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JP2006019666A - Light emitting unit and light emitting device - Google Patents

Light emitting unit and light emitting device Download PDF

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Publication number
JP2006019666A
JP2006019666A JP2004198512A JP2004198512A JP2006019666A JP 2006019666 A JP2006019666 A JP 2006019666A JP 2004198512 A JP2004198512 A JP 2004198512A JP 2004198512 A JP2004198512 A JP 2004198512A JP 2006019666 A JP2006019666 A JP 2006019666A
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Prior art keywords
light emitting
light
anode
emitting device
cathode
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JP2004198512A
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Japanese (ja)
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Shuzo Ito
修三 伊藤
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Phenitec Semiconductor Corp
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Phenitec Semiconductor Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48257Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a die pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

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  • Led Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light emitting unit and a light emitting device in which luminance of light traveling in the opening direction of a recess can be enhanced while enhancing heat dissipation of a light emitting element by forming the recess having inner surface of mirror finish in a mount member and mounting the light emitting element in the recess. <P>SOLUTION: In the light emitting unit mounting a light emitting element 10 on a submount material 30, a recess 30a having inner surface of mirror finish is formed in the submount member 30 and the light emitting element 10 is mounted in the recess 30a. The light emitting element 10 has an anode and a cathode, the submount member 30 is a P type semiconductor substrate, N type semiconductor regions 32 and 32 are formed at a part on the bottom of the recess 30a, and anode connecting parts 20 and 20 connected with the anode and cathode are provided on the N type semiconductor regions 32 and 32. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、マウント部材に発光素子が実装された発光器及び該発光器を備える発光装置に関する。   The present invention relates to a light emitter in which a light emitting element is mounted on a mount member, and a light emitting device including the light emitter.

照明装置として、電球よりも消費電力が低く、寿命が長いLEDを用いたものがある。図15は、LEDを用いた発光装置の例を示す断面図である。LEDチップ(発光素子)10がサブマウント材(マウント部材)3に実装された発光器が、銅製の棒状の第1リード40の先端部近くに設けられた板状のダイパッド44上に、Agペースト46を用いてダイボンディングされている。ただし、サブマウント材3と第1リード40とは絶縁されている。   Some lighting devices use LEDs that have lower power consumption and longer life than light bulbs. FIG. 15 is a cross-sectional view illustrating an example of a light emitting device using LEDs. A light emitting device in which an LED chip (light emitting element) 10 is mounted on a submount material (mounting member) 3 is placed on a plate-like die pad 44 provided near the tip of a copper rod-shaped first lead 40. Die bonding is performed using 46. However, the submount material 3 and the first lead 40 are insulated.

第1リード40の先端は、ワイヤ48によってサブマウント材3の図示しないボンディングパッドと接続されている。また、銅製の棒状の第2リード42の先端が、ワイヤ48によってサブマウント材3の図示しないボンディングパッドと接続されている。発光器と第1リード40及び第2リード42の先端側とが透光性を有する合成樹脂性のカバー49に挿入されている。カバー49は、LEDチップ10から照射された光を集光する集光レンズとしても機能する。   The tip of the first lead 40 is connected to a bonding pad (not shown) of the submount material 3 by a wire 48. Further, the tip of the copper rod-like second lead 42 is connected to a bonding pad (not shown) of the submount material 3 by a wire 48. The light emitter and the distal ends of the first lead 40 and the second lead 42 are inserted into a synthetic resin cover 49 having translucency. The cover 49 also functions as a condensing lens that condenses the light emitted from the LED chip 10.

図16は図15に示した発光器の拡大断面図である。LEDチップ10は、四角形の透明なサファイア基板12上(図の下方向)に、GaN系のLED層14が形成されている。LED層14上(図の下方向)には図示しないカソード電極及びアノード電極が形成されており、LEDチップ10は、LED層14を下側にして、四角形の板状のサブマウント材3に実装されている。   16 is an enlarged cross-sectional view of the light emitter shown in FIG. In the LED chip 10, a GaN-based LED layer 14 is formed on a rectangular transparent sapphire substrate 12 (downward in the figure). A cathode electrode and an anode electrode (not shown) are formed on the LED layer 14 (downward in the figure), and the LED chip 10 is mounted on the rectangular plate-shaped submount material 3 with the LED layer 14 on the lower side. Has been.

サブマウント材3のオモテ面には、2箇所、N型拡散層32、32が形成されている。N型拡散層32、32上には、アルミニウム電極20、20が形成されている。また、N型拡散層32、32周辺部分には、酸化膜(SiO2 )26、26が形成され、酸化膜26、26上に前記アルミニウム電極20、20が形成されている。アルミニウム電極20、20には、上述したワイヤ48が接続されるボンディングパッド24、24が形成されている。 Two N-type diffusion layers 32 and 32 are formed on the front surface of the submount 3. Aluminum electrodes 20 and 20 are formed on the N-type diffusion layers 32 and 32. In addition, oxide films (SiO 2 ) 26 and 26 are formed around the N-type diffusion layers 32 and 32, and the aluminum electrodes 20 and 20 are formed on the oxide films 26 and 26. Bonding pads 24 and 24 to which the wires 48 described above are connected are formed on the aluminum electrodes 20 and 20.

LEDチップ10のカソード電極、アノード電極は、導電性のボール22、22により、サブマウント材3のアルミニウム電極20、20に接続されている。また、サブマウント材3の裏面には、Al−Ti−Ag層又はAl−Ti−Au層などのダイボンディング用のメタル層34が形成されている。   The cathode and anode electrodes of the LED chip 10 are connected to the aluminum electrodes 20 and 20 of the submount material 3 by conductive balls 22 and 22. Further, a metal layer 34 for die bonding such as an Al—Ti—Ag layer or an Al—Ti—Au layer is formed on the back surface of the submount material 3.

また、ワイヤ48を用いずに、第1リード40及び第2リード42を発光器の裏面に接続できるように、オモテ面から裏面に貫通する絶縁分離層を有する半導体素子が提案されている(例えば、特許文献1参照)。発光装置において、LEDチップ10のLED層14から下方へ照射された光は、アルミニウム電極20,20で反射され、透明なサファイア基板12を透過して上方へ進む。
特開2003−229581号公報
Further, a semiconductor element having an insulating separation layer penetrating from the front surface to the back surface has been proposed so that the first lead 40 and the second lead 42 can be connected to the back surface of the light emitter without using the wire 48 (for example, , See Patent Document 1). In the light emitting device, light irradiated downward from the LED layer 14 of the LED chip 10 is reflected by the aluminum electrodes 20, 20, passes through the transparent sapphire substrate 12, and travels upward.
JP 2003-229581 A

現在のLEDの輝度は、一般の照明に使用できるほど十分ではなく、輝度の向上が望まれている。しかし、図16に示すように、LEDチップ10から横方向に照射された光は、横方向から外部に出たり、乱反射したり、サブマウント材3に吸収されるなど、有効に使用されていないという問題がある。また、LEDチップ10は発光による発熱が生じるため、放熱性の向上が望まれている。   The brightness of current LEDs is not sufficient to be used for general illumination, and an improvement in brightness is desired. However, as shown in FIG. 16, the light irradiated in the horizontal direction from the LED chip 10 is not used effectively, such as coming out from the horizontal direction, being irregularly reflected, or absorbed by the submount material 3. There is a problem. Further, since the LED chip 10 generates heat due to light emission, improvement in heat dissipation is desired.

本発明は斯かる事情に鑑みてなされたものであり、マウント部材に内面が鏡面の凹部を形成し、該凹部に発光素子を実装した構成にすることにより、凹部の開口方向に進む光の輝度を向上させることができ、また発光素子の放熱性を向上できる発光器及び発光装置を提供することを目的とする。   The present invention has been made in view of such circumstances, and the brightness of light traveling in the opening direction of the concave portion is obtained by forming a concave portion having a mirror surface on the mount member and mounting a light emitting element on the concave portion. It is an object to provide a light-emitting device and a light-emitting device that can improve the heat dissipation and improve the heat dissipation of the light-emitting element.

また、本発明は、P型半導体のマウント部材に形成された凹部の底の一部にN型半導体領域を形成し、N型半導体領域上に発光素子の陽極と接続された陽極接続部を設け、凹部のP型半導体領域上に発光素子の陰極と接続された陰極接続部を設けることにより、発光素子に逆方向から静電気が加わることを防止できる発光器及び発光装置を提供することを他の目的とする。   According to the present invention, an N-type semiconductor region is formed in a part of the bottom of the recess formed in the P-type semiconductor mount member, and an anode connection portion connected to the anode of the light emitting element is provided on the N-type semiconductor region. It is another object of the present invention to provide a light emitting device and a light emitting device capable of preventing static electricity from being applied to the light emitting element from the reverse direction by providing a cathode connection portion connected to the cathode of the light emitting element on the P-type semiconductor region of the recess. Objective.

また、本発明は、P型半導体基板に形成された凹部の底の2箇所にN型半導体領域を形成し、一方のN型半導体領域上に発光素子の陽極と接続された陽極接続部を設け、他方のN型半導体領域上に発光素子の陰極と接続された陰極接続部を設けることにより、発光素子に順方向及び逆方向から静電気が加わることを防止できる発光器及び発光装置を提供することを他の目的とする。   Further, according to the present invention, an N-type semiconductor region is formed in two places at the bottom of the recess formed in the P-type semiconductor substrate, and an anode connection portion connected to the anode of the light emitting element is provided on one N-type semiconductor region. Providing a light-emitting device and a light-emitting device capable of preventing static electricity from being applied to the light-emitting element from the forward and reverse directions by providing a cathode connection portion connected to the cathode of the light-emitting element on the other N-type semiconductor region. For other purposes.

また、本発明は、マウント部材の凹部が形成されている凹部形成面(オモテ面)から裏面へ貫通する貫通導電層を設け、凹部形成面の貫通導電層を陽極接続部又は陰極接続部に接続し、裏面の貫通導電層に陽極板又は陰極板を接続した構成にすることにより、ワイヤを用いずに陽極板又は陰極板に正極リード又は負極リードを直接的に接続できる発光器及び発光装置を提供することを他の目的とする。   The present invention also provides a through conductive layer penetrating from the concave surface (front surface) where the concave portion of the mount member is formed to the back surface, and connecting the through conductive layer on the concave surface to the anode connection portion or the cathode connection portion. And a light-emitting device and a light-emitting device in which a positive electrode lead or a negative electrode lead can be directly connected to the anode plate or the cathode plate without using a wire by using a structure in which the anode plate or the cathode plate is connected to the through conductive layer on the back surface. The other purpose is to provide.

また、本発明は、マウント部材の凹部形成面から裏面へ貫通する2つの貫通導電層を設け、凹部形成面の2つの貫通導電層の一方を陽極接続部に接続し、他方を陰極接続部に接続し、裏面の一方の貫通導電層に陽極板を接続し、他方の貫通導電層に陰極板を接続した構成にすることにより、ワイヤを用いずに陽極板及び陰極板に夫々正極リード及び負極リードを直接的に接続できる発光器及び発光装置を提供することを他の目的とする。   Further, the present invention provides two through conductive layers penetrating from the recessed portion forming surface to the back surface of the mount member, one of the two through conductive layers of the recessed portion forming surface is connected to the anode connecting portion, and the other is connected to the cathode connecting portion. By connecting the anode plate to one through conductive layer on the back surface and connecting the cathode plate to the other through conductive layer, the positive electrode lead and the negative electrode are connected to the anode plate and the cathode plate, respectively, without using wires. Another object of the present invention is to provide a light-emitting device and a light-emitting device in which leads can be directly connected.

第1発明に係る発光器は、マウント部材に発光素子が実装された発光器において、マウント部材に内面が鏡面の凹部が形成されており、凹部に発光素子が実装されていることを特徴とする。   A light emitting device according to a first aspect of the present invention is a light emitting device in which a light emitting element is mounted on a mount member, wherein the mount member is formed with a recess having a mirror inner surface, and the light emitting element is mounted in the recess. .

第2発明に係る発光器は、第1発明において、前記発光素子は陽極及び陰極を有し、前記マウント部材はP型半導体基板であり、凹部の底の一部にN型半導体領域が形成されており、N型半導体領域上に前記陽極と接続された陽極接続部を有し、N型半導体領域が形成されていないP型半導体領域上に前記陰極と接続された陰極接続部を有することを特徴とする。   A light emitting device according to a second invention is the light emitting device according to the first invention, wherein the light emitting element has an anode and a cathode, the mount member is a P type semiconductor substrate, and an N type semiconductor region is formed in a part of the bottom of the recess. An anode connection portion connected to the anode on the N-type semiconductor region, and a cathode connection portion connected to the cathode on the P-type semiconductor region where the N-type semiconductor region is not formed. Features.

第3発明に係る発光器は、第1発明において、前記発光素子は陽極及び陰極を有し、前記マウント部材はP型半導体基板であり、凹部の底の2箇所にN型半導体領域が形成されており、一方のN型半導体領域上に前記陽極と接続された陽極接続部を有し、他方のN型半導体領域上に前記陰極と接続された陰極接続部を有することを特徴とする。   A light emitting device according to a third invention is the light emitting device according to the first invention, wherein the light emitting element has an anode and a cathode, the mount member is a P type semiconductor substrate, and N type semiconductor regions are formed at two locations at the bottom of the recess. And having an anode connection portion connected to the anode on one N-type semiconductor region and having a cathode connection portion connected to the cathode on the other N-type semiconductor region.

第4発明に係る発光器は、第2又は第3発明において、マウント部材の凹部が形成されている凹部形成面と該凹部形成面の反対側の裏面との間を貫通する貫通導電層と、前記凹部形成面の貫通導電層に陽極接続部又は陰極接続部を接続する導電体と、前記裏面の貫通導電層に接続された陽極板又は陰極板とを備えることを特徴とする。   The light emitting device according to a fourth invention is the penetrating conductive layer penetrating between the concave portion forming surface where the concave portion of the mount member is formed and the back surface opposite to the concave portion forming surface in the second or third invention, It is characterized by comprising a conductor for connecting an anode connecting portion or a cathode connecting portion to the through conductive layer on the concave surface and an anode plate or a cathode plate connected to the through conductive layer on the back surface.

第5発明に係る発光器は、第2又は第3発明において、マウント部材の凹部が形成されている凹部形成面と該凹部形成面の反対側の裏面との間を貫通する2つの貫通導電層と、前記凹部形成面の2つの貫通導電層の一方に陽極接続部を、他方に陰極接続部を夫々接続する2つの導電体と、前記裏面の一方の貫通導電層に接続された陽極板、及び、他方の貫通導電層に接続された陰極板とを備えることを特徴とする。   The light emitting device according to the fifth invention is the light-emitting device according to the second or third invention, wherein in the second or third invention, there are two through-conductive layers penetrating between the concave portion forming surface where the concave portion of the mount member is formed and the back surface opposite to the concave portion forming surface. Two conductors for connecting an anode connecting portion to one of the two through conductive layers on the concave surface and the cathode connecting portion to the other, and an anode plate connected to one through conductive layer on the back surface, And a cathode plate connected to the other through conductive layer.

第6発明に係る発光装置は、第1乃至第5発明の何れかの発光器と、該発光器に接続された正極リード及び負極リードと、正極リード及び負極リードの一部と発光器とが挿入される透光性のカバーとを備えることを特徴とする。   A light emitting device according to a sixth aspect of the present invention includes the light emitter according to any one of the first to fifth aspects, a positive electrode lead and a negative electrode lead connected to the light emitter, a part of the positive electrode lead and the negative electrode lead, and the light emitter. And a translucent cover to be inserted.

第7発明に係る発光装置は、第2又は第3発明の発光器と、正極リード及び負極リードと、正極リードを発光器の陽極接続部に接続する導電体、及び、負極リードを発光器の陰極接続部に接続する導電体と、正極リード及び負極リードの一部と発光器とが挿入される透光性のカバーとを備えることを特徴とする。   A light emitting device according to a seventh aspect of the present invention is the light emitting device of the second or third aspect, a positive electrode lead and a negative electrode lead, a conductor that connects the positive electrode lead to the anode connection portion of the light emitting device, and a negative electrode lead that is connected to the light emitting device. It is characterized by comprising a conductor connected to the cathode connection portion, and a translucent cover into which a positive electrode lead, a part of the negative electrode lead, and a light emitter are inserted.

第8発明に係る発光装置は、第4発明の発光器と、該発光器の陽極板に接続された正極リード、及び、陰極板に接続された負極リードと、正極リード及び負極リードの一部と発光器とが挿入される透光性のカバーとを備えることを特徴とする。   A light-emitting device according to an eighth aspect of the present invention includes the light-emitting device according to the fourth aspect, a positive electrode lead connected to the anode plate of the light-emitting device, a negative electrode lead connected to the cathode plate, and part of the positive electrode lead and the negative electrode lead. And a translucent cover into which the light emitter is inserted.

第1、第6発明においては、内面が鏡面の凹部に発光素子が実装されており、発光素子から横方向に照射された光は、凹部内面(鏡面)で反射し、開口方向に進む。発光素子から照射される光の多くは凹部の開口方向に進んでいるが、横方向に照射した光も開口方向に進むため、開口方向に進む光の輝度が向上する。また、凹部に発光素子が実装されているため、発光素子がマウント部材に埋め込まれた状態になり、発光器全体の厚みが減少し、薄型化される。さらに、凹部に発光素子が実装されているため、発光素子からマウント部材の裏面までの厚さが減少し、発光素子の発熱がマウント部材の裏面に伝わり易くなり、放熱性が向上する。   In the first and sixth inventions, the light emitting element is mounted in the concave portion whose inner surface is a mirror surface, and the light irradiated in the lateral direction from the light emitting element is reflected by the inner surface (mirror surface) of the concave portion and proceeds in the opening direction. Most of the light emitted from the light emitting element proceeds in the opening direction of the recess, but the light irradiated in the lateral direction also proceeds in the opening direction, so that the luminance of the light traveling in the opening direction is improved. In addition, since the light emitting element is mounted in the recess, the light emitting element is embedded in the mount member, and the thickness of the entire light emitter is reduced and the thickness is reduced. Furthermore, since the light emitting element is mounted in the recess, the thickness from the light emitting element to the back surface of the mount member is reduced, and heat generated from the light emitting element is easily transmitted to the back surface of the mount member, thereby improving heat dissipation.

第2、第7発明においては、マウント部材はP型半導体基板であり、凹部の底の一部にN型半導体領域が形成されている。N型半導体領域上に発光素子の陽極と接続された陽極接続部を有し、凹部のN型半導体領域が形成されていないP型半導体領域上に発光素子の陰極と接続された陰極接続部を有しているため、陽極接続部及び陰極接続部間は、発光素子とダイオードとが逆方向に並列接続された状態になる。前記ダイオードにより、発光素子に逆方向から静電気が加わることを防止できる。   In the second and seventh inventions, the mount member is a P-type semiconductor substrate, and an N-type semiconductor region is formed in a part of the bottom of the recess. A cathode connecting portion connected to the cathode of the light emitting element is formed on the P type semiconductor region having an anode connecting portion connected to the anode of the light emitting element on the N type semiconductor region, and the N type semiconductor region of the recess is not formed. Therefore, the light emitting element and the diode are connected in parallel in the opposite direction between the anode connection portion and the cathode connection portion. The diode can prevent static electricity from being applied to the light emitting element from the opposite direction.

第3、第7発明においては、マウント部材はP型半導体基板であり、凹部の底の2箇所にN型半導体領域が形成されている。一方のN型半導体領域上に発光素子の陽極と接続された陽極接続部を有し、他方のN型半導体領域上に発光素子の陰極と接続された陰極接続部を有しているため、陽極接続部及び陰極接続部間は、発光素子と、直列にカソードが接続された2つのダイオードとが並列接続された状態になる。前記2つのダイオードにより、発光素子に順方向及び逆方向から静電気が加わることを防止できる。   In the third and seventh inventions, the mount member is a P-type semiconductor substrate, and N-type semiconductor regions are formed at two locations on the bottom of the recess. The anode connection portion connected to the anode of the light emitting element is provided on one N-type semiconductor region, and the anode connection portion connected to the cathode of the light emitting element is provided on the other N-type semiconductor region. Between the connection part and the cathode connection part, the light emitting element and two diodes connected in series with the cathode are connected in parallel. The two diodes can prevent static electricity from being applied to the light emitting element from the forward direction and the reverse direction.

第4、第8発明においては、マウント部材には、凹部が形成されている凹部形成面(オモテ面)から裏面へ貫通する貫通導電層が形成されている。凹部形成面の貫通導電層を導電体で陽極接続部又は陰極接続部に接続し、裏面の貫通導電層に陽極板又は陰極板を接続しているため、陽極接続部又は陰極接続部は前記導電体及び貫通導電層を介して裏面の陽極板又は陰極板と接続されている。発光器を正極リード及び負極リードに接続する際、ワイヤを用いずに、正極リード又は負極リードをマウント部材裏面の陽極板又は陰極板に直接的に接続することが可能になる。ワイヤを用いない場合、製造が容易になり、製造コストが低減する。また、ワイヤの配置スペースが不要になるため、軽薄短小化が可能になる。   In the fourth and eighth inventions, the mount member is formed with a through conductive layer penetrating from the recess forming surface (front surface) where the recess is formed to the back surface. Since the through conductive layer on the recess forming surface is connected to the anode connecting portion or the cathode connecting portion with a conductor, and the anode plate or the cathode plate is connected to the through conductive layer on the back surface, the anode connecting portion or the cathode connecting portion is It is connected to the anode plate or cathode plate on the back surface through the body and the through conductive layer. When connecting the light emitter to the positive electrode lead and the negative electrode lead, the positive electrode lead or the negative electrode lead can be directly connected to the anode plate or the cathode plate on the back surface of the mount member without using a wire. When a wire is not used, manufacturing is facilitated and manufacturing cost is reduced. In addition, since a wire arrangement space is not required, it is possible to reduce the thickness and thickness.

第5、第8発明においては、マウント部材には、凹部が形成されている凹部形成面(オモテ面)から裏面へ貫通する2つの貫通導電層が形成されている。凹部形成面の2つの貫通導電層の一方を導電体で陽極接続部に接続し、他方を導電体で陰極接続部に接続し、裏面の一方の貫通導電層に陽極板を接続し、他方の貫通導電層に陰極板を接続しているため、陽極接続部及び陰極接続部は前記導電体及び貫通導電層を介して夫々裏面の陽極板及び陰極板と接続されている。発光器を正極リード及び負極リードに接続する際、ワイヤを用いずに、正極リード及び負極リードを夫々マウント部材裏面の陽極板及び陰極板に直接的に接続することが可能になる。ワイヤを用いない場合、製造が容易になり、製造コストが低減する。また、ワイヤの配置スペースが不要になるため、軽薄短小化が可能になる。   In the fifth and eighth aspects, the mount member is formed with two through conductive layers penetrating from the recess forming surface (front surface) where the recess is formed to the back surface. One of the two through conductive layers on the recess forming surface is connected to the anode connecting portion with a conductor, the other is connected to the cathode connecting portion with a conductor, the anode plate is connected to one through conductive layer on the back surface, and the other Since the cathode plate is connected to the through conductive layer, the anode connecting portion and the cathode connecting portion are connected to the anode plate and the cathode plate on the back surface through the conductor and the through conductive layer, respectively. When the light emitter is connected to the positive electrode lead and the negative electrode lead, the positive electrode lead and the negative electrode lead can be directly connected to the anode plate and the cathode plate on the back surface of the mount member, respectively, without using wires. When a wire is not used, manufacturing is facilitated and manufacturing cost is reduced. In addition, since a wire arrangement space is not required, it is possible to reduce the thickness and thickness.

第1、第6発明によれば、開口方向に進む光の輝度を向上させることができる。また、発光素子の放熱性を向上でき、発光素子に流す電流を増加させることが可能になる。   According to the first and sixth inventions, the luminance of light traveling in the opening direction can be improved. Further, the heat dissipation of the light emitting element can be improved, and the current flowing through the light emitting element can be increased.

第2、第3、第7発明によれば、発光素子に静電気が加わることを防止できる。   According to the second, third, and seventh inventions, it is possible to prevent static electricity from being applied to the light emitting element.

第4、第5、第8発明によれば、ワイヤを用いずに正極リードをマウント部材裏面の陽極板に直接的に接続したり、負極リードを陰極板に直接的に接続できる。ワイヤを用いないため、製造コストを低減でき、また、軽薄短小化が可能になる。   According to the fourth, fifth, and eighth inventions, the positive electrode lead can be directly connected to the anode plate on the back surface of the mount member without using a wire, and the negative electrode lead can be directly connected to the cathode plate. Since no wire is used, the manufacturing cost can be reduced, and the thickness can be reduced.

以下、本発明をその実施の形態を示す図面に基づいて具体的に説明する。
(第1の実施の形態)
図1は、本発明に係る発光装置の例を示す断面図である。銅製の棒状の第1リード40の先端部近くに設けられた板状のダイパッド44上に、LEDチップ(発光素子)10がサブマウント材(マウント部材)30に実装された発光器が、Agペースト46を用いてダイボンディングされている。ただし、サブマウント材30と第1リード40とは絶縁されている。
Hereinafter, the present invention will be specifically described with reference to the drawings illustrating embodiments thereof.
(First embodiment)
FIG. 1 is a cross-sectional view showing an example of a light emitting device according to the present invention. A light emitting device in which an LED chip (light emitting element) 10 is mounted on a submount material (mounting member) 30 on a plate-like die pad 44 provided near the tip of the copper rod-shaped first lead 40 is an Ag paste. Die bonding is performed using 46. However, the submount material 30 and the first lead 40 are insulated.

第1リード40の先端は、ワイヤ(導電体)48によってサブマウント材30の図示しないボンディングパッドと接続されている。また、銅製の棒状の第2リード42の先端が、ワイヤ48によってサブマウント材30の図示しないボンディングパッドと接続されている。第1リード40及び第2リード42の一方(正極リード)は図示しない電源の正極と接続され、他方(負極リード)は負極と接続される。発光器と第1リード40及び第2リード42の先端側とが透光性を有する合成樹脂性のカバー49に挿入されている。LEDチップ10は例えば青色ダイオードチップであり、発光装置から青色の光を出力したり、例えば黄色のフィルタなどを用いて発光装置から白色の光を出力することが可能である。   The tip of the first lead 40 is connected to a bonding pad (not shown) of the submount material 30 by a wire (conductor) 48. The tip of the copper rod-like second lead 42 is connected to a bonding pad (not shown) of the submount 30 by a wire 48. One of the first lead 40 and the second lead 42 (positive lead) is connected to a positive electrode of a power source (not shown), and the other (negative lead) is connected to a negative electrode. The light emitter and the distal ends of the first lead 40 and the second lead 42 are inserted into a synthetic resin cover 49 having translucency. The LED chip 10 is, for example, a blue diode chip, and can output blue light from the light emitting device, or can output white light from the light emitting device using, for example, a yellow filter.

図2は図1に示した発光器の例を示す上面図であり、図3(a)は図2のA−A線切断断面図である。LEDチップ10は、四角形の透明なサファイア基板12上(図面の下方向)に、GaN系のLED層14が形成されている。LED層14上(図面の下方向)には図示しないアノード電極(陽極)及びカソード電極(陰極)が形成されており、LEDチップ10は、LED層14を下側にして、サブマウント材30の後述する凹部30aに実装されている。   2 is a top view showing an example of the light emitting device shown in FIG. 1, and FIG. 3A is a cross-sectional view taken along line AA in FIG. In the LED chip 10, a GaN-based LED layer 14 is formed on a rectangular transparent sapphire substrate 12 (downward in the drawing). An anode electrode (anode) and a cathode electrode (cathode) (not shown) are formed on the LED layer 14 (downward in the drawing). The LED chip 10 has the LED layer 14 on the lower side and the submount material 30 It is mounted in a recess 30a which will be described later.

LED層14は、例えばサファイア基板12上にGaNバッファ層が形成され、GaNバッファ層上の一部にカソード電極、他部にN−GaN層が形成され、N−GaN層上にN−AlGaN層(クラッド層)が形成され、N−AlGaN層上にInGaN層(活性層)が形成され、InGaN層上にP−AlGaN層(クラッド層)が形成され、P−AlGaN層上にP型GaN層が形成され、P型GaN層上にアノード電極が形成されている。   The LED layer 14 includes, for example, a GaN buffer layer formed on the sapphire substrate 12, a cathode electrode formed on a part of the GaN buffer layer, an N-GaN layer formed on the other part, and an N-AlGaN layer on the N-GaN layer. (Clad layer) is formed, an InGaN layer (active layer) is formed on the N-AlGaN layer, a P-AlGaN layer (clad layer) is formed on the InGaN layer, and a P-type GaN layer is formed on the P-AlGaN layer And an anode electrode is formed on the P-type GaN layer.

サブマウント材30は、四角形のP型シリコン基板であり、オモテ面(凹部形成面)に楕円状の凹部30aが形成されている。凹部30aはエッチングにより形成される。サブマウント材30にエッチングを行った場合、等方エッチングとなり、凹部30aの断面は、図3(a)に示すように底外周部からサブマウント材30のオモテ面までが曲線になっている。例えば極率半径が100〜150μmの曲線になっている。また、前記曲線部分は、シリコンの鏡面となっている。   The submount material 30 is a rectangular P-type silicon substrate, and an elliptical concave portion 30a is formed on the front surface (recessed surface). The recess 30a is formed by etching. When the submount material 30 is etched, it becomes isotropic etching, and the cross section of the recess 30a is curved from the bottom outer peripheral portion to the front surface of the submount material 30 as shown in FIG. For example, the curvature radius is a curve of 100 to 150 μm. The curved portion is a mirror surface of silicon.

サブマウント材30の凹部30aの底には、2箇所、N型拡散層(N型半導体層)32、32が形成されている。N型拡散層32、32上には、アルミニウム電極20、20が形成されている。また、凹部30aの底のN型拡散層32、32周辺部分には、酸化膜(SiO2 )28、28が形成され、酸化膜28、28上にアルミニウム電極20、20が形成されている。アルミニウム電極20、20には、上述したワイヤ48が接続されるボンディングパッド24、24が形成されている。アルミニウム電極20、20の一方(陽極接続部)はアノード電極が接続され、他方(陰極接続部)にはカソード電極が接続される。 Two N-type diffusion layers (N-type semiconductor layers) 32 and 32 are formed on the bottom of the recess 30 a of the submount material 30. Aluminum electrodes 20 and 20 are formed on the N-type diffusion layers 32 and 32. In addition, oxide films (SiO 2 ) 28 and 28 are formed on the periphery of the N-type diffusion layers 32 and 32 at the bottom of the recess 30 a, and aluminum electrodes 20 and 20 are formed on the oxide films 28 and 28. Bonding pads 24 and 24 to which the wires 48 described above are connected are formed on the aluminum electrodes 20 and 20. One of the aluminum electrodes 20, 20 (anode connection portion) is connected to the anode electrode, and the other (cathode connection portion) is connected to the cathode electrode.

LEDチップ10のカソード電極、アノード電極は、導電性のボール22、22により、サブマウント材30のアルミニウム電極20、20に接続されている。また、サブマウント材30の裏面には、Al−Ti−Ag層又はAl−Ti−Au層などのダイボンディング用のメタル層34が形成されている。   The cathode and anode electrodes of the LED chip 10 are connected to the aluminum electrodes 20 and 20 of the submount material 30 by conductive balls 22 and 22. Further, a metal layer 34 for die bonding such as an Al—Ti—Ag layer or an Al—Ti—Au layer is formed on the back surface of the submount material 30.

図3(b)は、図3(a)に示す発光器の等価回路図である。2つのN型拡散層32、32をP型半導体であるサブマウント材30に設けることにより、LED素子10と、直列にカソード同士が接続された2つのツェナーダイオードとが並列接続されていると見なすことができる。前記2つのツェナーダイオードの働きにより、LED素子10に順方向及び逆方向から静電気が加わることを防止できる。   FIG. 3B is an equivalent circuit diagram of the light emitter shown in FIG. By providing the two N-type diffusion layers 32 and 32 in the submount material 30 that is a P-type semiconductor, it is considered that the LED element 10 and two Zener diodes having cathodes connected in series are connected in parallel. be able to. The action of the two Zener diodes can prevent static electricity from being applied to the LED element 10 from the forward direction and the reverse direction.

図4(a)〜(d)及び図5(a)〜(c)は、サブマウント材30の製造方法の例を示す要部断面図である。図4(a)に示すようにP型シリコン基板(サブマウント材30)のオモテ面及び裏面に酸化膜26,26を形成し、次に図4(b)に示すようにエッチングにより凹部30aを形成する。この後は、従来と同様に製造することが可能であり、例えば図4(c)に示すように凹部30aの底に酸化膜28を形成し、次に図4(d)に示すように酸化膜28の一部を取除いて、図5(a)に示すようにN型拡散層32を形成し、また裏面の酸化膜26を取除く。次に図5(b)に示すようにN型拡散層32及び酸化膜28上にアルミニウム電極20を形成し、また裏面にメタル層34を形成し、次に図5(c)に示すようにアルミニウム電極20上にボンディングパッド24を形成する。   FIGS. 4A to 4D and FIGS. 5A to 5C are cross-sectional views of relevant parts showing an example of a method for manufacturing the submount material 30. FIGS. As shown in FIG. 4 (a), oxide films 26 and 26 are formed on the front and back surfaces of a P-type silicon substrate (submount material 30), and then a recess 30a is formed by etching as shown in FIG. 4 (b). Form. Thereafter, it can be manufactured in the same manner as in the prior art. For example, an oxide film 28 is formed on the bottom of the recess 30a as shown in FIG. 4C, and then oxidized as shown in FIG. 4D. A part of the film 28 is removed to form an N-type diffusion layer 32 as shown in FIG. 5A, and the oxide film 26 on the back surface is removed. Next, as shown in FIG. 5B, the aluminum electrode 20 is formed on the N-type diffusion layer 32 and the oxide film 28, and the metal layer 34 is formed on the back surface. Next, as shown in FIG. A bonding pad 24 is formed on the aluminum electrode 20.

サブマウント材30の高さは120〜160μmであり、凹部30aの底からサブマウント材30の裏面までの厚さは50〜80μmである。LEDチップ10の実装部分からサブマウント材30の裏面までの厚さは、従来の1/2程度になる。また、発光器全体の高さは、LEDチップ10が凹部30a内に実装されているため、ほぼサブマウント材30と同様の高さになり、従来の2/3程度の薄型パッケージとなる。   The height of the submount material 30 is 120 to 160 μm, and the thickness from the bottom of the recess 30 a to the back surface of the submount material 30 is 50 to 80 μm. The thickness from the mounting portion of the LED chip 10 to the back surface of the submount material 30 is about ½ of the conventional thickness. Moreover, since the LED chip 10 is mounted in the recess 30a, the entire light emitting device is almost the same height as that of the submount material 30 and becomes a conventional thin package of about 2/3.

図3(a)に示すように、LEDチップ10のLED層14から下方へ照射された光は、アルミニウム電極20,20で反射され、透明なサファイア基板12を透過して凹部30aの開口方向へ進む。また、LED層14から横方向へ照射された光は、凹部30aで反射されて開口方向へ進むため、発光装置から出力される光の輝度が向上する。例えば波長418nmにおいて凹部30aを形成していない場合に発光装置から出力される光のランプ効率は27[lm/w]で、凹部30aを形成した場合のランプ効率は40[lm/w]で、ランプ効率は1.5倍に向上している。また、図6はLEDチップ10から発生した光に対するLEDチップ10の上方向に進む光の外部量子効率の例を示す特性図である。図6に示すように、凹部30aを形成した本発明品は、凹部30aを形成していない従来品に比べて、外部量子効率が約1.6〜1.8倍向上している。   As shown in FIG. 3A, the light irradiated downward from the LED layer 14 of the LED chip 10 is reflected by the aluminum electrodes 20 and 20, passes through the transparent sapphire substrate 12, and opens in the opening direction of the recess 30 a. move on. Moreover, since the light irradiated in the horizontal direction from the LED layer 14 is reflected by the recess 30a and proceeds in the opening direction, the luminance of the light output from the light emitting device is improved. For example, when the concave portion 30a is not formed at a wavelength of 418 nm, the lamp efficiency of light output from the light emitting device is 27 [lm / w], and when the concave portion 30a is formed, the lamp efficiency is 40 [lm / w]. The lamp efficiency is improved by a factor of 1.5. FIG. 6 is a characteristic diagram showing an example of the external quantum efficiency of light traveling upward of the LED chip 10 with respect to light generated from the LED chip 10. As shown in FIG. 6, the product of the present invention in which the recess 30a is formed has an external quantum efficiency improved by about 1.6 to 1.8 times compared to the conventional product in which the recess 30a is not formed.

また、LEDチップ10で生じた熱は、ダイパッド44を介して第1リード40へ放熱されるが、図1に示すように、サブマウント材30に形成された凹部30aにLEDチップ10が実装されているため、LEDチップ10で生じた熱は、従来よりもサブマウント材30からダイパッド44に伝わり易く、放熱性が向上する。例えば凹部30aを形成していない場合の熱抵抗は125℃/Wで、凹部30aを形成した場合の熱抵抗は80℃/Wで、熱抵抗は35%減少している。放熱性が向上するため、LEDチップ10に従来よりも大きな電流を流すことが可能になり、輝度を向上させることができる。   The heat generated in the LED chip 10 is dissipated to the first lead 40 through the die pad 44, but the LED chip 10 is mounted in the recess 30a formed in the submount material 30 as shown in FIG. Therefore, the heat generated in the LED chip 10 is more easily transmitted from the submount material 30 to the die pad 44 than in the prior art, and heat dissipation is improved. For example, the thermal resistance when the concave portion 30a is not formed is 125 ° C./W, the thermal resistance when the concave portion 30a is formed is 80 ° C./W, and the thermal resistance is reduced by 35%. Since heat dissipation improves, it becomes possible to flow a larger electric current through the LED chip 10 than before, and luminance can be improved.

(第2の実施の形態)
図7はLEDチップ10がサブマウント材30に実装された発光器の他の例を示す上面図であり、図8は図7のB−B線切断断面図である。図2及び図3(a)の例では、ボンディングパッド24、24はアルミニウム電極20、20上に形成されているが、図7及び図8では、ボンディングパッド24、24は、アルミニウム電極20、20に接続されているが、アルミニウム電極20、20外周の酸化膜28、28上に形成されている。
(Second Embodiment)
FIG. 7 is a top view showing another example of the light emitting device in which the LED chip 10 is mounted on the submount material 30, and FIG. 8 is a cross-sectional view taken along the line BB of FIG. In the example of FIGS. 2 and 3A, the bonding pads 24, 24 are formed on the aluminum electrodes 20, 20, but in FIGS. 7 and 8, the bonding pads 24, 24 are the aluminum electrodes 20, 20 respectively. Are formed on the oxide films 28 and 28 on the outer periphery of the aluminum electrodes 20 and 20.

(第3の実施の形態)
図9(a)はLEDチップ10がサブマウント材30に実装された発光器の更に他の例を示す断面図である。図3(a)の例では、N型拡散層32は2箇所に形成されているが、図9(a)では、前記2個所のうちのアノード側のみにN型拡散層32が形成されている。図9(b)は、図9(a)に示す発光器の等価回路図である。サブマウント材30のアノード側にN型拡散層32を設けることにより、LEDと、ツェナーダイオードとが逆方向に並列接続されていると見なすことができる。前記ツェナーダイオードの働きにより、LED素子10に逆方向から静電気が加わることを防止できる。
(Third embodiment)
FIG. 9A is a cross-sectional view showing still another example of the light emitting device in which the LED chip 10 is mounted on the submount material 30. In the example of FIG. 3A, the N-type diffusion layer 32 is formed in two places, but in FIG. 9A, the N-type diffusion layer 32 is formed only on the anode side of the two places. Yes. FIG. 9B is an equivalent circuit diagram of the light emitter shown in FIG. By providing the N-type diffusion layer 32 on the anode side of the submount material 30, it can be considered that the LED and the Zener diode are connected in parallel in the opposite direction. By the action of the Zener diode, it is possible to prevent static electricity from being applied to the LED element 10 from the reverse direction.

(第4の実施の形態)
図10(a)はLEDチップ10がサブマウント材30に実装された発光器の更に他の例を示す断面図である。図3(a)の例では、N型拡散層32は2箇所に形成されているが、図10(a)では、N型拡散層32は形成されていない。図10(a)に示すように、サブマウント材30の凹部30の底には、2箇所に酸化膜28、28が形成され、酸化膜28、28上にアルミニウム電極20、20が形成され、アルミニウム電極20、20には、ボンディングパッド24、24が形成されている。図10(b)は、図10(a)に示す発光器の等価回路図である。サブマウント材30にN型拡散層32が設けられていないので、LEDがワイヤ28間に接続されていると見なすことができる。
(Fourth embodiment)
FIG. 10A is a cross-sectional view showing still another example of the light emitting device in which the LED chip 10 is mounted on the submount material 30. In the example of FIG. 3A, the N-type diffusion layer 32 is formed in two places, but in FIG. 10A, the N-type diffusion layer 32 is not formed. As shown in FIG. 10A, oxide films 28 and 28 are formed at two locations on the bottom of the recess 30 of the submount material 30, and aluminum electrodes 20 and 20 are formed on the oxide films 28 and 28, Bonding pads 24 and 24 are formed on the aluminum electrodes 20 and 20. FIG. 10B is an equivalent circuit diagram of the light emitter shown in FIG. Since the N-type diffusion layer 32 is not provided in the submount material 30, it can be considered that the LED is connected between the wires 28.

(第5の実施の形態)
図11はLEDチップ10がサブマウント材30に実装された発光器の更に他の例を示す断面図である。図11の例では、図3(a)とほぼ同様のサブマウント材30の左右に、サブマウント材30オモテ面(凹部形成面)から裏面に貫通する、P型半導体領域とは絶縁された例えばTi−Al製のN型絶縁拡散層(貫通導電層)50,50が形成され、オモテ面のN型絶縁拡散層50,50部分には、ワイヤ(導電体)58、58をN型絶縁拡散層50、50に接続するための接続窓56、56が形成されている。前記ワイヤ58、58の他端は、ボンディングパッド24、24に接続されている。また、サブマウント材30裏面のN型絶縁拡散層50,50部分には、例えばTi−Au製の裏面電極(陽極板、陰極板)52,52が接続されている。なお、サブマウント材30裏面のP型半導体領域部分と裏面電極52,52との間には酸化膜54が形成されている。ボンディングパッド24、24は、ワイヤ58及びN型絶縁拡散層50,50を介して裏面電極52,52と接続されている。
(Fifth embodiment)
FIG. 11 is a cross-sectional view showing still another example of the light emitting device in which the LED chip 10 is mounted on the submount material 30. In the example of FIG. 11, the submount material 30 that is substantially the same as that of FIG. 3A is insulated from the P-type semiconductor region penetrating from the front surface (recessed surface) to the back surface of the submount material 30. N-type insulating diffusion layers (penetrating conductive layers) 50, 50 made of Ti-Al are formed, and wires (conductors) 58, 58 are N-type insulating diffusions on the N-type insulating diffusion layers 50, 50 on the front surface. Connection windows 56 and 56 for connecting to the layers 50 and 50 are formed. The other ends of the wires 58 and 58 are connected to the bonding pads 24 and 24. Further, back electrodes (anode plate, cathode plate) 52, 52 made of, for example, Ti—Au are connected to the N-type insulating diffusion layers 50, 50 on the back surface of the submount material 30. An oxide film 54 is formed between the P-type semiconductor region portion on the back surface of the submount material 30 and the back surface electrodes 52 and 52. The bonding pads 24, 24 are connected to the back electrodes 52, 52 via wires 58 and N-type insulating diffusion layers 50, 50.

図12(a)〜(d)及び図13(a)〜(d)は、図11に示す発光器のサブマウント材30の製造方法の例を示す要部断面図である。図12(a)に示すようにP型シリコン基板(サブマウント材30)のオモテ面及び裏面に酸化膜26,54を形成し、次に図12(b)に示すようにN型絶縁拡散層50を形成し、またN型絶縁拡散層50上に接続窓56を形成する。N型絶縁拡散層50及び接続窓56は、従来と同様の方法で形成することが可能である。次に図12(c)に示すようにエッチングにより凹部30aを形成する。この後は、従来と同様に製造することが可能であり、例えば図12(d)に示すように凹部30aの底に酸化膜28を形成し、次に図13(a)に示すように酸化膜28の一部を取除いて、図13(b)に示すようにN型拡散層32を形成し、また裏面のN型絶縁拡散層50部分の酸化膜54を取除く。次に図13(c)に示すようにN型拡散層32及び酸化膜28上にアルミニウム電極20を形成し、また裏面に裏面電極52を形成し、次に図13(d)に示すようにアルミニウム電極20上にボンディングパッド24を形成する。   12 (a) to 12 (d) and FIGS. 13 (a) to 13 (d) are cross-sectional views of relevant parts showing an example of a method for manufacturing the submount material 30 of the light emitting device shown in FIG. As shown in FIG. 12A, oxide films 26 and 54 are formed on the front and back surfaces of a P-type silicon substrate (submount material 30), and then an N-type insulating diffusion layer is formed as shown in FIG. 50 and a connection window 56 is formed on the N-type insulating diffusion layer 50. The N-type insulating diffusion layer 50 and the connection window 56 can be formed by a method similar to the conventional method. Next, as shown in FIG. 12C, a recess 30a is formed by etching. Thereafter, it can be manufactured in the same manner as in the prior art. For example, an oxide film 28 is formed on the bottom of the recess 30a as shown in FIG. 12 (d), and then oxidized as shown in FIG. 13 (a). A part of the film 28 is removed to form an N-type diffusion layer 32 as shown in FIG. 13B, and the oxide film 54 in the N-type insulating diffusion layer 50 on the back surface is removed. Next, as shown in FIG. 13C, an aluminum electrode 20 is formed on the N-type diffusion layer 32 and the oxide film 28, and a back electrode 52 is formed on the back surface. Next, as shown in FIG. A bonding pad 24 is formed on the aluminum electrode 20.

図14は、図11に示した発光器を用いた発光装置の例を示す断面図である。銅製の棒状のリード60、62の先端部近くに設けられた板状のダイパッド64,64上に、図11に示した発光器が、Agペースト46を用いてダイボンディングされている。発光器のサブマウント材30の裏面電極52,52が、Agペースト46を介してダイパッド64,64と接続されるため、リード(正極リード、負極リード)60、62とサブマウント材30のボンディングパッド24、24とをワイヤで接続する必要はない。ワイヤで接続する必要がなくなるため、ワイヤ接続に関する組立工程が不要となり、組立コストが低減し、またワイヤを配置する空間が不要になるため、軽薄短小化が可能になる。   14 is a cross-sectional view illustrating an example of a light-emitting device using the light-emitting device illustrated in FIG. The light emitting device shown in FIG. 11 is die-bonded using Ag paste 46 on plate-like die pads 64 and 64 provided near the tips of copper rod-like leads 60 and 62. Since the back electrodes 52 and 52 of the submount material 30 of the light emitter are connected to the die pads 64 and 64 via the Ag paste 46, the leads (positive electrode lead and negative electrode lead) 60 and 62 and the bonding pads of the submount material 30 are connected. There is no need to connect the wires 24 and 24 with wires. Since there is no need to connect with wires, an assembling process relating to wire connection is not required, the assembling cost is reduced, and a space for arranging wires is not required.

図11及び図14の例では、N型絶縁拡散層50を2つ形成したが、1つだけ形成することも可能である。1つだけ形成した場合、裏面電極52は1つだけになり、正極リード又は負極リードの一方は裏面電極と接続され、他方はワイヤを用いてサブマウント材30の前記裏面電極と接続されていない方のボンディングパッドと接続される。また、図8、図9(a)、図10(a)に示した発光器のサブマウント材30に、1又は2つのN型絶縁拡散層を形成することも可能である。   In the example of FIGS. 11 and 14, two N-type insulating diffusion layers 50 are formed, but it is also possible to form only one. When only one is formed, there is only one back electrode 52, one of the positive electrode lead or the negative electrode lead is connected to the back electrode, and the other is not connected to the back electrode of the submount 30 using a wire. To the other bonding pad. It is also possible to form one or two N-type insulating diffusion layers on the submount material 30 of the light emitting device shown in FIGS. 8, 9A, and 10A.

本発明に係る発光装置の例を示す断面図である。It is sectional drawing which shows the example of the light-emitting device which concerns on this invention. 図1に示した発光器の例を示す上面図である。It is a top view which shows the example of the light-emitting device shown in FIG. (a)は図2のA−A線切断断面図であり、(b)は(a)に示す発光器の等価回路図である。(A) is the sectional view on the AA line of FIG. 2, (b) is an equivalent circuit schematic of the light-emitting device shown to (a). サブマウント材の製造方法の例を示す要部断面図である。It is principal part sectional drawing which shows the example of the manufacturing method of a submount material. サブマウント材の製造方法の例を示す要部断面図である。It is principal part sectional drawing which shows the example of the manufacturing method of a submount material. 外部量子効率の例を示す特性図である。It is a characteristic view which shows the example of external quantum efficiency. 発光器の他の例を示す上面図である。It is a top view which shows the other example of a light-emitting device. 図7のB−B線切断断面図である。FIG. 8 is a sectional view taken along line BB in FIG. 7. (a)は発光器の更に他の例を示す断面図であり、(b)は(a)に示す発光器の等価回路図である。(A) is sectional drawing which shows the further another example of a light-emitting device, (b) is an equivalent circuit schematic of the light-emitting device shown to (a). (a)は発光器の更に他の例を示す断面図であり、(b)は(a)に示す発光器の等価回路図である。(A) is sectional drawing which shows the further another example of a light-emitting device, (b) is an equivalent circuit schematic of the light-emitting device shown to (a). 発光器の更に他の例を示す断面図である。It is sectional drawing which shows the further another example of a light-emitting device. 図11に示す発光器のサブマウント材の製造方法の例を示す要部断面図である。It is principal part sectional drawing which shows the example of the manufacturing method of the submount material of the light-emitting device shown in FIG. 図11に示す発光器のサブマウント材の製造方法の例を示す要部断面図である。It is principal part sectional drawing which shows the example of the manufacturing method of the submount material of the light-emitting device shown in FIG. 図11に示した発光器を用いた発光装置の例を示す断面図である。It is sectional drawing which shows the example of the light-emitting device using the light-emitting device shown in FIG. 従来のLEDを用いた発光装置の例を示す断面図である。It is sectional drawing which shows the example of the light-emitting device using conventional LED. 図15に示した従来の発光器の拡大断面図である。It is an expanded sectional view of the conventional light-emitting device shown in FIG.

符号の説明Explanation of symbols

10 LEDチップ
12 サファイア基板
14 LED層
20 アルミニウム電極
22 ボール
24 ボンディングパッド
26、28、54 酸化膜
30 サブマウント材
30a 凹部
32 N型拡散層
34 メタル層
40 第1リード
42 第2リード
44 ダイパッド
46 Agペースト
48、58 ワイヤ
49 カバー
50 N型絶縁拡散層
52 裏面電極
56 接続窓
DESCRIPTION OF SYMBOLS 10 LED chip 12 Sapphire substrate 14 LED layer 20 Aluminum electrode 22 Ball 24 Bonding pad 26, 28, 54 Oxide film 30 Submount material 30a Recess 32 N type diffused layer 34 Metal layer 40 First lead 42 Second lead 44 Die pad 46 Ag Paste 48, 58 Wire 49 Cover 50 N-type insulating diffusion layer 52 Back electrode 56 Connection window

Claims (8)

マウント部材に発光素子が実装された発光器において、
マウント部材に内面が鏡面の凹部が形成されており、凹部に発光素子が実装されていることを特徴とする発光器。
In the light emitter in which the light emitting element is mounted on the mount member,
A light emitting device characterized in that a concave member having a mirror inner surface is formed on a mounting member, and a light emitting element is mounted in the concave portion.
前記発光素子は陽極及び陰極を有し、
前記マウント部材はP型半導体基板であり、凹部の底の一部にN型半導体領域が形成されており、N型半導体領域上に前記陽極と接続された陽極接続部を有し、N型半導体領域が形成されていないP型半導体領域上に前記陰極と接続された陰極接続部を有することを特徴とする請求項1記載の発光器。
The light emitting element has an anode and a cathode,
The mount member is a P-type semiconductor substrate, an N-type semiconductor region is formed in a part of the bottom of the recess, and an anode connection portion connected to the anode is provided on the N-type semiconductor region. 2. The light emitting device according to claim 1, further comprising a cathode connection portion connected to the cathode on a P-type semiconductor region in which no region is formed.
前記発光素子は陽極及び陰極を有し、
前記マウント部材はP型半導体基板であり、凹部の底の2箇所にN型半導体領域が形成されており、一方のN型半導体領域上に前記陽極と接続された陽極接続部を有し、他方のN型半導体領域上に前記陰極と接続された陰極接続部を有することを特徴とする請求項1記載の発光器。
The light emitting element has an anode and a cathode,
The mount member is a P-type semiconductor substrate, and an N-type semiconductor region is formed at two locations on the bottom of the recess, and has an anode connection portion connected to the anode on one N-type semiconductor region, The light emitting device according to claim 1, further comprising a cathode connection portion connected to the cathode on the N-type semiconductor region.
マウント部材の凹部が形成されている凹部形成面と該凹部形成面の反対側の裏面との間を貫通する貫通導電層と、
前記凹部形成面の貫通導電層に陽極接続部又は陰極接続部を接続する導電体と、
前記裏面の貫通導電層に接続された陽極板又は陰極板と
を備えることを特徴とする請求項2又は3記載の発光器。
A penetrating conductive layer penetrating between a concave portion forming surface where the concave portion of the mount member is formed and a back surface opposite to the concave portion forming surface;
A conductor for connecting an anode connection part or a cathode connection part to the through-conductive layer of the recess forming surface;
The light emitting device according to claim 2, further comprising: an anode plate or a cathode plate connected to the through conductive layer on the back surface.
マウント部材の凹部が形成されている凹部形成面と該凹部形成面の反対側の裏面との間を貫通する2つの貫通導電層と、
前記凹部形成面の2つの貫通導電層の一方に陽極接続部を、他方に陰極接続部を夫々接続する2つの導電体と、
前記裏面の一方の貫通導電層に接続された陽極板、及び、他方の貫通導電層に接続された陰極板と
を備えることを特徴とする請求項2又は3記載の発光器。
Two penetrating conductive layers penetrating between a concave portion forming surface where the concave portion of the mount member is formed and a back surface opposite to the concave portion forming surface;
Two conductors for connecting an anode connecting portion to one of the two through conductive layers of the recess forming surface and a cathode connecting portion to the other;
4. The light emitting device according to claim 2, further comprising: an anode plate connected to one through conductive layer on the back surface; and a cathode plate connected to the other through conductive layer.
請求項1乃至5の何れかに記載の発光器と、
該発光器に接続された正極リード及び負極リードと、
正極リード及び負極リードの一部と発光器とが挿入される透光性のカバーと
を備えることを特徴とする発光装置。
The light emitter according to any one of claims 1 to 5,
A positive electrode lead and a negative electrode lead connected to the light emitter;
A light-emitting device comprising: a positive electrode lead, a part of the negative electrode lead, and a translucent cover into which the light emitter is inserted.
請求項2又は3記載の発光器と、
正極リード及び負極リードと、
正極リードを発光器の陽極接続部に接続する導電体、及び、負極リードを発光器の陰極接続部に接続する導電体と、
正極リード及び負極リードの一部と発光器とが挿入される透光性のカバーと
を備えることを特徴とする発光装置。
The light emitter according to claim 2 or 3,
A positive lead and a negative lead,
A conductor connecting the positive lead to the anode connection of the light emitter, and a conductor connecting the negative lead to the cathode connection of the light emitter;
A light-emitting device comprising: a positive electrode lead, a part of the negative electrode lead, and a translucent cover into which the light emitter is inserted.
請求項4記載の発光器と、
該発光器の陽極板に接続された正極リード、及び、陰極板に接続された負極リードと、
正極リード及び負極リードの一部と発光器とが挿入される透光性のカバーと
を備えることを特徴とする発光装置。
The light emitter according to claim 4;
A positive lead connected to the anode plate of the light emitter, and a negative lead connected to the cathode plate;
A light-emitting device comprising: a positive electrode lead, a part of the negative electrode lead, and a translucent cover into which the light emitter is inserted.
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JP2008160046A (en) * 2006-12-21 2008-07-10 Lg Electronics Inc Light emitting device package and manufacturing method thereof
JP2009117536A (en) * 2007-11-05 2009-05-28 Towa Corp Resin-sealed light emitting body and manufacturing method thereof
JP2009212394A (en) * 2008-03-05 2009-09-17 Oki Data Corp Semiconductor device, led head, and image forming apparatus
JP2011502356A (en) * 2007-11-01 2011-01-20 エルジー イノテック カンパニー リミテッド Light emitting device package and manufacturing method thereof
EP1876653A3 (en) * 2006-07-07 2013-05-01 LG Electronics Inc. Sub-mount for mounting light emitting device and light emitting device package
JP2017063231A (en) * 2016-12-26 2017-03-30 ローム株式会社 Light-emitting element package and illumination device
US9997682B2 (en) 2010-12-28 2018-06-12 Rohm Co., Ltd. Light emitting element unit and method for manufacturing the same, light emitting element package and illuminating device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007235137A (en) * 2006-02-28 2007-09-13 Lg Electronics Inc Light emitting device package and manufacturing method thereof
JP2013034025A (en) * 2006-02-28 2013-02-14 Lg Electronics Inc Light emitting device package and method of manufacturing the same
EP1876653A3 (en) * 2006-07-07 2013-05-01 LG Electronics Inc. Sub-mount for mounting light emitting device and light emitting device package
JP2008160046A (en) * 2006-12-21 2008-07-10 Lg Electronics Inc Light emitting device package and manufacturing method thereof
JP2011502356A (en) * 2007-11-01 2011-01-20 エルジー イノテック カンパニー リミテッド Light emitting device package and manufacturing method thereof
US8217416B2 (en) 2007-11-01 2012-07-10 Lg Innotek Co., Ltd. Light emitting device package and method for fabricating the same
JP2009117536A (en) * 2007-11-05 2009-05-28 Towa Corp Resin-sealed light emitting body and manufacturing method thereof
JP2009212394A (en) * 2008-03-05 2009-09-17 Oki Data Corp Semiconductor device, led head, and image forming apparatus
US9997682B2 (en) 2010-12-28 2018-06-12 Rohm Co., Ltd. Light emitting element unit and method for manufacturing the same, light emitting element package and illuminating device
JP2017063231A (en) * 2016-12-26 2017-03-30 ローム株式会社 Light-emitting element package and illumination device

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