JP2005238155A - Composite structure forming apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mask used in an aerosol deposition method, concretely, a composite structure forming apparatus for forming the structure of particulates with a specific pattern on the surface of a substrate by jetting particulates of a brittle material toward the substrate. <P>SOLUTION: The deformation of the mask is prevented by structuring the mask used in the aerosol deposition method from the substrate formed by applying a material of at least one kind selected from a group of a resin having DHv2 of ≥40 and ≤80, grease, waxes, vaseline, elastomer and animal fat and oil on the surface of a base body composed of a metallic material or an inorganic material in the jetting nozzle side. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a mask used in an aerosol deposition method, more specifically, a composite structure in which fine particles of brittle material are sprayed toward a base material to form a structure of the fine particles on the surface of the base material. The present invention relates to an object forming apparatus.

  As a method for forming a structure mainly composed of a brittle material on the surface of a substrate, a technique called an aerosol deposition method has been recognized. This is because an aerosol in which fine particles of brittle material are dispersed in a gas is sprayed from a nozzle toward the base material, the fine particles collide with the base material, and the brittle material fine particles are deformed or crushed by the impact of the collision to join them. It is characterized by directly forming a structure composed of fine particle constituent materials on a substrate, and in particular a mechanical strength equivalent to a fired body in a process that can form a structure at room temperature that does not require a heating means. Can be obtained. The apparatus used in this method basically consists of an aerosol generator for generating aerosol and a nozzle for injecting the aerosol toward the base material. When a structure is produced with a larger area than the opening of the nozzle, In addition, it has a position control means that moves and swings the base material and the nozzle relative to each other, and has a chamber and a vacuum pump for forming a structure when producing under reduced pressure, and also generates aerosol It is common to have a gas source.

  In the structure formed by the aerosol deposition method, the fine particles collide with the base material, and the fine particles collide with each other by the impact of the collision. An anchor portion made of a brittle material that bites in is formed, and a structure made of the brittle material is formed on the anchor portion. Examples of the substrate on which the anchor portion is formed and the structure is formed include metals, ceramics, and glass.

  The resulting structure is dense and strong, and the anchor portion has good adhesion to the base material, but compressive residual stress is generated in the structure, so the base material faces the structure up. There is a problem of causing deformation along the convex shape. This is because of the feature of this method of colliding fine particles, because the structure is always exposed to compressive impact force when the structure is formed, stress is accumulated inside, and the structure is forged and expanded. it is conceivable that.

  On the other hand, in the case of forming a fine structure by the aerosol deposition method, according to Patent Document 1, a mask having an opening forming a predetermined opening pattern is arranged between a nozzle and a substrate, and the mask A method of injecting the fine particle material through the opening of the mask while relatively displacing the nozzle with respect to the mask while maintaining a constant distance from the growth surface of the structure on the substrate or the surface of the substrate. It has been taken.

JP-A-10-202171

  For the mask used in the aerosol deposition method described above, a metal material is generally used for reasons such as high processing accuracy and excellent strength. However, since the fine particles collide with the surface at the time of manufacturing the structure and a structure made of a brittle material is formed, the structure and the mask are deformed by the compressive residual stress, and a desired pattern is formed on the substrate surface. There was a problem that the accuracy of making it worsen.

  In order to solve the above-mentioned problem, in one embodiment of the present invention, a composite structure forming apparatus that forms fine particle structures in a specific pattern on a surface of a base material by injecting fine particles of brittle material toward the base material. And an aerosol generating means, an injection nozzle, a base material support means, and a pattern formation means used at least during the formation of a structure, interposed between the injection nozzle and the base material support, the pattern formation means, At least one material selected from the group consisting of resin, grease, wax, petroleum jelly, wax, elastomer, and animal oil and fat having a DHv2 of 40 to 80 on the surface of the base made of a metal material or an inorganic material on the jet nozzle side. Provided is a composite structure forming apparatus characterized by comprising a covered material.

As another embodiment of the present invention for solving the above-mentioned problems, a composite structure forming apparatus for forming fine particle structures in a specific pattern on the surface of the substrate by injecting fine particles of brittle material toward the substrate. An aerosol generating means, an injection nozzle, and a base material supporting means, and at least a pattern forming means used to be interposed between the injection nozzle and the base material support at the time of forming a structure, The surface of the substrate that is not deformed by the fine particle flux is coated with at least one material selected from the group consisting of grease, wax, petrolatum, wax, elastomer, and animal fat. A composite structure forming apparatus is provided.

  Further, as another embodiment of the present invention for solving the above-mentioned problem, a composite structure in which brittle material fine particles are sprayed toward a substrate to form the fine particle structure in a specific pattern on the substrate surface A mask for forming at least one selected from the group consisting of resin, grease, wax, petroleum jelly, wax, elastomer, and animal oil and fat having a DHv2 of 40 or more and 80 or less on a surface of a substrate made of a metal material or an inorganic material. A layer coated with a material is formed, and is disposed between the spray nozzle and the substrate support means of the composite structure forming apparatus including the aerosol generating means, the spray nozzle, and the base material support means. Provided is a composite structure forming mask characterized by being used with the covering layer side facing.

Further, as another embodiment of the present invention for solving the above-mentioned problem, a composite structure in which brittle material fine particles are sprayed toward a substrate to form the fine particle structure in a specific pattern on the substrate surface A forming mask, wherein a layer coated with at least one material selected from the group consisting of grease, wax, petrolatum, wax, elastomer, and animal fat is formed on the surface of the substrate that is not deformed by the fine particle flux. And between the spray nozzle and the substrate support means of the composite structure forming apparatus provided with the aerosol generating means, the spray nozzle, and the base material support means, with the coating layer side facing the spray nozzle side. A mask for forming a composite structure is provided.

  According to the present invention, it is possible to prevent the mask from being deformed when a structure is manufactured in the aerosol deposition method. Thereby, a desired composite structure can be formed with high accuracy.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 shows a production apparatus 10 for forming a composite structure according to the present invention, in which an aerosol generator 103 is installed through a gas transport pipe 102 at the tip of a nitrogen gas cylinder 101, and an aerosol transport pipe is downstream of the apparatus. A crusher 105 is disposed through 104, and is connected to a nozzle 108 having, for example, a 10 mm × 0.4 mm injection opening in the structure forming chamber 107 through the aerosol transport pipe 106. The aerosol generator 103 is filled with brittle material fine particles, for example, aluminum oxide fine particle powder. A mask 112 is disposed between the nozzle 108 and the substrate 110, and the substrate 110 is held on an XY stage 109 as a substrate support means. The structure forming chamber 107 is connected to the vacuum pump 111.

  The operation of the composite structure manufacturing apparatus 10 of the present invention will be described below. The nitrogen gas cylinder 101 is opened, the gas is sent into the aerosol generator 103, and at the same time, the aerosol generator 103 is operated to generate an aerosol in which brittle material fine particles and nitrogen gas are mixed in an appropriate ratio. Further, the vacuum pump 111 is operated to generate a differential pressure between the aerosol generator 103 and the structure forming chamber 107. Aerosol rides on this differential pressure and is introduced into the crusher 105 on the downstream side, and the agglomerates contained therein are crushed and converted into an aerosol containing a large amount of primary particles. This aerosol is accelerated through the aerosol carrier pipe 106 and sprayed from the nozzle 108 toward the substrate 110. At this time, the structure of the brittle material fine particles is formed in a specific pattern on the surface of the base material by the mask 112. The base material 110 is swung by the XY stage 109, and a film-like brittle material structure is formed on the base material 110 by collision of fine particles while changing the aerosol collision position.

  Next, an embodiment of a mask used in the present invention will be described with reference to FIG. A mask 20 as a pattern forming means is a group of resin, grease, wax, petroleum jelly, wax, elastomer, animal oil and fat having a DHv2 of 40 to 80 on the surface of a base 202 made of a metal material or an inorganic material having an opening 204. The layer 203 is coated with at least one material selected from the above, and the coating layer 203 is disposed so as to face the nozzle 201. The fine particle bundle ejected from the nozzle 201 passes through the opening 204 of the mask 20 and collides with the base material 205, and forms a specific pattern of a desired shape such as a large and small square shape as shown in FIG. A composite structure 206 is formed. The mask opening 204 has a shape required from a fine shape to an area larger than the fine particle flux.

  The base material is stainless steel, copper, aluminum, brass or the like, and the inorganic material is glass or alumina. Further, the substrate that is not deformed by the fine particle flux means a substrate that has a thickness that is not deformed by the fine particle bundle ejected from the nozzle in the case of other than a metal material or an inorganic material. It is preferable that it is 100 micrometers or more.

Moreover, the brittle material fine particles in the present invention are, for example, oxides such as Al ₂ O ₃ , SiO ₂ , NiO, TiO ₂ , CuO, ZnO, ZrO ₂ , SnO ₂ , MgO, WC, diamond, SiC, B4C, and the like. Examples thereof include carbides, nitrides such as AlN and Si ₃ N ₄ , fluorides such as CaF and ZrF, BaTiO ₃ and PZT.

Examples of the resin having a DHv2 of 40 or more and 80 or less include PP, PC, polystyrene, glass epoxy, and the like.

  The presence or absence of structure formation on various resin substrates was examined using an aerosol deposition method. Aluminum oxide was selected as the brittle material fine particles. Specifically, α-alumina having a purity of 99% or more and an average particle diameter of 0.2 μm was used. For the resin substrate, ABS (acrylonitrile butadiene styrene copolymer) having a thickness of about 1 to 2 mm, PET (polyethylene terephthalate), PE (polyethylene), PMMA (polymethyl methacrylate), PP (polypropylene), PC (polycarbonate), Eleven kinds of polystyrene, PTFE (polytetrafluoroethylene), epoxy resin ARALDITE XD911, a polyimide film formed on stainless steel with a thickness of several tens of μm, and a glass-epoxy substrate often used as an electronic circuit board were used.

The flow rate of the high purity nitrogen gas in the aerosol deposition method was 7 L / min. The formation of the structure was attempted to an area of 17 mm × 5 mm. The forming time was 10 minutes and the forming environment was room temperature. Table 1 shows the results of forming the obtained structure.

In Table 1, with regard to the structure formation status, when formation of the structure is observed (formed), formation is not observed, and when there is no visual change in the substrate (not formed), formation is observed. If the substrate is etched and scraped off from the surface (not formed or the substrate is scraped), and the formation of a structure is seen, the maximum formation thickness of the structure is set to Nippon Vacuum Technology Co., Ltd. Measurement was performed using a stylus type surface profile measuring device Dektak 3030. In addition, the load-unloading test was conducted using a dynamic ultra-micro hardness meter DUH-W201 manufactured by Shimadzu Corporation under the conditions of a Vickers indenter, a test force of 10 gf, a load speed of 1.350 gf / sec, and a holding time of 15 seconds. The values of the dynamic hardness DHv1 not considering the plastic deformation of the material and the dynamic hardness DHv2 considering the plastic deformation of the material are shown.
From this result, it can be seen that the value of the dynamic hardness DHv2 of the substrate greatly affects the presence or absence of the formation of the structure. FIG. 3 shows the situation in an easy-to-understand manner. When the DHv2 of the base material is arranged on the vertical axis, the numerical values are expressed in three levels: “formed”, “not formed”, “not formed / the substrate is scraped”. Can be classified. From this result, it can be said that when a resin having a DHv2 of 40 or more and 80 or less is used, formation of a structure of a brittle material by the aerosol deposition method can be prevented. In addition, a resin having a DHv2 of 40 or more and 80 or less can be applied to the surface of the metal or inorganic material substrate on the side of the injection nozzle, or can be suitably used by applying a film.

Using the aerosol deposition method using the apparatus shown in Fig. 1, liquid glue (manufactured by Arabic Yamato Yamato Co., Ltd.), vacuum grease (FS high vacuum grease, Dow Corning Asia Co., Ltd.), vacuum pump oil (SMR-100) Whether or not a structure was formed on a metal substrate coated with a vacuum pump oil (Alvac Co., Ltd.) on a portion where brittle material fine particles ejected from a nozzle could collide was examined. Aluminum oxide was selected as the brittle material fine particles. Specifically, α-alumina having a purity of 99% or more and an average particle diameter of 0.2 μm was used. Further, stainless steel 304 was used as the metal substrate, a nozzle having an opening of 0.4 mm in length and 20 mm in width was used, and high purity He gas was used as a carrier gas at a flow rate of 7 L / min. The formation area of the structure was 10 mm × 10 mm, and the formation time was 5 minutes.

FIG. 4 shows the state of the stainless steel substrate surface after the formation of the structure is attempted. In FIG. 4, the portion A is liquid paste, the portion B is vacuum grease, and the portion C is vacuum pump oil. In addition, nothing was applied to the portion D. Cured glue 401 was observed at location A where the liquid glue was applied, and a spot-like structure was formed at 402 after the cured glue was removed. In the portion B where the vacuum grease 403 was applied, after the formation of the structure was attempted, the structure was not formed on the substrate in 404 after the vacuum grease was wiped off. On the other hand, the composite structure 405 was formed in the same manner as the composite structure 406 in the place D where nothing was applied at the place C where the vacuum pump oil was applied. From this result, it can be said that the formation of the structure on the stainless steel substrate can be prevented by applying the vacuum grease 403.

Using the aerosol deposition method using the apparatus shown in FIG. 1, aluminum oxide having a purity of 99% or more and an average particle size of 0.2 μm is used as the brittle material fine particles, and a stainless foil having a thickness of 100 μm is made into 20 × 10 mm with scissors. On the cut substrate, vacuum grease was applied to the portion where the fine particles ejected from the nozzle could collide, and the warpage of the stainless steel foil after the formation of the structure was observed. For comparison, the warpage of the stainless steel foil after attempting to form a structure in the same manner without applying vacuum grease was also observed. The nozzle and gas used at this time were the same nozzle and gas as in Example 2, and the formation time of the structure was 10 minutes.

FIG. 5 shows the result of observing the stainless steel foil after attempting to form the structure. A is a stainless steel foil coated with vacuum grease, and B is a stainless steel foil not coated with vacuum grease. Formation of the structure was not confirmed on the stainless steel foil A of FIG. 5 to which the vacuum grease was applied, and no warping occurred. On the other hand, it was confirmed that the stainless steel foil B to which the vacuum grease was not applied was clearly warped in a convex shape. From this result, it can be said that the formation of the structure can be prevented and the deformation of the metal can be prevented by applying the vacuum grease to the portion where the brittle material fine particles can collide.

Schematic diagram showing a composite structure manufacturing apparatus in the present invention Schematic diagram showing the configuration of the mask in the present invention The graph which shows the relationship between the hardness (DHV1 and DHV2) of various resin, and the presence or absence of structure formation A diagram observing the presence or absence of structure formation on the base material when oil is applied to the metal base material in the aerosol deposition method The figure which observed the curvature of the base material with and without applying vacuum grease to the metal base material in the aerosol deposition method

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Composite structure preparation apparatus 101 ... Nitrogen gas cylinder 102 ... Gas conveyance pipe 103 ... Aerosol generator 104 ... Aerosol conveyance pipe 105 ... Crusher 106 ... Aerosol conveyance pipe DESCRIPTION OF SYMBOLS 107 ... Structure formation chamber 108 ... Nozzle 109 ... XY stage 110 ... Base material 111 ... Vacuum pump 112 ... Mask 20 ... Mask 201 ... Nozzle 202 ... Base 203 ... Coating layer 204 ... Opening 205 ... Base 206 ... Composite structure 401 ... Hardened paste 402 ... After removing hardened paste 403 ... Vacuum grease 404: After wiping off the vacuum grease 405 ... Structure 406 ... Composite structure

Claims (4)

A composite structure forming apparatus for spraying brittle material fine particles toward a base material to form a structure of the fine particles in a specific pattern on the surface of the base material, comprising: an aerosol generating means, an injection nozzle, and a base material supporting means; A pattern forming unit that is interposed between the spray nozzle and the base material support unit at least when a structure is formed. The pattern forming unit is provided on the spray nozzle side of a base made of a metal material or an inorganic material. A composite structure comprising a surface coated with at least one material selected from the group consisting of resin, grease, wax, petrolatum, wax, elastomer, and animal fats and oils having a DHv2 of 40 to 80. Forming equipment A composite structure forming apparatus for spraying brittle material fine particles toward a base material to form a structure of the fine particles in a specific pattern on the surface of the base material, comprising: an aerosol generating means, an injection nozzle, and a base material supporting means; A pattern forming unit that is interposed between the spray nozzle and the base material support at least when a structure is formed, and the pattern forming unit is a surface on the spray nozzle side of the substrate that is not deformed by the fine particle flux. And a composite structure forming apparatus comprising a material coated with at least one material selected from the group consisting of grease, wax, petrolatum, wax, elastomer, and animal fats and oils A composite structure forming mask for spraying brittle material fine particles toward a base material to form a structure of the fine particles in a specific pattern on the surface of the base material, on a surface of a base material made of a metal material or an inorganic material A layer coated with at least one material selected from the group consisting of resin, grease, wax, petrolatum, wax, elastomer, and animal oil and fat having a DHv2 of 40 to 80, an aerosol generating means, an injection nozzle, A composite structure comprising: a composite structure forming apparatus including a substrate support means, wherein the coating nozzle side is interposed between the spray nozzle and the substrate support means, with the coating layer side facing the spray nozzle side. Object formation mask A mask for forming a composite structure in which fine particles of brittle material are jetted toward a base material to form the fine particle structure in a specific pattern on the surface of the base material, and the mask is not deformed by the fine particle flux. , A layer coated with at least one material selected from the group consisting of grease, wax, petrolatum, wax, elastomer, and animal fat and oil, and a composite comprising an aerosol generating means, an injection nozzle, and a substrate supporting means A composite structure forming mask characterized by being used with the coating layer side facing the spray nozzle side between the spray nozzle of the structure forming apparatus and the substrate support means

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