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DE69522241D1 - Datenerfassungs- und steueranlage für rastenprobenmikroskop - Google Patents

Datenerfassungs- und steueranlage für rastenprobenmikroskop

Info

Publication number
DE69522241D1
DE69522241D1 DE69522241T DE69522241T DE69522241D1 DE 69522241 D1 DE69522241 D1 DE 69522241D1 DE 69522241 T DE69522241 T DE 69522241T DE 69522241 T DE69522241 T DE 69522241T DE 69522241 D1 DE69522241 D1 DE 69522241D1
Authority
DE
Germany
Prior art keywords
control system
data acquisition
rear sample
sample microscope
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69522241T
Other languages
English (en)
Other versions
DE69522241T2 (de
Inventor
Karl Binnig
Walter Haeberle
Josef Scheich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69522241D1 publication Critical patent/DE69522241D1/de
Application granted granted Critical
Publication of DE69522241T2 publication Critical patent/DE69522241T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52023—Details of receivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52023—Details of receivers
    • G01S7/52034—Data rate converters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52053—Display arrangements
    • G01S7/52057—Cathode ray tube displays
    • G01S7/52074—Composite displays, e.g. split-screen displays; Combination of multiple images or of images and alphanumeric tabular information
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69522241T 1995-05-13 1995-05-13 Datenerfassungs- und steueranlage für rastenprobenmikroskop Expired - Lifetime DE69522241T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1995/001821 WO1996035943A1 (en) 1995-05-13 1995-05-13 Data acquisition and control apparatus for scanning probe systems

Publications (2)

Publication Number Publication Date
DE69522241D1 true DE69522241D1 (de) 2001-09-20
DE69522241T2 DE69522241T2 (de) 2002-05-02

Family

ID=8166018

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69522241T Expired - Lifetime DE69522241T2 (de) 1995-05-13 1995-05-13 Datenerfassungs- und steueranlage für rastenprobenmikroskop

Country Status (5)

Country Link
US (1) US5877497A (de)
EP (1) EP0826145B1 (de)
JP (1) JP3297054B2 (de)
DE (1) DE69522241T2 (de)
WO (1) WO1996035943A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6200022B1 (en) * 1997-04-21 2001-03-13 Ta Instruments, Inc. Method and apparatus for localized dynamic mechano-thermal analysis with scanning probe microscopy
JP2952327B2 (ja) * 1997-07-16 1999-09-27 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
US6249747B1 (en) * 1997-07-17 2001-06-19 International Business Machines Corporation Investigation and/or manipulation device
JP3478955B2 (ja) 1997-09-29 2003-12-15 日本電子株式会社 トンネル電流検出装置における疑似電流防止装置
JP3723681B2 (ja) * 1998-03-11 2005-12-07 株式会社島津製作所 微小材料試験装置
US6370487B1 (en) 1998-04-23 2002-04-09 Micron Technology, Inc. Remote semiconductor microscopy
US7260051B1 (en) * 1998-12-18 2007-08-21 Nanochip, Inc. Molecular memory medium and molecular memory integrated circuit
US6556956B1 (en) * 2000-06-30 2003-04-29 General Electric Company Data acquisition unit for remote monitoring system and method for remote monitoring
GB0028134D0 (en) * 2000-11-17 2001-01-03 Texas Instruments Ltd Improvements in or relating to systems for data transmission
US20020138301A1 (en) * 2001-03-22 2002-09-26 Thanos Karras Integration of a portal into an application service provider data archive and/or web based viewer
US7233517B2 (en) 2002-10-15 2007-06-19 Nanochip, Inc. Atomic probes and media for high density data storage
US7041963B2 (en) * 2003-11-26 2006-05-09 Massachusetts Institute Of Technology Height calibration of scanning probe microscope actuators
US20050243660A1 (en) * 2004-04-16 2005-11-03 Rust Thomas F Methods for erasing bit cells in a high density data storage device
US7367119B2 (en) 2005-06-24 2008-05-06 Nanochip, Inc. Method for forming a reinforced tip for a probe storage device
US20070041237A1 (en) * 2005-07-08 2007-02-22 Nanochip, Inc. Media for writing highly resolved domains
US7463573B2 (en) * 2005-06-24 2008-12-09 Nanochip, Inc. Patterned media for a high density data storage device
US7309630B2 (en) 2005-07-08 2007-12-18 Nanochip, Inc. Method for forming patterned media for a high density data storage device
US20070008866A1 (en) * 2005-07-08 2007-01-11 Nanochip, Inc. Methods for writing and reading in a polarity-dependent memory switch media
US7207119B1 (en) * 2005-12-08 2007-04-24 International Business Machines Corporation Controller
US20080175033A1 (en) * 2007-01-19 2008-07-24 Nanochip, Inc. Method and system for improving domain stability in a ferroelectric media
US20080233672A1 (en) * 2007-03-20 2008-09-25 Nanochip, Inc. Method of integrating mems structures and cmos structures using oxide fusion bonding
US20090129246A1 (en) * 2007-11-21 2009-05-21 Nanochip, Inc. Environmental management of a probe storage device
RU2428700C2 (ru) * 2007-12-11 2011-09-10 ЗАО "Нанотехнология-МДТ" Блок управления для сканирующих зондовых микроскопов
US20100039729A1 (en) * 2008-08-14 2010-02-18 Nanochip, Inc. Package with integrated magnets for electromagnetically-actuated probe-storage device
US20120047610A1 (en) * 2010-04-09 2012-02-23 Boise State University Cantilever-based optical interface force microscope
WO2012071560A1 (en) * 2010-11-24 2012-05-31 Hysitron, Inc. Mechanical testing instruments including onboard data

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4259725A (en) * 1979-03-01 1981-03-31 General Electric Company Cursor generator for use in computerized tomography and other image display systems
US4398211A (en) * 1981-01-07 1983-08-09 Young Ian T Solid state optical microscope
EP0163664A4 (de) * 1983-11-10 1987-01-10 Acoustec Partners Ultraschall-diagnose-vorrichtung.
JP2880182B2 (ja) * 1989-06-09 1999-04-05 株式会社日立製作所 表面顕微鏡
JP2588050B2 (ja) * 1990-06-29 1997-03-05 日立建機株式会社 超音波映像検査装置
US5212383A (en) * 1991-07-29 1993-05-18 David Scharf Color synthesizing scanning electron microscope
JP3187148B2 (ja) * 1991-08-26 2001-07-11 株式会社東芝 超音波診断装置
AU3794893A (en) * 1992-03-13 1993-10-05 Park Scientific Instruments Corp. Scanning probe microscope

Also Published As

Publication number Publication date
JPH10507273A (ja) 1998-07-14
JP3297054B2 (ja) 2002-07-02
DE69522241T2 (de) 2002-05-02
US5877497A (en) 1999-03-02
EP0826145B1 (de) 2001-08-16
EP0826145A1 (de) 1998-03-04
WO1996035943A1 (en) 1996-11-14

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Legal Events

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8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)