JP2002090176A - Multilayer coil and electromagnetic induction type displacement sensor using the same - Google Patents

Abstract

(57) [Object] To provide a shielded laminated coil type electromagnetic induction type displacement sensor. A first sheet having a hole in the center is provided on a first sheet.
A plurality of arc-shaped first conductive patterns 12 and 14 are formed concentrically. Further, a plurality of second conductive patterns 22 and 23 that complement the first conductive patterns 15 and 16 are formed on a second sheet 20 having a hole 13 at the center. Then, the plurality of first conductive patterns 12, 14 and the plurality of second conductive patterns 22, 2,
The first sheet 10 and the second sheet 20 are overlapped to form a pair sheet 30 so as to conduct at one end of each of the sheets 3. Thus, a plurality of basic coils having different radii are created in the pair sheet 30. Then, a plurality of the pair sheets 30 are stacked. Thereby, a primary coil and a secondary coil having different radii are formed. Then, a magnetic body connected to a displacement symmetric object is inserted into a hollow portion formed by laminating the holes 13.
Thereby, a small electromagnetic induction type displacement sensor can be realized.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a laminated coil having a simple structure and easy to assemble, and an electromagnetic induction type displacement sensor using the laminated coil. In particular, the present invention relates to a laminated coil in which a ground conductor pattern and one or more conductive patterns are formed on a sheet, and the sheets are laminated to form one or more coils shielded from electromagnetic fields and electromagnetic waves.
Further, the present invention relates to an electromagnetic induction type displacement sensor which enables high-precision displacement detection using the laminated coil.

[0002]

2. Description of the Related Art Conventionally, there is an electromagnetic induction type displacement sensor using a plurality of coils. It is a sensor that displaces a core in a coil and detects a displacement of an object linked to the core by utilizing a change in mutual inductance of the coil due to the displacement of the core. For example, FIG. 22 shows a configuration diagram thereof. This electromagnetic induction type displacement sensor includes a primary coil 2 wound around a bobbin 1, a secondary coil 3, and a displaceable core 4 connected to a displacement object (not shown).

In FIG. 22, when an AC voltage E ₁ is applied to the primary coil 2, an AC voltage E ₂ is obtained from the secondary coil 3 according to the turn ratio. The AC voltage E ₁ and the AC voltage E ₂ have the following relational expressions.

[Number 1] _{E 2 = k · M · E} 1 ········ (1) Here, k: proportional constant, M: is the mutual inductance.

At this time, the core 4 linked to the object to be displaced
The mutual inductance M changes. That is, displacement
When the object is displaced, the AC power of the secondary coil 3 is
Pressure E _TwoChanges in amplitude. The displacement of the displacement object is, for example,
This E_TwoWas calculated based on the change in the amplitude.

[0005]

However, the conventional coil device of the electromagnetic induction type displacement sensor is a device in which a conductor coated on a bobbin is wound by coiling technology, and does not meet the recent demand for miniaturization. . In addition, since the enamel wire is wound around the bobbin, the terminal processing thereof is complicated. That is, it is necessary to set the terminal to a bobbin and wind an enameled wire, which makes the operation difficult. Further, it is difficult to manufacture a large number of devices in a short time because the enamel wire is wound around the bobbin. In addition, there are variations in the winding of the conductive wire by the coiling technique, and when this is used for an electromagnetic induction type displacement sensor, high accuracy measurement may not be guaranteed. Furthermore, in an electromagnetic induction type displacement sensor, the linearity and the sensitivity of the detected displacement may be better if the number of turns is not uniform along the axial direction of the coil but is increased from the end to the center, for example. is there. However, it is difficult to obtain such an uneven distribution of the number of turns by the coiling technique.

In order to reduce the size of the coil device, for example, there is a laminated coil disclosed in Japanese Patent Application Laid-Open No. 6-333742 (FIG. 23). This is because a semicircular conductor 6 is formed on a ceramic green sheet 5, the conductors 6 are stacked alternately in the direction of the arc as shown in the figure, and vias formed at the end of the conductor 6 are formed. The coil is formed by conducting through the hole. However, since only a single coil is formed, it cannot be used for a coil of an electromagnetic induction type displacement sensor using a combination of a primary coil and a secondary coil as shown in FIG. Further, assuming that this coil is used for an electromagnetic induction type displacement sensor, it is conceivable to prepare two coils and connect them in series in the axial direction of the displacing core. However, in this case,
Since the laminated coils are not shielded, they cannot avoid the influence of external electromagnetic fields and electromagnetic waves. That is, it has been difficult to detect the displacement of the object with high accuracy.

The present invention has been made to solve the above problems, and an object of the present invention is to simplify the assembly of a coil. In particular, it is an object of the present invention to eliminate the work of winding an enamel wire around a bobbin so that a large number of devices can be manufactured in a short time. Another object is to provide a coil which can be easily assembled and can be applied to a coil of an electromagnetic induction type displacement sensor. Another object is to provide a first type sheet on which a ground conductive pattern and a plurality of first type conductive patterns are formed, and a second type sheet on which a ground conductive pattern and a plurality of second type conductive patterns are formed. The effect is to eliminate the effects of external electromagnetic fields by alternately stacking sheets with one another to realize a shielded coil or coils. Another object of the present invention is to provide a highly accurate electromagnetic induction type displacement sensor using the laminated coil. Another object of the present invention is to simplify a method for forming a predetermined number of turns distribution along the axial direction of the coil. Thereby, a highly accurate electromagnetic induction type displacement sensor is realized. It is to be understood that these objects of the invention are not all intended to be met at the same time, and that there is one or more of the objects of the invention described above for each invention.

[0008]

In order to solve the above problems, a laminated coil according to the present invention is a laminated coil formed by laminating sheets on which conductive patterns are formed and forming the conductive patterns continuously. Then, on the first sheet, a ground conductive pattern uniformly formed on the outer peripheral portion and a first conductive pattern having a discontinuous portion made of an arc component are formed inside the ground conductive pattern, and are uniformly formed on the second sheet on the outer peripheral portion. A second conductive pattern having a length equal to or longer than the discontinuous length of the first conductive pattern and complementary to the discontinuous portion is formed inside the ground conductive pattern formed in the first conductive pattern and the first conductive pattern and the second conductive pattern. The first sheet and the second sheet are overlapped to form a pair sheet so that the first sheet and the second sheet are electrically connected at one end thereof. The emission is made conductive at the other end and forming with.

On the first sheet, a ground conductive pattern uniformly formed on the outer peripheral portion and a first conductive pattern formed of an arc component and having discontinuous portions inside the ground conductive pattern are formed. Then, a ground conductive pattern uniformly formed on an outer peripheral portion of the second sheet and a second conductive pattern having a length equal to or longer than the discontinuous length of the first conductive pattern and complementary to the discontinuous portion are formed inside the ground conductive pattern. . Here, the shape of the sheet is arbitrary such as a circular plate, a square plate, a polygonal plate, and an elliptic plate. The material of the sheet is arbitrary as long as it is insulative, and resins, ceramics, and the like can be used. The concept of the arc component is part of a circle, part of a spiral,
Includes a part of a closed curve such as a spiral, an ellipse, etc. that is wound many times. In particular, it is not a strict meaning of a part of a perfect circle, but a broad concept including a part of a curve. The point is that the coils need only be formed when they are continuous. Further, the first conductive pattern and the second conductive pattern may be completely the same pattern or may not be the same. Also, the first conductive pattern and the second conductive pattern
The type of the conductive pattern may be the same or may not be the same. For example, one may be spiral and the other arc-shaped. The formation position of the conductive pattern and the grounding conductor pattern may be formed on the surface of the sheet or may be incorporated in the thickness direction of the sheet (at the same thickness as the sheet). Although the forming method is arbitrary, for example, it can be formed by screen printing or the like. When a conductive pattern is formed on the sheet surface, the first conductive pattern and the second conductive pattern are formed on one surface of the first sheet and the second sheet, respectively, and are formed so as to be conductive at one end to the other surface. You. However, this conduction position does not necessarily have to be at the end of the pattern. For example, the front and back surfaces may be electrically connected at the center of the arc. That is, a part of the arc may be formed on the front surface of the sheet, and the remaining part may be formed on the back surface of the sheet. Of course, only the second conductive pattern is formed on the front and back of the sheet in this way, and the first conductive pattern is formed only on one surface of the sheet, and the second conductive pattern is used as a function of connecting the first conductive pattern. May be. When the conductive pattern is embedded in the thickness direction of the sheet, it is desirable to interpose an insulating film between the first sheet and the second sheet as necessary. In the case of forming a buried mold, insert molding using a conductive pattern is used for resin, and firing is performed after molding the conductive pattern and clay for ceramics. The position where the grounding conductor pattern is formed is formed in a ring shape with the same thickness along the side wall of the sheet, an outer peripheral portion on at least one surface of the sheet, or a side wall corresponding to the outer peripheral portion of the sheet, or the sheet. (The U-shaped cross section) can be formed on the outer periphery of both sides of the side wall and the subsequent sheet. Ring shape, or
When formed on the side walls and the outer peripheral portions on both sides, a cylindrical shield can be obtained only by laminating the sheets, which is the most desirable. If the ground conductor pattern is formed only on the outer peripheral portion of the surface of the sheet, it is necessary to connect to the ground conductor pattern of another sheet by a via hole or the like. Therefore, it is desirable to increase the number of via holes. The method of forming the ground conductor pattern is the same as the method of forming the first and second conductive patterns. The first conductive pattern and the second conductive pattern are stacked such that the first sheet and the second sheet are electrically connected at one end to form a pair sheet. That is, one pair sheet forms one turn of the coil in the typical and simplest case. Note that the number of turns formed by one pair sheet is not limited to one turn. It may be 1 / k (k is a natural number) turns. In this case, one turn is performed with k pair sheets. In particular, if the first conductive pattern and the second conductive pattern are arcs having the same angle of π, π / 2, etc., they can be made the same pattern, and only the rotation angle of the sheet needs to be adjusted to be laminated. Therefore, manufacturing is simplified. When the conductive pattern is formed in a spiral shape as in claim 2,
Multiple turns will be formed. Then, a plurality of the paired sheets are vertically stacked so that the first conductive pattern and the second conductive pattern of the different paired sheets are conductive at the other end. For example, if n layers are stacked, in the simplest case, n
A coil of turns is formed. In the case of the configuration of the second aspect, when m-turns are formed by one paired sheet, the coil is nxm turns in total. In addition, when the paired sheets are stacked as one set, the number of layers of the sheets becomes an even number as a whole, but a sheet of a different type from the adjacent sheet may be stacked on one side. That is, the lower end layer and the upper end layer may be the same type of sheet, and the number of sheet layers may be odd. The invention described in the present claim naturally includes the case where another sheet is laminated on both ends of the laminate and added to the laminate of the paired sheets. By laminating in this way,
Ground conductors formed on the outer peripheral portions of the first sheet and the second sheet are electrically connected, and a shield surface is formed on a side surface thereof. Therefore, a laminated coil in which the influence of external electromagnetic waves and electromagnetic fields is reduced. Further, in this coil, since the operation of winding the enamel wire around the bobbin is eliminated, the production is extremely simple, and there is an effect that a large number of coils can be produced in a short time. Furthermore, since the terminal treatment of the enameled wire for connecting the enameled wire to the terminal of the bobbin is not required, the manufacturing is extremely simple.

Further, according to the laminated coil of the present invention, the first conductive pattern composed of an arc component is a spiral conductive pattern, and the winding direction of the second conductive pattern is opposite to that of the first conductive pattern. A spiral conductive pattern,
The first sheet and the second sheet are connected so that the outer peripheral end or the inner peripheral end of the conductive pattern is electrically connected to the outer peripheral end or the inner peripheral end of the second conductive pattern.
It is characterized in that the sheets are stacked to form a pair sheet, a plurality of the pair sheets are stacked vertically, and the first conductive pattern and the second conductive pattern of different pair sheets are formed to be conductive at the other end.

The winding direction is as follows when a current flows clockwise.
It means the direction in which the radius decreases or the direction in which the radius increases. Conversely, based on the winding method that reduces the radius,
The winding direction may be defined as right-handed or left-handed. That is, in the pair sheet, both the first conductive pattern and the second conductive pattern
With reference to the positive direction of the axis of the coil, the first conductive pattern is formed so that when currents flow together clockwise, the radius becomes smaller and then becomes larger, or vice versa. And the second conductive pattern are connected. Also, the outer peripheral end and the inner peripheral end mean both ends of the spiral pattern, the end located on the side with the larger radius in the radial direction is the outer peripheral end, and the end located on the side with the smaller radius is the inner periphery. Called the edge. With this configuration, the spiral coil is formed by being connected in the layer direction. When considering the inductance per unit length in the layer direction, the inductance of the coil of the spiral pattern is larger than the inductance of the conventional laminated coil. Therefore, a thin laminated coil can be realized. this is,
For example, mounting on a printed circuit board is facilitated.

Further, according to the laminated coil of the third aspect, the first
The conductive pattern, the second conductive pattern, and the ground conductive pattern are formed on the upper surfaces of the first sheet and the second sheet, respectively.
The first conductive pattern and the second conductive pattern each have one end, and the grounding conductive pattern has conductive means penetrating in at least one or more places in the layer direction. Each pattern is formed on the upper surface of each sheet. The formation can be realized by a printing method such as screen printing. Therefore, it can be produced in large quantities at low cost. In addition, a conductive means such as a via hole or the like, for example, penetrated in the layer direction is provided at a place where each pattern is connected.
This ensures that the first conductive pattern and the second conductive pattern and the ground conductors of different sheets are conductive. Therefore, the manufacture of the laminated coil is simplified.

According to a fourth aspect of the present invention, there is provided a laminated coil in which sheets on which conductive patterns are formed are laminated to form a continuous conductive pattern. A plurality of first conductive patterns having concentricity are formed, a plurality of second conductive patterns complementary to a plurality of discontinuous portions of the first conductive pattern are formed on a second sheet, and a plurality of first conductive patterns facing the plurality of first conductive patterns are formed. The first sheet and the second sheet are overlapped to form a pair sheet so that each of the second conductive patterns is electrically connected at one end, and the pair sheets are stacked one above the other, and the first conductive pattern and the second The conductive pattern is formed by conducting at the other end.

A difference from the first aspect of the present invention is that a plurality of first conductive patterns and a plurality of second conductive patterns are provided, and no ground conductor pattern is provided. Except for this point, all items described in the first aspect of the present invention also apply to the present invention, and the description of the first aspect of the present invention is replaced with the description of the first aspect.
The first sheet having an arc component on the first sheet and having discontinuous portions
A plurality of conductive patterns are formed concentrically. In addition, the second sheet complements a plurality of discontinuous portions of the first conductive pattern on the second sheet.
A plurality of conductive patterns are formed. Next, the first sheet and the second sheet are stacked to form a pair sheet so that each of the plurality of second conductive patterns facing the plurality of first conductive patterns is conductive at one end. That is, as a typical example, a plurality of one-turn coils having different radii are formed on the pair sheet. When the conductive pattern is formed in a spiral shape, a plurality of coils of a plurality of turns (m turns) are formed in a concentric spiral shape. Next, a plurality of the paired sheets are stacked so that the plurality of first conductive patterns and the plurality of second conductive patterns of different paired sheets are electrically connected at the other ends. For example, n layers are stacked. This allows
In the simplest case, a plurality of coils of n turns with different radii are formed. When the conductive pattern is formed in a spiral shape, a plurality of concentric coils of nxm turns are formed as a whole. The formation of a plurality of conductive patterns will be described. In the simplest case, two conductive patterns are formed to form a primary coil and a secondary coil. Further, as described later, they may be connected in series to form one coil. Further, in a state after forming and laminating four conductive patterns, two parallel coils of a coil in which two coils are connected in series are connected by connecting two at one end in the uppermost conductive pattern. It is also possible to form. The parallel coil enables a primary coil and a secondary coil to be used in an electromagnetic induction type displacement sensor. Regarding the arrangement relationship of the plurality of coils, each conductive pattern may be formed in each area by dividing the radius on the sheet by p. That is, in the case where the conductive pattern of the paired sheet is spiral as in claim 5, p conductive patterns may be formed in each region divided by p by a concentric circle in the radial direction. The whole of the p conductive patterns may be spiral. In the case of forming a plurality of coils, as described above, if they are connected at one end, they become a series coil, and if they are not connected, they become a concentric parallel coil. These may be used properly depending on the application. In the case of a series coil, when connected at one end and folded, the winding direction is the same along the direction of current flow, that is, the winding direction is opposite to the positive direction of the coil axis. It is necessary to be. In short, the winding direction needs to be reversed with respect to the positive direction of the axis of the forward coil and the axis of the return coil. What is necessary is just to connect the 1st conductive pattern of a 1st sheet, and the 2nd conductive pattern of a 2nd sheet so that it may become such a relationship.

According to the laminated coil of the present invention, the first conductive pattern composed of an arc component is a spiral conductive pattern, and the second conductive pattern is a spiral whose winding direction is opposite to that of the first conductive pattern. The first sheet and the first sheet so that the outer peripheral end or the inner peripheral end of the plurality of first conductive patterns and the outer peripheral end or the inner peripheral end of the plurality of second conductive patterns opposed thereto are electrically conductive. A paired sheet is formed by stacking two sheets, and the paired sheets are stacked one above the other and formed by conducting the first conductive pattern and the second conductive pattern of different paired sheets at the other end.

Here, a plurality of spiral conductive patterns are formed concentrically as the first conductive patterns. Also, a plurality of spiral patterns whose winding direction is different from the first conductive pattern are formed as the second conductive pattern on the second sheet. The arrangement of the plurality of coils, the direction of the spiral of the conductive pattern, and the like are as described above. A first conductive pattern and a second conductive pattern,
When connected in a state in which a current flows in the direction of turning the right screw in the positive axial direction, the radius of the vortex is enlarged on one side and the radius of the vortex is reduced on the other side. A plurality of coils having such a relationship are formed for each region divided in the radial direction, or a plurality of conductive patterns are arranged in parallel to form a spiral as a whole.

Further, according to the laminated coil of the present invention, the laminated coil is provided on the uppermost layer with a plurality of first coils located immediately below the uppermost layer.
It is characterized by having a coupling sheet that connects two predetermined pairs of the conductive pattern or the second conductive pattern as a pair to form an arbitrary number of connection pairs. As a result, the tips of a predetermined pair of coils included in the uppermost layer are connected to each other, and a single coil, that is, a series-connected coil can be formed by reciprocation. Thereby, the inductance per unit length in the axial direction of one coil can be increased. Also, the signal input / output terminals can be set on the same bottom surface of the laminated coil. Therefore, a highly convenient laminated coil that can be surface-mounted is obtained. As described above, in the case of using a series coil, it is necessary to make a connection so that the winding direction of the coil is the same as the direction in which the current flows in the reciprocating coil.

The invention according to claim 7 is characterized in that the number of turns of each layer of the first conductive pattern or the second conductive pattern has a predetermined distribution along the axial direction of the laminated coil. By adopting such a configuration of the present invention, the number of turns along the axial direction of the coil is not uniform, and it is easy to obtain a predetermined distribution. That is, when this coil is used for an electromagnetic induction type displacement sensor, the sensitivity can be adjusted depending on the position of the core. For example, it is possible to improve the linearity of the detection output with respect to the core displacement by configuring the end portion of the coil in which the coupling with the core becomes small to increase the number of turns. Conversely, if the displacement detection range is limited only to the center of the coil, it is possible to realize a high-sensitivity, high-accuracy displacement detector by increasing the number of turns only at the center with good linearity. Become.

Further, according to the laminated coil of the present invention, the first sheet and the second sheet forming the paired sheet have a ground conductor pattern at the periphery thereof, and the paired sheets are laminated to form a side surface of the laminated coil. Is characterized in that a shield surface is formed. Thereby, a laminated coil including a plurality of coils having a shield surface on a side surface can be provided. In other words, for example, a shielded primary coil, 2
A laminated coil composed of the secondary coil can be provided. The modification regarding the arrangement of the ground conductor pattern is as described in the first aspect of the present invention.

According to the laminated coil of the ninth aspect, the first
The conductive pattern, the second conductive pattern, and the ground conductive pattern are formed on the upper surfaces of the first sheet and the second sheet, respectively.
The first conductive pattern and the second conductive pattern each have one end, and the grounding conductive pattern has conductive means penetrating in at least one or more places in the layer direction. The plurality of respective patterns are formed on the upper surface of each sheet. The formation can be realized by a printing method such as screen printing. Therefore, it can be produced in large quantities at low cost. In addition, a plurality of conductive means such as via holes, for example, penetrated in the layer direction, are provided at locations where the plurality of patterns are connected. This ensures that the plurality of first conductive patterns and the plurality of second conductive patterns and the plurality of ground conductive patterns are electrically connected. Therefore, it is easy to assemble a shielded laminated coil having a plurality of coils.

According to a tenth aspect of the present invention, in the laminated coil, a third sheet made of a conductive film is provided as an uppermost layer, and the third sheet is connected to the ground conductor pattern in a layer therebelow. Thereby, it is possible to shield the end face of the laminated coil. Therefore, it is a laminated coil having a plurality of coils and shielding external influences as much as possible.

The laminated coil according to the eleventh aspect has a bottom surface,
An electrode connected to one end of each of the plurality of first conductive patterns or second conductive patterns located at the lowermost layer is provided. Thus, signals can be directly input and output from the bottom surface, for example, from the printed circuit board. Therefore, a laminated coil that increases the mounting density in surface mounting is obtained. Note that the conductive pattern is the surface of the sheet (the inner surface when a laminated coil is used).
Then, by forming an electrode on the back surface (outer surface when a laminated coil is formed), forming a conductor pattern on a portion other than the electrode, and connecting it to a ground conductor pattern, it is possible to realize a shield on this end face. It becomes possible.

According to a twelfth aspect of the present invention, in the laminated coil, the first sheet and the second sheet forming the paired sheet have a hole in the center, and the paired sheets are laminated to form a hollow part in the center. It is characterized by. Since a hollow portion is formed inside the coil, the inductance of the coil can be adjusted by inserting a core into the hollow portion. Also, by connecting this core to a displacement measurement object, it is possible to configure an electromagnetic induction type displacement sensor.

The laminated coil according to claim 13 is a laminated coil formed by laminating sheets on which conductive patterns are formed, wherein the first conductive pattern is formed on an annular first sheet having a gap. The first sheets are sequentially laminated to form a first block having a gap perpendicular to the layer direction.
A second conductive pattern complementary to the conductive pattern is formed on the second sheet, and the second sheets are sequentially laminated to form a second block, and the second block is fitted into the gap between the first blocks and hollow at the center. The first conductive pattern of the i-th layer of the first block and the first conductive pattern of the (i + 1) -th layer are electrically connected by the second conductive pattern of the second block. Here, i is a layer number.

The first conductive pattern formed on the annular first sheet having a gap is, for example, an arc-shaped pattern. The first sheets are sequentially laminated to form a first block having a gap perpendicular to the layer direction. The second conductive pattern formed on the second sheet is the first arc-shaped first pattern.
This is a pattern complementary to the conductive pattern. The second sheets are sequentially laminated to form a second block. Then, the second block is fitted into the gap of the first block.
Thereby, a hollow portion is formed at the center. And the second
The first conductive pattern of the i-th layer of the first block and the first conductive pattern of the (i + 1) -th layer are conducted by the second conductive pattern of the block to form a hollow coil. With this configuration, it is not necessary to alternately laminate different conductive patterns. That is, the first block and the second block are easily formed. If, for example, each conductive pattern is subjected to, for example, solder plating, a series of coils can be easily formed only by heating after fitting. Therefore, the laminated coil is easy to manufacture and inexpensive.

According to a fourteenth aspect of the present invention, there is provided an electromagnetic induction type displacement sensor using a laminated coil, wherein a magnetic body connected to an object to be displaced is inserted into the hollow portion. Inserting a magnetic material into the hollow changes its inductance. In particular, since the magnetic body is connected to the object to be displaced, the inductance changes according to the displacement. Therefore, if the inductance change is detected, the displacement of the displacement object can be detected. In particular, when the laminated coil has a plurality of coils including, for example, a primary coil and a secondary coil, the mutual inductance changes according to the object to be displaced.
At that time, the electromotive voltage of the secondary coil is proportional to its mutual inductance. Therefore, the displacement of the displacement object can be detected by the electromotive voltage of the secondary coil. The laminated coil can be small and surface-mounted as described above. Therefore, it is possible to realize a small electromagnetic induction type displacement sensor which is mounted on a substrate and detects displacement of an object.

[0027]

Embodiments of the present invention will be described below with reference to the drawings. Note that the present invention is not limited to the following examples. (First Embodiment) FIG. 1 shows a basic configuration of a laminated coil according to the present invention. The laminated coil of the present embodiment is an example in which the arrangement of the conductive pattern and the ground conductor pattern on the sheet is formed by insert molding. That is, the conductive pattern and the ground conductor pattern are embedded in the thickness direction of the sheet. The laminated coil of this embodiment is configured by laminating the basic configuration. The basic configuration of the present embodiment is a pair sheet 30 including a first sheet 10 and a second sheet 20. First sheet 10
Has a grounded conductor pattern 11 formed in a ring shape with the same thickness as the sheet on a side wall which is an outer peripheral portion, and a first conductive pattern 12 made of an arc component having the same thickness as the sheet inside the ground conductor pattern 11. The second sheet 20 has a second conductive pattern 22 that complements a discontinuous portion between the ground conductive pattern 21 and the first conductive pattern 12 which are also formed uniformly on the outer peripheral portion.
have. Each sheet is manufactured by, for example, integrally molding a metal and a resin. The second conductive pattern 22 has a half on the upper surface of the second sheet 20 and the other half on the lower surface of the second sheet 20. And they are continuous at the center. One end a of the first conductive pattern 12 is in contact with one end b of the second conductive pattern 22. A hole 13 is formed in the center of each of the first sheet 10 and the second sheet 20.

FIG. 2A shows a cross section (AA ′) of the first sheet 10 at the joint, and FIG. 2B shows a cross section of the joint at the second sheet (B ′).
B ′) and the cross section of the paired sheet 30 bonded to (c). As can be seen from the figure, the pair sheet 30
In this case, one end b of the second conductive pattern 22 formed so as to extend in the direction of the layer a at one end a of the first conductive pattern 12 is in contact, and one turn of the coil is formed. Then, one end d of the second conductive pattern 22 of one pair sheet 30 is connected to one end c of the first conductive pattern 12 of another adjacent pair sheet. In this way, by stacking n pairs of sheets as shown in FIG. 3, an n-turn coil 41 having a hollow portion 43 is formed (FIG. 4). Assuming that a current flows from the bottom surface of the laminated coil, the current is supplied from one end d of the second conductive pattern 22, so that the coil is a left-handed coil.

Since the ring-shaped ground conductor patterns 11 and 21 are formed on the outer peripheral portion of each sheet, the side sheets 42 are formed by laminating the pair sheets 30 so as to be conductive. In FIG. 4, the boundary between the first sheet 10 and the second sheet 20 is omitted for simplicity. As described above, since the shield is formed on the side surface of the coil, the influence of the external electromagnetic field and the electromagnetic wave is reduced. If a predetermined magnetic material is inserted into the hollow portion 43, the inductance of the coil can be adjusted. Actually, the first conductive pattern 12 in the uppermost layer and the second conductive pattern in the lowermost layer are used as electrodes, and lead wires are drawn out from them and used.

(Second Embodiment) FIG. 5 shows a second embodiment of the present invention. The figure is a pair sheet showing the basic structure. Also in this embodiment, the conductive pattern and the conductive pattern are formed by insert molding. The feature of this embodiment is that the pair sheet 3
Spiral first conductive pattern 14 on the first sheet 10
And that the spiral second conductive pattern 24 is formed on the second sheet 20. At this time, assuming that the spiral direction in which the radius becomes smaller is the spiral direction, the spiral direction of the second conductive pattern 24 is opposite to that of the first conductive pattern 14. The same parts as those in the first embodiment are denoted by the same reference numerals.

Then, the first sheet 10 and the second sheet 20 are overlapped so that the outer peripheral end a of the first conductive pattern 14 and the outer peripheral end b of the second conductive pattern 24 are electrically connected to form a pair sheet 30. Is done. At the time of this superposition, an insulating film (not shown) is thinly applied except for the outer peripheral ends a and b and the inner peripheral ends c and d of the first pattern and the second conductive pattern so that the two patterns do not conduct in a region other than the contact. I have. Next, these pair sheets 30 are stacked. At this time, the inner peripheral end c of the first conductive pattern 14 of a certain pair sheet 30 and the inner peripheral end d of the second conductive pattern 24 of the adjacent pair sheet are configured to be in contact with each other. As a result, the spiral coil 44 is continuously formed in the layer direction as shown in the sectional view of FIG. Inner peripheral edge d of the lowermost second conductive pattern 24
Assuming that a current is supplied from the coil, this coil becomes a left-handed coil.

In this example, as can be seen from the drawing, a three-turn coil is formed by one pair sheet 30. In general, the number of coils can be increased to provide, for example, m-turn coils. Therefore, m-turn coil pair sheet 3
If n layers of 0 are laminated, a coil having a nm turn can be formed. That is, considering the inductance per unit length in the layer direction, the inductance of the coil of the spiral pattern is
It can be larger than that of conventional coils. In other words, a thin laminated coil can be obtained with the same inductance. Therefore, for example, a laminated coil suitable for mounting on a printed board is obtained.

(Third Embodiment) The laminated coil of the first embodiment is an example in which a single coil is shielded. The present embodiment is an example in which a plurality of coils are formed by being shielded. This allows, for example, a shielded 1
A secondary coil and a secondary coil are formed. Also in this embodiment, the conductive pattern, the conductive pattern and the sheet are formed by insert formation. FIG. 7 shows a third embodiment of the present invention. The figure is a pair sheet showing the basic structure. The feature of this embodiment is that a third conductive pattern 15 is additionally formed concentrically with the first conductive pattern 12 on the first sheet 10 of the first embodiment, and discontinuous portions of the third conductive pattern 15 are formed on the second sheet 20. Is formed additionally with the fourth conductive pattern 23 complementary to the above. Here, the third conductive pattern 15 is a kind of the first conductive pattern described in the claims and is included therein. Similarly, the fourth conductive pattern 23 is a kind of the second conductive pattern described in the claims and is included therein.

Specifically, one end a of the first conductive pattern 12 and one end b of the second conductive pattern 22 are in electrical contact with each other,
One end e of the third conductive pattern 15 and the fourth conductive pattern 23
So that it comes into contact with one end f of the
The first sheet 10 and the second sheet 20 are stacked and a pair sheet 3
0 is formed. That is, a plurality of (two) one-turn coils having different radii are formed on the paired sheet 30. For example, a basic unit including a small coil and a large coil is formed.

Next, the other end c of the first conductive pattern 12 of one pair sheet 30 and the other end d of the second conductive pattern 22 of another pair sheet adjacent thereto are connected. Similarly, the other end g of the third conductive pattern 15 of one pair sheet 30 is connected to the other end h of the fourth conductive pattern 23 of another adjacent pair sheet. In this way, the other portions are insulated so that each conductive pattern is conductive only at each end.
Thus, a plurality of pair sheets 30 are laminated. For example, n layers are stacked as shown in FIG. As a result, FIG.
For example, as shown in FIG.
And an n-turn secondary coil 46 on the outside is a side shield 4
2 and are formed. Here, the primary coil and the secondary coil have been described, but it is of course possible to form a plurality of more coils. Also here, for simplicity, the boundaries between the sheets are not shown, and only the coil cross section is shown.

(Fourth Embodiment) The laminated coil of the second embodiment is an example in which a single spiral coil is shielded. This embodiment is an example in which a plurality of spiral coils are formed by being shielded. Thereby, for example, a spiral primary coil and a secondary coil which are shielded are formed.

FIG. 10 shows the configuration. The feature of this embodiment is that the first conductive pattern 1 is provided on the first sheet 10 of the second embodiment.
The third conductive pattern 16 is additionally formed concentrically with the fourth conductive pattern 4, and the fourth conductive pattern 25 having a different winding direction from the third conductive pattern 16 is additionally formed on the second sheet 20. Then, a pair sheet 30 is formed by the first sheet 10 and the second sheet 20. At this time, the first conductive pattern 1
The outer peripheral end a of the fourth conductive pattern 24 is connected to the outer peripheral end b of the second conductive pattern 24, and the outer peripheral end e of the third conductive pattern 16 is connected to the outer peripheral end f of the fourth conductive pattern 25. This allows
A large spiral coil (for example, a secondary coil) is formed so as to include a small spiral coil (for example, a primary coil). Also in this case, similarly to the second embodiment, an insulating film (not shown) is applied to portions other than the outer peripheral end and the inner peripheral end of each spiral coil.

Next, the inner peripheral end c of the first conductive pattern 14 of a certain pair sheet 30 and the inner peripheral end d of the second conductive pattern 24 of the adjacent pair sheet are connected. A plurality (n layers) of pair sheets 30 are stacked so that the inner peripheral end g of the third conductive pattern 16 is connected to the inner peripheral end h of the fourth conductive pattern 25 of another adjacent pair sheet. In this case, a plurality of three-turn coils are formed in one pair sheet 30, so that a plurality (two) of 3n-turn spiral coils are formed. By laminating in this way,
As shown in FIG. 11, a spiral primary coil 47 is formed so as to be included in a spiral secondary coil 48 and shielded by a side shield 42. Note that, in the above example, an example in which three-turn spiral coils are formed on one pair sheet 30 has been described.
It can be a turn coil. Therefore, by stacking n pairs of m-turn coil pairs, a plurality of nm-turn spiral coils are formed.

At this time, considering the inductance per unit length in the layer direction, the inductance of the coil having the spiral pattern can be made larger than that of the conventional coil. In other words, a laminated coil having a plurality of thin spiral coils can be realized with the same inductance. That is, a laminated coil having a thin and spiral primary coil and a secondary coil can be realized.

(Fifth Embodiment) In the third and fourth embodiments, two secondary coils and a primary coil in a parallel relationship are formed by lamination. The present embodiment is an example in which the above-described coils are joined at the upper portion by a joining sheet described later to form one continuous (series-connected) coil. And
This is an example in which a third sheet made of a conductor or a conductive film is formed on the entire surface is further formed on the bonding sheet and connected to a shield surface formed on a side surface to form a complete shield body.

FIG. 12 shows the upper part of this embodiment. In this embodiment, for example, the uppermost first sheet 10 of the third embodiment is used.
On (FIG. 12C), a bonding sheet 50 on which the bonding pattern 26 is further formed and a third sheet 60 made of a conductor or having a conductive film formed on the back surface are sequentially stacked. First, the binding sheet 50 is overlaid on the uppermost first sheet 10. Thereby, for example, the first conductive pattern 12
Is connected to one end c of the third conductive pattern 15.

When connecting one end c of the first conductive pattern 12 and one end e of the third conductive pattern 15 by using the coupling sheet 50, that is, in FIG. 13, the coil 45 and the coil 46 are connected in series at one end. In this case, the direction in which the magnetic field generated by the coil 45 is generated must match the direction in which the magnetic field generated by the coil 46 is generated. That is, both coils are wound in the same direction in the direction in which the current flows, and the winding directions are opposite to each other (left-handed or right-handed) with respect to the positive direction of the coil axis.
Need to be In order to realize this, the connection relationship differs from the connection relationship at the end of the conductive pattern in the third embodiment. That is, the first conductive pattern and the second conductive pattern set and the third conductive pattern and the fourth conductive pattern set need not be connected in a parallel relationship but connected by a clearance along the axial direction. is there. As shown in FIG. 14, one end a of the first conductive pattern 12 in the pair sheet 30 is connected to one end b of the second conductive pattern 22 (see FIG. 1).
4 (a)), one end g of the third conductive pattern 15 and one end h of the fourth conductive pattern 23 are connected (FIG. 14 (b)).
In this way, by connecting the coils so that they cross each other along the axial direction, it is possible to reverse the direction of the winding. That is, in this example, when viewed from the bottom surface, the current rises in the coil 45 counterclockwise (counterclockwise),
And the coil 46 is similarly configured to descend counterclockwise. In this manner, the coil 45 and the coil 46 are connected in series to form one coil. At this time, an insulating film (not shown) is formed on the upper surface of the coupling pattern 26, and is configured so as not to conduct to the third sheet 60.

Next, the third sheet 60 is further stacked on the upper portion, and is connected to the ground conductor 21 of the coupling sheet 50.
That is, it is connected to the side shield 42. Thereby, as shown in FIG. 13, the laminated coil is almost completely shielded except for the bottom surface. Therefore, the laminated coil is hardly affected by external electromagnetic fields and electromagnetic waves.

The above configuration can be applied to the spiral laminated coil of the fourth embodiment. That is, in the uppermost layer of FIG. 10, the inner peripheral end c of the first conductive pattern 14 and the outer peripheral end e of the third conductive pattern 16 are coupled by a coupling pattern (not shown). Further, in FIG. 10, the first conductive pattern 12 of the pair sheet 30 connects the outer peripheral end a to the outer peripheral end b of the second conductive pattern 22, and the third conductive pattern 15
May be connected to the inner peripheral end h of the fourth conductive pattern 23. In this way, in the cross-sectional view of FIG. 11, the spiral coil 47 and the spiral coil 48 are connected in the same direction along the direction in which current flows. With this configuration, a left-handed series coil can be formed assuming that a current is supplied from the inner peripheral end d of the second conductive pattern 22 in the lowermost layer. Thus, a laminated coil having a large inductance can be formed.

In the configuration in which the coil is folded back by the series connection, two terminals of the coil can be installed on the bottom surface of the laminated coil. That is, as shown in FIG. 15, wide electrodes 29a and 29b are formed on the lowermost second sheet 20a, one end a of the first conductive pattern 12 is connected to the electrode 29a, and one end g of the third conductive pattern 15 is formed. Is connected to the electrode 29b. In this way, a current flows from the electrode 29a and the electrode 2
9b allows a left-handed coil to output a current. Of course, the direction in which the current flows may be reversed. In this way, surface mounting can be easily performed. Therefore, a laminated coil having high convenience for surface mounting is obtained.

(Sixth Embodiment) This is an example in which two series-connected coils according to the fifth embodiment are provided in parallel. That is, four coils are formed, two of which are connected at their end faces and folded. Thus, two parallel coils are created, which can be a mutually coupled primary coil and secondary coil. In this case, the first conductive pattern formed on the first sheet 10 is divided into four in the radial direction as shown in FIG. 16A, and four first conductive patterns X1 and X2 are provided in each region. , X3 and X4.
The ends a, c, e, and g shown in FIG.
It is defined the same as 0, and the connection relationship is as described in the fifth embodiment. In this case, the coil formed by the conductive pattern X1 and the coil formed by the conductive pattern X2 are connected in series, and the coil formed by the conductive pattern X3 and the coil formed by the conductive pattern X4 are connected in series. You. Then, the two coils become a primary coil and a secondary coil, respectively. Which two of the four conductive patterns are connected in series is arbitrary, and may be connected based on the design concept of the laminated coil. The method of forming the second conductive pattern on the second sheet 20 is the same.

Also, four conductive patterns X1, X2, X
As shown in FIG. 16B, three and X4 may be formed in a spiral shape while keeping four parallel. Also in this case, the set of conductive patterns connected in series may be arbitrary. The conductive pattern may be not only a spiral shape but also an arc shape as in the third embodiment.

(Seventh Embodiment) In the first to sixth embodiments, the first sheet on which different conductive patterns are formed and the second sheet are different.
This is an example in which a pair sheet is once formed from sheets, and the sheets are sequentially laminated to form a coil. The present embodiment is an example in which a block is formed by laminating the same conductive patterns, and a series of coils is created by fitting different blocks.

FIG. 17 is a perspective view of the present embodiment, and FIG. 18 is a sectional view of the joint. The laminated coil according to the present embodiment includes a first block 91 and a second block 92. The first block 91 is composed of an annular first sheet 93 having a gap. Then, on the first sheet 93, for example, the above-described arc-shaped first conductive pattern 95 is formed. The first sheet 93 is laminated, and the second
A gap into which the block fits is formed. The second block 92 includes a second sheet 94. Second sheet 9
A second conductive pattern 96 complementary to the arc-shaped first conductive pattern 95 is formed on 4.

When the second block 92 is fitted into the gap between the first blocks 91, the second block 92
The conductive pattern 96 makes the first conductive pattern 95 of the i-th layer of the first block 91 and the first conductive pattern 95 of the (i + 1) -th layer conductive. Thereby, a series of hollow coils is formed. With this configuration, it is not necessary to form a pair sheet in which different conductive patterns are alternately stacked as in the first to fifth embodiments. That is, if a complicated coil shape is not required, it may be formed in this manner. Then, for example, the first conductive pattern 95 and the second conductive pattern 9
If, for example, solder plating is applied to 6, the solder is joined at the boundary only by heating after fitting, and a coil is easily formed. Therefore, an inexpensive laminated coil can be realized.

(Eighth Embodiment) FIG. 19 shows an electromagnetic induction type displacement sensor using a laminated coil according to a sixth embodiment. However, in the drawing, two sets of coils formed by connecting two coils in series are referred to as a primary coil 45 and a secondary coil 4 respectively.
6 is shown. In practice, the primary coil 45,
Each of the secondary coils 46 is composed of two conductive patterns. The electromagnetic induction type displacement sensor of this embodiment is
It is composed of a magnetic body 81 as a core connected to a displacement object 80 and the laminated coil 70 of the third embodiment. In this embodiment, a coupling sheet 50 for forming a series coil is provided.
And a third sheet 60 for shielding, and a second sheet 20a for terminal output. Each is configured as already described. On the second sheet 20a, terminals 451a and 451b of the primary coil 45 and terminals 461a and 461b of the secondary coil 46 are formed. Except for these terminal portions, the second sheet 20a has a conductive film laminated thereon and shields the bottom surface of the laminated coil. If these terminals are connected to electrodes on a printed circuit board of an electronic circuit, a completely shielded displacement detection sensor that facilitates connection to an external circuit is obtained. If applied to the primary coil 45 for example an AC voltage E ₁ of the laminated coil 70, the electromotive force E ₂ is generated in the secondary coil 46 by electromagnetic induction. At this time, E ₂ occurs in proportion to the mutual inductance M.

The mutual inductance M is determined by the magnetic material 81
, That is, the displacement of the measuring object 80.
That is, the measurement object 80 is the amplitude of the AC voltage E ₂ of the secondary coil 46 is changed accordingly when displaced. Therefore, if the voltage of the secondary coil 46 is detected, the displacement target 80
Can be detected. This laminated coil 70
Are small and surface mountable as described above. Therefore, it is possible to realize a small electromagnetic induction type displacement sensor which is mounted on the substrate and directly detects the displacement of the object. In the above example, the laminated coil 70 including the primary coil 45 and the secondary coil 46 is used, but the laminated coil shown in another embodiment may be used. For example, the laminated coil of the fourth embodiment may be used. Further, a laminated coil in which a single coil of the first or second embodiment is formed may be used. In short, the magnetic body 81 of the hollow portion 43
May be displaced, and a change in inductance due to the displacement may be directly detected. Further, the number of turns of the coil may be greater at both ends of the laminated coil. That is, the sensitivity of the end portion of the laminated coil is reduced because the coupling with the core is small. Therefore, in order to compensate for this, the linearity of displacement detection can be improved by forming the conductive pattern of each sheet so that the number of turns increases toward the end.

(Modification) The above embodiment is one embodiment of the present invention, and various other modifications are possible. For example, in the above-described embodiment, the first sheet 10 and the second sheet 20 are formed by, for example, resin-molding a metal sheet of each conductive pattern. In this case, each conductive pattern does not need to be exposed on the upper and lower surfaces of the sheet. At least one end should be exposed on the connection side. Also, a conductive pattern may be formed on the surface of each sheet by screen printing or the like. For example, it may be configured as shown in FIG. FIG. 21A shows the coil of the first embodiment shown in FIG. 1 formed by screen printing. 1st sheet 10, 2nd
The sheet 20 is an insulating sheet, the first conductive pattern 12 and the second conductive pattern 22 are formed thereon by a printing method or the like, and a via hole is formed in a part of the first conductive pattern 12 and the second conductive pattern 22.
Then, for example, a solder ball may be inserted into the via hole and heated, so that the connection is firmly performed. That is, the conducting means may be the via holes 110 and 220.
Thus, by alternately laminating the first sheet 10 and the second sheet 20, one end a formed on the back surface of the first sheet 10 of the first conductive pattern 12 and the one end a formed on the surface of the first sheet 20 are formed. The one end b of the second conductive pattern 22 is connected. Similarly, one end d formed on the back surface of the second sheet 20 of the second conductive pattern 22 and one end c of the first conductive pattern 22 formed on the surface of the first sheet 10 can be connected. Such a structure may be adopted. In this case, the ground conductor patterns 11 and 21 are formed on both surfaces of the first sheet 10 and the second sheet 20. Then, the patterns on both sides are conducted by the via holes. Alternatively, a ground conductor pattern may be formed on the side walls of the first sheet 10 and the second sheet 20, and the front and rear ground conductor patterns may be connected.

In the first embodiment, the first conductive pattern 12
Although the second conductive pattern 22 and the second conductive pattern 22 are formed differently, the same pattern shown in FIG. 20 may be used if one or more coils can be formed complementary to each other. In the figure, arcs having a central angle of 270 ° or more are used as the first and second conductive patterns.
At the time of lamination, they are rotated by 90 degrees and laminated so that they are electrically connected at one end. One or more turns of the coil are formed on one pair sheet 30. The pair sheet 30 may be formed in this manner. When the pair sheets 30 are stacked, the first conductive patterns 12 and the second conductive patterns 22 of the pair sheets 30 different from each other may be stacked so as to conduct at one end. A laminated coil having a larger number of turns than in the first embodiment can be formed.

In the first to sixth embodiments, the first
Although the sheet 10 and the second sheet 20 are overlapped so that the pattern on each sheet is conductive, the pair sheet 30 is formed. However, the order may be reversed as shown in FIG. That is, the first conductive pattern 12 and the second conductive pattern 22 may be connected in advance, and then the first sheet 10 and the second sheet 20 may be integrally formed by resin molding or the like.
In particular, the first conductive pattern 12 and the second conductive pattern 22 are formed of the same conductive material, and the first sheet 10 and the second sheet 2
If 0 is molded with the same resin, a single sheet will be formed. Just stack this sheet,
A laminated coil is obtained.

In the above embodiment, the first sheet 10 and the second sheet 20 both have the hole 13 at the center, but the hole 13 may be omitted if not used for the electromagnetic induction type displacement sensor.

[Brief description of the drawings]

FIG. 1 is a pair sheet structure diagram showing a basic configuration of a laminated coil according to a first embodiment of the present invention.

FIGS. 2A and 2B are cross-sectional views (a) and (b) of a paired sheet and a cross-sectional view after bonding (c) of the paired sheet according to the first embodiment of the present invention.

FIG. 3 is a structural diagram of an n-layer laminated coil according to the first embodiment of the present invention.

FIG. 4 is a sectional view of the laminated coil according to the first embodiment of the present invention.

FIG. 5 is a pair sheet structure diagram showing a basic configuration of a laminated coil according to a second embodiment of the present invention.

FIG. 6 is a sectional view of a laminated coil according to a second embodiment of the present invention.

FIG. 7 is a pair sheet structure diagram showing a basic configuration of a laminated coil according to a third embodiment of the present invention.

FIG. 8 is a structural diagram of an n-layer laminated coil according to a third embodiment of the present invention.

FIG. 9 is a sectional view of a laminated coil according to a third embodiment of the present invention.

FIG. 10 is a pair sheet structure diagram showing a basic configuration of a laminated coil according to a fourth embodiment of the present invention.

FIG. 11 is a sectional view of a laminated coil according to a fourth embodiment of the present invention.

FIG. 12 is an upper structural view of a laminated coil according to a fifth embodiment of the present invention.

FIG. 13 is a sectional view of a laminated coil according to a fifth embodiment of the present invention.

FIG. 14 illustrates a pair sheet according to a fifth embodiment of the present invention.
Sectional view of the secondary coil joint (a), sectional view of the secondary coil joint (b).

FIG. 15 is a lower structural view of a laminated coil according to a fifth embodiment of the present invention.

FIG. 16 is a plan view showing a conductive pattern on a first sheet of a laminated coil according to a sixth embodiment of the present invention.

FIG. 17 is a perspective view of a laminated coil according to a seventh embodiment of the present invention.

FIG. 18 is an enlarged view of a joint portion of the laminated coil according to the seventh embodiment of the present invention.

FIG. 19 is a sectional structural view of an electromagnetic induction type displacement sensor according to an eighth embodiment of the present invention.

FIG. 20 is a pair sheet structure diagram according to a modification of the first embodiment of the present invention.

FIG. 21 is a sectional view of a pair sheet according to a modification of the first embodiment of the present invention.

FIG. 22 shows a conventional electromagnetic induction type displacement sensor using a coil device wound around a bobbin.

FIG. 23 shows a conventional laminated coil.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 1st sheet 11 Ground conductive pattern 12, 14 1st conductive pattern 15, 16 3rd conductive pattern 13 hole 20 2nd sheet 21 Ground conductive pattern 22, 24 2nd conductive pattern 23, 25 4th conductive pattern 29a, b Electrode Reference Signs List 30 pair sheet 41 coil 42 side shield 43 hollow portion 44 spiral coil 45, 47 primary coil 46, 48 secondary coil 50 coupling sheet 60 third sheet 70 laminated coil 80 object to be displaced 81 magnetic body 91 first block 92 first 2 blocks 93 first sheet 94 second sheet 95 first conductive pattern 96 second conductive pattern

Claims (14)

[Claims] 1. A laminated coil formed by laminating sheets on which a conductive pattern is formed and forming the conductive pattern continuously, comprising: a ground conductive pattern uniformly formed on an outer peripheral portion of a first sheet; A first conductive pattern formed of an arc component and having discontinuous portions is formed on the inside thereof, a ground conductor pattern uniformly formed on an outer peripheral portion of the second sheet, and a discontinuity of the first conductive pattern formed on the inside thereof. Forming a second conductive pattern having a length equal to or greater than the length and complementing the discontinuous portion; and forming the first sheet and the second sheet so that the first conductive pattern and the second conductive pattern conduct at one end thereof. A pair of sheets is formed by stacking the sheets, and a plurality of the pair of sheets are stacked up and down, and the first conductive pattern and the second conductive pattern of different pair sheets are formed to be conductive at the other end. Laminated coil. 2. The first conductive pattern comprising the arc component is a spiral conductive pattern, and the second conductive pattern has a spiral winding direction of the first conductive pattern.
A spiral conductive pattern in a direction opposite to the conductive pattern, wherein the first or second conductive pattern is electrically connected to an outer or inner peripheral end of the first conductive pattern.
The sheet and the second sheet are stacked to form a pair sheet, and the pair sheets are stacked one above the other, and the first conductive pattern and the second conductive pattern of different pair sheets are formed to be conductive at the other end. Claim 1 characterized by the following:
3. The laminated coil according to item 1. 3. The first conductive pattern, the second conductive pattern, and the ground conductive pattern are formed on upper surfaces of the first sheet and the second sheet, respectively, and the first conductive pattern and the second conductive pattern are respectively formed. 3. The laminated coil according to claim 1, wherein the ground conductor pattern is provided with a conducting means penetrating in a layer direction at at least one or more locations at one end of the laminated coil. 4. 4. A laminated coil formed by laminating sheets on which conductive patterns are formed and forming a continuous conductive pattern, wherein the first sheet has a first conductive pattern made of an arc component and having a discontinuous portion concentrically. A plurality of second conductive patterns complementary to a plurality of discontinuous portions of the first conductive pattern on the second sheet, and a plurality of the second conductive patterns opposed to the plurality of first conductive patterns.
The first sheet and the second sheet are overlapped to form a pair sheet so that each of the conductive patterns is conductive at one end, and a plurality of the pair sheets are stacked up and down, and the first conductive pattern and the second sheet of different pair sheets are stacked. A laminated coil formed by conducting a conductive pattern at the other end. 5. The first conductive pattern comprising the arc component is a spiral conductive pattern, and the second conductive pattern is a spiral conductive pattern whose winding direction is opposite to the first conductive pattern. The first sheet and the second sheet so that the outer peripheral end or the inner peripheral end of the plurality of first conductive patterns and the outer peripheral end or the inner peripheral end of the plurality of second conductive patterns opposed thereto are electrically connected. And forming a paired sheet by stacking a plurality of the paired sheets one above the other, and forming the first conductive pattern and the second conductive pattern of the different paired sheets at the other end so as to conduct. Item 5. The laminated coil according to Item 4. 6. An arbitrary number of the laminated coils are connected to an uppermost layer by connecting a predetermined two of a plurality of the first conductive patterns or the second conductive patterns located immediately below the uppermost layer as a pair. The laminated coil according to claim 4, further comprising a bonding sheet forming a pair. 7. The method according to claim 2, wherein the number of turns of each layer of the first conductive pattern or the second conductive pattern has a predetermined distribution along an axial direction of the laminated coil. Item 7. The laminated coil according to any one of items 6. 8. The first sheet and the second sheet forming the paired sheet have a ground conductor pattern in a peripheral portion thereof, and a shield surface is formed on a side surface of the laminated coil by laminating the paired sheet. The laminated coil according to any one of claims 4 to 7, wherein the coil is formed. 9. A plurality of the first conductive patterns, the second conductive patterns, and the ground conductive pattern are formed on upper surfaces of the first sheet and the second sheet, respectively. 9. The conductive pattern according to claim 4, wherein each of the two conductive patterns is provided at one end thereof with conductive means penetrating in the layer direction at any one or more locations of the ground conductive pattern. Item 8. The laminated coil according to Item 1. 10. The laminated coil according to claim 1, further comprising a third sheet made of a conductive film as an uppermost layer, wherein the third sheet is connected to the ground conductor pattern in a layer therebelow. The laminated coil according to any one of claims 3, 8, and 9. 11. The multilayer coil according to claim 1, further comprising an electrode connected to one end of each of the plurality of first conductive patterns or second conductive patterns located on the lowermost layer on the bottom surface. The laminated coil according to any one of claims 1 to 10. 12. The first sheet and the second sheet forming the paired sheet have a hole at a central portion, and the paired sheets are laminated to form a hollow portion at the center. The laminated coil according to any one of claims 1 to 11. 13. A laminated coil formed by laminating sheets on which conductive patterns are formed, wherein a first conductive pattern is formed on an annular first sheet having a gap, and the first sheets are sequentially formed. A first block having a gap perpendicular to the layer direction is formed by stacking, a second conductive pattern complementary to the first conductive pattern is formed on a second sheet, and the second sheet is sequentially stacked to form a second block.
A block is formed, and the second block is fitted into the gap of the first block to form a hollow portion at the center, and the n-layer of the first block is formed by the second conductive pattern of the second block. A laminated coil, wherein the first conductive pattern and the (n + 1) th first conductive pattern are electrically connected. 14. An electromagnetic induction type displacement sensor using the laminated coil according to claim 1, wherein a magnetic body connected to an object to be displaced is inserted into said hollow portion. An electromagnetic induction type displacement device characterized by being performed.