JP2001015397A - Electronic device manufacturing apparatus and control method therefor - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To perform preprocessing such as heating and position correction on a sample in a preprocessing chamber, and transport the preprocessed sample to one of a plurality of processing chambers via a transfer chamber. In the apparatus for performing the machining process, the possibility that a trouble occurs in the selected processing chamber can be reduced. SOLUTION: A preprocessing time required for preprocessing for the processing chamber 4a from a predicted time of processing completion in the processing chamber 4a, and a preprocessing chamber 3 to the processing chamber 4a after completion of the preprocessing.
And the transport time required to transport the sample to At a time corresponding to the result obtained by the subtraction, a preprocessing request is issued to the preprocessing chamber 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an electronic device manufacturing apparatus and a control method thereof, and more particularly to an electronic device manufacturing apparatus for manufacturing a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, and the like, and a control method thereof.

[0002]

2. Description of the Related Art Conventionally, an electronic device manufacturing process for manufacturing an electronic device such as a semiconductor or a liquid crystal has a pre-processing chamber for performing heating and position correction and a plurality of processing chambers for performing processing. Electronic device manufacturing apparatuses are widely used. As shown in FIG. 4, this type of electronic device manufacturing apparatus has a plurality of load lock chambers 2, a pre-processing chamber 3, and a plurality of processing chambers 4a to 4c with a transfer chamber 1 at the center.
Are provided along the circumferential direction. In the transfer chamber 1, a W arm 5 is installed as a robot hand that executes loading and unloading of a sample with each of the chambers 2, 3, 4a to 4c.

In such a configuration, a sample taken out of the load lock chamber 2 into the transfer chamber 1 is transported to the pre-processing chamber 3. One of the processing chambers 4a to 4c to be conveyed next is selected, and pre-processing such as position correction or heating under a preset condition is performed under conditions corresponding to the selected specific processing chamber. Processing is performed. As soon as the pre-processing is completed, the sample is taken out of the pre-processing chamber 3 into the transfer chamber 1 and transported to the processing chamber selected as described above to be processed.

[0004]

However, in such a conventional apparatus, specific processing chambers 4a to 4c are selected in order to determine processing conditions in the preprocessing chamber 3, and after the preprocessing is started, When a trouble occurs in the selected processing chamber and the processing cannot be performed, the apparatus stops until the trouble in the selected processing chamber is recovered.

Further, even if the trouble in the processing chamber is recovered, for example, if the pretreatment is heating, if the heated sample is left for a long time in the transfer chamber during the recovery from the trouble, the temperature of the sample drops. There is a possibility that the sample cannot be processed in the processing chamber. An object of the present invention is to solve the above-mentioned conventional problems and to reduce the possibility that a trouble will occur in a selected processing chamber. Another object of the present invention is to prevent the productivity from being reduced due to the stoppage of the apparatus even if a trouble occurs in the selected processing chamber.

[0006]

In order to achieve this object, the present invention provides a method for calculating the pre-processing time required for pre-processing for a processing chamber, the pre-processing time required for the pre-processing for the processing chamber, and the pre-processing time after completion of the pre-processing. A transfer time required to transfer a sample from a processing chamber to the processing chamber is subtracted, and a preprocessing request is issued to the preprocessing chamber at a time corresponding to a result obtained by the subtraction. Things.

[0007] With this configuration, the operation from the start of the preprocessing to the transfer of the sample to the processing chamber can be executed in a short time without any waiting time. The possibility of occurrence can be reduced. Further, in the present invention, when a processing chamber to which a sample to be transported after the completion of the preprocessing is in a state where the processing cannot be performed, a different processing chamber is selected and the preprocessing is performed again.

With this configuration, even if a trouble occurs in the processing chamber between the start of the preprocessing and the transfer of the sample to the processing chamber, and the processing cannot be performed in the processing chamber, the preprocessing is performed again. Thus, the sample can be processed in another processing chamber. Further, according to the present invention, before the pre-processing request is issued from the processing chamber, the pre-processing is started in the pre-processing chamber under predetermined conditions in advance, and after a lapse of a predetermined time from the start of the pre-processing, or When a condition is satisfied after the start of the process, the pre-process is continued, and a pre-process request from the process chamber is awaited. A preprocessing request is issued to the preprocessing chamber at a time earlier by a transport time required for transporting the sample to the processing chamber.

With such a configuration, the operation from the start of the preprocessing to the transfer of the sample to the processing chamber can be executed in a short time without any waiting time. Can be reduced.
Further, according to the present invention, when a sample that has been subjected to preprocessing is to be transported to the processing chamber via the transfer chamber and the allowable time has been exceeded, the sample is returned to the preprocessing chamber and preprocessing is performed again. It is made to be performed.

With such a configuration, even if the time from the end of the pre-processing to the transfer to the processing chamber exceeds the allowable time, the pre-processing can be performed again, so that the sample can be processed again in the processing chamber. it can.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS According to the first aspect of the present invention, a sample is subjected to pre-processing such as heating and position correction in a pre-processing chamber, and the pre-processed sample is subjected to a plurality of processing via a transfer chamber. The apparatus for carrying out the processing by transporting it to one of the processing chambers determines the preprocessing time required for the preprocessing for the processing chamber from the predicted time of the processing end in the processing chamber, and the preprocessing time after the completion of the preprocessing. Means for subtracting the transport time required to transport the sample from the processing chamber to the processing chamber, and means for issuing a preprocessing request to the preprocessing chamber at a time corresponding to the result obtained by the subtracting means It has the following.

With this configuration, the operation from the start of the preprocessing to the transfer of the sample to the processing chamber can be executed in a short time without any waiting time. The possibility of occurrence can be reduced. According to the second aspect of the present invention, when the preprocessing is completed, if the processing chamber to which the sample after the preprocessing is to be transported is in a state where the processing cannot be performed, a different processing chamber is selected and the preprocessing is performed again. It has a means.

In this case, even if a trouble occurs in the processing chamber between the start and the end of the pretreatment and the processing cannot be performed in the processing chamber, the preprocessing is performed again and the sample is removed. It can be processed in another processing chamber. Claim 3
The present invention described in the above, immediately before transporting the sample after the pre-processing from the pre-processing chamber to the processing chamber via the transfer chamber, if the processing chamber is in a state that can not be processed, the sample is pre-processed The apparatus has a means for returning to the chamber, selecting a different processing chamber, and performing the pre-processing again.

In this case, even if a trouble occurs in the processing chamber between the start of the preprocessing and immediately before the transfer of the sample to the processing chamber and the processing cannot be performed in the processing chamber, the preprocessing is performed again. And the sample can be processed in another processing chamber. The present invention according to claim 4 performs pretreatment such as heating and position correction on a sample in a pretreatment chamber, and transfers the pretreated sample to one of a plurality of treatment chambers via a transfer chamber. A device for carrying and processing is carried out, when the sample is carried to the pre-processing chamber, means for starting the pre-processing under preset conditions, and after a certain time has elapsed after the start of the pre-processing or It is determined whether or not a certain condition is satisfied after the start of the pre-processing. In that case, a means for waiting for a pre-processing request from the processing chamber while continuing the pre-processing, and a predicted time of processing end in the processing chamber, A means for issuing a preprocessing request to the preprocessing chamber at a time earlier by a transport time required to transport the sample from the preprocessing chamber to the processing chamber, and upon receiving the preprocessing request, terminating the preprocessing, Means for transporting the sample in the preprocessing chamber to the processing chamber via the transfer chamber It is obtained to have a.

With this configuration, the operation from the start of the pre-processing to the transfer of the sample to the processing chamber can be executed in a short time without any waiting time. Can be reduced.
According to a fifth aspect of the present invention, there is provided means for presetting an allowable time from the end of pre-processing to the transfer of a sample to the processing chamber, and the step of transferring the pre-processed sample to the processing chamber via the transfer chamber. Means for returning the sample to the pre-processing chamber and performing the pre-processing again when the time exceeds the permissible time at the time when the sample is to be transported.

In this case, even if the time from the end of the preprocessing to the transfer to the processing chamber exceeds the allowable time, the preprocessing can be performed again, so that the sample can be processed again in the processing chamber. it can. The present invention according to claim 6 performs pretreatment such as heating and position correction on a sample in a pretreatment chamber,
When transferring the preprocessed sample to one of the plurality of processing chambers via the transfer chamber and performing the processing, the preprocessing for the processing chamber is performed based on the predicted time of the processing end in the processing chamber. The required pre-processing time and the transport time required to transport the sample from the pre-processing chamber to the processing chamber after the end of the pre-processing are subtracted, and at a time corresponding to the result obtained by the subtraction,
A preprocessing request is issued to the preprocessing room.

In this way, the operation from the start of the pre-processing to the transfer of the sample to the processing chamber can be executed in a short time without any waiting time, and a trouble may occur in the processing chamber during this operation. Performance can be reduced. Claim 7
The present invention described in the above, at the end of pre-processing, if the processing chamber to which the sample after the pre-processing is to be transported is in a state where processing cannot be performed, a different processing chamber is selected and pre-processing is performed again .

In this way, even if a trouble occurs in the processing chamber between the start and the end of the preprocessing, and the processing cannot be performed in the processing chamber, the preprocessing is performed again and the sample is subjected to another processing. Can be processed in the room. In the present invention according to claim 8, immediately before transporting a sample after preprocessing from the preprocessing chamber to the processing chamber via the transfer chamber, if the processing chamber is in a state where processing cannot be performed, the sample is removed. The process is returned to the pre-processing chamber, a different processing chamber is selected, and pre-processing is performed again.

In this way, even if a trouble occurs in the processing chamber between the start of the preprocessing and immediately before the sample is transferred to the processing chamber, and the processing cannot be performed in the processing chamber, the preprocessing is performed again. The sample can be processed in another processing chamber. The present invention according to claim 9 performs preprocessing such as heating and position correction on a sample in a preprocessing chamber, and transfers the preprocessed sample to one of a plurality of processing chambers via a transfer chamber. When the sample is conveyed to the pre-processing chamber when the sample is conveyed to the pre-processing chamber, the pre-processing is started under predetermined conditions, and after a certain time has elapsed after the start of the pre-processing or after the start of the pre-processing. It is determined whether or not a certain condition is satisfied. In that case, while preprocessing is continued, a preprocessing request from the processing chamber is waited, and a predicted processing end time in the processing chamber is determined.
At a time before the transfer time required to transfer the sample from the pre-processing chamber to the processing chamber, a pre-processing request is issued to the pre-processing chamber and the pre-processing request is received. The sample in the processing chamber is transferred to the processing chamber via the transfer chamber.

In this way, the operation from the start of the preprocessing to the transfer of the sample to the processing chamber can be executed in a short time without any waiting time, and a trouble occurs in the processing chamber during this operation. Possibilities can be reduced. According to the tenth aspect of the present invention, the allowable time from the end of the preprocessing to the transfer of the sample to the processing chamber is set in advance, and the sample after the preprocessing is transferred to the processing chamber via the transfer chamber. At this point, if the time exceeds the allowable time, the sample is returned to the pretreatment chamber and pretreatment is performed again.

In this way, even if the time from the end of the pre-processing to the transfer to the processing chamber exceeds the allowable time, the pre-processing can be performed again, so that the sample can be processed again in the processing chamber. Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.

In the electronic device manufacturing apparatus shown in FIG. 1, a transfer chamber 1 provided with a W arm 5 for loading and unloading a sample is centered, and a wafer, a glass substrate, A load lock chamber 2 for loading and unloading a cassette containing the sample, a plurality of processing chambers 4a to 4c for performing processing such as etching and sputtering on the sample, and a sample before processing in the processing chambers 4a to 4c. A preprocessing chamber 3 for performing preprocessing such as position correction and heating is installed.

The transfer room 1 and the load lock room 2 are managed by a transfer room / load lock room control unit 6 having a microcomputer as a main part, and the pre-processing room 3 has a microcomputer as a main part. The processing chambers 4a to 4c are managed by processing chamber control units 8a to 8c mainly including a microcomputer.

The transfer room / load lock room control unit 6, the pre-processing room control unit 7, and the processing room control units 8a to 8c are managed by an overall control unit 9 mainly including a microcomputer. The same processing can be performed in each of the plurality of processing chambers 4a to 4c, and the sample that has been subjected to the preprocessing in the preprocessing chamber 3 is carried into one of the processing chambers 4a to 4c by the W arm 5. Process.

Next, a processing method in the electronic device manufacturing apparatus of FIG. 1 will be described with reference to a flowchart of FIG. First, when the sample is transferred from the transfer chamber 1 to the pre-processing chamber 3 in step S1, in step S2, a pre-processing request from the processing chambers 4a to 4c is waited without executing the pre-processing immediately.

The control units 8a to 8c of the processing chambers 4a to 4c
When the processing of the sample is started in these processing chambers 4a to 4c, the current processing end time is predicted from the processing time required for the previous processing in the processing chamber. Then, from the predicted processing end time, the preprocessing time required for the preprocessing for the processing chamber, the transport time required to transport the sample from the preprocessing chamber 3 to the processing chamber after the completion of the preprocessing, and At the time corresponding to the result obtained by the subtraction,
A preprocessing request is issued to the preprocessing chamber 3.

When the pre-processing chamber receives a pre-processing request from a specific processing chamber, for example, the processing chamber 4a in step S2, the pre-processing conditions corresponding to the requested processing chamber 4a are determined in step S3. Then, in step S4, the pre-processing is executed under the condition. When the pre-processing is completed, it is checked in step S5 whether the requested processing chamber 4a has stopped in trouble. If the trouble has stopped, the process returns to step S2, and waits for a preprocessing request from another processing chamber.

If it is determined in step S5 that the processing chamber 4a that has requested the trouble has not stopped, the process proceeds to step S6.
The sample is transported from the pre-processing chamber 3 to the W arm 5 of the transfer chamber 1,
The W arm 5 is directed toward the processing chamber 4a. Step S
At 7, it is confirmed again whether or not the requested processing chamber 4a has stopped in trouble. At this time, if the trouble has stopped, the process returns to step S1, the sample is returned from the transfer chamber 1 to the pre-processing chamber 3, and the pre-processing is performed again.

If the processing chamber 4a requested in step S7 does not stop in trouble, then in step S8,
The sample is transferred from the transfer chamber 1 to the processing chamber 4a, and the processing is performed in the processing chamber 4a. As described above, the processing chamber 4a
Subtract the pre-processing time required for the pre-processing for the processing chamber and the transport time required to transport the sample from the pre-processing chamber to the processing chamber after the completion of the pre-processing from the predicted processing end time in ~ 4c. Then, since a preprocessing request is issued to the preprocessing chamber 3 at a time corresponding to the result obtained by the subtraction, the work from the start of the preprocessing to the transport to the processing chamber can be performed without waiting time. It can be executed in time, and the possibility that a trouble occurs in the processing chamber during this operation can be reduced.

In step S5, it is determined whether or not a trouble has occurred in the processing chamber 4a at the end of the pre-processing. In step S7, the sample whose pre-processing has been completed is transferred from the transfer chamber 1 to the processing chamber 4a. Immediately before transporting the wafer, it is determined again whether or not a trouble has occurred. If a trouble has occurred, the processing is performed in another processing chamber in steps S2 to S4, so that productivity can be improved.

Next, a second embodiment of the present invention will be described with reference to FIG. First, when the sample is transported from the transfer chamber 1 to the pre-processing chamber 3 in step S11, the execution of the pre-processing is started in step S12 according to preset conditions. In step S13, it is determined whether a predetermined time has elapsed since the start of the preprocessing, or whether a condition after the start of the preprocessing (e.g., when the preprocessing is a heating process, a preset temperature has been reached) is satisfied. And in that case, while continuing the preprocessing,
The process proceeds to step S14 to wait for a pre-processing request from the processing chambers 4a to 4c.

The control units 8a to 8c of the processing chambers 4a to 4c
When the processing of the sample is started in these processing chambers 4a to 4c, the current processing end time is predicted from the processing time required for the previous processing in the processing chamber. Then, a pre-processing request is issued to the pre-processing chamber 3 at a time earlier than the predicted time of the end of the processing by a transport time required for transporting the sample from the pre-processing chamber to the processing chamber.

In step S14, when the pre-processing chamber 3 receives a pre-processing request from a specific processing chamber, for example, the processing chamber 4a,
In step S15, the pre-processing is ended, and the end time is stored. Then, in step S16, the sample is transported from the pre-processing chamber 3 to the transfer chamber 1, and the W arm 5 is moved to the processing chamber 4.
Turn to a.

In step S17, the process waits until the requested processing chamber 4a is ready to carry the next sample. When it becomes possible to carry in, in step S18, the elapsed time from the time stored in step S15 is calculated. If the time exceeds the preset allowable time, the process returns to step S11 again, and the sample is transferred to the transfer chamber 1
To the pre-processing chamber 3 to perform the pre-processing again.

In step S18, if the time does not exceed the allowable time, in step S19, the sample is transported from the transfer chamber 1 to the processing chamber 4a, and the processing is performed. Thus, the processing chamber 4
Before the preprocessing request is issued from a to 4c, the preprocessing is started in the preprocessing chamber 3 under predetermined conditions in advance, and after a predetermined time has elapsed since the preprocessing was started, or the preprocessing was started. When a certain condition is satisfied later, while waiting for a pre-processing request from the processing chambers 4a to 4c while continuing the pre-processing, on the other hand, the pre-processing time is longer than the predicted processing end time in the predetermined processing chamber 4a. In order to issue a pre-processing request to the pre-processing chamber 3 at a time earlier by the time required to transfer the sample from the chamber 3 to the processing chamber 4a, the work from the start of the pre-processing to the transfer to the processing chamber 4a Can be executed in a short time without waiting time, and the possibility that a trouble occurs in the processing chamber 4a during this operation can be reduced.

In addition, an allowable time from the end of the preprocessing to the transfer to the processing chamber is set in advance, and when the allowable time is exceeded, the sample is returned to the preprocessing chamber 3 and the preprocessing is performed again. Therefore, the sample after the pre-processing can be processed in the processing chambers 4a to 4c.

[0037]

As described above, according to the present invention, the pretreatment such as heating and position correction is performed on the sample in the pretreatment chamber, and the pretreated sample is transferred to a plurality of processing chambers via the transfer chamber. When the processing is performed by transporting the samples to one, the waiting time from the start of the preprocessing of the sample to the transfer to the processing chamber is eliminated, so that the possibility that a trouble occurs in the processing chamber during this time can be reduced.

Further, even if a trouble occurs in the processing chamber during this time, the preprocessing can be performed again, so that the sample can be processed in another processing chamber. Even if the time from the end of the pre-processing to the transfer to the processing chamber exceeds the allowable time, the pre-processing can be performed again, so that the sample can be processed again in the processing chamber. As described above, even if the processing chamber stops at any timing, processing can be performed in another processing chamber, and the productivity of the apparatus can be improved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an electronic device manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a flowchart of a control method of the electronic device manufacturing apparatus according to the first embodiment of the present invention.

FIG. 3 is a flowchart of a control method of an electronic device manufacturing apparatus according to a second embodiment of the present invention.

FIG. 4 is a configuration diagram of a conventional electronic device manufacturing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Transfer room 3 Pre-processing room 4a Processing room 4b Processing room 4c Processing room

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Atsushi Toizumi 1006 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Inventor Hiroshi Kusumoto 1006 Odaka Kadoma Kadoma City, Osaka Matsushita Electric Industrial F Terms (reference) 3C042 RB32 RB38 RH01 RH05 RJ11 RL11 5F031 CA02 CA05 FA01 FA02 FA12 GA50 MA04 MA30 PA03 PA04 PA10 5F045 BB20 DQ17 EB08 EB11 EB17 EN04 GB17

Claims (10)

[Claims] 1. A pre-processing unit performs pre-processing such as heating and position correction in a pre-processing chamber, and transports the pre-processed sample to one of a plurality of processing chambers via a transfer chamber to perform processing. A pre-processing time required for pre-processing for the processing chamber based on the predicted time of processing completion in the processing chamber, and transporting a sample from the pre-processing chamber to the processing chamber after the completion of the pre-processing. An electronic device, comprising: means for subtracting a transfer time required to perform the processing, and means for issuing a preprocessing request to a preprocessing chamber at a time corresponding to a result obtained by the subtracting means. manufacturing device. 2. At the end of the pre-processing, if the processing chamber to which the sample after the pre-processing is to be transported is in a state where processing cannot be performed,
2. The electronic device manufacturing apparatus according to claim 1, further comprising means for selecting a different processing chamber and performing preprocessing again. 3. If the processing chamber is in a state where processing cannot be performed immediately before transporting the sample after the preprocessing from the preprocessing chamber to the processing chamber via the transfer chamber, the sample is transferred to the preprocessing chamber. 3. The electronic device manufacturing apparatus according to claim 1, further comprising means for returning, selecting a different processing chamber, and performing preprocessing again. 4. A sample is subjected to pre-processing such as heating and position correction in a pre-processing chamber, and the pre-processed sample is transported to one of a plurality of processing chambers via a transfer chamber for processing. Means for starting the pretreatment under predetermined conditions when the sample is transferred to the pretreatment chamber, and for elapse of a predetermined time after the start of the pretreatment or for the pretreatment. Means for waiting for a pre-processing request from the processing chamber while continuing the pre-processing, in which case the pre-processing chamber Means for issuing a preprocessing request to the preprocessing chamber at a time earlier by a transport time required to transport the sample to the processing chamber, and upon receiving the preprocessing request, terminating the preprocessing and terminating the preprocessing chamber Means for transferring the sample to the processing chamber via the transfer chamber. Apparatus for manufacturing an electronic device characterized by. 5. A means for presetting an allowable time from the end of pre-processing to the transfer of a sample to the processing chamber, and an attempt to transfer the pre-processed sample to the processing chamber via the transfer chamber. At this point, if the time limit has been exceeded,
5. The electronic device manufacturing apparatus according to claim 4, further comprising means for returning the sample to the pre-processing chamber and performing the pre-processing again. 6. A pre-processing unit performs pre-processing such as heating and position correction in a pre-processing chamber, and transports the pre-processed sample to one of a plurality of processing chambers via a transfer chamber to perform processing. The preprocessing time required for preprocessing for the processing chamber and the transport required to transport the sample from the preprocessing chamber to the processing chamber after the preprocessing is completed, based on the predicted time of processing completion in the processing chamber. A method for controlling an electronic device manufacturing apparatus, characterized in that a time is subtracted and a preprocessing request is issued to a preprocessing chamber at a time corresponding to a result obtained by the subtraction. 7. At the end of the pre-processing, if the processing chamber to which the sample after the pre-processing is to be transported is in a state where processing cannot be performed,
7. The control method for an electronic device manufacturing apparatus according to claim 6, wherein a different processing chamber is selected and preprocessing is performed again. 8. If the processing chamber is in a state where processing cannot be performed immediately before transporting the sample after the preprocessing from the preprocessing chamber to the processing chamber via the transfer chamber, the sample is transferred to the preprocessing chamber. The method for controlling an electronic device manufacturing apparatus according to claim 6, wherein the preprocessing is performed again by returning the selected processing chamber to a different processing chamber. 9. A sample is subjected to pre-processing such as heating and position correction in a pre-processing chamber, and the pre-processed sample is transported to one of a plurality of processing chambers via a transfer chamber for processing. When the sample is conveyed to the pre-processing chamber, pre-processing is started under preset conditions, and after a certain period of time has elapsed since the start of this pre-processing, or the condition after the start of the pre-processing is satisfied In such a case, while waiting for a pre-processing request from the processing chamber while continuing the pre-processing, the sample is transported from the pre-processing chamber to the processing chamber more than the predicted time of the processing end in the processing chamber. A preprocessing request is issued to the preprocessing chamber at a time earlier by the transport time required for the processing, and when the preprocessing request is received, the preprocessing is terminated and the sample in the preprocessing chamber is processed through the transfer chamber. Control of electronic device manufacturing equipment characterized by being transported to a room Your way. 10. An allowable time from when the preprocessing is completed to when the sample is transported to the processing chamber is set in advance, and when the sample after the preprocessing is to be transported to the processing chamber via the transfer chamber. , If the time has exceeded
10. The control method for an electronic device manufacturing apparatus according to claim 9, wherein the sample is returned to a pre-processing chamber and pre-processing is performed again.