JP2004185716A - Method and apparatus for verifying master carrier holding position in magnetic transfer device, and method and apparatus for verifying slave medium supply position for master carrier - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To verify the positioning of a holding position of a master carrier and a supply position of a slave medium in a magnetic transfer method in which the master carrier and the slave medium are in close contact and magnetic transfer is performed. <P>SOLUTION: In a magnetic transfer device 10 performing magnetic transfer by closely contacting a master carrier 3 of a disk type having a transfer pattern corresponding to transfer information and a slave medium 2 and applying a magnetic field for transfer, a medium 52 for test being the same as the slave medium 2 is positioned so that the rotation center of the medium 52 coincides with the prescribed reference position A, supplied and adhered closely to the master carrier 3, magnetic transfer is performed for the medium 52 for test, and a holding position of the master carrier 3 is verified by testing a transfer position of a transfer pattern in a magnetically transferred medium 52'for test by a transfer position test means 56. Also, a medium 62 for test being the same as the slave 2 is supplied and adhered closely for the master carrier 3 held at the prescribed position, magnetic transfer is performed for the medium 62 for test, and a supply position of the slave 2 is verified by testing a transfer position of a transfer pattern in a magnetically transferred medium 62' by the transfer position test means 66. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method and apparatus for verifying a holding position of a master carrier in a magnetic transfer apparatus that performs magnetic transfer from a disk-shaped master carrier having a pattern corresponding to transfer information to a disk-like slave medium.
[0002]
The present invention also relates to a method and apparatus for verifying the supply position of a slave medium with respect to a master carrier in a magnetic transfer apparatus that magnetically transfers a disk-shaped master carrier having a pattern corresponding to transfer information to a slave medium using a magnetic recording medium. It is about.
[0003]
[Prior art]
Conventionally, information carried on a master carrier by applying a magnetic field for transfer in a state where a master carrier carrying transfer information by a fine uneven pattern of a magnetic material and a slave medium by a magnetic recording medium to be transferred are in close contact with each other (for example, Magnetic transfer in which a magnetization pattern corresponding to a servo signal) is transferred and recorded on a recording surface of a slave medium is known (see, for example, Patent Documents 1 and 2).
[0004]
When the slave medium is a disk-shaped medium such as a hard disk or a high-density flexible disk, the master carrier is also disk-shaped and has a transfer pattern formed concentrically, and the master medium is provided on one or both sides of the slave medium. With the carrier in close contact, a magnetic field application device using an electromagnet device or a permanent magnet device is disposed on one or both sides of the carrier to apply a transfer magnetic field.
[0005]
One of the important issues in performing this magnetic transfer is to transfer the magnetization pattern with high accuracy to the rotation center of the slave medium. In particular, in a slave medium such as a hard disk, the center of rotation when mounted on a drive device after magnetic transfer must coincide with the center of the magnetized pattern transferred and recorded accurately. Cannot be reproduced satisfactorily, and when the transferred and recorded signal is a servo signal, the tracking function cannot be sufficiently obtained.
[0006]
From the above points, in magnetic transfer, in order to align the position of the transfer signal with the rotation center of the slave medium, it is necessary to align the master carrier and the slave medium. To accurately perform this alignment, a CCD camera or the like is required. A positioning mechanism has been proposed that can be automatically performed while correcting misalignment by image processing (see, for example, Patent Document 3).
[0007]
The applicant of the present invention also has a method of positioning the master carrier with respect to the slave medium receiving shaft with respect to the contact holder for bringing the master carrier and the slave medium into close contact, and then supplying the slave medium to the slave medium receiving shaft. This is proposed in Japanese Patent Application No. 2001-302231.
[0008]
[Patent Document 1]
Japanese Patent Laid-Open No. 10-40544
[0009]
[Patent Document 2]
Japanese Patent Application Laid-Open No. 10-269566
[0010]
[Patent Document 3]
JP 2001-209978 A
[0011]
[Problems to be solved by the invention]
As described above, various positioning mechanisms have been proposed. However, when performing actual transfer, the amount of eccentricity of the center of the transfer pattern transferred to the slave medium with respect to the rotation center of the slave medium is within a specified value. It is necessary to verify whether or not it is trapped.
[0012]
However, the verification method and apparatus have not been established so far.
[0013]
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a verification method and verification apparatus for a holding position of a master carrier in a magnetic transfer apparatus.
[0014]
Another object of the present invention is to provide a method and apparatus for verifying the supply position of a slave medium with respect to a master carrier in a magnetic transfer apparatus.
[0015]
[Means for Solving the Problems]
The master carrier holding position verification method of the present invention provides a holding means for holding a disk-shaped master carrier on which a transfer pattern corresponding to transfer information is formed at a predetermined position, and a disk-like slave medium is supplied to the master carrier. In the magnetic transfer apparatus, the master carrier by the holding means in the magnetic transfer device, comprising: a supply means for making contact, and a magnetic field applying means for applying a transfer magnetic field to the master carrier and the slave medium that are in close contact It is a master carrier holding position verification method for verifying the holding position of
An inspection medium having the same shape as that of the slave medium is supplied to the master carrier held by the holding means after being positioned at a predetermined reference position, magnetically transferred to the inspection medium, and the inspection medium The holding position of the master carrier is verified by inspecting the transfer position of the transfer pattern.
[0016]
The master carrier holding position verification apparatus according to the present invention supplies a disk-shaped master medium on which a transfer pattern corresponding to transfer information is formed at a predetermined position, and a disk-shaped slave medium to the master carrier. In the magnetic transfer apparatus, the master carrier by the holding means in the magnetic transfer device, comprising: a supply means for making contact, and a magnetic field applying means for applying a transfer magnetic field to the master carrier and the slave medium that are in close contact A master carrier holding position verification device for verifying the holding position of
An inspection medium having the same shape as the slave medium;
Inspection medium supply means for positioning the inspection medium at a predetermined reference position and then supplying the inspection medium to the master carrier held by the holding means;
Transfer position inspection means for inspecting the transfer position of the transfer pattern in the inspection medium that is in close contact with the master carrier and has been magnetically transferred.
[0017]
In the master carrier holding position verification apparatus, it is preferable that the transfer position inspection means obtains an eccentric amount of the center of the transfer pattern transferred to the inspection medium with respect to the center of the inspection medium. Specific examples of the transfer position inspection means include a magnetic developing means for developing a magnetic pattern and an optical inspection means for optically detecting the magnetically developed magnetic pattern, a spin stand and a data analysis device, etc. The first-order eccentricity measuring apparatus is mentioned.
[0018]
In other words, the master carrier holding position verification method and apparatus of the present invention is a method and apparatus for verifying whether or not the master carrier holding position is held at a predetermined position. Can be used to ensure that it is held in position.
[0019]
In the slave medium supply position verification method of the present invention, a disk-shaped master carrier on which a transfer pattern corresponding to transfer information is formed is held at a predetermined position, and a disk-shaped slave medium is supplied to the master carrier. The slave medium with respect to the master carrier in a magnetic transfer apparatus comprising: a supply means for making a close contact; and a magnetic field applying means for applying a transfer magnetic field to the master carrier and the slave medium that are in close contact with each other A slave medium supply position verification method for verifying the supply position of
The inspection medium having the same shape as that of the slave medium is supplied to the master carrier held at the predetermined position by the supplying means, and is magnetically transferred to the inspection medium. The supply position of the slave medium with respect to the master carrier is verified by inspecting the transfer position of the transfer pattern.
[0020]
The slave medium supply position verification device of the present invention supplies a disk-shaped slave medium to a holding means for holding a disk-shaped master carrier on which a transfer pattern corresponding to transfer information is formed at a predetermined position, and the master carrier. The slave medium with respect to the master carrier in a magnetic transfer apparatus comprising: a supply means for making a close contact; and a magnetic field applying means for applying a transfer magnetic field to the master carrier and the slave medium that are in close contact with each other A slave medium supply position verification device for verifying the supply position of
An inspection medium having the same shape as the slave medium;
Transfer position inspection means for inspecting the transfer position of the transfer pattern in the inspection medium which is supplied by the supply means and is in close contact with the master carrier held at the predetermined position and magnetically transferred. It is characterized by.
[0021]
In the slave medium supply position verification apparatus, it is preferable that the transfer position inspection unit obtains an eccentric amount of the center of the transfer pattern transferred to the inspection medium with respect to the center of the inspection medium. Specific examples of the transfer position inspection means include a magnetic developing means for developing a magnetic pattern and an optical inspection means for optically detecting the magnetically developed magnetic pattern, a spin stand and a data analysis device, etc. Is mentioned.
[0022]
That is, the slave medium supply position verification method and apparatus according to the present invention is a method and apparatus for verifying whether or not the slave medium is supplied to a predetermined position. Can be used to guarantee that they are being supplied.
[0023]
【The invention's effect】
In the master carrier holding position verification method and apparatus of the present invention, the inspection medium having the same shape as the slave medium is positioned and supplied to the master carrier held by the holding means, and the inspection medium is supplied. The transfer position of the transfer pattern on the inspection medium is inspected, and the holding position of the master carrier is verified by verifying the transfer position of the transfer pattern on the inspection medium. Can be verified. Such verification is performed before actual magnetic transfer, and it is possible to execute magnetic transfer after confirming that it is held in a predetermined position, that is, in a state where it is guaranteed that it is held in a predetermined position. The reliability of the positioning accuracy of the carrier can be increased.
[0024]
If the master carrier is not in the predetermined position as a result of verification, after adjusting the holding position, etc., the master carrier holding position is verified again to confirm that the master carrier is accurately held in the predetermined position. By repeating the adjustment and verification until it is done, magnetic transfer can be performed in a state where it is guaranteed that the master carrier is in a predetermined position, so that the reliability of the positioning accuracy of the master carrier can be improved. it can.
[0025]
According to the slave medium supply position verification method and apparatus of the present invention, the inspection medium having the same shape as the slave medium is supplied to the master carrier held at a predetermined position by the supply means of the magnetic transfer device, and the inspection medium is closely attached. Since the transfer position of the slave medium relative to the master carrier is verified by performing magnetic transfer on the inspection medium and inspecting the transfer position of the transfer pattern on the inspection medium, the slave medium is accurately positioned at a predetermined position relative to the master carrier. It can be verified easily and reliably whether or not it is supplied. Such verification is performed before actual magnetic transfer is performed, and after confirming that the slave medium is supplied to a predetermined position, that is, magnetic transfer can be executed in a state where it is guaranteed that the slave medium is supplied to the predetermined position. A slave medium having a transfer pattern with less eccentricity can be produced with high yield.
[0026]
If the supply position of the slave medium is not the predetermined position as a result of the verification, the slave medium supply position is verified again after adjusting the supply position of the slave medium, and the slave medium is accurately set to the predetermined position. By repeating the adjustment and verification until the supply is confirmed, magnetic transfer can be performed in a state where it is guaranteed that the slave medium is in a predetermined position. The provided slave medium can be produced with high yield.
[0027]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail. FIG. 1 is a side view of an essential part of a magnetic transfer apparatus in which a master carrier position and a slave medium supply position are verified by a verification method and apparatus according to the present invention. In addition, the figure is a schematic diagram and is shown at a ratio different from actual dimensions.
[0028]
A magnetic transfer device 10 shown in FIG. 1 applies magnetic fields for transfer by applying magnetic fields for transfer by closely contacting master carriers 3 and 4 having transfer patterns corresponding to servo signals and the like on both recording surfaces of a slave medium 2 (magnetic recording medium). The transfer is performed. This device 10 is supported by a device main body 11 and two master carriers 3 and 4 supported in a predetermined position on the main body 11 with the information carrying surface in the vertical direction on both surfaces of the slave medium 2. A slave medium supply means 20 and a holder 13, 14 for supplying the slave medium 2 with the recording surface oriented in the vertical direction to the holders 13, 14 to be in close contact with each other, and the master carrier held by the holders 13, 14, Magnetic field applying means (not shown) for applying a transfer magnetic field while rotating.
[0029]
The slave medium 2 is a hard disk having a disk shape and a center hole 2a having a predetermined diameter, and has a recording surface in which a magnetic layer is formed on both surfaces of a disk-shaped base made of a glass plate or the like. Note that the slave medium 2 may be a high-density flexible disk.
[0030]
Each of the master carriers 3 and 4 is formed in a disk shape, and has a transfer pattern formed by a magnetic layer having a fine concavo-convex shape in close contact with the recording surface of the slave medium 2, and the opposite surface is a reference side described later. The holder 13 and the non-reference side holder 14 are held.
[0031]
A reference side holder 13 that holds the first master carrier 3 that transfers information such as a servo signal to one recording surface of the slave medium 2 is supported by a reference side holder support 15 fixed to the apparatus body 11, The counter-reference side holder 14 that holds the second master carrier 4 that transfers information such as servo signals to the other recording surface of the slave medium 2 can move toward and away from the reference-side holder support 15 on the apparatus main body 11. It is supported by the non-reference side holder support 16. That is, the first master carrier 3 is held at a predetermined position with respect to the apparatus main body 11 by the reference side holder 13 and the support portion 15 that supports the reference side holder 13, and the second master carrier 4 is It is held at a predetermined position with respect to the apparatus main body 11 by the support portion 16 that supports the reference side holder 14 and the counter reference side holder 14.
[0032]
The reference side holder 13 and the counter-reference side holder 14 can be detached from the support portions 15 and 16, respectively, and are mechanically fixed in a position-exiting manner when being fixed to the support portions 15 and 16. For example, the fixed shafts 13a and 14a of the holders 13 and 14 and the shapes of the fixed bearing portions 15a and 16a of the support portions 15 and 16 are fitted to each other, and the positioning surfaces and the fixed shafts 13a and 16a are fixed to the fixed bearing portions 15a and 16a. What is necessary is just to provide the suppression mechanism which presses 14a to this surface. Thereby, the holders 13 and 14 shall be supported by the support parts 15 and 16 so that the reference | standard axis | shaft A and the center of the holders 13 and 14 may correspond here. In the following description, the first master carrier held by the reference side holder 13 is called a reference side master carrier, and the second master carrier held by the anti-reference side holder 14 is called an anti-reference side master carrier.
[0033]
The non-reference side holder support portion 16 is movable in the X direction by a high precision slider 17, and the anti-reference side holder 17 is positioned with respect to the reference side holder 16 by the accuracy of the slider 17.
[0034]
The slave medium supply means 20 supplies and closely contacts the slave medium 2 to the reference-side master carrier 3 held by the reference-side holder 13, and a robot hand 21 that holds the slave medium 2 in its center hole 2a. A support unit 22 that supports the robot hand 21 and is movable in each of the X, Y, and Z directions on the apparatus main body 11, and a sight 22a attached to a part of the support unit 22; An automatic alignment mechanism including a camera 23 and an image processing unit (not shown) is provided to move the support unit 22 so that the sight 13a attached to a part of the reference side holder 13 coincides.
[0035]
The robot hand 21 holds the slave medium 2 on the reference-side master carrier 3 held by the reference-side holder 13 by an automatic alignment mechanism by gripping the inner diameter portion of the center hole 2a with the recording surface oriented in the vertical direction. Positioned and supplied with respect to it.
[0036]
The robot hand 21 and the support portion 22 that supports the robot hand 21 can be moved in the X direction by a slider 25 together with a support base 26. Further, the support base 26 is provided with a slider (not shown). 22 is movable in the Y direction, and 22 is movable in the Z direction by lifting means (not shown). The support portion 22 is configured to be retracted in the Y direction in the figure by a slider (not shown) when the holders are brought into close contact with each other after the slave medium is supplied.
[0037]
In the case of in-plane recording, the magnetic field applying means for applying the transfer magnetic field is formed by, for example, ring-type head electromagnets in which a coil is wound around a core having a gap extending in the radial direction, arranged on both sides of the transfer holder. A transfer magnetic field generated in parallel with the track direction is applied in the same direction on both sides. Further, the holder is rotated by a transfer holder rotating mechanism (not shown), and a transfer magnetic field is applied to the entire surface of the slave medium 2 and the master carriers 3 and 4. The magnetic field applying means may be provided so as to rotate. The magnetic field applying means may be disposed only on one side, and the permanent magnet device may be disposed on both sides or one side. In the perpendicular magnetic recording, the magnetic field applying device arranges electromagnets or permanent magnets having different polarities on both sides of the transfer holder, and generates and applies a transfer magnetic field in the vertical direction. In the case of applying a magnetic field partially, the entire surface is magnetically transferred by moving the transfer holder or moving the magnetic field.
[0038]
In the magnetic transfer apparatus 10 shown in FIG. 1, the anti-reference side holder support 16 is disposed on the high-precision slide means 17, and the anti-reference side master carrier 4 is moved by the mechanical accuracy of the slide 17. Although positioning is performed with respect to the reference-side master carrier 3, a position adjustment mechanism that can adjust the position mechanically may be provided in a support portion that supports the counter-reference-side master carrier 3. Alternatively, an automatic alignment mechanism similar to the automatic alignment mechanism provided in the slave medium supply unit may be provided.
[0039]
In addition, the slave medium supply unit 20 performs automatic alignment with the camera and image processing. However, the slave medium supply unit 20 may perform positioning based on machine reproducibility. For example, as described in Japanese Patent Application No. 2001-302231 by the present applicant, a shaft that fits in the center hole 2a of the slave medium 2 is provided in the reference side holder 13, and the shape of the shaft and the center hole 2a of the slave medium 2 is formed. The alignment may be performed with accuracy.
[0040]
Next, magnetic transfer in the magnetic transfer apparatus 10 will be briefly described.
[0041]
Magnetic transfer is continuously performed on a plurality of slave media 2 by the same master carrier 3 or 4. With the reference side holder 13 and the anti-reference side holder 14 holding the reference-side master carrier 3 and the anti-reference-side master carrier 4, respectively, the slave medium 2 that has been initially magnetized in one of the in-plane direction and the vertical direction is opened. After the setting, the non-reference side holder 14 is closed to bring it close to the reference side holder 13. Then, the slave medium 2 and the master carriers 3 and 4 are brought into close contact with each other by uniformly applying an adhesive force.
[0042]
Thereafter, the magnetic field applying means is brought close to the holders 13 and 14, and a magnetic field for transfer is applied in a direction almost opposite to the initial magnetization by the magnetic field applying means while rotating the holders 13 and 14 integrally. The applied magnetic field for transfer is sucked into the convex pattern of the magnetic material in close contact with the slave medium 2 in the transfer pattern of the master carriers 3 and 4, and in the case of in-plane recording, the initial magnetization of this part is not reversed and the others In the case of perpendicular recording, the initial magnetization of this portion is reversed and the initial magnetization of the other portion is not reversed. As a result, the slave medium 2 corresponds to the transfer pattern of the master carriers 3 and 4. A magnetization pattern is transferred and recorded. After the magnetic transfer, the holders 13 and 14 are opened, the slave medium 2 after the magnetic transfer is taken out and carried out, the next new slave medium 2 is supplied, and the same magnetic transfer is repeated thereafter.
[0043]
Note that single-sided magnetic transfer may be performed. In this case, the reference-side holder 13 holds a master carrier 3 for transferring information such as a servo signal to the one-side recording surface of the slave medium 2, and the anti-reference side. The holder 14 is preferably provided with an elastic body (cushion material) that contacts the other recording surface of the slave medium 2. The slave medium 2 is supplied and brought into close contact with the master carrier 3 by the slave supply means 20 as described above.
[0044]
The positioning of the master carrier and the slave medium in the magnetic transfer apparatus 10 is performed according to the following procedure.
[0045]
First, the holders 13 and 14 are separated (opened), the reference side holder 13 and the anti-reference side holder 14 are removed from the support portions 15 and 16, respectively, and the reference side master carrier 3 and the anti-reference side holder 14 are respectively attached to the holders 13 and 14. The reference-side master carrier 4 is positioned and held at predetermined positions of the holders 13 and 14. The positioning of the holders 13 and 14 to the predetermined positions of the master carriers 3 and 4 is performed by finely adjusting the master carriers 3 and 4 in the XY directions using a position observation means such as a measurement microscope or a CCD camera, for example. It is also possible to carry out the master carrier 3 or 4 while directly or automatically adjusting the position of the master carrier 3 or 4 (see Japanese Patent Application No. 2001-302231 by the present applicant).
[0046]
Next, the holders 13 and 14 respectively holding the master carriers 3 and 4 are attached and fixed to the support portions 15 and 16 with the above-described mechanical accuracy.
[0047]
The robot hand 21 holds the slave medium 2 at its center hole, and the automatic positioning mechanism positions the aim 13a of the reference side holder 13 and the aim 22a of the support portion 22 that supports the robot hand 21, It is supplied to the master carrier 3 and brought into close contact therewith.
[0048]
The support portion 16 that supports the anti-reference side holder 14 that holds the anti-reference side master carrier 4 is moved by the slider 17 toward the reference side holder 13 so that the anti-reference side master carrier 4 is brought into close contact with the other surface of the slave medium 2.
[0049]
Before the actual magnetic transfer, whether or not the eccentric amount of the center of the transfer pattern with respect to the rotation center of the slave medium 2 is suppressed to a predetermined value or less in the slave medium 2 to which the pattern is transferred by the magnetic transfer apparatus 10. This verification ensures that the amount of eccentricity is kept below a specified value.
[0050]
Here, using the master carrier holding position verification method and apparatus of the present invention and the slave medium supply position verification method and apparatus of the present invention, the holding position of the master carrier and the slave medium supply position are verified step by step.
[0051]
First, an embodiment of the master carrier holding position verification method and apparatus of the present invention will be described. FIG. 2 is a block diagram showing a schematic configuration of the verification apparatus, and FIG. 3 shows a flow of a holding position guarantee method using an embodiment of the verification method by the verification apparatus of FIG.
[0052]
The master carrier holding position verification device 50 holds 3 to 10 inspection media 52 having the same shape as the slave medium 2 and the inspection medium 52 at a predetermined position of the transfer device 10 in a state where the inspection medium 52 is positioned at a predetermined reference position. The inspection medium supply means 54 that is supplied to and closely adhered to the reference-side master carrier 3, and the center of the transfer pattern on the inspection medium 52 ′ that has been magnetically transferred from the center of rotation of the medium 52 ′. And a transfer position inspection means 56 for measuring the amount. The inspection medium supply means 54 is for positioning the inspection medium 52 at a predetermined reference position of the main body 11 of the transfer apparatus 10 and supplying the inspection medium 52 to the reference-side master carrier 3, and is provided in the magnetic transfer apparatus 10. The supply means 20 may be configured. As described above, the supply means 20 of the magnetic transfer apparatus 10 has an automatic alignment mechanism. However, when used as the inspection medium supply means 54, the automatic alignment mechanism is turned off to perform automatic alignment. First, control is performed so that the main body 11 of the transfer device 10 is positioned at a predetermined reference position. Of course, the slave medium 2 itself may be used as the inspection medium 52 described above.
[0053]
The transfer position inspection means 56 performs primary eccentricity measurement such as magnetic development and optical inspection, or spin stand and data analysis, and the center of the transfer pattern with respect to the rotation center of the inspection medium 52 ′, the eccentric angle, etc. Measure.
[0054]
Next, a procedure for guaranteeing the master carrier holding position will be described with reference to the flow of FIG.
[0055]
First, the inspection medium supply means 54 positions the inspection medium 52 so that the center thereof coincides with a predetermined reference position (reference axis A) of the main body 11 of the transfer apparatus 10, and supplies the reference medium to the reference-side master carrier 3 to be in close contact therewith. Magnetic transfer is performed (S1). As the inspection medium 52, the same medium as the slave medium 2 is used. In addition, one that is previously magnetized in one direction of the track is used. Magnetic transfer is sequentially performed on about three to ten test media 52.
[0056]
Next, for each inspection medium 52 ′ subjected to magnetic transfer, the amount of eccentricity and the eccentric angle from the center of the inspection medium 52 ′ at the center position of the transfer pattern transferred to the medium 52 ′ are obtained, and the transfer is performed. Among the plurality of inspection media 52 ', the amount of eccentricity (maximum amount of eccentricity) and the center value of the eccentricity are obtained (S2).
[0057]
It is determined from the obtained eccentric amount whether or not the position of the reference-side master carrier 3 held by the reference-side holder 13 is a predetermined position (S4). Here, it is verified whether or not the reference axis A is coincident with the center of the transfer pattern on the master carrier. Specifically, the transfer pattern transferred to the inspection medium 52 ′ by the master carrier 3. It is determined whether or not the maximum amount of eccentricity from the rotation center of the inspection medium 52 ′ is within a specified value (slave medium position control range). If the maximum amount of eccentricity is within the specified value (S4: Yes), the holding position of the reference side master carrier 3 is regarded as a predetermined position. That is, the holding position of the reference side master carrier 3 is guaranteed to be a predetermined position. On the other hand, if the maximum eccentricity is outside the specified value (S4: No), the reference side master carrier 3 is reattached to the reference side holder 13 (S5), and the process returns to the first step S1.
[0058]
Next, for each inspection medium 52 ′, the deviation of the center of the transfer pattern transferred by the non-reference side master carrier 4 from the center of the transfer pattern transferred by the reference side master carrier 3 is obtained, thereby obtaining the reference side master. The deviation of the eccentric center of the anti-reference side master carrier 4 with respect to the eccentric center of the carrier 3 is obtained (S6), and the position of the anti-reference side master carrier 4 held by the anti-reference side holder 14 is a predetermined position. It is verified whether or not (S7). Here, it is determined whether or not the deviation of the transfer pattern on one side of the inspection medium 52 ′ from the transfer pattern on the other side is within a specified value.
[0059]
If the deviation is within the specified value (S7: Yes), the holding position of the anti-reference side master carrier 4 is regarded as a predetermined position, that is, the holding position of the anti-reference side master carrier 4 is guaranteed to be the predetermined position. It becomes a state. The holding positions of both master carriers are guaranteed, and the guarantee of the master carrier holding positions ends.
[0060]
On the other hand, if the deviation is outside the specified value (S7: No), the anti-reference side master carrier 4 is reattached to the anti-reference side holder 14 (S8), and the process returns to the first step S1. However, in this case, since the position of the reference side master carrier 3 is guaranteed (S3: Yes), the confirmation step (S4) for the holding position of the reference side master carrier 2 is passed, and the anti-reference side master carrier 3 is passed. Only 4 need to be verified.
[0061]
As described above, by using the master carrier holding position verification device and the verification method of the present invention, it is possible to easily and surely guarantee that the holding position of the master carrier is a predetermined position.
[0062]
In the case of a magnetic transfer apparatus in which the support portion of the anti-reference side holder is provided with a holder support position adjusting mechanism, the position of the holder 14 is adjusted by the mechanism without removing the anti-reference side holder 14, and the master carrier 4 may be adjusted. In the case of a magnetic transfer apparatus equipped with an automatic alignment mechanism that automatically aligns the counter-reference side holder with respect to the reference-side holder, an alignment correction value is set in the image processing unit of the automatic alignment mechanism. By inputting, the position of the anti-reference holder 14, that is, the holding position of the anti-reference side master carrier 4 may be adjusted.
[0063]
Next, an embodiment of the slave medium supply position verification method and apparatus of the present invention will be described. FIG. 4 is a block diagram showing a schematic configuration of the verification apparatus, and FIG. 5 shows a supply position assurance method flow using an embodiment of the verification method by the verification apparatus of FIG.
[0064]
The slave medium supply position verification device 60 includes 3 to 10 inspection media 62 having the same shape as that of the slave medium 2, and the center of the transfer pattern on the inspection medium 62 ′ subjected to magnetic transfer. A transfer position inspection means 66 for measuring the amount of eccentricity from the center of rotation is provided.
[0065]
Here, since the supply position accuracy when the slave medium is supplied by the slave medium supply means 20 is verified, the automatic alignment function of the supply means 20 is turned ON.
[0066]
The transfer position inspection means 66 performs primary eccentricity measurement such as magnetic development and optical inspection or spin stand and data analysis, similar to the transfer position inspection means 56 of the above-described master carrier holding position verification apparatus. Measure the eccentricity, eccentric angle, etc. of the center of the transfer pattern with respect to the rotation center of the medium.
[0067]
Next, a procedure for guaranteeing the slave medium supply position will be described with reference to the flow of FIG.
[0068]
First, the inspection medium 62 is aligned by the automatic alignment function by the slave medium supply unit 20 of the magnetic transfer apparatus 10, and is supplied to the reference-side master carrier 3 held at a predetermined position of the transfer apparatus 10 to be closely attached. And magnetic transfer is performed (S11). The inspection medium 62 is the same as the slave medium 2. In addition, one that is previously magnetized in one direction of the track is used. Magnetic transfer is sequentially performed on about three to ten inspection media 623.
[0069]
Next, for each inspection medium 62 ′ subjected to magnetic transfer, the amount of eccentricity and the eccentric angle of the center position of the transfer pattern transferred to the medium 62 ′ from the center of the inspection medium 62 ′ are obtained, and transfer is performed. Among the plurality of inspection media 62 ', the eccentricity (maximum eccentricity) of the one having the greatest eccentricity and the center value of the eccentricity are obtained (S12).
[0070]
Verification is made as to whether the obtained maximum eccentric amount and the deviation between the eccentric center of the transfer pattern on one surface and the eccentric center of the transfer pattern on the other surface are within a specified value (S13).
[0071]
If both are within the specified value (S13: Yes), the verification is finished assuming that the accuracy of the slave medium supply position is good. That is, it is guaranteed that the slave medium is supplied to the predetermined position. On the other hand, if at least one of the values is outside the specified value (S13: No), it is determined that there is an error in the slave medium supply position, and an image processing correction value of the automatic alignment function of the slave medium supply unit 20 is input. Then, the slave medium supply position is adjusted (S14), the process returns to the first step S11, and verification is performed again. In addition, when the supply means for positioning the slave medium 2 with mechanical accuracy is provided, the position may be adjusted mechanically.
[0072]
Thus, by using the slave medium supply position verification apparatus and verification method of the present invention, it is possible to ensure that the slave medium is supplied to a predetermined position easily and reliably.
[0073]
If the magnetic transfer device 10 is guaranteed based on the above verification and magnetic transfer is performed to the slave medium 2, the eccentricity of the center of the transfer pattern with respect to the rotation center of the slave medium 2 is set to a predetermined value or less. Therefore, it is possible to produce a magnetic disk medium that does not cause defects such as inability to reproduce when mounted on the drive device with a high yield.
[Brief description of the drawings]
FIG. 1 is a side view of an essential part of a magnetic transfer apparatus.
FIG. 2 is a block diagram showing a device configuration of an embodiment of a master carrier holding position verification device of the present invention.
[Fig. 3] Master carrier holding position guarantee flow
FIG. 4 is a block diagram showing a device configuration of an embodiment of a slave medium supply position verification device of the present invention.
FIG. 5: Slave medium supply position assurance flow
[Explanation of symbols]
2 Slave media
2a Center hole
3, 4 Master carrier
10 Magnetic transfer device
11 Device body
13 Reference side holder
14 Non-reference side holder
20 Slave medium supply means
50 Master carrier holding position verification device
52 Inspection media
54 Inspection medium supply means
56 Transfer position inspection means
60 Slave medium supply position verification device
62 Inspection media
66 Transfer position inspection means

Claims (6)

A holding unit that holds a disc-shaped master carrier on which a transfer pattern corresponding to the transfer information is formed in a predetermined position; and a feeding unit that feeds and contacts the disc-shaped slave medium to the master carrier. Master carrier holding position verification for verifying the holding position of the master carrier by the holding means in a magnetic transfer apparatus comprising magnetic field applying means for applying a magnetic field for transfer to the master carrier and the slave medium. A method,
An inspection medium having the same shape as that of the slave medium is supplied to the master carrier held by the holding means after being positioned at a predetermined reference position, magnetically transferred to the inspection medium, and the inspection medium A method for verifying a holding position of the master carrier, wherein the holding position of the master carrier is verified by inspecting a transfer position of the transfer pattern in the method. A holding unit that holds a disc-shaped master carrier on which a transfer pattern corresponding to the transfer information is formed in a predetermined position; and a feeding unit that feeds and contacts the disc-shaped slave medium to the master carrier. Master carrier holding position verification for verifying the holding position of the master carrier by the holding means in a magnetic transfer apparatus comprising magnetic field applying means for applying a magnetic field for transfer to the master carrier and the slave medium. A device,
An inspection medium having the same shape as the slave medium;
Inspection medium supply means for positioning the inspection medium at a predetermined reference position and then supplying the inspection medium to the master carrier held by the holding means;
A master carrier holding position verification device comprising: a transfer position inspection means for inspecting a transfer position of the transfer pattern in the inspection medium which is in close contact with the master carrier and magnetically transferred. 3. The master carrier holding position according to claim 2, wherein the transfer position inspection means obtains an eccentric amount of the center of the transfer pattern transferred to the inspection medium with respect to the center of the inspection medium. Verification device. A holding unit that holds a disc-shaped master carrier on which a transfer pattern corresponding to the transfer information is formed in a predetermined position; and a feeding unit that feeds and contacts the disc-shaped slave medium to the master carrier. Slave medium supply position verification for verifying the supply position of the slave medium with respect to the master carrier in a magnetic transfer apparatus comprising magnetic field applying means for applying a magnetic field for transfer to the master carrier and the slave medium A method,
The inspection medium having the same shape as that of the slave medium is supplied to the master carrier held at the predetermined position by the supplying means, and is magnetically transferred to the inspection medium. A slave medium supply position verification method comprising: verifying a supply position of the slave medium with respect to the master carrier by inspecting a transfer position of the transfer pattern. A holding unit that holds a disc-shaped master carrier on which a transfer pattern corresponding to the transfer information is formed in a predetermined position; and a feeding unit that feeds and contacts the disc-shaped slave medium to the master carrier. Slave medium supply position verification for verifying the supply position of the slave medium with respect to the master carrier in a magnetic transfer apparatus comprising magnetic field applying means for applying a magnetic field for transfer to the master carrier and the slave medium A device,
An inspection medium having the same shape as the slave medium;
Transfer position inspection means for inspecting the transfer position of the transfer pattern in the inspection medium which is supplied by the supply means and is in close contact with the master carrier held at the predetermined position and magnetically transferred. A slave medium supply position verification device. 6. The slave medium supply position according to claim 5, wherein the transfer position inspection means calculates an eccentric amount of the center of the transfer pattern transferred to the inspection medium with respect to the center of the inspection medium. Verification device.

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