JP2005125577A - Liquid jet recording head and manufacturing method thereof - Google Patents

Abstract

Disclosed is a liquid jet recording head that has good dimensional accuracy and can be stably produced, and a method for manufacturing the same.
A nozzle forming material that is cured by a photoacid generating catalyst is coated on a substrate provided with an ink discharge pressure generating element and a solid layer that occupies at least a portion that becomes a liquid path. In the method of manufacturing a liquid jet recording head including a step of forming nozzles by forming discharge ports and removing the solid layer, the solid layer contains an ultraviolet absorber.
[Selection] Figure 5

Description

  The present invention relates to a liquid jet recording head for generating recording liquid (ink) droplets used in a liquid jet (hereinafter referred to as “inkjet”) recording method and a method for manufacturing the same.

  An ink jet recording head applied to this type of ink jet recording system generally includes a plurality of fine ink discharge ports (orifices), a liquid flow path, and a plurality of liquid discharge energy generating portions provided in a part of the liquid flow path. In order to obtain a high-quality image with such an ink jet recording head, it is desirable that the ink droplets ejected from the ejection ports are always ejected from the ejection ports at the same volume and ejection speed.

  In order to achieve this, for example, in Patent Documents 1 to 3, a drive signal is applied to the ink discharge pressure generating element (electrothermal conversion element) corresponding to the recording information, and the ink nucleate boiling is caused to the electrothermal conversion element. There is disclosed a method of generating thermal energy that gives a rapid temperature rise exceeding, forming bubbles in the ink, and ejecting ink droplets by the pressure of the bubbles.

  In an ink jet recording head for realizing such a method, the distance between the electrothermal transducer and the orifice (hereinafter referred to as “OH distance”) needs to be set accurately and with good reproducibility.

  Conventionally, as a method of manufacturing this type of ink jet recording head, for example, the method described in Patent Documents 4 and 5, that is, a nozzle comprising an ink flow path and an orifice portion on a substrate on which an ink discharge pressure generating element is formed. A pattern is formed using a photosensitive resin material, and a lid such as a glass plate is joined thereto, or a method described in Patent Document 6, for example, an ink flow path pattern with a soluble resin The pattern is coated with an epoxy resin, the resin is cured, and the soluble resin pattern is eluted and removed after the substrate is cut.

  However, any of the above methods is a method for manufacturing an ink jet recording head of a (substantially vertical) type (edge shooter) in which the bubble growth direction and the discharge direction are different. In this type of head, since the distance between the ink discharge pressure generating element and the orifice is set by cutting the substrate, the cutting accuracy is extremely high in controlling the distance between the ink discharge pressure generating element and the orifice. It becomes an important factor. However, cutting is generally performed by mechanical means such as a dicing saw, and it is difficult to achieve high accuracy.

  In addition, as a method of manufacturing an ink jet recording head of a type (side shooter) in which the bubble growth direction and the discharge direction are substantially the same, for example, a method described in Patent Document 7, that is, a dry film serving as a substrate and an orifice plate, Are bonded through another patterned dry film and an orifice is formed by photolithography, for example, a method described in Patent Document 8, that is, a substrate on which an ink discharge pressure generating element is formed. There is a method of joining an orifice plate manufactured by electroforming via a patterned dry film.

  However, in any of these methods, it is difficult to make the orifice plate thin (for example, 20 μm or less) and uniformly, and even if it can be made, it is difficult to produce the orifice plate with the substrate on which the ink discharge pressure generating element is formed. The joining process becomes extremely difficult due to the fragility of the orifice plate. Therefore, a manufacturing method described below has been proposed by the present applicant (see Patent Document 9).

  That is, as shown in FIGS. 1 to 6, the distance between the ink discharge pressure generating element and the orifice can be set with a very high accuracy, short and with good reproducibility, and the ink discharge pressure generating element can be recorded with high quality. A step of forming an ink flow path pattern with a resin that can be dissolved on a substrate on which a resin is formed, and a resin layer in which a coating resin containing a solid epoxy resin at room temperature is dissolved in a solvent, and the resin layer can be dissolved Forming a coating resin layer serving as an ink flow path wall on the dissolvable resin layer by performing solvent coating thereon; forming an ink discharge port in the coating resin layer above the ink discharge pressure generating element; And a step of eluting a soluble resin layer.

  However, when patterning is performed by irradiating the coating resin layer with ultraviolet rays, a slight scum (development residue) may be generated at the boundary with the flow path pattern even though the discharge port portion is not irradiated. It has been confirmed.

  This scum is because when the coating resin layer is irradiated with ultraviolet rays, light is reflected at the interface between the ink flow path pattern layer and the coating resin layer, and light wraps around the original unexposed portion and the coating resin layer is slightly cured. It is considered.

  The eaves-like scum formed at the boundary between the ink discharge port and the ink flow path has been determined to be no problem because it is extremely small. However, in recent printers, there is a trend toward higher image quality and higher definition, and since the amount of ink discharged is reduced, the size of the discharge port is becoming increasingly finer, so the size of these scums is the same as before. Even when the size is large, the influence on the ink droplet direction is relatively large, and the problem is regarded as a problem. For this reason, these scums need to be eliminated or made smaller.

  As a method for solving this problem, Patent Document 10 discloses a manufacturing method in which a basic substance is added to a solid layer that occupies a portion that becomes an ink flow path. According to this method, since the basic substance contained in the solid layer is mixed into the compatible layer composed of the solid layer and the nozzle forming material, and the curing reaction by the acid generation catalyst is inhibited, the nozzle forming material is removed. Thus, the compatible layer is removed and scum is eliminated.

  However, since a substance that hinders the curing reaction of the nozzle forming material is handled, there is a possibility that a trouble that curing does not proceed or difficult to proceed unless care is taken at the production site. If the progress of the curing reaction is changed, the dimensional accuracy of the discharge port, which has a great influence on the discharge characteristics, is deteriorated. Further, the nozzle forming material is peeled off from the substrate due to long-term use, which causes a problem of deterioration in ink discharge performance.

  Further, in Patent Document 11 by the present applicant, when a nozzle material is subjected to pattern exposure by including a component that absorbs or scatters ultraviolet rays, a liquid discharge port with respect to the incident direction of irradiation energy is included in the nozzle forming material. A method of manufacturing an ink jet recording head is described in which a latent image having a gradually increasing cross-sectional area is formed, and an ejection port having a large cross-sectional area is formed toward an ink ejection energy generating portion.

  In the above manufacturing method, the ultraviolet rays reflected at the interface between the nozzle forming material and the solid layer are attenuated in the nozzle forming material, so that the occurrence of scum is eliminated or very small.

  However, an object of the present invention is to provide a tapered shape in which the cross-sectional area of the ink discharge port gradually increases in order to increase the discharge frequency of the ink droplets. Therefore, in the embodiment, inorganic pigment particles that scatter light are used. What is added is a heterogeneous system, and the amount added is as large as 10 to 35%.

  In the said invention, since the discharge port cross section becomes a taper shape which becomes large gradually, management of a shape is difficult and it is difficult to produce stably. Further, since the nozzle density becomes high when discharging minute ink, the shape of the swell spread is disadvantageous because the nozzle density cannot be increased.

Japanese Patent Laid-Open No. 4-10940 JP-A-4-10941 JP-A-4-10942 JP-A-57-208255 JP-A-57-208256 JP 61-154947 A Japanese Patent Laid-Open No. 58-8658 JP 62-264975 A JP-A-6-286149 JP 2001-179990 A JP 2001-179799 A

  The present invention has been made in view of the above-described problems of the prior art, and the target process is small enough not to cause a problem scum in the ink flow path. An object of the present invention is to provide a manufacturing method capable of manufacturing a stable and highly reliable liquid jet recording head by a simple method.

The present invention intends to achieve the above object by providing a method of manufacturing a liquid jet recording head according to any one of the following items (1) to (4).
(1) A substrate on which an ink discharge pressure generating element and a solid layer that occupies at least a portion serving as a liquid path are coated with a nozzle forming material that is cured by a photoacid generating catalyst, and discharged onto a nozzle forming member. In a method for manufacturing a liquid jet recording head, comprising forming a nozzle by forming an outlet and removing the solid layer.
A method of manufacturing a liquid jet recording head, wherein the solid layer contains an ultraviolet absorber.
(2) The method for producing a liquid jet recording head, wherein the curable nozzle forming material to be coated is a cationic polymer of an epochine resin, and the ultraviolet absorber contained in the solid layer is not basic.
(3) A method of manufacturing a liquid jet recording head, characterized in that the added amount of the ultraviolet absorber is 0.01 to 10% by weight relative to the other solid content of the solid layer.
(4) A liquid jet recording head manufactured by any of the manufacturing methods described above.

  According to the present invention, the discharge pressure generating element, the solid layer exclusively occupied by at least a portion serving as the flow path, and the nozzle forming member cured by the photoacid generating catalyst are coated on the provided substrate, and discharged by exposure and development. In a manufacturing method of a liquid jet recording head including a step of forming an outlet and forming an ink flow path by removing a solid layer, an ultraviolet absorber is added to a dissolvable resin layer to thereby form a part of the ink flow path. The scum generated in the part can be suppressed to a very small level or not at all. Therefore, even in a liquid jet recording head that ejects minute ink droplets, ejection disturbance does not become a problem.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  In the present embodiment, an ink jet recording head was manufactured according to the procedure shown in FIGS. 1 to 6 also include a part of the basic manufacturing method disclosed in JP-A-6-286149 as the conventional example.

  In the conventional example, a substrate 1 made of glass, ceramics, plastic, metal, or the like as shown in a schematic perspective view of FIG. 1 is used.

  If such a substrate 1 functions as a part of a liquid flow path component, and can function as a support for a material layer that forms an ink flow path and an ink discharge port (orifice) described later, The shape, material, etc. can be used without any particular limitation. A desired number of ink discharge energy generating elements 2 such as electrothermal conversion elements or piezoelectric elements are arranged on the substrate 1. By such an ink ejection energy generating element 2, ejection energy for ejecting ink droplets as ink is given to the ink, and recording is performed.

  For example, when an electrothermal conversion element is used as the ink discharge energy generating element 2, the element heats nearby ink, thereby causing a change in state of the ink and generating discharge energy. For example, when a piezoelectric element is used, ejection energy is generated by mechanical vibration of the element.

  These elements 2 are connected to control signal input electrodes (not shown) for operating these elements. In general, various functional layers such as a protective layer are provided for the purpose of improving the durability of the ejection energy generating element 2, but it is of course possible to provide such a functional layer.

  In FIG. 1, an example in which an opening 3 for supplying ink is provided in advance on the substrate 1 and ink is supplied from the rear of the substrate 1 is illustrated. Any method can be used for forming the opening 3 as long as it is a means capable of forming a hole in the substrate 1. For example, it may be formed by a mechanical means such as a drill, or light energy such as a laser may be used. Further, a resist pattern or the like may be formed on the substrate 1 and chemically etched. Of course, the ink supply port 3 may not be formed in the substrate 1 but may be formed in a resin pattern and provided on the same surface as the ink discharge port 8 with respect to the substrate 1.

  Next, as shown in the “dissolvable flow path pattern formation diagram” in FIG. 2 (AA ′ cross-sectional view in FIG. 1), the dissolvable resin is formed on the substrate 1 including the ink discharge energy generating element 2. Thus, the ink flow path pattern 4 (solid layer) is formed. As the most general means, there is a means of forming with a photosensitive material, but it can also be formed by means of a screen printing method or the like. In the case of using a photosensitive material, the ink flow path pattern can be dissolved, so that it is possible to use a positive resist or a solubility-changing negative resist.

  Here, in the present invention, an ultraviolet absorber is added to the nozzle flow path pattern (solid layer). This is because when a resin solution of a coating resin layer is applied onto a solid layer in a later step, a layer (compatible layer) that is mutually melted between only two layers is formed. In addition, when a discharge port is formed in the coating resin layer by irradiating an ultraviolet pattern to the coating resin layer, the reflection of light generated at the interface between the ink flow path pattern layer and the coating resin layer is attenuated to suppress scum. It is.

  Here, the following are mentioned as an example of the ultraviolet absorber which can be added.

  2,4-di-hydroxybenzophenone, 2-hydroxy-4-methoxybenzophenone, 2-hydroxy-4-n-octoxybenzophenone, 2-hydroxy-4-n-dodecyloxybenzophenone, 2-hydroxy-4-benzyloxy Benzophenone, 2,2′-hydroxy-4-methoxybenzophenone, phenyl salicylate, 4-t-butylphenyl salicylate, 2-hydroxy-4-methoxybenzophenone, 2,4-di-t-butylphenyl-3 ′, 5 ′ -Di-t-butyl-4-hydroxybenzoate and the like. Other than this can be used as long as it does not depart from the gist of the present invention.

  The addition amount of the ultraviolet absorber is preferably 0.01 to 10%. More preferably, it is 0.03% to 5%. If the addition amount is too small, the effect of adding the ultraviolet absorber cannot be obtained. If the added amount is larger than this, the problem of scum disappears, but the ultraviolet rays reaching the substrate are attenuated too much, so that the exposure time of the mold material becomes longer and the productivity is deteriorated. In addition, the side surface shape of the pattern is also different from the one intended by the design, which is a problem.

  As a method of forming the solid layer as the ink flow path pattern, when using the substrate 1 provided with the ink supply port 3 on the substrate 1, this photosensitive material is dissolved in an appropriate solvent and PET (polyethylene) is used. It is preferable to form a dry film by applying and drying on a film such as terectrate) and then laminating. As the above-mentioned dry film, vinyl ketone photodegradable polymer compounds such as polymethyl isopropyltone and polyvinyl ketone can be suitably used. The reason is that these compounds maintain characteristics (film properties) as a polymer compound before light irradiation and can be easily laminated on the ink supply port 3.

  In addition, a filling material that can be removed in a subsequent process is disposed in the ink supply port 3 and a film may be formed by a normal spin coating method, roll coating method, or the like.

  In this way, on the ink flow path pattern 4 formed of a dissolvable solid layer, as shown in “Coating resin layer formation diagram” of FIG. It is formed by a method such as a roll coating method.

  Here, in the process of forming the resin layer 5, characteristics such as not causing deformation of the dissolvable resin pattern as much as possible are required. That is, when the coating resin layer 5 is dissolved in a solvent and formed on the resin pattern 4 that can be dissolved by spin coating, roll coating, or the like, it is necessary to select the solvent so as not to dissolve the soluble resin pattern 4 as much as possible. There is. In the case of the present invention, an ultraviolet absorber is contained in a dissolvable resin pattern, and an ultraviolet absorber is contained in a compatible layer portion formed between the coating resin layer and the coating resin layer is formed. If the resin pattern that can sometimes be dissolved does not dissolve at all, the present invention becomes ineffective, but in reality, it is not said that there is no compatible layer, and it is formed of a very thin layer, even if it is about that level, the present invention The effect of is sufficiently obtained.

  Next, the coating resin layer 5 will be described.

  The coating resin layer 5 is preferably photosensitive because the ink discharge port 3 can be easily and accurately formed by photolithography. Such a photosensitive coating resin layer 5 is required to have high mechanical strength as a structural material, adhesion to the substrate 1, ink resistance, and resolution for patterning a fine pattern of ink discharge ports at the same time. Is done. Here, as a result of intensive studies, the cationic polymerization cured product of an epoxy resin has excellent strength, adhesion, and ink resistance as a structural material, and is excellent if the epoxy resin is solid at room temperature. It has been found that it has patterning properties.

  A cationic polymerization cured product of an epoxy resin has a high crosslink density (high Tg) as compared with a cured product of an ordinary acid anhydride or amine, and thus exhibits excellent characteristics as a structural material. In addition, by using a solid epoxy resin at room temperature, diffusion of polymerization initiating species generated from the cationic polymerization initiator by light irradiation into the epoxy resin can be suppressed, and excellent patterning accuracy and shape can be obtained. .

  However, when patterning is performed by irradiating the coating resin layer with ultraviolet rays, a slight scum (development residue) is generated at the boundary with the nozzle flow path pattern even though the discharge port portion is not irradiated. Has been confirmed. This scum is because when the coating resin layer is irradiated with ultraviolet rays, light is reflected at the interface between the ink flow path pattern layer and the coating resin layer, the light wraps around the original unexposed portion, and the coating resin layer is slightly cured. It is believed that. The eaves-like scum formed at the boundary between the ink discharge port and the ink flow path has been determined to be no problem because it is extremely small.

  However, in recent printers, there is a trend toward higher image quality and higher definition, and since the amount of ink discharged is reduced, the size of the discharge port is becoming increasingly finer, so the size of these scums is the same as before. Even the size has a relatively large effect on the ejection characteristics and, in particular, the ink droplet direction, and has become a problem.

  The solid epoxy resin includes a reaction product of bisphenol A and epichlorohydrin having a molecular weight of about 900 or more, a reaction product of bromosphenol A and epichlorohydrin, a reaction product of phenol novolac or cresol novolak and epichlorohydrin. For example, polyfunctional epoxy resins having an oxycyclohexane skeleton described in JP-A-60-161973, JP-A-63-221121, JP-A-64-9216, JP-A-2-140219, etc. Is mentioned.

  In the above-described epoxy compound, a compound having an epoxy equivalent of 2000 or less, more preferably 1000 or less, is preferably used. This is because if the epoxy equivalent exceeds 2000, the crosslinking density decreases during the curing reaction, and the Tg or thermal deformation temperature of the cured product may decrease, or problems may occur in adhesion and ink resistance. is there.

  Examples of the photocationic polymerization initiator for curing the epoxy resin include aromatic iodonium salts, aromatic sulfonium salts [J. POLYMER SCI: Symposium No. 56 383-395 (1976)] and commercial products SP-150, SP-170, SP-172 and the like marketed by Asahi Denka Kogyo Co., Ltd. are listed.

  Moreover, the above-mentioned photocationic polymerization initiator can promote cationic polymerization (a crosslink density improves compared with single photocationic polymerization) by heating together with a reducing agent. However, when a photocationic polymerization initiator and a reducing agent are used in combination, the reducing agent is selected so that it becomes a so-called redox type initiator system that does not react at room temperature and reacts at a certain temperature or higher (preferably 60 ° C. or higher). There is a need.

  As such a reducing agent, copper triflate (copper trifluoromethanesulfonate (II)) is most suitable in consideration of the copper compound, particularly reactivity and solubility in the epoxy resin. A reducing agent such as ascorbic acid is also useful.

  In addition, when a higher crosslink density (high Tg) is required, such as an increase in the number of nozzles (high-speed printability), use of non-neutral ink (improvement of water resistance of the colorant), the above-described reducing agent is described later As described above, the crosslinking density can be increased by a post-process in which the coating resin layer is dipped and heated using the solution after the development process of the coating resin layer.

  Furthermore, the following additives can be added to the composition as necessary. For example, a flexibility-imparting agent may be added for the purpose of lowering the elastic modulus of the epoxy resin, or a silane coupling agent may be added to obtain further adhesion to the substrate 1.

  Next, the photosensitive coating resin layer 5 made of the above compound is subjected to pattern exposure through a mask 6 as shown in “pattern exposure diagram of ink discharge port” in FIG. The photosensitive coating resin layer 5 is a negative type and shields a portion where an ink discharge port is formed with a mask (of course, also shields a portion where electrical connection is made, not shown).

  The pattern exposure can be appropriately selected from ultraviolet rays, deep-UV light, electron beams, X-rays and the like according to the photosensitive region of the photocationic polymerization initiator to be used.

  Here, all the steps so far can be aligned using conventional photolithography technology, and the accuracy can be greatly improved as compared with a method in which an orifice plate is separately manufactured and bonded to a substrate. . The photosensitive coating resin layer 5 subjected to pattern exposure in this manner may be subjected to a heat treatment in order to accelerate the reaction as necessary. Here, as described above, since the photosensitive coating resin layer 5 is composed of an epoxy resin that is solid at room temperature, diffusion of cationic polymerization initiating species generated by pattern exposure is limited, and excellent patterning accuracy, The shape can be realized.

  Next, the pattern-exposed photosensitive coating resin layer 5 is developed using an appropriate solvent to form an ink discharge port 8 as shown in the “patterned coating resin layer development diagram” of FIG. Here, it is also possible to develop the dissolvable resin pattern 4 that forms the ink flow path simultaneously with the development of the unexposed photosensitive coating resin layer.

  However, in general, a plurality of recording heads having the same or different forms are disposed on the substrate 1 and used as an ink jet recording head through a cutting process. Therefore, as shown in FIG. By selectively developing only the photosensitive coating resin layer 5, the resin pattern 4 forming the ink flow path is left (the resin pattern 4 remains in the liquid chamber, so that dust generated during cutting does not enter) and is cut. It is also possible to develop the resin pattern 4 after the process (FIG. 6 flow path pattern elution diagram). At this time, since the scum (development residue) generated when developing the photosensitive coating resin layer 5 is eluted together with the soluble resin layer 4, almost no residue remains in the nozzle.

  An electrical connection (not shown) for driving the ink supply member 7 and the ink discharge pressure generating element 2 is formed on the substrate 1 formed with the ink flow path and the ink discharge port thus formed. As a result, an ink jet recording head is formed (a substrate diagram on which the ink supply unit of FIG. 7 is arranged).

  The ink jet recording head manufacturing method according to the present invention is effective as a full-line type recording head capable of recording simultaneously over the entire width of the recording paper, and also for a color recording head in which a plurality of recording heads are integrated or combined. It is.

  The above has described mainly the basic aspects to which the present invention can be applied. Next, embodiments of the present invention will be described in detail.

  First, in FIG. 1, a blast mask is placed on a silicon substrate 1 on which an electrothermal conversion element 2 (heater made of material HfB2) as an ejection energy generating element is formed, and a through-hole 3 for supplying ink is formed by sandblasting. Formed.

  Next, the following was used as the soluble resin layer 4 on the substrate 1.

(Resin composition 1)
Name parts by weight ODUR-1010 100 parts by weight KEMISORB 11 0.3 parts by weight (UV absorber)
ODUR-1010 is polymethyl isopropenyl ketone (trade name, manufactured by Tokyo Ohka Kogyo Co., Ltd.), and KEMISORB 11 is 2-hydroxy-4-methoxybenzophenone (trade name, manufactured by Chemipro Kasei Co., Ltd.). This was formed into a dry film on PET and transferred to the substrate 1 by lamination. ODUR-1010 was concentrated and used because it has a low viscosity and cannot form a thick film.

  Next, each of the above was pre-baked at 120 ° C. for 20 minutes, and then pattern exposure of the ink flow path 4 was performed using a mask aligner PLA520 (trade name Cold Mirror CM290) manufactured by Canon Inc. The exposure was 1.8 minutes, the development was methyl isobutyl ketone / xylene = 2/1, and the rinse was xylene. The pattern 4 formed of this dissolvable resin is for securing an ink flow path between the ink supply port 3 and the electrothermal conversion element 2 (FIG. 2). The resist film thickness after development was 10 μm.

  Next, a resin composition 1 shown below was dissolved in a methyl isobutyl ketone / xylene mixed solvent at a concentration of 50 wt%, and a photosensitive coating resin layer 5 was formed by spin coating (film thickness 10 μm on the flow path pattern 4, FIG. 3).

(Resin composition 1)
Name part by weight EHPE-3158 Daicel Chemical Co., Ltd. 100 parts by weight A-187 Nippon Unicar Co., Ltd. 5 parts by weight SP-170 Asahi Denka Kogyo Co., Ltd. 1.5 parts by weight Next, the mask aligner PLA520 (CM250) ), Pattern exposure for forming the ink discharge ports 8 was performed (FIG. 4). The exposure was performed for 15 seconds, and the after baking was performed at 60 ° C. for 30 minutes.

  Next, development was performed with methyl isobutyl ketone to form ink discharge ports. In the present embodiment, a discharge port pattern of φ10 μm was formed.

  Next, in order to enhance the removability of the dissolvable resin layer 4 (polymethylisopropenyl ketone), after exposing again with the PLA520 (CM290) for 2 minutes, it is immersed while applying ultrasonic waves to methyl lactate. The remaining ink flow path pattern 4 was eluted (FIG. 6).

  Next, the inkjet recording head is heated at 180 ° C. for 1 hour to completely cure the photosensitive coating material layer 5.

  Finally, as shown in the substrate diagram in which the ink supply member is arranged in FIG. 7, the ink supply member 7 is bonded to the ink supply port 3 to complete the ink jet recording head of this embodiment.

  The resin composition 2 of Table 2 was used for the meltable resin layer, and the exposure was performed for 2 minutes. Otherwise, an ink jet recording head was produced in the same manner as in Example 1 (film thickness on the flow path pattern 4 was 10 μm, FIG. 3).

(Resin composition 2)
Name parts by weight ODUR-1010 100 parts by weight KEMISORB 12 0.5 parts by weight (UV absorber)
KEMISORB 12 is 2-hydroxy-4-n-octoxybenzophenone (trade name, manufactured by Chemipro Kasei Co., Ltd.).

<Comparison example>
As a comparative conventional example, ODUR-1010 was used alone as a soluble resin layer, and exposure was performed for 1.5 minutes. Otherwise, an ink jet recording head was prepared in the same manner as in Example 1. A resin composition containing no ultraviolet absorber was used for this resin composition.

  The ink jet recording heads of Examples 1 and 2 thus prepared and the conventional comparative example were mounted on the recording apparatus, and pure water / diethylene glycol / isopropyl alcohol / lithium acetate / black dye hood black 2 = 79.4 / 15/3. When recording was performed using an ink having a ratio of 0.1 / 2.5, stable printing was possible in all of the examples, and the obtained printed matter was of high quality.

  However, in the comparative conventional example, disorder of printing was recognized. When each head was disassembled and observed, a scum of about several nanometers was observed in a part of the ink flow path at the entrance of the ink discharge port in the conventional example. No scum was observed in the head of this example.

  The present invention relates to a method for manufacturing a liquid jet recording head for generating recording liquid droplets used in a liquid jet recording method, and is generated in a part of an ink flow path by adding an ultraviolet absorber to a dissolvable resin layer. Scum can be reduced to a very small level or not at all.

It is a typical perspective view of the board | substrate applicable to the inkjet recording head which concerns on this invention. It is a typical sectional view showing the basic manufacturing process of the ink jet recording head concerning the present invention. It is a typical sectional view showing the basic manufacturing process of the ink jet recording head concerning the present invention. It is a typical sectional view showing the basic manufacturing process of the ink jet recording head concerning the present invention. It is a typical sectional view showing the basic manufacturing process of the ink jet recording head concerning the present invention. It is a typical sectional view showing the basic manufacturing process of the ink jet recording head concerning the present invention. 1 is a schematic cross-sectional view illustrating an example of an ink jet recording head according to the present invention.

Explanation of symbols

1 Substrate 2 Electrothermal conversion element (ink discharge pressure generating element)
3 Ink Supply Port 4 Ink Flow Pattern 5 Photosensitive Coating Resin Layer 6 Negative Mask 7 Ink Supply Member 8 Ink Ejection Port

Claims (4)

A substrate on which an ink discharge pressure generating element and a solid layer that occupies at least a portion that becomes a liquid path are coated with a nozzle forming material that is cured by a photoacid generating catalyst, and a discharge port is formed in the nozzle forming member. In a method for manufacturing a liquid jet recording head, including a step of forming a nozzle by removing the solid layer,
A method of manufacturing a liquid jet recording head, wherein the solid layer contains an ultraviolet absorber.   2. The method of manufacturing a liquid jet recording head according to claim 1, wherein the curable nozzle forming material to be coated is a cationic polymer of an epochine resin, and the ultraviolet absorber contained in the solid layer is not basic.   3. The method of manufacturing a liquid jet recording head according to claim 1, wherein the addition amount of the ultraviolet absorber is 0.01 to 10% by weight with respect to the other solid content of the solid layer.   A liquid jet recording head manufactured by the manufacturing method according to claim 1.

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