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JP2000003973A - Package for electronic component - Google Patents

Package for electronic component

Info

Publication number
JP2000003973A
JP2000003973A JP10167893A JP16789398A JP2000003973A JP 2000003973 A JP2000003973 A JP 2000003973A JP 10167893 A JP10167893 A JP 10167893A JP 16789398 A JP16789398 A JP 16789398A JP 2000003973 A JP2000003973 A JP 2000003973A
Authority
JP
Japan
Prior art keywords
lid
electronic component
package
brazing material
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10167893A
Other languages
Japanese (ja)
Inventor
Takeshi Ebisawa
健 海老澤
Yoji Nagano
洋二 永野
Shoichi Nagamatsu
昌一 永松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Communication Equipment Co Ltd
Original Assignee
Toyo Communication Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Communication Equipment Co Ltd filed Critical Toyo Communication Equipment Co Ltd
Priority to JP10167893A priority Critical patent/JP2000003973A/en
Publication of JP2000003973A publication Critical patent/JP2000003973A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an electronic component package which is cheap and excellent in workability in a sealing operation. SOLUTION: A lid 202 is composed of a metal plate 203 and a metal brazing material 204 which is provided, at least, to the one side of the metal plate 203 for cladding. A metallized part 201 is provided in the peripheral frame of a ceramic vessel 100, and an electronic component 104 is mounted in a recessed part. The lid 202 is mounted on the ceramic vessel 100 making the metal brazing material 204 confront the metallized part 201 so as to stop up the opening of the ceramic vessel 100. A pulsating electric power is applied between a pair of roller electrodes which rotate along the opposed edges of the lid 202 to fix the lid 2 to the ceramic vessel 100, whereby a package of this constitution can be hermetically sealed up without using an expensive covering used for conventional seam sealing and a vacuum chamber used for electron beam sealing, so that an electronic component package which is cheap and excellent in production efficiency can be provided.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は電子部品用パッケー
ジに関し、特に、パッケージ蓋に金属ろう材を設けた電
子部品パッケージに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component package, and more particularly to an electronic component package having a package lid provided with a metal brazing material.

【0002】[0002]

【従来の技術】近年、移動体通信機は小型化及び、低価
格化が進み、これに使用される圧電振動子や、SAWフ
ィルタ等の圧電部品を含む電子部品も小型化及び、低価
格化への要求が高くなっている。この様な圧電部品用パ
ッケージは、圧電部品の周波数安定度を高安定に保つ
為、その内部を高真空状態若しくは不活性ガスを封入し
た状態にて封止するのが一般的である。通常、パッケー
ジ内を高真空状態とする封止は、圧電素子の表面に付着
する気体等の異物が少ない為、極めて高い周波数安定度
を有する圧電部品が得られる反面、真空チャンバー内で
の封止作業となる為、生産性が悪いという欠点がある。
即ち、前記真空チャンバーは封止作業時に完全密室とす
る為、封止時のチャンバー内へのパッケージの搬入出が
不可能である。従って、数多くのパッケージを封止する
場合は一回の封止終了後に新たなパッケージをチャンバ
ー内に搬入し、そして再度チャンバー内を高真空状態に
しなければならず、多くの工程と時間を必要としてい
た。これに対し、不活性ガスを封入した圧電部品は、極
めて高い周波数安定度は得ることはできないが、封止作
業は不活性ガスが充満する容器内にて行い、その内部へ
のパッケージを搬入出は、前記容器内の不活性ガスの濃
度が急激に低下しないように前記容器に隣接する位置に
設けたパスボックスを経由して行われる為、連続した封
止作業が可能となり、高効率な生産性を得ることが可能
となる。従って、高真空状態での封止は極めて高い周波
数安定度が要求される高価な圧電部品に用いられ、不活
性ガスでの封止は低価格が要求される圧電部品に用いら
れる。尚、前記パスボックスとは封止作業を行う作業容
器内に外気中より物を搬入する場合に用いられる容器で
あり、作業容器内に搬入する物を入れたパスボックス内
に不活性ガスを充満させた後、作業容器内に物を搬入す
ることにより、作業容器内の不活性ガス濃度を低下させ
ることなく、物品の搬入が自由に行えるものである。そ
して、このようにパッケージ容器内を高真空または不活
性ガス封入状態に保つ為の前記封止は通常シーム溶接方
法を用いて金属蓋と容器とを接合していた。
2. Description of the Related Art In recent years, mobile communication devices have been reduced in size and price, and electronic components including piezoelectric components such as piezoelectric vibrators and SAW filters have also been reduced in size and cost. The demand for is increasing. In order to keep the frequency stability of the piezoelectric component highly stable, such a package for a piezoelectric component is generally sealed in a high vacuum state or a state in which an inert gas is filled. Normally, sealing in which the package is in a high vacuum state can provide a piezoelectric component having extremely high frequency stability because there are few foreign substances such as gas adhering to the surface of the piezoelectric element, but sealing in a vacuum chamber. There is a drawback that productivity is poor because of the work.
That is, since the vacuum chamber is completely closed during the sealing operation, it is impossible to carry the package into and out of the chamber at the time of sealing. Therefore, when many packages are sealed, a new package must be carried into the chamber after one sealing, and the inside of the chamber must be brought into a high vacuum state again, which requires many steps and time. Was. On the other hand, a piezoelectric component filled with inert gas cannot achieve extremely high frequency stability, but the sealing operation is performed in a container filled with inert gas, and the package is loaded and unloaded into and out of the container. Is performed through a pass box provided at a position adjacent to the container so that the concentration of the inert gas in the container does not drop sharply. Character can be obtained. Accordingly, sealing in a high vacuum state is used for expensive piezoelectric components requiring extremely high frequency stability, and sealing with an inert gas is used for piezoelectric components requiring low cost. Note that the pass box is a container used to carry an object from outside air into a working container for performing a sealing operation.The pass box filled with the object to be carried into the working container is filled with an inert gas. Then, by carrying the object into the working container, the article can be freely carried in without lowering the concentration of the inert gas in the working container. In order to keep the inside of the package container in a high vacuum or inert gas sealed state, the metal lid and the container are usually joined by a seam welding method.

【0003】図3は従来のシーム溶接の様子を示すもの
である。シーム溶接による封止はセラミック容器100
にろう付けされたコバーリング101と金属蓋102と
を重ね合わせて一対のローラ電極103をもって前記蓋
102の対向する端に沿って加圧、通電することにより
前記蓋102とコバーリング101との接合部に連続的
にジュール熱が発生し、これにより前記蓋102とコバ
ーリング101とが連続してスポット溶接され封止され
るものである。尚、同図に示す電子部品104は前記セ
ラミック容器100の凹陥部に搭載されており、金属ワ
イヤー等によりセラミック容器100に設けた回路配線
パターンと電気的に接続されている。このようにシーム
封止されたパッケージは気密性に優れるが、シーム封止
を行う為に高価な前記コバーリング101を使用してい
る為、電子部品のコストアップを招来するという問題が
生じると共に、前記接合部に発生する高温なジュール熱
によりセラミック容器100にクラックが発生するとい
う欠点もある。前記セラミック容器100にクラックが
発生するという問題に対しては、例えばコバーリングの
厚みを厚くすることにより、セラミック容器100が急
激且つ、高温に加熱されることを防止することにより改
善されるが、圧電部品の低背化即ち、小型化が不可能で
あるという問題が生じていた。
FIG. 3 shows the state of conventional seam welding. Sealing by seam welding is performed for ceramic container 100
The Kovar ring 101 and the metal lid 102 which are brazed to each other are overlapped, and a pair of roller electrodes 103 are pressed and energized along opposing ends of the lid 102 to form a joint between the lid 102 and the Kovar ring 101. Joule heat is continuously generated, whereby the lid 102 and the Kovar ring 101 are continuously spot-welded and sealed. The electronic component 104 shown in the figure is mounted in a recess of the ceramic container 100 and is electrically connected to a circuit wiring pattern provided on the ceramic container 100 by a metal wire or the like. Although the package sealed in such a manner is excellent in airtightness, since the expensive Kovar ring 101 is used for performing the seam sealing, there is a problem that a cost of an electronic component is increased, and There is also a disadvantage that cracks occur in the ceramic container 100 due to high temperature Joule heat generated at the joint. The problem of cracks occurring in the ceramic container 100 is improved by preventing the ceramic container 100 from being rapidly and heated to a high temperature, for example, by increasing the thickness of kovaring. There has been a problem that it is impossible to reduce the height of components, that is, to reduce the size.

【0004】図4は圧電部品の低背化が可能な従来の他
のパッケージ封止方法を示す断面図である。同図(a)
はパッケージの分解構成図を示し、同図(b)は組み立
て時の断面図を示す。同図に示す電子部品用パッケージ
は先に説明した図4に示すものと同様にその内部に電子
部品104を搭載したセラミック容器100と金属製の
蓋202とから構成されている。更に、該セラミック容
器100はその外周枠上にメタライズ部201を設けた
構造としている。該メタライズ部201はタングステン
またはモリブデン等の金属膜表面にニッケルまたは金等
によりメッキを施した構造としている。前記蓋202は
前記セラミック容器100の開口部と同一形状の金属板
203と、該金属板203の片面全体にクラッド化され
た金属ろう材204とで構成されている。例えば前記金
属板203としては鉄系合金を、前記金属ろう材204
は銀合金やアルミニウム合金等の金属材を用いる。先
ず、同図(b)に示すように前記蓋202の金属ろう材
204を付着した面と前記セラミック容器100の外周
枠上のメタライズ部201とが接触し、前記セラミック
容器100の開口部を封止するように配置する。そし
て、前記蓋202の上部から前記セラミック容器100
の外周縁部分に電子ビームを照射して前記金属ろう材を
溶解させることにより、前記蓋202とセラミック容器
100のメタライズ部201とが溶接されて電子部品用
パッケージが密封される。
FIG. 4 is a sectional view showing another conventional package sealing method capable of reducing the height of a piezoelectric component. FIG.
1 shows an exploded configuration view of the package, and FIG. 1B shows a sectional view at the time of assembly. The electronic component package shown in FIG. 8 includes a ceramic container 100 in which an electronic component 104 is mounted and a metal lid 202 similarly to the package shown in FIG. 4 described above. Further, the ceramic container 100 has a structure in which a metallized portion 201 is provided on the outer peripheral frame. The metallized portion 201 has a structure in which the surface of a metal film such as tungsten or molybdenum is plated with nickel or gold. The lid 202 includes a metal plate 203 having the same shape as the opening of the ceramic container 100, and a metal brazing material 204 clad on one side of the metal plate 203. For example, as the metal plate 203, an iron-based alloy is used, and the metal brazing material 204 is used.
Uses a metal material such as a silver alloy or an aluminum alloy. First, as shown in FIG. 2B, the surface of the lid 202 on which the metal brazing material 204 is adhered comes into contact with the metallized portion 201 on the outer peripheral frame of the ceramic container 100, and the opening of the ceramic container 100 is sealed. Arrange to stop. Then, the ceramic container 100 is placed from above the lid 202.
By irradiating the outer periphery with an electron beam to dissolve the metal brazing material, the lid 202 and the metallized portion 201 of the ceramic container 100 are welded to seal the electronic component package.

【0005】[0005]

【本発明が解決しようとする課題】しかしながら、電子
ビームの照射は、周知のように真空中で行うことが必要
である為、真空チャンバー内で行われ、これによりパッ
ケージ内は高真空状態で封止される。従って、先に説明
した通り、真空封止は生産性が悪い為、圧電部品の低価
格化が不可能である。即ち、低価格を必要とする低背な
圧電部品に対しては電子ビームによる封止方法ではその
要求を達成し得ないという問題が生じていた。
However, since it is necessary to perform electron beam irradiation in a vacuum as is well known, the irradiation is performed in a vacuum chamber, whereby the package is sealed in a high vacuum state. Is stopped. Therefore, as described above, vacuum sealing has low productivity, so that it is impossible to reduce the cost of piezoelectric components. That is, there has been a problem that the demand for a low-profile piezoelectric component requiring a low price cannot be achieved by the sealing method using an electron beam.

【0006】[0006]

【課題を解決するための手段】上記課題を解決する為
に、本発明に係わる電子部品用パッケージの請求項1記
載の発明は金属製の蓋とセラミック容器から成る電子部
品用パッケージであって、前記蓋の少なくとも片面の周
縁部にはクラッド化した金属ろう材または、該金属ろう
材の表面に金属メッキを設けた金属層が設けてあり、ま
た、前記セラミック容器は電子部品を収納する為の凹陥
部と、該セラミック容器の枠上面にメタライズ部を有し
ており、前記蓋を金属ろう材面が前記セラミック容器の
メタライズ部と接触するよう重ね、且つ、両者をシーム
溶接により固着したことを特徴とする。
According to a first aspect of the present invention, there is provided a package for an electronic component comprising a metal lid and a ceramic container. At least one peripheral edge of the lid is provided with a clad metal brazing material or a metal layer provided with metal plating on the surface of the metal brazing material, and the ceramic container is used for housing electronic components. The recessed portion has a metallized portion on the upper surface of the frame of the ceramic container, the lid is overlapped so that the surface of the brazing metal contacts the metallized portion of the ceramic container, and both are fixed by seam welding. Features.

【0007】[0007]

【本発明の実施の形態】図1は本発明の実施例を示す電
子部品用パッケージの構造を示すものである。同図に示
す蓋202は鉄−ニッケル−コバルト系合金の金属板2
03の少なくとも片面全体には液相線温度が183℃〜
957℃の範囲である銀系合金または金系合金若しく
は、その他の金属系合金をクラッド化した金属ろう材2
04の層が設けられている。尚、金属板203と金属ろ
う材204とのクラッド化は2枚の金属板を圧延により
接合することにより可能である。また、同図に示すセラ
ミック容器100の凹陥部内には電子部品104が搭載
されており、更に、該セラミック容器100の外周枠上
には例えばニッケルメッキや金メッキ等が施されたタン
グステンまたはモリブデン等のメタライズ部201が設
けられている。本発明と図4に示すパッケージとの大き
く異なる点は封止時に電子ビーム溶接方法を用いる代わ
りにシーム溶接方法を用いて封止を行うところにある。
即ち、図1に示すようにメタライズ部201と金属ろう
材204とを重ね合わせ、一対のローラ電極103をも
って、前記蓋202の対向する端に沿って、加圧、通電
することによりメタライズ部201と金属ろう材204
とを連続的にスポット溶接し、これによりパッケージ内
部は気密保持される。また、金属ろう材はコバーリング
と比較し、融点温度が低いので低温での溶接が可能であ
る。従って、前記ローラ電極103より供給される電流
が小さくても溶解し、コバーリングより薄い金属ろう材
であってもセラミック容器100は封止時に発生する熱
により破損することはない。
FIG. 1 shows a structure of an electronic component package according to an embodiment of the present invention. The lid 202 shown in the figure is a metal plate 2 of an iron-nickel-cobalt alloy.
03 has a liquidus temperature of 183 ° C.
A metal brazing material 2 clad with a silver alloy, a gold alloy, or another metal alloy having a temperature range of 957 ° C.
04 layers are provided. The cladding of the metal plate 203 and the metal brazing material 204 can be performed by joining two metal plates by rolling. In addition, an electronic component 104 is mounted in a recessed portion of the ceramic container 100 shown in the figure, and further, for example, tungsten or molybdenum plated with nickel or gold is provided on an outer peripheral frame of the ceramic container 100. A metallizing unit 201 is provided. A major difference between the present invention and the package shown in FIG. 4 lies in that sealing is performed using a seam welding method instead of using an electron beam welding method at the time of sealing.
That is, as shown in FIG. 1, the metallized portion 201 and the metal brazing material 204 are overlapped, and a pair of roller electrodes 103 are pressed and energized along opposing ends of the lid 202 to form a contact with the metallized portion 201. Metal brazing material 204
Are continuously spot-welded to keep the inside of the package airtight. Further, the metal brazing material has a lower melting point temperature as compared with Kovaring, so that welding at a lower temperature is possible. Therefore, even if the current supplied from the roller electrode 103 is small, it is melted, and even if the metal brazing material is thinner than Kovaring, the ceramic container 100 is not damaged by the heat generated at the time of sealing.

【0008】図2は本発明に基づくパッケージの他の実
施例を示す側面断面構成図である。同図の構造が図1に
示しました実施例と異なる点は、金属板203の少なく
とも片面に金属ろう材204を施し、更に、該金属ろう
材204の表面にニッケル等を例えば1が0.1μm〜
3μmの厚みとなるようにメッキ1したところにある。
このようにメッキ1を施せば、封止時に金属ろう材20
4が融解した際に発生する金属ろう材の屑が電子部品表
面に飛び散り、該電子部品の電気的特性不良を起こすと
いうことを防ぐことが可能となる。即ち、金属ろう材2
04は融解した際に、該金属ろう材204及び、その内
部に含まれるフラックス剤が気化し、この気化ガスが噴
き出す勢いにより飛び散る金属ろう材の屑を金属ろう材
より融点温度が高いメッキ膜により抑えこみ、電子部品
表面に金属ろう材の屑が付着することにより該電子部品
の回路の短絡を防ぐことが可能となる。また、前記蓋2
02の寸法を前記セラミック容器100の外周より例え
ば0.1mm〜0.05mm程小さくすれば、封止後に
蓋202の外周縁に金属ろう材によるフィレットが形成
されやすくなり、より一層の封止強度が得られることは
言うまでもない。以上本発明の実施例では金属ろう材を
蓋の片面に設けた構成をもちいて説明したが、本発明は
これに限るものでなく蓋の両面に金属ろう材を設けた場
合であっても、図1のパッケージ構造と同等の機能が得
られ、更に、封止作業時に蓋の金属ろう材面の確認をす
ることなく封止可能である為、より作業性に優れること
は言うまでもない。
FIG. 2 is a side sectional view showing another embodiment of the package according to the present invention. The structure of the figure differs from that of the embodiment shown in FIG. 1 in that a metal brazing material 204 is applied to at least one surface of a metal plate 203, and furthermore, nickel or the like is applied to the surface of the metal brazing material 204, for example, when 1 is set to 0.1. 1 μm ~
This is where plating 1 was applied to a thickness of 3 μm.
If the plating 1 is applied in this manner, the metal brazing material 20 can be used at the time of sealing.
It is possible to prevent the waste of the metal brazing material generated when 4 is melted from scattering on the surface of the electronic component and causing the electrical characteristics of the electronic component to be defective. That is, metal brazing material 2
04 melts the metal brazing material 204 and the flux contained in the metal brazing material 204 upon melting, and disperses the metal brazing material scattered by the force of the vaporized gas by a plating film having a melting point higher than that of the metal brazing material. As a result, it is possible to prevent a short circuit in the circuit of the electronic component due to adhesion of the metal brazing material to the surface of the electronic component. In addition, the lid 2
When the size of the ceramic container 100 is smaller than the outer circumference of the ceramic container 100 by, for example, about 0.1 mm to 0.05 mm, a fillet made of a metal brazing material is easily formed on the outer peripheral edge of the lid 202 after sealing, and the sealing strength is further improved. Needless to say, this is obtained. Although the embodiment of the present invention has been described using the configuration in which the metal brazing material is provided on one surface of the lid, the present invention is not limited to this, even when the metal brazing material is provided on both surfaces of the lid, A function equivalent to that of the package structure of FIG. 1 is obtained, and furthermore, the sealing can be performed without checking the metal brazing material surface of the lid during the sealing operation.

【0009】[0009]

【本発明の効果】以上説明したように前記請求項1記載
の発明は、前記蓋と前記凹陥状の容器とを該蓋の表面に
設けた金属ろう材をシーム溶接したので、真空チャンバ
ーを必要とせず、また、短時間での封止が可能である
為、生産性の向上に伴う電子部品の低価格化を達成し得
るという効果を奏する。また、本発明に基づく電子部品
用パッケージは部品全体を加熱するハンダ封止と比較し
て加熱時間が不要である為生産性に優れ電子部品の低コ
スト化が図れると共に、封止部分のみの加熱である為、
電子部品への熱衝撃が無く、これにより電気的特性の長
期安定性に優れた電子部品が得られるという効果も奏す
る。
As described above, according to the first aspect of the present invention, since the metal brazing material provided on the surface of the lid and the recessed container is seam-welded, a vacuum chamber is required. In addition, since sealing can be performed in a short time, there is an effect that it is possible to achieve a reduction in the price of electronic components with an improvement in productivity. In addition, the package for an electronic component according to the present invention does not require a heating time as compared with soldering for heating the entire component, so that the productivity is excellent and the cost of the electronic component can be reduced, and the heating of only the sealed portion is achieved. Because
There is no thermal shock to the electronic component, which also provides an effect that an electronic component having excellent long-term stability of electrical characteristics can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に基づく電子部品用パッケージ封止方法
の一実施例の側面断面図を示すものである。
FIG. 1 is a side sectional view showing one embodiment of an electronic component package sealing method according to the present invention.

【図2】本発明に基づく電子部品用パッケージ封止方法
の他の一実施例の側面断面図を示すものである。
FIG. 2 is a side sectional view of another embodiment of the electronic component package sealing method according to the present invention.

【図3】従来のシーム封止工程を説明する図を示すもの
である。
FIG. 3 is a diagram illustrating a conventional seam sealing step.

【図4】従来の電子ビーム封止による電子部品用パッケ
ージの側面断面構造図を示すものである。 (a)分解構成図を示すものである。 (b)側面断面図を示すものである。
FIG. 4 is a side sectional structural view of a conventional electronic component package by electron beam sealing. (a) is an exploded configuration diagram. (B) It is a side sectional view.

【符号の説明】[Explanation of symbols]

1金属メッキ、100セラミック容器、101コバーリ
ング、102蓋、103ローラ電極、104電子部品、
201メタライズ部、202蓋、203金属板、204
金属ろう材
1 metal plating, 100 ceramic container, 101 kovaring, 102 lid, 103 roller electrode, 104 electronic components,
201 metallized part, 202 lid, 203 metal plate, 204
Metal brazing material

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】金属製の蓋とセラミック容器から成る電子
部品用パッケージであって、前記蓋の少なくとも片面の
周縁部にはクラッド化した金属ろう材または、該金属ろ
う材の表面に金属メッキを設けた金属層が設けてあり、
また、前記セラミック容器は電子部品を収納する為の凹
陥部と、該セラミック容器の枠上面にメタライズ部を有
しており、前記蓋を金属ろう材面が前記セラミック容器
のメタライズ部と接触するよう重ね、且つ、両者をシー
ム溶接により固着したことを特徴とする電子部品用パッ
ケージ。
An electronic component package comprising a metal lid and a ceramic container, wherein at least one peripheral edge of the lid is provided with a clad metal brazing material or a metal plating on the surface of the metal brazing material. The provided metal layer is provided,
Further, the ceramic container has a concave portion for accommodating an electronic component and a metallized portion on a top surface of the frame of the ceramic container, and the lid is made such that the surface of the metal brazing material contacts the metallized portion of the ceramic container. A package for electronic parts, wherein the two parts are overlapped and fixed by seam welding.
JP10167893A 1998-06-16 1998-06-16 Package for electronic component Pending JP2000003973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10167893A JP2000003973A (en) 1998-06-16 1998-06-16 Package for electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10167893A JP2000003973A (en) 1998-06-16 1998-06-16 Package for electronic component

Publications (1)

Publication Number Publication Date
JP2000003973A true JP2000003973A (en) 2000-01-07

Family

ID=15858027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10167893A Pending JP2000003973A (en) 1998-06-16 1998-06-16 Package for electronic component

Country Status (1)

Country Link
JP (1) JP2000003973A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6921970B2 (en) 2001-11-12 2005-07-26 Neomax Materials Co., Ltd. Package for electronic parts, lid thereof, material for the lid and method for producing the lid material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6921970B2 (en) 2001-11-12 2005-07-26 Neomax Materials Co., Ltd. Package for electronic parts, lid thereof, material for the lid and method for producing the lid material

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