JP2001256489A - Device and method for adjusting illumination in part of plural selection areas in image of object to be measured - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for adjusting the light strength of an image system in order to obtain the desired quality or characteristic of a fetched image. SOLUTION: An illumination adjusting method is the method for adjusting the illumination of a part in an object to be measured corresponding to an important area in the image of the object to be measured, which is generated through the use of the image system, and includes an image fetching process for illuminating the object to be measured and obtaining the image of the object, an image data taking-out process for positioning in the important area and taking-out image data, an image quality selecting process for selecting at least one kind of image quality from taken-out image data and an illumination state adjusting process for adjusting an illumination state till the relation of regions of interest(ROI) selected by at least selected image quality is satisfied.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a lighting device for an imaging system.

[0002]

BACKGROUND OF THE INVENTION Light output, as in any device, is a function of many variables. These variables include the instantaneous drive current, the age of the device, the ambient temperature, whether the light source is dirty or residue, the performance history of the device, and the like. Machine vision metrology systems generally locate an object in a field of view in a manner that can be determined by contrast with others in a region of interest where the object can be found. This measurement is significantly affected by the total amount of incident or transmitted light.

[0003] Automated video inspection and measurement instruments generally have a programming function that allows the user to define the sequence of events. These can be performed either in a planned manner, for example by programming, or in a recording mode in which the sequence of the measuring instruments is gradually learned. Sequence commands are stored as part programs. The ability to create an instruction program that executes a sequence of instrument events offers several advantages.

[0004] For example, a plurality of workpieces or instrument sequences may be performed at the level of the assumed instrument repeatability. In addition, the majority of the instruments can execute a single program, so that the majority of inspection tasks can be performed simultaneously or sequentially. Moreover, the programming function provides the ability to record work results. Thus, the test process can be analyzed and potential failure locations of the workpiece or failure of the controller can be identified. Programs recorded without sufficient standardization and repeatability change performance over time or between devices of the same model and equipment.

Conventionally, Mahaney US Pat.
As described in 53903, a closed loop control system was used to ensure that the output light intensity of the light source of the machine imaging system was driven to a specific command level. Accordingly, these conventional closed-loop control systems have prevented fluctuations from the desired output light intensity due to changes in the instantaneous drive current, the age of the light source, the ambient temperature, and the like.

[0006]

In these prior art closed loop control systems, the quality of the result of illumination of the device under test obtained by driving the light source to a specific command level is not considered. Was driven to a specific command level. However, even if the output light intensity of the light source was controlled to a specific command level, the resulting image captured by the machine imaging system could not have the required quality or characteristic image.

[0007] Similarly, US patent application Ser. No. 09 / 475,990, filed Dec. 30, 1999, states that the actual output light intensity of a light source in operation is the desired output power based on a particular input light intensity command value. A system for calibrating the output intensity of a light source to match the light intensity has been disclosed. However, even if the output light intensity is at the desired value, the quality of the image, or the characteristics of the resulting captured image, may be insufficient.

Also, the input light setting of many imaging systems often does not match the steady output light intensity. Furthermore, the output light intensity cannot be measured directly by the user. Rather, the output light intensity is measured indirectly by measuring the brightness of the image. In general, the brightness of an image is the average gray level of the image. Alternatively, the output light intensity can be measured directly using dedicated external equipment for a particular imaging system. Regardless, the lighting task, i.e. the relationship between the measured output light intensity and the commanded light intensity, is consistent between different imaging systems, in the same imaging system over time, or by each part of the device under test. It does not do. Rather, the relationship between the measured output light intensity and the commanded light intensity is determined by the particular light source used to illuminate the optics or the device under test, the particular light source of that light source, It depends on each part of the specific device under test.

This inconsistency in the lighting operation makes it difficult to correctly execute the part program even in a single operation on one machine. That is, a part program having a fixed combination of commanded light intensity command values, when illuminating different parts of the same DUT,
It creates an image by changing the brightness. However, many measurement algorithms (such as those using edge detection) rely on image brightness. As a result, when inspecting different parts, the resulting program often results in differences in brightness, and the part program is not executed consistently.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and provides a system, method, and graphical user interface for adjusting the light intensity of an imaging system to obtain a desired quality or characteristic of a captured image. The purpose is to provide an interface. The present invention also provides a system, method, and graphical system for defining a plurality of regions of interest in an image used to determine the quality or characteristics of the captured image according to the current illumination level.
The purpose is to provide a separate user interface.

The present invention also provides a system, method, and graphical system that allows a user to easily and quickly define multiple regions of interest that can be used to determine the image quality of a captured image. The purpose is to provide a separate user interface.

[0012]

SUMMARY OF THE INVENTION In order to achieve the above object, a method for adjusting illumination according to the present invention is provided. A method for adjusting the illumination of a corresponding portion of the object to be measured, the method comprising: first illuminating the object to be measured with a controllable illumination system, and acquiring an image of the object to be measured; Positioned at the image data of at least the first region of interest and the second region of interest are extracted, an image data extracting step,
Selecting at least one image quality, such as contrast or average lightness, from the retrieved image data, an image quality selection step, illumination of an illumination system until at least the selected image quality satisfies a relationship between preselected regions of interest. An illumination state adjusting step of adjusting the state.

In the present invention, an image capturing step, an image data extracting step, an image quality selecting step, and an illumination state adjusting step are repeated until at least the selected image quality satisfies the relationship between the preselected regions of interest. It is preferred that Further, in the present invention, the light source comprises a plurality of selectable light sources, each of the light sources has a controllable light intensity, and in the illumination state adjusting step, at least one of the plurality of selectable light sources is used. And adjusting the light intensity of at least one of the selected at least one light source.

In the present invention, it is preferable that the controllable illumination system includes a focus adjustment subsystem, and that the illumination condition adjustment step includes adjustment of the focus adjustment subsystem. Further, in the present invention, after the illumination state adjusting step, extracting image data from an important area of the image, an image data extracting step,
It is preferable to have an image data processing step of processing image data taken out of the important area.

In the present invention, it is preferable that the important area includes an edge, and the image data processing step includes an analyzing step of analyzing image data extracted from the important area for edge position determination. In the present invention, it is preferable that at least one of the image qualities is either contrast or brightness. Further, in the present invention, the contrast is selected for the image quality in the image quality selecting step, and the difference between the contrasts is maximized in the image data of the first and second regions of interest as a relationship to be satisfied in the illumination condition adjusting step. Preferably, a relationship has been selected.

Further, in the present invention, the image system includes a graphical user interface including display means such as a display for displaying an image of the object to be measured. It is preferable to display a graphical user interface having at least first and second regions of interest drawn on the image. Also, in the present invention, the graphical user interface is selectable, a selection step of selecting the graphical user interface, a positioning adjustment step of performing at least one positioning adjustment of the first and second regions of interest, and Preferably, the method comprises a dimension setting step of setting at least the size of the first and second regions of interest based on the input received from the graphical user interface.

Further, in the present invention, the image system comprises a computerized control system, and at least one of the steps is automatically executed by automatically controlling the image system and automatically executing the instructions of the program. Preferably, it is performed. In the present invention, it is preferable that the first and second regions of interest are positioned at a defined position associated with the important region. Further, in the present invention, the definition position related to the important region is one position near the important region, and it is preferable that the defined position is a position spaced apart from the important region in the image.

Further, in the present invention, it is preferable that at least one region of interest is positioned so as to exhibit a substantially uniform image light intensity over most of the region of interest. In the present invention, in most of the region of interest,
Preferably, at least one region of interest is positioned so as to result in an approximately uniform pattern of the device under test having a substantially uniform surface.

Further, the illumination adjusting device according to the present invention includes a controllable illumination system, an imaging system,
A processor, a display means such as a display for displaying image data, and a graphical user which can be displayed on the display means and used to display a plurality of regions of interest.
In an imaging system including an interface, image data of the first and second regions of interest used to control the lighting system, the graphical user interface is a combination of a plurality of borders, and The combination defines the position and size of one of the multiple regions of interest displayed on the image, and each combination of the boundaries can be positioned independently on the image, The size of the combination is independently adjustable on the image.

In the present invention, it is preferable that the graphical user interface is arranged in an initial shape in the image display based on the points on the image provided to the processor by the user. Further, in the present invention, it is preferable to include a plurality of display portions of the region of interest included in the prescribed condition of the graphical user interface. Also, in the present invention, the display portion comprises a specific color for at least one line extending between the regions of interest or a set of lines extending between the regions of interest or boundaries of the region of interest, wherein the lines or colors are graphical. It is preferable that the condition is a prescribed condition of the user interface.

[0021]

DETAILED DESCRIPTION OF THE INVENTION The present invention may be used in different imaging systems and / or in the same or different imaging systems at different times, at different locations, or for viewing objects with various surface properties. It is particularly useful for presenting reliable and repeatable results when using predetermined instructions in a lighting system, such as when the instructions are included in a part program to be performed.

In various and exemplary embodiments of the systems, methods, and graphical user interfaces of the present invention, a user may define two or more regions of interest in a captured image of a device under test. Can use a multi-area image quality tool. The multi-area image quality tool is activated during execution of a part program that can be used to illuminate the device under test and capture a device image for subsequent analysis. The multi-area image quality tool allows a user to specify the positioning, orientation, size, and separation of two or more regions of interest. The multi-area image quality tool is a light source operation mode of the imaging system.
A goal to reach the selected image quality, and / or image quality measured in two or more regions of interest, including a numerical range that satisfies the selected image quality, and The distribution is analyzed to allow the user to specify one or more of the light sources used to illuminate the device under test and to adjust the angle of illumination.

In the operation of the part program including the multi-area image quality tool, the device under test is immediately illuminated based on the lighting command included in the part program prior to the multi-area image quality tool.
In particular, for example, in the closed loop control system disclosed in the aforementioned US Pat. No. 5,753,903, or the calibration system and method disclosed in the US patent application Ser. No. 09 / 475,990, the initial illumination level is correctly adjusted to the required illumination level. Can be used to guarantee a match. The imaging system then uses this initial illumination level to capture an image of the device under test. A portion of the image is then retrieved based on the defined region of interest. The image quality of the captured image is determined based on an analysis of the region of interest,
And the image quality is defined by the multi-area image quality tool.

If the image quality reaches the defined goal and / or falls within the range defined by the multi-area image quality tool, the next instruction in the part program is executed. If the image quality is not within the defined range, the intensity of the light source is adjusted.
Then, a new image of the object to be measured is captured, and a region of interest, which is a part of the newly captured image, is extracted and analyzed. Such a procedure is repeated until the image quality of the captured image of the device under test in the region of interest is the current output intensity of the light source such that it falls within the defined range. Thus, by using the system, method, and graphical user interface of the present invention, a user can define a desired image quality rather than a desired illumination level, and can capture the captured image of the device under test. Used to get.

Hereinafter, the above-described functions and advantages of the present invention and other functions and advantages will be described in detail with reference to examples. The lighting adjustment system, method, and graphical user interface in the present application can be used in conjunction with the lighting calibration system and method described in US patent application Ser. No. 09 / 475,990.
For simplicity and explanation, the operation principle and design elements of the present invention will be described using an embodiment of the image system of the present invention shown in FIG. The basic description of the operation of the imaging system shown in FIG. 1 is applicable to any imaging system using the lighting adjustment system and method of the present invention.

The input light intensity command value is a combination of light intensity values set by the user to control the light output intensity of the light source. The command value of the input light intensity is clearly set using a part program or a user interface. The input light intensity command value ranges from 0 to 1.
And represents a percentage of the maximum possible output light intensity. In the following description, ranges 0-1 and 0% -10
0% is used interchangeably. 0 or 0% corresponds to no illumination, while 1 or 100% corresponds to illumination at full power.

The output light intensity value is the light intensity of the light source received by the optical sensor after illuminating the object to be measured, reflecting off the object to be measured and before passing through the optical element of the imaging system. Illumination adjustment system, method, and graphical
In various embodiments of the user interface, the output light intensity I is measured using the average gray level of a region of the image. In the following description of various embodiments of the systems and methods of the present invention, the operations of the various embodiments of the systems and methods are performed automatically. The operation of various embodiments of the system and method is outlined with an understanding of many system operations and method steps, such as, for example, creating and executing part program instructions. However, any manual operation that achieves system operation and method steps is within the scope of the present invention.

FIG. 1 shows an embodiment of an image system including a lighting adjustment control system according to the present invention. FIG.
As shown in FIG. 1, the image system 10 includes a control system unit 100 and an image system component unit 200.
The imaging system component 200 includes a central transparent member 212.
And a stage 210 having The DUT 20 into which an image is captured using the imaging system 10 is a stage 2
Placed at 10. Light emitted by one or more of the light sources 220 to 240 illuminates the device under test 20. Light from one or more of the light sources 220-240 passes through a lens system 250 after illuminating the device under test 20, and possibly before illuminating the device under test 20, to create an image of the device under test 20. To be collected by the camera system 260.
The image captured by the camera system 260 is output to the control system unit 100 via a signal line 262. Light source 22 used to illuminate device under test 20
0-240 include stage lights 220, coaxial lights 230, and surface lights 240, such as ring lights and programmable ring lights.

The distance between the stage 210 and the camera system 260 can be adjusted to focus the image of the device under test captured by the camera system 260. In particular, in embodiments having a fixed stage 210,
In other embodiments having a fixed camera system 260, the position of the camera system 260 may be configured to be variable along the vertical axis, and in other embodiments, the position of the stage 210 may be configured to be variable along the vertical axis. It is suitable. Further, in other embodiments of the imaging system 10, the vertical position between the camera system 260 and the stage 210 is preferably configurable to maximize the focus range of the imaging system 10.

In one embodiment, the control system unit 100 includes an input / output interface 110, a controller 120, a memory 130, a multi-area ROI generator 150, a multi-area ROI output unit 160, a part program generator and / or an output unit 170, and an input. An optical command value adjuster 180, and a power supply 190,
In each case, the various components are interconnected by a data / control bus 195 or a direct connection.
A signal line 262 from the camera system 260 is connected to the input / output interface 110. Further, the display 102 connected by the signal line 103 and one or more signal lines 1 are connected.
One or more input devices 104 connected by 05 can be connected to the input / output interface 110. The display 102 and one or more input devices 104
Viewing information, creating and modifying part programs, viewing images captured by the camera system 262, and / or image components 2
Used to control 00 directly. However, in a fully automated system with a predetermined part program, the display 10
Two and / or one or more input devices 104 and corresponding signal lines 103 and / or 105 may be omitted.

As shown in FIG. 1, the memory 130 includes a part program storage section 131, a multi-area interest area definition storage section 132, a multi-area characteristic storage section 133, an initial setting storage section 134, and a captured image storage section 135. Including. The part program storage unit 131 stores one or more part programs used to control the operation of the imaging system 10 according to the type of each device under test. The captured image storage unit 135
The images captured using the camera system 260 are stored when programming and / or operating the imaging system 10.

The multiple area region of interest definition storage unit 132
A rectangular neighborhood of a multi-area image quality tool, surrounded by two or more regions of interest forming a multi-area image quality tool and an angle that the multi-area image quality tool makes with a predetermined axis of the captured image It also contains data defining the positioning of the multi-area image quality tool in the captured image, as well as the width and height of the border. The function of the multi-area image quality tool will be described in detail later with reference to FIG.

The multi-area characteristic storage 133 includes at least a current multi-area image quality tool, data identifying one or more light sources to be adjusted to obtain the desired image quality, various aspects of the imaging system 10. Data defining the mode of operation for operating the various light sources, data defining the quality of the image used in the measurement to determine if the light source identified as being adjusted requires further adjustment,
The data defining the tolerance range of the quality of the selected image and the data defining whether or not the image data of the region of interest to be filtered are stored. Various characteristics of the multi-area image quality tool are described in detail in FIGS.

The initial setting storage unit 134 stores the image system 1
Prior to a part program that executes a multi-area image quality tool to adjust one or more of the zero light sources 220-240, an initial control of the various light sources 220-240 of the imaging system 10 installed at predetermined locations is performed. The settings are stored. Generally, these settings are defined in the previously executed part program.

FIG. 2 shows one embodiment of the multi-area image quality tool of the present invention. In particular, the multi-area image quality tool shown in FIG. As shown in FIG. 2, the dual area image quality tool 300 includes a second region of interest 320 connected by a connecting bar 330 to a first region of interest 310. Thus, the dual area image quality tool 300 is limited by the rectangle 340. In a first embodiment of the dual area image quality tool 300, the dual area image quality tool 300
Have two regions of interest 310 and 320. However, the present invention allows any number of regions of interest to be set within a multi-area image quality tool.

Thus, the multiple area region of interest definition storage 132 stores data defining the positioning of the dual area image quality tool in the captured image. This data includes the horizontal distance or offset of the captured image from the origin, and the vertical distance or offset of the captured image from the origin. The horizontal and vertical distance from the origin of the captured image can be linked to any point within rectangle 340 occupied by the multi-area image quality tool. In general, the horizontal and vertical distances are
It is linked to one of the vertices of 0 or the center point of the rectangle 340.

As described above, the multi-area region-of-interest definition storage unit 132 stores height and width data defining the height and width of the rectangle 340 in contact with the multi-area image quality tool. In various embodiments of a multi-area image quality tool, such as the dual-area image quality tool 300 shown in FIG. 2, once the height and width are defined, the regions of interest 310 and 320 have the same height as the rectangle 340. , And is defined as a rectangle having a width that is １ ／ of the width of the rectangle 340. That is, regions of interest 310 and 320 occupy one-third the width of rectangle 340, respectively, while tie bar 330 occupies the remaining third.

It should be noted that in various other embodiments of the multi-area image quality tool according to the present invention, various ratios may be used for the width of the region of interest and the connecting rod. Further, the length of the connecting rod may be zero, that is, it may not be used. That is, two adjacent regions of interest can be set. Further, in still other various embodiments of the multi-area image quality tool according to the present invention, the multi-area region of interest definition storage 132 stores additional data supplied by the user or the ratio of the region of interest to the connecting rod. Additional data that is automatically generated for the determination may be included.

As described above, the multi-area region of interest definition storage 132 also includes angle data defining the angle made by the sides of the rectangle 340 on a predetermined axis in the captured image. Thus, if the predetermined axis of the captured image is aligned with the horizontal axis of the captured image, 0 ° extends along the horizontal axis of the captured image. Rectangle 34
Coincides with the 0 side, while 90 ° or 270 ° is a rectangle 3 extending along the vertical axis of the captured image
Indicates that the side is 40. Generally, rectangle 340 is one that rotates at the same point in rectangle 340 that is associated with the horizontal and vertical distances. Thus, if the horizontal and vertical distances are linked to the center point of rectangle 340, rectangle 340 rotates at the center point.

In operation, when the user uses the imaging system 10 to create a part program, the user can either explicitly code the instructions using the part program language or save the instructions in the part program. The instructions of the part program are created by operating the image system 10 through the teaching sequence as described above to create the instructions. In particular, these instructions cause the imaging system 10 to operate the stage 210 and / or the camera system 260, so that a specific part of the device under test is within the field of view of the camera system 260 and has a desired focus state. Further, prior to capturing an image, the user sets the light sources 220 to 220 to obtain a desired illumination state of the device under test 20.
Part program instructions that operate one or more of the 240 can be created.

The part program generator and / or output unit 170, under the control of the controller 120, captures an image of the device under test 20 and instructs the camera system 260 to output the captured image to the control system 100. The control system 100 inputs the captured image through the input / output interface 110 under the control of the controller 120, and stores the captured image in the captured image storage unit 1 of the memory 130.
At 35, the captured image is stored. Then, the controller 120 displays the captured image on the display 102.

Next, in the system, method and graphical user interface of the present invention,
Users generally access a multi-area image quality tool using a graphical user interface. That is, the user activates a multi-area image quality tool creation menu item or toolbar button. The user then selects the portion 340 desired to be selected from the captured image. Then, the multi-area image quality tool 300 changes the selected part 340
Placed inside. In particular, in various embodiments, the instructions of the part program include the horizontal and vertical distance of the reference point of the multi-area image quality tool 300 from the captured image reference, the height and width of the selection area 340, and the predetermined 0. An angle of the selection area 340 formed by the angle axis can be defined. Different embodiments of the multi-area image quality tool as described in FIGS. 3-6 will produce different part program instructions that define different information appropriate for that embodiment.

If the control system 100 automatically adjusts the proportion of the region of interest in the multi-area image quality tool 300, two or more regions of interest are automatically positioned within the selected region 340, One or more connecting bars are drawn between the determined regions of interest. In general,
The selected region 340 is such that two or more regions of interest are placed on different sides of a selected feature (such as an edge) in the captured image, and one or more connecting bars are selected. Selected to be drawn across the feature. For example, as shown in FIG.
The dual area image quality tool 300 having 0 and 320 has a selected area 340 set across an edge 350. Therefore, the region of interest 310 is the bright region 3
Within 52, the other regions of interest 320 are each positioned within the dark region 352, and the connecting rod 330 has been pulled across the edge 350.

FIG. 3 shows a first embodiment of a multi-area image quality tool and graphical user interface used to select two or more regions of interest surrounded by a region of interest 350. In FIG. 3, the captured image portions in the regions of interest 310 and 320 generally have a constant intensity. Therefore, in such a case, no filtering is required for these regions of interest.

In many cases, the regions of interest each have a constant intensity. To be precise, region of interest 3
Each of 10 and 320 is homogeneous with respect to a particular image quality or selected features. Furthermore, this means that at least the image properties are continuous within the region of interest. For example, the pixel intensity of an enlarged figure of a brushed piece of aluminum is expected to vary significantly within the region of interest. However,
There are no sudden changes in the overall properties within the area of interest. An example of this type is shown in FIG.
Shown on the left. The present invention can be used without making such regions of interest unusable, even with sharp discontinuities in such regions of interest.

FIG. 4 shows two multi-area image quality tools 400 and 50 each having two or more regions of interest.
A dual area image quality tool 300 having a zero and a coupling bar 330 is described. In particular, the multi-area image quality tool 400 of the second embodiment includes four regions of interest 410-440 that are interconnected. On the other hand, the multi-area image quality tool 500 according to the third embodiment has four regions of interest 510 to 540 in which the second region of interest 520 to the fourth region of interest 540 are respectively connected to the first region of interest 510. In the dual area image quality tool 300 shown in FIG. 4, the regions of interest are not linear but have an angle with each other. The regions of interest in the present invention do not necessarily have to be in a linear relationship.

The multi-area image quality tool 400 according to the second embodiment and the multi-area quality tool 500 according to the third embodiment describe general methods for connecting various regions of interest with connecting rods 450 and 550. Have been. The first method is where the second region of interest is connected to the first region of interest,
The various regions of interest are successively combined such that the third region of interest is connected to the second region of interest. In the second method, the second, third,... Regions of interest are connected to one region of interest in parallel, such as connected to the first region of interest.

When the multi-area image quality tool has two or more regions of interest, the multi-area attributes of the multi-area image quality tool include the total number of regions of interest, the manner in which the regions of interest are combined, and the connections between the regions of interest. Indicates one or more, such as angles between bars. FIG. 5 illustrates one embodiment of a third image and multi-area image quality tool according to one embodiment of the present invention. In FIG. 5, the image intensity within the region of interest 310 includes both very bright and very dark portions. Thus, filtering out the regions of interest 310 and 320 to eliminate these extreme image intensities will improve the analysis of the selected image quality.

FIG. 6 shows a fourth image and a multi-area image quality tool and a graphical user interface 600 according to a fifth embodiment of the present invention. In particular, in FIG.
00 is a circular region of interest 610 and 620 instead of a rectangle. In general, the shape of the region of interest is not important. However, it is preferred that the shape of the region of interest be selected to match the shape of the selected portion of the captured image. Note that FIG. 6 shows that the multi-area image quality tool 600 rotates at an angle such that the boundary 650, which is an important feature across the tie bar 630, extends vertically.

Also in the present invention, to ensure that the regions of interest 310 and 320 as shown in FIG. 3 include the appropriate portions of the captured image, and / or
Connecting rod 33 across important features such as edge 350
To ensure that 0 is extended, the user must
It is preferable that a process of changing the height, width, angle, or positioning of 0 can be performed. Once the user has confirmed that the multi-area image quality tool 300 is properly placed, the user indicates this to the system control 100. The part program generator and / or output device 170 in the apparatus shown in FIG. 1 then generates part program instructions based on the current state of the multi-area image quality tool.

The user can then adjust the various light sources 220 to adjust the light source output based on the particular image quality.
A light source to be controlled is input to the apparatus. For example, an image system 10 as shown in FIG.
In the multi-area image quality tool, the light source data of the multi-area attribute data in this embodiment of the multi-area image quality tool may be stage light 220, coaxial light 230, ring light 240, or programmable if provided. It can be indicated that all parts of the ring light 240 are to be used as a light source. In addition, the light source data is stored in the programmable ring light 24.
One can indicate that some of the multiple parts at 0 should be adjusted. In this case, the multi-area attribute data for the current multi-area image quality tool also includes data defining the individual data of the controlled programmable ring light.

The multi-area attribute data also includes data indicating which image quality or characteristic to use when adjusting the selected light source. In the various embodiments described herein of the system, method, and graphical user interface of the present invention, the various image qualities or characteristics used include contrast, average brightness, intermediate brightness, brightness features, and the like. Various data representing the quality of the image can be used. That is, any image characteristic or image quality that depends on the output light intensity of the selected light source can be used in the present invention.

In various embodiments, the multi-area attribute data associated with the multi-area image quality tool example also includes arrival states that define targets for selected image quality or characteristics and a stop threshold. The reaching state is, for example, when the contrast of the image quality is the maximum contrast or the minimum contrast. The stop threshold defines an error state that ends the part program. For example, when the attainment state is at maximum contrast, the stop threshold indicates the value at which the maximum threshold must be reached by the part program to continue execution.

In another embodiment, the multi-area attribute data associated with the multi-area image quality tool example also includes a tolerance for the selected image quality. This tolerance indicates a range of acceptable image quality values, and thus does not require further adjustment of the selected light source. In particular, the tolerance may define a minimum quality difference, a maximum difference, or both a minimum and a maximum difference of the captured image portion in the region of interest of the multi-area image quality tool.

For example, if the selected image quality is average brightness, the captured image portions in regions of interest 310 and 320 are used to determine the average brightness in regions of interest 310 and 320, respectively. Will be analyzed. The difference is then determined between the average brightness of each of the regions 310 and 320. The formula is as follows.

[0056]

[Number 1] _{C =} | M 1 _-M 2 |, where, C is the contrast, _{M 1} is the average image intensity of the first region of interest, _{M 2} is the average image intensity of the second region of interest. In various embodiments, the determined difference is analyzed to determine whether it is in the reached state or has reached the reached state. Once the defined reach status is obtained and the stop threshold is exceeded, the next part program instruction can be executed. Otherwise, if the stop threshold has not been exceeded, execution of the part program is stopped.

In various other embodiments, the determined difference is whether the difference is greater than a minimum allowable value, less than a maximum allowable value, or a minimum and a maximum allowable value if both are defined. Is compared to an acceptable value to determine if Once the defined tolerance is obtained, the next part program instruction is executed.

In various embodiments of the systems and methods of the present invention, target numerical values for image quality or characteristics are set by manual teaching. That is, in the teaching mode, the user manually operates the machine, for example, by adjusting the light source until the user's subjective examination of the image quality in the important area becomes good, and sets a target numerical value. Then, one value or a plurality of values, such as contrast and brightness, that match the image quality or characteristics are determined from the image data set by the user. In addition, these values are stored as reference values for future automatic execution of the part program and become target numerical values, and can be used for image characteristics related to the image contrast of the formula 1, for example.

Equation 1 can provide a numerical value that matches the light intensity gradient between two appropriately positioned regions of interest. That is, if in an area of interest an edge is located between these two regions of interest, this number and the corresponding light intensity gradient will be consistent with the image characteristics that affect most edge location determination algorithms. Reproducing a particular numerical value of this type therefore regenerates an image of the edge leading to a reproducible edge position calculated from the image data.

The user can also perform an iterative procedure involving additional operations in critical areas to change or supplement the light source settings during or during manual teaching. For example, after setting the input light intensity command value and determining the value determined by the image quality or characteristics,
The user can position the edge in the critical area in a predetermined manner and store the positioning for later reference. The user can then adjust the light source to the input light intensity command value, such as the positioning of the edge in the critical area, match the new one or more values, match the image characteristics from the image data, and repeat additional operations. Execution and the like can be performed.

Since the ultimate goal of setting the input light intensity value of the light source is reliable and reproducible edge positioning, the user can determine which numerical values are within acceptable edge positioning values, ie, within an accurate tolerance. The results of the edge positioning data can be analyzed to determine if they match the numerical image characteristics. This method is used to set the optimal target value of the image characteristic as well as the allowable range of the target value of the image characteristic. Preferably, two additional multi-area attribute values are defined. The operating mode value indicates whether the selected image quality has been determined based on the illumination by the selected light source, or whether it has been determined based on all active light sources.

The second number indicates whether the image data in the region of interest should be filtered to exclude pixels with extreme image quality values. For example, if the image quality is based on lightness, the filter
It can be used to exclude unusually bright or unusually dark pixels when determining if the determined image quality is within a selected tolerance.

Once the user sets the dimensional data for the size and position defining the multi-area image quality tool and the data defining the attributes used when using the defined multi-area image quality tool, the corresponding part is set. Once the program instructions are added to the part program to be created, the user can create the next part program instructions, such as instructions to create another multi-area image quality tool. The user continues working in this manner until the part program is completed and stored in the part program storage unit 131.

When the imaging system 10 receives an instruction to execute a part program, the part program generator / output unit 170 under the control of the controller 120
Starts reading the instruction of the part program stored in the part program storage unit 131 and executes the read instruction. At this time, the instruction of the part program may include an instruction for turning on / off one or more of the light sources 220 to 240 or an instruction for adjustment. Such an instruction includes an input light intensity instruction value.

Part Program Generator / Output Unit 1
When 70 reads such an instruction to the light source, part program generator / output unit 170 outputs the input light intensity command value to input light intensity command value adjuster 180. Input light intensity command value adjuster 1 under control of controller 120
80 outputs the initial input light intensity value to the power supply 190, while the part program generator / output 170
The command is output to the power source 190 of the driven light sources 220 to 240. The power supply 190 then provides a signal through each of the signal lines 222, 232, and 242 connected to one or more light sources 220-240 of the imaging system component 200 to reduce the initial input light intensity value. The light sources 220 to 240 are driven based on the above.

For a multi-area image quality system, method, and part program including instructions associated with a graphical user interface according to the present invention, the part program generator / output 170
An instruction for defining the positioning, size, and angle of the multi-area image quality tool is read, and the multi-area image quality tool definition data in the multi-area interest region definition storage unit 132 and the multi-area attribute data in the multi-area characteristic storage unit 133 are stored. .

The input light command adjuster 180 under the control of the controller 120 determines whether the selected image quality has been determined based on illumination by the selected light source, or to all active lightable light sources. An access is made to the multi-area attribute data stored in the multi-area characteristic storage unit 133 which determines whether or not the multi-area attribute is determined based on the determination. If the selected image quality is determined based on all of the active light sources, the input light intensity command adjuster 180 provides a multiple region of interest output so that the region of interest can be extracted from the captured image. To the container 160.

On the other hand, if the selected image quality is determined based solely on the illumination by the selected light source, the input light intensity command value adjuster 180 will first operate in the initialization storage 134. The settings of the light sources 220 to 240 set to be turned on are stored, and the other light sources being operated are turned off. The controller 120 is connected to the camera system 26 through the input / output interface 110 and the signal line 262.
Send a signal to 0. Then, the camera system 260 captures a new image illuminated only by the selected light source in order to output the newly captured image to the adjustment and control unit 100. Further, the input / output interface 110 under the control of the controller 120 includes a memory 130
The newly captured image is stored in the captured image storage unit 135.

Subsequently, the multiple region of interest generator 150
Reads the definition of the multiple area ROI stored in the multiple area ROI definition storage unit 132 in order to define the dimensions such as the position and size of various regions of interest defined in the multiple area comparison instruction. And a plurality of areas of interest output device 1
Numeral 60 extracts image data from the captured image of the region of interest created by the multiple region of interest generator 150 at the position indicated by the multiple region of interest generator 150.

In various embodiments, the multi-area region of interest output unit 160 analyzes the extracted portion of the image and stores a multi-area characteristic to determine image quality or characteristics used to determine state of arrival. Part 1
The multi-area attribute data stored in 33 is accessed. Then, the multi-area interest region output unit 160 indicates whether the light source defined by the multi-area attribute data stored in the multi-area characteristic storage unit 133 needs to be adjusted, and indicates the quality of the image or characteristic determined with respect to the arrival state. If so, a defined image quality or characteristic is created and determined. Otherwise, the multi-area region of interest output unit 160 instructs the part program generator / output unit 170 to retrieve the next part program instruction.

In various other embodiments, the multi-area region of interest output unit 160 analyzes the extracted portion of the image and determines tolerances to be used for comparison with the determined image quality or characteristics. To access the multi-area attribute data stored in the multi-area characteristic storage unit 133 for the purpose. And a plurality of areas of interest output device 16
0 indicates whether the light source defined by the multi-area attribute data stored in the multi-area property storage unit 133 needs to be adjusted, and if the quality of the image or the property determined in comparison with the allowable range is indicated. Create and determine defined image quality or characteristics. Otherwise, the multi-area region of interest output unit 160 instructs the part program generator / output unit 170 to retrieve the next part program instruction.

On the other hand, if the multi-area region-of-interest output unit 160 determines that the adjustment of the selected light source is necessary, the multi-area region-of-interest output unit 160 instructs the input light intensity command value adjuster 180. Put out. Then, the input light intensity command value adjuster 180 adjusts the light intensity command value of the selected light source. Then, the input light command value adjuster 180 controls the power supply 190 so that the light intensity output of the selected light source is adjusted.
Output the adjusted light intensity command value of the selected light source.

As in the various embodiments described above, the selected image quality or characteristic is first adjusted for the attainment state stored in the multi-area characteristic storage 133, and the result is compared with the stop threshold. It is done. In particular, in such an embodiment, the multi-area ROI output device 160
Determines whether the selected image quality or characteristic has reached the reaching state stored in the multi-area characteristic storage unit 133. If the determination of the multi-area ROI output unit 160 is to increase the light intensity, the input light intensity command value adjuster 180 is output to the power supply 190 to increase the output light intensity of the selected light source. Increase the adjusted light intensity command value. On the other hand, if the decision of the multi-area region of interest output device 160 is to reduce the light intensity, the input light intensity command value adjuster 180 may be used to reduce the output light intensity of the selected light source. Power supply 1
The adjusted light intensity command value output to 90 is reduced. This means that the selected image quality or characteristic is the measured average brightness contrast, and the arrival state stored in the multi-area characteristic storage 133 maximizes the measured average brightness contrast between the regions of interest. This is possible in both cases when the measured average brightness contrast has not yet reached the maximum value.

Once the light intensity of the selected light source is adjusted, the camera system 26 controlled by the controller 120
0 captures another image of the device under test and outputs the captured image to the input / output interface 110 via the signal line 262. The input / output interface 110 controlled by the controller 120 causes the captured image storage unit 135 to store the newly captured image.

Then, the multi-area region of interest 160 controlled by the controller 120 re-extracts a portion of the newly captured image as defined by the multi-region of interest generator 150. Further, the multi-area area of interest 160 re-determines whether the selected image quality of the extracted area, or a characteristic, has reached the arrival state stored in the multi-area characteristic storage unit 133. If determined to be reached, the multi-area region of interest 160 indicates to the part program generator / output 170 that the next part program instruction should be executed. Note that if the selected light sources are adjusted by turning off the other working light sources, those light sources are turned on again. In particular, the input light command value adjuster 180 reads out the stored value of the other operating light source from the initial setting storage unit 134 and outputs the input light intensity value stored again in the power supply 190. Alternatively, it is also possible to repeat the above-described light source adjustment to capture a new image. Such a process is repeated until the image quality in the portion extracted from the captured image reaches the reaching state stored in the multi-area characteristic storage unit 133.

As in the various other embodiments described above, the selected image quality or characteristic is stored in the multi-area characteristic storage 133 until the selected image quality or characteristic is within the success threshold or tolerance. It is compared to a stored success threshold or tolerance. If the comparison of the selected image quality or characteristic with the tolerance determined by the multi-area region of interest output unit 160 increases the light intensity, the input light intensity command value adjuster 180 is selected. In order to increase the output light intensity of the light source, the light intensity command value output to the power supply 190 is increased. On the other hand, if the multi-area region of interest output device 16
If the comparison by zero is to decrease light intensity, the input light intensity command value adjuster 180 adjusts the adjusted light intensity command output to the power supply 190 to reduce the output light intensity of the selected light source. Decrease the value.

This is the average brightness contrast for which the selected image quality or characteristic is measured, and is measured between regions of interest whose arrival state stored in the multi-area characteristic storage unit 133 exceeds an allowable value. When average brightness contrast, it can happen in both cases when the measured average brightness contrast has not yet exceeded the tolerance. Accordingly, if the comparison of the tolerance with the selected image quality or characteristic is such that the light intensity is reduced, the input light intensity command value adjuster 180 may be used to reduce the output light intensity of the selected light source. The adjusted light intensity command value output to 190 is reduced.

Once the light intensity of the selected light source is adjusted, the camera system 26 controlled by the controller 120
0 captures another image of the device under test and outputs the captured image to the input / output interface 110 via the signal line 262. The input / output interface 110 controlled by the controller 120 causes the captured image storage unit 135 to store the newly captured image.

Then, the multi-area ROI 160 controlled by the controller 120 re-extracts a part of the newly captured image as defined by the multi-ROI generator 150. In addition, the multi-area region of interest 160 redetermines whether the selected image quality, or characteristic, of the retrieved region is within tolerances defined in the part program. If so, the multi-area region of interest 160 indicates to the part program generator / output 170 that the next part program instruction should be executed. Note that if the selected light sources are adjusted by turning off the other working light sources, those light sources are turned on again. In particular, the input light command value adjuster 180 reads out the stored value of the other operating light source from the initial setting storage unit 134 and outputs the input light intensity value stored again in the power supply 190. Alternatively, it is also possible to repeat the above-described light source adjustment to capture a new image. Such a process is repeated until the image quality at the part extracted from the captured image falls within the allowable value defined in the part program.

Preferably, the various light sources 220 to 240 include a plurality of light sources colored in different colors. By way of example, stage light 220 may include a red light source, a green light source, and a blue light source. Each of the red, green, and blue light sources of the stage light 22 is connected to a power source 19.
0 can be separately driven.
Therefore, the selected light source in the multi-area characteristic data stored in the multi-area characteristic storage unit can specify not only the light source to be adjusted but also the specific color of the multi-color light source to be adjusted. Is preferred. That is, if the image characteristics are determined based only on the illumination by the selected light source, turning off the other light sources includes turning off the other colors of the multi-color light source.

FIG. 7 is a flowchart outlining one embodiment of a method for creating part program instructions using the multi-area image quality tool of the present invention. Step S100 is started and the following step S
At 110, the user places the DUT within the field of view of the imaging system so that measurements can be made with the imaging system. Next, in step S120, the user creates a part program command setting related to a light intensity setting value of one or more light sources of the imaging system. This sets the input light intensity command value of one or more selected light sources to a programmed value. Of course, if the user has already created the instruction of the part program, step S120 can be omitted, and the light intensity instruction value of the selected one or more light sources uses the previously programmed value. It may be. Furthermore, if the user has previously placed the device under test in the field of view of the imaging system or has begun to create the part where the part program instructions will be executed, skip the possible parts of steps S110 and S120. You can also. Then, the process proceeds to step S130.

In step S130, one or more selected light sources are activated using the programmed input light intensity command value. Next, in step S140, the image of the device under test is captured when illuminated by one or more selected light sources driven at the programmed input light intensity. Then, the image captured in step S150 is displayed. If the image has been captured and displayed in advance, steps S110 to S150 can be omitted.

At step 160, the user places a multi-area image quality tool at the selected location of the captured image. As mentioned above, the multi-area image quality tool is such that the connecting bar of the multi-area image quality tool extends across key features of the captured image, and the regions of interest are close to useful features On the captured image. Further, when the multi-area image quality tool is arranged at the selected position of the captured image, the user adjusts dimensions such as the size and position of the multi-area image quality tool to a value desired by the user. Then, the process continues to step S170.

In step S170, the user inputs the multi-area attribute data to the multi-area image quality tool. As described above, this multi-area attribute determines whether the selected light source to be adjusted, the selected image quality is determined by using the selected light source or all operable light sources, within the region of interest. The image data may include whether to filter and / or a selected image quality tolerance. Subsequently, in step S180, one or more part program instructions are created based on the location and dimensions of the multi-area image quality tool and the input multi-area attribute data. Next, in step S190, a determination is made whether the user desires to create another multi-area image quality tool on the captured image. If so, the process returns to step S160. Otherwise, continue to step S200.

In step S200, a determination is made as to whether it is desired to create an instruction for another part program. If so, step S210 follows. Otherwise, the process jumps to step S220. In step S210, a fragment of another part program is generated. In particular, if such other part program instructions include a multi-area image quality tool to add to different captured images of the device under test, steps S140-S200, possibly S1.
Steps 20 and S130 are repeated as part of step S210. When all the desired part program commands are created, the process jumps to step S220, which is the end.

FIGS. 8 and 9 show an embodiment of a method for executing a part program created by using the multi-area image quality tool according to the present invention. Note that the flowcharts described in FIG. 8 and FIG.
It is one flowchart of what is described separately, and is respectively connected in A in FIG. 8 and A in FIG. 9, and B in FIG. 8 and B in FIG. Step S300 shown in FIG. 8 is started, and the following step S3
At 10, an object to be measured using the imaging system is placed in the field of view of the imaging system. Next, step S
At 320, the first part program instruction or the part program instruction next to the part program being executed is executed. Then, in step S330, it is determined whether an instruction has been executed for multi-area image quality. If executed, step S340 follows. If not, the process returns to step S320.

In step S340, an independent mode using only the selected light source for illumination of the object to be measured or a dependent mode using all operable light sources for illumination of the object to be measured is selected. A hard decision is made. If the independent mode is selected here, step S350
If the dependent mode is selected, the process jumps to step S360. In step S350, only the light source selected in the selected multi-area image quality command is driven using the input light intensity command value of the selected light source defined by one or more previously executed part program commands. You. Then, the process continues to step S370. In contrast, in step S360, all operable light sources are driven with the input light intensity command values defined by one or more part program commands, and continue to step S370.

In step S370, an image of the device under test is captured. Then, in step S380, the image data is extracted from the captured image in the region of interest defined in the executed multi-area image quality instruction. Next, in step S390, the image quality, such as contrast, selected in the multi-area image quality instruction being executed is determined from the extracted image data in the defined region of interest, and continues to step S400.

In step S400, a determination is made as to whether the selected image is within an acceptable range or value defined in the multi-area image quality instruction being executed. If so, step S4 in FIG.
Jump to step S20, otherwise jump to step S410. In step S410, the input light intensity values of one or more selected light sources are adjusted based on the determined image quality, and the process returns to step S340. On the other hand, in step S420 in FIG. 9, it is determined again whether the independent mode is selected. If it is selected, the process jumps to step S430. If it is not selected, the process jumps to step S440.

In step S430, if there is any unselected working light source, it is driven with the initial input light intensity command value defined in one or more previously executed part program commands, while the selected light source is , Continue to be driven with the adjusted input light intensity. Then, the process jumps to step S450. On the other hand, in step S440, all the light sources are driven with the input light intensity command values as they are. Thus, the unselected actuating light source will continue to be driven with the previously commanded input light intensity command value, while the selected light source will continue to be driven with the adjusted input light intensity. Then, the process jumps to step S450.

In step 450, the image of the device under test is captured with the input light intensity command value including the adjusted light intensity command value of the selected light source. Then, the instruction of the next part program is executed. Step S320 in FIG.
Return to Preferably, the aforementioned systems and methods in the present invention are based on automatic program operations. However, the systems and methods of the present invention operate in much the same way when lighting commands are issued manually at one or more input devices 104 or by step-by-step operation of an imaging system.

The control system unit 100 can be implemented by a programmed general-purpose computer. However, the control unit 100 may be a dedicated purpose computer, a programmed microprocessor or microcontroller and peripheral IC elements, an ASIC or other IC, a digital signal processor, an electrically wired circuit or logic circuit such as an individual element circuit, PLD, PL
A, a programmable logic device such as an FPGA or a PAL can be used. Generally, FIG.
Any device capable of implementing the flowcharts shown in FIGS. 8 and 9 can be used as the control system unit 100.

The control system unit 100 shown in FIG.
Each control circuit or control element can be understood to be a suitably programmed general purpose computer unit. Alternatively, the control system unit 100 shown in FIG.
Each control circuit or control element of the ASIC is a physically separate hardware circuit in the ASIC or a FP.
It can be implemented by using GA, PLD, PLA, PAL, or by using individual logic elements or individual circuit elements. in this way,
Various specifications can be used for each control circuit or control element of the control system unit 100 shown in FIG.

Further, the control system 100 includes:
It can be implemented as software executable on a system such as a programmed general purpose computer, special purpose computer, microprocessor, and the like. In such a case, the control system unit 100 can also be implemented by physically incorporating a software system and / or hardware such as an image system hardware and a software system. As described by the embodiments described above, the present invention is not limited to only the examples disclosed herein, but may be embodied in many alternatives, modifications, and types in accordance with the teachings herein. Implementation is possible. Therefore, the embodiments of the present invention are not limited to the above-described embodiments, and various changes can be made without departing from the scope of the present invention.

[0095]

As described above, according to the illumination adjusting method of the present invention, the quality of the illumination can be adjusted accurately by analyzing the selected image quality in the region of interest. Further, according to the lighting adjustment device of the present invention, it is possible to easily adjust the lighting state using the graphical user interface.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of an embodiment of an image system using a light intensity control system of the present invention.

FIG. 2 is a first embodiment of the multi-area image quality tool of the present invention and sizing of two regions of interest and their relative spacing.

FIG. 3 is a portion of a first exemplary image and a second part of a graphical user interface of a multi-area image quality tool used to select two or more regions of interest surrounding a region of interest. It is one embodiment.

FIG. 4 is a second exemplary image portion and a fourth embodiment of a second embodiment of a multi-area image quality tool.

FIG. 5 is a third exemplary image portion and a first embodiment of a multi-area image quality tool.

FIG. 6 is a fourth exemplary image portion and a fifth embodiment of the multi-area image quality tool of the present invention.

FIG. 7 is a flowchart outlining one embodiment of a method for determining multi-area image quality by a part program.

FIG. 8 is a flowchart outlining one embodiment of a method for adjusting illumination of an imaging system associated with a region of interest of an image.

FIG. 9 is a flowchart outlining one embodiment of a method for adjusting illumination of an imaging system associated with a region of interest of an image.

[Explanation of symbols]

 Reference Signs List 10 image system 20 device under test 100 control system unit 102 display 103 signal line 104 input device 105 signal line 110 input / output interface 120 controller 130 memory 131 part program storage unit 132 multiple area region of interest definition storage unit 133 multiple area characteristic storage unit 134 Initial setting storage unit 135 Captured image storage unit 150 Multiple regions of interest generator 160 Multiple regions of interest output unit 170 Part program generator / output unit 180 Input optical command value adjuster 190 Power supply 195 Data / control bus 200 Image system component unit 210 Stage 212 Central transparent member 220 Stage light 222 Signal line 230 Coaxial light 232 Signal line 240 Surface light 242 Signal line 250 Lens System 260 camera system 262 signal line

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H04N 7/18 H04N 7/18

Claims (19)

[Claims] 1. A method for adjusting the illumination of a portion of an object to be measured corresponding to an important region in an image of an object to be measured, which is generated using an image system including a controllable illumination system and an imaging system. Illuminating the device under test with a possible illumination system to obtain an image of the device under test, image data of at least a first region of interest and a second region of interest positioned relatively within the critical region; An image data extracting step to be extracted; an image quality selecting step of selecting at least one image quality such as a contrast and an average brightness from the extracted image data; at least a relation between the regions of interest in which the selected image quality is selected in advance. Adjust the lighting conditions of the lighting system until Lighting adjustment method characterized by comprising the lighting conditions adjustment process, which. 2. The illumination adjusting method according to claim 1, wherein an image capturing step, an image data extracting step, and an image quality selecting step are performed until at least the selected image quality satisfies a relationship between preselected regions of interest. And a lighting condition adjusting step is repeated. 3. The lighting adjustment method according to claim 1, wherein the light source comprises a plurality of selectable light sources, each of the light sources having a controllable light intensity. Selecting at least one of a plurality of selectable light sources, and adjusting at least one light intensity of the at least one selected light source. 4. The illumination adjustment method according to claim 1, wherein the controllable illumination system includes a focus adjustment subsystem, and the illumination state adjustment step includes adjustment of a focus adjustment subsystem. Lighting adjustment method. 5. The illumination adjustment method according to claim 1, wherein, after the illumination condition adjustment step, image data is extracted from an important area of the image, an image data extraction step, and the image data extracted from the important area is processed. An illumination adjustment method, comprising: an image data processing step. 6. The illumination adjustment method according to claim 5, wherein the important area includes an edge, and the image data processing step includes an analysis step of analyzing image data extracted from the important area to determine an edge position. A lighting adjustment method comprising: 7. The illumination adjustment method according to claim 1, wherein at least one of the image qualities is either contrast or brightness. 8. The illumination adjustment method according to claim 7, wherein contrast is selected for the image quality in the image quality selection step, and the first and second regions of interest are satisfied in the illumination state adjustment step. A method for maximizing a difference in contrast in the image data. 9. The illumination adjustment method according to claim 1, wherein the image system includes a graphical user interface including display means such as a display for displaying a captured image of the device under test. Displaying a graphical user interface having at least first and second regions of interest drawn on a captured image of the device under test. 10. The lighting adjustment method according to claim 9, wherein the graphical user interface is selectable, and a selecting step of selecting the graphical user interface; and at least one of the first and second regions of interest. And a dimension setting step of setting at least a size of the first and second regions of interest based on an input received from a graphical user interface. Method. 11. The lighting adjustment method according to claim 1, wherein the image system comprises a computerized control system, and is automatically controlled by the image system to automatically execute a program instruction, thereby at least A lighting adjustment method, wherein one of the steps is performed automatically. 12. The illumination adjustment method according to claim 1, wherein the first and second regions of interest are positioned at a defined position associated with the important region. 13. The illumination adjustment method according to claim 12, wherein the defined position associated with the important region is one position near the important region and a position spaced apart from the important region in the image. A lighting adjustment method characterized by the above-mentioned. 14. The illumination adjustment method according to claim 1, wherein at least one region of interest is positioned so as to exhibit substantially uniform image light intensity over a majority of the region of interest. Method. 15. The method of claim 1, wherein at least one region of interest is positioned such that a majority of the region of interest has an approximately uniform pattern of the device under test having a substantially uniform surface. A lighting adjustment method characterized in that: 16. A controllable illumination system, an imaging system, a processor, a display means such as a display for displaying image data, and a graphical user displayable on said display means and used for displaying a plurality of regions of interest. An imaging system comprising an interface, image data of the first and second regions of interest used to control the lighting system, wherein the graphical user interface is a combination of a plurality of borders, each border The combination of defines the position and size of one of the multiple regions of interest displayed on the image, and the combination of each boundary line can be positioned independently on the image, and each boundary line The size of the combination can be adjusted independently on the image. Lighting adjustment device according to claim. 17. The apparatus of claim 16, wherein the graphical user interface is arranged in an initial shape in an image display based on points on the image provided by the user to the processor. 18. The apparatus according to claim 16, further comprising a plurality of display portions of a region of interest included in a prescribed condition of the graphical user interface. 19. The apparatus according to claim 18, wherein the display portion comprises a specific color for at least one line extending between the regions of interest or a set of lines extending between the regions of interest or boundaries of the region of interest. , These lines or colors are graphical
A lighting adjustment device, which is a prescribed condition of a user interface.