JP2008071726A - Organic EL sheet manufacturing equipment - Google Patents

Abstract

An object of the present invention is to provide an organic EL sheet manufacturing apparatus capable of coating and forming a material with a single apparatus when a polymer type organic EL sheet is manufactured.
A coating chamber 12, a connecting chamber 16, and a film forming chamber 14 are provided, a first winding roll 18 is provided in the coating chamber, a second winding roll 58 is provided in the film forming chamber 14, and sheets are wound around each other. By unwinding and rewinding, the organic EL material is applied in the coating chamber 12 and the organic EL material is formed in the film forming chamber 14 for continuous production.
[Selection] Figure 1

Description

  The present invention relates to an organic EL sheet manufacturing apparatus for manufacturing a polymer type organic EL sheet.

  The present applicant has previously proposed a coating apparatus suitable for coating an organic EL material (see, for example, Patent Document 1). With this coating apparatus, the organic EL material can be thinly coated on the film substrate.

By the way, as a method for producing a polymer type organic EL sheet, there is a roll-to-roll system. In this method, the light emitting layer is first applied in a nitrogen atmosphere, and then the cathode and the sealing film are formed in a vacuum atmosphere.
JP 2003-1171 A

  In the roll-to-roll manufacturing method as described above, in order to change from a nitrogen atmosphere to a vacuum atmosphere, it is necessary to once take out and transfer the film base material on which each material has been applied or formed into the air. If the film substrate is exposed to the air during the transfer, the organic film is damaged by the influence of humidity and oxygen in the air, and the performance of the organic EL deteriorates.

  Therefore, in view of the above problems, the present invention provides an organic EL sheet manufacturing apparatus capable of coating and forming a material with a single apparatus when manufacturing a polymer type organic EL sheet.

  The present invention relates to an organic EL sheet manufacturing apparatus for manufacturing a polymer type organic EL sheet by coating and forming a plurality of materials for forming a polymer type organic EL on a sheet-like film substrate. A film forming chamber connected to the coating chamber, a first winding roll for winding the film substrate provided in the coating chamber, and a coating apparatus provided in the coating chamber. A second winding roll for winding the film substrate provided in the film forming chamber, a film forming apparatus provided in the film forming chamber, and the coating chamber and the film forming chamber. Or an internal pressure adjusting device for making a vacuum atmosphere, and maintaining the film substrate in a state where the first winding roll and the first winding roll are connected to each other on the film substrate. When applying the material, the internal pressure adjusting device and the coating chamber After bringing the film chamber to atmospheric pressure, the film base material is unwound from the first winding roll, the material is applied by the coating apparatus, and the material is carried into the film forming chamber, and the second winding roll. When winding up and forming a film on the film substrate, the film substrate is wound from the second winding roll after the coating chamber and the film forming chamber are placed in a vacuum atmosphere by the internal pressure adjusting device. The organic EL sheet manufacturing apparatus is characterized in that the material is deposited by the film deposition apparatus, carried into the coating chamber, and taken up by the first winding roll.

  According to the present invention, the polymer organic EL material can be applied and formed into a film by alternately exchanging the film substrate between the first winding roll and the second winding roll.

  Hereinafter, an organic EL sheet manufacturing apparatus (hereinafter simply referred to as a manufacturing apparatus) 10 according to an embodiment of the present invention will be described with reference to FIGS.

(1) Configuration of Organic EL Sheet 1 Before describing the manufacturing apparatus 10, the organic EL sheet 1 manufactured by the manufacturing apparatus 10 will be described with reference to FIG.

  As shown in FIG. 2, in this organic EL sheet 1, a barrier layer 3 is laminated on a synthetic resin film substrate 2, and ITO 4 as a transparent electrode is laminated thereon. A hole injection layer 5 is laminated thereon, an organic EL light emitting layer 6 is laminated thereon, and a cathode 7 is laminated thereon. Finally, a sealing film 8 is provided in order to block the hole injection layer 5, the organic EL light emitting layer 6, and the cathode 7 from the outside so as to be in an airtight state. Among them, the barrier layer 3, the ITO 4, the cathode 7, and the sealing film 8 are formed by laminating and stacking each material in a vacuum atmosphere. The hole injection layer 5 and the organic EL light emitting layer 6 are: Each material is applied in a nitrogen atmosphere under atmospheric pressure.

  Hereinafter, the manufacturing apparatus 10 for coating and forming these materials on the film substrate 2 will be described.

(2) Configuration of Manufacturing Device 10 The configuration of the manufacturing device 10 will be described with reference to FIG.

  The manufacturing apparatus 10 includes a coating chamber 12, a film forming chamber 14, and a connecting chamber 16 that connects the coating chamber 12 and the film forming chamber 14, and the interior of each chamber is integrated and airtight. ing. A pump 60 and a gas refining / circulating device 70 are provided to make the inside of the coating chamber 12, the film forming chamber 14, and the connection chamber 16 into an inert gas atmosphere such as nitrogen gas or a vacuum atmosphere under atmospheric pressure.

  Hereinafter, the structure is demonstrated along the conveyance path of the film base material 2. FIG.

  Inside the coating chamber 12, a first winding roll 18 around which the film substrate 2 is wound is disposed, and a backup roll 24 is disposed through guide rolls 20 and 22. Below the backup roll 24, a coating apparatus 100, which will be described in detail later, is disposed.

  The film substrate 2 passes from the backup roll 24 through the guide roll 26, and a heating roll 28 is disposed. From the heating roll 28, the film base material 2 is carried into the connection chamber 16 from the ceiling surface of the coating chamber 12 through four guide rolls.

  The connection chamber 16 extends in the horizontal direction, and five guide rolls 38 are sequentially provided therein. After guiding the film base 2 from the left end to the right end in FIG. The film base 2 is carried into the film forming chamber 14.

  The film substrate 2 carried into the film forming chamber 14 reaches the cooling roll 46 through the guide rolls 40, 42 and 44. On the left side, lower side, and right side of the cooling roll 46, film forming apparatuses 48, 50, and 52 are provided, respectively.

  The film base 2 is wound around the second winding roll 58 from the cooling roll 46 through the guide rolls 54 and 56.

  In the following description, the direction in which the film substrate 2 travels from the first winding roll 18 to the second winding roll 58 as described above is referred to as a forward direction, and the traveling from the second winding roll 58 to the second winding roll 18 is performed. The direction to do is called the reverse direction.

  The gas purification circulator 70 is an apparatus for maintaining the inert gas atmosphere when the coating chamber 12, the film forming chamber 14, and the connection chamber 16 are in an inert gas atmosphere. The inside of the film formation chamber 14 and the connection chamber 16 is maintained in a low humidity and low oxygen state. Further, the evaporated gas generated during the coating and drying of the hole injection layer and the light emitting layer is removed.

(3) Configuration of Film Forming Apparatus 48, 50, 52 Next, the structure of the film forming apparatus 48, 50, 52 will be described.

  The film forming apparatus 48 is a sputtering apparatus, the cooling roll 46 is set to the cathode side, the film forming apparatus 48 is set to the plus side (for example, +150 to 200 V), ions are emitted toward the target, and the surface of the cooling roll 46 is set. Film formation is performed on the film substrate 2 being conveyed.

  The film forming apparatus 52 is also a sputtering apparatus like the film forming apparatus 48.

  The film forming apparatus 50 is a vacuum vapor deposition apparatus, and heats and vaporizes the material in the space 51 to vapor deposit the material on the film substrate 2.

(4) Coating device 100
Next, the capillary type coating apparatus 100 will be described.

(4-1) Configuration of Coating Device 100 FIG. 3 is a configuration diagram of the coating device 100.

  Below the backup roll 24, a coating nozzle 114 for coating the coating liquid on the lower surface of the film substrate 2 is disposed. The coating nozzle 114 has a beak-shaped upper portion, and a capillary gap 116 is provided along the left-right direction. The upper end of the capillary gap 116 serves as a coating liquid discharge port 118. Yes. In addition, a liquid reservoir 119 that is a space for evenly distributing the supplied coating liquid in the left-right direction is provided at the lower end of the capillary gap 116.

  The coating nozzle 114 can be moved up and down by a vertical movement device 120 including an air cylinder or a motor disposed below the coating nozzle 114 (from a dotted line state to a solid line state in FIG. 3).

  A coating tank 122 for supplying a coating liquid is provided outside the coating nozzle 114. That is, a screw rod 126 is rotatably arranged in a vertical direction on the support portion 124 fixed to the wall of the coating nozzle 114, and a rack 128 is provided on the screw rod 126. The coating tank 122 is attached to the rack 128. The screw rod 126 is rotatable by a motor 130 with a speed reducer. When the motor 130 is rotated, the screw rod 126 rotates, and at the same time, the rack 128, that is, the coating tank 122 moves up and down with respect to the coating nozzle 114. Move. Moreover, since the support part 124 is being fixed to the coating nozzle 114, when the coating nozzle 114 moves up and down by the vertical movement apparatus 120, the coating tank 122 will also move up and down with it.

  The coating tank 122 stores a coating liquid, and an upper portion thereof is open and is open to the atmosphere.

  A supply pipe 134 for supplying the coating liquid from the bottom surface of the coating tank 122 toward the side surface of the coating nozzle 114 is provided. The coating liquid supplied from the supply pipe 134 reaches the liquid reservoir 119.

  A non-contact (for example, optical) liquid level sensor 132 protrudes from the upper portion of the support portion 124. The liquid level sensor 132 detects the liquid level of the coating liquid accumulated in the coating tank 122.

A replenishment tank 136 for supplying the coating liquid to the coating tank 122 is provided. A refill pipe 138 extends from the refill tank 136 toward the upper part of the coating tank 122. The replenishment pipe 138 is provided with a filter (not shown) and a solenoid valve 139. The replenishing tank 136 is hermetically sealed, and the coating liquid is supplied to the replenishing pipe 138 by an inert gas (for example, inert gas or nitrogen gas (N ₂ )) sent from the pressure feeding device 140 such as a compressor. Then, by operating the electromagnetic valve 139, a certain amount of coating liquid is supplied to the coating tank 122. Here, the inert gas is sent for explosion prevention, but other gases such as air may be used when explosion prevention is not aimed.

  In order to control the coating apparatus 100, a control unit 142 composed of a microcomputer is provided. The control unit 142 is connected to a motor 131 that moves the backup roll 24, a vertical movement device 120, a motor 130 that moves the coating tank 122 up and down, a liquid level sensor 132, an electromagnetic valve 139, and a pressure feeding device 140.

  The control unit 142 detects the liquid level of the coating liquid by the liquid level sensor 132, drives the motor 130 based on the detected data, and moves the coating tank 122 up and down, and the coating tank Feedback control is performed so that the liquid level in 122 becomes a predetermined set value described below.

  In addition, when the coating liquid is reduced by the coating and the liquid level detected by the liquid level sensor 132 is lower than the reference value, the control unit 142 operates the pressure feeding device 140 to increase the pressure by the inert gas. The coating liquid is sent from the replenishing tank 136 through the replenishing pipe 138, and a predetermined amount is replenished by operating the electromagnetic valve 139, so that the coating liquid exceeding the reference value is always stored in the coating tank 122. Let As a result, it is possible to minimize the coating liquid discarded as in the prior art.

(4-2) Coating method Using the coating apparatus 100 having the above-described configuration, the coating method for coating the coating liquid on the lower surface of the film substrate 2 is performed in order based on FIGS. 4 (1) to (4). I will explain to you.

(4-2-1) First step (see FIG. 4 (1))
In the initial state, the film base 2 is conveyed by the backup roll 24, and the coating nozzle 114 is in a standby state below it.

(4-2-2) Second step (see FIG. 4 (2))
The coating nozzle 114 is raised by the vertical movement device 120, and the discharge port 118 is stopped near the lower surface of the film substrate 2 at the coating start position.

  In this case, the coating tank 122 rises together with the coating nozzle 114, but not only the amount of the rise, but also the liquid level height of the coating liquid stored in the coating tank 122 using the motor 130, It sets so that it may become the position (namely, discharge port) of the upper end part in the capillary gap 116 of the coating nozzle 114. FIG. In this setting, as shown in FIG. 3, it is considered that the liquid height of the capillary gap 116 is higher than the liquid height stored in the coating tank 122 by h1. The reason why there is a difference in height of h1 is that the coating liquid rises to the upper end of the coating nozzle 114 in the capillary gap 116 due to a capillary phenomenon. Hereinafter, the liquid level in the coating tank 122 is referred to as a standby height setting value.

(4-2-3) Third step (see FIG. 4 (3))
While detecting the liquid level sensor 132, the coating tank 122 is raised with respect to the coating nozzle 114 by the motor 130, the liquid level in the coating tank 122 is raised above the standby height setting value, and the discharge port From 118, the coating solution is brought into contact with the lower surface of the film substrate 2. Hereinafter, the liquid level in the coating tank 122 is referred to as a liquid contact height setting value.

  As a result, the liquid contact can be performed quickly and reliably.

  In order to make the liquid contact more reliably, the height of the coating nozzle 114 may be slightly increased by the vertical movement device 120.

(4-2-4) Fourth step (see FIG. 4 (4))
The height of the coating tank 122 is finely adjusted by the motor 130 while the coating liquid is in contact with the lower surface of the film substrate 2, and the coating tank 122 is filled with the desired coating thickness. The liquid level is set (hereinafter, this height is referred to as a coating height setting value). While the coating height set value is detected by the liquid level sensor 132 and maintained by feedback control, the coating roll is applied to the lower surface of the film base 2 and the backup roll 24 is rotated to rotate the film base. The material 2 is conveyed. As a result, the coating liquid is applied to the lower surface of the film substrate 2.

(4-2-5) Fifth step (see FIG. 4 (2))
When coating is completed up to the coating end position of the film base 2, the height of the coating tank 122 is lowered by the motor 130 while being detected by the liquid level sensor 132, and the liquid level in the coating tank 122 is separated. The coating liquid is lowered from the lower surface of the film substrate 2 by lowering the liquid height to the set value and sucking the coating liquid from the discharge port 118. This liquid separation height setting value is a value lower than the liquid contact height setting value and the coating height setting value, and may be the same height as the standby height setting value.

  Thereby, the coating can be finished at the target position, and the width of the unstable region of the film thickness can be narrowed.

  In this case, the coating nozzle 114 may be slightly lowered in order to further promote liquid separation.

  As described above, by controlling the liquid surface height in the coating tank 122, the unstable region of the film thickness at the start and end of coating can be narrowed and coating can be performed reliably.

(4-3) Retraction Configuration The entire coating nozzle 114 in the coating apparatus 100 can be retracted from the coating chamber 12 together with the coating tank 122 by the vertical movement device 120. That is, the part of the coating apparatus 100 other than the backup roll 24 is moved downward by the vertical movement device 120 and is stored in the retreat chamber 62 outside the coating chamber 12. The escape chamber 62 and the inside of the coating chamber 12 are shielded by a partition wall 64.

(5) Manufacturing Method of Organic EL Sheet 1 Next, a manufacturing method of the organic EL sheet 1 will be described.

  In addition, the manufacturing sheet in which the barrier layer 3 and the ITO 4 are laminated on the film substrate 2 is used. This in-production sheet refers to a sheet that is being coated with a material on the film substrate 2 or is being formed.

  First, the sheet being manufactured is wound around the first winding roll 18. Then, the manufacturing sheet is passed along the conveyance path in order from the guide roll 20, and the starting end is wound up by the second winding roll 58. Thus, the sheet during manufacture connects the first winding roll 18 and the second winding roll 58 to each other.

  Next, the coating chamber 12, the connecting chamber 16, and the film forming chamber 14 are brought to atmospheric pressure in an inert gas atmosphere with a pump 60.

  Next, the sheet during manufacture is conveyed in the forward direction at a predetermined traveling speed, and the material of the hole injection layer 5 made of water-soluble is applied by the coating apparatus 100 when passing through the backup roll 24. And when the coated part passes the heating roll heated at 60 degreeC-80 degreeC, this material dries and coating is completed. The in-manufactured sheet that has been coated is carried into the film forming chamber 14 through the connection chamber 16, and is wound around the second winding roll 58 through the water-cooled cooling roll 46 cooled to 10 ° C. to 30 ° C.

  Next, when all the coating is completed, the manufacturing sheet wound around the second winding roll 58 is rewound onto the first winding roll 18 in the reverse direction. In this case, the connection state is maintained between the first winding roll 18 and the second winding roll 58 without coating to the end.

  Next, in the same manner as described above, the manufacturing sheet coated with the hole injection layer 5 is caused to travel in the forward direction, and the material of the organic EL light emitting layer 6 made of an organic solvent is applied by the coating apparatus 100. .

  Next, the in-manufacturing sheet coated with the hole injection layer 5 and the organic EL light emitting layer 6 is wound around the second winding roll 58. However, the connected state is maintained between the first winding roll 18 and the second winding roll 58.

  Next, the coating apparatus 100 is retracted to the retracting chamber 62.

  Next, in order to form the cathode 7 and the sealing film 8, the coating chamber 12, the deposition chamber 14, and the connection chamber 16 are brought into a vacuum atmosphere from the inert gas atmosphere by the pump 60.

  Next, the manufacturing sheet wound around the second winding roll 58 is unwound and traveled in the reverse direction, and the cathode 7 and the sealing film 8 are formed using two film forming apparatuses among the film forming apparatuses 48 to 52. Are continuously formed. For example, the cathode 7 is vacuum-deposited by the film forming apparatus 50, and the sealing film 8 is sputtered by the film forming apparatus 48.

  Next, the organic EL sheet 1 is completed by winding these formed sheets in production through the connection chamber 16 and the coating chamber 12 with the first winding roll 18.

(6) Effect Since it is the manufacturing apparatus 10 of this embodiment, since the film base material 2 is never carried out in the air, an organic film is not damaged by the influence of humidity and oxygen in the air.

  In the connected state, the organic EL sheet 1 can be continuously produced simply by unwinding and winding up each other between the first winding roll 18 and the second winding roll 58.

  By coating using the capillary phenomenon by the coating apparatus 100, an expensive light-emitting material can be applied thinly and uniformly over a large area without waste.

  Since the coating apparatus 100 is retracted to the retreat chamber 62 when forming a film in a vacuum atmosphere, the coating liquid is prevented from evaporating in vacuum, and the organic solvent that is the coating liquid is dried to form a coating nozzle. The organic film sticks to 114 and cleaning is not impossible. Further, the degree of vacuum does not decrease due to evaporation of these organic solvents.

(7) Modifications The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the invention.

(7-1) Modification 1
In the above-described embodiment, the film base 2 previously laminated with the barrier layer 3 and the ITO 4 is used. However, the present invention is not limited to this, and the barrier layer 3 and the ITO 4 are formed using the film forming apparatuses 48, 50, and 52. A film may be formed.

(7-2) Modification 2
In the above embodiment, the cathode 7 and the sealing film 8 are continuously formed. However, the present invention is not limited to this, and the film may be formed once.

  That is, after the cathode 7 is formed by the film forming apparatus 48, the film is wound around the first winding roll 18. Then, the sheet being manufactured is again unwound from the first winding roll 18 in the forward direction, the sealing film 8 is formed by the film forming apparatus 52, and is wound by the second winding roll 58.

(7-3) Modification 3
In the above embodiment, different film formation was performed in one film formation chamber 14, but two film formation chambers 14 were provided as shown in FIG. May be.

(7-4) Modification 4
In the above embodiment, the coating chamber 12 and the film forming chamber 14 are connected by the connecting chamber 16, but instead of this, a partition wall 64 may be provided inside one chamber, and the coating chamber 12 and the film forming chamber 14 may be provided. Good.

(7-5) Modification 5
In the present invention, as an organic EL sheet other than that in the above embodiment, for example, the following structure can be manufactured by the manufacturing apparatus 10 in the above embodiment.

  An organic EL sheet in which an electron injection layer is inserted between the light emitting layer and the cathode.

  An organic EL sheet with a multilayered cathode.

  An organic EL sheet having a multilayer sealing film.

  An organic EL sheet for producing a sealing film by a multilayer film in a coating process and a vacuum film forming process.

  An organic EL sheet having a structure reverse to that of a barrier film, a cathode, a light emitting layer, a hole injection layer, an anode, and a sealing film on a film substrate.

  An organic EL sheet in which the film substrate 2 is a metal foil for improving barrier properties.

  An organic EL sheet in which the light extraction direction is not the film side but the cathode side (transparent cathode).

  An organic EL sheet in which a film with a barrier is laminated instead of a sealing film.

(7-6) Modification 6
In addition to the organic EL sheet, the following sheet-like material can be produced.

  This is a case where the sealing film and the barrier film are formed of a multilayer film of an organic material and an inorganic material. An organic substance is formed by a coating process, and an inorganic substance is formed by vacuum film formation.

  Even in this case. By the manufacturing apparatus 10 of the above embodiment, the coating process and the vacuum film forming process can be sequentially repeated for the organic substance and the inorganic substance.

(7-7) Modification 7
In addition to the organic EL sheet, the following sheet-like material can be produced.

  It can also be applied to optical film products such as antireflection films. For example, these products may be multilayer films, and can be manufactured by the manufacturing apparatus 10 of the above-described embodiment when they are stacked by a coating process and a vacuum film forming process.

The vacuum film forming process and the coating process can also be repeated sequentially.

(7-8) Modification Example 8
In addition to the organic EL sheet, the following sheet-like material can be produced.

  A flexible solar cell using a film substrate or the like can also be manufactured. For example, when laminating by a coating process and a vacuum film forming process, it can be manufactured by the manufacturing apparatus 10 of the above embodiment.

(7-9) Modification 9
The coating apparatus 100 may be a capillary-type coating apparatus using an overflow tank described in JP-A-2001-321709.

  Further, a lip coater, a die coater, a vacuum type coating apparatus as shown in Japanese Patent Application No. 2006-239248, a gravure coater, or an ink jet coater may be used.

(7-10) Modification 10
The film forming apparatuses 48 to 52 may be ion plating or CVD apparatuses.

It is a longitudinal cross-sectional view of the organic electroluminescent sheet manufacturing apparatus which shows one Embodiment of this invention. It is a longitudinal cross-sectional view of an organic EL sheet. It is explanatory drawing of a coating apparatus. It is explanatory drawing in the case of coating a coating liquid with a coating nozzle. It is explanatory drawing of the coating apparatus of the example 4 of a change. It is explanatory drawing of the manufacturing apparatus of the example 5 of a change.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Organic EL sheet 2 Film base material 10 Manufacturing apparatus 12 Coating room 14 Deposition room 16 Connection room 18 1st roll 24 Backup roll 48 Deposition apparatus 50 Deposition apparatus 52 Deposition apparatus 58 Second roll 60 Pump 62 Evacuation chamber 100 Coating device

Claims (8)

In an organic EL sheet manufacturing apparatus for manufacturing a polymer type organic EL sheet by coating and forming a plurality of materials for forming a polymer type organic EL on a sheet-like film substrate,
A coating room,
A film forming chamber connected to the coating chamber;
A first winding roll for winding the film substrate provided in the coating chamber;
A coating device provided in the coating chamber;
A second winding roll for winding the film substrate provided in the film forming chamber;
A film forming apparatus provided in the film forming chamber;
An internal pressure adjusting device that brings the coating chamber and the film forming chamber to atmospheric pressure or a vacuum atmosphere;
Have
Maintaining the film substrate in a state of being connected between the first winding roll and the first winding roll;
When the material is applied onto the film base, the film base is unwound from the first winding roll after the internal pressure adjusting device brings the coating chamber and the film forming chamber to atmospheric pressure. Coating the material with the coating device, carrying it into the film forming chamber and winding it with the second winding roll,
When forming a film on the film substrate, the film base is unwound from the second winding roll after the coating chamber and the film formation chamber are placed in a vacuum atmosphere by the internal pressure adjusting device. The organic EL sheet manufacturing apparatus, wherein the material is formed into a film by a film forming apparatus, carried into the coating chamber, and taken up by the first winding roll. The organic EL sheet manufacturing apparatus according to claim 1, further comprising a retracting device configured to retract the coating apparatus from the coating chamber when forming a film on the film base material. When a film different from the film-formed material is continuously formed on the film substrate, the first chamber is placed in a vacuum atmosphere by the internal pressure adjusting device, and then the first chamber is formed. The said film base material is unwound from a winding roll, and it carries in into the said film-forming chamber, forms the said different material into a film with the said film-forming apparatus, and winds up with the said 2nd winding roll. Organic EL sheet manufacturing equipment. 2. The organic EL sheet manufacturing method according to claim 1, wherein two film forming apparatuses are arranged in order on a conveyance path in the film forming chamber, and two kinds of materials can be formed on the film base material in succession. apparatus. The organic EL sheet manufacturing apparatus according to claim 1, wherein the coating chamber has a heating roll that dries while transporting the film base material coated with the material. The organic EL sheet manufacturing apparatus according to claim 1, wherein the film forming chamber includes a cooling roll that cools the film base material while transporting the film base material during the film formation. The organic EL sheet manufacturing apparatus according to claim 1, wherein the film forming apparatus is a sputtering apparatus or a vacuum deposition apparatus. The coating apparatus is
A backup roll for conveying the film substrate in the front-rear direction;
A coating nozzle that is arranged below the backup roll, and has a capillary gap, and the upper end of the coating nozzle extends in the left-right direction as a discharge port for the coating liquid;
The coating liquid is stored in a bear that is open to the atmosphere, and the coating liquid supply means is connected to the coating nozzle and can supply the coating liquid to the coating nozzle;
With
The coating liquid supplied to the coating nozzle from the coating liquid supply means is applied by capillary action from the discharge port of the coating nozzle to the lower surface of the film substrate. The organic electroluminescent sheet manufacturing apparatus of description.

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