JP2002346452A - Paste coating machine - Google Patents

Abstract

(57) [Problem] To reduce the weight with a simple configuration, to apply a paste in a desired pattern accurately on a substrate, and to eliminate the possibility of contamination of the substrate. SOLUTION: A substrate is placed on a table facing a paste discharge port of a nozzle, and a relative position relationship between the substrate and the nozzle while discharging a paste filled in a paste storage tube onto the substrate from the paste discharge port. The frames 2A and 2B can be moved in one direction parallel to the upper surface of the substrate 8 on a table as a paste applicator for applying a paste pattern of a desired shape on the substrate by changing There are a plurality of coating heads 5A to 5D provided so as to be individually movable by linear motor drive. Each coating head is provided with a paste storage cylinder and a nozzle having a discharge port facing a substrate, and a frame and each coating head are provided. Control means 9 and 10 are provided for moving the paste to a desired position on the substrate and applying paste to a desired position on the substrate from the discharge port of each nozzle.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used in a manufacturing process of a flat panel, a printed circuit board or a semiconductor assembly.
The substrate is placed on the table so as to face the discharge port of the nozzle, and the relative position relationship between the substrate and the nozzle is changed while discharging the paste filled in the paste storage tube onto the substrate from the discharge port of the nozzle. More particularly, the present invention relates to a paste applying machine for applying a paste pattern of a desired shape on a substrate, and more particularly to a driving mechanism of an applying head including a nozzle.

[0002]

2. Description of the Related Art A frame is provided on a table so as to be movable in one direction parallel to the upper surface of a substrate, and a coating head having a paste storage cylinder and a nozzle having a discharge port opposed to the substrate is moved in a direction in which the frame extends. There is a paste coating machine which is provided so as to be movable, and moves a frame and a coating head to a desired position on a substrate to apply a paste to a desired position on the substrate from a discharge port of a nozzle. Is driven by a servo motor using
00-93866).

[0003]

In this case, if a plurality of coating heads are provided and pastes are to be simultaneously applied to the substrate from the nozzles in a desired pattern, a ball screw or a servomotor is required for each coating head. In addition to this, the structure becomes complicated and the weight of the apparatus increases, but moreover, each ball screw generates a difference in thermal expansion due to a rise in temperature during operation, and accurate position control of each coating head is required. There was a problem that it became difficult. Further, there is also a problem that dust is generated in a plurality of movable parts existing on the substrate, and the substrate is contaminated.

[0004] It is an object of the present invention to reduce the weight with a simple structure, to enable accurate application of paste on a substrate in a desired pattern, and to provide a paste coating machine which does not cause contamination of the substrate. Is to provide.

Another object of the present invention is to provide a paste applying machine which can apply a paste in a pattern of a desired shape stably at a high speed and accurately even with a simple structure. Is to do.

[0006]

In order to achieve the above object, the present invention provides a paste coating machine for applying and drawing a paste pattern of a desired shape on a substrate mounted on a table. It can move in one direction within a plane parallel to the surface on which the paste pattern is applied and drawn,
And a frame extending in a direction different from this one direction,
A plurality of linear motors are arranged on the frame, are provided with a linear motor movably in the direction of extension of the frame, and are provided with a paste storage cylinder and a nozzle having a paste discharge port for discharging paste filled in the paste storage cylinder. While moving the frame with respect to the table and moving the plurality of coating heads with respect to the frame within a range in which the coating head and the paste discharge port face the substrate mounted on the table, the paste of the plurality of coating heads is moved. And a control unit for controlling the discharge of the paste from the discharge port, and a paste pattern of a desired shape is applied and drawn on the substrate by a plurality of application heads.

[0007] The linear motor of each of the plurality of coating heads includes a magnet provided on the frame along the extension direction thereof, and an armature coil provided on the coating head facing the magnet. Is what you do.

According to another aspect of the present invention, in the above configuration, when the control means moves a plurality of coating heads along the extending direction of the frame, two adjacent coating heads are moved. When entering the preset mutual interference range, one of these two coating heads is stopped and the other coating head is moved, and after the movement of the other coating head is completed, one coating head is moved. It is controlled so as to make it.

[0009] Further, two or more frames are provided in a parallel relationship to each other, and the control means, when these frames are moved, makes two adjacent frames fall within a preset mutual interference range. Sometimes, one of these two frames is stopped, the other frame is moved, and after the movement of the other frame is completed, one frame is controlled to be moved.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing an embodiment of the paste applicator of the present invention, wherein 1 is a gantry, 2A and 2B are frames, 3A and 3B are fixed parts, 4A to 4D are movable parts,
A to 5D are coating heads, 6 is a substrate holding board, 7 is a θ axis rotation table, 8 is a substrate, 9 is a main control unit, 10 is a sub control unit,
11 is a monitor, and 12 is a keyboard.

In FIG. 1, a fixing portion 3 is provided on a gantry 1.
An X-axis drive mechanism including A, 3B, movable parts 4A to 4D, and frames 2A, 2B is provided. Fixed parts 3A, 3
B is fixed on the gantry 1 along the X-axis direction. Two movable parts 4A and 4C are provided on the fixed part 3A, and two movable parts 4B and 4D are provided on the fixed part 3B so as to be movable. ing. Then, the frame 2A straddles the movable part 4A and the movable part 4B (that is, along the Y-axis direction), and also straddles the movable part 4C and the movable part 4D (that is, along the Y-axis direction). Each of the frames 2B is provided.

The frame 2A has two coating heads 5
A and 5B are provided so as to be movable in the longitudinal direction of the frame 2A (that is, the Y direction).
Has two application heads 5C and 5D in this frame 2B.
In the longitudinal direction (that is, the Y direction).

On the gantry 1, fixed parts 3A, 3 of the X-axis drive mechanism
A substrate holding board 6 is mounted and a θ-axis rotating table 7 rotatable in the θ-axis direction is provided between B. A substrate 8 is suction-held (placed) on the substrate holding board 6. In addition, stand 1
Is provided with a monitor 11 and a keyboard 12, and includes a main control unit 9, a sub control unit 10, and the like.

FIG. 2 is a view showing a portion of the movable portion 4A of the X-axis drive mechanism in FIG. 1. FIG. 2A is a side view of this portion viewed from the Y-axis direction, and FIG. FIG. 5 is a view of this portion as viewed from the X-axis direction. 3a1 is a magnet, 3a
Reference numerals a2 and 3a3 denote linear guides, 3a4 denotes a linear scale, 4a1 denotes an armature coil, 4a2 denotes a detection unit, and portions corresponding to those in FIG.

2 (a) and 2 (b), a fixed portion 3A of the X-axis drive mechanism has a magnet 3a1 and linear guides 3a2, 3a parallel to the X-axis direction (perpendicular to the paper).
3 and a linear scale 3a4, and an armature coil 4a1 that forms a linear motor with the magnet 3a1 of the fixed unit 3A and a detection unit 4a2 of the linear scale 3a4 are provided on the movable unit 4A. The movable portion 4A is driven by the linear motors 3a2 and 3a3 by the driving force of the linear motor.
In the X-axis direction.

The fixing portion 3B shown in FIG.
The movable section 4B has the same configuration as the movable section 4A. The detection result of the linear scale 3a4 of the fixed section 3A detected by the detection section 4a2 of the movable section 4A and the detection of the movable section 4B Based on the linear scale detection result of the fixed section 3B detected by the section, the main control section 9 causes the fixed section 3A,
By controlling the linear motor of the movable section 4A and the linear motors of the fixed section 3B and the movable section 4B, the position of the movable sections 4A and 4B is controlled so that these detection results match.
The longitudinal direction of the frame 2A is accurately aligned with the direction perpendicular to the fixing portions 3A and 3B (that is, the Y-axis direction).

The movable units 4C and 4D in FIG. 1 also have the same configuration as the movable unit 4a1, and the main control unit 9 controls the similar movable units 4a and 4b in accordance with the detection results of these detection units.
C, 4D position control is performed.

FIGS. 3A and 3B are views showing a portion of the coating head in FIG. 1, wherein FIG. 3A is a side view as viewed from the Y direction, and FIG. 3B is a perspective view. 2a1 is a magnet,
2a2 to 2a4 are linear guides, 2a5 is a linear scale, 5a1 is a base, 5a2 is an armature coil, 5a3 is a detection unit, 5A1 is a Z-axis servo motor, 5A2 is a Z-axis guide, 5A3 is a Z-axis table, and 5A4. Is an optical distance meter, 5
A5 paste storage cylinder (syringe), 5A6 is an image recognition camera, and the parts corresponding to those in FIG.

Hereinafter, the coating head 5A will be described, but the same applies to the other coating heads 5B to 5D.

3A and 3B, the frame 2
A includes the coating head 5A (therefore, the coating head 5B
The magnet 2a1 extends along the longitudinal direction (Y-axis direction) of the upper surface of the Y-axis drive mechanism, and two linear guides 2a2 are arranged on both sides thereof in parallel with the magnet 2a1. 2a3, a linear guide 2a4 is provided on one side, and a linear scale 2a5 is provided on the other side.

The coating head 5A is mounted on the frame 2
The armature coil 5a2 which forms a linear motor together with the magnet 2a1 of the frame 2A, and the detection unit 5a3 of the linear scale 2a5 of the frame 2A have a base 5a1 arranged so as to straddle A. Is provided.

The linear scale 2a5 is provided on the side surface of the frame 2A along the Y-axis direction, and a detecting section 5a3 for detecting the linear scale 2a5 is provided with a coating head 5A facing the linear scale 2a5. This detector 5a
The main control unit 9 controls the linear motor composed of the armature coil 5a2 of the coating head 5A and the magnet 2a1 of the frame 2A based on the detection result from the linear scale 2a5 in the Y-axis direction on the frame 2A. Position control is performed.

On the base 5a1 of the coating head 5A,
A Z-axis servo motor 5A1 is provided. The Z-axis servo motor 5A1 is provided with a Z-axis guide 5A2, the Z-axis guide 5A2 is further provided with a Z-axis table 5A3, and the Z-axis table is provided.
The table 5A3 is provided with a distance meter 5A4, and the distance meter 5A4 is further provided with a paste storage cylinder 5A5. The Z-axis table 5A3 is further provided with an image recognition camera 5A6.

The Z-axis servo motor 5A1 is controlled by the sub-control unit 10 (FIG. 1) based on the detection result of the distance meter 5A4 installed on the Z-axis table 5A3, and the Z-axis guide 5A2.
Via a paste storage cylinder 5A5 or an image recognition camera 5A6
Is driven in the Z-axis direction.

The other coating heads 5B to 5 as shown in FIG.
D has a similar configuration.

FIG. 4 shows the optical rangefinder 5 shown in FIG.
FIG. 4 is a perspective view showing a positional relationship between A4 and a nozzle provided at the tip of a paste storage cylinder 5A5, where 5A7 is a nozzle support, 5A8 is a nozzle, and portions corresponding to FIG. I have.

In the same drawing, a nozzle support 5A7 is provided at the lower end of the paste storage cylinder 5A5, and the nozzle 5 has a paste discharge port open toward the substrate 8 at its tip.
A8 is attached. The paste storage cylinder 5A5 and the nozzle 5A8 communicate with each other via a nozzle support 5A7, and the paste discharge port of the nozzle 5A8 is provided on the upper surface of the substrate 8 with the reflection points RA and Δ of the distance measurement light of the optical distance meter 5A4.
They approach each other with a slight difference between X and ΔY.

The distance meter 5A4 measures the vertical (Z-axis) distance from the tip (paste discharge port) of the nozzle 5A8 to the surface (upper surface) of the substrate 8 by non-contact triangulation. Since the deviations ΔX and ΔY between the discharge port of the nozzle 5A8 and the reflection point RA of the distance measurement light at the distance meter 5A4 are set to such an extent that they are not affected by the irregularities on the surface of the substrate 8, the tip of the nozzle 5A8 (paste discharge) There is almost no error in the vertical (Z-axis direction) distance from the exit (outlet) to the surface (upper surface) of the substrate 8 due to the deviations ΔX and ΔY.

Accordingly, the Z-axis servomotor 5A1 is controlled based on the measurement result of the distance meter 5A4, and the tip of the nozzle is moved up and down in accordance with the unevenness (undulation) of the surface of the substrate 8, thereby obtaining the surface ( The vertical distance (interval) to the upper surface) can always be kept constant.

The other coating heads 5B to 5D shown in FIG. 1 have the same configuration.

Next, an electric and pneumatic control system in this embodiment will be described.

FIG. 5 is a block diagram showing a configuration of one specific example of the main control section 9 in FIG.
b2 to 5d2 are armature coils, 4b2 to 4d2, 5b3
5d3 is a detector, 7a is a servo motor, 7b is a θ-axis encoder, 9a is a microcomputer, 9b is an external interface, 9c is an image processing device, 9d is a motor controller, and 9e1 to 9e4 are X-axis systems. Linear motor amplifiers, 9e5 to 9e8 are Y-axis linear motor amplifiers,
9e9 and 16 are positive pressure sources, 18 is a negative pressure source, 17 is a regulator, 19 is a regulator, and 20 is a valve unit 20.
The same reference numerals are given to the portions corresponding to FIG.

In the figure, a main controller 9 comprises a microcomputer 9a, an external interface 9b, an image processing device 9c, a motor controller 9d, amplifiers 9e1 to 9e for X-axis linear motors, and Y-axis linear motors. A motor amplifier 9e5 to 9e8 and an amplifier 9e9 of a servo motor 7a for driving the θ-axis rotary table 7 are provided. The servo motor 7a is provided with a θ-axis encoder 7b.

The armature coils 4b1, 4c1, 4d1 are the armature coils of the movable parts 4B, 4C, 4D in FIG. 1, respectively, and correspond to the armature coils 4a1 for the movable part 4A shown in FIG. is there. Armature coil 5b
2, 5c2 and 5d2 are coating heads 5 in FIG.
The armature coils B, 5C, and 5D correspond to the armature coils 5a2 for the movable portion 5A shown in FIG.

The detectors 4b2, 4c2 and 4d2 are linear scales provided on the fixed parts 3A and 3B, respectively (in the fixed part 3A, the linear scale 3a shown in FIG.
Moving parts 4B, 4C, 4D for detecting 4) (FIG. 1)
And corresponds to the detector 4a2 in the movable part 4A shown in FIG. 2 (b). Detectors 5b3, 5
Coating heads 5B, c3 and 5d3 for detecting linear scales (in the fixed portion 3A, the linear scale 3a4 shown in FIG. 2B) provided in the fixed portions 3A and 3B, respectively.
The detectors at 5C and 5D (FIG. 1) correspond to the detector 5a3 at the coating head 5A shown in FIG.

The detection outputs of the detectors 4a2 to 4d2 and 5a3 to 5d3 are supplied to a motor controller 9d, and drive signals corresponding to these detection outputs are output from the motor controller 9d, and the X-axis linear motor amplifiers 9e1 to 9e are output.
4, after being amplified by the Y-axis linear motor amplifiers 9e5 to 9e8, the armature coils 4a1 to 4d1, 5a2 to 5d
2, the driving of the linear motors of the movable parts 4A, 4B and the coating heads 5A to 5D is controlled, and the position of the movable parts 4A, 4B and the coating heads 5A to 5D is controlled.

The image processing device 9c includes a substrate 8 obtained by an image recognition camera 5A6 (FIG. 3B) provided on the coating head 5A and an image recognition camera similarly provided on the coating heads 5B to 5D. Process the above video signal, based on the video processing data obtained by this,
The positioning of the substrate 8 is performed.

In order to apply the paste to a desired position on the substrate 8 in an appropriate pattern by the application heads 5A to 5D, the regulator 1 is supplied from the positive pressure source 16 or the negative pressure source 18.
A desired air pressure is applied to the paste storage cylinders of the coating heads 5A to 5D (the coating head 5A, the paste storage 5A5 in FIG. 3) through the valves 7 and 19 and the valve unit 20, and the regulators 17, 19 and The control signal of the valve unit 20 is transmitted from the external interface 9b. Reference numeral 15 denotes a hard disk.

Although not shown, the microcomputer 9a includes a main processing unit, a ROM storing a processing program for performing coating / painting described later, processing results in the main processing unit, an external interface 9b, and an image. RA for storing input data from the processing device 9c, the motor controller 9d, and the like.
M, an input / output unit for exchanging data with the external interface 9b, the image processing device 9c, the motor controller 9d, and the like. The hard disk 15 stores input data such as data representing a paste pattern to be drawn from the keyboard 12, data of a processing result of the microcomputer 9a, and the like.

FIG. 6 is a block diagram showing a specific example of the sub-control unit 10 in FIG. 1 and includes 5B1, 5C1, and 5D1.
Are the Z-axis servo motors of the coating heads 5B, 5C, and 5D;
B4, 5C4 and 5D4 are optical rangefinders for the coating heads 5B, 5C and 5D, 5A1a, 5B1a, 5C1a and 5D1.
a is a Z-axis encoder for the coating heads 5A, 5B, 5C and 5D, 10a is a microcomputer, 10b is an external interface, 10c is a motor controller, and 10d1.
10 to 10d4 are Z-axis servo motors 5A1, 5B1, 5 respectively.
An amplifier for C1 and 5D1, and 21 is a hard disk.

In the figure, a sub-control unit 17 includes a microcomputer 10a, an external interface 10b, a motor controller 10c, and a Z-axis servo motor amplifier 1.
0d1 to 10d4.

In each coating head 5A, a Z-axis encoder 5A1a is provided on the Z-axis servo motor 5A1.
The rotation amount of the axis servo motor 5A1 is equal to the Z-axis encoder 5A1.
a, and the detection output is output from the external interface 1
0b is supplied to the microcomputer 10a.

On the other hand, the measurement result of the optical distance meter 5A4 is supplied to the microcomputer 10a via the external interface 10b, and the nozzle 5A8
The distance (nozzle height) to (FIG. 4) is calculated, and a drive signal for achieving the specified nozzle height is generated. The drive signal is amplified by the Z-axis servo motor amplifier 10d1 via the motor controller 10c, and then supplied to the Z-axis servo motor 5A1. As described above, the measurement result of the optical distance meter 5A4 is obtained through the external interface 10b, the Z-axis servo motor 5A1 is operated, and the Z-axis table 5A3 shown in FIG. The position of the nozzle 5A8 shown in FIG. 4 in the Z-axis direction is controlled.

Similarly, the other coating heads 5B to 5D
4 has the same configuration as the coating head 5A shown in FIG. 4, and the amount of rotation of each of the Z-axis servo motors 5B1 to 5D1 is detected by each of the Z-axis encoders 5B1a to 5D1a and the motor controller 10c Computer 1
0a. The motor controller 10c is connected to the coating heads 5B to 5D via the external interface 10b.
The measurement results of the optical rangefinders 5B4 to 5D4 are obtained, and the Z-axis servo motors 5B1 to 5D1 are operated to raise and lower the Z-axis table corresponding to the Z-axis table 5A3 of the coating head 5A shown in FIG. , The position of these nozzles in the Z-axis direction is controlled.

The microcomputer 10a includes a ROM (not shown) storing a main processing unit and a processing program for controlling the height of the nozzles at the time of coating and drawing, which will be described later.
RAM for storing the processing results of the main processing unit and input data from the external interface 10b, the motor controller 10c, etc., and the RAM for storing the external interface 10b, the motor controller 10c, and the like. It has an input / output unit for exchanging data. The hard disk 21 stores desired data.

The main control unit 9 and the sub control unit 10 are configured as described above, and the armature coils of the respective linear motors in the movable units 4A and 4B movable in the X-axis direction (FIG. 1). 4a
Coating head 5 movable in 1 to 4d or Y-axis direction (FIG. 1)
A to 5D armature coils 5a2 to 5d of respective linear motors
2 and the Z-axis servo motors 5A1 to 5D1
The main control unit 9 and the sub-control unit 10 cooperate with each other via external interfaces 9b and 10b, thereby providing a key.
Microcomputer 9 previously input from board 12
The coating heads 5A to 5D (accordingly, their nozzles) move in the X and Y axial directions with respect to the substrate 8 sucked and held on the substrate holding board 6 based on the data stored in the RAM of FIG. And the Z-axis tables of the coating heads 5A to 5D (for the coating head 5A, the Z-axis table 5A3 (FIG. 3)).
The nozzle (the nozzle 5A8 (FIG. 4) in the coating head 5A) supported through the nozzle is moved an arbitrary distance in the Z-axis direction,
During the movement, the data is inputted from the keyboard 12 to the paste storage cylinder (the paste storage cylinder 5A5 (FIG. 3) in the case of the coating head 5a) and stored in the RAM of the microcomputer 9a. The pressure adjusted by the positive pressure regulator 17 is continuously applied, the paste is discharged from the paste discharge port at the tip of these nozzles, and a desired paste pattern is applied and drawn on the substrate 8.

During the paste application operation,
As described later, the armatures 4a1 to 4d of the respective linear motors are controlled by the motor controller 9d of the main control unit 9 (FIG. 5).
It is always monitored whether the positions of 1, 5a2 to 5d2 are within a preset interference range (a range of the distance between the coating heads in which the coating head is too close to cause a collision). Even if a warning message appears, the application program can be stopped by the monitoring program so as not to cause a collision.

The movable parts 4A to 4D moving in the X-axis direction and Y
The linear motors of the coating heads 5A to 5D that move in the axial direction include a plurality of magnets arranged side by side on a fixed side (provided on the fixed portions 3A and 3B and the frames 2A and 2B), and an armature. Move the coil to the movable side (movable parts 4A to 4D
Side and the coating heads 5A to 5D), the fixed side magnet is used in common, so that there is no difference due to thermal expansion generated by the conventional ball screw drive. Unless an erroneous signal is given to the armature coil on the movable side, there is no position error in the XY axis directions, and accurate position control of each of the coating heads 5A to 5D can be performed. Further, the configuration is simple and the generation of dust is small. Since the attractive force is constantly acting between the fixed-side magnet and the movable-side armature coil, the coating head is restrained by the gantry 1 side. If there is no undulation on the main surface (the surface on which the paste is applied), there is almost no variation in the distance from the upper main surface of the substrate 8 to the paste discharge ports of the nozzles of the application heads 5A to 5D.

FIG. 7 is a view showing a specific example of a paste pattern applied on the substrate 8 in this embodiment.
ＰＴPTd is a paste pattern, and Sa〜Sd are application start positions of the paste patterns PTa〜PTd.

In this specific example, as shown in FIG.
The four paste patterns PTa to PTd are applied on the substrate 8 by the four application heads 5A to 5D shown in FIG. These paste patterns PTa to PTd have the same shape, two-dimensional path data from the application start positions Sa to Sd to the end position are set, and the application start position Sa of the paste pattern PTa is set at the center 0 of the substrate 8. As the origin, the paste pattern P is added to the coordinates (X1, Y1).
The application start position Sb of Tb is also represented by coordinates (X2, Y2)
The application start position Sc of the paste pattern PTc is set to the coordinates (X3, Y3), and the application start position Sd of the paste pattern PTd is set to the coordinates (X4, Y4).

Next, the operation of applying and drawing a paste pattern according to this embodiment will be described with reference to FIG.

In FIG. 8, first, the power is turned on (step 100), and a step (20) for initializing the apparatus is performed.
0).

In this initial setting, in FIG. 1, the servo motor 7a (FIG. 5) is driven to rotate the .theta.-axis rotating table 7, so that the substrate holding plate 6 is moved in the .theta. By positioning and driving the linear motors of the movable parts 4A and 4B and the coating heads 5A to 5D, the coating heads 5A to 5D are moved to set the paste discharge ports at the nozzle tips at predetermined predetermined origin positions. And the paste pattern PTa ~
Two-dimensional path data from the start position to the end position of PTd, positioning mark data, and paste application height (the paste discharge port at the nozzle tip from the surface of the substrate 8 for each of the application heads 5A to 5D) Settings).

These data are input from the keyboard 12, and each input data is supplied to the microcomputer 9a of the main controller 9 (FIG. 5) and the microcomputer 10a of the sub controller 10 (FIG. 5). 6) In the built-in RAM,
The data is stored in storage media such as hard disks 15 and 21 which are external storage devices of the control units 9 and 10.

The coating heads 5A, 5B, 5C, 5D
The origin position of the paste discharge port at the tip of the nozzle in the XY coordinate system is, as shown in FIG.
a to Td so that the substrate 8 is not stained even if the nozzle paste drips before the start of coating.

When the processing of the initial setting (step 200) is completed, the substrate 8 is then placed on the substrate holding board 6 and held (step 300).

Subsequently, the substrate 8 is positioned (Step 400). In this process, any of the image recognition cameras of the coating heads 5A to 5D (in the case of the coating head 5A, the image recognition camera 5A6 (FIG. 3)), which is initially set in step 200, is mounted on the substrate holding board 6. The positioning mark on the placed substrate 8 is positioned at a position where it can be photographed, and the positioning mark is photographed. The position of the center of gravity of the photographed positioning mark is obtained by image processing of the main controller 9 (FIG. 5), and the inclination of the substrate 8 in the θ direction is detected.
The inclination of the substrate 8 in the θ direction is corrected by driving the θ-axis rotary table 7 by the servomotor 7a based on the detection result. In addition, an error (ΔX1, ΔX1,
Y1) is corrected when the starting point is moved, which will be described later. For this reason, the image data of the positioning mark is stored in the RAM of the microcomputer 9a.

When the positioning of the substrate 8 in step 400 is completed, next, a paste application operation is performed (step 500). This will be described with reference to FIG.

In the figure, first, it is confirmed whether or not there is an uncoated pattern on the substrate 8 (that is, whether or not there is a pattern which must be applied but has not yet been drawn) (step 510). The presence or absence of the uncoated pattern will be described later.

At the start of the application, since all the patterns to be applied have not been applied, the process proceeds to the next start point moving step (step 520). This means that the coating heads 5A to 5D are moved, and the paste discharge ports at the tips of the nozzles of the coating heads 5A to 5D are moved from the origin positions Ta to Td shown in FIG. 9 to the coating start positions Sa to Sd of the paste patterns PTa to PTd. This is a process of positioning and moving these application heads 5A to 5D so as to face each other. This will be described with reference to FIG.

In the figure, first, it is confirmed that the patterns to be drawn (four patterns in this case) have the same shape (step 521), and if they are the same pattern, they can be applied simultaneously. Is confirmed (step 522).

At the same time, the condition for judging that application is possible is that the application start point positions Sa and Sb are on the same X axis and the application start point positions Sc and Sd are on the same X axis.
= X2 and X3 = X4, it is possible to apply simultaneously.

When any of the patterns can be applied at the same time, if there are two or more application start positions that are close to each other, there is a possibility that the application heads or nozzles where the nozzle tips are positioned may collide with each other. It is checked whether or not each of the nozzles at the application start positions Sa to Sd is in an interference range with each other (step 523).

FIG. 12 is a diagram for explaining such an interference range in the X-axis direction.

In the figure, when the paste patterns to be applied are the patterns PTa to PTd shown in FIG. 7, in the X-axis direction, in the patterns PTa and PTb, the distance X1 (= X2) from the center O of the substrate 8 in the X-axis direction. ) Are the application start positions Sa and Sb. Also, the pattern PT
c, PTd, the distance X3 (= X
The positions separated by 4) are the coating start positions Sc and Sd.
At the start of coating, the nozzles of the coating heads 5A, 5B, 5C, and 5D are respectively at these coating start positions Sa, Sb, Sc,
Sd will be set.

Here, these coating start positions Sa, Sb,
An interference range XC is set in the X-axis direction from Sc and Sd toward the substrate center O. Here, when (X1-XC)-(X3 + XC)> 0, that is, when X1-X3-2XC> 0, the coating heads 5A and 5B in the frame 2A and the coating heads 5C and 5D in the frame 2B interfere with each other. It is operable without.

FIG. 13 is a diagram for explaining an interference range in the Y-axis direction.

In the figure, the PT of the pattern shown in FIG.
a to PTd, the pattern PTa in the Y-axis direction
In the figure, the position separated by the distance Y1 from the center O of the substrate 8 is the coating start position Sa, and in the coating pattern PTb, the position separated by the distance Y2 from the center O of the substrate 8 is the coating start position Sb, and in the coating pattern PTc, Y from center O of substrate 8
The position 3 away is the application start position Sc, the application pattern PTd
In this case, a position distant from the center O of the substrate 8 by Y4 is the coating start position Sd. The interference range YC is set in the direction from each coating start position toward the substrate center 0.

In the patterns PTa and PTb, (Y2-YC)-(Y1 + YC)> 0, that is, when Y2-Y1-2YC> 0, the coating heads 5A and 5B can operate without interfering with each other. In the patterns PTc and PTd, when (Y4-YC)-(Y3 + YC)> 0, that is, when Y4-Y3-2YC> 0, the coating heads 5C and 5D can operate without interfering with each other.

For the pattern that satisfies all the conditions of steps 521 to 523 in FIG. 11 (there is a Yes determination), the process proceeds to the next step 525, but any of the conditions of these steps 521 to 523 is satisfied. Otherwise (if there is a determination of No), it is impossible to apply all the patterns simultaneously, and one of the two patterns that cannot be applied at once is stored as an unapplied pattern (step 524). ), The other is steps 521-5
In addition to the patterns satisfying all the conditions of No. 23, the patterns are set to be coatable patterns, and the coating heads for coating these patterns are made to stand by at respective origin positions.

Then, the coating head for coating the coatable pattern is moved, and the amount of movement of these nozzles in the X and Y axes from the origin position shown in FIG. 9 to the coating start position of the pattern to be coated is determined. It is calculated from the position deviation (step 525). Now, for example, the coating heads 5C and 5D
Is determined to be "interference" (step 523), one of these, for example, the coating head 5D is set to an uncoated pattern, and the other coating head 5C and the coating heads 5A and 5B are subjected to the above-described processing. Step 525
Is performed.

The amount of movement in the X- and Y-axis directions from the origin position of the coating head for coating the coatable pattern to the coating start position of the pattern to be coated is obtained as follows.
Now, for example, taking the application head 5A as an example, and assuming that the position coordinates of the origin position Ta are (X011, Y011), the position from the origin position Ta to the application start point Sa (X1, Y1) of the nozzle 5A8 of the application head 5A is assumed. Movement amount LX111, LY1
11, LX111 = X1-X011, LY111 = Y1-Y0
11 can be easily calculated.

In this way, the movement amounts of all the coating heads 5A to 5D including the coating head for the uncoated pattern are calculated (step 525) and set (step 526). Here, the set moving amounts of the nozzles of the coating heads 5A to 5D are respectively set as follows: coating head 5A: (LX111, LY111) coating head 5B: (LX112, LY112) coating head 5C: (LX121, LY121) coating head 5D: ( LX122, LY122). Here, LX is the amount of movement in the X-axis direction, and LY is the amount of movement in the Y-axis direction.

Based on the above settings, the coating head used for the coatable pattern is moved by this set amount of movement, and the tips of the nozzles are set to the coating start position of the corresponding pattern (step 527).

Here, when moving the coating head, Y
Movable parts 4A, 4B for driving frame 2A of the axis moving mechanism
Armature coils 4a1 and 4a2 must be driven simultaneously. In addition, the armature coils 4c and 4d of the movable parts 4C and 4D that drive the frame 2B of the Y-axis moving mechanism must be driven at the same time.

Now, description will be made with reference to FIG. 14 on the assumption that the coating heads 5A to 5D are moved (here, 4a1
4d1, 5a2 to 5d2 are armature coils of the linear motors shown in FIG. 5 of the fixed parts 4A to 4D and the coating heads 5A to 5D), and the movable part 4A and the movable part 4B are as if one motor. As if, electrically set by the motor controller 9d, the movable part 4C and the movable part 4D
Both are electrically set by the motor controller 9d as if they were one motor, and the frame 2A is controlled by a program running on the microcomputer 9a.
And the frame 2B are moved by distances LX111 and LX121, respectively. The command of the distance LX111 is given by the armature coils 4a1, 4 of the linear motors of the movable parts 4A, 4B.
b1 and the command for the distance LX121 is transmitted to the movable unit 4C,
It is supplied to the armature coils 4c1 and 4d1 of the 4D linear motor.

In the Y-axis direction, the coating head 5
A, the command of the distance LY111 to the armature coil 5a1 of the linear motor, the command of the distance LY112 to the armature coil 5b1 of the linear motor to the coating head 5B, and the command of the linear motor to the coating head 5C. The command of the distance LY121 is sent to the armature coil 5c1 by the application head 5D.
The distance L to the armature coil 5d1 of the linear motor.
The command of Y122 is individually supplied.

As described above, in step 527 of FIG. 11, the fixing portions 4A to 4D and the coating heads 5A to 5D
The above-mentioned movement commands are simultaneously supplied to the armature coils of the linear motor shown in FIG. 5 via the amplifiers 9e1 to 9e8 (FIG. 5). However, in this case, the coating head used for the pattern that has been set as the uncoated pattern in step 524 of FIG. 11 is not included.

In the movement of the nozzle of each coating head,
It is preferable to perform a linear interpolation operation so that these nozzles arrive at the application start positions of the respective patterns at the same time.

As described above, each of the coating heads 5A to 5D moves, and when the movement of the corresponding nozzle to the coating start position Sa to Sd of the corresponding pattern is completed (step 52).
8) This means that step 520 in FIG. 10 has been completed.

Therefore, in FIG.
Is completed, the nozzle gaps of the coating heads 5A to 5D are set (step 530). This "gap"
Is the height of the tip of the nozzle from the paste application surface of the substrate 8. In this step, the Z-axis servo motors 5A1 to 5D1 (FIG. 6) are driven by the coating heads 5A to 5D to drive the Z-axis tape. Moving the table in the Z-axis direction and setting the positions of the paste discharge ports at the tip of each nozzle (distance from the upper surface of the substrate 8) to the application height of the paste patterns PTa to PTd (FIGS. 7 and 9). Is what you do.

For this purpose, first, each of the coating heads 5A to 5A
With respect to D, based on the preset initial movement distance data for these nozzles, these nozzles are lowered by the initial movement distance, and the height from the surface of the substrate 8 is set to a distance meter ( In the case of the application head 5A, the measurement is performed by a distance meter 5A4 (FIG. 3). Next, whether or not the tip of each nozzle is set to the height at which the paste pattern is drawn is checked for each of the application heads 5A to 5D, and the tip of each nozzle is set to the height at which the paste pattern is drawn. In this case, the process of step 530 ends.

If the tip of the nozzle is not set at the height at which the paste pattern is drawn, the nozzle is lowered by a small distance, and the distance to the paste-coated surface of the substrate 8 is measured with a distance meter. The measurement and the lowering of the minute distance of the nozzle are repeatedly performed, and this process is repeated until all the nozzle tips are set to the height at which the paste pattern is drawn.

When the processing in step 530 described above is completed, next, paste application moving processing is performed (step 5).
40).

Here, the coating head 5 operable freely
The nozzles A to 5D draw the same path. Therefore, as shown in FIG. 15, each of the armature coils 4a1 to 4d1 for moving the coating heads 5A to 5D in the X-axis direction is electrically controlled by the motor controller 9d (FIG. 5) as if it were one motor. Similarly, the armature coils 5a2 to 5d2 of the coating heads 5A to 5D for moving the coating heads 5A to 5D in the Y-axis direction are similarly set.
However, an electric setting is made by the motor controller 9d as if it is one motor, and a program running on the microcomputer 9a sends a paste pattern in two axes of X and Y axes based on the pattern data. May be applied to the X and Y axes to draw.

With this arrangement, the paste discharge port at the tip of the nozzle of each of the coating heads 5A to 5D moves in the X and Y-axis directions in accordance with the paste pattern data while facing the substrate 8, and as shown in FIG. As described above, a slight air pressure is applied to the paste storage tubes of the application heads 5A to 5D (in the application head 5A, the paste storage tube 5Aa5 (FIG. 3)), and the paste is discharged from the paste discharge port at the tip of each nozzle. Be started.

Then, as described above, the sub control unit 1
Microcomputer 10a includes coating heads 5A to 5A.
Actual measurement data of the distance between the paste discharge ports of the coating heads 5A to 5D obtained from the 5D distance meter (for the coating head 5A, the distance meter 5A4 (FIGS. 3 and 4)) and the paste application surface of the substrate 8. The undulation of the surface of the substrate 8 is measured by using, and the Z-axis servomotor of the coating heads 5A to 5D (in the coating head 5A, the Z-axis servomotor 5A1 (FIG. 3)) according to the measured value.
, The height of the paste discharge port from the paste application surface of the substrate 8 is maintained at the set value. Thereby, the paste pattern can be applied in a desired application amount.

As described above, the drawing of the paste patterns PTa to PTd shown in FIGS. 7 and 9 proceeds, but each of the paste discharge ports is at the end of the drawing pattern determined by the paste pattern data on the substrate 8. It is always determined whether or not there is, and if it is not the end, the process returns to the measurement processing of the surface undulation of the substrate 8 again, and thereafter, the above-described application and drawing are repeated until the paste pattern formation reaches the end of the drawing pattern. continue.

When the paste discharge port reaches the end of the drawing pattern, the coating heads 5A to 5D drive their Z-axis servomotors to raise their nozzles. Then, the number of the applied pattern is registered in the RAM of the microcomputer 10a (FIG. 6) (step 550),
Return to step 510.

By the way, as described above, in step 524 of FIG.
Since one of the three patterns has been registered as an unapplied pattern, it is determined in FIG. 10 whether there is an unapplied pattern except for the applied pattern (step 510). If there is, the operation of the above steps 520 to 550 is executed for this uncoated pattern.
At this time, the other coating head, which may have interfered with the coating head, has completed the application of the paste pattern and has retreated to its original position, so that no interference occurs. Then, when all the patterns have been applied (step 510), the paste application step (step 5) in FIG.
00) ends.

In FIG. 8, when Step 500 is completed, the substrate holding board 6 (FIG. 1) is released, and the coated substrate 8 is discharged out of the apparatus (Step 600). If a paste pattern is to be formed on a plurality of substrates in the same pattern (step 700), a new paste pattern is applied to the substrate on which the paste pattern is to be formed, and step 30 is performed.
The above operations from 0 are executed, and thereafter, when the series of paste pattern drawing processes for all the substrates is completed (step 700), the operation is terminated (step 8).
00).

While the embodiment of the present invention has been described above, the present invention is not limited to this embodiment, and may be as follows. That is, only one frame may be installed, or three or more frames may be installed, or three or more application heads may be provided in one frame. The paste pattern having a desired shape drawn by the coating head may be a plurality of dots applied in a zigzag pattern on the substrate, a waveform or a saw-tooth coating, or a closed curve application. It may be. Further, any paste may be applied to the substrate. Further, the linear motor provided in the coating head may be of any type and type as long as the frame side is a fixed portion and the coating head side is a movable portion.

[0093]

As described above, according to the present invention,
The weight can be reduced with a simple configuration, the paste can be accurately applied to the substrate in a pattern of a desired shape, and there is no risk of contamination of the substrate.

According to the present invention, even with a simple structure, it is possible to apply a paste of a desired shape accurately and stably on a substrate at a high speed.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing one embodiment of a paste applicator according to the present invention.

FIG. 2 is a side view showing a specific example of a frame and a driving mechanism of the frame in the paste applicator shown in FIG.

FIG. 3 is a partial cross-sectional view showing a specific example of an application head and a driving mechanism of the application head in the paste application machine shown in FIG.

FIG. 4 is a perspective view showing a positional relationship between an optical distance meter and a nozzle provided at a tip of a paste storage in the coating head shown in FIG.

FIG. 5 is a block diagram showing a specific example of a main control unit and its control system in FIG. 1;

FIG. 6 is a block diagram showing a specific example of a sub-control unit and its control system in FIG. 1;

FIG. 7 is a view showing a specific example of a paste pattern applied on a substrate in the embodiment shown in FIG. 1;

8 is a flowchart showing a specific example of an operation of applying and drawing a paste pattern on a substrate according to the embodiment shown in FIG. 1;

FIG. 9 is a diagram for explaining step 500 in FIG. 8;

FIG. 10 is a flowchart detailing step 500 in FIG. 8;

FIG. 11 is a flowchart illustrating step 520 in FIG. 10 in detail.

12 is a diagram for explaining setting of an interference region of a frame in the X-axis direction when applying a paste in the pattern shown in FIG. 7;

13 is a diagram for describing setting of an interference area of a coating head in the Y-axis direction when applying a paste in the pattern shown in FIG. 7;

14 is a diagram showing how to issue a movement command for the movement of the nozzle shown in FIG. 9;

FIG. 15 is a view showing how to issue an application command for the paste application moving process of FIG. 10;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Stand 2A, 2B Frame 2a1 Magnet 2a2-2a4 Linear guide 2a5 Linear scale 3A, 3B Fixed part of X-axis drive mechanism 3a1 Magnet 3a2, 3a3 Linear guide 3a4 Linear scale 4A-4D Movable part of X-axis drive mechanism 4a1-4d1 Electric machine Child coil 4a2 Detector 5A-5D Coating head 5A1-5D1 Z-axis servo motor 5A2 Z-axis guide 5A3 Z-axis table 5A4 Optical distance meter 5A5 Paste storage cylinder 5A6 Image recognition camera 5A7 Nozzle support 5A8 Nozzle 5a2 Base 2a5d Armature coil 5a3 Detector 6 Substrate holding board 7 θ-axis rotation table 7a θ-axis servo motor 8 Substrate 9 Main control unit 10 Sub-control unit PTa to PTd Paste pattern Sa to Sd Application start position Ta to Td Origin position Xc X axis Interference range of interference range YC Y-axis direction countercurrent

Continued on the front page (72) Inventor Junichi Matsui 5-2-2 Koyodai, Ryugasaki-shi, Ibaraki Pref. Hitachi Techno Engineering Co., Ltd. (72) Inventor Kiyoji Matsumoto 5-2-2 Koyodai, Ryugasaki-shi, Ibaraki Hitachi-Techno Engineering Development Laboratory Co., Ltd. (72) Inventor Hitoshi Manabe 5-2 Koyodai, Ryugasaki City, Ibaraki Prefecture Hitachi R & D Co., Ltd. Ryugasaki Plant F-term (reference) 2H025 AB14 AB15 AB16 EA05 4F041 AA02 AA06 AB02 BA22 BA38 5H641 BB16 GG03 GG26 HH02

Claims (4)

[Claims] 1. A paste coating machine for applying and drawing a paste pattern of a desired shape on a substrate mounted on a table, wherein the paste pattern of the substrate mounted on the table is parallel to a surface on which the paste pattern is applied and drawn. A frame movable in one direction and extending in a direction different from the one direction; a linear motor arranged on the frame so as to be movable in the direction of extension of the frame; A plurality of coating heads provided with a nozzle having a paste discharge port for discharging the paste filled in the storage tube; and a table in which the paste discharge port faces the substrate mounted on the table. The paste discharge ports of the plurality of coating heads are moved while moving the frame with respect to the frame and moving the plurality of coating heads with respect to the frame. And a control unit for controlling the discharge of the paste from the substrate, wherein the plurality of coating heads apply and draw a paste pattern of a desired shape on the substrate. 2. The coating machine according to claim 1, wherein a linear motor of each of the plurality of coating heads is provided on the frame along a direction in which the frame extends, and a magnet provided on the coating head facing the magnet. And an armature coil. 3. The apparatus according to claim 1, wherein when the plurality of application heads are moved along the direction in which the frame extends, two adjacent application heads interfere with each other in a predetermined manner. When entering the range, one of the two coating heads is stopped, the other of the coating heads is moved, and after the movement of the other coating head is completed, one of the coating heads is moved. A paste coating machine characterized by controlling. 4. The frame according to claim 1, wherein two or more of the frames are provided in a mutually parallel arrangement relationship, and when the control unit moves these frames, two adjacent frames are set in advance. When entering the mutual interference range, control is performed so that one of the two frames is stopped, the other frame is moved, and after the other frame has been moved, one of the frames is moved. A paste coating machine.