JP2004205427A - Analysis apparatus and analysis condition setting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To facilitate work for selecting and setting an analysis condition suitable for a purpose of each user when an analysis apparatus is used. <P>SOLUTION: A plurality of the recorded analysis conditions corresponding to a plurality of user information are collated with the user information identified based on inputted user authentication information. The analysis condition corresponding to the identified user information is extracted from the plurality of the analysis conditions. The extracted analysis condition is displayed on a monitor. The analysis condition is set based on the displayed analysis condition. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an analyzer for observing and analyzing a sample, and a method for setting analysis conditions.
[0002]
[Prior art]
In a device for observing or analyzing a sample using a medical analyzer, a physicochemical analyzer, an electron microscope, or the like, it is necessary to set analysis conditions in advance in order to perform observation and analysis appropriately.
[0003]
The analysis conditions include various setting parameters of the apparatus.For example, the observation conditions in the scanning electron microscope are not automatically determined by the analyzer according to the characteristics of the sample, but are determined by the user, that is, the operator's intention. There is known a technique for determining a combination with the conditions to be determined (for example, see Japanese Patent Application Laid-Open No. 2001-338603). On the other hand, the user who uses the analyzer has different purposes, and the conditions to be set in the device differ depending on the purpose.
[0004]
Since the analyzer is expensive, it is common practice that a plurality of persons use the analyzer in common. Then, conditions corresponding to a plurality of purposes of a plurality of persons are registered, and it becomes very difficult to select a condition suitable for one's analysis from the registered conditions. The above technique does not consider optimizing the analyzer according to the user, and has a problem in that the user is forced to make measurements under the analysis conditions that he / she wears.
[0005]
[Patent Document 1]
JP 2001-338603 A (page 3, FIG. 2)
[0006]
[Problems to be solved by the invention]
An object of the present invention is to facilitate the operation of selecting and setting analysis conditions suitable for each user when using an analyzer.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, analysis conditions are registered for each user. Conventionally, when displaying a registered analysis condition menu using information for specifying a user obtained as a result of a user authentication operation used for confirming the validity of a user, the analysis condition registered by the user in advance Only menus are displayed, analysis conditions necessary for the analysis are selected from the menu, and the selected conditions are immediately set in the analyzer.
[0008]
Further, the analysis condition can be freely changed by the user who has registered the analysis condition, and can be registered as a new analysis condition.
[0009]
Furthermore, users are classified into general users and system administrators, and the system administrator can maintain (register, correct, and delete) all registered contents for all users.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0011]
FIG. 1 is an apparatus configuration diagram of a scanning electron microscope which is an example of an embodiment of the present invention. The central processing unit, that is, the CPU 1 controls various control circuits of the scanning electron microscope. When the electron beam 23 is generated, the control signal from the CPU 1 controls the high voltage generation circuit 3, the filament circuit 4, and the bias circuit 5 via the DA converters 2a, 2b, 2c, so that the filament 15, the Wehnelt 16, An electron beam 23 is generated from an electron gun including the anode 17. An emission current detector 6 is connected to the high voltage generation circuit 3, and the information is fed back to the CPU 1 and used for control.
[0012]
Since the electron beam 23 generated by the above-mentioned electron gun does not always pass through the center of the electron lens system, correction is performed by the electron lens. The correction information from the CPU 1 is sent to the gun alignment coil control circuit 7 via the DA converter 2d, and controls the gun alignment coil 18 and the gun alignment coil 19.
[0013]
Next, the electron beam 23 is narrowed down by the converging lenses 20 and 21. Correction information from the CPU 1 is controlled by the convergent lens control circuit 8 via the DA converter 2e.
[0014]
The converged electron beam 23 passes through the objective movable diaphragm 9, the size of the electron beam spot is determined, and the sample 24 on the stage 25 is scanned by the action of the deflection coil 22. A scanning signal from the CPU 1 is sent to a scanning oscillation circuit 10 for controlling a scanning speed and the like and a deflection control circuit 11 for deflecting an electron beam via a DA converter 2f to control a deflection coil 22.
[0015]
By scanning the sample 24 with the electron beam 23, information signals of the sample 24 such as secondary electrons and reflected electrons are generated from the sample 24. In this embodiment, the case of the secondary electrons 26 will be described. However, the configuration of the reflected electrons may be similar to that of the secondary electrons except for the content of the information signal.
[0016]
The information signal of the sample 24 is detected by the secondary electron detector 14 and displayed on the CRT 12 through signal processing such as amplification in the display circuit 13. The CRT 12 also displays operation information of the scanning electron microscope such as analysis conditions sent from the CPU 1 to the display circuit 13. The CRT 12 also has an input function such as an analysis condition instruction.
[0017]
A personal computer, that is, a PC 28 is connected to the CPU 1 and has a function as an operation unit of the scanning electron microscope and a storage unit for acquired data.
[0018]
The above is the general configuration of the scanning electron microscope. In this embodiment, the user authentication unit 27 is further connected to the CPU 1. The user authentication unit 27 is a device that authenticates the validity of a user who uses the scanning electron microscope using a fingerprint, a USB token, an IC card, or the like. The user authentication unit 27 may be configured as a part of the PC 28 or as software. In this case, input of an instruction or screen display at the time of user authentication can be performed by the PC 28 instead of the CRT 12.
[0019]
In the case of the acceleration voltage, which is an example of the analysis conditions in the scanning electron microscope, an appropriate value suitable for the sample is determined by adjusting the high voltage generation circuit 3, the filament circuit 4, the bias circuit 5, the emission current detector 6, and the like. Is done.
[0020]
FIG. 2 is a functional block diagram showing a user authentication function executed by the user authentication unit 27. In the user authentication unit 27 shown in FIG. 1, the user authentication information such as the input user ID and the information registered in the user information storage unit 105 are collated by the collation unit 101. Use is licensed.
[0021]
As the user authentication information input by the user, there are various methods such as 1) user ID and password, 2) finger / fingerprint authentication, 3) iris authentication, 4) USB token, 5) IC card and a combination thereof. It can be arbitrarily selected.
[0022]
Different analysis conditions for each user are recorded in the analysis condition recording unit 104. The analysis condition menu corresponding to the user whose authentication is determined to be valid by the analysis condition read setting unit 102 is extracted from the analysis condition recording unit 104, and the analysis condition display processing unit 103 displays the analysis condition menu on the CRT 12.
[0023]
The user looks at the displayed analysis condition menu, selects an analysis condition that matches the analysis to be performed by the user, and sets the analysis condition in the analysis condition setting unit 106. The set analysis conditions are set, the analysis conditions are displayed on the CRT 12, and the user can immediately proceed to the analysis work. The above procedure will be described in detail below.
[0024]
FIG. 3 is a flowchart showing a user authentication processing procedure. The power of the user authentication unit 27 shown in FIG. 1 is turned on, the apparatus is started up, the user authentication processing procedure is started (step 301), and it is determined whether the user ID is valid or invalid in the collation unit 101 shown in FIG. (Step 302). If the determination is invalid, a display or an alarm is output to the CRT 12 (step 303), and the procedure ends.
[0025]
If the user ID is valid, the analysis condition menu of the ID is called from the analysis condition recording unit 104 shown in FIG. 2 (step 304). It is determined whether there are a plurality of called analysis conditions (step 305). If there are a plurality, the analysis condition menu is displayed on the CRT 12 (step 306).
[0026]
The user selects, from the analysis condition menu displayed on the CRT 12, an overview menu corresponding to the analysis condition matching the analysis to be performed (step 307), and determines whether or not the analysis condition item needs to be changed (step 307). 308). If the analysis conditions need to be changed, the analysis conditions are changed on the displayed change content setting screen (step 309). The user determines whether or not to register the changed analysis condition as a new analysis condition or not (step 310). When registering, the user is registered with a new name (step 311). On the other hand, the user sets the analysis conditions as the current analysis conditions (step 312), the analysis work is started (step 313), and the user authentication processing procedure ends (step 314).
[0027]
If the number of analysis conditions is one in step 305 described above, steps from step 306 to step 311 are omitted, and the analysis conditions are set in step 312. This allows the analysis work to start immediately.
[0028]
If it is not necessary to change the analysis condition selected in step 308 described above, steps from step 309 to step 311 are omitted, and the analysis condition is set in step 312. If the analysis conditions have been changed in the above-mentioned step 310 but are not newly registered, step 311 is omitted, and the analysis conditions are set in step 312.
[0029]
If there is no matching analysis condition, the closest analysis condition is selected in step 307, necessary correction is made in steps 308 and 309, and a new analysis condition is named and registered in steps 310 and 311. Thus, when the same analysis is performed in the next analysis, the new analysis conditions are recorded in the analysis condition recording unit 104, so that only the analysis conditions need to be selected, which is convenient.
[0030]
FIG. 4 is a configuration diagram showing a data configuration of the analysis condition recorded in the analysis condition recording unit 104. An analysis condition menu 402 is provided for each user registered in advance in the user menu 401. For example, in the figure, the analysis condition menu for the user 1 indicates that the analysis condition menu has analysis conditions 1 to m.
[0031]
For the analysis condition 1, the parameter menu 403 indicates that the parameter menu 403 has set values from parameter 1 to parameter n. In the figure, only the user 1 and the analysis condition 1 are described, but the same configuration applies to the user 2 to the user k and the analysis condition 2 to the analysis condition m.
[0032]
In the conventional analysis condition setting method, since the setting is registered sequentially in time series, it is difficult for a plurality of users to repeat the setting one after another, so that it is difficult to immediately select an analysis condition required by a certain user. However, by dividing the analysis conditions for each user as described above, it is possible to easily select the optimum analysis conditions.
[0033]
Further, since the user cannot read the analysis conditions of another user, there is an effect that confidentiality is maintained without being falsified by another person. Therefore, a single analyzer, for example, an expensive scanning electron microscope can be used by a plurality of companies, and the frequency of use of the device is increased, the use efficiency is improved, and the analysis cost is reduced. There is also the effect that it can be done.
[0034]
FIG. 5 to FIG. 7 are views showing examples of screens displayed on the CRT. FIG. 5 shows an example of the user authentication screen 501. The screen 501 displays a user ID input window 502, a password input window 503, and a login button 504.
[0035]
By inputting a user ID and a password from a keyboard or the like provided on the CRT and clicking a log-in button or the like, the user information is collated with user information registered in advance in the user information storage unit 105 shown in FIG. If they match, the user authentication is successful, and the user can use the analyzer. As a result, the analyzer can specify the user.
[0036]
FIG. 6 is an example of a display screen of the analysis condition menu shown in FIG. The analysis condition menu 602 displayed on the screen 601 is hierarchically displayed as “large classification”, “middle classification”, “small classification” according to the purpose of the user. The names of these categories can be arbitrarily set by the user.
[0037]
Further, since the analysis condition menu of another user is not displayed, only the analysis conditions registered only by the user are displayed as described above, and the user can easily search for necessary analysis conditions.
[0038]
FIG. 7 is a display screen example of a list of parameter menus and their set values shown in FIG. Above the parameter menu 702 displayed on the screen 701, the name of the analysis condition is displayed on the analysis condition name display section 703. The user confirms the validity of the parameter setting value of the analysis condition on this screen.
[0039]
If it is determined to be appropriate, the analysis condition of the displayed parameter setting value is set by clicking the setting button 705 or the like. To change a parameter, for example, the user clicks on a corresponding field of the parameter menu 702, inputs a value after the change, and clicks on a setting button 705, for example.
[0040]
To re-register the changed analysis conditions by overwriting without changing the name, the user clicks a setting button 705 or the like. When newly registering the analysis condition as another analysis condition, after changing the analysis condition name, the registration button 704 is clicked. Alternatively, the registration button 704 may be deleted, and the function of the registration button 704 may be integrated with the setting button 705.
[0041]
FIG. 8 is a flowchart of the processing procedure of the analysis condition management by the system administrator. FIG. 9 is an example of a display screen of the analysis condition management menu when the system administrator logs in. The system administrator can maintain, that is, register, modify, and delete the analysis menu for all users.
[0042]
8, as in FIG. 3, the user authentication unit 27 shown in FIG. 1 is turned on and the apparatus is started up to start an administrator menu (step 801), and the user ID is changed to the collation unit shown in FIG. At 101, it is determined whether it is valid or invalid (step 802). If the user ID is invalid, the display or warning is output (step 803), and the process ends.
[0043]
If the user ID is valid, it is determined whether or not the system administrator has logged in (step 804). If the user is the system administrator, the analysis condition management procedure is started, and the analysis condition management screen for all users is displayed on the CRT 12. (Step 805). The system administrator performs the maintenance work of the analysis condition menu with the authority (step 806), and ends (step 807).
[0044]
If the user who has logged in in step 804 is not the system administrator, the procedure proceeds to step 304 in the flowchart shown in FIG. 3 (step 808).
[0045]
FIG. 9 is a diagram showing an example of the analysis condition management screen 901 for the administrator displayed in step 805 of FIG. The analysis condition management screen 901 for the administrator displays the analysis condition menus of the users 1a to 1k, and displays any of the menus shown in FIG. And maintenance work such as registration, correction, and deletion can be performed.
[0046]
In the above embodiment, the scanning electron microscope has been described as an example, but the analyzer is not limited to this.
[0047]
According to this embodiment, when using the analyzer, the user can select a menu of analysis conditions suitable for the purpose from the analysis condition menu registered for each user. There is an effect that it can be easily performed.
[0048]
When multiple users share the device, the number of analysis conditions registered by each user increases, but similar but slightly different conditions increase, and the task of selecting the analysis condition menu that suits the purpose becomes increasingly complicated. It becomes. On the other hand, in the present invention, since the analysis condition menu can be managed for each user, the analysis condition menu can be enriched in a unified manner, and an effect that it is possible to realize an analyzer that is optimal for the purpose of the user can be realized. is there.
[0049]
In other words, despite the fact that the expensive analyzer must be shared by a plurality of users, the user has the effect of realizing usability as if it were his / her own device.
[0050]
In many cases, the user does not want to show his / her analysis condition menu to other users. However, according to the present invention, only the analysis condition menu registered by the user in advance is displayed for a specific user. This has the effect of maintaining confidentiality between the devices.
[0051]
【The invention's effect】
According to the present invention, when using an analyzer, a menu of analysis conditions suitable for the purpose can be selected from the analysis condition menu registered for each user, so that the task of selecting and setting the analysis conditions suitable for the purpose is easy. There is an effect that can be.
[Brief description of the drawings]
FIG. 1 is a device configuration diagram of a scanning electron microscope.
FIG. 2 is a functional block diagram showing a user authentication function executed by a user authentication unit 27;
FIG. 3 is a flowchart illustrating a user authentication processing procedure.
FIG. 4 is a configuration diagram showing a data configuration of analysis conditions recorded in an analysis condition recording unit.
FIG. 5 is a view showing an example of a user authentication screen displayed on a CRT.
FIG. 6 is a view showing an example of a screen of an analysis condition menu displayed on a CRT.
FIG. 7 is a view showing a screen example of a parameter menu of FIG. 4 displayed on a CRT and its setting values.
FIG. 8 is a flowchart of a processing procedure of analysis condition management by a system administrator.
FIG. 9 is a diagram showing an example of an analysis condition management screen 901 for an administrator.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... CPU, 12 ... CRT, 27 ... User authentication part, 28 ... PC, 101 ... Collation part, 102 ... Analysis condition read setting part, 103 ... Analysis condition display processing part, 104 ... Analysis condition recording part, 105 ... User information Storage unit, 106: Analysis condition setting unit.

Claims (6)

An analysis condition recording unit that records a plurality of analysis conditions corresponding to a plurality of user information; a matching unit that specifies user information based on the input user authentication information; and an analysis condition corresponding to the identified user information. An analysis condition reading setting unit that extracts from the analysis condition recording unit, a monitor that displays the extracted analysis conditions, and an analysis condition setting unit that sets the analysis conditions based on the displayed analysis conditions. Characteristic analyzer. 2. The analysis device according to claim 1, wherein the analysis condition recording unit is configured to change and record the analysis condition based on an instruction input when a part of the displayed analysis condition is changed. Characteristic analyzer. 2. The analysis device according to claim 1, wherein when the input user information indicates a system administrator, all analysis conditions recorded in the analysis condition recording unit can be displayed on the monitor. apparatus. A plurality of analysis conditions recorded in correspondence with a plurality of user information are collated with user information specified based on the input user authentication information, and the analysis conditions corresponding to the specified user information are compared with the plurality of analysis conditions. An analysis condition setting method, characterized in that the analysis conditions are extracted from the analysis conditions, the extracted analysis conditions are displayed on a monitor, and the analysis conditions are set based on the displayed analysis conditions. 5. The method according to claim 4, wherein when a part of the displayed analysis condition is changed, the analysis condition is changed and recorded based on an instruction input. 5. The method according to claim 4, wherein when the input user information indicates a system administrator, all the recorded analysis conditions can be displayed on the monitor.

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