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JP1746405S - Susceptor cover - Google Patents

Susceptor cover

Info

Publication number
JP1746405S
JP1746405S JP2023000284F JP2023000284F JP1746405S JP 1746405 S JP1746405 S JP 1746405S JP 2023000284 F JP2023000284 F JP 2023000284F JP 2023000284 F JP2023000284 F JP 2023000284F JP 1746405 S JP1746405 S JP 1746405S
Authority
JP
Japan
Prior art keywords
component
susceptor
susceptor cover
cover
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023000284F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2023000284F priority Critical patent/JP1746405S/en
Application granted granted Critical
Publication of JP1746405S publication Critical patent/JP1746405S/en
Priority to US29/896,276 priority patent/USD1082729S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットを構成するカバー部品であり、基台となるサセプタ部品の外周上に載置される部品である。This article is a cover component that constitutes a susceptor unit used to hold a wafer in a semiconductor manufacturing apparatus or the like, and is a component that is placed on the outer periphery of the susceptor component that serves as a base.

JP2023000284F 2023-01-11 2023-01-11 Susceptor cover Active JP1746405S (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023000284F JP1746405S (en) 2023-01-11 2023-01-11 Susceptor cover
US29/896,276 USD1082729S1 (en) 2023-01-11 2023-06-30 Susceptor cover

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023000284F JP1746405S (en) 2023-01-11 2023-01-11 Susceptor cover

Publications (1)

Publication Number Publication Date
JP1746405S true JP1746405S (en) 2023-06-15

Family

ID=86720898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023000284F Active JP1746405S (en) 2023-01-11 2023-01-11 Susceptor cover

Country Status (2)

Country Link
US (1) USD1082729S1 (en)
JP (1) JP1746405S (en)

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Also Published As

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