JP2002341357A - Manufacturing method and manufacturing apparatus for liquid crystal display device - Google Patents
Manufacturing method and manufacturing apparatus for liquid crystal display deviceInfo
- Publication number
- JP2002341357A JP2002341357A JP2001143310A JP2001143310A JP2002341357A JP 2002341357 A JP2002341357 A JP 2002341357A JP 2001143310 A JP2001143310 A JP 2001143310A JP 2001143310 A JP2001143310 A JP 2001143310A JP 2002341357 A JP2002341357 A JP 2002341357A
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- Prior art keywords
- elastic body
- substrates
- liquid crystal
- crystal display
- display device
- Prior art date
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Abstract
(57)【要約】
【課題】 定盤と基板間に介在する弾性体があらゆる方
向につぶれ、ギャップ不良が発生することを防止する。
【解決手段】 上側定盤1と、板状の弾性体5を設置し
た下側定盤2とを備え、シール材6の塗布と、スペーサ
粒子7の散布または突起の形成を、少なくとも一方の基
板に対して行った2枚の基板3,4を上側定盤と1下側
定盤2にそれぞれ1枚ずつ真空吸着させた状態で位置合
わせを行い、両定盤1,2により上下基板3,4を加圧
して基板3,4の貼り合わせを行うことができる液晶表
示装置の製造装置であって、弾性体5の吸着孔51が弾
性体厚み方向に対して傾斜して設けられている。これに
より、弾性体5のつぶれ方向を制御し、貼り合わせ時の
パネルへの加圧を均一にすることができる。
(57) [Summary] [PROBLEMS] To prevent an elastic body interposed between a surface plate and a substrate from being crushed in all directions and causing a gap defect. SOLUTION: An upper surface plate 1 and a lower surface plate 2 provided with a plate-like elastic body 5 are provided, and at least one of substrates for applying a sealing material 6 and dispersing spacer particles 7 or forming projections. The two substrates 3 and 4 are aligned with each other in such a manner that each of the substrates 3 and 4 is vacuum-adsorbed to the upper surface plate 1 and the lower surface plate 2 one by one. This is an apparatus for manufacturing a liquid crystal display device capable of bonding substrates 3 and 4 by applying pressure, wherein suction holes 51 of elastic body 5 are provided to be inclined with respect to the thickness direction of the elastic body. Thereby, the direction in which the elastic body 5 is crushed can be controlled, and the pressure applied to the panel at the time of bonding can be made uniform.
Description
【0001】[0001]
【発明の属する技術分野】この発明は、液晶表示装置の
製造方法および製造装置に関する。The present invention relates to a method and an apparatus for manufacturing a liquid crystal display.
【0002】[0002]
【従来の技術】液晶表示装置の製造方法は次の2通りの
工法が実用されている。まず第1の工法は真空注入法で
ある。図6に示すように、2枚の基板3,4のいずれか
一方に2枚の基板3,4を接着させ、更に液晶材料を封
止するためのシール材料6を、1〜数個所の切れ目をつ
けてパターン形成する。また2枚の基板3,4のいずれ
か一方にセルギャップを所定の値で保持するためのスペ
ーサ粒子7または突起を形成する。これら2枚の基板
3,4を上定盤1と下定盤2にそれぞれ真空吸着させ、
空気圧中で貼り合わせた後にシール材料6を硬化し、空
セルを作成する。次にこの空セルに真空チャンバ中に
て、予め設けておいた1〜数個所のシール材料6の切れ
目(注入口)から液晶材料を注入した後に、注入口に封
口材料を用いて封止して液晶表示装置を組み立てる。2. Description of the Related Art As a method of manufacturing a liquid crystal display device, the following two methods are practically used. First, the first method is a vacuum injection method. As shown in FIG. 6, two substrates 3 and 4 are adhered to one of the two substrates 3 and 4, and a sealing material 6 for sealing a liquid crystal material is further provided with one or several cuts. To form a pattern. Further, spacer particles 7 or projections for holding the cell gap at a predetermined value are formed on one of the two substrates 3 and 4. These two substrates 3 and 4 are vacuum-adsorbed to the upper surface plate 1 and the lower surface plate 2, respectively.
After bonding in air pressure, the sealing material 6 is cured to form an empty cell. Next, a liquid crystal material is injected into this empty cell from one or several cuts (injection ports) of the sealing material 6 provided in advance in a vacuum chamber, and then the injection port is sealed with a sealing material. To assemble the liquid crystal display.
【0003】第2の工法は滴下工法である。2枚の基板
のいずれか一方に2枚の基板を接着させ、更に液晶材料
を封止するためのシール材料を、切れ目をつけずにパタ
ーン形成する。また2枚の基板のいずれか一方にセルギ
ャップを所定の値で保持するためのスペーサ粒子または
突起を形成する。更に2枚の基板のいずれか一方に所定
の量の液晶材料を滴下する。これら2枚の基板を上下定
盤に真空吸着後、真空チャンバ中で、貼り合わせた後に
シール材料を硬化して液晶表示装置を組み立てる。[0003] The second method is a dropping method. The two substrates are bonded to one of the two substrates, and a sealing material for sealing the liquid crystal material is formed in a pattern without cutting. In addition, spacer particles or protrusions for holding the cell gap at a predetermined value are formed on one of the two substrates. Further, a predetermined amount of a liquid crystal material is dropped on one of the two substrates. After these two substrates are vacuum-sucked on the upper and lower plates, they are bonded together in a vacuum chamber and then the sealing material is cured to assemble a liquid crystal display device.
【0004】液晶表示装置に必要なセルギャップ精度は
一般に、TN液晶表示装置では±0.3μm以下、ST
N液晶表示装置では±0.05μm以下であるが、それ
に対して金属製の上下定盤の平面加工精度は±20μm
程度しか期待できない。そのために、注入工法の液晶表
示装置貼り合わせ方法では上下基板を均一に加圧する事
が不可能であり、必要なセルギャップ精度を得るために
は、上記の貼り合わせを行った後に、別途準備した加圧
機を用いて上下基板を均一に加圧して、シール樹脂を所
定量だけ押しつぶす必要があった。そこで貼り合わせ時
に下定盤と下側基板の間に弾性体を設置する事により、
貼り合わせ工程において同時に基板を均一加圧し、シー
ル樹脂を所定量だけ押しつぶす事が可能である。The cell gap accuracy required for a liquid crystal display device is generally ± 0.3 μm or less for a TN liquid crystal display device,
In the case of N liquid crystal display devices, it is ± 0.05 μm or less.
We can expect only degree. Therefore, it is impossible to pressurize the upper and lower substrates uniformly with the liquid crystal display device bonding method of the injection method, and in order to obtain the required cell gap accuracy, the above-described bonding was performed and separately prepared. It was necessary to press the upper and lower substrates uniformly using a pressing machine to crush the sealing resin by a predetermined amount. Therefore, by installing an elastic body between the lower surface plate and the lower substrate at the time of bonding,
In the bonding step, it is possible to simultaneously press the substrate uniformly and crush the sealing resin by a predetermined amount.
【0005】この時上下基板の位置合わせがずれないよ
うに、上下定盤の真空吸着による固定が必要であり、そ
のために下側基板と下定盤間に設置した弾性体に真空吸
着孔を空けておく必要がある。At this time, it is necessary to fix the upper and lower substrates by vacuum suction so that the alignment between the upper and lower substrates does not shift. For this purpose, a vacuum suction hole is formed in an elastic body provided between the lower substrate and the lower surface plate. Need to be kept.
【0006】[0006]
【発明が解決しようとする課題】しかし、弾性体の吸着
孔が弾性体表面に対し傾きが不規則のため、貼り合わせ
時、弾性体があらゆる方向につぶれ統一性がなく、その
ためパネルに加わる圧力に不均一が生じ、組立て後のパ
ネルにギャップ不良が発生し、パネル品質を著しく低下
させる課題がある。However, since the suction hole of the elastic body has an irregular inclination with respect to the surface of the elastic body, the elastic body is crushed in all directions at the time of bonding, resulting in a lack of uniformity. There is a problem that unevenness occurs in the panel, a gap failure occurs in the panel after assembly, and the panel quality is remarkably deteriorated.
【0007】したがって、この発明の目的は、基板の貼
り合わせ時に、定盤と基板間に介在する弾性体があらゆ
る方向につぶれ、ギャップ不良が発生することを防止す
る液晶表示装置の製造方法および製造装置を提供するこ
とである。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a method and a method for manufacturing a liquid crystal display device in which an elastic body interposed between a surface plate and a substrate is prevented from being crushed in all directions at the time of bonding substrates, thereby preventing a gap defect from occurring. It is to provide a device.
【0008】[0008]
【課題を解決するための手段】このような課題を解決す
るためにこの発明の請求項1記載の液晶表示装置の製造
方法は、2枚の基板を接着するためのシール材の塗布
と、2枚の前記基板間のギャップを形成するためのスペ
ーサ粒子の散布または突起の形成を、少なくとも一方の
前記基板に対して行い、2枚の前記基板を1枚ずつ真空
吸着させ、位置合わせを行った後、前記基板を貼り合わ
せる液晶表示装置の製造方法であって、前記基板を真空
吸着する際に、いずれか一方の基板を弾性体に当接さ
せ、弾性体厚み方向に対して傾斜して設けられた前記弾
性体の吸着孔により真空吸着する。According to a first aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device, comprising: applying a sealant for bonding two substrates; Spraying of spacer particles or formation of protrusions for forming a gap between the two substrates was performed on at least one of the substrates, and the two substrates were vacuum-adsorbed one by one to perform alignment. Thereafter, a method for manufacturing a liquid crystal display device in which the substrates are attached to each other, wherein, when the substrates are vacuum-sucked, one of the substrates is brought into contact with an elastic body, and is provided inclined with respect to the elastic body thickness direction. Vacuum suction is performed by the suction holes of the elastic body.
【0009】このように、2枚の基板を接着するための
シール材の塗布と、2枚の基板間のギャップを形成する
ためのスペーサ粒子の散布または突起の形成を、少なく
とも一方の基板に対して行い、基板を貼り合わせて空セ
ルを形成する注入工法において、基板を真空吸着する際
に、いずれか一方の基板を弾性体に当接させ、弾性体厚
み方向に対して傾斜して設けられた弾性体の吸着孔によ
り真空吸着するので、弾性体のつぶれ方向を制御し、貼
り合わせ時のパネルへの加圧を均一にすることができ
る。すなわち、弾性体は吸着孔の傾いた方向につぶれる
ため、パネルへの加圧が均一となるように弾性体のつぶ
れ方向を予め制御することが可能となり、組立て後のパ
ネルにギャップ不良が発生しない。As described above, the application of the sealing material for bonding the two substrates and the dispersion of the spacer particles or the formation of the protrusions for forming the gap between the two substrates are performed on at least one of the substrates. In the injection method of bonding the substrates to form an empty cell, one of the substrates is brought into contact with the elastic body when the substrate is vacuum-sucked, and is provided inclined with respect to the elastic body thickness direction. Since the vacuum suction is performed by the suction hole of the elastic body, the direction in which the elastic body is crushed can be controlled, and the pressure applied to the panel at the time of bonding can be made uniform. That is, since the elastic body is crushed in the direction in which the suction hole is inclined, the crushing direction of the elastic body can be controlled in advance so that the pressure on the panel is uniform, and no gap failure occurs in the panel after assembly. .
【0010】請求項2記載の液晶表示装置の製造方法
は、請求項1記載の液晶表示装置の製造方法において、
弾性体の吸着孔が同一方向に傾斜している。このよう
に、弾性体の吸着孔が同一方向に傾斜しているので、弾
性体の吸着孔付近におけるつぶれ方向が一定となる。According to a second aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the first aspect.
The suction holes of the elastic body are inclined in the same direction. As described above, since the suction holes of the elastic body are inclined in the same direction, the collapse direction near the suction holes of the elastic body is constant.
【0011】請求項3記載の液晶表示装置の製造方法
は、請求項1記載の液晶表示装置の製造方法において、
弾性体の吸着孔が弾性体厚み方向に対して3度以上傾斜
している。このように、弾性体の吸着孔が弾性体厚み方
向に対して3度以上傾斜しているので、弾性体のつぶれ
方向を確実に制御でき、セルギャップ不良が改善する。According to a third aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the first aspect.
The suction holes of the elastic body are inclined at least 3 degrees with respect to the thickness direction of the elastic body. As described above, since the suction holes of the elastic body are inclined at least three degrees with respect to the thickness direction of the elastic body, the direction in which the elastic body is crushed can be reliably controlled, and the cell gap failure is improved.
【0012】請求項4記載の液晶表示装置の製造方法
は、2枚の基板を接着するためのシール材の塗布と、2
枚の前記基板間のギャップを形成するためのスペーサ粒
子の散布または突起の形成と、所定量の液晶材料の滴下
を、少なくとも一方の前記基板に対して行う工程と、2
枚の前記基板を1枚ずつ真空吸着させる工程と、2枚の
基板を含む雰囲気内を、基板の真空吸着よりも低い真空
度に保持する工程と、2枚の基板間の距離を一定に保持
してアライメントを実施する工程と、アライメントが完
了した後、2枚の基板を加圧して、前記シール材を押し
つぶして基板を貼り合わせる工程とを含む液晶表示装置
の製造方法であって、前記基板を真空吸着する際に、い
ずれか一方の基板を弾性体に当接させ、弾性体厚み方向
に対して傾斜して設けられた前記弾性体の吸着孔により
真空吸着する。According to a fourth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device, comprising: applying a sealing material for bonding two substrates;
Dispersing or forming projections of spacer particles for forming a gap between two substrates, and dropping a predetermined amount of liquid crystal material onto at least one of the substrates;
A step of vacuum-suctioning the two substrates one by one, a step of maintaining the atmosphere including the two substrates at a degree of vacuum lower than the vacuum suction of the substrates, and a constant distance between the two substrates A method of manufacturing a liquid crystal display device, comprising: a step of performing alignment by performing the alignment; and, after the alignment is completed, a step of pressing the two substrates, crushing the sealant, and bonding the substrates together. When vacuum suction is performed, one of the substrates is brought into contact with the elastic body, and vacuum suction is performed using the suction holes of the elastic body that are provided to be inclined with respect to the thickness direction of the elastic body.
【0013】このように、2枚の基板を接着するための
シール材の塗布と、2枚の基板間のギャップを形成する
ためのスペーサ粒子の散布または突起の形成と、所定量
の液晶材料の滴下を、少なくとも一方の基板に対して行
い、2枚の基板を1枚ずつ真空吸着させて製造する滴下
工法において、基板を真空吸着する際に、いずれか一方
の基板を弾性体に当接させ、弾性体厚み方向に対して傾
斜して設けられた弾性体の吸着孔により真空吸着するの
で、弾性体のつぶれ方向を制御し、貼り合わせ時のパネ
ルへの加圧を均一にすることができる。すなわち、弾性
体は吸着孔の傾いた方向につぶれるため、パネルへの加
圧が均一となるように弾性体のつぶれ方向を予め制御す
ることが可能となり、組立て後のパネルにギャップ不良
が発生しない。As described above, the application of the sealant for bonding the two substrates, the dispersion or formation of the projections of the spacer particles for forming the gap between the two substrates, the formation of the predetermined amount of the liquid crystal material, and the like. Dropping is performed on at least one substrate, and in a dropping method in which two substrates are vacuum-adsorbed one by one, when one of the substrates is vacuum-adsorbed, one of the substrates is brought into contact with an elastic body. Since vacuum suction is performed by the suction holes of the elastic body provided at an angle with respect to the thickness direction of the elastic body, the direction in which the elastic body is crushed can be controlled, and the pressure applied to the panel during bonding can be uniform. . That is, since the elastic body is crushed in the direction in which the suction hole is inclined, the crushing direction of the elastic body can be controlled in advance so that the pressure on the panel is uniform, and no gap failure occurs in the panel after assembly. .
【0014】請求項5記載の液晶表示装置の製造方法
は、請求項4記載の液晶表示装置の製造方法において、
弾性体の吸着孔が同一方向に傾斜している。このよう
に、弾性体の吸着孔が同一方向に傾斜しているので、弾
性体の吸着孔付近におけるつぶれ方向が一定となる。According to a fifth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the fourth aspect.
The suction holes of the elastic body are inclined in the same direction. As described above, since the suction holes of the elastic body are inclined in the same direction, the collapse direction near the suction holes of the elastic body is constant.
【0015】請求項6記載の液晶表示装置の製造方法
は、請求項4記載の液晶表示装置の製造方法において、
弾性体の吸着孔が弾性体厚み方向に対して3度以上傾斜
している。このように、弾性体の吸着孔が弾性体厚み方
向に対して3度以上傾斜しているので、弾性体のつぶれ
方向を確実に制御でき、セルギャップ不良が改善する。According to a sixth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the fourth aspect.
The suction holes of the elastic body are inclined at least 3 degrees with respect to the thickness direction of the elastic body. As described above, since the suction holes of the elastic body are inclined at least three degrees with respect to the thickness direction of the elastic body, the direction in which the elastic body is crushed can be reliably controlled, and the cell gap failure is improved.
【0016】請求項7記載の液晶表示装置の製造装置
は、上側定盤と、板状の弾性体を設置した下側定盤とを
備え、シール材の塗布と、スペーサ粒子の散布または突
起の形成を、少なくとも一方の基板に対して行った2枚
の基板を前記上側定盤と前記下側定盤にそれぞれ1枚ず
つ真空吸着させた状態で位置合わせを行い、前記両定盤
により上下基板を加圧して基板の貼り合わせを行うこと
ができる液晶表示装置の製造装置であって、前記弾性体
の吸着孔が弾性体厚み方向に対して傾斜して設けられて
いる。According to a seventh aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display device, comprising: an upper surface plate; and a lower surface plate on which a plate-like elastic body is installed. The formation is performed on at least one of the two substrates, and the two substrates are aligned with each other while being vacuum-adsorbed to the upper surface plate and the lower surface plate one by one. A manufacturing apparatus for a liquid crystal display device capable of bonding substrates by pressurizing the elastic body, wherein the suction holes of the elastic body are provided to be inclined with respect to the thickness direction of the elastic body.
【0017】このように、上側定盤と、板状の弾性体を
設置した下側定盤とを備え、シール材の塗布と、スペー
サ粒子の散布または突起の形成を、少なくとも一方の基
板に対して行った2枚の基板を上側定盤と下側定盤にそ
れぞれ1枚ずつ真空吸着させた状態で、基板を貼り合わ
せ空セルを形成する注入工法の装置において、弾性体の
吸着孔が弾性体厚み方向に対して傾斜して設けられてい
るので、弾性体のつぶれ方向を制御し、貼り合わせ時の
パネルへの加圧を均一にすることができる。As described above, the upper surface plate and the lower surface plate provided with the plate-like elastic body are provided, and the application of the sealing material and the dispersion of the spacer particles or the formation of the projections are performed on at least one of the substrates. In the injection method, two substrates are bonded to each other on the upper surface plate and the lower surface plate by vacuum, and then the substrates are bonded together to form an empty cell. Since it is provided to be inclined with respect to the body thickness direction, it is possible to control the direction in which the elastic body is crushed, and to evenly apply pressure to the panel during bonding.
【0018】請求項8記載の液晶表示装置の製造装置
は、請求項7記載の液晶表示装置の製造装置において、
弾性体の吸着孔が同一方向に傾斜している。このよう
に、弾性体の吸着孔が同一方向に傾斜しているので、弾
性体の吸着孔付近におけるつぶれ方向が一定となる。The manufacturing apparatus for a liquid crystal display device according to claim 8 is the manufacturing apparatus for a liquid crystal display device according to claim 7,
The suction holes of the elastic body are inclined in the same direction. As described above, since the suction holes of the elastic body are inclined in the same direction, the collapse direction near the suction holes of the elastic body is constant.
【0019】請求項9記載の液晶表示装置の製造装置
は、請求項7記載の液晶表示装置の製造装置において、
弾性体の吸着孔が弾性体厚み方向に対して3度以上傾斜
している。このように、弾性体の吸着孔が弾性体厚み方
向に対して3度以上傾斜しているので、弾性体のつぶれ
方向を確実に制御でき、セルギャップ不良が改善する。According to a ninth aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display device according to the seventh aspect.
The suction holes of the elastic body are inclined at least 3 degrees with respect to the thickness direction of the elastic body. As described above, since the suction holes of the elastic body are inclined at least three degrees with respect to the thickness direction of the elastic body, the direction in which the elastic body is crushed can be reliably controlled, and the cell gap failure is improved.
【0020】請求項10記載の液晶表示装置の製造装置
は、上側定盤と、板状の弾性体を設置した下側定盤と、
前記上側定盤と前記下側定盤を内部に設置したチャンバ
とを備え、シール材の塗布と、スペーサ粒子の散布また
は突起の形成と、所定量の液晶材料の滴下を、少なくと
も一方の基板に対して行った2枚の基板を前記上側定盤
と前記下側定盤にそれぞれ1枚ずつ真空吸着させ、前記
チャンバ内を前記基板を吸着する真空度よりも低い真空
度に保持した状態で、2枚の基板間の距離を一定の距離
に保持してアライメントを実施し、前記両定盤により上
下基板を加圧して、シール材を押しつぶして基板を貼り
合わせることができる液晶表示装置の製造装置であっ
て、前記弾性体の吸着孔が弾性体厚み方向に対して傾斜
して設けられている。According to a tenth aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display device, comprising: an upper surface plate; a lower surface plate on which a plate-like elastic body is installed;
A chamber having the upper surface plate and the lower surface plate installed therein, and application of a sealing material, dispersion of spacer particles or formation of protrusions, and dropping of a predetermined amount of liquid crystal material onto at least one substrate. While the two substrates performed on the upper surface plate and the lower surface plate are vacuum-adsorbed one by one, and the inside of the chamber is kept at a vacuum degree lower than the vacuum degree at which the substrates are adsorbed, An apparatus for manufacturing a liquid crystal display device capable of performing alignment while keeping a distance between two substrates at a fixed distance, pressing the upper and lower substrates by the both surface plates, crushing the sealing material and bonding the substrates together. Wherein the suction hole of the elastic body is provided to be inclined with respect to the thickness direction of the elastic body.
【0021】このように、上側定盤と、板状の弾性体を
設置した下側定盤と、上側定盤と下側定盤を内部に設置
したチャンバとを備え、シール材の塗布と、スペーサ粒
子の散布または突起の形成と、所定量の液晶材料の滴下
を、少なくとも一方の基板に対して行った2枚の基板を
上側定盤と下側定盤にそれぞれ1枚ずつ真空吸着させて
製造する滴下工法の装置において、弾性体のつぶれ方向
を制御し、貼り合わせ時のパネルへの加圧を均一にする
ことができる。As described above, the apparatus includes the upper surface plate, the lower surface plate on which the plate-shaped elastic body is installed, and the chamber in which the upper surface plate and the lower surface plate are installed. The spraying of spacer particles or the formation of projections and the dropping of a predetermined amount of liquid crystal material were performed on at least one of the substrates, and the two substrates were vacuum-adsorbed one by one to the upper surface plate and the lower surface plate, respectively. In the device of the dropping method to be manufactured, the direction in which the elastic body is crushed can be controlled, and the pressure applied to the panel at the time of bonding can be made uniform.
【0022】請求項11記載の液晶表示装置の製造装置
は、請求項10記載の液晶表示装置の製造装置におい
て、弾性体の吸着孔が同一方向に傾斜している。このよ
うに、液晶表示装置の製造装置において、弾性体の吸着
孔が同一方向に傾斜しているので、弾性体の吸着孔付近
におけるつぶれ方向が一定となる。According to an eleventh aspect of the present invention, in the manufacturing apparatus of the tenth aspect, the suction holes of the elastic body are inclined in the same direction. As described above, in the liquid crystal display device manufacturing apparatus, since the suction holes of the elastic body are inclined in the same direction, the collapse direction near the suction hole of the elastic body is constant.
【0023】請求項12記載の液晶表示装置の製造装置
は、請求項10記載の液晶表示装置の製造装置におい
て、弾性体の吸着孔が弾性体厚み方向に対して3度以上
傾斜している。このように、弾性体の吸着孔が弾性体厚
み方向に対して3度以上傾斜しているので、弾性体のつ
ぶれ方向を確実に制御でき、セルギャップ不良が改善す
る。According to a twelfth aspect of the present invention, there is provided the liquid crystal display device manufacturing apparatus according to the tenth aspect, wherein the suction holes of the elastic body are inclined at least 3 degrees with respect to the thickness direction of the elastic body. As described above, since the suction holes of the elastic body are inclined at least three degrees with respect to the thickness direction of the elastic body, the direction in which the elastic body is crushed can be reliably controlled, and the cell gap failure is improved.
【0024】[0024]
【発明の実施の形態】この発明の第1の実施の形態を図
1〜図4に基づいて説明する。図1はこの発明の第1の
実施の形態の液晶表示装置の製造装置の概略図、図2は
この発明の実施の形態における弾性体の概略を示す平面
図、図3はこの発明の実施の形態における下側定盤の概
略を示す平面図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic diagram of an apparatus for manufacturing a liquid crystal display device according to a first embodiment of the present invention, FIG. 2 is a plan view schematically showing an elastic body according to the embodiment of the present invention, and FIG. It is a top view which shows the outline of the lower surface plate in a form.
【0025】図1〜図3に示すようにこの液晶表示装置
の製造装置は、上側定盤1と、板状の弾性体5を設置し
た下側定盤2とを備え、シール材(シール樹脂)6の塗
布と、スペーサ粒子7の散布または突起の形成を、少な
くとも一方の基板に対して行った2枚の基板3,4を上
側定盤1と下側定盤2にそれぞれ1枚ずつ真空吸着させ
た状態で位置合わせを行い、両定盤1,2により上下基
板3,4を加圧して基板の貼り合わせを行う。また、弾
性体5の真空吸着孔51は、弾性体厚み方向に対して傾
斜して設けられている。この場合、下側定盤2には真空
吸着孔51に連通する吸着溝21が設けられている。As shown in FIGS. 1 to 3, the manufacturing apparatus for a liquid crystal display device includes an upper surface plate 1 and a lower surface plate 2 on which a plate-like elastic body 5 is installed. 2) At least one of the substrates 3 and 4 subjected to the application of 6 and the spraying of the spacer particles 7 or the formation of the projections is vacuumed on each of the upper platen 1 and the lower platen 2. Alignment is performed in a state where the substrates are adsorbed, and the upper and lower substrates 3 and 4 are pressed by both the platens 1 and 2 to bond the substrates. Further, the vacuum suction holes 51 of the elastic body 5 are provided to be inclined with respect to the thickness direction of the elastic body. In this case, the lower surface plate 2 is provided with a suction groove 21 communicating with the vacuum suction hole 51.
【0026】次に液晶表示装置の製造方法について説明
する。まず、一般的な方法で形成されたアレイ基板とカ
ラーフィルタ基板を準備し、それぞれの基板に、洗浄、
ポリイミド製の配向膜の形成、硬化、所定のラビング処
理を行なった。Next, a method of manufacturing a liquid crystal display device will be described. First, an array substrate and a color filter substrate formed by a general method are prepared, and each substrate is washed,
An alignment film made of polyimide was formed, cured, and subjected to a predetermined rubbing treatment.
【0027】次にアレイ基板側に粒径4.5μmの樹脂
製スペーサ粒子7を散布し、カラーフィルタ側には、径
5.5μmのガラスファイバを混在した紫外線硬化型の
シール樹脂6を、スクリーン印刷法を用いてパターン形
成した。この時、カラーフィルタ基板には注入口のある
パターンを形成した。Next, resin spacer particles 7 having a particle size of 4.5 μm are sprayed on the array substrate side, and an ultraviolet-curing type sealing resin 6 mixed with a glass fiber having a diameter of 5.5 μm is screened on the color filter side. A pattern was formed using a printing method. At this time, a pattern having an inlet was formed on the color filter substrate.
【0028】これらのアレイ基板とカラーフィルタ基板
を用いて、以下のように貼り合わせを行なった。Using these array substrate and color filter substrate, bonding was performed as follows.
【0029】貼り合わせ装置の下定盤2と下側基板4間
に弾性体5を挿入して貼り合わせを行なった。なお弾性
体5はシリコンゴム材質のものを準備した。The elastic body 5 was inserted between the lower platen 2 and the lower substrate 4 of the bonding apparatus to perform bonding. The elastic body 5 was prepared from a silicone rubber material.
【0030】カラーフィルタ基板を予め準備した弾性体
5を介して下定盤2に、アレイ基板を上定盤1にそれぞ
れ真空吸着して、上下基板3,4の位置合わせを行なっ
た後に、上下基板3,4を貼り合わせ、上下定盤1,2
を介して1.5トンで加圧してシール樹脂6を十分に押
しつぶした。この時、図4(a)に示すようにセットa
に用いた弾性体5の吸着孔は弾性体表面に対し垂直(弾
性体厚み方向)に空けたものを、図4(b)〜(d)に
示すようにセットb、セットc、セットdに関してはそ
れぞれ2度、3度、4度各々弾性体厚み方向に対して傾
斜して空けたものを使用した。After the color filter substrate is vacuum-adsorbed to the lower platen 2 via the elastic body 5 previously prepared and the array substrate is vacuum-adsorbed to the upper platen 1 respectively, the upper and lower substrates 3 and 4 are aligned. Laminate 3, 4
And pressurized with 1.5 tons to sufficiently crush the sealing resin 6. At this time, as shown in FIG.
The suction holes of the elastic body 5 used in (1) were opened perpendicularly to the surface of the elastic body (in the thickness direction of the elastic body), and as shown in FIGS. 4B to 4D, the set b, set c, and set d Were used at intervals of 2, 3 and 4 degrees with respect to the thickness direction of the elastic body, respectively.
【0031】次に上記貼り合わせ済み基板セットa、セ
ットb、セットc、セットdを、貼り合わせ装置から取
り出し、紫外線照射によるシール樹脂6の硬化を行なっ
た。Next, the bonded substrate set a, set b, set c and set d were taken out of the bonding apparatus, and the sealing resin 6 was cured by irradiation with ultraviolet rays.
【0032】これらセットa、セットb、セットc、セ
ットdの貼り合わせ済み基板の周辺部分を切断した後、
真空注入法を用いて液晶材料を充填し、注入口を封止し
て液晶表示装置を作成した。After cutting the peripheral portions of the bonded substrates of set a, set b, set c and set d,
A liquid crystal material was filled using a vacuum injection method, and the injection port was sealed to form a liquid crystal display device.
【0033】この発明の第2の実施の形態を図5に基づ
いて説明する。図5はこの発明の第2の実施の形態の液
晶表示装置の製造装置の概略図である。A second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a schematic view of an apparatus for manufacturing a liquid crystal display device according to the second embodiment of the present invention.
【0034】図5に示すようにこの液晶表示装置の製造
装置は、上側定盤1と、板状の弾性体5を設置した下側
定盤2と、上側定盤1と下側定盤2を内部に設置したチ
ャンバ9とを備え、シール材6の塗布と、スペーサ粒子
7の散布または突起の形成と、所定量の液晶材料8の滴
下を、少なくとも一方の基板に対して行った2枚の基板
3,4を上側定盤1と下側定盤2にそれぞれ1枚ずつ真
空吸着させ、チャンバ9内を基板を吸着する真空度より
も低い真空度に保持した状態で、2枚の基板3,4間の
距離を一定の距離に保持してアライメントを実施し、両
定盤1,2により上下基板3,4を加圧して、シール材
6を押しつぶして基板を貼り合わせる。また、弾性体5
の真空吸着孔51は、弾性体厚み方向に対して傾斜して
設けられている。As shown in FIG. 5, this liquid crystal display device manufacturing apparatus comprises an upper surface plate 1, a lower surface plate 2 on which a plate-like elastic body 5 is installed, an upper surface plate 1, and a lower surface plate 2. And a chamber 9 in which the sealing material 6 is applied, the spacer particles 7 are scattered or projections are formed, and a predetermined amount of the liquid crystal material 8 is dropped on at least one of the substrates. The substrates 3 and 4 are vacuum-adsorbed one by one on the upper surface plate 1 and the lower surface plate 2, and the two substrates are held in a state where the chamber 9 is maintained at a vacuum lower than the vacuum for suctioning the substrates. Alignment is performed while maintaining the distance between the substrates 3 and 4 at a fixed distance, and the upper and lower substrates 3 and 4 are pressed by the two stools 1 and 2 to crush the sealing material 6 and bond the substrates. Also, the elastic body 5
The vacuum suction holes 51 are provided to be inclined with respect to the elastic body thickness direction.
【0035】次に液晶表示装置の製造方法について説明
する。まず、第1の実施の形態と同様に一般的な方法で
形成されたアレイ基板とカラーフィルタ基板を準備し、
それぞれの基板に、洗浄、ポリイミド製の配向膜の形
成、硬化、所定のラビング処理を行なった。Next, a method of manufacturing a liquid crystal display device will be described. First, an array substrate and a color filter substrate formed by a general method as in the first embodiment are prepared.
Each substrate was subjected to washing, formation of an alignment film made of polyimide, curing, and predetermined rubbing treatment.
【0036】次にアレイ基板側に粒径4.5μmの樹脂
製スペーサ粒子7を散布し、カラーフィルタ側には、径
5.5μmのガラスファイバを混在した紫外線硬化型の
シール樹脂6を、スクリーン印刷法を用いてパターン形
成した。この時、カラーフィルタ基板には注入口の無い
パターンを形成した。Next, resin spacer particles 7 having a particle size of 4.5 μm are sprayed on the array substrate side, and an ultraviolet-curable sealing resin 6 mixed with glass fibers having a diameter of 5.5 μm is screened on the color filter side. A pattern was formed using a printing method. At this time, a pattern having no injection port was formed on the color filter substrate.
【0037】これらのアレイ基板とカラーフィルタ基板
を用いて、以下のように貼り合わせを行なった。Using these array substrate and color filter substrate, bonding was performed as follows.
【0038】予めカラーフィルタ基板に液晶材料8を滴
下した後に貼り合わせを行なった。第1の実施の形態と
同様に、貼り合わせ装置の下定盤2と下側基板4間に弾
性体5を挿入して貼り合わせを行なった。After the liquid crystal material 8 was dropped on the color filter substrate in advance, the bonding was performed. As in the first embodiment, the elastic body 5 was inserted between the lower platen 2 and the lower substrate 4 of the bonding apparatus to perform bonding.
【0039】予め液晶材料8を滴下したカラーフィルタ
基板を、弾性体5を介して下定盤2に、アレイ基板を上
定盤1にそれぞれ真空吸着して、真空チャンバ内9の真
空度が0.5×133.322〜1.0×133.32
2Pa(0.5〜1.0torr)になるまで真空引き
を行なった。この時、上下定盤1,2による真空吸着の
真空度は、0.1×133.322Pa(0.1tor
r)以下であった。The color filter substrate on which the liquid crystal material 8 has been dropped in advance is vacuum-sucked to the lower platen 2 and the array substrate to the upper platen 1 via the elastic body 5, respectively. 5 × 133.322 to 1.0 × 133.32
The evacuation was performed until the pressure became 2 Pa (0.5 to 1.0 torr). At this time, the degree of vacuum of vacuum suction by the upper and lower stools 1 and 2 is 0.1 × 133.322 Pa (0.1 torr).
r) below.
【0040】上記真空度で真空チャンバ9内を保持しな
がら、上下基板3,4の位置合わせを行なった後に、上
下基板3,4を貼り合わせ、上下定盤1,2を介して
1.5トンで加圧してシール樹脂6を十分に押しつぶし
た。この時、セットeに用いた弾性体5の吸着孔は弾性
体表面に対し垂直に空けたものを、セットf、セット
g、セットhに関しては2度、3度、4度傾けて空けた
ものを使用した。セットe〜セットhの弾性体5の形状
は、それぞれ第1の実施の形態の図4(a)〜(d)に
対応する。After positioning the upper and lower substrates 3 and 4 while holding the inside of the vacuum chamber 9 at the above-mentioned degree of vacuum, the upper and lower substrates 3 and 4 are bonded to each other. The sealing resin 6 was sufficiently crushed by pressurizing with a ton. At this time, the suction holes of the elastic body 5 used in the set e were opened perpendicularly to the surface of the elastic body, and the set f, set g, and set h were opened at an angle of 2, 3, and 4 degrees. It was used. The shapes of the elastic bodies 5 of the sets e to h correspond to FIGS. 4A to 4D of the first embodiment, respectively.
【0041】次に上記貼り合わせ済み基板セットe、セ
ットf、セットg、セットhを、貼り合わせ装置から取
り出し、紫外線照射によるシール樹脂6の硬化を行な
い、さらに、基板の周辺部分を切断して、液晶表示装置
を作成した。Next, the bonded substrate set e, set f, set g, and set h are taken out of the bonding apparatus, the sealing resin 6 is cured by ultraviolet irradiation, and the peripheral portion of the substrate is cut. , A liquid crystal display device was created.
【0042】比較例として第1の実施の形態と同様にア
レイ基板とカラーフィルタ基板を形成し、以下のように
貼り合わせを行った。As a comparative example, an array substrate and a color filter substrate were formed in the same manner as in the first embodiment, and were bonded as follows.
【0043】すなわち、このセットiは従来の製造方法
を用いて貼り合わせを行なった。図6に示したようにカ
ラーフィルタ基板を下定盤2に、アレイ基板を上定盤1
に真空吸着して、上下基板3,4(アレイ基板、カラー
フィルタ基板)の位置合わせを行なった後に上下基板
3,4を貼り合わせた。That is, this set i was bonded using a conventional manufacturing method. As shown in FIG. 6, the color filter substrate is placed on the lower platen 2 and the array substrate is placed on the upper platen 1.
And the upper and lower substrates 3 and 4 (array substrate, color filter substrate) were aligned, and then the upper and lower substrates 3 and 4 were bonded.
【0044】次に上記、貼り合わせ済み基板セットi
を、貼り合わせ装置から取り出し、真空パックを施して
シール樹脂6をつぶした後に、紫外線照射によるシール
樹脂6の硬化を行なった。Next, the bonded substrate set i
Was taken out of the bonding apparatus, vacuum-packed, and the seal resin 6 was crushed, and then the seal resin 6 was cured by ultraviolet irradiation.
【0045】以上に作成したセットa〜セットiの液晶
表示装置のセルギャップ測定(面内100点)を行なっ
た。さらに周辺回路を実装し、パネル表示を行なって表
示の均一性の目視評価を実施した。これらの結果を表1
に示す。The cell gap measurement (100 points in the plane) of the liquid crystal display devices of the sets a to i prepared as described above was performed. Further, peripheral circuits were mounted, panel display was performed, and a visual evaluation of display uniformity was performed. Table 1 shows these results.
Shown in
【0046】[0046]
【表1】 [Table 1]
【0047】表1からも明らかなように、弾性体の吸着
孔が弾性体厚み方向に対して3度以上角度を持って空け
ることによりセルギャップ不良が改善することがわか
る。As is clear from Table 1, the cell gap defect is improved by forming the suction holes of the elastic body at an angle of 3 degrees or more with respect to the thickness direction of the elastic body.
【0048】[0048]
【発明の効果】この発明の請求項1記載の液晶表示装置
の製造方法によれば、2枚の基板を接着するためのシー
ル材の塗布と、2枚の基板間のギャップを形成するため
のスペーサ粒子の散布または突起の形成を、少なくとも
一方の基板に対して行い、基板を貼り合わせて空セルを
形成する注入工法において、基板を真空吸着する際に、
いずれか一方の基板を弾性体に当接させ、弾性体厚み方
向に対して傾斜して設けられた弾性体の吸着孔により真
空吸着するので、弾性体のつぶれ方向を制御し、貼り合
わせ時のパネルへの加圧を均一にすることができる。す
なわち、弾性体は吸着孔の傾いた方向につぶれるため、
パネルへの加圧が均一となるように弾性体のつぶれ方向
を予め制御することが可能となり、組立て後のパネルに
ギャップ不良が発生しない。このため、セルギャップの
均一な表示品位の高い液晶表示装置を作成することがで
きる。According to the method of manufacturing a liquid crystal display device according to the first aspect of the present invention, it is possible to apply a sealing material for bonding two substrates and to form a gap between the two substrates. Spraying spacer particles or forming projections on at least one of the substrates, and bonding the substrates together to form an empty cell, when vacuum-adsorbing the substrates,
One of the substrates is brought into contact with the elastic body, and vacuum suction is performed by the suction hole of the elastic body provided at an angle with respect to the thickness direction of the elastic body. The pressure applied to the panel can be made uniform. In other words, the elastic body collapses in the direction in which the suction holes are inclined,
The crushing direction of the elastic body can be controlled in advance so that the pressure applied to the panel becomes uniform, so that a gap defect does not occur in the panel after assembly. Therefore, a liquid crystal display device having a uniform cell gap and high display quality can be manufactured.
【0049】請求項2では、弾性体の吸着孔が同一方向
に傾斜しているので、弾性体の吸着孔付近におけるつぶ
れ方向が一定となる。In the second aspect, since the suction holes of the elastic body are inclined in the same direction, the crushing direction near the suction holes of the elastic body is constant.
【0050】請求項3では、弾性体の吸着孔が弾性体厚
み方向に対して3度以上傾斜しているので、弾性体のつ
ぶれ方向を確実に制御でき、セルギャップ不良が改善す
る。According to the third aspect, since the suction holes of the elastic body are inclined at least three degrees with respect to the thickness direction of the elastic body, the direction in which the elastic body is crushed can be reliably controlled, and the cell gap defect is improved.
【0051】この発明の請求項4記載の液晶表示装置の
製造方法によれば、2枚の基板を接着するためのシール
材の塗布と、2枚の基板間のギャップを形成するための
スペーサ粒子の散布または突起の形成と、所定量の液晶
材料の滴下を、少なくとも一方の基板に対して行い、2
枚の基板を1枚ずつ真空吸着させて製造する滴下工法に
おいて、基板を真空吸着する際に、いずれか一方の基板
を弾性体に当接させ、弾性体厚み方向に対して傾斜して
設けられた弾性体の吸着孔により真空吸着するので、弾
性体のつぶれ方向を制御し、貼り合わせ時のパネルへの
加圧を均一にすることができる。すなわち、弾性体は吸
着孔の傾いた方向につぶれるため、パネルへの加圧が均
一となるように弾性体のつぶれ方向を予め制御すること
が可能となり、組立て後のパネルにギャップ不良が発生
しない。このため、セルギャップの均一な表示品位の高
い液晶表示装置を作成することができる。According to the method of manufacturing a liquid crystal display device according to the fourth aspect of the present invention, application of a sealing material for bonding two substrates and spacer particles for forming a gap between the two substrates. Spraying or forming a projection and dropping a predetermined amount of liquid crystal material on at least one of the substrates.
In the dropping method in which one substrate is vacuum-adsorbed and manufactured one by one, when the substrate is vacuum-adsorbed, one of the substrates is brought into contact with the elastic body and is provided to be inclined with respect to the elastic body thickness direction. Since the vacuum suction is performed by the suction hole of the elastic body, the direction in which the elastic body is crushed can be controlled, and the pressure applied to the panel at the time of bonding can be made uniform. That is, since the elastic body is crushed in the direction in which the suction hole is inclined, the crushing direction of the elastic body can be controlled in advance so that the pressure on the panel is uniform, and no gap failure occurs in the panel after assembly. . Therefore, a liquid crystal display device having a uniform cell gap and high display quality can be manufactured.
【0052】請求項5では、弾性体の吸着孔が同一方向
に傾斜しているので、弾性体の吸着孔付近におけるつぶ
れ方向が一定となる。In the fifth aspect, since the suction holes of the elastic body are inclined in the same direction, the crushing direction near the suction holes of the elastic body becomes constant.
【0053】請求項6では、弾性体の吸着孔が弾性体厚
み方向に対して3度以上傾斜しているので、弾性体のつ
ぶれ方向を確実に制御でき、セルギャップ不良が改善す
る。In the sixth aspect, since the suction holes of the elastic body are inclined at least 3 degrees with respect to the thickness direction of the elastic body, the direction in which the elastic body is crushed can be reliably controlled, and the cell gap defect is improved.
【0054】この発明の請求項7記載の液晶表示装置の
製造装置によれば、上側定盤と、板状の弾性体を設置し
た下側定盤とを備え、シール材の塗布と、スペーサ粒子
の散布または突起の形成を、少なくとも一方の基板に対
して行った2枚の基板を上側定盤と下側定盤にそれぞれ
1枚ずつ真空吸着させた状態で、基板を貼り合わせ空セ
ルを形成する注入工法の装置において、弾性体の吸着孔
が弾性体厚み方向に対して傾斜して設けられているの
で、弾性体のつぶれ方向を制御し、貼り合わせ時のパネ
ルへの加圧を均一にすることができ、セルギャップの均
一な表示品位の高い液晶表示装置を作成することができ
る。According to a seventh aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display device, comprising: an upper surface plate; a lower surface plate on which a plate-like elastic body is provided; Spraying or forming projections on at least one of the substrates is performed, and the two substrates are vacuum-adsorbed one by one to the upper surface plate and the lower surface plate, respectively, and the substrates are bonded to form an empty cell. Since the suction holes of the elastic body are provided inclined with respect to the thickness direction of the elastic body, the direction of the collapse of the elastic body is controlled, and the pressure on the panel at the time of bonding is evenly distributed. Thus, a liquid crystal display device with a uniform cell gap and high display quality can be manufactured.
【0055】請求項8では、弾性体の吸着孔が同一方向
に傾斜しているので、弾性体の吸着孔付近におけるつぶ
れ方向が一定となる。In the eighth aspect, since the suction holes of the elastic body are inclined in the same direction, the crushing direction near the suction holes of the elastic body becomes constant.
【0056】請求項9では、弾性体の吸着孔が弾性体厚
み方向に対して3度以上傾斜しているので、弾性体のつ
ぶれ方向を確実に制御でき、セルギャップ不良が改善す
る。In the ninth aspect, since the suction hole of the elastic body is inclined at least 3 degrees with respect to the thickness direction of the elastic body, the crushing direction of the elastic body can be reliably controlled, and the cell gap defect is improved.
【0057】この発明の請求項10記載の液晶表示装置
の製造装置によれば、上側定盤と、板状の弾性体を設置
した下側定盤と、上側定盤と下側定盤を内部に設置した
チャンバとを備え、シール材の塗布と、スペーサ粒子の
散布または突起の形成と、所定量の液晶材料の滴下を、
少なくとも一方の基板に対して行った2枚の基板を上側
定盤と下側定盤にそれぞれ1枚ずつ真空吸着させて製造
する滴下工法の装置において、弾性体のつぶれ方向を制
御し、貼り合わせ時のパネルへの加圧を均一にすること
ができ、セルギャップの均一な表示品位の高い液晶表示
装置を作成することができる。According to the apparatus for manufacturing a liquid crystal display device according to the tenth aspect of the present invention, the upper surface plate, the lower surface plate provided with the plate-like elastic body, and the upper surface plate and the lower surface plate are internally provided. A chamber installed in the chamber, applying a sealing material, spraying spacer particles or forming protrusions, and dropping a predetermined amount of liquid crystal material,
In an apparatus of a dropping method in which at least one substrate is vacuum-adsorbed to each of two substrates on an upper surface plate and a lower surface plate one by one, the crushing direction of the elastic body is controlled and bonded. The pressure applied to the panel at the time can be made uniform, and a liquid crystal display device with a uniform cell gap and high display quality can be manufactured.
【0058】請求項11では、液晶表示装置の製造装置
において、弾性体の吸着孔が同一方向に傾斜しているの
で、弾性体の吸着孔付近におけるつぶれ方向が一定とな
る。According to the eleventh aspect, in the manufacturing apparatus of the liquid crystal display device, since the suction holes of the elastic body are inclined in the same direction, the collapse direction near the suction hole of the elastic body is constant.
【0059】請求項12では、弾性体の吸着孔が弾性体
厚み方向に対して3度以上傾斜しているので、弾性体の
つぶれ方向を確実に制御でき、セルギャップ不良が改善
する。In the twelfth aspect, since the suction holes of the elastic body are inclined at least three degrees with respect to the thickness direction of the elastic body, the direction in which the elastic body is crushed can be reliably controlled, and the cell gap failure is improved.
【図1】この発明の第1の実施の形態の液晶表示装置の
製造装置の概略図FIG. 1 is a schematic diagram of an apparatus for manufacturing a liquid crystal display device according to a first embodiment of the present invention.
【図2】この発明の実施の形態における弾性体の概略を
示す平面図FIG. 2 is a plan view schematically showing an elastic body according to the embodiment of the present invention.
【図3】この発明の実施の形態における下側定盤の概略
を示す平面図FIG. 3 is a plan view schematically showing a lower surface plate according to the embodiment of the present invention.
【図4】液晶表示装置の各弾性体吸着孔を角度別に示す
概略図FIG. 4 is a schematic diagram showing each elastic body suction hole of the liquid crystal display device by angle.
【図5】この発明の第2の実施の形態の液晶表示装置の
製造装置の概略図FIG. 5 is a schematic diagram of an apparatus for manufacturing a liquid crystal display device according to a second embodiment of the present invention.
【図6】従来例の液晶表示装置の製造方法を真空注入法
に適応した場合を示す概略図FIG. 6 is a schematic diagram showing a case where a method of manufacturing a conventional liquid crystal display device is applied to a vacuum injection method.
1 上定盤 2 下定盤 21 下定盤の吸着溝 3 上基板 4 下基板 5 弾性体 51 弾性体の吸着孔 6 シール樹脂 7 スペーサ粒子 8 液晶材料 9 真空チャンバ DESCRIPTION OF SYMBOLS 1 Upper surface plate 2 Lower surface plate 21 Adsorption groove of lower surface plate 3 Upper substrate 4 Lower substrate 5 Elastic body 51 Elastic body adsorption hole 6 Seal resin 7 Spacer particle 8 Liquid crystal material 9 Vacuum chamber
フロントページの続き (72)発明者 山田 聡 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Fターム(参考) 2H088 FA01 FA09 FA17 FA30 2H089 NA22 NA48 NA49 NA60 QA04 QA14 Continuation of the front page (72) Inventor Satoshi Yamada 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. F term (reference) 2H088 FA01 FA09 FA17 FA30 2H089 NA22 NA48 NA49 NA60 QA04 QA14
Claims (12)
塗布と、2枚の前記基板間のギャップを形成するための
スペーサ粒子の散布または突起の形成を、少なくとも一
方の前記基板に対して行い、2枚の前記基板を1枚ずつ
真空吸着させ、位置合わせを行った後、前記基板を貼り
合わせる液晶表示装置の製造方法であって、前記基板を
真空吸着する際に、いずれか一方の基板を弾性体に当接
させ、弾性体厚み方向に対して傾斜して設けられた前記
弾性体の吸着孔により真空吸着することを特徴とする液
晶表示装置の製造方法。1. A method according to claim 1, further comprising: applying a sealing material for bonding the two substrates, and spraying spacer particles for forming a gap between the two substrates or forming protrusions on at least one of the substrates. A method of manufacturing a liquid crystal display device, in which two substrates are vacuum-adsorbed one by one, and alignment is performed, and then the substrates are attached to each other. A method of manufacturing a liquid crystal display device, wherein the substrate is brought into contact with an elastic body and vacuum-sucked by suction holes of the elastic body provided at an angle to the thickness direction of the elastic body.
る請求項1記載の液晶表示装置の製造方法。2. The method according to claim 1, wherein the suction holes of the elastic body are inclined in the same direction.
て3度以上傾斜している請求項1記載の液晶表示装置の
製造方法。3. The method for manufacturing a liquid crystal display device according to claim 1, wherein the suction holes of the elastic body are inclined at least 3 degrees with respect to the thickness direction of the elastic body.
塗布と、2枚の前記基板間のギャップを形成するための
スペーサ粒子の散布または突起の形成と、所定量の液晶
材料の滴下を、少なくとも一方の前記基板に対して行う
工程と、2枚の前記基板を1枚ずつ真空吸着させる工程
と、2枚の基板を含む雰囲気内を、基板の真空吸着より
も低い真空度に保持する工程と、2枚の基板間の距離を
一定に保持してアライメントを実施する工程と、アライ
メントが完了した後、2枚の基板を加圧して、前記シー
ル材を押しつぶして基板を貼り合わせる工程とを含む液
晶表示装置の製造方法であって、前記基板を真空吸着す
る際に、いずれか一方の基板を弾性体に当接させ、弾性
体厚み方向に対して傾斜して設けられた前記弾性体の吸
着孔により真空吸着することを特徴とする液晶表示装置
の製造方法。4. Applying a sealant for bonding two substrates, dispersing or forming protrusions of spacer particles for forming a gap between the two substrates, and dropping a predetermined amount of liquid crystal material. Is performed on at least one of the substrates, a step of vacuum-sucking the two substrates one by one, and maintaining an atmosphere including the two substrates at a vacuum degree lower than the vacuum suction of the substrates. Performing the alignment while maintaining a constant distance between the two substrates, and after the alignment is completed, pressing the two substrates, crushing the sealing material, and bonding the substrates. A method of manufacturing a liquid crystal display device, comprising the steps of: contacting one of the substrates with an elastic body when vacuum-absorbing the substrate; and providing the elastic body inclined with respect to the elastic body thickness direction. Vacuum suction through body suction holes A method of manufacturing a liquid crystal display device.
る請求項4記載の液晶表示装置の製造方法。5. The method according to claim 4, wherein the suction holes of the elastic body are inclined in the same direction.
て3度以上傾斜している請求項4記載の液晶表示装置の
製造方法。6. The method according to claim 4, wherein the suction holes of the elastic body are inclined at least 3 degrees with respect to the thickness direction of the elastic body.
側定盤とを備え、シール材の塗布と、スペーサ粒子の散
布または突起の形成を、少なくとも一方の基板に対して
行った2枚の基板を前記上側定盤と前記下側定盤にそれ
ぞれ1枚ずつ真空吸着させた状態で位置合わせを行い、
前記両定盤により上下基板を加圧して基板の貼り合わせ
を行うことができる液晶表示装置の製造装置であって、
前記弾性体の吸着孔が弾性体厚み方向に対して傾斜して
設けられていることを特徴とする液晶表示装置の製造装
置。7. An upper surface plate and a lower surface plate on which a plate-like elastic body is installed, and apply a sealing material and scatter spacer particles or form projections on at least one substrate. Positioning is performed in a state where the two substrates are vacuum-adsorbed one by one to the upper surface plate and the lower surface plate, respectively.
A manufacturing apparatus for a liquid crystal display device, which can perform the bonding of the substrates by pressing the upper and lower substrates by the both surface plates,
An apparatus for manufacturing a liquid crystal display device, wherein the suction holes of the elastic body are provided to be inclined with respect to the thickness direction of the elastic body.
る請求項7記載の液晶表示装置の製造装置。8. The manufacturing apparatus according to claim 7, wherein the suction holes of the elastic body are inclined in the same direction.
て3度以上傾斜している請求項7記載の液晶表示装置の
製造装置。9. The manufacturing apparatus for a liquid crystal display device according to claim 7, wherein the suction holes of the elastic body are inclined at least 3 degrees with respect to the thickness direction of the elastic body.
下側定盤と、前記上側定盤と前記下側定盤を内部に設置
したチャンバとを備え、シール材の塗布と、スペーサ粒
子の散布または突起の形成と、所定量の液晶材料の滴下
を、少なくとも一方の基板に対して行った2枚の基板を
前記上側定盤と前記下側定盤にそれぞれ1枚ずつ真空吸
着させ、前記チャンバ内を前記基板を吸着する真空度よ
りも低い真空度に保持した状態で、2枚の基板間の距離
を一定の距離に保持してアライメントを実施し、前記両
定盤により上下基板を加圧して、シール材を押しつぶし
て基板を貼り合わせることができる液晶表示装置の製造
装置であって、前記弾性体の吸着孔が弾性体厚み方向に
対して傾斜して設けられていることを特徴とする液晶表
示装置の製造装置。10. An upper platen, a lower platen on which a plate-like elastic body is installed, and a chamber in which the upper platen and the lower platen are installed. Spraying of spacer particles or formation of protrusions and dropping of a predetermined amount of liquid crystal material were performed on at least one of the substrates, and the two substrates were vacuum-adsorbed one by one on the upper surface plate and the lower surface plate. Then, in a state where the inside of the chamber is maintained at a vacuum degree lower than the vacuum degree at which the substrate is sucked, alignment is performed while maintaining a constant distance between the two substrates, An apparatus for manufacturing a liquid crystal display device capable of applying pressure to a substrate and squeezing a sealing material to bond the substrate, wherein the suction hole of the elastic body is provided to be inclined with respect to the thickness direction of the elastic body. An apparatus for manufacturing a liquid crystal display device, comprising:
いる請求項10記載の液晶表示装置の製造装置。11. An apparatus for manufacturing a liquid crystal display device according to claim 10, wherein the suction holes of the elastic body are inclined in the same direction.
して3度以上傾斜している請求項10記載の液晶表示装
置の製造装置。12. The apparatus for manufacturing a liquid crystal display device according to claim 10, wherein the suction holes of the elastic body are inclined at least 3 degrees with respect to the thickness direction of the elastic body.
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|---|---|---|---|
| JP2001143310A JP2002341357A (en) | 2001-05-14 | 2001-05-14 | Manufacturing method and manufacturing apparatus for liquid crystal display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001143310A JP2002341357A (en) | 2001-05-14 | 2001-05-14 | Manufacturing method and manufacturing apparatus for liquid crystal display device |
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|---|---|
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ID=18989479
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2001
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