JP2007000963A - Chuck table moving mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a chuck table moving mechanism capable of moving a chuck table holding a work piece with high accuracy by absorbing a vibration of a male screw rod.
SOLUTION: A plurality of moving bases disposed between a chuck table support base 51 and a male threaded rod 421 are provided, and a first threaded base 52 is provided with a female screw that is screwed with a male threaded rod. The operating force acting in the machining feed direction is transmitted through the vibration absorbing means 54 and 55 between the adjacent moving base and the chuck table support base and between the moving bases.
[Selection] Figure 2

Description

  The present invention is equipped in a processing device such as a semiconductor wafer or other processing device that cuts a workpiece or a laser processing device that performs laser processing on the workpiece, and moves a chuck table that holds the workpiece in the processing feed direction. The present invention relates to a chuck table moving mechanism.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially disc-shaped semiconductor wafer, and circuits such as ICs, LSIs, etc. are partitioned in these partitioned regions. Form. Then, by cutting the semiconductor wafer along the planned dividing line, the region where the circuit is formed is divided to manufacture individual semiconductor chips. In addition, optical device wafers in which gallium nitride compound semiconductors are stacked on the surface of sapphire substrates are also cut into optical devices such as individual light emitting diodes, laser diodes, CCDs, etc. Widely used.

  Cutting along the streets of the above-described semiconductor wafer, optical device wafer, or the like is usually performed by a cutting device called a dicer. This cutting apparatus has a chuck table for holding a workpiece such as a semiconductor wafer, a cutting means having a cutting blade for cutting the workpiece held on the chuck table, and moving the chuck table in the machining feed direction. And a chuck table moving mechanism.

  The chuck table moving mechanism includes a chuck table support base that holds a workpiece, a guide rail that guides the chuck table support base in a processing feed direction, and a rotation of a servo motor or the like disposed along the guide rail. The male screw rod is rotated by the driving means, and the female screw is provided on the chuck table support base and is screwed with the male screw rod. In such a chuck table moving mechanism, it is inevitable that vibration occurs when the male screw rod rotates, and the vibration of the male screw rod is transmitted to the chuck table via the female screw and the chuck table support base, This is a cause of hindering high-precision movement.

In order to solve the above problem, a female screw is formed on the feed nut fixing plate separated from the chuck table support base, and a vibration absorbing means made of a steel ball is arranged between the feed nut fixing plate and the chuck table support base. An installed chuck table moving mechanism has been proposed. (For example, refer to Patent Document 1.)
Japanese Utility Model Publication No. 3-11475

  According to the chuck table moving mechanism disclosed in the above publication, it is possible to absorb about 80% of the vibration of the male screw rod. However, the chuck table moving mechanism disclosed in the above publication is not always satisfactory for moving the chuck table with high accuracy because the vibration of the male screw rod is transmitted to the chuck table by about 20%.

  The present invention has been made in view of the above facts, and the main technical problem is to move the chuck table holding the workpiece with high accuracy by absorbing the vibration of the male screw rod as much as possible. An object of the present invention is to provide a movable chuck table moving mechanism.

In order to solve the above main technical problem, according to the present invention, a chuck table support means for supporting a chuck table for holding a workpiece, a guide rail for guiding the chuck table support means in a processing feed direction, A chuck table moving mechanism comprising: a male screw rod disposed along a guide rail and screwed with a female screw provided on the chuck table support means;
The chuck table support means includes a chuck table support base for supporting the chuck table, and a plurality of moving bases disposed between the chuck table support base and the male screw rod,
Of the plurality of moving bases, a moving base adjacent to the male screw rod is provided with a female screw that is screwed with the male screw rod, and among the plurality of moving bases, adjacent to the chuck table support base. Actuating force transmitting means is provided between the moving base and the chuck table support base and between the moving bases to transmit the operating force acting in the machining feed direction via the shake preventing means. Yes,
A chuck table moving mechanism is provided.

The guide rail is a common guide rail that guides the chuck table support base and the plurality of moving bases.
The guide rail is composed of a plurality of guide rails for guiding the chuck table support base and the plurality of moving bases, respectively.

  Since the chuck table moving mechanism according to the present invention is configured as described above, most of the vibration generated in the male screw rod can be absorbed by the action of the plurality of absorbing means. Therefore, the chuck table supported by the chuck table support base can be moved with high accuracy.

  Hereinafter, a preferred embodiment of a chuck table moving mechanism configured according to the present invention will be described in more detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a cutting apparatus equipped with a chuck table moving mechanism constructed according to the present invention.
The cutting apparatus shown in FIG. 1 includes a stationary base 2, and a chuck table mechanism 3 that is disposed on the stationary base 2 so as to be movable in a direction indicated by an arrow X that is a machining feed direction, and holds a workpiece. A spindle support mechanism 6 disposed on the stationary base 2 so as to be movable in a direction indicated by an arrow Y that is an indexing feed direction (a direction perpendicular to a direction indicated by an arrow X that is a machining feed direction), and the spindle support mechanism 6, a spindle unit 7 is disposed as a cutting means that is movably disposed in a direction indicated by an arrow Z that is a cutting feed direction.

  The chuck table mechanism 3 includes a chuck table 31 that holds a workpiece and a chuck table moving mechanism 4 that supports the chuck table 31 and moves the chuck table 31 in a processing feed direction indicated by an arrow X. The chuck table moving mechanism 4 includes a pair of common guide rails 41 and 41 arranged in parallel along the direction indicated by the arrow X on the stationary base 2, and the arrow X on the guide rails 41 and 41. A chuck table support means 5 disposed so as to be movable in the direction, and a moving means 42 for moving the chuck table support means 5 along a pair of guide rails 41 and 41 are provided.

  The chuck table support means 5 will be described with reference to FIGS. The chuck table support means 5 in the illustrated embodiment includes a chuck table support base 51 that supports the chuck table 31, and a plurality of moving bases disposed between the chuck table support base 51 and the moving means 42. Tables 52 and 53 are provided. In the illustrated embodiment, the movable base is a first movable base 52 disposed in the vicinity of the moving means 42 and a second movable base 52 in the vicinity of the chuck table support base 51. It consists of a moving base 53.

  The chuck table support base 51 is formed in a rectangular shape, and a pair of support legs 511 and 511 that protrude downward are provided at both ends along the pair of guide rails 41 and 41, respectively. The pair of support legs 511 and 511 are formed with guided grooves 512 and 512 into which the pair of guide rails 41 and 41 are fitted, respectively. The chuck table 31 is disposed on the upper surface of the chuck table support base 51 thus configured.

  The first moving base 52 arranged adjacent to the moving means 42 is formed in a rectangular shape, and guided grooves 521 and 521 for fitting the pair of guide rails 41 and 41 are formed on the lower surface thereof. Yes. Further, a female screw block 522 that protrudes downward is provided between the guided grooves 521 and 521 on the lower surface of the first moving base 52, and a machining feed direction indicated by an arrow X is provided on the female screw block 522. A female screw 523 formed so as to penetrate through is provided.

  The second moving base 53 disposed in the vicinity of the chuck table support base 51 is formed in a rectangular shape, and the length along the pair of guide rails 41 and 41 corresponds to the chuck table support base 51. The size is set so as to fit between the pair of support legs 511 and 511 provided. A pair of support legs 531 and 531 are provided at both ends of the second moving base 53 along the pair of guide rails 41 and 41 so as to protrude downward. Guided grooves 532 and 532 for fitting the pair of guide rails 41 and 41 are formed in the pair of support legs 531 and 531, respectively. Note that the distance between the pair of support legs 531 and 531 is set to a dimension in which the first moving base 52 is fitted.

  The first moving base 52 formed as described above is disposed on the pair of guide rails 41 and 41, and the guided grooves 521 and 521 are fitted to the pair of guide rails 41 and 41. The second moving base 53 is disposed on the first moving base 52, and the first moving base 52 is fitted between the pair of support legs 531 and 531, and the pair of support legs 531. The guided grooves 532 and 532 formed in 531 are fitted into the pair of guide rails 41 and 41. The chuck table support base 51 is disposed on the second movement base 53, and the second movement base 53 is fitted between the pair of support legs 511 and 511, and the pair of support legs. Guided grooves 512 and 512 formed in 511 and 511 are fitted to the pair of guide rails 41 and 41.

  In the illustrated embodiment, the chuck table support means 5 is provided between the first moving base 52 and the second moving base 53 and between the chuck table supporting base 51 and the second moving base 53. Shake absorbing means 54 and 55 are provided, respectively. In the illustrated embodiment, the shake preventing means 54 is composed of steel balls 541 and 541 that are arranged so as to be able to roll on both end surfaces in the machining feed direction indicated by the arrow X in the first moving base 52. Further, in the illustrated embodiment, the vibration absorbing means 55 is composed of steel balls 551 and 551 that are arranged so as to be able to roll on both end surfaces in the machining feed direction indicated by the arrow X in the second moving base 53, respectively. Yes. When the first moving base 52 is moved in the machining feed direction indicated by the arrow X along the pair of guide rails 41, 41 by the moving means 42, the chuck table supporting means 5 configured in this way is first. The operating force acting on the moving base 52 is transmitted to the pair of support legs 531, 531 of the second moving base 53 through the steel balls 541, 541 disposed on the first moving base 52. . Accordingly, the end surface of the first moving base 52 and the pair of support legs 531 and 531 of the second moving base 53 shake the operating force in the processing feed direction acting on the first moving base 52 and absorb the vibration. It functions as an operating force transmission means for transmitting to the second moving base 53 via the steel balls 541 and 541 as 54. When the second moving base 53 is moved in the machining feed direction indicated by the arrow X as described above, the chuck table is supported via the steel balls 551 and 551 provided on the second moving base 53. This is transmitted to the pair of support legs 511 and 511 of the base 51. Accordingly, the end surface of the second moving base 53 and the pair of support legs 511 and 511 of the chuck table supporting base 51 shake the operating force in the processing feed direction that acts on the second moving base 53 and absorb the vibration. It functions as an actuating force transmission means for transmitting to the chuck table support base 51 via the steel balls 551 and 551.

  Returning to FIG. 1 and continuing the description, the chuck table 31 is disposed on the chuck table support base 51 of the chuck table support means 5 configured as described above. That is, a cylindrical support cylinder 32 is disposed on the upper surface of the chuck table support base 51, and the chuck table 31 is rotatably supported on the upper end of the support cylinder 32. A pulse motor (not shown) is provided in the support cylinder 32, and the chuck table 31 is rotated by a predetermined angle by the pulse motor. The chuck table 31 is connected to a suction means (not shown) and appropriately holds the workpiece placed on the holding surface, which is the upper surface thereof. A chuck table cover 33 fixed to the upper end of the support cylinder 32 is disposed below the chuck table 31.

The moving means 42 constituting the chuck table moving mechanism 4 will be described with reference to FIG.
The moving means 42 in the illustrated embodiment includes a drive source such as a male screw rod 421 arranged in parallel between the pair of guide rails 41 and 41, and a servo motor 422 for rotationally driving the male screw rod 421. Contains. One end of the male screw rod 421 is rotatably supported by a bearing block 423 fixed to the stationary base 2, and the other end is connected to the output shaft of the servo motor 422. The male screw rod 421 is screwed into a female screw 523 formed on a female screw block 522 provided on the lower surface of the first moving base 52 as shown in FIG. Accordingly, when the male screw rod 421 is rotated forward and backward by the servo motor 422, the first moving base 52 is moved along the guide rails 41 and 41 in the machining feed direction indicated by the arrow X.

  At this time, when a vibration occurs in the male screw rod 421, this vibration is transmitted to the first moving base 52, but a steel ball 541 as the vibration absorbing means 54 disposed on the first moving base 52, As the 541 rotates and the first moving base 52 and the second moving base 53 are relatively displaced, about 80% of the vibration is absorbed. Therefore, about 20% of the vibration generated in the male screw rod 421 is transmitted to the second moving base 53. In this way, a part of the vibration generated in the male screw rod 421 is transmitted to the second moving base 53, but the steel ball 551 as the vibration absorbing means 55 disposed on the second moving base 53. , 551 rotate, and the second moving base 53 and the chuck table support base 51 are relatively displaced, so that about 80% of the vibration transmitted to the second moving base 53 is absorbed. As described above, the vibration absorbing means 54 and 55 absorb about 96% of the vibration generated in the male screw rod 421. Therefore, the vibration transmitted to the chuck table support base 51, that is, the chuck table 31, is about 4% of the vibration generated in the male screw rod 421, and the chuck table can be moved with high accuracy. In addition, by providing three moving bases and providing a vibration absorbing means, the vibration transmitted to the chuck table 31 can be reduced to about 0.8% of the vibration generated in the male screw rod 421.

  Continuing the description with reference to FIG. 1, the spindle support mechanism 6 includes a pair of guide rails 61, 61 disposed on the stationary base 2 in parallel along the indexing feed direction indicated by the arrow Y, A movable support base 62 is provided on the guide rails 61 and 61 so as to be movable in the direction indicated by the arrow Y. The movable support base 62 includes a movement support portion 621 that is movably disposed on the guide rails 61, 61, and a mounting portion 622 that is attached to the movement support portion 621. A pair of guided grooves 621 a and 621 a that are fitted to the guide rails 61 and 61 are formed on the lower surface of the moving support portion 621. By fitting the guided grooves 621 a and 621 a to the guide rails 61 and 61, The movable support base 62 is configured to be movable along the guide rails 61 and 61. The mounting portion 622 is provided with a pair of guide rails 622a and 622a extending in the direction indicated by the arrow Z on one side surface in parallel.

  The spindle support mechanism 6 in the illustrated embodiment includes a moving means 63 for moving the movable support base 62 along the pair of guide rails 61, 61 in the index feed direction indicated by the arrow Y. The moving means 63 includes a drive source such as a male screw rod 631 disposed in parallel between the pair of guide rails 61, 61 and a pulse motor 632 for rotating the male screw rod 631. One end of the male screw rod 631 is rotatably supported by a bearing block (not shown) fixed to the stationary base 2, and the other end is connected to the output shaft of the pulse motor 632. The male screw rod 631 is screwed into a female screw hole formed in a female screw block (not shown) provided on the lower surface of the central portion of the moving support portion 631 constituting the movable support base 62. Therefore, when the male screw rod 631 is driven to rotate forward and reversely by the pulse motor 632, the movable support base 62 is moved along the guide rails 61 and 61 in the index feed direction indicated by the arrow Y. Accordingly, the pulse motor 632, the male screw rod 631, and the like function as index feeding means for relatively moving the chuck table and a spindle unit described later in the index feeding direction indicated by the arrow Y perpendicular to the cutting feed direction (arrow X direction). To do.

  The spindle unit 7 in the illustrated embodiment includes a unit holder 71, a spindle housing 72 attached to the unit holder 71, and a rotating spindle 73 that is rotatably supported by the spindle housing 72. The unit holder 71 is provided with a pair of guided grooves 71a and 71a slidably fitted to a pair of guide rails 622a and 622a provided in the mounting portion 622. The guided grooves 71a and 71a By being fitted to the guide rails 622a and 622a, the guide rails 622a and 622a are supported so as to be movable in the infeed direction indicated by the arrow Z. The rotary spindle 73 is disposed so as to protrude from the tip of the spindle housing 72, and a cutting blade 74 is attached to the tip of the rotary spindle 73. Note that the rotary spindle 73 on which the cutting blade 74 is mounted is driven to rotate by a drive source such as a servo motor 75. An image of the surface of the workpiece held on the chuck table 31 is imaged at the tip of the spindle housing 72 to detect a region to be cut by the cutting blade 73 and confirm the state of the cutting groove. The image pickup means 77 is provided. The image pickup means 77 is composed of optical means such as a microscope and a CCD camera, and sends the picked up image signal to a control means (not shown).

  The spindle unit 7 in the illustrated embodiment includes a moving means 76 for moving the holder 71 along the pair of guide rails 622a and 622a in the direction indicated by the arrow Z. The moving means 76 is driven by a male screw rod (not shown) disposed between the guide rails 622a and 622a, a pulse motor 762 for rotating the male screw rod, etc. The unit holder 71, the spindle housing 72, and the rotary spindle 73 are cut along the guide rails 622a and 622a by an arrow Z by driving a male screw rod (not shown) forward and backward by a pulse motor 762. Move in the direction. Accordingly, the pulse motor 762 and a male screw rod (not shown) function as a cutting feed means for moving the spindle unit 7 in the cutting feed direction indicated by the arrow Z.

The cutting apparatus in the illustrated embodiment is configured as described above, and the operation thereof will be briefly described below with reference to FIG.
First, a workpiece such as a semiconductor wafer is placed on the chuck table 31, and a suction means (not shown) is operated to suck and hold the workpiece on the chuck table 31. The chuck table 31 that sucks and holds the workpiece in this way is moved to a position immediately below the image pickup means 77. When the chuck table 31 is positioned immediately below the image pickup means 77, the cutting line formed on the workpiece is detected by the image pickup means 77, and the spindle unit 7 is moved and adjusted in the arrow Y direction as the indexing direction to adjust the cutting line. And the cutting blade 74 are precisely aligned.

  Next, a cutting process is performed in which the workpiece is cut along the cutting line while rotating the cutting blade 74. That is, the cutting blade 74 is cut and fed by a predetermined amount in the direction indicated by the arrow Z (see FIG. 1), and the moving means 42 of the chuck table moving mechanism 4 is operated while rotating the rotary spindle 73, that is, the cutting blade 74. The chuck table 31 supported by the chuck table support means 5 is moved at a predetermined cutting feed speed in the direction indicated by the arrow X in FIG. As a result, the workpiece held on the chuck table 31 is cut along a predetermined cutting line by the cutting blade 74.

  In the cutting process described above, the servo motor 422 of the moving means 42 is driven to rotate the male screw rod 421, but the male screw rod 421 is shaken. However, in the illustrated embodiment, as described above, the chuck table support means 5 that supports the chuck table 31 includes the chuck table support base 51, the first moving base 52, and the second moving base 53. Since the vibration absorbing means 54 and 55 are disposed between the first moving base 52 and the second moving base 53 and between the chuck table support base 51 and the first moving base 52, By the action of the absorbing means 54 and 55, most of the vibration generated in the male screw rod 421 can be absorbed. Therefore, the chuck table support base 51, that is, the chuck table 31 can be moved with high accuracy.

Next, another embodiment of the chuck table support means constituting the chuck table moving mechanism 4 will be described with reference to FIGS. In the embodiment shown in FIGS. 4 to 6, the same members as those of the chuck table support means 5 shown in FIGS.
4 to 6 includes a chuck table support base 51a for supporting the chuck table 31, and a plurality of chuck table support bases 51a disposed between the chuck table support base 51a and the moving means 42. Moving bases 52a and 53a are provided. In the illustrated embodiment, the moving base is a first moving base 52a disposed close to the moving means 42 and a second movable base 52a disposed close to the chuck table support base 51a. It consists of a moving base 53a.

  The chuck table support base 51a is formed in a rectangular shape, and is provided with support legs 511a and 511a that protrude downward from the outer periphery. The support legs 511a and 511a provided in parallel with the pair of guide rails 41a and 41a are formed with guided grooves 512a and 512a for fitting the pair of guide rails 41a and 41a, respectively. The chuck table 31 is disposed on the upper surface of the chuck table support base 51a configured as described above.

  The first moving base 52a disposed adjacent to the moving means 42 is formed in a rectangular shape, and guided grooves 521a and 521a for fitting the pair of guide rails 43a and 43a are formed on the lower surface thereof. . Further, a female screw block 522a protruding downward is provided between the guided grooves 521a and 521a on the lower surface of the first moving base 52a, and a machining feed direction indicated by an arrow X is provided in the female screw block 522a. A female screw 523a is formed so as to penetrate through.

  The second moving base 53a disposed in the vicinity of the chuck table support base 51a is formed in a rectangular shape and is fitted into support legs 511a and 511a formed on the chuck table support base 51a. It is formed in size. The second moving base 53a is provided with support legs 531a and 531a that protrude downward from the outer peripheral portion. In addition, the size of the inner periphery of the support legs 531a and 531a is set to a dimension in which the first moving base 52a is fitted. In the second moving base 53a thus formed, the guide legs 421 and 531a provided in parallel with the pair of guide rails 42a and 42a are guided grooves for fitting the pair of guide rails 42a and 42a, respectively. 532a and 532a are formed.

  The first moving base 52a formed as described above is disposed on the pair of guide rails 43a and 43a, and the guided grooves 521a and 521a are fitted to the pair of guide rails 43a and 43a. The second moving base 53a is disposed on the first moving base 52a, and the guided grooves 533a and 533a are fitted to the pair of guide rails 42a and 42a. The chuck table support base 51a is disposed on the second moving base 53a, and the guided grooves 513a and 513a are fitted to the pair of guide rails 41a and 41a.

  The chuck table support means 5a shown in FIGS. 4 to 6 is provided between the first moving base 52a and the second moving base 53a and between the chuck table supporting base 51a and the second moving base 53a. Further, shake absorbing means 54 and 55 are provided, respectively. In the illustrated embodiment, the shake preventing means 54 is composed of steel balls 541 and 541 that are arranged so as to be able to roll on both end surfaces in the machining feed direction indicated by the arrow X in the first moving base 52. Further, in the illustrated embodiment, the vibration absorbing means 55 is composed of steel balls 551 and 551 that are arranged so as to be able to roll on both end surfaces in the machining feed direction indicated by the arrow X in the second moving base 53, respectively. Yes. When the first moving base 52a is moved in the machining feed direction indicated by the arrow X along the pair of guide rails 43a and 43a by the moving means 42, the chuck table supporting means 5a configured in this way is first. The operating force acting on the movable base 52a is transmitted to the support legs 531a and 531a of the second movable base 53a via the steel balls 541 and 541 disposed on the first movable base 52a, and the second The moving base 53a is moved along the pair of guide rails 42a and 42a. Accordingly, the end surface of the first moving base 52a and the support legs 531a and 531a of the second moving base 53a use the operating force in the machining feed direction acting on the first moving base 52a as the vibration absorbing means 54. It functions as an operating force transmission means for transmitting to the second moving base 53a via the steel balls 541 and 541. Further, when the second moving base 53a is moved in the machining feed direction indicated by the arrow X as described above, the chuck is interposed via the steel balls 551 and 551 disposed on the second moving base 53a. This is transmitted to the support legs 511a and 511a of the table support base 51a, and the chuck table support base 51a is moved along the pair of guide rails 41a and 41a. Accordingly, the end surface of the second moving base 53a and the support legs 511a and 511a of the chuck table support base 51a can act as the vibration absorbing means 55 by acting the operating force in the processing feed direction acting on the second moving base 53a. It functions as an operating force transmission means for transmitting to the chuck table support base 51a via the steel balls 551 and 551.

  As described above, in the illustrated embodiment, the example in which the chuck table moving mechanism configured according to the present invention is applied to the cutting apparatus has been shown. However, the chuck table moving mechanism according to the present invention is a laser processing apparatus that performs laser processing on a workpiece. Needless to say, the present invention may be applied to other processing apparatuses.

The principal part perspective view of the cutting device equipped with the chuck table moving mechanism comprised according to this invention. The principal part sectional view showing one embodiment of the chuck table moving mechanism constituted according to the present invention. The perspective view which decomposes | disassembles and shows the structural member of the chuck table support means which comprises the chuck table moving mechanism shown in FIG. The principal part sectional drawing which shows other embodiment of the chuck table moving mechanism comprised according to this invention. AA sectional drawing in FIG. The perspective view which decomposes | disassembles and shows the structural member of the chuck table support means which comprises the chuck table moving mechanism shown in FIG.

Explanation of symbols

2: stationary base 3: chuck table mechanism 31: chuck table 4: chuck table moving mechanism 41: guide rail 42: moving means 421: male screw rod 422: servo motor 5: chuck table supporting means 51: chuck table supporting base 52 : First moving base 53: second moving base 54: shake absorbing means 55: shake absorbing means 6: spindle support mechanism 62: movable support base 7: spindle unit 71: unit holder 72: spindle housing 73: Rotating spindle 74: Cutting blade

Claims (3)

A chuck table support means for supporting a chuck table for holding a workpiece, a guide rail for guiding the chuck table support means in the machining feed direction, and a guide rail disposed along the guide rail and provided on the chuck table support means A chuck table moving mechanism comprising a male threaded rod threadedly engaged with the female thread,
The chuck table support means includes a chuck table support base for supporting the chuck table, and a plurality of moving bases disposed between the chuck table support base and the male screw rod,
Of the plurality of moving bases, a moving base adjacent to the male screw rod is provided with a female screw that is screwed with the male screw rod, and among the plurality of moving bases, adjacent to the chuck table support base. Actuating force transmitting means is provided between the moving base and the chuck table support base and between the moving bases to transmit the operating force acting in the machining feed direction via the shake preventing means. Yes,
A chuck table moving mechanism.   The chuck table moving mechanism according to claim 1, wherein the guide rail is a common guide rail for guiding the chuck table support base and the plurality of moving bases.   The chuck table moving mechanism according to claim 1, wherein the guide rail includes a plurality of guide rails that respectively guide the chuck table support base and the plurality of moving bases.

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