JP2001080740A - Vacuum transport or laying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent dust produced in a pipe from expanding to the outside of the pipe when a movable body is moved by preventing air from leaking to the outside of the pipe through a cut line near the movable body. SOLUTION: This device is formed so that a cutout line 14 is formed in a pipe 11 longitudinally along the overall length of the pipe, and a movable body 16 inserted into the pipe 11 sucks the air inside the pipe by a vacuum pump from either of both ends of the pipe so as to be movable inside the pipe. A connection member 17 having a base end connected to the movable body inside the pipe passes through the cut line, and a transported object 23 is connected to the tip of the connection member positioned outside the pipe. A seal wire material 18 capable of closing the cut line from the outside of the pipe is disposed through the overall length of the pipe, and a guide member 24 allowing the seal wire material to be extracted from the cut line to the outside of the pipe and the extracted seal wire material to be inserted into the cut line when the movable body is moved is provided on the connection member.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laying or carrying device utilizing negative pressure generated by sucking air. More specifically, in a clean room where the diffusion of dust is disliked, or in a place where an electric motor cannot be used to handle flammable substances such as organic solvents, etc. The present invention relates to a device laid by negative pressure.

[0002]

2. Description of the Related Art The applicant of the present invention discloses that a cut is formed in a longitudinal direction over the entire length of a pipe, and a movable body that can move in the pipe is inserted into the pipe by compressed air sent into the pipe, and the pipe moves in the pipe. An international application has been filed for a laying or carrying device in which the base end of a wire is connected to the body, and the wire is connected to an object to be laid at a tip located outside the pipe through a cut (International Publication No. WO 95/21482). In this device, a sealing wire capable of closing a cut is disposed in the entire length of the pipe in a pipe, and a moving body is provided with a guide groove for guiding the sealing wire so as to close the cut when the moving body moves.

[0003] In the device configured as described above, when a moving body is inserted into a pipe, a wire is taken out of the pipe through a cut, an object to be laid is connected to a tip of the wire, and then compressed air is introduced into the pipe. , The moving body is propelled. At this time, the wire whose base end is connected to the moving body shifts the sealing wire from the cut and advances the cut, and after the wire passes, the guide groove guides the sealing wire to the cut. The object to be laid outside the pipe connected to the tip of the wire is pulled by the moving body and laid at a predetermined place. As a result, it can be laid or transported by a small number of people, and the laying or transporting time can be greatly reduced.

[0004]

However, in the laying or conveying apparatus using the compressed air, since the compressed air is introduced into the pipe, the compressed air may leak out of the pipe from a cut near the moving body. . Further, in the laying or conveying apparatus using the compressed air, since the sealing wire is inserted into the cut from the inside of the pipe, there is a problem that the replacement of the sealing wire is relatively troublesome. Furthermore, in the laying or conveying apparatus using the compressed air, there is a possibility that dust or the like generated when the moving body moves inside the pipe may diffuse outside the pipe.

A first object of the present invention is to prevent air from leaking out of a pipe from a cut in the vicinity of a moving body, and to prevent dust and the like generated in the pipe from diffusing out of the pipe when the moving body moves. It is to provide a vacuum conveying or laying device which can be prevented. A second object of the present invention is to provide a vacuum conveying or laying apparatus capable of extremely easily exchanging a sealing wire and improving the obstruction of a cut by the sealing wire. is there. A third object of the present invention is to ensure that the sealing wire pulled out from the cut by the draw-out tube of the guide member can be inserted again into the cut, and to prevent the traveling bogie from wobbling in the circumferential direction of the pipe. To provide a vacuum carrying or laying device.

[0006]

The invention according to claim 1 is
As shown in FIGS. 1, 2 and 7, a pipe 11 having a cut 14 in the longitudinal direction over its entire length,
The moving body 16 which is inserted into the pipe 1 and is movable in the pipe 11 by sucking air in the pipe 11 from one of both ends of the pipe 11 by a vacuum pump 51, 52 or a blower.
The base 2 is connected to the moving body 16 in the pipe 11, and the transported object 2 is attached to the distal end located outside the pipe 11 through the cut 14.
3 or a connection member 17 to which an object to be laid is connected. In the vacuum carrying or laying apparatus according to the first aspect, the moving body 16 is positioned at the starting point of the carrying route, and the carrying member 23 is connected to the connecting member 17. When the air in the pipe 11 on the side is sucked by the vacuum pump 52 or 51, the inside of the pipe 11 on the end point side of the moving body 16 becomes negative pressure, and the negative pressure causes the moving body 16 to move from the starting point to the end point inside the pipe 11. To move. In order to move the moving body 16 by the negative pressure in this manner, air flows from the cut 14 to the pipe 1.
1 can be prevented from leaking outside.

The invention according to claim 2 is the invention according to claim 1, and further includes a pipe 1 as shown in FIGS.
1. A sealing wire 18 capable of closing the cut 14 from outside is disposed over the entire length of the pipe 11. In the vacuum conveying or laying device according to the second aspect, the gap 14 of the pipe 11 is closed by the sealing wire 18, so that the airtightness in the pipe 11 can be improved. Also, when replacing the sealing wire 18, an extremely simple operation of pulling out the old sealing wire 18 out of the pipe 11 from the cut 14 and removing it, and then inserting the new sealing wire 18 from the outside of the pipe 11 into the cut 14. Only needs to be done.

[0008] The invention according to claim 3 is the invention according to claim 1, and further as shown in FIGS.
6, the sealing wire 18 is pulled out from the cut 14 to the outside of the pipe 11 and the drawn sealing wire 18 is moved.
The guide member 24 for inserting the wire into the cut 14 is
It is characterized by being provided in. In the vacuum carrying or laying device according to the third aspect, when the moving body 16 starts moving in the pipe 11, the connecting member 17 moving together with the moving body 16 passes through the cut 14 in the pipe 11. At this time, the sealing wire 1 closing the cut 14
8 is pulled out by the guide member 24. Therefore, the connecting member 17 can move the cut 14 smoothly without being disturbed by the sealing wire 18. After passing through the connecting member 17, the sealing wire 18 drawn out of the pipe 11
It is pushed into the cut 14 again by the guide member 24. Thereby, the cut 14 other than the portion where the connecting member 17 passes
Is closed by the sealing wire 18.

The invention according to a fourth aspect is the invention according to the second or third aspect, and further, as shown in FIG.
A large groove portion 14a facing the outer surface of the pipe 11 and a small width groove portion 14b connected to the large groove portion 14a and facing the inner surface of the pipe 11.
A large sealing portion 18a in which the sealing wire 18 can be inserted into the large groove portion 14a, and a small sealing portion 18b which is connected to the large sealing portion 18a and can be inserted into the small groove portion 14b.
And characterized in that: In the vacuum conveying or laying device according to the fourth aspect, the large sealing portion 18a and the small-width sealing portion 18b of the sealing wire 18 are formed with the cuts 14.
Are inserted into the large groove portion 14a and the small width groove portion 14b, respectively.

The invention according to claim 5 is the invention according to claims 2 to 4
The invention according to any of the above, and as shown in FIG.
The sealing wire 18 is formed of elastic rubber or plastic, and at least the continuous portion of the narrow sealing portion 18b and the large sealing portion 18a and the narrow sealing portion 18b are more flexible than other portions of the sealing wire 18. Alternatively, it is characterized by being formed of plastic.
In the vacuum conveying or laying device according to the fifth aspect, at least the continuous portion of the small-width seal portion 18b and the large-size seal portion 18a having flexibility and the small-width seal portion 18b are formed on the inner surface of the large-size groove portion 14a and the small-width groove portion 14b. Therefore, the closing property of the cut 14 by the sealing wire 18 can be further enhanced.

The invention according to claim 6 is the invention according to claims 1 to 5
The invention according to any of the above, further as shown in FIG.
The moving body 16 contacts a shaft member 19 whose axis coincides with the center of the pipe 11 so as to keep the inner surface of the pipe 11 airtight, and a pair of airtight members 22 and 2 fixed to both ends of the shaft member 19.
2 and a first rolling member 21 rotatably attached to the shaft member 19 and capable of rolling on the inner surface of the pipe 11. In the vacuum carrying or laying device according to the sixth aspect, since the first rolling member 21 rolls on the inner surface of the pipe 11, the moving body 16 can smoothly move by the negative pressure generated in the pipe 11. You can move inside. Even if the sealing wire 18 is drawn out of the pipe 11 by the guide member 24 and the cut 14 of the pipe 11 is opened, the cut 14 is opened only when the connecting member 17 passes, so that the airtight member The inside of the pipe 11 on the outer surface of 22 is maintained at a negative pressure by the airtight member 11.

The invention according to a seventh aspect is the invention according to the sixth aspect, and further includes a moving body 1 as shown in FIGS.
6 is characterized in that communication small holes 22c, 22c are formed in the pair of airtight members 22, 22, respectively, for communicating between the inside of the pipe 11 outside both ends and the inside of the pipe 11 where the shaft member 19 is located. In the vacuum carrying or laying apparatus according to the seventh aspect, the first rolling member 21 rolls on the inner surface of the pipe 11 when the moving body 16 moves, or the airtight member 22 slides on the inner surface of the pipe 11. As a result, dust is generated in the pipe 11, but the dust is sucked through the communication small hole 22 c by the negative pressure generated by the operation of the vacuum pump 51 or 51, and is diffused outside the pipe 11. Never.

The invention according to claim 8 is the invention according to claims 1 to 7
8 and 9, a cut 14 is formed on the upper surface of the pipe 11, a lower end of the connecting member 17 is connected to the moving body 16, and the connecting member 1
7 is connected to a traveling vehicle 101 covering the pipe 11, and a second rolling member 102 capable of rolling on the outer surface of the pipe 11 is attached to the inner surface of the traveling vehicle 101.
To be connected to the transported object 23 or the laid object. In the vacuum carrying or laying apparatus according to the eighth aspect, since the sealing wire 18 drawn out of the cut 14 by the guide member 24 moves toward the cut 14 by its own weight, the guide member 24 surely cuts the cut. 14 is inserted. Also, the second rolling member 1
02 rolls on the outer surface of the pipe 11, so that the traveling carriage 10
1 smoothly moves with the moving body 16 without swaying in the circumferential direction of the pipe 11.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a first embodiment of the present invention will be described with reference to the drawings. As shown in FIG.
1 is suspended on a ceiling 12 of a clean room along a transport route and via a suspending tool 13. As shown in FIGS. 1 to 3, a cut 14 is formed in the lower surface in the longitudinal direction of the pipe 11 over the entire length of the pipe 11. Pipe 11
A moving body 16 that is movable by a negative pressure generated by sucking air from inside the pipe 11 is inserted into the inside, and an upper end of a plate-shaped connecting member 17 is connected to a lower surface of the moving body 16. This connecting member 17 passes through the cut 14
Project below. Also, this pipe 11
A sealing wire 18 capable of closing the cut 14 from outside is arranged over the entire length of the pipe 11. The cut 14 has a large groove 14a facing the outer surface of the pipe 11 and the large groove 14a.
a and a narrow groove 14b facing the inner surface of the pipe 11 (FIG. 3). The large groove portion 14a has a substantially heart-shaped cross section, and the small width groove portion 14b has a substantially rectangular cross section whose width is smaller than the width of the large groove portion 14a and slightly larger than the thickness of the connecting member 17.

The sealing wire 18 is formed in a shape corresponding to the large groove portion 14a and can be inserted into the large groove portion 14a, and has a shape corresponding to the small width groove portion 14b connected to the large seal portion 18a. And a small-width seal portion 18b formed and insertable into the small-width groove portion 14b. The sealing wire 18 is formed of rubber or plastic having elasticity, and the upper part of the small-width seal part 18b and the large seal part 18a is formed of rubber or plastic which is more flexible than the lower part of the large seal part 18a.
The large groove portion of the cut and the large seal portion of the sealing wire are not limited to the above shapes, but may be a circle, an ellipse, a square, or another polygon. In addition, the small width groove and the small width seal portion need not be able to completely close the cut and maintain airtightness by inserting the large seal portion into the large groove portion. Further, the cut may be formed by machining at the same time as molding of the pipe or after molding of the pipe, or may be formed by forming a narrow groove in the pipe and welding a plate having a large groove on the outer bottom surface of the pipe. Good.

The moving body 16 is, as shown in FIG.
A shaft member 19 whose axis coincides with one center, a pair of air-tight members 22 that are in contact with the inner surface of the pipe 11 so as to maintain airtightness and are fixed to both ends of the shaft member 19, and are rotatably mounted on the shaft member 19. And a first rolling member 21 capable of rolling on the inner surface of the pipe 11. The shaft member 19 includes a large-diameter portion 19a loosely inserted into the pipe 11, and a pair of male screw portions 19d protruding from both ends of the large-diameter portion 19a via a middle-diameter portion 19b and a small-diameter portion 19c, respectively. The airtight member 22 includes a core member 22a fitted into the small-diameter portion 19c, and a fitting member 22b attached to the outer peripheral surface and one outer surface of the core member 22a. The outer peripheral surface of the fitting member 22b is slidably contacted along the inner surface of the pipe 11, so that airtightness in the pipe 11 on both sides of the airtight member 22 is maintained. The airtight member 22 is fixed by screwing a nut 19e to the male screw portion 19d after fitting into the small diameter portion 19c. As the fitting member 22b, a soft or hard rubber having elasticity, a soft plastic, or a sponge or the like is used as long as airtightness in the pipes on both sides of the airtight member 22 separated by the airtight member 22 can be maintained. The pair of airtight members 22 and 22 are provided with pipes 1 at both ends of the moving body 16.
1 and communication pipes 22c, 22c are formed to communicate the inside of the pipe 11 where the shaft member 19 is located. The airtight member may be formed by alternately arranging rubber and sponge to form a composite plate, and iron plates may be arranged on both sides of the composite plate to fit into the small diameter portion.

The first rolling member 21 comprises a steel ball 21a and a steel ball holder 21b for rotatably holding the steel ball 21a (FIGS. 1 and 2). The outer periphery of the large diameter portion 19a of the shaft member 19 is spaced apart from the large diameter portion 19a by a predetermined distance in the axial direction.
3 locations at predetermined intervals in the radial direction and a total of 6 locations
Holder accommodation holes 19f are formed at the locations, and the steel ball holders 21b are inserted into these holder accommodation holes 19f, respectively, with a part of the steel ball 21a protruding. The number of the first rolling members is not limited to five, and may be four or less or six or more. Instead of steel balls, rollers may be used as the first rolling members.

The connecting member 17 has a first plate 17a whose upper end is welded to the lower surface of the large diameter portion 19a of the shaft member 19, and a second plate 17b which is welded to the lower end of the first plate 17a via a draw-out tube 24a. Having. First plate 1
7a passes through the cut 14 of the pipe 11 and
a and the second plate 17b are configured to be located outside the pipe 11 (FIGS. 1 and 2). Second plate 1
A pair of hooks 17c, 17c are fixed to both surfaces of 7b, and a pair of handles 23a, 23a of the basket 23 to be carried are locked to the hooks 17c, 17c, respectively (FIG. 1). ~ Figure 3). Although not shown, the basket 23 accommodates a silicon wafer or the like. In the case where the moving body rotates in the circumferential direction of the pipe by the gap between the first plate and the cage and swings, the basket is formed with a groove in the inner surface of the pipe in parallel with the cut, and the outer peripheral surface of the airtight member is formed. By forming a ridge that is slidably inserted into the groove, the basket can be prevented from swinging.

The connecting member 17 is provided with a guide member 24 (FIGS. 1 to 3). The guide member 24 is attached to the drawer cylinder 24a and the second plate 17b by the bracket 24.
and a pair of push rollers 24c, 24c rotatably mounted via the b, 24b. The drawer tube 24a is provided in parallel with the pipe 11, and the sealing wire 18 is inserted through the drawer tube 24a. This drawer tube 24
As a result, the sealing wire 18 is pulled out of the pipe 11 from the cut 14 when the moving body 16 moves. Further, the pair of pushing rollers 24c, 24c is formed by a pair of airtight members 22, 22.
And the lower surface of the pipe 11 is arranged so as to be rollable. These pushing rollers 24c, 2
4c, the drawn-out sealing wire 18 is cut 1
4 to be inserted. Reference numeral 26 in FIGS. 1 to 3 denotes the drawer cylinder 24a and the pushing roller 2.
4c. The cover body 26 prevents dust from being sucked into the pipe 11, rotates the pushing roller 24 c, and rotates the sealing wire 18 and the draw-out tube 24.
The diffusion of the dust generated by the sliding between a and the like is prevented. In order to reduce the frictional resistance between the sealing wire and the inner surface of the drawer tube, the inner surface of the drawer tube is coated with a friction reducing material such as a fluororesin, or the inner surface of the drawer tube in contact with the sealing wire is provided with a predetermined surface. A rotatable ball or roller may be buried at intervals.

A plurality of pipes 11 are connected according to the transport distance of the basket 23. As shown in FIGS. 4 to 6, one pipe 11 a and the other pipe 11 b are connected using a short connecting pipe 27. The short pipe 27 for connection is formed on both pipes 11 except for a cut 14 between the two pipes 11a and 11b.
It is configured to close the seam between a and 11b (FIG. 5).
Specifically, the connecting short pipe 27 has a wide cut 27 a having a width wider than the cut 14 over the entire length of the short pipe 27. One end of the connecting short pipe 27 is fitted to one pipe 11a such that the cut 14 is located at the center of the wide cut 27a (FIGS. 4 and 5). A first pedestal 31 is provided on the outer surface near the other end of the connecting short pipe 27 (FIGS. 4 and 5), and a second pedestal 31 is provided on the outer surface near the connecting portion of the other pipe 11b.
A pedestal 32 is provided (FIGS. 4 and 6). First and second
The pedestals 31, 32 are each formed in a U-shape, and are respectively welded to the outer surface of the connecting short pipe 27 and the outer surface of the other pipe 11b. The first pedestal 31 has a screw rod 29 via a pin 28.
The base of is pivoted. The screw rod 29 has a length such that the tip thereof reaches the second pedestal 32 in a state where the other pipe 11 b is inserted into the connecting short pipe 27. In order to connect both pipes 11a and 11b by the connecting short pipe 27, one pipe 1
1a, the other pipe 11b is inserted into the other end of the connecting short pipe 27, the tip of the screw rod 29 is inserted into the second pedestal 32, and the screw rod 29 is inserted into the first and second pedestals 31, 32. After being installed in between, the nut 33 is screwed into the tip of the screw rod 29.
By tightening the nut 33, the one pipe 11a and the other pipe 11b are in close contact with each other, and there is no gap in the joint. The second pedestal may be provided on the outer surface of the other end of the connecting short pipe, and the first pedestal to which the proximal end of the threaded rod is pivotally mounted may be provided on the outer surface near the connecting portion of the other pipe.

As shown in FIG. 7, a first vacuum pump 51 is connected to one end of the pipe 11 connected as described above via a first conduit 41, and one end of the pipe 11 is connected to the first vacuum pump 51. A first solenoid valve 61 that switches between three ports and two positions is provided in the first conduit 41 between the two. A second vacuum pump 52 is connected to the other end of the pipe 11 via a second pipe 42, and a 3-port 2 is connected to the second pipe 42 between the other end of the pipe 11 and the second vacuum pump 52. Position switching second solenoid valve 6
2 are provided. The first and second vacuum pumps 51 and 52 are driven by first and second electric motors 71 and 72, respectively. The first solenoid valve 61 has a first port 61a communicating with the suction port of the first vacuum pump 51, a second port 61b communicating with one end of the pipe 11, and a third port 61c communicating with the atmosphere. When the first solenoid valve 61 is turned on, the first port 61a and the second port 61b are connected and connected. When the first solenoid valve 61 is turned off, the second port 61b and the third port 61c are connected and connected. The second solenoid valve 62 is
First port 62a communicating with the suction port of vacuum pump 52
A second port 62b communicating with the other end of the pipe 11,
A third port 62c communicating with the atmosphere. When the second solenoid valve 62 is turned on, the first port 62a and the second port 62
b are connected to each other, and when turned off, the second port 62b and the third port 62c are connected to each other.
When the pipe is long, the first vacuum pump and the first
A first vacuum tank is provided in a first pipe between the solenoid valves, and a second vacuum tank is provided in a second pipe between the second vacuum pump and the second solenoid valve to increase the suction amount of air in the pipe. Thus, the moving body can be quickly moved. The air in the pipe may be sucked by a blower instead of the vacuum pump.

A method of using the thus constructed vacuum carrying device will be described. The starting point of the transport route of the basket 23 is the pipe 1
1, and the end point is the other end of the pipe 11 (the right end of the pipe 11 in FIG. 7).
First, the moving body 16 is positioned at one end of the pipe 11 together with the connecting member 17, and in this state, the basket 23 containing the silicon wafer or the like is hung on the hook 17c. Next, the second solenoid valve 62 is turned on, the first port 62a and the second port 62c of the solenoid valve 62 are communicated, and the second vacuum pump 52 is operated. At this time, the first solenoid valve 61 is kept off, the second port 61b and the third port 61c of the solenoid valve 61 are communicated, and the first vacuum pump 51 is kept stopped. As a result, the air in the pipe 11 on the right side of the moving body 16 is sucked by the second vacuum pump 52 to become a negative pressure, and the moving body 16 starts moving to the right together with the basket 23 due to the negative pressure. At this time, the pipe 1 on the left side of the moving body 16
1 communicates with the atmosphere, so that air flows into the left pipe 11 as the moving body 16 moves.

When the moving body 16 starts moving in the pipe 11, the first plate 17 a of the connecting member 17 that moves with the moving body 16 passes through the cut 14 of the pipe 11. At this time, the sealing wire 1 closing the cut 14
8 is drawn out by the drawer cylinder 24a. Therefore, the first plate 17a can smoothly move the cut 14 without being disturbed by the sealing wire 18. Further, the sealing wire 18 is drawn out of the pipe 11 and the cut 14 is opened only when the first plate 17a passes, and the sealing wire 18 drawn out of the pipe 11 is removed from the first plate 17a. Is pushed again into the cut 14 by the pushing roller 24c. As a result, the cuts 14 other than the portion through which the first plate 17 a passes are closed by the sealing wire 18. In addition, since the upper portion of the narrow sealing portion 18b and the large sealing portion 18a is formed of rubber or the like having flexibility more than the lower portion of the large sealing portion 18a, the sealing wire 18 adheres very well to the cut 14; The obstruction of the cut by the wire 18 can be enhanced.

When the moving body 16 moves, the first rolling member 2
When one steel ball 21a rolls on the inner surface of the pipe 11, or the airtight member 22 slides on the inner surface of the pipe 11,
Dust is generated in the pipe 11. However, due to the above-mentioned negative pressure, these dusts communicate with the communication small holes 22c of the right airtight member 22.
So that it is not diffused out of the pipe 11,
There is no contamination in the clean room. Pressing roller 2
4c rolls on the lower surface of the pipe 11 so that the pipe 1
Dust is generated in the outer cover body 26. However, the dust is sucked by the negative pressure and passes through the cut 14 where the sealing wire 18 is drawn out and through the communication small hole 22c of the right airtight member 22 so that the pipe 11 on the right side of the moving body 16 is removed.
Since it flows into the inside, it is not diffused outside the cover body 26, and the inside of the clean room is not contaminated. Although the cover body 26 cannot be inside the clean room, it also has a function of preventing relatively large dust outside the pipe 11 from being sucked by the negative pressure. The joint between the pipes 11 is sealed by the connecting short pipe 27 (FIG. 4). As a result, the airtightness in the pipe 11 on the right side of the moving body 16 increases, and no air enters the pipe 11 on the right side from outside the pipe 11, and the inside of the pipe 11 on the right side is maintained at a negative pressure. Therefore, the moving body 16 can move smoothly within the pipe 11 from one end (the starting point of the transport route) to the other end (the end point of the transport route).

When the moving body 16 reaches the end point of the transport path of the basket 23, that is, the other end of the pipe 11, the second vacuum pump 52 is stopped, the second solenoid valve 62 is turned off, and the second solenoid valve 62 is turned off. The port 62b and the third port 62c are communicated. As a result, air is introduced into the pipe 11 on the right side of the moving body 16 to reach atmospheric pressure, and the moving body 16 stops, so that the basket 23 containing the silicon wafer or the like is removed from the hook 17c. Further, the empty basket 23 is hung on the hook 17c, the first solenoid valve 61 is turned on, and the first port 6 of the solenoid valve 61 is turned on.
1a and the second port 61b, and the first vacuum pump 5
Activate 1 At this time, the second solenoid valve 62 is kept off (the second port 62b of the second solenoid valve 62 and the third
The port 62c is kept in communication. ), The second vacuum pump 52 is kept stopped. Thereby, the moving body 16
The air in the pipe 11 on the left side is sucked by the first vacuum pump 51 to be a negative pressure, and the negative pressure
Moves to the left with the basket 23. At this time, the moving body 16
Since the inside of the pipe 11 on the right side communicates with the atmosphere, air flows into the pipe 11 on the right side as the moving body 16 moves. As a result, the moving body 16 can move smoothly in the pipe 11 from the other end (the end point of the transport route) to the one end (the start point of the transport route). When the sealing wire is replaced, the old sealing wire is pulled out of the pipe through the cut and removed, and then a new sealing wire is inserted from the outside of the pipe into a very simple operation.

FIGS. 8 to 12 show a second embodiment of the present invention. 8 to 12, the same reference numerals as those in FIGS. 1 to 7 indicate the same parts. In this embodiment, a cut 14 is formed on the upper surface of the pipe 11, the lower end of the first plate 17 a of the connecting member 17 is connected to the upper surface of the shaft member 19 of the moving body 16, and the upper end of the second plate 17 b connects the pipe 11. It is connected to the traveling carriage 101 to cover (FIGS. 8 and 9). A second rolling member 102 capable of rolling on the outer surface of the pipe 11 is attached to the inner surface of the traveling vehicle 101, and a basket 23 to be transported is connected, that is, placed on the upper surface of the traveling vehicle 101. First
A drawer cylinder 24a of the guide member 24 is welded between the plate 17a and the second plate 17b.
A pair of pushing rollers 24c, 24c that can roll on the upper surface of the pipe 11 via a bracket 24b are attached to 7b.

A stay 103 extending longitudinally over the entire length of the pipe 11 is provided on the lower surface of the pipe 11.
And are provided integrally. The cross section of the stay 103 is substantially inverted L
A horizontal piece 103a and a horizontal piece 103
and a vertical piece 103b which is hung at one end of a. The vertical piece 103b is bolted 103 to the wall 104 of the clean room.
By fixing at c, the pipe 11 is fixed along the transport route of the basket 23. The traveling cart 101 has a horizontal cross section formed in a substantially bowl shape, and has a horizontal panel portion 101a and a pair of vertical panel portions 101b and 101c suspended from both side edges of the horizontal panel portion 101a. Horizontal panel 1
01a, a pair of fixtures 101d, 101d
Are fixed at predetermined intervals. Second plate 17b
Is sandwiched between a pair of fixtures 101d, 101d, and the bolt 1
01e, and insert the nut 101f into the bolt 101e.
Is screwed, the traveling carriage 101 is connected to the second plate 17b. In this embodiment, the second rolling member 102 travels at two places at predetermined intervals in the longitudinal direction of the pipe 11 and the stay 103 and at five places at intervals in the radial direction and the width direction, for a total of 10 running points. Reference numerals 102a to 102e are attached to the inner surface of the carriage 101. In other words, five of these rollers 102a to 102e are arranged on each of two surfaces crossing the pipe 11 and the stay 103. The rollers 102a and 102b are connected to one of the vertical panel portions 1
01b, and the rollers 102c to 102e are mounted on the inner surface of the other vertical panel portion 101c. The rollers 102a and 102c roll on the outer surface of the pipe 11, the rollers 102b and 102d roll on the upper surface of the horizontal piece 103a, and the rollers 102e roll on the lower surface of the horizontal piece 103a.

A plurality of pipes 11 are connected according to the transport distance of the basket 23. As shown in FIGS. 10 to 12, one pipe 11a and the other pipe 11b are connected via a packing 106 formed of rubber or the like (FIG. 10).
And FIG. 12). The packing 106 has the same cross-sectional shape as the pipe 11. Four first pedestals 31 are provided on the outer surface of the other pipe 11b near the connecting portion at predetermined intervals in the circumferential direction of the pipe 11b (FIG. 1).
1) Four second pedestals 32 are provided on the outer surface of the one pipe 11a in the vicinity of the connection portion, respectively, in opposition to the four first pedestals 31. The first and second pedestals 31, 32 are each formed in a U-shape, and are respectively welded to the outer surface of the other pipe 11b and the outer surface of one pipe 11a. The base end of a threaded rod 29 is pivotally connected to the first pedestal 31 via a pin 28, and the centering member 10 faces the outer surface of one of the pipes 11a.
7 is protruded. The screw rod 29 has a length such that the tip thereof reaches the second pedestal 32 in a state where one pipe 11a is in contact with the other pipe 11b via the packing 106. To connect the two pipes 11a and 11b, one of the pipes 11a is inserted into four centering members 107 projecting from the four first pedestals 31, and the tip of the screw rod 29 is connected to the second pedestal. 32 and screw rods 29 into the first and second
After being installed between the pedestals 31 and 32, a nut 33 is screwed to the tip of the screw rod 29. By tightening the nut 33, the one pipe 11a and the other pipe 11b come into close contact with each other via the packing 106, and there is no gap in the joint. The second pedestal may be provided on the outer surface of the other pipe, and the first pedestal to which the proximal end of the threaded rod is pivotally mounted may be provided on the outer surface of one pipe. Except for the above, the configuration is the same as that of the first embodiment.

In the vacuum type transport apparatus thus constructed, the cutout 14 is formed by the drawing cylinder 24a of the guide member 24.
After passing through the draw-out tube 24a, the sealing wire 18 pulled out from the cylinder 14 moves toward the cut 14 by its own weight, so that the sealing wire 18 is securely pushed into the cut 14 by the pushing roller 24c and inserted. . Further, since the second rolling member 102 rolls on the outer surface of the pipe 11 and the upper and lower surfaces of the stay 103, the traveling cart 101 on which the basket 23 is placed does not move in the circumferential direction of the pipe 11 so that the moving body 1
It moves smoothly with 6. As a result, the silicon wafer or the like accommodated in the basket 23 does not rattle and is not damaged. Operations other than those described above are substantially the same as the operations of the first embodiment, and thus the repeated description will be omitted. In the first and second embodiments, an apparatus for transporting a basket (conveyed object) containing a silicon wafer or the like in a clean room is described. However, an electric motor that handles a flammable substance such as an organic solvent is used. The present invention can also be applied to a device for transporting an object to be transported in a place where it cannot be used, or an apparatus for laying an object to be laid such as a cable in a place where an electric motor for handling a flammable substance such as an organic solvent as described above cannot be used.

[0030]

As described above, according to the present invention, a cut is formed in the longitudinal direction over the entire length of the pipe, and the moving body inserted into the pipe is moved from one of the two ends of the pipe by a vacuum pump or the like. The inside of the pipe is moved by sucking the air inside the pipe, the connecting member whose base end is connected to the moving body in the pipe passes through the cut, and the transported object etc. is connected to the tip of the connecting member located outside the pipe Therefore, when the air in the pipe at the end point of the transport route is sucked from the moving body by a vacuum pump or the like, the inside of the pipe at the end point becomes negative pressure, and the negative pressure causes the moving body to move from the starting point to the end point. Move in. Since the moving body is moved by the negative pressure in this way, it is possible to prevent air from leaking out of the pipe from the cut. In addition, by arranging the sealing wire capable of closing the cut from the outside of the pipe over the entire length of the pipe, the airtightness in the pipe can be enhanced, and the replacement of the sealing wire can be performed extremely easily and in a short time.

If the connecting member is provided with a guide member for drawing the sealing wire to the outside of the pipe from the cut when the moving body is moved and inserting the drawn sealing wire into the cut, the connecting member becomes the sealing wire. The cut can be smoothly moved without being disturbed, and the cut other than the portion through which the connecting member passes is closed by the sealing wire. As a result, the airtightness in the pipe can be improved. Also, a large groove portion of the cut faces the outer surface of the pipe, a small width groove portion connected to the large groove portion faces the inner surface of the pipe, a large seal portion of the sealing wire is inserted into the large groove portion, and the large groove portion is connected to the large seal portion. By inserting the small-width seal portion into the small-width groove portion, it is possible to enhance the closing property of the cut by the sealing wire.

Further, the sealing wire is formed of elastic rubber or plastic, and at least the continuous portion of the small-width seal portion and the large-size seal portion and the small-width seal portion are made of rubber or plastic having flexibility more than other portions of the sealing wire. When formed of plastic, at least the continuous portion of the small-width seal portion and the large-size seal portion having flexibility and the small-width seal portion are in close contact with the inner surface of the large-groove portion and the small-width groove portion, respectively, so that the sealing wire is in close contact with the cut. As a result, the closing property of the cut by the sealing wire can be further increased. Also, the first rolling member rotatably mounted on the shaft member is fixed to both ends of the shaft member by aligning the axis of the shaft member of the moving body with the center of the pipe, and fixing a pair of airtight members in contact with the inner surface of the pipe so as to maintain the airtightness. If the moving member is configured to roll on the inner surface of the pipe, the moving body can smoothly move in the pipe due to the negative pressure generated in the pipe. Even if the wire for sealing is pulled out of the pipe by the guide member and the cut in the pipe is opened, the cut is opened only when the connecting member passes, so the inside of the pipe on the outer surface of the airtight member is airtight. A negative pressure is maintained by the member.

If a pair of hermetic members are formed with communication small holes that communicate between the inside of the pipe at both ends of the moving body and the inside of the pipe where the shaft member is located, the first rolling member rolls on the inner surface of the pipe. Even if dust is generated in the pipe by the airtight member sliding on the inner surface of the pipe, the dust is sucked through the communication small hole by the negative pressure generated by the operation of the vacuum pump. Therefore, it is not diffused outside the pipe. In addition, a cut is formed on the upper surface of the pipe, the lower end of the connecting member is connected to the moving body, and the upper end of the connecting member is connected to the traveling carriage covering the pipe, and the inner surface of the traveling carriage can roll the outer surface of the pipe. If the moving member is attached and a conveyed object is connected to the traveling carriage, the sealing wire drawn out from the cut by the guide member moves toward the cut due to its own weight, so that the guide member reliably inserts the cut. . Further, since the second rolling member rolls on the outer surface of the pipe, the traveling vehicle can smoothly move with the moving body without swaying in the circumferential direction of the pipe.

[Brief description of the drawings]

FIG. 1 is a sectional view taken along line AA of FIG. 2 showing a vacuum-type transport device according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along line BB of FIG. 1;

FIG. 3 is a sectional view taken along line CC of FIG. 1;

FIG. 4 is an essential part side view showing a connecting portion between adjacent pipes.

FIG. 5 is a sectional view taken along line DD of FIG. 4;

FIG. 6 is a sectional view taken along line EE of FIG. 4;

FIG. 7 is a configuration diagram of a transport device including a vacuum pump.

FIG. 8 is a sectional view taken along line FF of FIG. 9 showing a second embodiment of the present invention.

FIG. 9 is a sectional view taken along line GG of FIG. 8;

FIG. 10 is a side view of a main part showing a connecting portion between adjacent pipes.

FIG. 11 is a sectional view taken along line HH of FIG. 10;

FIG. 12 is a sectional view taken along line II of FIG. 11;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Pipe 14 Break 14a Large groove part 14b Small width groove part 16 Moving body 17 Connection member 18 Sealing wire 18a Large seal part 18b Small width seal part 19 Shaft member 21 First rolling member 22 Airtight member 22c Communication small hole 23 Basket 24) Guide member 51, 52 Vacuum pump 101 Traveling carriage 102 Second rolling member

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B65G 49/07 B65G 49/07 L H01L 21/68 H01L 21/68 A

Claims (8)

[Claims] 1. A pipe (11) having a cut in the longitudinal direction over its entire length, and a vacuum pump (51, 52) or a blower inserted into the pipe (11) from one of both ends of the pipe (11). A moving body (16) that can move in the pipe (11) by sucking air in the pipe (11); and a cut end whose base end is connected to the moving body (16) in the pipe (11). (14) A connection member (17) to which a transported object (23) or an object to be laid is connected at the tip located outside the pipe (11) through the pipe (11)
And a vacuum carrying or laying device. 2. A vacuum conveying or laying apparatus according to claim 1, wherein a sealing wire (18) capable of closing a cut (14) from outside the pipe (11) is arranged along the entire length of the pipe (11). 3. The sealing wire rod (18) when the moving body (16) is moved.
The connecting member (17) is provided with a guide member (24) for drawing out the pipe (11) from the cut (14) outward and inserting the drawn sealing wire (18) into the cut (14). The vacuum conveying or laying device according to 1. 4. A large groove (14a) having a cut (14) facing the outer surface of the pipe (11), and the pipe (1) is connected to the large groove (14a).
1) having a narrow groove portion (14b) facing the inner surface, and a sealing wire (1
8) is a large seal portion (18a) that can be inserted into the large groove portion (14a).
And the small width groove portion (14b) which is connected to the large seal portion (18a).
The vacuum conveying or laying device according to claim 2 or 3, further comprising a small-width seal portion (18b) insertable into the device. 5. The sealing wire (18) is formed of elastic rubber or plastic, and at least the continuous portion of the small-width seal portion (18b) and the large-size seal portion (18a) and the small-width seal portion (18b) are formed. The vacuum carrying or laying device according to any one of claims 2 to 4, wherein the device is formed of rubber or plastic which is more flexible than other parts of the sealing wire (18). 6. A moving body (16) comes into contact with a shaft member (19) whose axis coincides with the center of the pipe (11) so as to keep the inner surface of the pipe (11) airtight, and the shaft member (19). A pair of airtight members (22, 22) fixed to both ends of the first member, and a first rolling member (21) rotatably mounted on the shaft member (19) and capable of rolling on the inner surface of the pipe (11). The vacuum carrying or laying device according to any one of claims 1 to 5, further comprising: 7. A communication small hole (22c, 22c) for communicating between an inside of a pipe (11) at both ends of a moving body (16) and an inside of a pipe (11) in which a shaft member (19) is located. 7. The vacuum conveying or laying device according to claim 6, wherein the device is formed on the airtight members. 8. A cut (14) is formed on the upper surface of the pipe (11), a lower end of the connecting member (17) is connected to the moving body (16), and an upper end of the connecting member (17) is connected to the pipe (11). Traveling trolley covering
(101), a second rolling member (102) that is capable of rolling on the outer surface of the pipe (11) is attached to the inner surface of the traveling vehicle (101), and the transported object is mounted on the traveling vehicle (101). The vacuum carrying or laying apparatus according to any one of claims 1 to 7, wherein the apparatus is configured to be connected to an object to be laid.