JP2008221132A - Thin film forming method, droplet discharge device, and liquid crystal display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin film deposition method which causes no stripe-shaped level differences in film thickness of thin films which are deposited by discharging liquid droplets, and also provide a liquid droplet-discharging device and a liquid crystal display device. <P>SOLUTION: In the liquid droplet-discharging device, a first discharging head is arranged to overlap with a second discharging head when they are viewed from the main scanning direction, and a third discharging head 16C is arranged on a superposing route OA in which the scanning route of the first discharging head overlap with the scanning route of the second discharging head. Then, a difference value between a discharging amount which the first discharging head gives to a first liquid film FLF and a discharging amount which the second discharging head gives to a second liquid film FLL is made to be a discharging amount that the third discharging head 16 C gives to a third liquid film FLC. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a thin film forming method, a droplet discharge device, and a liquid crystal display device.

In a liquid crystal display device, an alignment film subjected to an alignment process is used to define the alignment direction of liquid crystal molecules. As a method for manufacturing this alignment film, an ink jet method using a droplet discharge device has been intensively developed in order to improve productivity and reduce manufacturing costs.

The droplet discharge device includes a nozzle that discharges a liquid material including an alignment film material as droplets, and a discharge head that has a plurality of nozzles and moves relative to the substrate. The discharge head and the substrate are mainly used. Droplets are ejected to the selected nozzle while being relatively moved along the scanning direction. Then, a liquid film containing an alignment film material is drawn in order along the main scanning direction of the substrate, and the alignment film is formed by drying the liquid film.

In the droplet discharge device, when the size of the alignment film becomes larger than the scan width of the discharge head, the substrate and the discharge head are relatively moved along the sub-scanning direction intersecting the main scanning direction, and the discharge head and the substrate are again moved to the main direction. Relative movement is made along the scanning direction, that is, the ejection head is scanned for line feed.
In this line feed scanning, as the size of the substrate increases, the number of scans of the ejection head increases. Therefore, in the case of a large liquid crystal display device, it takes a long time to form an alignment film. There is a risk of significantly impairing productivity.

Therefore, conventionally, in the droplet discharge device, proposals have been made to improve productivity by avoiding line feed scanning of the discharge head. In Patent Literature 1 and Patent Literature 2, a plurality of ejection heads are arranged along the sub-scanning direction that intersects the main scanning direction, respectively, and droplets are ejected at once over the entire width of the substrate in the sub-scanning direction. In Patent Document 3, a plurality of first ejection heads are arranged along the sub-scanning direction, and a plurality of second ejection heads are arranged along the sub-scanning direction. Then, ink is ejected from the first ejection head, and a treatment liquid that insolubilizes or aggregates the color material in the ink is ejected from the second ejection head. According to these, it is possible to discharge a droplet in a desired state over the entire surface of the object without performing a line feed scan of the discharge head.
JP 2004-255335 A JP 2005-95835 A JP 2006-137113 A

However, in Patent Documents 1 to 3, since a plurality of different ejection heads are arranged in the sub-scanning direction, if there is an individual difference in the ejection amount for each ejection head, alignment films having different film thicknesses in the main scanning direction. It is formed over the entire width. As a result, a streak-like film thickness step continuous in the main scanning direction is formed in a region facing the boundary between adjacent ejection heads on the surface of the substrate.

The present invention has been made in order to solve the above-described problems, and an object of the present invention is to provide a thin film formation method, a droplet discharge device, and a thin film formation method that eliminates a streaky film thickness step of a thin film formed by discharging a droplet. A liquid crystal display device is provided.

In the thin film forming method of the present invention, a substrate and a discharge head unit that discharges droplets are relatively moved in a scanning direction to form a liquid film composed of the droplets on the substrate, and the liquid film is dried. A thin film forming method for forming a thin film, wherein one side of a first ejection head having a plurality of first nozzles arranged in one direction intersecting the scanning direction, and a plurality of second nozzles arranged in the one direction A third ejection head having a plurality of third nozzles arranged in a direction intersecting the scanning direction, the second ejection head having a second ejection head having a plurality of third nozzles arranged in a direction intersecting with the scanning direction. The head and the second discharge head are arranged in the scanning direction of the overlapping region, and the difference value between the discharge amount of the first discharge head and the discharge amount of the second discharge head is set as the discharge amount of the third discharge head. To do.

According to the thin film forming method of the present invention, the difference value between the discharge amount of the first discharge head and the discharge amount of the second discharge head is compensated by the third discharge head. Therefore, the film thickness difference between the thin film formed by the first discharge head and the thin film formed by the second discharge head can be flattened by the third discharge head. As a result, even if each discharge head has a different discharge amount, the streaky film thickness step caused by the individual difference can be eliminated.

In this thin film forming method, it is preferable that the third ejection head is arranged in the scanning direction in a region where the first ejection head and the second ejection head overlap to move the substrate in the scanning direction.

According to this thin film forming method, after the first discharge head forms a liquid film and the second discharge head forms the liquid film, the third discharge head drops droplets on the boundary between these liquid films. Discharge. Therefore, a droplet corresponding to the difference value, that is, a liquid material with a small discharge amount can be landed on the liquid film formed in advance. When a droplet with a low discharge amount lands directly on the substrate, drying starts instantaneously and streaks are formed along the scanning direction. Therefore, the liquid films can be smoothly united as much as the third ejection head lands droplets on the liquid film, and the film thickness step can be eliminated more reliably.

In addition, the liquid droplets corresponding to the difference value can be combined with both the liquid film formed by the first discharge head and the liquid film formed by the second discharge head. As a result, the streaky film thickness level difference caused by the individual difference can be more reliably eliminated.

In this thin film forming method, the plurality of third nozzles are arranged in another direction intersecting the scanning direction, and an angle formed between the other direction and the scanning direction is determined by an angle formed between the one direction and the scanning direction. Alternatively, the configuration may be reduced.

According to this thin film forming method, the resolution of the droplets ejected from the third ejection head can be improved by the amount that the arrangement direction of the third nozzles is brought closer to the scanning direction. Therefore, the streaky film thickness level difference caused by the individual difference of each ejection head can be eliminated with higher accuracy.

In this thin film forming method, the third discharge head discharges droplets that are smaller than the droplets discharged by the first discharge head and smaller than the droplets discharged by the second discharge head. It is preferable that the difference value between the discharge amount of the first discharge head and the discharge amount of the second discharge head be the discharge amount of the third discharge head.

According to this thin film forming method, the liquid droplets ejected from the third ejection head are united with the liquid film with less energy as much as the size is reduced. Therefore, the liquid film formed by the first discharge head and the liquid film formed by the second discharge head can be planarized in a shorter time. As a result, the streaky film thickness level difference caused by the individual difference can be reliably eliminated with higher accuracy.

The droplet discharge device of the present invention includes: a discharge head unit that discharges droplets; a scanning unit that relatively moves the discharge head unit and the substrate along a scanning direction; and the discharge head unit and the scanning unit. And a control unit for driving and controlling the discharge head unit to discharge liquid droplets onto the substrate, wherein the discharge head unit is arranged in one direction intersecting the scanning direction. A first ejection head having a plurality of first nozzles, a second ejection head having a plurality of second nozzles arranged in the one direction, and a plurality of third nozzles arranged in a direction crossing the scanning direction. A third ejection head, and arranged so that one side of the first ejection head and the other side of the second ejection head overlap each other when viewed from the scanning direction, and the first ejection head The third ejection head is arranged in the scanning direction of the region where the second ejection head overlaps, and the control means calculates a difference value between the ejection amount of the first ejection head and the ejection amount of the second ejection head. The discharge amount of the third discharge head is set.

According to the droplet discharge device of the present invention, the difference value between the discharge amount of the first discharge head and the discharge amount of the second discharge head is compensated by the third discharge head. Therefore, the film thickness difference between the thin film formed by the first discharge head and the thin film formed by the second discharge head can be flattened by the third discharge head. As a result, even if each discharge head has a different discharge amount, the streaky film thickness step caused by the individual difference can be eliminated.

In the liquid droplet ejection apparatus, the scanning unit moves the substrate in the scanning direction, and the third ejection head is disposed in the scanning direction in a region where the first ejection head and the second ejection head overlap. The configuration is preferred.

According to this droplet discharge device, the third discharge head discharges droplets toward the boundary between the liquid film formed by the first discharge head and the liquid film formed by the second discharge head. Therefore, a droplet corresponding to the difference value, that is, a liquid material with a small discharge amount can be landed on the liquid film formed in advance. When a droplet with a low discharge amount lands on the substrate, drying starts instantaneously and streaks are formed along the scanning direction. Therefore, the film thickness level difference can be more reliably eliminated by the amount that the liquid droplets ejected from the third ejection head land on the liquid film.

In addition, the liquid droplets corresponding to the difference value can be combined with both the liquid film formed by the first discharge head and the liquid film formed by the second discharge head. As a result, the streaky film thickness level difference caused by the individual difference can be more reliably eliminated.

In the droplet discharge device, the plurality of third nozzles are arranged in another direction intersecting the scanning direction, and an angle formed between the other direction and the scanning direction is an angle between the one direction and the scanning direction. The structure may be smaller than the angle formed.

According to this droplet discharge device, the resolution of the droplets discharged from the third discharge head can be improved by the amount that the arrangement direction of the third nozzles is closer to the scanning direction. Therefore, the streaky film thickness level difference caused by the individual difference of each ejection head can be eliminated with higher accuracy.

In this droplet discharge device,
The third ejection head may be configured to eject droplets that are smaller than the droplets ejected by the first ejection head and smaller than the droplets ejected by the second ejection head.

According to this droplet discharge device, the droplets discharged from the third discharge head are united with the liquid film under a smaller amount of energy as much as the size is reduced. Therefore, the liquid film formed by the first discharge head and the liquid film formed by the second discharge head can be planarized in a shorter time. As a result, the streaky film thickness level difference caused by the individual difference can be reliably eliminated with higher accuracy.

In this droplet discharge device, the control unit supplies a first drive signal to each of the first discharge head and the second discharge head to discharge the droplets, and from the droplets discharged by the first discharge head The second drive signal may be supplied to the third ejection head for ejecting droplets that are smaller and smaller in size than the droplets ejected by the second ejection head.

According to this droplet discharge device, the first and second discharge heads discharge droplets in response to the first drive signal, respectively, and the third discharge head in response to the second drive signal A droplet having a size smaller than the droplet discharged from the two discharge heads is discharged. Accordingly, the liquid droplets ejected from the third ejection head are united with the liquid film with less energy by the size of the liquid droplets. Therefore, the liquid film formed by the first discharge head and the liquid film formed by the second discharge head can be planarized in a shorter time. As a result, the streaky film thickness level difference caused by the individual difference can be reliably eliminated with higher accuracy.

The liquid crystal display device of the present invention is a liquid crystal display device in which a thin film is provided on a substrate enclosing liquid crystal molecules, and the thin film is formed using the droplet discharge device.
According to the liquid crystal display device of the present invention, streaky film thickness steps can be eliminated in the thin film of the liquid crystal display device, and as a result, the display image quality of the liquid crystal display device can be improved.

Hereinafter, an embodiment embodying the present invention will be described with reference to FIGS. FIG. 1 is a perspective view showing a droplet discharge device 10.
In FIG. 1, a droplet discharge device 10 has a base 11 formed in a rectangular parallelepiped shape. On the upper surface of the base 11, a stage 12 that is drivingly connected to an output shaft of a stage motor provided on the base 11 is attached. The stage 12 places and fixes the substrate S, and when the stage motor rotates normally or reversely, the stage 12 reciprocates at a predetermined speed along the long axis direction of the base 11 to scan the substrate S.

Here, the direction from the lower right to the upper left in FIG. 1 is the + X direction (main scanning direction), and the direction opposite to the + X direction, that is, the direction from the upper left to the lower right in FIG. Stage 12
However, the operation of scanning the substrate S along the + X direction is referred to as “main scanning”. As the substrate S, for example, a flat plate-shaped or disk-shaped glass substrate used for a liquid crystal display device or a disk-shaped silicon substrate used for a semiconductor device can be used.

On the upper side of the base 11, a gate-shaped guide member 13 is installed so as to straddle the base 11, and on the upper side of the guide member 13, an ink tank 14 for storing ink Ik is mounted. . The ink tank 14 enables the ink Ik as a stored liquid material to be derived at a predetermined pressure. As the ink Ik, an alignment film ink containing an alignment polymer such as polyimide, a resist film ink containing a photosensitive resin such as a novolac resin, or the like can be used.

A carriage 15 that is drivingly connected to an output shaft of a carriage motor provided on the guide member 13 is attached to the lower side of the guide member 13, and an ejection head 16 is mounted on the lower side of the carriage 15. . When the carriage motor rotates forward or reverse, the carriage 15
The ejection head 16 is scanned by reciprocating along the minor axis direction of the base 11.

Here, the direction from the upper right to the lower left in FIG. 1 is defined as the + Y direction (sub-scanning direction), and the direction opposite to the + Y direction, that is, the direction from the lower left to the upper right in FIG. Carriage 1
5 scans the ejection head 16 along the −Y direction, and the substrate S is viewed from the ejection head 16.
The operation of relatively scanning in the + Y direction is referred to as “sub-scanning”.

A droplet weight device 17 is disposed on the left side of the base 11. The droplet weight device 17 measures the weight of the droplets ejected by the ejection head 16, and a known weight measuring device can be used. As the droplet weight device 17, for example, an electronic balance that receives a discharged droplet by a receiving pan and measures the droplet can be used. Further, the droplet weight device 17 uses a piezoelectric vibrator having an electrode, discharges the droplet toward the electrode, and drops the droplet based on the resonance frequency of the piezoelectric vibrator that changes due to the landing of the droplet. It is possible to use one that detects the weight of.

FIG. 2 is a perspective view of the ejection head 16 as viewed from the stage 12, and FIG.
6 is a plan view showing an arrangement position of 6. FIG. 4 is a cross-sectional view taken along the line AA in FIG.
In FIG. 2, a nozzle plate 18 is provided above each ejection head 16 (the lower side in FIG. 1). On the upper surface of the nozzle plate 18, a nozzle forming surface 1 parallel to the substrate S is provided.
8a is formed, and 180 nozzles N penetrating in the normal direction of the nozzle forming surface 18a are arranged on the nozzle forming surface 18a at equal intervals along the sub-scanning direction to form one nozzle row NR. is doing. A head substrate 19 is provided below each ejection head 16 (upper side in FIG. 1), and an input terminal 19 a is provided at one end of each head substrate 19. A predetermined drive waveform signal for driving the corresponding ejection head 16 is input to each input terminal 19a.

In FIG. 3, the plurality of ejection heads 16 are each arranged in three rows along the sub-scanning direction. Here, each of the plurality of ejection heads 16 arranged in the most −X direction is referred to as a first ejection head 16F, and the nozzle N included in the first ejection head 16F is referred to as a first nozzle NF.
A plurality of ejection heads 1 arranged in the + X direction (main scanning direction) of the first ejection head 16F.
6 are the second discharge heads 16L, and the nozzles N of the second discharge heads 16L are
This is called the second nozzle NL. Furthermore, the ejection heads 16 arranged in the + X direction (main scanning direction) of the second ejection head 16L are respectively referred to as third ejection heads 16C, and the nozzles N included in the third ejection head 16C are referred to as third nozzles NC.

In the present embodiment, the first ejection head 16F, the second ejection head 16L, and the third ejection head 16C constitute an ejection head unit.
The first ejection heads 16F and the second ejection heads 16L are arranged in a staggered manner along the sub-scanning direction, and the arrangement direction of the first nozzles NF and the second nozzles NL corresponds to the sub-scanning direction. Thereby, the first and second ejection heads 16F and 16L are moved to the stage 12.
When main scanning is performed on the substrate S, the nozzles N are opposed to each other over substantially the entire width of the substrate S in the sub-scanning direction.

Adjacent first ejection head 16F and second ejection head 16L are arranged so as to overlap each other when viewed from the main scanning direction, and each first nozzle NF and each second nozzle NL are continuously spaced at equal intervals. Arrange. Accordingly, the first and second discharge heads 16F and 16
L makes the resolution of the nozzles N uniform in the sub-scanning direction when the stage 12 performs main scanning on the substrate S.

When the stage 12 performs main scanning on the substrate S, the first and second ejection heads 16F and 16L each move relative to the substrate S to draw a scanning path extending in the main scanning direction. Further, the adjacent first and second ejection heads 16F and 16L are configured such that when the stage 12 performs the main scanning on the substrate S, the scanning path of the first ejection head 16F and the scanning path of the second ejection head overlap (hereinafter simply referred to as “scanning path”). , Which is referred to as a superimposing path OA).

Here, an angle formed between the arrangement direction of each first nozzle NF or each second nozzle NL and the + X direction (main scanning direction) is referred to as a main drawing angle θ1. In the present embodiment, since the arrangement direction of the first nozzle NF or the second nozzle NL is the sub-scanning direction, the main drawing angle θ1 is 90 °.

Each of the third discharge heads 16C is adjacent to the first and second discharge heads 16F and 16F, respectively.
The L overlapping regions are arranged in the main scanning direction. Each of the third ejection heads 16C defines the arrangement direction of the corresponding third nozzle NC in a direction intersecting with the main scanning direction and the sub-scanning direction.

Here, an angle formed by the arrangement direction of the third ejection heads 16C and the + X direction (main scanning direction) is referred to as a sub-drawing angle θ2. The sub drawing angle θ2 is set to be smaller than the main drawing angle θ1. In the present embodiment, the sub drawing angle θ2 is set to 30 ° C., which is smaller than the main drawing angle θ1. As a result, each third ejection head 16C reduces the arrangement pitch of the third nozzles NC as viewed from the main scanning direction, and increases the resolution of the nozzles N in the sub-scanning direction. When the stage 12 performs main scanning on the substrate S, each third ejection head 16C has a scanning path that overlaps the corresponding overlapping path OA when viewed from the substrate S, to the adjacent first and second ejection heads 16F and 16L. Follow and draw.

In FIG. 4, cavities 21 communicating with the ink tanks 14 are formed above the nozzles N, respectively. Each cavity 21 stores the ink Ik derived from the ink tank 14 and supplies it to the corresponding nozzle N. A diaphragm 22 that can vibrate in the vertical direction is attached to the upper side of each cavity 21 so that the volume of the corresponding cavity 21 can be enlarged and reduced. Piezoelectric elements PZ are respectively disposed on the upper side of the diaphragm 22. When each piezoelectric element PZ receives a drive waveform signal for driving the piezoelectric element PZ,
The corresponding diaphragm 22 is vibrated by contracting and extending in the vertical direction.

Each cavity 21 has a corresponding nozzle N when the corresponding diaphragm 22 vibrates.
The ink Ik having a predetermined weight corresponding to the driving voltage is ejected as a droplet D from the corresponding nozzle N. Each ejected droplet D flies toward the substrate S and lands on the surface Sa facing the nozzle N. Each droplet D after landing wets and spreads on the surface Sa to form a united liquid film FL.

Here, the droplets D discharged from the first nozzle NF, the second nozzle NL, and the third nozzle NC are referred to as a first droplet DF, a second droplet DL, and a third droplet DC, respectively. In the present embodiment, the third ejection head 16C receives a driving voltage at a lower potential than the first ejection head 16F and the second ejection head 16L, and the size of the third droplet DC is reduced to the first droplet DF and the first droplet DF. It is made smaller than the two droplets DL. The liquid film FL formed by the first droplet DF, the second droplet DL, and the third droplet DC is
These are referred to as a first liquid film FLF, a second liquid film FLL, and a third liquid film FLC, respectively.

FIG. 5 is a plan view (hereinafter simply referred to as a dot pattern) schematically showing the discharge positions of the first droplet DF and the second droplet DL, and FIG. 6 shows the first liquid film FLF and the second liquid. It is a sectional side view showing typically film FLL.

In FIG. 5, the scanning paths of the first nozzles NF and the second nozzles NL are virtually divided by dot pattern grids indicated by alternate long and short dash lines. This dot pattern lattice is defined by the discharge interval of the first droplet DF or the second droplet DL in the main scanning direction and the discharge interval of the first droplet DF or the second droplet DL in the sub-scanning direction, respectively. It is a lattice. The ejection / non-ejection of each droplet D is defined for each grid point of the dot pattern grid.

Here, the lattice points of the dot pattern corresponding to the first nozzle NF and the second nozzle NL are referred to as main drawing lattice points P, respectively. In the present embodiment, the discharge interval in the sub-scanning direction of the main drawing grid point P is defined by the arrangement pitch of the first nozzles NF or the second nozzles NL viewed from the main scanning direction.

As the nozzles N that discharge the droplets D toward the main drawing grid points P, the first nozzle NF or the second nozzle NL that passes immediately above the corresponding main drawing grid point P when the substrate S is main-scanned.
Either one is selected.

When the stage 12 performs main scanning on the substrate S, each first nozzle NF and each second nozzle NL pass directly above each main drawing grid point P defined in the scanning path, and correspond to the drive waveform signal. A droplet D is ejected toward the main drawing grid point P to be performed. Each of the first nozzle NF and each second nozzle NL causes the droplet D to land on the selected main drawing grid point P, and the first liquid film FLF and the second liquid film FLL spreading along the corresponding scanning path. Draw. At this time, the first liquid film FLF
The second liquid film FL is dried by the amount formed prior to the second liquid film FLL.
Prior to L, the outer edge is fixed prior to the surface Sa of the substrate S.

In FIG. 6, the first liquid film FLF has a first liquid film FLF that suppresses the flow of the ink Ik between the first liquid film FLF and the second liquid film FLL in order to make the dried state precede the second liquid film FLL. It is difficult to average the capacity of the ink Ik and the capacity of the ink Ik included in the second liquid film FLL. Therefore, when there is a difference between the discharge amount applied to the first discharge head 16F and the discharge amount applied to the second discharge head 16L, a stepped portion SP resulting from the difference in discharge amount is formed in the overlap path OA. Is done.

FIG. 7 is a plan view schematically showing the discharge position of the third droplet DC (hereinafter simply referred to as a dot pattern), and FIG. 8 is a side sectional view schematically showing the third liquid film FLC. .
In FIG. 7, the scanning path of each third nozzle NC is virtually divided by a dot pattern grid indicated by a one-dot chain line. This dot pattern grid is a grid defined by the discharge interval of the third droplet DC in the main scanning direction and the discharge interval of the third droplet DC in the sub-scanning direction. The ejection / non-ejection of the third droplet DC is defined for each grid point of the dot pattern grid.

Here, the grid point corresponding to the third nozzle NC is referred to as a sub-drawing grid point Ps. In the present embodiment, the discharge interval in the sub-scanning direction of the sub-drawing grid point Ps is defined by the arrangement pitch of the third nozzles NC viewed from the main scanning direction. That is, the discharge interval in the sub-scanning direction of the sub-drawing grid point Ps is defined to be smaller than the discharge interval of the main drawing grid point P by the amount that the sub-drawing angle θ2 is smaller than the main drawing angle θ1.

As the third nozzle NC for discharging the third droplet DC to each sub-drawing grid point Ps, the substrate S
The third nozzle NC that passes immediately above the sub-drawing grid point Ps corresponding to the main scanning is selected. The discharge / non-discharge of the selected third nozzle NC is defined based on the difference value between the discharge amount applied to the first liquid film FLF and the discharge amount applied to the second liquid film FLL.

That is, in the discharge / non-discharge of the third droplet DC, the discharge amount given to the third liquid film FLC is a difference value between the discharge amount given to the first liquid film FLF and the discharge amount given to the second liquid film FLL. It is prescribed to be

When the stage 12 performs main scanning on the substrate S, each third nozzle NC passes immediately above each sub-drawing grid point Ps defined in the scanning path, and according to the drive waveform signal, the corresponding sub-drawing grid point Ps. The third droplet DC is discharged toward Then, each third nozzle NC causes the third droplet DC to land on the selected sub-drawing lattice point Ps, and the third liquid film FL spreading on the corresponding overlapping path OA.
Draw C.

At this time, the third ejection head 16C has the sub drawing angle θ2 smaller than the main drawing angle θ1,
The resolution of the third droplet DC is increased with respect to the overlapping path OA extending in the main scanning direction, and the third droplet DC is landed with higher accuracy over the entire step portion SP. The third discharge head 1
6C is the third droplet D that lands on the stepped portion SP by the size of the third droplet DC.
Let C flow in less time with less energy. And the third discharge head 1
6C gives the third liquid film FLC a discharge amount corresponding to the step amount of the stepped portion SP, and fills the entire stepped portion SP with the ink Ik. Accordingly, the third ejection head 16C causes the surface of the first liquid film FLF and the surface of the second liquid film FLL to be continuously drawn by drawing the third liquid film FLC, and the liquid film FL viewed from the entire surface Sa. Improve the uniformity.

Next, the electrical configuration of the droplet discharge device 10 will be described with reference to FIGS. FIG.
FIG. 9 is a block circuit diagram showing an electrical configuration of the droplet discharge device 10, and FIG. 9 is a block circuit diagram showing an electrical configuration of the head drive circuit.

In FIG. 9, the control device 30 constituting the control means causes the droplet discharge device 10 to execute various processing operations. The control device 30 includes an external I / F 31, a control unit 32 including a CPU, a RAM 33 that stores various data including a DRAM and an SRAM, and a ROM 34 that stores various control programs. The control device 30 includes an oscillation circuit 35 that generates a clock signal, a drive waveform generation circuit 36 that generates a drive waveform signal for driving the piezoelectric element PZ, and an internal I / F 38 that transmits various signals. Have.

The control device 30 is connected to the input / output device 37 via the external I / F 31. Also,
The control device 30 is connected to a motor drive circuit 39 for scanning the stage 12 and the carriage 15 via an internal I / F 38. The control device 30 also includes a first head driving circuit 40F for driving and controlling the first ejection head 16F and a second head driving circuit for driving and controlling the second ejection head 16L via the internal I / F 38. 40L and the third discharge head 16
It is connected to a third head drive circuit 40C for driving and controlling C.

The input / output device 37 is, for example, an external computer having a CPU, RAM, ROM, hard disk, liquid crystal display, and the like. The input / output device 37 outputs various control signals for driving the droplet discharge device 10 to the external I / F 31 in accordance with a control program stored in the ROM or the hard disk. The external I / F 31 receives the drawing data Ip from the input / output device 37.

The drawing data Ip is various data for discharging the first droplet DF, the second droplet DL, and the third droplet DC toward the surface Sa of the substrate S. The drawing data Ip is, for example, data related to the position of the scanning path with respect to the surface Sa and data related to the scanning speed of the stage 12. The drawing data Ip is data defining discharge / non-ejection of the first droplet DF and the second droplet DL for each main drawing grid point P, and the third droplet DC for each sub-drawing grid point Ps. Discharge
This data defines non-ejection. Further, the drawing data Ip is data relating to the weight of the droplet D measured for each ejection head 16, and the ejection amount given to the third liquid film FLC is
This is data used to obtain a difference value between the discharge amount applied to the first liquid film FLF and the discharge amount applied to the second liquid film FLL.

The RAM 33 is used as a reception buffer, an intermediate buffer, and an output buffer. ROM
34 stores various control routines executed by the control unit 32 and various data for executing the control routines.

The oscillation circuit 35 generates a clock signal for synchronizing various data and various drive signals. For example, the oscillation circuit 35 generates a transfer clock CLK used when serially transferring various data. The oscillation circuit 35 generates a latch signal LAT that is used when parallel-converting various serially transferred data for each droplet D ejection cycle.

The drive waveform generation circuit 36 stores waveform data for generating various drive waveform signals in association with predetermined addresses. The drive waveform generation circuit 36 latches the waveform data read by the control unit 32 for each clock signal of the ejection cycle, converts it into an analog signal, amplifies the analog signal, and generates a drive waveform signal. That is, the drive waveform generation circuit 36 generates a main drawing drive signal COMA having a high potential level for driving the first ejection head 16F and the second ejection head 16L and the third ejection in accordance with the waveform data read by the control unit 32. A sub-drawing drive signal COMB having a low potential level for driving the head 16C is generated.

The control unit 32 converts the drawing data Ip from the input / output device 37 received by the external I / F 31 into the RA.
Temporarily stored in M33 and converted to an intermediate code. The control unit 32 reads the intermediate code data stored in the RAM 33 and generates dot pattern data. The dot pattern data is data that associates whether or not the first droplet DF or the second droplet DL is ejected with respect to each of the main drawing lattice points P, and the third droplet DC with respect to each of the sub drawing lattice points Ps. This is data for associating whether or not to discharge.

When generating the dot pattern data corresponding to the main scan, the control unit 32 generates serial data synchronized with the transfer clock CLK using the dot pattern data, and generates the internal I / F 3.
The serial data is serially transferred to the corresponding head drive circuit via 8.

Here, the serial data generated using the dot pattern data and transferred to the first head drive circuit 40F is referred to as first serial pattern data SIF. Serial data generated using the dot pattern data and transferred to the second head drive circuit 40L is referred to as second serial pattern data SIL. The serial data generated using the dot pattern data and transferred to the third head driving circuit 40C is converted into the third serial pattern data S.
IC. Each serial pattern data SIF, SIL, SIL is data having a bit value for defining ejection / non-ejection of the corresponding droplet D, corresponding to the number of nozzles N, that is, 180, for each ejection cycle. Are generated sequentially.

The control unit 32 is connected to the motor drive circuit 39 via the internal I / F and outputs a drive control signal corresponding to the motor drive circuit 39. In response to the drive control signal from the controller 32, the motor drive circuit 39 moves the stage 12 and the carriage 15 via the internal I / F 38, that is, the substrate S is main-scanned and sub-scanned.

Next, the first head drive circuit 40F, the second head drive circuit 40L, and the third head drive circuit 4
0C will be described below. In FIG. 10, each head drive circuit 40F, 40L, 40
C includes a shift register 41, a latch 42, a level shifter 43, and an analog switch 44, respectively.

Each shift register 41 is controlled by the control device 30 with the serial pattern data SIF, S.
When serially transferring IL and SIC, the corresponding serial pattern data SIF and SIL
, SIC are sequentially shifted by the transfer clock CLK to store 180-bit serial pattern data SIF, SIL, SIC. Each latch 42 latches the serial pattern data SIF, SIL, and SIC stored in the corresponding shift register 41 when the control device 30 receives the latch signal LAT, converts the serial / parallel, and the corresponding parallel pattern data. Output to the level shifter 43 as PI.

Each level shifter 43 boosts the parallel pattern data PI to the driving voltage level of the analog switch element when the corresponding latch 42 outputs the parallel pattern data PI, and opens and closes each piezoelectric element PZ of the corresponding ejection head 16. Generate a signal.

That is, in the first head drive circuit 40F, the level shifter 43 generates an open / close signal for each of the 180 piezoelectric elements PZ included in the first ejection head 16F using the first serial pattern data SIF. In the second head drive circuit 40L, the level shifter 4
3 uses the second serial pattern data SIL, and the second ejection head 16L has 18
An open / close signal is generated for each of the zero piezoelectric elements PZ. The third head drive circuit 40
In C, the level shifter 43 uses the third serial pattern data SIC to generate an open / close signal for each of the 180 piezoelectric elements PZ included in the third ejection head 16C.

Each analog switch 44 has 180 switch elements corresponding to the piezoelectric elements PZ. Each switch element opens and closes in response to an open / close signal output from the corresponding level shifter 43. The main drawing drive signal C is supplied from the control device 30 to the input end of each switch element.
The OMA or the sub drawing drive signal COMB is input, and the corresponding piezoelectric element PZ is connected to the output end of each switch element. Each switch element supplies the main drawing drive signal COMA or the sub drawing drive signal COMB to the corresponding piezoelectric element PZ when the corresponding level shifter 43 outputs an “H” level open / close signal. Conversely, each switch element stops the output of the main drawing drive signal COMA or the sub drawing drive signal COMB when the corresponding level shifter 43 outputs an “L” level open / close signal.

That is, in the first head drive circuit 40F, the analog switch 44 receives the “H” level open / close signal based on the first serial pattern data SIF, and receives the first ejection head 16.
A main drawing drive signal COMA is supplied to the piezoelectric element PZ selected from F. In the second head drive circuit 40L, the analog switch 44 receives the “H” level open / close signal based on the second serial pattern data SIL, and drives the main drawing to the piezoelectric element PZ selected from the second ejection head 16L. The signal COMA is supplied. In the third head drive circuit 40C, the analog switch 44 receives the “H” level open / close signal based on the third serial pattern data SIC, and applies the sub-switch to the piezoelectric element PZ selected from the third ejection head 16C. A drawing drive waveform COMB is supplied.

Accordingly, the control device 30 causes the first liquid film FLF to perform the discharge process of the first droplet DF and the second droplet DL toward the selected main drawing grid point P according to the dot pattern data.
The second liquid film FLL is drawn with relatively large droplets D. Then, the control device 30 causes the third droplet DC to be discharged toward the selected sub-drawing lattice point Ps, and the discharge amount applied to the first liquid film FLF and the discharge amount applied to the second liquid film FLL. The third liquid film FLC having a difference value between the two is drawn with a droplet D having a relatively small size.

Next, a method for forming a thin film using the droplet discharge device 10 will be described below.
First, the droplet discharge device 10 measures the weight of the droplet D for each discharge head 16 using the droplet weight device 17. The input / output device 37 generates drawing data Ip based on the measurement result of the droplet weight device 17 and inputs the drawing data Ip to the control device 30. Next, the droplet discharge device 10 places the substrate S on the stage 12 with the surface Sa facing upward, and places the substrate S in the −X direction of the carriage 15.

The control device 30 performs sub-scanning on the carriage 15 via the motor drive circuit 39 so that each nozzle N passes over the corresponding main drawing grid point P or sub-drawing grid point Ps when the substrate S is main-scanned. The carriage 15 is disposed on the front side. When the carriage 15 is disposed, the control device 30 starts main scanning of the substrate S via the motor drive circuit 39.

The control device 30 develops the drawing data Ip input from the input / output device 37 into dot pattern data. The control device 30 generates first serial pattern data SIF, second serial pattern data SIL, and third serial pattern data SIC using the developed dot pattern data. The control device 30 is configured so that each serial pattern data SIF, SIL, S
Each head drive circuit 40F, 40L, 40 corresponding to the IC is synchronized with the transfer clock CLK.
Serial transfer to C.

Then, the control device 30 determines that each main drawing grid point P is the first nozzle NF or the second nozzle NL.
When it reaches just below, a latch signal LAT and a main drawing drive signal COMA synchronized with the latch signal LAT are output for each ejection cycle. The control device 30 transmits the first and second serial pattern data SIF, S via the first head drive circuit 40F and the second head drive circuit 40L.
The IL is serial / parallel converted to generate an open / close signal for opening / closing each corresponding switch element. In accordance with the open / close signal, the control device 30 applies the first droplet D to each main drawing grid point P to be selected.
F or the second droplet DL is ejected to draw the first liquid film FLF and the second liquid film FLL.

Further, when each sub-drawing grid point Ps reaches just below the third nozzle NC, the control device 30 latches the latch signal LAT and the sub-drawing drive signal COMB synchronized with the latch signal LAT every discharge cycle.
Is output. The control device 30 performs serial / parallel conversion on the third serial pattern data SIC via the third head drive circuit 40C, and generates an open / close signal for opening / closing each corresponding switch element. The controller 30 selects each sub-drawing grid point Ps to be selected according to the open / close signal.
The third droplet DC is discharged to draw the third liquid film FLC.

As a result, the control device 30 can form the third liquid film FLC having excellent fluidity with high accuracy on the stepped portion SP, and the discharge amount applied to the third liquid film FLC can be set to the first liquid film FLC. A difference value between the discharge amount applied to the one liquid film FLF and the discharge amount applied to the second liquid film FLL can be set. The film thickness uniformity of the liquid film FL can be improved as viewed from the entire surface Sa, and the film thickness uniformity of the thin film can be improved by drying the liquid film FL.

(1) In the above embodiment, the first ejection head 16F and the second ejection head 16L are arranged so as to overlap each other when viewed from the main scanning direction, and the scanning path of the first ejection head 16F and the second ejection head 16L. The third ejection head 16C on the overlapping path OA that overlaps the scanning path of
Arrange. The difference between the discharge amount that the first discharge head 16F applies to the first liquid film FLF and the discharge amount that the second discharge head 16L applies to the second liquid film FLL is expressed as the third discharge head 1.
The discharge amount 6C gives to the third liquid film FLC.

Therefore, in the region where the first liquid film FLF and the second liquid film FLL overlap, the third liquid film F is present.
LC can be formed, and the third liquid film FLC can be formed with a film thickness corresponding to the film thickness difference between the first liquid film FLF and the second liquid film FLL. As a result, the stepped portion SP between the first liquid film FLF and the second liquid film FLL can be compensated and flattened by the third liquid film FLC. Therefore, the streaky film thickness step caused by the individual difference of the ejection heads 16 can be eliminated.

(2) In the above embodiment, the third ejection head 16C, the second ejection head 16L, and the first ejection head 16F are arranged in this order from the main scanning direction, and the first liquid film FLF is formed on the first ejection head 16F. In addition, after the second liquid film FLL is formed on the second discharge head 16L, the third liquid film FLC is formed on the third discharge head 16C.

Therefore, a small discharge amount of ink Ik can be discharged onto the first liquid film FLF and the second liquid film FLL formed in advance. When the ink Ik having a small ejection amount lands directly on the substrate S, drying is instantaneously started to form streaky irregularities along the main scanning direction. Therefore, the third liquid film FLC is replaced with the first liquid film FLF and the second liquid film FLL.
The unevenness caused by the third liquid film FLC can be avoided by the amount formed on the film, and the coalescence of the liquid films FL can be made smooth. As a result, the film thickness uniformity of the thin film can be further improved.

(3) In the above embodiment, the sub drawing angle θ2 is configured to be smaller than the main drawing angle θ1, and the resolution of the third nozzle NC viewed from the main scanning direction is set to the resolution of the first nozzle NF and the second nozzle NL. Higher than. Accordingly, the resolution of the third droplet DC with respect to the stepped portion SP can be increased by the amount corresponding to the increase in the resolution of the third nozzle NC, and the third droplet DC can be obtained with higher accuracy over the entire stepped portion SP. Can be landed.

(4) In the above embodiment, the size of the third droplet DC is made smaller than that of the first droplet DF and the second droplet DL. Therefore, the third droplet DC can be made to flow with less energy by reducing the size of the third droplet DC. That is, the ink Ik ejected from the third ejection head 16C can be filled in the stepped portion SP in a shorter time, and the first liquid film FLF and the second liquid film FLL can be planarized in a shorter time. Can do.

(Second embodiment)
Next, the liquid crystal display device of the present invention will be described with reference to FIGS. FIG. 11 is a perspective view showing a liquid crystal display device, and FIG. 13 is a perspective view showing a counter substrate 52.

In FIG. 11, the liquid crystal display device 50 includes an element substrate 51 and an opposite substrate 52 that are opposed to each other, and the element substrate 51 and the opposite substrate 52 are bonded together by a rectangular frame-shaped sealing material 53, and a liquid crystal LC is interposed in the gap. Is enclosed. An optical substrate 54 such as a polarizing plate or a retardation plate is bonded to the lower surface of the element substrate 51. The optical substrate 54 has a transmission axis in a predetermined direction, and allows light from a backlight or the like to be transmitted toward the liquid crystal LC.

A plurality of element regions 5 are formed on the upper surface of the element substrate 51 (hereinafter simply referred to as an element formation surface 51a).
5 is partitioned, and in each element region 55, a switching element (not shown) made of a TFT, a light-transmissive pixel electrode 56, and the like are formed.

On the upper side of each pixel electrode 56, an alignment film OF1 is stacked over the entire element formation surface 51a. The alignment film OF1 is a thin film made of an alignment polymer such as alignment polyimide,
The alignment direction of the liquid crystal LC is defined in the vicinity of the corresponding pixel electrode 56. The alignment film OF1 supplies the ink Ik in which an alignment film material (for example, an alignment polymer such as polyimide) is dispersed to the droplet discharge device 10 and discharges the ink Ik to the entire upper side of each element region 55. It is formed by drying a liquid film FL composed of droplets D.

FIG. 12 is a perspective view showing the counter substrate 52 with the element substrate 51 side facing up. FIG.
2, a polarizing plate 57 is disposed on the lower surface of the counter substrate 52 (upper surface in FIG. 11). The polarizing plate 57 has a transmission axis in a predetermined direction and allows light from the liquid crystal LC to pass therethrough.
Upper surface of the counter substrate 52 (lower surface in FIG. 11: hereinafter simply referred to as a filter forming surface 52a)
A black matrix BM is formed. The black matrix BM is a thin film formed of a light shielding material that shields light emitted from the liquid crystal LC.
It is formed in a lattice shape surrounding the area facing the. On the filter forming surface 52a, color filters CF are respectively formed in regions surrounded by the black matrix BM. The color filter CF transmits light of a specific wavelength from the light emitted from the liquid crystal LC, converts the light from the liquid crystal LC into colored light, and emits it.

A common overcoat layer OC is laminated on the black matrix BM and the color filter CF. The overcoat layer OC is a thin film formed of a light transmissive resin that transmits light emitted from the liquid crystal LC, and flattens the entire surface of the counter substrate 52. The overcoat layer OC is formed by applying the ink Ik in which the light transmissive resin is dispersed to the droplet discharge device 1.
The liquid film FL composed of a plurality of droplets D landed on and discharged to the entire counter substrate 52.
It is formed by drying.

On the upper side of the overcoat layer OC, a light transmissive counter electrode 58 is laminated. The counter electrode 58 receives a predetermined common potential, forms a potential difference between each pixel electrode 56 and the counter electrode 58, and modulates the alignment state of the corresponding liquid crystal LC. As a result, the polarization state of the light emitted from the optical substrate 54 is modulated for each element region 55.

On the upper side of the counter electrode 58, an alignment film OF2 is laminated. The alignment film OF2 is formed of the alignment film O2.
Similar to F2, it is a thin film made of an alignment polymer such as alignment polyimide, and defines the alignment state of liquid crystal molecules located in the vicinity. The alignment film OF2 is formed by supplying an ink in which an oriented polymer is dispersed to the droplet discharge device 10 and discharging it to the entire counter electrode 58, and drying a liquid film composed of a plurality of landed droplets. The

According to this, regarding the alignment films OF1 and OF2 and the overcoat layer OC, the amount of the thin film material used can be suppressed and the film thickness uniformity can be improved. As a result, the productivity of the liquid crystal display device 50 can be improved.

In addition, you may change the said embodiment as follows.
In the above embodiment, the size of the third droplet DC is set to the first droplet DF and the second droplet D.
It was made the structure made smaller than the size of L. For example, the first droplet DF, the second droplet DL, and the third droplet DC may be the same size. That is, the present invention relates to the droplet D
The difference value between the discharge amount that the first discharge head 16F applies to the first liquid film FLF and the discharge amount that the second discharge head 16L applies to the second liquid film FLL is not limited to the size of the third liquid film FLF. Any structure may be used as long as the discharge amount is given to the liquid film FLC.

In the above embodiment, the ejection interval in the sub-scanning direction of the sub-drawing grid point Ps is configured to be smaller than the ejection interval in the sub-scanning direction of the main drawing grid point P. For example, the discharge interval of the sub-drawing grid point Ps and the discharge interval of the main drawing grid point P may be the same size. That is, the present invention is not limited to the discharge interval of the droplets D, and the discharge amount that the first discharge head 16F applies to the first liquid film FLF and the second discharge head 16L applies to the second liquid film FLL. Any structure may be used as long as the difference value from the discharge amount becomes the discharge amount given to the third liquid film FLC.

In the above embodiment, the third ejection head 16C is sequentially from the main scanning direction (+ X direction).
The second ejection head 16L and the first ejection head 16F are arranged. For example, as shown in FIG. 13, the second ejection head 16L, the third ejection head 16C, and the first ejection head 16F may be arranged in this order from the main scanning direction. 1
4, the second ejection head 16L, the first ejection head 16F, and the third ejection head 16C.
The structure which arrange | positions may be sufficient. That is, the present invention is not limited to the arrangement order of the ejection heads 16 in the main scanning direction, and the first ejection head 16F is the first liquid film FLF.
The difference value between the discharge amount given to the second liquid film FLL and the discharge amount given to the second liquid film FLL by the second discharge head 16L may be the discharge amount given to the third liquid film FLC.

In the above embodiment, the third droplet DC is changed by changing the drive voltage supplied to the first discharge head 16F and the second discharge head 16L and the drive voltage supplied to the third discharge head 16C.
Is configured to be smaller than the sizes of the first droplet DF and the second droplet DL. For example, the drive voltages supplied to the first, second, and third ejection heads 16F, 16L, and 16C are configured at the same level, and the third is compared with the sizes of the first nozzle NF and the second nozzle NL. The structure which makes the size of nozzle NC small may be sufficient.

In the above embodiment, the number of the third nozzle NC is configured with the same value as the number of the first nozzle NF and the second nozzle NL. For example, as shown in FIGS. 13 and 14, the number of the third nozzles NC is configured to be smaller than the number of the first nozzles NF and the second nozzles NL, and the third discharge head 16 </ b> C is configured. You may comprise a size smaller than the size of the 1st discharge head 16F and the 2nd discharge head 16L.

In the second embodiment, the thin film is embodied in the alignment films OF1 and OF2 and the overcoat layer OC. However, the present invention is not limited to this, and the thin film may be embodied as a black matrix BM made of a photosensitive resin or a resist film used for an etching process.

1 is a perspective view showing a droplet discharge device according to a first embodiment that embodies the present invention. Similarly, the perspective view which shows the discharge head seen from the board | substrate. Similarly, the top view which shows the arrangement position of an ejection head. Similarly, the schematic sectional side view showing the inside of the ejection head. Similarly, the top view which shows typically the discharge position of a 1st and 2nd droplet. Similarly, the side view which shows a 1st and 2nd liquid film. Similarly, the top view which shows typically the discharge position of a 3rd droplet. Similarly, the side view which shows a 3rd liquid film. Similarly, the electric block circuit diagram which shows the electric constitution of a droplet discharge apparatus. Similarly, the block circuit diagram which shows the electric constitution of a head drive circuit. The perspective view which shows the liquid crystal display device of 2nd embodiment which actualized this invention. Similarly, the perspective view which shows a counter substrate. The top view which shows the arrangement position of the discharge head in the example of a change. The top view which shows the arrangement position of the discharge head in the example of a change.

Explanation of symbols

D ... droplet, DF ... first droplet, DL ... second droplet, DC ... third droplet, FL ... liquid film, NF ... first nozzle, NL ... second nozzle, NC ... third nozzle, S ... Substrate, 10 ... Droplet discharge device, 12
... stage constituting scanning means, 16 ... discharge head, 16F ... first discharge head, 16L ...
Second ejection head, 16C ... Third ejection head, 30 ... Control device constituting control means, 39 ...
A motor drive circuit constituting the control means, 40F, a first head drive circuit constituting the control means,
40L: second head driving circuit constituting control means, 40C: third head driving circuit constituting control means, 50: liquid crystal display device.

Claims (10)

A thin film forming method for forming a thin film by forming a liquid film composed of the liquid droplets on the substrate by relatively moving a substrate and a discharge head unit for discharging the liquid droplets in a scanning direction, and drying the liquid film Because
One side of a first ejection head having a plurality of first nozzles arranged in one direction intersecting the scanning direction, and the other side of a second ejection head having a plurality of second nozzles arranged in the one direction A region in which the first discharge head and the second discharge head overlap each other in a third discharge head having a plurality of third nozzles arranged in a direction intersecting with the scan direction while being arranged so as to overlap when viewed from the scanning direction Arranged in the scanning direction of
A difference value between the discharge amount of the first discharge head and the discharge amount of the second discharge head is set to the discharge amount of the third discharge head;
A method for forming a thin film. The thin film forming method according to claim 1,
Moving the substrate in the scanning direction by disposing the third ejection head in the scanning direction in a region where the first ejection head and the second ejection head overlap;
A method for forming a thin film. The thin film forming method according to claim 1 or 2,
Arranging the plurality of third nozzles in another direction intersecting the scanning direction, and making an angle formed between the other direction and the scanning direction smaller than an angle formed between the one direction and the scanning direction;
A method for forming a thin film. A thin film forming method according to any one of claims 1 to 3,
A droplet having a size smaller than a droplet discharged by the first discharge head and a size smaller than a droplet discharged by the second discharge head is discharged to the third discharge head, and the first discharge head The difference value between the discharge amount and the discharge amount of the second discharge head is set to the discharge amount of the third discharge head,
A method for forming a thin film. An ejection head unit for ejecting droplets;
Scanning means for relatively moving the ejection head unit and the substrate along a scanning direction;
A control unit for driving and controlling the discharge head unit and the scanning unit to discharge liquid droplets from the discharge head unit onto the substrate;
The discharge head unit is
A first ejection head having a plurality of first nozzles arranged in one direction intersecting the scanning direction, a second ejection head having a plurality of second nozzles arranged in the one direction, and a direction intersecting the scanning direction A third ejection head having a plurality of third nozzles arranged in a
The one side of the first ejection head and the other side of the second ejection head are arranged so as to overlap each other when viewed from the scanning direction, and the region where the first ejection head and the second ejection head overlap each other Arranging the third ejection head in the scanning direction;
The control means includes
A difference value between the discharge amount of the first discharge head and the discharge amount of the second discharge head is set to the discharge amount of the third discharge head;
A droplet discharge device characterized by the above. The droplet discharge device according to claim 5,
The scanning means moves the substrate in the scanning direction,
The third ejection head is disposed in the scanning direction in a region where the first ejection head and the second ejection head overlap;
A droplet discharge device characterized by the above. The droplet discharge device according to claim 5 or 6,
The plurality of third nozzles are arranged in another direction intersecting the scanning direction,
An angle formed between the other direction and the scanning direction is smaller than an angle formed between the one direction and the scanning direction;
A droplet discharge device characterized by the above. A droplet discharge device according to any one of claims 5 to 7,
The third ejection head ejects droplets smaller than the droplets ejected by the first ejection head and smaller in size than the droplets ejected by the second ejection head;
A droplet discharge device characterized by the above. A droplet discharge device according to any one of claims 5 to 7,
The control means supplies a first drive signal to each of the first ejection head and the second ejection head to eject droplets, which are smaller than the droplets ejected by the first ejection head, and Supplying a second drive signal to the third ejection head for ejecting droplets of a size smaller than the droplets ejected by the two ejection heads;
A droplet discharge device characterized by the above. A liquid crystal display device comprising a thin film on a substrate enclosing liquid crystal molecules,
The thin film is formed using the droplet discharge device according to any one of claims 5 to 9,
A liquid crystal display device.

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