JP2003257617A - Functional element substrate and image display device using the functional element substrate - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To provide a functional element substrate on which a functional element group is formed, to ensure the safety of an operator at the time of manufacturing, to prevent a manufacturing error, and to improve the working efficiency. SOLUTION: A droplet of a solution containing a functional material (organic EL material) is ejected and applied onto a rectangular substrate 14, and a functional element group (organic EL element group) is formed in a matrix. A functional element substrate (organic EL substrate) is manufactured. Each corner of the substrate 14 is a chamfer 14a of C1 or R1 or more.
Is applied. Further, a shape (for example, large chamfer 14b) in which at least one corner is different from the other corners is formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a functional element substrate and an image display device using the functional element substrate, and particularly to a function formed by forming a film of a functional material using an ejection device. The present invention relates to a functional element substrate and an image display device using the functional element substrate.

[0002]

2. Description of the Related Art In recent years, the development of a light emitting device using an organic material as a self-luminous display replacing a liquid crystal display has been accelerated. Such element formation is performed by patterning a functional material, and is generally performed by a photolithography method. For example, as an organic electroluminescence (hereinafter, referred to as organic EL) element using an organic material, Appl.Phys.Let.51 (1
2), 21 September 1987, page 913, a method of forming a low molecular weight film by vapor deposition has been reported. Further, in the organic EL element, a method of vapor-depositing different light-emitting materials on desired pixels through a mask is used as a colorization means. However, the vacuum film forming method and the photolithography method have the drawbacks that the number of steps is large and the production cost is high in order to form an element over a large area.

In order to solve such a problem, the present inventor has proposed in US Pat. No. 30,60429 in forming and patterning a functional material film for forming a functional element represented by such an organic EL element. No. 3,298,298
030, US Pat. No. 3,596,275, US Pat. No. 3
No. 416153, U.S. Pat. No. 3,747,120, U.S. Pat. No. 5,729,257, etc., the ink jet droplet applying means enables stable yield and low yield without depending on the vacuum film forming method and the photolithography / etching method. It was thought that the functional material could be applied at a desired position at a cost.

For example, organic E is used as an example of a functional element.
When considering an L element, a composition prepared by dissolving or dispersing a hole injecting / transporting material and a light emitting material forming such an organic EL element in a solvent is ejected from an inkjet head and pattern-coated on a transparent electrode substrate. However, it was thought that this could be achieved by patterning the hole injecting / transporting layer and the light emitting material layer.

However, in the case of ink jet recording in which so-called ink is ejected toward recording paper for recording, several tens to several hundreds of recording papers are set in a cassette, and the recording papers are located at a position facing the ink jet head. Further, it is possible to perform printing by sequentially sending it by a paper transport mechanism, and no problem occurs, but a solution containing a functional material is caused to fly and is applied onto the substrate to form a functional element group. When manufacturing a functional element substrate formed by forming a substrate, the substrate is not a thin sheet like recording paper, and it cannot be treated simply like recording paper, and there are still many unsolved elements. To do.

[0006]

SUMMARY OF THE INVENTION The present invention relates to a functional element substrate using such a functional element and an image display device using the functional element substrate. A first object of the present invention is to provide such a function. It is to ensure the safety of the operator when manufacturing the flexible element substrate. A second object is to improve the production efficiency of the operator when producing such a functional element substrate and prevent production errors. Further, a third object is not only to improve the manufacturing efficiency of the operator at the time of manufacturing such a functional element substrate but also to prevent a manufacturing error, and also to prevent an error in position / direction when assembling this functional element substrate. To do. A fourth object is to propose an image display device using such a functional element substrate.

[0007]

In order to achieve the above-mentioned object, the present invention firstly has a functional element group formed by jetting droplets of a solution containing a functional material onto a substrate. In the element substrate, the shape of the substrate is rectangular, and the corners are chamfered with C1 or R1 or more, or chamfering equivalent thereto. Secondly, a droplet of a solution containing a functional material is jetted and applied onto the substrate,
In the functional element substrate on which the functional element group is formed, the substrate shape is rectangular, and at least one corner has a shape different from other corners so that it can be distinguished from other corners. It is characterized by having been done. Thirdly, a droplet of a solution containing a functional material is jetted and applied onto the substrate,
In the functional element substrate on which the functional element group is formed, the substrate shape is rectangular, and at least one side is provided with a cutout. Fourthly, the image display device is characterized by comprising the functional element substrate according to any one of the first to third aspects and a cover plate arranged so as to face the functional element substrate.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIG.
~ It demonstrates based on the Example shown in FIG. FIG. 1 is a perspective view schematically showing one step of producing a functional element using the ejection composition of the example of the present invention, which is a case where an organic EL element is considered as an example of the functional element. Here, a solution in which an organic EL material that develops red, green, and blue is dissolved on the transparent electrode pattern 4 of the glass substrate 5 with the barrier 3 that surrounds the ITO (indium tin oxide) transparent electrode pattern 4 partitioned in a mosaic shape. Shows an example in which is added so as to be arranged in a mosaic pattern of each color. To apply the organic EL material on the transparent electrode pattern 4, a solution in which the organic EL material is dissolved is ejected from the nozzle 1 using a liquid ejecting head, and the liquid droplets are applied. The composition of the solution is as follows, for example. Solution composition Solvent Dodecylbenzene / Dichlorobenzene (1/1, volume ratio) Red Polyfluorene / Perylene dye (98/2, weight ratio) Green Polyfluorene / Coumarin dye (98.5 / 1.5, weight ratio) Blue Polyfluorene

The ratio of the solid matter to the solvent is, for example, 0.4% (weight / volume). Here, the glass substrate 5 to which such a solution has been applied is heated at, for example, 100 ° C. to remove the solvent, and then a suitable metal mask is formed on this substrate, and aluminum (not shown) is vapor-deposited at 2000 angstroms to form an ITO film. A lead wire is drawn from aluminum and aluminum, and an organic EL element is completed using ITO as an anode and aluminum as a cathode. When the applied voltage is about 15 volts, an organic EL element which emits red, green and blue light in a predetermined shape can be obtained.

A substrate having such an organic EL element is provided with an image display device such as a self-luminous organic EL display by arranging a transparent cover plate such as glass or plastic so as to face each other and casing (packaging). can do. Although an organic EL element is considered here as an example of a functional element, the element and material are not necessarily limited to such an element. For example, an organic transistor or the like can be suitably manufactured as the functional element by utilizing the method of the present invention. Further, the resist material for forming the barrier 3 in the above example is also used as the solution used in the present invention.

Here, in the present invention, an ink jet technique is applied as a means for applying a solution containing such a functional material. The specific method will be described below. FIG. 2 is a perspective view for explaining an embodiment of the functional device substrate manufacturing apparatus of the present invention. In the figure, 11 is an ejection head unit, 12 is a carriage, 13 is a substrate holder, 14 is a substrate for forming a functional element, 15 is a solution supply tube containing a functional material, 16 is a signal supply cable, and 17 is a signal supply cable. Ejection head control box, 18 X-direction scan motor of carriage 12, 19 Y-direction scan motor of carriage 12, 20 computer, 21 control box, 22 (22X1, 2X2)
2Y1, 22X2, 22Y2) are substrate positioning / holding means.

FIG. 3 is a diagram showing a droplet applying device applied to the production of the functional element substrate of the present invention, and FIG. 4 is a perspective view of a main part showing an ejection head unit of the droplet applying device of FIG. is there. The droplet applying apparatus of FIG. 3 is different from the droplet applying apparatus of FIG. 2 in that the substrate 14 side is moved to form the functional element group on the substrate. 3 and 4, 31 is a head alignment control mechanism, 32 is a detection optical system, 33 is an ejection head, 34 is a head alignment fine movement mechanism, 35 is a control computer, 36 is an image identification mechanism, 37 is an XY direction scanning mechanism, 38 is a position detection mechanism, 39 is a position correction control mechanism, 40 is an ejection head drive / control mechanism, 41 is an optical axis, 4
2 is an element electrode, 43 is a droplet, and 44 is a droplet landing position.

The ejecting head 33 for ejecting the droplets of the ejecting head unit 11 may be any mechanism as long as it can eject any droplet in a fixed amount, and particularly, several pl to several 1
An inkjet mechanism that can form droplets of about 00 pl is desirable. As the ink jet system, for example, the system disclosed in US Pat. No. 3,683,212 (Zoltan system) and US Pat. No. 3,747,120.
System disclosed in the specification (Stemme system),
An electric signal is applied to the piezoelectric vibrating element as in the method (Kyser method) disclosed in US Pat. No. 3,946,398, and the electric signal is converted into mechanical vibration of the piezoelectric vibrating element, thereby There is one that ejects and ejects droplets from a fine nozzle according to vibration, and is generally generically called a drop-on-demand method.

Another method is US Pat. No. 3,596,627.
There is a system (Sweet system) disclosed in the specification of US Pat. No. 5, the specification of US Pat. This generates small droplets of recording liquid whose charge amount is controlled by the continuous vibration generation method, and the generated small droplets whose charge amount is controlled fly between deflection electrodes to which a uniform electric field is applied. By doing so, recording is performed on the recording member, and normally,
It is called a continuous flow method or a charge control method.

As another method, Japanese Patent Publication No. 56-94.
There is a system disclosed in Japanese Patent No. 29. This is to generate bubbles in a liquid and eject the droplets from a fine nozzle by the action force of the bubbles, which is called a thermal inkjet system or a bubble jet (registered trademark) system.

There are drop-on-demand method, continuous flow method, thermal ink jet method and the like as the method for ejecting the liquid droplets as described above, and the method may be appropriately selected as needed, but a piezo element is used as an example. The driving conditions in the case where the organic EL element group is formed by performing droplet ejection by the above drop-on-demand type inkjet head are shown below.

The solution used is O-dichlorobenzene /
This is a solution in which 0.2 wt% of polyhexyloxyphenylene vinylene is mixed with a mixed solution of dodecylbenzene. In addition, the jet head used has a nozzle diameter of Φ23.
In μm, the input voltage to the piezo element was 27.5 V, and the drive frequency was 12 kHz. At that time, an initial jet velocity of 9 m / s was obtained, and the mass of one drop was 5 pl. The carriage scanning speed (X direction) was set to 5 m / s. The distance between the ejection head nozzle and the substrate was 3 mm. In addition, the shape of the droplet during flight is separately jetted and observed under the same conditions as the element formation, and the drive waveform is such that the shape becomes a substantially round droplet immediately before adhering to the substrate surface (3 mm in the present invention example). Was controlled and injected.

Thereafter, aluminum was sputtered on this to form a device. When a lead wire was drawn out from ITO and aluminum and a voltage of 10 V was applied using ITO as an anode and aluminum as a cathode, a good orange light emission could be achieved.

According to the present invention, in the apparatus for manufacturing a functional element substrate as shown in FIG. 2, the substrate 14 is determined by adjusting the holding position by the substrate positioning / holding means 22 of this device. Although simplified in FIG. 2, the substrate positioning / holding means 22 is in contact with each side of the substrate 14 and is capable of fine adjustment in the X direction and the Y direction orthogonal thereto in the order of μm. It is connected to the ejection head control box 17, the computer 20, the control box 21, etc., and the position information and the fine adjustment displacement information thereof, the position information and timing of the droplet application, etc. can be constantly fed back.

Further, the functional device substrate manufacturing apparatus of the present invention has a rotational position adjusting mechanism (not shown because it is located below the substrate 14) in addition to the X and Y direction position adjusting mechanism. is doing. In this regard, the shape of the functional element substrate of the present invention and the arrangement of the functional element group to be formed will be described first.

The functional element substrate of the present invention is made of quartz glass,
Glass having a reduced content of impurities such as Na, soda lime glass, a glass substrate having SiO ₂ deposited on its surface, and a ceramic substrate such as alumina are used. Also,
Various plastic substrates such as PET are also preferably used for the purpose of weight reduction or flexibility. In any case, its shape is rectangular (rectangular quadrangle), unlike Si wafers, etc., because of the use of functional element substrates that are economically produced and supplied or ultimately manufactured. Is. In other words, the two vertical sides that make up the rectangular shape,
The horizontal two sides are substrates in which the vertical two sides are parallel to each other, the horizontal two sides are parallel to each other, and the vertical and horizontal sides form a right angle.

In the present invention, the functional element groups to be formed are arranged in a matrix on such a substrate, and the two orthogonal directions of the matrix are the sides in the vertical direction or the sides in the horizontal direction of the substrate. The functional element groups are arranged so as to be parallel to the direction of. The reason why the functional element groups are arranged in a matrix in this manner and the reason why the vertical and horizontal sides of the substrate are parallel to the two orthogonal directions of the matrix will be described below.

As shown in FIGS. 2 and 3, in the present invention,
After the positional relationship between the substrate 14 and the solution ejection port surface of the ejection head unit 11 (ejection head 33) is first determined, no particular position control is performed. That is, the ejection head unit 11 performs relative movement in the X and Y directions in parallel with the surface on which the functional element group is formed while maintaining a constant distance from the substrate 14, while the solution (for example, organic EL material, or A solution in which a conductive material is dissolved, a resist material, etc.) is injected. That is, the X direction and the Y direction are two directions orthogonal to each other, and when the substrate is positioned, the vertical side or the horizontal side of the substrate is made parallel to the Y direction or the X direction. Since the two directions of the matrix-like array of the functional element group to be formed are parallel to each other, it is possible to form the element group with high accuracy only by the mechanism for ejecting while performing the relative movement. In other words, if the substrate shape, the matrix-like arrangement of the functional element groups, and the relative movement device in the two directions of X and Y orthogonal to each other are used as in the present invention,
This means that if the substrate is accurately positioned before the droplet ejection for element formation, a highly accurate matrix-like arrangement of functional element groups can be obtained.

Here, the rotation position adjusting mechanism will be described again. As described above, according to the present invention, the positioning of the substrate before the droplet ejection of the element formation is accurately performed, only the relative movement in the X and Y directions is performed, and other control is not performed. The idea is to obtain a matrix-like arrangement of groups. The problem in this case is a deviation of the rotation direction (the rotation direction with respect to the axis perpendicular to the plane defined by the two directions X and Y) when initially positioning the substrate.

In order to correct the deviation in the rotational direction, the present invention has the rotational position adjusting mechanism (not shown, which is located under the substrate 14 and is not shown), as described above. As a result, if the displacement in the rotational direction is also corrected and the sides of the substrate are positioned, in the apparatus of the present invention, a highly precise matrix-like array of functional element groups can be obtained by relative movement only in the X and Y directions.

In the above, the rotational position adjusting mechanism is used for the substrate positioning / holding means 22 (22X1, 22Y1, 22 in FIG. 2).
Although it has been described as a mechanism different from (X2, 22Y2) (located under the substrate 14 and not visible), the substrate positioning / holding means 22 may have a rotational position adjusting mechanism. For example, the substrate positioning / holding means 22 may be used for the substrate 14
Of the substrate positioning / holding means 22,
The position can be adjusted in the X direction or the Y direction. However, in the portion of the substrate positioning / holding means 22 abutting on the side of the substrate 14, two screws provided at a distance are independently provided. If you move it, you can adjust the angle. The rotational position control information is also the same as the above-mentioned positioning information in the X and Y directions and the fine adjustment displacement information, and the ejection head control box 17 and the computer 2.
0, the control box 21 and the like are connected so that position information, timing, etc. of the droplet application can be continuously fed back.

Next, other means and structure different from the positioning means of the present invention will be described. In the above description, the board positioning / holding means 22 is brought into contact with the side of the board 14 so that the whole board positioning / holding means 22 can adjust its position in the X direction or the Y direction. ,
An example will be described in which the strip-shaped patterns are provided not on the sides of the substrate 14 but in two directions orthogonal to each other on the substrate. As described above, according to the present invention, the functional element groups are arranged in a matrix on the substrate, but here, the above-described two-direction strip-shaped patterns that are orthogonal to each other are formed on the substrate so that they are orthogonal to each other. It is formed so as to be parallel to the direction. Such a strip-shaped pattern can be easily formed on the substrate by a photofabrication technique.

Alternatively, instead of forming the above-described strip-shaped pattern only for that purpose, the element electrode 42 shown in FIG. 4 and a wiring pattern such as X-direction wiring or Y-direction wiring of each element are provided by the present invention. It may be regarded as a strip-shaped pattern in two directions orthogonal to each other. If such a band-shaped pattern is provided, pattern detection can be performed by the detection optical system 32 using a CCD camera and a lens, which will be described later with reference to FIG.

Next, in the Z direction, which is a direction perpendicular to the X and Y directions, in the present invention, after the positional relationship between the substrate 14 and the solution ejection port surface of the ejection head unit 11 is first determined. Does not particularly perform position control. That is,
The ejection head unit 11 ejects the solution containing the functional material while performing relative movement in the X and Y directions while maintaining a constant distance with respect to the substrate 14. At the time of ejection,
The position control of the ejection head unit 11 in the Z direction is not particularly performed. The reason is that if the control is performed during injection, the mechanism,
Not only does the control system become complicated, but the board 14
This is because the formation of the functional element due to the application of droplets to the film becomes slow and the productivity is significantly reduced.

Instead, according to the present invention, the flatness of the substrate 14 and the flatness of the device holding the substrate 14 and the accuracy of the carriage mechanism for relatively moving the ejection head unit 11 in the X and Y directions are set. By increasing the height, the ejection head unit 11 and the substrate 14 are relatively moved in the X and Y directions at high speed without performing the Z direction control during ejection.
Increases productivity. As an example, the variation in the distance between the substrate 14 and the solution ejection port surface of the ejection head unit 11 during application of the solution of the present invention (during ejection) is suppressed to 5 mm or less (the size of the substrate 14 is 200 mm × 200 m).
m or more and 4000 mm x 4000 mm or less).

It should be noted that the plane is normally determined by two directions of X and Y directions, and is configured so as to be kept horizontal (a plane perpendicular to the vertical direction). However, when the substrate 14 is small (for example, 500 mm ×). In the case of 500 mm or less), it is not always necessary to make the plane determined by the two directions of the X and Y directions horizontal, and the positional relationship of the arrangement of the substrate 14 may be the most efficient for the device.

Next, another embodiment of the present invention will be described.
The invention is not limited to these examples. Figure 3
2 is an example in which the substrate 14 side is moved when the discharge head unit 11 and the substrate 14 are relatively moved, unlike the case of FIG. FIG. 4 shows the ejection head unit 11 of the apparatus of FIG.
4A is an enlarged view of FIG. 4A shows a state in which the ejection head unit is positioned by the detection optical system, and FIG. 4B shows a state in which droplets are ejected after the ejection head unit is positioned. It shows the state of jetting. In FIG. 3, reference numeral 37 denotes an XY direction scanning mechanism, on which the functional element substrate 14 is placed. The functional element on the substrate 14 has, for example, the same configuration as that of FIG. 1, and as a single element, similar to the configuration shown in FIG. 1, the glass substrate 5 (corresponding to the functional element substrate 14) and the barrier 3 are provided. , ITO transparent electrode 4
Has become Above the functional element substrate 14, the ejection head unit 11 that applies droplets is located. In this embodiment, the ejection head unit 11 is fixed, and the functional element substrate 14 is moved to an arbitrary position by the XY direction scanning mechanism 37, whereby the relative movement between the ejection head unit 11 and the functional element substrate 14 is realized. It

Next, referring to FIG. 4, the ejection head unit 11
The configuration of will be described. In FIG. 4, reference numeral 32 denotes a detection optical system that captures image information on the substrate 14, and is close to the ejection head 33 that ejects the droplets 43, and the optical axis 41 and the focus position of the detection optical system 32 and the ejection head 33 are used. Droplet 43
It is arranged so that the landing position 44 of is matched. In this case, the positional relationship between the detection optical system 32 and the ejection head 33 shown in FIG. 3 can be precisely adjusted by the head alignment fine movement mechanism 34 and the head alignment control mechanism 31. A CCD camera and a lens are used for the detection optical system 32.

In FIG. 3, reference numeral 36 designates the above-mentioned detection optical system 32.
This is an image identification mechanism for identifying the image information taken in by, and has a function of binarizing the contrast of the image and calculating the barycentric position of the binarized specific contrast portion. Specifically, VX-4210, a high-precision image recognition device manufactured by Keyence Corporation, can be used. The position detecting mechanism 38 is means for giving the position information on the functional element substrate 14 to the image information obtained by this. For this, a length measuring device such as a linear encoder provided in the XY direction scanning mechanism 37 can be used. Further, the position correction control mechanism 39 performs position correction based on the image information and the position information on the functional element substrate 14. By this mechanism, the movement of the XY direction scanning mechanism 37 is corrected. To be Further, the ejection head 33 is driven by the ejection head drive / control mechanism 40, and droplets are applied onto the functional element substrate 14. Each control mechanism described so far,
It is centrally controlled by the control computer 35.

In the above description, the ejection head unit 11 is fixed, and the functional element substrate 14 is moved to an arbitrary position by the XY direction scanning mechanism 37, whereby the ejection head unit 11 and the functional element substrate 14 are separated from each other. Although the relative movement is realized, it goes without saying that the functional element substrate 14 may be fixed and the ejection head unit 11 may scan in the XY directions as shown in FIG. Especially 200
2,000 mm x 2 from a medium-sized board of about
In the case of applying to the production of a large substrate of 000 mm or more, the functional element substrate 14 is fixed like the latter, and the ejection head unit 11 is made to scan in two directions of X and Y orthogonal to each other. It is preferable that the droplets are applied sequentially in such two orthogonal directions.

On the contrary, for example, a light plastic substrate is used, and its size is 200 mm × 200 mm to 4 mm.
In the case of a medium-sized substrate having a size of about 00 mm × 400 mm, it may be possible to carry the paper by an inkjet printer. In other words, the ejection head unit 11 mounted on the carriage 12 can move only in the X direction (or Y direction).
The substrate is transported in the Y direction (or the X direction) by being scanned in only the direction). In that case, the productivity is remarkably improved.

When the substrate size is about 200 mm × 200 mm or less, the ejection head unit for applying liquid droplets is a large array multi-nozzle type capable of covering a 200 mm range, and the relative movement of the ejection head unit and the substrate is orthogonal. It is possible to perform relative movement only in one direction (for example, only in the X direction) without performing in two directions (X direction and Y direction), and mass productivity can be improved, but the substrate size is 200 mm. In the case of x200 mm or more, it is technically / costly difficult to realize a large array multi-nozzle type ejection head unit capable of covering such a 200 mm range. X and Y where 11 is orthogonal
It is preferable that the scanning is performed in two directions, and the droplets of the solution are applied sequentially in such two orthogonal directions.

Especially, as a final substrate, 200 mm ×
Even if you want to make something smaller than 200 mm,
In the case of manufacturing multiple large substrates, the original substrate should be 400 mm × 400 mm to 20 mm.
Since the size of 00 mm × 2000 mm or more is used, the ejection head unit 11 scans in two directions of X and Y which are orthogonal to each other, and application of the droplets of the solution is performed in such two directions orthogonal to each other. It is better to have a configuration in which they are performed sequentially.

As the material of the droplet 43, the above-mentioned organic EL is used.
In addition to materials, for example, polyphenylene vinylene-based (polyparaphenylene vinylene-based derivatives), polyphenylene-based derivatives, and other low-molecular organic EL materials soluble in benzene derivatives, high-molecular organic EL materials, polyvinylcarbazole, and other materials Can be used. Specific examples of the organic EL material include rubrene, perylene, 9,10-diphenylanthracene, tetraphenylbutadiene, Nile red, coumarin 6, quinacridone, and polythiophene derivative. Further, the electron transporting and hole transporting materials which are the peripheral materials in the organic EL display are also used as the functional material for manufacturing the functional element of the present invention.

As the functional material for manufacturing the functional element of the present invention, other than the above, a precursor of silicon glass of an interlayer insulating film which is often used for semiconductors or the like, or a silica glass forming material can be mentioned. Examples of such precursors include polysilazane (for example, manufactured by Tonen) and organic SOG materials. Alternatively, an organometallic compound may be used.

Further, as another example, a color filter material can be mentioned. Specifically, Sumika Red B (trade name, Sumitomo Chemical dye), Kayaron Huast Yellow G
Sublimation dyes such as L (trade name, dye manufactured by Nippon Kayaku Co., Ltd.) and Diacerine Fast Brilliant Blue B (trade name, dye manufactured by Mitsubishi Kasei) can be used.

In the solution composition of the present invention, the boiling point of the benzene derivative is preferably 150 ° C. or higher. Specific examples of such a solvent include O-dichlorobenzene,
Examples thereof include m-dichlorobenzene, 1,2,3-trichlorobenzene, O-chlorotoluene, p-chlorotoluene, 1-chloronaphthalene, bromobenzene, O-dibromobenzene and 1-dibromonaphthalene. It is preferable to use these solvents because volatilization of the solvents can be prevented. These solvents are suitable because of their high solubility in aromatic compounds. Further, it is preferable that the solution composition of the present invention contains dodecylbenzene. The dodecylbenzene may be a single n-dodecylbenzene or a mixture of isomers.

This solvent has a boiling point of 300 ° C. or higher and a viscosity of 6c.
It has a characteristic of p or more (20 ° C.) and, of course, a single solvent may be used, but by adding it to another solvent, volatilization of the solvent can be effectively prevented, which is preferable. Further, among the above solvents, except for dodecylbenzene, the viscosity is relatively small, and the viscosity can be adjusted by adding this solvent, which is very suitable. According to the present invention, there is provided a functional film forming method in which a solution composition as described above is supplied onto a substrate by a discharging device and then the substrate is treated at a temperature higher than the temperature at the time of discharging to form a film. The discharge temperature is room temperature, and it is preferable to heat the substrate after discharge. By carrying out such a treatment, the deposited contents are redissolved due to the volatilization of the solvent at the time of discharge and the temperature drop, and a uniform and homogeneous functional film can be obtained. In the above-described method for producing a functional film, it is preferable that after the discharge composition is supplied onto the substrate by the discharge device, the substrate is heated while being pressurized when the substrate is processed at a temperature higher than the discharge temperature. By such treatment, the evaporation of the solvent at the time of heating can be delayed, and the redissolution of the contents is further promoted. As a result, a uniform and uniform functional film can be obtained.
Further, in the above-described method for producing a functional film, it is preferable that the substrate is depressurized immediately after the high temperature treatment to remove the solvent.
By such treatment, phase separation of the contents at the time of solvent concentration can be prevented.

The droplet 43 is discharged onto the discharge head unit 1
When applying to the desired element electrode 42 by the ejection head 33 of No. 1, the position to be applied is measured by the detection optical system 32 and the image identification mechanism 36, and the measurement data and the ejection port surface of the ejection head unit 11 are measured. Corrected coordinates are generated based on the distance of the functional device substrate 14 and the moving speed of the carriage, and droplets are applied while the ejection head unit 11 is moved in the X and Y directions on the front surface of the functional device substrate 14 according to the corrected coordinates. To do. The detection optical system 32 may be a combination of a CCD camera and a lens, and the image identification mechanism 36 may be a commercially available one that binarizes an image and obtains its barycentric position.

As is clear from the above description, the functional element substrate of the present invention is manufactured by causing a solution containing a functional material to fly in the air according to the principle of ink jet and depositing it on the substrate 14 as droplets. As described above, the functional element substrate of the present invention includes quartz glass, glass having a reduced content of impurities such as Na, soda lime glass, a glass substrate having SiO ₂ deposited on its surface, and alumina. It is a ceramic substrate or various plastic substrates including PET, and its shape is a rectangle (quadrangle at right angles).
That is, the vertical 2 sides and the horizontal 2 sides forming the rectangular shape are substrates in which the vertical 2 sides are parallel to each other, the horizontal 2 sides are parallel to each other, and the vertical and horizontal sides form a right angle.

By the way, in such a rectangular substrate, the corners of the four corners are 90 °, and in the present invention, the substrate material is glass, ceramics or the like as described above, and therefore functions. An accident that an operator is injured often occurs during the manufacturing process of the flexible element substrate. Therefore, in the present invention, the four corners of such a rectangular substrate are chamfered with C1 or R1 or more, or a shape or size equivalent to them. FIG. 5 is a plan view showing a substrate for forming the functional element of the present invention, in which each corner is chamfered, and FIG. 5A shows an example of 45 ° chamfering. B) shows an example of chamfering by an arc. Each corner of the rectangular substrate 14 is C as shown in FIG.
1 or by chamfering 14a equal to or more than R1 as shown in FIG. 5 (B), the sharp parts (90 ° corners) of glass, ceramics, etc. are eliminated, and the worker can work. Prevents injuries when the board is transported, replaced, mounted on a manufacturing device, etc. Note that such chamfering may be performed only on a part of the four corners in some cases, and the chamfering should be easily performed by grinding with a grinder containing abrasive grains such as carborundum or emery. Is possible.

Next, other features of the present invention will be described. FIG. 6 is a plan view showing a substrate for forming the functional element of the present invention, and is an example in which the lower right corner of the substrate has a shape different from the other three corners. In this example, the lower right corner of the substrate 14 has a different shape from the other three corners, and the substrate 1
The directionality of the substrate 14 can be easily determined when 4 is installed on the substrate holder 13 of the functional device substrate manufacturing apparatus as shown in FIG. That is, by making at least one corner of the four corners different from the other corners and forming a large chamfer 14b, it is possible to distinguish the corners of the functional element substrate from the other corners. At the time of manufacturing, an operator can recognize the direction of the board 14 and can reliably install the board. For example, by checking the orientation of the board and installing the board by making the size and shape that allows the operator to recognize that the shape of that corner is different from other corners only by touching the corner with hands. Efficiency and work mistakes can be significantly reduced.

Next, still another feature of the present invention will be described. FIG. 7 is a plan view showing a substrate for forming the functional element of the present invention, which is an example in which a cutout is provided on at least one side of the four sides of the substrate. In this example, the notch 14c is provided on at least one of the four sides of the rectangular substrate, and when the substrate 14 is installed on the substrate holding table 13 of the functional device substrate manufacturing apparatus as shown in FIG. On board 1
The direction of 4 can be easily determined. Ie 4
By providing the notch 14c on at least one of the sides, an operator can recognize the direction of the substrate 14 during manufacturing of the functional element substrate, and the substrate 14 can be reliably installed. Become. For example, the operator can confirm the direction of the substrate 14 by simply touching the notch 14c with his hand.
The work efficiency of installing the substrate 14 and the work error can be significantly reduced. Further, although not shown in FIG.
By providing a substrate stopper member corresponding to the notch 14c on the substrate holding table 13 of the functional device substrate manufacturing apparatus, there is an advantage that the substrate 14 can be reliably installed or accurately positioned.

As described above, in the functional element substrate of the present invention, the base substrate 14 is made into a rectangular shape, the corners are chamfered, the shape of the corners, the notches in the sides, etc. It is possible to prevent accidents and improve the work efficiency during manufacturing by providing the above. Although FIG. 4 shows a diagram in which droplets are jetted obliquely onto the surface of the substrate, the droplets are basically jetted and applied almost vertically.

Although the functional element substrate shown in FIG. 1 shows an example in which droplets are jetted and applied into the barrier 3, the barrier 3 is not provided and the electrode pattern is directly formed on the flat substrate. Alternatively, the functional element may be formed by spraying and applying a solution containing the functional material onto the layer. Also,
Although an organic EL element has been mainly described here as an example of the functional element, the present invention is not necessarily limited to such an element and material as described above. As the functional element, an organic transistor or the like can be preferably manufactured by utilizing the present invention. Further, the resist material for forming the barrier 3 in the above example can also be used as the solution used in the present invention, and is suitably applied as a technique for producing such a resist pattern.

[0051]

As is apparent from the above description, the present invention has the following effects. In the functional element substrate on which the functional element group corresponding to claim 1 is formed, the substrate shape is made rectangular, and the corner portions are C1 or R1 or more, or chamfering equivalent to them is performed. It is possible to prevent an accidental accident in which an operator is injured at a corner portion of a substrate during the operation (during substrate transportation, replacement, attachment to a manufacturing apparatus, etc.) during manufacturing of the flexible element substrate.

In the functional element substrate on which the effect functional element group according to claim 2 is formed, the substrate shape is rectangular and at least one of the four corners is formed.
Since the shape of the corner is made different from the other corners so that one corner can be distinguished from the other corners, an operator can recognize the direction of the board when manufacturing the functional element board, and It is possible to perform the installation reliably, and it is possible to improve work efficiency and reduce work mistakes.

In the functional element substrate in which the functional element group corresponding to the third aspect is formed, the substrate shape is made rectangular and the notch is provided on at least one of the four sides. When manufacturing a flexible element substrate, an operator can recognize the direction of the substrate and can reliably install the substrate, improving work efficiency,
Work mistakes can be reduced, and the substrate can be reliably installed or accurately positioned in the manufacturing apparatus.

Since the functional element substrate according to claim 4 can improve the working efficiency during manufacturing, a low-cost functional element substrate can be obtained, and such a low-cost functional element substrate can be used in an image display device. Since it is used for the above, a low-cost image display device can be obtained.

[Brief description of drawings]

FIG. 1 is a perspective view schematically showing one step of producing a functional element using the ejection composition of the example of the present invention.

FIG. 2 is a perspective view showing an embodiment of the functional device substrate manufacturing apparatus of the present invention.

FIG. 3 is a diagram showing a droplet applying device applied to the functional device substrate manufacturing apparatus of the present invention.

FIG. 4 is an enlarged view showing an ejection head unit of the droplet applying device shown in FIG.

FIG. 5 is a plan view showing a substrate for forming the functional element of the present invention, which is an example in which each corner is chamfered.

FIG. 6 is a plan view showing a substrate for forming the functional element of the present invention, which is an example in which one corner has a different shape from the other three corners.

FIG. 7 is a plan view showing a substrate for forming the functional element of the present invention, which is an example in which a notch is provided on one side.

[Explanation of symbols]

1 ... Nozzle (of liquid ejection head), 2 ... Droplet (made of organic EL material), 3 ... Organic (polyimide) barrier, 4 ...
Transparent electrode pattern, 5 ... Glass substrate, 11 ... Discharge head unit, 12 ... Carriage, 13 ... Substrate holding base, 14
... substrate, 15 ... supply tube for solution containing functional material, 16 ... signal supply cable, 17, 21 ... control box, 18 ... X-direction scan motor, 19 ... Y-direction scan motor, 20 ... computer, 22 ... substrate Positioning / holding means, 31 ... Head alignment control mechanism, 32 ... Detection optical system, 33 ... Jet head, 34 ... Head alignment fine adjustment mechanism, 35 ... Control computer, 3
6 ... Image identification mechanism, 37 ... XY direction scanning mechanism, 38 ... Position detection mechanism, 39 ... Position correction control mechanism, 40 ... Jet head drive / control mechanism, 41 ... Optical axis, 42 ... Element electrode, 43
... Droplet, 44 ... Droplet landing position.

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01L 51/00 H01L 29/78 618A H05B 33/10 618B 33/14 626C 29/28 F term (reference) 3K007 AB04 AB18 BA06 CA00 DB03 FA01 5C094 AA08 AA43 AA48 BA12 BA27 CA19 CA24 DA13 EB10 FB01 FB20 5F110 AA30 BB01 DD02 DD21 GG05 GG42 QQ06

Claims (4)

[Claims] 1. A functional element substrate having a functional element group formed by jetting droplets of a solution containing a functional material onto a substrate to form a functional element group, wherein the shape of the substrate is rectangular, and corners are C1. Alternatively, a functional element substrate characterized by being chamfered with R1 or more, or equivalent to them. 2. A functional element substrate having a functional element group formed by jetting droplets of a solution containing a functional material onto a substrate to form a functional element group, wherein the substrate has a rectangular shape and at least one corner portion. Is a functional element substrate in which the shape of a corner is different from the shape of another corner to the extent that it can be distinguished from other corners. 3. A functional element substrate having a functional element group formed by jetting droplets of a solution containing a functional material onto a substrate to form a functional element group, wherein the substrate shape is rectangular, and at least one side is formed. A functional element substrate having a notch. 4. An image display device, comprising: the functional element substrate according to claim 1; and a cover plate arranged to face the functional element substrate.