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JP2001118701A - Low-resistance resistor for detecting current and its manufacturing method - Google Patents

Low-resistance resistor for detecting current and its manufacturing method

Info

Publication number
JP2001118701A
JP2001118701A JP29687599A JP29687599A JP2001118701A JP 2001118701 A JP2001118701 A JP 2001118701A JP 29687599 A JP29687599 A JP 29687599A JP 29687599 A JP29687599 A JP 29687599A JP 2001118701 A JP2001118701 A JP 2001118701A
Authority
JP
Japan
Prior art keywords
pair
low
resistor
plate
electrode pads
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29687599A
Other languages
Japanese (ja)
Other versions
JP4503122B2 (en
Inventor
Keiji Nakamura
圭史 仲村
Mikio Tatsukuchi
幹男 辰口
Katsumi Takagi
克己 高木
Hideji Kawaguchi
秀司 河口
Hiroshi Kato
博 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koa Corp
Original Assignee
Koa Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koa Corp filed Critical Koa Corp
Priority to JP29687599A priority Critical patent/JP4503122B2/en
Publication of JP2001118701A publication Critical patent/JP2001118701A/en
Application granted granted Critical
Publication of JP4503122B2 publication Critical patent/JP4503122B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a low-resistance resistor for detecting current which can be reduced in manufacturing cost by simplifying its manufacturing process and reducing the number of parts and, at the same time, can be improved in heat radiating property, and a method for manufacturing the resistor. SOLUTION: A low-resistance resistor 1 for measuring current has a recessed groove 3 formed by cutting the central part of the rear surface of a rectangular flat metallic resistance body 2 having a thickness of about 1-2 mm. On the front surface of the resistance body 2, a pair of electrode pads 4 and 4 for bonding is formed by successively plating copper and nickel in the central parts of both end sections. On the rear surface of the body 2, in addition, a pair of electrodes 5 and 5 to be connected to a printed board, etc., is formed by successively plating copper, nickel, and solder in both end sections on both sides of the groove 3.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電流検出用低抵抗
器及びその製造方法に係り、特にワイヤボンディングに
より外部回路と接続するための電極を備えた電流検出用
低抵抗器及びその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a current detecting low resistor and a method of manufacturing the same, and more particularly to a current detecting low resistor having an electrode for connecting to an external circuit by wire bonding and a method of manufacturing the same. .

【0002】[0002]

【従来の技術】従来、電流検出用低抵抗器としては、図
7に示すような構造のものが知られている。これは、マ
ンガニン板等からなる金属製低抵抗体41と放熱用の銅
板42とが、絶縁体であるアルミナ板43を挟んで積層
され、裏面側の銅板42上にプリント基板等への接着用
の金メッキ層44が形成されている。一方、金属製低抵
抗体41の表面両端部にニッケルメッキが施されて一対
のボンディング用電極パッド45が形成されている。
2. Description of the Related Art Conventionally, as a low resistor for current detection, one having a structure as shown in FIG. 7 is known. This is because a low-resistance metal plate 41 made of a manganin plate or the like and a copper plate 42 for heat dissipation are laminated with an alumina plate 43 serving as an insulator interposed therebetween, and the copper plate 42 on the back side is used for bonding to a printed board or the like. Gold plated layer 44 is formed. On the other hand, both ends of the surface of the metal low-resistance body 41 are plated with nickel to form a pair of bonding electrode pads 45.

【0003】このような電流検出用低抵抗器は、金メッ
キ層44を介してプリント基板等に実装され、一対の電
極パッド45にワイヤボンディングが施されて、金属製
低抵抗体41を流れる電流の大きさを測定できるように
なっている。
[0003] Such a current detecting low resistor is mounted on a printed circuit board or the like via a gold plating layer 44, and wire bonding is performed on a pair of electrode pads 45, so that a current flowing through the metal low resistor 41 is detected. The size can be measured.

【0004】この電流検出用低抵抗器は、次のようにし
て製造される。即ち、先ず、シート状の放熱用の銅板4
2とアルミナ板43と金属製低抵抗体41とをこの順に
積層し、3層の多数個取り用の積層体を形成する。次い
で、銅板2上にレジストを被着し、パターニングを行っ
て切断予定部にレジストパターンを形成した後、切断予
定部以外に金メッキを施し、その後前記レジストパター
ンを剥離して、切断予定部によって区切られた金メッキ
層44がマトリックス状に配置される。次いで、金属製
低抵抗体41の表面にレジストを被着し、パターニング
を行って一対の電極パッド予定部に開口したレジストパ
ターンを形成する。そして、該開口部にニッケルメッキ
を施し、その後前記レジストパターンを剥離する。これ
により、一対の電極パッド45をマトリックス状に形成
する。
[0004] This current detecting low resistor is manufactured as follows. That is, first, the sheet-shaped heat-dissipating copper plate 4
2, the alumina plate 43, and the metal low-resistance body 41 are laminated in this order to form a three-layer, multi-cavity laminate. Next, a resist is applied on the copper plate 2 and patterned to form a resist pattern on the portion to be cut. Then, gold plating is applied to portions other than the portion to be cut, and then the resist pattern is peeled off and separated by the portion to be cut. The gold plating layers 44 thus arranged are arranged in a matrix. Next, a resist is applied to the surface of the metal low-resistance body 41, and patterning is performed to form a resist pattern having openings in a pair of electrode pad planned portions. Then, the opening is plated with nickel, and then the resist pattern is peeled off. Thus, a pair of electrode pads 45 are formed in a matrix.

【0005】次いで、金属製低抵抗体41の表面にレジ
ストを被着し、パターニングを行って切断予定部以外の
部分にレジストパターンを形成した後、エッチングを行
って切断予定部の金属製低抵抗体41を除去する。その
後、前記レジストパターンを剥離して、シート状の多数
個取りの基板から個々の抵抗器に切断するための切断溝
を形成する。次いで、同様にして裏面側の銅板42上に
切断予定部以外の部分にレジストパターンを形成した
後、エッチングを行って切断予定部の銅板42を除去す
る。その後、前記レジストパターンを剥離して、シート
状の多数個取りの基板から個々の抵抗器に分割するため
の切断溝を形成する。次いで、レーザー等により各金属
製低抵抗体41のトリミング調整を行う。次いで、前記
切断溝に沿って切断し、個々のチップ状の低抵抗器を得
る。
[0005] Next, a resist is applied to the surface of the metal low-resistance body 41, patterning is performed to form a resist pattern in a portion other than the portion to be cut, and then etching is performed to remove the metal low-resistance in the portion to be cut. The body 41 is removed. Thereafter, the resist pattern is peeled off to form a cutting groove for cutting each resistor from the sheet-shaped multi-piece substrate. Next, after a resist pattern is formed on the copper plate 42 on the rear surface side in a portion other than the portion to be cut in the same manner, etching is performed to remove the copper plate 42 at the portion to be cut. Thereafter, the resist pattern is peeled off to form a cutting groove for dividing the sheet-shaped multi-piece substrate into individual resistors. Next, trimming adjustment of each metal low-resistance body 41 is performed by a laser or the like. Next, cutting is performed along the cutting grooves to obtain individual chip-shaped low resistors.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、上記従
来の電流測定用低抵抗器においては、製造工程が複雑で
あると共に部品点数が多いため、製造コストが高くなる
という問題がある。また、アルミナ板を介在させている
ため、必然的に放熱性が劣るという問題がある。また、
電極のワイヤボンディング時に抵抗値の測定精度にバラ
ツキが生じるという問題がある。
However, the conventional low resistance for current measurement has a problem that the manufacturing process is complicated and the number of parts is large, so that the manufacturing cost is high. In addition, since the alumina plate is interposed, there is a problem that heat radiation is necessarily inferior. Also,
There is a problem that the accuracy of measuring the resistance value varies during wire bonding of the electrodes.

【0007】本発明は上記事情に鑑みて為されたもの
で、製造工程が簡素でかつ部品点数が少なくて製造コス
トを低減することができると共に、放熱性に優れた電流
検出用低抵抗器及びその製造方法を提供することを目的
とする。
The present invention has been made in view of the above circumstances, and has a simple manufacturing process, a small number of parts, a low manufacturing cost, and a current detecting low resistor excellent in heat dissipation. It is an object of the present invention to provide a manufacturing method thereof.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、請求項1に記載の電流検出用低抵抗器は、板状の金
属製抵抗体の裏面中央部が切削されて凹部が形成され、
表面両端部に一対のボンディング用電極パッドが形成さ
れ、前記凹部に隣接する裏面両端部に一対の接続用電極
が形成されたことを特徴とする。
According to a first aspect of the present invention, there is provided a low current detecting resistor according to the first aspect, wherein a central portion of a rear surface of a plate-shaped metal resistor is cut to form a concave portion. ,
A pair of bonding electrode pads are formed at both ends of the front surface, and a pair of connection electrodes are formed at both ends of the rear surface adjacent to the recess.

【0009】これにより、板状の金属製抵抗体材料に切
削加工を行うと共に、表裏面にそれぞれ一対の電極パッ
ド及び一対の接続用電極を形成することにより製造する
ことができるので、製造工程が簡素になる。また、金属
製抵抗体材料の板により形成されるので、部品点数が少
ない。従って、製造コストを低減することできる。ま
た、金属製抵抗体材料により形成されているので、放熱
性に優れている。
[0009] This makes it possible to cut the plate-shaped metal resistor material and to form a pair of electrode pads and a pair of connection electrodes on the front and back surfaces, respectively. Become simple. In addition, the number of components is small because the resistor is formed of a metal resistor material plate. Therefore, manufacturing costs can be reduced. Also, since it is formed of a metal resistor material, it has excellent heat dissipation.

【0010】請求項2に記載の電流検出用低抵抗器の製
造方法は、板状の金属製抵抗体材料の表裏面にそれぞ
れ、レジストパターンを形成した後、電解メッキを施し
て表面側に一対の電極パッド及び裏面側に一対の接続用
電極を形成し、前記金属製抵抗体材料における前記一対
の接続用電極間の部分を切削することで凹部を形成する
ことを特徴とする。これにより、レジストパターンを用
いて電解メッキを施すと共に、切削加工を行うことによ
り簡単に電流検出用低抵抗器を製造することができる。
According to a second aspect of the present invention, there is provided a method for manufacturing a low-resistance resistor for current detection, wherein a resist pattern is formed on each of the front and back surfaces of a plate-shaped metal resistor material, and then a pair of electrolytic plating is performed on the front surface. A pair of connection electrodes are formed on the electrode pad and the back surface side, and a concave portion is formed by cutting a portion between the pair of connection electrodes in the metal resistor material. This makes it possible to easily manufacture a current detection low resistor by performing electrolytic plating using the resist pattern and performing cutting.

【0011】請求項3に記載の電流検出用低抵抗器の製
造方法は、板状の金属製抵抗体材料の表裏面にそれぞ
れ、メッキ用フィルムマスクを施した後、電解メッキを
施して表面側に一対の電極パッド及び裏面側に一対の接
続用電極を形成し、前記金属製抵抗体材料における前記
一対の接続用電極間の部分を切削することで凹部を形成
することを特徴とする。これにより、メッキ用フィルム
マスクを用いて電解メッキを施すと共に、切削加工する
ことにより簡単に電流検出用低抵抗器を製造することが
できる。
According to a third aspect of the present invention, there is provided a method for manufacturing a current detecting low resistor, comprising: applying a plating film mask to each of the front and back surfaces of a plate-shaped metal resistor material; A pair of electrode pads and a pair of connection electrodes are formed on the back surface side, and a concave portion is formed by cutting a portion between the pair of connection electrodes in the metal resistor material. Thus, the current detecting low resistor can be easily manufactured by performing the electrolytic plating using the plating film mask and performing the cutting process.

【0012】請求項4に記載の電流検出用低抵抗器は、
前記一対の電極パッドは、銅メッキが施され、さらにニ
ッケルメッキが施されて形成されていることを特徴とす
る。これにより、銅メッキが施されているため、抵抗値
のバラツキの精度が改善される。
According to a fourth aspect of the present invention, there is provided a current detecting low resistor.
The pair of electrode pads are formed by performing copper plating and further performing nickel plating. Thereby, since the copper plating is performed, the accuracy of the variation in the resistance value is improved.

【0013】[0013]

【発明の実施の形態】以下、本発明の実施の形態を図面
を参照して説明する。図1及び図2に示すように、本実
施の形態に係る電流測定用低抵抗器1は、マンガニン
板、銅−ニッケル板或いはニッケル−クロム板等からな
る厚さ1〜2mm程度の長方形板状の金属製抵抗体2の
裏面中央部が切削されて、図示するような凹溝(凹部)
3が形成されている。金属製抵抗体2の表面両端部(肉
厚部)の中央部には、銅メッキが施され、さらにニッケ
ルメッキが施されて一対のボンディング用電極パッド
4,4が形成されている。また、金属製抵抗体2の裏面
の凹溝3を挟んだ両端部(肉厚部)には、ニッケルメッ
キさらに半田メッキが順次施されてプリント基板等への
一対の接続用電極5,5が形成されている。
Embodiments of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 and 2, the current measuring low resistor 1 according to the present embodiment is a rectangular plate having a thickness of about 1 to 2 mm made of a manganin plate, a copper-nickel plate, a nickel-chromium plate, or the like. The central portion of the back surface of the metal resistor 2 is cut to form a concave groove (recess) as shown in the figure.
3 are formed. Copper plating is applied to the center of both end portions (thick portions) of the surface of the metal resistor 2 and nickel plating is applied to form a pair of bonding electrode pads 4 and 4. Nickel plating and solder plating are sequentially applied to both ends (thick portions) of the metal resistor 2 with the concave groove 3 interposed therebetween, so that a pair of connection electrodes 5 and 5 to a printed board or the like are provided. Is formed.

【0014】この電流検出用低抵抗器1は、プリント基
板等に実装され、一対の電極5,5に電流用端子が接続
される。一方、一対の電極パッド4,4にセンス電圧測
定のためのワイヤボンディングが為されて、その間の電
圧をセンス電圧として測定することができる。これによ
り、金属製抵抗体1を流れる電流の大きさを測定でき
る。
The current detecting low resistor 1 is mounted on a printed circuit board or the like, and a current terminal is connected to the pair of electrodes 5 and 5. On the other hand, the wire bonding for measuring the sense voltage is performed on the pair of electrode pads 4 and 4, and the voltage between them can be measured as the sense voltage. Thereby, the magnitude of the current flowing through the metal resistor 1 can be measured.

【0015】この電流検出用低抵抗器1にあっては、板
状の金属製抵抗体材料を切削加工して裏面中央部に凹溝
3を形成すると共に、表裏面にそれぞれ一対の電極パッ
ド4,4及び一対の接続用電極5,5を形成することに
より製造することができるので、製造工程を簡素化する
ことができる。また、金属製抵抗体材料の板から製造す
ることができるので、部品点数を低減することができ
る。このため、製造コストを低減することができる。さ
らに、金属製抵抗体材料により形成されているので、放
熱性を向上させることができる。さらには、一対のボン
ディング用電極パッド4,4に銅メッキが施されている
ので、抵抗値のバラツキの精度を向上させることができ
る。
In this current detecting low resistor 1, a plate-shaped metal resistor material is cut to form a concave groove 3 in the center of the back surface, and a pair of electrode pads 4 are formed on the front and back surfaces, respectively. , 4 and a pair of connection electrodes 5, 5, so that the manufacturing process can be simplified. In addition, since it can be manufactured from a metal resistor material plate, the number of parts can be reduced. For this reason, manufacturing costs can be reduced. Furthermore, since it is formed of a metal resistor material, heat dissipation can be improved. Further, since the pair of bonding electrode pads 4 and 4 are plated with copper, it is possible to improve the accuracy of the variation in the resistance value.

【0016】次に、電流検出用低抵抗器1の製造方法
を、図3(a)〜(c)を参照しつつ説明する。先ず、
マンガニン板、銅−ニッケル板、或いはニッケル−クロ
ム板等からなる例えば10cm角の厚さ1〜2mm程度
のシート状の金属板(金属製抵抗体材料)11を準備す
る。次いで、図3(a)に示すように、この金属板11
の裏面に、接続用電極5,5を帯状に形成する。これ
は、接続用電極5,5予定部以外の部分にレジストパタ
ーン12を形成し、その開口部にニッケルメッキ、半田
メッキを連続して行うことによる。次いで、レジストパ
ターン12を剥離する。次いで、図3(b)に示すよう
に、一対の電極5,5間を機械加工あるいはレーザー加
工等により約半分程度の厚さになるように切削して、凹
溝3を形成する。
Next, a method of manufacturing the current detecting low resistor 1 will be described with reference to FIGS. First,
A sheet-shaped metal plate (metal resistor material) 11 of, for example, about 10 cm square and having a thickness of about 1 to 2 mm, which is made of a manganin plate, a copper-nickel plate, a nickel-chrome plate, or the like, is prepared. Next, as shown in FIG.
The connection electrodes 5 and 5 are formed in a strip shape on the back surface of the. This is because the resist pattern 12 is formed in portions other than the portions where the connection electrodes 5 and 5 are to be formed, and nickel and solder plating are continuously performed on the openings. Next, the resist pattern 12 is peeled off. Next, as shown in FIG. 3B, the groove 3 is formed by cutting the space between the pair of electrodes 5 and 5 by machining or laser processing so as to have a thickness of about half.

【0017】次いで、図3(c)に示すように、金属板
11の表面に、電極パッド4,4をマトリックス状に形
成する。これは、電極パッド4,4予定部以外の部分に
レジストパターン13を形成し、その開口部に銅メッ
キ、ニッケルメッキを連続して行うことによる。次い
で、レジストパターン13を剥離する。次いで、縦方向
及び横方向に切断線14に沿って切断して、個々のチッ
プ状の低抵抗器1が得られる。次いで、レーザー等によ
り切り込みを入れてトリミング調整を行う。次いで、測
定検査した後、自動テーピング装置により順次テーピン
グする。
Next, as shown in FIG. 3C, electrode pads 4 and 4 are formed in a matrix on the surface of the metal plate 11. This is because the resist pattern 13 is formed in a portion other than the portions where the electrode pads 4 and 4 are to be formed, and copper and nickel plating are continuously performed on the opening. Next, the resist pattern 13 is peeled off. Next, cutting is performed along the cutting line 14 in the vertical and horizontal directions to obtain individual chip-shaped low resistors 1. Next, trimming adjustment is performed by making a cut with a laser or the like. Next, after the measurement and inspection, taping is sequentially performed by an automatic taping device.

【0018】なお、本実施の形態の製造方法では、角板
状の金属板11を用いてマトリックス状に多数の低抵抗
器1を製造するようにしたが、帯状の金属板を用いて低
抵抗器1を一列に連続的に製造するようにしても良い。
In the manufacturing method of the present embodiment, a large number of low resistors 1 are manufactured in a matrix using the square metal plate 11, but the low resistance is manufactured using the strip metal plate. The containers 1 may be manufactured continuously in a line.

【0019】図4及び図5は、本発明の他の実施の形態
に係る電流測定用低抵抗器21を示す平面図及び側面図
である。なお、これらの図において、図1及び図2と同
一構成要素には同一符号を付してその説明を簡略化す
る。この電流測定用低抵抗器21は、一対のボンディン
グ用電極パッド24,24が金属製抵抗体2の表面両端
部全面に形成されている点、及び一対の接続用電極2
5,25が銅メッキ、ニッケルメッキ、さらに半田メッ
キが施されて形成されている点で、上記電流測定用低抵
抗器1と異なるが、他の構成は同一である。
FIG. 4 and FIG. 5 are a plan view and a side view showing a current measuring low resistor 21 according to another embodiment of the present invention. In these drawings, the same components as those in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be simplified. The current measuring low resistor 21 has a pair of bonding electrode pads 24, 24 formed on the entire surface of both ends of the surface of the metal resistor 2.
5 and 25 are formed by applying copper plating, nickel plating, and further solder plating, which are different from the above-described low resistance 1 for current measurement, but other configurations are the same.

【0020】次に、この電流検出用低抵抗器21の製造
方法を、図6(a)〜(g)を参照しつつ説明する。な
お、これらの図において、図3(a)〜(c)と同一構
成要素には同一符号を付してその説明を簡略化する。先
ず、図6(a)に示すように、マンガニン板、銅−ニッ
ケル板或いはニッケル−クロム板等からなる厚さ1〜2
mm程度の帯状の金属板(金属製抵抗体材料)31の表
裏面に長手方向に沿って両側端部を除いて、それぞれ例
えば有機系の耐酸性テープ等のメッキ用フィルムマスク
32a、32bを貼付する。次いで、図6(b)に示す
ように、金属板31の表裏面のフィルムマスク32a、
32b以外の部分にそれぞれ、銅メッキ、さらにニッケ
ルメッキを施し、銅メッキ層及びニッケルメッキ層から
なる一対の電極パッド24,24及び一対の電極25,
25を金属板31の両側端部に連続して帯状に形成す
る。次いで、図6(c)及び図6(d)示すように、前
記フィルムマスク32a,32bを剥離する。
Next, a method for manufacturing the current detecting low resistor 21 will be described with reference to FIGS. 6 (a) to 6 (g). Note that, in these figures, the same components as those in FIGS. 3A to 3C are denoted by the same reference numerals, and description thereof will be simplified. First, as shown in FIG. 6A, a thickness of 1 to 2 made of a manganin plate, a copper-nickel plate, a nickel-chrome plate, or the like is used.
Attaching plating film masks 32a and 32b, such as organic acid-resistant tapes, respectively, to the front and back surfaces of a strip-shaped metal plate (metal resistor material) 31 of about mm except for both side ends along the longitudinal direction. I do. Next, as shown in FIG. 6B, the film masks 32 a on the front and back surfaces of the metal plate 31,
Copper plating and further nickel plating are applied to portions other than 32b, respectively, and a pair of electrode pads 24 and 24 and a pair of electrodes 25 and
25 are continuously formed on both sides of the metal plate 31 in a strip shape. Next, as shown in FIGS. 6C and 6D, the film masks 32a and 32b are peeled off.

【0021】次いで、図6(e)及び図6(f)に示す
ように、金属板31の電極25,25間の部分を、機械
加工あるいはレーザー加工等により約半分程度の厚さに
なるように切削して、凹溝3を連続して形成する。次い
で、半田メッキ用マスキングをした後、一対の電極2
5,25に半田メッキを施す。次いで、図6(e)にお
ける一点鎖線で示すように切断して個々のチップ状の低
抵抗器1にした後、図6(g)に示すように、低抵抗器
1にレーザー等により切り込みKを入れてトリミング調
整を行う。次いで、測定検査した後、自動テーピング装
置により順次テーピングする。
Next, as shown in FIGS. 6 (e) and 6 (f), the portion between the electrodes 25, 25 of the metal plate 31 is reduced to about half the thickness by machining or laser machining. And the concave groove 3 is continuously formed. Next, after masking for solder plating, a pair of electrodes 2
5, 25 are plated with solder. Next, after cutting as shown by a dashed line in FIG. 6E to obtain individual chip-shaped low-resistance devices 1, as shown in FIG. To adjust the trimming. Next, after the measurement and inspection, taping is sequentially performed by an automatic taping device.

【0022】なお、この実施の形態の製造方法では、帯
状の金属板31を用いたが、これに代えて、角板状の金
属製抵抗体材料を用いてマトリックス状に多数の低抵抗
器1を同時に製造するようにしても良い。
Although the band-shaped metal plate 31 is used in the manufacturing method of this embodiment, a large number of low-resistance resistors 1 may be formed in a matrix using a square-plate-shaped metal resistor material instead. May be manufactured at the same time.

【0023】[0023]

【発明の効果】以上説明したように、本発明によれば、
板状の金属製低抵抗体材料をプレス加工すると共に、表
裏面にそれぞれ一対の電極パッド及び一対の接続用電極
を形成することにより製造することができるため、その
製造工程を簡素化することができる。そして、板状の金
属製低抵抗体材料から製造することができるため、部品
点数を低減することができるので、製造コストの低減を
図ることが可能である。さらに、金属製低抵抗体材料に
より形成されているので、放熱性を向上させることがで
きる。また、一対の電極パッドは銅メッキが施されてい
るため、抵抗値のバラツキの精度が改善される。
As described above, according to the present invention,
Since it can be manufactured by pressing a plate-shaped metal low-resistance material and forming a pair of electrode pads and a pair of connection electrodes on the front and back surfaces respectively, the manufacturing process can be simplified. it can. And since it can be manufactured from a plate-shaped metal low-resistance material, the number of parts can be reduced, and the manufacturing cost can be reduced. Furthermore, since it is formed of a metal low-resistance material, heat dissipation can be improved. In addition, since the pair of electrode pads are plated with copper, the accuracy of resistance value variation is improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態に係る電流検出用低抵抗器
を示す平面図である。
FIG. 1 is a plan view showing a current detection low resistor according to an embodiment of the present invention.

【図2】図1の側面図である。FIG. 2 is a side view of FIG.

【図3】本発明の実施の形態に係る電流検出用低抵抗器
の製造方法を説明するための図であって、図3(a)は
背面図、図3(b)は側面図、図3(c)は平面図であ
る。
3A and 3B are views for explaining a method of manufacturing the current detection low resistor according to the embodiment of the present invention, wherein FIG. 3A is a rear view, FIG. 3B is a side view, and FIG. FIG. 3C is a plan view.

【図4】本発明の他の実施の形態に係る電流検出用低抵
抗器を示す平面図である。
FIG. 4 is a plan view showing a current detection low resistor according to another embodiment of the present invention.

【図5】図4の側面図である。FIG. 5 is a side view of FIG. 4;

【図6】本発明の他の実施の形態に係る電流検出用低抵
抗器の製造方法を説明するための図であって、図6
(a)〜図6(c)は平面図、図6(d)は断面図、図
6(e)は背面図、図6(f)は断面図、図6(g)は
側面図である。
FIG. 6 is a diagram for explaining a method of manufacturing a current detection low resistor according to another embodiment of the present invention.
6 (a) to 6 (c) are plan views, FIG. 6 (d) is a cross-sectional view, FIG. 6 (e) is a rear view, FIG. 6 (f) is a cross-sectional view, and FIG. 6 (g) is a side view. .

【図7】従来の電流検出用低抵抗器を示す側面図であ
る。
FIG. 7 is a side view showing a conventional low resistor for current detection.

【符号の説明】[Explanation of symbols]

1,21 電流検出用低抵抗器 2 金属製抵抗体 3 凹溝(凹部) 4,24 電極パッド 5,25 接続用電極 11,31 金属板(金属製抵抗体材料) 12,13 レジストパターン 32 メッキ用フィルムマスク 1, 21 Low resistance for current detection 2 Metal resistor 3 Groove (recess) 4, 24 Electrode pad 5, 25 Connection electrode 11, 31 Metal plate (Metal resistor material) 12, 13 Resist pattern 32 Plating For film mask

フロントページの続き (72)発明者 高木 克己 長野県上伊那郡箕輪町大字中箕輪14016 コーア株式会社内 (72)発明者 河口 秀司 長野県上伊那郡箕輪町大字中箕輪14016 コーア株式会社内 (72)発明者 加藤 博 長野県上伊那郡箕輪町大字中箕輪14016 コーア株式会社内 Fターム(参考) 5E028 AA10 BA21 BB01 CA02 DA04 JA00 JB00 JC03 JC06 5E032 AB10 BA21 BB01 CA02 CC11 CC14 5E033 AA00 BC07 BD01 BG03 BH01Continued on the front page (72) Inventor Katsumi Takagi 14016 Nakaminowa, Minowa-machi, Kamiina-gun, Nagano Prefecture Inside the Koa Co., Ltd. Person Hiroshi Kato 14016 Nakaminowa, Minowa-cho, Kamiina-gun, Nagano Prefecture F-term (reference) 5E028 AA10 BA21 BB01 CA02 DA04 JA00 JB00 JC03 JC06 5E032 AB10 BA21 BB01 CA02 CC11 CC14 5E033 AA00 BC07 BD01 BG03 BH01

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 板状の金属製抵抗体の裏面中央部が切削
されて凹部が形成され、表面両端部に一対のボンディン
グ用電極パッドが形成され、前記凹部に隣接する裏面両
端部に一対の接続用電極が形成されたことを特徴とする
電流検出用低抵抗器。
1. A central portion of a rear surface of a plate-shaped metal resistor is cut to form a recess, a pair of bonding electrode pads are formed at both ends of the front surface, and a pair of bonding electrode pads are formed at both ends of the rear surface adjacent to the recess. A low resistance for current detection, wherein a connection electrode is formed.
【請求項2】 板状の金属製抵抗体材料の表裏面にそれ
ぞれ、レジストパターンを形成した後、電解メッキを施
して表面側に一対の電極パッド及び裏面側に一対の接続
用電極を形成し、 前記金属製抵抗体材料における前記一対の接続用電極間
の部分を切削することで凹部を形成することを特徴とす
る電流検出用低抵抗器の製造方法。
2. After forming a resist pattern on each of the front and back surfaces of the plate-shaped metal resistor material, electrolytic plating is performed to form a pair of electrode pads on the front surface side and a pair of connection electrodes on the back surface side. A method for manufacturing a low-resistance resistor for current detection, characterized in that a concave portion is formed by cutting a portion between the pair of connection electrodes in the metal resistor material.
【請求項3】 板状の金属製抵抗体材料の表裏面にそれ
ぞれ、メッキ用フィルムマスクを施した後、電解メッキ
を施して表面側に一対の電極パッド及び裏面側に一対の
接続用電極を形成し、 前記金属製抵抗体材料における前記一対の接続用電極間
の部分を切削することで凹部を形成することを特徴とす
る電流検出用低抵抗器の製造方法。
3. A plating film mask is formed on each of the front and back surfaces of a plate-shaped metal resistor material, and then electrolytic plating is performed to form a pair of electrode pads on the front side and a pair of connection electrodes on the back side. Forming a recess between the pair of connection electrodes in the metal resistor material to form a concave portion.
【請求項4】 前記一対の電極パッドは、銅メッキが施
され、さらにニッケルメッキが施されて形成されている
ことを特徴とする請求項1に記載の電流検出用低抵抗
器。
4. The current detection low resistor according to claim 1, wherein said pair of electrode pads are formed by applying copper plating and further applying nickel plating.
JP29687599A 1999-10-19 1999-10-19 Low resistor for current detection and method for manufacturing the same Expired - Lifetime JP4503122B2 (en)

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DE102013101857A1 (en) 2012-02-28 2013-08-29 Denso Corporation Semiconductor module with switching elements
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