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DE69414136D1 - Mikrostruktarierter festkörpermassenspektrograph für verwendung als sensor für einen gasdetektor - Google Patents

Mikrostruktarierter festkörpermassenspektrograph für verwendung als sensor für einen gasdetektor

Info

Publication number
DE69414136D1
DE69414136D1 DE69414136T DE69414136T DE69414136D1 DE 69414136 D1 DE69414136 D1 DE 69414136D1 DE 69414136 T DE69414136 T DE 69414136T DE 69414136 T DE69414136 T DE 69414136T DE 69414136 D1 DE69414136 D1 DE 69414136D1
Authority
DE
Germany
Prior art keywords
sensor
gas detector
solid mass
mass spectrograph
microstructured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69414136T
Other languages
English (en)
Inventor
Carl Friedhoff
Robert Young
Saptharishi Sriram
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Corp
Original Assignee
Northrop Grumman Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Priority claimed from PCT/US1994/013509 external-priority patent/WO1996016430A1/en
Application granted granted Critical
Publication of DE69414136D1 publication Critical patent/DE69414136D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
    • H01J49/288—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE69414136T 1994-11-22 1994-11-22 Mikrostruktarierter festkörpermassenspektrograph für verwendung als sensor für einen gasdetektor Expired - Lifetime DE69414136D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1994/013509 WO1996016430A1 (en) 1993-09-22 1994-11-22 Solid state micro-machined mass spectrograph universal gas detection sensor

Publications (1)

Publication Number Publication Date
DE69414136D1 true DE69414136D1 (de) 1998-11-26

Family

ID=22243314

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69414136T Expired - Lifetime DE69414136D1 (de) 1994-11-22 1994-11-22 Mikrostruktarierter festkörpermassenspektrograph für verwendung als sensor für einen gasdetektor

Country Status (5)

Country Link
EP (1) EP0745268B1 (de)
JP (1) JPH09511614A (de)
KR (1) KR970700931A (de)
AU (1) AU687960B2 (de)
DE (1) DE69414136D1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2438892A (en) * 2006-06-08 2007-12-12 Microsaic Systems Ltd Microengineered vacuum interface for an electrospray ionization system
EP1959476A1 (de) * 2007-02-19 2008-08-20 Technische Universität Hamburg-Harburg Massenspektrometer
CN107180740A (zh) * 2017-04-26 2017-09-19 上海交通大学 提高空间分辨率的二维角分辨质子谱仪
WO2019178649A1 (en) * 2018-03-23 2019-09-26 ETP Ion Detect Pty Ltd Particle detector having improved performance and service life
US10948456B1 (en) * 2019-11-27 2021-03-16 Mks Instruments, Inc. Gas analyzer system with ion source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5304799A (en) * 1992-07-17 1994-04-19 Monitor Group, Inc. Cycloidal mass spectrometer and ionizer for use therein
US5386115A (en) * 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5401963A (en) * 1993-11-01 1995-03-28 Rosemount Analytical Inc. Micromachined mass spectrometer

Also Published As

Publication number Publication date
AU1259195A (en) 1996-06-17
EP0745268A1 (de) 1996-12-04
JPH09511614A (ja) 1997-11-18
EP0745268B1 (de) 1998-10-21
KR970700931A (ko) 1997-02-12
AU687960B2 (en) 1998-03-05

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Legal Events

Date Code Title Description
8332 No legal effect for de