JP2004020094A - Environmental temperature control method and environmental temperature control system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an environmental temperature control method and an environmental temperature control system for accurately keeping an indoor environmental temperature constant even if a variation factor of the indoor environmental temperature is caused. <P>SOLUTION: This environmental temperature control method investigates beforehand influence affected to the indoor environmental temperature with every kind of indoor heat source such as an iulluminating lamp in a room and a person in the room, and controls the environmental temperature according to a state of the heat source with every kind such as the lighting number of illuminating lamps in the room and the number of persons staying in the room (S01 to S04). Thus, even if the state of the heat source for imparting a variation to the environmental temperature is occasionally different, the environmental temperature can be accurately controlled, and can be kept constant. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an environmental temperature control method and an environmental temperature control system for a room such as a clean room maintained at a constant temperature.
[0002]
[Prior art]
A beam drawing apparatus using an electron beam or a laser beam can form a fine structure on a base material and form, for example, a fine diffraction ring pattern on an optical element (for example, see Japanese Patent Application No. 2001-357578 by the present applicant). ). In such a beam writing apparatus, the writing position of the beam fluctuates due to a change in the environmental temperature in a room such as a clean room in which the apparatus is installed. For example, a position fluctuation of about 160 nm / ° C. occurs on the base material. Since the accuracy of the drawing position by the beam is reduced due to the fluctuation of the environmental temperature, it is necessary to keep the indoor environmental temperature constant. Similarly, in a clean room in which a stepper or the like for performing a semiconductor manufacturing process is installed, it is necessary to maintain a constant environmental temperature in the room in order to maintain constant accuracy. Also, when installing equipment that requires environmental temperature control, such as other various precision measurement devices, it is necessary to maintain a constant indoor environmental temperature because fluctuations in environmental temperature affect measurement accuracy. It is.
[0003]
However, if environmental temperature fluctuation factors such as turning on / off the lighting and entering / leaving people in a room such as a clean room occur, the environmental temperature in the room will fluctuate, and turning on / off the lighting and going in and out of the lighting will always occur. Therefore, it is difficult to accurately maintain a constant environmental temperature, and the above-described apparatus may have a problem in obtaining the required accuracy.
[0004]
[Problems to be solved by the invention]
An object of the present invention is to provide an environmental temperature control method and an environmental temperature control system capable of accurately maintaining a constant indoor environmental temperature even when a change factor of the indoor environmental temperature occurs.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, an environmental temperature control method according to the present invention examines in advance the effect on the indoor environmental temperature for each type of indoor heat source, and controls the environmental temperature according to the state of the heat source for each type. Is performed.
[0006]
According to this environmental temperature control method, the influence on the indoor environmental temperature is examined for each type of heat source, and the environmental temperature is controlled in accordance with the state of the heat source for each type. However, even if it differs from time to time, the environmental temperature can be accurately controlled and kept constant.
[0007]
In this case, by controlling the environmental temperature based on the current number that affects the environmental temperature for each type of the heat source, control is performed in consideration of the number of each type of heat source that affects the environmental temperature. Therefore, the environmental temperature can be accurately controlled.
[0008]
Further, another environmental temperature control method according to the present invention is a step of obtaining and storing information relating to the indoor environmental temperature for each type of indoor heat source, and a step of inputting a state of the heat source for each type of heat source. Measuring the environmental temperature in the room; and controlling the environmental temperature based on the state of the heat source, the relationship information, and the measured temperature.
[0009]
According to this environmental temperature control method, since the environmental temperature is controlled according to the state of the heat source for each type, the environmental temperature can be accurately controlled even if the state of each heat source that fluctuates in the environmental temperature varies from time to time. Can be kept constant.
[0010]
In this case, it is preferable that the relation information is obtained by obtaining a relation between the number of the heat sources affecting the environmental temperature and the environmental temperature for each type of the heat source. The environmental temperature can be estimated from the relation information and the number of states affecting the environmental temperature of the heat source, and the environmental temperature control step can be executed based on the estimated environmental temperature.
[0011]
In each of the environmental temperature control methods, the heat source is an indoor lighting lamp, and the environmental temperature can be controlled based on the number of turned on lighting lamps. The environmental temperature can be controlled based on the number of people who are in the room. As a result, the environmental temperature can be controlled accurately.
[0012]
The environmental temperature control system according to the present invention is a storage unit that stores information relating to the indoor environmental temperature for each type of indoor heat source, a temperature measuring unit that measures the indoor environmental temperature, and a type of the heat source. Input means for inputting the state of the heat source, and indoor temperature adjusting means for controlling and adjusting the environmental temperature based on the state of the heat source, the relationship information, and the measured temperature are provided.
[0013]
According to this environmental temperature control system, each of the above-mentioned environmental temperature control methods can be executed, and the environmental temperature is controlled according to the state of the heat source for each type. Therefore, even if the temperature is different, the environmental temperature can be controlled accurately and can be kept constant.
[0014]
In addition, by inputting the current number of the heat sources that affect the environmental temperature as the state of the heat source to the input unit, control is performed in consideration of the number of each type of heat source that affects the environmental temperature. Can be controlled accurately. For example, it is possible to input to the input means the number of on-state lighting lamps in the room as the state of the heat source, and to input the number of persons in the room as the state of the heat source to the input means. it can.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram of an environmental temperature control system according to the present embodiment, and FIG. 2 is a diagram showing an example of a temperature change in a day in a clean room to which the environmental temperature control system of FIG. 1 can be applied. FIG. 3 is a diagram showing the relationship between the number of lighting fluorescent lamps and the environmental temperature in the clean room of FIG.
[0016]
The environmental temperature control system 10 shown in FIG. 1 is installed in a clean room in which a large number of fluorescent lamps are arranged on a ceiling and workers come in and out and air in the room is removed, and the heat source indicates a state of a heat source in the clean room. Information, that is, an input terminal 11 composed of a keyboard or the like capable of inputting the number of lit fluorescent lamps and the number of persons in the room, and a temperature control condition calculated based on heat source information input from the input terminal 11 Computing device 12, a temperature measuring device 13 for measuring the environmental temperature in the clean room and inputting the temperature measurement result to the computing device 12, and an environmental temperature in the clean room based on the temperature control conditions obtained by the computing device 12. And an air conditioner 14 for controlling and adjusting.
[0017]
The air conditioner 14 is a known device that combines a blower, a cooler, a heater, and the like, and controls a blower, a cooler, a heater, and the like so that a temperature control signal from the arithmetic unit 12 is input and the environmental temperature becomes constant. The control unit 15 includes
[0018]
In the example of FIG. 2, for example, when the control set temperature is set to 23 ° C., the environmental temperature in the clean room is maintained at about 22.9 ° C. until the fluorescent lamp is turned on in the morning and a person enters the room. However, when the fluorescent lamp is turned on and a person enters the room, the fluorescent lamp and the person rise as a heat source, respectively, and then decrease once in the lunch break when the person leaves the room and turns off the fluorescent lamp, but then rises again. As shown in FIG. 2, in a clean room where the environmental temperature fluctuates, in an unmanned state and the control set temperature is set to 23 ° C., the number of lightings x in which the fluorescent lamps are turned on and the measured environmental temperature y (° C.) in the room. The relationship is checked in advance, and the two are in a relationship, for example, as shown in FIG. 3. When the number of lighting sources increases and the number of heat sources increases, the environmental temperature also increases.
y = 0.0091x + 22.813
[0019]
The arithmetic unit 12 includes a memory 12a capable of storing the above equation. When the input terminal 11 inputs the number x of the turned on fluorescent lamps in the clean room, the estimated environmental temperature y is calculated from the equation read out from the memory 12a. The temperature control condition is calculated based on the calculated environmental temperature and the measured temperature at that time, and a temperature control signal is sent to the control unit 15 of the air conditioner 14. The control unit 15 controls the air conditioner 14 to a constant temperature according to the temperature control signal.
[0020]
In a clean room where the environmental temperature fluctuates as shown in FIG. 2, the relationship between the measured environmental temperature (° C.) and the number of persons in the room in a state where all the fluorescent lamps are turned off and the control set temperature is set to 23 ° C. Is similarly checked in advance, and an approximate expression is similarly obtained from a relationship similar to FIG. According to this relationship, when the number of heat sources in the room increases and the number of heat sources increases, the environmental temperature also increases. The arithmetic unit 12 similarly stores an approximate expression of the relationship between the environmental temperature (° C.) and the number of persons in the room in the memory 12a, and reads out from the memory 12a when the number of persons in the clean room is input by the input terminal 11. The estimated environmental temperature is calculated from the approximate expression, and the control unit 15 controls the air conditioner 14 to a constant temperature using the calculated environmental temperature in the same manner as described above.
[0021]
The operation of the environmental temperature control system shown in FIG. 1 will be described with reference to FIG. FIG. 4 is a flowchart showing the operation of temperature control in the environmental temperature control system of FIG.
[0022]
As shown in FIG. 4, when environmental temperature control in the clean room is started, the number of fluorescent lamps in the room is checked, and the number is input from the input terminal 11 in FIG. 1 (S01). Next, the number of workers in the room is confirmed, and input from the input terminal 11 of FIG. 1 (S02). Then, the indoor environmental temperature is measured by the temperature measuring device 13 (S03). The input step S01 of the number of lights and the input step S02 of the number of working persons in the room may be performed in the reverse order, and the environmental temperature measurement step S03 may be performed before step S01 or between step S01 and step S02. It may be continued from a while.
[0023]
Next, the arithmetic unit 12 of FIG. 1 calculates the estimated environmental temperature from the number of lighting of the indoor fluorescent lamps based on the above equation, similarly calculates the estimated environmental temperature from the number of persons in the room, and measures these estimated environmental temperatures. Based on the temperature, the control unit 15 controls the air conditioner 14 so as to control and keep the environmental temperature constant (S04).
[0024]
The above steps S01 to S04 are executed while the fluorescent lamp is turned on / off and the traffic of the person continues (S05). For example, in FIG. 2, the above-described temperature control is performed between 10 o'clock and 23 o'clock when the environmental temperature rises because the fluorescent lamp is turned on / off and people continue to enter and exit, thereby setting the environmental temperature to a set control temperature (for example, , 23 ° C.).
[0025]
When the state of the heat source changes for each type, such as the number of lighting fluorescent lamps in the room or the number of people in the room, the environmental temperature changes accordingly, but as described above, the environmental temperature control system of the present embodiment According to this, the environmental temperature is controlled based on the state of the heat source for each type. Therefore, even if the state (the number of lightings and the number of persons) of each heat source that changes the environmental temperature in the clean room changes from time to time, the environmental temperature is controlled. It is possible to control with high accuracy, keep it constant, and suppress fluctuations in environmental temperature.
[0026]
When the number of lighting of the fluorescent lamps is turned on, it can be input from the keyboard of the input terminal 11 each time the input terminal 11 in FIG. 1 is used. The input may be automatically input to the input terminal 11, thereby saving the trouble of inputting the information to the keyboard every time the fluorescent lamp is turned on and off.
[0027]
As described above, the present invention has been described with the embodiments, but the present invention is not limited to these, and various modifications can be made within the technical idea of the present invention. For example, the relationship between the number of lighting fluorescent lamps, the number of people in the room, and the environmental temperature is stored in the memory 12a of the arithmetic unit 12 by an approximate expression. The relationship between the number of lighting fluorescent lamps and the environmental temperature is shown in FIG. A table may be stored in the memory 12a. Similarly, the relationship between the number of persons in the room and the environmental temperature may be stored in the memory 12a in a table as shown in FIG.
[0028]
Also, as the heat source in the clean room, the number of lighting lamps such as fluorescent lamps and the number of persons in the room have been described as examples, but the environmental temperature control method according to the present invention is not limited to these, and other heat sources ( For example, it is needless to say that the temperature can be controlled in the same manner even when a device such as various devices whose power is turned on / off is indoors.
[0029]
Further, the clean room equipped with the environmental temperature control system according to the present invention is suitable for installation of various precision instruments, and can secure required accuracy by suppressing fluctuations in environmental temperature. A beam drawing device to be used, a precision device such as a stepper for manufacturing a semiconductor, or various precision measuring devices can be installed.However, the present invention is not limited to these, and can be applied when accurate control of environmental temperature is required. Of course. Further, it is a matter of course that the environmental temperature control system according to the present invention is suitable for a room in which dust removal in a room is not particularly required but in which accurate control of the environmental temperature is required.
[0030]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to the environmental temperature control method and the environmental temperature control system of this invention, even if the fluctuation | variation factor of the indoor environmental temperature arises, the indoor environmental temperature can be maintained accurately constant.
[Brief description of the drawings]
FIG. 1 is a block diagram of an environmental temperature control system according to an embodiment.
FIG. 2 is a diagram showing an example of a temperature change in a day in a clean room to which the environmental temperature control system of FIG. 1 can be applied;
FIG. 3 is a diagram showing the relationship between the number of fluorescent lamps turned on and the environmental temperature in the clean room in FIG. 2;
FIG. 4 is a flowchart showing an operation of temperature control in the environmental temperature control system of FIG. 1;
FIG. 5 is an explanatory diagram of a modified example of the present embodiment, and is a diagram showing that a relationship between the number of lighting of fluorescent lamps and an ambient temperature is tabulated.
FIG. 6 is an explanatory diagram of a modified example of the present embodiment, and shows that the relationship between the number of persons in the room and the environmental temperature is tabulated.
[Explanation of symbols]
10 Environmental temperature control system 11 Input terminal (input means)
12 arithmetic unit 12a memory (storage means)
13 temperature measuring device 14 air conditioner (indoor temperature adjusting means)
15 control unit (room temperature adjustment means)

Claims (10)

An environmental temperature control method, wherein the influence on the indoor environmental temperature is checked in advance for each type of indoor heat source, and the environmental temperature is controlled according to the state of the heat source for each type. The environmental temperature control method according to claim 1, wherein the environmental temperature is controlled based on a number that affects the environmental temperature for each type of the heat source. Obtaining and storing information relating to the indoor environmental temperature for each type of indoor heat source;
Inputting the state of the heat source for each type of the heat source,
Measuring the ambient temperature in the room;
Controlling the ambient temperature based on the state of the heat source, the relationship information, and the measured temperature. The environmental temperature control method according to claim 3, wherein the relation information is obtained by calculating a relation between the number of the heat sources affecting the environmental temperature and the environmental temperature for each type of the heat source. . The environmental temperature according to any one of claims 1 to 4, wherein the heat source is an indoor lighting lamp, and the environmental temperature is controlled based on the number of the lighting lamps that are turned on. Control method. The environmental temperature control method according to claim 1, wherein the heat source is a person in the room, and the environmental temperature is controlled based on a number of people in the room. Storage means for storing information relating to the indoor environmental temperature for each type of indoor heat source,
Temperature measuring means for measuring the environmental temperature in the room,
Input means for inputting the state of the heat source for each type of the heat source,
An environmental temperature control system, comprising: an indoor temperature adjusting unit that controls and adjusts the environmental temperature based on the state of the heat source, the relationship information, and the measured temperature. The environmental temperature control system according to claim 7, wherein the relation information is obtained by obtaining a relation between the number of the heat sources affecting the environmental temperature and the environmental temperature for each type of the heat source. . 9. The environmental temperature control system according to claim 7, wherein the number of turned-on indoor lights is input to the input unit as the state of the heat source. 10. The environmental temperature control system according to claim 7, wherein the number of persons in the room is input to the input unit as the state of the heat source.

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