HK1134338B - Coriolis mass flow controller - Google Patents

Description

Coriolis mass flow controller

The present application is a divisional application with a filing date of 12/7/1999, a filing date of the previous division of 10/25/2007, an application number of 200710168276.0, and an invention name of "coriolis mass flow controller".

Technical Field

The present invention relates generally to mass flow measurement and control, and more particularly to a mass flow measurement and control device based on the coriolis force effect and having an integrated flow control valve with associated sensing, control and communication circuitry.

Background

Mass flow measurement based on the coriolis force effect is achieved in the following manner. Coriolis forces result in the effect of a mass flowing in an established direction and then being forced to change direction and have a vector component perpendicular to the established direction of flow. This can be explained by the following formula.

In the formula(Coriolis force vector) is(Mass flow vector) andcross product of (angular velocity vector).

In a rotating system, the angular velocity vector is oriented along the axis of rotation. With "right-hand principle", the fingers determine the direction of rotation, while the thumb, extended, determines the angular velocity vector direction. In the case of a typical coriolis force flow sensor, the tube through which fluid flow is established is vibrated. The tube is often in the shape of one or more rings. The annular shape is such that the mass flow vectors point in opposite directions in different parts of the ring. For example, the tube loop may be U-shaped, rectangular, triangular or delta-shaped or spiral-shaped. In a particular embodiment of a straight tube, the mass flow vector is in a single direction, while there are two angular velocity vectors that coincide at the fixed point of the tube.

In a vibrating system the angular velocity vector changes due to the change of the direction of rotation. The result is that at any given moment, coriolis forces act in opposite directions where the mass flow vectors or angular velocity vectors point in opposite directions. The coriolis force also varies continuously since the angular velocity vector is continuously varied by the vibration system. The result is that a dynamic twisting motion is imparted on top of the oscillating motion of the tube. The magnitude of the twist is proportional to the mass flow for a given angular velocity.

Mass flow measurement is achieved by measuring the twist in the sensor tube caused by Coriolis forces generated by the movement of fluid through the sensor tube. Typical known devices utilize a pick-off sensor that includes a magnet and coil pair located on the flow tube where coriolis force induced displacement is believed to be greatest. The coil and magnet are mounted on opposing structures, e.g., the magnet is mounted on the tube and the coil is mounted on the static enclosure wall. The magnet will move into and out of the coil, inducing a current in the coil. The current is proportional to the movement of the magnet relative to the coil. Since this is a velocity measurement, the velocity and hence the signal is greatest as the flow tube passes through its rest position (zero cross). The coriolis force induced twist produces a phase shift in the velocity signal that is measured by measuring the difference in the number of zero crossings between the two velocity sensors. In application, this puts a large accuracy burden on the time measurement loop. This may limit the maximum sensitivity of mass flow measured by this technique.

Furthermore, the flow rate performance of known devices based on coriolis technology is generally limited to flow rates higher than desired for many applications. Furthermore, existing coriolis mass flow measurement devices only provide for mass flow sensing with non-integral flow control capability. The means for controlling the flow is provided by the user.

Disclosure of Invention

The present invention aims to address these disadvantages associated with the prior art.

According to one aspect of the present invention, there is provided a coriolis mass flow sensor comprising: a flow sensor tube; a housing within which the flow sensor tube is located; a drive device for vibrating the fluid and fixed outside the housing; and at least one pickup sensor positioned relative to the flow sensor tube to measure a twist in the flow sensor tube caused by the coriolis force.

Preferably, at least one pickup sensor is placed within the housing.

Preferably, a magnet is also included that is coupled to the flow sensor tube, wherein the drive means comprises an electromagnetic coil.

Preferably, the electromagnetic coil comprises an energy inductor.

Preferably, the magnet comprises a non-rare earth magnet.

Preferably, the magnet comprises a nickel-plated samarium zirconium magnet.

According to another aspect of the present invention, there is provided a mass flow measurement device comprising: a housing having a first end and a second end; a valve body; a first seal positioned relative to the housing first end and the valve body such that the valve body and the first end are connected in a sealing manner; a user interface component; and a second seal positioned relative to the housing second end and the user interface assembly such that the user interface assembly and the second end are coupled in a sealed fashion.

Preferably, the user interface component comprises one of the first or second user interface components.

Preferably, the user interface component conforms to IP-65/NEMA 4X.

Preferably, the mass flow measurement device further comprises: a sensor housing located within the housing; a flow sensor tube positioned within the sensor housing; wherein the flow sensor tube provides a first fluid seal, the sensor housing provides a second fluid seal and the valve body and first end and the user interface assembly and second end provide a third fluid seal.

According to another aspect of the present invention, there is provided a coriolis mass flow sensor comprising: a flow sensor tube having a first end and a second end; and first and second piezoelectric stacks positioned on respective first and second ends of the flow sensor tube; wherein the piezoelectric and inverse piezoelectric effects cause the flow sensor tube to vibrate and detect a twist in the flow sensor tube caused by the coriolis force.

According to another aspect of the invention, there is provided a coriolis mass flow controller comprising: a flow sensor tube; a drive device positioned relative to the flow sensor tube so as to cause the flow sensor tube to vibrate; a position sensing device positioned relative to the flow sensor tube to measure a twist in the flow sensor tube caused by the coriolis force; and a flow control device adapted to receive fluid from the flow sensor tube.

Preferably, the flow control means comprises a valve comprising: a valve seat; a piston adapted to seal against the valve seat, the piston defining at least one aperture extending therethrough to establish a fluid flow path through the piston when the piston is not seated against the valve seat.

Preferably, the flow control means comprises a pump.

Preferably, the pump comprises a metering pump.

According to another aspect, there is provided an apparatus for determining mass flow from coriolis force induced phase shifts between first and second input signals detected by first and second displacement meters, comprising: a first phase sensitive detector connected to receive the first and second input signals, the first phase sensitive detector being operable to mix the first and second input signals and provide an output representative of the mixed first and second input signals; a first phase shifter connected to receive a first input signal and operable to output an output signal representative of a 90 ° phase shift of the first input signal; a second phase sensitive detector connected to receive the first phase shifter output and the second input signal, the second phase sensitive detector being operable to mix the phase shifted first and second input signals and provide an output representative of the mixed signal; and a processor connected to the first and second phase sensitive detectors to receive the mixed signals and operable to calculate a vector mode and phase of the mixed signals relative to each other, wherein the vector phase is proportional to the mass flow.

Preferably, the apparatus further comprises first and second low pass filters connected to the first and second phase sensitive detectors, the first and second low pass filters being operable to remove high frequency signals from the mixed signal and output a DC voltage.

Preferably, the apparatus further comprises a third output terminal synchronized in phase with the first input terminal for providing a sinusoidal output signal to drive the flow tube into resonance.

Preferably, the apparatus comprises a synchronous amplifier.

Preferably, the apparatus further comprises: a third phase sensitive detector connected to receive the first input signal on each of the two inputs, the third phase sensitive detector being operable to mix the first input signal with itself and to provide an output representative of the mixed first input signal; a fourth phase sensitive detector connected to receive the first phase shifted output and the first input signal, the fourth phase sensitive detector being operable to mix the phase shifted first input signal with the first input signal and to provide an output representative of the mixed signal; a first differential amplifier connected to receive the outputs of the first and third phase sensitive detectors and provide a differential signal to the processor; and a second differential amplifier connected to receive the outputs of the second and fourth phase sensitive detectors and provide a differential signal to the processor.

Preferably, the apparatus further comprises first and second low pass filters connected to the first and second differential amplifiers, the first and second low pass filters being operable to filter out high frequency components from the mixed signal and to output a DC voltage.

Preferably, the apparatus further comprises a second phase shifter connected to receive the first input signal and operable to output a signal indicative of a 90 ° phase shift of the first input signal to the fourth phase sensitive detector.

According to another aspect of the invention, there is provided a method of determining mass flow from coriolis force induced phase shifts between first and second input signals detected by first and second displacement meters, the method comprising: mixing the first input signal with the second input signal to generate a first output signal; phase shifting the first input signal by 90 °; mixing the second input signal with the phase-shifted first input signal to produce a second output signal; and calculating a vector mode and a phase of the first and second output signals relative to each other, wherein the vector phase is proportional to the mass flow.

Preferably, the method further comprises filtering the first and second output signals.

Preferably, the method further comprises synchronizing the phase of the drive terminal to the first input signal to drive the flow resonance.

Preferably, mixing the first and second input signals comprises inputting the first and second signals into a phase sensitive detector.

Preferably, mixing the first and second input signals comprises mixing a difference between the first and second input signals with the first input signal.

According to another aspect of the present invention, there is provided an apparatus for determining mass flow from coriolis force induced phase shifts between first and second input signals detected by first and second displacement meters, comprising: a differential amplifier connected to receive the first and second input signals, the differential amplifier being operable to output a signal representative of a difference between the first and second input signals; a first phase sensitive detector connected to receive the output of the differential amplifier and the first input signal and provide an output representative of the mixed differential amplifier output and first input signal; a phase shifter connected to receive a first input signal and operable to output an output signal indicative of a 90 ° phase shift of the first input signal; a second phase sensitive detector connected to receive the phase shifter output and the differential amplifier signal and provide outputs indicative of the mixed phase shifted first input signal and the differential amplifier signal and provide an output indicative of the mixed signal; and a processor connected to the first and second phase sensitive detectors to receive the mixed signals and operable to calculate a vector mode and phase of the mixed signals relative to each other, wherein the vector phase is proportional to the mass flow.

Preferably, the apparatus further comprises first and second low pass filters connected to the first and second phase sensitive detectors, the first and second low pass filters being operable to filter out high frequency components from the mixed signal and to output a DC voltage.

Preferably, the apparatus further comprises a third output terminal phase synchronized to the first input terminal for providing a sinusoidal output signal to drive the flow tube into resonance.

Preferably, the apparatus comprises an on-frequency amplifier.

According to another aspect of the present invention, there is provided a capacitive pick off sensor for a mass flow measurement device comprising a flow sensor tube and a drive device for vibrating the flow sensor tube, the capacitive pick off sensor comprising: at least one conductive plate connectable to a first potential and adapted to be positioned adjacent to a flow sensor tube connected to a second potential so as to define a gap between the flow sensor tube and the conductive plate; such that the capacitance between the conductive plate and the flow sensor tube changes due to the relative movement of the conductive plate and the flow sensor when the flow sensor tube vibrates.

Preferably, the flow sensor tube is connected to ground potential.

Preferably, the at least one electrically conductive plate comprises first and second plates, and the first and second plates are positioned tangentially to the motion of the vibrating flow sensor tube.

Preferably, the first and second plates are positioned side-by-side so as to define a uniform gap therebetween.

Preferably, the first and second plates are at the same potential and the flow sensor tube is at ground potential.

Preferably, the first and second plates are generally rectangular and the gap extends generally parallel to the flow sensor tube.

Preferably, the first and second plates are generally triangular in shape and the gap extends diagonally relative to the flow sensor tube.

Preferably, the first and second plates are generally saw-toothed and the gap defines a generally saw-tooth shape.

Preferably, at least one conductive plate is embedded on the printed circuit board.

Preferably, the printed circuit board is a multilayer printed circuit board comprising a protective layer and a backing layer solderable to the sensor block.

According to another aspect of the present invention, there is provided a coriolis mass flow sensor comprising: a flow sensor tube; a drive device positioned relative to the flow sensor to vibrate the flow sensor tube; and at least one capacitive displacement meter positioned relative to the flow sensor tube to measure a twist in the flow sensor tube caused by the coriolis force.

Preferably, the drive means comprises an electromagnetic drive.

Preferably, the drive means comprises an electrostatic drive.

Preferably, the drive means comprises a sound driver.

Preferably, the drive means comprises a piezoelectric driver.

Preferably, the at least one capacitance displacement meter comprises two capacitance displacement meters.

Preferably, the capacitance displacement meter is located symmetrically to the sensor tube.

Preferably, the capacitance displacement meter is miniaturized and surface mounted on the sensor package wall.

Preferably, the coriolis mass flow sensor further comprises circuitry adapted to measure a phase shift produced by the coriolis force.

Preferably, the circuit comprises a synchronous amplifier.

Preferably, the at least one capacitance displacement meter is mounted on an actuator operable to dynamically position the capacitance displacement meter relative to the flow sensor.

Preferably, the actuator comprises a piezoelectric actuator.

Preferably, the actuator positions the at least one capacitance displacement meter in response to a flow condition.

Preferably, the actuator positions the at least one capacitance displacement meter in three dimensions.

Preferably, the at least one capacitance displacement meter comprises first and second plates; the first and second plates are positioned adjacent the flow sensor tube in a plane tangential to the motion of the flow sensor tube when the flow sensor tube vibrates; and the first and second plates are positioned side-by-side to define a uniform gap therebetween.

Preferably, the first and second plates are at the same potential and the flow sensor is at ground potential.

Preferably, the first and second plates are generally rectangular and the gap extends parallel to the flow sensor tube.

Preferably, the first and second plates are generally triangular in shape and the gap extends diagonally across the flow sensor tube.

Preferably, the first and second plates are generally saw-toothed and the gap forms a saw-tooth shape.

Preferably, the coriolis mass flow sensor further comprises an evacuated housing, the flow sensor tube being positioned within the evacuated housing.

In one aspect of the invention, a capacitive pick off sensor for a mass flow measurement device is disclosed. The mass flow measurement device includes a flow sensor tube and a drive device for vibrating the flow sensor tube. The capacitive pick off sensor includes at least one conductive plate connectable to a first potential and adapted to be positioned adjacent to a flow sensor tube connected to a second potential. The conductive plate is positioned relative to the flow sensor tube to define a gap therebetween. The capacitance between the conductive plate and the flow sensor tube deforms due to the relative motion of the conductive plate and the flow sensor tube when the flow sensor tube vibrates.

In another aspect of the invention, a coriolis mass flow sensor includes a flow sensor tube, a drive device positioned relative to the flow sensor tube to generate vibrations of the flow sensor tube, and a capacitive displacement meter positioned relative to the flow sensor tube to measure a twist in the flow sensor tube caused by a coriolis force. In certain embodiments, electromagnetic, electrostatic, acoustic, and/or piezoelectric actuators are used to vibrate the flow sensor tube. In another embodiment, a piezoelectric device is used to vibrate the flow sensor tube and detect torsion within the flow sensor tube.

In yet another aspect of the invention, a coriolis mass flow controller includes a flow sensor tube, a drive device positioned relative to the flow sensor tube to vibrate the flow sensor tube, and a position sensing device positioned relative to the flow sensor tube to measure a twist in the flow sensor tube caused by a coriolis force. The coriolis mass flow controller also includes an integral flow control device adapted to receive fluid from the flow sensor tube. Such an integrated flow valve with associated sensing circuitry provides a more compact package that is easy to use and provides significant changes in dynamic performance.

In another aspect of the invention, a direillier mass flow sensor includes a flow sensor tube, a housing within which the flow sensor tube is located, a drive device positioned outside the housing for vibrating the flow sensor tube, and at least one pickup sensor positioned relative to the flow sensor tube to measure a twist in the flow sensor tube caused by coriolis forces. In an exemplary embodiment, the pickoff sensors are located within the housing. In another embodiment, the magnet is connected to the flow sensor tube and the drive device comprises an electromagnetic coil. The magnet may be a non-rare earth magnet, and more specifically, a nickel-plated samarium-zirconium magnet. The electromagnetic coil may include an energy sensor.

According to another aspect of the invention, a mass flow measurement device includes a housing having first and second ends, a valve body, and a first seal positioned relative to the housing first end and the valve body to sealingly couple the valve body and the first end, a user interface assembly and a second seal positioned relative to the housing second end to sealingly couple the user interface assembly and the second end. The seal allows for interchangeability between various types of user interface components, including IP-65/NEMA 4X compliant user interface components, and provides additional fluid sealing.

Drawings

Other objects and advantages of the present invention will become apparent upon reading the following detailed description and upon reference to the drawings in which

FIG. 1 is a block diagram conceptually illustrating a Coriolis mass flow sensor in accordance with aspects of the present invention;

FIGS. 2A and 2B illustrate a Coriolis mass flow sensor employing an electromagnetic drive in accordance with an embodiment of the present invention;

FIGS. 3A and 3B illustrate a Coriolis mass flow sensor employing an electrostatic drive in accordance with an embodiment of the present invention;

FIGS. 4A and 4B illustrate a Coriolis mass flow sensor employing an acoustic drive in accordance with an embodiment of the present invention;

FIGS. 5A, 5B and 5C illustrate a Coriolis mass flow sensor employing a piezoelectric drive in accordance with an embodiment of the present invention;

FIG. 6 is a schematic diagram of an on-frequency amplifier for measuring the Coriolis force induced phase shift in accordance with the present invention;

FIG. 7 is a schematic diagram of a dual channel lock-in amplifier for measuring Coriolis force induced phase shift in accordance with the present invention;

FIG. 8 is a graph showing the relationship between the amplitude of input signals from each sensor tube position sensor using the signal processing method according to the present invention.

FIG. 9 is a schematic diagram of a dual lock-in amplifier for measuring Coriolis force induced phase shift in accordance with the present invention;

FIG. 10 is a schematic diagram of a dual lock-in amplifier including a reference frequency adjustment device for measuring the Coriolis force induced phase shift in accordance with the present invention;

FIG. 11 shows a first embodiment of a capacitance displacement probe according to the present invention;

FIG. 12 shows a second embodiment of a capacitance displacement probe according to the present invention;

FIG. 13 shows a third embodiment of a capacitance displacement probe according to the present invention;

14A and 14B illustrate aspects of a prior art threaded valve connection and a sealed threaded valve connection according to the present invention, respectively; and

Detailed Description

While the invention is amenable to various modifications and alternative forms, specifics thereof have been shown by way of example in the drawings and will be described in detail. It should be understood, however, that the description herein of specific embodiments is not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

Illustrative embodiments of the invention are described below. In the interest of clarity, not all features of an actual implementation are described in this specification. It will of course be appreciated that in the development of any such actual device, numerous implementation-specific decisions must be made to achieve the developers' specific goals, such as compliance with system-related and business-related constraints, which will vary from one implementation to another. Moreover, it will be appreciated that such a development effort might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure.

FIG. 1 is a diagram conceptually illustrating a Coriolis mass flow sensor in accordance with aspects of the present invention. The coriolis mass flow sensor 1 includes a flow sensor tube 2 with a drive device 3 positioned relative thereto to vibrate the tube 2. The displacement gauge 4 is positioned relative to the tube 2 so as to measure the twist in the tube 2 due to coriolis forces.

A typical material for the sensor tube 2 is 316L stainless steel. Reasons for using 316L stainless steel include its resistance to chemical attack from many substances, its resistance to cracking from normal process pressures, its general non-contaminating nature, and its ease of forming into the desired shape of the flow sensor tube 2. However, 316L stainless steel is not suitable for all applications. Therefore, other tube materials are necessary that can be used to achieve applications for which 316L stainless steel is not suitable. Known devices utilize silicon as a substitute for 316L stainless steel. An advantage of silicon replacing 316L stainless steel is that the sensor tube can be made in a smaller shape than would be formed from 316L stainless steel.

Another consideration for the material selection of the sensor tube 2 is resistance to corrosion induced or increased stresses. Stress is created at the bottom of the bent arms where the tube is installed. In polycrystalline materials, stress will create lattice doping in the material to diffuse and accumulate at grain boundaries between regions of individual crystallite particles. In many cases this will weaken the bonds between the crystallite grains, making the material more susceptible to chemical attack. Single crystal materials like silicon or sapphire are not easily affected in this way.

Metals like 316L stainless steel are generally polycrystalline and are therefore more susceptible to this form of chemical attack to varying degrees. Amorphous materials like quartz glass and many plastics are also less resistant to stress caused by chemical attack because they do not have a lattice structure like polycrystalline materials. Tube materials that are susceptible to chemical attack may have their surfaces modified or coated in some way to reduce corrosion or erosion if the use of base materials is otherwise suitable.

Surface modification can be achieved by ion implantation, thermal diffusion, and chemical or electrochemical reactions. The purpose here is to remove, redistribute or introduce elemental or molecular species that leave a chemically resistant layer at the surface. Surface coating can be accomplished by thermally induced precipitation from a vapor, liquid or powder that is in intimate contact with the surface at elevated temperatures. Lower temperatures may be used if the chemically reactive species are also excited or ionized by the plasma or a strong photon flux, such as from a laser. Other materials resistant to chemical attack may be deposited by non-reactive physical vapor evaporation, as accomplished by thermal or electron beam emission or ion sputtering. If sputtering is accomplished with a high energy ion beam so that the sputtered species is chemically excited or ionized, then chemical reaction with the surface is also accomplished, which is desirable for certain deposition materials. Also chemical reactions at the surface can be accomplished by accelerating the chemical species so that kinetic energy can be used to trigger or enhance the chemical reaction.

The tubing used for the coriolis flow sensor tube 2 in certain embodiments of the present invention is austenitic and martensitic stainless steel, high nickel alloys, titanium and zirconium and their alloys, particularly titanium-vanadium-aluminum alloys and zircaloy (due to their higher strength and low young's modulus), silicon, sapphire, silicon carbide, quartz glass, and plastic. Tube coating materials used in accordance with the present invention include silicon carbide, nickel, chromium, diamond, refractory carbides, refractory metal nitrides, and refractory metal oxides.

Fig. 2A and 2B illustrate a coriolis mass flow sensor 1 according to a particular embodiment of the invention. The coriolis mass flow sensor 1 employs an electromagnetic drive 10 comprising an electromagnet 12 driven by a signal source (not shown) which in the illustrated embodiment comprises a sinusoidal wave signal source. The electromagnet 12 is located near a small permanent magnet 14 mounted on a sensor tube 16. The sensor tube 16 is connected to a base 18 that includes first and second openings 19 to form a flow path from one port 19 through the flow tube 16 to the other port 19. The exemplary sensor tube 16 shown in the embodiments disclosed herein is generally U-shaped, although other shaped tubes such as delta-shaped, rectangular, spiral, or straight may be used.

Fig. 3A and 3B show an embodiment similar to that shown in fig. 2, which utilizes electrostatic drive. The electrostatic drive 20 includes a charging plate 22 positioned adjacent to a small dielectric plate 24 mounted on the sensor tube 16. If the tube 16 is made of a dielectric material, the charging plate 22 is positioned adjacent to the tube 16 and the dielectric plate 24 may be eliminated. Also, the charging plate is driven by a signal source (not shown), such as a sinusoidal signal source. A voltage applied to the charging plate 22 will create an electric field between the charging plate 22 and the dielectric plate 24. This will generate a surface charge on the dielectric plate 24. As the voltage polarity is rapidly changed on the charge plate 22, the resulting electric field between the charge plate 22 and the dielectric plate 24 will alternately attract or repel, causing the flow tube 16 to vibrate.

Fig. 4A and 4B illustrate another embodiment of a coriolis mass flow sensor 1 employing a novel acoustic drive. The sonic driver 30 includes a small speaker 32 placed near the tube 16. The pressure waves generated by the speaker 32 cause the tube 16 to vibrate.

In fig. 5A, 5B and 5C, yet another embodiment of a coriolis mass flow sensor 1 is shown. The coriolis mass flow sensor 1 of fig. 5A, 5B, and 5C employs a piezoelectric drive 40 in which two piezoelectric fields 42 are positioned on opposite sides of each leg of the flow tube 16, acting to generate a bimorph on each leg 16, as shown in fig. 5. Piezoelectric and inverse piezoelectric effects will be used to drive and/or detect deflection of the tube 16.

The mass flow is measured by measuring the twist in the sensor tube 16 caused by the coriolis force generated by the fluid moving through the sensor tube 16. For example, the pick-off sensors, which include magnet and coil pairs, are typically located on the flow tube 16 where coriolis force induced displacement is believed to be greatest. The coil and magnet are mounted on opposing structures, for example, the magnet is mounted on the tube 16 and the coil is mounted on a static enclosure wall. The magnet will move into and out of the coil, inducing a current in the coil. This current is proportional to the speed of the magnet relative to the coil. Since this is a speed measurement, the speed and hence the signal is greatest when the flow tube 16 passes through its dead center (0 passed). The coriolis force induced twist produces a phase shift in the velocity signal that is detected by measuring the difference in the 0-times elapsed between the two velocity sensors. In use, this places a large accuracy burden on the count measurement circuitry. This will limit the maximum sensitivity of mass flow measured by this technique.

Aspects of the present invention provide a flow measurement technique that provides for lower flow capacity, which is more straightforward and requires less precision in the circuit than typical time-based signal conditioning techniques. Referring to the embodiment shown in fig. 2-4, the displacement of the vibrating sensor tube is measured using a capacitive pick-off sensor, and two capacitive displacement meters (50) are positioned near the tube 16 at locations symmetrical to the shape of the tube 16 to measure the twist in the sensor tube 16 caused by coriolis forces generated by the fluid flowing through the sensor tube 16. In certain embodiments of the present invention, the capacitance displacement meter 50 is miniaturized and surface mounted on the sensor package wall or on a sensor block inserted inside the ring of sensor tubes. The twist in the sensor tube 16 caused by the coriolis force causes a phase shift between the two signals from each of the capacitance displacement meters 50. Since this is a displacement sensor, the signal is proportional to the displacement. The relative displacement of each side of the tube is measured as a phase shift. The meter driver and signal conditioning circuitry translates the displacement of the relative tube 16 into a high level signal as a function of the phase shift that can be used to measure the coriolis effect in the flow setup through the tube 16.

A first signal processing technique utilizes a synchronous (lock in) summer with a reference signal provided by one displacement meter 50 and an input signal provided by the other displacement meter 50. Each displacement gauge 50 may provide a reference or input signal. The phase output from the lock-in amplifier is proportional to the flow. Fig. 6 is a functional schematic of a synchrosetter 52 with which the method for measuring coriolis force induced twist according to the present invention may be implemented. The signal moves from left to right as shown in figure 6. The signals for the left input 100 and the right input 102 come from the left and right displacement meters 50, respectively. For example, the left input 100 may be used as a reference signal. The sinusoidal output 103 is a drive signal phase-synchronized to the left input 100 signal. This will drive the flow sensor tube 16 into resonance. The right input 102 signal is mixed with the left/reference input 100 signal and its 90 ° phase shifted signal 104 in two Phase Sensitive Detectors (PSDs) 106. Functionally, the PSDs106 multiply the two signals, producing a high frequency component and a DC component. The low pass filter 108 filters out high frequency components and produces DC voltages on the X and Y outputs 110, 112. The X output 110 is referred to as the in-phase component and the Y output 112 is referred to as the 90 ° (quadrature) component of the vector signal relative to the reference signal. Each of these components is sensitive to phase variations; however, the vector modulo and phase components can be separated by the following relationship:

equation 1:die

Equation 2: theta is tan^-1(Y/X) phase angle

The relationship between the output of the synchronous amplifier 52 and the input from the displacement meter 50 is derived as follows:

the two signals are considered to be sine waves with arbitrary amplitude and arbitrary phase difference. Each signal may be represented as follows:

V_left＝V_ref＝Asinωt

V_right＝Bsin(ωt+φ)

at the lower PSD106, the following operations occur:

X′＝V_ref*(V_right)＝Asinωt*[Bsin(ωt+φ)]

the signal has a DC voltage component and an AC component at twice the frequency, and a Low Pass Filter (LPF)108 filters out the AC component to leave:

at the upper PSD106 the following occurs:

Y′＝Acosωt*[B sin(ωt+φ)

since cos ω t ═ sin (ω t +90 °), we have a cosine multiplier.

We obtain a signal with AC and DC components that after passing through LPF108 yields the following:

from equations 1 and 2, the modulo R and phase angle θ are calculated, we obtain:

and

θ＝φ

these calculations may be performed by any suitable digital or analog processing device 120. The vector phase is proportional to the mass flow.

Another method according to an embodiment of the present invention requires a two-channel lock-in amplifier with a reference signal and one input signal provided by one displacement meter 50 and a second input signal provided by the other displacement meter 50. The difference between the two input signals is then measured against a reference signal. The phase output from the lock-in amplifier is proportional to the flow. Fig. 7 is a functional schematic of the dual channel lock-in amplifier 54. The signal moves in the same way as in fig. 6 and is defined the same as it. The left input 100 is also used as a reference signal. As before, the sinusoidal output 103 is a drive signal that is phase synchronized with the left input 100 signal. In this case, the left input signal 100 is subtracted from the right input 102 signal and mixed with the left/reference input 100 signal and its 90 ° phase shifted signal 104 in two phase sensitive detection systems (PSDs) 106. The internal function is the same as that of the synchronous amplifier 52 of fig. 6.

The following derivation may be used to determine the relationship between the output from the lock-in amplifier 54 and the input from the displacement meter 52. Any suitable digital or analog processing device 120 may be used to perform these calculations.

The two signals are considered as sine waves with arbitrary amplitude and arbitrary phase difference. Each signal may be represented as follows:

V_left＝V_ref＝Asinωt

V_right＝Bsin(ωt+φ)

in which case the output of the low noise differential amplifier 114 will be V_ref-V_right：

At the lower PSD106, the following operations occur:

X’＝V_ref(V_ref-V_right)＝Asinωt*[Asin-B sin(ωt+φ)]

at twice the frequency the signal has a DC voltage component and an AC component, and a Low Pass Filter (LPF)108 filters out the AC component to leave:

at the upper PSD106 the following occurs:

Y′＝Acosωt*[Asinωt-B sin(ωt+φ)]

since cos ω t ═ sin (ω t +90 °), we get a cosine multiplier.

Also, we get a signal with AC and DC components that after passing through the LPF yields the following results:

from equations 1 and 2, the modulo R and phase angle θ are calculated, we obtain:

and

θ is no longer the phase angle, but the arctangent, the phase angle being a function of the amplitude of the left and right input signals. Analysis of this equation yields that θ is a strength function (strongfunction) of φ. In practice, the relative amplitude of the input signal may control the strength of this equation. This can be illustrated from the graph shown in fig. 8, where a and B are the amplitudes of the left and right signals, respectively. Since the amplitudes are very close to match, the sensitivity to the synchronous amplifier output θ is high. Even for amplitudes matched within 2%, the sensitivity of θ to φ is almost 100 times that of the standard synchronous amplifier configuration.

Fig. 9 is a functional schematic of a dual lock-in amplifier 56 with which the method for measuring coriolis force induced phase shift according to the present invention is implemented. The signals move in the same manner and are defined the same as described above. The left input 100 is also used as a reference signal. As before, the sinusoidal output 103 is also a drive signal that is phase synchronized with the left input 100 signal. In this case, the left input 100 signal is mixed with itself and the 90 ° phase shifted signals at the two phase sensitive detector systems (PSDs)106 in the upper lock-in amplifier 58. In the lower lock-in amplifier 60, the right input 102 signal is mixed with the left input 100 signal and its 90 ° phase shifted signal in two phase sensitive detector systems (PSDs) 106. The paired outputs from the non-phase shifted PSDs106 and the phase shifted PSDs106 are differentiated within two low noise differential amplifiers 114. The DC component of the signal is filtered by a low pass filter 108 to give a common synchronous amplifier output. The algorithm executed by this 120 may be processed by any suitable digital or analog means, as in the method described above in connection with fig. 7, although the order in which the operations occur is different. In the two-channel synchronization technique of fig. 7, two high level signals with very small differences are removed. The low level signal is then multiplied by the high level signal, which can cause noise in analog circuits or trim errors in digital circuits. In the two-channel synchronization technique of fig. 9, the high level signal channels are first amplified and the resulting signals of similar amplitude are then removed, producing an output with low noise.

The use of a synchronous amplifier is significant for measuring low level signals buried in very high amplitude noise. The lock-in amplifier accomplishes this by acting as a very narrow bandpass filter. The signal and noise are multiplied by the reference sine and cosine waves and then passed through a low pass filter to remove the reference frequency. The result of the multiplication/filtering operation is a DC signal representing a complex vector (x + iy). The phase difference between the reference frequency and the signal of interest can be determined by atan (y/x).

In measuring coriolis forces, the phase difference between two signals of the same frequency is of interest. This can be achieved with dual synchronous amplifiers, each driven by the same reference frequency, as shown in fig. 10. In the functional diagram shown in fig. 10, the left and right input signals 100, 102 are multiplied by reference sine and cosine waves provided by a reference frequency generator 144. The input signals 100, 102 are mixed with sine and cosine signals in the PSDs106 and then passed through a fifth order bessel IIR low pass filter 148, as described with reference to fig. 6, 7 and 9. The above described multiplication/filtering process is performed on the left and right input signals 100,102 with the resultant phase difference output X, Y for each signal relative to the reference frequency. The difference between the two output signals X, Y represents the phase difference of the two input signals 100, 102. In the case of coriolis mass flow, this phase difference represents an indication of mass flow 152.

When a very small phase difference associated with coriolis mass flow is measured with a lock-in amplifier, the reference frequency must be adjusted to match the signal of interest. If the reference signal is not very close to the signal of interest, a very low frequency AC signal will be produced at the output of the low pass filter 148. The frequency of the coriolis sensor varies with mass flow, temperature, density, and pressure, further complicating the measurement process.

The reference frequency can be accurately adjusted by processing the output vector from one of the input signals 100, 102. First, the derivative of the output vector is calculated. This can be done by calculating the complex difference of two consecutive output vectors. The initial output vector is then rotated 90 and the dot product of this vector and the derivative is calculated, producing an error signal 150 which is provided to the reference frequency generator 144. The error signal 150 is positive, negative, or zero if the reference frequency needs to be adjusted downward, upward, or unchanged, respectively.

The amount of adjustment of the reference frequency depends on the accuracy of the phase measurement, but in general the finer the adjustment, the better the accuracy, as determined by calculating the standard error over a number of output samples. However, fine tuning of the reference frequency (small step changes) would be disadvantageous if there were a step change in the signal frequency, since it would take a long time for the reference frequency generator 144 to reach the desired frequency. If the signal frequency undergoes a step change in frequency, a PID or adaptive algorithm can be used to adjust the reference frequency in a more sensitive manner.

In an alternative embodiment, the capacitive displacement probe 50 may be mounted on a piezoelectric actuator that will first position the capacitive displacement probe 50 in three dimensions. Further, when used with the dual channel lock-in amplifier or dual lock-in amplifier methods disclosed herein, the piezoelectric actuator can dynamically adjust the sensitivity of the flow sensor, thereby providing an expanded operating range.

This dynamic positioning provides compensation for manufacturing variability, particularly the positioning of the flow sensor tube relative to the capacitive displacement probe. Dynamic positioning also provides compensation for dimensional drift caused by relative thermal expansion of the various components. Applied in combination with a dual channel lock-in amplifier or dual lock-in amplifier, dynamic positioning closely matches the two displacement signals to provide adjustable sensitivity to flow. For high flow conditions, low sensitivity will be used, and for wide low flow conditions, high sensitivity will be used, thereby increasing the dynamic range of flow measurement.

Embodiments of the present invention additionally provide capacitance measurement techniques, and in particular, novel geometries for capacitance displacement probes. Typically, the displacement of the target is measured as a distance perpendicular to the capacitive displacement probe, which may also be measured as a distance tangential to the capacitive displacement probe. Referring to fig. 11, this may be accomplished by placing two plates 130 side by side with a uniform gap 132 between the two plates 130 and in a plane tangential to the motion (as indicated by arrow 136) near the sensor tube 132, as shown in fig. 11. In one embodiment, the plates 130 will be at the same potential and the sensor tube 134 at ground potential. The sensor tube 134 is positioned directly over the gap 132 between the two plates 130 with the desired motion 136 perpendicular to the gap so that the cyclic motion of the sensor tube 134 will bring the tube 134 closer to one plate 130 than the other plate 130. The relative capacitance between each plate 130 and the sensor tube 134 is measured. As the sensor tube 134 moves across one plate 130 or the other, the amount of area that affects capacitance will change and thus the relative capacitance is measured.

An alternative configuration has the gap 132 extending diagonally across the sensor tube 134 as shown in fig. 12. This allows for less precise displacement of the sensor tube 134 in the plane of the plate 130. Misalignment of the sensor tube 134 will cause less mismatch in the signal compared to a parallel gap.

Another embodiment has a saw tooth pattern of gaps 132 as shown in fig. 13. This is an improvement in the angular misalignment of the object gap 132 with respect to the sensor tube 134 relative to the gap 132, whether parallel or object, will produce a deviation in the rate of change of capacitance between the two plates 130. This will result in an undesirable change in phase between the two signals. The saw tooth pattern will neutralize the angular misalignment of the sensor tube 134, providing a better symmetrical signal.

An exemplary low flow coriolis mass flow controller according to an embodiment of the invention includes a flow sensor portion 101 and a flow control portion 104. A processor, internal or external to the mass flow controller, receives an indication of a set point or desired mass flow. The value of the set point is compared to the actual mass flow as indicated by the flow sensor portion to produce an error value. The flow control portion includes a value that is manipulated to adjust the flow rate and minimize the error. It will be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure to implement this particular control system, and thus, the details of such an implementation will not be described in detail herein.

The flow sensor portion enclosed by the housing includes a sensor tube bent into a ring, a drive device, and two pickoff sensors positioned on opposite sides of the sensor tube that measure the displacement of each side of the sensor tube.

In existing coriolis devices, the sensor is typically enclosed within a welded metal housing. The sensor tube within the housing is also connected to its displacement or velocity sensor with a wire that is connected to circuitry on the outside of the housing by a feedthrough. The sensor tube in such a device is relatively large and has a resonant frequency of about 100 kHz. For smaller sensor tubes, as in the embodiments of the present invention, the resonant frequency is higher, on the order of 200Hz or higher. As the frequency increases, the viscous damping effect caused by atmospheric conditions inside the sensor housing will increase. Viscous damping can be reduced or even eliminated by evacuating the housing or utilizing a vacuum compliant material inside the housing. Thus, in the exemplary embodiment shown, the sensor tube is located within the vacuum sensor housing.

The sensor tube is designed to allow elastic bending orthogonal to the line connecting the annular legs of the tube. The loop is wide enough to allow elastic twisting about the centerline of the loop. To measure coriolis forces at low flow rates, it is desirable to minimize the mass of the sensor tube. The size of the tubes is critical since the tubes need to be small, yet still be able to maintain the fluid under a sustained pressure. It is also preferred that the pickoff sensors be non-contact, since any contact with or mass loaded on the tube will inhibit coriolis forces.

Pickup sensor technologies may include capacitive, magnetic, piezoresistive, and optical. The piezoresistive strain gage displacement sensors do contact the pipe, but at the point where the annular base is at its lowest displacement and highest stress. This has a minimal effect on the vibration of the tube. Optical techniques include various laser and white light interferometric displacement techniques, triangulation techniques, multiple internal reflection and beam masking techniques, and magnetic displacement techniques include hall effect, eddy current, variable impedance, and magnetoresistive techniques.

The capacitive pick-off sensor technology is used in this embodiment because it has the sensitivity required to measure the tube displacement, is non-contact, and is not affected by the magnetic drive. Each capacitive pick off sensor includes at least one conductive plate connected to a given potential and positioned adjacent to the flow sensor tube so as to form a gap therebetween. The flow sensor tube is connected to a different electrical potential than the conductive plate. The capacitance between the conductive plate and the flow sensor tube changes due to relative motion between the conductive plate and the flow sensor tube when the flow sensor tube vibrates.

In the illustrated embodiment, the conductive plates include first and second plates as described above with reference to fig. 11-13. In the particular embodiment shown, a serrated plate is used as shown in FIG. 13. The capacitive pick-off sensor is assembled as an integral sensor block sized to fit within the sensor housing and sized to be positioned on the rear wall of the housing by the press pin. The conductive plates of the capacitive pick-off sensor are fabricated on a multilayer printed circuit board to provide a protective layer to reduce the derived capacitance and to provide a back contact layer for soldering to the sensor block. Since the capacitive pick-off sensor needs to operate in a vacuum, a low-outgassing material is used in the illustrated embodiment. Standard fiberglass materials are not vacuum compatible. Desirable material properties include that it is vacuum compatible, solderable, bondable to multiple layers with low outgassing bonds, and that it has a low cost electrical constant for simple protective layer structures. In a particular embodiment, a commercially available DRUOID is used.

The sensor block containing the capacitive pick-off sensors can be adjusted to optimize the space relative to the sensor tube. This is achieved by using an electronic discharge machined hinge plate. The conically placed bolts enable linear and angular displacement of the capacitive pick-off sensors. In addition, the conductive plate of the capacitive pick-off sensor includes a pad that enables a wire to be soldered or bonded to the printed circuit board on the front of the sensor block that interconnects the capacitive pick-off sensor with the hermetically sealed electrical contacts that engage the capacitive displacement circuit outside of the sensor housing.

The driving device drives the tube to vibrate in a bending mode. In the embodiment shown, the drive means consists of a small magnet welded to the sensor tube and a small electromagnetic coil that alternately pushes or pulls the magnet. In one embodiment according to the invention, a non-rare earth magnet, and more specifically, a nickel-plated samarium cobalt magnet, is used. Samarium cobalt magnets have good magnetic strength to weight ratios. In this embodiment, the magnet weighs approximately 20 mg. The magnet is positioned at the top, middle of the sensor tube so that the magnetic poles point parallel to the preferred direction of displacement of the tube.

The coil is located outside the sensor housing and connected to the circuit board. The sensor housing is non-magnetic and thus transparent to the magnetic field. The coil is in the form of an open coil opposite the toroidal coil. The coil in this embodiment is a commercially available power inductor rated at least 1 mH. The central axis of the coil is oriented perpendicular to the surface of the magnet. The sensor tube drives resonance with a signal from a capacitive pick-off sensor fed back to the coil drive circuit by a phase-locked loop function. The functionality may be implemented by circuitry or in software.

The sensor tube is mounted to the bottom portion forming an inlet port and an outlet port to provide a flow path from the inlet, through the flow sensor tube, through the flow control section, and through the outlet port of the sensor. The flow control portion includes a meter body having a valve coil and a coil cover located therein. The valve stem and piston are located within the valve coil, and the valve body is connected to the meter body with a seal therebetween. The valve seat, the spring and the opening are positioned in the valve body. End blocks are located at each end of the flow control portion, and seals are provided between the meter body and the end blocks and between the valve body and the end blocks. In an embodiment, the seal comprises an electroformed nickel seal.

In an exemplary embodiment, a coriolis mass flow controller is assembled in the following manner. The meter body and sensor housing, as well as the floor, central post and sensor tube, are assembled and secured in place by locators that spatially locate the sensor tube to the wall of the sensor housing. The remaining parts are positioned by press pins. These parts are then brazed into a unit. The magnet is welded to the sensor tube. The sensor blocks are assembled and mounted into the sensor housing using press pins. The press pin passes approximately 0.5mm through the back of the sensor housing. An air-tight joint is pressed in the back opening of the sensor shell. The sensor block press pin and hermetically sealed joint are laser welded to provide a leak proof seal. A lid is placed on the front side of the sensor housing in a vacuum environment and electron beam welded in place, providing a vacuum sealed environment.

The remaining valve element and end block are then assembled with the meter body. Electroformed nickel seals may be used, or elastomeric O-rings may be used for calibration purposes and then replaced with nickel seals. The circuit is assembled and mounted in the completed assembly. The O-ring is mounted on the base plate and the housing is pressed against the O-ring seal. A cam lock on the base plate rotates to lock the housing. The O-shaped ring is arranged on the circuit covering cover plate. A circuit cover is positioned over the user interface connector. The circuit cover is pressed into place on the housing to act on the O-ring seal. The assembled mass flow controller is then tested and calibrated.

The exemplary coriolis mass flow controller has a modular construction, which provides a number of benefits. As described above, the circuit package is designed to act as an O-ring seal on the flow controller body (between the lower end of the housing and the bottom plate) and use a user interface cover plate on top (between the upper end of the housing and the circuit cover plate). The circuit cover is connected to a user interface board inside the coriolis mass flow controller that is also connected to the sensing and control circuitry. The circuit cover plate and the user interface board together form a user circuit interface. This provides flexibility in configuring the interface to the needs of the user without the need to design different sensing and control circuitry and housings for each user configuration.

For example, a variation of the user interface cover plate would have an electrical conduit with a seal to provide an IP-65/NEMA 4X compliant device. In contrast, an apparatus according to one embodiment of the present invention includes a connector that connects to a user interface board. According to one embodiment of the invention, the circuit cover 337 is extended to provide space for additional components as required for a particular application.

Another feature of the O-ring seal housing is that it provides a tertiary fluid seal, with the sensor tube being a primary fluid seal and the sensor housing being a secondary seal.

In the presence of bubbles in the fluid being controlled, the annular opening around the piston in a conventional valve restricts the passage of bubbles to the outlet of the valve. Bubbles will collect at the inlet of the annular opening to the extent that liquid flow is restricted and flow control fails. If the annular opening is enlarged, the increased space of the piston from the valve coil will reduce the field strength within the magnetic circuit and thereby reduce the force that is required to resist the hydraulic forces generated by the fluid in order to open or close the valve. Thus, in the illustrated coriolis mass flow controller, an annular bore is provided through the piston. The annular aperture is adapted to the shape and size of the bubble, allowing the bubble to pass more freely through the valve. This reduces the possibility of flow obstruction caused by bubbles. The hole through the center of the piston reduces the effect on the magnetic circuit, thus maintaining the force to open and close the valve against hydraulic forces.

With conventional existing valves, the valve piston has a catch seat (captiveseat) made of a deformable material which, when pressed against the contact surface of the bore, will form a seal against water flow. The solenoid type valve may be spring biased against the seat under normal closing conditions and balanced so that the solenoid action lifts the seat from the bore interface. The solenoid-type valve is normally open, the force against the seat is generated by the action of the solenoid, and is balanced so that the spring lifts the seat from the orifice when the magnetic field is removed. The material of the seat may be elastomeric, plastic or a ductile metal.

It is generally preferred to replace the plastic deformation by an elastic deformation so that the seal is recoverable. Alternatively, hard materials may be used for the seat and interface, but they are manufactured to very tight tolerances that include a high degree of mating surfaces between the seat and interface. This is a costly process. The space between the seat and the contact surface is critical to the operation of the valve because the magnetic force on the piston is not linear with displacement. In the case of a normally open valve, the normal position of the piston and the position of the seat relative to the contact surface need to be optimized in order to provide the maximum force when the seat moves against the contact surface, while at the same time allowing a large water flow in the open position. In the case of a normally closed valve, the force of the seat against the contact surface is generated by a spring. The spring force needs to be large enough to close against hydraulic forces and yet minimized to allow the magnetic force to lift the seat from the contact surface a sufficient distance to maximize water flow.

Existing devices may utilize a variety of means to adjust the space between the seat and the contact surface, including placing a shim under the contact surface or seat, or having a threaded adjusting bolt in the orifice member. However, as shown in FIG. 14A, a typical threaded trim within the orifice does not seal between the orifice body 250 and the valve body 252, leaving a leak path 254 between the threaded members 256. Such a threaded adjustment requires a threaded member 256 that seals against fluid leakage. A separate seal, such as an O-ring or gasket, provides this seal.

According to aspects of the invention, the orifice and/or the contact surface are made of a plastic material, such as VESPELWhich can be machined into threaded elements with precise orifices. As shown in the exemplary embodiment illustrated in fig. 14B, threads 256 are sized such that there is an interference fit 258 between port body 250 and valve body 252, thereby sealing and eliminating the need for a separate seal (O-ring or gasket). The orifice contact surface is now a deformable element, simplifying the design and manufacture of the valve seat and piston.

However, the present invention is not necessarily limited to any particular valve piston configuration. In an alternative embodiment, a pump is used in the place of the valve, for example a metering pump may be used for fluid control purposes. In particular, a piezoelectric pump including a plurality of piezoelectric tube portions may be employed. The piezoelectric tube portions are controlled in a manner that causes the different piezoelectric tube portions to contract or expand, thereby allowing the water flow to be controlled as desired.

The particular embodiments disclosed above are illustrative only, as the invention may be modified and practiced in different versions as would be apparent to those skilled in the art having the benefit of the teachings herein. Furthermore, no limitations are intended to the details of construction or design herein shown, other than as described in the claims below. It is therefore evident that the particular embodiments disclosed above may be altered or modified and all such variations are considered within the scope and spirit of the invention and accordingly, the scope of the claims appended hereto.

Claims (5)

1. An apparatus for determining mass flow from a coriolis force induced phase shift between first and second input signals detected by first and second displacement meters, comprising:

a first phase sensitive detector connected to the first and second displacement meters to receive the first and second input signals, the first phase sensitive detector being operable to mix the first and second input signals and to provide an output representative of the mixed first and second input signals;

a first phase shifter connected to the first displacement meter to receive the input signal and operable to output an output signal indicative of a 90 ° phase shift of the first input signal,

a second phase sensitive detector connected to the first phase shifter and the second displacement meter to receive the output of the first phase shifter and the second input signal, the second phase sensitive detector being operable to mix the phase shifted first input signal and the second input signal and provide an output representative of the mixed signal;

a third phase sensitive detector connected to the first displacement meter to receive the first input signal on each of the two inputs, the third phase sensitive detector being operable to mix the first input signal with itself and to provide an output representative of the mixed first input signal;

a fourth phase sensitive detector connected to the first phase shifter and the first displacement meter to receive the output of the first phase shifter and the first input signal, the fourth phase sensitive detector being operable to mix the phase shifted first input signal with the first input signal and provide an output representative of the mixed signal;

a first differential amplifier connected to the first and third phase sensitive detectors to receive the outputs of the first and third phase sensitive detectors and provide a differential signal to the processor; and

a second differential amplifier connected to the second and fourth phase sensitive detectors to receive the outputs of the second and fourth phase sensitive detectors and provide a differential signal to the processor;

the processor is operable to receive the differentiated signals and is operable to calculate a vector norm and phase of the mixed signals relative to each other, wherein the vector phase is proportional to the mass flow.

2. The apparatus of claim 1 further comprising a third output terminal phase synchronized with the first input terminal for providing a sinusoidal output signal to drive the flowtube into resonance.

3. The apparatus of claim 1, wherein the apparatus comprises a synchronous amplifier.

4. The apparatus of claim 1 further comprising first and second low pass filters coupled to the first and second differential amplifiers, the first and second low pass filters operable to filter high frequency components from the mixed signal and output a DC voltage.

5. The apparatus of claim 1, further comprising a second phase shifter connected to receive the first input signal and operable to output a signal indicative of a 90 ° phase shift of the first input signal to the fourth phase sensitive detector.