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FR2983955B1 - Capteur de pression pour fluide - Google Patents

Capteur de pression pour fluide

Info

Publication number
FR2983955B1
FR2983955B1 FR1161376A FR1161376A FR2983955B1 FR 2983955 B1 FR2983955 B1 FR 2983955B1 FR 1161376 A FR1161376 A FR 1161376A FR 1161376 A FR1161376 A FR 1161376A FR 2983955 B1 FR2983955 B1 FR 2983955B1
Authority
FR
France
Prior art keywords
fluid
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1161376A
Other languages
English (en)
Other versions
FR2983955A1 (fr
Inventor
Eric Donzier
Emmanuel Tavernier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Openfield SA
Original Assignee
Openfield SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1161376A priority Critical patent/FR2983955B1/fr
Application filed by Openfield SA filed Critical Openfield SA
Priority to AU2012350278A priority patent/AU2012350278B2/en
Priority to BR112014013857-5A priority patent/BR112014013857B1/pt
Priority to CN201280067062.3A priority patent/CN104040315B/zh
Priority to CA2858146A priority patent/CA2858146C/fr
Priority to EP12806393.0A priority patent/EP2788732B1/fr
Priority to MX2014006922A priority patent/MX336698B/es
Priority to US13/707,802 priority patent/US8931347B2/en
Priority to PCT/EP2012/074873 priority patent/WO2013083821A1/fr
Publication of FR2983955A1 publication Critical patent/FR2983955A1/fr
Application granted granted Critical
Publication of FR2983955B1 publication Critical patent/FR2983955B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
FR1161376A 2011-12-09 2011-12-09 Capteur de pression pour fluide Expired - Fee Related FR2983955B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR1161376A FR2983955B1 (fr) 2011-12-09 2011-12-09 Capteur de pression pour fluide
BR112014013857-5A BR112014013857B1 (pt) 2011-12-09 2012-12-07 Sensor de pressão de fluido e sonda de medição
CN201280067062.3A CN104040315B (zh) 2011-12-09 2012-12-07 流体压力传感器以及测量探针
CA2858146A CA2858146C (fr) 2011-12-09 2012-12-07 Capteur de pression de fluide et sonde de mesure
AU2012350278A AU2012350278B2 (en) 2011-12-09 2012-12-07 Fluid pressure sensor and measurement probe
EP12806393.0A EP2788732B1 (fr) 2011-12-09 2012-12-07 Capteur de pression de fluide et sonde de mesure
MX2014006922A MX336698B (es) 2011-12-09 2012-12-07 Sensor de presion de fluido y sonda de medicion.
US13/707,802 US8931347B2 (en) 2011-12-09 2012-12-07 Fluid pressure sensor and measurement probe
PCT/EP2012/074873 WO2013083821A1 (fr) 2011-12-09 2012-12-07 Capteur de pression de fluide et sonde de mesure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1161376A FR2983955B1 (fr) 2011-12-09 2011-12-09 Capteur de pression pour fluide

Publications (2)

Publication Number Publication Date
FR2983955A1 FR2983955A1 (fr) 2013-06-14
FR2983955B1 true FR2983955B1 (fr) 2014-10-03

Family

ID=47435906

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1161376A Expired - Fee Related FR2983955B1 (fr) 2011-12-09 2011-12-09 Capteur de pression pour fluide

Country Status (9)

Country Link
US (1) US8931347B2 (fr)
EP (1) EP2788732B1 (fr)
CN (1) CN104040315B (fr)
AU (1) AU2012350278B2 (fr)
BR (1) BR112014013857B1 (fr)
CA (1) CA2858146C (fr)
FR (1) FR2983955B1 (fr)
MX (1) MX336698B (fr)
WO (1) WO2013083821A1 (fr)

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US10006823B2 (en) 2013-06-20 2018-06-26 The Regents Of The University Of Michigan Microdischarge-based transducer
EP3025154B1 (fr) 2013-07-26 2022-11-09 Agilent Technologies, Inc. Détermination de la pression pour des applications en clhp
CN103604556A (zh) * 2013-11-26 2014-02-26 无锡市纳微电子有限公司 一种流体压力传感器
JP6166185B2 (ja) * 2014-01-06 2017-07-19 アルプス電気株式会社 Ｍｅｍｓセンサ
US9902611B2 (en) * 2014-01-13 2018-02-27 Nextinput, Inc. Miniaturized and ruggedized wafer level MEMs force sensors
WO2015142949A1 (fr) 2014-03-17 2015-09-24 The Regents Of The University Of Michigan Microsystèmes empaquetés
DE102015104410B4 (de) * 2015-03-24 2018-09-13 Tdk-Micronas Gmbh Drucksensor
DE102015210919A1 (de) * 2015-06-15 2016-12-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben
CN106313350B (zh) * 2015-07-06 2018-06-29 天津职业技术师范大学 一种多线切割切割区温度测量装置
IT201600118077A1 (it) * 2016-11-22 2018-05-22 Francesco Tondolo Sistema integrato e metodo per la misura della deformazione e/o tensione in elementi monodimensionali.
WO2018148510A1 (fr) 2017-02-09 2018-08-16 Nextinput, Inc. Capteur de force de fusion piézorésistif et piézoélectrique intégré
CN110494724B (zh) 2017-02-09 2023-08-01 触控解决方案股份有限公司 集成数字力传感器和相关制造方法
IT201700071798A1 (it) * 2017-06-27 2018-12-27 St Microelectronics Srl Sensore di forza multiassiale, metodo di fabbricazione del sensore di forza multiassiale, e metodo di funzionamento del sensore di forza multiassiale
EP3655740A4 (fr) 2017-07-19 2021-07-14 Nextinput, Inc. Empilement de transfert de contrainte dans un capteur de force mems
US11423686B2 (en) 2017-07-25 2022-08-23 Qorvo Us, Inc. Integrated fingerprint and force sensor
WO2019023552A1 (fr) 2017-07-27 2019-01-31 Nextinput, Inc. Capteur de force piézorésistif et piézoélectrique collé sur tranche et procédés de fabrication associés
US11579028B2 (en) 2017-10-17 2023-02-14 Nextinput, Inc. Temperature coefficient of offset compensation for force sensor and strain gauge
WO2019090057A1 (fr) 2017-11-02 2019-05-09 Nextinput, Inc. Capteur de force étanche à couche d'arrêt de gravure
US11874185B2 (en) 2017-11-16 2024-01-16 Nextinput, Inc. Force attenuator for force sensor
CN108760140A (zh) * 2018-07-26 2018-11-06 沈阳白云机械有限公司 压力检测仪
US10962427B2 (en) 2019-01-10 2021-03-30 Nextinput, Inc. Slotted MEMS force sensor
WO2020175408A1 (fr) * 2019-02-28 2020-09-03 アルプスアルパイン株式会社 Capteur de pression
DE102019129411A1 (de) * 2019-09-12 2021-03-18 Wika Alexander Wiegand Se & Co. Kg Aufnehmerkörper mit einem Messelement und Herstellungsverfahren für einen Aufnehmerkörper
CN110749268A (zh) * 2019-10-28 2020-02-04 江苏厚生新能源科技有限公司 适于检测隔膜弓形的测试装置及其工作方法
US11492255B2 (en) 2020-04-03 2022-11-08 Saudi Arabian Oil Company Steam methane reforming with steam regeneration
US11703408B1 (en) * 2020-04-30 2023-07-18 Senva, Inc. Versatilely mountable pressure sensing apparatus, system, and/or method
EP4158144A1 (fr) 2020-05-26 2023-04-05 Saudi Arabian Oil Company Guidage géologique dans un forage directionnel
WO2021240196A1 (fr) 2020-05-26 2021-12-02 Saudi Arabian Oil Company Détection d'eau pour guidage géologique dans un forage directionnel
US11999619B2 (en) 2020-06-18 2024-06-04 Saudi Arabian Oil Company Hydrogen production with membrane reactor
US11583824B2 (en) 2020-06-18 2023-02-21 Saudi Arabian Oil Company Hydrogen production with membrane reformer
US11492254B2 (en) 2020-06-18 2022-11-08 Saudi Arabian Oil Company Hydrogen production with membrane reformer
US20220236128A1 (en) * 2021-01-27 2022-07-28 Honeywell International Inc. Pressure sensor components having microfluidic channels
US11787759B2 (en) 2021-08-12 2023-10-17 Saudi Arabian Oil Company Dimethyl ether production via dry reforming and dimethyl ether synthesis in a vessel
US11718575B2 (en) 2021-08-12 2023-08-08 Saudi Arabian Oil Company Methanol production via dry reforming and methanol synthesis in a vessel
US12258272B2 (en) 2021-08-12 2025-03-25 Saudi Arabian Oil Company Dry reforming of methane using a nickel-based bi-metallic catalyst
US11578016B1 (en) 2021-08-12 2023-02-14 Saudi Arabian Oil Company Olefin production via dry reforming and olefin synthesis in a vessel
US12169152B2 (en) * 2021-12-02 2024-12-17 Goodrich Corporation Pressure monitoring systems and methods for pressure bottle
US11617981B1 (en) 2022-01-03 2023-04-04 Saudi Arabian Oil Company Method for capturing CO2 with assisted vapor compression
CN115290246B (zh) * 2022-03-25 2024-07-19 西人马联合测控（泉州）科技有限公司 一种交叉耦合的双芯片压力传感器
CN116007801B (zh) * 2023-01-17 2025-09-05 中国地震局工程力学研究所 一种软接触式的土压传感器及土压传感器校准方法
CN116281843B (zh) * 2023-03-27 2025-06-17 四川启睿克科技有限公司 一种基于可调谐mems法珀腔芯片的应力调控方法

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Publication number Priority date Publication date Assignee Title
US20010001550A1 (en) 1998-11-12 2001-05-24 Janusz Bryzek Integral stress isolation apparatus and technique for semiconductor devices
US6120458A (en) * 1999-01-07 2000-09-19 Welch Allyn, Inc. Low profile pressure measure device
FR2792070B1 (fr) * 1999-04-06 2001-06-08 Suez Lyonnaise Des Eaux Appareil pour la mesure et l'enregistrement de la pression d'un reseau de distribution d'eau
US6601452B2 (en) * 2000-06-05 2003-08-05 Denso Corporation Semiconductor pressure sensor having rounded corner portion of diaphragm
US6928879B2 (en) 2003-02-26 2005-08-16 Robert Bosch Gmbh Episeal pressure sensor and method for making an episeal pressure sensor
US6988412B1 (en) * 2004-11-30 2006-01-24 Endevco Corporation Piezoresistive strain concentrator
US7334484B2 (en) * 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
JP4291394B1 (ja) * 2008-03-12 2009-07-08 ファナック株式会社 接触式計測装置
AT511330B1 (de) * 2011-06-03 2012-11-15 Piezocryst Advanced Sensorics Sensor für die messung von druck und/oder kraft
SG188777A1 (en) * 2011-09-28 2013-04-30 Agency Science Tech & Res A sensor device

Also Published As

Publication number Publication date
US20130145853A1 (en) 2013-06-13
WO2013083821A1 (fr) 2013-06-13
US8931347B2 (en) 2015-01-13
CA2858146C (fr) 2019-02-12
EP2788732B1 (fr) 2021-02-24
AU2012350278B2 (en) 2015-11-26
CN104040315B (zh) 2016-03-09
CN104040315A (zh) 2014-09-10
BR112014013857A8 (pt) 2017-06-13
BR112014013857B1 (pt) 2020-09-29
EP2788732A1 (fr) 2014-10-15
CA2858146A1 (fr) 2013-06-13
MX336698B (es) 2016-01-28
AU2012350278A1 (en) 2014-06-26
BR112014013857A2 (pt) 2017-06-13
FR2983955A1 (fr) 2013-06-14
MX2014006922A (es) 2015-01-22

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