JP2012068032A - Tcp testing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a TCP testing device capable of accurately performing the positioning of a probe pin with a pad.SOLUTION: The TCP testing device has a camera 51 provided on a space between a pusher mechanism 3 and a probe mechanism 4, includes imaging a contact end of a probe pin and an end of a pad with the camera 51, measuring the amount of displacement between the probe pin and the pad based on the imaged data, and accurately performing the positioning of the probe pin with the pad by moving TCP based on the amount of the displacement.

Description

  The present invention relates to a TCP test apparatus for testing a TCP (Tape Carrier Package) in which electronic circuit components and wiring patterns are mounted on a tape-shaped member.

  Devices (hereinafter collectively referred to as “TCP”) in which a plurality of electronic circuit components such as IC and LSI chips and wiring patterns are mounted on a film carrier tape (hereinafter referred to as “tape”) such as a polyimide film. Widely known. This TCP performance inspection device transports a probe card consisting of a plate-like member with probe pins standing on one side (front), and a tape on which a plurality of TCPs are formed at positions facing the probe pins. And a pusher that holds a tape disposed opposite to the probe card and moves it toward the probe card. In such a TCP test apparatus, the TCP is tested by moving a pusher and bringing a TCP terminal (pad) into contact with a probe pin of a probe card.

As described above, in the TCP test, the probe pin and the TCP pad are brought into direct contact. Therefore, it is necessary to accurately align the probe pin and the pad before the test or when the tape is replaced.
For this reason, conventionally, a probe pin and a pad are imaged by a camera, and the probe pin and the pad are aligned based on the captured image (see, for example, Patent Documents 1 and 2).

International Publication WO2004 / 068154 JP 2002-181889 A

  However, in the past, since the camera was provided on the other side (rear) side of the probe pin, the contact end of the probe pin is not included in the field of view of the camera, or the contact end and the pad overlap each other. The contact end and the pad may not be imaged. As a result, it is difficult to accurately align the probe pin and the pad.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a TCP test apparatus that can accurately align probe pins and pads.

  In order to solve the above-described problems, a TCP test apparatus according to the present invention includes a probe pin protruding in a first direction, and a contact end of the probe pin opposed to the first direction in the first direction. A pusher that holds a TCP having a contact pad, a space between the probe pin and the TCP that is supported to be movable, a camera that images the probe pin and the TCP in the space, and a probe imaged by the camera Based on the image of the pin and TCP, a measuring unit that measures the amount of positional deviation between the contact end of the probe pin and the pad of the TCP, and a pusher in a second direction orthogonal to the first direction based on the amount of positional deviation The TCP pad held by the pusher is moved to the contact end by moving the pusher along the first direction toward the contact end. It is characterized in that a test unit for testing the TCP in contact.

  In the TCP test apparatus, the camera has a first field of view facing the direction of the probe pin and a second field of view facing the direction of the TCP, and the first field of view and the second field of view are a mutual method. The lines may be located on the same straight line along the first direction.

  According to the present invention, by providing a camera in the space between the probe pin and the TCP, it is possible to image the contact end of the probe pin and the end of the pad. By measuring the amount of positional deviation from the pad and moving the TCP based on this amount of positional deviation, the probe pin and the pad can be accurately aligned.

FIG. 1 is a front view showing a configuration of a TCP test apparatus according to an embodiment of the present invention. FIG. 2 is an enlarged perspective view showing a part of the TCP test apparatus. FIG. 3 is a block diagram showing the configuration of the control device in the TCP test apparatus. FIG. 4 is a flowchart showing a test operation by the TCP test apparatus according to the embodiment of the present invention. FIG. 5 is a schematic diagram for explaining the positional relationship between the probe card and the tape.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<Configuration of TCP test equipment>
As shown in FIGS. 1 and 2, the TCP test apparatus 1 according to the present embodiment includes a TCP handler 2 that transports a tape T on which TCP is mounted along a predetermined path, and the predetermined path. A pusher mechanism 3 which is provided at a position and holds the conveyed tape and pushes it in a predetermined direction, and a probe pin which is disposed opposite to the pusher mechanism 3 in the Z direction and protrudes toward the pusher mechanism 3. The probe mechanism 4, a camera mechanism 5 that supports a camera 51 having two fields of view so as to be movable between the pusher mechanism 3 and the probe pin 4, a measurement unit camera 6, and components of these TCP test apparatuses 1 It is comprised from the control apparatus 7 which controls operation | movement. For convenience, the vertical direction is the “X direction”, the direction connecting the pusher mechanism 3 and the probe mechanism 4 is the “Z direction”, and the direction perpendicular to the X direction and the Z direction (the direction perpendicular to the plane of FIG. 1). Is “Y direction”.

  The TCP handler 2 includes an unwinding reel 21 on which the tape T before the test is wound, and a winding reel 22 on which the tape T unwound from the unwinding reel 21 and tested. Yes. Between the unwinding reel 21 and the take-up reel 22, a first feeding unit 23 that feeds the tape T unwound from the unwinding reel 21 toward the pusher mechanism 3, and the first sending unit 23. The first sprocket 24 and the first sprocket guide 25 that send the tape T that has been sent toward the pusher mechanism 3 in a state where a predetermined tension is applied vertically downward (X direction), and the tape T that has passed through the pusher mechanism 3 A second sprocket 26 and a second sprocket guide 27 that are led out toward the take-up reel 22, and a second sending section 28 that feeds the tape T led out therefrom toward the take-up reel 22 are provided.

  The pusher mechanism 3 functions as a moving mechanism. The pusher mechanism 3 includes a pusher stage 31 supported so as to be movable around the X direction, the Y direction, the Z direction, and the Z axis (θ direction), and a probe card 42 that is attached to the pusher stage 31 and is opposed to a probe card 42 described later. The pusher plate 32 with which the tape T is in sliding contact with the surface and the TCP on the tape T, which is provided at both ends along the X direction of the pusher plate 32 and performs the test by holding the tape T, are on the pusher plate 32. And a tape clamper 33 to be disposed.

  The probe mechanism 4 is disposed at a predetermined distance from the pusher mechanism 3 in the Z direction, and has a base 41 provided with an opening at the center, and a probe provided at the opening of the base 41 and disposed opposite to the pusher plate 32. Card 42. The probe card 42 is provided with a probe pin protruding to the pusher mechanism 3 side. This probe pin is electrically connected to the control device 7.

  The camera mechanism 5 includes a camera 51 having two fields of view, and a moving unit 52 that supports the camera 51 so as to be movable in at least the X direction, the Y direction, and the Z direction in a space between the pusher mechanism 3 and the probe mechanism 4. And.

  Here, the camera 51 includes two solid-state imaging devices such as a CCD (Charge Coupled Device) and a CMOS (Complementary Metal Oxide Semiconductor), and captures two different fields of view by capturing images from the respective solid-state imaging devices. Consists of possible digital cameras. In the present embodiment, the two fields of view of the camera 51 are set on both the positive and negative sides in the Z direction. That is, one field of view is set to include the pusher mechanism 3 and the other field of view includes the probe mechanism 4. As a result, the camera 51 can image both the pusher mechanism 3 and the probe mechanism 4. The two visual fields are set so that their normal lines are located on the same straight line along the Z-axis direction. As a result, the two fields of view project positions that are opposite to each other at the same height (X direction).

  The camera 51 is not limited to a digital camera provided with two solid-state image sensors, and various digital cameras can be used as long as they have two fields of view. For example, a digital camera having two fields of view composed of one solid-state image sensor, a prism provided on the optical axis of the solid-state image sensor, a shutter for switching the field of view, and the like may be applied.

  The measuring unit camera 6 is composed of a known digital camera including a solid-state image sensor such as a CCD or a CMOS. Such a measurement unit camera 6 is disposed on the opposite side of the probe mechanism 4 from the side facing the pusher mechanism 3 in the Z direction, the imaging direction is along the Z-axis direction, and the probe card 42 is substantially at the center. And it is set so that it may be located on the same straight line as TCP hold | maintained on the pusher plate 32. FIG. Thereby, the measurement unit camera 6 can capture an image of TCP through an opening 425 (described later) formed at the center of the probe card 42.

  The control device 7 includes an input unit 71 that detects user operation input, a drive unit 72 that controls driving of the pusher mechanism 3, the camera mechanism 5, and the measurement unit camera 6, and various types of operations related to the operation of the TCP test apparatus 1. A storage unit 73 that stores information, an image processing unit 74 that performs image processing on the image data of the camera 51 and the measurement unit camera 6, a test unit 75 that performs a TCP test using a tester (not shown), and a TCP test And a main control unit 76 that controls the operation of the entire apparatus 1. Here, the tester is attached to the probe mechanism 4 and is electrically connected to the probe pin and measures the electrical characteristics of the TCP. Such a measurement result is sent to the control device 7.

  Such a control device 7 includes an arithmetic device such as a CPU, a storage device such as a memory and an HDD (Hard Disc Drive), and an input that detects input of information from the outside such as a keyboard, a mouse, a pointing device, a button, and a touch panel. An I / F device that transmits and receives various information via a communication line such as the Internet, a LAN (Local Area Network), a WAN (Wide Area Network), etc., and an LCD (Liquid Crystal Display) or FED (Field Emission Display) The computer includes a display device such as a computer and a program installed in the computer. That is, the hardware device and software cooperate to control the above hardware resources by a program, and the above-described input unit 71, drive unit 72, storage unit 73, and main control unit 76 are realized. Note that the program may be provided in a state of being recorded on a recording medium such as a flexible disk, a CD-ROM, a DVD-ROM, or an IC memory.

<Test operation by TCP test equipment>
Next, a TCP test operation by the TCP test apparatus 1 will be described with reference to FIG. In the following, a case where a new TCP is tested will be described as an example. However, as will be described later, the case where the probe card 42 and the unwinding reel 21 are replaced can be tested by the same procedure.

  First, the position information of the TCP mounted on the tape T (hereinafter referred to as “TCP position information”) and the position information of the probe card 42 that inspects the TCP (hereinafter referred to as “probe position information”) by the input unit 71. .) Is input from the user, the information is stored in the storage unit 73 (step S1). Here, the TCP position information includes the position of the alignment mark on the TCP (coordinates on the XY plane), the position of the pad provided on the TCP (coordinates on the XY plane), and the like. The probe position information includes the position of the probe pin on the probe card 42 (coordinate on the XY plane), the probe tip position (coordinate on the XY plane) for alignment (hereinafter referred to as “alignment position”). .), The tip height of the probe pin (coordinates in the Z direction), and the like. In the following, as shown in FIG. 5, a case will be described in which the probe pins provided at the four corners among the plurality of probe pins are the first to fourth alignment positions 421 to 424.

  Further, in a state where the tape T is held by the tape clamper 33 by the driving unit 72, the pusher stage 31 is moved so that the pusher plate 32 is opposed to the probe card 42 while being separated by a predetermined distance. Further, the drive unit 72 moves the camera 51 between the pusher plate 32 and the probe card 42 (step S2).

  When the TCP position information and the probe information are input, the probe 51 located at the first to fourth alignment positions 421 to 424 is measured by the camera 51 (step S3). The probe tip needle height means the distance on the surface of the probe card 42 in the Z direction. As the measurement, first, only the signal from the solid-state imaging device facing the probe mechanism 4 side is taken in, so that the field of view of the camera 51 is made only to the probe mechanism 4 side. It is moved to a position facing the alignment position 421. Subsequently, the needle tip height of the probe pin is measured by adjusting the focus of the camera 51 to the needle tip of the probe pin located at the first alignment position 421. The needle tip height of the probe pin at the second to fourth alignment positions 421 to 424 is measured by the same method. The measured needle tip height is compared with the needle tip height stored in the storage unit 73 in step 2, and if it is different, the detected needle tip height is stored in the storage unit 73.

  When the needle tip height is measured, the camera 51 measures the needle tip position of the probe pin located at the first to fourth alignment positions 421 to 424 (step S4). This needle tip position is a coordinate (coordinate on the XY plane) on the plane of the probe card 42 on the pusher mechanism 3 side. As the measurement, first, the image processing unit 74 sets the field of view of the camera 51 only to the probe mechanism 4 side, and then moves the camera 51 to a position facing the first alignment position 421 by the driving unit 72. After confirming the needle tip height of the probe pin located at the first alignment position 421, the probe tip needle tip position corresponding to the needle tip height is measured based on the imaging data. By the same method, the image processing unit 74 measures the probe tip position of the probe pin at the second to fourth alignment positions 421 to 424. The measured needle tip height is compared with the needle tip position (alignment position) stored in the storage unit 73 in step 2, and if different, the measured needle tip position is stored in the storage unit 73.

  When the needle tip height is measured, the image processor 74 measures the displacement amount of the position of the TCP pad corresponding to the first to fourth alignment positions 421 to 424 detected in step S4 (step S5). Specifically, first, the image processing unit 74 captures only the signal from the solid-state imaging device facing the pusher mechanism 3 side, thereby setting the field of view of the camera 51 to the pusher mechanism 3 side, that is, the TCP side. Subsequently, the image processing unit 74 confirms the approximate position of the pad on the TCP based on the TCP alignment mark included in the field of view, and the driving unit 72 moves the camera 51 to a position facing the first alignment position 421. Move. When the camera 51 is moved, the image processing unit 74 switches the field of view of the camera 51 to the probe card 42 side by taking in only the signal from the solid-state imaging device facing the probe mechanism 4 side, and is positioned at the first alignment position 421. The probe tip position of the probe pin to be detected is detected and stored in the storage unit 73. Then, the image processing unit 74 switches the field of view of the camera 51 to the TCP side again, and performs image processing such as edge extraction on the TCP pad facing the first alignment position 421 in the Z direction, thereby performing the pad position (XY). Coordinates on the plane) are detected and stored in the storage unit 73. When the position of the pad is detected, the amount of deviation between the pad position and the needle tip position is measured by comparing the position of this pad with the previously detected needle tip position. The amount of deviation is the distance between the pad and the tip position on the XY plane, more specifically, the position on the pad where the probe pin is contacted (hereinafter referred to as “contact position”) and the tip position. The contact position is arbitrarily set based on the edge of the pad. By the same method, the image processing unit 74 measures a deviation amount between the probe tip needle position and the pad position at the second to fourth alignment positions 421 to 424. The measured deviation amount is stored in the storage unit 73. As described above, the measurement of the pad position deviation amount is performed only by switching the field of view without moving the camera 51, so that it is possible to prevent the movement error of the camera 51 from being included in the measurement result.

  When the deviation amount is measured, the main control unit 76 performs probe needle alignment (step S6). Specifically, after the camera 51 is retracted from the position sandwiched between the pusher mechanism 3 and the probe mechanism 4 by the drive unit 72 and moved to a position where they do not interfere with the Z-axis direction, the pusher plate 32 is moved to the pad. It is moved to the position immediately before contact with the probe card and moved to the probe card 42 side in an arbitrary set value unit to check whether the pad has contacted the probe pin. Whether or not this contact has occurred is confirmed based on a signal from a tester (not shown) connected to the probe mechanism 4. Further, the position of the probe card 42 in the X and Y directions is set based on the deviation amount measured as described above. That is, the probe pins at the first to fourth alignment positions 421 to 424 are aligned so as to come into contact with the contact positions of the pads arranged to face each other. In this state, the pusher plate 32 is moved in the Z direction in units of an arbitrary set value, and the ratio of the probe pins included in the probe card 42 that touch the pad of the TCP held by the pusher plate 32 The position of the pusher plate 32 that has reached the arbitrary set ratio is set as the contact height. The set contact height is stored in the storage unit 73.

  When the contact height is set, the image processing unit 74 confirms the optimum contact position (step S7). The optimum contact position means, for example, a position at an equal interval from each side of the pad and a position where each probe pin contacts with a margin from the pad edge. For example, in a state where the pusher plate 32 is moved to the contact height, the image processing unit 74 moves the pusher plate 32 in the X and Y directions in arbitrary set value units, and the position where the probe pin is not in contact with the pad. The optimal contact position is obtained by confirming. When the optimum contact position is acquired, the pusher driving unit 4 moves the pusher plate 32 to the optimum contact position.

  When the pusher plate 32 is moved to the optimum contact position, the image processing unit 74 causes the measurement unit camera 6 to capture the TCP alignment mark on the pusher plate 32 and confirms the position of the alignment mark (step S8). As shown in FIG. 5, an opening 425 is formed in a substantially central portion of the probe card 42. The measurement unit camera 6 images the TCP exposed from the opening 425. The position of the alignment mark is stored in the storage unit 73. Thereby, the optimum contact position can be derived based on the position of the alignment mark stored in the storage unit 73.

  When the alignment mark at the optimum contact position is stored, the test unit 75 performs a test of the TCP mounted on the tape T wound around the unwinding reel 21 (step S9). Specifically, the tape wound around the unwinding reel 21 is sequentially sent out to the pusher plate 32, and the tape clamper 33 holds the tape for each TCP. In this held state, the TCP alignment mark is imaged by the measurement unit camera 6, the amount of deviation between the position of this alignment mark and the position of the alignment mark measured in step S8 is calculated, and the pusher is based on this amount of deviation. The plate 32 is moved in the X and Y directions. As a result, the pusher plate 32 is disposed at the optimum contact position. Subsequently, the pusher plate 32 is moved to the contact height in the Z direction, and the TCP pad on the pusher plate 32 is brought into contact with the probe pins of the probe card 42. This probe pin is electrically connected to the control device 7 via a tester (not shown). Thereby, the test part 75 confirms whether there exists abnormality in the TCP by exchanging an electrical signal with TCP via a probe pin. When the confirmation is completed, the pusher plate 32 is separated from the probe card 42, the tape T held by the tape clamper 33 is released, and the tape T on which the TCP arranged on the pusher plate 32 is mounted is taken up by the take-up reel 22. To the side. Such a series of test operations is performed until the tape T wound around the unwinding reel 21 is exhausted.

  As described above, according to the present embodiment, by providing the camera 51 in the space between the pusher mechanism 3 and the probe mechanism 4, the contact end of the probe pin and the end of the pad can be imaged. Therefore, the positional deviation between the probe pin and the pad is measured based on these imaging data, and the TCP is moved based on the positional deviation, thereby accurately aligning the probe pin and the pad. it can.

  Although the case of testing a new TCP has been described with reference to FIG. 3, it goes without saying that the test can be performed by the same method as described above even when the probe card 42 or the unwinding reel 21 is replaced. Specifically, when the probe card 42 is exchanged, the TCP position information and the probe position information that have already been stored may be read from the storage unit 73 and then the processes of steps S3 to S9 may be performed. When the unwinding reel 21 is replaced, the processing of steps S5 to S9 may be performed after reading the needle tip height and the needle tip position of the probe pin from the storage unit 73.

  In the present embodiment, the case where the camera 51 has two fields of view has been described as an example. However, if the camera 51 can be disposed in the space between the probe pin and the TCP, a camera with one field of view is used. Needless to say, it can be applied. In this case, for example, the camera is provided with a moving mechanism that allows the field of view to move around the X axis so that both positive and negative sides in the Z-axis direction can be imaged. Can be realized.

  The present invention can be applied to various devices that perform tests by bringing two members arranged opposite to each other into contact with each other.

  DESCRIPTION OF SYMBOLS 1 ... TCP test apparatus, 2 ... TCP handler, 3 ... Pusher mechanism, 4 ... Probe mechanism, 5 ... Camera mechanism, 6 ... Measuring part camera, 7 ... Control apparatus, 21 ... Unwinding reel, 22 ... Take-up reel, 23 ... 1st delivery part, 24 ... 1st sprocket, 25 ... 1st sprocket guide, 26 ... 2nd sprocket, 27 ... 2nd sprocket guide, 28 ... 2nd delivery part, 31 ... Pusher stage, 32 ... pusher plate, 33 DESCRIPTION OF SYMBOLS ... Tape clamper, 41 ... Base, 42 ... Probe card, 51 ... Camera, 52 ... Moving part, 71 ... Input part, 72 ... Drive part, 73 ... Memory | storage part, 74 ... Image processing part, 75 ... Test part, 76 ... Main control part, 421-424 ... 1st-4th alignment position, 425 ... opening part.

Claims (2)

A probe pin protruding in a first direction;
A pusher that holds a TCP provided with a pad that is disposed opposite to the contact end of the probe pin in the first direction and that contacts the contact end;
A camera that is movably supported in a space between the probe pin and the TCP, and that images the probe pin and the TCP in the space;
Based on the image of the probe pin and the TCP imaged by the camera, a measurement unit that measures the amount of positional deviation between the contact end of the probe pin and the TCP pad;
The pusher is moved in a second direction orthogonal to the first direction based on the displacement amount, and the pusher is moved toward the contact end along the first direction. And a test section for testing the TCP by bringing the pad of the TCP held in contact with the contact end. The camera has a first field of view facing the probe pin and a second field of view facing the TCP;
2. The TCP test apparatus according to claim 1, wherein the first visual field and the second visual field are positioned on the same straight line along the first direction.