JP2007101024A - Method for drying object to be dried, dryer, and device manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drying method, a drier, and a device manufacturing method capable of reducing the influence of a solvent component remaining in a storage chamber and preventing deterioration of film quality when drying an object to be dried under reduced pressure. I will provide a.
SOLUTION: A dryer 100 includes a storage chamber 118 (119) that can store an object to be dried Q, and a first decompression pump 102 as a first decompression unit that decompresses the storage chamber 118 in a first decompression process. And a drying unit 110 for drying the object to be dried Q. A second decompression pump 103 as a second decompression unit for decompressing the interior of the storage chamber 119 in the second decompression process, and a removal unit 120 for cleaning the interior of the storage chamber 119 after drying the object to be dried Q. I have. Furthermore, the control part 142 which controls the 1st pressure reduction pump 102, the drying part 110, the 2nd pressure reduction pump 103, and the removal part 120 is provided.
[Selection] Figure 1

Description

  The present invention relates to a method for drying an object to be dried, a dryer, and a method for manufacturing a device.

  As disclosed in Patent Document 1, a coating liquid is applied onto a substrate to be processed such as a semiconductor wafer or a substrate for a liquid crystal display, and the coating liquid is dried under reduced pressure to form a coating film. Methods and devices are known.

JP 2002-239441 A

  However, in the above method and apparatus, since the solvent remaining in the pipe connected to the apparatus is removed, the attached solvent in the accommodation chamber (particularly in the vicinity of the substrate to be processed) is not removed, and thus the effect is small. For this reason, the solvent component may remain in the storage chamber. If the storage chamber is opened to the atmosphere with the solvent component remaining in the storage chamber, the solvent component may liquefy and adhere to the substrate, and the film quality after drying and the reproducibility of the film shape may not be obtained. there were. As a result, film quality may be deteriorated. Although it is possible to wipe off the solvent component adhering to the storage chamber, the apparatus must be stopped during that time, which is cumbersome and difficult to improve productivity. Further, when the solvent component remains in the storage chamber, the degree of vacuum in the storage chamber decreases. Therefore, it was necessary to reduce the pressure for a long time in order to return the degree of vacuum to a normal value. As a result, much power was consumed.

  An object of the present invention is to provide a drying method, a dryer, and a device capable of reducing the influence of a solvent component remaining in a storage chamber and preventing deterioration of film quality when drying an object to be dried under reduced pressure. It is to provide a manufacturing method.

  The dryer according to the present invention is a dryer that dries an object to be dried to which a functional liquid has been applied, and includes a storage chamber that can store the object to be dried and a decompression of the storage chamber in a first decompression process. A first decompression unit, a drying unit for drying the object to be dried, a second decompression unit for decompressing the storage chamber in a second decompression process, and after drying the object to be dried, A controller for controlling the removal unit for cleaning the storage chamber, the first decompression unit, the drying unit, the second decompression unit, and the removal unit. Features.

  According to the present invention, since the drying unit for drying the object to be dried and the removing unit for cleaning the storage chamber are separated from each other, they are separated. The room can be cleaned with a removal section. Therefore, the object to be dried can be dried while the inside of the accommodation chamber is always kept clean, so that a dryer capable of forming a stable quality film can be provided.

  In the dryer according to the present invention, the first pressure reducing unit includes a first detection unit, and the first detection unit detects a pressure, an integration time, and the number of processed sheets. It is desirable that at least one of the detection devices is provided.

  According to the present invention, since the detection device for detecting the pressure, the integration time, and the number of processed sheets is provided, the determination for starting the cleaning of the storage chamber can be made quantitatively, so that the accuracy is high.

  In the dryer of the present invention, the second decompression unit includes a second detection unit, and the second detection unit detects a pressure, a gas concentration, and an integration time. It is desirable that at least one of the detection devices is provided.

  According to the present invention, since the detection device for detecting the pressure, the gas concentration, and the integration time is provided, the determination for ending the cleaning of the storage chamber can be quantitatively performed, so that the accuracy is high.

  The dryer of the present invention preferably includes at least two of the storage chambers.

  According to the present invention, since the two storage chambers can be used alternately for drying and cleaning, the drying operation can be performed almost continuously without being interrupted. Can provide a machine.

  In the dryer according to the present invention, it is preferable that the removing unit includes an infrared lamp.

  According to the present invention, since the solvent component in the storage chamber can be thermally decomposed and removed by heating the infrared lamp, a dryer capable of cleaning the storage chamber can be provided.

  In the dryer according to the present invention, it is preferable that the removing unit includes a plasma irradiation device.

  According to the present invention, by operating the plasma irradiation device to generate plasma, the solvent component in the storage chamber can be decomposed and volatilized, so that a dryer capable of cleaning the storage chamber is provided. it can. Moreover, since the plasma can be irradiated with high density, the storage chamber can be cleaned in a short time, which is efficient.

  As for the dryer of this invention, it is desirable to provide the said removal part with the ultraviolet irradiation device.

  According to this invention, by operating the ultraviolet irradiation device to generate ultraviolet rays, the solvent components in the accommodation chamber can be decomposed and removed by the energy of the ultraviolet rays, so that the accommodation chamber can be cleaned. A dryer can be provided. As close as possible to the removal surface of the containment chamber, the energy of ultraviolet rays can be utilized as effectively as possible, so the effect is great.

  In the dryer according to the present invention, it is desirable that the removing unit includes a heater.

  According to the present invention, since the solvent component in the storage chamber can be thermally decomposed and removed by heating the heater, a dryer capable of cleaning the storage chamber can be provided.

  In the dryer according to the present invention, the control unit is controlled to start energization of the removal unit at least when the pressure in the storage chamber reaches an allowable value in the first pressure reducing process for reducing the pressure in the storage chamber. It is characterized by doing.

  According to this invention, since the control unit detects the pressure of the storage chamber in the first decompression process, the degree of the solvent component residue in the storage chamber can be determined. Can be started.

In the dryer of the present invention, when at least one of the pressure and the gas concentration in the storage chamber reaches an allowable value in the second decompression process in which the control unit decompresses the storage chamber, the energization to the removal unit is performed. Is controlled to stop.

  According to the present invention, the control unit detects at least one of the pressure and the gas concentration in the storage chamber in the second decompression process, so that the degree of the solvent component residue in the storage chamber can be determined. If exceeded, cleaning of the storage chamber can be stopped.

  The drying method of the present invention is a method for drying an object to be dried on which a functional liquid has been applied. The object to be dried is accommodated in an accommodating chamber capable of accommodating the object to be dried, and the accommodating chamber is decompressed to remove the object to be dried. When the drying step for drying, the first detection step for detecting the degree of contamination in the accommodation chamber, and the degree of contamination obtained in the first detection step reaches an allowable value, the energization of the removal unit is turned on and the accommodation chamber is turned on. Cleaning process, a second detection process for detecting the cleanliness of the storage chamber in the energized state of the removal unit, and the removal when the cleanliness obtained in the second detection process reaches an allowable value. And a step of stopping the cleaning of the storage chamber by turning off the energization of the section.

  According to this invention, the permissible value of the contamination level in the storage chamber in the first detection step for turning on the energization of the removal unit, and the cleaning of the storage chamber in the second detection step for turning off the energization of the removal unit. Since the degree should be determined in advance, management is easy. And if a to-be-dried body is dried in the state by which the cleanliness was maintained, the coating film with stable quality can be formed.

  The drying method of the present invention preferably includes at least one of the detection methods for detecting the pressure, the integration time, and the number of processed sheets in the first detection step.

  According to the present invention, since the detection method for detecting the pressure, the accumulated time, and the number of processed sheets is provided, the determination for starting the cleaning of the storage chamber can be simplified.

  The drying method of the present invention preferably includes at least one of the detection methods among the detection methods for detecting pressure, gas concentration, and integration time in the second detection step.

  According to the present invention, since the detection method for detecting the pressure, the gas concentration, and the integration time is provided, it is possible to simplify the determination for completing the cleaning of the storage chamber.

  In the drying method of the present invention, in the cleaning step, it is preferable to clean the storage chamber by heating with an infrared lamp.

  According to this invention, since the solvent component remaining in the storage chamber can be evaporated and removed by heating the storage chamber with the infrared lamp, the storage chamber can be cleaned cleanly.

  In the drying method of the present invention, in the cleaning step, it is desirable to clean the storage chamber by irradiating with plasma.

  According to the present invention, by irradiating the plasma generated by the plasma irradiation apparatus, the solvent component remaining in the storage chamber can be volatilized and removed, so that the storage chamber can be cleaned cleanly.

  In the drying method of the present invention, in the cleaning step, it is desirable to clean the storage chamber by irradiating with ultraviolet rays.

  According to this invention, since the solvent component remaining in the storage chamber can be decomposed and removed by irradiating the ultraviolet rays generated by the ultraviolet irradiation device, the storage chamber can be cleaned cleanly.

  In the drying method of the present invention, in the cleaning step, it is desirable to clean the storage chamber by heating with a heater.

  According to this invention, since the solvent component remaining in the storage chamber can be decomposed and removed by heating the storage chamber with the heater, the storage chamber can be cleaned cleanly.

  The device manufacturing method of the present invention is a device manufacturing method for forming pixels on a substrate by a droplet discharge method, and is characterized by using the above-described drying method.

  According to the present invention, since the coating film is dried after improving the cleanliness in the storage chamber, the quality of the coating film is stabilized. And the manufacturing method of the device which can obtain the stable quality can be provided.

Hereinafter, embodiments of the drying method, the drier, and the device manufacturing method of the present invention will be described in detail with reference to the accompanying drawings. The substrate to be dried will be described by taking as an example a substrate on which a functional liquid is applied on a substrate by a droplet discharge method.
(First embodiment)

  FIG. 1 is a schematic diagram showing the overall configuration of the dryer. FIG. 2A is a schematic plan view, and FIG. 2B is a schematic cross-sectional view.

  As shown in FIGS. 1 (a) and 1 (b), the dryer 100 is capable of transporting a drying unit 110 for drying the object to be dried Q, a removing unit 120 having an infrared lamp 121, and a chamber 112. The apparatus 130 and the operation panel 140 for operating the dryer 100 are comprised.

  The drying unit 110 includes a loading table 111 for loading the material to be dried Q, a chamber 112 having a hooking unit 113, and a decompression unit as a first decompression unit for decompressing the inside of the chamber 112 (accommodating chamber 118). The pump 102 and a pressure sensor 114 as a first detection unit for detecting the pressure in the chamber 112 (accommodating chamber 118). The object to be dried Q is formed by applying the functional liquid L on the substrate P.

  When the decompression pump 102 is operated, the inside of the chamber 112 (the storage chamber 118) can be decompressed from the atmospheric pressure. The decompression pump 102 is disposed on the table 104. An exhaust duct 106 for exhausting the exhaust gas is connected to the decompression pump 102 by a method not shown. The base 104 is fixed to the base 101 by a method not shown.

  The pressure sensor 114 is fixed to the piping of the decompression pump 102 by a method not shown.

  The removal unit 120 includes a chamber 112 having a hook 113, an infrared lamp 121 for heating the chamber 112, a decompression pump 103 as a second decompression unit for decompressing the inside of the chamber 112 (accommodating chamber 119), A pressure sensor 115 as a second detection unit for detecting the pressure in the chamber 112 (accommodating chamber 119) and a gas concentration sensor 116 for detecting the concentration of the solvent in the chamber 112 (accommodating chamber 119). Has been. Further, a thermocouple 129 for monitoring the temperature in the chamber 112 (accommodating chamber 119) is disposed in the vicinity of the infrared lamp 121.

  In order to depressurize the chamber 112 (accommodating chamber 119), the depressurizing pump 103 is operated to depressurize the chamber 112 (accommodating chamber 119) from atmospheric pressure. The decompression pump 103 is disposed on a table 105. Further, when the decompression pump 103 is operated, the solvent present in the chamber 112 (accommodating chamber 119) is exhausted to the outside of the dryer 100. Then, when the decompression pump 103 is operated, the inside of the chamber 112 (the storage chamber 119) is decompressed. Further, when the energization of the infrared lamp 121 is turned ON, the inside of the chamber 112 (the storage chamber 119) is heated. An exhaust duct 107 for exhausting the solvent is connected to the decompression pump 103 by a method not shown. The base 105 is fixed to the base 101 by a method not shown.

  The moving device 130 is a pneumatic cylinder (not shown) for moving the chamber 112 in the vertical direction (Z direction), and an illustration for moving the chamber 112 in the rotational direction (R direction) and covering the infrared lamp 121. A pneumatic cylinder that does not. The moving device 130 includes a hook part 131. The hook 112 is hooked on a hook 113 provided in the chamber 112, and the pneumatic cylinder (not shown) is operated to move the chamber 112.

  Further, in the dryer 100, an operation panel 140 for operating the dryer 100 is fixed to the gantry 101 by a method not shown.

  FIG. 2 is a block diagram of a control system of the dryer 100. As illustrated in FIG. 2, the operation panel 140, the input / output device 141, and the control unit 142 are connected to the CPU 145 and the RAM 146 via the input / output interface 143 and the bus 144. The input / output device 141 is connected to the first pressure reducing pump 102, the first pressure sensor 114, the moving device 130, the second pressure reducing pump 103, the second pressure sensor 115, and the gas concentration sensor 116. An infrared lamp 121 and a thermocouple 129 are connected to the control unit 142.

  The input / output device 141 includes a drive circuit (not shown), an AD converter, and the like, and can input values detected by the first pressure sensor 114, the second pressure sensor 115, and the gas concentration sensor 116 to the input / output device 141. . In addition, the input / output device 141 can output for driving the first decompression pump 102, the second decompression pump 103, and the moving device 130. Further, the moving device 130 includes a switch for operating a valve, a sensor, a pneumatic cylinder, and the like.

  The configuration of the dryer 100 in the present embodiment is as described above, and a drying method for drying the object to be dried Q using the dryer 100 will be described. FIG. 3 is a schematic flowchart showing an operation procedure of the dryer 100.

  When an instruction to start work is given, the CPU 145 sends a signal to the input / output device 141, and performs a drying process under reduced pressure on the droplets L applied on the substrate P (see FIGS. 1A and 1B). . Details of the specific drying method will be described below.

  The object to be dried Q is placed on the loading table 111, and the chamber 112 is placed thereon. Therefore, as shown in step S1 of FIG. 3, the operation panel 140 provided in the dryer 100 is operated to turn on the first pressure reducing pump 102 to depressurize the chamber 112 (the storage chamber 118). . When the inside of the chamber 112 (accommodating chamber 118) is depressurized, the solvent contained in the droplets L evaporates, and the evaporated solvent is exhausted to the outside of the dryer 100 through the exhaust duct 106. When a predetermined time elapses, the droplet L applied on the substrate P is dried, and a coating film is formed. The method of drying the to-be-dried body Q is reduced-pressure drying which dries while reducing the pressure at room temperature. Note that drying under reduced pressure is effective for an object that cannot be heated, and is used when drying at a low temperature is desired. Moreover, the reduced-pressure drying can volatilize a solvent that is difficult to volatilize (low vapor pressure).

  Next, as shown in step S <b> 2 of FIG. 3, the pressure in the chamber 112 (accommodating chamber 118) is detected by the first pressure sensor 114, and the pressure in the chamber 112 (accommodating chamber 118) is set to a set pressure for a predetermined time. Judge whether to reach.

  Next, as shown in step S3 of FIG. 3, if the pressure in the chamber 112 (accommodating chamber 118) reaches the set pressure in a certain time as a result of the determination in step S2, the pressure control of the first vacuum pump 102 is stopped. The pressure inside the chamber 112 (the storage chamber 118) is increased, and the dryer 100 is stopped. And the drying operation | work of the to-be-dried body Q is implemented repeatedly. When the drying operation of the object to be dried Q is repeatedly performed, solvent residues gradually increase in the chamber 112 (accommodating chamber 118), and the cleanliness in the chamber 112 (accommodating chamber 118) deteriorates. The degree of contamination in the chamber 112 (the storage chamber 118) and the pressure correspond to each other. When the cleanliness deteriorates (residue of the solvent), the pressure is unlikely to decrease. If the pressure in the chamber 112 (container 118) is set to a certain value in advance, it is useful for grasping the degree of contamination. In addition, the pressure is highly accurate because it can be grasped quantitatively. Moreover, it can be displayed easily. The pressure in the chamber 112 (accommodating chamber 118) varies depending on conditions such as the size, thickness, and material of the substrate P, the coating amount of the droplet L, the amount of the solvent contained in the droplet L, and the like. Moreover, it changes also with the required quality (dry condition etc.) of the to-be-dried body Q. The number of substrates to be dried Q that can be dried varies depending on the size, thickness, material, or coating amount of the droplet L, the amount of solvent contained in the droplet L, and the like.

  Next, as shown in step S4 of FIG. 3, if the pressure in the chamber 112 (container 118) does not reach the set pressure within a certain time as a result of the determination in step S2, the cleanliness deteriorates (residue of solvent). It shows that. This indicates a state in which the material to be dried Q cannot be continuously dried due to the influence of the solvent residue, and the cleaning of the chamber 112 (the storage chamber 118) must be started. Therefore, the pressure control of the first decompression pump 102 is stopped to increase the pressure in the chamber 112 (accommodating chamber 118) and release it to the atmosphere. If the atmosphere is released, the chamber 112 can be cleaned. The timing of starting the cleaning in the chamber 112 is the required quality of the object to be dried Q, the size, thickness and material of the substrate P, the application amount of the droplet L, and the amount of the solvent contained in the droplet L. Therefore, different pressure values are set in the first pressure sensor 114 according to the conditions.

  Next, as shown in step S5 of FIG. 3, the chamber 112 is moved. To move the chamber 112, the moving device 130 is moved downward (Z direction) by a pneumatic cylinder (not shown), and the hook portion 131 provided in the moving device 130 is hooked on the hook portion 113 provided in the chamber 112. Then, it is lifted upward (Z direction) by a pneumatic cylinder (not shown). Further, the chamber 112 is swung in the swiveling direction (R direction) and lowered in the down direction (Z direction) by a pneumatic cylinder (not shown), and moved from the drying unit 110 to the removing unit 120.

  Next, as shown in step S6 of FIG. 3, the energization of the second decompression pump 103 is turned on to decompress the interior of the chamber 112 (accommodating chamber 119). By reducing the pressure in the chamber 112 (the storage chamber 119), the solvent can be positively removed. In addition, it changes suitably according to the pressure at the time of pressure reduction, the kind of solvent, a coating amount, etc. Moreover, you may introduce | transduce inert gas, such as dry air or nitrogen gas, into the 2nd pressure reduction pump 103 at the time of pressure reduction.

  Next, as shown in step S <b> 7 of FIG. 3, energization of the infrared lamp 121 is turned on to heat the chamber 112. The solvent can be positively removed by heating the chamber 112. The heating temperature is appropriately changed depending on the type of solvent and the amount of coating. In addition, a thermocouple 129 disposed in the vicinity of the infrared lamp 121 is used to monitor and control the temperature in the chamber 112 (the storage chamber 119) so as not to exceed the set range.

  Next, as shown in step S <b> 8 of FIG. 3, the second pressure sensor 115 detects whether the pressure in the chamber 112 (accommodating chamber 119) has dropped to the set pressure. If the pressure in the chamber 112 (accommodating chamber 119) does not drop to the set pressure, decompression and heating are continued. If the pressure in the chamber 112 (accommodating chamber 119) falls to the set pressure, the process proceeds to the next step.

  Next, as shown in step S9 of FIG. 3, the energization of the infrared lamp 121 is turned off, and the heating of the chamber 112 is stopped.

  Next, as shown in step S <b> 10 of FIG. 3, it is detected by the thermocouple 129 whether the temperature in the chamber 112 (the storage chamber 119) has decreased to a certain temperature. The process waits until the temperature in the chamber 112 (accommodating chamber 119) falls below the set temperature, and proceeds to the next step if the temperature falls.

  Finally, as shown in step S11 of FIG. 3, the energization of the second decompression pump 103 is turned off, and the pressure in the chamber 112 (the storage chamber 119) is increased. By removing the solvent in the chamber 112 (the storage chamber 119), the chamber 112 can be cleaned cleanly. If the chamber 112 is moved from the removing unit 120 to the drying unit 110, the drying operation of the object to be dried Q can be continued.

  Next, a method for detecting the gas concentration instead of the method for detecting the pressure in the chamber 112 (the storage chamber 119) will be described.

  FIG. 4 is a schematic flowchart showing an operation procedure of the dryer 100 when the gas concentration sensor 116 is used. Steps S1 to S7 and steps S9 to S11 are the same as steps S21 to S27 and steps S30 to S32 in FIG. Steps S28 and S29 will be described.

  As shown in step S28 of FIG. 4, the analysis of the exhaust gas composition exhausted from the chamber 112 (accommodating chamber 119) is started.

  Next, as shown in step S29 of FIG. 4, the gas concentration sensor 116 detects whether the gas concentration in the chamber 112 (accommodating chamber 119) has decreased to the set concentration. If the gas concentration does not drop to the set concentration, decompression and heating are continued. If the gas concentration falls to the set concentration, the process proceeds to the next step. The gas concentration sensor 116 uses, for example, a gas analyzer FT-IR.

  It should be noted that the control unit 142 connected to the thermocouple 129 for detecting the temperature in the chamber 112 (container 119) shown in FIG. 1 and the infrared lamp 121 for heating depends on the detection result of the thermocouple 129. The temperature is calculated to control the temperature in the chamber 112 (accommodating chamber 119). The input / output device 141 connected to the first pressure sensor 114, the first pressure reduction pump 102, the second pressure sensor 115, and the second pressure reduction pump 103 is connected to the chamber 112 (accommodating chamber 118) by the first pressure sensor 114. The pressure inside is detected. Similarly, the pressure in the chamber 112 (accommodating chamber 119) is detected by the second pressure sensor 115. In addition, the input / output device 141 detects the gas concentration in the chamber 112 (the storage chamber 119) by the gas concentration sensor 116. These functions are realized by program software using the CPU 145. In addition, the RAM 146 can record data such as a storage area for storing program software in which a control procedure of the operation of the dryer 100 is described, temperature, pressure, gas concentration, and the like in the chamber 112 (the storage chambers 118 and 119).

  Next, an outline of the liquid crystal display device will be described.

  FIG. 5 is a cross-sectional view schematically showing a liquid crystal display device 50 as a device. As shown in FIG. 5, in the liquid crystal display device 50, a rectangular flat plate-like substrate 52 made of glass, plastic, or the like, and a substrate 54 are arranged to face each other with a sealant and a spacer (not shown) interposed therebetween. A liquid crystal 56 made of STN (Super Twisted Nematic) liquid crystal or the like is sandwiched between the substrate 52 and the substrate 54.

  Between the substrate 52 and the liquid crystal 56, a plurality of segment electrodes 58 and an alignment film 60 are formed in this order from the substrate 52 side. As shown in FIG. 5, the segment electrode 58 is formed in a stripe shape, and is formed of a transparent conductive film such as indium tin oxide (hereinafter abbreviated as ITO). The alignment film 60 is made of polyimide resin or the like.

  Between the substrate 54 and the liquid crystal 56, a color filter 62, an overcoat film 66, a common electrode 68, and an alignment film 70 are formed in this order from the substrate 54 side. The color filter 62 includes red (R), green (G), and blue (B) pigment layers 62r, 62g, and 62b. Between the pigment layers 62r, 62g, and 62b constituting the color filter 62, a black matrix 64 made of a metal such as resin black or chromium (Cr) having a low light reflectance is formed. Yes. The dye layers 62 r, 62 g, and 62 b constituting the color filter 62 are disposed so as to face the segment electrode 58 formed on the substrate 52.

  The overcoat film 66 flattens the steps between the dye layers 62r, 62g, and 62b and protects the surfaces of the dye layers 62r, 62g, and 62b. It is formed of an inorganic film such as an acrylic resin, a polyimide resin, or a silicon oxide film. The common electrode 68 is formed of a transparent conductive film such as ITO, and is formed in a stripe shape at a position orthogonal to the segment electrode 58 formed on the substrate 52. The alignment film 70 is formed of polyimide resin or the like.

  Next, a method for forming the alignment films 60 and 70 on the substrate 52 or the color filter 62 on which the segment electrode 58 is formed, the black matrix 64, the overcoat film 66, and the substrate 54 on which the common electrode 68 is formed will be described.

  FIG. 6 is a flowchart showing a method for manufacturing the liquid crystal display device.

  As shown in FIG. 6, the manufacturing method of the alignment films 60 and 70 of the liquid crystal display device 50 is roughly composed of a substrate cleaning process, an alignment film material application process, a reduced pressure drying process, and a baking process.

  As shown in step S201 of FIG. 6, for example, the substrate 52 on which the segment electrode 58 is formed is cleaned using an alkaline detergent or pure water. The cleaned substrate 52 is dried at a predetermined temperature and time, for example, 80 to 90 ° C. for 5 to 10 minutes.

  Next, as shown in step S <b> 202 of FIG. 6, an alignment film material is applied to the substrate 52. The composition of the alignment film material is 98% for the solvent (γ-butyllactone) and 2% for the solid content (polyimide). The alignment film material can be applied using a droplet discharge device, and a predetermined amount of the alignment film material can be disposed in a predetermined drawing region.

Here, although there are various ejection techniques for the droplet ejection method, it is preferable to use an inkjet method because a fine wiring pattern can be formed on demand. Examples of the ink jet method include a charge control method, a pressure vibration method, an electromechanical conversion method, an electrothermal conversion method, and an electrostatic suction method. Here, in the charge control method, a charge is applied to a material by a charging electrode, and the flight direction of the material is controlled by a deflection electrode and discharged from a discharge nozzle. Also, pressure vibration method is intended to discharge the material to the nozzle tip side by application of ultra-high pressure of about 30kg / cm ² on the material from the discharge nozzle and the material goes straight when not applying a control voltage When discharged and a control voltage is applied, electrostatic repulsion occurs between the materials, and the materials are scattered and are not discharged from the discharge nozzle. The electromechanical conversion method utilizes the property that a piezoelectric element (piezoelectric element) is deformed by receiving a pulse-like electric signal. The piezoelectric element is deformed through a flexible substance in a space where material is stored. Pressure is applied, and the material is extruded from this space and discharged from the discharge nozzle.

  In the electrothermal conversion method, a material is rapidly vaporized by a heater provided in a space in which the material is stored to generate bubbles, and the material in the space is discharged by the pressure of the bubbles. In the electrostatic attraction method, a minute pressure is applied to a space in which a material is stored, a meniscus of material is formed on the discharge nozzle, and an electrostatic attractive force is applied in this state before the material is drawn out. In addition to this, techniques such as a system that uses a change in the viscosity of a fluid due to an electric field and a system that uses a discharge spark are also applicable. The droplet discharge method has an advantage that the use of the material is less wasteful and a desired amount of the material can be accurately disposed at a desired position. In addition, the amount of one drop of the liquid material discharged by the droplet discharge method is 1 to 300 nanograms, for example.

  The liquid droplet ejection apparatus described above can be used in the arrangement method and the manufacturing method according to the present invention. However, the present invention is not limited to this, and a liquid droplet is ejected and a predetermined landing position is expected. Any method and apparatus can be used as long as they can be landed. For example, the alignment film material may be applied by a method such as a spin coating method, a slit coating method, a dispensing method, or a printing method.

  Next, as shown in step S <b> 203 of FIG. 6, the alignment film material applied to the substrate 52 is subjected to reduced-pressure drying at room temperature using, for example, the dryer 100 shown in FIG. 1. The treatment time may be an appropriate time for drying the alignment film material under reduced pressure and evaporating the solvent contained in the alignment film material. Note that the processing time is not limited to this range, and may be appropriately changed depending on the type of the alignment film material, the coating amount, and the like.

  Finally, as shown in step S204 of FIG. 6, the alignment film material is baked. For example, the treatment is performed in a temperature range of 180 to 250 ° C., and the alignment film material is completely solidified or cured to form the alignment film 60. The temperature of the baking treatment can be appropriately determined depending on the composition of the alignment film material and the like. Further, it may be simply dried or aged in a different atmosphere (in nitrogen gas or in dry air) without heating to a particularly high temperature. In the assembly apparatus (not shown), the substrate 52 on which the segment electrode 58 and the alignment film 60 are formed is the substrate on which the color filter 62, the black matrix 64, the overcoat film 66, the common electrode 68, and the alignment film 70 are formed. 54. 5 is injected between the substrate 52 and the substrate 54, the liquid crystal display device 50 shown in FIG.

  In the first embodiment as described above, the following effects are obtained.

(1) Since the dryer 100 is composed of the drying unit 110 that dries the object to be dried Q and the removal unit 120 for cleaning the inside of the chamber 112 (the storage chamber 119), the dryer 100 is separated. If the cleanliness in the chamber 112 (accommodating chamber 118) decreases, the removal unit 120 can perform cleaning. Therefore, the object to be dried Q can be dried while the inside of the chamber 112 (accommodating chamber 118) is always kept clean, so that the dryer 100 capable of forming a film of stable quality can be provided.
(2) Since the dryer 100 includes the first pressure sensor 114 as a detection device for detecting the pressure, the determination for starting the cleaning of the chamber 112 (the storage chamber 119) can be quantitatively performed. High accuracy. Moreover, it is easy.
(3) Since the dryer 100 includes the second pressure sensor 115 as a detection device for detecting the pressure or the gas concentration sensor 116 as a detection device for detecting the gas concentration, the cleaning of the storage chamber is completed. The judgment to do is quantitative, so the accuracy is high. Moreover, it is easy.
(4) Since the dryer 100 includes the two storage chambers 118 and 119 and can alternately perform drying and cleaning, the drying operation can be performed almost continuously without being interrupted. , Productivity can be improved.
(5) The dryer 100 includes an infrared lamp 121. By heating the chamber 112, the solvent component and organic matter attached to the inner wall of the chamber 112 can be thermally decomposed and removed. Chamber 119) can be cleaned.
(6) Since the control unit 142 detects the pressure value in the chamber 112 (accommodating chamber 118) in the first decompression process, the degree of the solvent component residue can be determined. If the residue exceeds the allowable value, cleaning is performed. Can be started. Since the pressure value is detected quantitatively, the accuracy is high. Moreover, it is easy.
(7) Since the control unit 142 detects the pressure value or gas concentration in the chamber 112 (container 119) in the second decompression process, the degree of the solvent component residue can be determined, so the residue exceeds the allowable value. Once cleaned, cleaning can be stopped. Since the pressure value or gas concentration value is quantitatively detected, the accuracy is high. Moreover, it is easy.
(8) Allowable pressure value in the first detection step for turning on the energization of the removal unit 120 to the control unit 142 and allowable pressure value in the second detection step for turning off the energization of the removal unit 120 Is easy to manage. And if the to-be-dried body Q is dried in the state by which the cleanliness was maintained, the coating film with the stable quality can be formed.
(9) In the method of forming the coating film, the quality of the coating film can be stabilized because the object to be dried Q is dried after the chamber 112 (the storage chambers 118 and 119) is cleaned cleanly. And the manufacturing method of the device which can obtain the stable quality can be provided.
(Second Embodiment)

  Next, a second embodiment of the present invention will be described. The second embodiment is different in the configuration of the removing unit in the first embodiment described above, and is different in that a plasma irradiation apparatus is provided instead of the infrared lamp. In addition, since a dryer is the structure substantially the same as the above-mentioned 1st Embodiment, a different location is demonstrated easily.

  FIG. 7 is a schematic diagram showing the overall configuration of the dryer according to the present embodiment. FIG. 2A is a schematic plan view, and FIG. 2B is a schematic cross-sectional view.

  As shown in FIGS. 7A and 7B, the dryer 100 can transport the drying unit 110 for drying the object to be dried Q, the removing unit 120 having the plasma irradiation device 122, and the chamber 112. A moving device 130 and an operation panel 140 for operating the dryer 100 are configured. Note that, unlike the first embodiment, the chamber 112 is not heated.

  The plasma irradiation device 122 is connected to a discharge power source (not shown) and can perform high frequency discharge. For example, high frequency discharge of 13.56 MHz can be performed. Further, the plasma irradiation device 122 and the chamber 112 are insulated (not shown).

  FIG. 8 is a block diagram of a control system of the dryer 100. As illustrated in FIG. 8, the operation panel 140, the input / output device 141, and the control unit 142 are connected to the CPU 145 and the RAM 146 via the input / output interface 143 and the bus 144. The input / output device 141 is connected to the first pressure reducing pump 102, the first pressure sensor 114, the moving device 130, the second pressure reducing pump 103, the second pressure sensor 115, and the gas concentration sensor 116. A plasma irradiation device 122 is connected to the control unit 142.

  The configuration of the dryer 100 in the present embodiment is as described above, and a drying method for drying the object to be dried Q using the dryer 100 will be described.

  FIG. 9 is a schematic flowchart showing an operation procedure of the dryer 100. Steps S41 to S46 are the same as steps S1 to S6 in FIG. Here, steps S47 to S50 having different contents from the first embodiment will be described.

As shown in step S <b> 47 of FIG. 9, the plasma irradiation device 122 is turned on to irradiate the inner wall of the chamber 112 with plasma. By irradiating the inner wall of the chamber 112 with plasma, the solvent and organic matter attached to the inner wall of the chamber 112 can be actively decomposed and volatilized. Similarly, deposits containing inorganic components can be removed. In the present embodiment, the O ₂ gas is introduced into the plasma irradiation device 122, but this is not particular and other gases may be introduced. You may change suitably with the kind of solvent, the application quantity, etc. For example, an inert gas such as Ar gas or He gas, a fluorine-based gas such as CF ₄ , or an etching gas such as a chlorine-based gas may be used. If an etching gas is added to the O ₂ gas, the reaction with the organic substance is promoted, so that the cleaning effect can be further improved. Therefore, the cleaning time can be shortened, which is efficient. Further, if plasma of high frequency discharge of 13.56 MHz is used, high density plasma is formed as compared with direct current discharge, which is more effective.

  As shown in step S48 of FIG. 9, the second pressure sensor 115 detects whether the pressure in the chamber 112 (accommodating chamber 119) has dropped to the set pressure. If the pressure does not drop to the set pressure, the pressure reduction and the plasma irradiation are continued. If the pressure falls to the set pressure, proceed to the next step.

  Next, as shown in step S49 of FIG. 9, the plasma irradiation apparatus 122 is turned off to stop plasma irradiation in the chamber 112 (accommodating chamber 119).

  Finally, as shown in step S50 of FIG. 9, the second decompression pump 103 is turned off, and the pressure in the chamber 112 (the storage chamber 119) is increased. The inside of the chamber 112 (the storage chamber 119) is cleaned cleanly by removing the solvent. And if the chamber 112 is moved from the removal part 120 to the drying part 110, the drying operation of the to-be-dried body Q can be restarted.

  Next, a method for detecting the gas concentration instead of the method for detecting the pressure in the chamber 112 (the storage chamber 119) will be described.

  FIG. 10 is a schematic flowchart showing an operation procedure of the dryer 100 when the gas concentration sensor 116 is used. Steps S51 to S57 and steps S60 and S61 are the same as steps S41 to S47 and steps S49 and S50 in FIG. Steps S58 and S59 will be described.

  As shown in step S58 of FIG. 10, the analysis of the exhaust gas composition exhausted from the chamber 112 (accommodating chamber 119) is started.

  Next, as shown in step S59 of FIG. 10, the gas concentration sensor 116 detects whether or not the gas concentration in the chamber 112 (accommodating chamber 119) has decreased to a set concentration. If the gas concentration does not drop to the set concentration, the decompression and plasma irradiation are continued. If the gas concentration falls to the set concentration, the process proceeds to the next step. The gas concentration sensor 116 uses, for example, a gas analyzer FT-IR.

  In the second embodiment as described above, the following effects are obtained.

(10) By irradiating the plasma generated by the plasma irradiation device 122 to the inner wall of the chamber 112, the solvent component and organic matter attached to the inner wall of the chamber 112 can be volatilized and removed, so that the chamber 112 (the storage chamber 118, 119) The inside can be cleaned cleanly. If the object to be dried Q is dried in the cleanly cleaned chamber 112 (accommodating chambers 118 and 119), a coating film with stable quality can be formed. In addition, since the chamber 112 (accommodating chamber 119) is not heated, a cooling time is not required as compared with the case where the chamber 112 is heated.
(Third embodiment)

  Next, a third embodiment of the present invention will be described. The third embodiment is different in the configuration of the removing unit in the first embodiment and the second embodiment described above, and is different in that an ultraviolet irradiation device is provided instead of the infrared lamp or the plasma irradiation device. In addition, since a dryer is the structure substantially the same as the above-mentioned 1st Embodiment and 2nd Embodiment, it demonstrates briefly about a different location.

  FIG. 11 is a schematic diagram illustrating the overall configuration of the dryer according to the present embodiment. FIG. 2A is a schematic plan view, and FIG. 2B is a schematic cross-sectional view.

  As shown in FIGS. 11A and 11B, the dryer 100 can transport the drying unit 110 for drying the object to be dried Q, the removing unit 120 having the ultraviolet irradiation device 123, and the chamber 112. A moving device 130 and an operation panel 140 for operating the dryer 100 are configured. A plurality of ultraviolet lamps 123 </ b> L are arranged inside the ultraviolet irradiation device 123. Note that, as in the second embodiment, the chamber 112 is not heated.

  The ultraviolet irradiation device 123 uses, for example, an excimer lamp as the ultraviolet lamp 123L, and the wavelength of the ultraviolet light is 172 nm. If the wavelength of the ultraviolet light is a short wavelength of 200 nm or less, the energy of the ultraviolet light is high, so that it is more effective for decomposing / removing the attached organic matter. Further, since the energy loss of ultraviolet rays can be reduced by bringing the ultraviolet lamp 123L closer to the chamber 112, the effect is greater. For example, the distance between the chamber 112 and the ultraviolet lamp 123L is preferably 5 mm or less.

  FIG. 12 is a block diagram of a control system of the dryer 100. As illustrated in FIG. 12, the operation panel 140, the input / output device 141, and the control unit 142 are connected to the CPU 145 and the RAM 146 via the input / output interface 143 and the bus 144. The input / output device 141 is connected to the first pressure reducing pump 102, the first pressure sensor 114, the moving device 130, the second pressure reducing pump 103, the second pressure sensor 115, and the gas concentration sensor 116. An ultraviolet irradiation device 123 is connected to the control unit 142.

  The configuration of the dryer 100 in the present embodiment is as described above, and a drying method for drying the object to be dried Q using the dryer 100 will be described.

  FIG. 13 is a schematic flowchart showing an operation procedure of the dryer 100. Steps S71 to S76 and step S80 are the same as steps S41 to S46 and step S50 in FIG. Here, steps S77, S78, and S79, which are different from those in the second embodiment, will be described.

  As shown in step S77 of FIG. 13, the energization of the ultraviolet irradiation device 123 is turned on to irradiate the inner wall of the chamber 112 with ultraviolet rays. By irradiating the inner wall of the chamber 112 with ultraviolet rays, it is possible to decompose and remove the solvent and organic substances attached to the inner wall of the chamber 112. Note that if ultraviolet rays are irradiated in an oxygen atmosphere, it is more effective to decompose and remove solvents and organic substances by the synergistic action of ultraviolet rays and ozone.

  As shown in step S78 of FIG. 13, the second pressure sensor 115 detects whether the pressure in the chamber 112 (accommodating chamber 119) has dropped to the set pressure. If the pressure does not drop to the set pressure, the pressure reduction and the ultraviolet irradiation are continued. If the pressure falls to the set pressure, proceed to the next step.

  Next, as shown in Step S79 of FIG. 13, the energization of the ultraviolet irradiation device 123 is turned off, and the ultraviolet irradiation in the chamber 112 (the storage chamber 119) is stopped.

  Next, a method for detecting the gas concentration instead of the method for detecting the pressure in the chamber 112 (the storage chamber 119) will be described.

  FIG. 14 is a schematic flowchart showing an operation procedure of the dryer 100 when the gas concentration sensor 116 is used. Steps S81 to S87 and steps S90 and S91 are the same as steps S71 to S77 and steps S79 and S80 in FIG. Steps S88 and S89 will be described.

  As shown in step S88 of FIG. 14, the analysis of the exhaust gas composition exhausted from the chamber 112 (accommodating chamber 119) is started.

  Next, as shown in step S89 of FIG. 14, the gas concentration sensor 116 detects whether the gas concentration in the chamber 112 (accommodating chamber 119) has decreased to the set concentration. If the gas concentration does not decrease to the set concentration, the decompression and the ultraviolet irradiation are continued. If the gas concentration falls to the set concentration, the process proceeds to the next step. The gas concentration sensor 116 uses, for example, a gas analyzer FT-IR.

  In the third embodiment as described above, the following effects are obtained.

(11) By irradiating the inner wall of the chamber 112 (accommodating chamber 119) with the ultraviolet light generated by the ultraviolet irradiation device 123, the solvent component and organic matter adhering to the inner wall of the chamber 112 can be removed by the ultraviolet cleaning effect. The inside of the chamber 112 (the storage chamber 119) can be cleaned cleanly. Furthermore, if ultraviolet rays are irradiated in an O ₂ atmosphere, the cleaning effect is higher due to the synergistic action of ultraviolet rays and ozone. If the object to be dried Q is dried in the cleanly cleaned chamber 112 (accommodating chambers 118 and 119), a coating film with stable quality can be formed. Note that since the chamber 112 (the storage chamber 119) is not heated, a cooling time is not required as compared with the case where the chamber 112 is heated.
(Fourth embodiment)

  Next, a fourth embodiment of the present invention will be described. The fourth embodiment is different from the first embodiment, the second embodiment, and the third embodiment in the configuration of the removing unit, and includes a heater in place of the infrared lamp, the plasma irradiation apparatus, or the ultraviolet irradiation apparatus. Is different. In addition, since a dryer is the structure substantially the same as the above-mentioned 1st Embodiment, 2nd Embodiment, and 3rd Embodiment, a different location is demonstrated easily.

  FIG. 15 is a schematic diagram illustrating the overall configuration of the dryer according to the present embodiment. FIG. 2A is a schematic plan view, and FIG. 2B is a schematic cross-sectional view.

  As shown in FIGS. 15A and 15B, the dryer 100 includes a drying unit 110 for drying the object to be dried Q, a removing unit 120 having a heater 124, and a moving device capable of transporting the chamber 112. 130 and an operation panel 140 for operating the dryer 100. The heater 124 is arranged on the outer periphery so as to surround the chamber 112.

  The heater 124 is connected to a heating power source (not shown), and can heat the chamber 112 (accommodating chamber 119) from the outside.

  FIG. 16 is a block diagram of a control system of the dryer 100. As shown in FIG. 16, the operation panel 140, the input / output device 141, and the control unit 142 are connected to the CPU 145 and the RAM 146 via the input / output interface 143 and the bus 144. The input / output device 141 is connected to the first decompression pump 102, the first pressure sensor 114, the moving device 130, the second decompression pump 103, the second pressure sensor 115, and the gas concentration sensor 116. A heater 124 and a thermocouple 129 are connected to the control unit 142.

  The configuration of the dryer 100 in the present embodiment is as described above, and a drying method for drying the object to be dried Q using the dryer 100 will be described.

  FIG. 17 is a schematic flowchart showing an operation procedure of the dryer 100. Steps S101 to S106 and steps S108, S110, and S111 are the same as steps S1 to S6 and steps S8, S10, and S11 of FIG. Here, steps S107 and S109 having different contents from the first embodiment will be described.

  As shown in step S <b> 107 of FIG. 17, energization of the heater 124 is turned on to heat the chamber 112. By heating the chamber 112, it is possible to decompose and remove the solvent and organic substances attached to the inner wall of the chamber 112. In addition, although heating temperature was set and implemented in the range of 100-150 degreeC, it does not stick to this, You may change suitably according to the kind of solvent, application quantity, etc. In addition, the thermocouple 129 is used to monitor and control the temperature in the chamber 112 (accommodating chamber 119) so as not to exceed the set range.

  As shown in step S109 of FIG. 17, the heater 124 is turned off and heating of the chamber 112 is stopped.

  Next, a method for detecting the gas concentration instead of the method for detecting the pressure in the chamber 112 (the storage chamber 119) will be described.

  FIG. 18 is a schematic flowchart showing an operation procedure of the dryer 100 when the gas concentration sensor 116 is used. Note that steps S121 to S127 and S130 to S132 are the same as steps S101 to S107 and S109 to S111 in FIG. Steps S128 and S129 will be described.

  As shown in step S128 of FIG. 18, the analysis of the exhaust gas composition exhausted from the chamber 112 (accommodating chamber 119) is started.

  Next, as shown in step S129 of FIG. 18, the gas concentration sensor 116 detects whether the gas concentration in the chamber 112 (accommodating chamber 119) has decreased to the set concentration. If the gas concentration does not drop to the set concentration, decompression and heating are continued. If the gas concentration falls to the set concentration, the process proceeds to the next step. The gas concentration sensor 116 uses, for example, a gas analyzer FT-IR.

  In the fourth embodiment as described above, the following effects are obtained.

  (12) When the inside of the chamber 112 (accommodating chamber 119) is heated from the outside by the heater 124, the solvent component and organic matter adhering to the inner wall of the chamber 112 can be thermally decomposed and removed, so that the inside of the chamber 112 (accommodating chamber 119) Can be cleaned cleanly. If the object to be dried Q is dried in the cleanly cleaned chamber 112 (accommodating chambers 118 and 119), a coating film with stable quality can be formed.

  The present invention has been described above with reference to preferred embodiments. However, the present invention is not limited to the above-described embodiments, and includes the following modifications and the scope in which the object of the present invention can be achieved. Thus, it can be set to any other specific structure and shape.

  (Modification 1) In the first embodiment or the fourth embodiment described above, the chamber 112 is heated and cleaned and then naturally cooled, but this is not restrictive. For example, a cooling device such as a chiller may be provided around the chamber 112. In this way, the chamber 112 can be positively cooled, so that it can be cooled in a shorter time, which is efficient.

  (Modification 2) Although the heater 124 is provided on the outer peripheral portion of the chamber 112 in the above-described fourth embodiment, the present invention is not limited to this. For example, you may install in the outer peripheral part of the chamber 112, and a ceiling part. In this way, the chamber 112 can be positively heated in a short time, so that the solvent and organic substances can be removed in a shorter time, which is efficient.

  (Modification 3) Although the method of forming the alignment films 60 and 70 has been described in the first embodiment, the present invention is not limited to this. For example, it can be used to form a film such as a photoresist film, an insulating film having an insulating property, and an optical film used in a color filter.

  (Modification 4) In the first to fourth embodiments described above, the pressure is detected in the first detection step, but the present invention is not limited to this. For example, the accumulated time, the number of processed sheets, etc. may be determined in advance, and the accumulated time, the number of processed sheets, etc., for drying the object to be dried may be detected. Even if it does in this way, since the cleaning in the chamber 112 (accommodating chamber 118) can be started, the effect similar to 1st Embodiment-4th Embodiment is acquired.

  (Modification 5) In the first to fourth embodiments described above, the pressure or gas concentration is detected in the second detection step, but the present invention is not limited to this. For example, the integration time may be determined in advance, and the integration time for drying the object to be dried may be detected. Even if it does in this way, since the cleaning in the chamber 112 (accommodating chamber 119) can be complete | finished, the effect similar to 1st Embodiment-4th Embodiment is acquired.

  (Modification 6) In the first to fourth embodiments described above, the chamber 112 (the storage chambers 118 and 119) has two configurations, but the present invention is not limited to this. For example, it is good also as one structure. Even if it does in this way, since the inside of the chamber 112 can be cleaned, the effect similar to 1st Embodiment-4th Embodiment is acquired, and stabilization of film | membrane quality can be aimed at.

  (Modification 7) In the first to fourth embodiments described above, the interior of the chamber 112 (accommodating chamber 119) is depressurized for cleaning, but the present invention is not limited to this. For example, the chamber 112 (the storage chamber 119) may be cleaned without reducing the pressure. Even if it does in this way, since the inside of the chamber 112 (accommodating room 119) can be cleaned, the effect similar to 1st Embodiment-4th Embodiment is acquired.

  (Modification 8) The dryer 100 used in the first to fourth embodiments described above is not limited to the liquid crystal display device 50. For example, an EL device, an electron emission device such as a field emission display (FED), a plasma display panel (PDP), an electrophoretic device, that is, a functional liquid containing charged particles. Is discharged into the recesses between the partition walls of each pixel, and a voltage is applied between the electrodes arranged to sandwich each pixel up and down to bring the charged particles to one electrode side, Various display devices having a step of forming a predetermined layer in a region above a substrate (base material) such as a display device, a thin cathode ray tube, a CRT (Cathode-Ray Tube) display, etc. It can be used for (electro-optical device).

  (Modification 9) The dryer 100 used in the first to fourth embodiments is not limited to the material to be dried Q. For example, it may be a solid that generates a solvent or the like when dried under reduced pressure. Even if it does in this way, since the drying and the removal of the solvent can be performed simultaneously, the application of the dryer 100 is wide.

  (Modification 10) The dryer 100 used in the first to fourth embodiments is not limited to the drying operation. For example, you may use for hardening of an adhesive agent and resin, hardening of a fluid, etc. Even if it does in this way, since the drying and the removal of the solvent can be performed simultaneously, the application of the dryer 100 is wide.

It is the schematic which shows the whole structure of the dryer in 1st Embodiment, (a) is a schematic plan view, (b) is a schematic sectional drawing. The block diagram of the control system of a dryer. The schematic flowchart which shows the operation | movement procedure of a dryer. The schematic flowchart which shows the operation | movement procedure of a dryer. Sectional drawing which shows the outline of a liquid crystal display device. 5 is a flowchart showing a method for manufacturing a liquid crystal display device. It is the schematic which shows the whole structure of the dryer in 2nd Embodiment, (a) is a schematic plan view, (b) is a schematic sectional drawing. The block diagram of the control system of a dryer. The schematic flowchart which shows the operation | movement procedure of a dryer. The schematic flowchart which shows the operation | movement procedure of a dryer. It is the schematic which shows the whole structure of the dryer in 3rd Embodiment, (a) is a schematic plan view, (b) is a schematic sectional drawing. The block diagram of the control system of a dryer. The schematic flowchart which shows the operation | movement procedure of a dryer. The schematic flowchart which shows the operation | movement procedure of a dryer. It is the schematic which shows the whole structure of the dryer in 4th Embodiment, (a) is a schematic plan view, (b) is a schematic sectional drawing. The block diagram of the control system of a dryer. The schematic flowchart which shows the operation | movement procedure of a dryer. The schematic flowchart which shows the operation | movement procedure of a dryer.

Explanation of symbols

DESCRIPTION OF SYMBOLS 50 ... Liquid crystal display device as a device, 100 ... Dryer, 102 ... 1st pressure reduction pump as a 1st pressure reduction part, 103 ... 2nd pressure reduction pump as a 2nd pressure reduction part, 110 ... Drying part, 112 ... Chamber, 114 ... 1st pressure sensor as 1st detection part, 115 ... 2nd pressure sensor as 2nd detection part, 116 ... Gas concentration sensor, 118 ... Storage chamber, 119 ... Storage chamber, 120 ... Removal part, 121 ... Infrared lamp 122 ... Plasma irradiation device, 123 ... UV irradiation device, 124 ... heater, 129 ... thermocouple, 130 ... substrate supply device, 140 ... operation panel, 141 ... input / output device, 142 ... control unit, 145 ... CPU, 146 ... RAM, P: substrate, Q: object to be dried.

Claims (18)

A drying machine for drying an object to be dried to which a functional liquid has been applied,
A storage chamber capable of storing the object to be dried;
A first decompression unit for decompressing the storage chamber in a first decompression process;
A drying section for drying the object to be dried;
A second decompression unit for decompressing the containing chamber in a second decompression process;
A removing unit for cleaning the storage chamber after drying the object to be dried;
A controller that controls the first decompression unit, the drying unit, the second decompression unit, and the removal unit;
The dryer characterized by having. The dryer according to claim 1,
The first decompression unit has a first detection unit,
The dryer, wherein the first detection unit includes at least one detection device among detection devices for detecting pressure, integration time, and number of processed sheets. The dryer according to claim 1,
The second decompression unit has a second detection unit,
The dryer, wherein the second detection unit includes at least one detection device among detection devices for detecting pressure, gas concentration, and integration time. In the dryer as described in any one of Claims 1-3,
A dryer comprising at least two storage chambers. In the dryer according to any one of claims 1 to 4,
A drying machine comprising an infrared lamp in the removing section. In the dryer according to any one of claims 1 to 4,
A dryer comprising a plasma irradiation device in the removing section. In the dryer according to any one of claims 1 to 4,
A dryer having an ultraviolet irradiation device in the removal section. In the dryer according to any one of claims 1 to 4,
A dryer having a heater in the removing section. In the dryer according to any one of claims 1 to 8,
The drying is characterized in that the control unit controls to start energization to the removal unit at least when the pressure in the storage chamber reaches an allowable value in the first pressure reducing process for reducing the pressure in the storage chamber. Machine. In the dryer according to any one of claims 1 to 8,
The control unit controls the energization of the removal unit to stop when at least one of the pressure and the gas concentration in the storage chamber reaches an allowable value in the second decompression process of decompressing the storage chamber. A dryer characterized by that. A method for drying an object to be dried to which a functional liquid is applied,
A drying step of storing the object to be dried in a storage chamber capable of accommodating the object, and depressurizing the chamber to dry the object to be dried;
A first detection step of detecting the degree of contamination in the storage chamber;
When the contamination level obtained in the first detection step reaches an allowable value, the step of cleaning the storage chamber by turning on the power of the removal unit;
A second detection step of detecting the cleanliness of the accommodation chamber in the energized state of the removal unit;
When the cleanliness obtained in the second detection step reaches an allowable value, turning off the energization of the removal unit and stopping the cleaning of the storage chamber;
A drying method comprising: The drying method according to claim 11,
In the first detection step, the drying method includes at least one of the detection methods among detection methods for detecting pressure, integration time, and number of processed sheets. The drying method according to claim 11,
In the second detection step, at least one of the detection methods for detecting pressure, gas concentration, and integration time is provided. In the drying method as described in any one of Claims 11-13,
In the cleaning step, the drying chamber is cleaned by heating with an infrared lamp. In the drying method as described in any one of Claims 11-13,
In the cleaning step, the storage chamber is cleaned by irradiating with plasma. In the drying method as described in any one of Claims 11-13,
In the cleaning step, the storage chamber is cleaned by irradiating with ultraviolet rays. In the drying method as described in any one of Claims 11-13,
In the cleaning step, the storage chamber is cleaned by heating with a heater. A device manufacturing method for forming pixels on a substrate by a droplet discharge method,
A device manufacturing method using the drying method according to any one of claims 11 to 17.

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