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JP2001130963A - Method for producing isotropic high-density carbon material - Google Patents

Method for producing isotropic high-density carbon material

Info

Publication number
JP2001130963A
JP2001130963A JP31152499A JP31152499A JP2001130963A JP 2001130963 A JP2001130963 A JP 2001130963A JP 31152499 A JP31152499 A JP 31152499A JP 31152499 A JP31152499 A JP 31152499A JP 2001130963 A JP2001130963 A JP 2001130963A
Authority
JP
Japan
Prior art keywords
carbon material
producing
density
isotropic
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP31152499A
Other languages
Japanese (ja)
Inventor
Keiichi Hirata
平田恵一
Yoshihiko Kitatsume
北爪良彦
Yutaka Yamaguchi
豊 山口
Kunio Ikegame
池亀邦男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Carbon Co Ltd
Original Assignee
Nippon Carbon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Carbon Co Ltd filed Critical Nippon Carbon Co Ltd
Priority to JP31152499A priority Critical patent/JP2001130963A/en
Publication of JP2001130963A publication Critical patent/JP2001130963A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a method for producing an isotropic carbon material by which the carbon material having a density higher than that of the conventional one, >=1.85 g/cc bulk density can be produced without causing crack in high yield. SOLUTION: This method for producing an isotropic carbon material is characterized in that a compact obtained by pulverizing carbonic cokes so as to have 4-20 μm size heat-treating the pulverized cokes at >=2,000 deg.C, mixing and kneading the heat-treated cokes with a binder pitch in 100-150% outer percentage, further subjecting the kneaded product to a kneading treatment at 300 deg.C to remove volatile components, repulverizing the treated product to provide fine powder having 10-30 μm average particle diameter, and subjecting the obtained fine powder to a cold isotactic pressing molding is subjected to a heat treatment at 2,000-3,000 deg.C in a nitrogen or reductive atmosphere to fire and graphitize the compact, after once or twice optional densifying treatments, and graphite boards having good thermal conductivity are set on upper and lower surface of the compact in the heat treatment for firing or densifying.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【技術分野】本発明は等方性高密度炭素材に関し、より
詳しくは、繰返し行われる含浸再焼成による緻密化処理
を最小限にとどめ、高密度の等方性炭素材を焼成工程、
黒鉛化工程でのクラックの発生等を抑制し、得率良く安
価にできる製造方法に関する。
TECHNICAL FIELD The present invention relates to an isotropic high-density carbon material, and more particularly, to a step of firing a high-density isotropic carbon material by minimizing the densification treatment by repeated impregnation and refiring.
The present invention relates to a production method capable of suppressing the occurrence of cracks in the graphitization step and achieving good yield and low cost.

【0002】[0002]

【従来技術】従来より等方性高密度炭素材は、半導体単
結晶製造用のルツボや放電加工用電極、ホットプレス用
ダイス、各種治具材など多くの用途に使用されている。
2. Description of the Related Art Conventionally, isotropic high-density carbon materials have been used in many applications such as crucibles for producing semiconductor single crystals, electrodes for electric discharge machining, dies for hot pressing, and various jig materials.

【0003】特にシリコン単結晶製造用のルツボやヒ−
タ等の部品は、等方性炭素材の重要な用途であるが、こ
のシリコン単結晶製造においては、原料シリコンと石英
ルツボの反応によって生成するSiOによる浸食が問題
となる。
[0003] In particular, crucibles and heat sinks for producing silicon single crystals.
Although components such as copper are important uses of isotropic carbon materials, erosion by SiO generated by the reaction between raw silicon and quartz crucibles becomes a problem in the production of silicon single crystals.

【0004】そこで等方性炭素材は、SiOとの反応を
抑制するため、高密度化し、空隙率を低くして、SiO
ガスの素材内部への拡散を抑制する方向で材料の開発が
検討されている。
[0004] Therefore, the isotropic carbon material is made to have a high density and a low porosity in order to suppress the reaction with SiO, and to suppress the reaction with SiO.
Development of materials is being studied in the direction of suppressing the diffusion of gas into the material.

【0005】一般に等方性炭素材の製造法は、原料コ−
クス粉にバインダ−ピッチを添加して混合、混捏して再
粉砕した後、冷間静水圧加圧法により成形し、成形体を
焼成化および黒鉛化する方法が通例である。
[0005] In general, a method for producing an isotropic carbon material is based on a raw material core.
In general, a method of adding binder-pitch to flour powder, mixing, kneading, and re-grinding, then molding by a cold isostatic pressing method, and calcining and graphitizing the molded body is customary.

【0006】等方性炭素材をより高密度化するために、
焼成後にコ−ルタ−ルピッチ等を含浸し、焼成するとい
う工程を繰り返すことが黒鉛化処理の前に実施されてい
るが、この高密度化処理(緻密化処理)は最低3回は繰
り返しが必要である。
In order to increase the density of the isotropic carbon material,
The process of impregnating with a cold pitch or the like after firing and firing is repeated before the graphitization process, but this densification process (densification process) needs to be repeated at least three times. It is.

【0007】したがって高密度化処理はコスト高な方法
であり、また高密度化処理を進めると、炭素材にクラッ
ク等の不具合が発生し易く、得率の面でも好ましくな
い。
Therefore, the densification treatment is an expensive method, and if the densification treatment is advanced, defects such as cracks are likely to occur in the carbon material, which is not preferable in terms of the yield.

【0008】また等方性炭素材は、焼成(炭素化)時間
が長時間を要するものであり、焼成工程の短縮も課題と
なっている。
The isotropic carbon material requires a long firing (carbonization) time, and shortening the firing process is also an issue.

【0009】そこで、等方性炭素材の製造方法に関し、
高密度の材料を、安価に得率良く得るために種々の方法
が試みられている。例えば、特開平5−229810号
には、優れた材質強度と正常な材質組織を有する等方性
高密度黒鉛材を安定かつ効率的に製造する方法を提供す
る発明が記載されている。
Therefore, a method for producing an isotropic carbon material is described below.
Various methods have been attempted in order to obtain a high-density material at a low cost and with good yield. For example, JP-A-5-229810 describes an invention which provides a method for stably and efficiently producing an isotropic high-density graphite material having excellent material strength and a normal material structure.

【0010】特開平5−229810号の特許請求の範
囲は、「 最大粒子径が10μm以下の非黒鉛性炭素質
を主体とする骨材成分100重量部に対してピッチ系バ
インダ−70〜110重量部を添加捏合し、混練物を粗
粉砕したのち250〜450℃の温度域で熱処理するこ
とによってトルエン可溶分およびβ−レジン分が各5〜
15重量%の範囲になるように揮発分調整し、再度粉砕
してラバ−プレスにより所定形状に成形し、ついで焼成
炭化および黒鉛化処理を施すことを特徴とする等方性高
密度黒鉛材の製造方法。」であり、同号においては、バ
インダ−中のトルエン可溶分と併せてβレジン分を一定
範囲に揮発分調整し焼成時の材質損傷を伴うことなし
に、安定して高強度の等方性高密度黒鉛材を製造し得る
とするものである。
The claims of Japanese Patent Application Laid-Open No. 5-229810 disclose that "a pitch-based binder is used in an amount of 70 to 110 parts by weight per 100 parts by weight of an aggregate component mainly composed of non-graphitic carbonaceous material having a maximum particle size of 10 μm or less. Parts are kneaded, and the kneaded material is roughly pulverized and then heat-treated in a temperature range of 250 to 450 ° C so that the toluene-soluble content and the β-resin content are each 5 to 5 parts.
The volatile content is adjusted so as to be within a range of 15% by weight, and is again pulverized, formed into a predetermined shape by a rubber press, and then subjected to calcined carbonization and graphitization treatment. Production method. In the same issue, the β resin content is adjusted to a certain range in combination with the toluene soluble content in the binder, and the volatile content is adjusted to a certain range. It is possible to produce a highly dense graphite material.

【0011】また特開平6−122552号には、優れ
た材質強度と均質な組織物性を備える大型の等方性高密
度黒鉛材を安定して工業生産するための製造方法を提供
する発明が記載されている。
Japanese Patent Application Laid-Open No. 6-122552 discloses an invention which provides a manufacturing method for stably and industrially producing a large isotropic high-density graphite material having excellent material strength and uniform tissue properties. Have been.

【0012】特開平6−122552号の特許請求の範
囲の請求項1は、「 非黒鉛性炭素質を主体とする骨材
成分とピッチ系バインダ−を混練する捏合工程、混練物
を再粉砕した原料粉をラバ−プレス成形する成形工程、
ついで成形体を焼成炭化および黒鉛化処理する炭化黒鉛
化工程からなる等方性黒鉛材の製造プロセスにおいて、
前記捏合工程で揮発分含有量の異なる混練物を調整し、
成形工程時にラバ−型の中心部に低揮発分の原料粉が位
置し、その外側に高揮発分の原料粉が介在する状態に原
料粉充填することを特徴とする等方性黒鉛材の製造方
法。」であり、原料粉の成形工程で成形体の中心部分の
揮発分を少なめにし、外側部分の揮発分を多めにするよ
うにラバ−プレスすると、炭化時の収縮が均一となっ
て、材質損傷等の現象が効果的に減少し、均質な組織物
性が付与され、高強度で均質な材質組織を備える等方性
黒鉛材を安定して得ることができるとするものである。
Claim 1 of the claims of Japanese Patent Application Laid-Open No. 6-122552 discloses a method of kneading an aggregate component mainly composed of non-graphitic carbonaceous material and a pitch binder, and re-grinding the kneaded material. Molding step of rubber press molding raw material powder,
Then, in the production process of isotropic graphite material comprising a carbonization and graphitization step of calcining and graphitizing the compact,
Adjust the kneaded material having a different volatile content in the kneading step,
Production of isotropic graphite material characterized in that raw material powder with low volatility is located in the center of the rubber mold during the molding process and raw material powder with high volatility is interposed outside the rubber powder. Method. When rubber pressing is performed to reduce the volatile content of the central part of the molded body and increase the volatile content of the outer part in the molding process of the raw material powder, the shrinkage during carbonization becomes uniform and the material is damaged. And the like are effectively reduced, homogeneous tissue properties are imparted, and an isotropic graphite material having a high-strength and homogeneous material structure can be stably obtained.

【0013】上記のような、特開平5−229810
号、特開平6−122552号の方法も等方性高密度炭
素材の製造方法として、優れた材質の材料を得率良く得
る方法であるが、より高密度のかさ比重が1.85g/
cc以上の緻密な材料を安価に得率良く製造できる方法
が望まれていた。
As described above, JP-A-5-229810
And Japanese Patent Application Laid-Open No. 6-122552 are also methods for producing an isotropic high-density carbon material at an excellent rate of a material having excellent quality.
There has been a demand for a method capable of producing a dense material of cc or more inexpensively and with good yield.

【0014】さらに大型の材料であってもクラックの発
生等を有効に抑えて得率良く製造可能で、しかも工程短
縮も可能な方法が望まれている。
Further, there is a demand for a method which can effectively suppress the occurrence of cracks and the like even with a large-sized material, can be manufactured at a high yield, and can reduce the number of steps.

【0015】[0015]

【発明の課題】上記のような問題点に鑑み、本発明者は
等方性炭素材の製造方法について、従来よりも一層高密
度で、かさ密度が1.85g/cc以上の炭素材をクラ
ックの発生を防止し、得率良く製造できる方法を提供す
る。
In view of the above problems, the present inventor has developed a method for producing an isotropic carbon material by cracking a carbon material having a higher density and a bulk density of 1.85 g / cc or more than before. To provide a method that can prevent the occurrence of odor and can be manufactured with good yield.

【0016】[0016]

【課題解決の手段】上記のような課題を解決するため本
発明者が提案するのは、炭素質コ−クスを平均粒径4〜
20μmに粉砕して、2000℃以上で熱処理した後、
バインダ−ピッチを外割で100〜150%の比率で混
合混捏し、得られた混捏物を300℃以下で混捏処理し
揮発分を除去した後、さらに平均粒径10〜30μmに
再粉砕して得た微粉を100kg/cm2以上で冷間静
水圧加圧成形して成形品とし、窒素または還元性雰囲気
中で焼成および黒鉛化のために2000〜3000℃ま
で熱処理をし、必要に応じて高密度化処理を黒鉛化処理
前に1回又は2回行い、前記焼成又は高密度化処理のた
めの熱処理において、成形品の上下面に熱伝導の良好な
黒鉛板をセットすることを特徴とする等方性炭素材の製
造方法である。
In order to solve the above problems, the present inventor proposes that carbonaceous coke has an average particle size of 4 to 4.
After pulverized to 20 μm and heat-treated at 2000 ° C. or higher,
The binder-pitch is mixed and kneaded at a ratio of 100 to 150%, and the obtained kneaded material is kneaded at 300 ° C. or less to remove volatile components, and then further pulverized to an average particle size of 10 to 30 μm. The obtained fine powder is cold isostatically pressed at a pressure of 100 kg / cm 2 or more to form a molded article, and is heat-treated to 2000 to 3000 ° C. for calcination and graphitization in a nitrogen or reducing atmosphere. The densification treatment is performed once or twice before the graphitization treatment, and in the heat treatment for the sintering or the densification treatment, a graphite plate having good heat conductivity is set on the upper and lower surfaces of the molded product. This is a method for producing an isotropic carbon material.

【0017】以下に本発明の等方性炭素材の製造方法に
ついて詳細に説明する。
Hereinafter, the method for producing an isotropic carbon material of the present invention will be described in detail.

【0018】本発明は黒鉛材を粉砕した黒鉛粉では、ア
スペクト比が大きくなりバインダ−を多量に要する割に
は、得られる黒鉛材のかさ比重が小さいものしか得られ
ないので使用しない。まず炭素質のコ−クスを平均粒径
が4〜20μmになるように粉砕する。20μm以上で
は、最終製品の嵩比重が低くなり、十分に緻密な材料が
得られず、また4μm以下では、焼成の工程においてク
ラックが多発し、いずれも好ましくない。
In the present invention, graphite powder obtained by pulverizing a graphite material is not used because the aspect ratio is large and a large amount of binder is required, but the obtained graphite material has only a small bulk specific gravity. First, carbonaceous coke is pulverized so that the average particle diameter becomes 4 to 20 μm. If it is 20 μm or more, the bulk specific gravity of the final product is low, and a sufficiently dense material cannot be obtained. If it is 4 μm or less, many cracks occur in the firing step, and both are not preferred.

【0019】上記のように粉砕したコ−クスを2000
℃以上の温度で熱処理をする。この熱処理は、後の成形
品の熱伝導を良好にし、焼成工程での炭素化を均一化
し、クラックの発生を抑制するために重要である。粉砕
したコ−クスの熱処理の温度が2000℃未満では熱伝
導率が悪く焼成時の炭素化が不均一になり、クラックが
多発する。
The coke crushed as described above was
Heat treatment at a temperature of at least ℃. This heat treatment is important for improving the thermal conductivity of the molded article later, uniformizing the carbonization in the firing step, and suppressing the occurrence of cracks. If the temperature of the heat treatment of the pulverized coke is lower than 2000 ° C., the thermal conductivity is poor and the carbonization during firing becomes non-uniform and cracks occur frequently.

【0020】次に上記のように熱処理したコ−クスにバ
インダ−ピッチを外割りで100〜150%の比率で混
合混捏する。バインダ−ピッチを比較的多量に使用する
ことにより、後の焼成の工程での収縮を大きくし、材料
の高密度化に有効に作用する。
Next, the coke that has been heat-treated as described above is mixed and kneaded at a ratio of 100 to 150% of the binder pitch on an external basis. By using a relatively large amount of the binder pitch, the shrinkage in the subsequent firing step is increased, which effectively acts on increasing the density of the material.

【0021】バインダ−ピッチの比率が、100%未満
では、最終製品の嵩比重が低く、十分に緻密な材料が得
られず、また150%を超えると、焼成の工程でクラッ
クが多発し、いずれも好ましくない。
If the binder-pitch ratio is less than 100%, the bulk specific gravity of the final product is low, and a sufficiently dense material cannot be obtained. If it exceeds 150%, cracks occur frequently in the firing step, and Is also not preferred.

【0022】上記のようなコ−クスとバインダ−ピッチ
の混捏物を300℃以下で混捏機により混捏処理して揮
発分を除去する。揮発分を除去することにより、上記の
ような多量のバインダ−ピッチの使用が可能となる。3
00℃以上では、成形粉の表面が酸化して不融化し、成
形不良が多発する。
The kneaded product of coke and binder pitch is kneaded at 300 ° C. or lower by a kneader to remove volatile components. Removal of volatiles allows the use of large amounts of binder pitch as described above. Three
If the temperature is higher than 00 ° C., the surface of the molding powder is oxidized and infused, and molding defects frequently occur.

【0023】次に得られた混捏物を平均粒径10〜30
μmに再粉砕する。平均粒径が30μmを超えると、最
終製品の嵩比重が低くなり、充分に高密度の材料が得ら
れず、また10μm未満では焼成工程でクラックが多発
しいずれも好ましくない。
Next, the obtained kneaded product is subjected to an average particle size of 10 to 30.
Re-grind to μm. When the average particle size exceeds 30 μm, the bulk specific gravity of the final product becomes low, and a sufficiently high-density material cannot be obtained. When the average particle size is less than 10 μm, many cracks occur in the firing step, which is not preferable.

【0024】このようにして得られた再粉砕粉を冷間静
水圧加圧成形法(ラバ−プレス法)により、静水圧10
0kg/cm2以上で成形する。100kg/cm2未満
では、最終製品の嵩比重が低くなり、充分に高密度の材
料が得られない。
The reground powder obtained in this manner is subjected to a cold isostatic pressing method (rubber press method) to a hydrostatic pressure of 10%.
Mold at 0 kg / cm 2 or more. If it is less than 100 kg / cm 2 , the bulk specific gravity of the final product is low, and a sufficiently high-density material cannot be obtained.

【0025】次に得られた、成形品を窒素または還元性
雰囲気中で2000〜3000℃で熱処理して焼成およ
び黒鉛化する。この焼成の工程では、成形品の上下面に
熱伝導の良好な黒鉛板をセットする。
Next, the obtained molded article is heat-treated at 2000 to 3000 ° C. in a nitrogen or reducing atmosphere to be calcined and graphitized. In this firing step, a graphite plate having good heat conductivity is set on the upper and lower surfaces of the molded product.

【0026】かかる黒鉛板のセットにより、成形品の熱
伝導をより良好にし、焼成工程の挙動を均一化するのに
優れた効果を発揮できる。
By setting such a graphite plate, it is possible to exhibit an excellent effect of improving the heat conduction of the molded product and making the behavior of the firing step uniform.

【0027】焼成品に、高密度化処理(ピッチを含浸し
再焼成する工程)を1回又は2回行う。この高密度化処
理は、通常、繰り返し行うもので、従来は最低3回は必
要であったが、本発明によると2回までと最小限にとど
め、高密度化処理後黒鉛化することにより緻密な炭素材
を得ることができる。
The fired product is subjected to one or two densification treatments (process of impregnating pitch and refiring). This densification treatment is usually performed repeatedly, and conventionally required at least three times. However, according to the present invention, the densification treatment is minimized to two times. Carbon material can be obtained.

【0028】以上のようにして、本発明の製造方法によ
る等方性炭素材が得られる。本発明の等方性炭素材の製
造法においては、特に、炭素質コ−クスを2000℃以
上で熱処理すること、またバインダ−ピッチの添加量を
比較的多量とすること、さらに焼成および再焼成の工程
で成形品の上下に黒鉛板をセットすることにより、成形
品の熱伝導を良好にし、焼成工程の挙動を均一化して、
クラックの発生の抑制にすぐれた効果を発揮し、大型の
材料を得率良く得ることができる。
As described above, an isotropic carbon material is obtained by the production method of the present invention. In the method for producing an isotropic carbon material of the present invention, in particular, heat treatment of carbonaceous coke at 2000 ° C. or higher, addition of a relatively large amount of binder pitch, firing and refiring By setting the graphite plate above and below the molded article in the step of, the heat conduction of the molded article is improved, and the behavior of the firing step is made uniform,
An excellent effect of suppressing the generation of cracks is exhibited, and a large-sized material can be obtained with good efficiency.

【0029】また、かかるクラック抑制のための手段と
同時に、各工程における原料の粒度や処理条件を特定す
ることにより、嵩比重を高め、すぐれた高密度の炭素材
を得ることができる。
Further, by specifying the particle size of the raw material and the processing conditions in each step at the same time as the means for suppressing such cracks, it is possible to increase the bulk specific gravity and obtain an excellent high-density carbon material.

【0030】本発明の製造方法により得られた等方性炭
素材の特性は、嵩密度が1.85g/cc以上、曲げ強
度は、500kg/cm2以上、固有抵抗が1500μΩcm以
下である。
The properties of the isotropic carbon material obtained by the production method of the present invention are such that the bulk density is 1.85 g / cc or more, the bending strength is 500 kg / cm 2 or more, and the specific resistance is 1500 μΩcm or less.

【0031】またクラック等の発生がなく良好な炭素材
を製造することができ、得率は、90%以上である。さ
らに、本発明においては、成形品の熱伝導性が良好なた
め、焼成工程の時間が短縮され、従来の70%で可能と
なった。
Further, a good carbon material can be produced without generation of cracks and the like, and the yield is 90% or more. Further, in the present invention, since the heat conductivity of the molded article is good, the time of the firing step is shortened, and it is possible to reduce the firing time by 70%.

【0032】[0032]

【発明の効果】本発明の等方性炭素材の製造方法による
と、嵩密度が1.85g/cc以上の高密度の炭素材を
製造することが可能で、特に半導体単結晶製造の用途で
は、SiOによる浸食に対して有効な材料となる。また
上記のような炭素材をクラックの発生等を抑制し、安定
的に得率良く製造可能で、高密度化処理を最小限にとど
め、安価に製造できる。さらに、焼成時間の短縮によ
り、工程短縮が可能であり、従来の70%で製造可能に
なる。本発明の等方性炭素材の製造方法は工業上きわめ
て有用である。
According to the method for producing an isotropic carbon material of the present invention, a high-density carbon material having a bulk density of 1.85 g / cc or more can be produced. , Is an effective material against erosion by SiO. In addition, the carbon material as described above can be produced stably at a high yield by suppressing the occurrence of cracks and the like, and can be produced at a low cost by minimizing the densification treatment. Furthermore, the process can be shortened by shortening the firing time, and the production can be performed at 70% of the conventional one. The method for producing an isotropic carbon material of the present invention is extremely useful industrially.

【0033】[0033]

【実施例および比較例】[Examples and Comparative Examples]

【実施例1】原料コ−クスを平均粒子径10μmに微粉
砕した後、2500℃処理して、この原料コ−クス10
0重量%に対して、バインダ−ピッチ130重量%の割
合で混合混捏し、250℃で300分間混捏機を用いて
混捏し、揮発分を除去した。得られた混捏物を15μm
に再粉砕し、ラバ−プレス成形(静水圧 500kg/
cm2)して、成形体を得た。次に、これを焼成する際
に、成形体の上下面に熱伝導率の良好な黒鉛板をセット
し、ピッチの含浸および再焼成による高密度化処理を2
回行い更に、約3000℃まで黒鉛化して、20個の等
方性高密度炭素材を得た(寸法 φ800×750m
m)。得られた等方性高密度炭素材の嵩密度は、1.9
2g/cc、曲げ強度は600kg/cm2、固有抵抗
は1100μΩcmであり、クラック等が発生せず、外
観の良好な炭素材の得率は95%であった。
Example 1 Raw material coke was finely pulverized to an average particle diameter of 10 μm and then treated at 2500 ° C.
The mixture was kneaded at a ratio of 130% by weight of binder pitch to 0% by weight, and kneaded at 250 ° C. for 300 minutes using a kneading machine to remove volatile components. The obtained kneaded product is 15 μm
Crushed into rubber and press-molded (hydrostatic pressure 500kg /
cm 2 ) to obtain a molded body. Next, when this is fired, a graphite plate having good thermal conductivity is set on the upper and lower surfaces of the molded body, and the density is increased by impregnation of pitch and refiring.
And graphitized to about 3000 ° C. to obtain 20 isotropic high-density carbon materials (size φ800 × 750 m
m). The bulk density of the obtained isotropic high-density carbon material was 1.9.
2 g / cc, flexural strength was 600 kg / cm 2 , specific resistance was 1100 μΩcm, cracks and the like did not occur, and the yield of the carbon material having a good appearance was 95%.

【0034】[0034]

【比較例1】実施例1におけるコ−クスを熱処理しない
以外は、すべて実施例1と同様にして等方性高密度炭素
材を得た。得られた等方性高密度炭素材の嵩密度は、
1.87g/cc、曲げ強度は400kg/cm2、固
有抵抗は1200μΩcmであった。また、外観の良好
な炭素材の得率は65%であった。
Comparative Example 1 An isotropic high-density carbon material was obtained in the same manner as in Example 1 except that the coke in Example 1 was not heat-treated. The bulk density of the obtained isotropic high-density carbon material is
The bending strength was 1.87 g / cc, the bending strength was 400 kg / cm 2 , and the specific resistance was 1200 μΩcm. The yield of the carbon material having a good appearance was 65%.

【0035】[0035]

【比較例2】実施例1におけるバインダ−ピッチの添加
量を70重量%とする以外はすべて 実施例1 と同様にして等方性高密度炭素材を得た。等方性高密度
炭素材の嵩密度は1.75g/cc、曲げ強度は450
kg/cm2、固有抵抗は1300μΩcmであり、また
外観良好な炭素材の得率は85%であった 。
Comparative Example 2 An isotropic high-density carbon material was obtained in the same manner as in Example 1 except that the amount of the binder pitch was changed to 70% by weight. The bulk density of the isotropic high-density carbon material is 1.75 g / cc, and the bending strength is 450.
kg / cm 2 , the specific resistance was 1300 μΩcm, and the yield of the carbon material having good appearance was 85%.

【0036】[0036]

【比較例3】実施例1における焼成時に黒鉛板を使用し
ないこと以外はすべて実施例1と同様にして等方性高密
度炭素材を得た。得られた等方性高密度炭素材の嵩密度
は、1.85g/cc、曲げ強度は550kg/cm2
固有抵抗は1200μΩcmであり、また外観が良好な炭
素材の得率は75%であった。
Comparative Example 3 An isotropic high-density carbon material was obtained in the same manner as in Example 1 except that the graphite plate was not used during firing. The bulk density of the obtained isotropic high-density carbon material was 1.85 g / cc, the bending strength was 550 kg / cm 2 ,
The specific resistance was 1200 μΩcm, and the yield of the carbon material having a good appearance was 75%.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 炭素質コ−クスを平均粒径4〜20μm
に粉砕して、2000℃以上で熱処理した後、バインダ
−ピッチを外割で100〜150%の比率で混合混捏
し、得られた混捏物を300℃以下で混捏処理をし揮発
分を除去した後、さらに平均粒径10〜30μmに再粉
砕して得た微粉を100kg/cm2以上で冷間静水圧
加圧成形して成形品とし、窒素又は還元性雰囲気中で焼
成及び黒鉛化のために2000〜3000℃まで熱処理
をし、必要に応じて高密度化処理を黒鉛化処理前に1回
又は2回行い、前記の焼成又は高密度化処理のための熱
処理においては、成形品の上下面に熱伝導の良好な黒鉛
板をセットすることを特徴とする等方性高密度炭素材の
製造方法。
The carbonaceous coke has an average particle size of 4 to 20 μm.
After heat treatment at 2000 ° C. or more, the binder-pitch was mixed and kneaded at a ratio of 100 to 150% on an external basis, and the obtained kneaded product was kneaded at 300 ° C. or less to remove volatile components. Thereafter, the fine powder obtained by re-grinding to an average particle size of 10 to 30 μm is cold isostatically pressed at 100 kg / cm 2 or more to form a molded product, which is fired and graphitized in a nitrogen or reducing atmosphere. Heat treatment to 2000 to 3000 ° C., and if necessary, a densification treatment once or twice before the graphitization treatment. A method for producing an isotropic high-density carbon material, comprising setting a graphite plate having good heat conductivity on a lower surface.
JP31152499A 1999-11-01 1999-11-01 Method for producing isotropic high-density carbon material Withdrawn JP2001130963A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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Family

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Country Link
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008290943A (en) * 2008-08-04 2008-12-04 Shin Nippon Techno Carbon Kk Method for manufacturing graphite crucible for manufacturing silicon single crystal
JP2014057888A (en) * 2010-11-08 2014-04-03 Oki Kogei:Kk Gum massage tool
KR20180000915A (en) * 2016-06-24 2018-01-04 주식회사 더불룸 Manufacturing method for isotropic graphte article and high density isotropic graphte article manufactured by the method
JP2020026366A (en) * 2018-08-10 2020-02-20 住友電気工業株式会社 Silicon carbide single crystal manufacturing equipment
CN112521172A (en) * 2020-12-04 2021-03-19 拓米(成都)应用技术研究院有限公司 Composite carbon material for in-situ growth of carbon fibers and preparation method and application thereof
CN114751749A (en) * 2022-05-12 2022-07-15 永安市鼎丰碳素科技有限公司 Technological method for optimizing kneading effect
CN118084524A (en) * 2024-04-29 2024-05-28 山东红点新材料有限公司 High-performance isostatic graphite and preparation method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008290943A (en) * 2008-08-04 2008-12-04 Shin Nippon Techno Carbon Kk Method for manufacturing graphite crucible for manufacturing silicon single crystal
JP2014057888A (en) * 2010-11-08 2014-04-03 Oki Kogei:Kk Gum massage tool
KR20180000915A (en) * 2016-06-24 2018-01-04 주식회사 더불룸 Manufacturing method for isotropic graphte article and high density isotropic graphte article manufactured by the method
KR101883862B1 (en) * 2016-06-24 2018-08-01 주식회사 더불룸 Manufacturing method for isotropic graphte article and high density isotropic graphte article manufactured by the method
JP2020026366A (en) * 2018-08-10 2020-02-20 住友電気工業株式会社 Silicon carbide single crystal manufacturing equipment
CN112521172A (en) * 2020-12-04 2021-03-19 拓米(成都)应用技术研究院有限公司 Composite carbon material for in-situ growth of carbon fibers and preparation method and application thereof
CN114751749A (en) * 2022-05-12 2022-07-15 永安市鼎丰碳素科技有限公司 Technological method for optimizing kneading effect
CN118084524A (en) * 2024-04-29 2024-05-28 山东红点新材料有限公司 High-performance isostatic graphite and preparation method thereof

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