JP2005318712A - Structure substrate having minute protrusion group and method for manufacturing the same - Google Patents

Abstract

【Task】
To provide a structural substrate provided with a group of minute protrusions capable of controlling the position, bottom area, and height.
[Solution]
The organic polymer substrate has a columnar microprojection group made of organic polymer extending from the substrate, and at least a part of the surface of the columnar microprojection group is formed of a material different from that of the substrate. A structural substrate having a group of minute protrusions.
The invention also discloses an actuator, an optical device, a flow path chip and the like using the structure having the above-mentioned microprojection group.
【effect】
ADVANTAGE OF THE INVENTION According to this invention, the structure board | substrate provided with the microprojection group made from an organic polymer which can control a dimension, an aspect-ratio, etc. freely can be provided. In addition, since an organic polymer is used to manufacture the microprojections, an inexpensive structural substrate can be provided that can be formed by a simple manufacturing technique called pressing.
[Selection] Figure 1

Description

  The present invention relates to a structure substrate having an organic polymer microprojection group and changing the inclination angle of the microprojection group by thermal control, and a manufacturing method thereof, and also relates to an actuator element, a light control element, a flow path chip and the like using the structural substrate.

  Japanese Patent Application Laid-Open No. 2003-111456 discloses a piezoelectric actuator in which a moving body moves to a predetermined method along the side wall using a plurality of piezoelectric actuator elements attached to an arbitrary side wall that performs cilia movement. . Each actuator element comprises a metal base, a piezoelectric element made of piezoelectric ceramic such as PZT provided on both sides of the base, and a plurality of electrodes. A plurality of actuator elements are arranged on an arbitrary side wall together with the phase difference generating element. The phase difference generating element applies a predetermined phase delay to the input current to generate a predetermined phase difference in the current sent to the electrodes of each of the plurality of actuator elements, and the phase of the current sent to the piezoelectric actuator element Is to control. The disclosed piezoelectric actuator is easier to reduce in size and weight than the conventional electromagnetic, electric, and hydraulic / pneumatic methods, and can be provided at low cost because the device is simple. Application to the above-mentioned movement of moving bodies, movement of moving bodies inside narrow tubes, micromachine exploration robots that inspect the inside of narrow tubes, and display devices are being studied.

  Conventionally, as a so-called dimming means for controlling light transmittance / reflectance, a blind or colored film that is physically dimmed, a photochromic material or a thermochromic material that changes its color tone by light or heat, and an electric dimmer Liquid crystals that emit light are known. The dimming means can be used for a wide variety of purposes, such as solar radiation control mechanisms for window glass of houses and cars, display devices such as displays, and recording sheets.

  Blinds and colored films are often used as a simple and inexpensive dimming means for adjusting solar radiation over a large area, but delicate control of light intensity and color tone is not easy.

  The photochromic material can change the color tone according to the light intensity, and the thermochromic material can change the color tone according to the temperature, and its application to sensors, information recording, light control glass, and the like has been studied.

  The liquid crystal can be reversibly changed to a transparent state or a cloudy state depending on a difference in molecular orientation depending on whether or not voltage is applied. In other words, it has the advantage of being able to adjust the light quantity and color tone with high accuracy within a practical range using only electrical signals, and is therefore applied to solar radiation control mechanisms for car window glass, display devices such as displays, and the like.

JP 2003-111456 A

  In the technique described in Patent Document 1, the piezoelectric actuator element is composed of a metal base, a piezoelectric element made of piezoelectric ceramic such as PZT provided on both sides of the base, and a plurality of parts. Therefore, the structure becomes complicated and a process for assembling the parts is required. Furthermore, since a process of attaching a plurality of piezoelectric actuator elements to an arbitrary side wall is necessary, the entire process becomes complicated.

  On the other hand, when a photochromic material or a thermochromic material is used as the light control means, it has been pointed out that it is difficult to keep the light control state constant and that there is a problem in repeated stability.

  Further, the light control means using liquid crystal requires a pair of transparent electrodes over the entire surface of the substrate, and the configuration is complicated.

  The structural substrate having the microprojection group of the present invention has an organic polymer microprojection group extending from the organic polymer base, and at least a part of the surface of the microprojection group is defined as the base. It is characterized by being formed of different materials.

  In the present invention, after forming the microprojection group made of an organic polymer, a layer made of a material having a coefficient of thermal expansion different from that of the base is formed on a part of the surface of the microprojection group. The angle is changed by thermal control.

  In addition, the structure board | substrate provided with the microprotrusion group of this invention also contains a film and a sheet | seat. In the present invention, unless otherwise specified, the organic polymer means only the organic polymer, and also includes those whose physical properties are changed by adding an inorganic filler thereto or chemically modifying the organic polymer.

  The present invention is characterized in that the inclination angle of the microprojection group is changed by thermal control to change the position and angle of an object placed on the microprojection group.

  The present invention is characterized in that the tilt angle of the microprojection group is changed by thermal control to control the transmittance or reflectance of light incident on the structure substrate.

  The present invention is characterized in that the micro-projections made of the organic polymer are formed in a flow path, and the flow rate is changed by changing the inclination angle of the micro-projections by thermal control.

  The shape of the organic polymer of the microprojection group is columnar, the equivalent diameter is 10 nm to 500 μm, the height is 50 nm to 5000 μm, and the equivalent diameter (D) with respect to the height (H) of the columnar microprojection group The ratio (H / D) is desirably 1 or more. This is because, when the aspect ratio is somewhat large, arbitrary characteristics as a functional substrate or a functional element can be designed, and the use is expanded accordingly.

  In the present invention, the equivalent diameter of the columnar microprotrusions is an equivalent diameter at an intermediate position of the protrusions. The term equivalent diameter is used because the cross section of the protrusion is not necessarily circular but may be an ellipse, a polygon, an asymmetric shape, etc. In the present invention, the equivalent diameter is used to encompass all of these. ing. The aspect ratio (H / D) is more preferably 4 to 30. However, 100 or less is preferable from the viewpoint of structural strength.

  The shape of the organic polymer of the microprojection group may be a wall shape, the equivalent width is 10 nm to 500 μm, the equivalent length is twice or more the equivalent width, and the height is 50 nm to 5000 μm. The ratio (W / D) of the equivalent width (W) to the height (H) of the microprojection group is more preferably 4-30. However, 100 or less is preferable from the viewpoint of structural strength.

  The substrate or film provided with the microprojection group of the present invention is a thermoplastic resin or uncured by using a micromold (precision mold) in which a concave group having a specific arrangement (hereinafter referred to as a pit group) is formed. A pattern is formed according to the type of the pit group.

  The mold is made of quartz, for example. By pulling the mold away from the thin film, a group of minute protrusions is formed. In particular, the height of the protrusion can be adjusted by the aspect ratio of the unevenness group (pit group) of the mold (molding die), and the position and bottom area of the protrusion can be adjusted by the position of the recess formed in the mold and the opening area. When the mold is separated from the thin film, the thermoplastic resin that has entered the pit, the uncured photocurable resin, or the thermosetting resin may be stretched to form a desired group of microprojections. Good. This manufacturing method will be described in detail later.

  The projections constituting the microprojection group have a slightly larger equivalent area of the bottom surface than the equivalent area of the tip. This is advantageous in ensuring the self-supporting and self-supporting properties of the resin-made microprojections, and the microprojections have a portion that becomes narrower from the root in contact with the base toward the tip. ing. Moreover, it is desirable that the microprojection group and the base material are the same. In particular, the protrusion and the substrate to which the protrusion is connected are preferably integrated. Since the microprojection group of the present invention can have a structure in which microprojections are densely packed, individual microprojections can be made difficult to be crushed and removed from the substrate.

  In the microprojection group, the organic material may be a thermoplastic polymer material, an uncured photocurable resin, or a thermosetting resin in the manufacturing process. The organic material may be a thermoplastic photocurable polymer material. For example, the main component of the microprojection group is cycloolefin polymer, polymethyl methacrylate (PMMA), polystyrene, polycarbonate, polyethylene terephthalate (PET), polylactic acid, polypropylene, polyethylene, polyvinyl alcohol, ABS resin, AS resin, polyamide, polyacetal, Polybutylene terephthalate, glass reinforced polyethylene terephthalate, modified polyphenylene ether, polyvinyl chloride, polyphenylene sulfide, polyether ether ketone, liquid crystalline polymer, fluororesin, polyarate, polysulfone, polyethersulfone, polyamideimide, polyetherimide, thermoplastic Thermoplastic resin such as polyimide, phenol resin, melamine resin, urea resin, epoxy resin, unsaturated polyester Resin, silicone resin, diallyl phthalate resin, polyamide bismaleimide, poly bisamide thermosetting resin triazole and the like, and the like these blended material of two or more or photocurable material a photosensitive substance is added. Moreover, you may add antioxidant, a flame retardant, etc. to these materials.

  When the aforementioned mold is pressed against the thin film of thermoplastic resin and peeled off, the resin press-fitted into the pit is stretched so that the equivalent diameter or equivalent width of the protrusion is slightly smaller than the inner diameter or inner width of the pit. Small projections can be formed which are small but longer than the pit depth. How much of the equivalent diameter or width and how long the microprojections become depends on the type of resin used, physical properties (molecular weight, etc.), and molding conditions (pit depth, temperature, molding pressure, etc.). It is good to confirm by various experiments.

  When the thin film of the thermosetting resin is in an uncured state, a precision mold having pits with a predetermined arrangement is pressed and peeled to form a group of minute protrusions with the desired shape. Is done. Next, a functional substrate with high mechanical strength can be obtained by curing this by heat curing, photocuring or the like. In curing the thermosetting resin, a curing temperature and a heating profile are examined in order to select conditions such that the resin does not melt and flow or deform. Of course, a curing agent or a curing accelerator may be added to the thermosetting resin.

The material formed on a part of the surface of the columnar microprojection group may be any material having a different thermal expansion coefficient from the organic polymer forming the microprojection group, and resin, oxide film, metal, or the like is used. Can do. For example, oxides and metals include Si, Zr, Th, Mg, Al, Y,
Elements such as Hf, Sc, Ti, Ta, Li, Nb, Ta, Zn, Nb, F, Zn, S, Ni, Au, Ag, and Cu are included. The resin, oxide film, and metal having a different thermal expansion coefficient from the organic polymer forming the microprojection group are formed on a part of the surface of the microprojection group by a thin film forming technique such as vapor deposition, sputtering, or plating. The change in the inclination angle by controlling the temperature of the microprojection group, which will be described later, depends on the organic polymer that forms the microprojection group to be used, the material that is formed on a part of the surface of the microprojection group, and the thickness. It is good to confirm by.

  ADVANTAGE OF THE INVENTION According to this invention, the structure board | substrate provided with the microprotrusion group made from an organic polymer which can control a dimension, an aspect-ratio, etc. freely can be provided. In addition, since an organic polymer is used to manufacture the microprojections, an inexpensive structural substrate can be provided that can be formed by a simple manufacturing technique called pressing.

  Although it is easy to produce a microprojection having a small aspect ratio, it is possible to form a microprojection with a nanometer unit and a large aspect ratio of 4 or more by a simple method. Accordingly, it is possible to obtain a structural substrate on the order of nm that can be developed for various uses. It is also possible to change the distance (pitch, P) between the center positions of the protrusions depending on the position and give a changed function.

Example 1
FIG. 1 is a schematic perspective view of a structural substrate 100 provided with a microprojection group 104 produced in this example. The material of the microprojection group 104 is PMMA, and the molecular weight is 20,000 to 600,000. The base 102 made of the same organic polymer as the microprojection group 104 is continuous with the projection group and firmly fixes the projection group. In FIG. 1, the microprojection group 104 has the same shape and is aligned in the vertical and horizontal directions, but may be formed randomly. Further, the height dimension and aspect ratio of the projection group may be changed depending on the position where the projection is formed. Such a change is a feature that can be achieved by the production method of the present invention.

  Furthermore, a specific function can be given by deleting a part of the projection group. According to the method of the present invention, it is possible to easily form a functional substrate having a defect portion in one step by previously forming a defect portion of the projection group on the mold.

After forming the microprojection group 104, an aluminum layer is formed on a part of the surface of the columnar microprojection group. At this time, the thermal expansion coefficient of PMMA forming the microprojection group 104 is 80 × 10 ⁻⁶ / ° C. and the thermal expansion coefficient of aluminum is 4 × 10 ⁻⁶ / ° C. The tilt angle can be controlled by the control.

(Example 2)
FIG. 2 is a perspective view showing a structure of a structural substrate 200 having a group of protrusions according to another embodiment, and FIG. 3 is a view showing a side structure of a microprojection 204. FIG. 4 is a flowchart showing a manufacturing process of the structural substrate having the microprojection group shown in FIGS.

2 and 3, the height of the columnar microprojection 204 is 3 μm, the equivalent diameter is 330 nm at the root, and 300 nm at the intermediate height position. The columnar microprojection 204 has a smooth surface state at the upper portion of about 1 μm, and the surface of the portion of about 2 μm from the root has a horizontal stripe pattern 209 as shown in FIG.

  Since the columnar microprojections 204 are formed with a constant pitch P, the equivalent diameter of the bottom surface is 330 nm, and the height is 3 μm, the aspect ratio at the bottom surface is 9. Further, since the equivalent diameter at the intermediate height position of the microprojection 204 is 300 nm, the aspect ratio at the intermediate height position is 10, which is a sufficiently large aspect ratio of 4 or more. In the present invention, the aspect ratio is a value at the intermediate height position of the fine protrusion unless otherwise specified.

  Moreover, it can be seen that the columnar microprojections 204 have a tip portion smaller than a bottom surface portion, and have a divergent shape. In the present embodiment, the shape of the columnar microprojections is a shape that narrows from the root to the tip, but may be a shape that narrows from the root to the tip and the tip portion swells, for example. One feature of the columnar microprojection of the present invention is that it has a portion that becomes narrower from the root to the tip. Since the tip of the protrusion is smaller and wider than the bottom of the protrusion, the protrusion is difficult to remove from the substrate. Further, since the protrusion is the same as the base material, the protrusion is difficult to remove from the base.

  The columnar microprojections 204 are made of the same PMMA as the base film (thin film) 202. The columnar microprojections 204 are connected to the base film 202 and are integrated.

After forming the microprojection group, an aluminum layer is formed on a part of the surface of the columnar microprojection group. At this time, the thermal expansion coefficient of PMMA forming the microprojection group is 80 × 10 ⁻⁶ / ° C., and the thermal expansion coefficient of aluminum is 4 × 10 ⁻⁶ / ° C. Therefore, the temperature control of the microprojection group described later is performed. The tilt angle can be controlled by.

  FIG. 2 is a perspective view of a structural substrate 200 provided with a group of protrusions produced by the manufacturing method of FIG. The structural substrate 200 includes a thin film 202 (PMMA) having a thickness of 0.5 μm, a first glass substrate 203 having a thickness of 550 μm and a width of 100 mm, a columnar microprojection 204 having an equivalent diameter of 300 nm mainly composed of PMMA, and the It consists of an aluminum film with an average thickness of 100 nanometers formed on a part of the surface of the columnar microprojection 204.

  In this embodiment, PMMA is used as the material for the columnar microprojections 204 and the base film 202. However, cycloolefin polymer, polystyrene, polycarbonate, polyethylene terephthalate (PET), polylactic acid, polypropylene, or other materials described above may be used.

In this example, an aluminum layer was formed on a part of the surface of the columnar microprojection group. However, aluminum, nickel, gold, Al ₂ O _3, etc. SiO _2, or may be used the above-mentioned other materials.

FIG. 8 shows a manufacturing method of the main part of the structural substrate having the microprojections. As the substrate 401, a glass wafer having a diameter of 150 mm was used. A PMMA resin film 404 having a molecular weight of 120,000 was applied to the surface of the substrate 401 by spin coating. The thickness of the resin film 404 is 1.5 μm. Next, a mold 405 having pits formed on the surface was pressed on the resin film 404. The mold 405 is a silicon wafer having a crystal orientation (100) and a diameter of 150 millimeters. The mold 405 was pulled up vertically to form columnar microprojections 406. As shown in FIG. 8, the aspect ratio of the columnar microprojections 406 is about four times the aspect ratio (about 1) of the pits of the mold 405. It is generally difficult to form nm-level pits having a large aspect ratio in the mold 405, but the columnar microprojections 406 having a large aspect ratio can be easily formed by using the method of this embodiment.

  In this embodiment, a glass wafer having a diameter of 150 mm is used as the substrate 401, but the substrate 401 is not limited to a glass wafer. For example, an inorganic material other than glass, an organic material such as polycarbonate, or a laminated structure thereof may be used.

  In this embodiment, the resin film 404 made of PMMA is formed on the surface of the substrate 401. For the resin film 404, for example, an organic polymer such as cycloolefin polymer, polystyrene, polycarbonate, or polypropylene is used in addition to PMMA. Can do. Moreover, you may add inorganic substances, such as a silica, to these polymers.

  In this embodiment, a silicon wafer having a crystal orientation of (100) and a diameter of 150 millimeters was used as the mold 405. However, a metal thin film such as nickel or PDMS (thermosetting or photocurable polydimethylsiloxane) is used. It may be organic.

  Further, the diameter and height of the columnar microprojections 406 can be controlled by adjusting the depth of the recesses (pits) of the mold 405 and the thickness and viscosity of the resin film 404. By increasing the opening area of the concave portion of the mold 405, the size of the bottom of the columnar microprojection 406 can be controlled. Furthermore, by controlling the position of the pits of the mold 405, the position where the columnar microprojections 406 are formed can be controlled.

  Further, by using a thermoplastic resin as the material of the columnar microprojections 406, the temperature at the time of forming the columnar microprojections 406 can be adjusted, and the shape of the columnar microprojections 406 can be easily controlled. Further, by using the columnar microprojections 406 as a photocurable material, the shape of the columnar microprojections 406 can be easily controlled by irradiating light when forming the columnar microprojections 406.

  Next, the manufacturing method of the structural substrate 200 provided with the projection group will be described in detail. FIG. 4 is a flowchart showing a method of manufacturing the structural substrate 200 according to this embodiment shown in FIGS.

  First, PMMA (solvent; ethyl cellosolve) was spin-coated to form a first resin film 404 on a glass substrate 401 as shown in FIG.

  Next, a mold (precise mold) 405 shown in FIG. 4B in which pits having a depth of 1 μm and a diameter of 500 nm are formed on the surface with a pitch of 1 μm is pressed onto the first resin film 404 and a part of the resin film is formed. After press-fitting into the pit, the mold 405 was peeled off. Thereby, as shown in FIG.4 (c), the columnar microprotrusion 406 was formed.

As shown in FIG. 2, the columnar microprojections 204 are arranged with a height of 3 μm and a period of 1 μm (pitch, P) as shown in FIG. The equivalent diameter at the intermediate position in the height direction of the columnar protrusion is 300 nm and is 330 nm at the root. The columnar microprojection 204 has an upper portion of about 1
The part of μm has a smooth surface state as shown in FIG. 3, and the surface of the part of about 2 μm from the root may have a striped pattern 209 or a huge part.

  Moreover, since the equivalent diameter of the intermediate height of the columnar microprojections 204 is 300 nm and the height is 3 μm, the ratio of the height to one side (aspect ratio) is 10, which is sufficiently larger than 4. It can also be seen that the cross-sectional area of the tip of the columnar microprojection 204 is smaller than the cross-sectional area of the bottom surface and is divergent. The columnar microprojections 204 are made of the same PMMA as the thin film 202. The columnar microprojections 204 are connected to the thin film 202 and integrated.

  Although the reason has not yet been elucidated, when the mold is peeled off from the resin film, a portion enlarged in the diameter direction may be formed at the tip of the microprojection. Even if there is this enormous portion, the function of the microprojection group is not impaired. The present invention also includes such a structure.

  Next, as shown in FIG. 4D, an aluminum layer 409 is deposited on a part of the surface of the columnar microprojection 406 by a sputtering technique to obtain a structural substrate 200 having a projection group. Note that the glass substrate 401 on which the columnar microprojections 406 were formed was placed in a sputtering apparatus so that the aluminum atom particles collided with one side surface of the columnar microprojections.

  The columnar microprojections in the present invention do not have to have the shape shown in FIG. 2, but when the columnar microprojections are formed by the press molding method of a thermoplastic resin film described below, as shown in FIGS. It is common to become. That is, the upper end of the microprojection 204 has a smaller cross-sectional area than the lower end, and as shown in FIG. 3, the upper portion of the projection is smooth, but the lower portion may have some lines 209 in the horizontal direction. . The reason why this line is generated has not been elucidated, but this is one of the geometric features of the columnar microprojections formed by the press mold method.

  In this embodiment, the main component of the microprojections 204 and 406 and the resin film 404 is PMMA. However, other thermoplastic resins such as polymer materials including cycloolefin polymer, polystyrene, polycarbonate, polyethylene terephthalate (PET), polylactic acid or polypropylene may be used.

In this example, an aluminum layer was formed on a part of the surface of the columnar microprojection group. However, it may be a resin, an oxide film, or a metal having a different thermal expansion coefficient from that of the other organic polymer forming the microprojection group. For example, aluminum, nickel, gold, Al ₂ O ₃ , SiO ₂ or the like may be used.

  As described above, the columnar microprojections 204 of the structural substrate 200 including the microprojection group are formed by press molding, and do not require dry etching or photolithography as in the conventional semiconductor process, and are small at low cost. There is an effect that the structure substrate 200 including the protrusion group can be manufactured.

The structural substrate 200 provided with the microprojection group of the present embodiment can change the inclination angle of the microprojection group by thermal control. In this example, the thermal expansion coefficient of PMMA forming the microprojection group is 80 × 10 ⁻⁶ / ° C., and the thermal expansion coefficient of aluminum is 4 × 10 ⁻⁶ / ° C. The tilt angle can be controlled by controlling the temperature.

(Example 3)
FIG. 5 is a perspective view showing a structure in which the structural substrate 200 having the microprojections of the present invention is applied to an actuator element.

  In FIG. 5, the height of the wall-shaped microprojection 204 is 320 μm, the equivalent width is 40 nm, and the equivalent length is 200 nm.

The wall-shaped microprojections 204 are formed at a constant pitch P, have a corresponding width of 40 nm, and a height of 320 μm. Therefore, the aspect ratio is 8, and the aspect ratio is a sufficiently large aspect ratio of 4 or more.

  The wall-shaped microprojections 204 are made of the same PMMA as the base film (resin film) 502. The wall-shaped microprojections 204 are connected to the base film 202 and integrated.

After forming the projection group, an aluminum layer is formed on a part of the surface of the wall-shaped microprojection group. At this time, the thermal expansion coefficient of PMMA forming the microprojection group is 80 × 10 ⁻⁶ / ° C., and the thermal expansion coefficient of aluminum is 4 × 10 ⁻⁶ / ° C. Therefore, the inclination angle by temperature control of the microprojection group Control becomes possible.

FIG. 5 is a perspective view of an actuator element 200 having a group of minute protrusions manufactured by the same manufacturing method as in the first embodiment. The actuator element 200 includes a thin film 202 having a thickness of 0.5 μm.
(PMMA), a glass first substrate 203 having a thickness of 550 μm and a width of 100 millimeters, a wall-shaped microprojection 204 having an equivalent width of 40 nm mainly composed of PMMA, and a part of the surface of the wall-shaped microprojection 204 The formed aluminum film has an average thickness of 40 nanometers.

  In this embodiment, PMMA is used as the material for the wall-shaped microprojections 204 and the base film 202. However, cycloolefin polymer, polystyrene, polycarbonate, polyethylene terephthalate (PET), polylactic acid, polypropylene, or other materials described above may be used.

In this example, an aluminum layer was formed on a part of the surface of the wall-shaped microprojection group. However, aluminum, nickel, gold, Al ₂ O _3, etc. SiO _2, or may be used the above-mentioned other materials.

  The manufacturing method of the main part of the actuator element provided with the microprojection group of the present embodiment is the same as that of the first embodiment. However, the aspect ratio of the wall-shaped microprojections 206 is about three times the aspect ratio (about 1) of the pits of the mold.

  As described above, the wall-shaped microprojections 204 of the actuator element 200 having the microprojection group are formed by press molding, and do not require dry etching or photolithography unlike the conventional semiconductor process, and the microprojection group. There exists an effect which can manufacture the actuator element 200 provided with.

In the actuator element 200 having the microprojection group of this embodiment, an element for controlling the temperature, a control circuit, etc. are arranged on the back of the base of the element, and the temperature of the microprojection is arbitrarily changed to tilt the microprojection 204. The moving body 208 placed on the microprojection group can be moved by controlling the angle.

  FIG. 6 is a diagram for explaining how the moving body 208 moves. FIG. 6A shows an initial state. By giving an arbitrary temperature distribution to the microprojection group composed of two kinds of materials, each microprojection changes the inclination angle according to the temperature, and the moving body 208 moves as shown in FIG. 6B. . Further, in this embodiment, as shown in FIG. 6C, only the installation angle of the object 207 on the group of minute protrusions can be changed.

  In addition, when the protrusion on the minute wall in this embodiment is inclined in the direction in which the side surface on which the aluminum layer is formed is directed to the substrate side, the protrusion on the minute wall may be inclined while being curved.

Example 4
In this embodiment, an example will be described in which a structural substrate 200 having a projection group is applied to a light transmittance / reflectance control element having a dimming function in which the transmittance / reflectance of incident light changes with temperature. FIG. 7 is a schematic configuration diagram of a light transmittance / reflectance control element manufactured according to the present invention. The light transmittance / reflectance control element 200 includes a thin film 202 (PMMA) having a thickness of 0.5 μm, a glass substrate 203 having a thickness of 550 μm and a width of 100 mm, an equivalent width of 40 nm mainly composed of PMMA, and an equivalent length of 200 nm. , A wall-shaped microprojection 204 having a height of 320 nm, and an aluminum layer having an average thickness of 40 nanometers formed on a part of the surface of the wall-shaped microprojection 204.

The thermal expansion coefficient of PMMA forming the wall-shaped microprojection group 604 is 80 × 10 ⁻⁶ / ° C., and the thermal expansion coefficient of aluminum is 4 × 10 ⁻⁶ / ° C. Angle control becomes possible. FIG. 7A is a diagram showing an initial state of the light transmittance / reflectance control element of the present invention. As the temperature around the substrate rises, the extension of the PMMA having a large thermal expansion coefficient increases, and the projections on the minute wall are inclined in the direction in which the side surface on which the aluminum layer is formed faces the substrate side as shown in FIG. To reduce the transmittance of incident light. Then, the tilt of the microprojection group returns to the original state by lowering the temperature of the tilted microprojection group.

  When the projections on the minute wall are inclined in the direction in which the side surface on which the aluminum layer is formed is directed toward the substrate, the minute wall-shaped projections may be inclined while being curved.

  When the light transmittance / reflectance control substrate of this example is used for a window glass, the projections on the microwall are incident in a direction in which the side surface on which the aluminum layer is formed faces the substrate side in a high temperature period. The transmittance of light was lowered, and the transmittance was lowered to 1/10 or less as compared with a normal window glass.

In this embodiment, the aluminum layer is formed on a portion of the surface of the microprojection group, but an oxide film layer having a high light transmittance may be formed. For example, when an Al ₂ O ₃ layer having an average thickness of 40 nanometers is formed, the thermal expansion coefficient of PMMA is 80 × 10 ⁻⁶ / ° C., and the thermal expansion coefficient of Al ₂ O ₃ is 7 × 10 ⁻⁶ / ° C. As a result, the tilt angle can be controlled by controlling the temperature of the microprojections. And when the structural substrate provided with the microprojection group of the present embodiment is used for the window glass, the microwall projections are directed in the direction in which the side surface on which the Al ₂ O ₃ layer is formed faces the substrate side as the temperature rises. The color of transmitted light was changed by tilting and functioned as an illumination glass. Further, the present invention can be applied to a display device by combining with an element such as a color filter used in a display.

(Example 5)
FIG. 9 is a perspective view showing the structure of a flow channel chip 500 having a group of minute protrusions produced by the manufacturing method of FIG. The channel chip 500 is made of a silicon nitride spacer 501 having a height of 3 μm, a resin film 502 having a thickness of 0.5 μm (PMMA to which an antioxidant and a flame retardant are added), a first silicon made of silicon having a thickness of 550 μm and a width of 1 mm. It consists of a substrate 503, a second substrate 507 made of polycarbonate, and a columnar microprojection 506 having an equivalent diameter of 300 nm mainly composed of PMMA.

  In this embodiment, PMMA is used as the material for the columnar microprojections 506 and the resin film 502. However, cycloolefin polymer, polystyrene, polycarbonate, polyethylene terephthalate (PET), polylactic acid, polypropylene, or other materials described above may be used.

  Next, the manufacturing method of the flow path chip 500 will be described in detail. FIG. 10 is a flowchart showing a manufacturing method of the flow channel chip 500 according to the present embodiment shown in FIG. First, as shown in FIG. 10B, a silicon nitride film 511 having a thickness of 3 μm was deposited on the first substrate 503 made of silicon shown in FIG.

  Next, as shown in FIG. 10C, the silicon nitride film 511 was patterned by photolithography to form a spacer 501. Next, PMMA (solvent; ethyl cellosolve) to which 5% by weight of silica ultrafine particles having a particle size of 2 nm is added is spin-coated, and the first 503 is formed on the spacer 501 and the first substrate 503 as shown in FIG. The resin film 502 was formed.

Next, pits having a depth of 1 μm and a diameter of 500 nm were formed on the surface with a pitch of 1 μm.
A mold (precision mold) 505 shown in (e) was pressed onto the first resin film 502 and a part of the resin film was pressed into the pit, and then the mold 505 was peeled off. Thereby, as shown in FIG.10 (f), the columnar microprotrusion 506 was formed. A support body 509 is provided on the back surface of the mold 505 so that the pressing force to the resin film is constant, and the resin film and the mold surface are maintained in parallel.

  As shown in FIG. 9, the columnar microprojections 506 are arranged with a height of 3 μm and a period (pitch, P) of 1 μm. The equivalent diameter at the intermediate position in the height direction of the columnar protrusion is 300 nm and is 330 nm at the root.

  In addition, since the equivalent diameter of the intermediate height of the columnar microprojections 506 is 300 nm and the height is 3 μm, the ratio of the height to one side (aspect ratio) is 10, which is sufficiently larger than 4. Also, it can be seen that the cross-sectional area of the tip of the columnar microprojection 504 is smaller than the cross-sectional area of the bottom surface and is divergent. The columnar microprojections 506 are made of the same PMMA as the resin film 502. The columnar microprojections 506 are connected to the resin film 502 and integrated.

An Al ₂ O ₃ layer having an average thickness of 80 nanometers was deposited on a part of the surface of the columnar microprojections 504 obtained in FIG. Note that the structure substrate on which the columnar microprojections 506 were formed was placed in the sputtering apparatus so that the aluminum atom particles collided with one side surface of the columnar microprojections.

Next, a second resin film 513 having the same component as that of the resin film 504 was formed on a second substrate 512 made of polycarbonate by a spin coating method as shown in FIG. Next, the second substrate 512 was overlaid as shown in FIG. Next, the first substrate 503 and the second substrate 512 were heated at 150 ° C. for 2 minutes while applying a pressure of 10 MPa to obtain a flow channel chip 500 shown in FIG. In the process of FIG. 10G, the resin film 502 and the resin film 508 are joined and integrated.

  As shown in FIG. 9, the columnar microprojections 506 are integrated with the resin film 502. The columnar microprojections 506 are arranged with a period (pitch, P) of 1 μm so that fluid flows through the flow path.

In this example, an Al ₂ O ₃ layer having an average thickness of 80 nanometers was formed on a part of the surface of the microprojection group. At this time, since the thermal expansion coefficient of PMMA is 80 × 10 ⁻⁶ / ° C. and the thermal expansion coefficient of Al ₂ O ₃ is 7 × 10 ⁻⁶ / ° C., the tilt angle can be controlled by controlling the temperature of the microprojection group. become. FIG. 11 is a diagram schematically showing the operation of the flow path chip manufactured according to the present invention. FIG. 11A shows a group of minute protrusions in the steady state flow path. At this time, the effective cross-sectional area of the flow path is small, and the fluid is blocked by the microprojections and the flow rate is small. Then, by raising the temperature of the flow path chip, as shown in FIG. 11B, the projections on the minute wall were inclined in the direction in which the side surface on which the Al ₂ O ₃ layer 510 was formed was directed to the substrate side. The flow rate of the fluid increased as the effective cross-sectional area of the flow path increased with the inclination of the microprojections. Further, as the temperature was returned to the initial state, the microprojection group returned to the state shown in FIG. 11A, and the effective cross-sectional area of the flow path became smaller and the flow rate phenomenon occurred. As a result, flow rate adjustment was possible with the channel chip of the present invention.

  In this embodiment, the main component of the columnar microprojections 506 and the resin films 502 and 513 is PMMA. However, other thermoplastic resins such as polymer materials including cycloolefin polymer, polystyrene, polycarbonate, polyethylene terephthalate (PET), polylactic acid or polypropylene may be used. The flow rate also varies depending on the equivalent diameter and period of the columnar microprojections 506.

The perspective view of the structure board | substrate provided with the microprotrusion group produced in the Example. The figure which shows the structure of the structure board | substrate provided with the microprotrusion group produced in the Example. The side view which shows the cross-section of the microprotrusion group produced in the Example. The flowchart which shows the manufacturing process of the structure board | substrate provided with the microprotrusion group by this invention. The figure which shows the structure of the actuator element provided with the microprotrusion group produced by this invention. The figure explaining operation | movement of an actuator element provided with the microprotrusion group produced by this invention. The figure explaining the effect | action of the light transmittance / reflectance control board | substrate provided with the microprotrusion group by this invention. The flowchart explaining the manufacturing method of the microprotrusion group by this invention. The figure which shows the structure of the flow-path chip | tip provided with the microprotrusion group produced by this invention. The flowchart explaining the manufacturing method of the flow-path chip | tip provided with the microprotrusion group produced by this invention. The figure explaining operation | movement of the flow-path chip | tip provided with the microprotrusion group produced by this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Light transmittance / reflectance control board | substrate, 102 ... Base | substrate, 104 ... Micro projection group, 200 ... Structural board | substrate, 202 ... Thin film, 203, 401 ... Substrate, 204 ... Projection, 209 ... Striped pattern, 404, 502, 508: Resin film, 405, 505: Mold, 406, 506: Fine projection, 409: Aluminum layer, 501: Spacer, 503: First substrate, 507: Second substrate, 510: Al ₂ O ₃ layer.

Claims (17)

  The organic polymer substrate has a columnar microprojection group made of organic polymer extending from the substrate, and a part of the surface of the columnar microprojection group is formed of a material different from that of the substrate. A structural substrate with a group of minute protrusions.   2. The microprojection group made of an organic polymer according to claim 1, and then a layer made of a material having a coefficient of thermal expansion different from that of the substrate is formed on a part of the surface of the microprojection group. A structural substrate having a group of minute protrusions, wherein the angle is changed by thermal control.   The organic polymer substrate has a columnar microprojection group made of organic polymer extending from the substrate, and a part of the surface of the columnar microprojection group is formed of a material different from that of the substrate, and the microprojection group A structural substrate having a microprojection group, wherein the inclination angle of the object is changed by thermal control, and the position and angle of an object placed on the microprojection group are changed.   The organic polymer substrate has a columnar microprojection group made of organic polymer extending from the substrate, and a part of the surface of the columnar microprojection group is formed of a material different from that of the substrate, and the microprojection group A structural substrate provided with a group of minute protrusions, wherein the inclination angle of the light is changed by thermal control and the transmittance or reflectance of light incident on the structural substrate is controlled.   5. The ratio of the equivalent diameter (D) to the height (H) of the microprojection group according to claim 1, wherein the organic projection has an equivalent diameter of 10 nm to 500 μm and a height of 50 nm to 5000 μm. (H / D) is 1 or more, The structure board | substrate provided with the columnar microprotrusion group characterized by the above-mentioned.   6. The structural substrate having a columnar microprojection group according to claim 5, wherein the ratio (H / D) of the equivalent diameter (D) to the height (H) of the columnar microprojection group is 4 to 30.   6. The structural substrate having a columnar microprojection group according to claim 5, wherein an equivalent diameter of a tip end portion of the columnar microprojection group is smaller than an equivalent diameter of a bottom surface portion of the columnar projection group.   6. The structural substrate having a columnar microprojection group according to claim 5, wherein an equivalent diameter of a tip end portion of the columnar microprojection group is smaller than an equivalent diameter of a bottom surface portion of the columnar projection group.   6. The structural substrate having a columnar microprojection group according to claim 5, wherein the columnar microprojection group has a radially bulging portion at a tip portion of the columnar microprojection group.   6. The structural substrate having a columnar microprojection group according to claim 5, wherein the columnar microprojection group has a portion that narrows from a base in contact with the base toward a tip portion.   In Claims 1-4, the equivalent width of the organic polymer of the microprojection group is 10 nm to 500 μm, the equivalent length is twice or more the equivalent width, the height is 50 nm to 5000 μm, and the height of the microprojection group A structural substrate provided with a group of wall-shaped microprojections, wherein the ratio (W / D) of the equivalent width (W) to (H) is 1 or more.   12. The structure having a wall-shaped microprojection group according to claim 11, wherein the ratio (H / W) of the equivalent width (W) to the height (H) of the wall-shaped microprojection group is 4 to 30. substrate.   12. The structural substrate having a wall-shaped microprojection group according to claim 11, wherein the equivalent width of the tip of the wall-shaped microprojection group is smaller than the equivalent width of the bottom surface portion of the columnar projection group.   12. The structural substrate having a wall-shaped microprojection group according to claim 11, wherein the wall-shaped microprojection group has a portion that swells in a width direction at a tip end portion thereof.   12. The structural substrate having a wall-shaped microprojection group according to claim 11, wherein the wall-shaped microprojection group has a portion that becomes narrower from the base in contact with the base toward the tip.   A mold made of a material having a number of pits having an equivalent diameter of 10 microns or less and a hardness higher than that of the material is pressed on a base of a material mainly composed of an organic polymer so as to form a predetermined pattern. A method of manufacturing a structural substrate including a columnar microprojection group including a step of forming a group of microcolumnar projections by press-fitting a part of the material into the pit and then peeling the mold from the material. A mold made of a material having a number of pits having a corresponding width of 10 microns or less and a hardness higher than that of the material is pressed on a base of a material mainly composed of an organic polymer so as to form a predetermined pattern. And a method of manufacturing a structural substrate having a wall-shaped microprojection group, including a step of press-fitting a part of the material into the pit and then forming the microwall-shaped projection group by peeling the mold from the material. .

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