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DE60226452D1 - Verfahren zur herstellung eines thermooptischen-wellenleiterschalters, routers und abschwächers - Google Patents

Verfahren zur herstellung eines thermooptischen-wellenleiterschalters, routers und abschwächers

Info

Publication number
DE60226452D1
DE60226452D1 DE60226452T DE60226452T DE60226452D1 DE 60226452 D1 DE60226452 D1 DE 60226452D1 DE 60226452 T DE60226452 T DE 60226452T DE 60226452 T DE60226452 T DE 60226452T DE 60226452 D1 DE60226452 D1 DE 60226452D1
Authority
DE
Germany
Prior art keywords
layers
devices
refractive index
cladding layer
heater material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60226452T
Other languages
English (en)
Inventor
Anisul Khan
Ajay Kumar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of DE60226452D1 publication Critical patent/DE60226452D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31—Digital deflection, i.e. optical switching
    • G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)
  • Thermally Actuated Switches (AREA)
  • Switches With Compound Operations (AREA)
  • Manufacture Of Motors, Generators (AREA)
DE60226452T 2001-07-16 2002-07-16 Verfahren zur herstellung eines thermooptischen-wellenleiterschalters, routers und abschwächers Expired - Lifetime DE60226452D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/907,183 US6954561B1 (en) 2001-07-16 2001-07-16 Methods for forming thermo-optic switches, routers and attenuators
PCT/US2002/022798 WO2003036369A1 (en) 2001-07-16 2002-07-16 Methods for forming thermo-optic switches, routers and attenuators

Publications (1)

Publication Number Publication Date
DE60226452D1 true DE60226452D1 (de) 2008-06-19

Family

ID=25423654

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60226452T Expired - Lifetime DE60226452D1 (de) 2001-07-16 2002-07-16 Verfahren zur herstellung eines thermooptischen-wellenleiterschalters, routers und abschwächers

Country Status (5)

Country Link
US (1) US6954561B1 (de)
EP (1) EP1417532B1 (de)
AT (1) ATE394701T1 (de)
DE (1) DE60226452D1 (de)
WO (1) WO2003036369A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7072534B2 (en) 2002-07-22 2006-07-04 Applied Materials, Inc. Optical ready substrates
US7043106B2 (en) 2002-07-22 2006-05-09 Applied Materials, Inc. Optical ready wafers
US7110629B2 (en) 2002-07-22 2006-09-19 Applied Materials, Inc. Optical ready substrates
WO2004106986A2 (en) 2003-05-29 2004-12-09 Applied Materials Inc. Maskless fabrication of waveguide mirrors
US7529435B2 (en) 2003-05-29 2009-05-05 Applied Materials, Inc. Serial routing of optical signals
US20050016446A1 (en) 2003-07-23 2005-01-27 Abbott John S. CaF2 lenses with reduced birefringence
KR100927594B1 (ko) * 2006-12-05 2009-11-23 한국전자통신연구원 평판형 광도파로(ｐｌｃ) 소자, 그 소자를 포함한 파장가변 광원 및 그 광원을 이용한 ｗｄｍ-ｐｏｎ
JP2008276000A (ja) * 2007-05-01 2008-11-13 Nitto Denko Corp 光導波路
US8078013B2 (en) * 2009-03-31 2011-12-13 Oracle America, Inc. Dual-layer thermally tuned optical device
US9664852B1 (en) * 2016-09-30 2017-05-30 Nanya Technology Corporation Optical waveguide having several dielectric layers and at least one metal cladding layer
FR3100082A1 (fr) * 2019-08-19 2021-02-26 Stmicroelectronics (Crolles 2) Sas Modulateur de phase
KR102435768B1 (ko) * 2019-10-30 2022-08-23 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 변조기 디바이스의 열 효율을 향상시키도록 구성된 히터 구조체
US11209673B2 (en) 2019-10-30 2021-12-28 Taiwan Semiconductor Manufacturing Company, Ltd. Heater structure configured to improve thermal efficiency in a modulator device
CN114089598A (zh) * 2022-01-24 2022-02-25 浙江光特科技有限公司 半导体器件的制造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2672398B1 (fr) * 1991-02-01 1993-11-19 Alcatel Nv Dispositif electro-optique a guide d'onde.
US5178728A (en) * 1991-03-28 1993-01-12 Texas Instruments Incorporated Integrated-optic waveguide devices and method
DE19644619A1 (de) * 1996-10-21 1998-04-23 Siemens Ag Halbleiterkörper mit Heizeinrichtung zum Beeinflussen von Licht
JPH1115028A (ja) * 1997-06-19 1999-01-22 Nippon Telegr & Teleph Corp <Ntt> 高分子熱光学光スイッチ
JP3868122B2 (ja) * 1998-08-12 2007-01-17 日本電信電話株式会社 熱光学光変調器
US6240226B1 (en) * 1998-08-13 2001-05-29 Lucent Technologies Inc. Polymer material and method for optical switching and modulation
EP0987580A1 (de) * 1998-09-16 2000-03-22 Akzo Nobel N.V. Optischer Intensitätsmodulator und diesen enthaltender Schalter
JP2000162460A (ja) * 1998-11-27 2000-06-16 Sharp Corp 有機光導波路およびその製造方法並びにそれを用いた光学部品
US6351578B1 (en) * 1999-08-06 2002-02-26 Gemfire Corporation Thermo-optic switch having fast rise-time
CN1176389C (zh) * 1999-09-08 2004-11-17 康宁股份有限公司 混合集成的光添加/去除多路复用器
US6408111B1 (en) * 2000-04-04 2002-06-18 Agere Systems Guardian Corp. Phase shifters with reduced thermal crosstalk

Also Published As

Publication number Publication date
US6954561B1 (en) 2005-10-11
EP1417532B1 (de) 2008-05-07
WO2003036369A1 (en) 2003-05-01
ATE394701T1 (de) 2008-05-15
EP1417532A1 (de) 2004-05-12

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