JP2002261577A - Vibrating piece, vibrator, oscillator and portable telephone device - Google Patents

Abstract

(57) [Problem] To provide a vibrating reed that can suppress occurrence of vibration failure while keeping a CI value low, a vibrator having the same, an oscillator including the vibrator, and a portable telephone device. SOLUTION: A base portion 110, vibrating arm portions 121 and 122 formed so as to protrude from the base portion, and grooves 123 and 124 are formed on a front surface portion and / or a rear surface portion of the vibrating arm portion. A vibrating reed in which a groove electrode portion and a side surface electrode portion are formed on the side surface portion of the arm portion, respectively, and these groove electrode portions 123a and 124a and the side surface electrode portion 121b,
The resonator element 100 is formed by forming the short-circuit preventing portions 121d and 122d between the electrodes 122b.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD OF THE INVENTION

[0002] The present invention relates to a vibrating piece made of, for example, quartz or the like,
The present invention relates to a resonator having the resonator element, an oscillator including the resonator, and a mobile phone device.

[0003]

2. Description of the Related Art Conventionally, a tuning-fork type quartz vibrating piece, which is a vibrating piece, is configured as shown in FIG. 11, for example. That is, the tuning-fork type quartz vibrating piece 10 includes the base 11 and the base 1
Two vibrating arms 12, 1 protruding from
Three. The two vibrating arms 12, 1
3, grooves 12a and 13a are formed on the front surface and the back surface, as shown in FIG. FIG. 12 is a cross-sectional view of FIG.
FIG. 12 is an enlarged cross-sectional view taken along the line A ′, and as shown in FIG. 13a, the cross section is formed in a substantially H shape.

Further, groove exciting electrodes 12b and 13b for vibrating the vibrating arms 12 and 13 are formed in the grooves 12a and 13a as shown in FIG. As shown in FIG. 12, side excitation electrodes 12c and 13c are also formed on the side surfaces of the vibrating arms 12 and 13, respectively. The groove excitation electrodes 12a, 13a and the side excitation electrodes 12c, 13c are arranged at regular intervals as shown in FIG. 12, and are configured so as not to short-circuit each other. That is, the groove excitation electrode 12
a, 13a and the side excitation electrodes 12c, 13c, when a voltage is applied to each of them, the vibrating arm 1 sandwiched between these electrodes
An electric field is generated in the electrodes 2 and 13 and starts to vibrate.

Accordingly, these groove excitation electrodes 12b,
If the 13b and the side excitation electrodes 12c, 13c are short-circuited, an electric field is less likely to be generated in the vibrating arms 12, 13, causing the tuning-fork type crystal vibrating piece 10 to be defective.

[0006]

The larger the width (horizontal direction in FIG. 12) of the grooves 12a and 13a of such a tuning-fork type quartz vibrating piece 10, the better the characteristics such as CI value (crystal impedance). Groove 12 as much as possible
a and 13a are formed wide. Therefore, the groove excitation electrodes 12b and 13b and the side excitation electrodes 12c and 13
The interval with c becomes small. For this reason, even if small dust or the like falls between the groove excitation electrodes 12b, 13b and the side excitation electrodes 12c, 13c, a short circuit or the like is likely to occur, and the vibrations of the vibrating arms 12, 13 may become defective. there were. On the other hand, if an insulating film or the like is disposed on the electrode portion or the like to prevent such a short circuit that causes such vibration failure, the CI value (clostal impedance or equivalent series resistance) increases, and the performance of the entire resonator element deteriorates. There was a problem such as doing.

SUMMARY OF THE INVENTION In view of the above problems, the present invention provides a vibrating reed that can suppress occurrence of vibration failure while keeping the CI value low, a vibrator having the vibrator, an oscillator including the vibrator, and a portable telephone device. The purpose is to:

[0008]

According to the first aspect of the present invention, there is provided a base, a vibrating arm protruding from the base, and a front and / or back surface of the vibrating arm. A vibrating reed in which a groove is formed in a portion and a groove electrode portion and a side surface electrode portion are formed in the groove portion and a side surface portion of the vibrating arm portion, respectively, and a short circuit is prevented between the groove electrode portion and the side electrode portion. This is achieved by a vibrating reed in which a portion is formed.

According to the first aspect of the present invention, since a short-circuit preventing portion is formed between the groove electrode portion and the side surface electrode portion, dust or the like is formed between the groove electrode portion and the side surface electrode portion. No short circuit or the like occurs even if adhered. Therefore, it is possible to prevent the occurrence of vibration failure of the vibrating arm. Further, since the short-circuit preventing portion is disposed only within a necessary minimum range between the groove electrode portion and the side surface electrode portion, the short-circuit preventing portion has an adverse effect on the groove electrode portion and the side surface electrode portion. And increasing the CI value can be prevented beforehand.

Preferably, according to the invention of claim 2, in the structure of claim 1, the vibrating reed is characterized in that the groove electrode portion and the side surface electrode portion are excitation electrodes.
According to the configuration of claim 2, since the groove electrode portion and the side surface electrode portion are excitation electrodes, it is possible to more effectively prevent the occurrence of vibration failure of the vibrating arm portion. Further, it is possible to prevent the excitation electrode from being adversely affected and the CI value from being increased.

Preferably, according to the third aspect of the present invention, there is provided the resonator element according to the first or second aspect, wherein the short-circuit preventing portion is formed of an insulating film. According to the configuration of claim 3, since the short-circuit preventing portion is formed of an insulating film, it is possible to more reliably prevent a short circuit between the groove electrode portion and the side electrode portion.

Preferably, according to a fourth aspect of the present invention, there is provided the resonator element according to the third aspect, wherein the insulating film is formed by an etching step. According to the configuration of claim 4, since the insulating film is formed by the etching process, the insulating film can be formed with a simple process and with high accuracy.

Preferably, according to a fifth aspect of the present invention, there is provided the resonator element according to any one of the first to fourth aspects, wherein a cut portion is formed in the base. According to the configuration of claim 5, since the cut portion is formed in the base portion, when the vibrating arm portion vibrates, even if a vertical component of the vibration occurs, the vibration of the vibrating arm portion leaks to the base portion side. Can be alleviated by the cut portion. Therefore, the vibrating piece,
Variation in CI value between elements can be reduced.

Preferably, according to a sixth aspect of the present invention, in the configuration of the fifth aspect, the base portion is provided with a fixing region for fixing the vibrating piece, and the notch portion is A vibrating reed provided on a base between a fixed region and the vibrating arm. According to the configuration of claim 6, the notch is provided at the base between the fixing region and the vibrating arm. Therefore, the cut portion is arranged at a position where it does not hinder the vibration of the vibrating arm portion, and effectively prevents vibration leakage from being transmitted to the fixed region and causing energy to escape. For this reason, variation in the CI value between the resonator element and the element can be reduced.

Preferably, according to the seventh aspect of the present invention, in the configuration of any one of the first to sixth aspects, the vibrating reed is made of a quartz crystal oscillating at about 30 kHz to about 40 kHz. A vibrating reed, which is a reed. According to the configuration of the seventh aspect, in the tuning-fork type vibrating piece in which the vibrating piece is formed of crystal oscillating at about 30 kHz to about 40 kHz, the functions and the like of the above-described claims can be exhibited.

According to an eighth aspect of the present invention, there is provided a base, a vibrating arm projecting from the base, and a groove formed on a front surface and / or a back surface of the vibrating arm. A vibrating piece in which a groove electrode portion and a side surface electrode portion are formed on the groove portion and the side surface portion of the vibrating arm portion, respectively, wherein the vibrator is housed in a package; This is achieved by a vibrator characterized in that a short-circuit prevention portion is formed between the side electrode portion and the side electrode portion.

According to the configuration of claim 8, since the short-circuit preventing portion is formed between the groove electrode portion and the side surface electrode portion of the vibrating reed, between the groove electrode portion and the side surface electrode portion. ,
Even if dust adheres, no short circuit or the like occurs. Accordingly, the vibrator can prevent the occurrence of vibration failure of the vibrating arm portion. Further, since the short-circuit preventing portion is disposed only within a necessary minimum range between the groove electrode portion and the side surface electrode portion, the short-circuit preventing portion has an adverse effect on the groove electrode portion and the side surface electrode portion. To increase the CI value.

According to a ninth aspect of the present invention, in the vibrator according to the eighth aspect, the groove electrode portion and the side surface electrode portion of the vibrating reed are excitation electrodes. is there. According to the configuration of the ninth aspect, since the groove electrode portion and the side surface electrode portion of the vibrating reed are excitation electrodes, vibration that can more effectively prevent occurrence of vibration failure of the vibrating arm portion can be prevented. Become a child. In addition, the vibrator can prevent the excitation electrode from being adversely affected and increasing the CI value.

Preferably, according to the tenth aspect of the present invention,
The vibrator according to claim 8 or 9, wherein the short-circuit preventing portion of the vibrating reed is formed of an insulating film. According to the configuration of the tenth aspect, since the short-circuit preventing portion of the vibrating reed is formed of an insulating film, a short circuit between the groove electrode portion and the side electrode portion can be more reliably prevented. Become a child.

Preferably, according to the invention of claim 11,
11. The resonator according to claim 10, wherein the insulating film of the resonator element is formed by an etching process. According to the configuration of claim 11, since the insulating film of the vibrating reed is formed by the etching step, the vibrator can form the insulating film with a simple process and with high accuracy.

Preferably, according to the invention of claim 12,
The vibrating reed according to any one of claims 8 to 11, wherein a cut portion is formed in the base of the vibrating reed. According to the configuration of claim 12, since the notch is formed in the base portion of the vibrating reed, when the vibrating arm vibrates, even if a vertical component of the vibration occurs, the vibration of the vibrating arm is reduced. Leakage to the base side can be mitigated by the cut portion. Therefore, the vibrator can reduce the variation of the CI value between the resonator element and the element while reducing the size of the base.

Preferably, according to the invention of claim 13,
In the configuration according to claim 12, a fixing region for fixing the vibrating reed is provided in the base of the vibrating reed, and the cut portion is provided between the fixing region and the vibrating arm. A vibrator provided on a base. According to the configuration of the thirteenth aspect, the cut portion of the vibrating reed is provided at the base between the fixed area and the vibrating arm. Therefore, the cut portion is arranged at a position where it does not hinder the vibration of the vibrating arm portion, and effectively prevents vibration leakage from being transmitted to the fixed region and causing energy to escape. Therefore, the vibrator can reduce the variation in the CI value between the resonator element and the element.

Preferably, according to the fourteenth aspect,
14. The vibrating reed according to any one of claims 8 to 13, wherein the vibrating reed is a tuning fork vibrating reed formed of quartz oscillating at about 30 kHz to about 40 kHz. According to the structure of the fourteenth aspect, in the tuning-fork type vibrating piece, in which the vibrating piece is formed of quartz oscillating at about 30 kHz to about 40 kHz, the vibrator capable of exhibiting the functions and the like of the above-described claims. is there.

Preferably, according to the invention of claim 15,
The vibrator according to any one of claims 8 to 14, wherein the package is formed in a box shape. According to the configuration of claim 15, in the vibrator in which the package is formed in the shape of a box, it is possible to exhibit the operation or the like according to any of claims 8 to 14.

Preferably, according to the invention of claim 16,
An oscillator according to any one of claims 8 to 14, wherein the package is formed in a so-called cylinder type. According to the configuration of the sixteenth aspect, it is possible to cause the vibrator in which the package is formed in a so-called cylinder type to exhibit the operation or the like according to any of the above-described eighth to fourteenth aspects.

[0026] The above object is achieved according to the seventeenth aspect of the present invention.
A base, a vibrating arm protruding from the base, and a groove formed on a front surface and / or a back surface of the vibrating arm, and a groove electrode portion is formed on each of the groove and the side surface of the vibrating arm. An oscillator in which a vibrating reed and a side surface electrode portion are formed, and an oscillator housed in a package, wherein a short-circuit preventing portion is formed between the groove electrode portion and the side surface electrode portion of the vibrating reed. Oscillator characterized by
It is achieved.

According to the configuration of claim 17, since the short-circuit preventing portion is formed between the groove electrode portion and the side surface electrode portion of the vibrating reed, between the groove electrode portion and the side surface electrode portion. Even if dust adheres, no short circuit or the like occurs. Accordingly, the oscillator can prevent the occurrence of vibration failure of the vibrating arm beforehand. Further, since the short-circuit preventing portion is disposed only within a necessary minimum range between the groove electrode portion and the side surface electrode portion, the short-circuit preventing portion has an adverse effect on the groove electrode portion and the side surface electrode portion. And an oscillator that can prevent the CI value from increasing beforehand.

[0028] The above object is attained by the invention of claim 18.
A base, a vibrating arm protruding from the base, and a groove formed on a front surface and / or a back surface of the vibrating arm, and a groove electrode portion is formed on each of the groove and the side surface of the vibrating arm. A vibrating piece in which a vibrating piece having a side surface electrode portion formed therein is housed in a package, and the vibrator is connected to a control unit and used. According to a mobile phone device, wherein a short-circuit preventing portion is formed between the electrode portion and the side electrode portion,
It is achieved.

According to the configuration of claim 18, since the short-circuit preventing portion is formed between the groove electrode portion and the side surface electrode portion of the vibrating reed, the portion between the groove electrode portion and the side surface electrode portion is formed. Even if dust adheres, no short circuit or the like occurs. Therefore, the mobile phone device can prevent the occurrence of vibration failure of the vibrating arm portion. Further, since the short-circuit preventing portion is disposed only within a necessary minimum range between the groove electrode portion and the side surface electrode portion, the short-circuit preventing portion has an adverse effect on the groove electrode portion and the side surface electrode portion. To increase the CI value beforehand.

[0030] According to the present invention, the object is as follows.
A base, a vibrating arm protruding from the base, and a groove formed on a front surface and / or a back surface of the vibrating arm, and a groove electrode portion is formed on each of the groove and the side surface of the vibrating arm. And a method of manufacturing a vibrating reed in which a side electrode portion is formed, the method including a step of forming a short-circuit preventing portion between the groove electrode portion and the side surface electrode portion. Forming an insulating film on the vibrating arm portion such that an insulating film formed on the side surface portion and the groove portion is thinner than a film thickness of the insulating film formed on the surface portion; And a step of removing the insulating film formed on the vibrating piece. According to the configuration of claim 19, a step of forming a short-circuit preventing portion between the groove electrode portion and the side surface electrode portion is provided, and in this step, an insulating film formed on a surface portion of the vibrating arm portion is formed. Forming an insulating film on the vibrating arm so that an insulating film formed on the side surface and the groove is thinner than a film thickness, and removing the insulating film formed on the side surface and the groove And at least the step of performing Therefore, since the insulating film can be easily left only on the surface of the vibrating arm, an increase in manufacturing cost can be prevented.

[0031]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Note that the embodiments described below are preferred specific examples of the present invention,
Although various technically preferable limits are given, the scope of the present invention is not limited to these modes unless otherwise specified in the following description.

(First Embodiment) FIG. 1 shows a tuning-fork type quartz vibrating piece 1 which is a vibrating piece according to a first embodiment of the present invention.
FIG. The tuning-fork type crystal vibrating piece 100 is formed by cutting out a single crystal of quartz to form, for example, a so-called quartz Z plate. The tuning-fork type quartz vibrating reed 1 shown in FIG.
Since 00 is a vibrating reed for transmitting a signal at, for example, 32.768 kHz, it is a very small vibrating reed. Such a tuning-fork type quartz vibrating piece 100 has, as shown in FIG.
It has a pad portion 110 as a base. Two tuning fork arms 121 and 122 as vibrating arms are arranged so as to protrude upward from the pad section 110 in the figure.

On the front and back surfaces of the tuning fork arms 121 and 122, grooves 123 and 124 are formed as shown in FIG. Since the grooves 123 and 124 are similarly arranged on the back side of the tuning fork arms 121 and 122 not shown in FIG. 1, as shown in FIG. H-shaped. By the way, tuning fork arm 1
Electrodes 21 and 122 are formed as shown in FIG. Specifically, the hatched portions of the tips of the tuning fork arms 121 and 122 are the frequency adjustment electrode portions 121a and 122a for adjusting the frequency. The frequency adjustment electrode portions 121a and 122a are made of Au on Cr (chromium).
(Gold).

The groove electrodes 123a and 124a are formed in the grooves 123 and 124 described above. As shown in FIG. 2, the groove electrode portions 123a and 124a
The tuning fork arms 121 and 122 are formed in grooves 123 and 124 formed on both the front and back surfaces. Also,
The groove electrode portions 123a and 124a are made of Cr. The groove electrode portions 123a and 124a function as excitation electrodes for vibrating the tuning fork arms 121 and 122. On the other hand, the tuning fork arms 121, 1 in FIG.
22 are provided on the right and left sides, respectively.
22b are formed. Specifically, as shown in FIG. 2, it is arranged at a fixed interval from the above-mentioned groove electrode portions 123a and 124a.

This is to avoid a short circuit or the like when a voltage is applied to the side surface electrode portions 121b and 122b and the groove electrode portions 123a and 124a. Further, these side surface electrode portions 121b, 122b are formed by the groove electrode portions 123a, 1b.
24a, it is made of Cr and plays a role as an excitation electrode. That is, when a voltage is applied to the side surface electrode portions 121b and 122b and the groove electrode portions 123a and 124a of the tuning fork arms 121 and 122 shown in FIG. 2, an electric field is efficiently generated inside the tuning fork arms 121 and 122 and vibrates efficiently. Will be. Therefore, the tuning fork arms 121 and 122 having the groove electrode portions 123a and 124a have a small vibration loss.

As described above, the groove electrode portions 123a and 124a and the side surface electrode portions 121b and 122b are arranged at a constant interval as described above. The electrode portions 123a and 124a and the side surface electrode portions 121b and 122b are short-circuited, and the tuning fork arm 12
1, 122 will be hindered. Therefore, in the present embodiment, as shown in FIG. 2, the insulating films 121c and 122c, which are short-circuit prevention portions, are provided. The insulating films 121c and 122c are formed of, for example, SiO ₂ . However, the insulating films 121c and 122c may be made of an oxide such as alumina, a nitride such as silicon nitride, or the like.
It may be an organic film.

Such insulating films 121c and 122c are
As shown in FIG. 2, upper end portions 121ba, 122ba and lower end portions 121bb, 12ba of side electrode portions 121b, 122b.
2bb and the upper end portion 123 of the groove electrode portions 123a, 124a.
aa, 124aa and the lower ends 123ab, 124ab. Therefore, the grooved electrode portions 123a and 124a arranged in the groove portions 123 and 124 of the tuning fork arms 121 and 122 have the insulating film 121.
c, 122c are not arranged. Also,
Similarly, the insulating films 121 are formed on the side electrode portions 121b and 122b disposed on the left and right side surfaces of the tuning fork arms 121 and 122 in FIG.
c and 122c are arranged. Therefore, the groove electrode portions 123 in the groove portions 123 and 124 functioning as excitation electrodes
Since the insulating films 121c and 122c are not disposed on the side electrode portions 121b and 122b on the side surfaces a and 124a,
Even if a voltage is applied to these electrodes and the tuning fork arms 121 and 122 vibrate, the tuning fork type vibrating piece 100 having a low CI value is obtained.

An insulating film 121c is provided between the side electrode portions 121b and 122b and the groove electrode portions 123a and 124a.
Since 122c is formed, even if dust or the like falls, there is no short circuit. Further, the insulating film 12
1c and 122c have side edges 121b and 1c, respectively.
Upper end portions 121ba and 122ba of 22b and lower end portion 12
1bb, 122bb, the upper end portions 123aa, 124aa and the lower end portions 123ab, 123ab, of the groove electrode portions 123a, 124a.
124ab. Therefore, the adhesion between the insulating films 121c and 122c is improved, and the insulating films 121c and 122c are firmly fixed to the tuning fork arms 121 and 122.

Further, as shown in FIG.
c, 122 c forming insulating film forming parts 121 d, 122
d, the groove electrode portions 123a and 124a and the side surface electrode portion 12
As described above, only Cr is disposed as 1b and 122b. This is because the insulating film 121 employed in the present embodiment
When c and 122c are SiO ₂ , adhesion to Au is poor, so that Au is not intentionally formed on Cr. For this reason, the insulating films 121c and 122c
The adhesiveness is further improved with the groove electrode portions 123a and 124a and the side electrode portions 121b and 122b made of Cr. By the way, as shown in FIG. 1, a pad electrode portion 112 made of Cr and Au is formed in the bad portion 111. As described above, the insulating films 121c and 122c are not formed on the frequency adjusting electrode portions 121a and 122a and the pad portion 111 of the tuning-fork type quartz vibrating piece 100 of the present embodiment. This is because these parts are parts that make electrical contact from the outside.

As shown in FIG. 1, the entirety of the pad portion 110 of the tuning-fork type quartz vibrating piece 100 is formed in a substantially plate shape. As shown in FIG. 1, the notches 12 are formed on both sides of the pad 110.
5 are provided at two places. The cuts 125, 1
The position of 25 is the tuning fork arms 121 and 122 as shown in FIG.
Are disposed below the lower ends of the grooves 123 and 124 of the tuning fork arm 121,
There is no possibility that the vibration of the motor 122 is hindered. Further, an area that is actually fixed when the tuning fork type quartz vibrating piece 100 is fixed in the package is the fixing area 113 in FIG. Figure 1
1, the lower end of the notch 125 is disposed above the fixing region 113 in FIG.
25 is configured so as not to affect the fixing region 113 and to adversely affect the fixing state of the tuning-fork type quartz vibrating piece 100 to the package.

As described above, the cut portion 125 provided on the pad portion 110 is provided at a position where the vibration of the tuning fork arms 121 and 122 of the tuning fork type quartz vibrating piece 100 is not adversely affected. Further, the notch 125
Is also provided at a position where the fixed state of the tuning-fork type quartz vibrating piece 100 to the package is not adversely affected. Notch 125 provided at such a position
Are provided on the pad portion 110 side below the positions of the grooves 123 and 124 of the tuning fork arms 121 and 122. Therefore, the vibration of the tuning fork arms 121 and 122 causes the groove 123,
Leakage vibration leaked from 124 becomes difficult to be transmitted to the fixing region 113 of the base 110 by the cutout 125.
Therefore, it is difficult for the leak vibration to be transmitted to the fixed region 113, and as a result, energy escape is unlikely to occur. The conventional variation in the CI value between the resonator element elements is 10 KΩ or more in standard deviation. However, in the present embodiment,
The standard deviation was drastically reduced to 1 KΩ.

The tuning-fork type quartz vibrating piece 10 according to the present embodiment.
0 is configured as described above, but the insulating film forming portion 1 of the tuning fork arms 121 and 122 of the tuning fork type quartz vibrating piece 100.
21d (see FIG. 1), the above-mentioned insulating films 121c, 122
The step of forming c will be described in detail below. Specifically, a portion of the tuning-fork type crystal vibrating piece 100 shown in FIG. 1 where the groove 123 of the insulating film forming portion 121d of the tuning-fork arm 121 is formed will be described using a cross-sectional view.

First, as shown in FIG. 3, a groove 123 is formed on the front and back surfaces of the tuning fork arm 121. Then, Cr is formed in the groove 123 with a thickness of, for example, 300 to 1000 mm. Au is deposited on this Cr to a thickness of 500 to 1000 mm. Similarly, tuning fork arm 1
Cr and Au are also formed on the side surfaces of the 23. Of the thus formed Cr and Au, a specific portion of the Au film is peeled off. This separation is performed using, for example, a photolithography technique or the like. That is, the pad electrode portion 11 of FIG.
The second electrode, the frequency adjustment electrode portion 121a, and the like are not stripped of the Au film, and are used as the pad electrode portion 112 and the frequency adjustment electrode portion 121a having the Au film. On the other hand, the Au film on the surface of the tuning fork arm 121 provided with the groove 123a of the insulating film forming portion 121d in FIG. 1 is peeled off as shown in FIG.

Next, as shown in FIG.
O ₂ is formed by sputtering. The tuning fork arm 12 at this time
1. SiO _{2 in the} upper and lower portions indicated by arrow B in FIG.
Is formed relatively thick, for example, about 2000 °. However, the side surface and the groove 123 indicated by the arrow C in FIG.
The inner portion is formed thinner than 2000 °. For example, the side surface is 1000 ° and the inside of the groove 123 is 500 ° to 100 °.
0 °. Although such film formation is performed by a sputtering apparatus, it is preferable that the upper surface and the lower surface in FIG. 5 be formed as thick as possible, and the side surface and the groove 123 be formed as thin as possible.

After the insulating film is formed as shown in FIG.
Performing the etching of O _2. First, examples of the etchant include an etchant in which hydrofluoric acid and ammonium fluoride are mixed and the concentration of which is adjusted with water, a potassium hydroxide solution, and the like. When etching is performed with such an etchant, the side surface (film thickness of 1000) of the tuning fork arm 121 is formed as described above.
ＳｉＯ) and the SiO ₂ film formed relatively thinly in the groove 123 (film thickness of 500Å to 1000Å) are removed. Then, if the etching is terminated at this point, the upper and lower surfaces (arrow B in FIG. 5) formed relatively thickly (2)
Remainder SiO ₂ film of 000Å), so that the insulating film 121c is deposited as shown in FIG.

The formation of the SiO ₂ film is performed by tuning the fork arm 1.
Since the SiO ₂ film can be prevented from being formed on the side surface of the groove 21 and the groove 123, even if the insulating film 121c is formed, the CI value does not increase. In addition, tuning fork arm 1
The removal of the insulating film from the side surface 21 and the groove 123 can be easily performed by etching, so that an increase in manufacturing cost can be prevented. In this embodiment, the tuning fork arm 1
Although the case where the insulating film of the side surface 21 and the groove 123 is removed by etching has been described, the insulating film may be left on the bottom of the groove 123.

(Second Embodiment) FIG. 7 is a view showing a ceramic package tuning-fork vibrator 200 as a vibrator according to a second embodiment of the present invention. The ceramic package tuning-fork vibrator 200 uses the tuning-fork type quartz vibrating piece 100 of the above-described first embodiment. Therefore, the configuration, operation, and the like of the tuning-fork type quartz vibrating piece 100 are denoted by the same reference numerals, and description thereof is omitted. FIG.
FIG. 3 is a schematic cross-sectional view illustrating a configuration of a ceramic package tuning fork vibrator 200. As shown in FIG. 7, the ceramic package tuning-fork vibrator 200 has a box-shaped package 210 having a space inside. This package 2
10 has a base portion 211 at the bottom thereof. The base portion 211 is formed of, for example, ceramics such as alumina.

A sealing portion 212 is provided on the base portion 211, and the sealing portion 212 is formed of the same material as the base portion 211. In addition, this sealing portion 21
A lid 213 is placed on the upper end of the base 2, and the base part 211, the sealing part 212 and the lid 213 form a hollow box. The package-side electrode 214 is provided on the base portion 211 of the package 210 thus formed. This package-side electrode 214
The tuning-fork type quartz vibrating piece 10 is placed on the
The fixed area 113 of the base 110 of the “0” is fixed. Since the tuning-fork type quartz vibrating piece 100 is configured as shown in FIG. 1, the CI value of the fundamental wave is kept low, and vibration failure due to a short circuit or the like hardly occurs. Therefore, the ceramic package tuning fork vibrator 200 on which the vibrating reed is mounted is also a small-sized, low CI value, and high-performance vibrator in which poor vibration hardly occurs.

(Third Embodiment) FIG. 8 is a schematic diagram showing a digital mobile phone 300 which is a mobile phone device according to a third embodiment of the present invention. The digital mobile phone 300 uses the tuning fork type vibrator 200 and the tuning fork type crystal vibrating piece 100 of the above-described second embodiment. Accordingly, the same reference numerals are used for the configurations, operations, and the like of the ceramic package tuning-fork type vibrator 200 and the tuning-fork type quartz vibrating piece 100, and description thereof is omitted. FIG. 8 shows a circuit block of the digital mobile phone 300. As shown in FIG. 8, when transmitting by the digital mobile phone 300, when the user inputs his / her voice into the microphone, the signal has a pulse width. The signal is transmitted from the transmitter and the antenna switch through the modulation / coding block and the modulator / demodulator block from the starting antenna.

On the other hand, the signal transmitted from another person's telephone is
The signal is received by an antenna, passes through an antenna switch and a reception filter, and is input from a receiver to a modulator / demodulator block. Then, the modulated or demodulated signal is output to a speaker as a voice through a block of pulse width modulation / coding. Among them, a controller for controlling an antenna switch, a modulator / demodulator block, and the like is provided. The controller includes, in addition to the above, a key which is an input unit such as an LCD or a number which is a display unit,
Furthermore, since the RAM and the ROM are also controlled, high accuracy is required. There is also a demand for downsizing the digital mobile phone 300. The ceramic package tuning fork vibrator 200 described above is used to meet such a requirement.

This ceramic package tuning fork vibrator 2
Since 00 has the tuning-fork type quartz vibrating piece 100 shown in FIG. Therefore, the digital mobile phone 300 equipped with the ceramic package tuning fork vibrator 200 is
A high-precision digital mobile phone having a low value and a vibrating reed that hardly causes vibration failure is obtained.

(Fourth Embodiment) FIG. 9 shows a tuning fork crystal oscillator 40 which is an oscillator according to a fourth embodiment of the present invention.
FIG. This digital tuning fork crystal oscillator 400
Has many parts in common with the above-described ceramic package tuning fork vibrator 200 of the second embodiment. Accordingly, the same reference numerals are used for the configurations, operations, and the like of the ceramic package tuning fork vibrator 200 and the tuning fork type quartz vibrating piece 100, and the description thereof is omitted.

The tuning-fork type crystal oscillator 400 shown in FIG. 9 is provided below the tuning-fork type crystal vibrating piece 100 of the ceramic package tuning-fork vibrator 200 shown in FIG.
The integrated circuit 410 is arranged as shown in FIG. That is, in the tuning-fork crystal oscillator 400, when the tuning-fork type crystal vibrating piece 100 disposed therein vibrates, the vibration is input to the integrated circuit 410, and thereafter, a predetermined frequency signal is taken out to function as an oscillator. Will be. That is, since the tuning-fork type crystal vibrating piece 100 housed in the tuning-fork crystal oscillator 400 is configured as shown in FIG. 1, the CI value is suppressed to be low, and the vibrating piece hardly causes vibration failure. Therefore, the digital tuning fork crystal oscillator 400 equipped with this resonator element also becomes a high-performance oscillator.

(Fifth Embodiment) FIG. 10 is a view showing a cylinder type tuning fork vibrator 500 which is a vibrator according to a fifth embodiment of the present invention. This cylinder type tuning fork vibrator 500 uses the tuning fork type quartz vibrating piece 100 of the first embodiment described above. Therefore, the same reference numerals are used for the configuration, operation, and the like of the tuning-fork type quartz vibrating piece 100, and description thereof is omitted. FIG. 10 is a schematic diagram showing a configuration of a cylinder type tuning fork vibrator 500. As shown in FIG. 10, the cylinder type tuning fork vibrator 500 has a metal cap 530 for accommodating the tuning fork type quartz vibrating piece 100 therein. The cap 530 is press-fitted into the stem 520, and the inside thereof is kept in a vacuum state.

A lead 51 for holding the substantially H-shaped tuning-fork type quartz vibrating piece 100 housed in the cap 530 is provided.
Two 0s are arranged. When a current or the like is applied to the cylinder type tuning fork vibrator 500 from the outside, the tuning fork arms 121 and 122 of the tuning fork type crystal vibrating piece 100 vibrate, and function as a vibrator. At this time, since the tuning-fork type quartz vibrating piece 100 is configured as shown in FIG. 1, the CI value is suppressed to be low, and the vibrating piece hardly causes a vibration failure. The cylinder-type tuning fork vibrator 500 having the vibrating reed is also a high-performance vibrator.

In each of the above embodiments, 32.7 is used.
The above description has been made with reference to a 38 kHz tuning-fork type quartz resonator as an example.
It is apparent that the present invention can be applied to a tuning fork type crystal resonator of kHz to 155 kHz. The tuning-fork type quartz vibrating piece 100 according to the above-described embodiment is not limited to the above-described example, but may include other electronic devices, portable information terminals, and televisions, video devices, so-called radio-cassettes, and personal computer built-in clocks. Obviously, it is also used for devices and watches. Furthermore, the present invention is not limited to the above embodiment,
Various changes can be made without departing from the scope of the claims. The configuration of the above embodiment can be partially omitted or changed to another arbitrary combination not described above.

[0057]

As described above, according to the present invention,
It is possible to provide a vibrating piece, a vibrator having the vibrating piece, a vibrator including the vibrator, an oscillator including the vibrator, and a portable telephone device, while suppressing a CI value to be low.

[Brief description of the drawings]

FIG. 1 is a schematic view of a tuning-fork type quartz vibrating piece according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along line F-F 'of FIG.

FIG. 3 is an explanatory view showing one step of forming an insulating film on the tuning-fork type quartz vibrating piece of FIG.

FIG. 4 is an explanatory view showing another step of forming an insulating film on the tuning-fork type quartz vibrating piece of FIG.

FIG. 5 is an explanatory view showing another step of forming an insulating film on the tuning-fork type quartz vibrating piece of FIG. 1;

FIG. 6 is an explanatory view showing another step of forming an insulating film on the tuning-fork type quartz vibrating piece of FIG. 1;

FIG. 7 is a schematic sectional view showing a configuration of a ceramic package tuning fork vibrator according to a second embodiment of the present invention.

FIG. 8 is a schematic diagram showing circuit blocks of a digital mobile phone according to a third embodiment of the present invention.

FIG. 9 is a schematic sectional view showing a configuration of a tuning fork crystal oscillator according to a fourth embodiment of the present invention.

FIG. 10 is a schematic sectional view showing a configuration of a cylinder type tuning fork vibrator according to a fifth embodiment of the present invention.

FIG. 11 is a schematic view showing a conventional tuning-fork type quartz vibrating piece.

12 is a schematic sectional view taken along line A-A 'of FIG.

[Explanation of symbols]

 100: tuning fork type crystal vibrating piece 110: pad portion 111: pad portion 112: pad electrode portion 113: fixed region 121, 122: tuning fork arm 121a, 122a: frequency adjustment Electrode portions 121b, 122b ... side electrode portions 121ba, 122ba ... upper end portions 121bb, 122bb ... lower end portions 121c, 122c ... insulating films 121d, 122d ... insulating film forming portions 123, 124 ... -Groove portions 123a, 124a-Groove electrode portions 123aa, 124aa-Upper end portions 123ab, 124ab-Lower end portions 125-Cut portions 200-Ceramic package tuning fork vibrator 210-Package 211 ... -Base 212-Sealing 213-Lid 214-Package-side electrode 300- Digital mobile phone 400 ... fork crystal oscillator 410 ... integrated circuits 500 ... cylinder type tuning-fork vibrator 510 ... lead 520 ... stem 530 ... Cap

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Junichiro Sakata 3-5-5 Yamato, Suwa-shi, Nagano F-term in Seiko Epson Corporation (reference) 5J079 AA02 AA04 BA43 FA01 HA03 HA07 HA22 HA25 5J108 BB02 CC06 CC09 CC11 EE18 FF01 FF14 GG03 GG04 GG15 GG16 HH03 JJ04 KK01 MM11

Claims (19)

[Claims] 1. A base, a vibrating arm protruding from the base, and a groove formed on a front surface and / or a back surface of the vibrating arm. A groove is formed on a side surface of the groove and the vibrating arm. A vibrating reed having a grooved electrode portion and a side surface electrode portion, wherein a short-circuit preventing portion is formed between the grooved electrode portion and the side surface electrode portion. 2. The resonator element according to claim 1, wherein the groove electrode portion and the side surface electrode portion are excitation electrodes. 3. The resonator element according to claim 1, wherein the short-circuit preventing portion is formed of an insulating film. 4. The resonator element according to claim 3, wherein the insulating film is formed by an etching process. 5. The resonator element according to claim 1, wherein a cut portion is formed in the base. 6. A fixing region for fixing the vibrating reed is provided on the base, and the cut portion is provided on a base between the fixing region and the vibrating arm. The resonator element according to claim 5, wherein: 7. The resonator element according to claim 6, wherein the vibrating piece is approximately 30 kHz to approximately 40 kHz.
The resonator element according to claim 1, wherein the resonator element is a tuning-fork type resonator element made of crystal oscillating at Hz. 8. A base, a vibrating arm protruding from the base, and a groove formed on a front surface and / or a back surface of the vibrating arm. The vibrating reed in which the groove electrode portion and the side surface electrode portion are respectively formed is a vibrator housed in a package, and a short-circuit preventing portion is provided between the groove electrode portion and the side surface electrode portion of the vibrating reed. A vibrator characterized by being formed. 9. The vibrator according to claim 8, wherein the groove electrode portion and the side surface electrode portion of the vibrating reed are excitation electrodes. 10. The vibrator according to claim 8, wherein the short-circuit preventing portion of the vibrating reed is formed of an insulating film. 11. The resonator according to claim 10, wherein the insulating film of the resonator element is formed by an etching process. 12. The vibration member according to claim 8, wherein a cut portion is formed in the base portion of the resonator element.
2. The vibrating reed according to any one of 1. 13. The base of the vibrating reed is provided with a fixing region for fixing the vibrating reed, and the cut portion is provided at a base between the fixing region and the vibrating arm. 2. The device according to claim 1, wherein
3. The vibrator according to 2. 14. The resonator element according to claim 1, wherein said resonator element has a frequency of about 30 kHz to about 40
14. The resonator element according to claim 8, wherein the resonator element is a tuning-fork type resonator element made of quartz oscillating at kHz. 15. The vibrator according to claim 8, wherein the package is formed in a box shape. 16. The vibrator according to claim 8, wherein said package is formed in a so-called cylinder type. 17. A base, a vibrating arm protruding from the base, and a groove formed on a front surface and / or a back surface of the vibrating arm. A groove is formed on a side surface of the groove and the vibrating arm. An oscillator in which a resonator element and an integrated circuit each having a grooved electrode portion and a side surface electrode portion are respectively housed in a package, wherein a short circuit occurs between the grooved electrode portion and the side surface electrode portion of the vibration piece. An oscillator, wherein a prevention unit is formed. 18. A base, a vibrating arm protruding from the base, and a groove formed on a front surface and / or a back surface of the vibrating arm, and a groove formed on a side surface of the groove and the vibrating arm. A vibrator in which a vibrating reed in which a groove electrode portion and a side surface electrode portion are respectively formed is housed in a package; and a mobile phone device using the vibrator connected to a control unit. A mobile phone device, wherein a short-circuit preventing portion is formed between the groove electrode portion and the side surface electrode portion of the resonator element. 19. A base, a vibrating arm protruding from the base, and a groove formed on a front surface and / or a back surface of the vibrating arm, and a groove formed on a side surface of the groove and the vibrating arm. A method of manufacturing a vibrating reed in which a groove electrode portion and a side surface electrode portion are formed, respectively, including a step of forming a short-circuit preventing portion between the groove electrode portion and the side surface electrode portion; Forming an insulating film on the vibrating arm so that an insulating film formed on the side surface and the groove is thinner than a film thickness of an insulating film formed on a surface of the vibrating arm; Removing the insulating film formed on the side surface portion and the groove portion.