JP2009097415A - Diaphragm compressor - Google Patents

Abstract

An object of the present invention is to improve the durability of a metal diaphragm used in a laminated manner in a diaphragm compressor.
A diaphragm unit 30 includes a first diaphragm 32 on the side of a pressurizing chamber 21C, a second diaphragm 34 on the side of a pump chamber 22C, and an intermediate diaphragm 36 therebetween, which are stacked in close contact. Each diaphragm is a metal diaphragm obtained by press molding, and the intermediate diaphragm 36 is provided with arc through holes 37 formed in an arc-shaped locus around the diaphragm center at three equal pitches, respectively. A notch 38 extending from the circular arc through hole 37 to the outer periphery of the diaphragm is provided. Excess lubricant intervening between the diaphragms is pushed out along with the curvature of the diaphragm and enters the arc through hole 37.
[Selection] Figure 2

Description

  The present invention relates to a diaphragm compressor in which a pressurizing chamber and a pump chamber are liquid-tightly divided by a metal diaphragm.

  Such a diaphragm type compressor is made of metal for each of the laminated diaphragms, so that high pressure compression is possible without causing any trouble in repeated bending at high pressure. In this case, since the diaphragms repeatedly bend in the laminated state, it is expected that friction will occur between adjacent diaphragms and the diaphragms will wear. In order to eliminate these points, it has been proposed to interpose a lubricant between diaphragms (for example, Patent Document 1).

JP-T-2007-515584 (paragraph 0043)

  Although the lubricant interposed between the diaphragms reduces friction during the bending of the diaphragm, the following problems have been pointed out. The lubricant is interposed between the diaphragms by a method such as applying to the surface of the diaphragm. If the lubricant thus applied is unevenly distributed, the lubricant at the location where the lubricant is excessively present at other locations is sandwiched between the diaphragms in an excess state and has no place to go. Therefore, in a location where the lubricant is excessively present, the excessive lubricant is likely to cause local deformation due to repeated bending of the diaphragm, and stress is likely to be concentrated. Since such stress concentration accelerates fatigue of the diaphragm, it tends to cause a decrease in durability. Therefore, when the lubricant is interposed between the diaphragms, it is indispensable to apply the lubricant evenly and uniformly to the adhesion area of the diaphragms, which requires strict process control and is complicated.

  In view of the above-described problems, an object of the present invention is to provide a simple method for improving the durability of a metallic diaphragm.

  In order to achieve at least a part of the above object, the present invention adopts the following configuration.

[Applicable: Diaphragm compressor]
A diaphragm compressor in which a pressurizing chamber and a pump chamber are liquid-tightly divided by a metal diaphragm,
The first diaphragm on the pressurizing chamber side, the second diaphragm on the pump chamber side, and one or more intermediate diaphragms between the first and second diaphragms are adhered and stacked, and the diaphragms are adhered to each other. The gist of the present invention is that the region has an escape portion capable of entering the lubricant interposed in the contact region.

  Even in the diaphragm compressor having the above-described configuration, the laminated diaphragms are repeatedly curved toward the pressurizing chamber side and the pump chamber side while suppressing friction with a lubricant interposed between the diaphragms. During the repeated bending of the diaphragm, the lubricant interposed between the diaphragms is pushed out toward the escape portion of the contact area of the diaphragm. For this reason, even if the lubricant is unevenly distributed, the lubricant in the location where the lubricant is excessively present enters the escape portion of the contact area of the diaphragm through the periphery of the location, and the lubricant in the contact area of the diaphragm The uneven distribution is eliminated or suppressed. Therefore, according to the diaphragm compressor having the above-described configuration, it is possible to suppress the trouble caused by the excessive presence of the lubricant between the diaphragms, that is, the stress concentration based on local deformation, so that the durability of the metal diaphragm Can be increased. In addition, in order to improve the durability, it is sufficient to have a lubricant escape portion in the diaphragm contact area, so that strict process management is not required when applying the lubricant, which is simple.

  The diaphragm type compressor described above can be configured as follows. For example, the escape portion of the lubricant in the contact area of the diaphragm can be formed in an intermediate diaphragm between the first diaphragm on the pressurizing chamber side and the second diaphragm on the pump chamber side. By doing so, it is easy to prepare a relief portion of the lubricant in the contact area of the diaphragm by simply laminating these diaphragms after applying the lubricant. Moreover, in the existing diaphragm compressor having the first diaphragm on the pressurizing chamber side and the second diaphragm on the pump chamber side, it is only necessary to incorporate the intermediate diaphragm having the above-described relief portion, so that simple modification or replacement of parts is possible. Thereby, the durability of the diaphragm in the existing compressor can be enhanced.

  In this case, if the groove penetrating the intermediate diaphragm is used as a relief part of the lubricant, the relief part can be formed in the intermediate diaphragm by a mass production method such as a press, so that the process and its management are simplified and the cost is reduced. Can be planned.

  Further, when the escape portion of the lubricant is formed in the contact area of the diaphragm, the escape portion can be equally formed around the center of the diaphragm in the contact area. By so doing, the curvature of the laminated diaphragm toward the pressurizing chamber side and the pump chamber side can be made uniform around the center of the diaphragm, which can contribute to improved durability. Thus, when the relief portion is equally divided around the center of the diaphragm, it is convenient to make the relief portion arc-shaped. Furthermore, if a radial relief portion extending from each arc-shaped relief portion to the outer peripheral edge of the diaphragm is provided, the following advantages are obtained.

  If the diaphragm is cracked or cracked, a leak in the pump chamber or the pressurizing chamber is caused. Therefore, the occurrence of leakage is usually determined at the outer edge of the diaphragm through pressure detection. Since each arc-shaped relief portion of the lubricant is connected to a radial relief portion that extends to the outer periphery of the diaphragm, assuming that a diaphragm crack or crack has occurred, the pressure abnormality due to this crack or crack is caused by this radial relief. It is quickly transmitted to the outer edge of the diaphragm through the section. Therefore, it is possible to quickly detect a pressure abnormality caused by a crack or a crack in the diaphragm.

  Hereinafter, embodiments of the present invention will be described based on examples. FIG. 1 is an explanatory diagram schematically showing the overall configuration of a diaphragm compressor 10 as an embodiment of the present invention, and FIG. 2 is a perspective view showing an overall image of a diaphragm unit 30 included in the diaphragm compressor 10 and its parts. It is explanatory drawing.

  As shown in the figure, the diaphragm compressor 10 is provided with a diaphragm unit 30 incorporated in the compressor body 20, and the hydrogen gas supplied from the hydrogen source 40 is changed to a high pressure of about 50 MPa by repeating the bending of the diaphragm unit 30. After being compressed, it is stored in the hydrogen tank 50. The diaphragm compressor 10 includes a hydraulic fluid feeder 60 that pumps hydraulic fluid (hydraulic oil) as a compression source for such gas compression, and driving control of each device including the hydraulic fluid feeder 60. It has the control apparatus 70 which performs.

  The compressor main body 20 sandwiches the diaphragm unit 30 at the periphery between the pressurizing chamber side main body part 21 having the pressurizing chamber side main body part 21 and the pump chamber side main body part 22 having the pump chamber 22C. Around the pressure chamber side and the pump chamber side, both body parts are fastened and fixed at equal pitches with bolts 24B and nuts 24N. The pressurizing chamber side main body part 21 receives supply / discharge of the working fluid through the working fluid port 21H provided at the center of the pressurizing chamber 21C. The hydraulic fluid feeder 60 includes a cylinder 62 for storing hydraulic fluid and a piston 63 as a piston driver 64. The hydraulic fluid is stored in the cylinder 62 at a high pressure exceeding the gas compression specified pressure (50 MPa), and then the piston is driven. The piston 63 is reciprocated by the machine 64 to perform high-pressure pumping of the working fluid to the pressurizing chamber 21C and forced discharge of the working fluid from the pressurizing chamber 21C. As a result, the diaphragm unit 30 repeatedly curves in the pressurizing chamber 21C and the pump chamber 22C, and compresses the fluid (hydrogen gas in the present embodiment) in the pump chamber 22C to a specified pressure (50 MPa). In this case, in order to ensure the liquid tightness of both the main body parts on the pressurizing chamber side and the pump chamber side, a rubber seal member 25 is attached to the joint portion of both parts. Further, a metal seal member 26 is mounted between the pump chamber side body part 22 and the diaphragm unit 30 in order to ensure liquid tightness of the pump chamber 22C included in the pump chamber side body part 22. By ensuring liquid tightness with such a sealing member, the diaphragm unit 30 partitions the pressurizing chamber 21C and the pump chamber 22C in a liquid tight manner.

  The pump chamber 22C of the pump chamber side body part 22 has an asymmetric shape with the pressurizing chamber 21C. The pump chamber 22C includes a hydrogen source 40, a flow path opening / closing valve 41, an inflow check valve 42, and a gas inflow port. Hydrogen gas flows in through 22HIN. The hydrogen gas that wants to flow into the pump chamber 22C is compressed through the curvature of the diaphragm unit 30, and then discharged from the gas outlet port 22HOUT located at the center of the pump chamber 22C. It is sent to the hydrogen tank 50 through the opening / closing valve 44 and stored under high pressure in the tank.

  Further, the diaphragm compressor 10 includes a hollow detection chamber 27 that surrounds the diaphragm unit 30 along its outer peripheral edge in order to detect cracks and cracks generated in the diaphragm unit 30. Then, the control device 70 of the diaphragm compressor 10 monitors the pressure transition of the detection chamber 27 by the pressure sensor 29 attached to the sensor attachment port 28 and controls the drive of the piston driver 64 in the hydraulic fluid feeder 60. Supply / discharge of the high-pressure hydraulic fluid to / from the pressurizing chamber 21C, and opening / closing control of the flow path opening / closing valve 41 and the flow path opening / closing valve 44 accompanying the supply / discharge are performed.

  As shown in FIGS. 1 and 2, the diaphragm unit 30 responsible for gas compression includes a first diaphragm 32 on the pressurizing chamber 21C side, a second diaphragm 34 on the pump chamber 22C side, and an intermediate diaphragm therebetween. 36 are provided in close contact with each other. Each of the diaphragms is a metal diaphragm obtained by press-forming a spring steel plate, and the first diaphragm 32 and the second diaphragm 34 are circular plate bodies. The intermediate diaphragm 36 is a plate having the same shape as the two diaphragms. The intermediate diaphragm 36 is provided with arc through holes 37 formed through an arc-shaped locus around the diaphragm center at three positions at an equal pitch. Has a notch 38 extending to the outer periphery of the diaphragm. The notches 38 are formed radially at equal pitches from the diaphragm center.

  In making the diaphragm unit 30 using the above three diaphragms, the contact area of each diaphragm, specifically, the entire surface of the first diaphragm 32 facing the intermediate diaphragm 36 and the second diaphragm 34 facing the intermediate diaphragm 36. A lubricant is applied to the entire surface of the substrate through a lubricant (grease) application device (not shown), and then the diaphragm unit 30 is obtained through adhesion and lamination of the diaphragms. As described above, the diaphragm unit 30 is sandwiched between the pressurizing chamber side main body part 21 and the pump chamber side main body part 22 to partition the pressurizing chamber 21C and the pump chamber 22C.

  The diaphragm compressor 10 having the diaphragm unit 30 is configured such that the diaphragm unit 30 protrudes toward the pump chamber 22C or is pressurized through the supply / discharge of the high-pressure hydraulic fluid from the hydraulic fluid feeder 60 to the pressurization chamber 21C. It is repeatedly curved so as to protrude toward the side of 21C, and hydrogen gas is compressed to the specified pressure by the diaphragm curvature and stored in the hydrogen tank 50. The diaphragm unit 30 of the present embodiment has been described above in a state where friction is suppressed by the lubricant interposed between the first diaphragm 32 and the intermediate diaphragm 36 and between the second diaphragm 34 and the intermediate diaphragm 36. To bend repeatedly. The lubricant that is interposed between the first diaphragm 32 and the intermediate diaphragm 36 and the lubricant that is interposed between the second diaphragm 34 and the intermediate diaphragm 36 are intermediate between the repeated bending of the diaphragm unit 30 described above. It is pushed out toward the circular arc through hole 37 formed in the diaphragm 36.

  For this reason, since it was not desired to uniformly apply the lubricant over the entire surfaces of the first diaphragm 32 and the second diaphragm 34, even if the lubricant is excessively unevenly distributed at an appropriate position on the application surface, the excessive presence of the lubricant is present. The lubricant at the location receives the extrusion accompanying the repeated bending of the diaphragm unit 30 and enters the circular arc through hole 37 of the intermediate diaphragm 36. Therefore, the uneven distribution of the lubricant in the contact area between the first diaphragm 32 and the intermediate diaphragm 36 and the contact area between the second diaphragm 34 and the intermediate diaphragm 36 is eliminated as the curvature of the diaphragm unit 30 is repeated. As a result, according to the diaphragm compressor 10 of the present embodiment, it is possible to suppress problems due to the excessive presence of the lubricant between the diaphragms constituting the diaphragm unit 30, that is, stress concentration based on local deformation. Therefore, not only the diaphragm unit 30 itself but also the durability of the individual metal diaphragms constituting the unit can be enhanced.

  In order to improve the durability of such a diaphragm, in this embodiment, an arcuate arc through-hole 37 is merely formed (punched) in the intermediate diaphragm 36 between the first diaphragm 32 and the second diaphragm 34. For this reason, when applying lubricant on the entire surface of the first diaphragm 32 and the entire surface of the intermediate diaphragm 36, strict process control is unnecessary, which is preferable because the process control can be simplified. In addition, since it is only necessary to stack the first diaphragm 32 and the second diaphragm 34 on which the lubricant is applied to the intermediate diaphragm 36 in which the circular arc through hole 37 is formed, it is possible to easily obtain the diaphragm unit 30 having high durability. it can. In addition, the durability of the diaphragm in the existing compressor can be easily replaced by replacing the diaphragm unit in the existing diaphragm compressor simply by stacking the diaphragms of the circular plate with the diaphragm unit 30 of this embodiment. Can be increased.

  Moreover, in order to eliminate the uneven distribution of the lubricant, it is only necessary to form the arc-shaped arc through hole 37 in the intermediate diaphragm 36. Therefore, the intermediate diaphragm 36 having the arc through hole 37 can be easily manufactured by a mass-productive press. . Therefore, not only process setting but also process management can be simplified and the cost can be reduced.

  Further, in this embodiment, since the arc-shaped arc through holes 37 are formed around the center of the diaphragm at an equal pitch in the intermediate diaphragm 36, the diaphragm unit is convex toward the pump chamber 22C or convex toward the pressurizing chamber 21C. The curvature of 30 is even around the center of the diaphragm. Therefore, even if the arcuate through hole 37 is provided in the intermediate diaphragm 36, the durability of the diaphragm unit 30 can be improved.

  In addition, in the diaphragm compressor 10 of the present embodiment, the detection chamber 27 is provided on the outer peripheral edge of the diaphragm unit 30 after forming the notches 38 extending radially from the arc through hole 37 to the outer peripheral edge of the diaphragm. And since the pressure of this detection chamber 27 is monitored via the pressure sensor 29, there exist the following advantages.

  The cracks and cracks in the first diaphragm 32 and the second diaphragm 34 constituting the diaphragm unit 30 cause a leak in the pressurizing chamber 21C and the pump chamber 22C, so that the hydraulic fluid and the gas are separated from the first diaphragm 32 and the first diaphragm 32 by this leak. After entering the contact area with the intermediate diaphragm 36 to which the two diaphragms 34 are in close contact, the detection chamber 27 on the outer periphery of the diaphragm is reached. In the present embodiment, the arc through hole 37 is formed in the diaphragm contact area, and the notch 38 is extended from the through hole so as to reach the detection chamber 27. Therefore, the pressure abnormality in the detection chamber 27 due to the leak described above. Can be quickly detected by the pressure sensor 29. For this reason, the control device 70 that detects this pressure abnormality can promptly stop the operation of the hydraulic fluid pressure transmitter 60 and perform the valve closing control of the flow path opening / closing valve 41 and the flow path opening / closing valve 44. It is possible to perform an emergency stop of the device at the time of occurrence, prompt abnormality notification, or the like.

  Further, in the diaphragm compressor 10 of the present embodiment, the pump chamber 22C and the pressurizing chamber 21C are asymmetric as shown in FIG. 1, and the degree of depression in the pressurizing chamber 21C is increased. Therefore, there are the following advantages. The curvature of the diaphragm unit 30 occurs with the supply / discharge of the high-pressure hydraulic fluid from the hydraulic fluid pressure transmitter 60 side to the pressurizing chamber 21 </ b> C, and the supply amount and the discharge amount of the hydraulic fluid are the same. For this reason, the degree of bending of the diaphragm unit 30 that protrudes toward the pump chamber 22C is the same as the degree of bending of the diaphragm unit 30 that protrudes toward the pressurizing chamber 21C. In this embodiment, when the diaphragm unit 30 is curved so as to be convex toward the pump chamber 22C, the diaphragm unit 30 causes the second diaphragm 34 to be close to the wall surface of the pump chamber 22C, and the curve is made. The supply amount and discharge amount of the high-pressure hydraulic fluid from the hydraulic fluid feeder 60 were determined so as to wake up. Then, in this embodiment, even if the diaphragm unit 30 is curved so as to protrude toward the pressurizing chamber 21C that is asymmetric and large in depression with the pump chamber 22C, the first diaphragm 32 in the diaphragm unit 30 is the pressurizing chamber. It curves only to the state where it is separated from the wall surface of 21C. Therefore, since the so-called sticking of the diaphragm unit 30 to the wall surface of the pressurizing chamber 21C can be prevented, coupled with the fact that the hydraulic fluid pressure from the hydraulic fluid feeder 60 is higher than the prescribed pressure (50 MPa) of gas compression, The diaphragm unit 30 can be smoothly and repeatedly bent.

  Next, a modified example of the diaphragm unit 30 will be described. FIG. 3 is an explanatory view showing an intermediate diaphragm 36A of the first modified example used in the diaphragm unit 30 in a perspective view and an arrow from the left and right, and FIG. 4 is an oblique view of the intermediate diaphragm 36B in the second modified example and an arrow from the left and right. It is explanatory drawing shown visually.

  The above-described intermediate diaphragm 36 has an arc-shaped arc through-hole 37. However, the intermediate diaphragm 36A and the intermediate diaphragm 36B shown in FIGS. 3 and 4 are formed with a bottom with an arc-shaped locus on the front and back surfaces of the diaphragm. It is characterized in that it has a circular groove 37A and a notched groove 38A having a bottom extending radially from the groove to the outer periphery of the diaphragm. 3 has an arc groove 37A and a notch groove 38A formed in the same phase on the front and back surfaces of the diaphragm, and the intermediate diaphragm 36B in FIG. 4 has an arc groove 37A and a notch groove on the front and back surfaces of the diaphragm. 38A are formed with different phases. That is, in the intermediate diaphragm 36B, the arc groove 37A and the notch groove 38A are shifted in phase by an amount corresponding to half of the arc locus of the arc groove 37A on the rear surface of the diaphragm with respect to the arc groove 37A and the notch groove 38A on the diaphragm surface. Is formed. The diaphragm unit 30 using the intermediate diaphragms 36A and 36B having the arc groove 37A and the notch groove 38A on the front and back surfaces can also achieve the effects described above by entering the lubricant into the arc groove 37A.

  FIG. 5 is an explanatory view showing an overall view and parts of a diaphragm unit 30A according to another modification. The diaphragm unit 30A includes a first diaphragm 32 and a second diaphragm 34 similar to the diaphragm unit 30, and is characterized in that an intermediate diaphragm 36C between the two diaphragms is formed from three thin plates. is there. That is, the intermediate diaphragm 36C is configured by adhering and laminating a thin end face diaphragm 36C2 on the front and back surfaces of a center diaphragm 36C1, which is a thin circular plate body, as shown in the drawing. The end face diaphragm 36C2 Similarly to the above, it has an arc through hole 37 and a notch 38. When the end face diaphragm 36C2 is closely attached to and laminated on the front and back surfaces of the center diaphragm 36C1, a lubricant is interposed between the diaphragms by application or the like. Even in the intermediate diaphragm 36A using the intermediate diaphragm 36C, the intermediate diaphragms 36A and 36B as shown in FIG. 3 and FIG. 4 can be obtained, so that the above-described effects can be obtained by entering the lubricant.

  FIG. 6 is an explanatory view showing an overall view and parts of a diaphragm unit 30B according to another modification. The diaphragm unit 30 </ b> B includes a first diaphragm 32 and a second diaphragm 34 similar to the diaphragm unit 30, and an intermediate diaphragm 36 </ b> D between the both diaphragms has only an arc through hole 37. Even in the intermediate diaphragm 36B using the intermediate diaphragm 36D, since the lubricant enters the arc through-hole 37 of the intermediate diaphragm 36D, the above-described effect (improvement of durability) can be achieved.

  FIG. 7 is an explanatory view showing an overall view and parts of a diaphragm unit 30C according to another modification. The diaphragm unit 30C includes a first diaphragm 32 and a second diaphragm 34 similar to the diaphragm unit 30, and an intermediate diaphragm 36E between the two diaphragms includes an arc-shaped through hole 37 and a notch 38 similar to the intermediate diaphragm 36. In addition, the center side arc through-hole 39 formed by an arc-shaped locus is equally divided inside the arc through-hole 37. Even in the intermediate diaphragm 36 </ b> C using the intermediate diaphragm 36 </ b> E, the above-described effects can be achieved by entering the lubricant into the circular arc through hole 37. Further, since the number of opportunities for entering the lubricant and the number of places where the lubricant enters are increased by the amount of the center-side arc through hole 39, the uneven distribution of the lubricant can be eliminated more quickly.

  FIG. 8 is an explanatory view showing an overall view and parts of a diaphragm unit 30D according to another modification. The diaphragm unit 30D includes a first diaphragm 32 and a second diaphragm 34 that are the same as the diaphragm unit 30, and an intermediate diaphragm 36F between the diaphragms is a radial through hole formed by a radially extending locus from the center of the diaphragm. 37B is equally provided around the center of the diaphragm. Even in the intermediate diaphragm 36D using the intermediate diaphragm 36F, the lubricant enters into the radial through holes 37B of the intermediate diaphragm 36F, so that the above-described effect (improvement of durability) can be achieved.

  FIG. 9 is an explanatory diagram for explaining another method for improving the durability of the diaphragm unit 30. As shown in the figure, in the diaphragm compressor 10A of this modification, the gas inflow port 22HIN for allowing gas to flow into the pump chamber 22C is arranged at equal intervals on a concentric circle centered on the gas outflow port 22HOUT of the pump chamber center. Arrange and prepare. By so doing, pressure inequalities in the pump chamber 22C are unlikely to occur as the gas flows into the pump chamber 22C from these gas inlet ports 22HIN. Therefore, the curvature of the diaphragm unit 30 that protrudes toward the pump chamber 22C is a curve toward the pump chamber 22C in a state in which the pressure is substantially uniform. For this reason, the diaphragm unit 30 can be repeatedly bent without hindrance, which is preferable in terms of improving durability. In this case, the configuration in which the gas inflow ports 22HIN are arranged at equal intervals on a concentric circle centered on the gas outflow port 22HOUT of the pump chamber center is separate from the diaphragm unit 30 incorporating the intermediate diaphragm 36 having the circular arc through holes 37. Can also be applied.

  As mentioned above, although the embodiment of the present invention has been described in the embodiments, the present invention is not limited to the above-described embodiments and modifications, and can be implemented in various modes without departing from the gist thereof. Is possible. For example, although the circular arc through-hole 37 is formed by an arc trajectory divided into three equal parts, it can also be an arc trajectory divided into two equal parts and four equal parts. The same applies to the arc groove 37A. Alternatively, the arc diaphragm 37A and the cutout groove 38A can be formed on the surfaces of the first diaphragm 32 and the intermediate diaphragm 36 facing the intermediate diaphragm 36, so that the intermediate diaphragm 36 can be a simple plate.

  Further, the number of diaphragms constituting the diaphragm unit 30 can be four or more. In this case, if the number of intermediate diaphragms 36, intermediate diaphragms 36A, etc. between the first diaphragm 32 and the second diaphragm 34 is increased. Good.

  In the above embodiment, the diaphragm unit 30 is bent by supplying and discharging the hydraulic fluid to and from the pressurizing chamber 21C. However, the diaphragm unit 30 is directly fixed to the diaphragm unit 30 and the diaphragm unit 30 is fixed by the piston. It can also be applied to a configuration in which the curve is curved.

It is explanatory drawing which shows roughly the whole structure of the diaphragm type compressor 10 as an Example of this invention. It is explanatory drawing which shows the whole image of the diaphragm unit 30 which the diaphragm compressor 10 has, and its parts by a perspective view. It is explanatory drawing which shows the intermediate diaphragm 36A of the 1st modification used for the diaphragm unit 30 by a perspective view and the arrow view from the left and right. It is explanatory drawing which shows the intermediate | middle diaphragm 36B of a 2nd modification by a perspective view and the arrow view from the left and right. It is explanatory drawing which shows the whole image of 30 A of diaphragm units of another modification, and its parts with a perspective view. It is explanatory drawing which shows the whole image of the diaphragm unit 30B of the other modification, and its parts by a perspective view. It is explanatory drawing which shows the whole image of the diaphragm unit 30C of the other modification, and its parts by a perspective view. It is explanatory drawing which shows the whole image of the diaphragm unit 30D of the other modification, and its parts by a perspective view. It is explanatory drawing for demonstrating the other method for aiming at the durable improvement of the diaphragm unit.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10, 10A ... Diaphragm compressor 20 ... Compressor main body 21 ... Pressurization chamber side main body part 21C ... Pressurization chamber 21H ... Hydraulic fluid port 22 ... Pump chamber side main body part 22HIN ... Gas inflow port 22HOUT ... Gas outflow port 22C ... Pump chamber 24B ... Bolt 24N ... Nut 25 ... Sealing member 26 ... Sealing member 27 ... Detection chamber 28 ... Sensor mounting port 29 ... Pressure sensor 30, 30A-30D ... Diaphragm unit 32 ... First diaphragm 34 ... Second diaphragm 36, 36A 36F ... Intermediate diaphragm 36C1 ... Center diaphragm 36C2 ... End face diaphragm 37 ... Arc through hole 37A ... Arc groove 37B ... Radial through hole 38 ... Notch 38A ... Notch groove 39 ... Center side arc through hole 40 ... Hydrogen source 41 ... Open / close flow path Valve 42 ... Inflow check valve 43 ... Outflow check valve 44 ... Flow path opening / closing valve 50 ... Hydrogen tank 60 ... Working hydraulic pressure feeder 62 ... Cylinder 63 ... Piston 64 ... Piston drive 70 ... Control device

Claims (6)

A diaphragm compressor in which a pressurizing chamber and a pump chamber are liquid-tightly divided by a metal diaphragm,
The first diaphragm on the pressurizing chamber side, the second diaphragm on the pump chamber side, and one or more intermediate diaphragms between the first and second diaphragms are adhered and stacked, and the diaphragms are adhered to each other. A diaphragm type compressor having an escape portion capable of entering a lubricant intervening in the close contact area.   The diaphragm-type compressor according to claim 1, wherein the escape portion is formed in the intermediate diaphragm.   The diaphragm type compressor according to claim 2, wherein the escape portion is a groove penetrating the intermediate diaphragm.   The diaphragm type compressor according to any one of claims 1 to 3, wherein the escape portion is formed equally around the center of the diaphragm in the contact area.   The diaphragm compressor according to claim 4, wherein the relief portion formed in equal parts has an arc shape.   6. The diaphragm compressor according to claim 5, further comprising a radial relief portion extending from each arcuate relief portion to the outer periphery of the diaphragm.

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