JP2007020267A - System identification device - Google Patents

Abstract

A system identification device capable of identifying a moment of inertia of a motor with high accuracy only by driving with a small amplitude.
A first band-pass filter that inputs a position and outputs a position fundamental frequency component that is a frequency component at a fundamental frequency of a position command of the input signal, and an amplitude of the input signal by inputting the position fundamental frequency component. A position amplitude detector 102 for outputting the position amplitude, and a first computing unit 103 for calculating and outputting the moment of inertia identification value of the electric motor combined with the load by inputting the position amplitude.
[Selection] Figure 1

Description

  The present invention relates to a system identification device for identifying a moment of inertia of a motor with a load.

  The system identification device according to the prior art calculates the total inertia of the motor and the load by dividing the torque command by the first-order time differential value of the detected speed (see, for example, Patent Document 1).

FIG. 10 is a configuration diagram of a system identification device showing the prior art.
10, 1001 is a position command generator, 1002 is a control parameter adjustment unit, 1003 is a position control unit, 1004 is a speed control unit, 1005 is an electric motor drive unit, 1006 is an electric motor and a load, 1007 is a speed detection unit, and 1008 is An integrator 1009 is an inertia estimation pause determination unit, and 1010 is an inertia estimation unit.
Hereinafter, the configuration of the system identification apparatus according to the prior art will be described with reference to FIG.
The position command generator 1001 outputs a position command. The control parameter adjustment unit 1002 inputs the position tracking deviation obtained by subtracting the detected position from the position command and the position command, and outputs the parameter setting. The position control unit 1003 inputs the position following deviation and the parameter setting, and outputs a speed command. The speed control unit 1004 inputs a speed tracking deviation obtained by subtracting the detected speed from the speed command, the parameter setting, and the total inertia, and outputs a torque command. The electric motor drive unit 1005 inputs the torque command and outputs an electric motor current. The motor and the load 1006 are driven by the motor current, and the speed is detected by the speed detection unit 1007 and output as the detected speed. The integrator 1008 inputs the detection speed and outputs the detection position. An inertia estimated pause determination unit 1009 receives the detected speed, determines whether the motor and the load 1006 are in a vibration state based on the input signal, and outputs an inertia estimated stop signal. The inertia estimation unit 1010 receives the torque command and the detected speed, and calculates and outputs the total inertia by dividing the torque command by a first-order time differential value of the detected speed. When the inertia estimation pause determination unit 1009 determines that the motor and the load 1006 are in a vibration state, the inertia estimation unit 1010 inputs the inertia estimation stop signal and stops the inertia estimation.

As described above, the system identification device according to the prior art divides the torque command by the first-order time differential value of the detected speed to estimate the total inertia of the motor and the load.
JP 2004-7955 A (page 47, FIG. 29)

  However, the system identification device according to the prior art is configured to divide the torque command by the first-order time differential value of the detection speed, and the motor with a load having a limited movable range has a sufficiently large detection speed of 1 Since the inertia time estimated disturbance is present because the differential time value cannot be obtained, the influence of the viscous friction or the constant torque disturbance appears in the torque command, so that the total inertia estimation accuracy by the inertia estimation unit is reduced. There was also a problem.

  The present invention has been made in view of such problems, eliminates position quantization errors, suppresses the influence of transient components of the position, and identifies the moment of inertia of the motor with only a small amplitude drive in a short time. It is an object of the present invention to provide a system identification apparatus capable of performing highly accurate inertia moment identification while suppressing the influence of viscous friction and constant torque disturbance. Also, the position command cycle can be set to maximize the moment of inertia identification accuracy, and the position amplitude can be sufficiently small with respect to the motor's movable range and sufficiently large with respect to the resolution of the position detector. It is an object of the present invention to provide a system identification device that can identify the moment of inertia of an electric motor with high accuracy only by driving with a small amplitude so that the torque command rated torque ratio is sufficiently small without generating noise.

  In order to solve the above problem, the invention according to claim 1 is a command generator that outputs a position command, a position controller that inputs the position command and position and outputs a speed command, and inputs the speed command and speed. A speed controller that outputs a torque command, a torque controller that inputs the torque command and drives the motor by a motor current, and a differentiator that inputs the position of the motor detected by a position detector and outputs the speed And an inertia moment identifier that outputs the inertia moment identification value of the electric motor that is input with the position and is combined with the load, wherein the inertia moment identifier receives the position and inputs the input signal. A first band-pass filter that outputs a position fundamental frequency component that is a frequency component at the fundamental frequency of the position command; and the position fundamental frequency component that is input. A position amplitude detector that outputs a position amplitude that is an amplitude of an input signal, and the position amplitude is input and a position command amplitude, a position command frequency, the position amplitude, a parameter of the position controller, and a parameter of the speed controller are used. And a first arithmetic unit that calculates and outputs the inertia moment identification value.

  According to a second aspect of the present invention, a command generator for outputting a position command, a position controller for inputting the position command and position and outputting a speed command, and outputting a torque command by inputting the speed command and speed. A speed controller that inputs the torque command and drives the motor by a motor current; a differentiator that inputs the position of the motor detected by a position detector and outputs the speed; and the position command And an inertia moment identifier that outputs an inertia moment identification value of the electric motor with the load input and the load adjusted, and the inertia moment identifier receives the position command and receives the input signal An FFT calculator that outputs a position command frequency that is a fundamental frequency and a position command amplitude that is a fundamental frequency component amplitude of the input signal; and the position and the position command frequency A second band pass filter that outputs a position fundamental frequency component that is a frequency component at the position command frequency of the position, and a position that inputs the position fundamental frequency component and outputs a position amplitude that is an amplitude of the input signal An amplitude detector, the position command amplitude, the position command frequency, and the position amplitude are input, and the position command amplitude, the position command frequency, the position amplitude, the position controller parameter, and the speed controller parameter are used. And a second computing unit that calculates and outputs the inertia moment identification value.

According to a third aspect of the present invention, in the system identification device according to the first aspect, the position controller is a proportional control with a gain of Kp, the speed controller is a proportional control with a gain of Kvj, and the position controller When the command amplitude is u0, the position command frequency is ω, and the position amplitude is A, the first calculator calculates the inertia moment identification value J by the following equation (1). It is characterized by that.

According to a fourth aspect of the present invention, in the system identification device of the second aspect, the position controller is a proportional control with a gain of Kp, the speed controller is a proportional control with a gain of Kvj, and the position controller When the command amplitude is u0, the position command frequency is ω, and the position amplitude is A, the second computing unit calculates the inertia moment identification value J by the following equation (1). It is characterized by that.

According to a fifth aspect of the present invention, in the system identification device according to the first aspect, the position controller is proportionally controlled, the speed controller is proportionally controlled with a gain of Kvj, and the position command amplitude is u0. Yes, the position command frequency is ω, the position amplitude when the gain of the position controller is Kp1 is A1, and the position amplitude when the gain of the position controller is Kp2 is A2. In this case, the first computing unit calculates the inertia moment identification value J by the following equation (2).

According to a sixth aspect of the present invention, in the system identification device of the second aspect, the position controller is set to proportional control, the speed controller is set to proportional control with a gain of Kvj, and the position command amplitude is u0. Yes, the position command frequency is ω, the position amplitude when the gain of the position controller is Kp1 is A1, and the position amplitude when the gain of the position controller is Kp2 is A2. In this case, the second arithmetic unit calculates the inertia moment identification value J by the following equation (2).

  Further, the invention according to claim 7 is the system identification device according to claim 1 or 2, wherein the command generator has the position command cycle shortened until the torque command increases and converges to a constant value. It is characterized by generating commands.

  The invention according to claim 8 is the system identification device according to claim 1 or 2, wherein the command generator has the motor of the position amplitude when the torque command is Tref and the rated torque is Trat. The position command amplitude is set so that the ratio to the movable range is smaller than the set value, the ratio of the position amplitude to the resolution of the position detector is larger than the set value, and the torque command rated torque ratio Tref / Trat is smaller than the set value. It is characterized by that.

  The system identification device according to claim 9 is the system identification device according to claim 1 or 2, wherein the position amplitude detector outputs an amplitude of a signal obtained by performing interpolation processing on the position fundamental frequency component as the position amplitude. It is characterized by being.

  According to a tenth aspect of the present invention, in the system identification device according to the first aspect, the first computing unit identifies the moment of inertia of the electric motor at a plurality of fixed intervals, and the identification value converges to a constant value. The inertia moment identification value is calculated and output by extrapolation.

  Further, the invention according to claim 11 is the system identification device according to claim 2, wherein the second computing unit identifies the moment of inertia of the motor in a plurality of intervals of a constant interval, and the identification value converges to a constant value. The inertia moment identification value is calculated and output by extrapolation.

  According to the first or second aspect of the invention, it is possible to identify the moment of inertia of the motor only by driving with a small amplitude, and to suppress the influence of viscous friction and constant torque disturbance and to identify the moment of inertia with high accuracy. it can.

  In addition, according to the inventions described in claims 3, 4, 5, and 6, the influence of the transient component of the position can be suppressed, and the moment of inertia of the motor can be identified with only a small amplitude drive in a short time. And the influence of constant torque disturbance can be suppressed and the moment of inertia can be identified with high accuracy.

  Further, according to the invention described in claim 7, the position command cycle can be set so as to maximize the inertia moment identification accuracy, and the inertia moment of the motor can be identified only by driving with a minute amplitude. It is possible to identify the moment of inertia with high accuracy while suppressing the influence of viscous friction and constant torque disturbance.

  According to the eighth aspect of the present invention, the position amplitude can be sufficiently small with respect to the movable range of the motor and sufficiently large with respect to the resolution of the position detector, no noise is generated during identification, and the torque command rated torque ratio The moment of inertia of the motor can be identified only by driving with a small amplitude, and the influence of viscous friction and constant torque disturbance can be suppressed, and the moment of inertia can be identified with high accuracy.

  Further, according to the ninth aspect of the present invention, it is possible to identify the moment of inertia of the electric motor only by driving with a minute amplitude, eliminating the quantization error of the position, and suppressing the influence of viscous friction and constant torque disturbance, and high accuracy. The moment of inertia can be identified.

  In addition, according to the invention described in claim 10 or 11, the influence of the transient component of the position can be suppressed, and the inertia moment of the motor can be identified only by driving with a minute amplitude. It is possible to suppress the moment of inertia identification with high accuracy.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 2 is a schematic configuration diagram of a system identification apparatus showing the first embodiment of the present invention.
In FIG. 2, 201 is a command generator, 202 is a position controller, 203 is a speed controller, 204 is a torque controller, 205 is an electric motor, 206 is a position detector, 207 is a differentiator, and 208 is an inertia moment identifier. is there.
Hereinafter, the outline of the configuration of the system identification apparatus of the present embodiment will be described with reference to FIG.
The command generator 201 outputs a position command. The position controller 202 inputs the position command and the position, and outputs a speed command. The speed controller 203 inputs the speed command and the speed, and outputs a torque command. The torque controller 204 receives the torque command and outputs a motor current. The electric motor 205 is driven by the electric motor current, and the position is detected and output by the position detector 206. The differentiator 207 inputs the position and outputs the speed. The inertia moment identifier 208 inputs the position command and the position, and outputs an inertia moment identification value.

FIG. 1 is a detailed configuration diagram of an inertia moment identifier in a system identification apparatus showing a first embodiment of the present invention.
In FIG. 1, 101 is a first band pass filter, 102 is a position amplitude detector, and 103 is a first computing unit.
The present invention is different from the prior art patent document 1 in that the present invention calculates and outputs an inertia moment identification value of a motor combined with a load using a position amplitude that is an amplitude of a position fundamental frequency component. One computing unit 103 is provided.
Hereinafter, the detailed configuration of the system identification apparatus according to the present embodiment will be described with reference to FIG.
The first band pass filter 101 receives a position and outputs a position fundamental frequency component that is a frequency component at the fundamental frequency of the position command of the input signal. The position amplitude detector 102 receives the position fundamental frequency component and outputs a position amplitude which is the amplitude of the input signal. The first calculator 103 receives the position amplitude, calculates and outputs an inertia moment identification value.

The operation of the system identification apparatus of the present invention will be described below with reference to FIGS.
The moment of inertia of the motor 205 combined with the load is J, the viscous friction of the motor 205 is D, the position is θ, the position command generated by the command generator 201 is u, the constant torque disturbance is w, and the gain of the position controller 202 is Kp Is a proportional control with a gain of Kvj, a closed loop including a position controller 202, a speed controller 203, a torque controller 204, an electric motor 205, a position detector 206, and a differentiator 207. The equation of motion of the system is expressed by equation (3).

When the position command u is a sine wave having an amplitude u0 and a frequency ω, the amplitude A in the steady state of the position θ is expressed by Expression (4).

When equation (4) is solved for moment of inertia J, equation (5) is obtained.

However, the gain Kvj of the speed controller 203 is set so that the value in the square root in Expression (5) becomes positive. In equation (5), if the relationship of ω <ωn is established between the position command frequency ω and the natural frequency ωn = ((Kp · Kvj / J)) ^1/2 of the closed loop system, the upper sign before the square root is effective. Otherwise, the following code is valid. In the system identification device of the present invention, the position command frequency ω is set so that the position amplitude A is very small. Therefore, the position command frequency ω is larger than the natural frequency ωn of the closed loop system, and the lower sign before the square root is effective in the equation (5). In the equation (5), when the viscous friction D of the electric motor 205 is ignored, the equation (6) is obtained.

  The first computing unit 103 calculates the inertia moment identification value according to equation (6). Of course, when the viscous friction D of the electric motor 205 is known, the equation (5) may be used. Since the equation (6) uses the amplitude A of the vibration component of the position and is not affected by the average value of the position, the constant torque disturbance does not affect the inertia moment identification according to the equation (6). In addition, since the system identification apparatus of the present invention is used for identifying the moment of inertia of the electric motor 205 with a minute movable range load, the position amplitude A is a minute amount in the equation (6), and is within the square root of the equation (6). The second term is sufficiently smaller than the first term, and the influence of viscous friction D on the moment of inertia identification accuracy can be ignored.

  When the torque command is Tref and the rated torque is Trat, the ratio of the position amplitude to the movable range of the electric motor 205 is smaller than the set value, and the ratio of the position amplitude to the resolution of the position detector 206 is smaller than the set value. By setting the position command amplitude so that the torque command rated torque ratio Tref / Trat is smaller than the set value, the moment of inertia can be silently identified using only a small amplitude drive using a small torque command.

  Further, the position amplitude detector 102 outputs the amplitude of the signal obtained by performing interpolation processing on the position fundamental frequency component as the position amplitude, thereby eliminating the quantization error of the position amplitude and performing the inertia moment identification with higher accuracy. it can.

  Further, the first computing unit 103 identifies the moment of inertia of the electric motor 205 at a plurality of intervals of a constant interval, and when the identified value is in the process of convergence to a constant value, the inertia moment identification value is calculated and output by extrapolation. As a result, highly accurate inertia moment identification can be performed.

Hereafter, the simulation result of a present Example is shown.
Numerical values used in this simulation are as shown in Equation (7).

However, Jm is the inertia moment of the electric motor 205 excluding the load, Jl is the inertia moment of the load, J * is the true value of the inertia moment of the electric motor 205 including the load, Trat is the rated torque, and Ts is the control cycle.
An inertia moment identification error e, which is an error between the true value of inertia moment J * and the inertia moment identification value J in this simulation, is calculated by Expression (8).

FIGS. 3A and 3B are explanatory diagrams of simulation results when the position command frequency is changed in the system identification device showing the first embodiment of the present invention. FIG. 3A is an inertia moment identification error, and FIG. 3B is a torque command rated torque. Is the ratio.
Hereinafter, the simulation result when the position command frequency is changed will be described with reference to FIG.
The minimum value of the moment of inertia identification error shown in FIG. 3A calculated from the equation (8) occurs at the position command frequency at which the torque command rated torque ratio shown in FIG. 3B increases and converges to a constant value. By shortening the cycle of the position command until the torque command rated torque ratio increases and converges to a constant value, the inertia moment identification accuracy according to the equation (6) can be increased.

FIGS. 4A and 4B are explanatory diagrams of simulation results when the viscous friction is changed in the system identification apparatus according to the first embodiment of the present invention. FIG. 4A is an inertia moment identification error, and FIG. 4B is a torque command rated torque ratio. It is.
Hereinafter, the simulation result when the viscous friction is changed will be described with reference to FIG.
When the viscous friction is changed from 0 N · m · s / rad to 0.002 N · m · s / rad, the inertia moment identification error shown in FIG. 4A calculated from the equation (8) is always 3% or less. The torque command rated torque ratio shown in FIG. 4B was always about 5.2%, and the position amplitude was always 0.004 rad or less (about 80 pulses with a 17-bit position detector).

FIGS. 5A and 5B are explanatory diagrams of simulation results when a constant torque disturbance is changed in the system identification device according to the first embodiment of the present invention. FIG. 5A is an inertia moment identification error, and FIG. 5B is a torque command rated torque. Is the ratio.
Hereinafter, the simulation result when the constant torque disturbance is changed will be described with reference to FIG.
When the constant torque disturbance is changed from 0% to 50% of the rated torque, the inertia moment identification error shown in FIG. 5A calculated from the equation (8) is always about 1.2%, and FIG. The torque command rated torque ratio is always about 5.2%, and the position amplitude is always 0.004 rad or less (about 17 pulses with a 17-bit position detector).

  As described above, the system identification apparatus according to the present embodiment suppresses the influence of viscous friction, is not affected by the constant torque disturbance, and can accurately identify the moment of inertia of the electric motor only by driving with a small amplitude.

FIG. 6 is a detailed configuration diagram of the moment of inertia identifier in the system identification apparatus showing the second embodiment of the present invention.
In FIG. 6, 601 is an FFT calculator, 602 is a second bandpass filter, and 603 is a second calculator. The same reference numerals as those in FIGS. 1 and 2 denote the same components as those in FIGS.
The present invention is different from the first embodiment in that the internal configuration of the moment of inertia identifier 208 in FIG. 2, that is, the moment of inertia identifier 208 of the present embodiment uses a position amplitude that is the amplitude of the position fundamental frequency component. Thus, there is provided a second computing unit 603 that calculates and outputs an inertia moment identification value of the motor combined with the load.

Hereinafter, the configuration and operation of the inertia moment identifier 208 of the present embodiment will be described in detail with reference to FIG.
The FFT calculator 601 receives a position command and outputs a position command frequency that is a fundamental frequency of the input signal and a position command amplitude that is a fundamental frequency component amplitude of the input signal. The second band pass filter 602 receives the position and the position command frequency, and outputs a position basic frequency component that is a frequency component of the position at the position command frequency. The position amplitude detector 102 receives the position fundamental frequency component and outputs a position amplitude which is the amplitude of the input signal. The second computing unit 603 receives the position command amplitude, the position command frequency, and the position amplitude, and calculates and outputs an inertia moment identification value.
In the above configuration, like the first computing unit 103 in the first embodiment, the second computing unit 603 calculates the inertia moment identification value by the above-described equation (6). Of course, when the viscous friction D of the electric motor 205 is known, the equation (5) may be used. Since the equation (6) uses the amplitude A of the vibration component of the position and is not affected by the average value of the position, the constant torque disturbance does not affect the inertia moment identification according to the equation (6). In addition, since the system identification apparatus of the present invention is used for identifying the moment of inertia of the electric motor 205 with a minute movable range load, the position amplitude A is a minute amount in the equation (6), and is within the square root of the equation (6). The second term is sufficiently smaller than the first term, and the influence of viscous friction D on the moment of inertia identification accuracy can be ignored.

  Further, by shortening the cycle of the position command until the torque command rated torque ratio increases and converges to a constant value, the inertia moment identification accuracy according to the equation (6) can be increased.

  When the torque command is Tref and the rated torque is Trat, the ratio of the position amplitude to the movable range of the electric motor 205 is smaller than the set value, and the ratio of the position amplitude to the resolution of the position detector 206 is smaller than the set value. By setting the position command amplitude so that the torque command rated torque ratio Tref / Trat is smaller than the set value, the moment of inertia can be silently identified using only a small amplitude drive using a small torque command.

  Further, the position amplitude detector 102 outputs the amplitude of the signal obtained by performing interpolation processing on the position fundamental frequency component as the position amplitude, thereby eliminating the quantization error of the position amplitude and performing the inertia moment identification with higher accuracy. it can.

  Further, when the second computing unit 603 identifies the moment of inertia of the motor 205 at a plurality of intervals of a constant interval and the identification value is in the process of convergence to a constant value, the inertia moment identification value is calculated by extrapolation and output. Accurate moment of inertia identification can be performed.

  As described above, the system identification apparatus according to the present embodiment, like the first embodiment, suppresses the influence of viscous friction, is not affected by a constant torque disturbance, and identifies the moment of inertia of the motor only by driving with a small amplitude. Can be made with high accuracy.

This embodiment differs from the first and second embodiments in that the position controller 202 in FIG. 2 which is the first and second embodiments is set to a proportional control of gains Kp1 and Kp2, and the speed controller 203 is changed to a gain Kvj. The other components are the same as those in the first and second embodiments, so that the description thereof is omitted.
The operation of the system identification apparatus of the present invention will be described below with reference to FIGS.
When the position controller 202 is set to proportional control of the gain Kp1 and the speed controller 203 is set to proportional control of the gain Kvj, the position amplitude A1 with respect to the position command which is a sine wave of the amplitude u0 frequency ω is expressed by the equation (1) It can be derived in the same manner as in 4) and becomes Equation (10).

When equation (10) is rewritten, equation (11) is obtained.

Assuming that the position amplitude when the gain of the position controller 202 is Kp2 is A2, Expression (12) can be obtained similarly to Expression (11).

Equation (13) is obtained by solving Equation (11) and Equation (12) for the moment of inertia J of the electric motor 205 combined with the load.

  The first computing unit 103 and the second computing unit 603 can calculate the inertia moment identification value by the equation (13). Since equation (13) uses the vibration component amplitude of the position, the average value of the position does not affect the identification accuracy, and the constant torque disturbance does not affect the inertia moment identification accuracy. Further, since the expression (13) does not include the viscous friction D, the viscous friction D does not affect the inertia moment identification accuracy.

FIGS. 7A and 7B are explanatory diagrams of simulation results when the viscous friction is changed in the system identification device showing the third embodiment of the present invention, where FIG. 7A is an inertia moment identification error and FIG. 7B is a torque command rated torque ratio. It is.
Hereafter, the simulation result of a present Example is shown using FIG.
In this simulation, the numerical value of the formula (14) was used.

Except for the expression (14), the numerical value of the expression (7) was used.
When the viscous friction is changed from 0 N · m · s / rad to 0.01 N · m · s / rad, the inertia moment identification error shown in FIG. 7A calculated by the equation (8) is always 2% or less. . At this time, the torque command rated torque ratio shown in FIG. 7B is always 12% or less.

FIG. 8 is an explanatory diagram of a simulation result when a constant torque disturbance is changed in the system identification device showing the third embodiment of the present invention, where (a) is an inertia moment identification error and (b) is a torque command rated torque. Is the ratio.
Hereinafter, the simulation result when the constant torque disturbance is changed will be described with reference to FIG.
When the constant torque disturbance rated torque ratio is changed from 0% to 50%, the inertia moment identification error shown in FIG. 8A calculated by the equation (8) is always 2% or less. At this time, the torque command rated torque ratio shown in FIG. 8B is always 12% or less.

FIG. 9 is an explanatory diagram of the simulation result of the position amplitude when the constant torque disturbance is changed in the system identification device showing the third embodiment of the present invention.
Hereinafter, the simulation result of the position amplitude when the constant torque disturbance is changed will be described with reference to FIG.
When the constant torque disturbance rated torque ratio is changed from 0% to 50%, the position amplitude is always 0.002 rad (about 40 pulses with a 17-bit position detector) or less. Similarly, when the viscous friction was changed, the position amplitude was always 0.002 rad or less.

  As described above, the system identification device according to the present invention uses the first computing unit 103 or the second computing unit 103 that calculates the inertia moment identification value of the electric motor 205 combined with the load using the position amplitude that is the amplitude of the position fundamental frequency component. Since the configuration includes the computing unit 603, the transient component of the position is suppressed, the position amplitude is sufficiently small with respect to the movable range of the electric motor 205, and sufficiently large with respect to the resolution of the position detector 206, and identification is performed. The torque command rated torque ratio can be made sufficiently small without generating noise, and the moment of inertia of the electric motor 205 can be identified with only a small amplitude drive, suppressing the effects of viscous friction and constant torque disturbance. Highly accurate moment of inertia can be identified.

  By using the position amplitude, position command amplitude, and position command frequency in the steady state of the motor controlled by position and speed, it is possible to identify the moment of inertia of the motor only by driving with a small amplitude, so it can be used for applications such as chip mounters and wire bonders. Is also widely applicable.

FIG. 1 is a detailed configuration diagram of an inertia moment identifier in a system identification apparatus showing a first embodiment of the present invention. 1 is a schematic configuration diagram of a system identification apparatus showing a first embodiment of the present invention. Explanatory drawing of the simulation result at the time of changing a position command frequency in the system identification apparatus which shows 1st Example of this invention Explanatory drawing of the simulation result at the time of changing viscous friction in the system identification apparatus which shows 1st Example of this invention Explanatory drawing of the simulation result when constant torque disturbance is changed in the system identification device showing the first embodiment of the present invention Detailed configuration diagram of the moment of inertia identifier in the system identification apparatus showing the second embodiment of the present invention Explanatory drawing of the simulation result at the time of changing viscous friction in the system identification apparatus which shows 3rd Example of this invention Explanatory drawing of the simulation result at the time of changing constant torque disturbance in the system identification apparatus which shows 3rd Example of this invention Explanatory drawing of the simulation result of the position amplitude at the time of changing constant torque disturbance in the system identification device which shows 3rd Example of this invention Configuration diagram of system identification device showing conventional technology

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 1st band pass filter 102 Position amplitude detector 103 1st calculator 201 Command generator 202 Position controller 203 Speed controller 204 Torque controller 205 Electric motor 206 Position detector 207 Differentiator 208 Inertia moment identifier 601 FFT calculator 602 Second band pass filter 603 Second computing unit 1001 Position command generator 1002 Control parameter adjustment unit 1003 Position control unit 1004 Speed control unit 1005 Motor drive unit 1006 Motor and load 1007 Speed detection unit 1008 Integrator 1009 Inertia estimation pause determination Part 1010 Inertia estimation part

Claims (11)

A command generator (201) for outputting a position command;
A position controller (202) for inputting the position command and the position and outputting a speed command;
A speed controller (203) for inputting the speed command and the speed and outputting a torque command;
A torque controller (204) for inputting the torque command and driving the electric motor (205) by an electric motor current;
A differentiator (207) for inputting the position of the electric motor (205) detected by a position detector (206) and outputting the speed;
An inertia moment identifier (208) that outputs an inertia moment identification value of the electric motor (205) to which the position is input and the load is matched;
The moment of inertia identifier (208)
A first band pass filter (101) for inputting the position and outputting a position fundamental frequency component which is a frequency component at the fundamental frequency of the position command of the input signal;
A position amplitude detector (102) for inputting the position fundamental frequency component and outputting a position amplitude which is an amplitude of the input signal;
The position amplitude is input, and the moment of inertia identification value is calculated and output using the position command amplitude, the position command frequency, the position amplitude, the parameter of the position controller (202), and the parameter of the speed controller (203). And a first computing unit (103). A command generator (201) for outputting a position command;
A position controller (202) for inputting the position command and the position and outputting a speed command;
A speed controller (203) for inputting the speed command and the speed and outputting a torque command;
A torque controller (204) for inputting the torque command and driving the electric motor (205) by an electric motor current;
A differentiator (207) for inputting the position of the electric motor (205) detected by a position detector (206) and outputting the speed;
An inertia moment identifier (208) that outputs the inertia moment identification value of the electric motor (205), which is obtained by inputting the position command and the position and combining loads;
The moment of inertia identifier (208)
An FFT calculator (601) that inputs the position command and outputs a position command frequency that is a fundamental frequency of the input signal and a position command amplitude that is a fundamental frequency component amplitude of the input signal;
A second bandpass filter (602) for inputting the position and the position command frequency and outputting a position fundamental frequency component which is a frequency component of the position at the position command frequency;
A position amplitude detector (102) for inputting the position fundamental frequency component and outputting a position amplitude which is an amplitude of the input signal;
The position command amplitude, the position command frequency, and the position amplitude are input, and the position command amplitude, the position command frequency, the position amplitude, the parameters of the position controller (202), and the parameters of the speed controller (203) are set. And a second computing unit (603) that calculates and outputs the moment of inertia identification value using the system identification device. The position controller (202) is a proportional control with a gain of Kp, the speed controller (203) is a proportional control with a gain of Kvj, the position command amplitude is u0, and the position command frequency is ω. And when the position amplitude is A,
The system identification device according to claim 1, wherein the first computing unit (103) calculates the inertia moment identification value J by the following equation (1).
The position controller (202) is a proportional control with a gain of Kp, the speed controller (203) is a proportional control with a gain of Kvj, the position command amplitude is u0, and the position command frequency is ω. And when the position amplitude is A,
The system identification apparatus according to claim 2, wherein the second computing unit (603) calculates the inertia moment identification value J by the following equation (1).
The position controller (202) is a proportional control, the speed controller (203) is a proportional control with a gain of Kvj, the position command amplitude is u0, the position command frequency is ω, and the position control When the position amplitude when the gain of the device (202) is Kp1 is A1, and when the gain of the position controller (202) is Kp2, the position amplitude is A2,
The system identification device according to claim 1, wherein the first computing unit (103) calculates the inertia moment identification value J by the following equation (2).
The position controller (202) is a proportional control, the speed controller (203) is a proportional control with a gain of Kvj, the position command amplitude is u0, the position command frequency is ω, and the position control When the position amplitude when the gain of the device (202) is Kp1 is A1, and when the gain of the position controller (202) is Kp2, the position amplitude is A2,
The system identification apparatus according to claim 2, wherein the second computing unit (603) calculates the inertia moment identification value J by the following equation (2).
  The said command generator (201) is a thing which produces | generates the said position command which shortened the period of the said position command until the said torque command increases and it converges to a fixed value, The Claim 1 or 2 characterized by the above-mentioned. System identification device.   In the command generator (201), when the torque command is Tref and the rated torque is Trat, the ratio of the position amplitude to the movable range of the electric motor (205) is smaller than a set value, and the position amplitude The position command amplitude is set such that the ratio of the position detector (206) to the resolution is larger than the set value and the torque command rated torque ratio Tref / Tat is smaller than the set value. 2. The system identification device according to 2.   3. The system identification apparatus according to claim 1, wherein the position amplitude detector (102) outputs an amplitude of a signal obtained by performing interpolation processing on the position fundamental frequency component as the position amplitude.   The first computing unit (103) identifies the moment of inertia of the electric motor (205) at a plurality of regular intervals, and calculates the moment of inertia identification value by extrapolation when the identified value is in the process of convergence to a constant value. The system identification apparatus according to claim 1, wherein the system identification apparatus outputs the data. The second computing unit (603) identifies the moment of inertia of the electric motor (205) at a plurality of fixed intervals, and calculates the moment of inertia identification value by extrapolation when the identification value is in the process of convergence to a constant value. The system identification apparatus according to claim 2, wherein the system identification apparatus outputs the data.