JP2011204926A5 - - Google Patents

Claims (5)

Collimation sputtering with a first loading / unloading port between the sample loading chamber and the sample loading chamber and an adjacent conveying chamber and a second loading / unloading port between the sample loading chamber and the adjacent loading chamber A sputtering apparatus comprising a possible sputtering chamber,
The sputtering chamber has a sample holder for mounting a sample, a target facing the sample holder, and the sample holder and placed removable collimator between the target, the outer peripheral portion of the collimator A first collimator support for supporting
The transport chamber has a conveyance device, a second collimator support housing the collimator,
The sputtering apparatus, wherein the collimator can be moved between the first collimator support and the second collimator support by the transport device. The conveying chamber is further sputtering apparatus according to claim 1, characterized in that it comprises a shutter support for accommodating the shutter plate and the shutter plate. Claim 1 Symbol placement of a sputtering apparatus, wherein the outer peripheral portion of the collimator in contact with the first collimator support is no opening shadows. The transport device is fixed to the tip of the transport support arm, a transport shaft that can be expanded and contracted in the vertical direction, a transport rotation mechanism that can rotate 360 degrees, a transport support arm that can be expanded and contracted in the horizontal direction, and the sample or claim 2 Symbol placement of a sputtering apparatus and having a conveying holder mechanism for placing the collimator or the shutter plate.   The sputtering apparatus according to claim 4, wherein the transfer device is capable of moving the collimator or the shutter plate via the first loading / unloading port.