beam-controlling movement between the Beam path and the workpiece on the translation stage; and To effect with the AOM of the small area of relative Beam-controlling movement between the beam path and the workpiece in order to the workpiece to hit at a certain beam position. The method of claim 174, further comprising: receiving error information regarding differences between the beam path and the desired beam position; and Transmitting the error information to the first and / or second transducer to compensate for the differences between the beam path and the desired beam position. The method of claim 174, further comprising: take up from off-axis information regarding differences between the beam path along a scan line and desired But far away ray positions parallel to the scan line; and Transfer the off-axis information to the first and / or second converter, to deflect the laser beam to the desired beam positions parallel to the scan line the workpiece impinge. AOM control system for controlling an AOM, the appropriate is to move along a beam path between a laser and a laser beam workpiece to be arranged, wherein the AOM has a jet entrance surface, a Beam exit surface and a first transducer disposed on a first transducer surface wherein the first transducer surface is in a first plane which is transverse to the beam entry surface, the first converter is adapted to be within a first transducer modulation range modulating the beam path, comprising: one second transducer attached to a second transducer surface which is in a second plane that is transversal to the jet entry surface is, wherein the second converter is adapted to within a second transducer modulation range, which modulates the beam path passes; one first RF driver comprising a first variable frequency controller or communicating with them, which is adapted to one first frequency of a first RF signal to be applied to the first converter, to modulate within the first transducer modulation range, around a first exit angle of the beam path along a to influence the first Cartesian axis; and a second RF driver, which includes a second variable frequency controller or communicating with this to a second frequency of a second RF signal to the second transducer to create a second Modulating transducers transversely to the first transducer modulation range is about a second exit angle of the beam path along a second Cartesian axis, which is transversal to the first Cartesian axis, so one cooperative deflection angle resulting from the application of the first and second RF signal simultaneously. AOM control system according to claim 177, wherein the first and second transducer modulation regions are generally orthogonal. AOM control system according to claim 177, wherein the first and second converter modulation area intersect. AOM control system according to claim 177, wherein the first and second RF drivers are adapted to independently first and second frequencies provide. An AOM control system according to claim 177, further comprising a radiation position control device, to coordinate the first and second frequency to the AOM To deflect the laser beam from the beam path to the workpiece on a desired Beam position arising from the cooperative deflection angle results. The AOM control system of claim 177, wherein the AOM is adapted to be arranged, so that a beam first Order propagated along the beam path. The AOM control system of claim 177, wherein the AOM is adapted to be arranged so that a jet zerter Order propagated along the beam path. The AOM control system of claim 177, wherein the AOM is adapted to be arranged so that the beam path up the AOM hits at an angle that is generally perpendicular to the jet entry surface is. The AOM control system of claim 177, wherein the AOM is suitable for hitting the beam path with an entrance angle, which is a Bragg angle the radiation entrance surface or the first transducer modulation range is or near. The AOM control system of claim 185, wherein the first and second RF drivers are adapted to adjust a first amplitude of the first RF signal and a second amplitude of the second RF signal, to compensate for variations in Bragg efficiency resulting from shifts in the first and / or second exit angles of the beam path from the Bragg angle. An AOM control system according to claim 177, further comprising: one third transducer disposed on a third transducer surface which is located in a third level which in general transversal to the beam entry surface is to modulate in a third converter modulation area; and a third RF driver to add a third frequency of a third RF signal which is applied to the third transducer to in the third Modulating modulator region that passes through the beam path and influenced the first exit angle, so that the first and third RF signal cooperate to control the first exit angle. The AOM control system of claim 187, wherein the first and third transducer modulation regions are generally parallel. The AOM control system of claim 187, wherein the first and third transducer surface coplanar are. AOM control system according to claim 187, wherein the third Transducer spatially separated and aligned at a small angle with respect to the first transducer is such that the first and third transducer modulation ranges are not are parallel and not overlapping are. The AOM control system of claim 187, wherein the first and third RF drivers are adapted to different first and to provide third frequencies. AOM control system according to claim 187, wherein the first and third frequencies are the same. The AOM control system of claim 188, wherein the first and third RF drivers are adapted to first and third frequencies generally provide a harmonious relationship to each other exhibit. The AOM control system of claim 187, wherein the first and third RF drivers are adapted to first and third frequencies to provide that have different phases. The AOM control system of claim 188, wherein the first and third RF drivers are adapted to first and second frequencies which are generally in phase. The AOM control system of claim 187, wherein the AOM is suitable for hitting the beam path with an entrance angle, which is a Bragg angle the jet entry surface or the first transducer modulation range is or is close to it is. The AOM control system of claim 187, wherein the first and third RF signal are adjusted to work together to the to control the first exit angle to a cooperative deflection angle at a resolution to encompass beyond that which is either the first or the third Can provide converter alone. The AOM control system of claim 187, wherein the first and third RF signal are adjusted to work together to the to control the first exit angle to a cooperative deflection angle which is beyond deflection angle ranges that either the first or the third converter can provide independently. A method of amplifying beam positioning control and an AOM suitable for positioning along a beam path between a laser and a workpiece, the AOM having a beam entrance surface, a beam exit surface, and a first transducer modulating region passing through the beam path and deflecting the beam path along a beam path first workpiece axis with respect to a surface of the workpiece, comprising: generating a laser beam along a beam path incident on a workpiece at a nominal beam position; Propagating the laser beam through the entrance surface of the AOM disposed along the path of the beam, the path of the beam impinging on the AOM at an entrance angle that is or near a Bragg angle with respect to the beam entrance surface of the AOM and the path of the AOM egg The angle of deflection of the beam path from the Bragg angle reduces the Bragg efficiency to a lower Bragg efficiency as a function of the amount of shift of the exit angle from the Bragg angle, and where a larger angular displacement is undesirable low Bragg efficiency results; Controlling a first frequency of a first RF signal applied to a first transducer disposed on a first transducer surface of the AOM, the first transducer surface being transversal to the beam entrance surface, and the first transducer modulated in the first transducer modulation range to communicate with the first transducer transducer AOM to move the beam path from the Bragg angle. Controlling a Bragg matching device upstream of the AOM to shift the entry angle at the beam entry surface of the AOM to reduce a loss of Bragg efficiency resulting from the shift of the exit angle; and coordinating the displacement of the entrance angle and the first frequency of the first RF signal to redirect the beam path from a nominal beam position to the workpiece to impinge on the workpiece at a desired beam position resulting from a cooperative deflection angle imposed by the Bragg gear. Lending device, and the AOM with a total Bragg efficiency is greater than the undesirable low Bragg efficiency. The method of claim 199, wherein the AOM is a first AOM is and the upstream Bragg adjustment device comprises a second AOM, on full: Controlling a second frequency of a second RF signal, which is applied to a second converter, which on a second transducer surface of the second AOM, and the second converter within a second transducer modulation range and the deflection the beam path along the first workpiece axis influenced; and Coordinate of the first and second RF signals to drive the laser beam from the nominal one Beam position on the workpiece distract to get to the workpiece at a desired Beam position, resulting from the cooperative deflection angle resulting from the first and second RF signals. The method of claim 199, wherein the upstream Bragg adjustment device one or more galvanometers or an FSM. The method of claim 199, wherein the upstream Bragg adjustment device is used to offset effects associated with a shift a focus distance from the lens back of an exit pupil are connected. The method of claim 199, wherein the upstream Bragg adjustment device used to position the AOM somewhere other than Meeting criterion for a focus distance from the lens back of an exit pupil to balance on the AOM. The method of claim 199, wherein the upstream Bragg adjustment device used to be permanent Offset drift or calibration regarding beam positioning. The method of claim 199, wherein the laser beam a UV wavelength includes. The method of claim 200, wherein the laser beam a UV wavelength includes. The method of claim 200, wherein the second AOM is used to offset effects associated with a shift at a focus distance from the lens back of an exit pupil related to the first AOM. The method of claim 200, wherein the upstream Bragg second AOM is used to balance the arrangement of the first AOM somewhere other than meeting criterion for a focal distance of the back of the lens an exit pupil on the first AOM. The method of claim 200, wherein the first and second frequencies are different. The method of claim 199, wherein the cooperative Deflection angle has a range that is greater than 100 milliradiant. The method of claim 200, wherein the beam path, the on the workpiece impinges, comprises a first-order beam path, that of the propagated first and second AOM. The method of claim 200, wherein the beam path on the second AOM impinges at an angle that is a Bragg angle in terms of the jet entry surface of the second AOM is or is near. The method of claim 200, wherein the first and second transducers have different sizes. The method of claim 200, wherein the second converter to a high-frequency driver for a big Beam area responds and the first converter to a driver lower Frequency for a smaller fine adjustment area responds. The method of claim 200, wherein the second converter to a frequency driver with higher Amplitude reacts and the first converter to a frequency driver reacts with lower amplitude. The method of claim 199, further comprising: Provide of fine adjustment and rapid adjustment control signals of a positioning signal processor; Control with a driver for a slow signal box of a big one Range of relative beam control movement of a translation stage, im Generally along a translation axis in response to the Fine shift control signal; Taxes with the first and / or second converter of a small range of relative beam-controlling Moving the AOM in response to the quick-shift control signal; and Effecting the big one Range of relative beam control movement between the beam path and the workpiece on the translation stage; and To effect with the AOM of the small area of relative Beam-controlling movement between the beam path and the workpiece in order to the workpiece to arrive at a desired Beam position. The method of claim 216, further comprising: take up error information regarding differences between the optical path and the desired beam position; and Transfer of error information directly or indirectly at first and / or second transducer to detect differences between the beam path and the desired Radiation position compensate. The method of claim 216, further comprising: take up from achsenferner information regarding differences between the Beam path along a scan line and desired beam positions, the are distant from the beam but parallel to the scan line; and Transfer from off-axis information to the first and / or second transducer, to deflect the laser beam to parallel to the desired beam positions to the scanning line of the workpiece impinge. The method of claim 200, wherein the cooperative Deflection angle not by either the first or second transducer not independent available is. The method of claim 200, wherein the laser beam at least different first and second wavelengths and the second frequency modulates the first wavelength and the first one Frequency the second wavelength modulated. The method of claim 220, wherein the first and second frequencies are set to the first and second wavelength to bend, generally along the same optical path too propagate. The method of claim 220, wherein the first and second wavelengths be bent at angles that meet a Bragg condition or close to it. AOM control system comprising: a first AOM adapted to be disposed along a beam path between a laser and a workpiece, the first AOM having a first beam entrance surface, a first beam exit surface and a first transducer modulating region adapted to to go through the beam path; a first transducer attached to the first transducer surface that is transverse to the first beam entrance surface; a first RF driver including or communicating with variable frequency control applying a first frequency of a first RF signal to the first transducer to modulate within the first transducer modulation range, the first frequency affecting a first deflection angle of the beam path exiting the first beam exit surface; a second AOM adapted to be disposed along the optical path between the first AOM and the workpiece, the second AOM including a second beam entrance surface, a second beam exit surface, and a third transducer modulating region adapted to traverse the optical path; a second transducer attached to a second transducer surface that is transverse to the second beam entrance surface; a second RF driver including or communicating with a second variable frequency controller for applying a second frequency of a second RF signal to the second converter to modulate in the second converter modulation range, the second frequency being a second frequency converter Distortion angle of the beam path exiting the second beam exit surface, wherein the first and second AOM along the beam path is arranged so that the first and second transducer modulation axis would affect the deflection of the beam path along a common workpiece axis with respect to a surface of the workpiece, so that the first and second deflection angles cooperate to provide a cooperative deflection angle for the beam path. An AOM control system according to claim 223, further comprising a control unit, to simultaneously apply the first and second RF signals to to generate the cooperative deflection angle. The AOM control system of claim 223, wherein the first AOM is suitable for a second entrance angle of the beam path at the second beam entrance surface of the second AOM, to reduce a loss of Bragg efficiency, resulting from the Displacement of the second deflection angle results. The AOM control system of claim 225, wherein the first and second entrance angle of the beam path are calibrated that they respect the jet entry surfaces and jet exit surfaces the AOMs are at or near a Bragg angle, where Distracting the beam path from the Bragg angle Bragg efficiency reduced to a lower Bragg efficiency as a function of extent the shift in the corresponding exit angles of the Bragg angle, and being a large angular displacement in one undesirable low Bragg efficiency leads and wherein the control system is adapted to control the displacement of the second entrance angle and the second frequency of the second RF signal coordinate to the beam path from a nominal beam position on the workpiece distract to get to the workpiece at a desired Radiation position, resulting from a cooperative deflection angle results, which is awarded by the first and second AOM, with a total Bragg efficiency that is greater than the unwanted low Bragg efficiency. AOM control system according to claim 223, wherein the first and second RF drivers are different. AOM control system according to claim 29, wherein the first and second frequency are different. AOM control system according to claim 223, wherein the cooperative Deflection angle has a range that is greater than 100 milliradiant. The AOM control system of claim 223, wherein the AOM control system forms a part of a laser system. AOM control system according to claim 230, wherein the beam path, the on the workpiece impinges, comprises a first-order beam path extending from the first and second AOM. The AOM control system of claim 223, wherein the AOM is adapted to cause small ranges of relative beam-steering motions between the beam path and the workpiece, and the first and second transducers control the small ranges of relative beam steering movement of the AOM in response to a quick-change. Controlling a control signal, further comprising: a slow interlocking to effect a large range of relative movement between the beam path and the workpiece, the slow interlocking comprising a translation stage capable of moving generally along a translation axis; a positioning signal processor for deriving fine adjustment and rapid adjustment control signals len from the positioning command; and a slow interposer driver for controlling the large range of relative beam control movement of the translation stage in response to the fine adjustment control signal such that the slow AOM coordination of the AOM deflects the beam path to impact the workpiece at a desired beam position. AOM control system according to claim 223, wherein the laser beam comprises at least different first and second wavelengths, and wherein the first frequency the first wavelength modulated and the second frequency modulates the second wavelength. An AOM control system according to claim 233, wherein the first and second frequency are set to bow the first and second wavelengths, to propagate generally along the same beam path. The AOM control system of claim 234, wherein the first and second wavelength be bent at angles that meet a Bragg condition or close to it. Method for increasing the performance of an AOM, the for the arrangement along a beam path between a laser and a workpiece is suitable, wherein the AOM a jet entrance surface, a Beam exit surface and a first transducer disposed on a first transducer surface of the AOM is arranged, wherein the first wall leroberfläche in a first plane which is transverse to the beam entry surface, full: Generating a laser beam along a beam path, on a workpiece strikes; Propagating the laser beam by the AOM, the is arranged along the beam path; Controlling the creation a first frequency of a first RF signal, the first Transducer is applied, which is within a first transducer modulation range modulated passing through the beam path to a first deflection angle the beam path along a first workpiece axis with respect to a surface of the workpiece to influence; Controlling the application of a second frequency a second RF signal applied to a second transducer is located on a second transducer surface of the AOM, wherein the second transducer surface is in a second plane that is transverse to the beam entry surface, and the second converter in a second converter modulation range modulated passing through the beam path to a second deflection angle to influence the beam path along the first workpiece axis, wherein the second transducer spatially is aligned and with a small angle with respect to the first transducer, such that the first and second transducer modulation areas are not parallel are; and Coordinating the creation of the first and / or second RF signal to deflect the laser beam to the workpiece on a desired Beam position resulting from the application of either one or both of the first and second frequencies results in a deflection propagation direction provide, from the application of the first and / or second RF signal results. The method of claim 236, wherein the first and second converter modulation area are not overlapping. The method of claim 236, wherein the first and second plane are transversal, with the beam entry surface and the jet exit surface Have planes that are not parallel, wherein the first transducer modulation area is generally parallel to the jet entry surface and wherein the second transducer modulation range is generally parallel to the jet exit surface is. The method of claim 236, wherein the small angle from about 0.1 degrees to about 3 degrees. The method of claim 239, wherein the small angle from about 0.5 degrees to about 2.5 degrees. The method of claim 236, wherein the first and second frequency are different. The method of claim 236, wherein the beam path impinges on the AOM with an entrance angle which is relative to the Beam entrance surface or the first transducer modulation range, a Bragg angle or close to it. The method of claim 242, wherein the deflection propagation direction has a range of up to at least 100 milliradians relative to the Bragg angle includes. The method of claim 236, wherein the first converter to a high-frequency converter for larger Bragg angle range the second converter responds to lower frequency drivers for smaller ones Bragg angle ranges respond. The method of claim 236, further comprising: Provide of fine adjustment and rapid adjustment control signals from a positioning signal processor; Taxes with one Driver for a slow interlocking of a large range of relative Beam control movement of a translation stage, generally along a translation axis in response to the fine adjustment control signal; Taxes with the first and / or second converter of a small area of relative beam steering movement of the AOM in response to the quick-shift control signal; Cause of the big one Range of relative beam control movement between the beam path and the workpiece on the translation stage; and To effect with the AOM of the small area of relative Beam control movement between the beam path and the workpiece in order to the workpiece at a desired Beam position apply. The method of claim 245, further comprising: take up error information regarding differences between the optical path and the desired beam position; and Transfer the error information directly or indirectly to the first and / or second transducer to detect differences between the beam path and the desired Compensate for radiation position; The method of claim 245, further comprising: take up of off - axis information regarding differences between the Beam path along a scan line and desired beam positions, the away from the axis, but parallel to the scan line; and Transfer from off-axis information to the first and / or second transducer, to deflect the laser beam to the desired beam positions in parallel over to the scan line the workpiece to let strike. The method of claim 236, wherein the deflection propagation direction at high diffraction efficiency neither at the first nor at the second Converter independent can be achieved. The method of claim 236, wherein the laser beam comprises at least different first and second wavelengths, and wherein the first frequency modulates the first wavelength and the second Frequency the second wavelength modulated. The method of claim 249, wherein the first and second frequency are set so that they are the first and second wavelength bend to generally along a common beam path to propagate. The method of claim 250, wherein the first and second wavelength be bent at angles that correspond to a Bragg condition or close to it. The method of claim 236, wherein the second converter one of several corresponding transducers, so everyone the corresponding transducer to a corresponding frequency of a corresponding RF signal responds to the corresponding transducer is placed on a corresponding transducer surface of the AOM is arranged, with the corresponding transducer surface itself located in a corresponding plane which is transverse to the beam entry surface, being the corresponding transducers at appropriate distances are arranged, which increase from the beam entry surface, and the corresponding transducers within a corresponding transducer modulation range modulate that passes through the beam path to a corresponding Deflection angle of the beam path along the first workpiece axis to influence, with the corresponding transducer spatially separated and aligned at a corresponding low angle with respect to the first transducer is such that the first and second transducer modulation areas are not are parallel. The method of claim 252, wherein the corresponding small angle decrease when the appropriate distances increase. The method of claim 253, wherein the corresponding frequencies decrease as the ent increase speaking distances. The method of claim 252, further comprising: Select from one of the corresponding transducers to be the second transducer, a desirable distraction propagation direction to reach. The method of claim 252, wherein at least two the corresponding small angle are different. The method of claim 256, wherein the corresponding ones Transducers aligned at different small angles are excited by RF drivers, the different frequency ranges exhibit. The method of claim 252, wherein one of the corresponding Converter modulation areas, a second converter modulation area is one of the corresponding transducer modulation areas a third converter modulation range, which consists of a third small angle of a third transducer, the second transducer modulation range disposed between the first and third transducer modulation regions is, and wherein the third low angle is greater than the low angle of the second converter. The method of claim 252, wherein the beam entry surface and the jet exit surface levels have in parallel. The method of claim 252, wherein the jet exit surface is located in a rearward plane, the one end face angle to a front plane of the beam entry surface, wherein the front surface angle is on average 90 degrees and corresponding sums of 90 degrees ± the low Angles of the corresponding transducers. The method of claim 252, wherein the corresponding low angles include a maximum tilt angle, the jet exit surface in a backward plane Be finds that a front angle to a front plane of the beam entry surface, and wherein the Face angle less than 90 degrees ± the biggest tilt angle is. The method of claim 236, further comprising: Taxes a third frequency of a third RF signal that at a third Transducer is placed on a third transducer surface of the AOM is arranged, wherein the third transducer surface is located in a third plane that is transverse to the beam entry surface and is transversal to the first level and the third transducer in one modulated third transducer modulation range, the beam path goes through and crossing the first converter modulation area to a third one Deflection angle of the beam path along a second workpiece axis to influence; and Controlling a fourth frequency of a fourth RF signal, which is applied to a fourth transducer, which on a fourth transducer surface of the AOM, wherein the fourth transducer surface is located is in a fourth plane which is transverse to the beam entry surface and transversal to the second level, and wherein the fourth transducer modulated in a fourth transducer modulation range, which passes through the beam path and with the second transducer modulation area intersects one another fourth deflection angle of the beam path along the second Workpiece axis to influence, with the fourth transducer spatially separated and with a small tilt angle with respect the third transducer is aligned so that the third and fourth Transducer modulation range are not parallel; and Coordinate the third and fourth RF signals to deflect the laser beam, around on the workpiece at the desired Beam position, resulting from the deflection propagation direction resulting from the first, second, third and fourth deflection angles resulting from the first, second, third and fourth RF signal, respectively is awarded. The method of claim 262, wherein the small or low angles and the tilt angle are different. The method of claim 262, wherein the small or low angles and the tilt angle are about the same. The method of claim 262, wherein the third and fourth planes are transversal, wherein the third transducer modulation region is generally parallel to the beam entrance surface and wherein the fourth Transducer modulation region is generally parallel to the beam exit surface. The method of claim 236, further comprising: Invest the first frequency to effect the first deflection angle; Invest the second frequency to effect the second deflection angle; and Coordinating the frequencies of the first and second RF signals, to deflect the laser beam with a cooperative deflection angle, resulting from the first and second deflection angles, the is given by the first and second RF signals. The method of claim 266, wherein the beam path, which impinges on the AOM with an entrance angle which is relative to the Beam entrance surface or the first transducer modulation range, a Bragg angle or close to it and where the first and second frequencies are appropriate provide first and second deflection angles which, when appropriate beam paths first or higher Order or close to being a Bragg condition suffice. The method of claim 252, further comprising: Invest the first frequency to effect the first deflection angle; Invest the second frequency to effect the second deflection angle; and Coordinating the frequencies of the first and second RF signals, to deflect the laser beam with a cooperative deflection angle, which results from the first and second deflection angle, the be imparted by the first and second RF signals. The method of claim 262, further comprising: Invest the first frequency to effect the first deflection angle; Invest the second frequency to effect the second deflection angle; and Coordinating the frequencies of the first and second RF signals, to deflect the laser beam with a cooperative deflection angle, which results from the first and second deflection angle, the be imparted by the first and second RF signals. The method of claim 1, further comprising: Invest of the first RF signal while the application of the second RF signal is prevented to a deflection propagation direction to reach or applying the second RF signal while preventing is that the first RF signal is applied to a deflection propagation direction to reach. The method of claim 270, wherein the beam path impinges on the AOM with an entrance angle which is relative to the Beam entrance surface or the first transducer modulation range is a Bragg angle or is close, wherein the first and the second transducer modulation range share a common beam path of zero order, where the first frequency controls the first deflection angle, so he near a first order beam path is from the first transducer modulation range, and wherein the second frequency controls the second deflection angle, so that he is at a first order beam path or near it is present from the second converter modulation area. The method of claim 252, further comprising: Invest of the first RF signal while the application of the second RF signal is prevented to a deflection propagation direction or applying the second RF signal while the Application of the first RF signal is prevented to a deflection propagation direction to reach. The method of claim 272, wherein the beam path on the AOM impinges with an entrance angle, with respect to the Beam entrance surface or the first transducer modulation range, a Bragg angle or is close, wherein the first and second transducer modulation area share a common beam path of zero order, the first frequency controls the deflection angle so that it is close to a ray path first order of the first converter modulation range, and wherein the second frequency controls the second deflection angle so that it is or is close to a first-order beam path from the second converter modulation area. The method of claim 262, further comprising: Invest of the first RF signal while the application of the second RF signal is prevented to a deflection propagation direction or applying the second RF signal while the Application of the first RF signal is prevented to a deflection propagation direction to reach. The method of claim 274, wherein the beam path on the AOM impinges at an angle with respect to the beam entrance surface or a Bragg angle or near the first transducer modulation range thereon, wherein the first and second transducer modulation ranges share a common beam path of zero order, the first frequency controls the first deflection angle so that it is close a first order beam path from the first transducer modulating region and wherein the second frequency is the second deflection angle so controls that he has a first order beam path of the second transducer modulation range is or is close to it. The method of claim 236, further comprising: Invest the first frequency to cause the first deflection angle while the second frequency is applied with one or more frequencies will, the Bragg efficiencies of effectively zero; or Applying the second frequency, to effect the second deflection angle while the first frequency at one or more frequencies, the Bragg efficiencies of effectively zero. The method of claim 252, further comprising: Invest the first frequency to cause a first deflection angle while the second frequency is applied at one or more frequencies will, the Bragg efficiencies of effectively zero; or Applying the second frequency, to effect the second deflection angle while the first frequency at one or more frequencies, the Bragg efficiencies of effectively zero. The method of claim 262, further comprising: Invest the first frequency to cause the first deflection angle while the second frequency is applied at one or more frequencies will, the Bragg efficiencies of effectively zero; or Applying the second frequency, to effect the second deflection angle while the first frequency at one or more frequencies, the Bragg efficiencies of effectively zero. The method of claim 276, wherein the first and second converter modulation area are not overlapping. The method of claim 276, wherein the first and second plane are transversal, the jet inlet opening and the jet outlet opening Have planes that are not parallel, wherein the first transducer modulation area is generally parallel to the jet entry surface and the second transducer modulation range generally parallel to the jet exit surface is. The method of claim 276, wherein the small angle from about 0.1 degrees to about 3 degrees. The method of claim 281, wherein the small angle from about 0.5 degrees to about 2.5 degrees. The method of claim 276, wherein the beam path impinges on the AOM with an entrance angle which is relative to the Beam entrance surface or a Bragg angle or near the first transducer modulation range it is. The method of claim 283, wherein the deflection propagation direction has a range of up to at least 100 milliradians relative to the Bragg angle includes. The method of claim 276, wherein the first and second converters to frequency drivers with different ranges react. AOM suitable for placement along a beam path between a laser and a workpiece, the AOM having a beam entrance surface, a beam exit surface and a first transducer disposed on a first transducer surface of the AOM, the first transducer surface being in a first Plane is transversal to the beam entrance surface and the first transducer is adapted to modulate within a first transducer modulation region passing through the beam path to affect a first deflection angle of the beam path along a first Cartesian axis, comprising: a second transducer; disposed on a second transducer surface of the AOM, the second transducer surface being in a second plane transverse to the beam entry surface, the second transducer adapted to modulate within a second transducer modulation range passes through the beam path to cause a second deflection angle of the beam path along the first Cartesian axis, the second transducer spatially separated and with a small angle be aligned with the first transducer so that the first and second transducer modulation regions are not parallel. AOM according to claim 286, wherein the first and second Transducer modulation range are not overlapping. AOM according to claim 286, wherein the first and second Plane are transversal, with the beam entrance surface and the jet exit surface Having planes that are not parallel, wherein the first transducer modulation area is generally parallel to the jet entry surface and wherein the second transducer modulation range is generally parallel to the jet exit surface is. AOM according to claim 286, wherein the small angle from about 0.1 degrees to about 3 degrees. AOM according to claim 289, wherein the small angle from about 0.5 degrees to about 2.5 degrees. AOM according to claim 286, wherein the AOM is a part an AOM control system, further comprising: one first RF driver comprising a variable frequency control part or the connected to a first frequency of a first RF signal to be applied to the first converter to the first converter modulation area The first frequency is a deflection propagation direction of the beam path emanating from the radiation exit surface; and a second RF driver comprising a variable-gain controller Frequency, or in conjunction, to a second frequency of one second RF signal to the second transducer to the second To modulate converter modulation axis, wherein the second Fre quenz affect the cooperative deflection angle of the laser beam would, emerging from the jet exit surface, the deflection propagation direction from the simultaneous application of the first and second RF signals results. AOM according to claim 291, wherein the AOM comprises a Beam position control is connected to the first and second Coordinate frequency to deflect the beam path with the AOM, around on the workpiece at the desired Beam position, resulting from the deflection propagation direction results. AOM according to claim 291, wherein the first and second RF driver separate RF driver form. AOM according to claim 291, wherein the first and second RF drivers include different frequency ranges. AOM according to claim 291, wherein the first and second Frequency are different. AOM according to claim 291, wherein the AOM is a part forms a laser system. AOM according to claim 296, wherein the AOM is suitable for propagating a first order beam path as a working beam path. AOM according to claim 296, wherein the AOM is suitable for striking through the beam path with an entrance angle, the re the radiation entrance surface or the first transducer modulation range is a Bragg angle or close to it. AOM according to claim 298, wherein the deflection angle has a range of up to at least 100 milliradians relative to the Bragg angle includes. AOM according to claim 286, wherein the first transducer to a high-frequency driver for a large Bragg angle range responds and the second converter to a driver with lower Frequency for a smaller Bragg angular range responds. The AOM of claim 296, wherein the AOM is adapted to cause small ranges of relative beam control movement between the beam path and the workpiece, and the first and second transducers control the small ranges of relative beam control movement of the AOM in response to quick shift control signals, further comprising: a slow one Interlocking to effect a large range of relative movement between the beam lengang and the workpiece, wherein the slow interlocking comprises a translation stage, which is able to move generally along a translation axis; a positioning signal processor for deriving fine adjustment and rapid adjustment control signals from the positioning command; a slow interlocking driver for controlling the large range of relative beam control movement of the translation stage in response to the fine adjustment control signal such that coordination of the AOM with the slow interlocking deflects the beam path to impact a workpiece at a desired beam position. AOM according to claim 301, wherein the laser beam is at least comprises different first and second wavelengths and wherein the first frequency the first wavelength and the second frequency modulates the second wavelength. AOM according to claim 302, wherein the first and second Frequency are set to bend the first and second wavelength, to propagate generally along the same beam path. AOM according to claim 303, wherein the first and second wavelength Broken at or near angles that are a Bragg condition suffice. AOM according to claim 286, wherein the second transducer one of several corresponding converters, so that each one the corresponding transducer to a corresponding frequency of a corresponding RF signal responds to the corresponding transducer is applied, which at a corresponding transducer surface of the AOM is arranged, with the corresponding transducer surface itself in a corresponding plane which is transverse to the beam entrance surface, being the corresponding transducers at appropriate distances are arranged, which increase from the beam entry surface, and the corresponding transducers within a corresponding transducer modulation range modulate that pass through the beam path to a corresponding Deflection angle of the beam path along the first workpiece axis to influence, with the corresponding transducer spatially separated and aligned at a corresponding small angle with respect to the first transducer is such that the first and the corresponding transducer modulation range are not parallel. AOM according to claim 305, wherein the corresponding small angle decreases as the corresponding Enlarge distances. AOM according to claim 306, wherein the corresponding Reduce frequencies while the corresponding distances increase. AOM according to claim 305, wherein at least two of the corresponding small angle are different. AOM according to claim 308, wherein the corresponding, with different small angles aligned transducer by RF driver be excited, which have different frequency ranges. AOM according to claim 305, wherein one of the corresponding Converter modulation areas, a second converter modulation area is one of the corresponding transducer modulation areas a third converter modulation range, which consists of a third small angle of a third transducer, the second transducer modulation range arranged between the first and third transducer modulation area and wherein the third small angle is greater than the small angle of the second converter. AOM according to claim 305, wherein the jet entry surface and the jet exit surface Have planes that are parallel. AOM according to claim 305, wherein the jet exit surface is located in a rear plane, which is in an end face acting Angle is located to a front plane of the jet entry surface, wherein the end face acting Angle averages 90 degrees and corresponding sums of 90 degrees ± the small angle of corresponding converter. AOM according to claim 305, wherein one of the corresponding small angles comprises a maximum tilt angle, wherein the beam exit surface is located in a rear plane which is in an end surface acting angle to a front plane of the beam exit surface, wherein the Stirnflä chenwirkende angle is less than 90 degrees ± the largest tilt angle. AOM according to claim 286, further comprising: one third transducer mounted on a third transducer surface of the AOM is arranged, wherein the third transducer surface is located in a third plane which is transverse to the beam entry surface, wherein the third converter is adapted to modulate within a third transducer modulation region, the beam path goes through and intersects with the first converter modulation area to one third deflection angle of the beam path along a second To influence Cartesian axis; and a fourth transducer, which is arranged on a fourth transducer surface of the AOM, the fourth transducer surface is in a fourth plane that is transverse to the beam entry surface, wherein the fourth transducer is adapted for modulating within a fourth transducer modulation region, which the beam path goes through and crosses the second converter modulation area to a fourth Deflection angle of the beam path along the second Cartesian Axis influence, with the fourth transducer spatially separated and with a small tilt angle with respect to the third transducer is aligned, so that the third and fourth transducer modulation range are not parallel. AOM according to claim 314, wherein the small angle and the tilt angle are different. AOM according to claim 314, wherein the small angle and the tilt angle are about the same. AOM according to claim 314, wherein the third and fourth Plane are transversal, wherein the third transducer modulation range is generally parallel to the beam entrance surface and the fourth transducer modulation range generally in parallel to the jet exit surface. Method for increasing the performance of an AOM, the for the arrangement along a beam path between a laser and a workpiece is suitable, wherein the AOM a jet entrance surface, a Beam exit surface and a first transducer disposed on a first transducer surface of the AOM is arranged, wherein the first transducer surface is in a first plane which is transverse to the beam entry surface, full: Generating a laser beam along a beam path, on a workpiece meets; Propagating the laser beam through the AOM, moving along the beam path is arranged; Controlling a first frequency a first RF signal applied to the first transducer, which modulates within a first transducer modulation range, which goes through the ray path, a first deflection angle of the beam path along a first workpiece axis in terms of a surface of the workpiece to influence; Controlling a second frequency of a second RF signal, which is applied to a second converter, which on a second transducer surface the AOM is arranged, wherein the second transducer surface is located in a second plane which is transverse to the beam entry surface and the second converter within a second converter modulation range modulated passing through the beam path to a second deflection angle to influence the beam path along the first workpiece axis, wherein the second transducer spatially separated and with a small angle with respect to the first wall lers so is aligned, that the first and second transducer modulation area are not parallel; and Coordinate the frequencies of the first and second RF signal to deflect the laser beam to the workpiece at a desired Laser position arising from a cooperative deflection angle results, which results from the first and second deflection angle, which was awarded by the first and second RF signals.