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EP1194959A2 - Dispositif de reglage destine a deplacer differents elements de systemes optiques ou de systemes de mesure - Google Patents

Dispositif de reglage destine a deplacer differents elements de systemes optiques ou de systemes de mesure

Info

Publication number
EP1194959A2
EP1194959A2 EP01913884A EP01913884A EP1194959A2 EP 1194959 A2 EP1194959 A2 EP 1194959A2 EP 01913884 A EP01913884 A EP 01913884A EP 01913884 A EP01913884 A EP 01913884A EP 1194959 A2 EP1194959 A2 EP 1194959A2
Authority
EP
European Patent Office
Prior art keywords
plate
adjusting device
spring
actuator
displaced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01913884A
Other languages
German (de)
English (en)
Inventor
Karlheinz Bartzke
Stefan Mack
Matthias Burkhardt
Thomas Hartmann
Reinhard Steiner
Peter Dittrich
Karl-Heinz Klopfleisch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Carl Zeiss Jena GmbH
Original Assignee
VEB Carl Zeiss Jena GmbH
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH, Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of EP1194959A2 publication Critical patent/EP1194959A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism

Definitions

  • Adjustment device for moving individual elements of optical systems or
  • the invention relates to an adjusting device for displacing individual elements of optical systems or measuring systems, the element to be displaced being movable on a base along a predetermined direction by means of a piezoelectric actuator arrangement.
  • Adjustment devices which are used to move individual elements of optical systems or measuring systems on a support along a predetermined direction, are used in various fields, such as, for. B. in optical devices (for moving lenses or diaphragms in the millimeter range or in an even smaller adjustment range) or also used in precision measuring devices for positioning objects with nanometer precision.
  • DE 40 23 311 A describes an adjusting device for micro movements, in which the drive is achieved by means of a piezo transducer using the shear effect, the drive elements comprising this piezo transducer not only the movement of the one lying against them Effect the object, but also guide it in the direction of movement.
  • the object is pressed against the (piezo) drive element with a predetermined force by means of a pressing device.
  • the drive can take place in such a way that the piezo transducer executes the shear movement slowly and takes the lying object with it, while the return movement of the piezo transducer is carried out quickly while overcoming the friction between it and the object.
  • the piezo transducer can also be controlled in reverse, namely that first a fast shearing movement (overcoming the friction) is carried out, in which the object does not move due to its inertia, followed by a slow return movement, in which the object is in this return direction is taken away.
  • this known drive it is possible to use this known drive to move the object not only in one direction but also in the opposite direction.
  • the (piezo) drive elements have supports on their upper side, which are provided with ball seats for balls, the movable object resting on the balls.
  • the disadvantage here is that the sliding friction on the ball elements results in downforce, which means that the functionality is impaired over a long period of use.
  • the achievable adjustment speed of the object is also relatively low.
  • a drive device for an object is known from DE 691 25 974 T2 and also from US Pat. No. 5,225,941 A, which is slidably guided on a rod, which in turn can be excited with a piezo actuator to expand or contract in its longitudinal direction.
  • slow expansion and rapid contraction of the rod can be achieved by suitable control of the piezo actuator, with the result that the object is carried along as a result of the frictional forces during slow expansion, whereas the object as a result of rapid contraction while overcoming the frictional forces its inertia remains in place.
  • This allows a gradual movement of the object in the longitudinal direction, and if the piezo element is actuated in opposite directions (for rapid expansion and slow contraction), it can also be driven in the opposite direction.
  • the design effort is comparatively high in this known construction and a large number of individual arrangement elements must be provided.
  • the adjustment range between the two bearing points of the slide rod is relatively limited with regard to larger adjustment paths.
  • the object of the invention is to propose an improved adjustment device for moving individual elements for optical systems or for measuring systems, which ensures particularly rapid adjustment over a wide adjustment range with the greatest possible precision and which is inexpensive to manufacture and simple in construction.
  • an adjusting device for displacing individual elements of optical systems or measuring systems the element to be displaced is movable on a support along a predetermined direction by means of a piezoelectric actuator arrangement which is carried by the element and which is designed and controllable in such a way that it exerts shock pulses on the support in order to carry out a gradual movement of the element on the support, the element in a body , which has an open or a closed hollow cross section, is attached and is frictionally supported on this at least at one point with the interposition of a prestressed spring device.
  • the body preferably has a U-shaped cross section or a circular hollow cross section.
  • the piezoelectric actuator arrangement is itself carried by the element to be displaced and is designed and controllable in such a way that shock impulses are exerted on the element itself by the piezoelectric deflections.
  • the piezoelectric actuator is carried by the element itself means that the element carries all the devices of its piezoelectric drive itself, which is why it basically has an arbitrarily large adjustment range. Because as long as the piezoelectric actuator emits its shock impulses, the element can basically be moved in the direction in question, so that when using the adjustment device according to the invention, a very large adjustment path can also be easily realized.
  • a frictional force is first generated which, in the configured state of the actuator arrangement, serves to fix the position of the element to be moved and ensures that once a position has been reached, it does not undesirably again changes. It is thus also possible to carry out adjustment movements in the direction of or 'under an inclination to gravity with the adjustment arrangement according to the invention. B. to adjust an element in a vertical pipe from bottom to top (or vice versa). By means of the spring it can easily be ensured that the element then also remains in this position when a certain adjustment position is reached, even if gravity acts continuously, whereby equally large adjustment steps can be achieved in ascending as well as in descending direction. The only requirement here is that the friction force occurring is in any case greater than the maximum load force of the actuator.
  • the element to be displaced has a plate, the shape of which is essentially adapted to the inner cross section of the body and in which the prestressed spring device consists of an at least partially extending strip along the outer circumference of the plate, which preferably extends laterally over the front and the back of the plate has protruding, spaced-apart spring tongues which, starting from the strip, run obliquely in the direction of the associated inner wall of the body and bear against it under spring pressure.
  • a further second plate arranged parallel to the displacing element is also provided, the shape of which also essentially corresponds to the inner shape of the hollow cross-section of the body, but which is not provided with a spring device and is connected to the element to be displaced via a tubular piezo actuator ,
  • a piezoelectric plate actuator extending parallel to the respective side face of the body with one of the plates Is attached ends, wherein the other ends of the two piezoelectric plate actuators are in turn attached to the second plate arranged parallel to the element to be displaced.
  • the inertial body namely the element to be moved
  • the piezo actuator piezo tube or the two piezo plates
  • the element in the form of a plate and / or the second plate has a receptacle for holding z.
  • a very particularly preferred embodiment of the invention also consists in that a measuring head for scanning a measuring tape, a bar code or the like is attached to the element to be displaced, preferably on the end surface lying at the front or back in the direction of travel, which in turn is a very good thing represents a simple constructive solution that is also inexpensive to manufacture.
  • a further preferred embodiment of the adjusting device according to the invention is that the body is formed from a plate, on the two plate surfaces of which a siGh plate-type piezo actuator which is arranged essentially perpendicular to the respective plate surface is fastened and which, when loaded with its end projecting from the plate in the desired direction of movement of the plate can be deflected.
  • a mass body is preferably attached to the free ends of the two plate actuators (each protruding on one side of the body), with, again preferably, the two plate actuators and the mass bodies attached to their free ends having an arrangement symmetrical to the longitudinal center plane of the plate ,
  • the two piezo actuators can preferably also be from one Plate actuator are formed, which is passed through the plate and protrudes on both sides.
  • the element to be displaced is essentially tubular (it can be formed, for example, by a lens arrangement), arranged concentrically in the likewise essentially tubular body and at one axial end attached to a radially enlarged guide disc, the interposition of at least one
  • the spring element is supported radially on the inner surface of the tubular body, the piezoelectric actuator being designed here as a disk-shaped piezo actuator which, in turn, is also arranged radially on the spring with the interposition of at least one spring element
  • the inner surface of the tubular body is supported.
  • the disk-shaped piezo actuator is very particularly preferred on one axial side via an elastic tubular one
  • Coupling member connected to the element to be displaced, wherein it preferably also carries a mass arranged concentrically on it on its side axially opposite the element to be moved.
  • This embodiment of the invention provides a very precise, excellent adjustment for z. B. lens systems that impress with their simple structure and excellent effectiveness.
  • FIG. 1 shows a perspective illustration of the principle of a first embodiment of an adjustment device according to the invention
  • FIG. 2 shows a further embodiment of an adjustment device according to the invention similar to that from FIG. 1, but here coupled with a displacement measuring system;
  • FIG. 3 shows a (partially sectioned) embodiment of a further adjustment device according to the invention in connection with a position measuring system
  • 4 shows a (partially cut) perspective view of yet another embodiment of an adjustment device according to the invention with a displacement measuring system
  • 5 shows the graph of the voltage curve of the excitation voltage for the piezo drive of an adjustment device according to the invention with a sawtooth-shaped voltage change, and the graph of the associated deflection of the piezo element, in each case over time
  • FIG. 6 shows a further embodiment of an adjustment device according to the invention with disk-shaped piezo actuators.
  • FIG. 1 a schematic representation of a Verstellvomchtung invention is shown in an oblique perspective.
  • An element 2 to be adjusted or moved in the form of a plate 2 rests on a base 1.
  • the base 1 is designed as a flat base, which forms a recess 3, within which the plate-shaped element 2 lies.
  • the width of the recess 3 is chosen so that the lateral boundary walls of the recess 3 serve as lateral guide walls for the plate-shaped element 2 (with the interposition of lateral support springs, see below), thus on both its underside and on its two Side surfaces of the base 1 in the form of an upwardly open hollow cross section is included.
  • “Hollow cross section” is understood to mean a cross section which ensures that the plate-shaped element 2 is supported on at least three sides thereof.
  • the plate-shaped element 2 is to be moved in the longitudinal direction of the recess 3, namely in the direction x indicated by the arrow or in the opposite direction -x.
  • a plate-shaped piezo-bending actuator 4 is provided, approximately in the middle of the plate-shaped element 2 (seen in its extension in the direction of movement x), which runs through the plate-shaped element 2 and protrudes on both sides thereof by an equally large distance f.
  • a mass 5 or 6 is attached, which is shown in the drawing of FIG. 1 only in principle in the form of a cylindrical body extending over the length of the relevant end.
  • This piezoelectric bending plate actuator (piezo element) 4 is shown as a piezoelectric bender, known as a "bimorph", and has a thickness e.
  • the piezo element 4 could also be designed as a unimorph or as a multimorph, the latter consisting of a plurality of right and left polarized piezo foils, which are arranged alternately next to one another and form a left and a right foil stack, between which an insulating foil is arranged.
  • a voltage UA which is varied in a suitable manner, is applied to the piezo element 4, as is shown in principle only in FIG. 1, in order to vary the piezo actuator 4 on both sides of the to continuously deflect plate-shaped element 2 in the desired direction of adjustment (and to return it to the starting position).
  • a suitable voltage selection both a movement in direction x and in the opposite direction -x can be achieved;
  • the actuating step of element 2 is only a fraction of the swing-out range of piezo actuator 4.
  • the piezo actuator is operated in resonance, depending on the type, with short frequencies in the range from 5 to 50 kHz, the control voltages being 6 to 40 V.
  • the step size of known piezo actuators is 0.2 ⁇ m and their actuating speed is approximately 10 mm / s.
  • Known piezo actuators that can be used here can move masses of up to a maximum of 100 g (also vertically).
  • the plate-shaped element 2 is laterally on its two long sides
  • Spring tongues made of spring steel are preferably suitable for this purpose, which, viewed in the direction of movement, are relatively stiff, but can be elastically deformed perpendicularly to the direction of movement.
  • the bias of the spring tongues 8 is selected in the installed state so that the friction force occurring between them and the side walls of the recess 3 and the friction force occurring at the bottom of the recess 3 with the plate-shaped element 2 is greater than the load weight of the plate-shaped element 2 with it attached piezo actuator 4 and its weights 5, 6, so much larger that the friction occurring during a movement of the element 2, which is smaller, still exceeds the load weight of the element 2 with parts attached to it.
  • the piezo actuator 4 can be activated in different ways:
  • the electrical actuation of the piezo actuator 4 can be carried out in any suitable manner, for. B. with sawtooth pulses (see. Fig. 5) or z. B. by means of suitable rectangular pulses.
  • sawtooth pulses see. Fig. 5
  • z. B. by means of suitable rectangular pulses.
  • the steep flank as a result of a high acceleration of the piezo element 4 (which must be able to overcome the static friction) effects the actuating step, while on the flat flank as a result of the low acceleration (which cannot overcome static friction) no adjustment step occurs.
  • the deflection of the piezoelectric element y is also plotted against the time t, showing the course of the voltage U over the time t.
  • the relatively flat edge of the sawtooth tension in the system that was initially at rest causes a moderate acceleration in the center of gravity of the inertial mass, the acceleration force generally remaining below the frictional force and therefore no movement occurring.
  • phase IV a new cycle is started in phase IV after the next positive sawtooth tip has been reached, provided the pulse train continues.
  • Fig. 1 further shows that an opening 9 is formed on the bottom 7 of the recess 3, the width of which is slightly larger than the width of the piezo actuator 4. In this way, the piezo actuator can protrude on both sides of the element 2 to be moved without the mobility of the element 2 being impaired thereby.
  • FIG. 2 shows in principle an almost the same arrangement as that from FIG. 1, but here the plate-shaped element 2 to be moved is coupled to a displacement measuring system 10.
  • the piezoelectric actuator 4 is no longer attached to the plate-shaped element 2 in the middle (as viewed with respect to the longitudinal extent of the element 2), but in its direction of movement x front area, in such a way that (as shown in FIG. 2) the piezo actuator 4 is located approximately in the middle of the longitudinal extent of the element 2, which lies outside the bridge 11.
  • a further change compared to the embodiment according to FIG. 1 also consists in the fact that in the arrangement according to FIG. 1, a prestressed resilient pressing device is not mounted on both sides of the plate-shaped element 2, but only on one side thereof, against the side wall of the recess 3 located there.
  • this is a spring bar formed laterally on the plate-shaped element 2. 15, which is provided here on its side facing the side wall of the recess 3 with a thickened nose 16 which rests resiliently against this side wall.
  • the spring bar 15 is formed as a thin side wall of an opening in the element 2, as shown in FIG. 2.
  • a bridge 11 with a Hall probe 12 is attached here on the base 1.
  • a permanent magnet 13 is attached to the top of the element 2 to be moved by means of a suitable connection 14. With this measuring arrangement, the relative movement between the element 2 and the base 1 can be measured.
  • the pressure force FQ acting between the nose 16 and the side wall of the recess 3 arises from the elastic bending of the spring bar 15. In this way, defined, definable friction forces can be generated (which, of course, in addition to the friction forces on the other side of the plate-shaped element 2 with the there side surface of the base 1 and on its underside with the bottom of the recess 3, at least in the lateral areas in which a support takes place).
  • Fig. 3 shows a partially sectioned perspective illustration of a further embodiment of an adjusting device according to the invention, which is characterized by small and compact size, inexpensive to manufacture and a particularly quiet run.
  • the base 1 is designed in the form of a hollow profile (guide tube) which is rectangular in cross section and which is also open on one side (in the drawing according to FIG. 3: for example upwards) and z. B. can consist of a fiber-reinforced plastic.
  • the element 2 to be displaced is designed in the form of a plate which is essentially adapted to the inner cross section of the body or the base 1.
  • the pretensioned spring device with which the element 2 to be moved is supported on the base 1, is designed in the form of spring tongues 8 and 8 'attached to two opposite sides on the outer circumference of the plate-shaped element 2, each of which extends over the height protrude on this side extending central strips 18 on both sides, inclined at a slight angle to the facing side surface of the base 1 and supported there at its free ends.
  • the element 2 to be moved has a round opening, for. B. for holding a lens 19, for example with a diameter of 15 mm.
  • a second plate-shaped element 20 (made of brass) with the same shape is attached, which has no spring tongues on the sides on which the side spring tongues 8 are located in the plate-shaped element 2. Rather, these sides of the element 20 are not in contact with the facing side wall of the base 1, but form a small gap with it.
  • the plate-shaped elements 2 and 20, as shown in FIG. 3 in detail, are connected to one another at their end regions adjacent to the two facing side surfaces of the underlays 1 by means of two piezoelectric plate actuators 21 and 22, the piezo actuators 21 and 22 being parallel to the respective side walls of FIG Underlay 1 run and are each suitably attached to the elements 2 and 20 at their end faces.
  • a measuring head 23 e.g. a measuring light barrier
  • a coding 25 for example in the form of a bar code or else
  • the electrical pulses for the piezo plates 21, 22 are supplied by a control electronics 26, which in turn is connected to measuring electronics 35 connected to the measuring head 23, which triggers the sinusoidal displacement signal supplied by the measuring head.
  • This arrangement shown only in principle allows, for. B. a target position predeterminable by a device, not shown, for the element 2 to be adjusted.
  • FIG. 4 shows a further exemplary embodiment of an adjusting device according to the invention in the form of a piezoelectric linear drive module, which is coupled to a displacement measuring system.
  • An oblique perspective (with a partial sectional view) is selected for the display.
  • the lower layer 1 is here plate-shaped and carries, approximately in the middle, a coding 25 in the form of a grid scale (for example with a lattice constant of 20 ⁇ m).
  • a cover 27 with a U-shaped cross section is attached, which is penetrated on its side opposite the base 1 by a longitudinal slot 28 which extends in alignment with the coding strip 25.
  • an element 2 to be moved is provided which can be moved in the longitudinal direction of the overall arrangement, that is to say in the longitudinal direction of the gap 28, by means of a piezoelectric drive to be described in more detail below.
  • a measuring or reading head 23 is provided for scanning the coding 25.
  • a measuring head z.
  • a reflection light barrier or an optoelectronic transmitter and receiver can be used.
  • the cross-section of the element 2 is designed such that it essentially fills the free interior space between the cover 27 and the lower part 1 in cross-section and on its upper side with a protruding into the longitudinal slot 28 and preferably up to the outer surface of the corresponding side of the cover 27 outgoing block projection 29 is provided in which z.
  • the element 2 forming the sliding body has spring elements 8 and 8 ', both on its side facing the viewer and on its side facing the base 1, which are designed in the form of spring tongues , which extend from a median strip 18 in the direction of movement and counter to it and each protrude beyond the corresponding front or rear side of the displacement body 2.
  • These spring tongues 8 and 8 ' run inclined at a small angle to the facing contact surface (ie to the relevant one Side legs of the cover 27 or towards the base 1), where they rest with their end areas under resilient pressure.
  • This arrangement of the spring elements 8 and 8 ' makes it possible to achieve an excellent play-free displacement mounting of the displacement body 2.
  • the displacement body 2 is driven by a plate-shaped piezo actuator 31 which is fastened to the displacement body 2 on the side opposite the measuring head 25, runs parallel to the base 1 and carries a block-shaped mass or an inertial body 32 at its free end, which in turn, however, does not have its own resilient support with respect to the base 1 or the side walls of the cover 27 (as can also be seen in FIG. 4), but is freely attached to the end of the piezoelectric actuator 31.
  • a piezoelectric plate with top and bottom electrodes is preferably used as the piezo actuator 31, the dimensions of which length z. B. 8 mm, the width 16 mm and thickness 0.5 mm.
  • the electrical piezo actuator 31 and the measuring head 23 can be controlled via electrical connections 33, which, as shown in FIG. 4, are led out on the upper side of the displacement body 2, in a gap between the one side of the block projection 29 and the facing one Side of the longitudinal slot 28 is formed.
  • the spring tongues 8 and 8 ensure the desired frictional force (which is particularly important in the case of a vertical movement) and play-free guidance of the displacement body within the cavity formed by the cover 27 and the base 1.
  • the piezoelectric linear drive modules as shown in FIG. 3 or in FIG. 4, are very well suited for use with incremental position measuring systems, the production, which is very inexpensive because of the low cost of the piezo plate, and the simple structural solution being particularly remarkable. Both embodiments work largely silently, which is also a great advantage.
  • Fig. 6 is a schematic representation of a further adjusting device is shown, in which the body 1 forming the friction pad is designed as a sleeve-shaped tube, the illustration of Fig. 6 being made such that the sleeve-shaped body 1 is cut along a diameter that however, the adjustment device located therein is not shown in section, and everything is also shown in perspective.
  • a disk-shaped piezo element 40 is provided as the piezoelectric actuator, which is supported on the inner surface of the sleeve-shaped body 1 by means of spring elements 41 (shown only schematically in FIG. 6). The element 2 to be moved, which in the embodiment shown z. B.
  • an additional mass 45 (which, as shown in the illustrated embodiment, can also consist in an end portion of the tubular body 2, which is passed through the disk-shaped piezo actuator 40 and protrudes on the opposite side thereof.
  • a guide disk 43 is used for guiding and supporting the body 2 or the lens group forming it, which is supported radially on the outside against the inside of the sleeve-shaped body 1 via one or more spring elements 44.
  • the disk-shaped piezo actuator 40 used here causes a translational movement of the system, which consists of it, the mass 45, the elastic coupling member 42, the connected lens group 2 and the guide disk 43 and the spring elements 41 and 44.
  • the mass 45. Connected to the disk-shaped piezo actuator 40 has a size that is approximately 50% of the mass of the disk-shaped piezo actuator 40 and the elastic head member. 42 corresponds.
  • the disk-shaped piezo actuator 40 is controlled via electrical connections 46, between which a voltage UA is applied, which leads to an accelerated bending of the disk-shaped piezo actuator 40 in the form of defined positive or negative voltage pulses.
  • z. B a bending of the same in the -x- direction, which causes a movement of the system in the + x - direction due to the inertia of the disk-shaped piezo actuator 40 in conjunction with the mass 45 and the action of the spring elements 41. If the voltage is reversed, the lens group 2 is moved in the opposite direction in an analogous manner.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

L'invention concerne un dispositif de réglage destiné à déplacer différents éléments (2) de systèmes optiques ou de systèmes de mesure, l'élément à déplacer étant mobile sur un support (1) le long d'une direction (x) donnée à l'aide d'un dispositif actionneur piézo-électrique (21, 22) qui est porté par l'élément (2) et est conçu et commandé de telle façon que, pour déplacer graduellement l'élément (2) sur le support (1), il exerce sur lui des impulsions à action de contact. L'élément (2) est installé dans un corps (1; 27) qui présente une section transversale creuse ouverte ou fermée et sur lequel il s'appuie en au moins un point par liaison de frottement par l'intermédiaire d'un dispositif élastique prétendu (8, 8').
EP01913884A 2000-03-16 2001-03-15 Dispositif de reglage destine a deplacer differents elements de systemes optiques ou de systemes de mesure Withdrawn EP1194959A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10012751A DE10012751B4 (de) 2000-03-16 2000-03-16 Verstellvorrichtung zum Verschieben einzelner Elemente von optischen Systemen oder von Meßsystemen
DE10012751 2000-03-16
PCT/EP2001/002921 WO2001069297A2 (fr) 2000-03-16 2001-03-15 Dispositif de reglage destine a deplacer differents elements de systemes optiques ou de systemes de mesure

Publications (1)

Publication Number Publication Date
EP1194959A2 true EP1194959A2 (fr) 2002-04-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP01913884A Withdrawn EP1194959A2 (fr) 2000-03-16 2001-03-15 Dispositif de reglage destine a deplacer differents elements de systemes optiques ou de systemes de mesure

Country Status (4)

Country Link
US (1) US6919666B2 (fr)
EP (1) EP1194959A2 (fr)
DE (1) DE10012751B4 (fr)
WO (1) WO2001069297A2 (fr)

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Also Published As

Publication number Publication date
WO2001069297A2 (fr) 2001-09-20
WO2001069297A3 (fr) 2002-01-24
DE10012751B4 (de) 2004-05-27
US6919666B2 (en) 2005-07-19
DE10012751A1 (de) 2001-09-27
US20030006675A1 (en) 2003-01-09

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