JP2000120765A - Active vibration isolation device - Google Patents

Abstract

(57) [Problem] To provide an active vibration isolator capable of maintaining a vibration isolation operation even when a large vibration such as an earthquake is applied and preventing damage to an actuator or the like. SOLUTION: When a vertical vibration transmitted through a floor 10 is larger than a first predetermined acceleration and a horizontal vibration is larger than a second predetermined acceleration, a guide part 410 constituting the seismic isolation device part 400 is provided. The sliding portions 430 move while sliding in the up and down directions, thereby absorbing and attenuating the up and down vibration transmitted to the platen 300, and the air spring 420 restores the up and down movement of the platen 300.
By the guide part 410 and the slide plate 440 constituting the seismic isolation device part 400 moving while sliding in the horizontal direction,
The horizontal vibration transmitted to the surface plate 300 is absorbed and attenuated, and the coil spring 454 restores the horizontal movement of the surface plate 300.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an active vibration isolator.

[0002]

2. Description of the Related Art For example, manufacturing equipment used for ultra-fine processing used in a semiconductor manufacturing factory or the like and precision equipment such as an ultra-high-magnification electron microscope are apparatuses that extremely dislike vibrations. An anti-vibration device is used in order to prevent a bad influence on the apparatus. The anti-vibration device has a surface plate that can maintain a high altitude stationary state without being affected by external vibrations and the like. Attach a part that dislikes it.

[0003] Vibrations that adversely affect such a device that dislikes vibration are roughly classified into the following three types. (A) Micro-vibration normally occurring in the external environment. For example, a vehicle running near a building equipped with a device that dislikes vibration, ground vibration due to construction work around the building, vibration generated by operation of air conditioning equipment, elevators and other machines installed in the building, and its Such vibrations are caused by a person walking in a building. (B) Vibration generated by a device that dislikes vibration. For example, a case in which the apparatus that dislikes this vibration is a step-and-scan type wafer exposure apparatus used in a semiconductor lithography process will be described as an example. Since the wafer stage on which the mask is mounted and the mask stage on which the mask is mounted are scanned in the horizontal direction, the wafer stage is accelerated and decelerated. (C) Vibration due to earthquake. The amplitude and acceleration of this vibration can vary from small to large, so the vibration can include small to large vibrations.

[0004] Many anti-vibration devices are described in the above (A) and (B).
It is designed to absorb micro-vibration and to prevent the device that dislikes vibration from being affected by such micro-vibration. No response is planned from the beginning.
For example, the degree of integration of semiconductor devices is not as high as now,
When the line width of a pattern handled by an exposure apparatus or the like was not as thin as it is now, a passive type vibration isolator was often used. In the passive vibration isolator, a surface plate for mounting a device that dislikes vibration such as an exposure device is fixed on a base fixed to the floor surface through an elastic support means such as an air spring or a vibration isolating rubber, The bending of the elastic support means absorbs micro vibrations from the outside, and by appropriately setting the resonance frequency of a vibration system formed by the elastic support means and the mass of the surface plate and the device attached thereto. The amplitude of the micro-vibration generated by the exposure apparatus or the like is suppressed.

[0005] However, such a passive vibration isolator cannot provide a vibration isolation effect with respect to vibrations in a low vibration region below the natural frequency of the elastic support means, and conversely amplifies the vibration. There is a limit to lowering the natural frequency of the elastic support means. And, as the degree of integration of semiconductors increases and pattern miniaturization progresses,
Since the passive vibration isolation device has become insufficient in vibration isolation capability, active vibration isolation devices have recently been widely used.

In an active vibration isolator, a surface plate is supported on a base via a plurality of actuators, and a plurality of vibration sensors (acceleration sensors) are mounted on the surface plate, and based on detection outputs of the vibration sensors. By controlling the actuator using techniques such as feedback and feed forward, the acceleration generated on the surface plate is suppressed small,
Therefore, the vibration is reduced.

[0007]

However, the active type vibration damping device is excellent in vibration suppression of the surface plate caused by the external and internal minute vibrations of the above (A) and (B). Has performance. However, with respect to the vibration caused by the earthquake (C), although the fine vibration caused by the microearthquake is effectively eliminated, for example, when a large vibration having a seismic intensity of 2 or more occurs, its amplitude reaches several millimeters to several tens of millimeters. When using the actuator (micro-displacement actuator) used to remove the aforementioned micro-vibration, it is difficult to control the surface plate with an accuracy on the order of several microns to sub-micron corresponding to such a large amplitude. It is. Further, when such a large vibration is applied to the base of the active vibration isolator, a large force is applied to the actuator provided between the base and the surface plate, which may cause damage to the actuator. Therefore, the amount of movement of the base relative to the base is regulated to prevent the actuator from being damaged. For this reason, when a large vibration occurs, the displacement of the surface plate is restricted, so that it is difficult to displace the surface plate by the actuator, and it is difficult to remove the vibration. The present invention has been devised in view of the above circumstances, and an object of the present invention is to be able to maintain the anti-vibration operation even when a large vibration such as an earthquake is applied, and to prevent breakage of an actuator or the like. It is an object of the present invention to provide an active vibration isolator that can perform the above-mentioned operations.

[0008]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a base plate on which a vibration damping body is mounted on a base so as to be movable vertically and horizontally, and An anti-vibration unit that detects horizontal acceleration and displaces the surface plate in accordance with the detected vertical and horizontal accelerations, thereby removing vertical and horizontal fine vibrations of the vibration-isolated body; In the active type anti-vibration device provided with, a seismic isolation device portion is provided between the base and a foundation structure fixed to a building, and the seismic isolation device portion absorbs vertical vibration. A vertical seismic isolation mechanism configured to attenuate, wherein the vertical seismic isolation mechanism operates when acceleration of vertical vibration of the substructure is greater than a predetermined vertical acceleration. Is smaller than the predetermined vertical acceleration. Is configured not to operate come, the predetermined acceleration is characterized in that it is set larger than the vertical acceleration of the vibration of the vibration isolation possible the object divided insulating member by the vibration damping device unit. Further, the present invention provides a base plate on which a vibration-isolated body is mounted movably in the vertical and horizontal directions on a base, and detects the vertical and horizontal accelerations of the base plate, and detects the detected vertical and horizontal positions. An active vibration isolator comprising: a vibration isolator for removing fine vibrations in the vertical and horizontal directions of the vibration-isolated body by displacing the surface plate in accordance with the acceleration in the direction; A seismic isolation device is provided between the base structure fixed to the building and the base isolation structure, and the seismic isolation device includes a horizontal seismic isolation mechanism configured to absorb and attenuate horizontal vibrations. The horizontal seismic isolation mechanism operates when the acceleration of the horizontal vibration of the substructure is greater than a predetermined horizontal acceleration, and does not operate when the acceleration of the horizontal vibration is smaller than the predetermined horizontal acceleration. The predetermined acceleration Characterized in that is larger than the horizontal acceleration of the vibration of the vibration isolation possible the object divided insulating member by the vibration damping device unit. Also,
The present invention provides a surface plate on which an anti-vibration body is mounted movably supported on the base vertically and horizontally, and detects vertical and horizontal acceleration of the surface plate, and detects the detected vertical and horizontal directions. In an active vibration isolator having a vibration isolator for removing fine vibrations in the vertical and horizontal directions of the vibration-isolated body by displacing the surface plate in response to acceleration, the base and the building A seismic isolation device is provided between a base structure fixed to an object, and the seismic isolation device is provided with a vertical seismic isolation mechanism configured to absorb and attenuate vertical vibrations. A horizontal seismic isolation mechanism configured to absorb and attenuate vibrations, wherein the vertical seismic isolation mechanism operates when an acceleration of vertical vibration of the substructure is larger than a predetermined vertical acceleration. The acceleration of the vibration in the direction is the predetermined vertical acceleration The horizontal seismic isolation mechanism is activated when the horizontal vibration acceleration of the substructure is greater than a predetermined horizontal acceleration, and the horizontal vibration acceleration is reduced when the horizontal vibration acceleration is less than the predetermined horizontal acceleration. It is configured not to operate when it is smaller than the horizontal predetermined acceleration,
The predetermined vertical acceleration is set to be greater than the acceleration of the vibration in the horizontal direction of the vibration-removable body that can be vibration-removed by the vibration-removal device unit, and the horizontal predetermined acceleration is the vibration-removable object that can be vibration-removed by the vibration-removal device unit. It is characterized in that it is set to be larger than the acceleration of horizontal vibration of the vibration isolator. Further, according to the present invention, the vertical seismic isolation mechanism may include vertical vibration absorbing means for absorbing vertical vibration of the base relative to the base structure, and vertical vibration of the base relative to the base structure. A vertical restoring force generating means for generating a restoring force against movement. Also, the present invention
The horizontal seismic isolation mechanism generates horizontal vibration absorbing means for absorbing horizontal vibration of the base relative to the base structure, and generates a restoring force for horizontal movement of the base relative to the base structure. And a horizontal restoring force generating means. Further, according to the present invention, the vertical vibration absorbing means includes a slip surface which is in contact with each other, and a frictional force acting between the slip surfaces is a predetermined magnitude of a force for relatively displacing the slip surface in a direction parallel to the slip surface. When the force is larger than a predetermined magnitude, the slip surfaces are not displaced with each other, and when the force is larger than a predetermined magnitude, the slip surfaces are displaced with each other. The apparatus is characterized in that it operates when the acceleration of the vertical vibration of the body is larger than the predetermined acceleration, and does not operate when the acceleration of the vertical vibration is smaller than the predetermined acceleration. Also, in the present invention, the horizontal vibration absorbing means has a slip surface which is in contact with each other, and a frictional force acting between the slip surfaces is a predetermined magnitude of a force which relatively displaces the slip surface in a direction parallel to the slip surface. When the force is larger than a predetermined magnitude, the slip surfaces are not displaced with each other, and when the force is larger than a predetermined magnitude, the slip surfaces are displaced with each other. Activated when the acceleration of the horizontal vibration of the body is greater than the predetermined acceleration,
When the acceleration of the horizontal vibration is smaller than the predetermined acceleration, it does not operate. Further, according to the present invention, the vertical vibration absorbing means is constituted by a friction damper, and the friction damper operates when an acceleration of a vertical vibration applied to the friction damper is larger than the predetermined acceleration, and the vertical vibration Is not activated when the acceleration is smaller than the predetermined acceleration. Further, according to the present invention, the horizontal vibration absorbing means is constituted by a friction damper, and the friction damper operates when an acceleration of a horizontal vibration of the substructure is larger than the predetermined acceleration, and Is not activated when the acceleration is smaller than the predetermined acceleration. Further, the invention is characterized in that the vertical restoring force generating member has at least one of an air spring and a coil spring disposed between the base and the substructure. In addition, according to the present invention, the vertical restoring force generating member is provided between the base and the base structure, and the base and the base including the vibration-isolated body are weighted by the base, and the base is vertically moved. It is configured to be supported in a movable state. Further, the invention is characterized in that the horizontal restoring force generating member has at least one of an air spring and a coil spring disposed between the base and the substructure. . Also, in the present invention, the horizontal restoring force generating member is configured to include a seismic isolation support unit disposed between the base and the foundation structure, and the seismic isolation support unit includes a rubber plate and a steel plate. Are alternately laminated. Further, according to the present invention, the vertical and horizontal accelerations of the base are detected by a vibration sensor, and the vertical and horizontal displacements of the base are provided between the base and the base. The first and second actuators are provided, and a first elastic body that absorbs a shear force acting on the first actuator is provided between the first actuator and the platen, and the second actuator and the platen are provided. A second elastic body that absorbs a shearing force acting on the second actuator is provided therebetween. Further, according to the present invention, the first and second actuators are formed of solid actuators, and are provided on the base, hold the first actuator, and move the first actuator in a non-driving state in the displacement direction thereof. A first adjusting means for adjusting a pre-compression force received from the surface plate; and a second actuator provided on the base and holding the second actuator, wherein the second actuator in a non-driving state is moved in the displacement direction of the surface plate. And a second adjusting means for adjusting the pre-compression force received from the motor. Further, the present invention is characterized in that the solid actuator is a giant magnetostrictive actuator.

According to the active vibration isolator of the present invention,
If a vertical vibration that is greater than the vertical vibration acceleration of the vibration-isolated body that can be removed by the vibration-isolating device portion occurs, the vibration is absorbed and attenuated by the seismic isolation device portion, and the It is possible to maintain the vibration isolation operation even when large vibration such as is applied, and to prevent damage to the actuator and the like constituting the vibration isolation device. Further, according to the active vibration isolation device of the present invention, when a horizontal vibration greater than the acceleration of the horizontal vibration of the vibration-removed body that can be vibration-removed by the vibration isolation device section occurs, the vibration is Since it is absorbed and attenuated by the seismic isolation device, it is possible to maintain the anti-vibration operation even when a large vibration such as an earthquake is applied, and to prevent damage to the actuators etc. that constitute the anti-vibration device Can be. Further, according to the active vibration isolation device of the present invention, when vibrations in the vertical and horizontal directions that are greater than the vertical and horizontal accelerations of the vibration-isolated object that can be removed by the vibration isolation device are generated. Since the vibration is absorbed and attenuated by the seismic isolation device, the vibration isolation operation can be maintained even when a large vibration such as an earthquake is applied, and the actuators constituting the vibration isolation device are damaged. Can be prevented.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view showing a schematic configuration of a first embodiment of an active vibration isolator of the present invention, FIG. 2 is an explanatory view showing a state of FIG. FIG. 4 is an explanatory view showing a state viewed from a cross section taken along a line BB, FIG. 4 is an explanatory view showing a configuration of a first adjusting unit, FIG.
FIG. 3 is an explanatory diagram showing a configuration of a main part of a seismic isolation device.

As shown in FIGS. 1 to 3, an active vibration isolator 1000 according to the present invention comprises a base 100, a base 200, a surface plate 300, a seismic isolation device 400, a vibrometer amplifier 500, and a control device. 502, an actuator drive amplifier 504, an anti-vibration unit 600, and the like. The base portion 100 is formed in a substantially rectangular thin plate shape in a plan view, and is fixed to a floor 10 of a building (corresponding to a substructure in the claims). The base 200 is a bottom wall 2 having a rectangular shape in plan view.
02 and a side wall 204 erected upward from four sides of the bottom wall 202. The surface plate 300 is for mounting a vibration-isolated body, and has a plate shape that is smaller than the base 200 and has a rectangular shape in a plan view, and the side surface is surrounded by a side wall 204 of the base 200. And is supported by a first actuator 210 disposed on a bottom wall 202 of the base 200. That is, the bottom wall 20 of the base 200
2, at positions corresponding to the vicinity of the four corners on the lower surface of the platen 300, the platen 300 is vertically displaced by applying a vertical displacement to the platen 300, and the first actuators 210 supporting the platen 300 each have one position. A total of four pieces are provided.

Further, on the side wall 204 of the base 200,
At positions corresponding to the vicinity of a pair of opposing corners of the four corners of the side surface of the surface plate 300, one second actuator 220 for applying a horizontal displacement to the surface plate 300 and displacing the surface plate 300 in the horizontal direction is provided. A total of four are arranged. That is, each of the second actuators 220 is adjacent to the pair of corners of the surface plate 300 at positions corresponding to the vicinity of the pair of opposed corners, and the pair of opposite corners of the surface plate 300 is opposed to each other. Is provided so that the driving force is transmitted to a portion corresponding to the vicinity of the second actuator 220, and the direction of displacement of each of the second actuators 220 adjacent to each other across the pair of corners is the direction perpendicular to each other in the horizontal plane. It is configured to be.

A rigid mode vibration of the platen 300, that is, a vertical acceleration of the platen 300 is detected on a bottom surface 302 of the platen 300 which has a rectangular shape when viewed from the top.
3 for detecting the acceleration in the horizontal direction with the vibration sensors 304
Each of the vibration sensors 306 is disposed at a position substantially overlapping the vertical and horizontal center lines of the bottom surface 302. Here, assuming that three-dimensional coordinate axes orthogonal to each other are an X-axis, a Y-axis, and a Z-axis, the vibration directions of the surface plate 300 include the following six components. That is, the vertical direction (Z-axis direction), the horizontal direction (X-axis direction and the Y-axis direction)
This is the direction of rotation about the axis, the Y axis, and the Z axis. For this reason,
The arrangement positions of these vibration sensors 304 and 306 are as described in the above 6
Any position that can detect the vibration of the component may be used.
The position is not limited to a position substantially overlapping the vertical and horizontal center lines of 02. In order to detect six component vibrations, at least the six vibration sensors described above may be provided, but the number of vibration sensors may be six or more.

Each of the first actuator 210 and the second actuator 220 is constituted by a giant magnetostrictive actuator which is a solid actuator, and generates a distortion (magnetostriction) which extends in the longitudinal direction of the case 230 based on a given drive signal. A case 230 that accommodates the giant magnetostrictive element and protects the giant magnetostrictive element from the outside, and a rod that is coupled to the giant magnetostrictive element and that advances and retreats from the end of the case 230 in the longitudinal direction of the case 230 23
2 is provided. This giant magnetostrictive element is made of an alloy material in which the amount of magnetostriction generated when affected by a magnetic field becomes large. Further, in this giant magnetostrictive actuator, since the displacement characteristic which is the amount of magnetostriction with respect to the magnitude of the drive signal given thereto is almost linear, the process of generating a drive signal for driving this giant magnetostrictive actuator is relatively simple. There is an advantage that it is good.

Each of the first actuators 210 is disposed with its axial center oriented in the up-down direction, and its rod 232
The upper end of the bottom surface 30 of the platen 300 is
2 attached. This elastic body (corresponding to the first elastic body in the claims) 240 is the first actuator 210.
The first actuator 210 is made of, for example, rubber having a rigid property in a displacement direction (up-down direction) and a soft property in a direction (horizontal direction) orthogonal to the displacement direction of the first actuator 210. While the force acting in the direction of displacement is transmitted to the platen 300 as it is, the shear force acting in the direction orthogonal to the direction of displacement and the micro vibration in the shear direction are absorbed.

As will be described in detail with reference to FIG. 4, each first actuator 210 is held by an actuator mounting portion 250 which is mounted on the bottom wall 202 with bolts or the like.
The actuator mounting portion 250 has a fixing piece 252 provided at a lower portion thereof fixed to the bottom wall 202 by a bolt 254 or the like. Accommodating space 25 surrounded by side wall 256 erected from the lower part of actuator mounting portion 250
6A is formed in the housing space 256A, and the first actuator 210 having the actuator holding portion 234 attached to the case 230 is housed and held in a vertically movable direction, that is, in a direction in which the rod 232 moves forward and backward. Have been. An intermediate wall 258 that extends in the horizontal direction facing the rear end of the actuator holding section 234 is formed below the accommodation space 256A, and the rear end of the actuator holding section 234 is formed of the intermediate wall 258. Abuts against the tip of the adjusting screw 259 screwed into the screw.

Therefore, by rotating the adjusting screw 259, the position of the actuator holding portion 234 in the displacement direction of the first actuator 210 can be adjusted. That is, by adjusting the position of the actuator holding portion 234 to which the first actuator 210 is fixed by the adjustment screw 259, the pre-compression force that the first actuator 210 in the non-driven state receives from the surface plate 300 in the displacement direction is adjusted. I can do it. Here, the actuator mounting portion 250 for holding the actuator holding portion 234 and the adjusting screw 259 correspond to first adjusting means in the claims. In addition,
In the first embodiment, the adjustment screw 259, the actuator 210, and the elastic body 240 are arranged in this order between the base 200 and the surface plate 300.
9, the arrangement of the actuator 210 and the elastic body 240 is not limited to the above order.

Each of the second actuators 220 is disposed with its axis centered in the horizontal direction, and the front end of the rod 232 has an elastic member (the second actuator in the claims) as in the case of the first actuator 210. (Equivalent to an elastic body) 242. The elastic body 242 has rigidity in the direction of displacement (horizontal direction) of the second actuator 220 and has soft characteristics in the direction perpendicular to the direction of displacement of the second actuator 220 (vertical direction). While transmitting the force acting on the second actuator 220 in the direction of displacement to the platen 300 as it is, the second actuator 220 absorbs the shearing force acting in the direction orthogonal to the direction of displacement and the micro vibration in the shearing direction.

The case 23 of each second actuator 220
Numeral 0 is fixed to an actuator holding portion 234 held on the side wall 204 of the base 200, and the actuator holding portion 234 is fixed on the side wall 204 at an arbitrary position along the moving direction of the rod 232. Has become. The actuator holding portion 234 is urged such that its rear end always comes into contact with the tip of an adjusting screw 259 screwed into a wall portion 204A provided on the side wall 204.

Therefore, by rotating the adjusting screw 259, the position of the actuator holding portion 234 in the displacement direction of the second actuator 220 can be adjusted. That is, after adjusting the position of the actuator holding portion 234 to which the second actuator 220 is fixed by the adjusting screw 259, the actuator holding portion 234 is fixed to the side wall 204, so that the second actuator 220 in the non-driving state can be displaced in the displacement direction. The pre-compression force received from the platen 300 can be adjusted. Here, the actuator holding unit 2
The adjustment screw 259 screwed to the side wall 204 and the wall portion 204A holding the support 34 corresponds to a second adjustment unit in the claims. In this embodiment, the adjustment screw 259, the actuator 220, and the elastic body 242 are arranged in this order between the base 200 and the surface plate 300. The arrangement is not limited to the above order.

As described above, each second actuator 22
Numerals 0 are arranged such that the displacement directions of the adjacent second actuators 220 are four different directions perpendicular to each other in a horizontal plane.

The vibrometer amplifier 500 is connected to each of the vibration sensors 30.
A total of six types of detection signals S indicating the acceleration in the vertical and horizontal directions, which are input from 4, 306, are amplified. The control device 510, based on the detection signal S indicating the vertical and horizontal acceleration input from the vibration meter amplifier 500,
First and second actuators 210 required to remove the vibration from the vibration-isolated body attached to the surface plate 300;
A drive signal corresponding to the drive amount of 220 is calculated and generated. As described above, since each of the actuators 210 and 220 constituted by the giant magnetostrictive actuators has a substantially linear drive amount (magnitude of generated displacement) with respect to a drive signal given thereto, the control device The process for calculating and generating the drive signal from the detection signal by 510 may be simple. Actuator drive amplifier 5
Reference numeral 20 denotes a device for driving the first and second actuators 210 and 220 by inputting a total of eight types of drive signals D obtained by amplifying the drive signals.

The above-described first and second actuators 21
0, 220, vibration sensors 304, 306, vibration system amplifier 500, control device 510, actuator amplifier 520
Thus, a vibration isolator 600 for removing fine vibrations in the vertical and horizontal directions of the vibration-isolated body attached to the surface plate 300 is configured.

On the other hand, a base isolation unit 400 is provided between the base 100 and the lower surface of the bottom wall 202 of the base 200. As shown in FIG. 5, the seismic isolation device unit 400 includes a guide unit 410, an air spring 420, a slide unit 430, a slide plate 440, and the like.

The four guide portions 410 have a cylindrical shape with the axis centered in the vertical direction. The upper end portions are fixed to locations corresponding to the four corners near the lower surface of the bottom wall 202 of the base 200, and the lower end portions are Is configured so that the opening 412 provided at the bottom is directed downward. The guide unit 410 is mounted on the base 200
Are arranged at the same interval with respect to the vertical and horizontal center lines of the bottom wall 202. Inside the guide portion 410, a columnar accommodation space 414 whose axis is directed vertically is formed. A sliding member 416 is provided on the inner peripheral surface of the accommodation space 414.
The slip surface 416 is formed by attaching A.

The slide portion 430 has a cylindrical shape with its axis centered vertically and corresponding to the accommodation space 414 of the guide portion 410, and is accommodated in the accommodation space 414 of the guide portion 410. The sliding surface 434 is formed by attaching a sliding member 434A constituting the sliding surface 434 to the outer peripheral surface 432 of the slide portion 430. The slide portion 430 is configured to be slidable up and down with the slip surface 434 in contact with the slip surface 416 of the guide portion 410. The magnitude of the frictional force acting between the slide surface 434 of the slide portion 430 and the slide surface 416 of the guide portion 410 is such that a relatively large earthquake occurs, and the base portion 100 has a vertical acceleration equal to or higher than a predetermined vertical acceleration. Occurs, the guide portion 410 is displaced relative to the slide portion 430; otherwise, the guide portion 41 is displaced.
The size is such that 0 is maintained in a fixed state with respect to the slide portion 430. The predetermined vertical acceleration is set to a value larger than the acceleration of vibration that can be removed by driving the first actuator 410 as described later.
The above-described guide portion 410 and slide portion 430 constitute a vertical vibration absorbing unit.

The air spring 420 has its upper end 422 and lower end 424 in contact with the upper surface 436 of the slide portion 430 and the upper surface 418 of the guide portion 410, respectively.
It is housed in ten housing spaces 414.

A sliding surface 439 is formed by attaching a sliding member 439A to the lower surface 438 of the sliding portion 430.

As shown in FIG. 3, the slide plate 440 is formed in a rectangular thin plate shape in a plan view, and the lower surface 442 is
0, and a slip surface 446 is formed by attaching a slip member 446A to the upper surface 444. The four sliding plates 440 are arranged at the same interval from each other with the vertical and horizontal center lines of the base plate 100 interposed therebetween. The sliding surface 439 of the sliding portion 430 is
The slide surface 44 is in contact with the slide surface 446 of the slide surface 44.
In the range of 6, it is possible to slide in the horizontal direction. Then, the slide surface 439 of the slide portion 430 and the slide plate 44
The magnitude of the frictional force acting between the sliding portion 446 and the zero sliding surface 446 is such that when a relatively large earthquake occurs and a horizontal acceleration equal to or greater than a predetermined horizontal acceleration is generated in the base portion 100, the sliding portion moves on the sliding plate. Relative to the slide plate, otherwise, the size is such that the slide portion is kept fixed to the slide plate. The horizontal predetermined acceleration is set to a value larger than the acceleration of vibration that can be removed by driving the second actuator 220 as described later. The horizontal vibration absorbing means is constituted by the slide part 430 and the slide plate 440. In the first embodiment, the slide portion 430 is fixed to the base 200, and the slide plate 440 is fixed to the base portion 100. However, the slide portion 430 is fixed to the base portion 100, and the slide plate 440 is fixed to the base. It may be fixed to 200. Also, the sliding plate 444,
The shape of the slip surface 446 is not limited to a rectangle, and may be, for example, a circle.

On the lower surface of the bottom wall 202 of the base 200, three level sensors (not shown) for detecting the vertical position of the base 200 are provided. The air pressure applied to each air spring 420 from the air compressor is adjusted by an air pressure control valve based on the output, so that the base 200
Is configured to maintain a constant position in the height direction. That is, these air springs 420 constitute a vertical restoring force generating means for generating a restoring force for the vertical movement of the base 200 with respect to the base plate 100 by their elastic force. These air springs 420 also reduce the weight of the base plate 200 including the vibration-isolated body and the base 200,
0 is configured to be supported in a vertically movable state.
Then, the above-mentioned vertical vibration absorbing means (guide section 410 and slide section 430) and vertical restoring force generating means (air spring 4)
20) constitutes a vertical seismic isolation mechanism.

As shown in FIG. 1 and FIG.
In the center of the lower surface of the base plate 100, a pillar 450 is provided.
4 sandwiched between opposing side portions between the upper sliding plates 440
A column 452 is fixed at the location. And pillar 450
A coil spring 454 is stretched between each of the four columns 552. These coil springs 454 constitute a horizontal restoring force generating means for generating a restoring force against horizontal movement of the base 200 with respect to the base plate 100 by the urging force. The horizontal vibration absorbing means (guide portion 410 and slide plate 440) and the horizontal restoring force generating means (coil spring 454) constitute a horizontal seismic isolation mechanism.

Next, the operation and effect will be described. First, the giant magnetostrictive actuator and the pre-compression force applied thereto will be described. Generally, in a giant magnetostrictive actuator, the amount of deformation (elongation, contraction) of the magnetostrictive actuator is the largest, and the amount of deformation of the giant magnetostrictive actuator changes linearly with respect to a drive signal given to the giant magnetostrictive actuator. It is preferable to make the state of making the most of the performance of the giant magnetostrictive actuator.
In the giant magnetostrictive actuator, by adjusting the pre-compression force applied thereto to an optimum value, the giant magnetostrictive actuator can be brought into the above-described preferable state.

In this embodiment, the first and second
Adjusting the actuators 210, 220 to the preferred state described above has the following advantages. That is,
The first and second actuators 21 and 21 respond to drive signals supplied to the first and second actuators 210 and 220.
Since the displacements 0 and 220 give to the platen 300 are the largest, it is possible to eliminate vibrations with respect to larger external vibrations. In addition, the first and second actuators 210 and 220 receive the first
Since the amount of displacement applied to the surface plate 300 by the first and second actuators 210 and 220 changes linearly, the amount of displacement applied to the surface plate 300 by the first and second actuators 210 and 220 faithfully occurs with respect to the drive signal. In addition, the drive control of the actuator is performed more faithfully. That is, by optimally adjusting the pre-compression force of the first and second actuators 210 and 220, it is possible to bring the vibration isolation device to the state where the vibration isolation capability is most excellent.

Therefore, first, the first actuator 2
10. The pre-compression force of the second actuator 220 is adjusted. The pre-compression force indicates a load received from the platen 300 when the giant magnetostrictive actuator constituting each actuator is not driven.

Adjustment of the precompression force of the giant magnetostrictive actuator (optimization of the amount of magnetostriction) is performed by applying a drive signal (for example, a sine wave signal) having a predetermined frequency and a predetermined amplitude to each actuator 210,
This is performed by adjusting the pre-compression force of each of the actuators 210 and 220 such that the platen 300 is vibrated most, that is, the displacement of the platen 300 is maximized in a state where the platen is input to 220. First and second actuators 21
The pre-compression force of 0, 220 rotates the adjusting screws 1010, 54 to rotate the first and second actuators 210, 2
Actuator holding part 234 in the displacement direction of 20
It can be easily adjusted by changing the positions of A and 49.

When the precompression adjustment of each of the actuators 210 and 220 is completed, the vibration meter amplifier 500 and the control device 5
10. When the power supply of the actuator drive amplifier 520 is turned on, the active vibration isolator 1000 operates. When the vertical vibration transmitted through the floor 10 is smaller than the above-described predetermined vertical acceleration and the horizontal vibration is smaller than the above-described horizontal predetermined acceleration, these vibrations are transmitted to the vibration isolator 400 and the base. The vibration is transmitted to the surface plate 300 and the vibration receiving body attached thereto via the base 200, and the vibration receiving body vibrates. Therefore, each of the vibration sensors 304, 3
Reference numeral 06 detects acceleration indicating the vibration of the platen 300, and inputs a detection signal indicating the acceleration to the vibrometer amplifier 500. The vibration meter amplifier 500 inputs the amplified detection signal to the control device 510. The control device 510 is necessary to remove the vibration from the vibration-free body attached to the surface plate 300 based on the detection signal S indicating the vertical and horizontal accelerations input from the vibration meter amplifier 500. The driving signals corresponding to the driving amounts of the first and second actuators 210 and 220 are arithmetically generated to generate an actuator driving amplifier 52.
Enter 0. This actuator drive amplifier 520
Converts the amplified drive signal D into first and second drive signals.
The actuator is input to and driven by the actuators 210 and 220.
As a result, the vibration of the vibration receiving body attached to the surface plate 300 is removed, and the vibration receiving body maintains a high stationary state.

On the other hand, it is assumed that the vertical vibration transmitted through the floor 10 due to the occurrence of an earthquake or the like is larger than the above-described predetermined vertical acceleration and the horizontal vibration is larger than the above-described horizontal predetermined acceleration. In this case, the seismic isolation device 4
00, the guide portion 410 and the slide portion 430 move while sliding up and down with respect to each other, thereby absorbing and attenuating the vertical vibration transmitted to the surface plate 300, and the air spring 420.
Thus, restoration for the vertical movement of the platen 300 is performed. Further, the guide unit 4 constituting the seismic isolation device unit 400
10 and the sliding plate 440 move while sliding in the horizontal direction with respect to each other, thereby absorbing and attenuating the horizontal vibration transmitted to the platen 300, and the coil spring 454 restores the horizontal movement of the platen 300. . According to the above-described first embodiment, even when a large vibration such as an earthquake occurs, the first and second devices are operated by the action of the seismic isolation device 400.
Vibration that cannot be removed by the actuators 210 and 220 can be removed, and the first and second actuators 210 and 220 are prevented from being damaged by receiving a large shearing force and a tensile force. Even when the large vibration such as an earthquake is only a vertical vibration or a horizontal vibration, the vibration in each direction is absorbed and attenuated by the action of the seismic isolation device 400. . Further, in the first embodiment described above, when the vibration of the vertical acceleration larger than the first acceleration acts, the base 2
00 is displaced in the vertical direction, and the base 200 is displaced in the horizontal direction when a horizontal acceleration greater than the second acceleration acts. That is, the seismic isolation device 400
Is configured to operate when the vertical acceleration is greater than the first acceleration, and to operate when the horizontal acceleration is greater than the second acceleration. In other words, the seismic isolation performance of the seismic isolation device 400 has a trigger function.

In the above-described first embodiment, the horizontal restoring force generating means is constituted by the coil spring 454. However, as the horizontal restoring force generating means, a conventionally known seismic isolation support unit is used as shown below. You can also. FIG. 6 is a diagram for explaining the second embodiment, and is an explanatory diagram corresponding to FIG. 3 showing the first embodiment. FIG. 2 is an explanatory view corresponding to a state viewed from a cross section taken along line BB of FIG. 1. The same parts as those in FIG. 3 are denoted by the same reference numerals, and description thereof will be omitted. Seismic isolation unit 46 between base 100 and base 200
0 is provided. The seismic isolation support unit 460 is one in which a hole is provided along the central axis of a cylindrical laminated body formed by alternately laminating rubber plates and steel plates, and a lead-made cylindrical body is inserted into the hole. . The seismic isolation support unit 460 has an upper end connected to the lower surface of the base 200 and a lower end connected to the base 100 at substantially the center of the rectangular base 100 and base 200. The seismic isolation support unit 460 undergoes shear deformation due to horizontal movement of the upper end portion relative to the lower end portion, and at this time, vibration energy is dissipated because the lead cylinder is plastically deformed. . In addition, vibration energy is dissipated due to internal friction of the laminated rubber plates, and the elastic force of the rubber plates acts as a restoring force for restoring the shear deformation of the seismic isolation support unit 460.

The seismic isolation support unit 460 undergoes shear deformation when a horizontal acceleration equal to or higher than a predetermined horizontal acceleration is generated in the base portion 100, and shears when a horizontal acceleration equal to or lower than the predetermined horizontal acceleration is generated. Not configured. That is, the seismic isolation support unit 4
60 is a horizontal vibration absorbing means for absorbing and attenuating horizontal vibration of the base 200 with respect to the base plate 100;
And a horizontal restoring force generating means for generating a restoring force against the horizontal movement of the base plate 100 with respect to the base plate 100. In addition, the seismic isolation support unit 460 is configured to undergo shear deformation when a horizontal acceleration equal to or more than a predetermined horizontal acceleration is generated in the base portion 100, but not to perform shear deformation when a horizontal acceleration equal to or less than the predetermined horizontal acceleration is generated. If so, a configuration having no lead columnar body may be employed.
According to the above-described second embodiment, it goes without saying that the same operation and effect as those of the first embodiment can be obtained.

In the above-described first embodiment, in order to provide a trigger function for the seismic isolation performance of the seismic isolation device 400, a configuration is used in which the frictional force between the slip surfaces is used. Thus, a configuration using a conventionally known seismic isolation support unit was adopted. However, in order to provide the seismic isolation performance of the seismic isolation device 400 with a trigger function, a configuration using a conventionally known friction damper having a trigger function as described below may be employed. FIG. 7 is a longitudinal sectional view showing a configuration of a seismic isolation device in the active vibration isolator of the third embodiment, FIG. 8 is an explanatory view showing a state viewed from a cross section taken along line CC of FIG.
FIG. 8 is an explanatory diagram showing a state viewed from a section taken along line DD of FIG. 7.
In the third embodiment, portions other than the seismic isolation device 460 are the same as those in the first embodiment, and a description thereof will be omitted. As shown in FIG. 7, the seismic isolation device 460 includes first and second bases 120 and 130, a slide 470, and a coil spring 4.
76, an air spring 480, a friction damper 482, and the like. The first base portion 120 is formed in a rectangular thin plate shape in a plan view, and is fixed to the floor 10. The second base portion 130 is configured to have substantially the same size and shape as the first base portion 120.

As shown in FIG. 9, four air springs 480 are disposed between the second base portion 130 and the lower surface of the base 200 at locations near the four corners of the base 200, and adjacent air springs 480 are provided. There are a total of eight friction dampers 482 between two 480
Are arranged.

The upper end of the friction damper 482 is
, And the lower end is connected to the upper surface of the second base 130. Each of the friction dampers 482 operates when a vertical acceleration equal to or more than a predetermined vertical acceleration is generated in the second base 130, that is, the first base 120, and moves the base 200 relative to the second base 130. In other cases, the base 200 is configured to be fixed to the second base 130. That is, the vertical vibration absorbing means is constituted by the friction damper 482. Such a friction damper 4
Since 82 is conventionally known, a detailed description is omitted.

The air spring 480 has an upper end connected to the lower surface of the base 200 and a lower end connected to the second base 130.
Is connected to the upper surface of. Here, the second base unit 130
Are supported so as to be immovable in the vertical direction with respect to the first base portion 120. The base 200 is supported by the air spring 480 so as to be vertically movable with respect to the second base 120. Therefore, the air spring 480 causes the first base portion 120 of the base 200 to move by the urging force.
And a vertical restoring force generating means for generating a restoring force with respect to the vertical movement. Also, the air spring 480
Is a surface plate (not shown in FIG. 7) including the vibration-isolated body and the base 200
Is supported such that the base 200 can move up and down. In the third embodiment, the vertical vibration absorbing mechanism (friction damper 482) and the vertical restoring force generating means (air spring 480) constitute a vertical seismic isolation mechanism.

As shown in FIG. 8, the slide portion 470
The second base portion 130 is disposed in the vicinity of the four corners on the lower surface of the second base portion 130, has a flat cylindrical shape, and has an upper end portion at the second base portion 1.
A sliding surface 471 formed of a sliding material is provided at a lower end portion, which is connected to a lower surface of the sliding member 30. The top surface of the first base portion 120 is provided with a sliding surface 122 having a rectangular shape in a plan view at locations near the four corners. The four slip surfaces 122 are arranged at the same interval from each other with respect to the vertical and horizontal center lines of the first base 120. And
The sliding surface 471 of the slide portion 470 is the first base portion 1
20 while being in contact with the sliding surface 122 of the sliding surface 12.
2 can be slid in the horizontal direction.

Then, the sliding surface 47 of the slide portion 470
The magnitude of the frictional force acting between the first base portion 120 and the slip surface 122 of the first base portion 120 is determined when a relatively large earthquake occurs and a horizontal acceleration equal to or more than a predetermined horizontal acceleration occurs in the first base portion 120. In addition, the slide portion 470 is connected to the first base portion 12.
In other cases, the size is set so that the slide portion 470 is kept fixed to the first base portion 120. The slide part 4
The horizontal vibration absorbing means is constituted by 70 and the first base plate 120.

A column 472 is provided substantially at the center of the lower surface of the second base portion 130, and each of the sliding surfaces 12
Columns 474 are fixed to four places between the opposing side portions between the two. A coil spring 476 is stretched between each of the columns 472 and the four columns 474. These coil springs 476 cause the second force by their urging force.
A restoring force is generated for the horizontal movement of the base 130 with respect to the first base 120. The base 200 is supported by the friction damper 482 so as to be immovable in the horizontal direction with respect to the second base portion 130. Therefore, the coil spring 476 causes the base 200
A horizontal restoring force generating means for generating a restoring force against horizontal movement of the first base portion 120 is formed.
In the third embodiment, a horizontal seismic isolation mechanism is configured by the above-described horizontal vibration absorbing means (slide portion 470 and first base plate 120) and horizontal restoring force generating means (coil spring 476). Also in the third embodiment described above, it is possible to obtain the same operation and effects as those of the first and second embodiments.

Although the air spring is used as the vertical restoring force generating means in the third embodiment, a coil spring may be used. Further, although the coil spring is used as the horizontal restoring force generating means, the above-described seismic isolation support unit may be used. Further, as the horizontal vibration absorbing means, the above-described seismic isolation support unit may be used. In this case, when a horizontal acceleration equal to or higher than the predetermined horizontal acceleration occurs, the shear deformation occurs, but a horizontal deformation equal to or lower than the predetermined horizontal acceleration is performed. It is necessary to be configured so that shear deformation does not occur when acceleration occurs. If the seismic isolation support unit does not have the function described above, that is, does not have a trigger function, the horizontal vibration absorbing means is constituted by the seismic isolation support unit and a friction damper. That is, a friction damper is provided between the first base part 120 and the second base part 130, one end of the friction damper is connected to the first base part 120, and the other end is connected to the second base part 130. And the friction damper is the first
Activated when a horizontal acceleration equal to or greater than a predetermined horizontal acceleration is generated in the base portion 120 to displace the second base portion 130 relatively to the first base portion 120; The unit 130 is configured to be kept fixed with respect to the first base unit 120.

In the third embodiment, the horizontal vibration absorbing means is constituted by the slide portion 470 and the first base plate 120. However, the first base portion 120 is formed by a conventionally known combination of a linear rail and a linear guide. Second
The base unit 130 may be configured to be slidably supported in directions perpendicular to each other in a horizontal plane. In this case, when a horizontal acceleration equal to or more than a predetermined horizontal acceleration occurs in the first base portion 120, the second base portion 130 is relatively displaced with respect to the first base portion 120; It is needless to say that the second base section 130 needs to be configured so as to be fixed to the first base section 120.

In the active vibration isolator of the first to third embodiments described above, both the upper and lower seismic isolation mechanisms and the horizontal seismic isolation mechanism are provided. It may be configured to include only one of the mechanism and the horizontal seismic isolation mechanism. Also, solid actuators other than giant magnetostrictive actuators may be used as the first and second actuators. Solid actuators other than giant magnetostrictive actuators include those that operate by thermal expansion due to temperature, those that operate by electrostriction or piezoelectric strain by electric fields (piezo actuators), and those that operate by light-induced phase transition by light. These solid actuators, like the giant magnetostrictive actuators, have almost linear displacement characteristics with respect to the magnitude of the drive signal given to them, so the process of generating a drive signal for driving this solid actuator is relatively simple. Good. The relationship between the solid actuator and the precompression force applied thereto is the same as in the case of the above-described giant magnetostrictive actuator.

[0050]

As is clear from the above description, the present invention
A base plate on which a vibration-isolated body is mounted movably in the vertical and horizontal directions on the base, and detects vertical and horizontal accelerations of the base plate, and corresponds to the detected vertical and horizontal accelerations. By displacing the surface plate in this manner, in an active vibration isolator having a vibration isolator unit for removing vertical and horizontal micro-vibrations of the vibration-isolated body, the base and the building A seismic isolation device is provided between the fixed base structure and the seismic isolation device includes a vertical seismic isolation mechanism configured to absorb and attenuate vertical vibrations,
The vertical seismic isolation mechanism is activated when the acceleration of the vertical vibration of the substructure is greater than a predetermined vertical acceleration, and is not activated when the acceleration of the vertical vibration is smaller than the predetermined vertical acceleration. The predetermined acceleration is set to be larger than the acceleration of the vibration in the vertical direction of the vibration-removed body that can be vibration-removed by the vibration-removing device.
Therefore, when a vertical vibration that is greater than the vertical vibration acceleration of the vibration-isolated body that can be removed by the vibration-isolating device portion occurs, the vibration is absorbed and attenuated by the seismic isolation device portion. Even if a large vibration such as an earthquake is applied, the vibration isolation operation can be maintained, and breakage of the actuator and the like constituting the vibration isolation device can be prevented.

Further, according to the present invention, there is provided a base plate which is supported on a base so as to be movable in the vertical and horizontal directions and to which a vibration-isolated body is attached, and the vertical and horizontal accelerations of the base plate are detected and detected. By displacing the surface plate in response to vertical and horizontal acceleration, the active vibration isolator having a vibration isolator unit for removing fine vibration in the vertical and horizontal directions of the vibration receiving body, A seismic isolation device is provided between the base and a foundation fixed to a building, and the seismic isolation device is configured to absorb and attenuate horizontal vibration. The horizontal seismic isolation mechanism is activated when the acceleration of the horizontal vibration of the substructure is greater than a predetermined horizontal acceleration, and when the acceleration of the horizontal vibration is smaller than the predetermined horizontal acceleration. Is configured to not work, Serial predetermined acceleration is set to be larger than the horizontal acceleration of the vibration of the vibration isolation possible the object divided insulating member by the vibration damping device unit. Therefore, when a horizontal vibration that is greater than the acceleration of the horizontal vibration of the vibration-isolated object that can be removed by the vibration-isolating device portion occurs, the vibration is absorbed and attenuated by the seismic isolation device portion. Even if a large vibration such as an earthquake is applied, the vibration isolation operation can be maintained, and breakage of the actuator and the like constituting the vibration isolation device can be prevented.

Further, according to the present invention, there is provided a base plate which is supported on a base so as to be movable in the vertical and horizontal directions and to which an anti-vibration body is attached, and the vertical and horizontal accelerations of the base plate are detected and detected. By displacing the surface plate in response to vertical and horizontal acceleration, the active vibration isolator having a vibration isolator unit for removing fine vibration in the vertical and horizontal directions of the vibration receiving body, A seismic isolation device is provided between the base and a base structure fixed to a building, and the seismic isolation device is configured to absorb and attenuate vertical vibrations. A mechanism and a horizontal seismic isolation mechanism configured to absorb and attenuate horizontal vibrations, wherein the vertical seismic isolation mechanism is used when the acceleration of vertical vibration of the substructure is greater than a predetermined vertical acceleration. Activate the acceleration of the vertical vibration The horizontal seismic isolation mechanism is configured not to operate when the vertical acceleration is smaller than the predetermined acceleration, and operates when the horizontal vibration acceleration of the substructure is greater than the horizontal predetermined acceleration, and Is not activated when the acceleration of the object is smaller than the predetermined horizontal acceleration, and the predetermined vertical acceleration is set to be larger than the acceleration of the horizontal vibration of the object to be removed which can be removed by the vibration removing device. The predetermined horizontal acceleration is set to be larger than the acceleration of horizontal vibration of the object to be removed which can be removed by the vibration removing device. Therefore, when vibrations in the vertical and horizontal directions, which are larger than the acceleration of the vibration in the horizontal direction, occur in the vertical direction of the object to be vibration-isolated by the vibration isolation device, the vibration is absorbed by the vibration isolation device. Since the vibration is attenuated, it is possible to maintain the vibration isolation operation even when a large vibration such as an earthquake is applied, and it is possible to prevent the actuators constituting the vibration isolation device from being damaged.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a schematic configuration of a first embodiment of an active vibration isolator according to the present invention.

FIG. 2 is an explanatory diagram showing a state where FIG. 1 is viewed from a cross section taken along line AA.

FIG. 3 is an explanatory diagram showing a state viewed from a cross section taken along a line BB of FIG. 1;

FIG. 4 is an explanatory diagram illustrating a configuration of a first adjustment unit according to the first embodiment.

FIG. 5 is an explanatory diagram illustrating a configuration of a main part of a seismic isolation device according to the first embodiment.

FIG. 6 is a diagram for explaining the second embodiment, and is an explanatory diagram corresponding to FIG. 3 showing the first embodiment.

FIG. 7 is a longitudinal sectional view illustrating a configuration of a seismic isolation device in an active vibration isolation device according to a third embodiment.

FIG. 8 is an explanatory diagram showing a state viewed from a cross section taken along line CC of FIG. 7;

FIG. 9 is an explanatory diagram showing a state viewed from a DD line cross section in FIG. 7;

[Explanation of symbols]

 1000 Active-type anti-vibration device 10 Floor (foundation structure) 120 First base plate (horizontal vibration absorbing means) 200 Base 210 First actuator 220 Second actuator 300 Surface plate 400 Seismic isolation device section 600 Anti-vibration device section

Continued on the front page (51) Int.Cl. ⁷ Identification FI FI Theme Court II (Reference) // G01N 13/10 H01L 41/08 C (72) Inventor Keiji Masuda 4-6-115 Sendagaya Shibuya-ku Tokyo F term in Fujita formula company (reference) 3J048 AA02 AB11 AC01 AC08 BA02 BB10 BC08 BE02 BE12 CB07 DA03 EA13 5F046 AA23 DA04 DB14 DC14

Claims (16)

[Claims] 1. A base plate on which a vibration damping body is mounted and supported on a base so as to be movable in the vertical and horizontal directions, detecting vertical and horizontal accelerations of the base plate, and detecting the detected vertical and horizontal directions. By displacing the surface plate corresponding to the acceleration of, the active type vibration isolator having a vibration isolator section for removing fine vibrations in the vertical and horizontal directions of the vibration-isolated body, the base and A seismic isolation device is provided between the base structure fixed to the building, and the seismic isolation device includes a vertical seismic isolation mechanism configured to absorb and attenuate vertical vibrations, The vertical seismic isolation mechanism is activated when the acceleration of the vertical vibration of the substructure is greater than a predetermined vertical acceleration, and is not activated when the acceleration of the vertical vibration is smaller than the predetermined vertical acceleration. The upper and lower predetermined Speed is set to be larger than the vertical acceleration of the vibration of the vibration isolation possible the object divided insulating member by the vibration damping device unit, it active anti-vibration apparatus according to claim. 2. A base plate on which a vibration-absorbing body is mounted movably in the vertical and horizontal directions on a base, detecting vertical and horizontal accelerations of the base plate and detecting the detected vertical and horizontal directions. By displacing the surface plate corresponding to the acceleration of, the active type vibration isolator having a vibration isolator section for removing fine vibrations in the vertical and horizontal directions of the vibration-isolated body, the base and A seismic isolation device is provided between the base structure fixed to the building and the seismic isolation device includes a horizontal seismic isolation mechanism configured to absorb and attenuate horizontal vibrations, The horizontal seismic isolation mechanism is activated when the acceleration of the horizontal vibration of the substructure is greater than a predetermined horizontal acceleration, and is not activated when the acceleration of the horizontal vibration is smaller than the predetermined horizontal acceleration. The said predetermined horizontal Speed is set to be larger than the horizontal acceleration of the vibration of the vibration isolation possible the object divided insulating member by the vibration damping device unit, it active anti-vibration apparatus according to claim. 3. A base plate on which a vibration-isolated body is mounted movably in the vertical and horizontal directions on a base, detecting vertical and horizontal accelerations of the base plate, and detecting the detected vertical and horizontal directions. By displacing the surface plate corresponding to the acceleration of, the active type vibration isolator having a vibration isolator section for removing fine vibrations in the vertical and horizontal directions of the vibration-isolated body, the base and A seismic isolation device is provided between a base structure fixed to a building, and the seismic isolation device includes a vertical seismic isolation mechanism configured to absorb and attenuate vertical vibrations and a horizontal seismic isolation mechanism. A horizontal seismic isolation mechanism configured to absorb and attenuate the vibration of the vertical seismic isolation mechanism, wherein the vertical seismic isolation mechanism operates when the acceleration of vertical vibration of the substructure is greater than a predetermined vertical acceleration. The vertical vibration acceleration is equal to the vertical The horizontal seismic isolation mechanism is configured to operate when the acceleration of the horizontal vibration of the substructure is greater than a predetermined horizontal acceleration, and the horizontal vibration isolation mechanism is configured to not operate when the acceleration of the horizontal vibration is smaller than the predetermined acceleration. It is configured not to operate when it is smaller than the horizontal predetermined acceleration, and the vertical predetermined acceleration is set to be larger than the acceleration of horizontal vibration of the vibration-removed body that can be vibration-removed by the vibration-removing device unit, The active vibration isolation device, wherein the horizontal predetermined acceleration is set to be greater than the acceleration of horizontal vibration of the vibration isolation member that can be isolated by the vibration isolation device. 4. The vertical seismic isolation mechanism absorbs vertical vibration of the base relative to the base structure, and vertical vibration absorbing means, and moves the base vertically relative to the base structure. 4. An active vibration isolator according to claim 1, further comprising a vertical restoring force generating means for generating a restoring force for the vibration. 5. The horizontal seismic isolation mechanism includes horizontal vibration absorbing means for absorbing horizontal vibration of the base relative to the base structure, and horizontal movement of the base relative to the base structure. 4. An active vibration isolator according to claim 2, further comprising a horizontal restoring force generating means for generating a restoring force for the vibration. 6. The vertical vibration absorbing means has a sliding surface that comes into contact with each other, and a frictional force acting between the sliding surfaces is larger than a predetermined magnitude of a force that relatively displaces the sliding surface in a direction parallel to the sliding surface. Is smaller, the slip surfaces are not displaced from each other, and when the force is larger than a predetermined magnitude, the slip surfaces are displaced from each other. 5. The apparatus according to claim 4, wherein the apparatus is configured to be activated when the acceleration of the vertical vibration is larger than the predetermined acceleration, and not to be activated when the acceleration of the vertical vibration is smaller than the predetermined acceleration. Active vibration isolator. 7. The horizontal vibration absorbing means includes slip surfaces that come into contact with each other, and a frictional force acting between the slip surfaces is greater than a predetermined magnitude of a force that relatively displaces the slip surfaces in a direction parallel to the slip surfaces. When the force is larger than a predetermined magnitude, the slip surfaces are not displaced with each other, and when the force is greater than a predetermined magnitude, the slip surfaces are displaced with each other. 6. The apparatus according to claim 5, wherein the apparatus operates when the acceleration of the horizontal vibration is larger than the predetermined acceleration, and does not operate when the acceleration of the horizontal vibration is smaller than the predetermined acceleration. Active vibration isolator. 8. The vertical vibration absorbing means comprises a friction damper. The friction damper operates when an acceleration of the vertical vibration applied to the friction damper is larger than the predetermined acceleration, and the friction damper operates to absorb the vertical vibration. The active vibration isolator according to claim 4, wherein the active vibration isolator is configured not to operate when the acceleration is smaller than the predetermined acceleration. 9. The horizontal vibration absorbing means comprises a friction damper, and the friction damper operates when an acceleration of the horizontal vibration of the substructure is greater than the predetermined acceleration. 6. The active vibration damping device according to claim 5, wherein the device is not activated when the acceleration is smaller than the predetermined acceleration. 10. The vertical restoring force generating member includes at least one of an air spring and a coil spring disposed between the base and the substructure. 9. The active vibration isolator according to 4, 6, or 8. 11. The vertical restoring force generating member is provided between the base and the base structure, and controls the weight of the base and the base including the vibration-isolated body, and allows the base to move up and down. The active vibration isolator according to claim 4, 6 or 8, wherein the active vibration isolator is configured to be supported in a state where it can be carried out. 12. The horizontal restoring force generating member includes at least one of an air spring and a coil spring disposed between the base and the substructure. Item 10. The active vibration isolator according to any one of Items 5, 7, and 9. 13. The horizontal restoring force generating member includes a seismic isolation support unit disposed between the base and the base structure, and the seismic isolation support unit includes a rubber plate and a steel plate. 10. The active vibration isolator according to claim 5, wherein the active vibration isolator is formed by alternately stacking. 14. Detection of vertical and horizontal acceleration of the surface plate is performed by a vibration sensor, and displacement of the surface plate in the vertical and horizontal directions is detected by a vibration sensor provided between the base and the surface plate. 1, performed by a second actuator, the first
A first elastic body is provided between the actuator and the surface plate for absorbing a shear force acting on the first actuator, and a shear force acting on the second actuator is provided between the second actuator and the surface plate. 2. A second elastic body for absorbing the pressure is provided.
3. The active vibration damping device according to any one of 3. 15. The first and second actuators are formed of solid actuators, are provided on the base, hold the first actuator, and move the non-driven first actuator in the direction of displacement thereof. First adjusting means for adjusting a pre-compression force received from the surface plate; and a second actuator provided on the base and holding the second actuator, wherein the second actuator in a non-driven state is displaced from the surface plate in a displacement direction thereof. The active vibration isolator according to claim 14, further comprising: a second adjusting unit that adjusts the received pre-compression force. 16. The active vibration isolator according to claim 15, wherein said solid actuator is a giant magnetostrictive actuator or a piezo actuator.