JP2000151336A - Piezoelectric vibrator, piezoelectric oscillator, and method of manufacturing these - Google Patents

Abstract

(57) [Problem] To provide a piezoelectric vibrator which is suitable for high-density mounting without being affected by disturbance such as vibration inputted from the outside and can always exhibit stable performance. A piezoelectric vibrator having a cantilever structure in which one end of a piezoelectric vibrating element long in one direction accommodated in a case is supported as a fixed end and the other end is a free end. A support member 22 having elasticity is arranged in a case, and the free end side 2 of the piezoelectric vibrating element is positioned with respect to the support member.
Structure in which 1 is in contact.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrator and a piezoelectric oscillator in which a piezoelectric vibrating element is housed in a case and supported in a cantilever manner, and to a method for manufacturing such a piezoelectric vibrator. .

[0002]

2. Description of the Related Art FIG. 11 is a side sectional view showing an example of a general piezoelectric vibrator.

In FIG. 1, a piezoelectric vibrator 1 accommodates a piezoelectric vibrating element 7 made of crystal or the like in a metal case 2 having an open left end. The left end opening of the metal case 2 is closed by an insulating material 4 and a metal cap 5, and the lead terminal 3 penetrates the insulating material 4 and the metal cap 5 and enters the metal case 2. The piezoelectric vibrating element 7 is fixed to the right end of the lead terminal 3 via a support means 6, and an excitation electrode (not shown) formed on the piezoelectric vibrating element 7 is connected thereto. As a result, the piezoelectric vibrating element 7 is supported by the cantilever support structure with the left end fixed, and is sealed in the metal case 2.

In such a piezoelectric vibrator 1, a driving voltage is applied to a piezoelectric vibrating element 7 via the lead terminal 3 by forming a part of an oscillation circuit mounted on various devices. It is designed to vibrate at a predetermined frequency, and by extracting a signal corresponding to the vibration frequency, it is used as a clock signal for various device parts.

[0005]

In recent years, the above-described piezoelectric vibrator 1 has been widely used in portable electronic devices, particularly portable telephones and the like. Such portable electronic devices are rapidly becoming smaller and lighter, so that the space for mounting the piezoelectric vibrator 1 is very limited in such devices. In addition, with high-density mounting, it may be unavoidable that components that adversely affect each other when they are close to each other are mounted adjacent to each other.

For example, in the case of the piezoelectric vibrator 1, if it is mounted near a vibration source, for example, a buzzer or the like, it may be affected as shown in FIG.

As shown in FIG. 12A, when the buzzer is not sounding, the piezoelectric vibrator 1 oscillates at the original oscillation frequency f0. However, when a buzzer arranged adjacent to or close to the piezoelectric vibrator 1 sounds, as shown in FIG. 12B, in addition to the original oscillation frequency f0 of the oscillation circuit, a spurious peak of f0 plus or minus fv is generated. Oscillation.

[0008] When the spurious peak becomes large, the mounted device may malfunction in data demodulation as its original function, communication may be interrupted, or the like.
Inconveniences such as inability to receive and adverse effects on other channels occur.

Such inconvenience is caused by the sounding operation of a buzzer or the like, and the piezoelectric vibrating element 7 built in the piezoelectric vibrator 1
Is considered to be causing unnecessary mechanical resonance. However, effective means for suppressing unnecessary resonance of the piezoelectric vibrating element 7 in the above situation has not been known.

Here, in order to suppress unnecessary resonance of the piezoelectric vibrating element 7, it is considered necessary to support the piezoelectric vibrating element 7 having a cantilever support structure so as not to generate such vibration. In this regard, in the conventional piezoelectric vibrator 1, as shown in FIG.
In order to prevent the piezoelectric vibrating element 7 from bending and breaking, for example, when a mechanical shock is applied from the outside,
A buffer member 8 is provided.

The cushioning member 8 is disposed on the back side (right end side) of the metal case 1 in FIG. 11 and has a projection 8 a surrounding the free end side of the piezoelectric vibrating element 7. The protruding portion 8a is arranged with a predetermined gap so that the inner side does not touch the tip of the piezoelectric vibrating element 7, and when an impact is applied to the piezoelectric vibrator 1, the piezoelectric vibrating element 8 bends. At this time, the piezoelectric vibrating element 7 is supported by hitting its tip to prevent the piezoelectric vibrating element 7 from being extremely bent and broken.

However, such a cushioning member 8 is
Although having a function of preventing the piezoelectric vibrating element 7 from being deformed such that it is bent and broken, as described above, it prevents vibrations that cause harmful spurious peaks due to the influence of other components and the like. It has no function.

That is, such a vibration is completely different from a deformation that would destroy the piezoelectric vibrating element 7, and it is impossible to prevent the vibration unless a means corresponding to the characteristic is taken. There was a problem.

The present invention has been made to solve the above-described problems, and is not affected by disturbances such as vibrations input from the outside. Therefore, the present invention is suitable for high-density mounting and always exhibits stable performance. It is an object of the present invention to provide a piezoelectric vibrator and a piezoelectric oscillator that can be used, and a method for manufacturing these.

[0015]

According to the first aspect of the present invention, there is provided a piezoelectric vibrating element long in one direction, which is accommodated in a case, is supported at one end as a fixed end, and the other end is a free end. A piezoelectric vibrator having a cantilever structure, wherein a supporting member having elasticity is arranged in the case, and a free end side of the piezoelectric vibrating element is brought into contact with the supporting member. Is achieved by

According to the first aspect of the present invention, the free end side of the cantilevered piezoelectric vibrating element is in contact with the elastic supporting member. Such a configuration exhibits the following operation.

According to the study of the present inventors, it has been found that unnecessary resonance of the piezoelectric vibrating element is mechanical vibration in the bending direction of the piezoelectric vibrating element. On the other hand, the vibration based on the original function of the piezoelectric vibration element is mainly vibration in the sliding direction. And by making the free end side of the piezoelectric vibrating element always contact the supporting member having elasticity, it is possible to suppress the mechanical vibration in the bending direction without hindering the vibration in the thickness sliding direction of the element. .

According to a second aspect of the present invention, in the configuration of the first aspect, the case is a bottomed tubular body having one end closed.
The case bottom is filled with the support member.

According to a third aspect of the present invention, in the configuration of the first or second aspect, a groove is previously formed at a position of the support member facing the piezoelectric vibration element, and a free end of the piezoelectric vibration element is formed in the groove. It is characterized by being inserted.

According to a fourth aspect of the present invention, there is provided a piezoelectric vibrating element elongated in one direction, a base for accommodating the piezoelectric vibrating element, and a piezoelectric vibrating element housed in the base. A cantilever structure in which a case composed of a metal lid for sealing the base is provided, one end of the piezoelectric vibrating element housed in the case is supported as a fixed end, and the other end is a free end. Is achieved by a piezoelectric oscillator in which a support member having elasticity is arranged in the case, and a free end side of the piezoelectric vibration element is brought into contact with the support member.

According to a fifth aspect of the present invention, there is provided a cantilever structure in which one end of a piezoelectric vibrating element long in one direction accommodated in a case is supported as a fixed end and the other end is a free end. A method of manufacturing a piezoelectric vibrator, wherein a material of a support member is arranged with the bottom side of the case formed of a bottomed cylinder as a bottom,
The piezoelectric vibrating element to which the lead wire connected from the outside of the case is connected is inserted into the case, the free end thereof is brought into contact with the material of the supporting member, and then the method of manufacturing the piezoelectric vibrator for curing the material of the supporting member is performed. Is achieved.

According to a sixth aspect of the present invention, in the configuration of the fifth aspect, the bottom of the case is filled with a silicone-based adhesive before curing, and then a piezoelectric vibrating element is inserted into the case and the free end thereof is closed. It is characterized in that it is brought into contact with a silicon-based adhesive before being cured and temporarily sealed, and then the silicon-based adhesive is cured.

According to a seventh aspect of the present invention, in the configuration of the fifth aspect, a jelly-like elastic body is used as the supporting member by heating and dehydrating the mixed solution.

According to an eighth aspect of the present invention, in the configuration of the fifth aspect, the support member is made of a silicon-based or urethane foam-based material.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of a piezoelectric vibrator of the present invention, FIG. 2 is a schematic plan view thereof, and FIG. 3 is a schematic sectional view thereof.

In these figures, the piezoelectric vibrator 10
Is a case 12 in which a space 12a is formed, and a plate-shaped piezoelectric vibrating element 11 which is sealed in the case and is long in one direction.
It has.

The piezoelectric vibrating element 11 is a plate formed of, for example, quartz in a strip shape, and connection electrodes 13 and 14 are formed on the piezoelectric vibrating element 11.

The case 12 is formed of, for example, a metal material. More specifically, the case 12 is made of easy-to-process nickel-white or more preferably Kovar or the like. In FIG.
3 is formed as a hollow cylindrical body.

The piezoelectric vibrating element 11 is inserted from the open end 18a of the case 12 into the space 12a. One end 19 of the piezoelectric vibrating element 11 is provided on the connection electrodes 13 and 14 with lead terminals 17 drawn from outside the case. , 17, the inner leads 17a, 17a are electrically conductive adhesive 1
5 and 16 are used for connection and fixation, respectively.

The open end 18a of the case 12 is hermetically sealed with a plug 18 fitted therein. This plug 1
8 is a metal ring 18b fitted into the inner periphery of the open end 18a of the case 12, as shown in FIGS.
An insulating member 18c made of, for example, a glass material is disposed inside the ring 18b.

The piezoelectric vibration element 1 is connected through the plug 18.
The piezoelectric vibrating element 11 is supported in a cantilever manner by fixing one end of the piezoelectric vibrator 1 to a free end 21 on the far side. Then, the insulating member 18c of the plug 18
Insulates the lead terminals 17, 17 penetrating therethrough.

Further, a support member 22 having elasticity is arranged on the back side of the hollow case 12, that is, on the bottom portion 23 side, and the free end 21 of the piezoelectric vibration element 11 is , Are always in contact.

Here, the piezoelectric vibration element 11 and the support member 22
The operation of will be described.

In the present invention, as shown in FIG. 4, the piezoelectric vibrating element 11 receives instantaneous and / or continuous vibrations or shocks as external disturbance, thereby causing mechanical resonance. It is intended to prevent the occurrence of the vibration fv in the bending direction as shown by the arrow.

FIG. 5 shows the thickness direction of the piezoelectric vibrating element 11 extremely thicker than the actual one for convenience of understanding, and shows the magnitude of the thickness slip vibration at a certain moment for each location. It is. In the piezoelectric vibrating element 11, the magnitude of the vibration is larger at the surface than at the center of the thickness, and is larger at the center than at the periphery. Further, the thickness sliding vibration becomes smaller at a level practically non-practical as it goes to the end of the piezoelectric vibration element 11.

On the other hand, vibration fv due to mechanical resonance due to vibration of other components adjacent to the piezoelectric vibrator 10 or vibration of an automobile as a moving body when the piezoelectric vibrator 10 is mounted, for example. In the figure, the free end 21 of the piezoelectric vibrating element 11 that is not fixed swings as illustrated, and the movement of the free end 21 that is the end of the piezoelectric vibrating element 11 is the largest.

Moreover, the vibration f0 in the thickness-shear direction based on the original function of the piezoelectric vibrating element 11 is a vibration of a high frequency on the order of megahertz, and the vibration fv based on the mechanical resonance is on the order of kilohertz, and The vibration has a frequency much lower than the vibration f0.

For this reason, the free end 21 of the piezoelectric vibrating element 11
The support member 2 having elasticity as shown in FIGS.
By contacting the piezoelectric vibrating element 2, the vibration f0 in the thickness-shear direction based on the original function of the piezoelectric vibrating element 11 is hardly present at the end portion, and is not absorbed based on the elasticity of the supporting member 11. That is, the vibration f0 is a movement of a very high frequency, and the stroke or amplitude at the free end 21 is extremely small as described with reference to FIG. 5, so that the thickness sliding direction based on the original function of the piezoelectric vibration element 11 is obtained. Is not substantially inhibited.

On the other hand, the harmful vibration fv due to the mechanical resonance is the largest movement at the free end 21 and the movement of the lower frequency. Therefore, the movement is brought into contact with the support member 22 and the movement is physically controlled. By damping it, damping can be effectively performed.

FIG. 6 is a schematic sectional view of a second embodiment of the present invention.

In FIG. 6, the portions denoted by the same reference numerals as those in FIGS. 1 to 3 have the same configuration, and thus the duplicated description will be omitted.

The piezoelectric vibrator 30 has a groove 32a on the surface of the support member 32 facing the piezoelectric vibration element 11,
The free end 21 of the piezoelectric vibration element 11 is fitted in the groove 32a. In this state, the piezoelectric vibrating element 11 and the groove 32a have no gap in the vertical direction, and have a slight gap 32b in the depth direction.

A gap 33 is provided between the support member 32 and the bottom 23 of the case 12. The length L of the free end of the piezoelectric vibrating element 11 entering the support member 32 is set to be greater than the depth 1 of the gap 33.

The piezoelectric vibrator 30 according to the second embodiment is configured as described above, and exhibits the same functions and effects as those of the first embodiment.

That is, the vibration fv based on the mechanical resonance
Is the movement in the direction A in the figure,
Since the support member 32 is filled in the case 12 without any gap in the vertical direction, the movement is prevented. On the other hand, the vibration f0 in the sliding direction based on the original function of the piezoelectric vibrating element 11 is caused by the gap 32b between the free end 21 of the piezoelectric vibrating element 11 and the support member 32. 21 does not receive a reaction force in the axial direction, so that its movement is not hindered. Further, the gap 32b can absorb variations in assembling the piezoelectric vibrator. The presence of the gap 33 between the support member 32 and the bottom 23 of the case 12 absorbs the difference in the coefficient of thermal expansion between the case 12 and the piezoelectric vibrating element 11 due to a temperature change, even if there is a difference. Will be.

FIG. 7 is a schematic sectional view showing an embodiment of the piezoelectric oscillator of the present invention.

In the piezoelectric oscillator 40, the portions denoted by the same reference numerals as those in FIGS. 1 to 3 have the same configuration, and thus the duplicated description will be omitted.

In the figure, a piezoelectric oscillator 40 includes space portions S1 and S1 for accommodating a plate-shaped piezoelectric vibration element 11 which is long in one direction.
A case 42 is provided with a box-shaped base 41 in which the base 2 is formed, and a plate-shaped lid 44 joined to the base 41 so as to seal a space portion. ing.

The base 41 is a plate-like first base 41.
a, a second base 41b formed in a ring shape, and a third base 41c having a further increased ring size are sequentially overlapped and joined to form a stepped internal space S1, S2 as shown in the figure. Has formed.

An electrode 45 is provided on the upper surface of the second base 41b, and one end of the piezoelectric vibrating element 11 is fixed by conductive adhesives 15 and 16. Thereby, the electrode part 45 is connected to the connection electrode of the piezoelectric vibration element 11,
As in FIGS. 1 to 3, the piezoelectric vibrating element 11 is supported in a cantilever manner.

Internal space S2 corresponding to first base 41a
, The integrated circuit 47 is fixedly accommodated on the first base 41a. This integrated circuit 47 includes a first base 41
are connected to the conductive patterns 46 and 48 on a by wire bonding. As a result, a predetermined drive voltage is applied to the piezoelectric vibration element 11 to cause it to vibrate, and its output is input to the integrated circuit 47, thereby extracting a signal of a predetermined frequency.

Here, as the material of the piezoelectric vibrating element 11, for example, quartz is used, as the material of the base 41, a ceramic such as alumina is used, and as the material of the lid 44, a ceramic wire such as alumina is used. A metal such as Kovar or a ceramic such as alumina having a coefficient of expansion close to that of the metal is used.

Further, in the internal space S 1 in the case 42, a support member 22 is disposed at a position facing the free end 21 of the piezoelectric vibration element 11.
This is the same as the first embodiment or the second embodiment.

Therefore, the piezoelectric oscillator 40 also exerts exactly the same functions and effects as those of the piezoelectric vibrator shown in FIGS.

Next, a preferred embodiment of a method for manufacturing a piezoelectric vibrator will be described.

First Manufacturing Method FIG. 8 is a schematic diagram for explaining a first embodiment of a method for manufacturing a piezoelectric vibrator corresponding to the above-described embodiment.

First, the case 12 is placed with the bottom 23 facing down. Next, for example, a syringe pump is used as a means for controlling the amount of minute protrusion of the material of the support member made of a fluid. The syringe pump is a pump that discharges a mobile phase previously filled in a cylinder by a piston that moves at a constant speed.

The injection needle 5 connected to this syringe pump
1 is inserted into the case 12 arranged as described above, and the bottom 23 of the case 12 is filled by discharging the silicone-based adhesive 22a (FIG. 8A).

Next, the piezoelectric vibrating element 11 to which the lead wires 17, 17 described with reference to FIGS. 1 to 3 are connected is inserted into the case, and its free end 21 is brought into contact with the material 22a of the supporting member, and the plug 18 And temporarily sealed (FIG. 8).
(B)). At this time, a channel for allowing gas in the case 12 to escape is formed. At this time, if the sinking amount of the free end 21 of the piezoelectric vibration element 11 is appropriately set, the piezoelectric vibration element 11
Of the piezoelectric vibrating element 11 with respect to the support member 22a, it is possible to accurately adjust the amount of sinking of the free end 21 of the piezoelectric vibrating element 11 to the support member 22a without variation depending on the product.

Then, as shown in FIG. 8C, for example, the adhesive is cured at 280 degrees Celsius for about 2 hours to perform the main sealing, and the free end, which is the tip of the piezoelectric vibrator 11, is formed. 21 can be fixed by being brought into contact with the support member 22a.

In this embodiment, since the silicon-based adhesive is used as the material of the support member 22, the material is compared with the case where the material is, for example, a two-liquid mixture type.
There is an advantage that it is easy to handle because there is no need to consider the mixing and the pot life.

Second Manufacturing Method FIG. 9 is a schematic diagram for explaining a second embodiment of a method of manufacturing a piezoelectric vibrator corresponding to the above-described embodiment.

First, the case 12 is placed with the bottom 23 facing down. Next, as a material for the support member made of a fluid,
A jelly-like elastic body made of a mixture is used.

Examples of this mixed solution include: 1. a hydrocarbon having at least one glycidyl group; 2. Epoxy silane coupling agent; 3. an amino-based silane coupling agent and, if it is desired to increase the hardness, Add the colloidal silica.

Before the mixture obtained by mixing them is made into a jelly, the injection needle 51 is inserted into the case 12 and
The mixed liquid 22b is discharged and filled into the bottom 23 of FIG. 2 (FIG. 9A).

Next, this mixed solution is heated at 130 ° C. or more for about 1 hour, preferably in a vacuum atmosphere.
The dehydration reaction proceeds to form a jelly (FIG. 9)
(B)).

Next, the piezoelectric vibrating element 11 to which the lead wires 17, 17 described with reference to FIGS. 1 to 3 are connected is inserted into the case, the free end 21 thereof is brought into contact with the material 22b of the supporting member, and the plug 18 is connected. Insert and seal (Fig. 9
(C)). Thereby, the free end 21 which is the tip of the piezoelectric vibrator 11 can be fixed by being brought into contact with the support member 22b.

In this embodiment, it is possible to switch the model of the corresponding product only by adjusting the discharge amount from the syringe pump. Further, there is no possibility that dust is generated from the mixed solution during the operation. Further, if, for example, an inorganic fiber filler is mixed into the support member 22b, the filler is raised on the surface of the support member after curing, and the inorganic fiber filler exclusively touches the piezoelectric vibration element 11 to support the same. It is also possible.

Third Manufacturing Method FIG. 10 is a schematic diagram for explaining a third embodiment of a method for manufacturing a piezoelectric vibrator corresponding to the above-described embodiment.

First, an elastic body having a shape along the bottom portion 23 of the case 12 is formed of a silicon-based or urethane foam-based material, and this becomes a support member material 22c.

The elastic body is cured at a high temperature and in a vacuum atmosphere, and a sufficient gas is discharged.

Next, as shown in FIG. 10A, the case 12 is arranged with the bottom 23 down.

Subsequently, the elastic body 22c is sucked at the tip by vacuum suction with the needle 52 and inserted into the case 12.

Finally, the piezoelectric vibrating element 11 to which the lead wires 17 and 17 described with reference to FIGS.
The free end 21 is brought into contact with an elastic body 22c, which is a material of the support member, and the plug 18 is fitted and sealed (FIG. 10B). Thereby, the piezoelectric vibrator 11
The free end 21 which is the tip of the support member 22 can be fixed by contacting the support member 22b.

According to the manufacturing method of the third embodiment,
Since the elastic body 22c, which is the material of the support member, can be formed in advance outside the case 12, it is easy to determine its size and the like, and there is almost no work in a narrow space inside the case 12, so that it is simple. It is. Moreover, the present invention can be implemented without using special equipment. Further, since the gas generated by curing before the material 22c is put in the case 12, the piezoelectric vibration element 11 can be completely sealed.

Further, a method of manufacturing the piezoelectric vibrator 30 according to the second embodiment described with reference to FIG. 6 will be briefly described.

In order to form a piezoelectric vibrator 30 of this type, the lead wire 17 described with reference to FIGS. 1 to 3 is formed with the free end 21 of the piezoelectric vibrating element 11 inserted into the groove 32 a of the support member 32. , 17 connected to the piezoelectric vibrating element 11
May be inserted into the case, the plug 18 may be fitted and sealed.

[0079]

As described above, according to the first and third aspects of the present invention, since it is not affected by disturbance such as vibration input from the outside, it is suitable for high-density mounting and always exhibits stable performance. A piezoelectric vibrator capable of performing the above-described operations can be provided.

According to the invention of claim 2, according to claim 1,
In addition to the effects of the invention, the support member can be easily held by the cylindrical wall of the case and the bottom of the case.

According to the third aspect of the invention, in addition to the effect of the first aspect, since the piezoelectric vibration element is inserted into the groove, the piezoelectric vibration element can slide with respect to the support member. Therefore, the piezoelectric vibrating element does not receive an axial reaction force from the support member.

According to the fourth aspect of the present invention, there is provided a piezoelectric oscillator which is not affected by disturbance such as vibration inputted from the outside, is suitable for high-density mounting, and can always exhibit stable performance. be able to.

According to the fifth aspect of the present invention, a piezoelectric vibrator which is not affected by disturbance such as vibration inputted from the outside, is suitable for high-density mounting, and can always exhibit stable performance. A method can be provided.

According to the sixth aspect of the invention, in addition to the effect of the fifth aspect, the supporting member can be formed without using the mixed solution, and the production is easy in terms of handling of materials and the like. Furthermore, before the adhesive is cured, the case can be used as a container, and after the adhesive is cured, it can function as a holding portion for the adhesive.

According to the seventh aspect of the invention, in addition to the effect of the fifth aspect, it is easy to switch the model of the means for manufacturing the product at the time of manufacturing, and it is possible to prevent dust from being generated at the time of manufacturing. You. Further, since the jelly-like elastic body is used as the support member, the reaction force received by the piezoelectric vibration element from the support member is extremely small. Therefore, the original vibration of the piezoelectric vibration element is not hindered at all.

According to the invention of claim 8, in addition to the effect of claim 5, it is possible to manufacture the piezoelectric vibrating element easily and inexpensively, and to improve the sealing performance of the piezoelectric vibrating element. In addition, since the support member is made of silicon or urethane foam, generation of gas harmful to the piezoelectric vibrating element is not practical. Therefore, since the original vibration of the piezoelectric vibrating element is not hindered, there is no adverse effect such as frequency fluctuation, and the long-term reliability of the piezoelectric vibrating element is not impaired.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a piezoelectric vibrator of the present invention.

FIG. 2 is a schematic plan view of the piezoelectric vibrator of FIG.

FIG. 3 is a schematic cross-sectional view of the piezoelectric vibrator of FIG.

FIG. 4 is an explanatory diagram for explaining harmful vibration of the piezoelectric vibration element.

FIG. 5 is an explanatory diagram for explaining a vibration state of the piezoelectric vibration element.

FIG. 6 is a schematic cross-sectional view showing a second embodiment of the piezoelectric vibrator of the present invention.

FIG. 7 is a schematic sectional view showing an embodiment of the piezoelectric oscillator of the present invention.

FIG. 8 is an explanatory diagram illustrating a first embodiment of a method for manufacturing a piezoelectric vibration element according to the present invention.

FIG. 9 is an explanatory view illustrating a second embodiment of the method for manufacturing a piezoelectric vibrating element of the present invention.

FIG. 10 is an explanatory view illustrating a third embodiment of the method for manufacturing a piezoelectric vibration element according to the present invention.

FIG. 11 is a schematic sectional view showing a configuration of a conventional piezoelectric vibrator.

FIG. 12 is a diagram showing a state of resonance of a conventional piezoelectric vibrator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Piezoelectric vibrator 11 Piezoelectric vibrating element 12 Case 13, 14 Connection electrode 15, 16 Conductive adhesive 17, 17 Lead terminal 18 Plug 19 Fixed end 21 Free end 22 Support member

Continued on the front page (51) Int.Cl. ⁷ Identification FI FI Theme Court II (Reference) H03H 9/19 H03H 9/19 A (72) Inventor Kazunari Ichise 3-5-5 Yamato, Suwa-shi, Nagano Seiko Epson (72) Inventor Hideaki Kato 3-3-5 Yamato, Suwa-shi, Nagano Seiko Epson Corporation F-term (reference) 5J079 AA04 BA23 HA04 HA13 KA01 5J108 AA01 BB02 CC04 DD02 EE02 EE03 EE07 EE11 EE13 GG01 GG03GG06 GG15 GG16 KK03 MM04

Claims (8)

[Claims] 1. A piezoelectric vibrator having a cantilever structure in which one end of a piezoelectric vibrating element long in one direction accommodated in a case is supported as a fixed end and the other end is a free end. A piezoelectric vibrator, wherein a support member having elasticity is arranged, and a free end side of the piezoelectric vibration element is brought into contact with the support member. 2. The piezoelectric vibrator according to claim 1, wherein the case is a bottomed cylindrical body with one end closed, and the bottom of the case is filled with the support member. 3. The piezoelectric vibrating element according to claim 1, wherein a groove is previously formed in the support member at a position facing the piezoelectric vibrating element, and a free end of the piezoelectric vibrating element is inserted into the groove. Piezoelectric vibrator. 4. A piezoelectric vibrating element elongated in one direction, a base for accommodating the piezoelectric vibrating element, and a metal lid for sealing the base with the piezoelectric vibrating element accommodated in the base. A piezoelectric vibrator having a cantilever structure in which one end of a piezoelectric vibrating element housed in the case is supported as a fixed end, and the other end is a free end. A piezoelectric vibrating element, wherein a resilient supporting member is disposed on the piezoelectric vibrating element, and a free end side of the piezoelectric vibrating element is brought into contact with the supporting member. 5. A method of manufacturing a piezoelectric vibrator having a cantilever structure in which one end of a piezoelectric vibrating element long in one direction accommodated in a case is supported as a fixed end and the other end is a free end. A material for a support member is disposed with the bottom side of the case made of a bottom cylindrical body as a bottom, and the piezoelectric vibrating element to which a lead wire led from the outside of the case is connected is inserted into the case, and its free end is inserted into the support member. A method for manufacturing a piezoelectric vibrator, comprising: contacting a material of a piezoelectric vibrator; 6. A silicone-based adhesive before curing is filled in the bottom of the case, and then a piezoelectric vibrating element is inserted into the case, and its free end is brought into contact with the silicone-based adhesive before curing to temporarily provide the same. The method for manufacturing a piezoelectric vibrator according to claim 5, wherein the sealing is performed, and then the silicon-based adhesive is cured. 7. The method according to claim 5, wherein a jelly-like elastic body is used as the supporting member by heating and dehydrating the mixed solution. 8. The piezoelectric vibrator according to claim 5, wherein said support member is made of a silicon-based or urethane-based material.