JP2000339894A - Suspension correction method and its correction device - Google Patents

Abstract

(57) Abstract: The present invention relates to a suspension correction method and a correction apparatus for correcting a roll angle and a pitch angle of a magnetic head with respect to a medium by bending a suspension arm that supports a magnetic head, and a correction apparatus for the suspension. One or both of the beam portions on both sides are scanned with a small laser spot on one or more lines, and as a result of bending, the suspension arm is twisted to correct the roll angle and the pitch angle. An object of the present invention is to reliably correct a pitch angle by a simple operation. One or both beam parts holding a magnetic head of a suspension arm or its vicinity are scanned and bent on a line with a laser beam. Of the magnetic head that holds the suspension arm by twisting it. A suspension correction method and a correction device for correcting a roll angle and a pitch angle.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider for reading and writing data from a hard disk drive (hereinafter referred to as an HDD). The present invention relates to a correction method and a correction device for correcting a pitch angle of a head mounting surface to an appropriate angle range.

[0002]

2. Description of the Related Art Conventionally, since a magnetic head of an HDD flies slightly above a recording medium, it has been difficult to manufacture a suspension arm that satisfies the required positional accuracy of a magnetic head mounting surface. The roll angle of the magnetic head mounting surface of the suspension arm affects the attitude of the magnetic head during flying, which is important for writing and reading data on the magnetic disk. Currently, suspension arms with poor roll and pitch angles are mechanically displaced to correct the roll and pitch angles. This is a method that mechanically bends or twists the magnetic head mounting surface or the magnetic head by directly pressing it, and touching and moving it, destroying the suspension arm and the magnetic head, and changing the mechanical characteristics In addition, there is a problem that the shape tends to return to the shape before the correction due to a change with time or an environmental change after the correction.

[0003]

In the present invention, the roll angle and the pitch angle are corrected by deforming the suspension arm to correct the roll and pitch angle of the magnetic head mounting surface. It is realized by using the metal bending process. When laser is irradiated to the metal and heated and cooled, contraction occurs on the laser irradiated side,
It is known that bending occurs in the direction (side) irradiated with laser. As a method of correcting the roll angle and the pitch angle using this bending deformation, there is a technique of adjusting the roll angle and the pitch angle by irradiating a laser beam to one point and heating and cooling a local area to generate a bend.

However, as HDDs have become smaller, each component has become smaller, and suspension arms have become thinner than before. In a conventional bending process using a laser beam spot irradiation, a hole is formed in an irradiation part, and heat of the laser irradiation part easily reaches a back surface of the irradiation part, and it is difficult to perform a desired bending deformation. Further, in the case of a continuous wave, there is no peak in the laser, and it is difficult to generate bending.

[0005] The present invention solves these problems,
One or more of the beam portions on both sides of the suspension arm and / or its vicinity are scanned with a small laser spot on the line, and one or more of them are scanned and bent. As a result of bending, the suspension arm is twisted to correct the roll angle and pitch angle. It is an object of the present invention to reliably and accurately correct a roll angle and a pitch angle by a simple operation.

[0006]

Means for solving the problem will be described with reference to FIG. In FIG. 1, a suspension arm 1 is provided with a beam section 9 on both sides as shown in the figure, and mounts and holds a magnetic head on a gimbal section 5.

The beam portion 9 holds the gimbal portion 5. Here, one or both of the beams are scanned by a laser spot, and the roll angle and the pitch angle of the magnetic head mounted on the bent gimbal portion 5 with respect to the medium ( (See FIG. 1A).

Next, the operation will be described. One or both beam portions 9 holding the magnetic head of the suspension arm 1 or the vicinity thereof are scanned with a laser beam on a line and bent, and the suspension arm 1 is twisted and held so that the roll angle and the pitch angle of the magnetic head are held. I am trying to fix it.

At this time, the amount of correction is adjusted by changing the scanning speed of the laser beam on the line. Further, the correction amount is adjusted by changing the number of times of the same position or adjacent position where the laser beam is scanned on the line.

Further, the correction amount of the roll angle is adjusted by changing the scanning position on the line with the laser beam (see FIG. 4). Further, the correction amount of the pitch angle is adjusted by changing the inclination of scanning on the line with the laser beam (see FIG. 5).

Also, when scanning on a line with a laser beam, focus control is performed so that the laser spot shape becomes the same (see FIG. 6). Therefore, the beam portion 9 on both sides of the suspension arm 1 and / or one or both of the beam portions 9 near the beam portion are scanned with a fine laser spot on one or more lines, and the suspension arm 1 is twisted as a result of bending and the roll angle and the pitch angle are corrected. Accordingly, the roll angle and the pitch angle can be reliably corrected by a simple operation without contact and non-mechanically and by bending.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, in order to correct a roll angle and a pitch angle of a suspension arm, a laser having a short pulse width and a peak having a few thousand pulses (second peak value) is used by using an optical device such as a Q switch. 10 times as high, pulse with a short interval of less than ms)
This is realized for the first time by scanning the asymmetric position of the beam section 9 on a line. In particular, the suspension arm 1 which was impossible with the prior art having a plate thickness of 30 μm or less.
A point having a high peak value effectively acted on the beam portion 9 of the above, and the roll angle and the pitch angle could be corrected well. The laser head, the laser beam, or the suspension arm 1 moves or uses a mirror to move the laser beam, so that the laser beam scans and irradiates the beam portion 9 on a line. Thus, the suspension arm 1 can be bent by twisting the suspension arm 1 instead of the conventional simple bending, and the deformation can be reliably applied to correct the roll angle and the pitch angle.

In order to correct the roll angle and the pitch angle, the type of laser, the configuration of the correction device, the irradiation method and the irradiation conditions (output, spot diameter, number of repetitions, irradiation position,
Speed, scanning position or angle). In the present invention, Q
A metal part of the suspension arm 1 is linearly scanned by a YAG laser by an optical device such as a switch unit, and the roll angle and the pitch angle are corrected by bending deformation of the generated metal part. The required displacement is controlled not only by setting the laser intensity and the like, but also by controlling and correcting the laser according to the shape of the suspension arm 1. The method and apparatus for correcting the roll and the pitch angle provided by the present invention will be described in detail sequentially with examples below.

FIG. 1 shows a configuration diagram of a suspension arm according to the present invention. FIG. 1A shows a configuration of a standard suspension arm 1. Suspension arm 1
It is composed of an actuator arm mounting section 2, an arm rigid section 4, an arm spring section 3, a gimbal section 5, a magnetic head mounting section 7, a magnetic head 6, and other electric signal cables. In the drawing, the rotation direction in the coordinates of the tip indicates the rotation direction of the roll (roll angle) and the pitch (pitch angle), respectively.

FIG. 1B shows the gimbal portion 5 shown in FIG. The gimbal part 5 includes a gimbal spring part 8,
It comprises a suspension arm mounting part 10, a magnetic head mounting part 7, and a beam part 9.

FIG. 1C shows the gimbal portion 5 shown in FIG. 1A similarly to FIG. 1B, and shows a dotted line S1-S2 which is a position to be laser-processed. The bending at the dotted line S1-S2 displaces the tip P1 of the arm and the tip P2 of the magnetic head mounting surface. An enlarged view of the gimbal tip portion 11 before correction is shown in FIG. 2A, and enlarged views of the AA cross section are shown in FIGS. 2B-1 and 2B-2.

FIG. 2 is an explanatory view of the present invention (roll angle correction,
The 1) is shown. The laser beam is linearly scanned along the dotted line S1-S2 in FIG. 2A to cause bending deformation, and one of the tips P1 is displaced toward the metal surface indicated by the arrow shown in FIG. 2B-1. The front end P2 of the magnetic head mounting surface is shown in FIG.
Twist is applied so as to be displaced toward the medium surface indicated by the arrow shown in 1), and the roll angle α shown in (b-1) of FIG. 2 is corrected as shown in (b-2) of FIG.

FIG. 3 is an explanatory view of the present invention (roll angle correction,
The 2) is shown. This FIG. 3 is obtained by comparing FIG.
1) and (b-2) when the direction of correcting the roll angle is desired to be reversed, and the magnetic head mounting section 7 is symmetrically processed (corrected) in one of the directions to correct the roll angle. Is controlled.

Generally, the correction of the roll angle and the like is controlled by laser oscillation conditions such as laser output, repetition frequency, pulse number, and spot diameter. The setting conditions of the present invention include the suspension arm 1, the angle to be corrected, the correction, and the like. The correction amount of the roll angle is arbitrarily controlled by changing the laser scanning speed, the laser scanning direction (angle), and the number of laser scanning repetitions other than the laser oscillation conditions with respect to the angle amount to be performed.

FIG. 4 is an explanatory view of the present invention (roll angle correction,
The 3) is shown. Here, FIG. 4A illustrates processing in which the scanning angle is changed stepwise from the scanning line a to the scanning line b. As a result, a difference occurs in the amount of bending deformation of the suspension arm 1, and as shown in FIG. 4B, the scanning lines a and b can control the roll angle correction amounts to A0 and B0. Also, the scanning speed of the scanning lines a and b is V0, V1, V2.
(Here, by changing V1 <V0 <V2), the laser irradiation energy amount on the scanning line can be controlled, and the correction angle amount can be controlled like A1, B1, A2, and B2 shown in FIG. 4B. .

FIG. 5 is a diagram for explaining the present invention (pitch angle correction).
Is shown. This shows an example of pitch angle correction with respect to the roll angle correction of FIG. 4, and a1 to b1 of the R1 portion of FIG.
Does not change the pitch angle (only the roll angle changes), but changes the processing position of the beam section 9 to the R of the magnetic head mounting section 7.
The pitch angle correction angle can be reduced from A1 to A2 in FIG. 5B by separating R1 from R1.

Further, when laser processing is repeatedly performed, the amount of change in the roll angle and the pitch angle can be controlled by overlapping or shifting the previous processing position and the laser irradiation position.

In the above-mentioned correction method, the amount of correction of the roll angle and the pitch angle differs depending on the shape of the target suspension arm 1 and the magnetic head mounting surface and the type of material, even if the processing is the same. In order to accurately control the correction amount, the condition setting is determined by an experiment.

FIG. 6 shows an overall configuration diagram of the present invention. FIG.
Then, the suspension arm 1 to be processed is assembled in a lot of several to several tens of lots, and can be corrected by measuring the quality of the roll angle and the pitch angle and measuring the amount of correction by the present apparatus. A laser irradiation device 13 used for correction, a measuring unit 14 for constantly measuring the distance between the roll angle and the pitch angle of the arranged suspension arm 1 and the processing position, a moving unit 12 for positioning the suspension arm 1, and a stage unit 15 A controller 15 for determining the measured roll angle and pitch angle, calculating the correction angle, and setting a laser irradiation condition setting table necessary for the correction angle in advance.
If necessary, a transport section for another process is arranged before and after.

As shown in FIG. 6, when processing the suspension arm 1 at a time in a certain number or individually, the distance between the processing focus lens and the processing position is measured at the time of measurement in order to stabilize the laser processing. A laser or an optical system is arranged in the optical axis direction so that the stage section 15 can irradiate an appropriate laser spot during processing.

Further, using the apparatus shown in FIG. 6, the laser setting conditions for the suspension arm 1 are constant, and the processing conditions are set at a beam spot diameter of 150 μm, a laser scanning speed of 10 mm / sec, and the number of times of processing is one. (A),
The roll angle is -0.50 to 0.50 degrees and the pitch angle is one processing in which the scanning angle is changed from a to b shown in FIG. 4A to the processing position shown in FIG. To -0.50 to 0
The control could be modified within a range of degrees.

As a result of the experiment of this embodiment, thermal energy (for example, a pulse-like laser shape having a high peak value of the Q-switched laser and a pulse interval of ms or less) is applied to the suspension arm.
The correction can be realized if is given, but the Q-switch pulse-controlled YAG laser is good, and other YAG lasers need to approach the laser pulse shape (currently difficult).

In this embodiment, the suspension arm 1 is used.
It is possible to correct the roll angle and the pitch angle of the suspension arm 1 with or without a magnetic head mounted thereon. For example, even if the roll angle and the pitch angle of the suspension arm 1 itself are accurate, the magnetic head to be mounted is inclined and adhered. In this case, the roll angle and the pitch angle of the tilted magnetic head can be corrected to within an allowable value.

[0029]

As described above, according to the present invention,
One or more of the beam portions 9 on both sides of the suspension arm 1 and / or its vicinity are scanned with a minute laser spot on the line, and the suspension arm 1 is twisted as a result of bending and the roll angle and the pitch angle are corrected. Therefore, the roll angle and the pitch angle can be reliably corrected by a simple operation without contact and non-mechanically and by bending.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a suspension arm of the present invention.

FIG. 2 is an explanatory view (roll angle correction, part 1) of the present invention.

FIG. 3 is an explanatory view (roll angle correction, part 2) of the present invention.

FIG. 4 is an explanatory view (roll angle correction, No. 3) of the present invention.

FIG. 5 is an explanatory diagram (pitch angle correction) of the present invention.

FIG. 6 is an overall configuration diagram of the present invention.

[Explanation of symbols]

 1: Suspension arm 2: Attachment arm mounting section 3: Arm spring section 4: Arm rigid section 5: Gimbal section 6: Magnetic head 7: Magnetic head mounting section 8: Gimbal spring section 9: Beam section 10: Suspension arm mounting section 11: Gimbal tip 12: Moving unit 13: Laser irradiation device 14: Measuring unit 15: Stage unit 16: Control unit p1: Displacement point of arm tip by laser processing p2: Displacement point of arm tip by laser processing p3: Laser processing Displacement point of magnetic head mounting surface by laser p4: Displacement point of magnetic head mounting surface by laser processing S1-S2: Laser spot scanning line S3-S4: Laser spot scanning line a: Laser processing position b: Laser processing position A: Roll angle change amount B: Roll angle change amount α: Roll angle of magnetic head slider

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Masayuki Imamon 4-1-1, Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa F-term in Fujitsu Limited (Reference) 5D059 AA01 BA01 CA14 CA16 CA26 DA15 DA17 DA40

Claims (14)

[Claims] 1. A suspension correction method for correcting a roll angle and a pitch angle of a magnetic head with respect to a medium by bending a suspension arm that supports the magnetic head, wherein one or both beam portions holding the magnetic head of the suspension arm or A suspension correction method comprising: scanning the vicinity of the suspension arm with a laser beam, bending the laser beam, and twisting and holding the suspension arm to correct the roll angle and the pitch angle of the magnetic head. 2. The correction amount is adjusted by changing a speed at which the laser beam scans a line.
The suspension correction method described. 3. The suspension correction method according to claim 1, wherein the correction amount is adjusted by changing the number of times of the same position or adjacent position where the laser beam is scanned on the line. 4. The suspension correction method according to claim 1, wherein the correction amount of the roll angle is adjusted by changing a position on the line scanned by the laser beam. 5. The suspension correction method according to claim 1, wherein the correction amount of the pitch angle is adjusted by changing an inclination of scanning on a line with the laser beam. 6. The suspension correction method according to claim 1, wherein focus control is performed so that a laser spot shape becomes the same when scanning on a line with the laser beam. 7. The suspension repair method according to claim 1, wherein the laser beam is scanned on a line to reduce the thickness of the bent portion to 30 μm or less. 8. A sample correction device for correcting a roll angle and a pitch angle of a magnetic head with respect to a medium by bending a suspension arm supporting a magnetic head, a laser irradiation device for irradiating a laser beam, and a magnetic head of the suspension arm. A laser beam generated from the laser beam irradiating device to scan and bend one or both beam portions of the beam portion to bend the beam portion to twist the suspension arm. 9. The suspension correcting apparatus according to claim 8, further comprising an apparatus for adjusting the correction amount by changing a scanning speed of the laser beam on a line. 10. The suspension correction according to claim 8, further comprising an apparatus for adjusting the correction amount by changing the number of times the same position or an adjacent position is scanned on the line by the laser beam. apparatus. 11. The suspension correction according to claim 8, further comprising an apparatus for adjusting a correction amount of the roll angle by changing a position on the line scanned by the laser beam. apparatus. 12. The suspension correction according to claim 8, further comprising an apparatus for adjusting the amount of correction of the pitch angle by changing the inclination of scanning on a line with the laser beam. apparatus. 13. The suspension according to claim 8, further comprising an apparatus for performing focus control so that a laser spot shape becomes the same when scanning on a line with the laser beam. Correction device. 14. The suspension repair apparatus according to claim 8, wherein the laser beam is scanned on a line to reduce the thickness of the bent portion to 30 μm or less.