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JP2005330142A - Mold for mold forming and its manufacturing method - Google Patents

Mold for mold forming and its manufacturing method Download PDF

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JP2005330142A
JP2005330142A JP2004148813A JP2004148813A JP2005330142A JP 2005330142 A JP2005330142 A JP 2005330142A JP 2004148813 A JP2004148813 A JP 2004148813A JP 2004148813 A JP2004148813 A JP 2004148813A JP 2005330142 A JP2005330142 A JP 2005330142A
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mold
molding
main body
glass
joining member
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JP4365727B2 (en
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Koki Iwazawa
広喜 岩沢
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Olympus Corp
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a large number of mold-forming molds, each with a highly precise molding surface and high strength, at a low cost within a short period of time. <P>SOLUTION: A joining member 23 made of glass having a glass yield point lower than the glass transition temperature of the mold main body 21 is placed between a bonding end of a mold substrate 22, which is supported by a substrate base 11, and a glass-made mold main body 21. The mold main body 21 and the joining member 23 are nip-pressed between a master mold 13 and the mold substrate 22 at a molding/joining temperature between the glass transition temperature and the glass yield point of the mold main body 21 to simultaneously perform formation of the mold surface 21a through transferring of a transfer pattern 13a of the master mold 13 to the mold main body 21 and joining of the mold main body 21 and the mold substrate 22 via the joining member 23. Since the joining member 23 has a glass yield point lower than the glass transition temperature of the mold main body 21, it melts at a molding temperature suitable for high-precision forming of the mold main body 21 and forms a favorable, high-strength joint. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、モールド成形用型およびその製造技術に関し、特に、光学素子等のモールド成形に用いられるモールド成形用型に適用して有効な技術に関する。   The present invention relates to a mold for molding and a manufacturing technique thereof, and more particularly to a technique effective when applied to a mold for molding used for molding an optical element or the like.

たとえば、レンズ、プリズム、フィルタ等の光学素子の量産には、モールド成形が有効である。ところで、このようなモールド成形に用いられるモールド用成形型の製作においては、機械加工等で製作した場合には、コスト高となり、特に、非球面や自由曲面等の成形面を加工する場合に顕著となる。   For example, molding is effective for mass production of optical elements such as lenses, prisms and filters. By the way, in the production of a mold for molding used for such molding, the cost is high when it is manufactured by machining or the like, and particularly, when a molding surface such as an aspherical surface or a free-form surface is processed. It becomes.

このため、たとえば、特許文献1のように、モールド成形型のモールド成形面を、マスタ型からの押圧転写にて形成することが考えられる。
また、特許文献2では、熱間にて押圧成形したガラスよりなる成形用型本体と、この成形用型本体と、線膨張係数がほぼ等しい金属またはセラミックスからなる接合体(支持部材)を一体に構成した光学素子成形用型が開示されている。すなわち、成形用型本体の成形面形成のための加熱および押圧と同時に、当該成形用型本体と照射部材との接合も行うようにしたものである。
For this reason, for example, as in Patent Document 1, it is conceivable to form a mold forming surface of a mold by press transfer from a master mold.
Further, in Patent Document 2, a molding die body made of glass press-molded in the hot state, a molding die body, and a joined body (support member) made of metal or ceramics having substantially the same linear expansion coefficient. A configured optical element molding die is disclosed. That is, simultaneously with the heating and pressing for forming the molding surface of the molding die body, the molding die body and the irradiation member are also joined.

ところが、一般に、ガラスからなる成形用型本体の成形面の面精度を出せる温度と、この成形用型本体と金属等の支持部材とを接合可能な温度に差があるため、特許文献2のように、成形用型本体の成形面の形成と、支持部材との接合を同時に行わせる場合には、成形用型本体における高精度な成形面の形成と、成形用型本体と支持部材との良好な接合強度とを同時に得ることが困難である、という技術的課題がある。   However, in general, there is a difference between the temperature at which the surface accuracy of the molding surface of the molding die body made of glass can be obtained and the temperature at which the molding die body can be joined to a supporting member such as metal. When forming the molding surface of the molding die body and joining with the support member at the same time, forming the molding surface with high accuracy in the molding die body and improving the molding die body and the support member There is a technical problem that it is difficult to obtain a high bonding strength at the same time.

すなわち、ガラスからなる成形用型本体の成形面の転写精度を維持するには、ガラス転移点からガラス屈伏点までの、外力(転写力)でのみ塑性変形する温度範囲に制御する必要があり、一方、金属等との良好な接合強度を得るには、ガラス屈伏点を超えた流動性の高い温度範囲まで加熱する必要があるからである。
特開平11−217227号公報 特開平2−102136号公報
That is, in order to maintain the transfer accuracy of the molding surface of the molding die body made of glass, it is necessary to control the temperature range from the glass transition point to the glass yield point, which is plastically deformed only by external force (transfer force), On the other hand, in order to obtain good bonding strength with a metal or the like, it is necessary to heat to a temperature range with high fluidity exceeding the glass yield point.
Japanese Patent Laid-Open No. 11-217227 Japanese Patent Laid-Open No. 2-102136

本発明の目的は、低コストで、モールド成形面の精度が高く、強度の大きなモールド成形用型を提供することにある。
本発明の他の目的は、低コストにて、モールド成形面の精度が高く、強度の大きなモールド成形用型を短期間で大量に供給することが可能な製造方法を提供することにある。
An object of the present invention is to provide a mold for molding with low cost, high accuracy of a molding surface and high strength.
Another object of the present invention is to provide a manufacturing method capable of supplying a large amount of mold forming molds with high accuracy and high strength at a low cost in a short period of time.

本発明の第1の観点は、ガラス遷移挙動を示す第1材料からなりモールド成形面を有する型本体と、前記型本体を支持する型基材と、前記型本体と前記型基材との間に介在し前記第1材料とは異なるガラス遷移挙動を示す第2材料からなる接合部材と、を一体的に接合したモールド成形用型を提供する。   According to a first aspect of the present invention, there is provided a mold main body made of a first material exhibiting a glass transition behavior and having a molding surface, a mold base supporting the mold main body, and between the mold main body and the mold base. And a joining member made of a second material having a glass transition behavior different from that of the first material.

本発明の第2の観点は、ガラス遷移挙動を示す第1材料からなりモールド成形面を有する型本体と、前記型本体を支持する型基材と、前記型本体と前記型基材との間に介在し、ガラス屈伏点温度が前記第1材料のガラス転移点温度よりも低い第2材料からなる接合部材と、を一体的に接合したモールド成形用型を提供する。   According to a second aspect of the present invention, there is provided a mold main body made of a first material exhibiting a glass transition behavior and having a molding surface, a mold base supporting the mold main body, and between the mold main body and the mold base. And a joining member made of a second material having a glass yield point temperature lower than the glass transition temperature of the first material.

本発明の第3の観点は、ガラス遷移挙動を示す第1材料からなりモールド成形面を有する型本体と、前記型本体を支持する型基材と、前記型本体と前記型基材との間に介在し、ガラス軟化点温度が前記第1材料のガラス転移点温度よりも低い第2材料からなる接合部材と、を一体的に接合したモールド成形用型を提供する。   According to a third aspect of the present invention, there is provided a mold main body made of a first material exhibiting a glass transition behavior and having a molding surface, a mold base supporting the mold main body, and between the mold main body and the mold base. And a joining member made of a second material having a glass softening point temperature lower than the glass transition temperature of the first material.

本発明の第4の観点は、ガラス遷移挙動を示す第1材料からなりモールド成形面を有する型本体と、前記型本体を支持する型基材と、前記型本体と前記型基材との間に介在し、ガラス遷移温度が前記第1材料のガラス転移点温度よりも低い金属ガラスの第2材料からなる接合部材と、を一体的に接合したモールド成形用型を提供する。   According to a fourth aspect of the present invention, there is provided a mold main body made of a first material exhibiting a glass transition behavior and having a molding surface, a mold base supporting the mold main body, and between the mold main body and the mold base. And a joining member made of a second material of metallic glass whose glass transition temperature is lower than the glass transition temperature of the first material.

本発明の第5の観点は、マスタ型を用いた押圧成形にてモールド成形面を転写形成するモールド成形用型の製造方法であって、
ガラス遷移挙動を示す第1材料からなる型本体と、前記型本体を支持する型基材との間に、前記第1材料とは異なるガラス遷移挙動を示す第2材料からなる接合部材を挟む工程と、
前記マスタ型を前記型本体に当接させ、前記マスタ型と前記型基材との間で前記型本体および前記接合部材を挟圧することにより、前記型本体に前記モールド成形面を転写形成するともに、前記型本体と前記接合部材と前記型基材とを接合する工程と、
を含むモールド成形用型の製造方法を提供する。
A fifth aspect of the present invention is a method for manufacturing a mold for molding, wherein a mold molding surface is transferred and formed by press molding using a master mold,
A step of sandwiching a joining member made of a second material exhibiting a glass transition behavior different from that of the first material between a mold body made of the first material exhibiting glass transition behavior and a mold base material supporting the mold body. When,
The master mold is brought into contact with the mold main body, and the mold main body and the joining member are clamped between the master mold and the mold base, thereby transferring and forming the molding surface on the mold main body. Bonding the mold body, the joining member, and the mold substrate;
A method for producing a mold for molding is provided.

本発明の第6の観点は、マスタ型を用いた押圧成形にてモールド成形面を転写形成するモールド成形用型の製造方法であって、
ガラス遷移挙動を示す第1材料からなる型本体と、前記型本体を支持する型基材との間に、ガラス屈伏点温度が前記第1材料のガラス転移点温度よりも低い第2材料からなる接合部材を挟む工程と、
前記マスタ型を前記型本体に当接させ、前記マスタ型と前記型基材との間で前記型本体および前記接合部材を挟圧することにより、前記型本体に前記モールド成形面を転写形成するともに、前記型本体と前記接合部材と前記型基材とを接合する工程と、
を含むモールド成形用型の製造方法を提供する。
A sixth aspect of the present invention is a method for producing a mold for molding, wherein the mold molding surface is transferred and formed by press molding using a master mold,
Between the mold body made of the first material exhibiting the glass transition behavior and the mold base material supporting the mold body, the glass yield point temperature is made of the second material lower than the glass transition temperature of the first material. A step of sandwiching the joining member;
The master mold is brought into contact with the mold main body, and the mold main body and the joining member are clamped between the master mold and the mold base, thereby transferring and forming the molding surface on the mold main body. Bonding the mold body, the joining member, and the mold substrate;
A method for producing a mold for molding is provided.

本発明の第7の観点は、マスタ型を用いた押圧成形にてモールド成形面を転写形成するモールド成形用型の製造方法であって、
ガラス遷移挙動を示す第1材料からなる型本体と、前記型本体を支持する型基材との間に、ガラス軟化点温度が前記第1材料のガラス転移点温度よりも低い第2材料からなる接合部材を挟む工程と、
前記マスタ型を前記型本体に当接させ、前記マスタ型と前記型基材との間で前記型本体および前記接合部材を挟圧することにより、前記型本体に前記モールド成形面を転写形成するともに、前記型本体と前記接合部材と前記型基材とを接合する工程と、
を含むモールド成形用型の製造方法を提供する。
A seventh aspect of the present invention is a method for producing a mold for molding, wherein a mold molding surface is transferred and formed by press molding using a master mold,
Between a mold body made of a first material exhibiting glass transition behavior and a mold substrate supporting the mold body, the glass softening point temperature is made of a second material lower than the glass transition point temperature of the first material. A step of sandwiching the joining member;
The master mold is brought into contact with the mold main body, and the mold main body and the joining member are clamped between the master mold and the mold base, thereby transferring and forming the molding surface on the mold main body. Bonding the mold body, the joining member, and the mold substrate;
A method for producing a mold for molding is provided.

本発明の第8の観点は、マスタ型を用いた押圧成形にてモールド成形面を転写形成するモールド成形用型の製造方法であって、
ガラス遷移挙動を示す第1材料からなる型本体と、前記型本体を支持する型基材との間に、ガラス遷移温度が前記第1材料のガラス転移点温度よりも低い金属ガラスの第2材料からなる接合部材を挟む工程と、
前記マスタ型を前記型本体に当接させ、前記マスタ型と前記型基材との間で前記型本体および前記接合部材を挟圧することにより、前記型本体に前記モールド成形面を転写形成するともに、前記型本体と前記接合部材と前記型基材とを接合する工程と、
を含むモールド成形用型の製造方法を提供する。
An eighth aspect of the present invention is a method for producing a mold for molding, wherein the mold molding surface is transferred by press molding using a master mold,
A second material of metallic glass having a glass transition temperature lower than a glass transition temperature of the first material between a mold body made of a first material exhibiting a glass transition behavior and a mold substrate supporting the mold body. A step of sandwiching a joining member comprising:
The master mold is brought into contact with the mold main body, and the mold main body and the joining member are clamped between the master mold and the mold base, thereby transferring and forming the molding surface on the mold main body. Bonding the mold body, the joining member, and the mold substrate;
A method for producing a mold for molding is provided.

上記した本発明によれば、たとえば、接合部材を構成する第2材料のガラス屈伏点温度やガラス軟化点温度あるいはガラス遷移温度が、型本体を構成する第1材料のガラス転移点温度よりも低くなるように第1および第2材料を選択し、成形および接合を一括して行う際の加熱温度(加工温度)を、第1材料のガラス転移点温度よりも高く、かつ当該第1材料のガラス屈伏点温度よりも低い値に設定する。   According to the present invention described above, for example, the glass yield point temperature, the glass softening point temperature or the glass transition temperature of the second material constituting the joining member is lower than the glass transition temperature of the first material constituting the mold body. The first and second materials are selected so that the heating temperature (processing temperature) when forming and joining are collectively performed is higher than the glass transition temperature of the first material, and the glass of the first material. Set to a value lower than the yield point temperature.

そして、型本体と接合部材と、型基材とを一括して挟圧して、型本体のモールド成形面の転写および型基材との接合を行うことにより、この加工温度下では接合部材は流動化して型基材と型本体との間に高い接合強度が得られるとともに、型本体のモールド成形面では、第1材料のガラス転移点温度よりも高く、かつ当該第1材料のガラス屈伏点温度よりも低い加工温度による加熱のため、マスタ型から高精度にて型形状をモールド成形面に転写することが可能になる。   Then, the die body, the joining member, and the die base material are collectively clamped to transfer the molding surface of the die body and to join the die base material, so that the joining member flows at this processing temperature. And a high bonding strength is obtained between the mold base and the mold body, and the glass forming point temperature of the first material is higher than the glass transition temperature of the first material on the molding surface of the mold body. Since the heating is performed at a lower processing temperature, the mold shape can be transferred from the master mold to the molding surface with high accuracy.

また、接合部材を構成する第2材料として金属ガラスを用いる場合には、過冷却液体領域の温度範囲に、第1材料のガラス転移点温度からガラス屈伏点温度までの温度範囲が含まれるように、第1材料のガラスと、第2材料の金属ガラスの種類を選択することで、上記と同様の効果が得られる。   Further, when metal glass is used as the second material constituting the joining member, the temperature range of the supercooled liquid region includes the temperature range from the glass transition temperature of the first material to the glass yield point temperature. By selecting the type of glass of the first material and the type of metal glass of the second material, the same effect as described above can be obtained.

本発明によれば、低コストで、モールド成形面の精度が高く、強度の大きなモールド成形用型を提供することができる、という効果が得られる。
また、低コストにて、モールド成形面の精度が高く、強度の大きなモールド成形用型を短期間で大量に供給することが可能となる。
According to the present invention, it is possible to obtain an effect that a mold for molding can be provided at low cost, with high accuracy of a molding surface and high strength.
Further, it is possible to supply a large amount of mold forming molds with high accuracy and high strength at a low cost in a short period of time.

以下、図面を参照しながら、本発明の実施の形態について詳細に説明する。
図1は、本発明の一実施の形態であるモールド成形用型の製造方法が実施される型製造装置の構成および動作の一例を工程順示す略断面図である。
本実施の形態の型製造装置10は、基材ベース11、ホルダ12、マスタ型13およびプレス軸14を備えている。また、基材ベース11およびマスタ型13を取り囲む位置には図示しない加熱炉が設けられており、基材ベース11およびマスタ型13等を所定の温度に加熱することが可能になっている。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic cross-sectional view showing an example of the configuration and operation of a mold manufacturing apparatus in which a method for manufacturing a mold for molding according to an embodiment of the present invention is performed, in the order of steps.
The mold manufacturing apparatus 10 of the present embodiment includes a base material base 11, a holder 12, a master mold 13, and a press shaft 14. Further, a heating furnace (not shown) is provided at a position surrounding the base material base 11 and the master die 13 so that the base material base 11 and the master die 13 can be heated to a predetermined temperature.

基材ベース11には、軸方向に保持穴11aが設けられ、この保持穴11aには、型基材22が接合端部を上向きにした姿勢で収容され、型基材22の上端部には、型基材22の接合端を取り囲む用に筒状のホルダ12が配置されている。
ホルダ12に取り囲まれた型基材22の接合端には、板状の接合部材23および型本体21が下から順に載置されている。
The base material base 11 is provided with a holding hole 11a in the axial direction, and the mold base material 22 is accommodated in the holding hole 11a with the joint end portion facing upward. A cylindrical holder 12 is disposed so as to surround the joint end of the mold base 22.
A plate-shaped joining member 23 and a mold body 21 are placed in order from the bottom on the joining end of the mold base 22 surrounded by the holder 12.

基材ベース11と対向する位置には、マスタ型13が配置されており、このマスタ型13の基材ベース11、すなわち型本体21に対する対向面には、任意の凹凸の転写パターン13aが形成されている。
型基材22は、たとえば、図2(a)のような物性を持つ、モールド型用の市販金型材K1または市販工具鋼K2で構成されている。この型基材22の外周部は、後述のようにして得られるモールド成形型20全体の位置決めの基準面(衝面22a)として重要となるので、高精度な仕上げ加工が施されている。
A master die 13 is disposed at a position facing the base material base 11, and an arbitrarily uneven transfer pattern 13 a is formed on the surface of the master die 13 facing the base material base 11, that is, the die body 21. ing.
The mold base 22 is made of, for example, a commercially available mold material K1 for molds or a commercially available tool steel K2 having physical properties as shown in FIG. Since the outer peripheral portion of the mold base 22 is important as a positioning reference surface (impact surface 22a) for the entire mold 20 obtained as described later, high-precision finishing is performed.

また、型本体21は、図2(b)の下段に示されるような物性をもつ市販ガラス材G3、市販ガラス材G4、または市販ガラス材G5(第1材料)で構成され、接合部材23は、図2(b)の上段側に例示されるような物性を持つ市販ガラス材G1または市販ガラス材G2(第2材料)で構成されている。   The mold body 21 is made of a commercially available glass material G3, a commercially available glass material G4, or a commercially available glass material G5 (first material) having physical properties as shown in the lower part of FIG. FIG. 2B is composed of a commercially available glass material G1 or a commercially available glass material G2 (second material) having physical properties as exemplified on the upper side.

すなわち、図3は、型本体21に用いられるガラス材料と、接合部材23に用いられるガラス材料の温度−伸びの特性曲線を示しており、本実施の形態の場合、接合部材23は、そのガラス屈伏点Atの温度が、型本体21のガラス転移点Tgの温度よりも小さいものを選択して用いる。また、成形温度は、型本体21におけるガラス転移点Tgとガラス屈伏点Atの間の温度に設定される。   That is, FIG. 3 shows a temperature-elongation characteristic curve of the glass material used for the mold body 21 and the glass material used for the bonding member 23. In the present embodiment, the bonding member 23 is made of the glass. A material having a yield point At temperature lower than the glass transition point Tg of the mold body 21 is selected and used. The molding temperature is set to a temperature between the glass transition point Tg and the glass deformation point At in the mold body 21.

以下、本実施の形態のモールド成形用型の製造方法の作用の一例について説明する。まず、図1(a)のように、基材ベース11の保持穴11aに型基材22を装填し、ホルダ12をセットする。次に、型基材22の接合端の上に、接合部材23および型本体21を順に載置する。   Hereinafter, an example of the operation of the method for manufacturing the mold for molding according to the present embodiment will be described. First, as shown in FIG. 1A, the mold base 22 is loaded into the holding hole 11a of the base 11 and the holder 12 is set. Next, the joining member 23 and the mold body 21 are placed in order on the joining end of the mold base 22.

その後、図1(b)のように、図示しない加熱炉にて、基材ベース11、型基材22、接合部材23、型本体21およびマスタ型13を所定の成形/接合温度T0(たとえば、型本体21が市販ガラス材G3、市販ガラス材G4の場合は、530℃〜540℃、市販ガラス材G5の場合は560℃)に加熱するとともに、プレス軸14に駆動されるマスタ型13を降下させ、型基材22とマスタ型13との間で、接合部材23および型本体21を挟圧(たとえば、型基材22の直径が7mmの場合、プレス軸14の推力は200kgf)する。   Thereafter, as shown in FIG. 1B, in a heating furnace (not shown), the base material base 11, the die base material 22, the joining member 23, the die body 21 and the master die 13 are set to a predetermined molding / joining temperature T0 (for example, When the mold body 21 is a commercially available glass material G3 or a commercially available glass material G4, it is heated to 530 ° C. to 540 ° C. or 560 ° C. in the case of a commercially available glass material G5), and the master die 13 driven by the press shaft 14 is lowered. Then, the joining member 23 and the mold body 21 are clamped between the mold base 22 and the master mold 13 (for example, when the diameter of the mold base 22 is 7 mm, the thrust of the press shaft 14 is 200 kgf).

この時、型本体21は、成形/接合温度T0が当該型本体21のガラス転移点Tgとガラス屈伏点Atの間に設定されていることにより、マスタ型13の転写パターン13aに倣って正確に塑性変形し、転写パターン13aの凹凸が逆に転写されたモールド型面21aが形成される。同時に、接合部材23においては、成形/接合温度T0がガラス屈伏点Atよりも高いため、流動性が良くなり、型本体21や型基材22の接合端面の微細な凹凸に浸潤して接合強度の大きな良好な接合部を形成する。   At this time, the mold body 21 accurately follows the transfer pattern 13a of the master mold 13 by setting the molding / joining temperature T0 between the glass transition point Tg of the mold body 21 and the glass yield point At. As a result of plastic deformation, the mold surface 21a to which the irregularities of the transfer pattern 13a are transferred in reverse is formed. At the same time, in the joining member 23, the molding / joining temperature T0 is higher than the glass yield point At, so that the fluidity is improved and the joint strength is infiltrated into the fine irregularities on the joining end surfaces of the mold body 21 and the mold substrate 22. Large and good joints are formed.

すなわち、マスタ型13によるモールド型面21aの成形と、型本体21と型基材22の接合とを一括して行う場合に、型本体21におけるマスタ型13によるモールド型面21aの高精度の形状転写と、接合部材23による、型本体21と型基材22の接合強度の向上とを両立させることが可能になる。   That is, when the molding of the mold surface 21a by the master mold 13 and the joining of the mold body 21 and the mold base 22 are performed at once, the shape of the mold mold surface 21a by the master mold 13 in the mold body 21 is high-precision. It is possible to achieve both the transfer and the improvement of the bonding strength between the mold main body 21 and the mold base 22 by the bonding member 23.

こうして、成形/接合が完了した後、図1(c)のように、冷却して、マスタ型13を上昇させて型本体21から離間させ、さらに図1(d)のように、基材ベース11、ホルダ12を分解し、接合部材23を介して型本体21と型基材22が一体的に接合されたモールド成形型20をとり出す。   Thus, after the molding / joining is completed, as shown in FIG. 1C, the master mold 13 is raised and separated from the mold main body 21 as shown in FIG. 1C, and further, as shown in FIG. 11. Disassemble the holder 12 and take out the mold 20 in which the mold body 21 and the mold base 22 are integrally bonded via the bonding member 23.

この状態では、型本体21の上端部周辺には、成形時に、ホルダ12とマスタ型13の隙間に型本体21の一部が広がって形成されたバリ等が付いた状態となっているので、2次加工にてこのバリ等を除去する仕上げ加工を施すことで、図1(e)のように、完成したモールド成形型20が得られる。   In this state, around the upper end portion of the mold body 21, there is a burr or the like formed by spreading a part of the mold body 21 in the gap between the holder 12 and the master mold 13 during molding. By performing a finishing process for removing the burrs and the like in the secondary process, a completed mold 20 is obtained as shown in FIG.

上述のような、型本体21のモールド型面21aの成形と、型本体21と型基材22の接合とを一括して行う図1(a)〜(e)の工程を反復することで、精密なモールド型面21aを有するとともに、型本体21と型基材22との接合強度の大きなモールド成形型20を短時間で大量に生産することが可能になる。   By repeating the process of FIG. 1A to FIG. 1E in which the molding of the mold mold surface 21a of the mold main body 21 and the bonding of the mold main body 21 and the mold base material 22 are performed collectively, It is possible to produce a large number of molds 20 having a precise mold surface 21a and a high bonding strength between the mold body 21 and the mold base 22 in a short time.

図2(c)に、本実施の形態のモールド成形用型の製造方法の実験結果を示す。この場合、成形/接合温度T0は530℃に設定され、型本体21として、市販ガラス材G3を用い、接合部材23として市販ガラス材G2または市販ガラス材G1を用い、型基材22として、市販金型材K1または市販工具鋼K2を用いた例が示されている。   FIG. 2C shows an experimental result of the method for manufacturing the mold for molding according to the present embodiment. In this case, the molding / joining temperature T0 is set to 530 ° C., a commercially available glass material G3 is used as the mold body 21, a commercially available glass material G2 or a commercially available glass material G1 is used as the joining member 23, and a commercially available mold base 22 is used. An example using a mold material K1 or a commercially available tool steel K2 is shown.

そして、これらの組み合わせになるモールド成形型20を急冷した場合あるいは徐冷した場合のいずれでも型本体21と型基材22の接合部に異常はみられず、当該モールド成形型20を用いた射出成形においても良好な精度で光学素子を成形することができた。
次に、型基材22として金属ガラスを用いた例を示す。すなわち、型基材22として図4(a)に示す物性の金属ガラスG7(第2材料)を用い、型本体21として、図4(b)に示す物性の市販ガラス材G6(第1材料)を用い、型基材22として、市販金型材K1を用いた例を示す。
No abnormality is observed in the joint portion between the mold main body 21 and the mold base 22 when the mold 20 that is a combination of these is rapidly cooled or slowly cooled, and the injection using the mold 20 is performed. In the molding, the optical element could be molded with good accuracy.
Next, an example in which metallic glass is used as the mold base 22 will be shown. That is, the metallic glass G7 (second material) having physical properties shown in FIG. 4A is used as the mold base 22, and the commercially available glass material G6 (first material) having physical properties shown in FIG. An example in which a commercially available mold material K1 is used as the mold base 22 is shown.

この場合、接合部材23を構成する金属ガラスG7のガラス遷移温度(転移点)Tg(=435℃)は、型本体21を構成する市販ガラス材G6のガラス転移点Tg(=458℃)よりも低い値となっている。また、後述の成形/接合温度T0(=470℃)は、金属ガラスG7のガラス結晶化温度Txよりも低くなっている。   In this case, the glass transition temperature (transition point) Tg (= 435 ° C.) of the metallic glass G 7 constituting the joining member 23 is higher than the glass transition point Tg (= 458 ° C.) of the commercially available glass material G 6 constituting the mold body 21. The value is low. Further, a molding / joining temperature T0 (= 470 ° C.) described later is lower than the glass crystallization temperature Tx of the metal glass G7.

すなわち、図5の線図に例示されるように、金属ガラスG7の過冷却液体域に市販ガラス材G6のガラス転移点Tg、成形/接合温度T0等が含まれる温度関係となっている。
そして、図4(c)のように、この金属ガラスG7の接合部材23にて、市販ガラス材G6の型本体21と市販金型材K1の型基材22とを、470℃の成形/接合温度T0にて成形/接合した結果、良好な接合結果が得られた。
That is, as illustrated in the diagram of FIG. 5, the supercooled liquid region of the metal glass G7 has a temperature relationship in which the glass transition point Tg of the commercial glass material G6, the molding / joining temperature T0, and the like are included.
And as shown in FIG.4 (c), with this joining member 23 of the metal glass G7, the mold main body 21 of the commercial glass material G6 and the mold base material 22 of the commercial mold material K1 are formed at a molding / joining temperature of 470 ° C. As a result of molding / joining at T0, good joining results were obtained.

すなわち、型製造装置10を用いた成形および接合に際して、成形/接合温度T0(=470℃)に加熱すると、型基材22の金属ガラスG7は過冷却液体域となって型基材22および型本体21の接合面の凹凸に浸潤して接合強度の大きな良好な結合部を形成するとともに、型本体21では転写に好適な塑性状態となり、マスタ型13の転写パターン13aに倣った高精度のモールド型面21aが転写形成される。   That is, when molding and joining using the mold manufacturing apparatus 10, when heated to the molding / joining temperature T0 (= 470 ° C.), the metallic glass G7 of the mold base 22 becomes a supercooled liquid region and the mold base 22 and the mold The mold body 21 infiltrates unevenness of the joint surface of the main body 21 to form a good joint portion having high joint strength, and the mold main body 21 is in a plastic state suitable for transfer, and a high-precision mold following the transfer pattern 13a of the master mold 13 The mold surface 21a is transferred and formed.

すなわち、型本体21における高精度のモールド型面21aの転写形成と、型本体21と型基材22の接合部材23による接合強度の大きな良好な接合とを同時に達成できる。
図6(a)〜(d)は、本実施の形態の型製造装置10の変形例である型製造装置30の構成および動作を工程順に示す略断面図である。
That is, highly accurate transfer of the mold surface 21a in the mold body 21 and good bonding with high bonding strength by the bonding member 23 between the mold body 21 and the mold substrate 22 can be achieved simultaneously.
6A to 6D are schematic cross-sectional views showing the configuration and operation of a mold manufacturing apparatus 30 which is a modification of the mold manufacturing apparatus 10 of the present embodiment in the order of steps.

この場合、図6(a)のように、フランジ状の下端部を持つ型基材22−1が基材ベース31の保持穴31aに挿通されるとともに、ホルダ32は、軸方向に細長く構成され、型基材22−1の接合端部および当該接合端部に載置された接合部材23および型本体21を取り囲むとともに、転写パターン33aが形成されたマスタ型33の全体が隙間無く挿入される構成となっている。   In this case, as shown in FIG. 6A, the mold base 22-1 having a flange-like lower end is inserted into the holding hole 31a of the base 31 and the holder 32 is configured to be elongated in the axial direction. The entire master die 33 with the transfer pattern 33a formed therein is inserted without any gaps while surrounding the joining end portion of the mold base 22-1 and the joining member 23 and the die body 21 placed on the joining end portion. It has a configuration.

これにより、図6(b)のように、成形/接合温度T0の加熱状態にて、プレス軸14にてマスタ型33を押圧して、型基材22−1との間で型本体21および接合部材23を挟圧する場合、型本体21にはマスタ型33から転写パターン33aがモールド型面21aとして転写されると同時に、型本体21と型基材22−1は接合部材23を介して接合される。このとき、ホルダ32内に隙間無く嵌合するマスタ型33にて加圧される型本体21にはバリが発生しない。   As a result, as shown in FIG. 6B, the master die 33 is pressed by the press shaft 14 in the heating state at the molding / joining temperature T0, and the die body 21 and the die base material 22-1. When clamping the joining member 23, the transfer pattern 33 a is transferred from the master die 33 to the die body 21 as the mold die surface 21 a, and at the same time, the die body 21 and the die base material 22-1 are joined via the joining member 23. Is done. At this time, no burrs are generated in the mold main body 21 pressed by the master mold 33 that fits in the holder 32 without a gap.

そして、図6(c)のように冷却および離型を行うことで、図6(d)のようなモールド成形型20が得られる。この場合、型本体21のバリ取り等の2次加工は不要である。
図7(a)〜(c)は、本発明の他の実施の形態であるモールド成形用型の製造方法を工程順に示す略断面図である。
Then, by performing cooling and mold release as shown in FIG. 6C, a mold 20 as shown in FIG. 6D is obtained. In this case, secondary processing such as deburring of the mold body 21 is not necessary.
FIGS. 7A to 7C are schematic cross-sectional views showing a method for manufacturing a mold for molding which is another embodiment of the present invention in the order of steps.

この場合、粉または粒状の接合部材23aを、型基材22の上に分散してほぼ均一に供給するところが、図1の場合と異なっている。これにより、成形/接合時に粉または粒状の接合部材23aは、溶融して型本体21と型基材22の接合面間に均一に分散し、接合部材の厚さのばらつきや位置ずれ等に起因して、成形/接合時に型本体21が型基材22に対して傾斜する等の不具合が解消され、型本体21のモールド型面21aを安定して成形することが可能になる。   In this case, it is different from the case of FIG. 1 in that the powder or granular joining member 23a is distributed on the mold base 22 and supplied almost uniformly. As a result, the powdered or granular joining member 23a is melted and uniformly distributed between the joining surfaces of the mold body 21 and the mold base 22 at the time of molding / joining, which is caused by variations in the thickness of the joining member, displacement, and the like. Thus, problems such as the mold body 21 being inclined with respect to the mold base material 22 during molding / joining are eliminated, and the mold mold surface 21a of the mold body 21 can be stably molded.

図8は、(a)〜(c)は、本発明のさらに他の実施の形態であるモールド成形用型の製造方法を工程順に示す略断面図である。
この図8の例では、同図(a)のように、型基材22の接合端面の中央部に、位置決め溝22bを形成し、図9(a)のように、この位置決め溝22bの位置に球状接合部材23bを配置し、その上に型本体21を載置するものである。
FIGS. 8A to 8C are schematic cross-sectional views showing a method of manufacturing a mold for molding which is still another embodiment of the present invention in the order of steps.
In the example of FIG. 8, a positioning groove 22b is formed at the center of the joining end surface of the mold base 22 as shown in FIG. 9A, and the position of the positioning groove 22b as shown in FIG. 9A. The spherical joining member 23b is disposed on the mold body 21 and the mold body 21 is placed thereon.

そして、図8(b)のように加圧して成形/接合を行うに際して、球状接合部材23bは、型本体21と型基材22との間の挟圧力にて、型本体21と型基材22の挟圧力のバランスが接合面内で均一となるように自己整合的に、両者の間隙に均一に分散するように広がる。これにより、型本体21が型基材22に対して傾斜した状態で接合される等の不具合を生じることが確実に防止される。また、接合面への空気の巻き込み等もなくなるとともに、球状接合部材23bの大きさを型基材22の接合面の面積に応じて適宜設定することで、比較的薄い厚さの接合部を形成することもできる。   When molding / joining is performed by applying pressure as shown in FIG. 8B, the spherical joining member 23b is pressed by the clamping force between the mold body 21 and the mold substrate 22, and the mold body 21 and the mold substrate. It spreads in a self-aligned manner so that the balance of the clamping pressure of 22 is uniform within the joint surface, and is uniformly distributed in the gap between the two. As a result, it is possible to reliably prevent problems such as the mold body 21 being joined to the mold substrate 22 in an inclined state. In addition, air entrainment on the joint surface is eliminated, and a joint portion having a relatively thin thickness is formed by appropriately setting the size of the spherical joint member 23b according to the area of the joint surface of the mold base 22. You can also

また、単体の球状接合部材23bは、取り扱いが便利であるため、搬送や、接合部への供給、位置決めの自動化が容易になる等の利点がある。
なお、球状接合部材23bの数は、一つに限らず、図9(b)のように、複数の球状接合部材23bを型基材22の接合面上に均等に配置してもよい。この場合、配置位置に複数の位置決め溝22bが均等に形成されることは言う迄もない。
Further, since the single spherical joining member 23b is convenient to handle, there are advantages such as easy transportation, supply to the joining portion, and automation of positioning.
The number of spherical bonding members 23b is not limited to one, and a plurality of spherical bonding members 23b may be evenly arranged on the bonding surface of the mold base 22 as shown in FIG. In this case, it goes without saying that the plurality of positioning grooves 22b are formed uniformly at the arrangement position.

本発明の一実施の形態であるモールド成形用型の製造方法が実施される型製造装置の構成および動作の一例を工程順示す略断面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic sectional drawing which shows an example of a structure and operation | movement of a type | mold manufacturing apparatus with which the manufacturing method of the shaping | molding die which is one embodiment of this invention is implemented in order of a process. (a)〜(c)は、本発明の一実施の形態であるモールド成形用型の製造方法に用いられる素材の物性および接合の実験結果を示す図である。(A)-(c) is a figure which shows the physical property of the raw material used for the manufacturing method of the shaping | molding die which is one embodiment of this invention, and the experimental result of joining. 本発明の一実施の形態であるモールド成形用型の製造方法に用いられるガラス材料の温度−伸びの特性曲線を示す線図である。It is a diagram which shows the temperature-elongation characteristic curve of the glass material used for the manufacturing method of the shaping | molding die which is one embodiment of this invention. (a)〜(c)は、本発明の一実施の形態であるモールド成形用型の製造方法に用いられる素材の物性および接合の実験結果を示す図である。(A)-(c) is a figure which shows the physical property of the raw material used for the manufacturing method of the shaping | molding die which is one embodiment of this invention, and the experimental result of joining. 本発明の一実施の形態であるモールド成形用型の製造方法に用いられるガラス材料の温度−伸びの特性曲線を示す線図である。It is a diagram which shows the temperature-elongation characteristic curve of the glass material used for the manufacturing method of the shaping | molding die which is one embodiment of this invention. (a)〜(d)は、本発明の一実施の形態である型製造装置の変形例の構成および動作を工程順に示す略断面図である。(A)-(d) is a schematic sectional drawing which shows the structure and operation | movement of the modification of the type | mold manufacturing apparatus which is one embodiment of this invention in order of a process. (a)〜(c)は、本発明の他の実施の形態であるモールド成形用型の製造方法を工程順に示す略断面図である。(A)-(c) is a schematic sectional drawing which shows the manufacturing method of the shaping | molding die which is other embodiment of this invention in order of a process. (a)〜(c)は、本発明のさらに他の実施の形態であるモールド成形用型の製造方法を工程順に示す略断面図である。(A)-(c) is a schematic sectional drawing which shows the manufacturing method of the shaping | molding die which is further another embodiment of this invention in order of a process. (a)および(b)は、図8における接合部材の配置例を示す平面図である。(A) And (b) is a top view which shows the example of arrangement | positioning of the joining member in FIG.

符号の説明Explanation of symbols

10 型製造装置
11 基材ベース
11a 保持穴
12 ホルダ
13 マスタ型
13a 転写パターン
14 プレス軸
20 モールド成形型
21 型本体
21a モールド型面
22 型基材
22−1 型基材
22a 衝面
22b 位置決め溝
23 接合部材
23a 粉または粒状の接合部材
23b 球状接合部材
30 型製造装置
31 基材ベース
31a 保持穴
32 ホルダ
33 マスタ型
33a 転写パターン
G1〜G6 市販ガラス材
G7 金属ガラス
K1 市販金型材
K2 市販工具鋼
T0 成形/接合温度
Tg ガラス転移点
At ガラス屈伏点
Tx ガラス結晶化温度
DESCRIPTION OF SYMBOLS 10 Type | mold manufacturing apparatus 11 Base material base 11a Holding hole 12 Holder 13 Master type | mold 13a Transfer pattern 14 Press axis | shaft 20 Mold shaping | molding die 21 Mold main body 21a Mold die surface 22 Joining member 23a Powdered or granular joining member 23b Spherical joining member 30 Mold manufacturing apparatus 31 Base base 31a Holding hole 32 Holder 33 Master mold 33a Transfer pattern G1 to G6 Commercial glass material G7 Metallic glass K1 Commercial mold material K2 Commercial tool steel T0 Molding / joining temperature Tg Glass transition point At Glass yield point Tx Glass crystallization temperature

Claims (16)

ガラス遷移挙動を示す第1材料からなりモールド成形面を有する型本体と、前記型本体を支持する型基材と、前記型本体と前記型基材との間に介在し前記第1材料とは異なるガラス遷移挙動を示す第2材料からなる接合部材と、を一体的に接合したことを特徴とするモールド成形用型。   A mold body made of a first material exhibiting glass transition behavior and having a molding surface, a mold base material for supporting the mold body, and the first material interposed between the mold body and the mold base material A molding die characterized by integrally joining a joining member made of a second material exhibiting different glass transition behavior. ガラス遷移挙動を示す第1材料からなりモールド成形面を有する型本体と、前記型本体を支持する型基材と、前記型本体と前記型基材との間に介在し、ガラス屈伏点温度が前記第1材料のガラス転移点温度よりも低い第2材料からなる接合部材と、を一体的に接合したことを特徴とするモールド成形用型。   A mold main body made of a first material exhibiting glass transition behavior and having a molding surface, a mold base supporting the mold main body, and interposed between the mold main body and the mold base, the glass yield point temperature being A mold for molding, wherein a joining member made of a second material lower than the glass transition temperature of the first material is integrally joined. ガラス遷移挙動を示す第1材料からなりモールド成形面を有する型本体と、前記型本体を支持する型基材と、前記型本体と前記型基材との間に介在し、ガラス軟化点温度が前記第1材料のガラス転移点温度よりも低い第2材料からなる接合部材と、を一体的に接合したことを特徴とするモールド成形用型。   A mold main body made of a first material exhibiting glass transition behavior and having a molding surface, a mold base supporting the mold main body, and interposed between the mold main body and the mold base, the glass softening point temperature being A mold for molding, wherein a joining member made of a second material lower than the glass transition temperature of the first material is integrally joined. ガラス遷移挙動を示す第1材料からなりモールド成形面を有する型本体と、前記型本体を支持する型基材と、前記型本体と前記型基材との間に介在し、ガラス遷移温度が前記第1材料のガラス転移点温度よりも低い金属ガラスの第2材料からなる接合部材と、を一体的に接合したことを特徴とするモールド成形用型。   A mold body made of a first material exhibiting glass transition behavior and having a molding surface, a mold substrate supporting the mold body, and interposed between the mold body and the mold substrate, the glass transition temperature is A molding die characterized by integrally joining a joining member made of a second material of metallic glass lower than the glass transition temperature of the first material. 前記第1材料はガラスまたは金属ガラスからなることを特徴とする請求項1から請求項4のいずれか1項に記載のモールド成形用型。   The mold for molding according to any one of claims 1 to 4, wherein the first material is made of glass or metal glass. 前記第2材料はガラスまたは金属ガラスからなることを特徴とする請求項1記載のモールド成形用型。   The mold for molding according to claim 1, wherein the second material is made of glass or metal glass. マスタ型を用いた押圧成形にてモールド成形面を転写形成するモールド成形用型の製造方法であって、
ガラス遷移挙動を示す第1材料からなる型本体と、前記型本体を支持する型基材との間に、前記第1材料とは異なるガラス遷移挙動を示す第2材料からなる接合部材を挟む工程と、
前記マスタ型を前記型本体に当接させ、前記マスタ型と前記型基材との間で前記型本体および前記接合部材を挟圧することにより、前記型本体に前記モールド成形面を転写形成するともに、前記型本体と前記接合部材と前記型基材とを接合する工程と、
を含むことを特徴とするモールド成形用型の製造方法。
A method for producing a mold for molding, wherein a molding surface is transferred by press molding using a master mold,
A step of sandwiching a joining member made of a second material exhibiting a glass transition behavior different from that of the first material between a mold body made of the first material exhibiting glass transition behavior and a mold base material supporting the mold body. When,
The master mold is brought into contact with the mold main body, and the mold main body and the joining member are clamped between the master mold and the mold base, thereby transferring and forming the molding surface on the mold main body. Bonding the mold body, the joining member, and the mold substrate;
A method for producing a mold for molding, comprising:
マスタ型を用いた押圧成形にてモールド成形面を転写形成するモールド成形用型の製造方法であって、
ガラス遷移挙動を示す第1材料からなる型本体と、前記型本体を支持する型基材との間に、ガラス屈伏点温度が前記第1材料のガラス転移点温度よりも低い第2材料からなる接合部材を挟む工程と、
前記マスタ型を前記型本体に当接させ、前記マスタ型と前記型基材との間で前記型本体および前記接合部材を挟圧することにより、前記型本体に前記モールド成形面を転写形成するともに、前記型本体と前記接合部材と前記型基材とを接合する工程と、
を含むことを特徴とするモールド成形用型の製造方法。
A method for producing a mold for molding, wherein a molding surface is transferred by press molding using a master mold,
Between the mold body made of the first material exhibiting the glass transition behavior and the mold base material supporting the mold body, the glass yield point temperature is made of the second material lower than the glass transition temperature of the first material. A step of sandwiching the joining member;
The master mold is brought into contact with the mold main body, and the mold main body and the joining member are clamped between the master mold and the mold base, thereby transferring and forming the molding surface on the mold main body. Bonding the mold body, the joining member, and the mold substrate;
A method for producing a mold for molding, comprising:
マスタ型を用いた押圧成形にてモールド成形面を転写形成するモールド成形用型の製造方法であって、
ガラス遷移挙動を示す第1材料からなる型本体と、前記型本体を支持する型基材との間に、ガラス軟化点温度が前記第1材料のガラス転移点温度よりも低い第2材料からなる接合部材を挟む工程と、
前記マスタ型を前記型本体に当接させ、前記マスタ型と前記型基材との間で前記型本体および前記接合部材を挟圧することにより、前記型本体に前記モールド成形面を転写形成するともに、前記型本体と前記接合部材と前記型基材とを接合する工程と、
を含むことを特徴とするモールド成形用型の製造方法。
A method for producing a mold for molding, wherein a molding surface is transferred by press molding using a master mold,
Between a mold body made of a first material exhibiting glass transition behavior and a mold substrate supporting the mold body, the glass softening point temperature is made of a second material lower than the glass transition point temperature of the first material. A step of sandwiching the joining member;
The master mold is brought into contact with the mold main body, and the mold main body and the joining member are clamped between the master mold and the mold base, thereby transferring and forming the molding surface on the mold main body. Bonding the mold body, the joining member, and the mold substrate;
A method for producing a mold for molding, comprising:
マスタ型を用いた押圧成形にてモールド成形面を転写形成するモールド成形用型の製造方法であって、
ガラス遷移挙動を示す第1材料からなる型本体と、前記型本体を支持する型基材との間に、ガラス遷移温度が前記第1材料のガラス転移点温度よりも低い金属ガラスの第2材料からなる接合部材を挟む工程と、
前記マスタ型を前記型本体に当接させ、前記マスタ型と前記型基材との間で前記型本体および前記接合部材を挟圧することにより、前記型本体に前記モールド成形面を転写形成するともに、前記型本体と前記接合部材と前記型基材とを接合する工程と、
を含むことを特徴とするモールド成形用型の製造方法。
A method for producing a mold for molding, wherein a molding surface is transferred by press molding using a master mold,
A second material of metallic glass having a glass transition temperature lower than a glass transition temperature of the first material between a mold body made of a first material exhibiting a glass transition behavior and a mold substrate supporting the mold body. A step of sandwiching a joining member comprising:
The master mold is brought into contact with the mold main body, and the mold main body and the joining member are clamped between the master mold and the mold base, thereby transferring and forming the molding surface on the mold main body. Bonding the mold body, the joining member, and the mold substrate;
A method for producing a mold for molding, comprising:
前記第1材料はガラスまたは金属ガラスからなることを特徴とする請求項7記載のモールド成形用型の製造方法。   8. The method for manufacturing a mold for molding according to claim 7, wherein the first material is made of glass or metal glass. 前記第2材料はガラスまたは金属ガラスからなることを特徴とする請求項11記載のモールド成形用型の製造方法。   The method for producing a mold for molding according to claim 11, wherein the second material is made of glass or metal glass. 前記接合部材は前記第2材料からなる粉体であることを特徴とする請求項7から請求項12記載のいずれか1項に記載のモールド成形用型の製造方法。   The method for manufacturing a mold for molding according to any one of claims 7 to 12, wherein the joining member is a powder made of the second material. 前記接合部材は球状の前記第2材料からなることを特徴とする請求項7から請求項12記載のいずれか1項に記載のモールド成形用型の製造方法。   The method for manufacturing a mold for molding according to any one of claims 7 to 12, wherein the joining member is made of the spherical second material. 前記接合部材は板状の前記第2材料からなることを特徴とする請求項7から請求項12記載のいずれか1項に記載のモールド成形用型の製造方法。   The method for manufacturing a mold for molding according to any one of claims 7 to 12, wherein the joining member is made of the plate-like second material. 前記型基材の前記接合部材に対する当接部には、球状の前記第2材料の位置決め用の凹部が形成されていることを特徴とする請求項14記載のモールド成形用型の製造方法。   The method for manufacturing a mold for molding according to claim 14, wherein a concave portion for positioning the second material having a spherical shape is formed in a contact portion of the mold base with the joining member.
JP2004148813A 2004-05-19 2004-05-19 Mold for molding and manufacturing method thereof Expired - Fee Related JP4365727B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008137874A (en) * 2006-12-05 2008-06-19 Olympus Corp Mold for forming and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008137874A (en) * 2006-12-05 2008-06-19 Olympus Corp Mold for forming and manufacturing method thereof

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