JP2009300232A - Mapping analyzer - Google Patents

Abstract

There is provided a mapping analysis apparatus capable of obtaining an optical observation image having the same field of view as a mapping observation range without any positional deviation, without taking extra time, regardless of the field of view of an observation image acquisition means.
A map image detection means (X-ray detector) for detecting a map image signal emitted from a plurality of mapping unit regions arranged on the surface of a sample, and optical observation of the surface of the sample. An image pickup means 22 for picking up an image, a signal interpolation extraction circuit 23a for removing a portion that is not an optical signal from the output signal of the image pickup means 22, and output signals of the map image signal detection means 28 and the signal interpolation extraction circuit 23a are stored. The image memory 25 to be moved, the XY stage 12 that sequentially moves the mapping unit region by moving the sample 11, and the map image signal detection means 28 and the signal interpolation extraction circuit 23a in synchronization with the movement of the XY stage 12. And a synchronization control circuit 27 for fetching the output signal into the image memory 25.
[Selection] Figure 1

Description

  The present invention irradiates a sample with an electron beam or an X-ray beam while driving a sample stage such as an electron beam microanalyzer (EPMA) or a micro fluorescent X-ray apparatus, and generates characteristic X-rays and reflected electrons generated from the sample. The present invention relates to a mapping analysis apparatus having a function of acquiring an image in which a position on a sample is associated with the intensity of a signal at the same time as acquiring secondary electrons as an analysis signal.

  In an EPMA or a micro fluorescent X-ray apparatus, an element contained in a sample is specified by irradiating one point of the sample with an electron beam or a condensed X-ray, and dispersing the X-ray generated therefrom. In these devices, in order to observe the distribution of a specific element on the sample, the X-ray intensity is measured while scanning the sample stage in a direction parallel to the surface, and the relationship between the scanning position and the X-ray intensity. In many cases (hereinafter referred to as “mapping function”). In these apparatuses, optical observation means (such as an optical microscope) is provided in order to find the analysis position, and imaging means (such as a television camera) is provided in order to acquire and store the observation image as data. Many. However, the field of view of the optical observation means is set so as to have sufficient resolution for finding the analysis position, and thus becomes a relatively narrow range. On the other hand, since the range for observing the element distribution by the mapping function is determined by the driving range of the sample, it may cover a wide area up to the full stroke of the XY stage 12, and does not match the field of view of the optical observation means. Is almost.

  Conventionally, for example, when an X-ray map image is created by EPMA, a map image of the surface shape of a sample by a secondary electron signal is displayed at the same time, whereby the correspondence between the surface shape and the element distribution can be observed. . The secondary electron image obtained by EPMA is monochrome due to the characteristics of the detection signal. In observation, since the actual color is displayed in addition to the shape of the sample surface, the observation becomes easy, so the optical observation image with the color of the actual sample surface can be displayed simultaneously with the map image. It is desired. In response to such a demand, conventionally, an imaging device such as a TV camera is attached to an analyzer such as EPMA, and a shape image of the sample surface is captured by this imaging device, and an optical observation image obtained by this imaging is obtained. What is displayed simultaneously with a map image is also known. When a display shape image is obtained by an imaging device, it is necessary to image the sample surface in advance by the imaging device and adjust the imaging data so as to match the acquisition range of the map image. For example, if the acquisition range of the map image is smaller than the imaging range of the imaging data, an optical observation image is created by adjusting the imaging data so as to cut out a range of the same size as the map image from the imaging data. On the contrary, when the acquisition range of the map image is larger than the imaging range of the imaging data, a plurality of imaging data is obtained while shifting the imaging range, and the plurality of imaging data is synthesized. Create an optical observation image.

  As described above, it is necessary to adjust the imaging data in order to obtain an optical observation image. However, since the adjustment involves an error, there is a problem that this error is directly shifted from the map image. In particular, when a plurality of pieces of imaging data with different imaging ranges are combined to match the large display size of the map image, this error is superimposed and becomes larger.

  For this reason, as shown in FIG. 12, the analysis range is divided into a plurality of irradiation regions (for example, irradiation regions A to I), and X-ray maps are synthesized by combining optical observation images acquired in the irradiation regions. A method of forming an optical observation image having the same field of view as an image has been proposed (see FIG. 3 of Patent Document 1). The broken line in the horizontal direction in FIG. 12 indicates a scanning locus. In FIG. 12, X-ray signals from the irradiation area A to the irradiation area G are acquired, and a map image is formed by these X-ray images. On the other hand, the optical observation image is acquired by performing image acquisition at a predetermined position during scanning. In the method proposed in Patent Document 1, this image acquisition position is determined for each irradiation region A to G. In the example illustrated in FIG. 12, for example, the image acquisition position Pa is set for the irradiation area A, the image acquisition position Pb is set for the irradiation area B, and the image is similarly applied to each of the irradiation areas C to I. Acquisition positions Pc to Pi are respectively set. These image acquisition positions Pa to Pi are normally set at the center of each irradiation region. In the method proposed in Patent Document 1, an image acquisition position set in advance during scanning is read, and when the image acquisition position is reached, the sample surface is imaged by an imaging means such as a television camera to acquire an image. And recorded. Then, the acquired images are combined and displayed on the display device.

In the method proposed in Patent Document 1, as shown in FIG. 13A, the X-ray signal is integrated as an integration period while scanning each irradiation region to form an X-ray integration signal. On the other hand, as shown in FIG. 13B, the imaging means such as a television camera is discrete at a predetermined time (for example, Pa, Pb, Pc) within the integration period in synchronization with the detection of the X-ray signal. By picking up images, images of corresponding irradiation areas are simultaneously acquired in real time. That is, the data acquisition procedure in the method proposed in Patent Document 1 is:
(a) The sample stage is moved so as to cross the “first irradiation area A” shown in FIG.
(b) integrating the X-ray signals obtained during that time;
(c) During the operation of (b), at the moment when the sample stage reaches the image acquisition position Pa shown in FIG. 12, the image of the irradiation area A is taken as a still image by the television camera;
(d) The sample stage is moved so as to cross the “next irradiation region B” shown in FIG.
A series of procedures described above are sequentially repeated along the image acquisition positions Pc to Pi to obtain an X-ray map image with each irradiation region as one pixel, and a plurality of discretely obtained TV camera images are connected and analyzed. An optical observation image of the entire range is obtained.
JP 2004-191183 A

  However, in the method proposed in Patent Document 1, as can be seen from the timing chart of FIG. 13, the sample stage is sequentially set to 1 at each of the image acquisition positions Pa to Pi defined discretely in space. There is a problem that the movement of the stage becomes complicated because it is necessary to be stationary (fixed) for acquiring the image for the screen. In addition to the mapping analysis, since the sample stage is stationary in time at the image acquisition positions Pa to Pi, extra time is required, resulting in a problem that the analysis time as a whole becomes long.

  Therefore, when the sample stage is continuously moved along the scanning trajectory as illustrated in FIG. 12 and the period detection signals moving within the irradiation area are integrated, the intensity data of the unit area (1 pixel) of the map image is acquired. At the same time, there is a need for a mapping analyzer that can acquire an optical observation image of the entire analysis range without stopping the sample stage.

  In view of the above-described problems, the present invention is capable of positioning the optical observation image having the same field of view as the mapping observation range regardless of the field of view of the observation image acquisition means for acquiring the optical observation image without taking extra time. Another object of the present invention is to provide a mapping analysis apparatus that can be obtained without accompanying.

  In order to achieve the above object, according to an aspect of the present invention, there is provided (a) a map image detecting means for detecting a map image signal emitted from a plurality of mapping unit regions arranged on the surface of a sample, and (b) (I) an image pickup means for picking up an optical observation image of the surface of the sample; (c) a signal interpolation extraction circuit for removing a portion that is not an optical signal such as a synchronization signal from the output signal of the image pickup means; (E) an image memory for storing output signals of the signal detection means and the signal interpolation extraction circuit, (e) an XY stage for moving a sample in a direction parallel to the surface and sequentially scanning a plurality of arranged mapping unit regions; And (f) a mapping analysis device comprising a map image signal detection means and a synchronization control circuit for fetching the output signal of the signal interpolation extraction circuit into the image memory in synchronization with the movement of the XY stage. To. And this mapping analyzer acquires the optical observation image of the surface of the sample which makes the area | region wider than the imaging range of an imaging means with the map image produced | generated from the signal for map images.

  According to the present invention, there is provided a mapping analyzer that can obtain an optical observation image having the same field of view as the mapping observation range without any positional deviation, without taking extra time, regardless of the imaging range of the imaging means. can do.

  Next, first to third embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the relationship between the thickness and the planar dimensions, the ratio of the thickness of each layer, and the like are different from the actual ones. Therefore, specific thicknesses and dimensions should be determined in consideration of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings.

  The first to third embodiments shown below exemplify apparatuses and methods for embodying the technical idea of the present invention, and the technical idea of the present invention is The material, shape, structure, arrangement, etc. are not specified below. The technical idea of the present invention can be variously modified within the technical scope described in the claims.

(First embodiment)
As shown in FIG. 1, the mapping analyzer according to the first embodiment of the present invention (in this specification, an analyzer having a mapping function is referred to as “mapping analyzer”) is provided on the surface of the sample 11. A map image detection means (X-ray detector) 28 for detecting a map image signal emitted from a plurality of mapping unit regions arranged in sequence, and an optical observation image of the surface of the sample 11 are continuously passed through the imaging support means 21. An image pickup means 22 for picking up an image, a signal interpolation extraction circuit 23a for removing a portion that is not an optical signal such as a synchronization signal or a signal during a blanking period from an output signal of the image pickup means 22, and a map image signal detection means ( X-ray detector) 28 and image memory 25 for storing output signals of signal interpolation and extraction circuit 23a, and sample 11 are moved in a direction parallel to the surface, and a plurality of mapping unit areas are sequentially arranged. The image memory 25 receives the output signals of the XY stage 12 to be checked and the map image signal detecting means (X-ray detector) 28 and the signal interpolation extracting circuit 23a in synchronization with the movement of the XY stage 12. The EPMA includes a synchronization control circuit 27. In the following, a television camera is exemplified as the imaging unit 22, but the imaging unit 22 is not limited to the television camera, and may be, for example, a digital camera having a continuous shooting function.

“Continuously capturing optical observation images” is intended to mean a technique compared to “discretely capturing optical observation images”. That is, as shown in FIG. 13, the sample stage is not sequentially stopped (fixed) at the respective image acquisition positions Pc to Pi discretely defined on the space, but mapping according to the first embodiment is performed. At the same time as the integration of the map image signal in the mapping unit area (1 pixel), the analyzer scans the image of the entire mapping unit area with the television camera and continuously acquires the optical observation image.

  Specifically, for example, the imaging support means 21 may arrange a reflector lens on the optical axis of the electron beam so that the upper surface of the sample is incidentally illuminated. In this case, the imaging support means 21 is a reflector lens. The optical observation image reflected by the light beam may be guided to the television camera 22 by an optical lens, and the illumination means may illuminate the sample surface via the reflector lens. That is, the illumination light from the illumination unit that forms part of the imaging support unit 21 is incidentally illuminated on the upper surface of the sample 11 via the optical lens and the reflector lens. Then, the optical observation image of the surface of the sample 11 by the illumination light is continuously formed on the television camera 22 through the reflector lens and the optical lens that form part of the imaging support means 21 again. In this specification, as described above, “continuous imaging of optical observation images” is used in contrast to “discrete imaging of optical observation images” as shown in FIG. Of course, the meaning of “continuously” does not include interruption of shooting during the retrace period of the television camera 22.

 In order to continuously acquire an optical observation image of the surface of the sample 11 having a wider area than the visual field of the television camera 22 together with a map image generated from the map image signal, the television camera 22 performs the first implementation. As shown in FIG. 1, the mapping analysis apparatus (EPMA) according to the embodiment includes a signal interpolation extraction circuit 23 a for interpolating horizontal and vertical blanking time signals of the output signal of the television camera 22, and a signal interpolation extraction circuit 23 a. A mapping unit region low-pass filter (LPF) 24 for low-pass filtering the output, an observation image of the surface of the sample 11 that has passed through the mapping unit region low-pass filter (LPF) 24, and an X-ray detector (map image detection means) 28 The image memory 25 that stores the map image obtained from the above and the movement of the sample 11 while scanning the sample 11 on the XY stage 12 by the synchronization control circuit 27 A mapping image and an optical observation image having the same field of view are formed from the output signal of the low-pass filter (LPF) 24 and the signal from the X-ray detector (map image detection means) 28 which are synchronously taken into the image memory. The image forming unit 26 and a display device 29 that displays the map image and the optical observation image formed by the image forming unit 26 are further provided.

  The EPMA having the mapping function according to the first embodiment irradiates an electron beam to a plurality of mapping unit regions arranged on the surface of the sample 11 to generate X-rays (maps) generated from each mapping unit region. Image signals) are sequentially detected to know the elements contained in the sample 11. Therefore, in order to detect X-rays (map image signals) emitted from the mapping unit regions on the surface of the sample 11, as shown in FIG. 1, the mapping analyzer according to the first embodiment An electron gun 1 that generates an electron beam and an electron lens 32 that converges the electron beam emitted from the electron gun 1 on the sample 11 are provided. Although not shown, actually, the electron beam emitted from the electron gun 2 is swung in a direction orthogonal to the axial direction, and the XY stage 12 (or the sample 11 disposed on the XY stage 12). You may provide the scanning coil which moves the irradiation position of an electron beam above. An electron optical system between the electron gun 2 and the XY stage 12 is configured by the scanning coil, the electron lens 32, and the like. For example, the electron lens 32 may be disposed between the scanning coil and the XY stage 12.

  The operation of determining the irradiation position for irradiating the sample 11 with the electron beam is performed by moving the sample 11 on the XY stage 12 while viewing the image observed by the television camera 22. The synchronization control circuit 27 incorporates stage control / stage driving means, and the stage control / stage driving means controls the XY stage 12 to scan the electron beam irradiation position on the sample 11, and further to X It controls the timing of capturing signals from the line detector (map image signal detecting means) 28 and the television camera 22 to the image memory.

  The image forming unit 26 forms a map image or an optical observation image from data in the image memory, and causes the display device 29 to display the formed map image and optical observation image. The display device 29 can include a display device that displays a map image and an optical observation image, respectively, or can be displayed side by side or superimposed on the display surface of one display device.

  The X-ray detector (map image signal detecting means) 28 detects X-rays (map image signal) emitted from the mapping unit region of the sample 11 by irradiation of the electron beam, and this detection signal (map image signal). Based on the signal, a map image such as element distribution is formed. Although not shown, in order to introduce X-rays (map image signal) having a predetermined wavelength to the X-ray detector (map image signal detecting means) 28, the sample 11 and the X-ray detector (map) are shown. Spectral means such as a spectral crystal is provided on the optical path connecting to the image signal detecting means) 28, or a signal corresponding to X-rays having a predetermined wavelength from the output of the X-ray detector (map image signal detecting means) 28. An electric circuit for extracting only the electric field may be provided.

  In the mapping analysis according to the first embodiment, the mapping unit regions arranged in a matrix on the surface of the sample 11 are two-dimensionally scanned on the XY stage 12, and X-rays ( The intensity of the map image signal) is taken into the image memory 25. For example, as illustrated in FIG. 4, the analysis range is divided into a plurality of mapping unit regions (pixels) A, B, C,..., H, I, and each mapping unit region A, B, C,. An X-ray map image is formed by using the signal intensity obtained from H and I as the brightness of the pixel. 4, in the example of FIG. 4, when the XY stage 12 moves to the left, the mapping unit region is scanned to the right with A, B, and C, and the electron beam is irradiated. Is done. Next, when the XY stage 12 moves upward and rightward, the mapping unit area in the lower row is scanned rightward with D, E, and F, and an electron beam is irradiated. Thereafter, similarly, when the XY stage 12 moves upward and moves rightward, the mapping unit area in the bottom row is scanned rightward with G, H, and I, and an electron beam is irradiated. Is done. In this way, X-ray signal intensities from the mapping unit areas A to I are acquired, and a map image is formed by these X-ray signal intensities. In FIG. 4, simultaneously with the acquisition of the X-ray signal intensity, a signal for an optical observation image is acquired by the television camera 22 attached to the imaging support means 21. That is, the signal of the optical observation image from the television camera 22 is taken into the image memory 25 through the mapping unit region low pass filter 24 corresponding to the time of the mapping unit regions (pixels) A, B, C,. Thus, the color information from each mapping unit area (pixel) A, B, C,..., H, I is obtained by scanning simultaneously in synchronization with the mapping analysis.

  As shown by the oblique broken lines in FIG. 4, the output signal of the television camera 22 has a period that does not show a correct value, such as a horizontal blanking period or a vertical blanking period. Since a correct signal cannot be obtained during the retrace time, if the output signal of the television camera 22 is directly input to the mapping unit region low-pass filter 24, the signal input to the image memory 25 may become fuzzy.

  As shown in FIG. 2, the signal interpolation extraction circuit 23a includes a horizontal scanning low-pass filter 231 having a time constant for each line of horizontal scanning, a blanking time detection circuit 233 for detecting a horizontal blanking period and a vertical blanking period, In the detected horizontal blanking period and vertical blanking period, the outputs of the horizontal scanning low-pass filter 231 and the straight line generating circuit 234 are output based on the output signals of the straight line generating circuit 234 and the retrace time detecting circuit 233 that generate straight lines for linear interpolation. A sample hold 232 is provided for changing the voltage value by holding the signal in time series. As shown in FIG. 3, during the horizontal blanking, the last value of the previous line and the first value of the next line are provided. Is linearly interpolated, and during vertical blanking, the last value of the previous screen and the first value of the next screen are linearly interpolated.

  If the time of the mapping unit area is not an integral multiple of the time of one frame of the television camera 22, the mapping unit area is switched in the middle of the frame, so that the original color information for determining each mapping unit area is determined. The signal is for a different part of the image of the television camera 22. In order to prevent an error due to this, the synchronization control circuit 27 may synchronize the movement of the XY stage 12 so that the switching of the mapping unit area occurs at the same position in the frame of the television camera 22.

  On the other hand, when the colors in the mapping unit area can be regarded as almost uniform, even if the time of the mapping unit area is shorter than the time of one frame of the television camera 22, there is not much error in the color information. High-speed mapping analysis is possible.

 As described above, the mapping analysis apparatus according to the first embodiment scans the color information of each mapping unit region with the television camera and continuously integrates the map image signals of the mapping unit region (pixels). Therefore, it does not take extra time to acquire the optical observation image. Further, as shown in FIG. 13, since the XY stage 12 does not need to be sequentially stationary (fixed) at the image acquisition positions Pc to Pi, and the movement of the XY stage 12 is simple, the synchronization control circuit 27 The driving circuit of the XY stage included in can be simplified. Furthermore, according to the mapping analysis apparatus according to the first embodiment, an optical observation image having the same field of view as the mapping observation range can be obtained without any positional deviation regardless of the field of view of the imaging support means.

(Second Embodiment)
As shown in FIG. 5, the mapping analyzer according to the second embodiment of the present invention (analyzer having a mapping function) includes a television camera 22 that images the surface of the sample 11 and an output signal of the television camera 22. A signal interpolation extraction circuit 23b that removes a portion that is not an optical signal, such as a synchronization signal, and an X-ray detector (map image) that detects an X-ray (map image signal) emitted from the sample 11 by irradiation with an electron beam. Signal detection means) 28, an image memory 25 for storing the output signals of the map image signal detection means (X-ray detector) 28 and the signal interpolation extraction circuit 23b, and the sample 11 in the XY plane parallel to the surface. The XY stage 12 to be moved at the same time, and the output signals of the map image signal detecting means (X-ray detector) 28 and the signal interpolation extracting circuit 23b in synchronism with the movement of the XY stage 12 are sent to the image memory 2. A EPMA comprising a synchronous control circuit 27 incorporated into.

  The mapping analysis apparatus according to the second embodiment further includes a mapping unit region low pass filter (LPF) 24 for low-pass filtering the output of the signal interpolation extraction circuit 23b and a synchronization control circuit 27 to the XY stage 12. An image memory that captures the output signal of the low pass filter (LPF) 24 and the map image signal obtained from the X-ray detector (map image signal detecting means) 28 in synchronization with the movement of the sample 11 while scanning. The image forming means 26 for forming the mapping image and the optical observation image having the same field of view as the mapping observation range, and the display device 29 for displaying the map image and the optical observation image formed by the image forming means 26 from Prepare. For this reason, the output of the signal interpolation extraction circuit 23 b passes through the mapping unit region low pass filter (LPF) 24 and is then taken into the image memory 25. The signal interpolation extraction circuit 23b has a function of interpolating horizontal and vertical blanking time signals of the output signal of the TV camera 22, but cuts out a portion corresponding to a part of the visual field in the output signal of the TV camera 22. You may make it have the function to take in. Furthermore, as shown in FIG. 5, the mapping analyzer according to the second embodiment includes an electron gun 1 that generates an electron beam, and an electron lens 32 that converges the electron beam emitted from the electron gun 1 onto a sample 11. Is provided.

  As shown in FIG. 6, the signal interpolation extraction circuit 23b includes a horizontal scanning low-pass filter 231 having a time constant for each line of horizontal scanning, a blanking time detection circuit 233 for detecting a horizontal blanking period and a vertical blanking period, The output signals of the horizontal scanning low-pass filter 231 and the average value generation circuit 235 are time-sequentially based on the output signals of the average value generation circuit 235 and the return time detection circuit 233 that add the outputs of the horizontal scanning low-pass filter 231 and generate an average value. And a sample hold 232 for changing the voltage value by holding it along, as shown in FIG. 7, the average value of the entire previous line during horizontal retrace and the average of the previous screen during vertical retrace Continue to output values and interpolate.

  Others are substantially the same as those of the mapping analysis apparatus according to the first embodiment, and thus redundant description is omitted. However, the mapping analysis apparatus according to the second embodiment includes a mapping unit region (pixel). At the same time as the integration of the map image signals, it is possible to continuously acquire an optical observation image by scanning the entire mapping unit area image with a television camera, so that no extra time is required for acquiring the optical observation image. It will end. In addition, since it is not necessary to stop (fix) the XY stage 12 sequentially, the driving circuit of the XY stage provided in the synchronization control circuit 27 can be simplified. Furthermore, according to the mapping analysis apparatus according to the second embodiment, an optical observation image having the same field of view as the mapping observation range can be obtained without any positional deviation regardless of the field of view of the imaging support means.

(Third embodiment)
Since the size of the mapping unit area is determined by the distance by which the XY stage 12 is moved during the data acquisition time of the mapping unit area, it is set to a different size depending on the purpose of analysis. On the other hand, the visual field of the television camera 22 is often fixed. For this reason, the visual field on the television camera 22 may be wider than the size of the mapping unit area. In this case, if all signals from the television camera 22 are input to the mapping unit region low-pass filter 24, information outside the pixel is mixed and an error occurs in the color information.

  In order to prevent this, in the mapping analysis apparatus (analysis apparatus having a mapping function) according to the third embodiment of the present invention, as shown in FIG. Only the signal of the portion corresponding to is extracted, and the data at other times may be interpolated by means similar to the mapping analyzers according to the first and second embodiments. Therefore, as shown in FIG. 9, the signal interpolation extraction circuit 23c of the mapping analysis apparatus according to the third embodiment corresponds to the mapping unit region in the signal from the television camera 22, as shown in FIG. An output signal extraction circuit 236 for extracting only a partial signal, a horizontal scanning low-pass filter 231 having a time constant for each line of horizontal scanning, a blanking time detection circuit 233 for detecting a horizontal blanking period and a vertical blanking period, In the detected horizontal blanking period and vertical blanking period, the outputs of the horizontal scanning low-pass filter 231 and the straight line generating circuit 234 are output based on the output signals of the straight line generating circuit 234 and the retrace time detecting circuit 233 that generate straight lines for linear interpolation. A sample hold 232 for changing the voltage value by holding the signal in time series is provided.

  As indicated by the broken lines in the oblique direction in FIG. 8, the output signal of the television camera 22 has a period that does not indicate a correct value, such as a horizontal blanking period or a vertical blanking period. The signal interpolation extraction circuit 23c shown in FIG. 9 linearly interpolates the last value of the extraction part of the previous line and the first value of the extraction part of the next line during the horizontal blanking, almost as in FIG. During vertical blanking, linear interpolation is performed between the last value of the extracted portion of the previous screen and the first value of the extracted portion of the next screen.

  Alternatively, as shown in FIG. 10, the signal interpolation extraction circuit 23d detects a horizontal scanning low-pass filter 231 having a time constant for each line of horizontal scanning, and a blanking time detection circuit for detecting a horizontal blanking period and a vertical blanking period. 233, the output signal of the horizontal scanning low-pass filter 231 and the average value generation circuit 235 are output by the average value generation circuit 235 that adds the outputs of the horizontal scanning low-pass filter 231 and generates an average value, and the output signal of the retrace time detection circuit 233. You may comprise so that the sample hold 232 which changes and holds a voltage value along a series may be provided. In the case of the signal interpolation extraction circuit 23d shown in FIG. 10, the average value of the entire extracted portion of the previous line is displayed during the horizontal blanking, and the extracted portion of the previous screen is displayed during the vertical blanking, as in FIG. Continue to output the average value of the whole and interpolate.

  In this case, as shown in FIG. 11, in the mapping analyzer according to the third embodiment, the XY stage 12 is scanned in the vertical direction, and the intensity of the X-ray (map image signal) is increased according to the position. It is a good configuration to be taken into the image memory 25. At this time, it is preferable to obtain an optical observation image by the television camera 22 attached to the imaging support means 21 at the same time. As shown by the arrow on the left side of FIG. 11, in the example of FIG. 11, when the XY stage 12 moves upward, the mapping unit area is scanned downward with A, D, and G, and the electron beam is irradiated. Is done. Next, when the XY stage 12 moves upward and shifts to the right, the mapping unit area of the adjacent column is scanned downward with B, E, H, and an electron beam is irradiated. . Thereafter, similarly, when the XY stage 12 moves upward and shifts to the right, the mapping unit area of the rightmost column is scanned downward with C, F, and I, and the electron beam is Irradiated. In this way, X-ray signal intensities from the mapping unit areas A to I are acquired, and a map image is formed by these X-ray signal intensities. At the same time, the imaging signal from the television camera 22 is extracted by the output signal extraction circuit 236, and the mapping unit corresponding to the time of the mapping unit areas (pixels) A, D, G, B, E, F, C, F, I The color information of the mapping unit areas (pixels) A, D, G, B, E, F, C, F, and I is extracted by taking in the image memory 25 through the area low-pass filter 24, and an optical observation image is obtained. Obtained simultaneously with mapping analysis. In this way, the signal extraction range from the television camera 22 shown in FIG. 8 can be limited only in the horizontal direction, and the signal can be used more effectively.

  Others are substantially the same as those of the mapping analyzers according to the first and second embodiments, and thus redundant description is omitted. However, the mapping analyzer according to the third embodiment includes a mapping unit region. Simultaneously with the integration of the (pixel) map image signals, the color information from each mapping unit area can be continuously acquired from the TV camera output, so that no extra time is required for acquiring the optical observation image. In addition, since it is not necessary to stop (fix) the XY stage 12 sequentially, the driving circuit of the XY stage provided in the synchronization control circuit 27 can be simplified. Furthermore, according to the mapping analysis apparatus according to the third embodiment, even when the field of view of the imaging support means is wider than the size of the mapping unit region, the optical observation image having the same field of view as the mapping observation range However, it can be obtained without positional deviation.

(Other embodiments)
As described above, the present invention has been described according to the first to third embodiments. However, it should not be understood that the description and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples, and operational techniques will be apparent to those skilled in the art.

  For example, in the mapping analyzer according to the third embodiment, as shown in FIG. 11, the XY stage 12 is scanned in the vertical direction, and the intensity of the X-ray (map image signal) is increased according to the position. Although the case where the image data is captured in the image memory 25 is illustrated, as in the mapping analyzers according to the first and second embodiments, when the XY stage 12 moves to the left, the mapping unit areas A, B, Next, the XY stage 12 moves upward and moves to the right, so that the mapping unit area in the lower row is scanned to the right, D, E, and F. Thereafter, when the XY stage 12 moves upward and moves to the right, the mapping unit area in the bottom row is scanned to the right with G, H, and I, and an electron beam is irradiated. Thus, the mapping unit area A X-ray signal intensity up to I is acquired, and color information of mapping unit areas (pixels) A, B, C,..., H, I is extracted by the output signal extraction circuit 236 and obtained in synchronization with mapping analysis. You may do it.

  Or, conversely, in the mapping analyzer according to the first and second embodiments, as shown in FIG. 11, the XY stage 12 is scanned in the vertical direction, and X-rays (maps) according to the position are scanned. The intensity of the image signal may be taken into the image memory 25.

  In the first to third embodiments, the case where the X-ray emitted from the sample 11 by the electron beam irradiation is detected as the map image signal is exemplified, but the secondary emitted from the sample 11 by the electron beam irradiation is illustrated. An electron beam or a reflected electron beam may be detected as a map image signal. Or the structure which detects the combination of the X-ray as a map image signal, a secondary electron beam, and a reflected electron beam may be sufficient. Furthermore, in order to emit a map image signal from the sample 11, the sample 11 may be irradiated with a charged particle beam other than an electron beam or an electromagnetic wave such as an X-ray.

  Furthermore, the signal processing in the first to third embodiments may be performed on an analog signal or a digital signal. When processing with a digital signal, if the output signal from the television camera 22 is an analog signal, an A / D converter for converting the analog signal into a digital signal is provided in front of the signal interpolation extraction circuits 23a, 23b, 23c, and 23d. It ’s fine.

  As described above, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

It is a block diagram explaining the outline of the mapping analyzer (EPMA) which concerns on the 1st Embodiment of this invention. It is a block diagram explaining the outline of the signal interpolation extraction circuit of the mapping analyzer which concerns on 1st Embodiment. In the mapping analysis apparatus according to the first embodiment, the last value of the previous line and the first value of the next line are linearly interpolated during horizontal blanking, and the previous screen is displayed during vertical blanking. It is a schematic diagram explaining linear interpolation of the last value and the first value of the next screen. In the mapping analyzer according to the first embodiment, the television camera acquires an optical signal simultaneously with the movement of the XY stage, and mapping unit areas (pixels) A, B, C,. It is a schematic diagram explaining obtaining the color information of the same visual field in synchronization with mapping analysis. It is a block diagram explaining the outline of the mapping analyzer (EPMA) which concerns on the 2nd Embodiment of this invention. It is a block diagram explaining the outline of the signal interpolation extraction circuit of the mapping analyzer which concerns on 2nd Embodiment. In the mapping analysis apparatus according to the second embodiment, it will be described that the average value of the entire previous line is output during horizontal blanking and the average value of the entire previous screen is continuously output during vertical blanking. It is a schematic diagram. In the mapping analyzer according to the third embodiment, when the field of view in the observation image acquisition unit is larger than the size of the mapping unit area, the signal corresponding to the mapping unit area in the signal from the TV camera It is a schematic diagram explaining extracting only. It is a block diagram explaining the outline of the signal interpolation extraction circuit of the mapping analyzer which concerns on 3rd Embodiment. It is a block diagram explaining the outline of the other example of the signal interpolation extraction circuit of the mapping analyzer which concerns on 3rd Embodiment. In the mapping analyzer according to the third embodiment, the television camera acquires an optical signal simultaneously with the movement of the XY stage, and mapping unit areas (pixels) A, D, G, B, E, F, C , F, and I are schematic diagrams for explaining that color information in the same field of view is obtained in synchronization with mapping analysis. It is a figure which shows the relationship between the irradiation area | region of an electron beam in the prior art proposed by patent document 1, and the acquisition position of an image. It is a timing diagram which shows the irradiation area | region and image acquisition timing of the electron beam in the prior art proposed in patent document 1.

Explanation of symbols

A to I: Mapping unit area Pa to Pi ... Image acquisition position 1 ... Map image 1 ... Electron gun 2 ... Electron gun 11 ... Sample 12 ... XY stage 21 ... Imaging support means 22 ... Television camera 23a, 23b, 23c, 23d ... Signal interpolation extraction circuit 24 ... Low pass filter for mapping unit area 25 ... Image memory 26 ... Image forming means 27 ... Synchronization control circuit 28 ... Signal detection means for map image (X-ray detector)
DESCRIPTION OF SYMBOLS 29 ... Display apparatus 32 ... Electronic lens 231 ... Horizontal scanning low-pass filter 232 ... Sample hold 233 ... Retrace time detection circuit 234 ... Straight line generation circuit 235 ... Average value generation circuit 236 ... Output signal extraction circuit

Claims (5)

A map image signal detecting means for detecting a map image signal emitted from a plurality of mapping unit areas arranged on the surface of the sample;
Imaging means for imaging an optical observation image of the surface of the sample;
A signal interpolation extraction circuit for removing a portion unrelated to the optical signal from the output signal of the imaging means;
An image memory for storing output signals of the map image signal detection means and the signal interpolation extraction circuit;
An XY stage that moves the sample in a direction parallel to the surface and sequentially scans the plurality of mapping unit regions arranged;
An area wider than the field of view of the image pickup means, in synchronization with the movement of the XY stage, and a synchronous control circuit for taking in the output signals of the map image signal detection means and the signal interpolation extraction circuit into an image memory A mapping analysis apparatus that acquires an optical observation image of the surface of the sample forming the image together with a map image generated from the map image signal.   The mapping analysis apparatus according to claim 1, wherein the imaging unit is a television camera.   The mapping analysis apparatus according to claim 2, wherein the signal interpolation extraction circuit further includes a function of interpolating horizontal and vertical blanking time signals of the output signal of the television camera.   The mapping analysis apparatus according to claim 2 or 3, wherein the signal interpolation extraction circuit has a function of extracting and capturing a portion corresponding to a part of the visual field in the output signal of the television camera.   5. The mapping analysis apparatus according to claim 2, further comprising a synchronization control circuit that synchronizes an operation of moving the XY stage with a frame scan of the television camera.

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