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FR2412620A1 - Vapour-coating appts. for applying tungsten carbide to tip - includes vacuum chamber, vapour source heated by electron beam and assembly including spaced end plates and perforated barrels - Google Patents

Vapour-coating appts. for applying tungsten carbide to tip - includes vacuum chamber, vapour source heated by electron beam and assembly including spaced end plates and perforated barrels

Info

Publication number
FR2412620A1
FR2412620A1 FR7832353A FR7832353A FR2412620A1 FR 2412620 A1 FR2412620 A1 FR 2412620A1 FR 7832353 A FR7832353 A FR 7832353A FR 7832353 A FR7832353 A FR 7832353A FR 2412620 A1 FR2412620 A1 FR 2412620A1
Authority
FR
France
Prior art keywords
vapour
end plates
vacuum chamber
tip
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7832353A
Other languages
French (fr)
Other versions
FR2412620B1 (en
Inventor
Konosuke Inagawa
Kazuo Nakamura
Soji Komiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Publication of FR2412620A1 publication Critical patent/FR2412620A1/en
Application granted granted Critical
Publication of FR2412620B1 publication Critical patent/FR2412620B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Vapour coating appts. which comprises (a) a vacuum chamber; (b) a vapour source heated by an electric beam gun; (c) a rotating assembly (I) including a pair of spaced end plates and circumferentially spaced, perforated barrels each contg. tips and supported by stub shafts which are carried by the end plates; (d) a pair of support rolls supporting (I) and rotated by a motor to impart rotation to (I); and (e) a sector rack disposed near the top of (I), and adapted to engage a pinion carried by the stub shaft of each barrel to impart rotation to the barrel when it is brought to the top of (I).
FR7832353A 1977-12-26 1978-11-16 Vapour-coating appts. for applying tungsten carbide to tip - includes vacuum chamber, vapour source heated by electron beam and assembly including spaced end plates and perforated barrels Granted FR2412620A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15562177A JPS5487683A (en) 1977-12-26 1977-12-26 Metal film depositing apparatus

Publications (2)

Publication Number Publication Date
FR2412620A1 true FR2412620A1 (en) 1979-07-20
FR2412620B1 FR2412620B1 (en) 1982-07-09

Family

ID=15609999

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7832353A Granted FR2412620A1 (en) 1977-12-26 1978-11-16 Vapour-coating appts. for applying tungsten carbide to tip - includes vacuum chamber, vapour source heated by electron beam and assembly including spaced end plates and perforated barrels

Country Status (2)

Country Link
JP (1) JPS5487683A (en)
FR (1) FR2412620A1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0293229A3 (en) * 1987-05-29 1989-08-30 Inco Limited Apparatus and process for coloring objects by plasma coating
EP0483880A3 (en) * 1990-11-01 1993-09-08 Matsushita Electric Industrial Co., Ltd Method for forming thin film and apparatus therefor
WO2001061068A3 (en) * 2000-02-16 2002-02-14 Specialty Coating Systems Inc Tumble coater
US6375745B1 (en) 2000-02-16 2002-04-23 Specialty Coating Systems, Inc. Mobile cellular tumble coater
EP0953656A3 (en) * 1998-04-29 2002-05-29 United Technologies Corporation Rotatable fixture for airfoils
EP0992605A3 (en) * 1998-10-02 2002-11-13 Sumitomo Special Metals Co., Ltd. Support member, holder, process, and apparatus in the field of surface-treatment

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3801418B2 (en) * 1999-05-14 2006-07-26 株式会社Ｎｅｏｍａｘ Surface treatment method
JP4560971B2 (en) * 2000-03-23 2010-10-13 日立金属株式会社 Vapor deposition film forming equipment
JP4774638B2 (en) * 2000-07-13 2011-09-14 日立金属株式会社 Dry surface treatment apparatus and dry surface treatment method using the apparatus
JP4483574B2 (en) * 2004-12-27 2010-06-16 日立金属株式会社 Deposition film forming method
JP4529763B2 (en) * 2005-03-30 2010-08-25 日立金属株式会社 Method of forming a deposition film of Al or its alloy on the surface of a workpiece

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1206010A (en) * 1958-04-30 1960-02-05 Int Resistance Co Method and apparatus for spraying film layers onto certain electrical parts
FR1480852A (en) * 1966-05-24 1967-05-12 Elettronica Metal Lux S P A Ceramic body support device
FR1521846A (en) * 1967-05-03 1968-04-19 Bayer Ag Method and device for vaporizing quartz or metals on small objects, in particular lenses
US3517644A (en) * 1965-06-23 1970-06-30 Mallory & Co Inc P R Apparatus for making metal alloy resistors
US3845739A (en) * 1972-04-17 1974-11-05 Xerox Corp System for vapor deposition of thin films
US3926147A (en) * 1974-11-15 1975-12-16 Mc Donnell Douglas Corp Glow discharge-tumbling vapor deposition apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48110425U (en) * 1972-03-29 1973-12-19

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1206010A (en) * 1958-04-30 1960-02-05 Int Resistance Co Method and apparatus for spraying film layers onto certain electrical parts
US3517644A (en) * 1965-06-23 1970-06-30 Mallory & Co Inc P R Apparatus for making metal alloy resistors
FR1480852A (en) * 1966-05-24 1967-05-12 Elettronica Metal Lux S P A Ceramic body support device
FR1521846A (en) * 1967-05-03 1968-04-19 Bayer Ag Method and device for vaporizing quartz or metals on small objects, in particular lenses
US3845739A (en) * 1972-04-17 1974-11-05 Xerox Corp System for vapor deposition of thin films
US3926147A (en) * 1974-11-15 1975-12-16 Mc Donnell Douglas Corp Glow discharge-tumbling vapor deposition apparatus

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0293229A3 (en) * 1987-05-29 1989-08-30 Inco Limited Apparatus and process for coloring objects by plasma coating
US4926792A (en) * 1987-05-29 1990-05-22 Inco Limited Apparatus and process for coloring objects by plasma coating
EP0483880A3 (en) * 1990-11-01 1993-09-08 Matsushita Electric Industrial Co., Ltd Method for forming thin film and apparatus therefor
US5320877A (en) * 1990-11-01 1994-06-14 Matsushita Electric Industrial Co., Ltd. Method for forming thin film and apparatus therefor
EP0953656A3 (en) * 1998-04-29 2002-05-29 United Technologies Corporation Rotatable fixture for airfoils
EP0992605A3 (en) * 1998-10-02 2002-11-13 Sumitomo Special Metals Co., Ltd. Support member, holder, process, and apparatus in the field of surface-treatment
US6821560B2 (en) 1998-10-02 2004-11-23 Neomax Co. Ltd. Surface-treating support member and method using the same
US6878210B2 (en) 1998-10-02 2005-04-12 Sumitomo Special Metals Co., Ltd. Surface-treating holder having tubular structure and method using the same
WO2001061068A3 (en) * 2000-02-16 2002-02-14 Specialty Coating Systems Inc Tumble coater
US6375745B1 (en) 2000-02-16 2002-04-23 Specialty Coating Systems, Inc. Mobile cellular tumble coater

Also Published As

Publication number Publication date
FR2412620B1 (en) 1982-07-09
JPS561392B2 (en) 1981-01-13
JPS5487683A (en) 1979-07-12

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