JP2009256029A - Conveyance device for tabular member and conveyance method for tabular plate-like member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conveyance device for a tabular member capable of highly performing processing for high surface flatness for the tabular member in the middle of a conveyance path, and to provide a conveyance method for the tabular member. <P>SOLUTION: This conveyance device 10 is provided with a floating means 20 with a plurality of floating members 21 arranged along the conveyance direction of a glass substrate 11 for making the glass substrate 11 floated, a conveyance means 30 retaining the glass substrate 11 in a condition with the glass substrate 11 floated from the floating members 21 and conveying the glass substrate 11 to the downstream side along the conveyance direction, and a processing section 40 performing exposure processing to the substrate 11 in the middle of the conveyance path in the conveyance means 30. In a region corresponding to the processing section 40, a horizontal floating member 43 is provided as a surface flatness improving means. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a plate-shaped member conveyance device and a plate-shaped member conveyance method for conveying a plate-shaped member such as a glass substrate used in a display, for example.

2. Description of the Related Art Conventionally, a substrate transfer device is known for transferring a plate-like member such as a glass substrate used for a display (see, for example, Patent Document 1).
In Patent Document 1, a glass substrate is levitated by a levitating block in which a plurality of air holes are formed, and a rear surface on the downstream side along the conveying direction of the levitated glass substrate is held by being sucked by an adsorbing pad while being pulled. Transport.
Patent publication 2003-86917

By the way, the glass substrate used for the display is often transported while passing through a processing unit that performs a predetermined process on the glass substrate in the middle of the transport path. As this process part, the process etc. which perform an exposure process to the peripheral part in the surface (upward surface) of a glass substrate can be illustrated, for example.
In general, a glass substrate used for a display is extremely thin, but in such a processing unit, the glass substrate is required to have a very high flatness on the surface.

However, since Patent Document 1 described above has a plurality of floating blocks arranged in parallel at a predetermined interval along a direction perpendicular to the conveyance direction and parallel to the conveyance direction of the glass substrate, in other words, A gap is formed between the floating blocks.
That is, in Patent Document 1, in the processing unit that performs exposure processing on the surface of the glass substrate, there is a place where air does not hit the back surface of the glass substrate. There is a problem that can not be done.

  In general, when exposure processing is performed in a frame shape along the periphery of a rectangular glass substrate, first, exposure processing is performed on a pair of edges parallel to each other, and then a line along the thickness direction is centered. In many cases, the glass substrate is rotated by a predetermined angle, and the remaining pair of edges are exposed. That is, when the exposure process is performed in a frame shape along the periphery of the rectangular glass substrate, a step of rotating the glass substrate by a predetermined angle is essential.

  However, in Patent Document 1 described above, since the downstream back surface along the conveyance direction of the glass substrate is adsorbed and supported by the adsorption pad, the adsorption pad is temporarily used before the step of rotating the glass substrate by a predetermined angle. After the step of moving the glass substrate away from the glass substrate and rotating the glass substrate by a predetermined angle, it is necessary to adsorb the suction pad to the glass substrate again.

  The above problems do not occur only when the exposure process is performed when transporting a glass substrate used for a display. When transporting a plate-like member, the flatness of the surface of the plate-like member is midway along the transport path. This occurs when the required processing is performed.

  The present invention has been made in order to solve the above-described problem, and a plate-shaped member conveying apparatus and a plate-shaped member conveying method capable of highly performing processing that requires the surface flatness of the plate-shaped member in the middle of the conveying path. The purpose is to provide.

  In addition, the present invention was made to solve the above-described problem, and a plate-shaped member conveying apparatus and plate capable of shortening tact even when the plate-shaped member is rotated around a line along the thickness direction. An object of the present invention is to provide a method for conveying a member.

  In the plate-shaped member conveyance device according to the present invention, a plurality of floating members are arranged in parallel along the conveying direction of the plate-like member by jetting gas upward from a plurality of injection ports. Levitation means, and conveying means for holding the plate member in a state where the plate member is levitated from the levitation member by the levitation means and conveying the plate member toward the downstream side in the conveyance direction. And a processing unit for performing processing for obtaining the surface flatness of the plate-shaped member in the middle of the transport path in the transporting means, corresponding to the processing unit in the levitation means In the region, means for improving the surface flatness of the plate-like member is provided.

  In the present invention, since the surface flatness improving means for the plate-like member is provided in the processing portion that performs the processing for which the surface flatness of the plate-like member is required, the plate-like member is provided in the treatment portion as compared with the conventional case. Therefore, for example, the exposure process or the like can be performed with high accuracy.

  Further, the plate-like member conveying apparatus of the present invention is characterized in that the surface flatness improving means includes a laterally levitating member provided along a direction intersecting the conveying direction. .

  In the present invention as described above, it is possible to make the density of the injection ports uniform by disposing the transversely levitating members along the direction intersecting the transport direction. Thus, the risk of the surface of the surface being undulated can be reliably reduced.

  Furthermore, the plate-like member conveying apparatus according to the present invention includes a plurality of the floating members arranged at predetermined intervals along a direction orthogonal to the conveying direction, and the surface flatness improving means includes It has the section floating member arranged between the floating members, It is characterized by the above-mentioned.

  In the present invention, by arranging the section levitation members between the levitation members, it becomes possible to make the density of the injection ports uniform, and the surface of the plate-like member can be surely wavy in the processing section. You can do less.

  In the plate member conveying apparatus of the present invention, a plurality of the floating members are arranged at predetermined intervals along a direction orthogonal to the conveying direction, and the surface flatness improving means A plurality of support pads for injecting gas from a number of injection ports are provided, and each of the support pads is laid between the floating members.

  In the present invention, it is possible to make the density of the injection ports uniform by laying the support pads between the floating members, and it is possible to reliably cause the surface of the plate-like member to undulate in the processing section. You can do less.

  Further, the plate-like member conveying device of the present invention is characterized in that the surface flatness improving means includes a jet port for jetting the gas and a suction port for sucking outside air in a region corresponding to the processing unit in the levitation unit. It has the injection suction member provided with.

  In the present invention, in the region corresponding to the processing unit, by including the ejection suction member including the ejection port and the suction port, the possibility that the surface of the plate-like member undulates in the processing unit can be reliably reduced. .

  Furthermore, the plate-like member conveying apparatus according to the present invention includes a plurality of the floating members arranged at predetermined intervals along a direction orthogonal to the conveying direction, and the surface flatness improving means includes It has the coating | coated member which covers the clearance gap between floating members, It is characterized by the above-mentioned.

  In such this invention, by having the coating | coated member which covers the clearance gap between each floating member, the possibility that the surface of a plate-shaped member may wave in a process part can be decreased reliably.

  And the conveying apparatus of the plate-shaped member of this invention has the floating member which has a floating member which floats a plate-shaped member by injecting gas from many injection ports upwards, and the said plate-shaped member by the said floating means A plate-like member conveying apparatus comprising: a conveying unit that holds the plate-like member in a state of being levitated from the levitation member and conveys the plate-like member toward the downstream side along the conveying direction; The transport means has a suction pad that is movable along the transport direction and is rotatable about a line along the thickness direction of the plate-like member, and the suction pad is a flat surface of the plate-like member. It is characterized by adsorbing at the center.

Here, when the plate-like member has a rectangular shape, the plane center portion indicates the inside of a circle drawn with a predetermined radius around the intersection of diagonal lines.
The predetermined radius is a radius at which the corners of the plate member do not interfere with other structures in a rotation process region in which the plate member is rotated by a predetermined angle around a line along the thickness direction. It is said.

  In the present invention, since the suction pad is attracted to the center of the flat surface of the plate member, the thickness direction is compared with the case where the downstream back surface along the transport direction of the plate member is sucked by the suction pad. When performing the step of rotating the plate-like member by a predetermined angle around the line along the line, it is not necessary to temporarily separate the suction pad from the plate-like member and again suck the suction pad to the plate-like member. Tact can be shortened.

  In the plate-shaped member conveying apparatus according to the present invention, the conveying means has a rotating shaft movable along the conveying direction, and the suction pad is connected to the rotating shaft.

  In the present invention, since the suction pad is connected to the rotation shaft movable along the transport direction, if the suction pad is sucked to the plate-like member supplied upstream in the transport direction, the transport direction There is no need to separate and re-adsorb the suction pad until the plate-like member is carried out from the downstream side, thereby reducing the tact.

  Furthermore, the plate-like member conveying apparatus of the present invention includes a maintaining unit that maintains the plate-like member horizontally, and a conveying unit that holds the plate-like member and conveys the plate-shaped member from the upstream side in the conveying direction to the downstream side in the conveying direction. A plate-like member conveying apparatus, wherein the conveying means is movable along the conveying direction and can be adsorbed to the plate-like member, and the plate-like member is linked to the adsorption pad. It has the supporting member to support, It is characterized by the above-mentioned.

  In the present invention, even if there is a region where the maintaining means cannot be provided for moving the suction pad, the support can be transported in a state where the plate-like member is reliably supported by the support member interlocked with the suction pad. Become.

  And the conveying apparatus of the plate-shaped member of this invention has a levitation | floating member which the said support means raises the said plate-shaped member by injecting gas from many injection ports toward the upper direction, The said support member is The moving levitation member has the same function as the levitation member.

  In the present invention, by using the support member as a moving levitation member, the plate-like member can be conveyed in a state of being reliably levitated.

  In the plate-shaped member conveying apparatus according to the present invention, the support member includes a rolling element that is rotatable while being in contact with the plate-shaped member.

  In such this invention, by providing the rolling member which can be rotated in a support member, a rolling member is made to contact with a plate-shaped member, and it can convey in the state which supported the plate-shaped member reliably.

  Further, the plate-like member conveying apparatus of the present invention is characterized in that the support member is provided along the conveying direction and on the upstream side in the conveying direction and the downstream side in the conveying direction with the suction pad interposed therebetween.

  In the present invention, since the support member is provided on the upstream side in the transport direction and the downstream side in the transport direction with the suction pad interposed therebetween, even when the suction pad is sucked to the plane center portion of the plate-like member, The plate member can be evenly supported.

In the plate member conveying method of the present invention, the floating member that injects the gas from a large number of injection ports upward is parallel along the conveying direction and along a direction orthogonal to the conveying direction. Placing a plate-like member on the upstream side in the conveyance direction in the levitation means arranged in a plurality at predetermined intervals,
In a state where the plate-like member is levitated from the levitation member by the levitation means, the adsorption pad is held between the levitation members by being adsorbed to the central portion of the lower surface of the plate-like member, and then the adsorption pad and The plate-like member is transported by moving a moving levitation member provided upstream in the transport direction and downstream in the transport direction across the suction pad from the upstream side in the transport direction to the downstream side in the transport direction, A predetermined treatment is performed on the surface of the plate-like member by the processing unit while the surface of the plate-like member is flattened by an area provided with means for improving the surface flatness of the plate-like member in the middle of the conveyance path in the conveyance means. The plate-like member is rotated by rotating the suction pad of the transport means after passing through the processing unit.

  In the present invention, since the suction pad is sucked to the center of the flat surface of the plate-like member, when the step of rotating the plate-like member by a predetermined angle about the line along the thickness direction is temporarily sucked. A step of separating the pad from the plate member and adsorbing the suction pad to the plate member again can be eliminated.

  Further, the plate-like member conveyance method of the present invention is characterized in that the next plate-like member is thrown into the conveyance direction upstream side while the suction pad is moved to the conveyance direction downstream side.

  In the present invention, by inserting the next plate member while moving the suction pad, it is possible to perform continuous work and shorten the process tact.

  According to the present invention, since the surface flatness improving means for the plate-like member is provided in the processing portion for performing the processing for which the surface flatness of the plate-like member is required, the surface of the plate-like member is corrugated in the processing portion as compared with the conventional case. For example, exposure processing can be performed with high accuracy.

  Further, in the present invention, since the suction pad is attracted to the center of the flat surface of the plate-like member, the suction pad is temporarily attached when performing the step of rotating the plate-like member by a predetermined angle about the line along the thickness direction. There is no need to separate the suction pad from the plate-like member and suck the suction pad to the plate-like member again, thereby shortening the tact.

DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a plate-shaped member conveying apparatus and a plate-shaped member conveying method according to the present invention will be described with reference to the drawings.
A transport apparatus 10 according to the first embodiment shown in FIG. 1 is for transporting a glass substrate 11 that is a plate-like member used for a display from left to right in FIG.
The transport device 10 includes a levitation unit 20 for levitating the glass substrate 11, a transport unit 30 for transporting the glass substrate 11, and a processing unit 40 provided in the middle of the transport path in the transport unit 30. .

The levitation means 20 has a plurality of levitation members 21 that levitate the glass substrate 11 by injecting gas upward from a number of injection ports.
The levitation member 21 has a substantially flat rectangular tube shape, and a large number of injection holes are provided on the upper surface at regular intervals. A plurality of such levitation members 21 are arranged at a predetermined interval along a direction parallel to the conveyance direction (left and right direction in FIG. 1) and perpendicular to the conveyance direction.
Note that the levitation means 20 is provided with a gap 22 at the center so as not to interfere with the conveyance means 30.

  As shown in FIG. 2, the conveying means 30 is supported by the rail 31 provided immediately below the gap 22, the guide member 32 movable along the rail 31, and the guide member 32. A motor 33 having a rotating shaft 36 (see FIG. 3) oriented vertically, a suction pad 34 connected to the rotating shaft 36 of the motor 33, and a pair of moving levitation members (supporting members) 35 supported by the guide member 32. , 35.

The moving levitation members 35 and 35 have a substantially flat rectangular tube shape like the above-described levitation member, and a large number of injection ports are provided on the upper surface at regular intervals. These movable levitation members 35 and 35 are provided along the transport direction and sandwiching the suction pad 34, and are movable along the transport direction in conjunction with the suction pad 34.
Returning to FIG. 1, in such a conveying means 30, the suction pad is disposed so as to be suckable at the center of the plane of the glass substrate 11.

As shown in FIG. 3, the processing unit 40 includes a gate-shaped support member 41 along the direction orthogonal to the transport direction, and a support in order to perform an exposure process on the entire surface (the entire upward surface) of the glass substrate 11. And an exposure device 42 that is movable along the member 41.
In order to perform the process for which the surface flatness of the glass substrate 11 is required, such a processing unit 40 makes the density of the injection ports uniform along the direction intersecting the transport direction.
Specifically, the processing unit 40 includes a pair of laterally levitating members (surface flatness improving means) 43, avoiding the gap 22, along the support member 41, that is, along the direction intersecting the transport direction. 43 is provided.

Next, the conveyance procedure in the above conveying apparatus 10 is demonstrated.
As shown in FIG. 1, in the state where air is previously jetted from the jet port of the floating member 21, the conveyance direction upstream side of the floating means 20 from the upper left to the lower side in FIG. 1 (left side in FIG. 1). The glass substrate 11 is put into the glass substrate 11, and the suction pad 34 disposed in the gap 22 is held by being attracted to the center of the lower surface of the glass substrate 11 in a state where the glass substrate 11 is lifted from the floating member 21 by the floating means 20. .

As shown in FIG. 4, the central portion of the suction pad on the lower surface of the glass substrate refers to the inside of a circle A drawn with a predetermined radius around the intersection of diagonal lines.
Circle B in FIG. 4 shows the locus of the corner of the glass substrate when the suction pad is rotated at the center of the glass substrate, that is, at the intersection of the diagonal lines, and circle C in FIG. Thus, the radius is such that the glass substrate does not interfere with other structures.
The radius of the circle A in FIG. 4 is set to a distance at which the locus of the corner of the glass substrate does not protrude from the circle C in FIG. 4 even if the suction pad is sucked at a position shifted from the center of the glass substrate. (See circle D in FIG. 4).

  Returning to FIG. 1 again, after rotating the suction pad 34 of the transport means 30 to rotate the glass substrate 11 by a predetermined angle, the suction pad 34 and the suction pad 34 are sandwiched between the upstream side and the downstream side in the transport direction. The glass substrate 11 is conveyed by moving the movable levitation members 35, 35 provided on the side from the upstream side to the downstream side in the conveyance direction, and is disposed horizontally along the support member 41 of the processing unit 40. Exposure processing is performed by the processing unit 40 while the surface of the glass substrate 11 is flattened by the floating members 43 and 43.

Then, the glass substrate 11 is rotated by rotating the suction pad 34 of the transport means 20 and is carried out to the next process.
While the transport unit 20 is moving downstream in the transport direction, the next glass substrate 11 is loaded on the upstream side in the transport direction, and the transport unit 20 is in a state where the glass substrate 11 is lifted from the levitation member 21 by the levitation unit 20. Wait until 30 returns to the initial position (upstream side).

According to the first embodiment as described above, in the processing unit 40 that performs processing for which the surface flatness of the glass substrate 11 is required, the density of the injection ports is made uniform along the direction intersecting the transport direction. Therefore, there is less possibility that the surface of the glass substrate 11 is undulated in the processing unit 40 as compared with the conventional case, and exposure processing and the like can be performed with high accuracy.
In particular, by arranging the horizontal floating members 43, 43 along the direction intersecting the transport direction, the density of the injection ports is made uniform, so that the surface of the glass substrate 11 in the processing unit 40 can be reliably corrugated. Can be less.

  Further, since the suction pad 34 is attracted to the center of the flat surface of the glass substrate 11, when performing the step of rotating the glass substrate 11 by a predetermined angle about the line along the thickness direction, the suction pad 34 is temporarily placed on the glass substrate. 11, it is not necessary to separate the suction pad 34 from the glass substrate 11 again, thereby reducing the tact time.

In particular, since the suction pad 34 is connected to the rotation shaft 36 (see FIG. 3) of the motor 33 that can move along the transport direction, the glass substrate 11 supplied to the upstream side in the transport direction is unloaded from the downstream side in the transport direction. Thus, the suction pad 34 does not need to be separated and re-sucked until the tact time is reduced.
Furthermore, while the transporting unit 20 is moving downstream in the transport direction, by inserting the next glass substrate 11 on the upstream side in the transport direction, continuous work can be performed, and the tact can be further shortened.

Moreover, since the conveyance means 30 has the movable levitation members 35 and 35 movable in the conveyance direction in conjunction with the suction pad 34, the glass substrate 11 can be moved even if there is a gap 22 in the conveyance path. It can be transported in a state of being lifted securely.
In particular, since a pair of moving levitation members 35 and 35 are provided across the suction pad 34, even when the suction pad 34 is attracted to the center of the plane of the glass substrate 11, the glass substrate 11 can be evenly levitated. it can.

Next, Modifications 1 to 5 with respect to the transport apparatus 10 according to the first embodiment will be described with reference to FIGS. Note that, in the first to fifth modifications, the same or similar members as those of the transport device 10 are denoted by the same reference numerals and description thereof is omitted.
(Modification 1)
The transport device 10 according to the first embodiment has described the direct drive motor configuration in which the rotation shaft 36 is directly rotated by the motor 33 as a means for rotating the rotation shaft 36. However, the rotation mechanism 50 shown in FIG. Is also possible.
The rotation mechanism 50 is a combination of a motor 51 and a gear 52. According to the rotating mechanism 50, the gear 52 rotates by rotating the motor 51, and the suction pad 34 rotates together with the rotating shaft 36 by rotating the gear 52.
According to the rotation mechanism 50 of the first modification, since it is not necessary to use a direct drive motor, an effect that the manufacturing cost of the transport apparatus 10 can be reduced is obtained.

(Modification 2)
Further, instead of the direct drive motor configuration used in the transport apparatus 10 of the first embodiment, a rotation mechanism 55 shown in FIG. 5B can be used.
The rotation mechanism 55 is a combination of an air drive source 56 and a gear 57. According to the rotation mechanism 55, the gear 57 rotates by driving the air drive source 56, and the suction pad 34 rotates together with the rotating shaft 36 by rotating the gear 57.
According to the rotation mechanism 55 of the second modification, since it is not necessary to use a direct drive motor, an effect that the manufacturing cost of the transport apparatus 10 can be reduced is obtained.

(Modification 3)
Furthermore, instead of the direct drive motor configuration used in the transport apparatus 10 of the first embodiment, a rotation mechanism 60 shown in FIG. 5C can be used.
The rotation mechanism 60 is a combination of a motor 61 and an endless belt 62. According to the rotating mechanism 60, the endless belt 62 rotates by rotating the motor 61, and the suction pad 34 rotates together with the rotating shaft 36 by rotating the endless belt 62.
According to the rotation mechanism 60 of the third modification, since it is not necessary to use a direct drive motor, an effect that the manufacturing cost of the transport apparatus 10 can be reduced is obtained.

(Modification 4)
The transport apparatus 10 according to the first embodiment has the pair of movable levitation members 35 and 35 provided upstream in the transport direction and downstream in the transport direction with the suction pad 34 interposed therebetween. As shown, a plurality of moving levitation members 35, 35 can be arranged in parallel on the upstream side in the transport direction, and a plurality of moving levitation members 35, 35 can be arranged in parallel on the downstream side in the transport direction.
According to the modified example 4, since a plurality of the movable levitation members 35 and 35 are arranged in parallel on the upstream side in the transport direction and the downstream side in the transport direction, a wide gap between the levitation members 21 can be secured, and as a result, the adsorption The pad 34 can be enlarged, and the adsorption power to the glass substrate 11 can be increased.
Moreover, the larger glass substrate 11 can also be rotated by these.

(Modification 5)
Further, instead of the moving levitation members 35 and 35 of the transport apparatus 10 of the first embodiment, as shown in FIGS. 7A and 7B, a support member 65 can be used.
The support member 65 includes a plurality of rolling elements 66 that can rotate while being in contact with the glass substrate 11 and a base 67 that rotatably supports the plurality of rolling elements 66.
According to the modified example 5, since the floating member is not used, the member cost can be reduced and the air consumption can be suppressed.

  Next, a plate-like member conveying apparatus and a plate-like member conveying method according to the second to fifth embodiments will be described with reference to FIGS. In the second embodiment to the fifth embodiment, the same or similar members as those of the transport apparatus 10 of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

(Second Embodiment)
The transport device 70 of the second embodiment shown in FIGS. 8 and 9 is provided with a surface flatness improving means 71 in place of the laterally levitating members 43 and 43 of the first embodiment, and other configurations are as follows. This is the same as the transport apparatus 10 of the first embodiment.
In the processing unit 40, the surface flatness improving means 71 includes a plurality of floating members 21 that are continuously arranged at predetermined intervals along a direction orthogonal to the transport direction, and a section floating member 72 is provided between the floating members 21. ing.

As shown in FIG. 9, the section floating member 72 is formed to have a short length L so that it is disposed only in the region 40 </ b> A of the processing unit 40.
This section floating member 72 has a function of floating the glass substrate 11 by injecting gas upward from a number of injection ports on the upper surface 72A, similarly to the horizontal floating members 43 and 43 of the first embodiment. ing.
Therefore, by providing the section levitation member 72 between the levitation members 21, the surface of the glass substrate 11 is made uniform in the processing unit 40 with the density of the injection ports made uniform, similarly to the horizontal levitation members 43 and 43 of the first embodiment. The risk of undulation can be reliably reduced.

  Thereby, according to the conveyance apparatus 70 of 2nd Embodiment, similarly to 1st Embodiment, in the process part 40 which performs the process for which the surface flatness of the glass substrate 11 is calculated | required, there exists a possibility that the surface of the glass substrate 11 may wave. The exposure process and the like can be performed with high accuracy.

(Third embodiment)
The transport apparatus 80 of the third embodiment shown in FIGS. 10 and 11 is provided with a surface flatness improving means 81 in place of the horizontal levitation members 43 and 43 of the first embodiment, and other configurations are as follows. This is the same as the transport apparatus 10 of the first embodiment.
In the processing unit 40, the surface flatness improving means 81 includes a plurality of the floating members 21 that are continuously arranged at predetermined intervals along a direction orthogonal to the transport direction, and gas from a plurality of injection ports upward. A plurality of support pads 82 for injecting water are provided, and each support pad 82 is laid between the floating members 21.

Each support pad 82 is disposed only in the region 40A (see FIG. 8) of the processing unit 40.
The support pad 82 has a function of levitating the glass substrate 11 by injecting gas upward from a number of injection ports on the upper surface 82A, similarly to the horizontal floating members 43 and 43 of the first embodiment. Yes.
Therefore, by laying a plurality of support pads 82 between the levitation members 21, the surface of the glass substrate 11 in the processing unit 40 can be made uniform in the same manner as in the horizontal levitation members 43 and 43 of the first embodiment. It is possible to reliably reduce the risk of undulation.

  Thereby, according to the conveyance apparatus 80 of 3rd Embodiment, similarly to 1st Embodiment, in the process part 40 which performs the process for which the surface flatness of the glass substrate 11 is calculated | required, there exists a possibility that the surface of the glass substrate 11 may wave. The exposure process and the like can be performed with high accuracy.

(Fourth embodiment)
The transport device 90 of the fourth embodiment shown in FIGS. 12 and 13 is provided with a surface flatness improving means 91 in place of the laterally levitating members 43 and 43 of the first embodiment, and other configurations are as follows. This is the same as the transport apparatus 10 of the first embodiment.
The surface flatness improving unit 91 includes an injection port for injecting gas upward and a suction port for sucking outside air on the upper surface 92A in the region 40A (see FIG. 8) corresponding to the processing unit 40 in the levitation unit 20. An injection suction member 92 is provided.
By providing the jetting suction member 92 with a suction port for sucking outside air, the gas below the glass substrate 11 can be maintained appropriately, and the risk of the surface of the glass substrate 11 undulating in the region 40A can be reliably reduced.

  Thereby, according to the transfer apparatus 90 of 4th Embodiment, similarly to 1st Embodiment, in the process part 40 which performs the process for which the surface flatness of the glass substrate 11 is calculated | required, there exists a possibility that the surface of the glass substrate 11 may wave. The exposure process and the like can be performed with high accuracy.

(Fifth embodiment)
The transport apparatus 100 of the fifth embodiment shown in FIGS. 14 and 15 is provided with a surface flatness improving means 101 in place of the horizontal levitation members 43 and 43 of the first embodiment, and other configurations are as follows. This is the same as the transport apparatus 10 of the first embodiment.
In the surface flatness improving means 101, a plurality of floating members 21 are arranged at predetermined intervals along a direction orthogonal to the transport direction in a region 40 </ b> A (see FIG. 8) corresponding to the processing unit 40 in the floating means 20. And a covering member 102 that covers the gaps between the floating members 21.
By providing the covering member 102 that covers the gaps between the floating members 21, the gas below the glass substrate 11 can be appropriately maintained, and the risk of the surface of the glass substrate 11 undulating in the region 40A can be reliably reduced.

  Thereby, according to the conveyance apparatus 101 of 4th Embodiment, similarly to 1st Embodiment, in the process part 40 which performs the process for which the surface flatness of the glass substrate 11 is calculated | required, there exists a possibility that the surface of the glass substrate 11 may wave. The exposure process and the like can be performed with high accuracy.

  The present invention is not limited to the above-described embodiment, and the plate-like member, the floating member, the floating means, the conveying means, the processing unit, the suction pad, the motor, the moving floating member exemplified in the above-described embodiment, Appropriate deformation and improvement of the rotation mechanism, the support member, the surface flatness improving means, etc. are possible.

The top view which shows the conveying apparatus of 1st Embodiment which concerns on this invention. The principal part perspective view which shows the conveyance means of 1st Embodiment. The side view which shows the process part of 1st Embodiment. Schematic plan view showing the concept of the central part of the plate-like member (A) It is a perspective view which shows the rotation mechanism of the modification 1 instead of the motor of 1st Embodiment, (B) is a perspective view which shows the rotation mechanism of the modification 2, (C) is a rotation mechanism of the modification 3. Perspective view The perspective view which shows the movement floating member of the modification 4 instead of the movement floating member of 1st Embodiment. The perspective view which shows the support member of the modification 5 instead of the movement levitation member of 1st Embodiment. The top view which shows the surface flatness improvement means of 2nd Embodiment which concerns on this invention Side view showing the processing unit of the second embodiment Side view showing the processing unit of the third embodiment The perspective view which shows the surface flatness improvement means of 3rd Embodiment. Side view showing the processing unit of the fourth embodiment Sectional drawing explaining the flow of the gas by the surface flatness improvement means of 4th Embodiment Side view showing the processing unit of the fifth embodiment Sectional drawing explaining the flow of the gas by the surface flatness improvement means of 5th Embodiment

Explanation of symbols

10, 70, 80, 90, 100 Conveying device 11 Glass substrate (plate-like member)
DESCRIPTION OF SYMBOLS 20 Floating means 21 Floating member 30 Conveying means 40 Processing part 33 Motor 34 Suction pad 35 Moving floating member (supporting member)
43 Horizontally levitating member (surface flatness improving means)
65 Support members 71, 81, 91, 101 Surface flatness improving means

Claims (14)

Levitation means in which a plurality of levitation members that float the plate-like member by injecting gas from a number of injection ports upward are arranged in parallel along the conveying direction of the plate-like member;
Conveying means for holding the plate-like member in a state where the plate-like member is levitated from the levitating member by the levitating means and conveying the plate-like member toward the downstream side along the conveying direction;
A plate-like member conveying device comprising a processing unit that performs a process in which surface flatness of the plate-like member is required in the middle of the conveying path in the conveying means,
A plate-like member conveying apparatus, wherein a surface flatness improving means for the plate-like member is provided in an area corresponding to the processing section in the levitation means.   The plate-shaped member conveying apparatus according to claim 1, wherein the surface flatness improving means includes a laterally levitating member provided along a direction intersecting the conveying direction. A plurality of the floating members are arranged at predetermined intervals along a direction orthogonal to the transport direction,
2. The plate-like member conveying apparatus according to claim 1, wherein the surface flatness improving means includes section floating members arranged between the floating members. A plurality of the floating members are arranged at predetermined intervals along a direction orthogonal to the transport direction,
The surface flatness improving means has a plurality of support pads for injecting gas from a number of injection ports upward,
The said support pad is laid between each said floating member, The conveying apparatus of the plate-shaped member described in Claim 1 characterized by the above-mentioned.   The surface flatness improving means has an injection suction member comprising an injection port for injecting the gas and an intake port for sucking outside air in a region corresponding to the processing unit in the levitation means. The plate-shaped member conveying apparatus according to claim 1. A plurality of the floating members are arranged at predetermined intervals along a direction orthogonal to the transport direction,
The plate-shaped member conveying apparatus according to claim 1, wherein the surface flatness improving means includes a covering member that covers a gap between the floating members. A levitation means having a levitation member that levitates the plate-like member by injecting gas upward from a number of injection ports;
The plate-like member includes a conveying unit that holds the plate-like member in a state where the plate-like member is levitated from the levitating member by the levitating unit and conveys the plate-like member toward the downstream side along the conveying direction. A member conveying device comprising:
The transport means has a suction pad that is movable along the transport direction and rotatable about a line along the thickness direction of the plate-shaped member,
The plate-like member conveying apparatus, wherein the suction pad is sucked to a flat central portion of the plate-like member. The transport means has a rotation shaft movable along the transport direction;
8. The plate-shaped member conveying apparatus according to claim 7, wherein the suction pad is connected to the rotating shaft. Maintenance means for maintaining the plate-like member horizontally;
A plate-like member conveying apparatus comprising a conveying means that holds the plate-like member and conveys the plate-shaped member from the upstream side in the conveying direction to the downstream side in the conveying direction,
A suction pad that is movable along the transport direction and can be sucked by the plate member;
A plate-shaped member conveying apparatus comprising: a support member that supports the plate-shaped member in conjunction with the suction pad. The support means has a levitation member that levitates the plate member by injecting gas from a number of injection ports upward.
The plate-like member conveying apparatus according to claim 9, wherein the support member is a moving levitation member having a function equivalent to that of the levitation member.   The said supporting member is provided with the rolling element which can rotate while contacting with respect to the said plate-shaped member, The conveying apparatus of the plate-shaped member described in Claim 9 characterized by the above-mentioned.   The plate-shaped member conveyance device according to claim 9, wherein the support member is provided along the conveyance direction and on the upstream side in the conveyance direction and the downstream side in the conveyance direction with the suction pad interposed therebetween. Upstream in the conveyance direction in the levitation means in which a plurality of levitation members for injecting gas upward from a plurality of injection ports are arranged in parallel along the conveyance direction and at predetermined intervals along a direction orthogonal to the conveyance direction I put a plate-like member on the side,
In a state where the plate-like member is levitated from the levitation member by the levitation means, the suction pad is held between the levitation members by being adsorbed to the central portion of the lower surface of the plate-like member
Next, the plate-like shape is obtained by moving the suction pad and a moving levitation member provided on the upstream side in the transport direction and the downstream side in the transport direction across the suction pad from the upstream side in the transport direction to the downstream side in the transport direction. Transport the parts,
A predetermined treatment is performed on the surface of the plate-like member by the processing unit while flattening the surface of the plate-like member by an area provided with means for improving the surface flatness of the plate-like member in the middle of the conveyance path in the conveyance means. Done
A plate-shaped member conveying method, wherein the plate-shaped member is rotated by rotating the suction pad of the conveying means after passing through the processing section.   The method for transporting a plate-shaped member according to claim 13, wherein a next plate-shaped member is introduced upstream of the transport direction while the suction pad is moved downstream in the transport direction.

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