HK1164212B - Nozzle rotation mechanism and coating device provided therewith - Google Patents

Description

Nozzle rotating mechanism and coating device provided with same

Technical Field

The present invention relates to a nozzle rotating mechanism and a coating apparatus including the same, and more particularly, to a nozzle rotating mechanism in which a nozzle unit having a flow path is fitted in a hollow portion of a motor and the nozzle unit and a nozzle attached thereto are rotated by rotation of the motor, and a coating apparatus including the same.

Background

When the outer surface or the inner surface of the cavity of the object to be coated is coated by using the discharge port which is arranged to face down out of the vertical direction, or when the locus containing the curved portion is coated to keep a certain cross-sectional shape, a rotating mechanism capable of changing the direction of the discharge port is arranged to perform the coating.

For example, a coating apparatus disclosed in patent document 1 is a coating apparatus for coating an outer surface, an inner surface, and the like of a box-shaped part, and includes: a fixing part for fixing the box-shaped component; a moving part capable of moving the fixed part in horizontal and vertical directions; an injection needle and a syringe for ejecting a coating fluid and having a V-shape; a holding part for rotatably inserting and holding the syringe; a dispenser that can pressurize the syringe via a tube; and a control unit for controlling these operations.

For example, a coating apparatus disclosed in patent document 2 is a material coating apparatus that coats a material along a predetermined trajectory on a surface to be coated from a tip discharge port of a nozzle while relatively moving the surface to be coated of a workpiece and the nozzle, wherein the nozzle having the tip discharge port (which is provided in a profile in which the tip portion has a width that is wider in a direction transverse to the trajectory than the rear end portion) is controlled to rotate so that the trajectory extends over almost the entire region and the tip portion precedes the rear end portion.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open No. Hei 4-100558

Patent document 2: japanese patent laid-open No. 2003-211045

Disclosure of Invention

(problems to be solved by the invention)

However, the nozzle rotating mechanism of the device of patent document 1 is provided with a motor separately in the holding part of the syringe, and forms a complicated and bulky object by transmitting the rotation of the motor with a belt. Further, since the belt is liable to slip, it is difficult to accurately position the discharge port in the rotational direction, and a load on the motor is large in a structure for rotating each syringe. In addition, if the syringes are rotated to change the direction of the discharge port, the tube to which the syringe is connected is twisted, which prevents smooth rotation, and the tube is repeatedly subjected to twisting, which may cause early degradation of the tube.

On the other hand, the device of patent document 2 rotates a nozzle, which is provided in a vertical direction and whose tip discharge port shape is devised, around the axis of the syringe by a rotation mechanism, and relatively moves the syringe in the XYZ-axis direction with respect to the workpiece by a movement mechanism. However, in this structure, since the syringe composed of the nozzle and the material storage body is attached to the lower side of the rotation mechanism including the motor portion, if the nozzle and the material storage body are not collectively detached at the time of material replenishment, the position of the tip of the nozzle may be displaced after the material replenishment.

Further, if the injectors are rotated to change the direction of the discharge port, the tube is wound around the injector, and it is determined that the injector must be rotated in the reverse direction each time the work is replaced.

Further, since the motor portion is distant from the nozzle tip, the rotation axis is liable to be deviated, which makes it difficult to correctly position the nozzle tip.

Accordingly, an object of the present invention is to provide a nozzle rotating mechanism capable of accurately positioning the position of the tip of a nozzle in the rotating direction with a small and simple structure, and a coating apparatus including the same.

(means for solving the problems)

The present inventors completed the present invention based on a basic idea of realizing a mechanism for rotating only a nozzle unit including the minimum limit component of a nozzle without a power transmission means such as a belt, and directly detachably mounting the nozzle unit to a rotating device. That is to say that the first and second electrodes,

the nozzle rotating mechanism of the first aspect of the present invention includes: a nozzle having a discharge port for discharging a liquid material; a nozzle unit having a flow path communicating with the nozzle and a liquid material supply source; a base member; and a rotating device which is arranged on the base component and rotates the nozzle unit; the nozzle rotating mechanism is characterized in that the nozzle is arranged on the nozzle unit in a mode that a central line (207) of a discharge port of the nozzle forms an angle with a rotating shaft central line (306) of the nozzle unit; the nozzle unit is detachably mounted on a rotating device.

In the nozzle rotating mechanism according to the second aspect of the present invention, in the first aspect of the present invention, the rotating device includes a motor having a hollow portion in which the nozzle unit is fitted, the hollow portion extending through a rotation axis center line (306) in an axial direction.

In the nozzle rotating mechanism according to the third aspect of the present invention, in the first or second aspect of the present invention, the flow path provided in the nozzle unit includes a supply-side opening (210) provided coaxially with the rotation axis center line (306) at an end on the side communicating with the liquid material supply source.

A nozzle rotation mechanism according to a fourth aspect of the present invention is the nozzle rotation mechanism according to the third aspect of the present invention, comprising: a connection pipe (501) connected to the supply-side opening; and a connecting pipe fixing member (502) which is disposed on the base member separately from the nozzle unit and fixes the connecting pipe.

In the nozzle rotating mechanism according to the fifth aspect of the present invention, in the fourth aspect of the present invention, the connection pipe (501) is substantially linear, and includes a protrusion (503) for directly connecting a liquid material supply source.

A nozzle rotation mechanism according to a sixth aspect of the present invention is the nozzle rotation mechanism according to any one of the first to fifth aspects of the present invention, further comprising a rotational position detection mechanism including a detection member disposed in the nozzle unit and a sensor portion provided in the base member.

In the nozzle rotating mechanism according to the seventh aspect of the present invention, in the sixth aspect of the present invention, the detecting member is disposed at a position facing the nozzle with a rotation shaft center line (306) interposed therebetween.

A nozzle rotation mechanism according to an eighth aspect of the present invention is the nozzle rotation mechanism according to any one of the first to seventh aspects of the present invention, wherein the nozzle is disposed such that the discharge port is located inward and downward of an outer periphery of the nozzle unit.

A coating apparatus according to a ninth aspect of the present invention includes: the nozzle rotating mechanism of any one of the first to eighth aspects of the present invention; a relative movement mechanism for relatively moving the nozzle rotation mechanism and the object to be coated; a supply of liquid material; and a control device.

(Effect of the invention)

According to the present invention, since only the nozzle unit is rotated, for example, in the case where the tube is connected to the injector, the tube portion is not rotated, and thus twisting and winding of the tube do not occur, and thus a method of the rotating operation is not limited, and the tube is not deteriorated.

Further, since only the light-weight nozzle unit is rotated, the load on the drive system such as the motor is small, and the drive system and the nozzle unit are linearly arranged, so that the head unit can be reduced in size and weight.

Further, since the drive system directly rotates the nozzle unit mounted thereon, the position of the discharge port in the rotational direction can be accurately positioned without causing positional deviation due to, for example, slippage of the belt, and since no power transmission mechanism is required in the middle of the process, energy efficiency is also improved.

Further, since the liquid material supply source can be attached and detached without detaching the nozzle, the nozzle is not displaced when the material is replenished.

Further, since the reference position of the nozzle unit can be accurately determined by providing the rotational position detecting means for detecting the reference position of the nozzle unit, the positioning of the rotational direction of the discharge port can be performed with high accuracy, and the change of the application pattern or the kind of the application object can be easily coped with only by changing the application program.

Drawings

Fig. 1 is a schematic perspective view of a nozzle rotating mechanism according to the present invention.

Fig. 2 is a front view of the nozzle rotating mechanism of the present invention.

Fig. 3 is a side view of the nozzle rotating mechanism of the present invention.

Fig. 4 is a bottom view of the nozzle rotating mechanism of the present invention.

Fig. 5 is a sectional view (sectional view a-a in fig. 2) of the nozzle rotating mechanism of the present invention.

Fig. 6 is an explanatory diagram for explaining the operation of the nozzle rotating mechanism of the present invention.

Fig. 7 is a schematic perspective view of the coating apparatus of example 1.

Fig. 8 is an explanatory view for explaining an operation when the coating apparatus of example 1 performs coating.

Fig. 9 is a sectional view of a nozzle rotating mechanism of embodiment 2.

Description of the symbols

101 nozzle rotating mechanism

201 nozzle unit

202 nozzle

203 first flow path

204 second flow path

205 center line of first flow path

206 center line of the second flow path

207 nozzle centerline

208 sealing member

209 nozzle mounting part

210 supply side opening part

301 motor (hollow shaft motor)

302 hollow part

303 rotating part

304 box body

305 Motor fixing component

306 motor rotation axis center line

401 liquid material supply source

402 storage container (Syringe)

403 connecting port

404 container holding member

405 adjusting screw

501 connecting pipe

502 connecting pipe fixing member

503 protruding part

504 connecting tube center line

505 gap

601 rotation position detection mechanism

602 light sensor

603 shading plate

604 an extension

605 extension side edge

606 detection part

701 base component (baseboard)

801 coating device

802X axis driving mechanism

803Y-axis driving mechanism

804Z-axis driving mechanism

805X axis drive direction

806Y-axis drive direction

807Z-axis drive direction

808 direction of nozzle rotation

809 machine

810 control device

811 ingredient controller

812 motor controller

813 other controllers

814 coating object

815 connecting pipe

816 supply of compressed gas from a pressurized source

817 coating side

818 coating direction

901 liquid material.

Detailed Description

Hereinafter, a mode of carrying out the present invention will be described with reference to an example of a nozzle rotating mechanism in which the syringe is directly connected.

[ Structure ]

Fig. 1 is a schematic perspective view of a nozzle rotating mechanism 101 according to the present invention. Further, the front view is shown in fig. 2, the side view is shown in fig. 3, the bottom view is shown in fig. 4, and the sectional view taken along the line a-a in fig. 2 is shown in fig. 5. The description will be made with reference to these drawings.

The nozzle rotation mechanism 101 of the present invention includes: the nozzle 202, the nozzle unit 201, the motor 301, the liquid material supply source 401, the connection pipe 501, and the rotational position detection mechanism 601. The nozzle 202 discharges the liquid material 901. The nozzle unit 201 is provided with a nozzle 202 and flow paths (203, 204) therein. The motor 301 rotates the nozzle unit 201. The liquid material supply source 401 stores the liquid material 901, and supplies the liquid material 901 to the nozzle unit 201 using pressure from a pressurization source. The connection pipe 501 connects the flow path 203 on the rear side of the nozzle unit 201 on the side where the nozzle 202 is provided, to the liquid material supply source 401. The rotational position detection mechanism 601 is configured to detect a reference position of the nozzle unit 201 in the rotational direction 808.

The nozzle unit 201 is provided with flow paths (203, 204), one end of the flow paths (203, 204) is connected to the nozzle 202 for discharging the liquid material 901, and the other end is connected to a connection pipe 501 connected to the liquid material supply source 401. The flow path is composed of two portions, a first flow path 203 communicating with the connection pipe 501 and a second flow path 204 communicating with the nozzle 202. A seal member 208 is provided at a connection portion between the first channel 203 and the connection pipe 501, thereby preventing the liquid material 901 from leaking from the connection pipe 501 side. In the nozzle unit 201, a nozzle mounting portion 209 is provided on the second flow path 204 side, and the second flow path 204 communicates with the discharge port of the nozzle 202 via the nozzle mounting portion 209.

The nozzle 202 is disposed in the nozzle unit 201 so as to include a nozzle center line 207 of the discharge port and form an angle (non-concentric) with the rotation axis center line 306, and is formed so as to rotate so that the discharge port automatically draws a circle around the rotation axis center line 306.

The motor 301 has a hollow portion 302 extending through the center of the rotating portion 303. The rotating portion 303 is surrounded by a case 304 formed in a substantially rectangular parallelepiped shape, except for both surfaces where the hollow portion 302 is opened. The motor 301 is fixed by fixing the case 304. Hereinafter, the motor 301 will be referred to as a "hollow shaft motor".

The liquid material supply source 401 in the present embodiment is constituted by a container (syringe) 402 for storing a liquid material 901 and a pressure source (not shown) connected thereto. The liquid material 901 is re-flowed from the syringe 402 into the flow paths (203, 204) through the connection pipe 501 by the pressure from the pressurization source, and then discharged from the nozzle 202. The liquid material supply source 401 is not limited to the syringe 402 according to the present embodiment, and may have another configuration. For example, the liquid material 901 may be supplied by pressure from a pressurizing source by connecting a liquid transfer pipe to the connection pipe 501 from a tank that is provided at a position remote from the nozzle rotation mechanism 101 and stores the liquid material 901.

The connection pipe 501 is a tubular member that connects the liquid material supply source 401 and the nozzle unit 201, and is fixed by the connection pipe fixing member 502 so as not to rotate with the rotation of the hollow shaft motor 301. One end of the projection 503 is inserted to the position where the seal member 208 is disposed in the nozzle unit 201, and the other end of the projection 503 is extended to project from the upper surface of the connection pipe fixing member 502. The projection 503 is shaped to fit the connection port 403 of the liquid material supply source 401.

The rotation detection mechanism 601 is composed of a sensor portion provided on the base plate 701 and a detection member provided on the nozzle unit 201. In the present embodiment, the sensor unit is constituted by the optical sensor 602, and the detection member is constituted by the light shielding plate 603. The light shielding plate 603 is a plate-like member having an L-shaped cross section in the vertical direction. The light shielding plate 603 is attached so as to face the nozzle 202 with the motor rotation axis line 306 interposed therebetween, and the extension portion 604 of the light shielding plate 603 is attached so as to extend outward from the side surface of the nozzle unit 201 in a substantially horizontal direction. The extension 604 extends to a position where the optical axis of the optical sensor 602 can be shielded. The photo sensor 602 is shaped like a letter "コ", and the detection unit 606 is constituted by a concave portion. The recess is installed in a direction and at a height where the protrusion 604 can pass and no collision occurs.

These components are combined as described below to constitute the nozzle mechanism 101.

The portion of the nozzle unit 201 in which the first flow path 203 is provided is fitted into the hollow portion 302 of the hollow shaft motor 301, and is detachably attached to the hollow portion 302 by a locking member such as a screw, not shown. In this embedded portion, the first flow path center line 205 in the nozzle unit 201 coincides with the rotation axis center line 306 of the hollow shaft motor, and even if the nozzle unit 201 rotates, the position of the supply side opening portion 210 of the first flow path 203 communicating with the connection pipe 501 does not change. Therefore, the fixed and non-rotatable linear connection pipe 501 can be inserted into the first flow path 203, and the nozzle unit 201, the hollow shaft motor 301, and the syringe 402 can be arranged linearly.

The nozzle 202 is not oriented vertically downward, but is mounted at an angle relative to the motor rotation axis centerline 306. In accordance with this angle, the second flow channel 204 in the nozzle unit 201 is inclined with respect to the motor rotation axis center line 306. The method of changing the direction of each nozzle 202 by inclining the flow path is advantageous in terms of the component compatibility because the nozzle used in a general coating operation can be used as it is without making the nozzle itself bent into a dogleg shape, for example. Further, since the nozzle tip position can be determined only by mounting the nozzle 202, positioning can be performed more easily than in the case where the nozzle itself is curved as described above.

The mounting angle of the nozzle 202 and the inclination or deflection of the flow path 204 can be arbitrarily changed in accordance with the shape of the object 814 to be coated and the desired coating state. In this case, the nozzle unit 201 can be simply changed. Here, the mounting position of the nozzle 202 in the height direction is a position that does not interfere with the detection mechanism 601 during rotation, and is preferably located below the mounting position of the detection mechanism 601. In this way, the nozzle unit 201 can be rotated by 360 degrees or more. When the nozzle 202 is attached, if the discharge port is located inside and below the outer periphery of the nozzle unit 201, the moving distance of the discharge port can be shortened compared to a case where the discharge port is located outside and below the outer edge of the nozzle unit.

The hollow shaft motor 301 in which the nozzle unit 201 is fitted is fixed to the base plate 701 by fixing a case 304 surrounding the rotating portion 303 with a motor fixing member 305. Therefore, only the nozzle unit 201 and the nozzle 202 attached thereto are rotated by the rotation of the rotating portion 303 of the hollow shaft motor 301.

A part of the front end of the connection pipe 501 is inserted into the first flow path 203 of the nozzle unit 201 fitted in the hollow shaft motor 301. Then, the connection pipe is securely fixed by the connection pipe fixing member 502 fixed to the bottom plate 701 so that the connection pipe does not rotate with the rotation of the hollow shaft motor 301 and so that the connection pipe center line 504 and the first flow path center line 205 are aligned and do not deviate from each other.

The connecting pipe fixing member 502 is formed to provide only a slight clearance 505 between the hollow shaft motor 301 and the nozzle unit 201 at the lower side. The reason is that if contact occurs, the contact mainly causes resistance to the rotation of the motor due to friction, and generates cutting debris. Then, the protruding portion 503 is formed above. The protruding portion 503 is formed in a shape that fits the connection port 403 of the liquid material supply source 401 provided at the end of the connection pipe 501. Since the connection pipe 501 is detachably provided, the connection pipe 501 having a connection port of various shapes can be easily replaced, and the liquid material supply source 401 can be adapted to various types.

The reservoir 402 (syringe) serving as a part of the liquid material supply source 401 is connected to the projection 503 above the connection tube fixing member 502. Then, above the connecting portion, it is supported by the container holding member 404 fixed to the bottom plate 701. An adjusting screw 405 is attached to the container holding member 404, and the syringe 402 is detachably fixed by the adjusting screw 405. Since there are no mechanism or member other than the container holding member 404 around the syringe 402, there is no shield when the syringe 402 is operated, and the operation can be smoothly performed. Further, since the syringe 402 can be attached and detached only to and from the syringe 402 by attaching and detaching the connection port 403, the liquid material can be replenished without affecting the nozzle position.

A nipple 815 is attached to the syringe 402 and receives a supply of compressed gas from a pressurized source, not shown. The liquid material 901 flows into the flow paths (203, 204) from the syringe 402 by the pressure from the pressure source, and is discharged by the nozzle 202. Since the syringe 402 does not rotate together with the rotation of the nozzle unit 201, the adapter tube 815 attached to the syringe 402 does not rotate, and the tube does not twist or interfere with the rotation. That is, since the connection pipe 501 to which the liquid material supply source 401 is connected does not rotate, not only the syringe 402 and the connection pipe 815, but also the liquid delivery pipe and the like can be connected without being twisted.

When the nozzle rotation mechanism 101 is viewed from below, the light shielding plate 603 is disposed at a position facing the nozzle 202 that discharges the liquid material 901, so as to sandwich the rotation axis line 306 of the hollow shaft motor 301 (see fig. 4). In other words, the light shielding plate 603 and the nozzle 202 are arranged in a state where a straight line connecting the side edge 605 of the protruding portion of the light shielding plate 603 and the center line 207 of the nozzle 202 for ejecting the liquid material 901 passes through the center 306 of the rotation shaft of the hollow shaft motor 301 and is aligned on the straight line. Then, the optical sensor 602 is attached with its detection portion 606 facing the side where the respective component parts are arranged at the center of the lower end of the base plate 701. Since the light shielding plate 603, the optical sensor 602, and the nozzle 202 are arranged in the positional relationship as described above, the reference position of the tip of the nozzle 202 is simply positioned in front of the rotational position detection mechanism 601 and at the center thereof, and thus the coating path can be easily imagined when the coating operation is performed. Further, for the same reason, the control of the linear operation and the rotational operation tends to be easy.

[ actions ]

The operation of the nozzle rotating mechanism 101 of the present invention will be described with reference to fig. 6.

When the position of the rotation direction 808 is shifted for some reason or the like immediately after the power is turned on, the following operation is performed in order to determine the reference position of the rotation direction 808 of the tip of the nozzle 202. The operation of setting the reference position in the rotation direction 808 may be referred to as "nozzle origin return operation".

First, the nozzle unit 201 is rotated counterclockwise when viewed from below (fig. 6 (a)). The rotating direction 808 is not limited to this, and may be determined in accordance with the direction of the extension side edge 605 of the light shielding plate 603. Then, the projecting-portion side edge 605 of the light shielding plate 603 mounted in the nozzle unit 201 is detected as being initially shielded to the position of the optical axis of the photosensor detection section 606, and rotation is stopped (fig. 6 (b)). This position is set as a reference position in the rotation direction 808 of the tip of the nozzle 202. Here, the rotation speed of the hollow shaft motor 301 is preferably a speed at which the motor rotates at the slowest speed to the extent of the minimum resolution. The reason is that if the rotation speed is too fast, the light sensor 602 does not stop and may flush the head even if it detects the light shielding plate 603, and the position of the flushing head may be regarded as the reference position of the rotation direction 808.

When the time required for the reference position setting operation in the rotation direction 808 is made shorter than that in the above method, the following operation may be performed. First, the nozzle unit 201 is rotated at a speed similar to the speed at the time of coating, and the position where the edge 605 of the protruding portion of the light shielding plate 603 attached to the nozzle unit 201 is first shielded by the optical axis of the optical sensor detection unit 606 is detected, and the rotation is stopped. However, as described above, it is determined that the head may be flushed when the vehicle stops (fig. 6 (c)). Here, the counter rotation is performed at the minimum speed from the position of the punch head, and the counter rotation is stopped by detecting the position where the light shielding plate 603 does not shield the light of the photosensor 602 (fig. 6 (d)). This position may be set as a reference position in the rotation direction 808. This can shorten the time required for rotation at the minimum speed.

After setting the reference position in the rotation direction 808, the rotation angle of the hollow shaft motor 301 is controlled by the motor controller 812, and the position of the tip of the nozzle 202 in the rotation direction 808 is controlled with the reference position determined by the above method as the origin. Since the position of the tip of the nozzle 202 can be accurately set, it is possible to easily cope with the situation by merely changing the coating program for controlling the coating operation without requiring a new teaching (teaching) when coating the coating object 814 having a different shape or when coating the same coating object 814 with a different coating pattern.

The present invention will be described in detail below with reference to examples, but the present invention is not limited to any of the examples.

Example 1

[ coating apparatus ]

The coating apparatus 801 of this embodiment is shown in fig. 7.

A storage container 402 (syringe) for storing the liquid material 901 is connected to the nozzle rotating mechanism 101, and the syringe 402 receives a supply of compressed gas from a pressurized source through a connecting tube 815. The nozzle rotation mechanism 101 is provided on the Z-axis drive mechanism 804, and is movable in the vertical direction (the direction indicated by reference numeral 807 in the figure). The Z-axis drive mechanism 804 is provided on the X-axis drive mechanism 802, and is movable in the left-right direction (the direction indicated by reference numeral 805 in the figure). A Y-axis drive mechanism 803, on which a table 809 for placing an object to be coated 814 is placed, is provided below the X-axis drive mechanism 802 and the Z-axis drive mechanism 804 so as to be movable in the front-rear direction (the direction indicated by reference numeral 806 in the figure).

The control device 810 that controls the above-described mechanisms is divided into a motor controller 812, a compounding controller 811, and a controller 813. The motor controller 812 controls the hollow shaft motor 301 of the nozzle rotation mechanism 101. The ingredient controller 811 controls the pressure applied to the injector 402, the time of pressure application, and the like. The controller 813 controls the remaining portions.

The above description is only an example of the coating apparatus 801, and the present invention is not limited to the above structure, provided that the structure can achieve the same purpose.

[ coating operation ]

The procedure for performing the coating operation by the coating apparatus 801 of the present embodiment is as follows.

First, the nozzle rotation mechanism 101 having the nozzle 202 and the syringe 402 mounted thereon is provided on the Z-axis drive mechanism 804 of the coating apparatus 801. Then, the reference position setting of the nozzle rotation direction 808 is performed in accordance with the method as described above. Then, the object to be coated 814 is placed on the stage 809 and fixed. Subsequently, the nozzle 202 is moved toward the object 814 to be coated, and coating is started. For example, when one-pass coating is performed on the outer surface of the coating object 814, operation control in the nozzle rotation direction 808 (see fig. 8) corresponding to the XY direction (805, 806) operation is performed so as to maintain a posture perpendicular to the nozzle center line 207 with respect to the coating surface 817 when viewed from above. When the coating is completed, the part including the stage 809 and the nozzle rotation mechanism 101 is moved to the standby position by the respective driving mechanisms (802, 803, 804), and the coating operation for one coating object 814 is completed. When the coating operation is continued for a plurality of objects to be coated, the objects to be coated are replaced with objects to be coated that are not coated, and the operation is repeated.

According to the coating apparatus of the present embodiment having the above configuration, since there are no mechanism and member around the syringe, there is no shielding object when the syringe is operated, and the operation of the syringe can be easily performed. Further, since only the syringe can be easily attached and detached by attaching and detaching the syringe connection port, the liquid material can be replenished without affecting the position of the nozzle.

Example 2

The nozzle unit 201 of the present embodiment is similar to the nozzle rotating mechanism 101 described above in that, as shown in fig. 9, the nozzle center line 207 and the rotation axis center line 306 form an angle therebetween, and the flow path provided in the nozzle unit 201 is formed of two portions (203, 204). However, the present embodiment differs from embodiment 1 in that the nozzle 202 is disposed so that the discharge port at the nozzle tip is positioned on the rotation axis center line 306, and in this case, the flow path (second flow path 204) inscribed in the nozzle unit 201 is formed in a crank shape.

In example 1, the discharge port at the nozzle tip is directed away from the rotation axis center line 306, but in this example, as shown in fig. 9, the discharge port at the nozzle tip is disposed so as to be positioned on the rotation axis center line 306. On the other hand, when the flow path provided in the nozzle unit 201 is viewed, the first flow path 203 is formed in the same manner as in example 1 so that the rotation axis center line 306 coincides with the flow path center line 205 because the connection pipe 501 connected to the liquid material supply source 401 is inserted into the supply side opening portion 210. However, since the discharge port at the nozzle tip is arranged so as to coincide with the rotation axis center line 306 as described above, the second flow path 204 from the first flow path 203 to the nozzle 202 is formed in a crank shape in accordance with the direction of the nozzle 202. In other words, there are 3 deflection points in the flow path from the supply-side opening portion 210 to the discharge port.

Since the discharge port at the nozzle tip is deflected toward the rotation axis center line 306 (i.e., is located inward and downward of the outer periphery of the nozzle unit 201), the device performs a smaller revolution than in example 1, and is particularly effective for a device in which the movable range (stroke) of each driving mechanism (802, 803) of the XY axis is small. For example, when the coating object 814 is coated as in fig. 8, the moving path is shown as 818 in example 1, but the moving path is shown as a moving path along the coating surface 817 in example 2, and it is found that the moving range is reduced (the moving distance is shortened).

In the apparatus of the present embodiment, since the discharge port to be positioned is located on the rotation axis center line 306, the positioning accuracy in the rotation direction is better than in a structure in which the discharge port is not located on the rotation axis center line.

In addition, the above embodiment can be easily handled by simply replacing only the nozzle unit 201, as a matter of course.

(availability in industry)

Instead of the liquid material supply source, a vacuum source may be connected to a connection pipe of the nozzle rotation mechanism, and the apparatus may be applied to a device in which a semiconductor chip cut from a wafer is sucked by a nozzle and moved from the wafer to a semiconductor chip mounting position on a substrate.

Claims (8)

1. A nozzle rotating mechanism is provided with: a nozzle having a discharge port for discharging the liquid material while relatively moving with respect to the object to be coated; a nozzle unit having a flow path therein communicating with one nozzle and a liquid material supply source; a base member; and a rotating device which is arranged on the base component and rotates the nozzle unit; the nozzle rotation mechanism is characterized in that,

arranging the one nozzle in the nozzle unit such that a center line (207) of a discharge port of the nozzle forms an angle with a rotation axis center line (306) of the nozzle unit;

the nozzle unit is detachably mounted on a rotating device

The rotating device is configured to include a motor having a hollow portion extending through a rotation axis center line (306) in an axial direction and fitted with a nozzle unit,

the nozzle unit has a first flow path provided coaxially with the rotation axis center line (306) and a second flow path inclined with respect to the rotation axis center line (306) inside.

2. The nozzle rotating mechanism according to claim 1, wherein the first flow path of the nozzle unit has a supply-side opening (210) provided coaxially with the rotation axis center line (306) at an end communicating with the liquid material supply source.

3. The nozzle rotation mechanism according to claim 2, comprising:

a connection pipe (501) connected to the supply-side opening; and

and a connecting pipe fixing member (502) which is disposed on the base member separately from the nozzle unit and fixes the connecting pipe.

4. A nozzle rotation mechanism according to claim 3, wherein the connection pipe (501) is substantially linear and has a projection (503) for directly connecting a liquid material supply source.

5. The nozzle rotation mechanism according to claim 1 or 2, comprising a rotational position detection mechanism including a detection member disposed in the nozzle unit and a sensor portion provided in the base member.

6. A nozzle rotation mechanism according to claim 5, wherein the detection member is disposed at a position facing the nozzle, sandwiching a rotation axis center line (306).

7. The nozzle rotation mechanism according to claim 1 or 2, wherein the second flow path is formed in a crank shape, and the nozzle is disposed so that the discharge port is deflected toward a rotation axis center line (306) side and is located inward and downward of an outer periphery of the nozzle unit.

8. A coating device is characterized by comprising: the nozzle rotating mechanism of claim 1 or 2; a relative movement mechanism for relatively moving the nozzle rotation mechanism and the object to be coated; a supply of liquid material; and a control device.