JP2005053203A - Cutting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting device which improves processing precision at the same time extends the life time of a cutting blade without using a revolving ultrasonic oscillator. <P>SOLUTION: An ultrasonic radiant face of a Langevin type ultrasonic oscillator is arranged parallelly at the side face of the cutting blade 1. The center axis of the Langevin type ultrasonic oscillator is passed through between the side face of the cutting blade 1 and the ultrasonic radiant surface of the Langevin type ultrasonic oscillator and water is discharged from the ultrasonic radiant face. As the result, the water fills a space between the side face of the cutting blade 1 and the ultrasonic radiant face of the Langevin type ultrasonic oscillator and the ultrasonic vibration is efficiently propagated to the cutting blade 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

Detailed Description of the Invention

The present invention relates to a cutting device for cutting glass, ceramic, silicone, cemented carbide, and the like.

In general, in order to perform processing such as grooving or cutting on brittle materials such as glass, silicon wafer, silicon nitride, and hard metal, a thin ring-shaped cutting blade 1 as shown in FIG. The cutting blade 1 is sandwiched between the first flange 4a attached to the tip of the screw and the second flange 4b fitted to the threaded portion of the rotary spindle 3, and the fastening nut 5 is fixed to the threaded portion by screwing. The cutting blade 1 is rotated and processed at the outer peripheral cutting portion. Further, since the cutting resistance is reduced in ultrasonic cutting, the frictional heat of the cutting tool is reduced, the thermal distortion of the processed surface is reduced, the life of the cutting tool is extended, and the machining accuracy is improved. Ultrasonic cutting is described in detail in “Ultrasonic Handbook” (Maruzen Co., Ltd., published in 1999), pages 679-684.

Problems to be solved by the invention

In the past, many attempts have been made to apply ultrasonic vibrations to the cutting blade. However, the method tried in the past has been a method in which a part of the rotary spindle 2 is an ultrasonic vibrator as shown in FIG. That is, piezoelectric elements 6a and 6b are provided on the rotary spindle 2 to form an ultrasonic vibrator. Then, a high-frequency AC voltage is applied to the piezoelectric elements 6 a and 6 b from the ultrasonic oscillator 7 via the slip ring 8. As a result, ultrasonic vibration is excited in the rotating spindle 2 and this is transmitted to the cutting blade 1.
However, a slip ring is required to apply the AC voltage from the ultrasonic oscillator for exciting the ultrasonic vibration to the piezoelectric element of the ultrasonic vibrator of the rotary spindle 2, and the apparatus becomes complicated and expensive.
The slip ring is usually used at a rotational speed of 5000 rpm or less. Therefore, it cannot be used for the rotational speed of the rotating spindle 2 beyond that.
Furthermore, since it is necessary to attach an ultrasonic transducer to the rotary spindle 2, the existing cutting device cannot be used as it is.
In addition, since an ultrasonic vibrator is attached to the rotary spindle 2 and a high frequency voltage is applied, the temperature of the cutting blade rises and this is transmitted to the workpiece, so that there is a problem that the machining accuracy is deteriorated.
An object of the present invention is to provide a cutting device that solves the above-described problems, extends the life of the cutting blade, and improves processing accuracy.

Means for solving the problem

In order to achieve the above object, an ultrasonic vibrator is disposed in the vicinity of the cutting blade, and a cutting device is characterized in that a liquid flows between the cutting blade and the ultrasonic vibrator.
Then, the cutting device is characterized in that the radiation surface of the ultrasonic transducer is arranged in parallel with the surface of the cutting blade.
Further, the present invention provides a cutting device that discharges liquid from a part of the ultrasonic radiation surface of the ultrasonic transducer.
Further, the cutting device is characterized in that there are a plurality of holes in the ultrasonic wave emitting surface of the ultrasonic vibrator and the liquid is discharged from the holes.
Further, the present invention provides a cutting device characterized in that a device for measuring the temperature of the cutting blade and adjusting the temperature of the liquid is provided.
Further, the present invention provides a cutting device comprising a device for measuring the temperature of the workpiece and adjusting the temperature of the liquid.
In addition, the cutting device is characterized in that the vibration mode of the ultrasonic vibrator is longitudinal vibration.
Further, the present invention provides a cutting device characterized by a plurality of ultrasonic transducers. Further, the cutting device is characterized in that the ultrasonic vibrator has a plurality of oscillation frequencies.

This will be described in detail based on the embodiment of the present invention.
A first embodiment will be described with reference to FIGS.
FIG. 1A is a plan view of the cutting apparatus 1 showing the first embodiment as viewed from above, and FIG. 1B is a side view.

A state in which the cutting blade 1 is mounted on a rotary spindle 3 that transmits the rotational force of the rotary motor 2 of the cutting device is shown.
The cutting blade 1 is sandwiched between a first flange 4a attached to the tip of the rotary spindle 3 and a second flange 4b fitted to the first flange 4a, and is screwed to a threaded portion of the rotary spindle 3. The fastening nut 5 is fixed.

Two Langevin type ultrasonic transducers 9a, 9b, 9c, and 9d that are not in contact with the cutting blade 1 are attached to a safety carver (not shown) on both sides of the cutting blade 1, respectively. Here, the arrow in FIG. 1A indicates the direction of the flow of the water 10.
A high frequency AC voltage is applied to each Langevin type ultrasonic transducer 9a, 9b, 9c, 9d from the ultrasonic oscillators 7a, 7b, 7c, 7d through lead wires. Here, the frequency of the high-frequency AC voltage applied by the Langevin type ultrasonic transducers 9a, 9b, 9c, 9d is different. The ultrasonic oscillator 7a is about 20 Khz, the ultrasonic oscillator 7b is about 100 Khz, the ultrasonic oscillator 7c is about 200 Khz, and the ultrasonic oscillator 7d is about 2000 Khz. In the figure, the shapes of the Langevin type ultrasonic transducers 9a, 9b, 9c, and 9d are the same. However, since the respective ultrasonic vibrations are designed to efficiently oscillate, the actual shapes are different.

Here, the cutting blade 1 is composed of a circular substrate and an electrodeposited abrasive layer. The circular substrate is made of a metal plate such as a steel plate or aluminum, and a mounting hole for mounting on the rotary spindle is formed at the center.

Moreover, in order to form an electrodeposited abrasive grain layer on a circular substrate, a normal electroplating method can be used. That is, diamond abrasive grains are mixed with nickel sulfate liquid contained in a plating tank, and nickel plating is performed on a circular substrate in a plating liquid in which diamond abrasive grains are mixed with the nickel sulfate liquid. An electrodeposited abrasive layer composed of a fixed composite plating layer can be formed.

Next, the cutting method of this cutting device will be described. The rotary motor 2 is operated to cut a workpiece (not shown). The movement of the rotary motor 2 is transmitted to the rotary spindle 3 and the cutting blade 1 rotates. Almost simultaneously with the operation of the rotary motor 2, a high-frequency AC voltage is applied to the Langevin ultrasonic transducers 9a, 9b, 9c, 9d from the ultrasonic oscillators 7a, 7b, 7c, 7d through lead wires. Here, the oscillation frequency of the ultrasonic oscillator is varied. This is because it is desired to give a plurality of ultrasonic vibration frequencies to be given to the cutting blade. At the same time, a cooling medium such as water 10 is flowed in the direction of the arrow in the figure. Next, alignment is performed and the workpiece is cut.

Ultrasonic vibrations of the Langevin type ultrasonic transducers 9a, 9b, 9c, 9d propagate to the cutting blade 1 using the water 10 as an ultrasonic propagation medium. Here, if there is no water, the ultrasonic vibration of the Langevin type ultrasonic vibrator propagates through the air and propagates to the cutting blade, but when comparing the attenuation coefficient of water and air of ultrasonic vibration, the attenuation coefficient of air It can be seen that the ultrasonic vibration of the Langevin type ultrasonic transducer is hardly transmitted to the cutting blade when there is no water.
The ultrasonic vibration of the Langevin type ultrasonic vibrator is longitudinal vibration. This is because, except for the longitudinal vibration, it does not propagate in the liquid.
Further, if the distance between the cutting blade 1 and the ultrasonic radiation surfaces of the Langevin type ultrasonic transducers 9a, 9b, 9c, 9d is 5 mm or more, the cutting blade 1 and the Langevin type supersonic wave depend on the rotational speed of the rotary spindle. There is a high possibility that a portion without the water 10 is formed between the ultrasonic wave emitting surfaces of the sound wave vibrators 9a, 9b, 9c, and 9d.
Therefore, the ultrasonic vibration of the Langevin type ultrasonic transducer may not be sufficiently transmitted to the cutting blade.
Therefore, the distance between the cutting blade and the ultrasonic radiation surface of the Langevin type ultrasonic transducer is preferably less than 5 mm and 1 mm or less.

The action of the ultrasonic vibration propagating through the water 10 to the cutting blade 1 varies depending on the frequency. For example, if it is about 20 Khz, the amplitude of the ultrasonic vibration is large, and the cutting speed is improved. At about 200 Khz, the amplitude decreases, but the surface accuracy of the cut surface improves. Further, at about 2 Mhz, the surface accuracy of the cut surface is further improved, and the cracking and chipping of the workpiece can be improved.

By increasing the frequency, it is possible to improve the cracking and chipping of the workpiece. In ultrasonic vibration machining, it is generally well known that the processing surface is improved when the ultrasonic vibration is made higher.

Although the ultrasonic vibration of the Langevin type ultrasonic transducer is propagated through water, it may be a liquid having a small attenuation coefficient of ultrasonic vibration, for example, silicon oil.

FIG. 2 is a detailed view of the Langevin type ultrasonic transducer used in FIG. FIG. 2A is a cross-sectional view taken along line AA in FIG.
In the Langevin type ultrasonic vibrator 9, a polyethylene insulating ring 12 is first passed through a bolt 11 having a central axis passing therethrough, an aluminum plate 13 serving as a support plate and an electrode is passed, and piezoelectric elements 6a and 6b are passed through both sides thereof. Further, electrode plates 14a and 14b made of phosphor bronze are passed outside. Water passes through the hole 21 penetrating the central axis of the bolt 11. And it tightens from both sides rather than 15a, 15b to the aluminum block which cut the internal thread in the center part.
Further, there are various ultrasonic vibrator methods, and only a piezoelectric element may be used.

According to the cutting apparatus as described above, it is not necessary to attach an ultrasonic transducer to the rotary spindle 3, so that it can be easily attached to an existing apparatus. Moreover, since there is no restriction | limiting in the rotation speed of the rotating spindle 3, it can also be easily attached to a dicer of 10,000 rotations or more. Further, since the ultrasonic vibration of the Langevin type ultrasonic vibrator is radiated to the cutting blade through water, an effect of removing dirt and the like of the cutting blade also occurs as a secondary effect.

Since the effect of ultrasonic vibration can be sufficiently exerted in the cutting operation in this way, the cutting resistance is reduced, the frictional heat of the cutting blade is reduced, the thermal distortion of the processed surface is reduced, the life of the cutting blade is prolonged, Machining accuracy is improved.

As described above, by adopting a configuration in which ultrasonic vibration is propagated to the cutting blade using water as a medium, it is possible to eliminate the disadvantages of the configuration in which the cutting blade is vibrated by ultrasonic vibration in a method tried in the past.

A second embodiment will be described with reference to FIG. FIG. 3 is a plan view seen from above. The configuration of the cutting device is the same as in FIG. The state where the cutting blade is mounted on the rotary spindle 3 that transmits the rotational force of the rotary motor 2 of the cutting device is shown.
The cutting blade 1 is sandwiched between a first flange 4a attached to the tip of the rotary spindle 3 and a second flange 4b fitted to the first flange 4a, and is screwed to a threaded portion of the rotary spindle 3. The fastening nut 5 is fixed.

Two Langevin type ultrasonic transducers 9 a and 9 b are attached to the side surface of the cutting blade 1. A high frequency AC voltage is applied to each Langevin type ultrasonic transducer 9a, 9b from the ultrasonic oscillator through a lead wire. Here, in order to simplify the drawing, the ultrasonic oscillator is not shown.
A hole 21 passes through the central axis of the Langevin type ultrasonic transducers 9a and 9b so that the water 10 flows. Further, there is a cooling device 16 for cooling the water 10, and the water 10 is supplied from the cooling device 16 through the pipe 17 to the hole of the central axis of the Langevin type ultrasonic transducers 9 a and 9 b.

The operation of the cooling device 16 is determined by the temperature from the temperature sensor 18a for observing the temperature of the cutting blade 1 or the temperature sensor 18b for observing the temperature of the workpiece 20. By doing so, the processing accuracy is improved.

The Langevin type ultrasonic transducer is attached to the safety carver 19. The top cover of the safety carver was omitted for the sake of simplicity. In this way, the cutting blade 1 can be subjected to ultrasonic vibration without any modification to the cutting device body.

FIG. 4 shows a means for evenly distributing water as much as possible between the side surface of the cutting blade 1 and the ultrasonic radiation surface of the Langevin type ultrasonic transducer 9. It is providing the hole 21 which discharge | releases several water. In this way, ultrasonic vibration propagates between the surface of the cutting blade 1 and the ultrasonic radiation surface of the Langevin type ultrasonic transducer with less loss.

Since the effect of ultrasonic vibration can be sufficiently exerted in the cutting operation in this way, the cutting resistance is reduced, the frictional heat of the cutting blade is reduced, the thermal distortion of the processed surface is reduced, the life of the cutting blade is prolonged, Machining accuracy is improved.

A third embodiment will be described with reference to FIG. FIG. 5 is a plan view seen from above. Two Langevin type ultrasonic transducers 9 a and 9 b are attached to the cutting blade 1. One has an ultrasonic radiation surface of the Langevin type ultrasonic transducer 9 a parallel to the side surface of the cutting blade 1, and another one has an ultrasonic wave of the Langevin type ultrasonic transducer 9 b parallel to the cut surface of the cutting blade 1. There is a radiation surface. The presence of the ultrasonic radiation surface of the Langevin type ultrasonic transducer 9b parallel to the cut surface of the cutting blade 1 reduces the area where ultrasonic vibration can be transmitted, and the role of ultrasonic vibration transmission is small compared to the former. . However, the effect of removing dirt on the cut surface is great.
Of course, it goes without saying that a liquid such as water 10 is required between the cutting blade 1 and the radiation surfaces of the Langevin type ultrasonic transducers 9a and 9b.

As described above, the cutting blade 1 has various functions ranging from the role of the dresser of the cutting blade 1 to the improvement of the cutting speed by reducing the distance between the radiating surfaces of the Langevin type ultrasonic transducers 9a and 9b and allowing the liquid to exist between them. Effects can be obtained.

A fourth embodiment will be described with reference to FIG. FIG. 6 is a plan view seen from above. There are five cutting blades 1a, 1b, 1c, 1d, and 1e. These cutting blades 1 a, 1 b, 1 c, 1 d, and 1 e are sandwiched between flanges 4 a, 4 b, 4 c, 4 d, 4 e, and 4 f, and are fixed by a tightening nut 5 that is screwed onto a screw portion of the rotary spindle 3. The distance between the cutting blades 1 is about 3 mm.
On the radiation surface of the Langevin type ultrasonic transducer 9, there are holes 21 through which water 10 flows, and a plurality of holes 21 are located so that water is discharged between the cutting blades 1. For the convenience of drawing, the Langevin type ultrasonic transducer is only on the radiation surface of the Langevin type ultrasonic transducer. Here, water 10 is represented by a thin line.
Since the water 10 can exist between the cutting blades 1 as indicated by a thin line, the ultrasonic vibration is well propagated to the side surfaces of the cutting blades 1. This is almost the same as when the radiation surface of the Langevin type ultrasonic transducer 9 is arranged in parallel with the side surface of the cutting blade.
In order to supply water more reliably between the cutting blades 1a, 1b, 1c, 1d and 1e, a thin nozzle is provided between the cutting blades 1a, 1b, 1c, 1d and 1e. Water can also be emitted in the direction of the central axis.

As described above, when there are a plurality of cutting blades 1, even if the radiation surface of the Langevin type ultrasonic transducer 9 is parallel to the cutting surface of the cutting blade 1, if water is present between the cutting blades 1, The same effect as that obtained when the radiation surface of the ultrasonic transducer is arranged in parallel with the side surface of the cutting blade can be obtained.

The invention's effect

As described above, according to the present invention, since it is not necessary to supply power to a conventional rotating ultrasonic transducer, it can be easily attached to an existing cutting device. In addition, since the effect of ultrasonic vibration can be sufficiently exerted in the cutting operation, the cutting resistance is reduced, the frictional heat of the cutting blade is reduced, the thermal distortion of the processed surface is reduced, the life of the cutting blade is increased, and Accuracy is improved.

  It is a figure explaining the cutting device of a 1st embodiment.   It is a detailed figure of the Langevin type ultrasonic transducer of a 1st embodiment.   It is a figure explaining the cutting device of a 2nd embodiment.   It is a figure which shows the ultrasonic radiation surface of another Langevin type ultrasonic transducer | vibrator of 2nd Embodiment.   It is a figure explaining the cutting device of a 3rd embodiment.   It is a figure explaining the cutting device of a 4th embodiment.   It is a figure explaining the conventional cutting blade, a rotation spindle, etc. FIG.   It is a figure which makes ultrasonic vibration act on the conventional cutting blade.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cutting blade 2 Rotating motor 3 Rotating spindle 4 Flange 5 Tightening nut 6 Piezoelectric element 7 Ultrasonic oscillator 8 Slip ring 9 Langevin type ultrasonic vibrator 10 Water 11 Bolt 12 Insulating ring 13 Aluminum plate 14 Electrode plate 15 Aluminum block 16 Cooling device 17 Pipe 18 Temperature sensor 19 Safety carver 20 Workpiece 21 Hole

Claims (9)

A cutting apparatus characterized in that an ultrasonic vibrator is disposed in the vicinity of the cutting blade, and a liquid flows between the cutting blade and the ultrasonic vibrator. 2. The cutting apparatus according to claim 1, wherein a radiation surface of the ultrasonic transducer is arranged in parallel to the surface of the cutting blade. The cutting apparatus according to claim 1 or 2, wherein the liquid is discharged from a part of the ultrasonic radiation surface of the ultrasonic vibrator. The cutting apparatus according to claim 3, wherein the ultrasonic wave emitting surface of the ultrasonic vibrator has a plurality of holes, and liquid is discharged from the holes. 4. The cutting device according to claim 1, further comprising a device for measuring the temperature of the cutting blade and adjusting the temperature of the liquid. 4. The cutting apparatus according to claim 1, further comprising a device for measuring the temperature of the workpiece and adjusting the temperature of the liquid. 2. The cutting apparatus according to claim 1, wherein the vibration mode of the ultrasonic vibrator is longitudinal vibration. The cutting apparatus according to claim 1, wherein there are a plurality of ultrasonic transducers. 9. The cutting apparatus according to claim 8, wherein the ultrasonic vibrator has a plurality of oscillation frequencies.

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