JP2000276077A - Light control element, method of manufacturing the same, and display device - Google Patents

Abstract

[PROBLEMS] To provide a method of manufacturing a light control element capable of manufacturing a light control element capable of high-speed response with high accuracy, and a light control element and a display device manufactured by the method. . A method of manufacturing a light control element includes a first step of providing a movable element (12) that is driven to move up and down on a substrate (10), and a method of forming a first master (20) and the substrate (10) on a reflective structure layer precursor. A second step of bringing the first master disk 20 into close contact with the first master disc 20 to form a reflective structure layer 28 that has a concave portion 32 corresponding to the convex portion 18 and reflects light. A fourth step of bringing the master 40 and the reflective structure layer 28 into close contact with each other via the light transmitting layer precursor 36, and a second master 4
A fifth step of forming a light-transmitting layer 42 having a flat upper end face 44 corresponding to the flat surface 38 by peeling off the light-transmitting substrate 0; a sixth step of making the portion on the movable element 12 independent;
And a seventh step of providing 0.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a light control element, a method for manufacturing the same, and a display device.

[0002]

BACKGROUND OF THE INVENTION Conventionally, there has been known an apparatus for controlling light by changing the molecular arrangement of liquid crystal by applying a voltage. Although this device has advantages such as low power consumption, it has a disadvantage that high-speed response is difficult. Therefore, an element that performs light control instead of the liquid crystal has been developed. As an example,
There is an element that controls incident light so that light is emitted or not emitted. In order to manufacture this element, high-precision fine processing is required.

An object of the present invention is to provide a method of manufacturing a light control element capable of manufacturing a light control element capable of high-speed response with high precision, a light control element manufactured by the method, and a display device. .

[0004]

(1) In a method of manufacturing a light control element according to the present invention, a first step of providing a movable element driven to move up and down on a substrate, and a convex portion are formed. A second step of closely adhering the surface of the first master on which the protrusions are formed and the surface of the substrate on which the movable element is provided, via a reflective structure layer precursor; A third step of solidifying the body, peeling off the first master, forming a reflective structure layer having a concave portion corresponding to the convex portion and reflecting light, and a second master having a flat surface formed thereon. A fourth step of bringing the surface including the flat surface and the reflective structure layer into close contact with each other with the light transmitting layer precursor interposed therebetween, with the flat surface and the concave portion facing each other; Solidifies to peel off the second master, and a flat upper surface corresponding to the flat surface of the second master A fifth step of forming a light-transmitting layer having a surface above the concave portion, and removing a portion of the reflective structure layer and the light-transmitting layer to make a portion of the reflective structure layer on the movable element independent A sixth step of causing the light-transmitting layer to be in close contact with the upper-end surface of the light-transmitting layer when the light-transmitting layer is raised by driving the movable element and is parallel to the upper-end surface of the light-transmitting layer. And a seventh step of providing a light transmissive substrate at the position where

[0005] This manufacturing method includes a step of forming a reflective structure layer having a concave portion using the first master as a mold, and forming a light transmitting layer having a flat upper end surface using the second master as a mold. Once manufactured, the first and second masters can be used as many times as the durability permits, so that they can be omitted in the subsequent manufacturing process of the light control element, thereby reducing the number of processes and reducing the cost. Can be.

According to the light control element manufactured by this method, the light is totally reflected inside the light-transmitting substrate and proceeds, and when the light-transmitting layer comes into close contact with the light-transmitting substrate, the light is emitted. It is incident on the transmissive layer. Then, the light is reflected and emitted by the concave portion of the reflective structure layer formed below the light transmitting layer. When the light transmissive layer does not contact the light transmissive substrate, the light is totally reflected inside the light transmissive substrate and proceeds. The light transmitting layer is brought into contact with or separated from the light transmitting substrate by moving the light transmitting layer up and down through driving of the movable element. By driving the movable element at high speed, this light control element can respond at high speed.

(2) In this manufacturing method, the projection of the first master may have a triangular cross section.

With such a triangular convex portion, a V-shaped concave portion is formed in the reflective structure layer, and light can be reflected by the inner surface of the concave portion.

(3) In this manufacturing method, the movable element may include a piezoelectric element, and before the first step, a step of forming an electrode for applying a voltage to the piezoelectric element on the substrate may be included. .

As described above, the movable element can be easily formed by using the piezoelectric element.

(4) In this manufacturing method, the reflective structure layer precursor contains a substance curable by light, and
The master may have optical transparency, and in the third step, the reflective structure layer precursor may be irradiated with light through the first master.

As described above, by using light, the reflection structure layer precursor can be solidified much more easily than in the case of using heat.

(5) In this manufacturing method, in the third step, after the first master is peeled off, a light reflection film is formed on the solidified reflection structure layer precursor to form the reflection structure layer. It may be formed.

The reflection structure layer may be formed of a reflection structure layer precursor having a property of reflecting light, but otherwise, the reflection structure layer precursor is solidified to form a light reflection film thereon. Thus, a reflective structure layer may be formed.

(6) In this manufacturing method, the light-transmitting layer precursor contains a light-curable substance,
The master may have light transmissivity, and in the fifth step, the light transmitting layer precursor may be irradiated with light through the second master.

As described above, by using light, the light-transmitting layer precursor can be solidified much more easily than in the case of using heat.

(7) In this manufacturing method, the surface of the third master on which the inverted shape of the convex portion of the first master is formed and the fourth master are formed by the master precursor. The master precursor is solidified through the
And removing the original master to manufacture the first original master.

According to this, since the expensive first master is manufactured by duplication, even if it deteriorates, it can be easily manufactured again, and the manufacturing cost of the light control element can be reduced.

(8) In this manufacturing method, a metal layer is formed by electroforming on the surface of the third master on which the inverted shape of the convex portion of the first master is formed. And removing the metal layer from the third master to manufacture the first master.

According to this, since the expensive first master is manufactured by duplication, it can be easily manufactured again even if it deteriorates, and the manufacturing cost of the light control element can be reduced.

(9) In this manufacturing method, a metal layer is formed by an electroforming method on a surface of the third master on which the shape of the convex portion of the first master is formed. Then, the metal layer is peeled off from the third master to form an intermediate master having the inverted shape of the convex portion formed thereon, and a surface of the intermediate master having the inverted shape formed therein, and a fourth master. And a step of manufacturing the first master by bonding the master and the master through a master precursor and solidifying the master precursor and peeling the intermediate master.

According to this, since the expensive first master is manufactured by duplication, even if it deteriorates, it can be easily manufactured again, and the manufacturing cost of the light control element can be reduced.

(10) In this manufacturing method, the first
At least one of the second master and the second master may have a spacer for regulating a distance from the substrate.

According to this, since the distance between the first or second master and the substrate is controlled by the spacer portion, the thickness of the reflection structure layer or the light transmitting layer sandwiched therebetween can be easily controlled. And the inclination of the concave portion of the reflective structure layer or the upper end surface of the light transmissive layer can be prevented. Thereby, the quality of the manufactured light control element can be made uniform.

(11) In this manufacturing method, the first
At least one end of the second master and the second master may have an engaging portion that engages in a direction intersecting a surface facing the substrate.

According to this, since the engaging portion is formed at the end of the first or second master, the first or second master can easily be hooked on the engaging portion to easily attach the first or second master to the reflection structure layer. Alternatively, it can be separated from the light transmitting layer.

(12) In this manufacturing method, the first
A low-adhesion layer having low adhesion to the reflective structure layer precursor may be formed on at least a part of the surface of the master having the convex portions formed thereon.

According to the present invention, since the low adhesion layer is formed on the first master, the reflection structure layer and the first master can be easily separated. Thus, the light control element can be manufactured while preventing the first master or the reflective structure layer from being damaged.

(13) In this manufacturing method, the low-adhesion layer may be formed on an end of a surface of the first master on which the convex portions are formed.

(14) In this manufacturing method, the second
A low-adhesion layer having low adhesion to the light-transmitting layer precursor may be formed in at least a part of a surface of the master including the flat surface.

According to the present invention, since the low-adhesion layer is formed on the second master, the light-transmitting layer and the second master can be easily separated. Thus, the light control element can be manufactured while preventing the second master or the light transmitting layer from being damaged.

(15) In this manufacturing method, the low adhesion layer may be formed at an end of a surface including the flat surface of the second master.

(16) In this manufacturing method, the first
The surface of the original master on which the convex portions are formed is composed of a flat surface and the convex portions, and the convex portions are formed smaller than the area of the movable element. In the second step and the third step, A flat upper end surface is formed by the flat surface of the first master outside the concave portion on the surface of the reflective structure layer. In the sixth step, the flat upper surface is formed outside the concave portion of the reflective structure layer. A part of the reflective structure layer and a part of the light transmitting layer may be removed while leaving a part of the upper end face.

According to this, when a part of the reflective structure layer and a part of the light transmitting layer are removed, a part of the flat upper end surface is left outside the concave part of the reflective structure layer. Can be left. Therefore, when removing a part of the reflective structure layer and a part of the light transmissive layer, it is not necessary to perform accurate positioning with respect to the concave portion.

(17) In this manufacturing method, the second
The original master is provided with a recess for spacer formation at a portion of the surface including the flat surface, which avoids a position directly above the movable element, and at a portion where a gap is formed from directly above the movable element. And forming a spacer-forming projection on the light-transmitting layer by the spacer-forming recess in the fifth step, and forming the spacer-forming projection directly above the movable element in the sixth step. Then, a part of the reflection structure layer and a part of the light transmission layer are removed, and a part of the light transmission layer including the spacer-forming protrusions and a part of the reflection structure layer form the light transmission layer. A spacer that supports the conductive substrate may be configured.

According to this, in the light-transmitting layer, the convex portion for forming the spacer is higher than other portions. By forming a spacer using this height, a light-transmitting substrate can be provided above the light-transmitting layer.

(18) In this manufacturing method, the light refractive index na of the light transmitting substrate and the light refractive index n of the light transmitting layer are different.
b may be in a relationship of na ≦ nb.

By doing so, the light incident on the light transmitting layer from inside the light transmitting substrate goes straight without being refracted, or the normal to the interface between the light transmitting substrate and the light transmitting layer. Refracted in the direction approaching. Therefore, it becomes easy to reflect light in a direction that does not cause total reflection in the light transmitting substrate or the light transmitting layer.

(19) The light control element according to the present invention is manufactured by the above method.

(20) A light control element according to the present invention comprises a substrate, a movable element formed on the substrate, a reflective structure layer formed on the movable element to reflect light, and a reflective structure layer. A light-transmitting layer formed on the top surface and having a flat upper end surface, and a light-transmitting substrate provided above the light-transmitting layer, wherein the movable element is driven to move up and down, The reflective structure layer has a flat upper surface and a concave surface, and the light-transmitting substrate is parallel to the upper surface of the light-transmitting layer, and the light-transmitting substrate is driven by driving the movable element. The light-transmitting layer is provided at a position that comes into close contact with the upper end surface when the layer is raised.

According to this, light is totally reflected inside the light-transmitting substrate and proceeds, and when the light-transmitting layer comes into close contact with the light-transmitting substrate, the light enters the light-transmitting layer. Then, the light is reflected and emitted by the concave portion of the reflective structure layer formed below the light transmitting layer. When the light transmissive layer does not contact the light transmissive substrate, the light is totally reflected inside the light transmissive substrate and proceeds. The light transmitting layer is brought into contact with or separated from the light transmitting substrate by moving the light transmitting layer up and down through driving of the movable element. By driving the movable element at high speed, this light control element can respond at high speed.

Further, since a part of the flat upper end surface remains outside the concave portion of the reflection structure layer, the concave portion is not partially missing.

(21) A light control element according to the present invention includes a substrate, a movable element formed on the substrate, and a reflection structure formed on the movable element and having a concave portion formed on the surface to reflect light. A light-transmitting layer formed on the reflective structure layer and having a flat upper end surface; a light-transmitting substrate provided above the light-transmitting layer; and a light-transmitting substrate formed on the substrate outside the movable element. And a spacer for supporting the light-transmitting substrate, wherein the movable element is driven to move up and down, and the light-transmitting substrate is parallel to the upper end surface of the light-transmitting layer. The light-transmitting layer is provided at a position in close contact with the upper end surface of the light-transmitting layer when the light-transmitting layer is raised by driving the movable element, and the spacer is made of the same material as the reflective structure layer. Made of the same material as the first layer to be formed and the light transmitting layer And the second layer in formed is the.

According to this, light is totally reflected inside the light-transmitting substrate and proceeds, and when the light-transmitting layer comes into close contact with the light-transmitting substrate, the light enters the light-transmitting layer. Then, the light is reflected and emitted by the concave portion of the reflective structure layer formed below the light transmitting layer. When the light transmissive layer does not contact the light transmissive substrate, the light is totally reflected inside the light transmissive substrate and proceeds. The light transmitting layer is brought into contact with or separated from the light transmitting substrate by moving the light transmitting layer up and down through driving of the movable element. By driving the movable element at high speed, this light control element can respond at high speed.

(22) A display device according to the present invention includes the above light control element and a light source.

(23) A display device according to the present invention includes a substrate, a plurality of movable elements formed on the substrate and driven to move up and down, and formed on each movable element to reflect light. A reflective structure layer, a light transmissive layer formed on the reflective structure layer and having a flat upper end surface, a light transmissive substrate provided above the light transmissive layer, and a light transmissive substrate inside the light transmissive substrate. A light source that emits light that travels while being totally reflected;
The reflective structure layer has a flat upper surface and a concave surface, and the light transmitting substrate is parallel to the upper surface of the light transmitting layer, and drives the movable element. The light-transmitting layer is provided at a position that comes into close contact with the upper end surface of the light-transmitting layer when the light-transmitting layer rises, and when the light-transmitting layer comes into close contact with the light-transmitting substrate, Light is incident on the light transmitting layer from the light transmitting substrate,
The light is reflected by the concave portion of the reflective structure layer and exits from the light transmitting layer and the light transmitting substrate.

According to this, light is totally reflected inside the light-transmitting substrate and proceeds, and when the light-transmitting layer comes into close contact with the light-transmitting substrate, the light enters the light-transmitting layer. Then, the light is reflected and emitted by the concave portion of the reflective structure layer formed below the light transmitting layer. When the light transmissive layer does not contact the light transmissive substrate, the light is totally reflected inside the light transmissive substrate and proceeds. The light transmitting layer is brought into contact with or separated from the light transmitting substrate by moving the light transmitting layer up and down through driving of the movable element. By driving the movable element at high speed, this display device can perform high-speed response.

Further, since a part of the flat upper end surface remains outside the concave portion of the reflective structure layer, the concave portion is not missing, and there is no loss of emitted light.

(24) A display device according to the present invention includes a substrate, a plurality of movable elements formed on the substrate and driven to move up and down, and a recess formed on each movable element and having a recess on the surface. A reflective structure layer that is formed and reflects light, a light transmissive layer formed on the reflective structure layer and having a flat upper end surface, a light transmissive substrate provided above the light transmissive layer, A first layer formed on the substrate outside the movable element and supporting the light-transmitting substrate, and a first layer formed of the same material as the reflective structure layer, and a first layer formed of the same material as the light-transmitting layer; A light source that emits light that travels while being totally reflected inside the light-transmitting substrate, wherein the light-transmitting substrate has a Parallel to the upper end surface, the light-transmitting layer is raised by driving the movable element. Is provided at a position in close contact with the upper end surface of the light transmitting layer when the light transmitting layer is in close contact with the light transmitting substrate. From the light transmitting layer, is reflected by the concave portion of the reflection structure layer, and is emitted outside from the light transmitting layer and the light transmitting substrate.

According to this, light is totally reflected inside the light-transmitting substrate and proceeds, and when the light-transmitting layer comes into close contact with the light-transmitting substrate, the light enters the light-transmitting layer. Then, the light is reflected and emitted by the concave portion of the reflective structure layer formed below the light transmitting layer. When the light transmissive layer does not contact the light transmissive substrate, the light is totally reflected inside the light transmissive substrate and proceeds. The light transmitting layer is brought into contact with or separated from the light transmitting substrate by moving the light transmitting layer up and down through driving of the movable element. By driving the movable element at high speed, this display device can perform high-speed response.

(25) In this display device, the light refractive index na of the light transmitting substrate and the light refractive index n of the light transmitting layer are set.
b may be in a relationship of na ≦ nb.

In this way, the light incident on the light transmitting layer from inside the light transmitting substrate travels straight without being refracted, or the normal to the interface between the light transmitting substrate and the light transmitting layer. Refracted in the direction approaching. Therefore, it becomes easy to reflect light in a direction that does not cause total reflection in the light transmitting substrate or the light transmitting layer.

(26) In this display device, the inner surface of the concave portion of the reflective structure layer may be inclined at an angle to reflect the light in a direction perpendicular to the interface between the light transmitting layer and the light transmitting substrate. Good.

According to this, at the interface between the light transmitting layer and the light transmitting substrate, light can be emitted without being refracted.

[0055]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIGS. 1A to 6
FIG. 1 is a diagram illustrating a first embodiment of the present invention. In this embodiment, a light control element is manufactured by applying the method for manufacturing a light control element according to the present invention. Here, the light control element refers to an element that controls light for transmitting information, displaying an image, and the like. An example is an optical switch that switches an optical path. The display device illustrated in FIG. 6 can be configured to include a plurality of optical switches arranged in a matrix in a plurality of rows and a plurality of columns. Alternatively, a light modulation element that modulates light intensity, phase, amplitude, frequency, polarization plane, and the like is also included in the light control element. Hereinafter, a method for manufacturing the light control element will be described.

(First Step) As shown in FIG. 1A, one or a plurality of movable elements 12 are formed on a substrate 10. The material of the substrate 10 is not limited as long as it has a strength capable of supporting a structure formed thereon. When the movable element 12 is electrically driven, the electrode 1 is placed on the substrate 10.
4 is required. In that case, before this step, the substrate 1
The step of forming the electrode 14 in advance to 0 is performed. For example, the electrode 14 can be easily formed on the substrate 10 by using a silicon substrate as the substrate 10 and applying a microfabrication technique of a semiconductor manufacturing process. Note that the electrode 14 is
Illustrations other than (A) are omitted.

When the light control element is used for a display device, a plurality of movable elements 12 are formed on the substrate 10. Each movable element 12 is formed corresponding to each pixel of the screen of the display device, and is driven independently. Movable element 1
2 is driven so that at least a part thereof moves up and down, that is, along the thickness direction of the substrate 10, and the light control is performed by this up and down movement. By electrically controlling the movable element 12, light control can be performed at high speed and with high accuracy. The movable element 12 including or composed of a piezoelectric element can be expanded and contracted in a predetermined direction by applying a voltage. The movable element 1 extends along the thickness direction of the substrate 10.
By expanding and contracting 2, the upper part can be moved up and down. When forming the movable element 12, a fine processing technique of a semiconductor process can be applied. Alternatively, in addition to the piezoelectric element, the movable element 12 may be driven to move up and down using electrostatic force.

(Second Step) Next, as shown in FIG. 1B, a reflective structure layer precursor 16 is provided. The reflection structure layer precursor 16 is for forming the reflection structure layer 28 (see FIG. 1D).

The reflection structure layer precursor 16 is preferably a low-viscosity liquid material. Such a material can easily transfer the shape of the surface of the first master 20 even at normal temperature, normal pressure or in the vicinity thereof. The liquid substance is preferably a substance that can be cured by applying energy. When such a substance is used, the timing of solidifying the reflective structure layer precursor 16 to form the reflective structure layer 28 can be easily controlled, so that the productivity and accuracy can be easily improved, and the robust reflective structure layer 28 can be easily formed. Is easily obtained.

A material having plasticity can be used as the reflective structure layer precursor 16.

The reflective structure layer precursor 16 is not particularly limited as long as it has a strength capable of supporting a structure formed thereon after solidification, but a resin can be used. . The resin is preferably used because a resin having energy curability or a resin having plasticity can be easily obtained.

As the resin having energy curability,
Desirably, it can be cured by applying at least one of light and heat. For the use of light and heat, a general-purpose exposure apparatus, a heating apparatus such as a baking furnace or a hot plate can be used, and the equipment cost can be reduced.

Examples of such an energy-curable resin include acrylic resins, epoxy resins,
Melamine-based resins, polyimide-based resins, and the like can be used. In particular, an acrylic resin is preferable because it can easily be cured by irradiation with light by using various commercially available precursors and photosensitive agents (photopolymerization initiators).

Specific examples of the basic composition of the photocurable acrylic resin include a prepolymer or oligomer, a monomer, and a photopolymerization initiator.

As the prepolymer or oligomer,
For example, acrylates such as epoxy acrylates, urethane acrylates, polyester acrylates, polyether acrylates, and spiroacetal acrylates; methacrylates such as epoxy methacrylates, urethane methacrylates, polyester methacrylates, and polyether methacrylates; Is available.

Examples of the monomer include 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, N-vinyl-2-pyrrolidone, carbitol acrylate, tetrahydrofurfuryl acrylate and isovol Monofunctional monomers such as nyl acrylate, dicyclopentenyl acrylate, and 1,3-butanediol acrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, neopentyl glycol diacrylate,
Bifunctional monomers such as neopentyl glycol dimethacrylate, ethylene glycol diacrylate, polyethylene glycol diacrylate, pentaerythritol diacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate,
Polyfunctional monomers such as pentaerythritol triacrylate and dipentaerythritol hexaacrylate can be used.

As the photopolymerization initiator, for example, 2,2-
Acetophenones such as dimethoxy-2-phenylacetophenone, butylphenones such as α-hydroxyisobutylphenone and p-isopropyl-α-hydroxyisobutylphenone, p-tert-butyldichloroacetophenone, p-tert-butyltrichloroacetophenone, α, halogenated acetophenones such as α-dichloro-4-phenoxyacetophenone, benzophenone,
Benzophenones such as N, N-tetraethyl-4,4-diaminobenzophenone; benzyls such as benzyl and benzyldimethylketal; benzoins such as benzoin and benzoin alkyl ether; 1-phenyl-1,2
Oximes such as -propanedione-2- (o-ethoxycarbonyl) oxime, 2-methylthioxanthone,
-Xanthones such as chlorothioxanthone, and radical generating compounds such as Michler's ketone and benzyl methyl ketal can be used.

If necessary, a compound such as an amine may be added for the purpose of preventing curing inhibition by oxygen, or a solvent component may be added for the purpose of facilitating coating. The solvent component is not particularly limited, and various organic solvents, for example, propylene glycol monomethyl ether acetate, methoxymethyl propionate, ethoxyethyl propionate, ethyl lactate, ethyl pyruvate, methyl amyl ketone, etc. Available.

The use of these substances is preferable when the first master 20 is made of silicon or quartz because the releasability from the first master 20 is good.

As the resin having plasticity, for example, a resin having thermoplasticity such as a polycarbonate resin, a polymethyl methacrylate resin, and an amorphous polyolefin resin can be used.

Then, as shown in FIG. 1C, a first master 20 is prepared. One or a plurality of convex portions 18 are formed on the first master 20, and a flat surface 22 is formed around the convex portions 18. The surface of the substrate 10 on which the movable element 12 is formed and the surface of the first master 20 on which one or a plurality of protrusions 18 are formed on which the protrusions 18 are formed are interposed via the reflective structure layer precursor 16. And make it adhere. The convex portion 18 of the first master 20 and the movable element 12 of the substrate 10 are arranged to face each other. Therefore, when substrate 10 has a plurality of movable elements 12, first master 20 has a plurality of convex portions 18.

The reflective structure layer precursor 16 is provided in a lump at substantially the center of the substrate 10, and the substrate 10 and the first
The reflection structure layer precursor 16 may be spread by the original master 20. By doing so, the reflective structure layer precursor 16 and the substrate 1
Air bubbles between at least one of the 0 and the first master 20 are released to the outside, so that air bubbles are less likely to remain.

Instead of being placed on the substrate 10, the reflection structure layer precursor 16 may be placed on the first master 20 or on both the substrate 10 and the first master 20. Also, substrate 1
The reflection structure layer precursor 16 may be previously applied to one or both of the zero and first masters 20 to a predetermined area. If necessary, when the substrate 10 and the first master 20 are brought into close contact with each other via the reflective structure layer precursor 16, the reflective structure layer is provided via at least one of the substrate 10 and the first master 20. The precursor 16 may be pressurized.
By applying pressure, the time required for the reflective structure layer precursor 16 to spread to a predetermined region can be shortened, so that workability is improved, and filling between the convex portions 18 of the first master 20 is ensured.

The projection 18 of the first master 20 has at least one inclined surface. The inclined surface may be a flat surface or a curved surface, and as described later, the inclined angle is determined according to the light reflection angle. For example, the projection 18 may have a triangular shape in cross section as shown in the figure, and in that case, the projection 18 may be a triangular prism or a triangular pyramid. Further, the vertex portion of the convex portion 18 may not necessarily form a corner but may be a curved surface or a flat surface.

The projection 18 may be formed to be smaller than the size of the movable element 12 formed on the substrate 10 in a plan view from the vertex thereof. In that case, at least a part of the flat surface 22 formed around the convex portion 18 enters a region right above the movable element 12.

By bringing the first master 20 and the substrate 10 into close contact with each other via the reflective structure layer precursor 16, the reflective structure layer precursor 16 corresponds to the surface of the first master 20 having the convex portions 18. The shape is transferred. That is, the reflection structure layer precursor 16
In addition, an inverted shape of the plurality of protrusions 18 and a flat surface 24 corresponding to the flat surface 22 formed around the protrusions 18 are formed.

(Third Step) Subsequently, as shown in FIG. 1C, the reflection structure layer precursor 16 is solidified. For example, when the reflective structure layer precursor 16 contains a photocurable substance,
Light 26 is applied to the reflective structure layer precursor 16. In that case, it is preferable that the first master 20 has optical transparency, and the light 26 can be irradiated through the first master 20. Alternatively, when using a plasticized resin heated above the softening point temperature as the reflective structure layer precursor 16,
It can be solidified by cooling.

Next, as shown in FIG. 1D, the first master 20 is separated from the reflective structure layer 28.

Thus, the reflection structure layer 28 is formed.
One or more concave portions 32 are formed in the reflective structure layer 28. The concave portion 32 corresponds to the shape of the convex portion 18 of the first master 20. The inner surface of the concave portion 32 is inclined at an angle corresponding to the inclined surface of the convex portion 18. When the first master 20 having the plurality of projections 18 is used, the plurality of recesses 32
Is formed. Further, the upper end surface 24 outside the concave portion 32 is
The first master 20 is flat corresponding to the flat surface 22. Specifically, a flat surface 24 corresponding to the flat surface 22 of the first master 20 is formed on the surface of the reflective structure layer precursor 16, and the light reflecting film 30 is formed flat thereon as described later. , The upper end surface 34 becomes flat. The concave portion 32 is formed to be smaller than the region directly above the movable element 12, and a part of the flat upper end surface 24 enters the region directly above the movable element 12.

When the reflection structure layer 28 does not have the required light reflectance, a light reflection film 30 is formed on the reflection structure layer 28 as shown in FIG. Light reflection film 3
0 can be formed of a material having high light reflectance, for example, a metal such as aluminum, platinum, silver, or gold. As a forming method, there are sputtering, vapor deposition, CVD and the like.

(Fourth Step) As shown in FIG. 2B, a light transmitting layer precursor 36 is provided on the reflection structure layer 28. As long as the light-transmitting layer precursor 36 has light-transmitting properties, the above-mentioned substance that can be selected as the reflective structure layer precursor 16 can be used. In addition, the method of providing the light-transmitting layer precursor 36 may be the method of providing the reflective structure layer precursor 16.

Then, as shown in FIG. 2C, a surface including the flat surface 38 of the second master 40 having the flat surface 38 is provided.
The reflection structure layer 28 (the light reflection film 30) is brought into close contact with the light transmission layer precursor 36. The entire surface of the second master 40 that is in close contact with the light-transmitting layer precursor 36 may be a flat surface, or the flat surface 38 may be formed only on a part of the surface. The second master 40 is arranged so that the flat surface 38 and the concave portion 32 of the reflective structure layer 28 or the corresponding concave portion 32 ′ of the light reflection film 30 face each other. When a plurality of recesses 32 are formed, the second master 40
In this case, a plurality of flat surfaces 38 are formed or the entire surface is flattened. As for the other points of the adhesion method, a method for bringing the substrate 10 and the first master 20 into close contact with each other via the reflective structure layer precursor 16 can be applied.

(Fifth Step) As shown in FIG. 2C, the light transmitting layer precursor 36 is solidified. As the method, a method of solidifying the reflective structure layer precursor 16 can be applied. For example, when the light 26 is used, it is preferable that the second master 40 has optical transparency.

Subsequently, the second master 40 is separated from the solidified light transmitting layer precursor 36 to form a light transmitting layer 42 as shown in FIG. 2D. Above the concave portion 32 of the reflective structure layer 28 (the concave portion 32 ′ of the light reflecting film 30), the upper end surface 44 of the light transmitting layer 42 is flat corresponding to the flat surface 38 of the second master 40. . The upper end surface 44 of the light transmitting layer 42 is formed on the flat upper end surface 3 of the reflective film 30.
It extends to the upper part of part 4.

(Sixth Step) As shown in FIG. 3A, a resist layer 46 patterned corresponding to the movable element 12 is formed on the light transmitting layer 42 above the movable element 12. The resist layer 46 is formed so as to cover at least a part of the concave portion 32 or at least a part of the concave portion 32 ′ of the reflective structure layer 28 and to expose the light transmissive layer 42 in other regions. The resist layer 46 is formed in each of the concave portions 3.
It is preferable to cover just above the entire 2 '. To this end, it is preferable to form the resist layer 46 up to above the flat upper end surface 34 formed outside the recess 32 '. By doing so, there is no need to align the resist layer 46 with the boundary between the concave portion 32 'and the upper end surface 34.

As a material for forming the resist layer 46,
For example, a commercially available positive resist in which a diazonaphthoquinone derivative is blended as a photosensitive agent with a cresol novolak resin, which is generally used in the manufacture of semiconductor devices, can be used as it is. Here, the positive resist is a substance that can be selectively removed by a developer when exposed to radiation according to a predetermined pattern. Resist layer 4
As a method for forming 6, a method such as a spin coating method, a dipping method, a spray coating method, a roll coating method, and a bar coating method can be used. Resist layer 4
In the patterning method 6, a mask may be arranged above the applied resist layer 46, and a predetermined region may be exposed to radiation. It is preferable to use light having a wavelength of 200 nm to 500 nm as radiation. The use of light in this wavelength region makes it possible to use the photolithography technology established in the liquid crystal panel manufacturing process and the like and the equipment used therefor, and to reduce costs. Then, after the resist layer 46 is exposed to radiation, development processing is performed under predetermined conditions, whereby the resist layer 46 can be patterned.

Next, as shown in FIG. 3B, the reflection structure layer 28, the light reflection film 30 (only when formed) and a part of the light transmission layer 42 are removed. This removal can be performed by etching using the resist layer 46 as a mask. For example, a dry etching technique such as reactive ion etching (RIE) using a reactive gas can be used.

By this removal, each movable element 12
Reflective structure layer 28 and light reflective film 30 (only if necessary)
And a reflection structure 48 composed of the light transmissive layer 42 is formed. However, the reflection structure 48 formed on each movable element 12 must be removed so as to separate from the substrate 10. Further, at least a part, preferably all of the concave portion 32 of the reflective structure layer 28 is left in the reflective structure 48. Then, as shown in FIG. 3C, the resist layer 46 is removed.

In FIG. 3C, the reflection structure layer 28 and the light transmitting layer 42 remain only on each movable element 12. At least a part, preferably the entirety of the concave portion 32 is formed in the reflective structure layer 28, and a flat portion 34 may remain outside the concave portion 32. Reflective structure layer 28
A light transmitting layer 42 is formed thereon. The upper end surface 44 of the light transmitting layer 42 is flat.

(Seventh Step) As shown in FIG. 4, a light transmitting substrate 50 is provided above the light transmitting layer 42. Since the light transmissive substrate 50 allows light to be totally internally reflected and travels,
It functions as an optical waveguide. When a plurality of movable elements 12 are formed and a plurality of light-transmitting layers 42 are formed, a light-transmitting substrate 50 may be provided for each of the light-transmitting layers 42. One light transmitting substrate 50 may be provided above the light transmitting layer 42.

The light transmissive substrate 50 is supported by at least one, preferably a plurality of spacers 52. The spacer 52 can be provided on the substrate 10, for example, in a region where the movable element 12 is not formed. Light transmitting substrate 5
0 indicates that when the movable element 12 is driven to raise the reflection structure 48, the light-transmitting layer 42
It is provided at a position where it comes into close contact with the device. More specifically, it is preferable that the flat upper end surface 44 of the light-transmitting layer 42 and the light-transmitting substrate 50 be in close contact with each other without any gap. For that purpose, the light transmissive substrate 50 is preferably formed flat. The light-transmitting substrate 50 is provided at a position separated from the light-transmitting layer 42 when the light-transmitting layer 42 is lowered by driving the movable element 12. In order to separate the light-transmitting layer 42 and the light-transmitting substrate 50 once in close contact with each other at a high speed, it is preferable that the two have no tackiness. Thus, the light-transmitting substrate 50 comes into close contact with or separates from the light-transmitting layer 42 by driving the movable element 12.

It is preferable that the light refractive index na of the light transmitting substrate 50 and the light refractive index nb of the light transmitting layer 42 have a relationship of na ≦ nb. By doing so, light incident on the light transmitting layer 42 from inside the light transmitting substrate 50 is
The light travels straight without being refracted, or refracts in a direction approaching the normal to the interface between the light transmitting substrate 50 and the light transmitting layer 42. Therefore, the light transmitting layer 42 or the light transmitting substrate 50
It is easy to reflect light in a direction that does not cause total internal reflection.

The light control element 42 can be manufactured through the above steps. The light control element 54 includes the substrate 10,
A movable element 12 formed on a substrate 10;
It has a reflective structure 48 formed thereon to reflect light, and a light-transmitting substrate 50 provided above the reflective structure 48.

The reflection structure 48 includes the reflection structure layer 28 and the light reflection film 30 formed on the reflection structure layer 28 and reflecting light.
And a light transmitting layer 42 formed on the light reflecting film 30. In addition, when the light reflectance required by the reflection structure layer 28 alone can be ensured, the light reflection film 30 is unnecessary, and in this case, light is reflected by the reflection structure layer 28.

Since the movable element 12 is driven to move up and down, the reflecting structure 48, that is, the reflecting structure layer 28 and the light transmitting layer 42 move up and down. The upper end surface 44 of the light transmitting layer 42 is flat, and the light transmitting layer 4
2 rises, the upper end surface 44 comes into close contact with the light transmitting substrate 50. Alternatively, when the light transmissive layer 42 descends, the upper end surface 44 separates from the light transmissive layer 48. The light transmissive substrate 50 is arranged at a position satisfying this condition. For example, the light-transmitting substrate 50 is provided via a spacer 52 provided on the substrate 10. Reflective structure layer 2
8 has a concave portion 32 and a flat upper end surface 34. The concave portion 32 has, for example, a V-shaped cross section and includes an inclined inner surface.

The light control elements 54 can be simultaneously manufactured for each of the plurality of movable elements 12 to obtain a light control element array including the plurality of light control elements 54.

(Operation of Light Control Element) FIGS. 5A and 5
FIG. 3B is a diagram illustrating the operation of the light control element. FIG.
As shown in (A), light 5 is transmitted inside light-transmitting substrate 50.
6 is proceeding with total reflection. That is, the light 56 is not extracted from inside the light control element 54. At this time, the upper end surface 44 of the light transmitting layer 42 is separated from the light transmitting substrate 50 and is in a non-contact state. The light transmitting substrate 50
And the light refractive index n of the light transmitting substrate 50
a and n <na. A gas such as air exists around the light-transmitting substrate 50 or is in a vacuum. Also,
Inside the light transmissive substrate 50, the incident angle of the light 56 with respect to the interface between the light transmissive substrate 50 and the outside is equal to or larger than the critical angle. For example, when the light transmissive substrate 50 is a glass substrate and air exists around the glass substrate, the critical angle is 42
°.

As shown in FIG. 5B, the movable element 12 is driven to bring the upper end surface 44 of the light transmitting layer 42 into close contact with the light transmitting substrate 50. At this time, the light transmissive substrate 50
The light 56 totally reflected inside the light enters the light transmitting layer 42. The premise is that the light refractive index n of the light transmitting substrate 50 is
a and the light refractive index nb of the light transmissive layer 42 are such that na ≦ nb. The light 56 travels inside the light transmissive layer 42, and on the inclined surface of the concave portion 32 of the reflective structure layer 28,
When 0 is formed, the evanescent light 58 can be extracted by being reflected on the film surface. Here, the inclined surface of the concave portion 32 is determined such that the evanescent light 58 travels at an angle that does not cause total reflection inside the light transmitting layer 42 and the light transmitting substrate 50. The evanescent light 58 may travel in a direction perpendicular to the surface of the light transmitting substrate 50. Thus, the evanescent light 58 can be extracted from the light control element 54.

As described above, according to the light control element 54 according to the present embodiment, the ON / OFF of the evanescent light 58 can be performed by driving the movable element 12. Thereby, it is possible to transmit information, display images, and the like.

(Display Device) FIG. 6 is a diagram showing a display device according to the present embodiment of the present invention. The display device shown in the figure includes a light control element array 60, 62, 64 in which a plurality of light control elements are arranged in a plane, and a light control element array 60, 6
2 and 64, and light sources 66, 68, 70 and lenses 72, 74, 76, respectively. An example in which the above-described light control element 54 is applied as a light control element formed in each of the light control element arrays 60, 62, and 64 will be described. The light control elements 54 can be arranged in a matrix.

The light sources 66, 68, 70
Is supplied to the inside of the light-transmitting substrate 50. Light may be supplied from a single light source to all the light control element arrays 60, 62, 64. By driving the movable element 12, the evanescent light 58 from each light control element 54 is turned ON / O.
The image is displayed by performing FF and enlarging by the lenses 72, 74, and 76. Further, by setting the color of each light of the light sources 66, 68, 70 to red, green, and blue, R, G,
An image can be displayed by the B light. Alternatively, even if the light sources 66, 68, 70 do not extract the red, green, and blue colors, the light sources 66, 68, 70
A color filter may be provided at any one of positions 2, 74 and 76.

(Second Embodiment) FIGS. 7A to 8
(C) is a figure explaining the manufacturing method of the light control element concerning a 2nd embodiment of the present invention. In this embodiment mode, the steps shown in FIGS. 1A to 2B are performed, and thereafter, the steps shown in FIGS.
The steps of (A) to FIG. 8C are performed.

In FIG. 7A, a plane including the flat surface 102 and the spacer forming recess 104 of the second master 100 having the flat surface 102 and the spacer forming recess 104 is shown.
The reflection structure layer 28 (or the light reflection film 30 when the light reflection film 30 is formed) is brought into close contact with the light transmission layer precursor 36. In the second master 100, the flat surface 102 is formed by the concave portion 32 formed on the light reflecting film 30 side of the reflective structure layer 28.
Is formed at a position opposing to
Is formed in a region avoiding a region corresponding to the movable element 12. Further, the spacer forming concave portion 104 is formed in a region having a gap from directly above the movable element 12. The spacer forming recess 104 can be formed by a lithography process.

When a light-transmitting substance is used as the light-transmitting layer precursor 36, the second master 100 preferably has light-transmitting properties. The adhesion method is the same as that of the first embodiment except that the substrate 10 and the first master 20 are bonded to the reflection structure layer precursor 1.
6 can be applied. The method described in the first embodiment can be applied to the method of solidifying the light transmitting layer precursor 36.

Subsequently, as shown in FIG. 7B, the second master 100 is peeled off from the solidified light-transmitting layer precursor 36 to form a light-transmitting layer 108. Above the concave portion 32 'formed on the light reflection film 30 side of the reflection structure layer 28, the upper end surface 110 of the light transmission layer 108 is connected to the second master 1
The flat surface 102 corresponds to the flat surface 102 of FIG. The upper end surface 110 of the light transmitting layer 108 is
8 extends to a position above a part of the flat upper end surface 34. A spacer 112 corresponding to the spacer forming recess 104 of the second master 100 is formed in the light transmitting layer 108. The spacer 112 is formed so as to avoid the region corresponding to the movable element 12, and is provided at a position spaced from the region corresponding to the movable element 12.

Next, as shown in FIG. 8A, the upper part of the movable element 12 in the light transmitting layer 108 and the spacer 11
2, a patterned resist layer 114 is formed. The resist layer 114 covers at least a part of and preferably directly above the entire recess 32 of the reflective structure layer 28 and at least a part and preferably the whole of the spacer 112. Also, the resist layer 114
Is formed so as to expose the light-transmitting layer 108 at least over a part of the region of the substrate 10 excluding the movable element 12 and at least a part in contact with the outer shape of the movable element 12. In order for the resist layer 114 to cover directly over the entire concave portion 32 ', it is preferable to form the resist layer 114 up to above a flat upper end surface 34 formed outside the concave portion 32'. By doing so, there is no need to align the resist layer 114 with the boundary between the concave portion 32 'and the upper end surface 34.

Next, as shown in FIG. 8B, the reflection structure layer 28, the light reflection film 30 (only when necessary) and a part of the light transmission layer 108 are removed. This removal is performed by the resist layer 4
6 can be performed by etching using the mask as a mask. For example, a dry etching technique such as reactive ion etching (RIE) using a reactive gas can be used.

By this removal, each movable element 12
Reflective structure layer 28 and light reflective film 30 (only if necessary)
And a reflection structure 116 composed of the light-transmitting layer 108 is formed. However, the reflective structure 116 formed on each movable element 12 must be removed so as to separate from the substrate 10. Further, the reflection structure 11
In 6, at least a part, preferably the whole, of the concave portion 32 of the reflective structure layer 28 is left.

At the time of this removal, a structure having the same configuration as that of the reflection structure 116 is left on the region other than the movable element on the substrate 10.

Then, the resist layer 114 is removed, and as shown in FIG.
12 so as to be supported. Thus, a light control element is obtained. This light control element differs from the light control element 54 of the first embodiment in a spacer 112. Specifically, the spacer 112 is formed on a structure having the same configuration as the reflective structure 116 remaining in the region other than the movable element. This portion is higher than the upper end surface of the light transmitting layer 108 of the reflective structure 116 by the spacer 112. Therefore, when the light transmissive substrate 50 is arranged via the spacer 112, the light transmissive substrate 50 and the reflective structure 1
16 and a space is formed. This light control element can also achieve the same effects as in the first embodiment.

(Third Embodiment) FIGS. 9A to 9
(E) is a figure explaining the manufacturing method of the 1st master used in the manufacturing method of the light control element concerning the present invention. FIG.
As shown in (A), a substrate 120 for forming an inverted shape of the convex portion of the first master is prepared. The substrate 120 preferably has a flat surface, and metal, glass, plastic, or the like may be used. However, a silicon substrate has excellent workability. When lithography is applied when processing the substrate 120, the resist layer 122 is patterned so that only a region corresponding to the convex portion of the first master is exposed. When the substrate 120 is a silicon substrate, an exposed portion of the substrate 120 can be etched in accordance with the crystal orientation 110 plane.

Thus, as shown in FIG. 9B, a third master 126 having the recess 124 formed thereon is obtained. Third
A flat surface 128 may be formed outside the concave portion 124 of the original master 126. The concave portion 124 has an inverted shape of the convex portion of the first master, and the inner surface thereof is an inclined surface. The cross-sectional shape of the concave portion 124 may be V-shaped. When the etching is performed according to the crystal orientation 110 plane, a concave portion 124 having a V-shaped cross section can be formed at an angle of 54.74 °.

Then, as shown in FIG. 9C, the metal film 13 is formed on the surface of the third master 126 on which the recess 124 is formed.
0 is formed to be conductive (body). As the metal film 130, for example, nickel (Ni) may be formed to a thickness of 500 to 1000 Å (10 ⁻¹⁰ m).
As a method for forming the metal film 130, sputtering, C
It is possible to use methods such as VD, vapor deposition, and electroless plating. Note that if the surface of the third master 126 has the conductivity required for forming a metal layer by the subsequent electroforming method, this conductivity is unnecessary.

Then, Ni is further electrodeposited by electroforming using the metal film 130 as a cathode and the chip-shaped or ball-shaped Ni as an anode, as shown in FIG. 9D.
A thick metal layer 132 is formed. An example of the electroplating solution is shown below.

Nickel sulfamate: 550 g / l Boric acid: 35 g / l Nickel chloride: 5 g / l Leveling agent: 20 mg / l Subsequently, as shown in FIG. 9E, the metal film 130 and the metal layer 132 were The first master disk 134 is obtained by performing processing such as peeling from the third master disk 126 and removing the metal film 130 from the metal layer 132 if necessary.

In this embodiment, when the metal layer 132 is separated from the third master 126, the metal film 130 is separated so as to remain on the metal layer 132 side. 126, leaving the metal film 13
0 may be peeled off by cohesive failure to separate it into both the third master 126 and the metal layer 132.

(Fourth Embodiment) FIGS. 10A to 1
FIG. 0 (C) is a diagram illustrating a method for manufacturing a first master used in the method for manufacturing a light control element according to the present invention. In the present embodiment, as shown in FIG. 10A, the third master 126 used in the third embodiment is prepared,
The master precursor 136 is provided on the surface on which 4 is formed. The master precursor 136 can be selected from materials that can be selected as the reflective structure layer precursor 16 used in the first embodiment, and in particular, a material having light transmittance can be used.

Then, as shown in FIG.
The master 126 and the substrate 138 are brought into close contact with each other via a master precursor. The substrate 138 may have a light transmitting property,
When the master precursor 136 has photocurability, the substrate 1
Light 26 can be emitted via 38.

Thus, when the master precursor 136 is cured and the third master 126 is peeled off, the first master 140
Can be obtained. Substrate 138 and master precursor 136
Has light transmissivity, the first master 140 has light transmissivity. Therefore, when the reflective structure layer precursor 16 shown in FIG. 1C is solidified, the first master 140 passes through the first master 140. Light 26 can be applied.

(Fifth Embodiment) FIGS. 11A to 1
FIG. 1 (C) is a diagram illustrating a method for manufacturing a first master used in the method for manufacturing a light control element according to the present invention. FIG.
As shown in FIG. 1A, a metal film 1 is formed on a third master 150.
52 is formed. On the third master 150, a convex portion 154 having the same shape as the convex portion of the first master is formed.
A flat surface may be formed around 54. Metal film 152
The method for forming the metal film may be the same as the method for forming the metal film 130 illustrated in FIG.

Subsequently, as shown in FIG. 11B, a thick metal layer 156 is formed on the metal film 152. Metal layer 15
6 and the method of forming the metal layer 132 are shown in FIG.
And its forming method. Then, FIG. 11 (C)
As shown in FIG. 3, the metal film 152 and the metal layer 156 are
From the master 150 of the intermediate layer 158, and if necessary, remove the metal film 152 from the metal layer 156.
Is obtained. The intermediate plate 158 has a concave portion 160 corresponding to the convex portion 154 of the third master 150. The intermediate master 158 is used as a third master 126 shown in FIG.
If used instead of this, the first master 140 shown in FIG. 10C can be obtained.

In the present embodiment, when the metal layer 156 is peeled off from the third master 150, the metal film 152 is peeled off so as to remain on the metal layer 156 side. 150 or peel off the metal film 15
2 may be peeled off by cohesion and destruction into both the third master 150 and the metal layer 152.

(Other Embodiments) FIG. 12 is a view for explaining a first master used in the method for manufacturing a light control element according to the present invention. On the first master 170 shown in FIG. 12, a spacer portion 174 is formed on the surface on which the convex portion 172 is formed. The spacer portion 174 is provided on the first master 170.
Is preferably formed at the end. Spacer part 174
Regulates the distance between the first master 170 and the substrate 10 when the first master 170 and the substrate 10 are brought into close contact with each other via the reflective structure layer precursor 16. The first master 170 and the substrate 10 can be kept parallel by the spacer portion 174.

FIG. 13 is a view for explaining a first master used in the method for manufacturing a light control element according to the present invention. FIG.
The first master 180 shown in FIG. 3 has an engaging portion 184 that engages in a direction intersecting the surface on which the convex portion 182 is formed. This engaging portion 184 is preferably formed at the end of the first master 180. The engaging portion 184 has various shapes such as a tapered surface, a protrusion, a notch, a groove, and a hole. By using the engaging portion 184, the step of peeling the first master 180 from the reflective structure layer 28 can be easily performed.

FIG. 14 is a view for explaining a first master used in the method for manufacturing a light control element according to the present invention. FIG.
The first master 190 shown in FIG. 4 has a low-adhesion layer 194 formed on the surface on which the convex portions 192 are formed. The low adhesion layer 194 may be formed on the end of the first master 190. The low adhesion layer 194 is formed of a material having low adhesion to the reflection structure layer precursor 16 (reflection structure layer 28). Therefore, the step of peeling the first master disk 190 from the reflective structure layer precursor 16 by the low adhesion layer 194 can be easily performed.

When the reflective structure layer precursor 16 is hydrophilic, the low adhesion layer 194 is made hydrophobic, and when the reflective structure layer precursor 16 is hydrophobic, the low adhesion layer 194 is made hydrophilic. , The adhesion between the two can be reduced.
Alternatively, the low-adhesion layer 194 may be formed of a material having low adhesion regardless of whether the reflection structure layer precursor 16 (reflection structure layer 28) is hydrophilic or hydrophobic.

It is preferable that low adhesion layer 194 is firmly bonded to the base material constituting first master 190. By doing so, the durability of the low-adhesion layer 194 is improved, so that the low-adhesion layer 194 is unlikely to peel even if the first master 190 and the reflection structure layer 28 are repeatedly peeled many times.

Next, a method for forming the low adhesion layer 194 will be described. The low adhesion layer 194 is formed of a material that repels the reflective structure layer precursor 16. For example, the reflection structure layer precursor 16
Is low, the low adhesion layer 194 is formed of a hydrophobic material such as silicon. If the reflection structure layer precursor 16 is hydrophobic, the low adhesion layer 1 is made of a hydrophilic material such as metal or SiO _2.
Form 94. Alternatively, if the low-adhesion layer 194 is formed by fluorine (a compound having an atom (F)) coating, the reflection structure layer precursor 16 is repelled regardless of whether it is hydrophilic or hydrophobic. For example, when the first master 190 is formed of a silicon-based material,
Fluorine coating can be performed by performing surface treatment with a silane coupling agent having a fluorine atom.

Alternatively, when the reflection structure layer precursor 16 is an acrylic resin, a metal film may be formed.

Alternatively, a metal underlayer is formed on the first master disk 190, and a sulfur compound repelling the reflective structure layer precursor 16 is self-assembled on the metal constituting the underlayer to form the low adhesion layer 194. May be. As a material for forming a metal base layer (hereinafter referred to as a metal layer), gold (Au), silver (A
g), copper (Cu), indium (In) and the like can be used. Since the thickness of the metal layer is an underlayer for self-accumulating and fixing a sulfur compound thereon, it is generally 100
A thickness of about 2000 Å (10 ⁻¹⁰ m) is sufficient. As a method for forming the metal layer, sputtering, vapor deposition, CVD, electroless plating, or the like can be used. In order to enhance the adhesion between the first master 190 and the metal layer, an intermediate layer made of, for example, titanium (Ti), chromium (Cr), or the like may be provided.

Further, as the sulfur compound, a thiol compound is preferable. Here, the thiol compound is a general term for an organic compound having a mercapto group (-SH) (R-SH; R is a hydrocarbon group such as an alkyl group). Among such thiol compounds, for example, a compound having a fluorine atom (F) represented by C _n F _{2n + 1} C _m H _2m SH (n and m are natural numbers) is referred to as a reflective structure layer precursor 16. It is preferable because it repels. Such a thiol compound is dissolved in an organic solvent such as dichloromethane or trichloromethane to form a solution of about 0.1 to 10 mM. Then, when the first master 190 on which the metal layer is formed is immersed in this solution, the thiol compound spontaneously assembles in the metal layer, and the atoms constituting the metal layer and the sulfur atoms (S) constituting the thiol compound are removed. Are covalently bonded, and a dense monomolecular layer of the thiol compound is firmly formed on the metal layer. Examples of the sulfur compound include an organic compound having a disulfide bond (SS bond) other than the thiol compound (R ₁ -S—S—R ₂ ; R ₁ and R ₂ are hydrocarbon groups such as an alkyl group) and the like. Also available.

According to this, a dense and firmly integrated
The low adhesion layer 194 that repels the reflective structure layer precursor 16 can be easily formed on the first master 190.

FIG. 15 is a view for explaining another example of the second master used in the method for manufacturing a light control element according to the present invention. A second master 200 shown in FIG.
The spacer portion 204 is formed on the surface on which is formed.
The spacer section 204 is preferably formed at an end of the second master 200. The spacer section 204 is the second master 2
00 and the reflective structure layer 28 (light reflecting film 30) are brought into close contact with each other via the light transmitting layer precursor 36,
The distance between 0 and the reflection structure layer 28 (light reflection film 30) is regulated. The second master 200 and the surface of the reflection structure layer 28 (light reflection film 30) can be kept parallel by the spacer portion 204.

FIG. 16 is a view for explaining still another example of the second master used in the method for manufacturing a light control element according to the present invention. The second master 210 shown in FIG.
Engaging part 2 engaged in a direction intersecting the surface on which 12 is formed
14 are formed. This engaging portion 214 is preferably formed at the end of the second master 210. Engaging portion 214
There are various shapes such as a tapered surface, a projection, a notch, a groove, and a hole. By using the engaging portion 214, the step of peeling the second master 210 from the light transmitting layer 42 can be easily performed.

FIG. 17 is a view for explaining a second master used in the method for manufacturing a light control element according to the present invention. FIG.
In the second master 220 shown in FIG. 7, a low adhesion layer 224 is formed on the surface where the flat portion 222 is formed. The low adhesion layer 224 may be formed on the end of the second master 220.
The low adhesion layer 224 is made of a material having low adhesion to the light transmitting layer precursor 36 (light transmitting layer 42). Therefore, the step of peeling the second master 220 from the light transmitting layer 42 by the low adhesion layer 224 can be easily performed.

It is preferable that the low adhesion layer 224 is firmly bonded to the base material constituting the second master 220. By doing so, the durability of the low-adhesion layer 224 is improved, so that the low-adhesion layer 224 is unlikely to be peeled even if the second master 220 and the light-transmitting layer 42 are repeatedly peeled many times. .

The low adhesion layer 224 is made of the light transmitting layer precursor 3
6 is formed of a material repelling. For example, a light-transmitting layer precursor
If the body 36 is hydrophilic, a hydrophobic material such as silicon
An adhesive layer 224 is formed. When the light transmitting layer precursor 36 is
If it is aqueous, metal or SiO _TwoLow adhesion with hydrophilic materials such as
The conductive layer 224 is formed. Alternatively, the light transmitting layer precursor 3
6 is a material having low adhesion regardless of whether it is hydrophilic or hydrophobic
The low-adhesion layer 224 may be formed with a material. Other details
For details, the low adhesion of the first master disk 190 shown in FIG.
The active layer 194 and a formation method thereof can be applied.

[Brief description of the drawings]

FIGS. 1A to 1D are diagrams showing steps of manufacturing a light control element according to a first embodiment of the present invention.

FIGS. 2A to 2D are diagrams showing steps of manufacturing the light control element according to the first embodiment of the present invention.

FIGS. 3A to 3C are diagrams illustrating a process of manufacturing the light control element according to the first embodiment of the present invention.

FIG. 4 is a diagram showing a step of manufacturing the light control element according to the first embodiment of the present invention.

FIGS. 5A and 5B are diagrams illustrating the operation of the light control element according to the first embodiment.

FIG. 6 is a diagram illustrating a display device according to the first embodiment.

FIGS. 7A and 7B are diagrams showing a process for manufacturing a light control element according to a second embodiment of the present invention.

8 (A) to 8 (C) are views showing steps for manufacturing a light control element according to a second embodiment of the present invention.

FIGS. 9A to 9E are diagrams showing a method of manufacturing a first master according to a third embodiment of the present invention.

FIGS. 10A to 10C are diagrams showing a method of manufacturing a first master according to a fourth embodiment of the present invention.

FIGS. 11A to 11C are diagrams showing a method of manufacturing a first master according to a fifth embodiment of the present invention.

FIG. 12 is a diagram showing a first master according to another embodiment of the present invention.

FIG. 13 is a view showing a first master according to another embodiment of the present invention.

FIG. 14 is a diagram showing a first master according to another embodiment of the present invention.

FIG. 15 is a diagram showing a second master according to another embodiment of the present invention.

FIG. 16 is a diagram showing a second master according to another embodiment of the present invention.

FIG. 17 is a diagram showing a second master according to another embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Substrate 12 Moving element 16 Reflection structure layer precursor 18 Convex part 20 1st original master 22 Flat surface 24 Flat surface 28 Reflection structure layer 30 Light reflection film 32 Depression 34 Upper end surface 36 Light transmitting layer precursor 38 Flat surface 40 2 master 42 light transmissive layer 44 upper end surface 48 reflective structure 50 light transmissive substrate 52 spacer 54 light control element

Continued on the front page (72) Inventor Shunji Uejima 3-5-5 Yamato, Suwa-shi, Nagano Seiko Epson Corporation F-term (reference) 2H041 AA04 AB12 AB40 AC08 AZ08 5C094 AA05 AA13 AA43 BA66 BA84 EB02 EB04 ED04 GB01 JA13

Claims (26)

[Claims] A first step of providing a movable element which is driven to move up and down on a substrate; a surface of the first master on which the convex portions are formed, on which the convex portions are formed; A second step of bringing the surface on which the movable element is provided into close contact with a reflective structure layer precursor, and solidifying the reflective structure layer precursor to peel off the first master to correspond to the convex portion A third step of forming a reflective structure layer having a concave portion and reflecting light, and a step including the flat surface of the second master having a flat surface formed thereon and the reflective structure layer, A fourth step of bringing the light-transmitting layer precursor into close contact with the recess while facing the recess, and solidifying the light-transmitting layer precursor to peel off the second master; Forming a light-transmitting layer having a flat upper end surface corresponding to the flat surface above the concave portion;
A sixth step of removing a part of the reflective structure layer and the light transmissive layer to make a part of the reflective structure layer on the movable element independent, and being parallel to the upper end surface of the light transmissive layer. A seventh step of providing a light-transmitting substrate at a position in close contact with the upper end surface of the light-transmitting layer when the light-transmitting layer is raised by driving the movable element. A method for manufacturing a light control element. 2. The method of manufacturing a light control element according to claim 1, wherein the projection of the first master has a triangular cross section. 3. The method of manufacturing a light control element according to claim 1, wherein the movable element includes a piezoelectric element, and an electrode for applying a voltage to the piezoelectric element before the first step. Forming a light control element on the substrate. 4. The method of manufacturing a light control element according to claim 1, wherein the reflective structure layer precursor includes a material curable by light, and the first master includes a light transmitting member. A method of manufacturing a light control element having a property and irradiating the reflective structure layer precursor with light through the first master in the third step. 5. The method for manufacturing a light control element according to claim 1, wherein the first master is peeled off in the third step, and then the solidified reflection structure layer precursor is formed. A method for manufacturing a light control element, wherein a light reflection film is formed on a body to form the reflection structure layer. 6. The method for manufacturing a light control element according to claim 1, wherein the light transmitting layer precursor includes a material curable by light, and the second master includes light. A method of manufacturing a light control element having transparency and irradiating light to the light transmitting layer precursor through the second master in the fifth step. 7. The method of manufacturing a light control device according to claim 1, wherein the inverted shape of the third master on which the inverted shape of the convex portion of the first master is formed. A step of bringing the formed surface and the fourth master into close contact with each other via a master precursor, solidifying the master precursor, peeling the third master, and manufacturing the first master. A method for manufacturing a light control element. 8. The method for manufacturing a light control device according to claim 1, wherein the inverted shape of the third master on which the inverted shape of the convex portion of the first master is formed. A method for manufacturing a light control element, comprising: forming a metal layer on the formed surface by an electroforming method; and peeling the metal layer from the third master to manufacture the first master. 9. The method of manufacturing a light control element according to claim 1, wherein the shape of the convex portion of the third master is formed with the shape of the convex portion of the first master. A metal layer is formed on the surface on which is formed by an electroforming method, and the metal layer is peeled from the third master to form an intermediate master having an inverted shape of the convex portion.
The surface of the intermediate master, on which the inverted shape is formed, and the fourth master are brought into close contact with each other via a master precursor, the master precursor is solidified, and the intermediate master is peeled off to form the first master. A method for manufacturing a light control element, comprising the step of manufacturing a light control element. 10. The method for manufacturing a light control element according to claim 1, wherein at least one of the first and second masters is a spacer that regulates a distance from the substrate. The manufacturing method of the light control element which has a part. 11. The method of manufacturing a light control element according to claim 1, wherein at least one end of the first and second masters has a direction of the substrate. A method for manufacturing a light control element, wherein an engaging portion that engages in a direction intersecting with a facing surface is formed. 12. The method for manufacturing a light control element according to claim 1, wherein at least a part of a surface of the first master on which the convex portions are formed, A method for manufacturing a light control element in which a low adhesion layer having low adhesion to a reflective structure layer precursor is formed. 13. The method of manufacturing a light control element according to claim 12, wherein the low adhesion layer is formed at an end of a surface of the first master where the convex portion is formed. Manufacturing method. 14. The method for manufacturing a light control element according to claim 1, wherein at least a part of a surface of the second master including the flat surface includes the light transmission element. A method for producing a light control element in which a low-adhesion layer having low adhesion to a functional layer precursor is formed. 15. The method for manufacturing a light control element according to claim 14, wherein the low adhesion layer is formed at an end of a surface including the flat surface of the second master. Method. 16. The method for manufacturing a light control element according to claim 1, wherein the surface of the first master on which the convex portions are formed is a flat surface and the convex portions. The convex portion is formed to be smaller than the area of the movable element. In the second step and the third step, the flat surface of the first master is located outside the concave portion on the surface of the reflective structure layer. Forming a flat upper end surface. In the sixth step, a part of the reflective structure layer and a light transmissive layer, leaving a part of the flat upper end surface outside the concave portion of the reflective structure layer. Of manufacturing a light control element for removing a part of the light control element. 17. The method for manufacturing a light control element according to claim 1, wherein the second master includes a surface including the flat surface and directly above the movable element. A spacer forming recess is formed in a portion where a gap is opened from directly above the movable element. In the fourth step and the fifth step, a spacer is formed in the light transmitting layer by the spacer forming recess. Forming a convex portion for use, in the sixth step, between the convex portion for forming a spacer and directly above the movable element, removing a part of the reflective structure layer and a part of the light transmissive layer; A method for manufacturing a light control element, wherein a part of the light transmitting layer including the spacer forming protrusions and a part of the reflective structure layer constitute a spacer supporting the light transmitting substrate. 18. The method for manufacturing a light control element according to claim 1, wherein a light refractive index na of the light transmitting substrate and a light refractive index nb of the light transmitting layer are: A method for manufacturing a light control element having a relationship of na ≦ nb. 19. A light control element manufactured by the method according to claim 1. Description: 20. A substrate, a movable element formed on the substrate, a reflective structure layer formed on the movable element to reflect light, and an upper end surface formed on the reflective structure layer and having a flat upper end surface. A light-transmitting layer, and a light-transmitting substrate provided above the light-transmitting layer, wherein the movable element is driven to move up and down, and the reflective structure layer has a flat upper end surface. The light transmitting substrate is parallel to the upper end surface of the light transmitting layer, and the light transmitting layer is raised when the light transmitting layer is raised by driving the movable element. A light control element provided at a position in close contact with the upper end surface of the layer. 21. A substrate, a movable element formed on the substrate, a reflective structure layer formed on the movable element and having a concave portion formed on the surface to reflect light, and formed on the reflective structure layer A light transmissive layer having a flat upper end surface, a light transmissive substrate provided above the light transmissive layer, and formed on the substrate outside the movable element to support the light transmissive substrate And a spacer, wherein the movable element is driven to move up and down, and the light transmissive substrate is parallel to the upper end surface of the light transmissive layer, and the light is transmitted by driving the movable element. A first layer formed of the same material as the reflective structure layer, the first layer being provided at a position in close contact with the upper end surface of the light transmissive layer when the transmissive layer is raised; And a second layer made of the same material as the conductive layer. That light control element. 22. A display device comprising: the light control element according to claim 19; and a light source. 23. A substrate, a plurality of movable elements formed on the substrate and driven to move up and down, a reflective structure layer formed on each movable element and reflecting light, and the reflective structure A light-transmitting layer formed on the layer and having a flat upper end surface; a light-transmitting substrate provided above the light-transmitting layer; and emitting light traveling while being totally reflected inside the light-transmitting substrate. The light-reflecting layer has a flat upper surface and a concave surface, and the light-transmitting substrate is parallel to the upper surface of the light-transmitting layer. The light-transmitting layer is provided at a position that comes into close contact with the upper end surface of the light-transmitting layer when the light-transmitting layer is raised by driving the movable element, and the light-transmitting layer comes into close contact with the light-transmitting substrate. Sometimes, the light enters the light transmitting layer from the light transmitting substrate. A display device that emits light, reflects from a concave portion of the reflective structure layer, and emits light out of the light transmitting layer and the light transmitting substrate. 24. A substrate, a plurality of movable elements formed on the substrate and driven to move up and down, and a reflection formed on each of the movable elements and having a concave portion formed on a surface to reflect light. A light-transmitting layer formed on the reflective structure layer and having a flat upper end surface; a light-transmitting substrate provided above the light-transmitting layer; and a light-transmitting substrate on the substrate outside the movable element. A spacer formed and supporting the light-transmitting substrate and formed of a first layer made of the same material as the reflective structure layer, and a second layer made of the same material as the light-transmitting layer And a light source that emits light that travels while being totally reflected inside the light transmissive substrate, wherein the light transmissive substrate is parallel to the upper end surface of the light transmissive layer, When the light transmitting layer is raised by driving the movable element, the light transmitting The light is incident on the light-transmitting layer from the light-transmitting substrate when the light-transmitting layer is in close contact with the light-transmitting substrate. A display device that reflects light from a concave portion of the reflective structure layer and emits light out of the light transmitting layer and the light transmitting substrate. 25. The display device according to claim 23, wherein a light refractive index na of the light-transmitting substrate and a light refractive index nb of the light-transmitting layer have a relationship of na ≦ nb. apparatus. 26. The display device according to claim 23, wherein the inner surface of the concave portion of the reflection structure layer directs the light perpendicular to an interface between the light transmitting layer and the light transmitting substrate. Display device that tilts at an angle that reflects light in various directions.