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JP2000035583A - Manufacturing method of flat display device and flat display device - Google Patents

Manufacturing method of flat display device and flat display device

Info

Publication number
JP2000035583A
JP2000035583A JP20156098A JP20156098A JP2000035583A JP 2000035583 A JP2000035583 A JP 2000035583A JP 20156098 A JP20156098 A JP 20156098A JP 20156098 A JP20156098 A JP 20156098A JP 2000035583 A JP2000035583 A JP 2000035583A
Authority
JP
Japan
Prior art keywords
substrate
spacer
display device
liquid crystal
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20156098A
Other languages
Japanese (ja)
Inventor
Kazuya Iwamoto
一也 岩本
Tetsuya Nishino
哲哉 西野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP20156098A priority Critical patent/JP2000035583A/en
Publication of JP2000035583A publication Critical patent/JP2000035583A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

(57)【要約】 【課題】 スペーサ柱による配向膜の損傷を抑えて配向
不良を軽減し歩留まりを向上させる。 【解決手段】 液晶を挟む2枚の基板11、21の間隙
をスペーサ柱25により保持する液晶表示装置におい
て、一方の基板21にフォトレジストで切頭角錐状にし
たスペーサ柱を配置する。スペーサ柱の頂面26の周囲
に上方に突出する突起27を形成しておき、基板合わせ
工程でスペーサ柱の突起27が対向する基板の配向膜1
6に接触するようにし、配向膜16を損傷することがあ
っても、最小にとどめて液晶配向に実質的な影響が生じ
ないようにする。
(57) [Summary] [PROBLEMS] To improve the yield by suppressing damage to an alignment film due to spacer pillars to reduce alignment defects. SOLUTION: In a liquid crystal display device in which a gap between two substrates 11 and 21 sandwiching a liquid crystal is held by a spacer column 25, a spacer column having a truncated pyramid shape made of photoresist is disposed on one substrate 21. A projection 27 projecting upward is formed around the top surface 26 of the spacer pillar, and the alignment film 1 of the substrate is opposed to the projection 27 of the spacer pillar in the substrate alignment step.
6, so that even if the alignment film 16 may be damaged, it is minimized so as not to substantially affect the liquid crystal alignment.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は平面表示装置、とく
に液晶表示装置に関する。
The present invention relates to a flat panel display, and more particularly to a liquid crystal display.

【0002】[0002]

【従来の技術】平面表示装置の一種である液晶表示装置
はTVやOA用表示装置として薄型、軽量の利点から大
量に利用されている。液晶表示装置は多数の画素を形成
した2枚のガラス基板間に液晶層を挟む構造であり、液
晶層の厚みを正確に確保するために基板間にスペーサを
挿入する。代表的なスペーサ配置として球状微粒子を基
板間に散布する方法があるが、スペーサが画素開口部を
塞ぐことを避けられず、画素不良が発生する。
2. Description of the Related Art A liquid crystal display device, which is a kind of flat display device, is widely used as a display device for TV and OA because of its thinness and light weight. The liquid crystal display device has a structure in which a liquid crystal layer is sandwiched between two glass substrates on which a number of pixels are formed, and a spacer is inserted between the substrates in order to ensure the thickness of the liquid crystal layer accurately. As a typical spacer arrangement, there is a method of dispersing spherical fine particles between the substrates. However, it is inevitable that the spacer blocks the pixel opening, and a pixel defect occurs.

【0003】これを防ぐために、一方の基板上の画素を
区画する非開口部部分に樹脂製のスペーサ柱を設置する
ことにより基板間の間隙を保持する方法が提案されてい
る。スペーサ柱を用いることによって液晶表示装置の品
質向上、コスト削減、省プロセス等に効果がある。
In order to prevent this, there has been proposed a method of maintaining a gap between substrates by disposing a resin spacer pillar in a non-opening portion that partitions pixels on one substrate. The use of the spacer columns is effective in improving the quality of the liquid crystal display device, reducing costs, saving processes, and the like.

【0004】[0004]

【発明が解決しようとする課題】液晶表示装置は液晶層
を配向する配向膜を両基板面に塗布しており、液晶を注
入する前のセル組立工程では、配向処理された両基板が
洗浄され、一方の基板周辺にシール剤を塗布して基板貼
合わせ機(マウンター)において、仮位置合わせ、本位
置合わせの2操作で貼り合わせる。仮貼り合せで一方の
基板に配置したスペーサ柱の頂部が画素開口部に接触す
ることがあり、仮貼り合わせが荒い位置合わせのため、
またはマウンターの精度が良好でないときに、本位置合
わせでスペーサ柱位置がずれた場合に、他方の基板の配
向膜を損傷し液晶の配向不良を引き起こす場合がある。
In a liquid crystal display device, an alignment film for aligning a liquid crystal layer is applied to both substrate surfaces. In a cell assembling process before injecting liquid crystal, both alignment processed substrates are cleaned. Then, a sealant is applied to the periphery of one of the substrates, and the substrates are bonded by a substrate bonding machine (mounter) by two operations of temporary positioning and final positioning. In the temporary bonding, the top of the spacer pillar arranged on one substrate may come into contact with the pixel opening, and the temporary bonding is a rough alignment,
Alternatively, when the position of the spacer column is displaced in the main alignment when the accuracy of the mounter is not good, the alignment film of the other substrate may be damaged, resulting in poor alignment of the liquid crystal.

【0005】従来のスペーサ柱形状は切頭角錐形の頂部
が面接触をするため、接触部の配向乱れが大きくなり、
セル或いはモジュールで点灯した場合、表示不良とな
る。
[0005] In the conventional spacer column shape, the truncated pyramid apex makes surface contact, so that the orientation disorder of the contact portion becomes large,
If the light is turned on in a cell or a module, a display failure occurs.

【0006】本発明はこのようなスペーサ柱の基板開口
部への接触による表示不良を防ぐことを目的とするもの
である。
An object of the present invention is to prevent a display defect due to such contact of the spacer pillar with the opening of the substrate.

【0007】[0007]

【課題を解決するための手段】本発明は、画素を形成す
る電極および配向膜を有する2枚の基板を前記配向膜が
対向するように配置し、前記一方の基板にスペーサ柱を
形成して前記他方の基板に前記スペーサ柱の頂面を当接
し前記2枚の基板の間隙を保持させ前記基板の周囲をシ
ール剤で貼り合わせる平面表示装置の製造方法におい
て、前記他の基板に当接する前記スペーサ柱の頂面の周
囲の少なくとも一部にこの頂面上に突出する突起を形成
してなる平面表示装置の製造方法にある。
According to the present invention, two substrates having an electrode for forming a pixel and an alignment film are arranged so that the alignment films face each other, and spacer pillars are formed on the one substrate. In the method of manufacturing a flat display device, the top surface of the spacer pillar is brought into contact with the other substrate to hold a gap between the two substrates, and the periphery of the substrate is bonded with a sealant. The present invention relates to a method for manufacturing a flat panel display device, comprising a projection formed on at least a part of a periphery of a top surface of a spacer column.

【0008】また、前記スペーサ柱は前記2枚の基板の
貼り合わせ時に前記突起がつぶれて前記頂面が他方の基
板に当接することを特徴とする平面表示装置の製造方法
にある。
In the method of manufacturing a flat display device, the spacer pillar may be crushed when the two substrates are bonded, and the top surface may contact the other substrate.

【0009】また、前記スペーサ柱が前記画素間の非開
口部に形成されてなるの平面表示装置の製造方法にあ
る。
[0009] Further, there is provided a method for manufacturing a flat display device, wherein the spacer pillar is formed in a non-opening portion between the pixels.

【0010】また、画素を形成する電極および液晶の配
向膜を有する2枚の基板間に間隙を保持するために配置
され一方の基板に形成され他方の基板に当接するスペー
サ柱が当接する頂面に突起を形成してなる平面表示装置
にある。
Also, a top surface is arranged to hold a gap between two substrates having electrodes for forming pixels and a liquid crystal alignment film, and a spacer pillar formed on one substrate and in contact with the other substrate is in contact therewith. In a flat panel display device having a projection formed thereon.

【0011】以上のように本発明は例えば切頭角錐形ス
ペーサ柱の頂部面の周囲に突起物を有せしめることで、
マウンターなどによる貼り合わせ時に対向する基板とこ
の突起を点接触させる。これによりマウンタでの貼り合
わせ精度が悪くスペーサ柱が開口部に接触しても、点接
触するのでセルまたはモジュールで点灯した場合でも肉
眼で表示不良を確認することができない。更に、組立後
の封着により突起部はつぶれて、スペーサ柱頂部は平面
となりカラーフィルタ基板と電極基板との間隙を支える
ことができる。
As described above, according to the present invention, for example, a projection is provided around the top surface of a truncated pyramid-shaped spacer column.
At the time of bonding by a mounter or the like, the opposing substrate and this projection are brought into point contact. As a result, even if the spacer pillars come into contact with the openings and the spacer pillars come into contact with the openings, they are in point contact with each other. Therefore, even if the cells or the modules are turned on, it is not possible to visually confirm display defects. Further, the projections are crushed by the sealing after assembly, and the tops of the spacer pillars become flat, so that the gap between the color filter substrate and the electrode substrate can be supported.

【0012】[0012]

【発明の実施の形態】本発明の実施の形態を図面により
説明する。
Embodiments of the present invention will be described with reference to the drawings.

【0013】(実施の形態1)本実施の形態は図1乃至
図4に示すように、アクティブマトリスク型液晶表示装
置であり、12インチ形のアレイ基板を形成するガラス
の第1の基板11と、対向基板を形成するガラスの第2
の基板21はシール剤30により、所定の間隙をあけて
対向保持されている。アレイ基板11は基板上に信号線
や走査線などの配線13、スイッチ用薄膜トランジスタ
14および画素電極15が形成され、その上にポリイミ
ドでなる液晶配向膜16が塗布され、さらに、基板の周
辺に駆動回路17と電極パッド18が形成されている。
図2に示すように、配線13は画素電極15間の非開口
部に延在し、各画素電極15の領域が画素の開口部とな
る。
(Embodiment 1) As shown in FIGS. 1 to 4, this embodiment is an active matrix type liquid crystal display device, and a first substrate 11 made of glass forming a 12-inch array substrate. And the second of the glass forming the opposing substrate.
The substrates 21 are held opposite to each other with a predetermined gap by a sealant 30. The array substrate 11 has wirings 13 such as signal lines and scanning lines, switching thin film transistors 14 and pixel electrodes 15 formed on the substrate, and a liquid crystal alignment film 16 made of polyimide is coated thereon. A circuit 17 and an electrode pad 18 are formed.
As shown in FIG. 2, the wiring 13 extends to a non-opening between the pixel electrodes 15, and a region of each pixel electrode 15 becomes an opening of the pixel.

【0014】対向基板21はカラーフィルタ22、IT
O透明導電膜の共通電極23およびその上面に液晶配向
膜24が形成されている。カラーフィルタ22は赤フィ
ルタ22R、緑フィルタ22Gおよび青フィルタ22B
のストライプの組合わせを順次配列したもので、各フィ
ルタ間に光吸収体22BMを配置している。
The opposing substrate 21 includes a color filter 22, an IT
A common electrode 23 made of an O transparent conductive film and a liquid crystal alignment film 24 are formed on the common electrode 23. The color filter 22 includes a red filter 22R, a green filter 22G, and a blue filter 22B.
Are sequentially arranged, and a light absorber 22BM is arranged between the filters.

【0015】図3に示すように、対向基板21にスペー
サ柱25が光吸収体22BM上に設けられ、図2に示す
非開口部の位置に対応して赤、緑、青画素の一組ごとに
配置される。
As shown in FIG. 3, a spacer column 25 is provided on the light absorbing body 22BM on the counter substrate 21, and a set of red, green, and blue pixels corresponding to the positions of the non-opening portions shown in FIG. Placed in

【0016】図4に示すようにスペーサ柱25は底面積
が20μm×15μmの切頭角錐形をなし、頂面26の
周囲に頂面上に突出する縁状突起27を形成している。
スペーサ柱25はフォトレジストで形成することがで
き、基板一面に形成したアクリル樹脂のレジスト膜を光
エッチングによりパターン化する。縁状突起27はフォ
トレジストの露光時間を調節することによって実現する
ことができる。例えば紫外線照射、300mJ/cm2
で光硬化させてスペーサ柱を形成する場合、2倍以上例
えば1000mJ/cm2 の光照射を行うと、角錐切頭
部の周縁にバリ状の縁状突起をつくることができる。こ
の突起は幅狭で先端がとがっているので、アレイ基板上
の配向膜16に当接しても、配向膜に接触する面積は小
さく、配向膜を損傷する面積が少ない。さらに、機械的
に弱く柔軟性があるため、2枚の基板同士を間隙をあけ
て対峙させると、突起はつぶれて間隙の保持は実質的に
スペーサ柱の頂面26までの距離hで定まる。間隙を液
晶層の厚みを得る例えば5μmとすれば、それに応じて
距離hを定めればよい。
As shown in FIG. 4, the spacer pillar 25 has a truncated pyramid shape with a bottom area of 20 μm × 15 μm, and has an edge-like projection 27 protruding above the top surface 26 around the top surface 26.
The spacer pillar 25 can be formed of a photoresist, and a resist film of an acrylic resin formed on one surface of the substrate is patterned by photoetching. The edge protrusion 27 can be realized by adjusting the exposure time of the photoresist. For example, ultraviolet irradiation, 300 mJ / cm 2
When light irradiation is performed twice or more, for example, at 1000 mJ / cm 2 to form a spacer column, a burr-like edge-shaped protrusion can be formed on the periphery of the truncated pyramid. Since this projection is narrow and has a sharp tip, even if it comes into contact with the alignment film 16 on the array substrate, the area in contact with the alignment film is small and the area that damages the alignment film is small. Further, since the two substrates are mechanically weak and have flexibility, when the two substrates are opposed to each other with a gap therebetween, the protrusion is crushed and the retention of the gap is substantially determined by the distance h to the top surface 26 of the spacer column. If the gap is, for example, 5 μm for obtaining the thickness of the liquid crystal layer, the distance h may be determined accordingly.

【0017】2枚の基板11、21の貼り合わせは対向
基板21の周辺にシール剤30を塗布し、マウンター上
で2枚の基板を各配向膜が対向するように仮位置合わせ
してから、適性位置で貼り合わせる。
The two substrates 11 and 21 are bonded together by applying a sealant 30 to the periphery of the counter substrate 21 and temporarily aligning the two substrates on a mounter such that the respective alignment films face each other. Attach at proper position.

【0018】このようなスペーサ柱を用いてセルを製作
し評価したところ、マウンターでの貼り合わせ精度が悪
くスペーサ柱頂部が画素開口部に接触した場合、顕微鏡
により頂部の4隅が点接触したことによる配向不良が観
察されたが、肉眼で表示不良は確認できなかった。
When a cell was manufactured using such a spacer column and evaluated, it was found that when the bonding accuracy of the mounter was poor and the top of the spacer column contacted the pixel opening, the four corners of the top were point-contacted with a microscope. However, poor display could not be confirmed with the naked eye.

【0019】(実施の形態2)図5に本実施の形態を示
す。アレイ基板11上にアモルファスシリコン膜41と
ゲート絶縁膜42を積層し、その上にゲート電極となる
ゲート線43、層間絶縁膜44を形成し、スルーホール
を経てアモルファスシリコン41にドレイン電極45、
ソース電極46を接続する。これにより薄膜トランジス
タ(TFT)を構成している。層間絶縁膜44上に保護
膜47を被覆し、その上面の薄膜トランジスタの領域に
遮光膜48が設けられ、画素電極15としてソース電極
46に接続されたITOの透明膜が配置される。保護膜
47はシリコンの低温酸化膜などで形成され、遮光膜4
8も同じく無機質膜などで形成される。この遮光膜48
上に多数の微小スペーサ柱50がアレイ基板11と対向
基板21間の間隙を保持するために形成される。最上層
を液晶配向膜16で覆い、配向処理が施される。
(Embodiment 2) FIG. 5 shows this embodiment. An amorphous silicon film 41 and a gate insulating film 42 are stacked on the array substrate 11, a gate line 43 serving as a gate electrode and an interlayer insulating film 44 are formed thereon, and a drain electrode 45 is formed on the amorphous silicon 41 through a through hole.
The source electrode 46 is connected. This constitutes a thin film transistor (TFT). A protective film 47 is coated on the interlayer insulating film 44, a light-shielding film 48 is provided in a region of the thin film transistor on the upper surface thereof, and a transparent film of ITO connected to the source electrode 46 is arranged as the pixel electrode 15. The protection film 47 is formed of a low-temperature oxide film of silicon or the like.
8 is also formed of an inorganic film or the like. This light shielding film 48
A large number of minute spacer columns 50 are formed on the array substrate 11 to maintain a gap between the array substrate 11 and the counter substrate 21. The uppermost layer is covered with a liquid crystal alignment film 16, and an alignment process is performed.

【0020】また、対向基板21の一面はカラーフィル
タ22、ITOの共通電極23および液晶配向膜24が
被着され、液晶配向膜の表面に配向処理が施される。
A color filter 22, a common electrode 23 of ITO and a liquid crystal alignment film 24 are adhered to one surface of the counter substrate 21, and an alignment process is performed on the surface of the liquid crystal alignment film.

【0021】これらの基板11、21を各電極形成側の
面、すなわち配向膜面が対向するようにして合わせスペ
ーサ柱50により所定の間隙をあけてシール剤で封着さ
れる。この間隙に液晶組成物が充填されて液晶層60と
して挟持される。
The substrates 11 and 21 are sealed with a sealing agent at a predetermined gap by spacer columns 50 so that the surfaces on the respective electrode forming sides, that is, the alignment film surfaces are opposed to each other. The gap is filled with a liquid crystal composition and sandwiched as a liquid crystal layer 60.

【0022】スペーサ柱50はネガ型感光性有機樹脂
(日本合成ゴム製)をスピンコーターにより6.0μm
の厚さに塗布し紫外線光により1000mJ/cm2
露光を行い、弱アルカリ溶液(TMAH(テトラメチル
アンモニウムハイドライド)0.5%水溶液)により現
像を行うと、突起51のある柱が形成される。さらに、
オーブンにより200℃でキュアを行い安定化させスペ
ーサ柱とする。
The spacer column 50 is made of a negative photosensitive organic resin (manufactured by Nippon Synthetic Rubber Co., Ltd.) of 6.0 μm by spin coater.
And exposed to ultraviolet light at 1000 mJ / cm 2 and developed with a weak alkaline solution (TMAH (tetramethylammonium hydride) 0.5% aqueous solution) to form columns with protrusions 51. . further,
Curing is performed at 200 ° C. in an oven to stabilize and form spacer pillars.

【0023】このスペーサ柱をもつセルを評価したとこ
ろ、仮位置合わせでスペーサ柱頂部が画素開口部に接触
した場合でも、肉眼で表示不良は確認できなかった。
When the cell having the spacer pillar was evaluated, no defective display could be confirmed with the naked eye even when the top of the spacer pillar was in contact with the pixel opening during the temporary alignment.

【0024】なお、スペーサ柱は上記した切頭角錐形の
ほか、円錐形な角柱、円柱などで形成しても同様の効果
を発揮することができる。
The same effect can be obtained by forming the spacer column from a truncated pyramid as described above, or from a conical prism or column.

【0025】[0025]

【発明の効果】 本発明のスペーサ柱は、スペーサ柱が
対向基板の開口部への接触による配向不良を軽減するの
で、液晶セルの歩留まりが向上する。また、スペーサ柱
が非開口部へ接触させるためのマウンターでの貼り合わ
せ精度を向上させる必要が無くなり、製造装置改造のコ
ストを省くことができる。
According to the spacer pillar of the present invention, since the spacer pillar reduces the alignment failure due to the contact with the opening of the counter substrate, the yield of the liquid crystal cell is improved. In addition, it is not necessary to improve the bonding accuracy with a mounter for bringing the spacer pillar into contact with the non-opening portion, so that the cost of remodeling the manufacturing apparatus can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態1を説明する分解斜視図、FIG. 1 is an exploded perspective view illustrating Embodiment 1 of the present invention,

【図2】本発明の実施の形態1の一部の平面図、FIG. 2 is a plan view of a part of the first embodiment of the present invention,

【図3】本発明の実施の形態1の一部の断面図、FIG. 3 is a partial cross-sectional view of Embodiment 1 of the present invention;

【図4】本発明の実施の形態1のスペーサ柱を示し、
(イ)は平面図、(ロ)はA−A線の断面図、(ハ)は
B−B線の断面図、
FIG. 4 shows a spacer column according to the first embodiment of the present invention;
(A) is a plan view, (b) is a cross-sectional view taken along line AA, (c) is a cross-sectional view taken along line BB,

【図5】本発明の実施の形態2の一部の断面図。FIG. 5 is a partial cross-sectional view of Embodiment 2 of the present invention.

【符号の説明】[Explanation of symbols]

11:アレイ基板 15:画素電極 16:配向膜 21:対向基板 22:カラーフィルタ 23:共通電極 24:配向膜 25:スペーサ柱 26:頂面 27:突起 11: Array substrate 15: Pixel electrode 16: Alignment film 21: Counter substrate 22: Color filter 23: Common electrode 24: Alignment film 25: Spacer pillar 26: Top surface 27: Projection

フロントページの続き Fターム(参考) 2H089 LA09 LA10 LA16 MA04X NA14 QA16 TA09 TA12 TA13 5C094 AA01 AA31 AA42 AA43 AA44 DA03 EA04 EC03 FA02 Continuation of the front page F term (reference) 2H089 LA09 LA10 LA16 MA04X NA14 QA16 TA09 TA12 TA13 5C094 AA01 AA31 AA42 AA43 AA44 DA03 EA04 EC03 FA02

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 画素を形成する電極および配向膜を有す
る2枚の基板を前記配向膜が対向するように配置し、前
記一方の基板にスペーサ柱を形成して前記他方の基板に
前記スペーサ柱の頂面を当接し前記2枚の基板の間隙を
保持させ前記基板の周囲をシール剤で貼り合わせる平面
表示装置の製造方法において、前記他の基板に当接する
前記スペーサ柱の頂面の周囲の少なくとも一部にこの頂
面上に突出する突起を形成してなる平面表示装置の製造
方法。
1. An electrode for forming a pixel and two substrates having an alignment film are arranged so that the alignment films face each other, a spacer column is formed on the one substrate, and the spacer column is formed on the other substrate. In a method of manufacturing a flat display device in which a top surface of the spacer pillar is abutted to hold a gap between the two substrates and a periphery of the substrate is bonded with a sealant, the periphery of the top surface of the spacer pillar abutting the other substrate A method of manufacturing a flat panel display device, wherein a projection projecting from the top surface is formed at least partially.
【請求項2】 前記スペーサ柱は前記2枚の基板の貼り
合わせ時に前記突起がつぶれて前記頂面が他方の基板に
当接することを特徴とする請求項1記載の平面表示装置
の製造方法。
2. The method according to claim 1, wherein the spacer pillar is configured such that when the two substrates are bonded together, the projection is crushed and the top surface abuts on the other substrate.
【請求項3】 前記スペーサ柱が前記画素間の非開口部
に形成されてなる請求項1記載の平面表示装置の製造方
法。
3. The method according to claim 1, wherein the spacer pillar is formed in a non-opening between the pixels.
【請求項4】 画素を形成する電極および液晶の配向膜
を有する2枚の基板間に間隙を保持するために配置され
一方の基板に形成され他方の基板に当接するスペーサ柱
が当接する頂面に突起を形成してなる平面表示装置。
4. A top surface which is arranged to hold a gap between two substrates having an electrode forming a pixel and a liquid crystal alignment film, and which is formed on one substrate and which comes into contact with a spacer column which is in contact with the other substrate. A flat display device having projections formed on the flat display device.
JP20156098A 1998-07-16 1998-07-16 Manufacturing method of flat display device and flat display device Pending JP2000035583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20156098A JP2000035583A (en) 1998-07-16 1998-07-16 Manufacturing method of flat display device and flat display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20156098A JP2000035583A (en) 1998-07-16 1998-07-16 Manufacturing method of flat display device and flat display device

Publications (1)

Publication Number Publication Date
JP2000035583A true JP2000035583A (en) 2000-02-02

Family

ID=16443087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20156098A Pending JP2000035583A (en) 1998-07-16 1998-07-16 Manufacturing method of flat display device and flat display device

Country Status (1)

Country Link
JP (1) JP2000035583A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001343654A (en) * 2000-06-01 2001-12-14 Nec Corp Liquid crystal display device and method of manufacture
JP2004145084A (en) * 2002-10-25 2004-05-20 Fujitsu Ltd Liquid crystal panel and manufacturing method thereof
JP2005099277A (en) * 2003-09-24 2005-04-14 Hitachi Chem Co Ltd Spacer for liquid crystal display device, method for manufacturing same, and photosensitive resin composition for manufacturing same and photosensitive element
JP2005099278A (en) * 2003-09-24 2005-04-14 Hitachi Chem Co Ltd Spacer for liquid crystal display device, method for manufacturing the same, and photosensitive resin composition for manufacturing the same and photosensitive element
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US7978299B2 (en) 2007-12-10 2011-07-12 Seiko Epson Corporation Liquid crystal device and method for manufacturing the same
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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001343654A (en) * 2000-06-01 2001-12-14 Nec Corp Liquid crystal display device and method of manufacture
JP2004145084A (en) * 2002-10-25 2004-05-20 Fujitsu Ltd Liquid crystal panel and manufacturing method thereof
JP2005099277A (en) * 2003-09-24 2005-04-14 Hitachi Chem Co Ltd Spacer for liquid crystal display device, method for manufacturing same, and photosensitive resin composition for manufacturing same and photosensitive element
JP2005099278A (en) * 2003-09-24 2005-04-14 Hitachi Chem Co Ltd Spacer for liquid crystal display device, method for manufacturing the same, and photosensitive resin composition for manufacturing the same and photosensitive element
KR100687343B1 (en) 2004-01-09 2007-02-27 비오이 하이디스 테크놀로지 주식회사 LCD and its manufacturing method
FR2866722A1 (en) * 2004-02-25 2005-08-26 Lg Philips Lcd Co Ltd LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING SUCH A DEVICE
CN100449390C (en) * 2005-06-28 2009-01-07 乐金显示有限公司 Liquid crystal display device and manufacturing method thereof
US7525622B2 (en) 2005-06-28 2009-04-28 Lg Display Co., Ltd. Liquid crystal display device and method for fabricating the same
US7978299B2 (en) 2007-12-10 2011-07-12 Seiko Epson Corporation Liquid crystal device and method for manufacturing the same
JP2008152302A (en) * 2008-03-14 2008-07-03 Sharp Corp Liquid crystal display panel and manufacturing method thereof
JP2010237660A (en) * 2009-03-11 2010-10-21 Semiconductor Energy Lab Co Ltd Liquid crystal display device
JP2013195609A (en) * 2012-03-19 2013-09-30 Dainippon Printing Co Ltd Color filter formation substrate and liquid crystal display unit

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