JP2006303310A - Batch processing method of chip, and device used for it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a solid electrolytic capacitor capable of effectively reproducing and reusing a clean and highly accurate temporary bar in a batch processing method of a chip for reusing a supporting member, especially in a manufacturing method of a conductor for a capacitor element in a batch processing method of the chip including the steps of fixing a plurality of chips to the supporting member, providing the predetermined process to a part of the surface of each chip, and then separating the each processed part from the supporting member, and to provide a device for these purposes. <P>SOLUTION: In the batch processing method comprising the steps of fixing the plurality of chips to the supporting member, and separating the processed part from the supporting member after providing the predetermined process to the part of the surface of each chip, the surface of the supporting member with the chip separated is plished and reused. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for batch processing of small pieces and an apparatus used for the method, in particular, a method for manufacturing a solid electrolytic capacitor that efficiently reuses a support member for manufacturing a solid electrolytic capacitor, and regeneration of a support member for manufacturing a solid electrolytic capacitor used therefor Relates to the device.

  In recent years, with the digitization of electrical equipment and the speeding up of personal computers, small and large-capacitance capacitors and low-impedance capacitors in the high frequency region are required. Recently, a solid electrolytic capacitor using a conductive polymer having electronic conductivity as a solid electrolyte has been proposed.

  A basic element of a solid electrolytic capacitor is generally formed by forming a dielectric oxide film on an anode base made of a metal foil having a large specific surface area that has been etched, and a solid semiconductor layer (hereinafter referred to as a solid electrolyte) as an electrode facing the outside. And a conductor layer such as a conductive paste is preferably formed. Usually, a masking layer is further provided to ensure insulation between the solid electrolyte (cathode portion) and the anode substrate, and electrodes are appropriately added.

  In general, an electrolytic oxidation polymerization method and a chemical oxidation polymerization method are known as methods for forming a conductive polymer on a dielectric oxide film. The chemical oxidative polymerization method is difficult to control the reaction or the form of the polymer film, but various methods have been proposed because it is easy to form a solid electrolyte and enables mass production in a short time. For example, a method of forming a solid electrolyte having a layered structure by alternately immersing an anode substrate in a solution containing a monomer and a step of immersing in a solution containing an oxidizing agent, and forming a solid electrolyte layer having a layered structure As a method for forming a solid electrolyte in the pores and the outer surface of the capacitor element, a cycle in which the anode substrate is immersed in a solution containing a monomer compound, polymerized in an oxidant solution, washed with the oxidant, and then dried. The method of repeating is known.

  Thus, since any manufacturing method includes the operation of immersing and pulling up the solid electrolytic capacitor element conductor (anode substrate) in the monomer-containing solution and the oxidant-containing solution, it is necessary to efficiently perform the dipping and lifting operations. For this reason, normally, in the manufacture of a solid electrolytic capacitor element, a plurality of elements are processed simultaneously using a support member called a temporary bar. That is, as shown in FIG. 1, a plurality of solid electrolytic capacitor element conductors 2 are attached to a support member (temporary bar) 1 by soldering or the like (FIG. 1A), and the treatment liquid 3 is moved by the vertical movement of the temporary bar. (Fig. 1 (b)) and a pulling up operation to form a solid electrolyte layer having a required thickness, and then separating the capacitor element conductor from the temporary bar (Fig. 1 (c)). Have gained.

  The above-described method is advantageous in that a large number of capacitor elements can be manufactured in a lump. However, the remaining pieces of the anode substrate (5 in FIG. 1C) are formed on the surface of the temporary bar after separating the capacitor element conductors. ) And an adhesive material such as welding marks and solder left by fixing the anode substrate to the temporary bar. In this state, the surface of the temporary bar is highly non-uniform and cannot be reused as it is. Conventionally, a scraper is applied to the surface of the temporary bar to remove the remaining pieces individually. However, these methods are inefficient and costly, and it is necessary to remove all the remaining pieces or to remove weld marks. In addition, the surface state after removal of the welding marks is not stable, and it is necessary to further improve the efficiency and reliability of the entire manufacturing process of the solid electrolytic capacitor.

  Accordingly, an object of the present invention is to fix a plurality of small pieces to a support member, perform a predetermined treatment on a part of the surface of each small piece, and then separate each processed portion from the support member. In a batch processing method, in a batch processing method for small pieces that reuses the support member, particularly in a method for manufacturing a conductor for a capacitor element, a solid electrolytic that efficiently regenerates and reuses a clean and highly accurate temporary bar. It is an object to provide a method of manufacturing a capacitor and an apparatus for these purposes.

  As a result of intensive studies on the above problems, the present inventors can solve the above problem by physically polishing the surface of a support member (for example, a temporary bar) after separating a small piece (for example, a conductor for a capacitor element). In particular, the present inventors have found that wet polishing using an infinite belt is useful and completed the present invention.

That is, the present invention relates to a small piece batch processing method and an apparatus used for the method shown below.
1. In the batch processing method of small pieces including a step of fixing a plurality of small pieces to a support member, performing a surface treatment on a part of the surface of each small piece, and separating the processed portion from the support member, A method for batch processing of small pieces, wherein the surface of the support member is polished and reused.
2. The method for batch processing of small pieces according to 1 above, wherein the small pieces are metal foil.
3. The batch processing method of the said small piece of said 2 whose metal foil is aluminum conversion foil.
4). The batch processing method of the small piece in any one of said 1-3 whose support member is a stainless steel plate.
5. The collective processing method for small pieces according to any one of the above 1 to 4, wherein the small pieces are fixed to the support member by soldering or welding.
6). The method for batch treatment of small pieces according to any one of 1 to 5, wherein the polishing is wet polishing.
7). 7. The batch processing method for small pieces according to 6 above, wherein polishing is performed by bringing an infinite belt containing an abrasive into contact with the surface of the support member.
8). The batch processing method for small pieces according to 7 above, wherein polishing is performed by bringing the endless belt into contact with the surface of the support member while washing with water.
9. 9. The batch processing method for small pieces as described in 8 above, wherein polishing is performed while removing the remaining conductors separated from the surface of the support member from the surface of the infinite belt by a water flow by water washing.
10. The batch processing method of the small pieces in any one of said 1-9 which makes the surface roughness of the support member after grinding | polishing 15S or less.
11. The batch processing method of the small pieces in any one of said 1-10 which further includes the deformation correction process of the support member after grinding | polishing.
12 A method for producing a solid electrolytic capacitor, wherein the method according to any one of 1 to 11 is applied to a treatment for forming a solid electrolytic capacitor element portion on a small piece.
13. A support member regenerator including a support member feeder that holds and sequentially feeds a plurality of conductor support members, and a transport unit that transports the loaded support members to a polishing unit, wherein the polishing unit includes at least one polishing belt.
14 14. The support member reproducing apparatus according to 13, wherein the polishing belt is an infinite belt containing an abrasive, and the driven infinite belt is brought into contact with the surface of the support member at the polishing portion.
15. 15. The support member recycling apparatus according to 14, wherein the polishing unit includes at least two polishing belts.
16. 16. The support member reproducing apparatus according to 15, wherein the endless belt is driven in a direction opposite to the conveyance direction of the support member.

  According to the present invention, it is possible to repeatedly use a supporting member used for processing a small piece (for example, manufacturing a solid electrolytic capacitor). For this reason, the efficiency of the manufacturing process which requires a batch continuous process is realizable. In addition, according to the present invention, since the surface properties of the regenerated support member are good, capacitor elements with little variation in electrical characteristics and the like can be repeatedly manufactured collectively.

Hereinafter, the method of the present invention will be described more specifically.
As described above, the method of the present invention includes a step of fixing a plurality of small pieces to a support member, performing a surface treatment on a part of the surface of each small piece, and then separating the treated portion from the support member. In this collective processing method, the small piece collective processing method is characterized by polishing and reusing the surface of the support member after separating the small pieces.
The method of the present invention can be applied to various small piece batch processing methods. Examples of such a batch processing method include immersion treatment in which a chemical solution is included for surface treatment of small pieces, immersion / electric current treatment for electrolytic polymerization and other redox treatment on the surface of the small pieces, and small pieces. Various surface treatments such as coating or immersion treatment for laminating various substances on the surface, various treatments maintained under specific atmosphere and temperature conditions, and washing treatment and drying treatment associated with these treatments can be mentioned. However, these are only examples, and any method can be applied as long as it is a method for batch processing of small pieces.

  In particular, the method of the present invention can be suitably applied to a method in which a plurality of these processes are combined. For example, in a method for producing a solid electrolytic capacitor, a plurality of conductors for producing a solid electrolytic capacitor are attached to a support plate in a row along its lower side, and the row of conductors is sequentially immersed in a monomer-containing solution and an oxidant-containing solution and pulled up. (If necessary, a solid electrolyte layer is formed on each conductor by including a washing process and a drying process after pulling up, and if necessary, this is converted into a carbon paste and a conductor paste (for example, a silver paste). Although the surface treatment for forming the conductor layer by dipping is performed, the method of the present invention is particularly useful in the method for producing such a solid electrolytic capacitor.

  When applied to a method of manufacturing a solid electrolytic capacitor, the small piece is generally a metal having a valve action. The metal having a valve action that can be used in the present invention is a simple metal such as aluminum, tantalum, niobium, titanium, zirconium, magnesium, silicon, or an alloy thereof. The small piece may be a single or alloy metal plate (including ribbon, foil, etc.), a porous sintered body, a plate surface-treated with etching or the like, a wire, etc. is there. Examples of the porous form include forms of a porous molded body such as an etched product of a rolled foil and a fine powder sintered body.

  Although the thickness of a small piece changes with purposes of use, foil (especially chemical conversion foil) whose thickness is about 40-300 micrometers is used. In order to obtain a thin solid electrolytic capacitor, for example, an aluminum foil (especially a chemical conversion foil) having a thickness of 80 to 250 μm is used, and the maximum height of the element provided with the solid electrolytic capacitor is 250 μm or less. Is preferred. The size and shape of the metal foil (especially the chemical conversion foil) vary depending on the application, but a rectangular element having a width of about 1 to 50 mm and a length of about 1 to 50 mm is preferable as a flat element unit, and more preferably about 2 to 15 mm in width. The length is about 2 to 25 mm.

  However, the method of the present invention can be widely used in addition to the method for producing a solid electrolytic capacitor, and the material and shape of the suitable piece are not particularly limited. For example, iron, titanium, gold, silver, copper, etc. Alloy, including plates, wires, and bars.

  The material and size of the support member are not particularly limited as long as the small piece can be fixed, but a conductive support is preferable in consideration of the convenience of processing the small piece. Usually, a material commonly used as a temporary bar (for example, SUS) can be used. Usually, the support member has a plate shape, but may have a surface that can substantially be physically polished, and may have a rod shape.

  In the small piece batch processing method, a plurality of, for example, about 10 to 50 pieces of the above small pieces are fixed to the support member. Generally, these small pieces are arranged and fixed in a row along the lower side of the support member. The fixing method is not particularly limited, but typically is soldering, welding, or the like. Thereafter, a predetermined process is performed on a part thereof, for example, a part protruding from the support member, and then only a part necessary as a product is separated. Separation is performed by peeling off the small pieces, cutting along the lower side of the support member, and the like. At this time, adhesion marks (for example, welding marks and solder), the remainder of the small pieces, and the like remain on the support member.

In the batch processing method for small pieces according to the present invention, after separating the small pieces from the support member, the surface of the support member is polished so that such adhesion marks (for example, welding marks and solder) and the remaining pieces (see FIG. 5) etc. are removed and the support member is reused.
The polishing method is physical polishing, preferably wet polishing.

  Wet polishing can be performed by various methods, but is usually performed by bringing the polishing means into contact with the support member and relatively moving both. As the polishing means, for example, various types such as a brush using ceramic abrasive grains as an abrasive may be used, but a polishing belt containing an abrasive is preferably used. That is, the polishing belt is brought into contact with the surface of the support member to be polished, and the support member and / or the polishing belt is moved. Preferably, while moving the support member, a polishing belt such as an infinite belt is rotationally driven and pressed against the surface of the support member. Polishing can be carried out uniformly by using an infinite belt. Moreover, since the polishing area can be increased, the polishing efficiency can be increased.

  In the method of the present invention, it is preferable to perform polishing while washing the infinite belt with water. By taking such an aspect, it is possible to perform polishing while removing the remaining pieces and weld / solder pieces peeled from the support member from the surface of the support member. The washing with water may be performed only on the polishing portion, but is preferably carried out by jetting a water stream on the belt orbiting or in addition to the polishing portion. In this case, even if the remaining pieces peeled off from the surface of the support member remain on the belt, they are surely washed off on the circular track. If necessary, known cleaning methods for the polishing belt may be combined (for example, see JP-A-11-077534).

  Further, the remaining pieces and weld / solder pieces peeled off from the polishing portion and the surface of the infinite belt are removed from the polishing zone (polishing system including the infinite belt orbit) by water washing. Such processing residues and the like are separated by passing the water stream through suitable filtration means. For example, a filtering means is provided below the polishing zone, and the water flow is washed thereon. The filtering means includes filter paper, filter cloth, wire mesh, etc., but it is preferable to perform filtration while removing the residue on the filtering means by moving continuously or intermittently as a web. The washing water after filtration may be returned to the water washing system.

  As the polishing belt used in the method of the present invention, a polishing cloth made of a synthetic resin fiber material can be suitably used. Various types of polishing cloth are commercially available, and any one can be used depending on the required durability. For example, polyamides such as nylon 6, nylon 66, nylon 12, copolymer nylon, Polyesters such as polyethylene terephthalate, polybutylene terephthalate, polytrimethylene terephthalate, copolymerized polyester, polyolefins such as polyethylene, polypropylene, polymethylpentene, polystyrene, copolymerized polystyrene, polylactic acid, lactic acid copolymer, polyglycolic acid, etc. Examples of synthetic resins include aliphatic polyester polymers and aliphatic polyesteramide copolymers. Further, these abrasive belts may include cushion members such as urethane, silicone, and acrylic polymers. However, these are examples, and various commercially available water-resistant metal polishing cloths can also be used.

  The polishing may be performed as long as the surface roughness of the support member after polishing is 15S or less. In consideration of the stability of the weldability at the time of reuse, it is preferably 10S or less, more preferably 6.3S or less, but generally 15S or less. Here, for example, 15S represents that the maximum value of the surface roughness is 15 μm.

The particle size of the abrasive grains adhered to the belt used for polishing is 150 mesh or more. If it is less than 150 mesh, the surface roughness becomes 15S or more, and the weldability deteriorates. There is no upper limit to the particle size. For example, if the particle size is 400 mesh or more, the surface roughness of 6.3S or less can be realized. Although the kind of abrasive grain is not specifically limited, For example, an alumina, silicon carbide, etc. are mentioned. An abrasive belt (resin belt) in which an abrasive having such a particle size is fixed to the above-described cloth belt with a resin is commercially available and can be used in the present invention.
Examples of means for pressing the polishing belt against the support member include a rubber contact roll.
In addition, since the support member after grinding | polishing may contain some deformation | transformation, you may correct with a leveler etc.

The present invention also provides an apparatus for regenerating the support member as described above. The reproducing apparatus includes a supporting member feeding machine that holds a plurality of conductor supporting members and sequentially throws them into a reproducing line, and a conveying unit that conveys the loaded supporting members to a polishing unit, and the polishing unit has at least one polishing belt including. As described above, the polishing belt is preferably an infinite belt containing an abrasive, and the infinite belt driven by a drive motor or the like is brought into contact with the surface of the support member in the polishing unit.
The polishing unit may include one polishing belt, but preferably includes at least two polishing belts. Moreover, it is preferable to drive the infinite belt in a direction opposite to the conveying direction of the support member. Furthermore, the polishing belt may have a width that allows a plurality of support members to be processed simultaneously. For example, about 2 to 10 sheets, preferably about 3 to 8 support members are arranged in parallel and brought into contact with the polishing belt, so that these support members can be polished simultaneously.

  Hereinafter, a representative example of the present invention will be described with reference to the drawings, and will be described more specifically. Note that these are illustrative examples, and the present invention is not limited to these examples.

(1) Temporary Bar Reproducing Device As shown in FIG. 3, the support member reproducing device 11 according to one aspect of the present invention includes a polishing zone provided with polishing belts 12 and 13, respectively. Here, the polishing belts 12 and 13 are a resin belt NB (A # 150X871KN) manufactured by Nippon Coated Abrasive Co., Ltd., and include 150 mesh abrasive grains (alumina).
The polishing belts 12 and 13 are rotated clockwise in the drawing at a peripheral speed of 335 m / min by the upper roll connected to the driving means, and are pressed against the temporary bar T by the polishing rolls 14 and 15 (rubber contact rolls).

At the same time, five temporary bars are fed from the left side of the drawing onto the conveyor belt 16 by a magazine with an elevator (not shown) so that the longitudinal direction coincides with the conveying direction (T ₁ ). The conveying belt 16 conveys the temporary bar from the left to the right in the figure (conveying speed: 6.2 m / min), but during this time, the polishing belts 12 and 13 are rotating clockwise in the figure, so the temporary belt is temporary. The surface of the bar receives a peeling force at a portion sandwiched between the conveyance belt and the polishing belt (T ₂ , T ₃ ).
Also, in the polishing zone, water flow is jetted in the direction indicated by the arrow in the figure, whereby the polishing belt receives the water flow on the polishing site and the circular orbit, and the welding marks and residues removed from the surface of the temporary bar are below. The funnel-shaped residue collection part 17 is washed away with a water flow. A wire net, filter paper, filter cloth, or a filtering means in combination of these is provided below the outlet of the residue collection unit 17 (not shown). For example, a wire mesh and a web-like filter paper are combined, relatively large remaining pieces are captured by the wire mesh, and welding marks and small pieces are received on the filter paper. The water filtered in this way is circulated to the water jet part by means of a suitable pump.

In this example, the support member regeneration device further includes an additional cleaning zone. Here, the polished temporary bars (temporary bars T _{4 to} T ₆ ) further move on the transport roller 21 and are cleaned by cleaning water sprayed in the direction indicated by the arrow in the drawing. The cleaning mist is collected by a mist collecting means 18 such as a mistracer. In addition, in this example, a drying zone is also included, and the cleaned temporary bars (temporary bars T _{7 to} T ₈ ) further move on the transport roller 22 and from the blower 19 in the direction indicated by the arrow in the figure. It is dried by the air that is sprayed on.
Below these zones, a funnel-shaped washing water recovery unit 20 is provided, and the washing water is heated to an appropriate temperature (for example, 40 ° C.) in an appropriate tank and circulated to the water jet unit.
On the other hand, the cleaned and dried temporary bar is discharged from the slope 23 (T ₉ ) and stacked in a collection magazine (not shown).

(2) Production of Solid Electrolytic Capacitor An aluminum conversion foil (thickness: 100 μm) formed by subjecting the surface of the aluminum foil to chemical conversion treatment by a conventional method was cut out so that one piece had a rectangular shape of 3 mm × 10 mm. 32 sheets of this conversion foil were soldered in a row at intervals of 4 mm so that the end from the short side (3 mm) side to 2 mm overlapped with a stainless steel temporary bar (224 mm × 15 mm × 1.0 mm (made of SUS304)). . Next, with respect to each chemical conversion foil, a polyimide solution having a width of 1 mm was applied on both sides in a circumferential manner so as to divide the major axis direction into 4 mm and 5 mm portions, and then masked.

  This temporary bar with aluminum conversion foil attached in a row is moved onto an aqueous solution of ammonium adipate and vertically lowered toward the solution, so that a 3 mm × 4 mm portion of each conversion foil is immersed in the solution, As it was, it was formed into a cut portion to form a dielectric oxide film.

  Next, the temporary bar was moved onto the monomer solution and dropped vertically toward the solution, so that a 3 mm × 4 mm portion of each chemical conversion foil was immersed in the solution. The formed foil row was pulled up and dried.

  On the other hand, by adjusting the oxidizer solution, moving the temporary bar onto the solution and lowering it vertically toward the solution, a 3 mm × 4 mm portion of each conversion foil is immersed in the solution to oxidatively. Polymerization was allowed to proceed.

The above immersion steps and polymerization steps were performed 20 times in total to form a solid electrolyte layer.
The solid electrolytic capacitor element portion thus manufactured is cut from the temporary bar and sent to a predetermined capacitor element manufacturing process, while the temporary bar to which the aluminum foil residue has adhered is placed in the sending magazine of the temporary bar reproducing apparatus of (1) above. 5 rows in parallel with each other, and sent out on the conveyor belt at 25 mm intervals and 5 rows for polishing, washing and drying.

The aluminum foil residue was generally removed with the first roll (polishing belt 2), and the soldering trace was removed with the second roll (polishing belt 3).
The finished surface of the temporary bar obtained by the above apparatus is smooth and has a surface roughness of less than 15S measured with a surface roughness measuring instrument (manufactured by Tokyo Seimitsu). The warpage in the longitudinal direction after correction with a leveler is 0. It was 5 mm / 224 mm (full length in the longitudinal direction). In addition, this apparatus was able to continuously process 5000 temporary bars per hour.

When the regenerated temporary bar was reused and put into the solid electrolytic capacitor manufacturing process, it was possible to manufacture completely the same as a new temporary bar.
In addition, a solid electrolytic capacitor element manufactured using a regenerative temporary bar is bonded to a carbon paste and a silver paste, and four sheets are stacked, a cathode lead terminal is connected, and a conductive polymer composition layer is not formed. The anode lead terminal was connected by welding, and after sealing this element with epoxy resin, aging was performed and the capacitor was completed. Compared with the capacitor using the new temporary bar, the electrical characteristics ( No significant deterioration was observed in the capacity and loss factor (tan δ × 100 (%)), equivalent series resistance (ESR) and leakage current) at 120 Hz.

  Further, in the reproduction by the above apparatus, the thickness reduction amount of the temporary bar per reproduction is 0.001 to 0.003 mm (by micrometer, resolution 0.001 mm), and practical range (0.05 mm or less). It was a sufficiently small value.

  According to the method of the present invention, batch processing of small pieces can be performed efficiently. In particular, it is useful in the production of solid electrolytic capacitors, and is effective for improving the efficiency and continuity of the production process of solid electrolytic capacitors.

The schematic diagram which shows the manufacturing process of a solid electrolytic capacitor. The schematic diagram which shows a part of reproducing | regenerating apparatus of the small piece support member of this invention.

Explanation of symbols

1 Small piece support member (temporary bar)
2 Small piece 3 Treatment liquid 4 Solid electrolytic capacitor element 5 Conductor residue 11 Small piece supporting member (temporary bar) Regenerating device 12 Polishing belt (No. 1 roll)
13 Abrasive belt (2nd roll)
14 Contact Roll 15 Contact Roll 16 Conveying Belt 17 Remaining Piece Collecting Unit 18 Mistracer 19 Blower 20 Washing Water Collecting Unit 21 Conveying Roller 22 Conveying Roller 23 Slope

Claims (16)

  In the batch processing method of small pieces including a step of fixing a plurality of small pieces to a support member, performing a surface treatment on a part of the surface of each small piece, and separating the processed portion from the support member, A method for batch processing of small pieces, wherein the surface of the support member is polished and reused.   The batch processing method of the small piece of Claim 1 whose said small piece is metal foil.   The method for batch processing of small pieces according to claim 2, wherein the metal foil is an aluminum conversion foil.   The small piece batch processing method according to any one of claims 1 to 3, wherein the support member is a stainless steel plate.   The method for batch processing of small pieces according to any one of claims 1 to 4, wherein the small pieces are fixed to the support member by soldering or welding.   The method for batch processing of small pieces according to any one of claims 1 to 5, wherein the polishing is wet polishing.   The batch processing method of the small piece of Claim 6 which grind | polishes by making the infinite belt containing an abrasive material contact the said support member surface.   The batch processing method of the small pieces of Claim 7 which grind | polishes by making an infinite belt contact the said supporting member surface while washing with water.   9. The batch processing method for small pieces according to claim 8, wherein the polishing is performed while removing the remaining pieces of the conductor separated from the surface of the support member from the surface of the infinite belt by a water flow by washing with water.   The method for batch treatment of small pieces according to any one of claims 1 to 9, wherein the surface roughness of the support member after polishing is 15S or less.   The batch processing method of the small pieces in any one of Claims 1-10 which further includes the deformation | transformation correction process of the support member after grinding | polishing.   A method for producing a solid electrolytic capacitor, wherein the method according to claim 1 is applied to a treatment for forming a solid electrolytic capacitor element portion on a small piece.   A support member regenerator that includes a support member feeding machine that holds and sequentially feeds a plurality of conductor support members, and a transport unit that transports the loaded support members to a polishing unit, wherein the polishing unit includes at least one polishing belt.   The supporting member regeneration device according to claim 13, wherein the polishing belt is an infinite belt containing an abrasive, and the driven infinite belt is brought into contact with the surface of the supporting member in the polishing portion.   The supporting member regeneration apparatus according to claim 14, wherein the polishing section includes at least two polishing belts. The supporting member reproducing apparatus according to claim 15, wherein the endless belt is driven in a direction opposite to the conveying direction of the supporting member.

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