JP2005169605A - Wire saw - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a wire saw capable of surely adhering abrasive grains of slurry to the outer periphery of the wire, and improving machining efficiency. <P>SOLUTION: A wafer is machine-cut from a work 22 by relatively pushing the work 22 to a traveling wire 18 while traveling the wire 18 so as to go around a plurality of the rollers 15, 16 and 17 for machining, and supplying slurry 31 from a slurry supply pipe 23 to the wire 18 at the position between the adjacent rollers 15, 16 for machining. A cutting machining part of the work 22 is cooled by spraying cooling air of a temperature of not less than 0 degree that is lower than the temperature of the slurry 31 relative to the wire 18 near the intersection between the air spray pipes 33A, 33B of the cooling device 32 and the outer periphery surface of the work 22 at the position between the work 22 and the rollers 15, 16 for machining. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a wire saw that uses a wire to cut a wafer from a work made of a hard and brittle material such as a semiconductor material, a magnetic material, or ceramic.

  In a general conventional wire saw, a wire travels around a plurality of processing rollers, and slurry is supplied to the wire at a position between adjacent processing rollers. In this state, the wafer is cut from the workpiece by pressing the workpiece against the running wire. In this case, as the slurry, a material in which abrasive grains are dispersed in silicon oil is circulated and used, and the abrasive grains are adhered to the outer periphery of the wire to ensure a cutting effect, and the workpiece cutting portion of the wire is cooled. And the fall of the processing precision accompanying the temperature rise of a cutting process part is suppressed.

  Further, as a wire saw in which air is blown together with a slurry to a workpiece or a wire at the time of cutting the workpiece with a wire, for example, there is a configuration as disclosed in Patent Document 1, Patent Document 2, and Patent Document 3. Proposed.

That is, in the configuration described in Patent Document 1, after cutting the workpiece, low-viscosity oil is jetted into the cutting groove of the workpiece together with compressed air, and the abrasive grains in the slurry adhering between the wafers are blown off, and the post-process It is designed to facilitate the cleaning of the wafer in the process. Further, in the configuration described in Patent Document 2, during cutting of a workpiece, compressed air is blown to the wire between the workpiece and the processing roller, and the slurry attached to the wire is blown off. The wear of the processing roller due to the abrasive grains is prevented. Further, in the configuration described in Patent Document 3, an air nozzle that ejects compressed air is provided concentrically on the outer periphery of a nozzle that ejects slurry, and slurry and compressed air are simultaneously ejected onto the wire, and the utilization rate of the slurry is increased. Has come to improve.
JP-A-10-296719 JP 2002-66900 A JP 2002-273648 A

However, the conventional wire saw as described above has the following problems.
That is, in the wire saw having the general configuration described above, a large amount of slurry is supplied to the wire in order to cool the workpiece cutting portion, so that the pump motor used for circulating the slurry has high power. The thing with much power consumption was needed. In addition, it is necessary to cool the slurry to the predetermined temperature required for cooling the cutting part in the middle of the circulation path, so a slurry dispersion with high viscosity cannot be used, and a slurry dispersion with low viscosity is used. Was. In other words, if a dispersion having a high viscosity is used, the viscosity of the dispersion is further increased by cooling, and circulation becomes difficult. Therefore, the function of holding the abrasive grains on the wire is not sufficient, and the cutting efficiency cannot be improved. Further, the types that can be used as the dispersion liquid are limited to those having a low viscosity, and it is difficult to cope with various cutting conditions such as the type of workpiece. Furthermore, because the slurry is used for cooling the cutting part, depending on the change in the cutting position in the workpiece axial direction, the progress of cutting in the direction orthogonal to the workpiece axial line, etc. Therefore, it was not possible to perform control to freely change the supply amount of the slurry. In other words, since the slurry is also used for cooling the cutting portion, it is necessary to secure a certain amount so that the cooling can be surely performed, and the amount of slurry is reduced even when not much abrasive grains are required. I can't.

  Further, in the configurations described in Patent Documents 1 to 3, the compressed air supplied together with the slurry has almost no effect of cooling the workpiece cutting portion. For this reason, in the same manner as the wire saw having the general configuration described above, it is necessary to supply a large amount of slurry to the wire to cool the workpiece cutting portion.

  The present invention has been made paying attention to such problems existing in the prior art. Its main purpose is to provide a wire saw that does not require the use of a large amount of slurry for cooling the workpiece.

  Another object of the present invention is to use a slurry having a relatively high viscosity, and to increase the viscosity of the slurry applied to the workpiece cutting portion by air cooling so that the abrasive grains contained in the slurry are removed from the wire. An object of the present invention is to provide a wire saw that can be easily and reliably attached to the outer periphery, can send a large amount of abrasive grains to a workpiece, and can improve the processing efficiency.

  Further, the object of the present invention is to supply slurry according to the change of the cutting position in the workpiece axial direction, the progress of cutting processing in the direction perpendicular to the workpiece axial line, etc. An object of the present invention is to provide a wire saw capable of performing fine control such as changing the amount and improving processing accuracy.

  In order to achieve the above object, according to the first aspect of the present invention, a wire is caused to travel around a plurality of processing rollers, and a slurry is supplied to the wire at a position between adjacent processing rollers. However, in the wire saw in which the workpiece is relatively pressed against the running wire and the wafer is cut from the workpiece, at a position between the workpiece and the processing roller, with respect to the workpiece cutting portion A cooling means for blowing cooling air having a temperature lower than the temperature of the slurry is provided.

The invention according to claim 2 is characterized in that, in the invention according to claim 1, the temperature of the cooling air is 0 ° C. or less.
According to a third aspect of the present invention, in the first or second aspect of the present invention, the cooling air is blown toward the vicinity of the intersection between the outer peripheral surface of the workpiece and the wire.

  According to a fourth aspect of the present invention, in the wire saw according to any one of the first to third aspects, the cooling air is blown toward the wire.

  The invention according to claim 5 is the invention according to any one of claims 1 to 4, wherein the wire travels in one direction while reciprocating within a predetermined range, and the cooling means is a workpiece. A pair of air blowing ports arranged on both sides of the wire are provided, and cooling air blowing from the pair of air blowing ports is alternately switched according to the timing of switching the wire traveling direction to cool the wire feeding side to the workpiece The air is blown and the cooling air blowing to the wire delivery side is stopped.

(Function)
In the present invention, when the workpiece is cut by the wire, cooling air having a temperature lower than the temperature of the slurry is blown onto the workpiece cutting portion, thereby cooling the workpiece cutting portion. Furthermore, the slurry applied to the cut portion is also cooled to increase the viscosity. Therefore, it is not necessary to use a large amount of slurry for cooling the cutting portion, and the components of the slurry circulation path including the pump motor can be reduced in size. Moreover, since it is not necessary to cool the slurry in the middle of the circulation path, a slurry having a relatively high viscosity can be used. Therefore, the abrasive grains contained in the slurry can be easily and reliably attached to the outer periphery of the wire, and a large number of abrasive grains can be sent to the workpiece, so that the processing efficiency can be improved. In addition to the cooling air, the amount of slurry supply can be freely changed according to the change in the cutting position in the workpiece axial direction, the progress of cutting in the direction perpendicular to the workpiece axial direction, etc. Fine control can be performed and processing accuracy can be improved.

  If the cooling air of 0 ° C. or less is blown as the cooling air, it is possible to effectively cool the cut portion of the workpiece, and it is possible to reliably suppress a reduction in processing accuracy.

If the cooling air is blown to the vicinity of the intersection between the wire or the outer peripheral surface of the workpiece and the wire, the cut portion of the workpiece can be effectively cooled.
If the cooling air is blown to the wire feeding side with respect to the workpiece and the blowing on the feeding side is stopped, unnecessary slurry adhesion to the wire on the feeding side does not occur, and wasteful consumption of the cooling air can be suppressed.

  As described above, according to the present invention, it is not necessary to use a large amount of slurry, and a small component can be used as a component of the slurry circulation path. In addition, a relatively high viscosity slurry can be used, and the slurry applied to the workpiece cutting part can be made highly viscous by air cooling, so that abrasive grains in the slurry can be reliably attached to the outer periphery of the wire. Abrasive grains can be sent to the workpiece, and excellent effects such as improvement of processing efficiency are exhibited.

(First embodiment)
Below, 1st Embodiment of this invention is described based on FIGS.
As shown in FIGS. 1 and 2, a column 12 is erected on a base 11 of a wire saw. In the vicinity of the column 12, a processing mechanism 13 is mounted on the base 11 via a bracket 14. In this processing mechanism 13, three processing rollers 15, 16, and 17 are arranged in parallel and rotatably, and a large number of annular grooves 15a, 16a, and 17a are formed on the outer periphery thereof. One wire 18 is wound around the annular grooves 15a, 16a, and 17a of the processing rollers 15, 16, and 17 in order.

  A motor 19 is disposed on the base 11 and is operatively connected to one processing roller 17 via a transmission mechanism 20 including a pulley and a belt. Then, when the processing roller 17 is rotated by the motor 19, the other two processing rollers 15 and 16 are rotated in conjunction with each other via the wire 18. Then, by driving the motor 19, the wire 18 is reciprocated within a certain range. In this case, since the forward stroke is longer than the reverse stroke, the wires 18 are sequentially fed in one direction as a total. For this reason, on the processing rollers 15 to 17, the wire 18 travels in one direction from the feeding side 18a to the feeding side 18b in FIG.

  Above the processing mechanism 13, a work support mechanism 21 is disposed on one side of the column 12 so as to be movable up and down, and a work 22 such as a silicon ingot is detachably attached to a lower end of the work support mechanism 21. As shown in FIGS. 1 to 3, the workpiece support mechanism 21 is moved downward to move the workpiece 22 to the traveling wire 18 at a position between a pair of adjacent processing rollers 15 and 16. On the other hand, it is relatively pressed from above.

  As shown in FIGS. 1, 2, 4, and 5, a pair of slurry supply pipes 23 is disposed on the bracket 14 at the upper position between the pair of adjacent processing rollers 15, 16. 15 and 16 are disposed along the axial direction. These slurry supply pipes 23 are composed of an inner pipe 24 and an outer pipe 25 arranged concentrically on the outer periphery thereof. A plurality of supply holes 24 a are formed at predetermined intervals in the axial direction on the upper surface of the peripheral wall of the inner pipe 24. On the lower surface of the outer peripheral wall of the outer pipe 25, a supply groove 25a is formed so as to extend along the axial direction, that is, in a direction substantially orthogonal to the wire 18 between the processing rollers 15 and 16. Further, the groove width L1 of the supply groove 25a is formed so as to gradually increase from the feeding side 18a toward the feeding side 18b in accordance with the traveling direction of the wire 18 shown in FIG.

  As shown in FIG. 7, a slurry circulation path 26 is connected to both the slurry supply pipes 23. The slurry circulation path 26 is provided with a tank 27, a pump 28, a cooler 44, a flow rate adjusting valve 29, and a slurry receiver 30. A slurry 31 in which abrasive grains are dispersed in silicon oil is fed from the tank 27 by the rotation of the pump 28, cooled by the cooler 44, and adjusted to a predetermined temperature. Then, the slurry 31 is introduced into both the slurry supply pipes 23 while the flow rate is adjusted via the flow rate adjusting valve 29, and is supplied from the supply groove 25 a of the outer pipe 25 to the traveling wire 18. Further, the slurry 31 dropped from the wire 18 is collected by the slurry receiver 30 and returned to the tank 27.

  As shown in FIGS. 1, 2, and 6, a cooling device 32 as a cooling unit is provided on the bracket 14 at an upper position between the pair of adjacent processing rollers 15 and 16 and both sides of the workpiece 22. A pair of air blowing pipes 33A and 33B serving as a pair of air blowing ports are disposed along the axial direction of the processing rollers 15 and 16. A plurality of blowing holes 33a are formed along the axial direction on the lower surfaces of the peripheral walls of the air blowing pipes 33A and 33B. Further, the pitch L2 of the blowing holes 33a is formed so as to gradually decrease from the feeding side 18a toward the feeding side 18b in accordance with the traveling direction of the wire 18 shown in FIG. Therefore, the arrangement density of the blowing holes 33a increases toward the delivery side 18b of the wires 18.

  As shown in FIG. 8, an air supply path 34 is connected to the air blowing pipes 33A and 33B. The air supply path 34 is provided with a filter 35, an air pump 36, a dryer 37, a cooler 38 and a switching valve 39. Then, by the rotation of the air pump 36, air is taken in from the outside air through the filter 35, and the air is dried by the dryer 37, and at 0 ° C. or lower, for example, 0 °, lower than the temperature of the slurry 31 by the cooler 38. Cool to a constant temperature in the range of C to -10 ° C. Thereafter, the cooling air is switched and supplied to both the air blowing pipes 33 </ b> A and 33 </ b> B via the switching valve 39, and the wire near the intersection of the outer peripheral surface of the workpiece 22 and the wire 18 from the blowing hole 33 a on the feeding side of the wire 18 with respect to the workpiece 22. 18 is sprayed on.

  In this case, the switching valve 39 is switched according to the switching timing of the traveling direction of the wire 18 traveling in one direction while reciprocating within a certain range. Thereby, the blowing of the cooling air from the pair of air blowing pipes 33 </ b> A and 33 </ b> B is alternately switched, and the cooling air is blown to the feeding side of the wire 18 with respect to the workpiece 22.

  As shown in FIG. 9, a vortex tube is used as the cooler 38 of the air supply path 34 in this embodiment. That is, the cooler 38 is equipped with a tube main body 40 that is open at one end and provided with a bottom plate at the other end. A compressed air supply port 40 a connected to the air supply path 34 is formed on the peripheral surface near the opening side end of the tube body 40. A warm air discharge port 40 b is formed in the bottom plate portion of the tube main body 40, and an opening side end portion of the tube main body 40 is a cold air discharge port 40 c connected to the air supply path 34.

  When compressed air is supplied into the tube main body 40 from the compressed air supply port 40a, the air advances along the inner peripheral surface of the tube main body 40 toward the warm air discharge port 40b in a spiral manner. At this time, centrifugal force acts on the air to compress the air, and heat is generated by contact between the air and the inner peripheral surface of the tube main body 40, and the warm air is discharged from the warm air discharge port 40b to the outside of the tube main body 40. Discharged. On the other hand, in the center of the warm air spiral flow, a reverse flow is generated toward the cold air discharge port 40c side opposite to the warm air discharge port 40b. In this case, since the heat quantity of the reverse flow is deprived by the warm air spiral flow, the reverse flow becomes cool air and is discharged from the cold air discharge port 40 c to the outside of the tube body 40. In this way, the compressed air is cooled to a predetermined temperature.

Next, the operation of the wire saw configured as described above will be described.
Now, during operation of this wire saw, the wire 18 travels in one direction while reciprocating within a certain range so as to go around the plurality of processing rollers 15, 16, 17, and between the adjacent processing rollers 15, 16. In position, the slurry 31 is supplied onto the wire 18 from the slurry supply pipe 23. In this state, the workpiece support mechanism 21 is moved downward, the workpiece 22 is pressed against the running wire 18, and the wafer is cut from the workpiece 22.

  At this time, at a position between the work 22 and the processing rollers 15 and 16, near the intersection of the wire 18 and the outer peripheral surface of the work 22 from the air blowing pipes 33 </ b> A and 33 </ b> B of the cooling device 32, the temperature of the slurry 31. Cooling air having a low temperature of 0 ° C. or lower is blown. In this case, the cooling air is blown from the pair of air blowing pipes 33A and 33B by the switching control of the switching valve 39 in the air supply path 34 according to the switching timing of the traveling direction of the wire 18 traveling while reciprocating. It can be switched alternately. That is, the cooling air is always blown to the feeding side of the wire 18 with respect to the workpiece 22. In addition, since the temperature of each of the processing rollers 15 to 16 is adjusted by the refrigerant supplied to the inside, it is desirable that the cooling air does not hit the processing rollers 15 to 16.

  Further, in this wire saw, as shown in FIGS. 2 and 5, the groove width L1 of the supply groove 25a of the outer pipe 25 in the slurry supply pipe 23 is directed from the feed side 18a to the feed side 18b in accordance with the traveling direction of the wire 18. It is formed so that it gradually becomes wider. For this reason, even when the work 18 is cut, the wire 18 wears as it travels from the feeding side 18a to the feeding side 18b, and even if the outer diameter gradually decreases, the wire 18 is supplied as the outer diameter decreases. A lot of slurry 31 is supplied from the groove 25a. Therefore, the workpiece 22 can be uniformly cut with high accuracy over the entire length in the axial direction. That is, even if the outer diameter of the wire 18 is reduced, the supply amount of the slurry 31 is increased, so that the amount of abrasive grains supplied on the wire 18 is also increased. A uniform cutting ability can be obtained from the feeding side 18a of the wire 18 to the feeding side 18b.

  Further, in this wire saw, as shown in FIG. 3, the slurry from the slurry supply pipe 23 is controlled by adjusting the flow rate adjusting valve 29 in the slurry circulation path 26 according to the progress of the cutting process of the workpiece 22 by the wire 18. The supply amount of 31 is changed. That is, when the workpiece 22 is started to be cut, the cutting portion of the workpiece 22 by the wire 18 is the outer peripheral portion of the workpiece 22 and the cutting length is small, so the supply amount of the slurry 31 is small. Thereafter, during the period from the start of cutting the workpiece 22 to the middle cutting (cutting near the center of the workpiece), the supply amount of the slurry 31 is increased in accordance with the increase in the cutting length, and from the middle cutting of the workpiece 22. Until the end of cutting, the supply amount of the slurry 31 is reduced according to the reduction of the cutting length. Therefore, an appropriate amount of slurry 31 is always supplied to the wire 18 according to the cutting state of the workpiece 22, and the workpiece 22 can be cut with high accuracy.

  Moreover, in this wire saw, as shown in FIGS. 2 and 6, the pitch L2 of the blowing holes 33a of the air blowing pipes 33A and 33B gradually decreases from the feeding side 18a toward the feeding side 18b according to the traveling direction of the wire 18. Thus, the arrangement density is increased. For this reason, when the workpiece 18 is cut, even if the temperature gradually increases as the wire 18 travels from the feeding side 18a to the feeding side 18b, a large amount of cooling air is generated from the blowing holes 33a according to the temperature rise. Be sprayed. Therefore, the cutting part of the workpiece 22 can be cooled uniformly over the entire length of the workpiece 22 in the axial direction, and the cutting accuracy can be kept constant.

Furthermore, according to this embodiment, the following effects can be obtained.
That is, in this wire saw, when the workpiece 22 is cut by the wire 18, the wire 18 of the cutting portion is cut from the air blowing pipes 33 A and 33 B of the cooling device 32 at a position between the workpiece 22 and the processing rollers 15 and 16. On the other hand, cooling air having a temperature lower than the temperature of the slurry 31 is blown to cool the cutting portion of the workpiece 22. For this reason, the cutting process part of the workpiece | work 22 can be cooled effectively, and the fall of the processing precision accompanying the temperature rise of a cutting process part can be suppressed reliably. And it can suppress depending on the cooling effect | action by the slurry 31, Therefore, it is not necessary to use a lot of slurry 31 for cooling of a cutting process part. For this reason, the circulation amount of the slurry 31 can be reduced, and the components of the slurry circulation path 26, for example, the pump 28 that is small and consumes less power can be used.

  Further, since the processed portion of the workpiece 22 and the wire 18 can be cooled by the cooling air, the temperature of the slurry 31 can be increased as compared with the conventional wire saw. For this reason, it is not necessary to use a low-viscosity dispersion (silicon oil) of the slurry 31, and a high-viscosity one can be used. Therefore, the abrasive grains in the slurry 31 can be effectively attached to the wire 18, and many abrasive grains can be sent to the workpiece, so that the cutting efficiency can be improved.

  Further, the viscosity of the slurry 31 supplied to the processing portion is increased by the cooling air below 0 ° C. For this reason, the abrasive grains contained in the slurry 31 can be effectively adhered to the outer periphery of the wire 18, and the processing efficiency can be improved even when the low-viscosity slurry 31 is used. Accordingly, since the range of usable viscosity from low viscosity to high viscosity as the dispersion liquid of the slurry 31 is expanded, the types of usable dispersion liquids are increased, and various conditions such as the material of the work 22 and the diameter of the wire 18 are increased. The selection range for using a suitable one is widened. In addition to the air cooling, the slurry supply amount can be finely adjusted. For example, unlike the conventional wire saw, the supply amount of the slurry 31 can be freely changed according to the change in the diameter due to the wear of the wire 18 in the axial direction of the work 22 or the progress of the cutting amount with respect to the work 22. This makes it possible to freely control the cutting ability and improve the processing accuracy.

  Further, in this wire saw, when the wire 18 travels in one direction while reciprocating within a certain range, a pair of wires 18 disposed on both sides of the workpiece 22 is arranged according to the switching timing of the traveling direction of the wire 18. The cooling air is blown from the air blowing pipes 33 </ b> A and 33 </ b> B on the feeding side of the wire 18 with respect to the workpiece 22, and is alternately switched so that the blowing is stopped on the opposite side. For this reason, it is possible to supply cooling air only to necessary portions, prevent unnecessary consumption of the cooling air, and efficiently blow the cooling air to the feeding side of the wire 18 with respect to the workpiece 22. The 22 cut parts can be cooled more effectively.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with a focus on differences from the first embodiment.

  In the second embodiment, as shown in FIG. 10, in addition to the slurry supply pipe 23 similar to that of the first embodiment, a pair of slurry supplies in the vicinity of the work support mechanism 21, that is, above the work 22. An auxiliary pipe 42 is provided. When the workpiece 22 is cut, the slurry 31 is supplied from the slurry supply pipe 23 onto the wire 18, and at the same time, the slurry 31 is supplied from the slurry supply auxiliary pipe 42 to both sides of the outer periphery of the workpiece 22. .

  Further, in addition to the air blowing pipes 33A and 33B similar to those in the first embodiment, a pair of air blowing auxiliary pipes 43 are disposed in the vicinity of each of the slurry supply auxiliary pipes 42. When cutting the workpiece 22, cooling air is blown from the air blowing pipes 33 </ b> A and 33 </ b> B to the vicinity of the intersection of the wire 18 and the outer circumference of the workpiece 22, and at the same time, supplied from the slurry supply auxiliary pipe 42 to the outer circumference of the workpiece 22. Cooling air is blown from the air blowing auxiliary pipe 43 toward the slurry 31.

  Therefore, according to the second embodiment, the workpiece 22 and the cut portion of the workpiece 22 are cooled from above and below by the cooling air from the air blowing pipes 33A and 33B and the cooling air from the air blowing auxiliary pipe 43. And the cooling effect can be improved. For this reason, it is suitable especially when the cutting process part of the workpiece | work 22 dislikes a temperature rise. Moreover, since the abrasive grains adhering to the surface of the workpiece 22 are lowered in temperature, the unmachined portion of the workpiece 22 can be kept in a cooled state, and the temperature rise of the workpiece 22 due to machining can be suppressed and high-precision machining is possible. It becomes.

(Example of change)
In addition, this embodiment can also be changed and embodied as follows.
In each of the above embodiments, as the cooler 38 in the air supply path 34, for example, another configuration such as an evaporator of a normal cooling circuit using a refrigerant is used. Thus, when air is cooled by an evaporator, it is necessary to provide an air passage so as to pass around the evaporator.

  In each of the above embodiments, the supply groove 25a of the outer pipe 25 of the slurry supply pipe 23 is formed so as to have a constant groove width, and the supply hole 24a of the inner pipe 24 is provided from the supply side 18a of the wire 18 to the supply side. It is formed such that the pitch gradually decreases toward 18b, or the hole diameter gradually increases at the same pitch.

  In each of the above embodiments, the blowing holes 33a of the air blowing pipes 33A and 33B are formed so that the hole diameter gradually increases at the same pitch from the feeding side 18a of the wire 18 toward the sending side 18b.

The principal part sectional view showing the wire saw of a 1st embodiment. The principal part enlarged plan view of the wire saw of FIG. The partial expanded sectional view which shows the cutting process state of the workpiece | work with a wire. Sectional drawing which expands and shows a slurry supply pipe. The disassembled perspective view which expands and shows a slurry supply pipe. The perspective view which expands and shows an air blowing pipe. The block diagram which shows the circulation path | route of a slurry. The block diagram which shows the supply path | route of cooling air. Sectional drawing which shows the structure of a cooling device. The principal part sectional view showing the wire saw of a 2nd embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 13 ... Processing mechanism, 15, 16, 17 ... Processing roller, 18 ... Wire, 18a ... Feeding side, 18b ... Sending side, 21 ... Work support mechanism, 22 ... Workpiece, 23 ... Slurry supply pipe, 26 ... Slurry circulation path 31 ... Slurry, 32 ... Cooling device as cooling means, 33A, 33B ... Air blowing pipe as air blowing port, 34 ... Air supply path, 39 ... Switching valve.

Claims (5)

The wire is run so as to go around a plurality of processing rollers, and while the slurry is supplied to the wire at a position between adjacent processing rollers, the workpiece is relatively pressed against the running wire, In the wire saw that cuts the wafer,
A wire saw provided with a cooling means for blowing cooling air having a temperature lower than the temperature of the slurry to the workpiece cutting portion at a position between the workpiece and the processing roller. The wire saw according to claim 1, wherein the temperature of the cooling air is 0 ° C. or less. The wire saw according to claim 1 or 2, wherein the cooling air is blown toward the wire. The wire saw according to any one of claims 1 to 3, wherein the cooling air is blown toward the vicinity of the intersection between the outer peripheral surface of the workpiece and the wire. The wire travels in one direction while reciprocating within a certain range, and the cooling means includes a pair of air blowing ports arranged on both sides of the workpiece, and a pair of air blowing according to the timing of switching the traveling direction of the wire. The cooling air blowing from the mouth is alternately switched so that the cooling air is blown to the wire feeding side with respect to the workpiece and the cooling air blowing to the wire feeding side is stopped. The wire saw according to any one of the above.

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