JP2004272195A - Method for producing random pattern, method for producing mask, method for producing electro-optical device, and program for producing random pattern - Google Patents

Abstract

PROBLEM TO BE SOLVED: To arrange a plurality of dot portions corresponding to a light transmitting portion and a light shielding portion in a sufficiently planar random state without being too close to each other.
(A) A plurality of dot sections 4 are randomly arranged in a unit area A0 at random, and (b) an auxiliary area having the same shape and the same arrangement of the dot sections 4 as the unit area A0 is defined as a unit. (C) selecting one attention dot from the plurality of dots 4 included in the unit area A0; and (d) selecting a plurality of surrounding dots around the attention dot. The distance d between each of them and the target dot portion is calculated, (e) each calculated d value is compared with a reference distance s, and (f) a plurality of surrounding dot portions satisfying d ≦ s An operation is performed to separate the surrounding dots corresponding to the auxiliary area at the same time as separating from the target dot section. Further, (g) Steps (c) to (f) are performed for all the dot sections 4 in the unit area A0 until there is no movement. It is a method of creating a random pattern that repeats .
[Selection diagram] Fig. 1

Description

  The present invention relates to a method for creating a random pattern in which a plurality of dot portions are randomly arranged, and a program for implementing the method. The present invention also relates to a method of manufacturing a mask in which a plurality of dot portions are randomly arranged, and a method of manufacturing an electro-optical device using the mask.

  At present, electro-optical devices such as liquid crystal devices are widely known. This electro-optical device modulates light by supplying light to a layer of electro-optical material, such as liquid crystal, and controlling the voltage applied to the layer of electro-optical material for each display dot, which is the minimum unit of display. Thus, images such as characters, numerals, figures, and the like are displayed.

  In such an electro-optical device, as a method for supplying light to the layer of the electro-optical material, a light reflecting layer is provided in parallel with the layer of the electro-optical material, and external light such as sunlight, room light, etc. There is known a method in which, after being introduced into an optical device, the light is reflected by the light reflecting layer and supplied to a layer of an electro-optical material. Furthermore, in this method, if the surface of the light reflecting layer is a smooth surface, that is, a mirror surface, the background of characters, numbers, etc. becomes a mirror image and the display becomes difficult to see. There is also known a method in which a fine uneven pattern is formed on the surface of the device so that reflected light becomes scattered light. In addition, the electro-optical device is not limited to the case where an uneven pattern is formed on the surface of the light reflection layer, and may need to form a fine uneven pattern as needed on the surface of various optical elements. .

  As described above, when forming a concavo-convex pattern on the surface of the light reflecting layer or other optical elements, if the concavo-convex pattern is provided in a regularly arranged state in a plane, interference fringes occur in reflected light. Display may be difficult to see. In order to prevent this, conventionally, a technique has been proposed in which the planar arrangement state of the uneven pattern is made random, that is, irregular.

  In addition, as one of specific methods for realizing such a random arrangement state, conventionally, a light reflection layer or the like is formed by using a photolithography process, and then a light exposure layer used in the photolithography process is formed. There is known a method in which the arrangement pattern of the light-transmitting portions or the light-shielding portions formed on the mask, that is, the dot portions is made irregular, that is, random (for example, see Patent Document 1). As described above, when manufacturing an exposure mask having a structure in which a plurality of dot portions are randomly arranged, coordinate data indicating a state in which a plurality of dot portions are randomly arranged on XY coordinates, that is, a random pattern Data must be predetermined.

  As a method of creating such a random pattern, conventionally, for example, a large number of ring members having an inner diameter of about 5 mm, for example, about 2000 ring members are scattered on a plane on which XY coordinates are drawn, so that those ring members are There is known a method in which the XY coordinates of each ring member are read after being arranged at random, and data of a random arrangement is defined by the XY coordinates.

JP-A-2002-258278

  However, in the conventional method of creating a random pattern as described above, the arrangement of a plurality of dot portions cannot be made completely random, and the arrangement may be partially increased in an unexpected manner. was there. Considering the case where irregularities are formed on the surface of the light reflecting layer according to such a random pattern, it has been insufficient to prevent the generation of interference fringes with respect to the light reflected by the light reflecting layer.

  Further, in the conventional method for creating a random pattern as described above, a plurality of dot portions may be too close to each other, or the dot portions may overlap each other. A mask for photolithography processing is prepared according to such a random pattern, and the resin film formed on the base material is exposed and developed using the mask to form irregularities on the surface of the resin film. Considering the above, there is a problem that the intervals between the formed concavities and convexities are too close or the concave portions overlap each other, and there is a problem that the resin film is easily peeled from the base material at those locations.

  The present invention has been made in view of the above problems, and has as its object to arrange a plurality of dot portions corresponding to light-transmitting portions and light-shielding portions in a sufficiently random state without being too close to each other. And

In order to achieve the above object, a method for creating a random pattern according to the present invention is a method for creating a random pattern in which a plurality of dot portions are arranged irregularly,
(A) randomly arranging a plurality of dot portions on XY coordinates in a unit area in the random pattern;
(B) a step of arranging an auxiliary area having the same shape as the unit area and the same arrangement of the dot portions around the unit area and continuously in the unit area;
(C) selecting one target dot portion from a plurality of dot portions included in the unit area;
(D) calculating a distance “d” between each of the plurality of peripheral dot portions existing around the noted dot portion and the noted dot portion;
(E) comparing each of the calculated plurality of distances “d” with a reference distance “s”;
(F) When d ≦ s among the plurality of surrounding dot portions, the XY coordinates of the surrounding dot portions are determined in the X direction, the Y direction, or both the X and Y directions with respect to the target dot portion. Performing a calculation of separating the surrounding dots corresponding to the auxiliary area at the same time as separating by a distance;
(G) repeating the steps (c) to (f) for all of the plurality of dot sections in the unit area until all of the dot section distances “d” satisfy d>s;
It is characterized by having.

  According to the random pattern creation method, a plurality of dot portions constituting the random pattern are arranged so as to be too close to each other over the entire area of the unit area of the random pattern and the random pattern formed by connecting a plurality of the unit areas. Can be prevented. Therefore, for example, the arrangement of a plurality of dot portions in the exposure mask, for example, a plurality of holes, is determined in accordance with such a random pattern, and further, the resin film formed on a base material made of glass or the like is used for this exposure. If patterning is performed using a mask, a sufficiently random uneven pattern can be formed on the resin film. In addition, at this time, since the concave portions of the concave and convex pattern do not approach each other too much or overlap with each other, it is possible to prevent the resin film from being easily peeled off from the base material.

  By the way, as a method of creating a random pattern, it is conceivable to arrange a plurality of dot portions randomly on XY coordinates over the entire area of the random pattern without considering the concept of the unit area A0. In such a case, it takes a very long time to form random data over the entire area of the random pattern, and the cost is very high. In addition, it takes a very long time to actually perform drawing by the exposure apparatus in accordance with the random data, and the cost is extremely high.

  On the other hand, in the method for creating a random pattern according to the present invention, instead of forming random data over the entire area of the random pattern, a unit area corresponding to a part of the random pattern is considered, and a plurality of dots are formed in this unit area. By randomly arranging the units and further connecting such unit regions one by one in a planar manner, a plurality of dot units are arranged at random with respect to the entire region of the random pattern. According to this method, since only the unit area needs to form the random data, the time for forming the data is short, and the cost is low.

  According to such a method of connecting the unit areas, in the boundary area of the connection, a plurality of dot parts may be too close to each other, or a state in which the plurality of dot parts may overlap with each other may be increased. Even in such a boundary region, the distance between the dots can be surely separated by a predetermined distance or more.

  In the method for creating a random pattern having the above configuration, the dot portion may be a circular portion or a polygonal portion.

  Next, in the method of creating a random pattern having the above-described configuration, it is preferable that the step of randomly arranging the plurality of dot portions on the XY coordinate system be performed using a random function. If a random function is used, primary random data can be obtained very easily. For example, the random function takes an arbitrary value from 0 to 1. However, if the X coordinate is repeatedly used in the first operation, the Y coordinate is used in the second operation,... Since individual coordinates can be obtained, random position coordinates can be obtained by scaling to the display dot size. As such a random function, one widely and generally provided as application software that can be installed in a memory of a computer can be used. Instead of such a random function, a method in which a large number of dot elements, for example, a large number of small ring members are actually scattered on a plane to realize a random arrangement can be used.

  Next, in the method of forming a random pattern having the above configuration, when the maximum outer dimension of the dot portion is about 7.5 μm and the total area of the required dot portion is about 30% of the area of the unit region. Preferably, the value of the reference distance “s” is about 9 μm.

  In this case, the plurality of dot portions are randomly arranged at least at a distance of about 9 μm or more. Therefore, irregularities are formed on the surface of the light reflecting layer according to the random pattern, and the light reflecting layer further forms When light is reflected, it is possible to prevent the occurrence of interference fringes in the reflected light. Further, when a plurality of dot portions are formed on the resin film according to the random pattern, it is possible to prevent the resin film from peeling off.

  Next, in the method of forming a random pattern having the above configuration, when the maximum outer dimension of the dot portion is about 10 μm and the total area of the required dots is about 30% of the area of the unit region, Desirably, the value of the distance "s" is about 13.5 μm.

  In this case, the plurality of dot portions are randomly arranged at least at a distance of about 13.5 μm or more. Therefore, irregularities are formed on the surface of the light reflecting layer according to the random pattern, and the light reflection is further performed. When light is reflected by the layer, it is possible to prevent the occurrence of interference fringes in the reflected light. Further, when a plurality of dot portions are formed on the resin film according to the random pattern, it is possible to prevent the resin film from peeling off.

  Next, a method of creating a random pattern having the above configuration, wherein the plurality of dot portions are arranged irregularly in correspondence with a color filter formed by arranging coloring elements of three primary colors. Preferably, the unit area is substantially the same area as a display dot area corresponding to one coloring element or a single pixel area formed by collecting three primary color elements.

  Next, in the method for manufacturing a mask according to the present invention, in a method for manufacturing a mask in which a plurality of dot portions functioning as a light-transmitting portion or a light-shielding portion are irregularly arranged, a step of creating random pattern data; Forming a non-patterned light-shielding layer on a base material, and having the step of patterning the light-shielding layer based on the random pattern data to form the plurality of dot portions, The step of creating is performed by the method of creating a random pattern having the configuration described above.

  According to the method for creating a random pattern having the above-described configuration, a plurality of dot portions constituting the random pattern can be prevented from being arranged too close to each other or arranged in an overlapping manner. If a plurality of dot portions in the mask for use, for example, the arrangement of a plurality of holes is determined, and further patterning is performed using this exposure mask with respect to a resin film formed on a base material made of glass or the like, this resin A sufficiently randomized uneven pattern can be formed on the film. In addition, at this time, it is possible to prevent the plurality of dot portions from being too close to each other or overlapping, thereby preventing the resin film from being easily peeled off from the base material.

  Next, a method for manufacturing an electro-optical device according to the present invention includes a substrate, a resin layer formed on the substrate and having irregularities on its surface, and a light reflecting layer formed on the resin layer. And a method for manufacturing an electro-optical device having an electro-optical material layer provided on the light reflecting layer, wherein the step of forming irregularities on the surface of the resin layer comprises the method of manufacturing a mask described above. It is formed using a mask manufactured by using.

  With respect to a mask manufactured using the method for manufacturing a mask having the above-described configuration, a plurality of dot portions are arranged without being too close to each other and in a sufficiently randomized state. When irregularities are formed on the surface of the resin layer, the irregularities are formed in a sufficiently randomized state without approaching each other too much. If the unevenness of the resin layer is formed so as not to be too close to each other, the resin layer can be hardly peeled off from the substrate. In addition, if the irregularities of the resin layer can be sufficiently randomized, it is possible to reliably prevent the occurrence of interference fringes in light reflected by the light reflecting layer formed on the resin layer or light transmitted through the resin layer. .

  In the method of manufacturing an electro-optical device having the above configuration, the electro-optical material may be a liquid crystal. The electro-optical device thus formed is a so-called liquid crystal device. This liquid crystal device can be used, for example, as a display device for displaying images such as characters, numbers, figures, and the like. The liquid crystal device includes a simple matrix type liquid crystal device using no active element, an active matrix type liquid crystal device using a two-terminal switching element such as a TFD (Thin Film Diode) as an active element, and a TFT (Thin Film Type). For example, an active matrix type liquid crystal device using a three-terminal switching element such as a transistor as an active element, or a liquid crystal device having various other configurations can be considered.

Next, a random pattern creation program according to the present invention is a random pattern creation program in which a plurality of dot portions are arranged irregularly,
(A) means for randomly arranging the plurality of dot portions on an XY coordinate in a unit area in the random pattern,
(B) means for continuously arranging an auxiliary area having the same shape as the unit area and the same arrangement of the dot portions around the unit area in the unit area;
(C) means for selecting one target dot portion from a plurality of dot portions included in the unit area;
(D) means for calculating a distance “d” between each of the plurality of surrounding dot portions existing around the noted dot portion and the noted dot portion;
(E) means for comparing each of the plurality of calculated distances “d” with a reference distance “s”;
(F) When d ≦ s is present among the plurality of surrounding dot portions, the XY coordinates of the surrounding dot portions are determined in the X direction, the Y direction, or both the X and Y directions with respect to the target dot portion. Means for performing an operation to separate the surrounding dots corresponding to the auxiliary area at the same time as the distance, and (g) performing the steps (c) to (f) for all of the plurality of dot portions in the unit area. Means to repeat until all of the inter-unit distances “d” satisfy d> s,
This is a program for functioning as

  According to the method of creating a random pattern executed according to this program, the plurality of dot portions constituting the random pattern are mutually connected over the unit area of the random pattern and the entire area of the random pattern formed by connecting a plurality of the unit areas. It can be prevented from being placed too close. Therefore, for example, the arrangement of a plurality of dot portions in the exposure mask, for example, a plurality of holes, is determined in accordance with such a random pattern, and further, the resin film formed on a base material made of glass or the like is used for this exposure. If patterning is performed using a mask, a sufficiently random uneven pattern can be formed on the resin film. In addition, at this time, since the concave portions of the concave and convex pattern do not approach each other too much or overlap with each other, it is possible to prevent the resin film from being easily peeled off from the base material.

Next, another method of creating a random pattern according to the present invention is to create a random pattern in which the plurality of dot portions are arranged irregularly in correspondence with a color filter formed by arranging coloring elements of three primary colors. In the method,
(A) determining a random pattern in the unit area using a display dot area corresponding to the one color coloring element as a unit area;
(A) determining a random pattern in the unit area using the display dot area corresponding to the other one color element as a unit area;
(C) determining a random pattern in the unit area using a display dot area corresponding to the other one color element as a unit area;
(D) determining a random pattern in the unit area using an area obtained by joining the three types of random patterns as a unit area,
The four steps are, respectively,
(A) randomly arranging the plurality of dot portions on the XY coordinates in the unit area;
(B) a step of arranging an auxiliary area having the same shape as the unit area and the same arrangement of the dot portions around the unit area and continuously in the unit area;
(C) selecting one target dot portion from a plurality of dot portions included in the unit area;
(D) calculating a distance “d” between each of the plurality of peripheral dot portions existing around the noted dot portion and the noted dot portion;
(E) comparing each of the calculated plurality of distances “d” with a reference distance “s”;
(F) When d ≦ s among the plurality of surrounding dot portions, the XY coordinates of the surrounding dot portions are determined in the X direction, the Y direction, or both the X and Y directions with respect to the target dot portion. Performing a calculation of separating the surrounding dots corresponding to the auxiliary area at the same time as separating by a distance;
And (g) repeating the steps (c) to (f) for all of the plurality of dot portions in the unit area until all of the dot portion distances “d” satisfy d> s. (E) The reference distance “s” in the step (d) is set to the smallest value of the reference distances “s” in the steps (a), (b) and (c). It is characterized by.

  Here, in the method of creating a random pattern having the above configuration, (i) the diameter of one dot portion, (ii) the number of dot portions in the unit region, and (iii) the unit region exists in the unit region with respect to the area of the unit region. At least one of the four items of the total area density of the plurality of dot portions and (iv) the reference distance between a pair of dot portions adjacent to each other is one of the items (A), (A), and (C). It is desirable that each step be different.

  In the method of creating a random pattern having the above-described configuration, the three primary colors are a combination of three colors of R (red), G (green), and B (blue), or C (cyan), M (magenta), and Y (yellow). ) Is desirable.

Next, still another method of creating a random pattern according to the present invention is a method of forming a random pattern in which the plurality of dot portions are irregularly arranged in correspondence with a color filter formed by arranging coloring elements of three primary colors. In the creation method,
(A) determining a random pattern in the unit area using a display dot area corresponding to the two colored elements as a unit area;
(A) determining a random pattern in the unit area using the display dot area corresponding to the other one color element as a unit area;
(C) determining a random pattern in the unit area with an area obtained by joining the two types of random patterns as a unit area,
The three steps are, respectively,
(A) randomly arranging the plurality of dot portions on the XY coordinates in the unit area;
(B) a step of arranging an auxiliary area having the same shape as the unit area and the same arrangement of the dot portions around the unit area and continuously in the unit area;
(C) selecting one target dot portion from a plurality of dot portions included in the unit area;
(D) calculating a distance “d” between each of the plurality of peripheral dot portions existing around the noted dot portion and the noted dot portion;
(E) comparing each of the calculated plurality of distances “d” with a reference distance “s”;
(F) When d ≦ s among the plurality of surrounding dot portions, the XY coordinates of the surrounding dot portions are determined in the X direction, the Y direction, or both the X and Y directions with respect to the target dot portion. Performing a calculation of separating the surrounding dots corresponding to the auxiliary area at the same time as separating by a distance;
And (g) repeating the steps (c) to (f) for all of the plurality of dot portions in the unit area until all of the dot portion distances “d” satisfy d> s. And
(E) The reference distance "s" in the step (c) is set to the smallest value among the reference distances "s" in the steps (a), (b) and (c). I do.

  Here, in the method of creating a random pattern having the above configuration, the three primary colors are a combination of three colors of R, G, and B, and the step (A) corresponds to two colors of R and G; The process desirably corresponds to the B color. In the method of forming a random pattern having the above configuration, it is preferable that the diameter of the dot portion corresponding to the two colors of R and G is smaller than the diameter of the dot portion corresponding to the B color. In the method for creating a random pattern having the above configuration, it is preferable that the reference distance corresponding to two colors of R and G is smaller than the reference distance corresponding to B color.

  Further, in the method of forming a random pattern having the above configuration, the diameter of the dot portion corresponding to two colors of R and G is 9 μm, the diameter of the dot portion corresponding to B color is 10 μm, Preferably, the reference distance corresponding to two colors is 12 μm, and the reference distance corresponding to B color is 13.5 μm.

(First Embodiment of Random Pattern Creating Method and Mask Manufacturing Method)
Hereinafter, a method of forming a random pattern and a method of manufacturing a mask will be described. Prior to the description, first, a mask manufactured by the mask manufacturing method will be briefly described.

  1A and 1B show an embodiment of a mask. FIG. 1A is a plan view, and FIG. 1B is a sectional view taken along line AA. The mask 1 shown here has a base material 2 formed of a light-transmitting glass or a light-transmitting plastic or the like, and a light-shielding film 3 formed on the base material 2. The light shielding film 3 is provided with a plurality of light transmitting holes 4 as a plurality of dot portions. Considering the case of exposing an object to be exposed, for example, a resist, using the mask 1, the exposure light is irradiated from the substrate 2 side and passes through the hole 4 as shown by an arrow B in FIG. The size L1 × L2 of the entire area of the mask 1 is determined according to the structure of the exposure apparatus, and is, for example, about 450 mm × 550 mm.

  When a hole is used as the dot portion, light that has passed through the hole is irradiated on an object to be exposed, for example, a resist. If the resist is a positive type, the exposed portion becomes soluble and becomes a hole after development. On the other hand, if the resist is a negative type, the exposed portion becomes insoluble and remains as a real portion after development in a projecting manner. Therefore, depending on the material of the object to be exposed and the shape of the object to be exposed after development, the dot portion may be a hole, that is, a light-transmitting portion, or conversely, an island-like real portion, that is, a light-shielding portion. .

  In FIG. 1A, the plurality of holes 4 are irregularly arranged in a plane, that is, randomly arranged. In the figure, in order to show the holes 4 in an easy-to-understand manner, the holes 4 are drawn with a larger number and a smaller number than the actual number. However, in reality, the holes 4 have a very small maximum outer diameter of, for example, about 7 to 10 μm. The number is also larger than the state shown in the figure, resulting in a higher distribution density.

  Further, in the figure, the hole 4 is circular, but may be a hexagon as shown in FIG. 2 or another polygon. In the case of the maximum outer diameter as described above, a circle indicates the diameter, and a polygon indicates the diagonal diameter D1 in FIG. In the following description, the hole 4 is exemplified as a dot portion, but the description can be applied to a case where the dot portion is a polygon.

  In FIG. 1A, as described above, the arrangement pattern of the plurality of holes 4 is random in a plane, but according to the present invention, the arrangement pattern of the plurality of holes 4 After the arrangement of the plurality of holes 4 existing in the area A0 is randomly set, the unit areas A0 are connected in a plane to form the plurality of holes 4 in the entire area of the mask 1. Is done. That is, the arrangement of the holes 4 in the entire area of the mask 1 is formed by repeating the random arrangement of the holes 4 in the unit area A0.

  The area of the unit area A0 can be arbitrarily set as desired. However, considering the case where the mask 1 is used as a mask for forming a concavo-convex pattern on the surface of a light reflection layer in a display device, the unit area A0 is It is desirable to set in association with a display dot which is a minimum unit of display. For example, the unit area A0 can be set to substantially the same area as the display dot. Also, three color elements corresponding to the three primary colors for color display, such as R (red), G (green), B (blue), C (cyan), M (magenta), and Y (yellow), are used. Considering the case where color display is performed, the unit area A0 can be set to be substantially the same as the area of one pixel formed by a group of three display dots corresponding to three color elements.

Hereinafter, a method of manufacturing the mask 1 shown in FIGS. 1A and 1B will be described. FIG. 3 shows an example of a manufacturing apparatus for performing the method of manufacturing a mask.
The manufacturing apparatus includes a CPU 11 for performing a series of calculations for creating a random pattern, a ROM 12 for storing fixed information that does not need to be rewritten, a RAM 13 for temporarily storing various data, a keyboard, a mouse, and the like. An input device 14, a video display device 16 such as a CRT (Cathode Ray Tube) or a flat panel display, a memory 17 storing a first file 18a and a second file 18b, and a surface of an exposure object 19 by an exposure light R0. An exposure device 21 for drawing an appropriate pattern, that is, a pattern. The above components are connected to each other by a bus 20.

  In the first file 18a, a program 22 for making each of the above-described elements function for creating a random pattern, the original data 23 of the random pattern, and how the unit area A0 (see FIG. 1A) is connected. The array condition data 24 as such data is stored. The array condition data 24 indicates, for example, whether to connect the unit areas A0 as shown in FIG. 4A, to connect them as shown in FIG. 4B, or to adopt another connecting method. This is the data to be displayed.

In the original data 23, a plurality of dot portions are randomly arranged in an area of an appropriate size by using a random function or dispersing a plurality of dot members on a coordinate memory. This is data indicating the state as XY coordinate values.
The original data is a certain degree of random dot arrangement data, but in some cases a regular dot arrangement is included in the data.

  Further, when the two unit areas A0 shown in FIG. 1A are connected in a plane, the original data includes a plurality of dots in which the distance between dots is too small in the area near the boundary line between the areas. This is data of a random pattern in which parts are formed or overlap each other.

  In the second file 18b, an area 26 for storing the size of the unit area A0 in FIG. 1A, an area 27 for storing the size of the dot part, and the number of the dot part are stored. , An area 29 for storing a reference value “s” of the distance between the dot parts, and the like.

  Hereinafter, the mask manufacturing process performed by the apparatus shown in FIG. 3 will be described with reference to the flowchart shown in FIG. In the following description, a case where a hole is formed as a dot portion will be exemplified.

  In a process P1 of FIG. 5, a light-shielding material 3 such as Cr is laminated on the surface of the base material 2 of FIG. Here, the base material 2 is formed in a square, a rectangle, or any other desired planar shape when viewed from the direction of arrow C. Next, in a process P2 in FIG. 5, a resist (not shown) is applied on the light shielding layer 3. Next, in step P3, the CPU 11 of FIG. 3 stores the random pattern data stored in a predetermined storage location in the memory 17, that is, the data in which a plurality of holes are randomly arranged, at the coordinate value of the center of the hole. (X0, Y0), (X1, Y1),... (Xn, Yn) are supplied to and stored in the memory of the exposure apparatus 21.

  Next, in step P4, the exposure device 21 performs exposure, that is, optical writing, at the coordinate positions (X0, Y0), (X1, Y1),... (Xn, Yn), and further performs development. A plurality of holes as dot portions are randomly formed in the resist. Then, using the resist as a mask, the light shielding layer 3 is etched in the process P5 to form a plurality of holes as dot portions inside the light shielding layer 3. The plurality of holes formed at this time are also randomly arranged in a plan view.

  Next, in step P6, by removing the resist, the mask 1 in which the light shielding layer 3 in which the plurality of holes 4 are randomly arranged is formed on the surface of the base material 2 as shown in FIG. It is made. Whether or not the plurality of holes 4 as dot portions are formed in a completely random state in the mask 1 thus manufactured is determined by the light writing process in the exposure process using the exposure apparatus 21 in the process P4 in FIG. Whether the random pattern data is completely randomized, in other words, the random pattern data (X0, Y0), (X1, Y1),... (Xn, Yn) supplied to the exposure apparatus 21 in the process P3 is completely random. Depends on whether

  If, in the mask 1 formed as shown in FIG. 1, the arrangement state of the plurality of holes 4 is not completely random but partially regular, the mask 1 is used. When an uneven pattern is formed on the surface of the light reflecting layer, interference fringes may be generated in light reflected by the light reflecting layer, and optical characteristics may be degraded. Further, if there is a plurality of holes 4 in which the interval between the holes is too small, when the mask 1 is used to form irregularities on the surface of the resin film, the interval between the concave portions becomes too small. There is a possibility that the resin film may be peeled off at the portion.

In order to solve these problems, the data of the random pattern supplied to the exposure apparatus 21 in the process P3 is sufficiently random data, that is, a plurality of holes are arranged so as not to be too close to each other and without overlapping. is necessary.
Hereinafter, a method for generating such a sufficiently random pattern will be described with reference to the flowchart shown in FIG.

  First, the operator inputs each data such as the size of the unit area A0 in FIG. 1A, the diameter of a hole as a dot portion, the number of holes, the reference value “s” of the distance between holes, and the like. Input through The CPU 11 of FIG. 3 stores the above data in a predetermined storage location in the second file 18b of FIG. 3 in step S11 of FIG.

  Next, in step S12, the number of holes and the unit area size are cut out from the original data 23 in the first file 18a in FIG. 3 to determine primary random data for one unit area A0. At this time, which part of the original data is cut out can be freely determined. As described above, the plurality of holes 4 are linearly and randomly arranged in the unit area A0.

  Next, in step S13, auxiliary areas are joined around one unit area A0. For example, as shown in FIG. 4A or FIG. 4B, the auxiliary area 32 is connected around the unit area 31 of interest. At this time, the shape of the auxiliary region 32 is the same as the unit region A0, and the arrangement state of the plurality of holes in the auxiliary region 32 is the same as the unit region A0. The joining mode at this time is selected from the array condition data 24 in the first file 18a in FIG. The operator may specify which arrangement to select through the input device 14 or the CPU 11 may automatically select the arrangement according to the program 22.

  The data connected as described above is stored as XY coordinate data in the RAM 13 in FIG. 3, that is, drawn. The drawing data may be stored in a predetermined storage location in the memory 17 as needed. Further, the arrangement state of the plurality of holes 4 at this time may be displayed as an image on the screen of the image display device 16.

  Next, in step S14, the CPU 11 selects a hole of interest from a plurality of holes included in the unit area 31. Then, in step S15, the distance “d” between the target hole and the holes existing around the target hole is calculated one by one. Then, the calculated distance “d” is compared with a predetermined reference distance “s”.

  As a result of the comparison, when there is a peripheral hole determined to satisfy d ≦ s (YES in step S16), the process proceeds to step S17, and the XY coordinate values of the peripheral hole are determined by a predetermined distance in both the X and Y directions. , For example, 0.5 μm at a time, so that d> s. At this time, the separating direction may be only the X direction or only the Y direction. At the same time, in step S18, the hole in the auxiliary area 32 corresponding to the moved peripheral hole also moves. Regarding the peripheral hole determined as d> s in step S16 (NO in step S16), the position is maintained without being corrected.

  Thereafter, in step S19, all holes existing in the unit area 31 of interest are selected as holes of interest, and the above-described position correction processing is performed on a plurality of peripheral holes existing around the hole of interest. When the processing for all holes is completed (YES in step S19), it is determined that the arrangement state of all holes in the unit area 31 of interest is random (step S20).

  Thereafter, the random data in the unit area 31 determined in this manner is connected in a plane in step S21, so that the random data relating to the entire area of the random pattern having the desired size is coordinated on the XY coordinates. Is determined as By arranging a plurality of holes 4 according to the data of the random pattern thus formed, the holes 4 are completely arranged at random, and there is also a case where the distance between the holes becomes too small. Gone. In particular, when the unit areas A0 in FIG. 1A are connected, there is a possibility that a portion where the hole interval becomes too narrow may occur near the boundary of the unit areas, but the program shown in FIG. According to this, not only the unit area, but also the hole positions in the surrounding area, that is, the auxiliary area, are taken into consideration, so that a random arrangement near the boundary of the unit area is also desirable.

(Embodiment of manufacturing method of electro-optical device)
Hereinafter, an embodiment of a method for manufacturing an electro-optical device according to the present invention will be described. In particular, an exposure mask used for forming irregular reflection irregularities on the surface of a light reflection layer provided in a liquid crystal device as an electro-optical device is manufactured using the random pattern creation program according to the present invention. The case will be described as an example.

  First, a liquid crystal device will be briefly described. In the present embodiment, a so-called transflective liquid crystal device capable of realizing both a reflective display and a transmissive display, and an active matrix type liquid crystal device using a TFD (Thin Film Diode) element as an active element is exemplified. However, it goes without saying that the liquid crystal device to which the present invention can be applied is not limited to the embodiment.

  In FIG. 7, the liquid crystal device 41 has a liquid crystal panel 42 and a lighting device 43 attached thereto. The liquid crystal panel 42 is formed by bonding a first substrate 44a and a second substrate 44b with an annular seal member 46. As shown in FIG. 8, a gap maintained by a spacer 54, a so-called cell gap 52, is formed between the first substrate 44a and the second substrate 44b. A layer 53 is formed.

  In FIG. 8, the first substrate 44a has a first base member 51a formed of light-transmitting glass, light-transmitting plastic, or the like. A resin layer 55 is formed on the liquid crystal side surface of the first base material 51a, and a reflective layer 56 is formed thereon. A light-shielding layer 57 is formed on the reflective layer 56, and R, G, and B color elements 58 are formed in a predetermined planar arrangement between the light-shielding layers 57 when viewed in the direction of arrow H. . A color filter 60 is constituted by the plurality of coloring elements 58. An overcoat layer 59 is formed on the light-shielding layer 57 and the coloring elements 58, a strip-shaped transparent electrode 61a is formed thereon, and an alignment film 62a is formed thereon. The alignment film 62a is subjected to an alignment process, for example, a rubbing process, whereby the alignment of the liquid crystal molecules near the alignment film 62a is determined. In addition, a polarizing plate 63a in FIG. 7 is attached to the outer surface of the first base member 51a by bonding or the like.

  In FIG. 8, the resin layer 55 has a first layer 55a and a second layer 55b laminated thereon. These layers can be formed of the same material. On the surface of the first layer 55a, a plurality of concave portions 64 as dot portions are irregularly arranged in a plane as viewed in the direction of arrow H, that is, randomly arranged. Therefore, irregularities are formed on the surface of the second layer 55b stacked on the first layer 55a, corresponding to the concave portions 64 and the convex portions adjacent thereto. The irregularities formed on the surface of the first layer 55a are in a rough state, and smooth irregularities can be obtained by laminating the second layer 55b thereon. By providing the unevenness on the surface of the second layer 55b, that is, the surface of the resin layer 55, the unevenness is also formed on the surface of the reflective layer 56 laminated on the resin layer 55. Due to the presence of the unevenness, the light incident on the reflection layer 56 is reflected as scattered light.

  One strip-shaped transparent electrode 61a extends in the direction perpendicular to the paper surface of FIG. 8, and an interval substantially equal to the width of the light shielding layer 57 is provided between adjacent electrodes 61a. Thus, the plurality of electrodes 61a are formed in a stripe shape when viewed from the arrow H direction.

  The coloring element 58 is composed of three primary colors of color display, R (red), G (green), and B (blue). The coloring elements 58 of these colors are formed in a predetermined plane arrangement, for example, a vertical stripe arrangement shown in FIG. 10, a mosaic arrangement shown in FIG. 14, a delta arrangement shown in FIG. ing.

  The vertical stripe arrangement in FIG. 10 is an arrangement in which coloring elements 58 of the same color are arranged in the vertical direction in the figure. Further, the mosaic arrangement in FIG. 14 is an arrangement in which the color of the coloring elements 58 sequentially and cyclically changes in both the vertical and horizontal directions in the figure. The delta arrangement in FIG. 18 is an arrangement in which the coloring elements 58 are arranged so as to be located at the vertices of a triangle, and the colors in the horizontal direction sequentially and cyclically change. Note that various arrangements of the coloring elements 58 have been proposed in addition to the above three types, and an appropriate arrangement is selected as necessary.

  In FIG. 8, a second substrate 44b facing the first substrate 44a has a second base member 51b formed of light-transmitting glass, light-transmitting plastic, or the like. On the liquid crystal side surface of the second substrate 51b, a linear line wiring 66, a TFD element 67 as an active element, and a transparent dot electrode 61b are formed. Further, an alignment film 62b is formed on these elements, and an alignment process, for example, a rubbing process is performed on the alignment film 62b, whereby the alignment of the liquid crystal molecules near the alignment film 62b is determined. The rubbing direction of the alignment film 62a on the first substrate 44a side and the rubbing direction of the alignment film 62b on the second substrate 44b side intersect at an appropriate angle according to the characteristics of the liquid crystal. Further, a polarizing plate 63b in FIG. 7 is attached to the outer surface of the second base member 51b by bonding or the like.

  As shown in FIG. 7A, the dot electrode 61b in FIG. 8 is formed in a dot shape close to a square or a rectangle, and is connected to the line wiring 66 via the TFD element 67. In FIG. 7A, the dot electrodes 61b and the like formed on the second substrate 44b side are indicated by solid lines, and the strip-shaped electrodes 61a formed on the first substrate 44a side are indicated by chain lines. FIG. 8 corresponds to a cross-sectional view taken along line EE in FIG.

  As shown in FIG. 7A, the strip electrodes 61a on the first substrate 44a extend in a direction perpendicular to the line wiring 66 on the second substrate 44b, and are spaced apart from each other in a direction perpendicular thereto. They are formed in parallel, that is, as stripes as a whole. Each strip-shaped electrode 61a is formed so as to face a plurality of dot electrodes 61b arranged in a row in a direction perpendicular to the line wiring 66. An area where the dot electrode 61b and the strip electrode 61a overlap constitutes a display dot D which is a minimum unit of display.

  In FIG. 8, openings 68 for light passage are provided in the reflection layer 56 corresponding to the individual display dots D. The openings 68 are configured to allow the reflection layer 56 to have a function of transmitting light. Instead of providing the openings 68, the thickness of the reflection layer 56 is reduced, and the function of reflecting light and the light May be provided with both functions of transmitting light.

  Each coloring element 58 is provided corresponding to the display dot D. In the case of monochrome display without using the coloring elements 58, one pixel is formed by one display dot D. However, in the case of a structure in which color display is performed using the three coloring elements 58 as in the present embodiment, , R, G and B form one pixel.

  As shown in FIG. 9, the TFD element 67 is formed by connecting a first TFD element 67a and a second TFD element 67b in series. The TFD element 67 is formed, for example, as follows. That is, first, the first layer 66a of the line wiring 66 and the first metal 71 of the TFD element 67 are formed by TaW (tantalum tungsten). Next, the second layer 66b of the line wiring 66 and the insulating film 72 of the TFD element 67 are formed by anodizing. Next, the third layer 66c of the line wiring 66 and the second metal 73 of the TFD element 67 are formed by, for example, Cr (chromium).

  The second metal 73 of the first TFD element 67a extends from the third layer 66c of the line wiring 66. Further, the dot electrode 61b is formed so as to overlap the tip of the second metal 73 of the second TFD element 67b. Considering that an electric signal flows from the line wiring 66 to the dot electrode 61b, the electric signal flows in the first TFD element 67a in the order of the second electrode 73 → the insulating film 72 → the first metal 71 along the current direction. On the other hand, in the second TFD element 67b, an electric signal flows in the order of the first metal 71 → the insulating film 72 → the second metal 73.

  That is, a pair of electrically opposite TFD elements is connected in series between the first TFD element 67a and the second TFD element 67b. Such a structure is generally called a back-to-back structure, and a TFD element having this structure has a larger structure than a structure in which a TFD element includes only one TFD element. It is known that stable characteristics can be obtained.

  In FIG. 7, the second substrate 44b has an overhang 47 extending outside the first substrate 44a, and wirings 39 and terminals 38 are formed on the surface of the overhang 47 on the first substrate 44a side. One driving IC 37a and two driving ICs 37b are mounted in an area where these wirings 39 and terminals 38 are gathered by an ACF (Anisotropic Conductive Film) (not shown).

The wiring 39 and the terminal 38 are formed simultaneously when the line wiring 66 and the dot electrode 61b are formed on the second substrate 44b. The line wiring 66 extends as it is over the overhanging portion 47 to form a wiring 39, which is connected to the driving IC 37a.
Further, a spherical or cylindrical conductive material (not shown) is mixed in the seal material 46 for bonding the first substrate 44a and the second substrate 44b. After the strip-shaped electrode 61a formed on the first substrate 44a is routed to the sealing material 46 on the first substrate 44a, the wiring 39 on the second substrate 44b is passed through the conductive material in the sealing material 46. It is connected to the. Thus, the strip electrode 61a on the first substrate 44a is connected to the driving IC 37b on the second substrate 44b.

  In FIG. 7, a lighting device 43 disposed opposite to an outer surface of a first substrate 44 a constituting the liquid crystal panel 42 includes, for example, a rectangular plate-shaped light guide 81 formed of transparent plastic. , And an LED 82 as a point light source. A light reflection sheet (not shown) can be attached to the surface of the light guide 81 opposite to the liquid crystal panel 42. Further, a light diffusion sheet (not shown) can be attached to a surface of the light guide 81 facing the liquid crystal panel 42. Further, a prism sheet (not shown) can be further mounted on the light diffusion sheet.

  Although three LEDs 82 are used in the present embodiment, one LED 82 may be used as needed, or a plurality of LEDs 82 other than three may be used. Further, a linear light source such as a cold cathode tube can be used instead of a point light source such as an LED.

  Hereinafter, the operation of the liquid crystal device having the above configuration will be described.

  When the external light such as sunlight or indoor light is sufficient, the external light is taken into the liquid crystal panel 42 through the second substrate 44b as shown by an arrow F in FIG. After that, the light is reflected by the reflection film 56 and supplied to the liquid crystal layer 53.

  On the other hand, when the external light is insufficient, the LED 82 (see FIG. 7) constituting the lighting device 43 is turned on. At this time, the light emitted from the LED 82 in the form of dots is introduced from the light entrance surface 81a of the light guide 81 into the inside of the light guide 81, and thereafter, the surface facing the liquid crystal panel 42, that is, the surface from the light exit surface 81b. It emits in a shape. In this way, the light emitted from various parts of the light emitting surface 81b is supplied to the liquid crystal layer 53 as planar light through the opening 68 formed in the reflection film 56 as shown by an arrow G in FIG.

  While light is supplied to the liquid crystal layer 53 as described above, the liquid crystal panel 42 is controlled by the driving ICs 37a and 37b (see FIG. 7), and for example, a scanning signal is supplied to the line wiring 66, and at the same time, For example, a data signal is supplied to the strip electrode 61a. At this time, when the TFD element 67 attached to the specific display dot is selected (that is, turned on) according to the potential difference between the scanning signal and the data signal, the video signal is written to the liquid crystal capacitance in the display dot, and When the TFD element 67 is in a non-selected state (that is, in an off state), the signal is stored in the display dot and drives the liquid crystal layer in the display dot.

  In this way, the liquid crystal molecules in the liquid crystal layer 53 are controlled for each display dot, and therefore, the light passing through the liquid crystal layer 53 is modulated for each display dot D. The light thus modulated passes through the polarizing plate 63b on the second substrate 44b side, so that an image such as a character, a numeral, a figure, or the like is displayed in the effective display area of the liquid crystal panel 42. Display performed using external light reflected by the reflective layer 56 is a reflective display. In addition, a display performed using light from the illumination device 43 is a transmissive display. In the present embodiment, the reflection type display and the transmission type display are automatically selected according to the user's request or according to a change in the external environment.

  When performing the above-mentioned reflective display using the reflective layer 56 of FIG. 8, it is desirable that the unevenness provided on the surface of the reflective layer 56 be sufficiently randomly arranged in a plane as viewed in the direction of arrow H. This is because, if there is a regular arrangement even in a part with respect to the arrangement of the unevenness, interference fringes are generated in the reflected light, and the display may be difficult to see.

  In addition, it is desirable that the distance between the concave portions among the irregularities provided on the surface of the reflective layer 56 is not too small. That is, it is desirable that the distance between the concave portions among the concave and convex portions of the resin layer 55 is not too small. This is because if the distance between the concave portions is too small, the resin layer 55 is likely to peel off from the base material 51a at that portion.

  Hereinafter, a method of manufacturing the electro-optical device having the above-described configuration will be described with reference to a flowchart of FIG. In FIG. 22, steps P31 to P34 are steps for forming the second substrate 44b of FIG. Steps P41 to P48 are steps for forming the first substrate 44a of FIG. Steps P51 to P58 are steps for completing the liquid crystal device by combining those substrates.

  In the manufacturing method according to the present embodiment, the first substrate 44a and the second substrate 44b shown in FIG. 7 are not formed one by one, but the first substrate 44a is large enough to form a plurality of first substrates 44a. A plurality of first substrates 44a are simultaneously formed using a first mother substrate having a large area. As for the second substrate 44b, a plurality of second substrates 44b are simultaneously formed using a second mother substrate having an area large enough to form the plurality of second substrates 44b. The first mother substrate and the second mother substrate are formed of, for example, transparent glass, transparent plastic, or the like.

  First, in step P31 of FIG. 22, the TFD element 67 and the line wiring 66 of FIG. 7A are formed on the surface of the second mother substrate. Next, in step P32, the dot electrode 61b of FIG. 7A is formed by photolithography and etching using ITO as a material. Next, in Step P33, the alignment film 62b of FIG. 8 is formed by coating, printing, or the like, and in Step P34, the alignment film 62b is subjected to an alignment process, for example, a rubbing process. As described above, a plurality of second substrates 44b are formed on the second mother base material.

  Next, in step P41 in FIG. 22, the first layer 55a of the resin layer 55 in FIG. 8 is formed on the surface of the first mother substrate by photolithography using, for example, a photosensitive resin as a material. Fine irregularities are formed on the surface of the first layer 55a. Thereafter, a second layer 55b of the same material is thinly applied on the first layer 55a to form a resin layer 55.

  Next, in step P42 of FIG. 22, the reflection layer 56 of FIG. 8 is formed by photolithography and etching using, for example, Al or an Al alloy. At this time, by forming an opening 68 for each display dot D, a light reflecting portion R and a light transmitting portion T are formed. Next, in step P43, the light-shielding layer 57 of FIG. 8 is formed in a predetermined pattern (for example, a lattice pattern that fills the periphery of the plurality of display dots D) by photolithography and etching using, for example, Cr as a material. I do.

  Next, in a process P44 of FIG. 22, the coloring elements 58 of FIG. 8 are sequentially formed for each of R, G, and B colors. For example, a coloring material formed by dispersing a pigment or dye of each color in a photosensitive resin is formed in a predetermined arrangement by photolithography. Next, in Step P45, the overcoat layer 59 in FIG. 8 is formed by photolithography using a photosensitive resin such as an acrylic resin or a polyimide resin.

  Next, in step P46 of FIG. 22, the band-shaped electrode 61a of FIG. 8 is formed by photolithography and etching using ITO as a material. Further, in step P47, an alignment film 62a of FIG. 8 is formed. A rubbing process is performed. As described above, a plurality of first substrates 44a are formed on the first mother substrate.

  Then, in a process P51 in FIG. 22, the first mother substrate and the second mother substrate are bonded. As a result, a large-area panel structure having a structure in which the first mother substrate and the second mother substrate are bonded to each other in the region of the liquid crystal device with the seal member 46 of FIG. 7 interposed therebetween is formed.

Next, the sealing material 46 (see FIG. 7) included in the large-area panel structure formed as described above is cured in step P52 to bond the two mother substrates.
Next, in step P53, the panel structure is subjected to primary cutting, that is, a primary break, so that a medium-area panel structure including a plurality of liquid crystal panels 42 in FIG. Are formed. An opening 46a is formed in an appropriate place in the sealing material 46 in advance, and when the strip-shaped panel structure is formed by the primary break, the opening 46a of the sealing material 46 is exposed to the outside.

  Next, in step P54 of FIG. 22, liquid crystal is injected into each liquid crystal panel through the opening 46a of the sealing material, and after the injection is completed, the opening 46a is sealed with resin. Next, in step P55, a second cutting, that is, a secondary break is performed, and individual liquid crystal panels 42 shown in FIG. 7 are cut out from the strip-shaped panel structure.

  Next, in a process P56 in FIG. 22, the polarizing plates 63a and 63b are attached to the liquid crystal panel 42 in FIG. 7 by sticking. Next, in step P57, the driving ICs 37a and 37b in FIG. 7 are mounted, and in step P58, the lighting device 43 in FIG. 7 is attached. Thus, the liquid crystal device 41 is completed.

  In the method of manufacturing a liquid crystal device as described above, in the resin layer forming step of step P41, a plurality of concave portions 64 as dot portions are randomly arranged in a plane on the surface of the first layer 55a of the resin layer 55 of FIG. For formation, the first layer 55a is exposed and developed using the exposure mask 1 shown in FIG. At this time, a concave portion 64 is formed on the surface of the first layer 55a corresponding to the dot portion of the mask 1, that is, the hole 4.

  As described above, the plurality of holes 4 formed in the mask 1 are formed by the drawing process of the exposure device 21 included in the mask manufacturing apparatus shown in FIG. The random pattern data (X0, Y0), (X1, Y1),... (Xn, Yn) supplied to the exposure device 21 are sufficiently randomized by the control shown in FIG. The holes 4 are arranged so that adjacent ones do not get too close to each other.

  Regarding the mask used in the method of manufacturing the liquid crystal device according to the present embodiment, the unit area A0 in FIG. 1 is colored in each of R, G, and B as illustrated in FIG. 10, FIG. 14, and FIG. It is determined in relation to the arrangement of the element 58. Specifically, the area of the unit area A0 is set to be substantially the same as the area of one pixel which is a group of three coloring elements 58 corresponding to the three colors of R, G, and B.

  Therefore, in step S11 in FIG. 6, the area of one pixel as described above is read as the unit area size. In step S12, one pixel size is cut out from the original data of the random pattern and set as primary random data. In step S13, the auxiliary area is joined around the pixel of interest in accordance with the arrangement of the coloring elements 58 employed.

  For example, when the vertical stripe arrangement of FIG. 10 is adopted, as shown in FIG. 11, a unit area 31 of interest is set corresponding to one pixel composed of three coloring elements 58 of R, G, and B. Is done. Also, as shown in FIG. 12, the primary random data of one pixel, that is, the hole 4 as the data randomly arranged in the first order, is cut out by one pixel from the original data and assigned to the unit area 31. Can be Further, as shown in FIG. 13, a plurality of auxiliary regions 32 having the same shape and the same hole arrangement as the pixel 31 are connected around the pixel 31 of interest as one unit of R, G, and B.

  Then, in step S14, one attention hole 4 is selected from the plurality of holes 4 in the attention pixel 31, and in step S15, each of the attention hole 4 and the plurality of surrounding holes 4 around the attention hole 4 is selected. Is calculated. Then, the d value is compared with the reference distance “s”.

  If there is a surrounding hole 4 where d ≦ s (YES in step S16), the data of the surrounding pixel 4 in the target pixel 31 and the auxiliary region 32 is corrected in a direction away from the target hole 4 (steps S17 and S18). ), The process is repeated until all holes 4 satisfy the condition of d ≦ s. As a result, the finally obtained arrangement data of the holes 4 for the target pixel 31 indicates that the distance between the holes is always greater than the reference value “s” and that the vicinity of the boundary line between the target pixel 31 and the auxiliary region 32 The distance between the holes is maintained larger than the reference value “s”.

  The random data for one pixel created in this way is connected by a required area, whereby random pattern data having a size corresponding to the entire area of the mask 1 in FIG. 1 is created.

  When the mosaic arrangement as shown in FIG. 14 is adopted as a method of arranging the coloring elements 58, as shown in FIG. 15, one of the R, G, and B coloring elements 58 is formed. The unit area 31 and the auxiliary area 32 are determined by the pixel. Further, as shown in FIG. 16, a hole 4 is cut out as primary random data for one pixel. Further, as shown in FIG. 17, a plurality of auxiliary regions 32 having the same shape and the same hole arrangement as the pixel 31 are connected to each other around the pixel 31 of interest as a unit of R, G, and B.

  When a delta arrangement as shown in FIG. 18 is employed as a method of arranging the coloring elements 58, as shown in FIG. 19, one of the R, G, and B coloring elements 58 is used. The unit area 31 and the auxiliary area 32 are determined by the pixel. In addition, as shown in FIG. 20, a hole 4 as primary random data for one pixel is cut out. Further, as shown in FIG. 21, a plurality of auxiliary regions 32 having the same shape and the same hole arrangement as the pixel 31 are connected around the pixel 31 of interest as R, G, and B as one unit.

  As described above, if the unit area of the random pattern is set so as to correspond to one pixel of the color filter formed by the coloring element 58, that is, the black mask in which the boundary of the unit area is formed by the light shielding layer 57. , It is possible to prevent a variation from occurring for each pixel between the light reflection characteristic of the random pattern and the color display characteristic of the coloring element 58.

  It is clear from the above description that when referring to a plurality of dot portions provided in a random pattern, the dot portion is conceptual, and is not a specific hole or a specific hole. It is not a real dot-shaped real part. When a mask is manufactured by an exposure apparatus based on this random pattern, holes for light transmission and dot-like real portions for light shielding are formed at positions corresponding to the plurality of dot portions. Become.

  In the above-described embodiment, a circular portion is considered as the dot portion 4. However, a hexagonal portion as shown in FIG. 2 or another polygonal portion can be considered as the dot portion 4.

  When designing a random pattern or a mask, the size and number of the dot portions 4 are important design factors. When the size of the dot portion 4 is specified, its maximum outer size may be specified. The maximum outer size is the diameter of the dot portion 4 if it is a circular portion, and the maximum outer size if it is a polygonal portion. Has a diagonal dimension indicated by reference numeral D1 in FIG.

When the hexagonal portion shown in FIG. 2 is adopted as the dot portion 4, if the maximum outer dimension D1 of the dot portion 4 is 7.5 μm and the width D2 is 6 μm, the area is about 33 μm ² . When deciding how many dot sections 4 to cut out in the unit area A0 when creating a random pattern, the total area of the necessary dot sections 4 is determined by what is the area of the unit area A0 of the mask 1 in FIG. Set whether it should be%. For example, if the required total area of the dot section 4 is set to be about 30% of the unit area A0, specifically, 31% or 32%, one area of the dot section 4 is about 33 μm ^{2 as} described above. Therefore, the required number of dot portions 4 can be obtained by calculation.

  According to the experiment of the inventor, as shown in FIG. 8, when the resin layer 55 has a two-layer structure including the first layer 55a and the second layer 55b, (1) the dot portion 4 is formed as shown in FIG. A hexagonal portion is adopted, (2) D1 = 7.5 μm, D2 = 6 μm, the required total area of the dot section 4 is set to 31% of the unit area A0, and (3) a reference for the distance between dots It has been found that setting the value to s = 9 μm is effective in arranging the plurality of dot portions 4 randomly without being too close to each other.

  By the way, the resin layer 55 shown in FIG. 8 is not limited to a two-layer structure, and may have a one-layer structure. According to the experiment of the inventor, when this one-layer structure is adopted, (1) the hexagonal portion of FIG. 2 is adopted as the dot part 4, (2) D1 = 10 μm, D2 = 9 μm, and Setting the required total area of the dot portions 4 to 32% of the unit area A0 and (3) setting the reference value of the distance between dots to s = 13.5 μm causes the plurality of dot portions 4 to be too close to each other. It has been found to be effective without any, yet sufficiently random arrangement.

(Other embodiments)
In the above embodiment, one pixel including the three color elements 58 of R, G, and B is used as the unit area of the random pattern. However, the unit area may be any other area. For example, one of the display dots D, which is the minimum unit of display, can be set as the minimum unit.

  Further, in the above embodiment, the coloring element 58 has three colors of R, G, and B, but the coloring element 58 may be a combination of C (cyan), M (magenta), and Y (yellow).

  In the above embodiments, the present invention is applied to a liquid crystal device that performs color display using the coloring element 58. However, the present invention is directed to a liquid crystal device that performs single color display and a monochrome display that does not use the coloring element 58. The present invention can also be applied to a liquid crystal device that performs.

  Although the liquid crystal device described above is an active matrix type liquid crystal device using a TFD element as an active element, the present invention relates to a simple matrix type liquid crystal device not using an active element and a three-terminal type such as a TFT. The present invention can also be applied to an active matrix type liquid crystal device using the switching element as an active element.

  In the above embodiments, the liquid crystal device is exemplified as the electro-optical device. However, as the electro-optical device, in addition to the liquid crystal device, an EL (Electro Luminescence) device, a plasma display device, an EPD (Electrophoretic Display), An FED (Field Emission Display: field emission display) and the like are also conceivable.

(Second Embodiment of Random Pattern Creating Method and Mask Manufacturing Method)
Next, another embodiment of the method for producing a random pattern and the method for producing a mask according to the present invention will be described. In the embodiment described above, as described with reference to FIG. 6, a random pattern is created using one pixel, which is a group of display dots of three colors such as R, G, B, C, M, and Y, as a unit area. did. In the embodiment described below, a random pattern is created by selecting a size other than one pixel as a unit area.

  FIG. 23 shows a flowchart in the case where such a random pattern creating method is implemented using a computer, for example, the computer shown in FIG. Further, in this method of creating a random pattern, as shown in FIG. 24, a random pattern is created corresponding to a color filter 60 in which R, G, and B color elements 58 are arranged in a vertical stripe. I do. In the following description, the display dots corresponding to the R, G, and B color components will be referred to as R display dots, G display dots, and B display dots, respectively. In the following embodiments, holes are formed as dot portions of a random pattern.

Returning to FIG. 23, in step S31, a random pattern in the R display dot is determined after setting the R display dot as a unit area. Specifically, the R display dot is set as a unit area, and the processing of steps S11 to S20 in FIG. 6 is executed. More specifically, first, in step S11 in FIG. 6, the size corresponding to one display dot is read as the size of the unit area. Also, the hole diameter of the hole as the dot portion is read as “a1”, the number of holes in the unit area is “m1”, the area density is “n1”, and the reference distance between the holes is “s1”. Here, the area density means that the area of one hole is “a”, the number of holes in a unit area is “m”, and the area of the unit area is “A”.
a × m / A
Is a numerical value represented by

  Next, in step S12 of FIG. 6, one display dot is cut out from the original data of the random pattern and set as primary random data. In step S13, the unit area 31 corresponding to the R display dot in FIG. 24 is set as the unit area of interest, and the auxiliary area 32 is connected around the unit area of interest. Further, as shown in FIG. 25, primary random data for one display dot, that is, holes 4 as data randomly arranged in the first order, are cut out from the original data by one display dot to form a unit area. 31. Further, as shown in FIG. 26, a plurality of auxiliary regions 32 having the same shape and the same hole arrangement as the unit region 31 are joined around the unit region 31 of interest.

  Next, in step S14 of FIG. 6, one attention hole 4 is selected from the plurality of holes 4 in the attention unit area 31, and further in step S15, the attention hole 4 and the plurality of The distance “d” between each of the peripheral holes 4 is calculated. Then, the d value is compared with the reference distance “s1”.

  If there is a surrounding hole 4 that satisfies d ≦ s1 (YES in step S16), the data of the surrounding hole 4 in the attention unit area 31 and the auxiliary area 32 is corrected in a direction away from the attention hole 4 (step S17 and step S17). S18) The process is repeated until all the holes 4 satisfy the condition of d ≦ s. As a result, the finally obtained arrangement data of the holes 4 for the attention unit area 31 is such that the distance between the holes is always larger than the reference value “s1” and the boundary line between the attention unit area 31 and the auxiliary area 32 Even in the vicinity, the distance between the holes is maintained larger than the reference value “s1”. Thus, the random data for one display dot corresponding to the R display dot is properly created, and the step S31 in FIG. 23 ends. The created random data is stored in the storage unit of the computer.

  Next, in step S32 of FIG. 23, the G display dot of FIG. 24 is set as a unit area, and a random pattern within the G display dot is determined. Specifically, one of the G display dots is set as a unit area, and the processing of steps S11 to S20 in FIG. 6 is executed. This series of processing is the same as the processing in step S31 described above, and thus detailed description is omitted.

  The data read into the processing unit of the computer in the process for the G display dots is as follows: the hole diameter of the hole as the dot portion is “a2”, the number of holes in the unit area is “m2”, and the area density is “n2”. , And the reference distance between the holes is “s2”. The numerical values of the hole diameter “a2”, the number of holes “m2”, the area density “n2”, and the reference distance “s2” are the hole diameter “a1”, the number of holes “m1”, The numerical values of the area density “n1” and the reference distance “s1” can all be the same, or some of them can be different values.

  When a series of processing from step S11 to step S20 in FIG. 6 is completed in step S32, random data for one display dot corresponding to the G display dot in FIG. 24 is appropriately created and stored in the storage unit.

  Next, in step S33 of FIG. 23, the B display dot of FIG. 24 is set as a unit area, and a random pattern within the B display dot is determined. Specifically, one of the B display dots is set as a unit area, and the processing of steps S11 to S20 in FIG. 6 is executed. This series of processing is the same as the processing in step S31 and step S32 described above, and a detailed description thereof will be omitted.

  The data read into the processing unit of the computer in the process for the B display dot is as follows: the hole diameter of the hole as the dot portion is “a3”, the number of holes in the unit area is “m3”, and the area density is “n3”. , And the reference distance between the holes is “s3”. The numerical values of the hole diameter “a3”, the number of holes “m3”, the area density “n3”, and the reference distance “s3” are the hole diameter “a1”, the number of holes “m1”, The area density “n1”, the reference distance “s1”, and the numerical values of the hole diameter “a2”, the number of holes “m2”, the area density “n2”, and the reference distance “s2” in the case of the G display dot in step S32 are all the same. Or some of them can have different values.

  When the series of processing from step S11 to step S20 in FIG. 6 is completed in step S33, random data for one display dot corresponding to the B display dot in FIG. 24 is properly created and stored in the storage unit.

  As described above, when the random data corresponding to each of the R, G, and B display dots is individually created, the process proceeds to step S34 in FIG. 23, where the R, G, and B display dots are connected. An area, that is, an area corresponding to one pixel is set as a unit area, and a random pattern in one pixel is determined. Specifically, an area corresponding to one pixel is set as a unit area, and the processing of steps S11 to S20 in FIG. 6 is executed. This series of processing is the same as the processing in step S31 and step S32 described above, and a detailed description thereof will be omitted.

  When step S20 in FIG. 6 is completed in step S34 in FIG. 23, random data in one pixel formed by joining R, G, and B display dots is determined. Thereafter, in step 35 of FIG. 23, the desired processing of the whole integration is determined by the same processing as in step S21 of FIG. 6, that is, by combining the created random data of one pixel two-dimensionally.

  In the case where the determination processing of step S16 of FIG. 6 is performed in step 34 of FIG. 23, when the reference distances s1 to s3 between the holes in each of the steps S31 to S33 are all set to be the same, the reference of step 34 It is desirable that the same value as the values of s1 to s3 be selected for the distance s4.

  On the other hand, the reference distances s1 to s3 between the holes in each of the steps S31 to S33 may be set to different values. In this case, it is desirable that the reference distance s4 in step 34 be set to the smallest value among those s1 to s3. If the reference distance s4 is set to a value other than the smallest value among s1 to s3, a hole interval may be excessively widened in the calculation process of the computer, so that an appropriate calculation result may not be obtained. There is. Further, there is a possibility that a large load is applied to the arithmetic processing of the computer. As a result, there is a possibility that the versatility regarding the creation of random data is reduced. On the other hand, when the reference distance s4 is set to the smallest value among s1 to s3 as in the present embodiment, creation of random data becomes more general and versatility is increased.

(Third Embodiment of Random Pattern Creating Method and Mask Manufacturing Method)
Next, still another embodiment of the method for producing a random pattern and the method for producing a mask according to the present invention will be described. In the embodiment described above, as described with reference to FIG. 23, a random pattern is created using each of the three colors of display dots such as R, G, B, C, M, and Y as a unit area. In the embodiment described below, the method of selecting the unit area is modified.

  FIG. 27 shows a flowchart in a case where such a random pattern creating method is implemented using a computer, for example, the computer shown in FIG. Further, in the method of creating a random pattern, as shown in FIG. 28, a random pattern is created corresponding to a color filter 60 in which R, G, and B color elements 58 are arranged in a vertical stripe. I do. Also in this embodiment, a case is considered where holes are formed as dot portions of a random pattern.

  Returning to FIG. 27, in step S41, an area corresponding to two display dots of R display dots and G display dots is set as a unit area, and a random pattern in the unit area is determined. Specifically, the area of the total of the R display dots and the G display dots is set as a unit area, and the processing of steps S11 to S20 of FIG. 6 is executed. More specifically, first, in step S11 of FIG. 6, the size corresponding to two display dots is read as the size of the unit area.

  In the present embodiment, the same number of holes and the same area density are formed in both the R display dots and the G display dots. Therefore, in step S11, the hole diameter of the hole as the dot portion is read as "a1", the number of holes in the unit area is "m1", the area density is "n1", and the reference distance between holes is "s1".

  Next, in step S12 of FIG. 6, two display dots are cut out from the original data of the random pattern and set as primary random data. In step S13, the unit area 31 corresponding to the two R display dots and the G display dots in FIG. 28 is set as the unit area of interest, and the auxiliary area 32 is connected around the unit area of interest. Further, as shown in FIG. 29, primary random data for two display dots, that is, holes 4 as data randomly arranged in the first order, are cut out from the original data by two display dots to form a unit area. 31. Further, as shown in FIG. 30, a plurality of auxiliary areas 32 having the same shape and the same hole arrangement as the unit area 31 are connected around the unit area 31 of interest as two units of two display dots.

  Next, in step S14 of FIG. 6, one attention hole 4 is selected from the plurality of holes 4 in the attention unit area 31, and further in step S15, the attention hole 4 and the plurality of The distance “d” between each of the peripheral holes 4 is calculated. Then, the d value is compared with the reference distance “s1”.

  If there is a surrounding hole 4 that satisfies d ≦ s1 (YES in step S16), the data of the surrounding hole 4 in the attention unit area 31 and the auxiliary area 32 is corrected in a direction away from the attention hole 4 (step S17 and step S17). S18) The process is repeated until all the holes 4 satisfy the condition of d ≦ s. As a result, the finally obtained arrangement data of the holes 4 in the unit area of interest 31 indicates that the distance between the holes is always larger than the reference value “s1” and that the vicinity of the boundary between the pixel of interest 31 and the auxiliary area 32 However, the distance between the holes is maintained larger than the reference value “s1”. As described above, the random data for the two display dots corresponding to the R display dot and the G display dot is properly created, and the step S41 in FIG. 27 ends. The created random data is stored in the storage unit of the computer.

  Next, in step S42 of FIG. 27, after setting the B display dot of FIG. 28 as a unit area, a random pattern in the B display dot is determined. Specifically, one of the B display dots is set as a unit area, and the processing of steps S11 to S20 in FIG. 6 is executed. This series of processing is the same as the processing in step S41 described above, and a detailed description thereof will be omitted. The data read into the processing unit of the computer in the process for the B display dot is as follows: the hole diameter of the hole as the dot portion is “a2”, the number of holes in the unit area is “m2”, and the area density is “n2”. , And the reference distance between the holes is “s2”.

  In general, the light scattering characteristics of the R and G colors are similar, while the light scattering characteristics of the B color are significantly different from those of the R and G colors. Specifically, it is known that the B color has a smaller scattering angle than the R color and the G color. In order to compensate for such a difference in scattering characteristics, in the present embodiment, a2 is set so that a2> a1 with respect to the hole diameter, and the number m2 of holes is set so that n2 = n1 with respect to the area density. Further, in relation to the setting of the hole diameter as a2> a1, the distance s2 between the holes is set to satisfy s2 <s1. For example, regarding R and G display dots, a1 = 9 μm (diameter) and s1 = 12 μm. For the G display dots, a2 = 10 μm (diameter) and s2 = 13.5 μm.

  When the series of processes from step S11 to step S20 in FIG. 6 is completed in step S42, random data for one display dot corresponding to the B display dot in FIG. 28 is appropriately created and stored in the storage unit. As described above, when the random data corresponding to the R and G display dots and the random data corresponding to the B display dot are individually created, the process proceeds to step S43 in FIG. A region where display dots are connected, that is, a region corresponding to one pixel is set as a unit region, and then a random pattern in the region of one pixel is determined. Specifically, an area corresponding to one pixel is set as a unit area, and the processing of steps S11 to S20 in FIG. 6 is executed. This series of processing is the same as the processing in step S41 and step S42 described above, and a detailed description thereof will be omitted.

  When step S20 in FIG. 6 is completed in step 43 in FIG. 27, random data in one pixel formed by joining R, G, and B display dots is determined. Then, in step 44 of FIG. 27, the same process as step S21 of FIG. 6, that is, a process of connecting the created random data of one pixel in a plane, is performed to determine a desired random pattern of the overall integration. I do.

  In the present embodiment, the distance between holes s1 for R and G and the distance between holes s2 for B are set to satisfy s2> s1. Therefore, when performing the determination process of step S16 of FIG. 6 in step 43 of FIG. , 43, the reference distance s is desirably set to the smaller value of s1 and s2. This makes the creation of random data more common and increases versatility.

(Modification)
In FIG. 27, the processing relating to the R and G display dots (step S41) is performed prior to the processing relating to the B display dots (step S42). Conversely, the processing relating to the B display dots may be performed first. .

  The method for forming a random pattern according to the present invention is suitably used for forming a random pattern on a mask. Further, the mask manufacturing method of the present invention is suitably used when forming a random pattern in a mask. In addition, the method for manufacturing an electro-optical device according to the present invention is suitable for manufacturing an electro-optical device such as a liquid crystal device, an organic EL device, and an electron-emitting device (such as a field emission display and a surface-conduction electron-emitter display). Used. The program for creating a random pattern according to the present invention is suitably used when creating a random pattern using a computer.

It is a figure which shows an example of the mask manufactured by the manufacturing method of the mask which concerns on this invention, (a) is a top view, (b) is sectional drawing. It is a figure showing an example of a dot part. It is a block diagram showing an example of an apparatus which can perform a manufacturing method of a mask concerning the present invention. FIG. 4 is a diagram schematically illustrating an operation performed by the apparatus in FIG. 3, and is a diagram illustrating a method of connecting unit areas. It is a flowchart showing one embodiment of a manufacturing method of a mask concerning the present invention. 5 is a flowchart illustrating an embodiment of a method for creating a random pattern according to the present invention. FIG. 2 is a diagram illustrating a liquid crystal device which is an example of an electro-optical device manufactured by a method of manufacturing an electro-optical device according to the invention. FIG. 8 is a cross-sectional view illustrating a cross-sectional structure of the liquid crystal device of FIG. 7. FIG. 8 is a perspective view illustrating an example of a TFD element that is an example of an active element used in the liquid crystal device of FIG. 7. FIG. 3 is a plan view illustrating an example of a color filter. FIG. 11 is a diagram illustrating a relationship between the color filter of FIG. 10 and a unit area. FIG. 11 is a diagram illustrating a state in which primary random data is assigned to a unit area corresponding to the color filter of FIG. 10. FIG. 11 is a diagram illustrating a state in which an auxiliary area is connected to a unit area corresponding to the color filter of FIG. 10. It is a top view which shows another example of a color filter. FIG. 15 is a diagram illustrating a relationship between the color filter of FIG. 14 and a unit area. FIG. 15 is a diagram illustrating a state where primary random data is allocated to a unit area corresponding to the color filter of FIG. 14. FIG. 15 is a diagram illustrating a state in which an auxiliary area is connected to a unit area corresponding to the color filter of FIG. 14. It is a top view which shows another example of a color filter. FIG. 19 is a diagram showing a relationship between the color filter of FIG. 18 and a unit area. FIG. 19 is a diagram showing a state in which primary random data is assigned to a unit area corresponding to the color filter of FIG. FIG. 19 is a diagram illustrating a state in which an auxiliary region is connected to a unit region corresponding to the color filter of FIG. 18. FIG. 4 is a process chart showing one embodiment of a method for manufacturing an electro-optical device according to the present invention. 9 is a flowchart illustrating another embodiment of a method for creating a random pattern according to the present invention. FIG. 9 is a diagram illustrating another example of the relationship between the color filter and the unit area. 25 is a diagram illustrating a state where primary random data is allocated to the unit area in FIG. 24. FIG. FIG. 26 is a diagram illustrating a state in which an auxiliary area is connected to the unit area in FIG. 25. 9 is a flowchart illustrating still another embodiment of the method for creating a random pattern according to the present invention. FIG. 11 is a diagram illustrating still another example of the relationship between the color filter and the unit area. FIG. 29 is a diagram showing a state where primary random data is allocated to the unit area of FIG. 28. FIG. 30 is a diagram illustrating a state in which an auxiliary area is connected to the unit area in FIG. 29.

Explanation of reference numerals

1: mask, 2: base material, 3: light shielding layer, 4: hole (dot portion), 17: memory, 18a, 18b: file, 19: exposure object, 31: unit area, 32: auxiliary area, 41: Liquid crystal device (electro-optical device), 42: liquid crystal panel, 43: lighting device, 44a, 44b: substrate, 46: sealing material, 51a, 51b: base material, 53: liquid crystal layer, 55: resin layer, 55a: first Layer, 55b: second layer, 56: reflective layer, 57: light shielding layer, 58: coloring element, 59: overcoat layer, 60: color filter, 61a, 61b: electrode, 64: recess (dot portion, 66: line) Wiring, 67: TFD element, A0: unit area

Claims (18)

In a method of creating a random pattern formed by arranging a plurality of dot portions irregularly,
(A) randomly arranging the plurality of dot portions on XY coordinates in a unit area in the random pattern;
(B) a step of arranging an auxiliary area having the same shape as the unit area and the same arrangement of the dot portions around the unit area and continuously in the unit area;
(C) selecting one target dot portion from a plurality of dot portions included in the unit area;
(D) calculating a distance “d” between each of the plurality of peripheral dot portions existing around the noted dot portion and the noted dot portion;
(E) comparing each of the calculated plurality of distances “d” with a reference distance “s”;
(F) When d ≦ s among the plurality of surrounding dot portions, the XY coordinates of the surrounding dot portions are determined in the X direction, the Y direction, or both the X and Y directions with respect to the target dot portion. Performing a calculation of separating the surrounding dots corresponding to the auxiliary area at the same time as separating by a distance;
(G) repeating the steps (c) to (f) for all of the plurality of dot sections in the unit area until all of the dot section distances “d” satisfy d>s;
A method for creating a random pattern, comprising: 2. The method according to claim 1, wherein the dot portion is a circular portion or a polygonal portion. 3. The method according to claim 1, wherein the step of randomly arranging the plurality of dot portions on the XY coordinates at random is performed using a random function. 4. The device according to claim 1, wherein a maximum outer dimension of the dot portion is about 7.5 μm, and a total area of the required dot portion is about 30% of an area of the unit region. In one embodiment, the value of the reference distance “s” is about 9 μm. 4. The at least one of claims 1 to 3, wherein a maximum outer dimension of the dot part is about 10 μm, and a total area of the required dot part is about 30% of an area of the unit region. , Wherein the value of the reference distance “s” is about 13.5 μm. A method for creating a random pattern according to at least one of claims 1 to 5, wherein
In a method of creating a random pattern, the plurality of dot portions are arranged irregularly in correspondence with a color filter in which coloring elements of three primary colors are arranged,
The method according to claim 1, wherein the unit area is substantially the same as a display dot area corresponding to one coloring element or one pixel area formed by collecting three primary color elements. In a method for manufacturing a mask in which a plurality of dot portions functioning as a light transmitting portion or a light shielding portion are arranged irregularly,
Creating random pattern data;
A step of forming a pattern-free light-shielding layer on the substrate,
Patterning the light shielding layer based on the data of the random pattern to form the plurality of dot portions,
7. A method of manufacturing a mask, wherein the step of creating data of the random pattern is performed by the method of creating a random pattern according to at least one of claims 1 to 6. A substrate, a resin layer formed on the substrate and having irregularities on its surface, a light reflection layer formed on the resin layer, and an electro-optical material provided on the light reflection layer A manufacturing method for manufacturing an electro-optical device having a layer and
A method for manufacturing an electro-optical device, wherein the step of forming irregularities on the surface of the resin layer is performed using a mask manufactured using the method for manufacturing a mask according to claim 7. 9. The method according to claim 8, wherein the electro-optical material is a liquid crystal. A program for creating a random pattern formed by arranging a plurality of dot portions irregularly, comprising:
(A) means for randomly arranging the plurality of dot portions on an XY coordinate in a unit area in the random pattern,
(B) means for continuously arranging an auxiliary area having the same shape as the unit area and the same arrangement of the dot portions around the unit area in the unit area;
(C) means for selecting one target dot portion from a plurality of dot portions included in the unit area;
(D) means for calculating a distance “d” between each of the plurality of peripheral dot portions existing around the noted dot portion and the noted dot portion;
(E) means for comparing each of the plurality of calculated distances “d” with a reference distance “s”;
(F) When d ≦ s among the plurality of surrounding dot portions, the XY coordinates of the surrounding dot portions are determined in the X direction, the Y direction, or both the X and Y directions with respect to the target dot portion. Means for performing an operation to separate the surrounding dots corresponding to the auxiliary area at the same time as the distance, and (g) performing the steps (c) to (f) for all of the plurality of dot portions in the unit area. Means for repeating until all the inter-unit distances “d” satisfy d> s,
A program for creating a random pattern to function as. In a method of creating a random pattern, the plurality of dot portions are arranged irregularly in correspondence with a color filter in which coloring elements of three primary colors are arranged,
(A) determining a random pattern in the unit area using a display dot area corresponding to the one color coloring element as a unit area;
(A) determining a random pattern in the unit area using the display dot area corresponding to the other one color element as a unit area;
(C) determining a random pattern in the unit area using a display dot area corresponding to the other one color element as a unit area;
(D) determining a random pattern in the unit area using an area obtained by joining the three types of random patterns as a unit area,
The four steps are, respectively,
(A) randomly arranging the plurality of dot portions on the XY coordinates in the unit area;
(B) a step of arranging an auxiliary area having the same shape as the unit area and the same arrangement of the dot portions around the unit area and continuously in the unit area;
(C) selecting one target dot portion from a plurality of dot portions included in the unit area;
(D) calculating a distance “d” between each of the plurality of peripheral dot portions existing around the noted dot portion and the noted dot portion;
(E) comparing each of the calculated plurality of distances “d” with a reference distance “s”;
(F) When d ≦ s among the plurality of surrounding dot portions, the XY coordinates of the surrounding dot portions are determined in the X direction, the Y direction, or both the X and Y directions with respect to the target dot portion. Performing a calculation of separating the surrounding dots corresponding to the auxiliary area at the same time as separating by a distance;
And (g) repeating the steps (c) to (f) for all of the plurality of dot portions in the unit area until all of the dot portion distances “d” satisfy d> s. (E) The reference distance “s” in the step (d) is set to the smallest value of the reference distances “s” in the steps (a), (b) and (c). A method for creating a random pattern characterized by the following. In claim 11,
(I) diameter of one dot portion,
(Ii) the number of dot parts in the unit area,
(Iii) at least one of four items of a total area density of a plurality of dot parts existing in the unit area with respect to an area of the unit area, and (iv) a reference distance between a pair of adjacent dot parts. Is a method for creating a random pattern, which is different among the steps (A), (A) and (C). 13. The device according to claim 11, wherein the three primary colors are a combination of three colors of R (red), G (green), and B (blue), or a combination of three colors of C (cyan), M (magenta), and Y (yellow). A method for creating a random pattern, which is a combination of colors. In a method of creating a random pattern, the plurality of dot portions are arranged irregularly in correspondence with a color filter in which coloring elements of three primary colors are arranged,
(A) determining a random pattern in the unit area using a display dot area corresponding to the two colored elements as a unit area;
(A) determining a random pattern in the unit area using the display dot area corresponding to the other one color element as a unit area;
(C) determining a random pattern in the unit area with an area obtained by joining the two types of random patterns as a unit area,
The three steps are, respectively,
(A) randomly arranging the plurality of dot portions on the XY coordinates in the unit area;
(B) a step of arranging an auxiliary area having the same shape as the unit area and the same arrangement of the dot portions around the unit area and continuously in the unit area;
(C) selecting one target dot portion from a plurality of dot portions included in the unit area;
(D) calculating a distance “d” between each of the plurality of peripheral dot portions existing around the noted dot portion and the noted dot portion;
(E) comparing each of the calculated plurality of distances “d” with a reference distance “s”;
(F) When d ≦ s among the plurality of surrounding dot portions, the XY coordinates of the surrounding dot portions are determined in the X direction, the Y direction, or both the X and Y directions with respect to the target dot portion. Performing a calculation of separating the surrounding dots corresponding to the auxiliary area at the same time as separating by a distance;
And (g) repeating the steps (c) to (f) for all of the plurality of dot portions in the unit area until all of the dot portion distances “d” satisfy d> s. And
(E) The reference distance "s" in the step (c) is set to the smallest value among the reference distances "s" in the steps (a), (b) and (c). To create random patterns. 15. The method according to claim 14, wherein the three primary colors are a combination of three colors of R, G, and B, wherein the step (A) corresponds to two colors of R and G, and the step (A) corresponds to B color. A method for creating a random pattern characterized by the following. 16. The method according to claim 15, wherein a diameter of the dot portion corresponding to two colors of R and G is smaller than a diameter of the dot portion corresponding to B color. 17. The method according to claim 16, wherein the reference distance corresponding to two colors of R and G having the same hole density is smaller than the reference distance corresponding to B color. In claim 17,
The diameter of the dot portion corresponding to two colors of R and G is 9 μm, the diameter of the dot portion corresponding to B color is 10 μm,
A method for creating a random pattern, wherein the reference distance corresponding to two colors of R and G is 12 μm, and the reference distance corresponding to B color is 13.5 μm.

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