JP2010260658A - Conveyance device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a levitation conveyance device with a novel configuration which solves a problem that the prompt and high accuracy stop of a substrate by the adjustment of the friction resistance with a roller or of the gas feeding direction of a gas is very difficult. <P>SOLUTION: This levitation conveyance device includes: a first levitation conveyance device comprising a pressing conveyance unit having a levitation unit for levitating the substrate by jetting gas and a receiving conveyance unit; and a second levitation device which is disposed continuously with the first conveyance device and comprises a pressing conveyance unit having a levitating unit for levitating the substrate and a receiving conveyance unit. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

In the present invention, when a plate-like substrate is floated by jetting gas to the plate-like substrate, and the plate-like substrate is moved, stopped, stopped, lifted and turned in this state, even a heavy and large plate-like substrate is surely obtained. Furthermore, the present invention relates to a levitating and conveying apparatus that can move, stop, stand still, ascend and change direction at high speed.

Japanese Patent No. 3519675 JP 2008-195541 A JP, 2005-75496, A Conventionally, the floating conveyance device which performs plate-like substrates, such as a glass board used for a liquid crystal display etc. in a forming and processing process, and a wafer etc. in which a semiconductor device is formed by jetting air current is known. (For example, see Patent Documents 1, 2, and 3.)

In Patent Document 1, braking is performed by the transport roller, for example, by pushing and transporting the side surface of the rear end in the transport direction of the substrate by a pressing member provided on the transport roller or the endless belt. In Patent Documents 2 and 3, gas is ejected in a direction opposite to the moving direction of the substrate to capture and stop the substrate.

In response to the demand for larger screens, the levitation transfer device according to the prior art has a tendency to increase the size of the substrate, etc. There is a problem that it is extremely difficult to stop the substrate quickly and accurately by adjusting the angle.

Therefore, an object of the present invention is to provide a levitating and conveying apparatus having a novel configuration that can solve the above-described problems.

  According to the first aspect of the present invention, there is provided a levitation conveyance apparatus comprising a pressing conveyance unit having a levitation unit for ejecting a gas and levitation of a substrate, and a receiving conveyance unit.

According to the invention of claim 2, the gas is ejected and connected to the first transport device provided with the pressure transport unit having the levitation unit for levitating the substrate and the receiving transport unit, and the gas is ejected, A levitation conveyance apparatus comprising: a pressure conveyance unit having a levitation unit for levitating a substrate; and a second conveyance apparatus provided with a receiving conveyance unit.

  According to a third aspect of the present invention, the apparatus includes a pressing / conveying unit having a levitation unit for ejecting gas and floating the substrate, and a lifting / lowering device connected to the conveying device provided with the receiving / conveying unit. It is a characteristic floating transportation device.

According to the fourth aspect of the present invention, the first conveyance provided with the pressure conveyance unit having the levitation unit which is connected to one of the lifting devices and causes the gas to be blown to float the substrate, and the receiving conveyance unit. And a second conveying device provided with a receiving and conveying unit connected to the other, a pressure conveying unit having a levitation unit for ejecting gas and levitation of the substrate. It is a transport device.
According to the fifth aspect of the present invention, the inspection apparatus is provided in connection with the first conveyance apparatus provided with the pressing conveyance unit having the levitation unit for ejecting the gas and floating the substrate, and the receiving conveyance unit. This is a levitation transport apparatus characterized by the above.

According to the present invention, the gas (airflow) G is ejected (jetted), the substrate is floated, and is transported by being sandwiched between the protrusions (conveying bars) provided on the back surface of the toothed belt. Highly accurate conveyance is possible due to the meshing of the teeth, and it is supported by the protrusions (conveying bars) on the back of the toothed belt and supported by the front and back of the substrate, so it can be prevented from shifting and vibrating, so it can be conveyed at high speed. Is possible.
In particular, according to the third and fourth aspects, the same effect as described above can be exhibited, and the substrate can be transported to another level, so that the installation space can be effectively used.

It is a top view of levitation conveyance system 1 concerning a 1st embodiment of the present invention. It is a perspective view which shows the connection state of the 2nd conveying apparatus 3, the 2nd conveying apparatus 30, and the raising / lowering conveying apparatus 60 based on the 1st Embodiment of this invention. It is a perspective view which shows the connection state of the raising / lowering conveying apparatus 60 and the 2nd conveying apparatus 90 based on the 1st Embodiment of this invention. The perspective view of the 1st conveying apparatus 3 which concerns on the 2nd Embodiment of this invention is shown. It is a side view of the raising / lowering conveying apparatus 60 which concerns on this invention. It is a state figure at the time of shrinking | contraction of the raising / lowering conveying apparatus 60 which concerns on this invention. It is a state figure at the time of the raising / lowering conveying apparatus 60 which concerns on this invention extended. It is a perspective view by which the board | substrate W is conveyed in an inspection apparatus by the 3rd conveying apparatus.

FIG. 1 is a plan view of a levitation transport apparatus 1 according to the first embodiment of the present invention. The levitation transfer device 1 includes a first transfer device 3, a second transfer device 30, an elevating transfer device 60, and a third transfer device 90. The first transport device 3 includes a plurality of first levitation units 4a, 4b, 4c, 4d, and 4e (hanging over the subscripts a to e to increase the overall length step by step) and the first pressure transport. A unit 7a and a first receiving / conveying unit 7b are provided. Then, the second transport device 30 has a plurality of second levitation units 34a, 34b, 34c, 34d, 34e, 34f, 34g, and 34h (the entire length is gradually increased by applying the suffixes a to h). A second pressing / conveying unit 37, a third receiving / conveying unit 45b, and a third 'receiving / conveying unit 45b' are provided. The lifting / lowering transport device 60 has a lifting unit 82 and a plurality of third floating units 64a, 64b, 64c, 64d (in the order of subscripts a to d), and the overall length is gradually increased. If there is sufficient gas jet flow, the number may be one.) Third floating units 64, 64, fourth receiving transport unit 67b, fourth pressing transport unit 67a, and fifth pressing unit A transport unit 75a and a fifth receiving transport unit 75b are provided. The third transport device 90 includes fourth levitation units 94a, 94b to 94e (the overall length gradually increases in the order of suffixes a to e), a sixth press transport unit 97a, and a sixth receiving transport. Unit 97b is provided.

The configuration of the first transfer device 3 shown in FIGS. 1 and 2 according to the first embodiment of the present invention described above, and the first transfer device shown in FIG. 4 which is the second embodiment of the present invention. The configuration with 3 is a similar configuration. Therefore, in FIG. 1, FIG. 2, and FIG. 4, portions that perform the same function are indicated by the same name and the same reference numerals. The specific difference of the first conveying device 3 between FIGS. 1, 2 and 4 is that the lengths of the first receiving and conveying toothed belts 12c and 12c in the first receiving and conveying unit 7b are different (FIG. 4 is longer). Accordingly, the number of idle pulleys 11c on the intermediate shaft 10c is different (two in FIG. 1 and FIG. 2 and four in FIG. 4). Therefore, the first transport device 3 in the first embodiment and the first transport device 3 in the second embodiment will be described together.

2 and 4 showing a perspective view of the first transport device 3, the base 25 includes an upper frame portion 25a made up of a long member and a short member, and a lower frame made up of a long member and a short member. The portion 25b is supported by a plurality of column members 25c, 25c, and a plurality of casters 26 and a plurality of stoppers 27 are provided on the lower surface side of the lower frame portion 25b. The plurality of casters 26 can easily move the first transfer device 3, and the plurality of stoppers 27 can fix the first transfer device 3 and can be installed at a necessary installation location such as a factory. is there.

A first left side plate 24a and a first right side plate 24b are provided opposite to and parallel to the upper surface of the long member 25a of the pair of upper frame portions 25a of the base 25 ( The left and right are expressed in a state in which the first conveying device 3 is arranged in Fig. 1. Incidentally, in Figs. 2 and 4, they are the front side and the rear side in the longitudinal direction. A plurality of beam members 23a, 23b to 23m (in FIG. 4, a plurality of beam members 23a, 23b to 23e) are bridged between the first left side plate 24a and the first right side plate 24b. Moreover, the plurality of beam members 23a, 23b, to 23m are attached with screws or the like (not shown) so that fine adjustment of the position in the vertical direction is possible.

A plurality of first levitation units 4a, 4b to 4e are provided on the beam members 23a and 23b to 23m (the overall length gradually increases toward the subscripts a to e). In parallel with the first levitation units 4a to 4e, a pair of first pressure-conveying toothed belts 12a, 12a and a first receiving-conveying toothed belt 12c, 12c are provided. A first pressing and conveying unit 7a and a first receiving and conveying unit 7b are provided.

The plurality of first levitation units 4a to 4e have different actual lengths but are the same in principle, and the first levitation unit main body 5a made of a long member having a ventilation pipe connected to a compressor. A plurality of gas ejection holes (airflow ejection holes) 5b and 5b are formed on the surface of the substrate, and gas (airflow) G is ejected (injected) from the plurality of gas ejection holes (airflow ejection holes) 5b and 5b. A plurality of first levitation units 4a to 4e are arranged in order to levitate. Conventionally, various techniques have been disclosed for devices corresponding to the plurality of first levitation units 4a to 4e and the like, and these can be used.

Then, the rear end surface of the substrate W is formed by pressing and conveying protrusions (pressing and conveying bars) 12b and 12b respectively provided at predetermined positions on the back surface of the first pressing and conveying toothed belts 12a and 12a of the first pressing and conveying unit 7a. From the first receiving and conveying toothed belts 12c and 12c of the first receiving and conveying unit 7b at predetermined locations on the back surface thereof by receiving and conveying protrusions (receiving and conveying beams) 12d and 12d respectively. Receiving the front end face of the In other words, the substrate W is restrained by a force that prevents the substrate W from being displaced between the pressing and conveying protrusions (pressing and conveying bars) 12b and 12b and the receiving and conveying protrusions (receiving and conveying bars) 12d and 12d, and does not deform the substrate W. In the predetermined direction, the belts are conveyed by the first pressure-conveying toothed belts 12a and 12a and the first receiving and conveying toothed belts 12b and 12b.

The first press-conveying unit 7a includes first press-conveying toothed belts 12a, 12a having press-conveying protrusions (press-conveying crosspieces) 12b, 12b provided at predetermined positions on the rear surface, Press and convey from the end face. Referring to FIG. 1 and FIG. 4, the configuration of the first pressing and conveying unit 7a will be described in detail. The base 25 is parallel to and opposed to the upper surface of the long member of the upper frame portion 25a. In the vicinity of the front end between the first left side plate 24a and the first right side plate 24b (in the vicinity of the right end in FIGS. 2 and 4 and in the vicinity of the second transfer device 30 in FIG. 1). ), Both ends are supported by a bearing (not shown) so as to be freely rotatable, and a plurality of the first floating units 4a to 4e and a first receiving / conveying unit 7b to be described later are sandwiched therebetween. A first pressing unit that is fixedly disposed to the pulleys 9a, 9a with the first pressing conveyance driving teeth and one driving pulley 13d (not directly connected to the first pressing conveyance servo motor in FIG. 4). The conveyance drive shaft 8a and the vicinity of the corresponding rear end (the left end in FIGS. 2 and 4) In FIG. 1, both ends are supported by a bearing (not shown) that is freely rotatable at a portion separated from the second transfer device 30, and a plurality of the first levitation units 4 a to 4 e are described later. A first receiving / conveying driven shaft 10a constructed by fixing and arranging two first receiving / conveying driven toothed pulleys 11a, 11a sandwiching the first receiving / conveying unit 7b (see FIG. 1 is “front and back”, and left and right in FIGS. 2 and 4). Between these first pulleys 9a, 9a with pressing and conveying drive teeth and pulleys 11a and 11a with first receiving and conveying driven teeth, the first belts 12a and 12a with pressing and conveying teeth are wound and installed respectively. It is. A first pressing / conveying servomotor 13a is connected to one end of the first pressing / conveying drive shaft 8a.

Next, in cooperation with the first pressing / conveying unit 7a, the first receiving / conveying teeth having the first receiving / conveying protrusions (receiving / conveying bars) 12d and 12d provided at predetermined positions on the back surface of the belt are provided. A configuration of the first receiving and conveying unit 7b in which the belts 12c and 12c receive and abut on the front end surface of the substrate W will be described. Near the front end portion of the base 25 between the first left side plate 24a and the first right side plate 24b in parallel and opposite to the upper surface of the long member of the upper frame portion 25a. (In FIGS. 2 and 4, in the vicinity of the right end portion, in FIG. 1, in the vicinity of the second conveyance device 30, rather, a part of the tip of the first conveyance device 3 is a conveyance region of the second conveyance device 30. 2), both ends are supported by a bearing (not shown) in a freely rotatable manner, and two first receiving and conveying drive teeth are provided with a first floating unit 4e interposed therebetween. A pulley 9b, a pulley 9b, and a first receiving / conveying drive shaft 8b fixedly connected to a pulley 13d with a drive tooth adjacent thereto are provided. A first receiving / conveying servo motor 13b having a motor toothed pulley 13c attached to a bracket or the like (not shown) below the first receiving / conveying driving shaft 8b is disposed. A motor toothed belt 13e is wound around a pulley 13d with a motor and a pulley 13c with a motor tooth. As a result, the tension side of the first receiving / conveying belt 12c becomes the side that receives and conveys the substrate W, and the rotational force of the first receiving / conveying servomotor 13b can be accurately transmitted. (In FIG. 4, the first receiving / servo servomotor 13b is directly connected, and the motor toothed pulley 13c, the drive toothed pulley 13d, and the motor toothed belt 13e are unnecessary.)

In correspondence with the two first receiving / conveying drive toothed pulleys 9b, 9b and the first receiving / conveying driving shaft 8b fixedly connected to the driving toothed pulley 13d adjacent thereto, the central portion 1 is constructed in the vicinity (a part near the first pressing and conveying driven shaft 10a from the central part in FIGS. 1 and 2 and a part near the second conveying device 30 in FIG. 1) and is shown rotatably. The first receiving and transporting pulleys 11b and 11b with two first receiving and transporting driven teeth are fixedly mounted on both ends of the non-supported bearing and the first floating unit 4e is sandwiched between them. The driven shaft 10b is installed in the front-rear direction ("front-rear" in FIG. 1 and "left-right" in FIGS. 2 and 4). Between the first receiving and conveying drive toothed pulleys 9b and 9b and the first receiving and conveying driven toothed pulleys 11b and 11b, the first receiving and conveying toothed belts 12b and 12b are respectively wound and installed. is there.

1 and FIG. 2, the first pressing / conveying servomotor 13a is shown on the surface for easy understanding. In FIG. 4, the first pressing / conveying servomotor 13a and 1 is shown on the surface, the first receiving / servo servomotor 13b does not appear on the surface to prevent interference with the second transfer device 30 in FIGS. On the lower side (not shown), the first servo motor 13b is provided by a mounting bracket or the like (not shown) with the motor toothed pulley 13c on the motor shaft, and the belt tension can be adjusted. Can be devised. In addition, in order to reliably transport the substrate W, it is necessary to make the tension side of the belt the upper surface during the transport operation. Further, in FIGS. 1 and 2, the substrate W is reliably delivered in a state where a part of the tip of the first transfer device 3 enters the transfer region of the second transfer device 30.

Referring to FIG. 1, the operation of first transport device 3 in levitation transport device 1 is as follows. Substrate W is transported from a substrate inspection device (not shown) to a start position W <b> 1 on first transport device 3. The rotational force of the first pressing / conveying servomotor 13a connected in advance to one end of the first pressing / conveying drive shaft 8a is synchronized with the conveying speed of the first pressing / conveying toothed belt 12a, 12a. The first pressure-conveying toothed pulleys 9a, 9a that are driven to rotate by the rotation, and the first pressure-conveying toothed belts 12a, 12a, the pressure-conveying protrusions (pressure-conveying bars) 12b on the back of the belts 12a, 12a, respectively. At 12b, the substrate W is brought into contact with the rear end face of the substrate W in synchronism with each other without giving an impact, and the transfer of the substrate is started. The first receiving / conveying servomotor 13b connected to one end of the first receiving / conveying drive shaft 8b causes the first receiving / conveying toothed belts 12c, 12c of the first receiving / conveying unit 7b to be placed at predetermined positions on the back surface. Each of the receiving and conveying protrusions (receiving and conveying bars) 12d and 12d provided is received and abutted and conveyed without giving an impact while synchronously moving the front end surface of the substrate W. Immediately after the substrate W has arrived at the start position W1, at a predetermined programmed timing, the substrate W is formed by the pressing and conveying protrusions (pressing and conveying bars) 12b and 12b and the receiving protrusions (receiving and conveying bars) 12d and 12d. Is carried by being sandwiched by a force that does not deform but does not deform.

Further, in the levitation transfer apparatus 1, the substrate W is transferred from the first transfer apparatus 3 to the second transfer apparatus 30. In that case, the rotational force of the first receiving / conveying servomotor 13b is transmitted at a predetermined timing when the tip of the substrate W to be conveyed approaches the end of the conveying area of the first conveying device 3, and the first receiving The receiving and conveying protrusions (receiving and conveying bars) 12d and 12d on the back surface of the first receiving and conveying toothed belt 12c wound around the pulley 11b having the conveying driven teeth wrap around below the thickness of the substrate W, It will be in the state which does not interfere with the board | substrate W conveyed. Then, the side surfaces of the rear end portion of the substrate W are pressed against the pressing and conveying protrusions (pressing and conveying bars) 12b and 12b on the back surface of the belts 12a and 12a with the first pressing and conveying teeth from the front end of the substrate W. It is transported to the transport area of the transport device 30.

Between the first left side plate 24a and the first right side plate 24b, a first pressure conveying drive shaft 8a in which two pulleys 9a, 9a with first pressure conveying drive teeth are fixedly disposed, and 2 The first receiving and conveying driven shaft 10a, to which the first receiving and conveying driven toothed pulleys 11a and 11a are fixedly arranged, is supported at both ends by a bearing not shown in the vicinity of the front and rear ends so as to be freely rotatable. Furthermore, between the first pulley 9a, 9a with a pressure conveying drive tooth and a pulley 11a, 11a with a first receiving conveyance driven tooth, a first belt 12a with a pressure conveying tooth, respectively. As described above, 12a is wound around and installed. 1 and 2, at the intermediate portion between the first left side plate 24a and the first right side plate 24b, a first pressing / conveying drive shaft 8a and a first receiving / conveying driven shaft. Two first intermediate shafts 10c, 10c each having two toothed idle pulleys 11c, 11c, both ends of which are parallel to 10a and rotatably supported by a bearing (not shown). However, it is erected. Each of the two toothed idle pulleys 11c and 11c supports the first belt 12a and 12a with pressure conveying teeth from the lower side to prevent the belts 12a and 12a from drooping. In FIG. 4, the intermediate shaft 10c is provided with four idle pulleys 11c, 11c, 11c, and 11c each having a tooth, and not only the first pressure-conveying toothed belts 12a and 12a, The belts 12b and 12b with receiving and conveying teeth are supported from below to prevent the belts 12b and 12b from drooping.

Next, referring to FIG. 1, the second transfer device 30 is arranged so that the substrate W can be transferred in a direction perpendicular to the transfer direction of the first transfer device 3. The second transport device 30 includes a plurality of second levitation units 34a, 34b to 34h, a second pressing transport unit 37, a third receiving transport unit 45b, and a third 'receiving transport unit 45b. ′ Etc. are provided.

Similar to the first transfer device 3, the second transfer device 30 is provided with beam members 53a, 53b, to 53m attached to the upper portion of the base 55 so as to be finely adjustable in the height direction. On these beam members 53a, 53b, .about.53m, a plurality of second levitation units 34a, 34b-34h (refer to FIG. 1, five second levitation units 34a and one second levitation unit 34a. 34f is the same as the conveyance direction of the first conveyance device 3, and the other second levitation unit is a direction perpendicular to the conveyance direction of the first conveyance device 3. Subscripts a to h. And the second receiving and conveying belts 42a and 42a and the second receiving and conveying belts that form a pair between the second floating units 34a and 34b to 34h. Second pressing and conveying units each having a toothed belt 42b and 42b. And Tsu DOO 37a, a second receiving conveying unit 37b, and a third receiving transport unit 45b, but a third 'of receiving the transport unit 45b', are provided. (Referring to FIG. 1, the third receiving and conveying unit 45b and the third receiving and conveying unit 45b 'are the same as the conveying direction of the first conveying device 3, and the other second receiving and conveying units 45b' are the same. (The transport unit 37b is in a direction perpendicular to the transport direction of the first transport device 3).

The second levitation units 34a, 34b to 34h have a plurality of gas ejection holes (air flow ejection holes) 35b, 35b on the surface of the second levitation unit body 35a made of a long member, and the plurality of gas ejection holes. Any gas (airflow) G may be ejected (injected) from the (airflow injection holes) 35b and 35b to eject (inject) the gas (airflow) G and float the substrate W.

Further, referring to FIG. 1, in addition to the second receiving / conveying unit 37b, the second conveying device 30 is provided with a third receiving / conveying unit 45b and a third ′ receiving / conveying unit 45b ′. It has been described above. The third receiving / conveying unit 45b and the third 'receiving / conveying unit 45b' have the front end surface of the substrate W in the same direction as the extending direction of the receiving / conveying direction with the first receiving / conveying unit 7b. While synchronously moving, it receives and abuts without giving an impact, and performs an operation of slowing down the conveyance speed of the substrate and temporarily stopping at the position of W2.

The structures of the third receiving / conveying unit 45b and the third 'receiving / conveying unit 45b' are such that receiving / conveying protrusions (receiving / conveying bars) 50d, 50d and 50d ', 50d' provided at predetermined positions on the back surface. The third belts 50c, 50c and 50c ′, 50c ′ having the receiving and conveying teeth have a front end surface of the substrate W and come into contact therewith. Referring to FIG. 1, the third receiving and conveying unit 45b and the third receiving and conveying unit 45b 'are a pair of brackets 52, 52 parallel to the short member of the upper frame portion 55a of the base 55. 3, third receiving and conveying drive shafts 46 b and 46 b ′ supported by bearings so as to be rotatable in the direction away from the first conveying device 3 are installed. The third receiving and conveying drive toothed pulleys 47b and 47b and the driving toothed pulley 51d adjacent thereto are fixedly connected to each other at the center of the third receiving and conveying drive shaft 46b. Similarly, in the central portion of the third 'receiving and conveying drive shaft 46b', the third 'receiving drive toothed pulleys 47b' and 47b 'and the adjacent drive toothed pulley 51d' are fixedly connected. Yes. A third receiving / conveying servomotor 51b having a motor-toothed pulley 51c is provided on the motor shaft and attached to a bracket (not shown) below the third receiving / conveying drive shaft 46b. A motor toothed belt 51e is wound around the toothed pulley 51d and the motor toothed pulley 51c. As a result, the tension side of the third receiving / conveying belt 50c becomes the side that receives and conveys the substrate W, and the rotational force of the third receiving / conveying servomotor 51b can be transmitted with high accuracy. Similarly, a 3 ′ receiving / conveying servomotor 51b ′, which is attached to a bracket or the like (not shown) below the third ′ receiving / conveying drive shaft 46b ′ and has a motor toothed pulley 51c ′ on the motor shaft, is provided. A motor toothed belt 51e 'is wound around the pulley 51d' having a drive tooth and a pulley 51c 'having a motor tooth. As a result, the tension side of the third 'receiving and conveying belt 50c' becomes the side that receives and conveys the substrate W, and the rotational force of the third 'receiving and conveying servomotor 51b' can be transmitted with high accuracy.

Corresponding to these shafts (the third receiving / conveying drive shaft 46b and the third 'receiving / conveying driving shaft 46b'), the pair of brackets 52, 52 are in a direction close to the first conveying device 3. A third driven follower shaft 48b, which is rotatably supported by the bearing and has third driven driven toothed pulleys 49b, 49b and third 'driven pulleys 49b', 49b ', respectively. A third ′ receiving driven shaft 48b ′ is installed. The third receiving and conveying toothed belts 50c and 50c are respectively provided between the third receiving and driving toothed pulleys 47b and 47b and the third receiving and conveying driven toothed pulleys 49b and 49b. 3 'receiving and conveying toothed belts 50c' and 50c 'are respectively provided between the receiving pulleys 47b' and 47b 'having the receiving driving teeth and the pulleys 49b' and 49b 'having the third conveying and receiving teeth. Each is wound and installed.
Then, a third receiving and conveying driven shaft provided on the third receiving and conveying driven shaft 48b and the third 'receiving and conveying driven shaft 48b' with the second floating unit 34f and the second floating 34a interposed therebetween. Toothed pulleys 49b, 49b and third 'receiving and conveying driven pulleys 49b' and 49b ', and to the third receiving and conveying drive shaft 46b and the third' receiving and conveying drive shaft 46b '. Between the third receiving and conveying drive toothed pulleys 47b and 47b and the third 'receiving and conveying driving toothed pulleys 47b' and 47b ', the third receiving and conveying toothed belts 50c and 50c and each of the third' The belts 50c 'and 50c' with the receiving and conveying teeth are wound and installed to transmit the rotational force of the third receiving servomotor 51b and the third 'receiving and conveying servomotor 51b' (not shown). .

Referring to FIG. 1, the operations of the third receiving / conveying unit 45 b and the third ′ receiving / conveying unit 45 b ′ in the second conveying device 30 constituting the levitation conveying device 1 are as follows. When the substrate W is transported to the second transport device 30, as described above, the third receiving transport unit 45 b and the third ′ transporting unit 45 b ′ include the first pressing transport unit 7 a and the first transporting unit 45 b. In the same direction as the extension direction of the transfer direction with respect to the first transfer unit 7b, the front end surface of the substrate W is synchronously moved without receiving an impact, is contacted and transferred, and after the substrate is gradually transferred, it is primary. The operation to stop is performed. That is, the side surface of the rear end portion of the substrate W is placed on the pressing and conveying protrusions (pressing and conveying bars) 12b and 12b on the back surface of the first pressing and conveying toothed belts 12a and 12a driven by the first pressing and conveying servo motor 13a. The substrate is pressed and transferred from the tip of the substrate W while being lifted to the second levitation unit 34 a, 34 f in the transfer region of the second transfer device 30. Then, the rotational force of the third receiving / conveying servomotor 51b and the third ′ receiving / conveying servomotor 51b ′ is transmitted (the order of transmission is the pulley 51b with a motor tooth → the belt 51e with a motor tooth → the pulley 51d with a driving tooth). 3rd receiving and conveying toothed belts 50c, 50c and (the order of transmission is pulley 51b ′ with motor teeth → belt 51e ′ with motor teeth → pulley 51d ′ with driving teeth) and 3 ′ receiving and conveying teeth respectively. The moving speeds of the receiving and conveying protrusions (receiving and conveying bars) 50d and 50d and the receiving protrusions (receiving and conveying bars) 50d 'and 50d' provided respectively at predetermined positions on the back of the attached belts 50c 'and 50c' are as follows. After the substrate W is placed on the pressing and conveying protrusions (pressing and conveying bars) 12b and 12b on the back of the first pressing and conveying toothed belts 12a and 12a driven by the one pressing and conveying servo motor 13a. While the side parts are moved in synchronization with the conveyance speed by pressing, subjected to contact conveyed without impacting the front end surface of the substrate W transported. First, pressing protrusions (pressing conveying bars) 12b and 12b on the back surface of the first pressure conveying toothed belts 12a and 12a driven by the first pressing and conveying servo motor 13a, and a third receiving servo motor Each of the third receiving toothed belts 50c and 50c that transmit the rotational force of 51b is gradually driven in cooperation with the receiving and conveying protrusions (pressing and conveying bars) 50d and 50d respectively provided at the predetermined positions on the back surface of the third receiving toothed belts 50c and 50c. In addition, the pressing protrusions (press conveying bars) 12b, 12b on the back surface of the first pressure conveying toothed belts 12a, 12a driven by the first pressure conveying servo motor 13a, and the third 'receiving servo motor 51b. Cooperating with receiving and conveying protrusions (receiving and conveying bars) 50d 'and 50d' respectively provided at predetermined positions on the back surface of the third and third receiving belts 50c 'and 50c' that transmit the rotational force of , Temporarily stopping the substrate W to the position of W2 while clamping the front and rear of the substrate W. In this case, the substrate W is operated at a timing that does not deform.

Next, referring to FIG. 1 and FIG. 2, in the second transport device 30, the substrate W is transported in a direction shifted by 90 degrees with respect to the transport direction of the first transport device 3. Then, the second press-conveying drive toothed pulleys 39a, 39a that transmit the rotational force of the second press-conveying servomotors 43a, 43a connected to one ends of the second press-conveying drive shafts 38a, 38a, respectively. The belts 42a and 42a are respectively driven and wound, and are connected to one end of the second conveying and driving shafts 38a and 38a, and the second conveying and driving shafts 38a and 38a. The second receiving / conveying servomotor 43b (lower, provided with a motor-toothed pulley 43c and driving the second pressing / conveying drive shaft 38b with a motor-toothed belt 443e, a driving-toothed pulley 43d, etc.) Receiving and conveying protrusions (receiving and conveying bars) 42d and 42d provided at predetermined positions on the back surface of the second receiving and conveying toothed belts 42c and 42c of the second receiving and conveying unit 37b, respectively. Each end surface of W2 in the substrate W (left) and W2 (right) and contact support to each sandwich (see Fig. 1) to be conveyed to the left without impacting while moving synchronously.

Further, in the levitation transfer system 1, the substrate W is transferred from the second transfer device 30 to the lift transfer device 60. In that case, the left end of the substrate W to be transported enters the transport region of the lift transport device 60, and the rotational force of the transport servomotor 43b is transmitted from the second transport / conveyance unit 37b at a predetermined timing. The receiving and conveying protrusions (receiving and conveying bars) 42d and 42d on the back surface of the second receiving and conveying toothed belt 42c wound around the second receiving and conveying driven toothed pulley 41b are below the thickness of the substrate W. It will be in the state which does not interfere with the board | substrate W conveyed around. And it is taken over by the 4th receiving conveyance unit 67b (it drives by the 4th receiving conveyance servomotor 73a) mentioned later, and is conveyed to the left, without giving an impact, synchronizing movement. The right end surface of the substrate W is taken over from the second pressing / conveying unit 37a to the fourth pressing unit 67a, and the right end surface portion of the substrate W is pressed and conveyed, and the substrate W is temporarily stopped at the position of W3. At the position of W3, the substrate W is abutted and supported by the right end surface portion of the substrate W by the press transport protrusions (press transport bars) 72b and 72b on the back surface of the fourth press transport toothed belts 72a and 72a. The left end of the substrate W by receiving and conveying protrusions (receiving and conveying bars) 80d and 80d on the back surface of the fifth receiving and conveying toothed belts 80c and 80c of the receiving and conveying unit 75b (driven by the fifth receiving and conveying servomotor 81a). The surface portion is abutted and supported. From this state, the lifting unit 82 is operated at a predetermined timing to raise the substrate W to a predetermined upper position and pass it to the third transport device 90 by the fifth press transport unit 75a. The substrate W is transported from the second transport device 30 to the lift transport device 60 and also in the third transport device 90 while being kept in a floating state within a predetermined size range.

1, 2, 5, 6, and 7, the lifting and lowering conveying device 60 is configured such that the third levitation unit 64 and the fourth levitation unit 64 are arranged on the conveying base plate 88 a supported by the leg member 89 a. The lifting / lowering unit 82 that can freely move the fourth bottom plate portion 83a on which the pressing / conveying unit 67, the fourth receiving / conveying unit, and the like are moved up and down to a predetermined position, and the upper surface of the bottom plate portion 83a, Received in synchronism with the transport speed of the left end portion of the substrate W transported from the floating units 64 and 64 and the second transport device 30, and after the speed is gradually decreased, the fourth is stopped. A receiving transport unit 67b, a fourth pressing transport unit 67a that presses the right end of the substrate W in accordance with the operation of the substrate W that stops after gradually decreasing the speed, and the front side of the stopped substrate Press the end And a fifth receiving transport unit 75b. The substrate W is received from the second transport device 30 at a position below the elevating unit 82, and above the elevating unit 82. The operation of transferring the substrate W to the third transfer device 90 at the position is performed.

FIG. 5 shows a fourth bottom plate portion 83a on which the third conveying device 90 and the third floating unit 64, the fourth pressing / conveying unit 67, the fourth receiving / conveying unit, etc. without the lifting / lowering unit 82 are placed. FIG. 7 is a state diagram in which the elevating unit 82a constituting the elevating / conveying device 60 is raised upward.
A first link left 84a and a first link right 84b each having a hole of a predetermined size at both ends are pivotally supported by a first rotation center shaft 84c at the center in the longitudinal direction. The first-stage folding link and the second link left 86a and the second link right 86b each having a hole of a predetermined size at both ends are connected to the second rotation center shaft 86c at the center in the longitudinal direction. The two-stage folding links pivotally supported in such a manner that the hole at the upper end of the first link left 84a and the hole at the lower end of the second link right 86b rotate around the rotation center shaft 86e. The upper link hole of the first link right 84b and the lower link hole of the second link left 86a are pivotally supported by the rotation center shaft 86c so that the two links can be folded. It is the raising / lowering unit a which forms the link 82b. Here, using two sets of two-stage folding links 82b, the opposite ends of the transport base plate 88a and the lower ends of the first links 84a are pivotally supported on the rotation center shaft 84c. The lower end portion of the first link right 84b is pivotally supported by a pivot 84e so that the right guide groove 88b of the transport base plate 88a can slide. In the upper part, the opposite end of the bottom plate part 83a and the upper end of each second link right 86b are pivotally supported by the rotation center shaft 86f, and the upper end part of each second link left 84a is pivoted. The central portion of the linear actuator 85 using a ball screw is connected to a shaft 85c that is slidably supported by a pivot shaft 84e in a guide groove 83b on the right side of the bottom plate portion 83a, and that connects the middle of each first link right 84b. The second link 86a is pivotally supported by connecting a portion near the lower end of the second link 86a with a bracket 85f so that the arm 85e of the linear actuator 85 is pivotally supported. As a result, the substrate W can be placed on the lifting / lowering transport device 60 and can be transported to another level with a smooth operation.
FIG. 8 is a perspective view in which the substrate W is transported into the inspection apparatus 120 by the third transport apparatus 90. The third transport device 90 performs the task of transporting the substrate W to the inspection device 120 and performing the next inspection process. Since it is the same structure as the said 1st conveying apparatus 3, description is abbreviate | omitted.

The present invention is applicable to an apparatus that floats and conveys components such as a liquid crystal display (LCD), a plasma display panel (PDP), and a color filter.

DESCRIPTION OF SYMBOLS 1 Levitation conveyance system 3 1st conveyance apparatus 4 1st levitation apparatus 30 2nd conveyance apparatus 34 2nd levitation unit 60 Elevation conveyance apparatus 64 3rd levitation apparatus 82 Elevation unit 90 3rd conveyance apparatus 94 4th Levitation equipment

Claims (5)

  A levitation conveyance apparatus comprising: a pressure conveyance unit having a levitation unit for ejecting gas to levitate a substrate; and a receiving conveyance unit.   A press having a levitation unit that is connected to a first conveyance device having a levitation unit that levitates a substrate and levitates the substrate, and a receiving conveyance unit, and that blasts the substrate and levitates the substrate. A levitation conveyance device comprising a conveyance unit and a second conveyance device provided with a receiving conveyance unit. An ascending / conveying apparatus comprising: a pressing / conveying unit having a levitation unit for ejecting gas to float a substrate; and a conveying device provided with a receiving / conveying unit, and a lifting device. Concatenated to one side sandwiching the lifting device, the first conveying device provided with a pressure conveying unit having a levitation unit for jetting gas and levitation of the substrate, and a receiving conveying unit, and connected to the other, A levitation conveyance apparatus comprising: a pressure conveyance unit having a levitation unit for ejecting gas to levitate a substrate; and a second conveyance apparatus provided with a receiving conveyance unit. A levitation transport apparatus characterized in that an inspection apparatus is provided in connection with a first transport apparatus provided with a press transport unit having a levitation unit for ejecting gas and floating a substrate, and a receiving transport unit. .